Background Statement for SEMI Draft Document 6581A
NEW SUBORDINATE STANDARD: SPECIFICATION FOR HTTP JSON
PROTOCOL IMPLEMENTATION FOR TESTER EVENT MESSAGING
FOR SEMICONDUCTORS (TEMS)
NOTICE: This Background Statement is not part of the balloted item. It is provided solely to assist the recipient in
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Background
There is an evolving class of services in the ATE domain that are used for both OEE and yield operations. These
server-client based services currently require unique data implementation per ATE vendor and application tool; this
is because test equipment and test operations use a diverse range of data formats, specifications, and interface
requirements. These services are being driven by the need for real-time, or near real-time, data analysis for product
quality, test yield, OEE etc.
This diverse range of formats creates a significant service and application engineering costs for ATE vendors, OSAT
companies, IDM test operations, software providers, and handler equipment manufactures. This standard has been
developed as an easy to implement method to communicate state and data to such services, and therefore reduce the
burden on all participants in these systems - ATE vendors, tool vendors, IDM’s, and OSAT’s.
The specification is designed to coexist with current implementations of different communication methods and to
allow for easy implementation of client-server based functionality services for ATE operations.
Requirement goals of specification
•
Do not modify existing standards (e.g. SEMI E30, STDF V4-2007) that cover part of the Test Cell data
management features
•
Ability to adapt data communication to different needs and to potential future data requirements
•
Use open mainstream industry standards that are expected to be supported in the foreseeable future
•
Minimal to no impact on test cell throughput
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Tester Event Messaging for
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Michelle Sun (SEMI)
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Laurent Bonneval (Teradyne)
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SEMI Draft Document 6581A
NEW SUBORDINATE STANDARD: SPECIFICATION FOR HTTP JSON
PROTOCOL IMPLEMENTATION FOR TESTER EVENT MESSAGING
FOR SEMICONDUCTORS (TEMS)
Table of Contents
Background ................................................................................................................................................... 0
TF/ TC Chapter Meeting Information............................................................................................................ 0
1 Purpose ...................................................................................................................................................... 3
1.1 The purpose of this Document is to provide an implementation of TEMS (SEMI xxx Specification) by
using HTTP JSON protocol ......................................................................................................................... 3
2 Scope .......................................................................................................................................................... 3
2.1 This Document describes the way to implement the TEMS protocol by using HTTP JSON................ 3
3 Limitations.................................................................................................................................................. 3
3.1 None .................................................................................................................................................... 3
4 Referenced Standards and Documents ..................................................................................................... 3
4.1 SEMI Standards and Safety Guidelines ............................................................................................... 3
4.2 SEMI Draft Document 6581A — New Standard: Specification for the Automated Test Equipment
Tester Event Messaging for Semiconductors (TEMS) ............................................................................... 3
5 Terminology ............................................................................................................................................... 3
5.1 Abbreviations and Acronyms .............................................................................................................. 3
5.2 DAS – Data Application Server ............................................................................................................ 3
5.3 GEM – Generic Equipment Model ...................................................................................................... 3
5.4 GPIB – General Purpose Interface Bus ................................................................................................ 3
5.5 HTTP – Hypertext Transfer Protocol ................................................................................................... 3
5.6 JSON – JavaScript Object Notation ..................................................................................................... 3
5.7 MQTT – Message Queuing Telemetry Transport ................................................................................ 3
5.8 REST – Representational State Transfer ............................................................................................. 3
5.9 RITdb – Rich Interactive Database ...................................................................................................... 3
5.10 RS-232 – Recommended Standard 232 ............................................................................................ 3
5.11 SECS – Semiconductor Equipment Communication Standard .......................................................... 3
5.12 STDF – Standard Test Data Format ................................................................................................... 3
5.13 TCS – Tester Control System ............................................................................................................. 3
5.14 TEMS – Tester Event Messaging for Semiconductors ....................................................................... 3
5.15 Definitions ......................................................................................................................................... 3
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development)
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5.16 DAS – Software acting at the TEMS message server ........................................................................ 3
5.17 Heartbeat – Periodic status message sent at a controlled rate ........................................................ 3
5.18 Message Broker – Wide area message distribution system ............................................................. 3
5.19 TCS – TEMS software running on a tester......................................................................................... 4
6 Conventions ............................................................................................................................................... 4
6.1 None. ................................................................................................................................................... 4
7 Message Coding ......................................................................................................................................... 4
7.1 Coding System ..................................................................................................................................... 4
7.2 Reasons for using JSON ....................................................................................................................... 4
7.3 JSON Syntax Rules ............................................................................................................................... 4
7.4 JSON Data syntax ................................................................................................................................ 4
7.5 Data Type ............................................................................................................................................ 4
7.6 Fields Rules ........................................................................................................................................ 10
7.7 Non-mandatory Fields ...................................................................................................................... 11
7.8 Mandatory fields without value associated ...................................................................................... 11
8 HTTP Code and Actions ............................................................................................................................ 12
8.1 This chapter describes which actions are taken by TCS depending on the HTTP code provided by the
DAS. ......................................................................................................................................................... 12
8.2 TCS defines four types of behavior depending on HTTP code provided by the DAS: ....................... 13
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1 Purpose
1.1 The purpose of this Document is to provide an implementation of TEMS (SEMI xxx Specification) by using
HTTP JSON protocol
2 Scope
2.1 This Document describes the way to implement the TEMS protocol by using HTTP JSON.
NOTICE: SEMI Standards and Safety Guidelines do not purport to address all safety issues associated with their use.
It is the responsibility of the users of the Documents to establish appropriate safety and health practices, and determine
the applicability of regulatory or other limitations before use.
3 Limitations
3.1 None
4 Referenced Standards and Documents
4.1 SEMI Standards and Safety Guidelines
4.2 SEMI Draft Document 6580A — New Standard: Specification for the Automated Test Equipment Tester Event
Messaging for Semiconductors (TEMS)
NOTE 1: The Automated Test Equipment Technical Committee is developing doc. 6580A, Specification for the
Automated Test Equipment Tester Event Messaging for Semiconductors (TEMS) intended to be a Primary Standard;
and this doc. 6581A is Subordinate Standard: Specification For HTTP JSON Protocol Implementation For Tester
Event Messaging For Semiconductors (TEMS). At the time when ballot 6581A was issued, the SEMI document
6580A was pending publication. This NOTE 1 is also to be removed after this ballot #6581A is passed.
NOTICE: Unless otherwise indicated, all documents cited shall be the latest published versions.
5 Terminology
5.1 Abbreviations and Acronyms
5.2 DAS – Data Application Server
5.3 GEM – Generic Equipment Model
5.4 GPIB – General Purpose Interface Bus
5.5 HTTP – Hypertext Transfer Protocol
5.6 JSON – JavaScript Object Notation
5.7 MQTT – Message Queuing Telemetry Transport
5.8 REST – Representational State Transfer
5.9 RITdb – Rich Interactive Database
5.10 RS-232 – Recommended Standard 232
5.11 SECS – Semiconductor Equipment Communication Standard
5.12 STDF – Standard Test Data Format
5.13 TCS – Tester Control System
5.14 TEMS – Tester Event Messaging for Semiconductors
5.15 Definitions
5.16 DAS – Software acting at the TEMS message server
5.17 Heartbeat – Periodic status message sent at a controlled rate
5.18 Message Broker – Wide area message distribution system
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5.19 TCS – TEMS software running on a tester
6 Conventions
6.1 None.
7 Message Coding
7.1 Coding System
7.1.1 TEMS sends messages in JSON format
• JSON stands for JavaScript Object Notation
• JSON is a lightweight data interchange format
• JSON is self-describing and easy to understand
• JSON is language independent
7.2 Reasons for using JSON
7.2.1 The exchange of data between a TCS and a DAS is only through text. JSON is text and a JavaScript object can
be converted into JSON; therefore, it can be sent to the DAS.
