®
USER MANUAL
COMPex 100/200/300
Series
(03/00)
Part No.: 262 349
U.S.A.
Lambda Physik Inc.
3201 West Commercial Blvd.
Lakeshore Business Center, Suite 110
Ft. Lauderdale, FL 33309, USA
Tel.:
Fax:
eMail:
(9 54) 4 86-15 00
(8 00) EXCIMER
(9 54) 4 86-15 01
salesusa@lambdaphysik.com
GERMANY
Lambda Physik GmbH
Hans-Böckler-Strasse 12
D – 37079 Göttingen, Germany
Tel.:
Fax:
eMail:
+49 / 551 / 69 38-0
+49 / 551 / 6 86 91
salesgermany@lambdaphysik.com
JAPAN
Lambda Physik Japan Co. Ltd.
German Industry Center
1-18-2 Hakusan
J-Yokohama 226-0006, Midori-ku
Tel.:
Fax:
04-59 39-78 48
04-59 39-78 49
Marubun Corp.
Marubun Daiya Bldg.
8-1 Nihonbashi Odenmacho
Chuo-ku, Tokyo 103 Japan
Tel.:
Fax:
03-36 39-98 11
03-36 62-13 49
TABLE OF CONTENTS
1
1
1.1
Purpose, Availability and Use . . . . . . . . . . . . . . 1
1.2
Intended Audience . . . . . . . . . . . . . . . . . . . 2
1.3
Numbering of Chapters, Pages and Instructions . . . . 2
1.4
Use of Signal Words and Symbols . . . . . . . . . . . 3
1.4.1
Signal Words . . . . . . . . . . . . . . . . . 3
1.4.2
Symbols . . . . . . . . . . . . . . . . . . . . 4
1.5
Overview of Chapters . . . . . . . . . . . . . . . . . . 5
1.6
Patents . . . . . . . . . . . . . . . . . . . . . . . . . 6
1.7
Trademarks . . . . . . . . . . . . . . . . . . . . . . . 8
1.8
Conversion Tables . . . . . . . . . . . . . . . . . . . 9
1.8.1
Measurements . . . . . . . . . . . . . . . . 9
1.8.2
Temperatures . . . . . . . . . . . . . . . . . 9
2
2.1
A0300COM.00
USER GUIDE TO THE MANUAL
EXCIMER LASER FUNDAMENTALS
Excimer Laser . . . . . . . . . . . .
2.1.1
The NovaTube® Innovation
2.1.2
Optional Accessories . . .
2.1.3
Denomination of Lasers
According to ISO 11145 . .
2.1.4
System Diagrams . . . . .
11
. . . . . . . . . 11
. . . . . . . . . 11
. . . . . . . . . 12
. . . . . . . . . 12
. . . . . . . . . 13
2.2
Laser Control . . . . . . . . . . . . . . . . . . . . . 17
2.3
Laser Tube . . . . . . . . . . . . . . . . . . . . . . 19
2.4
Thyratron . . . . . . . . . . . . . . . . . . . . . . . 21
2.5
Energy . . . . . . . . . . . . . . . . . . . . . . . . 22
2.5.1
Energy Measurement . . . . . . . . . . . . 22
2.5.2
Energy Management . . . . . . . . . . . . 22
2.6
Lambda Safety Systems . . . . . . . . . . . . . .
2.6.1
Monitoring Critical Modules by Watchdogs
2.6.2
Selftest of the Data Ring . . . . . . . . .
2.6.3
Interlocks . . . . . . . . . . . . . . . . .
2.6.4
Housing Interlock Switch . . . . . . . . .
2.6.5
Door Interlock Switch
and Laser Warning Light . . . . . . . . .
LAMBDA PHYSIK LASERTECHNIK - 03/00
.
.
.
.
.
28
28
28
29
29
. 29
TABLE OF CONTENTS - I
TABLE OF CONTENTS
3
3.1
3.2
3.3
4
31
General Safety Aspects . . . . . . . . . . . . . . . . 31
3.1.1
Basic Operation and Designated Use
of the COMPex . . . . . . . . . . . . . . . 31
3.1.2
Organizational Measures . . . . . . . . . . 32
3.1.3
Selection and Qualification of Personnel Basic Responsibilities . . . . . . . . . . . . 34
3.1.4
Safety Instructions Governing
Specific Operational Phases . . . . . . . . 34
Specific Safety Aspects . . . . . . . . . . . . . . . . 37
3.2.1
Physical Hazards . . . . . . . . . . . . . . 38
3.2.2
Personnel Safety . . . . . . . . . . . . . . 42
3.2.3
Constructive Safety Features . . . . . . . 50
Safety Compliance List . . . . . . . . . . . . . . . . 54
LABELS
55
4.1
Labels on the Outside of the Laser
(all countries except Germany) . . . . . . . . . . . . 56
4.2
Labels Inside the Laser
(all countries except Germany) . . . . . . . . . . . . 60
5
TABLE OF CONTENTS - II
SAFETY
SPECIFICATIONS, REQUIREMENTS
AND ACCESSORIES
63
5.1
Laser Specifications . . . . . . . . . . . . . . . . . . 64
5.2
Physical Dimensions . . . . . . . . . . . . . . . . . 66
5.3
Electrical Requirements . . . . . . . . . . . . . . . . 67
5.3.1
Power Supply . . . . . . . . . . . . . . . . 67
5.3.2
Serial Interface (RS232C) . . . . . . . . . . 68
5.3.3
Remote Socket . . . . . . . . . . . . . . . 68
5.3.4
Trigger Signal Ports . . . . . . . . . . . . . 69
5.4
Cooling Water . . . . . . . . . . . . . . . . . . . . . 70
5.5
Gas Requirements . . . . . . . . . . . . . . . . . . 71
5.5.1
Gases Required . . . . . . . . . . . . . . . 72
5.5.2
Optimum Gas Mixtures . . . . . . . . . . . 74
5.5.3
Pressure Regulators
5.5.4
Gas Cabinets . . . . . . . . . . . . . . . . 76
. . . . . . . . . . . . 76
USER MANUAL COMPex
TABLE OF CONTENTS
5.6
Air Intake and Exhaust . . . . . . . . . . . . . . . . 77
5.7
Beam Exit Position . . . . . . . . . . . . . . . . . . 77
5.8
Environmental Conditions . . . . . . . . . . . . . . . 78
5.9
5.8.1
Transport and Storage Conditions
5.8.2
Operational Environmental Conditions . . . 78
Vacuum Pump
. . . . . 78
. . . . . . . . . . . . . . . . . . . . 79
5.10 Halogen Filter . . . . . . . . . . . . . . . . . . . . . 79
6
6.1
81
Transport . . . . . . . . . . . . . . . . . . . . . . . 81
6.1.1
Safety . . . . . . . . . . . . . . . . . . . . 81
6.1.2
Transport and Storage Conditions
6.1.3
Floor Loads . . . . . . . . . . . . . . . . . 83
6.1.4
Transport Packaging . . . . . . . . . . . . 85
6.1.5
Transport / Lifting with Rigid Packaging . . . 86
6.1.6
Remove Rigid Packaging . . . . . . . . . . 87
6.1.7
Transport / Lifting without Rigid Packaging . 89
6.1.8
Remove Anti-Static Inner Cover
. . . . . 83
. . . . . . 90
6.2
Transport Locks . . . . . . . . . . . . . . . . . . . . 91
6.3
Install Remote Socket . . . . . . . . . . . . . . . . . 91
6.4
Connect Water Lines
(COMPex 110 and COMPex 205 only) . . . . . . . . 92
6.5
Electrical Line Installation . . . . . . . . . . . . . . . 94
6.6
A0300COM.00
INSTALLATION
6.7
6.5.1
Connect the Vacuum Pump . . . . . . . . . 94
6.5.2
Connect the Handheld Keypad . . . . . . . 95
6.5.3
Connect a Remote PC . . . . . . . . . . . 97
6.5.4
Connect the Main Power Supply Line . . . . 98
Exhaust Lines Installation . . . . . . . . . . . . . . . 99
6.6.1
Install Exhaust Line of Laser Device Housing 99
6.6.2
Install Laser Tube Exhaust Line
(Including the Vacuum Pump) . . . . . . . . 100
Install Gas Lines
LAMBDA PHYSIK LASERTECHNIK - 03/00
. . . . . . . . . . . . . . . . . . . 104
TABLE OF CONTENTS - III
TABLE OF CONTENTS
7
OPERATION
7.1
Overview of this Chapter . . . . . . . . . . . . . . . 107
7.2
Fundamental Laser Operations . . . . . . . . . . . . 109
7.3
7.4
7.5
7.6
7.7
7.2.1
Switch on the Laser Device . . . . . . . . . 109
7.2.2
Start Laser Operation . . . . . . . . . . . . 111
7.2.3
Stop Laser Operation . . . . . . . . . . . . 111
7.2.4
Switch off the Laser Device . . . . . . . . . 112
7.2.5
Check the Beam Path . . . . . . . . . . . . 112
7.2.6
Adjust the Cooling Water Flow Rate
(COMPex 110 and 205 only) . . . . . . . . 112
7.2.7
Check Parameter Setting . . . . . . . . . . 113
Gas Menu . . . . . . . . . . . . . . . . . . . . . . . 114
7.3.1
Select the Gas Menu . . . . . . . . . . . . 114
7.3.2
Reset the Gas Menu to Factory Settings . . 115
7.3.3
Select the Gas Mode . . . . . . . . . . . . 116
Change Triggering
7.8
. . . . . . . . . . . . . . . . . . 117
7.4.1
Change the Trigger Mode . . . . . . . . . . 117
7.4.2
Change the Repetition Rate
. . . . . . . . 118
Running Modes . . . . . . . . . . . . . . . . . . . . 119
7.5.1
Select the Running Mode . . . . . . . . . . 120
7.5.2
Adjust the Energy Constant (EGY) Mode . . 121
7.5.3
Adjust the High Voltage Constant (HV) Mode 121
7.5.4
Choose Charge On Demand (COD)
. . . . 122
Pulse Counter . . . . . . . . . . . . . . . . . . . . . 124
7.6.1
Select the Pulse Counter . . . . . . . . . . 124
7.6.2
Reset the User Counter . . . . . . . . . . . 125
Emergency Fill . . . . . . . . . . . . . . . . . . . . 126
7.7.1
TABLE OF CONTENTS - IV
107
Manual Fill with Inert Gas . . . . . . . . . . 126
Additionals
. . . . . . . . . . . . . . . . . . . . . . 128
7.8.1
Temperature Control (optional) . . . . . . . 128
7.8.2
Manual Halogen Injection (for service only!) . 129
USER MANUAL COMPex
TABLE OF CONTENTS
8
MAINTENANCE
131
8.1
Overview of this Chapter . . . . . . . . . . . . . . . 131
8.2
Laser Logbook
8.3
Maintenance Schedule . . . . . . . . . . . . . . . . 133
8.4
Gas System Maintenance . . . . . . . . . . . . . . . 134
8.5
. . . . . . . . . . . . . . . . . . . . 132
8.4.1
Flush Gas Lines . . . . . . . . . . . . . . . 134
8.4.2
Purge Gas Lines
8.4.3
New Gas Fill . . . . . . . . . . . . . . . . . 139
8.4.4
Replacing Gas Cylinders . . . . . . . . . . 143
. . . . . . . . . . . . . . 137
Laser Tube Maintenance . . . . . . . . . . . . . . . 145
8.5.1
Purge Laser Tube . . . . . . . . . . . . . . 145
8.5.2
Re-Passivate Laser Tube . . . . . . . . . . 146
8.6
Tube Optics Maintenance . . . . . . . . . . . . . . . 148
8.7
Energy Monitor Calibration . . . . . . . . . . . . . . 159
8.8
Electrical Maintenance . . . . . . . . . . . . . . . . 165
8.9
8.8.1
Check Thyratron
. . . . . . . . . . . . . . 165
8.8.2
Adjust Thyratron . . . . . . . . . . . . . . . 167
Halogen Filter Maintenance . . . . . . . . . . . . . . 169
8.9.1
Check the Halogen Filter Filling Ratio . . . . 169
8.9.2
Halogen Filter Exchange . . . . . . . . . . 170
8.9.3
Reset Halogen Filter Filling Ratio . . . . . . 173
8.10 Prepare Gas System for Transportation and Storage . 174
A0300COM.00
9
8.10.1
Transportation Fill
. . . . . . . . . . . . . 174
8.10.2
Disconnecting Gas Lines . . . . . . . . . . 176
REMOTE SOFTWARE
179
9.1
Nomenclature within this Chapter . . . . . . . . . . . 179
9.2
Remote Software Basics . . . . . . . . . . . . . . . 180
9.3
9.2.1
Choosing Remote Software . . . . . . . . . 180
9.2.2
Software Syntax . . . . . . . . . . . . . . . 180
Operation Commands (OPMODE) . . . . . . . . . . 181
9.3.1
OPMODE=CAPACITY RESET . . . . . . . 182
9.3.2
OPMODE=CONT . . . . . . . . . . . . . . 184
9.3.3
OPMODE=ENERGY CAL . . . . . . . . . . 184
9.3.4
OPMODE=FLUSH <xy> LINE
LAMBDA PHYSIK LASERTECHNIK - 03/00
. . . . . . . 184
TABLE OF CONTENTS - V
TABLE OF CONTENTS
9.4
TABLE OF CONTENTS - VI
9.3.5
9.3.6
OPMODE=FLUSHING . . . . . . . . . . . 184
OPMODE=HI . . . . . . . . . . . . . . . . 186
9.3.7
OPMODE=LL OFF . . . . . . . . . . . . . 186
9.3.8
OPMODE=MANUAL FILL INERT . . . . . . 186
9.3.9
OPMODE=NEW FILL . . . . . . . . . . . . 187
9.3.10
OPMODE=OFF . . . . . . . . . . . . . . . 187
9.3.11
OPMODE=ON . . . . . . . . . . . . . . . . 190
9.3.12
OPMODE=PASSIVATION FILL . . . . . . . 191
9.3.13
OPMODE=PGR . . . . . . . . . . . . . . . 191
9.3.14
OPMODE=PURGE <xy> LINE . . . . . . . 192
9.3.15
OPMODE=PURGE RESERVOIR . . . . . . 192
9.3.16
OPMODE=SAFETY FILL . . . . . . . . . . 193
9.3.17
OPMODE=SKIP . . . . . . . . . . . . . . . 193
9.3.18
OPMODE=TRANSPORT FILL . . . . . . . 193
Parameter Commands . . . . . . . . . . . . . . . . 194
9.4.1
BUFFER= . . . . . . . . . . . . . . . . . . 194
9.4.2
CAP.SET=
9.4.3
COD= . . . . . . . . . . . . . . . . . . . . 195
9.4.4
COUNTER= . . . . . . . . . . . . . . . . . 195
9.4.5
COUNTS= . . . . . . . . . . . . . . . . . . 196
9.4.6
EGY= . . . . . . . . . . . . . . . . . . . . 196
9.4.7
EGY RANGE= . . . . . . . . . . . . . . . . 197
9.4.8
EGY SET=
9.4.9
FILTER=
9.4.10
FILTER CONTAMINATION= . . . . . . . . 198
9.4.11
GASMODE= . . . . . . . . . . . . . . . . . 198
9.4.12
HALOGEN= . . . . . . . . . . . . . . . . . 198
9.4.13
HV= . . . . . . . . . . . . . . . . . . . . . 199
9.4.14
INERT= . . . . . . . . . . . . . . . . . . . 199
9.4.15
MENU= . . . . . . . . . . . . . . . . . . . 200
9.4.16
MODE= . . . . . . . . . . . . . . . . . . . 200
9.4.17
OPMODE= . . . . . . . . . . . . . . . . . 201
9.4.18
RARE= . . . . . . . . . . . . . . . . . . . 201
9.4.19
REPRATE= . . . . . . . . . . . . . . . . . 201
9.4.20
ROOMTEMP= . . . . . . . . . . . . . . . . 202
9.4.21
TEMP CONTROL= . . . . . . . . . . . . . 202
9.4.22
TIMEOUT= . . . . . . . . . . . . . . . . . 202
9.4.23
TRIGGER= . . . . . . . . . . . . . . . . . 203
. . . . . . . . . . . . . . . . . 195
. . . . . . . . . . . . . . . . . 197
. . . . . . . . . . . . . . . . . . 197
USER MANUAL COMPex
TABLE OF CONTENTS
A0300COM.00
9.5
9.6
Polling Commands . . . . . . . . . . . . . . . . . . 204
9.5.1
ACCU? . . . . . . . . . . . . . . . . . . . 204
9.5.2
BUFFER? . . . . . . . . . . . . . . . . . . 204
9.5.3
CAP.LEFT? . . . . . . . . . . . . . . . . . 204
9.5.4
COD? . . . . . . . . . . . . . . . . . . . . 204
9.5.5
COUNTER? . . . . . . . . . . . . . . . . . 205
9.5.6
COUNTS? . . . . . . . . . . . . . . . . . . 205
9.5.7
EGY? . . . . . . . . . . . . . . . . . . . . 205
9.5.8
EGY SET?
