MNE 15 (2022) 100128 Contents lists available at ScienceDirect Micro and Nano Engineering journal homepage: www.sciencedirect.com/journal/micro-and-nano-engineering Down-shifting and antireflective effects of ZnO/PMMA thin films and their influence on silicon solar cells performance Alvaro Flores-Pacheco a, b, *, José Raúl Montes-Bojórquez b, Mario Enrique Álvarez-Ramos a, Arturo A. Ayón b a b Posgrado en Nanotecnología, Departamento de Física, Universidad de Sonora, C.P. 83000 Hermosillo, Sonora, Mexico MEMS Research Lab, Department of Physics and Astronomy, University of Texas at San Antonio, San Antonio, TX 78249, USA A R T I C L E I N F O A B S T R A C T Keywords: Quantum dots Down-shifting Antireflective layers Solar cells The down-shifting effect of nanostructured II-VI semiconductors like zinc oxide (ZnO) is an attractive feature that can be exploited for the performance enhancement of silicon solar cells. The UV-region of the solar spectrum can be harvested more efficiently by the silicon solar cell after being absorbed by ZnO quantum dots (QDs) and reemitted in the visible range (centered ⁓510 nm). Additionally, the polymeric matrix (PMMA) used for the fabrication of the ZnO/PMMA thin films can serve as an antireflective layer, enabling a better overall solar radiation absorption. The present study discusses the synthesis and characterization of photoluminescent ZnO QDs and their effect on the performance of in-house-fabricated single crystal silicon solar cells. The down-shifting effect of the colloidal quantum dots was characterized by collecting and analyzing their absorption and pho­ toluminescence spectra. The structural characterization of the obtained ZnO QDs was performed employing Xray diffraction (XRD) and transmission electronic microscopy (TEM). Before the deployment of the ZnO QDs thin film layers, the optimal thickness of the PMMA matrix was evaluated by ellipsometry seeking the optimal antireflective effect. The performance characteristics of the solar cells before and after the application of the ZnO/PMMA layers were determined from the J-V curves generated in a solar simulator and their spectral response was evaluated by external quantum efficiency (EQE) measurements achieving a maximum relative PCE increase above 19%. 1. Introduction Single junction solar cells fabricated from single-crystal silicon are still the preferred market choice due their relatively high efficiency, mature processing techniques and the wide availability of silicon on the Earth's crust. These are some of the reasons underlying the continuous interest and development of silicon-based photovoltaics [1,2]. However, it is still considered critical to enhance their performance to promote their widespread utilization. When studying the losses associated with the radiation spectrum, it is important to mention that in addition to the transparency to wavelengths longer to 1100 nm there are other impor­ tant losses above the band gap energy. The excess energy of incoming photons from the solar irradiation with energy above the band gap is lost by the emission of phonons by the lattice in a process known as ther­ malization [3]. In addition to the excess energy lost by thermalization, only a small fraction of UV-light range is converted in electron-hole pairs due the low penetration depth for radiation within the 300–400 nm wavelength range in silicon. A viable approach to enhance the energy harvesting in the UV region has been the use of spectral-converting materials like down-shifting quantum dots (QDs). These semi­ conductor nanocrystals exhibit three-dimensional quantum confine­ ment, having discrete and size-dependent energetic states for electrons, holes and excitons. Additionally, the surface to volume ratio is increased, enhancing their photoelectronic properties. Semiconductor quantum dots (QDs) absorb high-energy photons and re-emit them at wavelengths more suitable for absorption by a silicon solar cell [4]. Particularly, ZnO is a II-VI wide direct-bandgap