7.2.2 Also, any JSON received from the TCS can be converted into a language object.
7.3 JSON Syntax Rules
•
JSON syntax is derived from JavaScript object notation syntax
•
Data is name-value pairs
•
Data is separated by commas
•
Curly braces hold objects
•
Square brackets hold arrays
7.4 JSON Data syntax
7.4.1 JSON data is written as name-value pair, which consists of a filled name (in double quotes), followed by a colon
and then, by a value.
Table 1 JSON Data Example
"name":"John"
7.5 Data Type
7.5.1 The figure below describes the type of data supported by JSON.
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string
number
object
array
true
false
null
Figure 1
Data Type Supported by JSON
7.5.2 String Type
7.5.2.1 A string will respect the following rules:
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Figure 2
String Format
7.5.3 DateTime Type
7.5.3.1 Datetime is represented as a string. Date and Time-Stamp are codified according to the Specification ISO8601.
For example, the field EVENT_DDTM is coded as follow:
Table 2 EVENT_DDTM Example
"EVENT_DDTM":"2018-06-07T03:25:29.6538690Z"
7.5.4 For each field, minimal precision is required. The different possibilities are:
• us: The value will contain at least the microsecond value
• ms: The value will contain at least the millisecond value
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• s: The value will contain at least the second value
• d: The value will contain at least the day value
7.5.5 Object Type
7.5.5.1 An object follows the figure below.
{
string
:
value
}
,
Figure 3
Object Format
7.5.5.2 An object can be defined inside another object. When it says “Object” in a message or response, it means that
it can be any JSON object described above.
Table 3 Object Example
"employee":
{
"name" : "Keith",
"age" : 61,
"city" : "TonyPandy"
}
7.5.6 Boolean Values
7.5.6.1 For Boolean, the value will be without quotes. It will follow the figure below.
true
false
Figure 4
Boolean Format
7.5.6.2 Also, it will be lowercase.
Table 4 Boolean Example
"Walshe": true
7.5.7 Null Values
7.5.7.1 For null the value will be without quotes. It will follow this schema.
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null
Figure 5
Null Format
7.5.7.2 Also, it will be lowercase.
Table 5 Null Example
"MiddleName": null
7.5.8 Number for TEMS
7.5.8.1 TEMS respects the coding defined in the JavaScript specification. Unlike other programming languages,
JSON does not define types of numbers, such as integers, short, long floating-point and so on.
7.5.8.2 The numbers follow the IEE750 standard.
7.5.8.3 Any numbers contained into all the messages can be:
Table 6 Number Format Under TEMS
Type
Precision
Integers (numbers without a period or exponent
notation)
Accurate up to 15 digits
Floating (number with a period)
Maximum of decimals is 17
7.5.8.4 The codification of any number follows the figure below.
0
-
.
digit
1-9
digit
e
digit
E
+
digit
-
Figure 6
Number Format
7.5.8.5 For TEMS, the data type used is float. In this case, there is no differentiation between float and double.
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Table 7 Number Example
"mynumber": 15.58969
7.5.9 Array Type
7.5.9.1 Any array inside TEMS follows the figure below.
[
value
]
,
Figure 7
Array Type
Table 8 Array Example
"first_names":["Leo","Thomas","Julien" ]
7.5.10 Array of Objects
7.5.10.1 Also, an array of objects can be defined. The figure below shows an example.
Table 9 Array of Object
"employees":
[
{ "name" : "Leo",
{ "name" : "Thomas",
{ "name" : "Julien",
]
"age"
"age"
"age"
: 3, "city" :
: 45, "city" :
: 48, "city" :
"Aubagne"
"Marseille"
"San Etienne"
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7.6 Fields Rules
7.6.1 Rules concerning the field names.
7.6.1.1 Fields names shall only use letters, digits, underscore (“_”), dot (“.”) and hyphen (“-”) from the first 128
characters of UTF-8.
7.6.1.2 Field names described in the SEMI xxxx specification.
7.6.1.2.1 Letters in the field name shall be uppercase.
7.6.1.3 Custom field names.
7.6.1.3.1 Any field that is not defined in SEMI xxxx specification but is required by the TCS or DAS shall be a
custom field.
7.6.1.3.2 Letters in the custom field name shall be lowercase.
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7.7 Non-mandatory Fields
7.7.1 If a field is not mandatory and it does not have any value, the field can be removed from the message.
7.8 Mandatory fields without value associated
7.8.1 For a string it will be represented by a null value or an empty string.
7.8.2 For a number it will be represented by a null value
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8 HTTP Code and Actions
8.1 This chapter describes which actions are taken by TCS depending on the HTTP code provided by the DAS.
Figure 8
Type of Response
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8.2 TCS defines four types of behavior depending on HTTP code provided by the DAS:
•
DAS accepts the message
•
Resend
•
Ignore & Proceed
•
Fatal Error
8.2.1 DAS the message
8.2.1.1 When DAS provides with the following code TCS consider that the message has been transmitted correctly.
Table 10 HTTP Code for “Message accepted” Case
Name
HTTP Code
HttpStatusCode.Accepted
202
HttpStatusCode.Created
201
HttpStatusCode.OK
200
8.2.2 Resend the message
8.2.2.1 When TCS receives any http code listed below, TCS tries to resend this message. The INITIALIZATION
message is not resent.
Table 11 Resend INITIALIZATION Message When TCS Receives the Following HTTP Code
Name
HTTP Code
HttpStatusCode.BadGateway
502
HttpStatusCode.Continue
100
HttpStatusCode.GatewayTimeout
504
HttpStatusCode.LengthRequired
411
HttpStatusCode.RedirectKeepVerb
307
HttpStatusCode.UseProxy
305
HttpStatusCode.Unused
306
HttpStatusCode.RequestTimeout
408
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8.2.3 Code for the case “Ignore & Proceed”:
8.2.3.1 When TCS receives any http code listed below, proceed to the next message, and ignore the current one. The
current message is not resent. The INITIALIZATION message is not resent.
Table 12 HTTP Code for “Ignore & Proceed” Case
Name
HTTP Code
HttpStatusCode.Ambiguous
300
HttpStatusCode.BadRequest
400
HttpStatusCode.Conflict
409
HttpStatusCode.ExpectationFailed
417
HttpStatusCode.Forbidden
403
HttpStatusCode.Found
302
HttpStatusCode.HttpVersionNotSupported
505
HttpStatusCode.Moved
301
HttpStatusCode.NoContent
204
HttpStatusCode.NonAuthoritativeInformation
203
HttpStatusCode.NotAcceptable
406
HttpStatusCode.NotFound
404
HttpStatusCode.NotImplemented
501
HttpStatusCode.NotModified
304
HttpStatusCode.PartialContent
206
HttpStatusCode.PaymentRequired
402
HttpStatusCode.PreconditionFailed
412
HttpStatusCode.ProxyAuthenticationRequired
407
HttpStatusCode.UnsupportedMediaType
415
HttpStatusCode.Unauthorized
401
HttpStatusCode.SwitchingProtocols
101
HttpStatusCode.ResetContent
205
HttpStatusCode.RequestUriTooLong
414
HttpStatusCode.RequestEntityTooLarge
413
HttpStatusCode.RequestedRangeNotSatisfiable
416
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8.2.4 Fatal Error Message
8.2.4.1 When TCS receives any http code listed below, TCS do not resent the message. The INITIALIZATION
message is resent.