9.5.9
EGY RANGE? . . . . . . . . . . . . . . . . 205
9.5.10
FILTER? . . . . . . . . . . . . . . . . . . . 205
9.5.11
FILTER CONTAMINATION? . . . . . . . . 206
9.5.12
GASMODE? . . . . . . . . . . . . . . . . . 206
9.5.13
HALOGEN? . . . . . . . . . . . . . . . . . 206
9.5.14
HV? . . . . . . . . . . . . . . . . . . . . . 206
9.5.15
INERT? . . . . . . . . . . . . . . . . . . . 206
9.5.16
INTERLOCK? . . . . . . . . . . . . . . . . 206
9.5.17
LEAKRATE?
9.5.18
MENU? . . . . . . . . . . . . . . . . . . . 206
9.5.19
MODE? . . . . . . . . . . . . . . . . . . . 207
9.5.20
OPMODE? . . . . . . . . . . . . . . . . . 207
9.5.21
POWER STABILIZATION ACHIEVED? . . . 207
9.5.22
PRESSURE? . . . . . . . . . . . . . . . . 207
9.5.23
PULSE DIFF? . . . . . . . . . . . . . . . . 207
9.5.24
RARE? . . . . . . . . . . . . . . . . . . . 207
9.5.25
RESERVOIR TEMP? . . . . . . . . . . . . 207
9.5.26
REPRATE? . . . . . . . . . . . . . . . . . 208
9.5.27
ROOMTEMP? . . . . . . . . . . . . . . . . 208
9.5.28
TEMP? . . . . . . . . . . . . . . . . . . . 208
9.5.29
TEMP CONTROL? . . . . . . . . . . . . . 208
9.5.30
TIMEOUT? . . . . . . . . . . . . . . . . . 208
9.5.31
TOTALCOUNTER? . . . . . . . . . . . . . 208
9.5.32
TRIGGER? . . . . . . . . . . . . . . . . . 208
9.5.33
TYPE OF LASER? . . . . . . . . . . . . . 209
9.5.34
VERSION? . . . . . . . . . . . . . . . . . 209
. . . . . . . . . . . . . . . . . 205
. . . . . . . . . . . . . . . . 206
Priority of ON Code Messages . . . . . . . . . . . . 210
LAMBDA PHYSIK LASERTECHNIK - 03/00
TABLE OF CONTENTS - VII
TABLE OF CONTENTS
10 TROUBLESHOOTING
211
10.1 Overview of this Chapter . . . . . . . . . . . . . . . 211
10.2 Warnings and Error Messages . . . . . . . . . . . . 212
10.2.1
Duty Cycle Exceeded (ON:03) . . . . . . . 214
10.2.2
Energy Cal. Error (OFF:7) . . . . . . . . . . 214
10.2.3
Error Temperature Measurement (OFF:12) . 214
10.2.4
Fatal Error, COM-Datalink (-) . . . . . . . . 214
10.2.5
Fatal Error, LWL-Datalink (OFF:5) . . . . . 215
10.2.6
Fatal Error, Watchdog (OFF:4) . . . . . . . 218
10.2.7
Fluorine Valve Not Opened (OFF:13; ON:13) 218
10.2.8
Halogen Pressure Too High (OFF:33)
10.2.9
HI in Prep (ON:34)
. . . 218
. . . . . . . . . . . . . 218
10.2.10 Inert Valve Closed (OFF:39) . . . . . . . . 219
10.2.11 Interlock XXX(OFF:1) . . . . . . . . . . . . 219
10.2.12 Leak!-Check Windows
(FLUSHING LEAKTEST CONT:30) . . . . . 219
10.2.13 Low Light (OFF:26) . . . . . . . . . . . . . 220
10.2.14 Low Pressure (OFF:10; ON:10) . . . . . . . 220
10.2.15 New Gas Fill Needed (OFF:8; ON:8) . . . . 220
10.2.16 No Capacity Left (OFF:11) . . . . . . . . . 221
10.2.17 No Gas Flow (XX:3) . . . . . . . . . . . . . 221
10.2.18 No Vacuum (OFF:9) . . . . . . . . . . . . . 222
10.2.19 No Vacuum (ON:9) . . . . . . . . . . . . . 223
10.2.20 Not Available (OFF:35) . . . . . . . . . . . 223
10.2.21 OFF:41 (OFF:41) . . . . . . . . . . . . . . 223
10.2.22 ON:40 (ON:40) . . . . . . . . . . . . . . . 223
10.2.23 ON:41 (ON:41) . . . . . . . . . . . . . . . 224
10.2.24 Polling (OFF:6) . . . . . . . . . . . . . . . 224
10.2.25 Preset Energy too High (OFF:2; ON:2) . . . 224
10.2.26 RAM Check Error (OFF:29) . . . . . . . . . 225
10.2.27 Timeout (OFF:31) . . . . . . . . . . . . . . 225
10.2.28 Warm-up 8min (OFF:21) . . . . . . . . . . 226
10.2.29 Warning! Repetition Rate
for COD 50 Hz (ON:37) . . . . . . . . . . . 226
10.2.30 Wrong Pressure (OFF:27)
TABLE OF CONTENTS - VIII
. . . . . . . . . 227
USER MANUAL COMPex
TABLE OF CONTENTS
10.3 Interlocks . . . . . . . . . . . . . . . . . . . . . . . 228
10.3.1
Overload
. . . . . . . . . . . . . . . . . . 229
10.3.2
Remote . . . . . . . . . . . . . . . . . . . 230
10.3.3
Temp.Res.
10.3.4
Ventilation . . . . . . . . . . . . . . . . . . 232
. . . . . . . . . . . . . . . . . 231
10.4 Laser Pulses without Triggering (Self-Firing) . . . . . 233
10.5 No Trigger Signal . . . . . . . . . . . . . . . . . . . 233
10.6 Corrosion in Gas System . . . . . . . . . . . . . . . 234
10.7 Gas Leak . . . . . . . . . . . . . . . . . . . . . . . 235
10.7.1
Leak Test Gas Lines . . . . . . . . . . . . 235
10.7.2
Leak Test Laser Tube . . . . . . . . . . . . 236
10.8 Laser Device Does Not Start . . . . . . . . . . . . . 238
10.9 Beam Energy Too Low . . . . . . . . . . . . . . . . 239
10.10Low Light . . . . . . . . . . . . . . . . . . . . . . . 244
10.11Fuses . . . . . . . . . . . . . . . . . . . . . . . . . 249
10.11.1 Fuses Inside COMPex
10.11.2 Fuses Outside COMPex
11 WIRING DIAGRAMS /
DIAGRAM SCHEMATICS
. . . . . . . . . . . 249
. . . . . . . . . . 250
251
11.1 Gas Flow Diagrams . . . . . . . . . . . . . . . . . . 251
11.2 Layout of the COMPex . . . . . . . . . . . . . . . . 254
11.3 Maintenance Areas . . . . . . . . . . . . . . . . . . 256
11.4 Wiring Diagrams
259
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12 GLOSSARY
. . . . . . . . . . . . . . . . . . . 258
LAMBDA PHYSIK LASERTECHNIK - 03/00
TABLE OF CONTENTS - IX
TABLE OF CONTENTS - X
USER MANUAL COMPex
1
USER GUIDE TO THE MANUAL
This chapter outlines:
¯ the purpose as well as the necessary availability and use of
the instrucation manual
¯ the persons, for whom the manual is intended,
¯ how the manual is organized,
¯ the use of signal words and safety signs in the manual,
¯ the contents of each chapter.
1.1
Purpose, Availability and Use
This instruction manual is intended to familiarize the user with
the COMPex and its designated use.
The instruction manual contains important information to
installing and operate the COMPex safely, properly and most
efficiently. Observing these instructions helps to avoid danger,
reduce repair costs and downtimes and increase the reliability
and lifetime of the COMPex.
The instruction manual must always be available wherever the
COMPex is in use.
The instruction manual must be read and applied by any
person in charge of carrying out work with and on the
COMPex, e.g.:
¯ operation including setting up, troubleshooting in the course
of work, removal of production waste, care and disposal of
consumables,
A0300COM.00
¯ maintenance (servicing, inspection, repair) and/or
¯ transport
The instruction manual is to be supplemented by the
respective national rules and regulations for accident
prevention and environmental protection.
LAMBDA PHYSIK LASERTECHNIK - 03/00
1
USER GUIDE TO THE MANUAL
1.2
Intended Audience
This manual is intended for:
¯ Operators, who have completed the COMPex Basic
Operations course. An operator operates the machine.
¯ Process engineers, who have completed the COMPex
Advanced Operations course. A process engineer writes
jobs for production and other purposes, and looks for
production quantity and quality.
¯ Any reader who wants to acquire general knowledge of the
COMPex excimer laser.
1.3
Numbering of Chapters, Pages and
Instructions
The pages of this manual are numbered continuously. The
page number appears in the lower outside corner of every
page.
The chapters are numbered continuously. The name of the
chapter appears in the upper outside corner of every even
page, the name of the main section appears in the upper
outside corner of the corresponding odd page.
Each chapter ends with an even page number. If this last
(even) page has no header line, it is intentionally left blank.
Each step within a procedure is sequentially numbered.
2
User Manual COMPex
Use of Signal Words and Symbols
1.4
Use of Signal Words and Symbols
Contained within this manual are sections in which particular
hazards are defined or special attention is drawn to particular
conditions. These are indicated with signal words according to
ANSI Z-535.2-1991 and safety symbols (pictorial hazard
alerts) according to ANSI Z535.3-1991.
The signal words are defined in Section 1.4.1.
The safety symbols are defined in Section 1.4.2.
1.4.1
Signal Words
Four signal words are used in this manual: DANGER,
WARNING, CAUTION and NOTE.
The signal words DANGER, WARNING and CAUTION
designate a degree or level of hazard:
DANGER
Indicates an imminently hazardous situation which, if not
avoided, will result in death or serious injury.
WARNING
Indicates a potentially hazardous situation which, if not
avoided, could result in death or serious injury.
CAUTION
Indicates a potentially hazardous situation which, if not
avoided, may result in minor or moderate injury. It is also
used to alert against unsafe practices that may result in
property damage.
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NOTE
Used to define sections, where particular attention should be
paid to ensure efficient operation or servicing of the laser.
LAMBDA PHYSIK LASERTECHNIK - 03/00
3
USER GUIDE TO THE MANUAL
1.4.2
Symbols
The signal words DANGER, WARNING, and CAUTION are
always emphasized with a safety symbol. These safety
symbols are used to indicate special hazards. They are used
regardless the hazard level:
This symbol is combined with the signal words DANGER,
WARNING, CAUTION to indicate a hazardous situation caused
by laser radiation.
This symbol is combined with the signal words DANGER,
WARNING, CAUTION to indicate a hazardous situation caused
by electricity.
This symbol is combined with the signal words DANGER,
WARNING, CAUTION to indicate a hazardous situation caused
by toxic substances.
This symbol is combined with the signal words DANGER,
WARNING, CAUTION to indicate a hazardous situation caused
by flammable substances.
This symbol is combined with the signal words DANGER,
WARNING, CAUTION to indicate a hazardous situation caused
by other circumstances.
The symbol for the signal word “NOTE”:
This symbol is combined with the signal word NOTE to indicate
important information.
4
User Manual COMPex
Overview of Chapters
1.5
Overview of Chapters
•
•
Chapter 1 (this chapter).
Chapter 2 provides the reader with a short overview of
system elements and a description of different subsystems.
It introduces fundamental functional concepts such as
running modes, and familiarizes the reader with how the
system is organized and functions.
•
Chapter 3 explains safety. The main physical hazards as
well as personal and construction precautions are described.
Read this chapter before performing any task on the
system.
•
Chapter 4 provides an overview of hazard signs and
identification labels.
•
Chapter 5 describes the specifications, installation
requirements, conditions of transport and operation, and
accessories delivered with the laser.
•
•
Chapter 6 describes the installation of the COMPex.
Chapter 7 contains instructions on how to start and operate
the system.
Chapter 8 describes fundamental maintenance routines,
which can be performed by instructed operators.
•
Chapter 9 provides an overview of the remote part of the
software.
•
Chapter 10 explains what action the operator can take
when errors occur and how to trace errors.
•
Chapter 11 gives an overview of wiring diagrams and
schematics.
•
Chapter 12 is a glossary.
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•
LAMBDA PHYSIK LASERTECHNIK - 03/00
5
USER GUIDE TO THE MANUAL
1.6
Patents
Lambda Physik GmbH is owner of the following patents:
Germany: P 32 12 928.9
“Entladungsgepumpter Laser”
US Patent # 4,534,034
“Discharge-pumped laser”
Germany: P 33 35 690.4
“Vorrichtung zum Erzeugen von
Hochleistungs-Hochspannungsimpulsen hoher Wiederholfrequenz”
Germany: P 38 17145.7
“Elektrode für gepulste Gaslaser
und ihre Verwendung”
Germany: G 88 17 197.3
“Elektrode für gepulste Gaslaser”
US Patent # 4,860,300
“Electrode for pulsed gas lasers”
Germany: P 37 14 503.7
“Steuerschaltung für einen
gepulsten Gaslaser und Verfahren
zum Initialisieren der
Steuerschaltung”
US Patent #4,916,707
“Control circuit for a pulsed
gas laser”
Japan: 2 641 493
“Control circuit for a pulsed
gas laser”
US Patent # 4,905,243
“Method and apparatus for
stabilizing the frequency of a
laser beam”
US Patent # 4,993,042
“Device for mounting a window
on a gas discharge laser”
US Patent # 4,980,894
“Ignitor for the preionization
of a gas discharge laser”
US Patent # 4,951,295
“Preionization means for a gas
discharge laser”
Germany: P 40 03 841.6-09 “Laserresonator”
Germany: P 40 09 850.8-09 “Vorrichtung zum Reinigen von
Lasergas”
Germany: P 42 06 803.7-09 “Verfahren zum Nachfüllen von
Halogengas in das Gasreservoir
eines Excimerlasers”
6
User Manual COMPex
Patents
US Patent # 5,396,514
“Excimer laser comprising a gas
reservoir and a collecting
receptacle and a method of
refilling the gas reservoir of
the laser”
Germany: G 92 08 936.4
“Laserresonator”
Germany: P 42 33 634.1
“Elektroden für die Entladungseinheit eines Excimerlasers”
US Patent # 5,347,532
“Laser having at least one anode
and one cathode for preionization
and/or discharge”
Japan: Hei 5-262 989/93
“Laser having at least one anode
and one cathode for preionization
and/or discharge”
US Patent # 4,977,573
“Excimer laser output
control device”
US Patent # 4,611,270
“Method and means of controlling
the output of a pulsed laser”
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Germany: P 43 35 079.8-33 “Elektroden in einer Fluor
enthaltenden Entladungseinheit
eines gepulsten Gasentladungslasers”
Germany: G 93 20 768.9
“Elektroden in einer Fluor
enthaltenden Entladungseinheit
eines gepulsten Gasentladungslasers”
Germany: G 94 01 808.1
“Vorrichtung zum Regeln der
Temperatur von Lasergas,
insbesondere eines Excimerlasers”
Germany: 295 20 820.1
“Laserröhre für halogenhaltige
Gasentladungslaser”
US Patent # 4,393,505
“Gas discharge laser having
a buffer gas of neon”
US Patent # 4,340,968
“Rare gas hydrogen-halide
excimer laser with
hydrogen additive”
LAMBDA PHYSIK LASERTECHNIK - 03/00
7
USER GUIDE TO THE MANUAL
1.7
Trademarks
LAMBDA PHYSIK is a registered trademark of
Lambda Physik GmbH.
®
8
is a registered trademark of
Lambda Physik GmbH.