semiconductor (3.37 eV) [5] with multiple optoelectronic applications ranging from blue lasers to solar cells [6,7]. Even though bulk ZnO exhibit excitonic radiative transitions in the UV-range due to a strong exciton binding energy (60 meV) [8], the defect-related emissions in the visible range found on ZnO nanocrystals [9,10] are better suited to be absorbed by crystalline sili­ con. To efficiently utilize the downshifting characteristics of ZnO nanocrystals, a high optical absorption is needed, however, recent * Corresponding author at: Posgrado en Nanotecnología, Departamento de Física, Universidad de Sonora, C.P. 83000 Hermosillo, Sonora, Mexico. E-mail address: a215290120@correoa.uson.mx (A. Flores-Pacheco). https://doi.org/10.1016/j.mne.2022.100128 Received 21 January 2021; Received in revised form 15 December 2021; Accepted 19 March 2022 Available online 21 March 2022 2590-0072/© 2022 The Authors. Published by Elsevier B.V. This is an open access article under the CC BY-NC-ND license (http://creativecommons.org/licenses/bync-nd/4.0/). A. Flores-Pacheco et al. Micro and Nano Engineering 15 (2022) 100128 Fig. 1. a) Absorption and photoluminescent (PL) spectra of ZnO QDs. b) Band gap calculation of the ZnO QDs colloidal solution using Tauc's graphical method. Fig. 2. a) Deconvolution of the defect-related PL emissions of ZnO QDs under UV illumination (λexc = 335 nm). b) Schematic diagram showing the radiative transitions found in the ZnO QDs. efforts in the incorporation of ZnO QDs in commercial silicon solar cells have resulted in low power conversion efficiency (PCE) enhancements, as the deposit of downshifting material layers damaged the original antireflective properties of the cell [11]. To overcome this limitation, we propose the utilization of ZnO/PMMA thin films as both, antireflective coating, and luminescent downshifting material. In the present work, the antireflective effect of PMMA layers of different thicknesses was evaluated on c-Si substrates by ellipsometry. After a suitable PMMA layer thickness was found, down-shifting ZnO quantum dots (QDs) were embedded in the polymeric matrix and deployed to the surface of fabricated c-Si solar cells. Finally, the influ­ ence of the ZnO/PMMA thin films on the power conversion efficiency (PCE) was characterized. dropwise under constant stirring until a pH value of 12 was achieved. The Zn2+ ions available after the hydrolysis of zinc acetate react with the OH− ions present in a basic chemical environment forming Zn(OH)2 [13]. Zn(CH3 COO)2 + (OH)− →HO − Zn − CH3 COO− + CH3 COO− (1) HO − ZnCH3 COO + (OH)− →Zn(OH)2 + CH3 COO− (2) Zn2+ + 2OH− →Zn(OH)2 (3) The precursor solution was placed on an ultrasonic bath for 3 h. This procedure allows the dehydration of Zn(OH)2 to produce ZnO due to the microthermal heating generated by cavitational hot spots promoted by the sonication energy [14]. 2. Experimental Zn(OH)2 →ZnO + H2 O (4) Afterward, a non-solvent (hexane) was added to the ZnO QDs solu­ tion in a volume ratio of 3:1 and allowed to stand for 24 h to allow the ZnO nanoparticles to precipitate. Subsequently, the supernatant was removed and the precipitated ZnO QDs were washed three times in ethanol to remove any unreacted products and dispersed also in ethanol for storage. 2.1. Synthesis of zinc oxide quantum dots The ZnO QDs colloidal solution was synthesized employing a controlled-precipitation method [12]. Starting with a 0.02 M solution of Zinc Acetate, the pH value is adjusted adding a 0.1 M LiOH solution 2 A. Flores-Pacheco et al. Micro and Nano Engineering 15 (2022) 100128 Fig. 3. a) Deconvolution of the X-ray diffraction pattern of ZnO QDs powders with crystallographic planes indicating wurtzite structure. b) HRTEM micrograph of ZnO QDs. The inset shows the size distribution histogram of the obtained nanoparticles. r.p.m. (60 s) and ending at 300 r.p.m. (10 s). The phosphorous (SOD) solution was spin-cast on the opposite side of the live sample using the previously mentioned parameters. Then, the