Table 13 Fatal HTTP Code
Name
HTTP Code
HttpStatusCode.Gone
HttpStatusCode.InternalServerError
HttpStatusCode.MethodNotAllowed
HttpStatusCode.ServiceUnavailable
410
500
405
503
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RELATED INFORMATION 1
LIST OF EXAMPLES OF EACH TEMS MESSAGE
NOTICE: This Related Information is not an official part of SEMI [designation number] and was derived from the
work of the [committee name] Global Technical Committee. This Related Information was approved for publication
by full letter ballot procedures on [A&R approval date].
R1-1.1 For all the listed examples bellow, the DAS address is “http://127.0.0.1:3000/”
R1-1.2 TCS Initialization Message Example
R1-1.2.1 INITIALIZATION Message POST Syntax
R1-1.2.2 The following message is generated from the tester named “ZYGON”. This tester supports the message
“INITIALIZATION”, “SHUTDOWN”, “STATUS” & “USER_ACCOUNT”.
R1-1.2.3 The tester is located in France and supports the “gzip” compression.
Table R1-1 INITIALIZATION Message Example
POST:
{
"url":"http://127.0.0.1:3000/TEST_CELL/ZYGON/INITIALIZATION",
"body":
{
"EVENT_DTTM": "2020-03-05T04:28:46.1061434Z",
"TIME_ZONE": "CET",
"DST_ON": true,
"TCS_VENDOR": "TERADYNE",
"TCS_VERSION": "2020-1805",
"TEMS_VERSION": "0.94",
"TCS_MESSAGE_LIST": [
"INITIALIZATION",
"SHUTDOWN",
"STATUS",
"USER_ACCOUNT"
],
"TCS_CONTROL_LIST": [],
"TCS_LOST_MESSAGES": 0,
"TCS_STATUS_FREQUENCY": 60,
"IS_PRIMARY_DAS": false,
"TCS_COMPRESSION_TYPE": [
"gzip"
],
"LOCATION": {
"PHYSICAL": {
"COUNTRY": "FRA",
"STATE": null,
"CITY": "PEYPIN",
"ADDRESS": ""
},
"GPS": {
"LATITUDE": "43.387698",
"LONGITUDE": "5.584187"
},
"BUILDING": {
"FLOOR": "1"
},
"LOGICAL": {
"FACILITY_ID": "T/RST",
"DOMAIN_ID": "ter.teradyne.com",
"CELL_ID": "ZYGON",
"IP_ADDRESS": [
{
"ADDRESS": "131.101.98.25",
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development)
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}
}
}
]
}
"MAC": "02:05:86:7F:EC:82",
"SUBNET_MASK": "255.255.255.255",
"GATEWAY": "131.101.98.255",
"DESCRIPTION": "Network card",
"STATE": "CONNECTED"
R1-1.2.4 INITIALIZATION Response Syntax
R1-1.2.4.1 The DAS, named “Kibana”, will accept all the messages from the TCS. However the DAS will not accept
any COMPRESSION
Table R1-2 INITIALIZATION Response Example
GET:
{
"url":"",
"body":
{
"DAS_VENDOR": "TERADYNE",
"DAS_NAME": "Kibana",
"DAS_VERSION": "1.0.0",
"TEMS_VERSION": "0.94",
"TCS_MESSAGE_LIST": [
"INITIALIZATION",
"SHUTDOWN",
"STATUS",
"USER_STATUS",
"CONFIGURATION",
"TESTER_OS",
"TEST_PROGRAM_LOAD",
"LOT_START",
"RUN_START",
"RUN_END",
"RUN_STATUS",
"TEST_START",
"TEST_END",
"TEST_DATA",
"HALT",
"EXTERNAL",
"PERIPHERAL",
"MAINTENANCE",
"MAINTENANCE_DATA",
"GENERIC",
"LOG",
"FILE"
]
}
}
R1-1.3 TCS Shutdown Message
R1-1.3.1 POST Syntax Example
R1-1.3.1.1 The tester is shutting down and no reason is specified.
Table R1-3 : Shutdown Message Example
POST:
{
"url":"http://127.0.0.1:3000/TEST_CELL/ZYGON/SHUTDOWN",
"body":
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development)
activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
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{
}
}
"EVENT_DTTM"
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: "2020-03-05T04:28:46.1061434Z",
R1-1.3.2 Response Syntax Example
Table R1-4 Shutdown Response
GET:
{
"url":"",
"body":
{
}
}
R1-1.4 Status Message Example
R1-1.4.1 Post Syntax
R1-1.4.1.1 This is an example of a heartbeat message when the tester software is running.
Table R1-5 Status Message Example
POST:
{
"url":"http://127.0.0.1:3000/TEST_CELL/ZYGON/STATUS",
"body":
{
"EVENT_DTTM"
: "2020-03-05T04:28:46.1061434Z",
"STATUS"
: "BUSY",
}
}
R1-1.4.2 Response Syntax Example
Table R1-6 Status Response Example
GET:
{
"url": "",
"body":
{
"MESSAGE_LIST":
["INITIALIZATION","SHUTDOWN", "STATUS","USER_STATUS","CONFIGURATION","TESTER_OS",
"TEST_PROGRAM_LOAD","LOT_START","RUN_START","RUN_END","RUN_STATUS","TEST_START",
"TEST_END","TEST_DATA","HALT","EXTERNAL","PERIPHERAL","MAINTENANCE",
"MAINTENANCE_DATA","GENERIC","LOG","FILE"]
}
}
R1-1.5 Configuration Message
R1-1.5.1 Post Syntax
R1-1.5.1.1 This configuration will represent the following items:
Cell Configuration
•
Name of the tester “ZYGON”
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
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Doc. 6581A SEMI
•
This is an Ultraflex tester, Serial Part 1234-789
From the software point of view:
•
Tester Software IG-XL, version 9.10.00_uflx, this software is link with a delta version 001
•
Operator interface named OIProduction version 11.22.00
From the hardware point of view:
•
This tester has a board called BPMU. Inside this board tester has 2 modules:
o
Mod_001
o
Mod_002
From the license point of view:
•
This tester has one license called GSO_TSA_TST
Table R1-7 Configuration Message Example
POST:
{
“url”:”/TEST_CELL/ZYGON/CONFIGURATION”,
“body”:
{
"EVENT_DTTM": "2020-03-05T04:28:46.1061434Z",
"TESTER_CONTROLLER_BOOT_TIME": "2020-03-05T02:25:46.1061434Z",
"CELL_NAME": "ZYGON",
"CELL_TYPE": "ULTRAFLEX",
"CELL_CONFIGURATION": {
"ID": "ZYGON",
"HOSTNAME": "ZYGON.ter.teradyne.com",
"CLASS": "TESTER",
"PART_NUMBER": "789-888",
"INV_TYPE": "ULTRAFLEX",
"SERIAL_ID": "1234-789"
},
"SW_CONFIGURATION": {
"SOFTWARE": [
{
"SOFTWARE_ID": "TER_001_ABC",
"NAME": "IG-XL",