NovaTube®
is a registered trademark of
Lambda Physik GmbH.
HaloSafe®
is a registered trademark of
Lambda Physik GmbH.
Gyrolok®
is a registered trademark of
Hoke Inc., NJ, USA.
User Manual COMPex
Conversion Tables
1.8
Conversion Tables
1.8.1
Measurements
This section lists the measurement units used in this manual
and their equivalents according to the SI standard.
1.8.2
1 meter (m)
= 39.37 inches (in)
1 meter (m)
= 3.28 feet (ft)
1 centimeter (cm)
= 0.3937 inch (in)
1 centimeter (cm)
= 0.0328 feet (ft)
1 square meter (m²)
= 1,549.9 square inch (in²)
1 square meter (m²)
= 10.76 square feet (ft²)
1 cubic meter (m³)
= 35.314 cubic feet (ft³)
1 liter (l)
= 0.264 gallons (gal)
1 kilogram (kg)
= 2.20 pounds (lbs)
1 bar
= 100,000 Pascal (Pa)
100,000 Pascal (Pa)
= 14.50 pounds force
per square inch (lbf/in²) (psi)
Temperatures
The temperatures in this manual are primarily indicated in
degrees celsius (°C).
To convert °C to °F multiply by 9, divide by 5, and add 32.
To convert °F to °C, subtract 32, multiply by 5, and divide by 9.
A0300COM.00
As a guide, we have converted some temperature values from
°C to °F:
-10 °C
= 14 °F
0 °C
= 32 °F
5 °C
= 41 °F
16 °C
= 61 °F
20 °C
= 68 °F
38 °C
= 100 °F
100 °C
= 212 °F
LAMBDA PHYSIK LASERTECHNIK - 03/00
9
10
User Manual COMPex
2
EXCIMER LASER
FUNDAMENTALS
This chapter briefly describes the most important features,
functions, and subassemblies of a Lambda Physik excimer
laser.
The information in this chapter does not enable you to operate
or service the COMPex laser device.
Never switch on or attempt to operate or service the COMPex
before reading, understanding and fully familiarizing yourself
with Chapter 3 (Safety) of this manual!
2.1
Excimer Laser
Excimer lasers take their name from the exci ted state dimers
from which lasing occurs. The most important excimers are
rare gas halides, as Fluorine (F 2), Argon Flouride (ArF),
Krypton Fluoride (KrF), Xenon Cloride (XeCl) and Xenon
Fluoride (XeF). These produce intense UV light (U ltra V iolet)
on distinct spectral lines between 157 nm and 351 nm.
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2.1.1
The NovaTube® Innovation
All Lambda Physik excimer lasers use the NovaTube®
technology. The NovaTube® has been conceived to virtually
eliminate the effects of corrosion and contamination. To
ensure strict adherence to thes design objectives, all laser
tube components are assembled in a clean-room. Optimized
electrode materials combined with an improved preionization
scheme minimizes electrode erosion. The Lambda Physik gas
flow system allows stable operation of the laser even at 1 kHz
repetition rate. These major improvements in laser tube
technology lead to an increased laser tube lifetime.
LAMBDA PHYSIK LASERTECHNIK - 03/00
11
EXCIMER LASER FUNDAMENTALS
2.1.2
Optional Accessories
Lambda Physik offers the halogen source Halo Safe ® as an
option. This halogen source allows on-site production of the
required halogen, thereby eliminating the need for compressed
gas cylinders with hazardous hydrogen fluorine/chloride as well
as safety gas cabinets. This drastically simplifies gas handling.
In addition, the halogen provides purer halogen than tank
halogen, thereby reducing contamination of the optics.
2.1.3
Denomination of Lasers According to ISO 11145
The ISO 11145 (”Optics and Optical Instruments - Lasers and
Laser Related Equipment - Vocabulary and Symbols) includes
a list of laser denominations.
To prevent misunderstandings, this manual strictly differs
between “laser” and “laser device” (see Figure 1). Thus “Start
laser device” means, that the power is off and shall be turned
on. To “start the laser” means to start lasing.
The COMPex 150 is composed of two separate, but coupled
lasers. They are called “amplifier” and “oscillator”.
Laser Unit
Laser Assembly
Laser Device
Laser
Workpiece
Mirrors, Lenses, ...
Telescope,
Focussing, ...
Supply Units
Power, Cooling, ...
Measuring and
Control Unit
Handling Systems
Robotics, Workpiece
Positioning
Figure 1: Laser components according to ISO 11145
12
User Manual COMPex
Excimer Laser
2.1.4
System Diagrams
This section gives you an overview of
¯ the system in general,
¯ the nomenclature,
¯ the location of the parts.
2.1.4.1
Outer System Diagram
1
8
2
7
6
5
4
3
Figure 2: Front view of the COMPex (from beam exit)
A0300COM.00
Key to Figure 2:
1
Right Side Panel (Service Panel)
2
Thyratron Access Panel (COMPex 100 only)
3
Lower Air Intake
4
Beam Shutter
5
Beam Exit Frame
6
Front Mirror Access Panel
7
Upper Air Intake
8
Front Panel
LAMBDA PHYSIK LASERTECHNIK - 03/00
13
EXCIMER LASER FUNDAMENTALS
1
2 3
4
5
6
7
8
9
10
11
12
13
14
15
21
20
19 18 17
16
Figure 3: Rear view of the COMPex
14
User Manual COMPex
Excimer Laser
Key to Figure 3:
Rear Panel
2
Key Switch
3
Control Supply Lamp
4
Fuses
5
Mains Switch
6
Power On Lamp
7
Mains Supply Line
8
Exhaust Fan Outlet
9
Remote Interlock Connector
10
RS232 Connector
11
Rear Mirror Access
12
Communication Interface Access Panel
13
LAN Feedthrough
14
Trigger BNC Connector
15
Vacuum Pump Power Supply
16
Buffer Gas Connector
17
Rare Gas Connector
18
Halogen Gas Connector
19
Inert Gas Connector
20
Vacuum Pump Connector
21
Water Connection Fittings
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1
LAMBDA PHYSIK LASERTECHNIK - 03/00
15
EXCIMER LASER FUNDAMENTALS
2.1.4.2
Inner System Diagram
1
2
12
11
10
9
8
7
5
6
4
3
Figure 4: COMPex inside
Key to Figure 4:
16
1
Thyratron Adjustment Panel
2
Power Module Shielding
3
Fuses
4
Basis Module
5
Control Box
6
Tube
7
Power Supply for Electrostatic Gas Purifier
8
Fan Motor
9
Pressure Sensor
10
Inner Beam Shielding
11
Beam Splitter Box
12
Energy Monitor
User Manual COMPex
Laser Control
2.2
Laser Control
The COMPex uses a built-in laser control device, the
Communication Interface (CI).
Communication
Interface
E-Monitor
Basic
Module
FOL Data Ring
COMPex
Power
Supply
Remote Control
RS232
Remote
Computer
Figure 5: COMPex control with remote computer
COMPex software Version 4.8 or higher is required. It consists
of two integrated parts, the local and the remote software:
¯ The local software provides a compact and easy possibility
to use the COMPex via the handheld keypad.
¯ The remote software is used to operate and control the laser
from any given external computer system. For the
information transfer between the external computer system
and the local PC the RS232 interface is used. The remote
software description is intended for programmers only.
Communication
Interface
E-Monitor
Basic
Module
FOL Data Ring
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COMPex
Power
Supply
RS232
COUNTS
GAS
NEW
FILL
MENU
RUN
STOP
TRIGGER
EXT/INT
MODE
7
8
9
HV
RESET
FLUSH
LINE
4
5
6
EGY
EGY
CAL
PURGE
LINE
1
2
3
PURGE
F4
F9
0
,
CLEAR
ENTER
EXE
F5
F10
REPRATE
SEL
SEL
F1
F6
RESET
F2
F7
F3
F8
Handheld
Keypad
RESERVOIR
BREAK
Figure 6: COMPex control with handheld keypad
LAMBDA PHYSIK LASERTECHNIK - 03/00
17
EXCIMER LASER FUNDAMENTALS
Partial tasks are carried out independently by submodules
specially designed for different purposes, e.g. energy
monitoring.
The information is optically coded by the CI and given to or
receive by the data ring as a sequence of light pulses. Each of
the submodules has an address assigned to it. The CI can
actuate it.
This system prevents any interference due to electromagnetic
radiation, as there are no electrical connections between
Handheld Keypad (or PC) and modules. This is a crucial
advantage in excimer lasers with their high internal
electromagnetic interference (EMI) level, generated by the fast
high voltage discharge.
Handheld Keypad
The handheld keypad provides a comfortable use of the
COMPex. It uses the local software part of the communication
interface. The handheld keypad is shown in Figure 7 and
explanations of the keys are the topic of Chapters 7 and 8.
Figure 7: Handheld keypad with RS232 Connector
18
User Manual COMPex
Laser Tube
2.3
Laser Tube
The laser tube can be considered to be the motor of the laser.
Figure 8 shows a section of the longitudinally symmetrical
laser tube.
A
B
F
C
D
E
Figure 8: Profile of the NovaTube
The laser tube (C) is the gas reservoir for the laser gas. The
materials chosen allow problem-free use of excimer gas
mixtures. The material surfaces are ultimately covered with a
layer of halogen metal complex and thus are chemically inert
with respect to halogen. This process is called passivation. A
re-passivation is always required
¯ if the surface passivation has been damaged as a result of
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air entering the laser tube,
¯ (applicable for multigas version only) if a change from a
fluorine to a chloride gas mixture is necessary (or vice versa).
LAMBDA PHYSIK LASERTECHNIK - 03/00
19
EXCIMER LASER FUNDAMENTALS
A high voltage discharge between the electrodes (B) transfers
the energy to the excimer gas mixture (e.g. fluorine, krypton)
and to the buffer gas (neon). In order to obtain a controlled,
spark-free discharge, the laser gas has to be preionized, i. e. a
sufficiently high density of free charged molecules has to be
created between the electrodes. This is done with preionization
pins (A) which are arranged along the main electrodes. This
results in a homogeneous preionization of the laser gas. The
switching of preionization and main discharge in series ensures
a perfect synchronization between preionisation and the main
discharge. The duration of the high-voltage discharge lasts for
only approx. 50 ns. After the discharge, thermal inhomogenities
in the laser gas arise in the discharge area. The recovery times
of these inhomogenities are on the order of 1/3 second. This
means that a new discharge in the identical gas volume is not
possible until 1/3 of a second has elapsed.
The gas volume in the discharge area has to be completely
exchanged between two laser pulses. A transverse circulation
fan (D) positioned within the laser tube causes the gas volume
between the main electrodes to be completely replaced
between two successive laser pulses. The circulation fan is
driven externally via magnetic coupling by a single phase motor.
The energy efficiency of the excimer laser is on the order of
2%, i.e. the main part of the energy supplied has to be carried
away in the form of heat. The gas, heated up by the discharge,
reaches the heat exchangers (F) as a result of the flow in the
laser tube and is cooled down again to the proper operating
temperature (approx. 30 °C or 86 °F).
Each discharge pulse of the laser results in a load on the
preionization pins and main electrodes and causes a slightly
erosion of material. To prevent that the created particles
precipitate on the laser windows and thus diminish the beam
intensity through scattering and absorption, the particles must
be permanently removed from the laser gas. This is done by
using an electrostatic filter (E) as an gas purifier, integrated in
the gas circulation. Due to the pressure conditions generated
by the circulation fan, the laser gas continuously flows through
this electrostatic filter.
20
User Manual COMPex
Thyratron
2.4
Thyratron
The laser uses a simple 3-inch hydrogen thyratron, a
thermionic tube. It is used as an active switch to discharge the
storage capacitors. The anode of the thyratron is connected to
the charging voltage. The cathode is connected to ground.
Between these two main electrodes is the control grid, which
initiates the discharge (switching) of the thyratron.
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As is also the case with conventional thermionic tubes, the
cathode structure has to be heated in order to ensure sufficient
emission of starting electrons. If the electron emission after a
longer operating period is no longer sufficient to initiate
switching of the thyratron, this can be corrected during the
thyratron lifetime by increasing the heating power of the
cathode. Hydrogen is necessary to provide a fast current
increase and a high current intensity. However, as hydrogen is
lost continually due to diffusion and metal erosion, the
concentration of hydrogen has to be continually renewed. For
this purpose, there is a reservoir structure (palladium) in the
tube in which a large quantity of hydrogen is stored. By heating
the reservoir, hydrogen is released from the reservoir into the
main thyratron. It should be noted that too much hydrogen
reduce the hold-off voltage between the electrodes of the
thyratron to such a level that unwanted switching of the
thyratron will take place even without the trigger pulse. On the
other hand, a partial hydrogen pressure in the thyratron that is
too low, prevents the laser from pulsing, as there is no
discharge in the thyratron due to the lack of charged particles.
The values for the two heating voltages, UH for the cathode
heating and UR for the hydrogen reservoir voltage, are
sensitive for the function of the tube. The voltages are
stabilized in a broad input voltage range in order to be
independent of voltage fluctuations on the supply line. The
values must be altered during the total life of the thyratron to
ensure proper switching of the tube. This can be done simply
by using the jumpers provided for this purpose. You will find a
description of the thyratron adjustment in Section 8.8.1 of this
manual.
LAMBDA PHYSIK LASERTECHNIK - 03/00
21
EXCIMER LASER FUNDAMENTALS
2.5
Energy
2.5.1
Energy Measurement
A built-in energy monitor measures the energy of individual
laser pulses, converts them into a digital value and transmits
the value via the Data Ring to the CI.
As the energy monitor does not supply absolute measured
values, it has to be calibrated by means of a calibrated energy
meter or power meter. Apart from the additional energy and
power detector, no further measures are necessary; the
calibration is facilitated with the help of the CI (thus by
handheld keypad or PC) with a special calibration menu.
2.5.2
Energy Management
In the following section, the mutual dependence of energy, high
voltage and gas actions (halogen injections, partial gas
replacements), is described.
E [mJ]
The pulse energy of an excimer laser is considered as a
function of the charging voltage. The resulting function is
shown in Figure 9
x
x
x
x
x
x
x
U [kV]
Figure 9: Pulse energy as a function of charging voltage
As excimer laser gases age, the pulse energy obtained from a
given charging voltage will decrease. The laser can, therefore,
run either in the Energy Constant Mode (EGY CONST) or in
the High Voltage Constant Mode (HV CONST).
22
User Manual COMPex
Energy
If the Energy Constant Mode is selected, the controller adjusts
the high voltage to achieve laser operation at a preset energy
level (Figure 10).
High Voltage
Energy
HV
Energy
Time
Figure 10: Pulse energy as a function of charging voltage
If the High Voltage Constant Mode is selected, pulse energy
decreases with time because gases have a limited lifetime
(Figure 11).
Energy
Energy
HV
High Voltage
Time
Figure 11: Energy drop in HV Constant Mode
Most applications require the Energy Constant Mode, whereas
the High Voltage Constant Mode is primarily used for
diagnostic purposes (e.g. to measure the gas lifetime).
If excimer lasers are operated continuously, the pulse energy
as a function of time and particularly as a function of the
number of laser pulses shows a clear drop. This drop is
basically due to the following three reasons:
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1. The halogen concentration in the laser gas slowly
decreases, because the highly reactive halogen enters into
a variety of stable compounds, particularly when the laser is
operated at higher repetition rates.
2. Impurities and reaction products accumulate in the laser gas.
3. The intense laser radiation in the resonator causes small
particles generated by the electrode burn-off to condense
on the optics with chemical reactants from the laser gas.
LAMBDA PHYSIK LASERTECHNIK - 03/00
23
EXCIMER LASER FUNDAMENTALS
In order to keep the desired pulse energy of the laser constant,
the controller replenishes laser gas by halogen injections (HI)
and partial gas replacements (PGR) if the PGR mode is
selected. These gas actions take place if the high voltage
adjustment reaches a preset replacement value (HVrepl).
2.5.2.1
Halogen Injection (HI)
Halogen concentration decreases slowly, even in well
passivated systems. This leads to lower pulse energy. A
portion of halogen is added to the gas fill to compensate for the
loss of halogen partial pressure. This gas refreshment is
carried out if high voltage reaches the value for replacement
(HVrepl, Figure 12):
Energy
repl
Energy
HV
max
HV
min
Time
Gasrefreshment
Figure 12: Charging current with Halogen Injections
2.5.2.2
Partial Gas Replacement (PGR)
Laser gas is released through the halogen filter and halogen,
rare, and buffer gases are refilled accordingly, dependent upon
the preset partial pressures.