sacrificial and live samples were heated at 130 ◦ C for 10 min to remove the organic solvents. Sub­ sequently, the live c-Si sample was placed in a furnace with the pristine side facing the surface of the sacrificial sample with the p-type film, both samples were separated by small pieces of clean silicon wafers. The samples were then annealed at 1000 ◦ C for 10 min to diffuse the dopants, creating the p–n junction in the front of the solar cell and the n− back surface field (BSF) in the back of the device. The heavily doped layer formed due to the high annealing temperature was removed by immersing the samples in a dilute HF aqueous solution (50:1 in volume) for 120 s. The electric contacts of the device were created by thermal evaporation using a VEECO thermal evaporator. 200 nm of aluminum were deposited on each side of the device, a shadow mask was used on the window side to produce a pattern of finger electrodes, while a blanket deposition was performed on the backside. Finally, the samples were annealed at 580 ◦ C for 10 min to reach the eutectic point of the Al–Si system [17] and promote the formation of an ohmic Al–Si contact. Table 1 ZnO QDs size calculations from X-ray diffraction peaks. 2θ (degrees) (hkl) β (radians) D (nm) 31.4616 34.3528 36.1973 47.5237 56.5555 62.7230 (100) (002) (101) (102) (110) (013) 0.03518 0.02944 0.03426 0.03633 0.03716 0.03478 4.10 4.93 4.26 4.17 4.23 4.67 2.2. Fabrication of single-crystal silicon solar cells and ZnO QDs application Single-crystal silicon solar cells were fabricated employing n-type, 〈100〉 silicon wafers. All the samples were cleaned using the standard 3step RCA cleaning process [15]. Boron and phosphorous spin-on dopant (SOD) solutions were prepared by the sol-gel method [16]. The boron (SOD) solution was spin-cast on the polished side of a sacrificial p-type, 〈111〉 silicon sample at 300 r.p.m. (10 s) ramping to a final speed of 1000 Fig. 4. a) Reflectance from the surface of single-crystal silicon samples with PMMA thin films spin-cast at various speeds compared with a reference bare silicon sample. b) Reflectance from the surface of PMMA-only and 0.5 mg/ml ZnO/PMMA thin films deposited at 1000 R.P.M (ZnO QDs absorption spectrum included as reference). 3 A. Flores-Pacheco et al. Micro and Nano Engineering 15 (2022) 100128 Fig. 5. a) AM1.5G irradiance spectrum. b) Power reflected from the AM1.5G illumination source incident on the surface of single-crystal silicon samples with PMMA thin films spin-cast at various speeds and a reference bare silicon sample. c) Power reflected from the AM1.5G illumination source incident on the surface of PMMA-only and 0.5 mg/ml ZnO/PMMA thin films deposited at 1000 R.P.M. Table 2 Weighted reflectance and total power reflected of single-crystal silicon samples with PMMA thin films spin-cast at various speeds. PMMA thickness (nm) Weighted reflectance (%) Total power reflected (W/m2) 0 (Bare silicon) 75 80 83 85 88 93 18.18 7.75 7.11 7.13 6.64 6.97 6.21 146.46 63.24 57.31 57.45 53.5 56.13 50.06 Table 3 Weighted reflectance and total power reflected of single-crystal silicon samples with PMMA-only and 0.5 mg/ml ZnO/PMMA thin films deposited at 1000 R.P. M. ZnO concentration (mg/ ml) Weighted Reflectance (%) Total power reflected (W/ m2) 0 (Pure PMMA) 0.5 6.21 6.09 50.06 49.09 The ZnO QDs storage solutions were dried for 2 h at 50 ◦ C to obtain a solid precipitate that was crushed and grinded into fine powders employing a mortar. The ZnO QDs powders were dispersed in a polymer matrix. Polymethylmethacrylate (PMMA) was selected due to its high transparency to wavelengths in the UV–visible range [18], high weather and UV resistance and excellent thermal insulation. Solutions with tar­ geted ZnO QDs powder concentrations of 0.5, 0.25 and 0.125 mg/ml were prepared and spin-cast on the window side of the fabricated solar cells. Three solar cell sets conformed each by three solar cells were fabricated and characterized before and after the application of ZnO/ PMMA layers. 