"CLASS": "TESTER_EXEC",
"VERSION": "9.10.00_uflx",
"STATUS": "ENABLED"
},
{
"SOFTWARE_ID": "TER_001_ABD",
"NAME": "OIPRODUCTION",
"CLASS": "OI",
"VERSION": "11.22.00",
"STATUS": "ENABLED"
}
],
"DELTAS": [
{
"DELTA_ID": "DELTA_ABC",
"SOFTWARE_ID": "TER_001_ABC",
"NAME": "DELTA_001",
"VERSION": "001",
"STATUS": "ENABLED"
}
]
},
"HW_CONFIGURATION": {
"RESOURCES": [],
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"BOARDS": [
{
"BOARD_ID": "BPMU_001",
"BOARD_TYPE": "BPMU",
"PART_NUMBER": "112-789",
"SERIAL_NUMBER": "ABC-DEF-GHI",
"PCB_VER": "20161805",
"FIRMWARE_VERSION": "1971-17-04",
"ASSEMBLY_REV": "1973-24-06",
"NUM_PINS": 2048,
"VENDOR": "TERADYNE"
}
],
"MODULES": [
{
"MODULE_ID": "MOD_011",
"MODULE_TYPE": "MODULE_BPPMU",
"CAL_STATUS": "PASS",
"CAL_STATUS_DDTM_UTC": "2020-01-05T04:28:46.1061434Z",
"VENDOR": "TERADYNE"
},
{
"MODULE_ID": "MOD_012",
"MODULE_TYPE": "MODULE_BPPMU",
"CAL_STATUS": "PASS",
"CAL_STATUS_DDTM_UTC": "2020-01-07T04:28:46.1061434Z",
"VENDOR": "ROOS_INSTRUMENT"
}
],
"CABLES": [],
"RESOURCE_CONNECTIONS": [
{
"CONNECTION_ID": "CONN_001",
"SLOT_UNIQUE_ID": "SLOT_TESTER01_001",
"SLOT_NUMBER": 1,
"BOARD_ID": "BPMU_001",
"MODULE_ID": "MOD_011"
},
{
"CONNECTION_ID": "CONN_002",
"SLOT_UNIQUE_ID": "SLOT_TESTER01_001",
"SLOT_NUMBER": 1,
"BOARD_ID": "BPMU_001",
"MODULE_ID": "MOD_012"
}
]
},
"LICENSE_INFO": [
{
"LICENSE_ID": "LIC_001",
"LICENSE_NAME": "GSO_TSA_TST",
"DESCRIPTION": "TEMS License",
"VERSION": "001",
"LICENSE_EXP_TYPE": "TEMP",
"EXPIRATION_DATE": "2021-07-14T01:00:00.0Z",
"LICENSE_TYPE": "NODE_LOCKED",
"STATUS": "ENABLED",
"LICENSE_AVAILABLE": 0
}
]
}
R1-1.5.2 Response Syntax Example
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
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Table R1-8 CONFIGURATION Response Example
GET:
{
"url": "",
"body":
{
"MESSAGE_LIST":
["INITIALIZATION","SHUTDOWN", "STATUS","USER_STATUS","CONFIGURATION","TESTER_OS",
"TEST_PROGRAM_LOAD","LOT_START","RUN_START","RUN_END","RUN_STATUS","TEST_START",
"TEST_END","TEST_DATA","HALT","EXTERNAL","PERIPHERAL","MAINTENANCE",
"MAINTENANCE_DATA","GENERIC","LOG","FILE"]
}
}
R1-1.6 USER_STATUS Message
R1-1.6.1 Post Syntax
R1-1.6.1.1 This example will record the user bonneval connecting to the computer.
Table R1-9 USER_STATUS Message Example
POST:
{
"url": "/TEST_CELL/ZYGON/USER_STATUS",
"body": {
"EVENT_DTTM": "2020-03-05T04:28:46.1061434Z",
"USER_EVENT": "LOGIN",
"USER_ID": "ter\bonneval",
"USER_TYPE": "admin"
}
}
R1-1.6.2 Response Syntax Example
Table R1-10 USER_STATUS Response Example
GET:
{
"url": "",
"body":
{
"MESSAGE_LIST":
["INITIALIZATION","SHUTDOWN","STATUS","USER_STATUS","CONFIGURATION","TESTER_OS",
"TEST_PROGRAM_LOAD","LOT_START","RUN_START","RUN_END","RUN_STATUS","TEST_START",
"TEST_END","TEST_DATA","HALT","EXTERNAL","PERIPHERAL","MAINTENANCE",
"MAINTENANCE_DATA","GENERIC","LOG","FILE"]
}
}
R1-1.7 TESTER_OS Message
R1-1.7.1 Post Syntax
R1-1.7.1.1 This example will notify the start of the tester software.
Table R1-11 TESTER_OS Message Example
POST:
{
"url": "/TEST_CELL/ZYGON/TESTER_OS",
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
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Date: 2/9/2021
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}
"body": {
"EVENT_DTTM": "2020-03-05T04:28:46.1061434Z",
"START_OR_END": "END",
"TESTER_OS_EVENT_TYPE": "INITIALIZATION",
"SOFTWARE_ID": [
"TER_001_ABC"
],
"DELTA_ID": [
"DELTA_ABC"
],
"ONLINE_MODE": "ONLINE",
"USER_MODE": "PRODUCTION",
"USER_ID": "ter\bonneval"
}
R1-1.7.2 Response Syntax Example
Table R1-12 TESTER_OS Response Example
GET:
{
"url": "",
"body":
{
"MESSAGE_LIST":
["INITIALIZATION","SHUTDOWN","STATUS","USER_STATUS","CONFIGURATION","TESTER_OS",
"TEST_PROGRAM_LOAD","LOT_START","RUN_START","RUN_END","RUN_STATUS","TEST_START",
"TEST_END","TEST_DATA","HALT","EXTERNAL","PERIPHERAL","MAINTENANCE",
"MAINTENANCE_DATA","GENERIC","LOG","FILE"]
}
}
R1-1.8 TESTER_OS Message
R1-1.8.1 Post Syntax
R1-1.8.1.1 This example shows that tester is loading MyTestProgram.igxl
Table R1-13 TEST_PROGRAM_LOAD Message Example
POST:
{
"url": "/TEST_CELL/ZYGON/TEST_PROGRAM_LOAD",
"body": {
"EVENT_DTTM": "2020-03-05T04:28:46.1061434Z",
"START_OR_END": "START",
"TESTER_OS_EVENT_TYPE": "INITIALIZATION",
"SOFTWARE_ID": [
"TER_001_ABC"
],
"DELTA_ID": [
"DELTA_ABC"
],
"TEST_PROGRAM": "C:\\MyFolder\\MyTestProgram.igxl",
"LOAD_EVENT": "LOAD",
"ENV_LIST": {
"CHANNEL_MAP": "chan_x08"
},
"MODULE_LIST": [
"Datatool.xla",
"Template.xla"
],
"LOAD_SUCCESS": "SUCCESS",
"LOAD_MESSAGE": "Loading the test program",
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Doc. 6581A SEMI
}
}
"JOB": {
"NAME": "MyJob",
"VERSION": "01.00"
},
"TEST_SPECIFICATION": {
"NAME": "MyTestSpec"
}
R1-1.8.2 Response Syntax Example
Table R1-14 TEST_PROGRAM_LOAD Response Example
GET:
{
"url": "",
"body":
{
"MESSAGE_LIST":
["INITIALIZATION","SHUTDOWN","STATUS","USER_STATUS","CONFIGURATION","TESTER_OS",
"TEST_PROGRAM_LOAD","LOT_START","RUN_START","RUN_END","RUN_STATUS","TEST_START",
"TEST_END","TEST_DATA","HALT","EXTERNAL","PERIPHERAL","MAINTENANCE",
"MAINTENANCE_DATA","GENERIC","LOG","FILE"]
}
}
R1-1.9 LOT_START Message
R1-1.9.1 Post Syntax
R1-1.9.1.1 This example shows that tester is going to start the LOT_ID CURRENTLOTID with 4 sites. This Lot
will be started by the Operator “Franck”. This is a fresh wafer.