During the first 80 seconds after laser start, no gas
replacements take place even if HVrepl is reached. This
warm-up period prevents unnecessary gas replenishment
actions.
Energy
repl
Energy
HV
max
HV
min
Time
HV decrease too low
Figure 13: Charging current with Partial Gas Replacement
24
User Manual COMPex
Energy
HI/PGR Algorithms (see flow diagram Figure 14 )
If HV regulation reaches HVrepl after the warm-up period, a
HI is performed.
•
If the HI is successful, i.e. the HV level decreases after the
HI to less than HVrepl -0.6 kV, the next gas replenishment
will be an HI. If the controller has already performed three
successful HIs in series , the next gas action will be a PGR
to adjust all partial gas pressure.
•
If an HI is not successful, i.e. the HV-level does not
decrease to less than HVrepl -0.6 kV, a PGR will be
performed when the HV level again reaches HV repl (Figure
13).
•
If a PGR is successful, i.e. the HV level decreases after the
PGR to less than HVrepl -0.6 kV, the next gas replenishment
action will be again an HI.
•
If a PGR is not successful, i.e. the HV level does not
decrease after the PGR to less than HVrepl -0.6 kV, then the
next gas replenishment action will be a PGR.
•
If 3 PGRs in series are not successful then the message
“Preset energy too high” will come up when HVrepl is
reached again if more than 64 pulses have been fired since
the last PGR. When HVmax is reached then laser operation
is stopped.
A0300COM.00
•
LAMBDA PHYSIK LASERTECHNIK - 03/00
25
EXCIMER LASER FUNDAMENTALS
HVrepl
reached
x-th* HI
in series ?
yes
* "x" represents a number
given with the gas menu
no
HI performed
HV less than
HVrepl-0.6kV?
no
PGR
performed
yes
Laser operation
continues
yes
Laser runs
until HVrepl
reached again
HV less than
HVrepl-0.6kV?
no
Laser runs
until HVrepl
reached again
yes
no
3rd PGR?
Message "Preset
Energy too high"
displayed
Laser runs until
HVmax reached
Laser stops;
Message "Preset Energy
too high" displayed
Figure 14: Partial Gas Replacement in Energy Constant Mode
26
User Manual COMPex
Energy
2.5.2.3
No Gas Replacement (NGR)
The operating mode is a constant energy mode without any
gas replenishment.
When high voltage reaches the level HVrepl the message ‘New
Gas Fill Needed’ will come up. Laser operation will be
continued until HVmax is reached. The laser then shuts off
automatically (Figure 15).
Energy
repl
Energy
HV
max
HV
min
Time
"New gas fill needed"
Figure 15: Charging Current with No Gas Replacement (NGR)
Figure 16 shows the flow diagram of the Energy Constant
Mode with No Gas Replacement.
HVrepl
reached
Message "New
Gas Fill Needed"
displayed
A0300COM.00
Laser runs until
HVmax reached
Laser stops;
Message "New Gas Fill
Needed" displayed
Figure 16: No Gas Replacement in Energy Constant Mode
LAMBDA PHYSIK LASERTECHNIK - 03/00
27
EXCIMER LASER FUNDAMENTALS
2.6
Lambda Safety Systems
2.6.1
Monitoring Critical Modules by Watchdogs
The COMPex, like all of Lambda Physik excimer lasers using
serial data rings, has watchdogs to ensure functional check.
Watchdogs are switches which alters its logic level as soon as
the reset pulses stop.
The watchdog is reset by the control at least three times a
second. Should the pulses stop, as in the case of a breakdown,
this is recognized by the watchdog belonging to the module.
The module is then switched to a safe, inactive state.
At COMPex, the basic module is equipped with a watchdog.
2.6.2
Selftest of the Data Ring
After the system is booted, a self-test is automatically carried
out in order to test the data ring and the modules for error-free
interaction. The serial structure of the data ring requires that all
modules work properly and that the controller receives a
correct response to a transmitted signal. If this does not occur,
the controller sends a message: “FATAL ERROR; DATA
CONFLICT; address”. In this situation it is not possible for the
controller to localize the error.
To avoid provoking any unwanted results, the light on the data
ring is switched off by the controller. In order to localize a
potentially defective module, it is recommended to cold start
the control processor again, as in this case light is transmitted
continuously from the interface to the controller. This light can
now simply be traced from module to module.
During the selftest, the error-free function of the watchdogs is
monitored and displayed on the screen.
28
User Manual COMPex
Lambda Safety Systems
2.6.3
Interlocks
‘Interlock’ refers to an error message indicating a malfunction
or critical interference in the functioning of the laser.
The response of the laser to the interlock may vary; if the user
needs to be protected, the laser is fully switched off. If the
malfunction can only harm the laser, only the high voltage is
switched off.
The advantages of this method are that the entire system does
not need to be started anew when there is a simple malfunction
and communication with the processor is still possible.
2.6.4
Housing Interlock Switch
All housing access panels (not mirror access panels) on the
COMPex are secured against removal by interlock switches
when the laser is running. The laser is de-energized the
moment a housing access panel is removed. This is not true
for the mirror access panels, removal of which allows the
optics of the COMPex to be serviced.
2.6.5
Door Interlock Switch and Laser Warning Light
A0300COM.00
The COMPex provides the option of implementing one or more
external interlock contacts (see Figure 17). This enables the
room, in which the laser is operated, to be secured. As
indicated on the circuit diagram, the door switch has to be
closed in order to allow the high voltage to be switched on.
Remote
interlock
(e. g. door
switch)
2
3
1
4
External
laser radiation
warning lamp
Figure 17: Remote interlock and laser warning light
LAMBDA PHYSIK LASERTECHNIK - 03/00
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EXCIMER LASER FUNDAMENTALS
If the laser is in the operating state, i.e. high voltage is on the
storage capacitor, the COMPex supplies a voltage of 24 VAC.
This signal can be loaded with up to 100 mA.
Please note that the remote interlock only switches off the high
voltage. After the door contact is closed again, the laser can be
re-started. If you want to avoid simple starting of the laser after
the door contact has been active, then the contact should be
looped into the emergency switch circuit.
30
User Manual COMPex
3
SAFETY
Never switch on or attempt to operate or service the
COMPex laser device before reading, understanding and
fully familiarizing yourself with the contents of this chapter.
This chapter is divided into two sections:
¯ General Safety Aspects, which explains aspects relating to
the safe operation of the laser device
¯ Special Safety Aspects, which outlines the risks specific to
working procedures with and on this laser device.
3.1
General Safety Aspects
3.1.1
Basic Operation and Designated Use of the COMPex
The COMPex has been built in accordance with
state-of-the-art technical standards and recognized safety
rules. Nevertheless, its use may constitute a risk to the life and
limb of the user or of third parties or cause damage to other
material property.
WARNING
Potential eye and skin burns!
Only use the laser in accordance with its designated use.
Safety interlocks are only to be defeated by authorized
personnel.
A0300COM.00
WARNING
Electrical hazard!
Safety interlocks are only to be defeated by authorized
personnel.
WARNING
Toxic hazards!
The gas system of an excimer laser contains a mixture of
halogen gases (fluorine or hydrogen chlorid). Inhalation of or
skin contact with halogen should be avoided.
LAMBDA PHYSIK LASERTECHNIK - 03/00
31
SAFETY
The COMPex must only be used in technically perfect condition
and in accordance with its designated use and the instructions
set out in the instruction manual, and only by safety conscious
persons who are fully aware of the risks involved in operating
the COMPex laser device. Any functional disorders, especially
those affecting the safety of the COMPex, should, therefore, be
rectified immediately.
The COMPex is primarily designed for use in low duty-cycle
operation, mainly in scientific and medical, but also industrial
applications. Using the COMPex for purposes other than those
mentioned above is considered contrary to its designated use.
The manufacturer/ supplier cannot be held liable for any
damage resulting from such use. The responsibility associated
with the risk of such misuse lies entirely with the user.
Operating the COMPex within the limits of its designated use
also involves observing the instructions set out in the
instruction manual and complying with the inspection and
maintenance directives.
3.1.2
Organizational Measures
In accordance with the valid national regulations for prevention
of accidents (in Germany: VBG 93, in the USA : ANSI Z 136.1)
a responsible person should be designated the Laser Safety
Officer (LSO) with the responsibility to effect the knowledgeable
evaluation of laser hazards and to monitor and enforce their
control.
The instruction manual must always be on hand at the place of
use of the COMPex.
In addition to the operation instructions, observe and instruct
the user in all other generally applicable legal and other
mandatory regulations relevant to accident prevention and
environmental protection.
These compulsory regulations may also deal with the handling
of hazardous substances as well as the issuing and/or wearing
of personal protective equipment.
32
User Manual COMPex
General Safety Aspects
CAUTION
Risk of serious injury through incorrect operation!
Personnel entrusted with work on the COMPex laser device
must have read the instruction manual and in particular the
safety instructions before beginning work. Reading the
instructions after work has begun is too late. This applies
especially to persons working only occasionally on the
COMPex, e. g. during set-up or maintenance.
Use protective equipment as required by the circumstances or
by law, e.g. protective eyeweare.
Ensure that all safety-relevant labels are attached to the laser
device in accordance with the Label Location Diagrams in
section 4 on page 55 and local regulations. Make sure that
these labels are always complete and perfectly legible. If any
labels are missing, immediately inform Lambda Physik.
In the event of safety relevant modifications or changes in the
behavior of the COMPex during operation, stop the COMPex
immediately and report the malfunction to a competent
authority/person (e. g. Lambda Physik Service).
Never make any modifications, additions or conversions which
might affect safety without the supplier’s approval. This also
applies to the installation and adjustment of safety devices and
valves.
Spare parts must comply with the technical requirements
specified by the manufacturer. Spare parts from original
equipment manufacturers can be relied upon to do so.
Never modify the software of programmable control systems.
Adhere to the intervals specified in the instruction manual for
routine checks and inspections.
A0300COM.00
For the execution of maintenance work, tools and workshop
equipment adapted to the task at hand are absolutely
indispensable.
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33
SAFETY
3.1.3
Selection and Qualification of Personnel - Basic
Responsibilities
Make sure that only authorized personnel work on or with the
COMPex laser device. Statutory minimum age limits must be
observed.
Employ only trained or instructed staff and clearly state the
individual responsibilities of the personnel for operation, set up,
maintenance and repair.
Do not allow persons not yet trained or instructed or those
taking part in a general training course to work on or with the
COMPex without being permanently supervised by an
experienced person.
WARNING
Potential electrical hazard!
Work on the electrical system and equipment of the COMPex
laser device must be carried out only by a skilled electrician or
by instructed persons under the supervision and guidance of a
skilled electrician and in accordance with electrical engineering
rules and regulations.
WARNING
Toxic hazards!
Work on gas-fueled equipment must always be carried out by
specially trained personnel only.
3.1.4
Safety Instructions Governing Specific
Operational Phases
Take the necessary precautions to ensure that the COMPex is
used only when in a safe and reliable state.
Operate the COMPex only if all protective and safety oriented
devices, such as removable safety devices, emergency shut off
equipment and exhausters, are in place and fully functional.
In the event of malfunctions, stop the COMPex immediately
and lock it. Have any defects rectified immediately.
Before starting up the COMPex, ensure that nobody is at risk.
Never switch off or remove suction and ventilation devices
when the COMPex is in operation.
34
User Manual COMPex
General Safety Aspects
Observe the required adjusting, maintenance and inspection
activities and intervals set out in the instruction manual,
including information on the replacement of parts and
equipment. These activities may be executed by skilled
personnel only.
Brief operating personnel before beginning special operations
and maintenance work and appoint a person to supervise the
activities.
In any work concerning the operation, conversion or
adjustment of the COMPex and its safety oriented devices or
any work related to maintenance, inspection and repair,
always observe the start up and shut down procedures set out
in the instruction manual and the information on maintenance
work.
Ensure that the maintenance area is adequately secured.
WARNING
Potential electrical hazards!
If the COMPex laser device is completely shut down for
maintenance and repair work, it must be secured against
inadvertent starting.
Ensure that the electrical system is locked-out and tagged-out
prior to servicing by locking the main switch and tagging
appropriate warning signs.
A0300COM.00
WARNING
Potential eye and skin burns!
If the COMPex laser device is completely shut down for
maintenance and repair work, it must be secured against
inadvertent starting.
Ensure that the radiation system is locked-out and tagged-out
prior to servicing by locking the main switch and tagging
appropriate warning signs.
LAMBDA PHYSIK LASERTECHNIK - 03/00
35
SAFETY
CAUTION
Risk of gas leaks!
Switching off the laser device automatically closes the
solenoid valves in the laser device’s gas circuit. This
interrupts the gas flow in the laser device, but does not
evacuate the circuits in the laser device.
Also, operating pressure remains in the external gas supply
lines. Therefore, for additional safety when locking out the
laser device, close the corresponding external gas shut-off
valves.
Always tighten any screwed connections that have been
loosened during maintenance and repair.
Any safety devices removed for set up, maintenance or repair
purposes must be refitted and checked immediately upon
completion of the maintenance and repair work.
Ensure that all consumables and replaced parts are disposed
of safely and with minimum environmental impact.
36
User Manual COMPex
Specific Safety Aspects
3.2
Specific Safety Aspects
Contents of Specific Safety Aspects are:
¯ the physical hazards related to the system (Section 3.2.1),
¯ the protection of operators or users of the system against
these hazards (Section 3.2.2),
¯ the safety features incorporated in the design of the laser
unit (Section 3.2.3).
Lasers and laser systems are classified according to their
relative hazards. These classifications are found in the
American National Standards for the Safe Use of Lasers (ANSI
Z 136.1-1986), FDA 21 CFR 1040.10 and 1040.11, IEC-825
and in the European Standard EN 60825. Within this
classification, the COMPex excimer laser device is a Class
IV (high power) laser device when operated with open
covers during servicing condition. It must therefore be
regarded as a potential hazard to the human operator.
The laser beam also effectuates a potential fire hazard.
A Class IV laser system is not enclosed and therefore requires
several safety precautions. Class IV is the most powerful (and
potentially hazardous) category of lasers. Direct and scattered
radiation from Class IV products are considered acute hazards
to the eyes and skin. Precautions include eye and skin
protection, remote interlocks and warning labels.
A0300COM.00
NOTE
The COMPex is a class IV laser device. However, when
connected to an OEM device or with closed housing, it
becomes a Class I laser device.
A Class I laser device is defined as a laser system which is
supplied with a special enclosure which does not allow access
to hazardous levels of laser light during normal operation. This
class of laser does not require special precautions for eye
safety during normal operations as long as the protective
enclosure is in place.
WARNING
Risk of serious injury!
A Class I laser system becomes a Class IV when the
enclosure is open. The laser itself is a class IV device.
LAMBDA PHYSIK LASERTECHNIK - 03/00
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SAFETY
3.2.1
Physical Hazards
3.2.1.1
Ultraviolet Light
Laser radiation is emitted as a narrow beam of almost parallel
rays, the intensity of which will remain high even at some
distance from the laser. Although the radiation is non-ionizing,
prolongued exposure can cause damage to living tissue as a
result of the heat produced during radiation absorption.
The radiation of an excimer laser lies outside the visible range.
Possible wavelengths of the high intensity ultraviolet radiation
are 157 nm, 193 nm, 248 nm, 308 nm or 351 nm.
Operating the laser at 157 nm causes additional spontaneous
and stimulated emission of radiation in the range of 620 nm to
780 nm (visible red).
WARNING
The laser beam is very dangerous to the eyes and skin.
The following radiations are hazardous:
1. direct radiation-light as it leaves the laser,
2. reflected radiation-light which has hit a surface and bounced
off,
3. diffuse radiation-light, which has hit a surface, bounced off
and scattered.
In general, the maximum permissible radiation exposure for the
skin is several times greater than for eye. Safety measures with
regard to radiation hazard are therefore mainly based on
dangers for the eye.
A potential chemical hazard results from the interaction
between the laser beam and an obstruction. The high
irradiance could cause hazardous fumes and gases to be
released. In addition, the heat generated is sufficient to ignite a
number of materials.