2.3. Characterization The absorption spectrum of the colloidal ZnO QDs solution was ob­ tained with an Ocean Optics Flame UV-VIS spectrometer. The photo­ luminescent emission of the ZnO QDs colloidal solution was characterized at room temperature using the fluorescence mode of the same spectrometer connected by an optical fiber to a Newport Oriel 74,100 Cornerstone 1/4 m UV-VIS monochromator illuminated by a 250-W Xenon lamp, a 335 nm wavelength was selected for excitation of the sample (λexc). The X-ray diffraction pattern was obtained on a Rigaku Ultima IV diffractometer operating at 40 keV and the HRTEM micro­ graphs were obtained on a JEOL JEM-2010F field emission transmission electron microscope (TEM) operating at 200 kV. The reflectance spectra and thickness of the finished solar cells were obtained in a J.A. Woollam spectroscopic ellipsometer VB-400 VASE. The current density-voltage (J–V) performance curves of the solar cells before and after the appli­ cation of the ZnO QD layers was characterized using an Oriel Sol2A solar simulator under AM1.5G illumination at standard testing conditions, i. e., 1000 W/m2 at room temperature. The external quantum efficiency (EQE) characterization was performed with a Newport External Quan­ tum Efficiency Measurement System to study the spectral response of the fabricated solar cells before and after the application of the ZnO QDs layers. 3. Results and discussion Fig. 1a shows the normalized absorption and emission spectra of the ZnO QDs. The absorption intensity of the ZnO QDs quickly increases in wavelengths below 350 nm with a maximum value around 320 nm. The photoluminescence (PL) maximum of the ZnO QDs is centered at 510 nm. The large Stokes-shift of the ZnO QDs (~160 nm) largely decreases 4 A. Flores-Pacheco et al. 5 Micro and Nano Engineering 15 (2022) 100128 Fig. 6. J-V characteristics for c-Si solar cells before (continuous lines) and after (dashed lines) application of ZnO/PMMA layers from solutions with three different ZnO QDs powders concentrations: a) 0.125 mg/ml, b) 0.25 mg/ml and c) 0.5 mg/ml. d) J-V characteristics for c-Si collar cells before (continuous lines) and after (dashed lines) application of PMMA-only layers. A. Flores-Pacheco et al. Micro and Nano Engineering 15 (2022) 100128 indicative of the formation of nanostructured materials, being in this particular case related to spherical nanoparticles of ZnO [25]. Fig. 3b shows the HRTEM micrograph and the size distribution his­ togram for the ZnO QDs, with an average particle size of 4.42 ± 0.65 nm. Furthermore, the X-ray diffraction pattern can also be utilized to calculate the particle size by examining the diffraction peaks and applying the Scherrer Eq. [26]. Table 4 Average silicon solar cell performance parameters before and after application of 0.125 mg/ml, 0.25 mg/ml, 0.5 mg/ml ZnO/PMMA and PMMA-only layers. Sample Voc (mV) Jsc (mA/ cm2) Jsc from EQE FF (%) PCE (%) Solar cell set 1 Solar cell set 1 + 0.125 mg/ ml ZnO Solar cell set 2 Solar cell set 2 + 0.25 mg/ ml ZnO Solar cell set 3 Solar cell set 3 + 0.5 mg/ml ZnO Solar cell set 4 Solar cell set 4 + PMMA 541.40 29.09 28.96 59.52 9.37 552.55 530.20 32.59 29.49 32.51 28.33 57.47 61.71 10.35 9.64 543.05 540.43 34.94 28.42 34.92 27.57 58.22 62.32 11.04 9.57 549.26 489.92 36.21 25.43 36.25 24.63 57.38 62.10 11.41 7.74 496.36 28.78 27.84 59.90 8.55 ΔPCE (%) 10.44 ± 0.14 D= 14.50 ± 0.05 Kλ βcosθ (7) where D is the crystallite size in nanometers, K is a dimensionless shape factor with a typical value of 0.9 [27], λ is the radiation wavelength of the X-ray source (typically 1.5406 Å from Cu K-α), β is the full width at half-maximum intensity (FWHM) in radians and θ is given by the angular position of the diffraction peak. The results of the evaluation of Eq. (7) with the information extracted from the deconvolution of Fig. 3a is summarized in Table 1. The average crystallite size of 4.39 nm extracted from Table 1 has good correspondence to the 4.54 nm diameter calculated using Brus's model and the average