Table R1-15 LOT_START Message Example
POST:
{
"url": "/TEST_CELL/ZYGON/LOT/CURRENTLOTID/LOT_START",
"body": {
"EVENT_DTTM": "2020-03-05T04:28:46.1061434Z",
"RUN_TYPE": "WAFER",
"LOT_INFO": {
"RETEST_CODE": "NO",
"PRODUCT_ID": "MYProduct",
"OPERATOR_ID": "Franck",
"OPERATION_FREQUENCY": "4006",
"FLOW_ID": "EWS1"
},
"SITE_MAPPING": [
{
"SITE_UID": "DUT_000",
"SITE_ID": 0,
"PHYSICAL_SITE_NUMBER": 0
},
{
"SITE_UID": "DUT_001",
"SITE_ID": 1,
"PHYSICAL_SITE_NUMBER": 1
},
{
"SITE_ID": "DUT_002",
"SITE_ID": 2,
"PHYSICAL_SITE_NUMBER": 2
},
{
"SITE_ID": "DUT_003",
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}
}
]
}
"SITE_ID": 3,
"PHYSICAL_SITE_NUMBER": 3
R1-1.9.2 Response Syntax Example
Table R1-16 : LOT_START Response Example
GET:
{
"url": "",
"body":
{
"MESSAGE_LIST":
["INITIALIZATION","SHUTDOWN","STATUS","USER_STATUS","CONFIGURATION","TESTER_OS",
"TEST_PROGRAM_LOAD","LOT_START","RUN_START","RUN_END","RUN_STATUS","TEST_START",
"TEST_END","TEST_DATA","HALT","EXTERNAL","PERIPHERAL","MAINTENANCE",
"MAINTENANCE_DATA","GENERIC","LOG","FILE"]
}
}
R1-1.10 RUN_START Message
R1-1.10.1 Post Syntax
R1-1.10.1.1 This example shows that tester is going to start a new wafer CURRENTLOTID-01BB with 4 sites. The
Wafer Size is 200mm .
Table R1-17 RUN_START Message Example
POST:
{
"url": "/TEST_CELL/ZYGON/LOT/CURRENTLOTID/RUN/CURRENTLOTID-01BB/RUN_START",
"body": {
"EVENT_DTTM": "2020-03-05T04:28:46.1061434Z",
"RUN_TYPE": "WAFER",
"SUBSTRATE_ID": "CURRENTLOTID-01BB",
"SUBSTRATE_INFO": {
"INFO_ID": "77803cfb-6410-43b2-b24a-cfcc28670f43",
"WAFER_SIZE": 200,
"UNITS": "MM"
},
"SITE_MAPPING": [
{
"SITE_UID": "DUT_000",
"SITE_ID": 0,
"PHYSICAL_SITE_NUMBER": 0
},
{
"SITE_UID": "DUT_001",
"SITE_ID": 1,
"PHYSICAL_SITE_NUMBER": 1
},
{
"SITE_UID": "DUT_002",
"SITE_ID": 2,
"PHYSICAL_SITE_NUMBER": 2
},
{
"SITE_UID": "DUT_003",
"SITE_ID": 3,
"PHYSICAL_SITE_NUMBER": 3
}
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}
}
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Doc. 6581A SEMI
R1-1.10.2 Response Syntax Example
Table R1-18 RUN_START Response Example
GET:
{
"url": "",
"body":
{
"MESSAGE_LIST":
["INITIALIZATION","SHUTDOWN","STATUS","USER_STATUS","CONFIGURATION","TESTER_OS",
"TEST_PROGRAM_LOAD","LOT_START","RUN_START","RUN_END","RUN_STATUS","TEST_START",
"TEST_END","TEST_DATA","HALT","EXTERNAL","PERIPHERAL","MAINTENANCE",
"MAINTENANCE_DATA","GENERIC","LOG","FILE"]
}
}
R1-1.11 RUN_END Message
R1-1.11.1 Post Syntax
R1-1.11.1.1 This example shows that tester is closing the wafer CURRENTLOTID-01BB with 4 sites. TheTester has
tested one good device on each site. The hard bin is 1 and the soft bin is 100.
Table R1-19 RUN_END Message Example
POST:
{
"url": "/TEST_CELL/ZYGON/LOT/CURRENTLOTID/RUN/CURRENTLOTID-01BB/RUN_END",
"body": {
"EVENT_DTTM": "2020-03-05T04:28:46.1061434Z",
"RUN_TYPE": "WAFER",
"SUBSTRATE_ID": "CURRENTLOTID-01BB",
"PART_COUNT" : 4,
"TOTAL_COUNT" : 4,
"BIN_MAP" :
{
"SOFT" : [{"ID" : "100", "NAME" : "GOOD", "BIN_PF": "PASS", "TOTAL" : 4 }
"HARD" : [{"ID" : "1",
"NAME" : "GOOD", "BIN_PF": "PASS", "TOTAL" : 4 }
},
}
}
"SITE_SUMMARY":
[
{ "SITE_UID": "DUT_000","PART_COUNT" : 1, "TOTAL_PASS" : 1,
"SOFT" :[{"ID" : "100","NAME" : "GOOD", "BIN_PF": "PASS",
"HARD" :[{"ID" : "1", "NAME" : "GOOD", "BIN_PF": "PASS",
},
{ "SITE_UID": "DUT_001","PART_COUNT" : 1, "TOTAL_PASS" : 1,
"SOFT" :[{"ID" : "100","NAME" : "GOOD", "BIN_PF": "PASS",
"HARD" :[{"ID" : "1", "NAME" : "GOOD", "BIN_PF": "PASS",
},
{ "SITE_UID": "DUT_002","PART_COUNT" : 1, "TOTAL_PASS" : 1,
"SOFT" :[{"ID" : "100","NAME" : "GOOD", "BIN_PF": "PASS",
"HARD" :[{"ID" : "1", "NAME" : "GOOD", "BIN_PF": "PASS",
},
{ "SITE_UID": "DUT_003","PART_COUNT" : 1, "TOTAL_PASS" : 1,
"SOFT" :[{"ID" : "100","NAME" : "GOOD", "BIN_PF": "PASS",
"HARD" :[{"ID" : "1", "NAME" : "GOOD", "BIN_PF": "PASS",
}
]
"TOTAL" : 1
"TOTAL" : 1
}
}
],
]
"TOTAL" : 1
"TOTAL" : 1
}
}
],
]
"TOTAL" : 1
"TOTAL" : 1
}
}
],
]
"TOTAL" : 1
"TOTAL" : 1
}
}
],
]
],
]
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
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R1-1.11.2 Response Syntax Example
Table R1-20 RUN_END Response Example
GET:
{
"url": "",
"body":
{
"MESSAGE_LIST":
["INITIALIZATION","SHUTDOWN","STATUS","USER_STATUS","CONFIGURATION","TESTER_OS",
"TEST_PROGRAM_LOAD","LOT_START","RUN_START","RUN_END","RUN_STATUS","TEST_START",
"TEST_END","TEST_DATA","HALT","EXTERNAL","PERIPHERAL","MAINTENANCE",
"MAINTENANCE_DATA","GENERIC","LOG","FILE"]
}
}
R1-1.12 RUN_STATUS Message
R1-1.12.1 Post Syntax
R1-1.12.1.1 This example shows that the tester sends the status of this run before closing the wafer
CURRENTLOTID-01BB with 4 sites. TheTester tested one good device on each site. The hard bin is 1 and the soft
bin is 100.