Not only is the direct laser beam hazardous. Also reflections of
laser light constitute a potential hazard. This risk is considerably
reduced if the laser beam is contained within a protective
enclosure. Protective measures must be taken, therefore, when
personnel are working in an open beam situation (use of beam
shielding and beam dump).
38
User Manual COMPex
Specific Safety Aspects
3.2.1.2
High Voltage / Electrical Energy
WARNING
Electrical hazards!
High voltages exceeding the Safety Extra Low Voltage levels
(SELV) of 42 VAC or 60 VDC introduce the potential hazard of
electric shock and might cause serious injuries by passing
electricity through the body.
High voltages of up to 32 kV are generated in the COMPex
laser device. As the equipment is provided with a protective
housing, accidental contact with current-carrying conductors
during normal operation is impossible. However, if an
appropriate protective cover is removed, potentially lethal
hazards exist in spite of the existence of the housing
interlocks. With a protective cover removed, there is the risk of
an electric shock whenever the mains supply is connected and
the high voltage capacitors are charged. The capacitors in the
laser device hold tens of joules at voltages of up to 32 kV.
WARNING
Risk of electrocution!
Personnel should never open the laser device, before the main
power supply cable has been disconnected and the high
voltage capacitors are completely discharged.
An electrical safety overview is given in Section 3.2.2. of this
chapter, but reference should also be made to Section 3.2.3
for an overall description of the system safeguards.
In addition to the above mentioned hazards, the HV switch
used (thyratron) generates ionizing radiation.
0.2 µSievert/h at 10 cm distance
A0300COM.00
Radiation Limit:
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SAFETY
3.2.1.3
Halogen Gas
WARNING
Toxic hazards!
The gas supply system of an excimer laser contains a mixture
of up to 5 % fluorine gas or 5 % hydrogen chlorid. Inhalation of,
or skin contact with, halogen gases should be avoided.
Halogen can cause severe chemical and thermal burns, and
can cause death due to respiratory damage and pulmonary
edema. Strictly observe local safety regulations concerning the
emission of chemical vapors along with the recommendations
made in this chapter and throughout this manual. Depending
upon the wavelength in which the laser is to be operated, the
halogen is either fluorine or hydrogen chloride.
¯ Fluorine is in the form of a premix gas, ratio 5 % F2 in
premix, and diluted further with other gases in the laser.
Fluorine is characterized by an extremely stinging smell in
very low concentrations (0.1 ppm).
¯ Hydrogen chloride (HCl) is in the form of a premix gas, ratio
5 % HCL in premix.
Both gases are still present in sufficient quantities in the gas
supply to cause serious injury if not correctly handled and used.
The attention of the user is drawn, therefore, to the following
maximum permitted exposure limits for fluorine and hydrogen
chlorine. The permitted periods of exposure time with respect
to these limits will, however, depend upon local safety
regulations:
The MAK (maximum acceptable concentration level) values
according to the German publication:
”Technische Regel des Ausschuß für Gefahrstoffe des
Bundesministeriums für Arbeit und Soziales (TRGS 900)”
and the PEL (permissible exposure limit) set by the American
government agency
Occupational Safety and Health Administration (OSHA)
are as follows:
40
F2 limit:
0.1 ppm (0.2 mg/m3)
HCl limit:
5.0 ppm (7.6 mg/m3).
User Manual COMPex
Specific Safety Aspects
The possibility of over-pressure of the gas mixture containing
fluorine or hydrogen chlorine creates potential hazards with the
risk of leakage from the laser tube and gas pipes. Under
normal operating conditions the overpressure is less than
2.5 bar (3.5 bar abs.). In the event of a leak occurring, the
release of halogen gas constitutes the greatest hazard.
Further potential chemical hazards exist due to the formation
of hydrofluoric or hydrochloric acid if the halogen gas comes
into contact with water.
Hydrofluoric acid and hydrochloric acid can also be formed in
the halogen filters used in the system due to fluorine or
chlorine coming into contact with the hygroscopic components
of the filter.
3.2.1.4
Ozone
The formation of ozone due to the interaction of ultraviolet light
(193 nm and 157 nm) with oxygen constitutes a potential
hazard.
The MAK (maximum acceptable concentration level) value
according to the German publication
”Technische Regel (TRGS 900) des Ausschuß für
Gefahrstoffe des Bundesministeriums für Arbeit und
Soziales”
and the PEL (permissible exposure limit) set by the American
government agency
Occupational Safety and Health Administration (OSHA)
are as follows:
0.1 ppm (0.2 mg/m3)
A0300COM.00
O3 limit:
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SAFETY
3.2.2
Personnel Safety
3.2.2.1
Ultraviolet and Visible Red Radiation Safety
An excimer laser emits high intensitiy pulsed ultraviolet
radiation which constitutes a hazard to personnel during
periods of operation and servicing. In addition, the F2 version of
the COMPex emits visible red radiation in the range from
620 nm to 780 nm, which represents a particular danger.
WARNING
Risk of serious injury!
A Class I laser system becomes a Class IV when the enclosure
is open. The laser itself is a Class IV device.
If alignment or maintenance work on Class IV laser equipment
is necessary, everyone in the laser area must wear appropriate
protective goggles or other appropriate protective eyewear.
The mandatory protective goggles provide protection against
direct, reflected and scattered radiation within the respective
wavelength range.
WARNING
Risk of serious injury!
Always wear goggles when there is a chance of exposure to
radiation from the laser.
Before putting on the protective goggles, check them for any
obvious defects. As the filter in the goggles provides protection
for only a narrow band of wavelengths, make sure you are
wearing the appropriate goggles for the laser device in
question.
Check with your Laser Safety Officer or other safety personnel
for guidance in selecting the appropriate goggles.
Contact a manufacturer of protective eyewear for information
about appropriate protective eyewear. Specifications needed to
select appropriate eyewear are: wavelength, power, beam
diameter, repetition rate and max. pulse duration.
The ANSI (American National Standards Institute) standard for
safe use of lasers requires that protective goggles which block
the appropriate laser wavelength should be worn while operating
or servicing class IV lasers. The goggles should be clearly
labeled with an optical density and the specified wavelength.
42
User Manual COMPex
Specific Safety Aspects
To avoid confusion, these goggles should be kept separate
from other safety glasses and personal protective equipment.
Using the wrong type of goggles is dangerous. It can be worse
to have improper eyewear and a false sense of security than to
have no eyewear and take precautions based on the absence
of protection. Even if you’re wearing protective goggles, never
looked directly into the beam; intense laser radiation is capable
of destroying the protective filter.
Optical Safety Guidelines
WARNING
Potential eye burns!
Only use the laser in accordance with its designated use.
Safety interlocks are only to be defeated by authorized
personnel.
Always follow the guidelines listed below and take additional
precautions if necessary to avoid injury caused by the laser
beam:
•
When eyewear is necessary, make sure it has the proper
optical density for the laser wavelength.
•
All other personnel in the vicinity of the laser should also be
ordered to wear protective eyewear. Only qualified
personnel should be permitted to operate the laser.
•
•
Never intentionally look directly into any laser beam.
Avoid indirect viewing of direct or reflected laser radiation.
Specular reflections (from reflective surfaces) can be as
dangerous as the direct laser beam. Do not view the beam
through optical instruments unless the optics are designed
to filter the laser wavelength.
Precautions must be taken to ensure that there are no
reflecting objects in the path of the laser beam. Only beam
stops made of non-flammable materials are to be used.
•
Do not deviate from standard operating procedures when
working with class IV laser equipment.
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•
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43
SAFETY
•
Use lasers only in approved applications and locations. Take
adequate precautions to prevent unauthorized personnel
from entering the area where a class IV laser is operating.
Do not use lasers around untrained personnel who may
injure themselves inadvertently. Assure that all personnel in
the area observed proper safety precautions.
•
Do not assume the laser unit is aligned. Misaligned optics
can cause unintended exposure.
•
•
Report all incidents of exposure to your supervisor.
•
Warning signs indicating the laser enclosed area should be
clearly displayed with an additional warning light outside the
door.
Local and national regulations governing the safe use of
lasers should be adhered to all times.
Skin Safety
WARNING
Potential skin burns!
Direct and reflected laser radiation can burn exposed skin.
Only use the laser in accordance with its designated use.
Safety interlocks are only to be defeated by authorized
personnel.
44
•
Although the skin can withstand a considerably higher
radiation intensity than the eyes, tissue may be burned to a
greater or lesser degree, depending on the radiation time
and the irradiation intensity.
•
Avoid contact between the skin and the beam, or specular
reflections of the beam. Reflections of the beam may be as
dangerous as the beam itself. Appropriate protective
clothing should be worn to protect the skin whenever
necessary.
User Manual COMPex
Specific Safety Aspects
3.2.2.2
Electrical Safety
WARNING
Electrical hazards!
If the COMPex is completely shut down for maintenance and
repair work, it must be secured against inadvertent starting.
Ensure that the electrical system is locked-out and tagged-out
prior to servicing by locking the main switch of the laser device
and tagging appropriate warning signs.
A0300COM.00
High voltages of up to 32 kV are generated within the laser
equipment. Details of the system safeguards can be found in
section 3.2.3 of this chapter, but as a general guide to safe
working practices, the following precautions should be
observed:
•
Local safety regulations must always be strictly complied
with.
•
Switch off the COMPex laser device immediately if trouble
occurs in the electrical system.
•
Work on the electrical system or equipment may only be
carried out by a skilled electrician himself or by specially
instructed personnel under the control and supervision of
such an electrician and in accordance with the applicable
electrical engineering rules.
•
Fault finding and troubleshooting in high voltage circuits
must only be performed by trained personnel.
•
Special attention should be paid to proper grounding of the
laser.
•
Necessary work on live parts and elements must be carried
out only in the presence of a second person who can cut off
the power supply by actuating the emergency shut off or
main power switch in case of danger. Secure the working
area with a red and white safety chain and a warning sign.
Use insulated tools only.
•
Whenever specified in applicable regulations, the power
supply to the COMPex must be cut off to carry out
inspection, maintenance and repair work. Before starting
any work, check the de-energized parts for the presence of
power and ground or short-circuit them in addition to
insulating adjacent live parts and elements.
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SAFETY
•
•
3.2.2.3
Use only original fuses with the specified current rating.
The electrical equipment of the COMPex is to be inspected
and checked at regular intervals. Defects such as loose
connections or scorched cables must be repaired or
replaced immediately.
Gas Safety
WARNING
Toxic gas hazards!
The gas system of an excimer laser contains a mixture of
fluorine or hydrogen chloride gas. Inhalation of, or skin contact
with, these halogens should be avoided.
The properties of compressed gases, such as pressure and
diffusiveness, make the handling of compressed gases
hazardous. In addition, laser gas mixtures invariably contain
components which are corrosive, toxic and oxidizing. Therefore,
extreme care must be taken when handling these mixtures.
As a general guide to safe working practices, the following
precautions should be observed when working with gas
equipment:
46
•
Protective equipment for gas-handling such as gas-masks,
must be available at the entrance to the area where the
laser is located. Ensure that a protective mask with a
protective gas filter, or a complete breathing apparatus set,
is placed in a clearly displayed and accessible part of the
operating area.
•
It is recommended that personnel work in pairs and within
sight and sound of each other, although not necessarily in
the same working area. Only trained and competent
personnel should be permitted to handle premix gas
cylinders and regulators.
•
Any equipment to be used for halogen servicing should be
thoroughly cleaned, degreased and dried before use.
•
Any equipment that has contained halogen must be
thoroughly purged with helium or argon and evacuated prior
to opening or refilling.
•
Avoid repeated bending and excessive vibration of gas
piping and equipment as this can result in flaking of the
protective fluorine film and rupturing of the metal. Flaking of
the protective film can also cause dust to foul the valves.
User Manual COMPex
Specific Safety Aspects
Due to the possibility of over-pressure of the gas mixture
containing halogen, potential hazards exist due to the risk of
leakage of the laser tube and gas pipes. The most vulnerable
part is the window. Under normal operating conditions the
pressure is 3.8 bar (abs.). The equipment must be used such
that the laser exit port is not directed at personnel. In the
event of a leak occuring, the release of halogen constitutes
the greatest hazard.
•
The COMPex laser devices use an externally connected
vacuum pump and halogen filter. Due to the possibility of
gas leaks, potential hazards exist outside the laser device
when evacuating the excimer laser gas mixture. A halogen
sensor and an evacuating system are to be installed in the
area of the vacuum pump to avoid hazardous halogen gas
concentrations.
•
As the premix gas contains halogen, a needle valve or
cut-off valve should be installed in the premix gas line. The
additional valve is to be located near the gas cylinder to
protect the gas line and pressure regulator against corrosion
and provide additional gas protection. Do not solely rely on
the main gas cylinder valve to provide adequate protection.
•
Gas cylinder valves should be closed except while filling the
laser or when running the laser in the constant energy mode
(EGY Const).
•
The pressure regulator, situated between the external gas
cylinder and the laser, should be checked regularly. The
maximum permitted value while cylinders are opened is
5 bar (abs) respectively 7 bar (abs.) to operate the halogen
source’s pilot valve.
•
All areas containing pressurized halogen should be
inspected for leaks periodically (weekly). In the event of a
leak occurring, the release of halogen constitutes the
greatest hazard.
A0300COM.00
•
LAMBDA PHYSIK LASERTECHNIK - 03/00
47
SAFETY
•
All leaks should be rectified immediately, but not while the
system contains halogen.
For Fluorine: Ammonia vapor expelled from a squeeze
bottle containing ammonium hydroxide may be used to
detect leaks at suspected points.
Filter paper moistened with potassium iodide solution is a
very sensitive means of detecting fluorine in concentrations
as low as approximately 25 ppm. The potassium iodide
paper should be held with the aid of 18 to 24 inch long
tongs or forceps, and will darken and turn black when
fluorine is present. Fluorine odor is sufficiently strong to be
detectable in very low concentrations (at 0.14 ppm).
Fluorine will also fume readily in air.
WARNING
Toxic gas hazards!
Ensure that the laser is ventilated into an appropriate exhaust.
Do not connect the exhaust of the laser to breathing air
systems (e. g. air conditioning or ventilating systems).
3.2.2.4
•
Ozone can be generated by high power ultraviolet radiation
(especially with F2 (157 nm) and ArF (193 nm)). This gas
should be removed with an appropriate air exhaust.
•
Adequate ventilation is essential. There should be at least
10 air changes per hour when the laser device is installed in
a confined space, e.g. housing of additional devices.
•
Always wear protective gloves when changing halogen
filters as they are hygroscopic and contain oxidizing agents.
Pressure Safety
Gas pressures of up 3.8 bar (abs.) are permitted in the laser
tube. In case of exceeding pressure, a built-in safety valve
releases the overpressure via the halogen filter into the
exhaust. The following precautions should be observed:
•
•
48
The laser should only be operated with the housing closed.
In accordance with the local pressure vessel regulations (in
Germany: “Druckbehälterverordnung”), Lambda Physik
recommends that the laser tube be checked by a specialist
every five years.
User Manual COMPex
Specific Safety Aspects
3.2.2.5
Fire Safety
WARNING
Fire hazards!
Class IV lasers effectuate, by definition, fire hazards.
The laser beam can cause flammable materials to ignite or
explode.
Always keep a fire extinguisher in the laser area in case a fire
occurs.
Because of the high output power from the class IV laser, a
wide range of materials can be set on fire. Therefore, when the
beam path is open, appropriate fire prevention measures
should be taken:
Combustible materials may be ignited by the laser beam or
by electrical components inside the laser unit. Flammable
items must be isolated from the laser beam and from the
laser unit.
•
Paper (circuit diagrams, leaflets, or even posters on the
wall), curtains that are not coated with fire retardant, wooden
panels or similar materials can be easily set on fire by direct
or reflected laser radiation.
•
Only beam stops made of non flammable materials (not
asbestos!) should be used.
•
Many fluids and solvents (e.g. cleaning agents used for
maintenance) are combustible. The intense beam of the
laser or a spark from an internal switch can ignite vapors
from these materials. Prevent the laser beam from
contacting flammable materials used in the laser area.
•
Move containers of flammable materials as far from the laser
unit as possible and shield them from the beam with opaque
materials. Under no circumstances should these solutions
and vapors be placed in the beam path or near the laser unit.
A0300COM.00
•
LAMBDA PHYSIK LASERTECHNIK - 03/00
49
SAFETY
3.2.3
Constructive Safety Features
The laser is equipped with the following constructional safety
features:
3.2.3.1
Radiation Safety Features
•
•
Appropriate Class IV label affixed to laser enclosure.