particle size of 4.42 nm measured with TEM. PMMA has an approximate refractive index value of 1.5 within the 400 to 500 nm wavelength range [28] that can be used as antireflective layer. The thickness d1 of the antireflective layer of a dielectric material like PMMA with a refractive index η1 is one-quarter of the wavelength of the incoming radiation λi 19.22 ± 0.06 10.59 ± 0.18 self-absorption, making the ZnO QDs good candidates as spectral con­ verters for silicon solar cells. During the investigation of the optical and electronic properties of germanium, Tauc et al [19] proposed a graphical method for band gap determination using the absorption data plotted in terms of energy. Based on Tauc's work, Davis and Mott [20] described how the absorp­ tion intensity depends on the difference between the incident photon energy hv and the semiconductor band gap Eg ) ( (5) (αhv)1/n = A hv − Eg d1 = λi 4η1 (8) The thickness of the PMMA thin films and therefore, the wavelength range where the antireflective effect occurs can be controlled by the spin casting speed of the polymeric solution applied to the silicon surface. The thickness d1 of a spin-cast thin film is proportional to the inverse of the angular velocity ω squared. where h is Planck's constant, v is the photon's frequency, α is the ab­ sorption coefficient and A is a proportionality constant. The value of the exponent denotes the nature of the electronic transition. ZnO is a semiconductor with direct allowed transitions having n = 1/2. The plot of the absorption data of the ZnO QDs processed by Eq. (5) is shown in Fig. 1b. When the energy of the incident photons is near the band gap value, the absorption becomes more pronounced and exhibits a region of linearity in the Tauc Plot. The extrapolation of the linear zone of Fig. 1b renders a band gap value of 3.63 eV. The energy dependence on particle size described by the Brus model [21] can be used to extract the approximate radius value R of the ZnO particles using the following equation ( ) ℏ2 π2 1 1 1.8e2 Eg = Eg bulk + 2 − + (6) 2R m*e m*h 4πεR 1 d1 ∝√̅̅̅̅ (9) ω Fig. 4a shows the reflectance spectra of PMMA thin films with thicknesses from 75 to 93 nm controlled by the spin-cast speed of the film. A significant shift in the maximum antireflective effect from around 420 nm to 500 nm was observed. The solar irradiation with wavelengths near to 500 nm can be more efficiently absorbed by the surface of the solar cell due to the reduced light reflection in this wavelength range. After obtaining the optimal deposition parameters, a PMMA solution with ZnO QDs powder concentration of 0.5 mg/ml was deposited at 1000 R.P.M. and compared against a PMMA-only thin film. Fig. 4b shows similar reflectance features for the samples given the minimal impact of the embedded ZnO QDs in the refractive index of the PMMA film due to the relatively low concentration of this nanoparticles. It is important to mention that there is a small decrease in reflectance from the PMMA-only to the ZnO/PMMA layer within the 300–400 nm region that could be related to the absorption spectrum of the ZnO nanoparticles. To obtain quantitative values of the antireflective effect of the PMMA and ZnO PMMA layers under solar illumination (Fig. 5a), the weighted reflectance 〈R〉 and total power reflected PReflected values were calculated from the reflectance spectra shown in Fig. 4 within the wavelength range of interest (300–1100 nm) using the following expressions: ∫ 1100 R(λ)I(λ)dλ (10) 〈R〉 = 300 ∫ 1100 I(λ)dλ 300 where ℏ is the reduced Planck's constant, Eg = 3.37 eV is the bulk band gap value for ZnO, me* = 0.26m0 and mh* = 0.59m0 are the effective electron and hole masses respectively and ε = 8.5ε0 [22] is the permittivity value of ZnO. The resulting estimate diameter of the ZnO QDs is 4.54 nm (R = 2.27 nm). The deconvolution of the PL spectrum of the ZnO QDs under UV illumination (335 nm) shown in Fig. 2a identifies the defect-related emissions of the ZnO quantum dots that can be exploited to