Table R1-21 RUN_STATUS Message Example
POST:
{
"url": "/TEST_CELL/ZYGON/LOT/CURRENTLOTID/RUN/CURRENTLOTID-01BB/RUN_STATUS",
"body": {
"EVENT_DTTM": "2020-03-05T04:28:46.1061434Z",
"RUN_TYPE" : "WAFER",
"RUN_STATE": "COMPLETED",
"SUBSTRATE_ID": "CURRENTLOTID-01BB",
"PART_COUNT" : 4,
"TOTAL_COUNT" : 4,
"BIN_MAP" :
{
"SOFT" : [{"ID" : "100", "NAME" : "GOOD", "BIN_PF": "PASS", "TOTAL" : 4 }
"HARD" : [{"ID" : "1",
"NAME" : "GOOD", "BIN_PF": "PASS", "TOTAL" : 4 }
},
}
}
"SITE_SUMMARY":
[
{ "SITE_UID": "DUT_000","PART_COUNT" : 1, "TOTAL_PASS" : 1,
"SOFT" :[{"ID" : "100","NAME" : "GOOD", "BIN_PF": "PASS",
"HARD" :[{"ID" : "1", "NAME" : "GOOD", "BIN_PF": "PASS",
},
{ "SITE_UID": "DUT_001","PART_COUNT" : 1, "TOTAL_PASS" : 1,
"SOFT" :[{"ID" : "100","NAME" : "GOOD", "BIN_PF": "PASS",
"HARD" :[{"ID" : "1", "NAME" : "GOOD", "BIN_PF": "PASS",
},
{ "SITE_UID": "DUT_002","PART_COUNT" : 1, "TOTAL_PASS" : 1,
"SOFT" :[{"ID" : "100","NAME" : "GOOD", "BIN_PF": "PASS",
"HARD" :[{"ID" : "1", "NAME" : "GOOD", "BIN_PF": "PASS",
},
{ "SITE_UID": "DUT_003","PART_COUNT" : 1, "TOTAL_PASS" : 1,
"SOFT" :[{"ID" : "100","NAME" : "GOOD", "BIN_PF": "PASS",
"HARD" :[{"ID" : "1", "NAME" : "GOOD", "BIN_PF": "PASS",
}
]
"TOTAL" : 1
"TOTAL" : 1
}
}
],
]
"TOTAL" : 1
"TOTAL" : 1
}
}
],
]
"TOTAL" : 1
"TOTAL" : 1
}
}
],
]
"TOTAL" : 1
"TOTAL" : 1
}
}
],
]
],
]
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development)
activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
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R1-1.12.2 Response Syntax Example
Table R1-22 RUN_STATUS Response Example
GET:
{
"url": "",
"body":
{
"MESSAGE_LIST":
["INITIALIZATION","SHUTDOWN","STATUS","USER_STATUS","CONFIGURATION","TESTER_OS",
"TEST_PROGRAM_LOAD","LOT_START","RUN_START","RUN_END","RUN_STATUS","TEST_START",
"TEST_END","TEST_DATA","HALT","EXTERNAL","PERIPHERAL","MAINTENANCE",
"MAINTENANCE_DATA","GENERIC","LOG","FILE"]
}
}
R1-1.13 TEST_START Message
R1-1.13.1 Post Syntax
R1-1.13.1.1 This example shows that the tester is starting testing. DUT_000 & DUT_003 are ready, and no device is
to be tested on DUT_001 & DUT_002
Table R1-23 TEST_START Message Example
POST:
{
"url": "/TEST_CELL/ZYGON/LOT/CURRENTLOTID/RUN/CURRENTLOTID-01BB/TEST_START",
"body": {
"EVENT_DTTM": "2020-03-05T04:28:46.1061434Z",
"UNIT_INDEX_TIME" : 4.2,
"SUBSTRATE_ID": "CURRENTLOTID-01BB",
}
}
"SITE_INFO":
[
{ "SITE_UID": "DUT_000", "STATUS" : "S",
"PART" :{"X" : "100","Y" : "101" },
},
{ "SITE_UID": "DUT_001", "STATUS" : "E" },
{ "SITE_UID": "DUT_002", "SITE_NUM" : 1, "STATUS" : "S",
"PART" :{"X" : "100","Y" : "103" },
},
{ "SITE_UID": "DUT_003", "STATUS" : "E" }
]
R1-1.13.2 Response Syntax Example
Table R1-24 TEST_START Response Example
GET:
{
"url": "",
"body":
{
"MESSAGE_LIST":
["INITIALIZATION","SHUTDOWN","STATUS","USER_STATUS","CONFIGURATION","TESTER_OS",
"TEST_PROGRAM_LOAD","LOT_START","RUN_START","RUN_END","RUN_STATUS","TEST_START",
"TEST_END","TEST_DATA","HALT","EXTERNAL","PERIPHERAL","MAINTENANCE",
"MAINTENANCE_DATA","GENERIC","LOG","FILE"]
}
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development)
activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
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Date: 2/9/2021
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Phone: 408.943.6900
DRAFT
Document Number: 6581A
Date: 2/9/2021
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}
R1-1.14 TEST_END Message
R1-1.14.1 Post Syntax
R1-1.14.1.1 This example shows that the tester is ending testing.
•
DUT_000 has been bined with Soft Bin 15 and Hard Bin 3 (Fail).
•
DUT_003 has been bined with Soft Bin 2 and Hard Bin 1 (Pass).
•
DUT_001 & DUT_002 has been not tested.