All parts of the laser where laser radiation may possibly
escape are marked with the appropriate adhesive danger
signs (according to IEC 825).
•
The beam exit at the laser housing can be closed by a
manually operated beam shutter.
•
COMPex series lasers are provided with a connector
(“Remote”) on the rear panel of the laser housing, where
electrical circuits for a warning light and an external interlock
switch can be installed (the appropriate plug is included in
the service box).
The warning light signals that the laser is operating and
therefore warns of the risk of laser radiation. Additionally,
the generation of laser radiation can be recognized by the
clicking noises: the higher the repetition rate, the faster the
clicking.
The interlock switch shuts down the laser externally, for
instance if a door connected with the switch is opened.
3.2.3.2
•
The Basic Module is monitored by a watchdog. The COMPex
immediately signals if this module has failed testing.
•
The service panel at the laser is equipped with an interlock
which will shut off high voltage if the laser is opened during
operation.
Electrical Safety Features
The following safety features protect the user from the potentially
lethal hazards associated with high voltage power sources.
•
50
All potentially lethal voltages are contained in fully protected
and grounded enclosures. Additionally a chassis cover
interlock disables the high voltage power supply when the
cover is removed.
User Manual COMPex
Specific Safety Aspects
•
Opening a service panel triggers an interlock switch that
shuts off the high voltage and thus the laser radiation.
•
The Power Module shielding encloses the HV parts of the
laser to protect the surrounding against ionizing radiation
and electromagnetic interference (for limits, see
Section 3.2.1.2 on page 39).
A proper closed laser housing completely shields the
surroundings from the ionizing radiation. The emission of
ionizing radiation has been checked by the German
Physikalisch Technische Bundesanstalt (PTB). No radiation
beyond background radiation was detected with covers
closed.
A0300COM.00
Opening the Power Module shielding discharges the
capacitors by a safety switch release.
•
High voltage warning labels are prominently displayed on all
three high voltage modules: the High Voltage Power Supply,
the Gas Processor Power Supply, and the High Voltage
Circuitry.
•
For service the capacitors can be discharged through a
shortcut plate to ground.
•
All AC power wiring is UL- or VDE-recognized and rated at
600 V. Black or brown is used for line phases, blue or white
is used for neutral and green or yellow-green is used for
ground (depending on the power supply version).
•
A yellow-green grounding conductor is included in every AC
power. All power connectors have grounding pins that make
first and break last.
•
All ground conductors are equipped with a ring lug and
external tooth lockwasher.
•
Fuses are used to provide branch circuit protection against
low level faults.
•
AC power and signal lines are never combined in the same
connector.
•
Fast acting magnetic circuit breakers with at least 10 kA
interrupting capacity, a lockable disconnect means and an
emergency-off function are supplied with the main switch.
•
All external low voltage (24 V) lines conform to the VDE
0551 safety standard.
LAMBDA PHYSIK LASERTECHNIK - 03/00
51
SAFETY
3.2.3.3
Gas Handling Safety Features
The Lambda Physik Excimer Laser incorporates the following
pressure and gas handling features.
•
The pressure chamber is designed according to the
Druckbehälterverordnung (”Allgemeine Vorschrift,
DruckbehV”;
edited by the “Bundesministerium f. Arbeit & Soziales”;
Germany). Every chamber is tested up to 4.5 bar (abs).
•
If tube pressure exceeds 4.3 bar, a safety valve opens and
leads the gas via the halogen filter into the exhaust.
•
•
•
•
•
Gas valves are automatic and electrically operated.
All utilities connections are found along one end of the laser.
The main enclosure is fully interlocked.
All gas fittings are 6 mm Gyrolok™.
A powerful ventilation system causes the continuous
underpressure in the laser tube during laser operation. This
technique prevents toxic gas from escaping into the ambient
air in case of a leak.
The exhaust enclosure is designed to ensure ventilation of
all components.
The housing is vented to allow toxic and corrosive gases to
be discharged safely in the event of an accidental leak. This
vent should be connected to a fume hood or exhaust duct.
•
52
The optional VUV-adapter makes it possible to continuously
purge the beam path of the laser with nitrogen. The beam
path has to be purged if the laser operates with ArF
(wavelength: 193 nm) or F2 (wavelength: 157 nm). A fully
nitrogen-purged beam path prevents ozone production.
User Manual COMPex
Specific Safety Aspects
3.2.3.4
Fire Safety Features
Fire safety features designed into the Lambda laser address
the elimination of combustible or toxic out-gassing materials,
and prevents flames from spreading or burning materials from
dripping. The design incorporates the following specific fire
safety features:
3.2.3.5
•
Except for electrical wire insulation, polyvinyl chloride (PVC)
is not used.
•
No ventilation holes in fire break enclosures are in excess of
5 mm (0.20 in) in diameter. Hole arrays are used as required.
•
Material meeting or exceeding UL 94-V0 is used.
Mechanical Safety Features
Mechanical safety design provides protection against any
hazards which could cause physical injury or burns. Specific
mechanical safety features are listed below.
•
•
•
•
A0300COM.00
3.2.3.6
Exposed corners are radiused.
Air fans have grill guards with less than 6.4 mm (0.25 in)
access.
No high temperature components are accessible to touch.
The laser’s center of gravity is centrally located within the
enclosure to minimize tipping hazard.
General Safety Features
•
The laser can only be switched on with the key switch. This
prevents inadvertent or unauthorized starting of the laser. It
cannot be operated with the key in OFF position and the key
cannot be removed in ON position.
•
•
No polychlorinated biphenyl (PCB) is used.
No asbestos is used.
LAMBDA PHYSIK LASERTECHNIK - 03/00
53
SAFETY
3.3
Safety Compliance List
The equipment has been tested and found to comply with the
standards and recommendations about safety of laser products
and safety requirements for electrical equipment for
measurement, control and laboratory use:
¯ IEC 60825-1(1994) + A11 (1996)
(IEC 825-1: 1993)
¯ IEC 61010-1 (1990) + A1 (1992) + A2 (1995)
¯ EN 61010-1 (1993) + A2 (1995)
¯ CAN-CSA 22.2 No. 1010.010—30
¯ UL 3101-1
54
User Manual COMPex
4
LABELS
This Chapter contains the description of the labels and where
they are found on the COMPex.
Be sure that all warning labels are affixed to the system
according to the plans given in Sections 4.1 and 4.2 of this
chapter.
A0300COM.00
WARNING
Risk of injury!
Misuse or improper handling of the laser device can cause
serious or, in certain situations, even lethal injuries.
Never put the COMPex into operation if the labeling is
incomplete.
Immediately replace missing labels or inform Lambda
Physik of their absence.
LAMBDA PHYSIK LASERTECHNIK - 03/00
55
LABELS
4.1
Labels on the Outside of the Laser
(all countries except Germany)
3
2
1
Figure 18: Labels on the front side of the COMPex
The Labels on the Front of the COMPex are:
1. Beam exit safety sign
AVOID EXPOSURE
VISIBLE AND INVISIBLE LASER
RADIATION IS EMITTED FROM
THIS APERTRE
2. Sign warning of laser radiation while mirror access panel is
removed.
DANGER
Visible And Invisible Laser Radiation
When Open
AVOID EYE OR SKIN EXPOSURE TO DIRECT
OR SCATTERED RADIATION
56
User Manual COMPex
Labels on the Outside of the Laser (all countries except Germany)
3. Warning label according to CDRH. Contains laser radiation
warning and individual laser data:
COMPex
Model
Power
[W]
Energy
[J]
Duration Wavelength
[ns]
[nm]
COMPex 102
20
0.6
10 - 50
157 - 800
COMPex 110
50
0.6
10 - 50
157 - 800
COMPex 120
50
0.4
10 - 50
157 - 800
COMPex 150T
50
1
10 - 50
157 - 800
COMPex 201
20
1
10 - 50
157 - 800
COMPex 205
50
1
10 - 50
157 - 800
COMPex 301
30
1.8
10 - 50
157 - 800
VISIBLE AND INVISIBLE
LASER RADIATION
AVOID EYE OR SKIN EXPOSURE TO
DIRECT OR SCATTERED RADIATION
Max. Average Power:
W
Output:
J/pulse
Duration
to
ns
Wavelength
nm
to
A0300COM.00
CLASS IV LASER PRODUCT
LAMBDA PHYSIK LASERTECHNIK - 03/00
57
LABELS
The Labels on the rear of the COMPex are:
11
4
5
6
10
7
9
8
Figure 19: Labels on the rear side of the COMPex
4. Label that prohibits to remove the RS232 cables (to
Handheld Keypad or Remote Computer) while power is on.
TURN OFF POWER BEFORE
DISCONNECTING THE CABLE
5. Warning Sign, warning of laser radiation while mirror access
panel is off. Identical to the label at the mirror output on the
front of the COMPex (see page 56).
6. Instruction for operating the COMPex with Handheld or
Remote Computer at distances of more than 2 m. This
complies to IEC 825.
ATTENTION
IF CONTROLLER AND LASER ARE
SEPARATED MORE THAN 2 METERS,
ALSO THE CONTROLLER HAS TO BE
EQUIPPED WITH APPROPRIATE
WARNING LABELS AND EMISSION
INDICATOR
(SEE MANUAL)
58
User Manual COMPex
Labels on the Outside of the Laser (all countries except Germany)
7. Halogen gas warning.
TOXIC AND CORROSIVE
GASES
8. (fluorine version only) Label directing that no gas mixture
other than fluorine gas mixtures be used.
Nur Fluor-Gasgemische verwenden!
Only for Fluorine-Gas Mixtures!
9. Warning that gas connections must be sealed when opened.
GASANSCHLÜSSE UND GASZULEITUNGEN SIND NACH
DEM TRENNEN ODER BEI
NICHTBENUTZUNG ZU VERSCHLIESSEN
GASINLETS AND SUPPLY
OUTLETS MUST BE BLANKED OFF AFTER DISCONNECTING OR IF NOT USED
10. Laser identification plate.
For more information about the configuration of the
electrical connection, please refer to Chapter 5. The
indicated values are shown on the label.
LASERTECHNIK
Lambda Physik GmbH
ß e 12
ö
Hans-Böckler-Stra
D-37079 Göttingen
ö
Germany
Modell:
Model
Serien-Nr.:
Serial-No.
Hergestellt:
in Göttingen
ö
Manufactured
V±
%
Phasen:
Phases
A0300COM.00
Hz
~
kVA
Leiter:
Wires
A
11. Label showing electrical frequency for the main supply,
where XX is replaced by the frequency.
Laser is switched for XX Hz
LAMBDA PHYSIK LASERTECHNIK - 03/00
59
LABELS
4.2
Labels Inside the Laser
(all countries except Germany)
1
2
3
8
4
7
6
5
Figure 20: Labels inside the COMPex
Labels inside the COMPex are:
max
max
UH
UR
min
50 Hz
60 Hz
min
1. Labels at the thyratron adjustment panel.
FUSE
AUX
BIAS
HEAT
RES
GND
60
User Manual COMPex
Labels Inside the Laser (all countries except Germany)
2. Label warning to access the high voltage circuit.
LEBENSGEFAHR!
Nur Personal, vollständig vertraut mit den Vorsichtsmaßnahmen für Arbeiten an
Hochspannungsgeräten darf Arbeiten am Gerät ausführen.
Vor jedem Service ist stets das Handbuch zu lesen.
Alle Anweisungen zur dauerhaften Erdung, sowie Prüfung auf Abwesenheit der Hochspannung sind genau und jederzeit zu befolgen.
Only Personnel fully conversant with safety measures for working with High Voltage
equipment shall perform work at this equipment.
Every time before service it is mandatory to read the Manual.
All instructions for positive Grounding and Check for Absence of High Voltage have
to be followed meticuously and at any time.
DANGER TO LIFE!
3. Label showing electrical frequency and voltage needed for
the main supply.
Line Voltage 230V
Line Voltage 110V
Line Frequency 50Hz
Line Frequency 60Hz
E=_________
4. Labeling of the power supply unit’s fuses.
M03/
F6
M03/
F5
M03/
F4
M03/
F3
M03/
F2
M03/
F1
5. Fabrication Number of the laser device.
A0300COM.00
Lambda Physik Göttingen
FN .
LAMBDA PHYSIK LASERTECHNIK - 03/00
61
LABELS
6. Identification label of the laser tube.
SERIEN-NR.:
SIEHE SCHLAGZAHL
SERIAL-NO.:
SEE ENGRAVED NUMBER
BAUJAHR:
MANUFACTION YEAR:
MAX. BETRIEBSDRUCK:
BAR
MAX. OPERATION PRESSURE:
MAX. BETRIEBSTEMPERATUR:
°C
MAX.OPERATION TEMPERATURE:
MIN. BETRIEBSTEMPERATUR:
°C
MIN.OPERATION TEMPERATURE:
LITER
INHALT:
LITRE
VOLUME:
GAS PROZESSOR:
KV
GAS PROCESSOR:
ANODE: P:
NO:
ANODE:
KATHODE: P:
NO:
CATHODE:
ELEKTRODEN-ABSTAND:
MM
ELECTRODE GAP:
7. Sign warning of electrical shock.
8. Label naming the (upper) remote plug and describing the
(lower) power supply plug.
REMOTE
0 .05 A
230 V
10 A
POW ER
62
User Manual COMPex
5
SPECIFICATIONS,
REQUIREMENTS AND
ACCESSORIES
To continuously optimize the laser devices, all data in this
chapter are subject to changes.
A0300COM.00
Should information on seperate sheets (e.g. laser data sheets)
attached to or provided together with this manual contradict the
information in this chapter, the information on the separate data
sheets has priority.
LAMBDA PHYSIK LASERTECHNIK - 03/00
63
SPECIFICATIONS, REQUIREMENTS AND ACCESSORIES
5.1
Laser Specifications
CDRH-class
(laser classification)
IV
Power
≤ 30 W
Pulseshape temp.
≥ 10 ns
Pulse to Pulse stability
≤ ± 12 % for pulse moving
average
With the exception of F2, all data given are measured with an
energy monitor and optimized gas mixtures.
Specifications for COMPex 100 series
F2
ArF
KrF
XeCl
XeF
Units
157
193
248
308
351
nm
COMPex 102
(Multigas)
10
200
300
200
150
mJ
COMPex 102
(F-Version)
10
200
350
—-
150
mJ
COMPex 110
(Multigas)
10
200
300
200
150
mJ
COMPex 110
(F-Version)
10
200
350
—-
150
mJ
COMPex 102
20
20
20
20
20
Hz
COMPex 110
50
100
100
100
100
Hz
COMPex 102
(Multigas)
0.2
4
6
4
3
W
COMPex 102
(F-Version)
0.2
4
7
—-
3
W
COMPex 110
(Multigas)
0.4
12
25
20
12
W
COMPex 110
(F-Version)
0.4
12
30
—-
12
W
Pulse Duration
(nominal)
COMPex 100
series
—-
25
30
20
25
ns,
FWHM
Beam
Dimensions3)
COMPex 100
series
24 x 5-10
24 x 5-10
24 x 5-10
24 x 5-10
24 x 5-10
mm²
(V x H)
Beam
Divergence3)
COMPex 100
series
3x1
3x1
3x1
3x1
3x1
mrad
(V x H)
COMPex
Model
Wavelength
1)
Pulse Energy
Max. Rep. Rate
2)
Avg. Power
1)
2)
3)
64
measured at low repetition rate (5 Hz)
measured at max. repetition rate
typical value, FWHM
User Manual COMPex
Laser Specifications
Specifications for COMPex 200 and 300 series
F2
ArF
KrF
XeCl
XeF
Units
157
193
248
308
351
nm
COMPex 201
(Multigas)
16
400
600
400
300
mJ
COMPex 201
(F-Version)
16
400
650
—-
300
mJ
COMPex 205
(Multigas)
16
400
600
400
300
mJ
COMPex 205
(F-Version)
16
400
650
—-
300
mJ
COMPex 301
(Multigas)
16
5504)
900
5504)
4004)
mJ
COMPex 301
(F-Version)
16
5504)
1000
—-
4004)
mJ
COMPex 201
10
10
10
10
10
Hz
COMPex 205
40
50
50
50
50
Hz
COMPex 301
10
10
10
10
10
Hz
COMPex 201
(Multigas)
0.15
4
5
3.5
3
W
COMPex 201
(F-Version)
0.15
4
6
—-
3
W
COMPex 205
(Multigas)
0.7
15
25
20
15
W
COMPex 205
(F-Version)
0.7
15
30
—-
15
W
COMPex 301
(Multigas)
0.15
54)
9
54)
44)
W
COMPex 301
(F-Version)
0.15
54)
10
—-
44)
W
COMPex 200
series
—-
20
25
25
20
ns,
FWHM
COMPex 301
—-
25
25
25
20
ns,
FWHM
COMPex 200
series
24 x 6-12
24 x 6-12
24 x 6-12
24 x 6-12
24 x 6-12
mm²
(V x H)
COMPex 300
series
30 x 8-15
30 x 8-15
30 x 8-15
30 x 8-15
30 x 8-15
mm²
(V x H)
COMPex
200/300 series
3x1
3x1
3x1
3x1
3x1
mrad
(V x H)
COMPex
Model
Wavelength
Pulse Energy 1)
Max. Rep. Rate
Avg. Power 2)
Pulse Duration
(nominal)
A0300COM.00
Beam
Dimensions 3)
Beam
Divergence 3)
1)
2)
measured at low repetition rate (5 Hz)
measured at max. repetition rate
3)
typical value, FWHM
4)
since September 1997
LAMBDA PHYSIK LASERTECHNIK - 03/00
65
SPECIFICATIONS, REQUIREMENTS AND ACCESSORIES
5.2
Physical Dimensions
COMPex 100:
Laser (l × h × w)
Weight
≈1300 × 795 × 385 mm
250 kg
COMPex 200/300:
Laser (l × h × w)
Weight
≈1700 × 795 × 385 mm
325 kg
Vacuum Pump:
Pump (l × h × w)
230 × 450 × 240
Pump with mounted filter 530 mm
Weight
23 kg
All dimensions are shown in the layout diagrams given in
Chapter 11 of this manual.