enhance the solar cell spectral response. The different transition mechanisms are summarized in Fig. 2b. The radiative recombination processes are attributed to electron transitions from a shallow donor, related with Zni (interstitial Zn) defects to different acceptor levels: shallow acceptor level due to zinc vacancies (VZn) at 445 nm, oxygen vacancies (VO) at 492 nm, VZn deep acceptor at 530 nm and interstitial oxygen (Oi) at 587 nm [23]. The X-ray diffraction pattern of the ZnO QDs powders shown in Fig. 3a exhibit the diffraction peaks corresponding to the hexagonal wurtzite crystal structure of ZnO indexed in the Crystallography Open Database (COD) entry # 9011662 [24]. The wide diffraction peaks are ∫ 1100 PReflected = R(λ)I(λ)dλ 300 6 (11) A. Flores-Pacheco et al. 7 Micro and Nano Engineering 15 (2022) 100128 Fig. 7. Spectral response (EQE) and calculated short circuit current from EQE data for c-Si solar cells before (continuous lines) and after (dashed lines) application of ZnO/PMMA layers from solutions with three different ZnO QDs concentrations: a) 0.125 mg/ml, b) 0.25 mg/ml and c) 0.5 mg/ml. d) EQE of c-Si collar cells before (continuous lines) and after (dashed lines) application of PMMA-only layers. A. Flores-Pacheco et al. Micro and Nano Engineering 15 (2022) 100128 Finally, for the 0.5 mg/ml ZnO QDs concentration (Fig. 7c) a noticeable improvement within the 300–400 nm range wavelengths by the downshifting effects of the ZnO QDs, which in addition to the antireflective properties of the PMMA layer greatly enhances photocurrent generation. To separate the antireflective and down-shifting effects, an additional solar cell set EQE was evaluated with PMMA-only layers. The EQE improvement is given within the 400–1000 nm range in concordance of the antireflective effect shown in Fig. 4a without any sign of enhance­ ment in the 300–400 nm range. The EQE values can be utilized to determine Jsc without the need of measuring the cell's irradiated area and can be more accurate than the standard J-V characterization due to the elimination of measurement errors of said irradiated area. The value of Jsc can be calculated combining the photon flux bs(λ) given by the AM1.5G irradiance spec­ trum, in combination with the EQE values and integrating across all the relevant wavelengths, namely, ∫ λ2 Jsc = − q bs (λ) EQE(λ)dλ (12) λ1 The calculated Jsc values obtained with Eq. (12) for the solar cells before and after application of ZnO/PMMA and PMMA-only layers were plotted in Fig. 7. Since EQE is employed to provide an independent measurement of the current density, it has been incorporated in the performance characteristics of the solar cells evaluated in the present work and summarized in Table 4 as an indicator of the consistency of the collected values. The data of Table 4 shows an interesting behavior for all the PMMAZnO and PMMA-only coated samples, which is the reduction of the fill factor FF. Under high irradiance operative conditions (comparable to one sun), the fill factor is dominated by the resistive losses mainly due to the series resistance [29]. These losses are proportional to the series resistance RS and the short circuit current Jsc of the solar cell and inversely proportional to the open circuit voltage VOC [30]. Fig. 8. ZnO QDs down-shifting (Stokes shift) mechanism (blue lines). Antire­ flective effect (black lines) and silicon solar cell EQE response effect (red lines) of the 0.5 mg/ml PMMA/ZnO layer. The AM1.5G spectral irradiance spectrum is included as reference (dark yellow line). (For interpretation of the references to colour in this figure legend, the reader is referred to the web version of this article.) where R(λ) is the reflectance of the sample and I(λ) the AM 1.5G irra­ diance spectrum. An important decrease in power lost by reflection is evident in Fig. 5b from the bare silicon sample to the PMMA coated silicon samples. The numerical values of this effect (weighted reflectance and total power reflected) calculated using