R1-1.14.1.2 The Test Time was 150ms
Table R1-25 TEST_END Message Example
POST:
{
"url": "/TEST_CELL/ZYGON/LOT/CURRENTLOTID/RUN/CURRENTLOTID-01BB/TEST_END",
"body": {
"EVENT_DTTM": "2020-03-05T04:28:46.1061434Z",
"UNIT_TEST_TIME" : 0.150,
"SUBSTRATE_ID": "CURRENTLOTID-01BB",
}
}
"SITE_INFO":
[
{ "SITE_UID":
"HARD_BIN":
},
{ "SITE_UID":
"HARD_BIN":
}
]
"DUT_000","SITE_NUM" : 0, "PASS_FAIL" : "F",
3, "SOFT_BIN": 15, "PART_ID": "1"
"DUT_003","SITE_NUM" : 3, "PASS_FAIL" : "P",
1, "SOFT_BIN": 2, "PART_ID": "2"
R1-1.14.2 Response Syntax Example
Table R1-26 TEST_END Response Example
GET:
{
"url": "",
"body":
{
"MESSAGE_LIST":
["INITIALIZATION","SHUTDOWN","STATUS","USER_STATUS","CONFIGURATION","TESTER_OS",
"TEST_PROGRAM_LOAD","LOT_START","RUN_START","RUN_END","RUN_STATUS","TEST_START",
"TEST_END","TEST_DATA","HALT","EXTERNAL","PERIPHERAL","MAINTENANCE",
"MAINTENANCE_DATA","GENERIC","LOG","FILE"]
}
}
R1-1.15 TEST_DATA Message
R1-1.15.1 Post Syntax
R1-1.15.1.1 The tester will perform the following parametric tests
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development)
activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
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Doc. 6581A SEMI
Table R1-27 Test Results Example
SITE_UI
D
Test #
Test
Name
Pin_Name
Low Limit
High Limit
Result
P/F
DUT_000
10
Test_1
0
P1
3.3mV
5.2mV
2mV
P
DUT_003
10
Test_1
0
P1
3.3mV
5.2mv
6mv
F
DUT_000
20
Test_2
0
P1
-30nA
20nA
15nA
P
DUT_000
20
Test_2
0
P2
-30nA
20nA
17nA
P
R1-1.15.1.2 The Post Syntax is:
Table R1-28 TEST_DATA Message Example
{
"url":"/TEST_CELL/ZYGON/LOT/CURRENTLOTID/RUN/CURRENTLOTID-01BB/TEST_DATA",
"body":{
"EVENT_DTTM":"2020-03-05T04:28:46.1061434Z",
"TEST_COND_INFO":[
{
"RESULT_ID":"10","TEST_NAME":"TEST_10",
"TEST_COND_INFO":
{
"RESULT_INFO":
{
"PIN_NAME":["P1"],
"RESULT_SCALE":-3,
"RESULT_UNITS":"V",
"RESULT_EVENT_GROUP":"Part1",
},
"LIMITS":
[{"LIMITS_LL":3.3,"LIMITS_UL":5.2,"LIMITS_ID":"TEST_10_01"}]
}
},
{
"RESULT_ID":"20","TEST_NAME":"TEST_20",
"TEST_COND_INFO":
{
"RESULT_INFO":
{
"PIN_NAME":["P1","P2"],
"RESULT_SCALE":-9,
"RESULT_UNITS":"A",
"RESULT_EVENT_GROUP":"Part2"
},
"LIMITS":
[{"LIMITS_LL":-30,"LIMITS_UL":20,"LIMITS_ID":"TEST_20_01"} ]
}
}
],
"PART_RESULTS" :
{
"PARAM_DATA":
[
{
"SITE_UID":"DUT_000","RESULT_ID":"10",
"R" :[ {"V":2,"PF":"P"} ],"PF_FLAG":"P"
},
{
"SITE_UID":"DUT_003","RESULT_ID":"10",
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development)
activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
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},
{
}
}
}
]
}
"R": [ {"V":6,"PF":"F"} ],"PF_FLAG":"F"
"SITE_UID":"DUT_000","RESULT_ID":"20",
"R" :[ {"V":15,"PF":"P"},{"V":17,"PF":"P"} ],"PF_FLAG":"P"
R1-1.15.2 Response Syntax Example
Table R1-29 TEST_DATA Response Example
GET:
{
"url": "",
"body":
{
"MESSAGE_LIST":
["INITIALIZATION","SHUTDOWN","STATUS","USER_STATUS","CONFIGURATION","TESTER_OS",
"TEST_PROGRAM_LOAD","LOT_START","RUN_START","RUN_END","RUN_STATUS","TEST_START",
"TEST_END","TEST_DATA","HALT","EXTERNAL","PERIPHERAL","MAINTENANCE",
"MAINTENANCE_DATA","GENERIC","LOG","FILE"]
}
}
R1-1.16 HALT Message
R1-1.16.1 Post Syntax
R1-1.16.1.1 This example shows the proper stops for an OCR reading issue.
Table R1-30 HALT Message Example
{
}
“url”:”/TEST_CELL/ZYGON/HALT”,
“body”:{
“EVENT_DTTM”:”2020-03-05T04:28:46.1061434Z”,
“HALT_TYPE” : “EQUIPMENT”,
“HALT_DESCRIPTION” : “OCR Not Ready”
}
R1-1.16.2 Response Syntax Example
Table R1-31 HALT Response Example
GET:
{
“url”: “”,
“body”:
{
“MESSAGE_LIST”:
[“INITIALIZATION”,”SHUTDOWN”,”STATUS”,”USER_STATUS”,”CONFIGURATION”,”TESTER_OS”,
“TEST_PROGRAM_LOAD”,”LOT_START”,”RUN_START”,”RUN_END”,”RUN_STATUS”,”TEST_START”,
“TEST_END”,”TEST_DATA”,”HALT”,”EXTERNAL”,”PERIPHERAL”,”MAINTENANCE”,
“MAINTENANCE_DATA”,”GENERIC”,”LOG”,”FILE”]
}
}
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development)
activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
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LETTER BALLOT
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Date: 2/9/2021
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Document Number: 6581A
Date: 2/9/2021
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R1-1.17 EXTERNAL Message
R1-1.17.1 Post Syntax
R1-1.17.1.1 This example sends a text to the DAS which contains the text “hello”
Table R1-32 EXTERNAL Message Example
{
}
"url":"/TEST_CELL/ZYGON/EXTERNAL",
"body":{
"EVENT_DTTM":"2020-03-05T04:28:46.1061434Z",
"DATA_PACKET" :
{
"MSG" : "HELLO"
}
}
R1-1.17.2 Response Syntax Example
Table R1-33 EXTERNAL Response Example
GET:
{
"url": "",
"body":
{
"MESSAGE_LIST":
["INITIALIZATION","SHUTDOWN","STATUS","USER_STATUS","CONFIGURATION","TESTER_OS",
"TEST_PROGRAM_LOAD","LOT_START","RUN_START","RUN_END","RUN_STATUS","TEST_START",
"TEST_END","TEST_DATA","HALT","EXTERNAL","PERIPHERAL","MAINTENANCE",
"MAINTENANCE_DATA","GENERIC","LOG","FILE"]
}
}
R1-1.18 PERIPHERAL Message
R1-1.18.1 Post Syntax
R1-1.18.1.1 The handler reported a JAM error.
Table R1-34 PERIPHERAL Message Example
{
}
"url":"/TEST_CELL/ZYGON/PERIPHERAL",
"body":{
"EVENT_DTTM":"2020-03-05T04:28:46.1061434Z",
"PERIPHERAL_TYPE": "HANDLER",
"PERIPHERAL_ID" : "EPSON_001",
"MESSAGE" : "JAM into Chamber 002"
}
R1-1.18.2 Response Syntax Example
Table R1-35 PERIPHERAL Response Example
GET:
{
"url": "",
"body":
{
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development)
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"MESSAGE_LIST":
["INITIALIZATION","SHUTDOWN","STATUS","USER_STATUS","CONFIGURATION","TESTER_OS",
"TEST_PROGRAM_LOAD","LOT_START","RUN_START","RUN_END","RUN_STATUS","TEST_START",
"TEST_END","TEST_DATA","HALT","EXTERNAL","PERIPHERAL","MAINTENANCE",
"MAINTENANCE_DATA","GENERIC","LOG","FILE"]
}
}
R1-1.19 MAINTENANCE Message
R1-1.19.1 Post Syntax
R1-1.19.1.1 Tester just performed a successfully autocalibration into the board HPPMU.