66
User Manual COMPex
Electrical Requirements
5.3
Electrical Requirements
This chapter provides the information about power supply and
interface specifications.
5.3.1
Power Supply
NOTE
All rated voltages can vary by ± 10 %.
COMPex
Model
Voltage
[V]
Frequency
[Hz]
Phases
[-]
Wires
[-]
Power
Cons.
[kVA]
COMPex 102
230
50 / 60
1
3
1.5
6
COMPex 110
230
50 / 60
1
3
3
13
COMPex 120
230
50 / 60
1
3
3
13
380 - 400
50
3
5
9
13
COMPex 201
230
50 / 60
1
3
1.5
6
COMPex 205
230
50 / 60
1
3
3
13
COMPex 301
230
50 / 60
1
3
2
7
COMPex 150T
COMPex
Model
A0300COM.00
230 V / 400 V version
Current
[A]
115 V / 208 V version
Voltage
[V]
Frequency
[Hz]
Phases
[-]
Wires
[-]
Power
Cons.
[kVA]
Current
[A]
COMPex 102
120
50 / 60
1
3
1.5
12
COMPex 110
120
50 / 60
1
3
3
25
COMPex 120
120
50 / 60
1
3
3
25
COMPex 150T
208
50 / 60
3
5
9
25
COMPex 201
120
50 / 60
1
3
1.5
12
COMPex 205
120
50 / 60
1
3
3
25
COMPex 301
120
50 / 60
1
3
2
14
See Chapter 11 of this manual for wiring diagrams.
LAMBDA PHYSIK LASERTECHNIK - 03/00
67
SPECIFICATIONS, REQUIREMENTS AND ACCESSORIES
5.3.2
Serial Interface (RS232C)
The laser can be controlled by an external PC system using the
interfaces specified in these section.
The connector is a 25 pole Sub D-type male connector.
PIN
Signal
Specific
Description
2
TXD
O, RS232
Transmit Data
3
RXD
I, RS232
Receive Data
7
GND
Signal Ground
Data format:
data bits
parity
stop bit
baud
5.3.3
8
no
1
9600 bps
Remote Socket
The Remote Socket enables to connect external safety
features to the laser device. Pin 2 and 3 must be connected to
run the laser, otherwise the interlock message “remote”7
appears.
Pin 2 to 3
24 VAC
Pin 1 to 4
24 VAC/100 mA
Remote
interlock
(e. g. door
switch)
2
3
1
4
External
laser radiation
warning lamp
Figure 21: Remote socket
68
User Manual COMPex
Electrical Requirements
5.3.4
Trigger Signal Ports
There are two BNC trigger signal ports at the COMPex laser
device:
¯ External Trigger In (Ext. Trig.),
¯ Sync. Out.
5.3.4.1
External Trigger In
This port allows external triggering of the laser. The
specifications of the necessary input are:
Voltage:
+3.3 V to +5 V
Impedance:
≥ 5 kΩ
Duration:
≥ 15 µs
triggered on positive slope
Connector:
BNC
Galvanic isolation by optocoupler provided.
5.3.4.2
Sync. Out Signal
The Sync. Out Signal is sent by the Communications Interface.
It informs devices other than the laser that a trigger signal
(whether internal or external) has just been given.
NOTE
If COD is active, there is a time delay between Sync. Out
Signal and firing of the laser. For more information about this
delay, see 7.5.4.
A0300COM.00
Specifications of the Sync. Out signal are:
Voltage:
+ 3.3 to +5 V
Impedance:
≥1 kΩ
Duration:
15 µs
triggered on positive slope
Connector:
BNC
Galvanic isolation by optocoupler provided.
LAMBDA PHYSIK LASERTECHNIK - 03/00
69
SPECIFICATIONS, REQUIREMENTS AND ACCESSORIES
5.4
Cooling Water
The models COMPex 102, COMPex 201 and COMPex 301 are
fully aircooled.
Installation of the water cooling is only required for COMPex
110 and COMPex 205. These lasers are optionally equipped
with built-in temperature stabilization to optimize the gas
temperature of the laser tube by regulation of the water flow.
CAUTION
Laser heat exchange may corrode!
Do not use deionized or distilled water.
NOTE
A) Particles in the cooling water can clog the cooling cycle.
Thus, the use of a filter is strongly recommended.
B) At a high duty cycle, more than 1000 liters of cooling
water a day are needed. Due to cost and environmental
factors, we recommend a cooling circuit and an additional
water chiller.
Specifications:
Temperature Range
(at water inlet)
70
5 to 20 °C (41 to 68 °F),
for 100 % duty cycle
Flow
1 to 5 l/min, depending on the
temperature of the water.
pH-value
6 to 9
Pressure
< 4 bar abs (< 57 psi).
Heat transfer to water
≤ 1.5 kW
Connectors In /Out
10 mm Serto®
The laser is connected to the
water line by two ½ inch hoses
(3 m length).
User Manual COMPex
Gas Requirements
5.5
Gas Requirements
The active medium in an excimer laser is a mixture of a rare
gas, a halogen and a buffer gas. The gases are mixed in the
laser itself.
The gas mixtures needed depend on the wavelengths desired
for operation:
Gas Mixture
Wavelength
F2 in He, Buffer (He)
157 nm
Ar, F2 in He, Buffer (Ne)
193 nm
Kr, F2 in He, Buffer (Ne)
248 nm
Xe, HCl and H2 in He, Buffer (Ne)
308 nm
Xe, F2 in He, Buffer (Ne)
351 nm
Normally the COMPex is prepared to operate at one
wavelength only. All gas valves on the laser device allow
supply from separate gas cylinders. In addition premix gases or
the optional halogen source can be used. The halogen source
is then controlled by the laser.
NOTE
In addition to the laser gas mixture we strongly recommend
a helium and a neon gas cylinder even if they are not
needed for the gas mixture. This gas cylinders are necessary
to purge the tube and the gas lines (helium) and to make the
laser device transportable and storable (neon).
A0300COM.00
A halogen filter is built into the laser and will fully absorb all of
the halogen exhaust during gas filling processes. No toxic
gases will leave the laser device. The halogen filter filling ratio
is monitored by the laser software. The Filter should be
exchanged after up to 30 gas fills or on a yearly basis,
whichever comes first.
At wavelengths less than 233 nm, nitrogen is required to purge
the beam path and optics modules.
LAMBDA PHYSIK LASERTECHNIK - 03/00
71
SPECIFICATIONS, REQUIREMENTS AND ACCESSORIES
5.5.1
Gases Required
It is possible to operate the COMPex at different wavelengths if
the COMPex is prepared for multigas-operation.
Make sure that the appropriate gas cylinders are available.
For low duty cycle applications that consistently use the same
laser wavelength, a premix gas cylinder operation can be
recommended. In this case one cylinder of premix gas and
another one with inert gas (helium) for flushing is required.
Fluorine
(only required without the optional fluorine source)
Type of gas
Purity of Helium
Purity of Fluorine
Pressure
Flow
RCS*)
5% F2 / 95 % He mixture
99.995 % or higher
for excimer lasers, HF-free
3.5 to 5 bar abs.
0.3 to 3 l/s
10 l, 28 bar (400 psi)
Hydrogen chloride
(only required without the optional chlorine source)
Type of gas
Purity of the mixture
Pressure regulator
Flow
RCS*)
5 % HCl/ 1 % H2 in He
99.995 % or higher
3.5 to 5 bar abs.
0.3 to 3 l/s
10 l, 100 bar, 1400 psi
Argon
Purity
Pressure regulator
Flow
RCS*)
99.995 % or higher
3.5 to 5 bar abs.
0.8 to 3 l/s
50 l, 200 bar, 2800 psi
Krypton
Purity
Pressure regulator
Flow
RCS*)
72
99.99 % or higher
3.5 to 5 bar abs.
0.8 to 3 l/s
10 l, 100 bar, 1400 psi
User Manual COMPex
Gas Requirements
Xenon
Purity
Pressure regulator
Flow
RCS*)
99.99 % or higher
3.5 to 5 bar abs.
0.8 to 3 l/s
2.5 l, 50 bar, 700 psi
Neon
Purity
Pressure regulator
Pressure regulator (for
optional halogen source)
Flow
RCS*)
99.995 % or higher
3.5 to 5 bar abs.
6.5 to 7 bar abs.
0.8 to 3 l/s
200 l, 200 bar, 2800 psi
Helium (flushing gas for the laser tube)
Purity
Pressure regulator
Pressure regulator (for
optional halogen source)
Flow
RCS*)
99.995 %
3.5 to 5 bar abs.
6.5 to 7 bar abs.
0.8 to 3 l/s
200 l, 200 bar, 2800 psi
Nitrogen (purge gas for the beam path)
Purity
Pressure regulator
Pressure regulator (for
optional halogen source)
Flow
RCS*)
99.999 % or boil off
2 to 2.5 bar abs.
6.5 to 7 bar abs.
1 to 12 l/min)
50 l, 200 bar, 2800 psi
A0300COM.00
*) RCS = Recommended Cylinder Size
LAMBDA PHYSIK LASERTECHNIK - 03/00
73
SPECIFICATIONS, REQUIREMENTS AND ACCESSORIES
5.5.2
Optimum Gas Mixtures
The gas mixtures described in this section are state of the art
at the given release date and may change due to new
knowledge.
The gases are listed in the order in which they are charged.
CAUTION
Tube may be soiled!
Impurities from the gas cylinder walls can be washed out.
Use gas cylinders with at least 5 bar (70 psi) remaining
pressure.
Optimum Gas Mixtures (Release 11/96)
COMPex
Model
Gas Mixture
(Wavelength)
Partial
Pressure
[mbar]
Gas
Pressure
[%]
Gas Port
ArF (193 nm)
100
F2/He
0.17/3.16
Halogen
160
Ar
5.33
Rare
2340
Ne
78.00
Buffer
KrF (248 nm)
COMPex 102
COMPex 110
XeCl(308 nm)
XeF (351 nm)
F2 (157 nm)
74
400
He
13.33
Inert
80
F2/He
0.12/2.30
Halogen
100
Kr
3.03
Rare
3120
Ne
94.55
Buffer
80
HCl/H2/He
0.13/0.02/2.35
Halogen
60
Xe
1.87
Rare
3060
Ne
95.63
Buffer
120
F2/He
0.18/3.46
Halogen
15
Xe
0.45
Rare
3165
Ne
95.91
Buffer
80
F2/He
0.15/2.81
Halogen
2620
He
97.04
Inert
Total
Pressure
[mbar]
3000
3300
3200
3300
2700
User Manual COMPex
Gas Requirements
Optimum Gas Mixtures (Release 11/96)
Laser Type
Gas Mixture
(Wavelength)
ArF (193 nm)
COMPex 201
COMPex 205
Gas
Pressure
[%]
Connect
to
100
F2/He
0.16/2.96
Halogen
200
Ar
6.25
Rare
2900
Ne
90.63
Buffer
KrF (248 nm)
(COMPex 201
only)
60
F2/He
0.10/1.71
Halogen
130
Kr
3.93
Rare
3120
Ne
94.26
Buffer
KrF (248 nm)
(COMPex 205
only)
60
F2/He
0.09/1.68
Halogen
130
Kr
3.82
Rare
3210
Ne
94.41
Buffer
XeCl (308 nm)
60
HCl/H2/He
0.08/0.02/1.57
Halogen
100
Xe
2.78
Rare
3440
Ne
95.55
Buffer
130
F2/He
0.20/3.74
Halogen
15
Xe
0.45
Rare
2855
Ne
86.52
Buffer
300
He
9.09
Inert
90
F2/He
0.16/3.05
Halogen
2710
He
96.79
Inert
70
F2/He
0.10/1.90
Halogen
140
Ar
4.00
Rare
2690
Ne
76.86
Buffer
600
He
17.14
Inert
70
F2/He
0.10/1.79
Halogen
100
Kr
2.70
Rare
XeF (351 nm)
F2 (157 nm)
ArF (193 nm)
KrF (248 nm)
COMPex 301
XeCl (308 nm)
XeF (351 nm)
A0300COM.00
Partial Pressure
(mbar)
F2 (157 nm)
2930
Ne
79.19
Buffer
600
He
16.22
Inert
60
HCl/H2/He
0.08/0.02/1.52
Halogen
70
Xe
1.89
Rare
3570
Ne
96.49
Buffer
120
F2/He
0.16/3.08
Halogen
15
Xe
0.40
Rare
2965
Ne
80.14
Buffer
600
He
16.22
Inert
90
F2/He
0.16/3.05
Halogen
2710
He
96.79
Inert
LAMBDA PHYSIK LASERTECHNIK - 03/00
Total
Pressure
[mbar]
3200
3310
3400
3600
3300
2800
3500
3700
3700
3700
2800
75
SPECIFICATIONS, REQUIREMENTS AND ACCESSORIES
5.5.3
Pressure Regulators
Pressure regulators are delivered by gas manufacturers. As a
minimum standard, Lambda Physik recommends pressure
regulators which operate up to 5 bar (abs.). The joints for the
gas lines must be provided with Gyrolok fittings for 6
mm-diameter-pipe. Stainless steel regulators are required for
halogen gases.
5.5.4
Gas Cabinets
Gas cylinders, especially those containing fluorine and
hydrogen chloride gas mixtures pose a safety hazard because
of the risk of leakage. In order to diminish this risk, safety gas
cabinets are available. Please contact gas manufacturers for
further information.
CAUTION
Laser tube may be poisoned by contaminated piping!
Keep dust, humidity, oil or other pollutants off tubing.
Operate the laser under clean conditions.
Connections and Tubing:
Gas Connections:
Gas Lines:
6 mm Gyrolok
316 L stainless steel, inside
electropolished, 6 mm outer
diameter, degreased.
The halogen supply line from an external gas cylinder is
recommended to be a double wall tubing.
See Chapter 11 of this manual for gas flow diagrams.
76
User Manual COMPex
Air Intake and Exhaust
5.6
Air Intake and Exhaust
The laser has one central air exhaust. Under normal operating
conditions the exhaust air does not include any toxic gases or
byproducts. Nevertheless, for certain failure scenarios the
exhaust air may include halogen gas or ozone in small
concentrations.
Effective protection is only guaranteed if the hose leads to
appropriate ventilation.
WARNING
Poisoning hazard!
Lead laser and vacuum pump exhaust hose to an
appropriate ventilation system. Do not connect the
exhaust to breathing air systems (i. e. air conditioning or
ventilating systems).
Specifications:
Air Flow
approx. 200 m³/h (100 cfm)
Diameter
150 mm
Hose length 3 m max. If the
distance to the ventilation is more
than 5 m, an additional blower
has to be installed.