Eqs. (10,11) are summarized in Table 2 and shows a weighted reflectance decrease of 11.97% for the 93 nm layer compared against the bare silicon sample. The reflectance decrease allowed the recovery of around 96.4 W/m2 of total power reflected from the AM1.5G solar spectrum (1000 W/m2) by antireflective effect in the silicon sample with a 93 nm PMMA thin film. Similarly to the previous section, the weighted reflectance and total power reflected of a ZnO/ PMMA layer was compared with the best PMMA-only sample with minimal changes in the weighed reflectance (0.12%) and total power reflected (0.97 W/m2). (See Table 3.) Fig. 6 shows the J-V curves of the fabricated solar cell sets evaluated before and after the application of the ZnO/PMMA layers obtained from solutions with three different concentrations of ZnO QDs powders (0.125, 0.25 and 0.5 mg/ml) and a solar cell set with PMMA-only layers. Taking as reference the J-V curves of the PMMA-only solar cell set, an increasing beneficial effect in current generation with higher ZnO con­ centrations is noticeable from Figs. 6a through 6c. The average silicon solar cell performance parameters before and after application ZnO/ PMMA layers summarized in Table 4 shown average peak PCE im­ provements of 10.44, 14.50 and 19.22% for the 0.125, 0.25 and 0.5 mg/ ml concentrations respectively and 10.59% for the reference PMMAonly layers. This indicates that a 0.125 mg/ml of ZnO QDs concentra­ tion in the PMMA layers does not have significative impact in photo­ generation and will be practically the same of PMMA-only layers. The external quantum efficiency (EQE) was measured to study the spectral response of the fabricated c-Si solar cells with and without the deployed ZnO QDs films. At the lowest ZnO QDs concentration of 0.125 mg/ml (Fig. 7a), the expected increase in EQE within the 300–400 nm range due to the down-shifting effect cannot be detected. Meanwhile, the improvement in EQE located within the 400–1000 nm wavelength range and can be attributed mainly to the anti-reflective effect of PMMA [28]. With the ZnO QDs concentration increased to 0.25 mg/ml (Fig. 7b) the spectral response starts to experience a better performance below 450 nm wavelength, which after being absorbed by the ZnO QDs can promote defect-related radiative transitions in the visible range [23]. ΔFF ≈ − RS Jsc Voc (13) The increment in open circuit voltage Voc is not linearly related with the increment in Jsc. From the ideal diode equation in the superposition approximation (J = Jsc − Jdark) [31]. ( qV ) J = Jsc − J0 eKT − 1 (14) were J is the net current density of the cell V is the solar cell voltage, J0 is related to the recombination rate constant, K is Boltzmann's constant, T the temperature and q the elemental charge. When the cell is in the open circuit condition J = 0 ) ( KT Jsc Voc = ln − 1 (15) q J0 Equation (15) shows that the open circuit voltage changes logarith­ mically with the short circuit current, promoting a reduction in fill factor with an increase in photogeneration (higher Jsc values). Fig. 8 shows the simultaneous phenomena that occur under solar illumination and permits a maximum average PCE improvement of 19.22% in the solar cell set with 0.5 mg/ml ZnO/PMMA layers. This performance enhancement can be attributed to the accumulative contribution of the antireflective effect of the PMMA matrix and downshifting effect (Stokes shift) of the ZnO QDs, that converts the UV region (300–400 nm) of the solar irradiance spectrum to the visible range (centered around 510 nm) on which the silicon solar cell has a better spectral response (described by EQE). 4. Conclusions The silicon solar cells with optimized ZnO/PMMA layers exhibit 8 A. Flores-Pacheco et al. Micro and Nano Engineering 15 (2022) 100128 significant performance enhancements. The maximum average PCE improvement of 19.22% can be attributed to the antireflective effect of the PMMA matrix and the down-shifting effects of the ZnO QDs. 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