Table R1-36 MAINTENANCE Message Example
{
}
"url":"/TEST_CELL/ZYGON/MAINTENANCE",
"body":{
"EVENT_DTTM":"2020-03-05T04:28:46.1061434Z",
"START_OR_END": "END",
"NAME" : "Autocalibration TP012",
"COMMENT" : "Autocalibration during validation of test program Pastaga",
"TYPE" : "AUTOCAL",
"RESULT" : "PASS",
"DESCRIPTION_LIST" :
[
{"BOARD" : "HPPMU","CHANNEL" : "ch02","RESULT":"PASS" },
{"BOARD" : "HPPMU","CHANNEL" : "ch03","RESULT":"PASS" }
]
}
R1-1.19.2 Response Syntax Example
Table R1-37 MAINTENANCE Response example
GET:
{
"url": "",
"body":
{
"MESSAGE_LIST":
["INITIALIZATION","SHUTDOWN","STATUS","USER_STATUS","CONFIGURATION","TESTER_OS",
"TEST_PROGRAM_LOAD","LOT_START","RUN_START","RUN_END","RUN_STATUS","TEST_START",
"TEST_END","TEST_DATA","HALT","EXTERNAL","PERIPHERAL","MAINTENANCE",
"MAINTENANCE_DATA","GENERIC","LOG","FILE"]
}
}
R1-1.20 MAINTENANCE DATA Message
R1-1.20.1 Post Syntax
R1-1.20.1.1 Tester performed a calibration into the board HPPMU
Table R1-38 MAINTENANCE_DATA Message Example
{
"url":"/TEST_CELL/ZYGON/MAINTENANCE_DATA",
"body":{
"EVENT_DTTM":"2020-03-05T04:28:46.1061434Z",
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development)
activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
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}
“LOG” :
[
{“BOARD” : “HPPMU”,”CHANNEL” :”ch02”,”RESULT”:”PASS”,”VALUE”:0.256 },
{“BOARD” : “HPPMU”,”CHANNEL” :”ch03”,”RESULT”:”PASS”,”VALUE”:02568 }
]
}
R1-1.20.2 Response Syntax Example
Table R1-39 MAINTENANCE_DATA Response Example
GET:
{
"url": "",
"body":
{
"MESSAGE_LIST":
["INITIALIZATION","SHUTDOWN","STATUS","USER_STATUS","CONFIGURATION","TESTER_OS",
"TEST_PROGRAM_LOAD","LOT_START","RUN_START","RUN_END","RUN_STATUS","TEST_START",
"TEST_END","TEST_DATA","HALT","EXTERNAL","PERIPHERAL","MAINTENANCE",
"MAINTENANCE_DATA","GENERIC","LOG","FILE"]
}
}
R1-1.21 GENERIC DATA Message
R1-1.21.1 Post Syntax
R1-1.21.1.1 This message was issued from a Teradyne tester. It will inform the DAS of the different folder size (in
GB). The test program sandbox is 3.4GB
Table R1-40 GENERIC Message Example
{
}
"url":"/TEST_CELL/ZYGON/GENERIC",
"body":{
"EVENT_DTTM":"2020-03-05T04:28:46.1061434Z",
"SOURCE": "TCS",
"TYPE": "LOG_FOLDERS",
"MES_ARRAY" :
[
{"ter_FOLDER":"TCS_LOG","ter_SIZE":1.2},
{"ter_FOLDER":"TP_SANDBOX","ter_SIZE":3.4}
],
}
R1-1.21.2 Response Syntax Example
Table R1-41 GENERIC Response Example
GET:
{
"url": "",
"body":
{
"MESSAGE_LIST":
["INITIALIZATION","SHUTDOWN","STATUS","USER_STATUS","CONFIGURATION","TESTER_OS",
"TEST_PROGRAM_LOAD","LOT_START","RUN_START","RUN_END","RUN_STATUS","TEST_START",
"TEST_END","TEST_DATA","HALT","EXTERNAL","PERIPHERAL","MAINTENANCE",
"MAINTENANCE_DATA","GENERIC","LOG","FILE"]
}
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development)
activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
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}
R1-1.22 LOG Message
R1-1.22.1 Post Syntax
R1-1.22.1.1 TCS notified the DAS that tester encountered an error into the module Mod02. It has been generated by
the software SOFTX.
Table R1-42 Log Message Example
{
}
"url":"/TEST_CELL/ZYGON/LOG",
"body":{
"EVENT_DTTM":"2020-03-05T04:28:46.1061434Z",
"TYPE": "ERROR",
"SOURCE": "SOFTX",
"MESSAGES" :
[
{"DATA": {
"ERROR_ID" : "ER158", "ERROR_DESC" : "This is an critical error",
"SOURCE": "MOD02"
},
{"TEXT":"Critial error into MOD02"}
]
}
R1-1.22.2 Response Syntax Example
R1-1.22.2.1 The DAS is requesting to enable the TRACE mode for the SOFTX software.
Table R1-43 LOG Response Example
GET:
{
"url": "",
"body":
{
"LOG_LIST" : [ { "LOG_LEVEL" : "TRACE" , "SOURCE" : "SOFTX" } ],
"MESSAGE_LIST":
["INITIALIZATION","SHUTDOWN","STATUS","USER_STATUS","CONFIGURATION","TESTER_OS",
"TEST_PROGRAM_LOAD","LOT_START","RUN_START","RUN_END","RUN_STATUS","TEST_START",
"TEST_END","TEST_DATA","HALT","EXTERNAL","PERIPHERAL","MAINTENANCE",
"MAINTENANCE_DATA","GENERIC","LOG","FILE"]
}
}
R1-1.23 FILE Message
R1-1.23.1 Post Syntax
R1-1.23.1.1 TCS notified the DAS that a new STDF file is OPENED. The file is located in
C:\STDF\MYSTDF.stdf_tmp
Table R1-44 FILE Message Example
{
"url":"/TEST_CELL/ZYGON/FILE",
"body":{
"EVENT_DTTM":"2020-03-05T04:28:46.1061434Z",
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development)
activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
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}
“FILES” : [
{ "TYPE": "DATALOG","FORMAT": "STDF",
"VERSION": "4.7", "STATUS":"OPENED",
"PATH": "C:\STDF\MYSTDF.stdf_tmp",
"SIZE" : 0
}
]
}
R1-1.23.2 Response Syntax Example
Table R1-45 FILE Response Example
GET:
{
"url": "",
"body":
{
"MESSAGE_LIST":
["INITIALIZATION","SHUTDOWN","STATUS","USER_STATUS","CONFIGURATION","TESTER_OS",
"TEST_PROGRAM_LOAD","LOT_START","RUN_START","RUN_END","RUN_STATUS","TEST_START",
"TEST_END","TEST_DATA","HALT","EXTERNAL","PERIPHERAL","MAINTENANCE",
"MAINTENANCE_DATA","GENERIC","LOG","FILE"]
}
}
NOTICE: SEMI makes no warranties or representations as to the suitability of the Standards and Safety Guidelines
set forth herein for any particular application. The determination of the suitability of the Standard or Safety Guideline
is solely the responsibility of the user. Users are cautioned to refer to manufacturer’s instructions, product labels,
product data sheets, and other relevant literature, respecting any materials or equipment mentioned herein. Standards
and Safety Guidelines are subject to change without notice.
By publication of this Standard or Safety Guideline, SEMI takes no position respecting the validity of any patent rights
or copyrights asserted in connection with any items mentioned in this Standard or Safety Guideline. Users of this
Standard or Safety Guideline are expressly advised that determination of any such patent rights or copyrights and the
risk of infringement of such rights are entirely their own responsibility.
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
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