Heat transfer
to exhaust
A0300COM.00
5.7
<1 kW
Beam Exit Position
The beam exit is on the left side of the laser when looking at
the service panel. The COMPex is equipped with
high-adjustable feed, so the beam exit can be adjusted from
378 to 418 mm in vertical position.
The beam exit is shown in the layout diagrams given in
Chapter 11 of this manual.
LAMBDA PHYSIK LASERTECHNIK - 03/00
77
SPECIFICATIONS, REQUIREMENTS AND ACCESSORIES
5.8
Environmental Conditions
This section describes recommended environmental conditions
for transport, storage and operation of the COMPex.
5.8.1
5.8.2
Transport and Storage Conditions
Temperature Range
-20 to +50 °C
Max. Temperature Gradient
5 °C/h
Ambient Air Pressure
650 to 1070 mbar
Max. Pressure Gradient
75 mbar/h
Humidity
< 70 % RH
Max. Allowed Acceleration
During Transport
1G
Operational Environmental Conditions
Ambient Temperature
5 to 30 °C
Max. Temp Gradient
5 °C/h
Altitude
0 to 2000 m above sea level
Max. Atmospheric
Pressure Gradient
75 mbar/h
Humidity
30 to 70% relative humidity (RH)
Cleanliness
class 10,000
CAUTION
Risk of contaminating optical components!
The ambient air is to be free of dust, oil, organic particles,
corroding substances and photochemically decompositable
or depositable compounds. Protect the beam path and the
laser optics with a purgeable shield at critical environmental
conditions.
Please contact Lambda Physik for more information.
78
User Manual COMPex
Vacuum Pump
5.9
Vacuum Pump
Type: Becker VTC 6/2
The vacuum pump is connected to the laser with a 3 m-long
supply cable and does not require an additional power supply.
For more information see the attached vacuum pump manual.
Halogen Filter
Type
Standard
Supplier
Lambda Physik GmbH
Hans-Böckler-Strasse 12
D-37079 Göttingen, Germany
Phone: +49/551/ 69 38-0
Fax: +49/551/68 691
Order-No.: 261 068
A0300COM.00
5.10
LAMBDA PHYSIK LASERTECHNIK - 03/00
79
80
User Manual COMPex
6
INSTALLATION
This chapter describes the installation of the laser device.
It must be read:
¯ prior to initial installation,
¯ after transportation,
¯ prior to re-installation after storing the laser device.
6.1
Transport
This chapter describes the equipment delivered and how it
shall be unpacked and safely moved.
WARNING
Risk of injury or damage!
Failure to observe the transportation requirements and
restrictions in this chapter may result in injury to persons
or damage to equipment. Persons responsible for
transporting the system must ensure that all transport
requirements are complied with.
6.1.1
Safety
A0300COM.00
When moving the laser device and its components, always
follow the standard safety precautions and practices for the
transportation and handling of heavy equipment.
WARNING
Risk of crushing!
The COMPex 100 series laser device together with its
components, accessories and packaging weights 345 kg
(760.6 lb), the COMPex 200/300 series laser device
together with its packaging weights 395 kg (870.8 lb).
LAMBDA PHYSIK LASERTECHNIK - 03/00
81
INSTALLATION
CAUTION
Risk of damaging laser device!
During transportation and installation, keep the laser device
as horizontal as possible. The laser device can be tilted
max. 5 ° around the beam axis and 20 ° longitudinally for a
short period (see Figure 22).
max ± 5°
max ± 20°
Figure 22: Permitted tilting gradients
CAUTION
Risk of damaging laser device feet!
The COMPex laser device is to be transported carefully.
Especially if attached to the base plate of the rigid transoprt
packaging avoid sudden shocks and, if tilted, avoid
vibrations.
82
User Manual COMPex
Transport
6.1.2
Transport and Storage Conditions
Ensure that the following conditions are maintained while
transporting and storing the laser device:
6.1.3
Temperature range
-20 to 50 °C (-4 to 122 °F)
(remove cooling water before
transport and for storing)
Max. temperature gradient
5 °C/h
Ambient air pressure
650 to 1070 mbar
Max. pressure gradient
75 mbar/h
Humidity
less than 70 % RH
Floor Loads
CAUTION
Risk of structural damage!
All floors on the proposed transport route or at the proposed
storage/installation location must be checked to ensure that
they can withstand the weight of the laser device and fork lift
truck or similar device (whatever used).
It is the responsibility of the customer to provide Lambda Physik
and/or the system manufacturer with
¯ Accurate information regarding floor loading capabilities.
This information is necessary to determine the type of
transportation to be used.
¯ Elevator loading capacities.
A0300COM.00
When elevator transport is intended, the loading capability of
the elevator must be verified.
LAMBDA PHYSIK LASERTECHNIK - 03/00
83
INSTALLATION
6.1.3.1
Packaging Dimensions and Weight
Laser Device with Rigid Transport Packaging
Length
1820 mm (71.7 in)
Height
1030 mm (40.6 in)
Width
540 mm (21.3 in)
Weight
COMPex 100 series
COMPex 200/300 series
345 kg (760,6 lb)
395 kg (870,8 lb)
Accessories (separately packed for COMPex 200/300 series)
Dimensions
660 mm x 520 mm x 430 mm
(26.0 in x 20.5 in x 16.9 in)
or
520 mm x 520 mm x 470 mm
(20.5 in x 20.5 in x 18.5 in)
Weight
depending on configuration
Laser Device without Rigid Transport Packaging (approx.)
COMPex 100 series
Length
1300 mm (51.2 in)
Height
795 mm (31.3 in)
Width
385 mm (15.2 in)
Weight
250 kg (551.2 lb)
COMPex 200/300 series
Length
1700 mm (51.2 in)
Height
795 mm (31.3 in)
Width
385 mm (15.2 in)
Weight
325 kg (716.5 lb)
Vacuum Pump
Length
230 mm (9.1 in)
Height*
450 mm (17.7 in)
Width
240 mm (9.4 in)
Weight
23 kg (50.7 lb)
* Height with halogen filter: 530 mm (20.9 in)
84
User Manual COMPex
Transport
6.1.4
Transport Packaging
This section describes the means of packaging the COMPex
laser devices to ensure safe shipment and delivery in the
required condition.
NOTE
Always retain the transport packaging to ensure optimum
protection of the laser device during subsequent shipment.
The transport packaging for the COMPex 100 series laser
devices consists of a single transport container. This contains
the laser device together with all accessories and components
removed from the laser device for transport.
The accessories and components of the COMPex 200/300
series laser devices are packed in a separate box (see Section
6.1.3.1 on page 84).
The transport packaging of the laser devices is in two-stages.
These are:
¯ Rigid transport packaging
¯ Anti-static (polyethylene) inner cover.
The rigid transport packaging (see Figure 23) fully
encapsulates the laser devices and inner cover. It consists of a
plywood base pallet (B) and plywood upper panels (A) at the
sides, front, rear and top.
A0300COM.00
A
B
Figure 23: Rigid transport packaging
LAMBDA PHYSIK LASERTECHNIK - 03/00
85
INSTALLATION
Placed on the base pallet are two shock absorbing buffers (see
Figure 24). When the laser device feet are placed in the
locating holes of the buffers (A), the laser device is secured in
position with rigid packaging closed.
A
Figure 24: Shock absorbing buffers
The lase device is to be stored in the rigid transport packaging.
6.1.5
Transport / Lifting with Rigid Packaging
WARNING
Risk of crushing!
The COMPex 100 series laser device together with its
accessories and packaging weights 345 kg (760.6 lb), the
COMPex 200/300 series laser devices together with its
packaging weight 395 kg (870.8 lb).
Prevent tipping or dropping during lifting and transportation.
A suitable fork lift truck or similar device is required to lift the
laser device. Ensure that the fork length and loading capacity is
sufficient to safely lift the laser device in its packaging.
NOTE
For information regarding the size and weight of the laser
device in its packaging, see Section 6.1.3.1 on page 84.
The laser device can be lifted longitudinally or from the side.
Set the forks as far apart as possible to safely lift the laser
device.
86
User Manual COMPex
Transport
6.1.6
Remove Rigid Packaging
Purpose
Remove the top and side panels from the rigid transport
packaging.
NOTE
At the end of this procedure the laser device remains attached
to the base pallet and is protected by the inner cover.
Tools and Materials
•
•
•
Suitable fork-lift truck
Clip removal tool (provided)
Screwdriver for removal of clip removal tool
Preparation
1. Using the fork lift truck or appropriate device, move the
laser device to the location where it is to be unpacked.
2. Set down the laser device in the unpacking location.
Removing the Rigid Packaging
NOTE
The original packaging is needed to re-ship the laser device.
Store the removed packaging in such a way that no parts are
lost or damaged.
A0300COM.00
3. Unscrew and remove the clip removal tool (see Figure 25,
A) from the rigid transport packaging.
Figure 25: Location of clip removal tool
LAMBDA PHYSIK LASERTECHNIK - 03/00
87
INSTALLATION
CAUTION
Incorrect use of the clip removal tool can cause injury!
The transport packaging clips are under tension. Do not use
excess force to remove. While levering off, use the other
hand to restrain movement.
4. Working from the top downwards, remove the clips from the
rigid transport packaging. Push the clip removal tool into the
recess on the clip, press against the clip to control
movement and lever off (see Figure 26).
Figure 26: Removing the clips
5. When the corresponding clips have been removed, remove
the top, front, rear and side panels of the packaging.
Storing the Transport Packaging
6. Stack the disassembled panels of the rigid transport
packaging and accessory packaging onto the base pallet.
NOTE
When stacking, ensure that the outer cover does not become
contaminated or damaged and that the inside surfaces of the
panels cannot become contaminated.
88
User Manual COMPex
Transport
6.1.7
Transport / Lifting without Rigid Packaging
NOTE
For information regarding the size of the laser device, see
Section 6.1.3.1 on page 84.
WARNING
Risk of crushing!
Without accessories, the COMPex 100 series laser device
weighs 250 kg (551.2 lb), the COMPex 200/300 series laser
devices weight 325 kg (716.5 lb).
Prevent tipping or dropping during lifting and
transportation.
CAUTION
Risk of soiling or damaging laser optics!
To avoid the formation of condensed water, ensure that the
max. permissible temperature gradient (5 °C/h) is maintained
while moving the laser device from the storage area.
Ensure that all passageways, corridors and access points
have sufficient clearances. Pay particular attention to the
clearances required to turn the laser device.
A suitable fork lift truck or similar device is required to lift the
laser device. Ensure that the fork length and/or the loading
capacity are sufficient to safely lift the laser device.
When using a fork lift truck, always transport or lift the laser
device together with the base pallet.
When using a crane, position the lifting harness or belt as near
to the laser device’s feet as possible.
A0300COM.00
CAUTION
Risk of damaging the laser device!
Incorrect lifting can cause serious damage. Use lifting points
as far apart as possible to safely lift the laser device.
LAMBDA PHYSIK LASERTECHNIK - 03/00
89
INSTALLATION
6.1.8
Remove Anti-Static Inner Cover
Purpose
Remove the anti-static inner cover from the laser device and
unpack the accessories.
Tools and Materials
•
Knife for cutting sealing tape
Preparation
1. Move the laser device and accessories into the installation
area.
Removing the Inner Covers
NOTE
The original packaging is needed to re-ship the laser device.
Store the removed packaging in such a way that no parts are
lost or damaged.
2. Remove the tape that seals the anti-static inner cover onto
the laser device.
3. Lift the anti-static inner cover off of the laser device.
4. Take the accessories out of the packaging.
5. Clean the accessories as required.
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User Manual COMPex
Transport Locks
6.2
Transport Locks
The COMPex is delivered without any transport locks.
6.3
Install Remote Socket
The remote socket is on the rear side of the laser device,
marked with “REMOTE CONTROL”. It provides the
connections for the door interlock switch and the laser warning
light (according to the international standard IEC 825).
Installing the Door Interlock Switch
1. Connect pins 2 and 3 (e.g. via a switch that opens when a
door is opened, thus shutting down the laser and preventing
accidential beam contact).
Installing the Laser Warning Light (100 mA)
2. Connect pins 1 and 4 (e.g. with a laser radiation lamp that
warns upon entering a room that the laser is on)
NOTE
The laser can only operate when pins 2 and 3 are connected
(with a closed switch, a short-circuit plug, etc.).
A0300COM.00
Installation may vary due to local requirements.
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INSTALLATION
6.4
Connect Water Lines
(COMPex 110 and COMPex 205 only)
Due to the increased power of the COMPex 110 and the
COMPex 205, they cannot be air-cooled only and therefore
require a water cooling supply, when they are continuously
operated at repetition rates higher than 20 Hz.
Water Supply Requirements
Input temperature
5 °C to 20 °C, for 100% duty cycle
Maximum pressure
< 4 bar abs.
Flow rate
1 l/min to 5 l/min
depending on the water temperature
Tools and Materials
•
•
•
2 water hoses (delivered with the COMPex)
4 hose clamps (delivered with the COMPex)
Hose cutter
CAUTION
Laser tubing may corrode!
Do not use deionized or distilled water.
NOTE
Particles in the cooling water can clog the cooling cycle.
We strongly recommend the use of a particle filter.
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User Manual COMPex
Connect Water Lines (COMPex 110 and COMPex 205 only)
NOTE
During intensive use of the laser device, more than 1000 liters of cooling water are consumed per day. For reasons of
cost and environment protection we recommend the use of
an external cooling circuit and an additional water chiller.
There are three types of water line connectors (see Figure 27).
The installation is therfore described in general.
Figure 27: Fittings for water lines
Installing the Water Lines
1. Mount the first water hose to the connector on laser device
marked with “WATER IN”.
2. Connect the other end of the hose to the water source.
3. Mount the second water hose to the connector on laser
device marked with “WATER OUT”.
A0300COM.00
4. Connect the other end of the hose to the building drain.
5. Turn on the water supply and adjust within a range of
1 l/min to 5 l/min.
6. Check that there are no water leaks or blockages.
For a full adjustment of the cooling water see Section 7.2.6 on
page 112.
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INSTALLATION
6.5
Electrical Line Installation
Electrical installation of the COMPex consists of the following
steps:
¯ Connection of the vacuum pump to the laser device
¯ Connection of the handheld keypad to the laser device
¯ Connection of a remote computer to the laser device (if used)
¯ Connection of the laser device to the General Power Outlet
WARNING
Risk of electrical shock!
Work on the electrical system and equipment of the
COMPex must be carried out only by a skilled electrician
or by instructed persons under the supervision and
guidance of a skilled electrician and in accordance with
electrical engineering rules and regulations.
A General Power Outlet is required for the laser device (and
with it the vacuum pump). Note the power consumption of
these devices:
COMPex 102, 201:
1.5 kVA max.
COMPex 301:
2.0 kVA max.
COMPex 110, 120, 205:
3.0 kVA max.
COMPex 150T:
9.0 kVA max.
NOTE
The power supply line of the laser device is to be protected
through an approved and correctly rated circuit interruption
device, in accordance with valid national and local electrical
standards.
6.5.1
Connect the Vacuum Pump
Please consult the operating instructions for the vacuum pump
attached to this manual. The vacuum pump must be connected
to the socket on the rear side of the laser device marked with
“POWER VACUUM PUMP”.
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User Manual COMPex
Electrical Line Installation
6.5.2
Connect the Handheld Keypad
The handheld keypad is an easy and comfortable way to use
the COMPex without an additional PC (a so-called Remote
PC).
CAUTION
Risk of data loss when disconnecting the handheld keypad!
The laser device must be switched off before disconnecting
the handheld keypad from the laser device. Otherwise the
menu parameters can be lost.
Tools and Materials
•
•
•
Handheld keypad
RS232 cable
Appropriate screwdriver for the RS232 plugs.
Connecting the Handheld Keypad
1. Switch off the laser device.
A0300COM.00
2. Plug the RS232 cable into the RS232 port on the laser
device (see Figure 28).
Figure 28: Connecting the RS232 plug to the laser device
3. Fasten the screws of the plug.
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INSTALLATION
4. Plug in the other side of the RS232 cable into the handheld
keypad (see Figure 29).
Figure 29: Connecting the RS232 plug to the keypad
5. Fasten the screws of the plug.
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User Manual COMPex
Electrical Line Installation
6.5.3
Connect a Remote PC
You may only connect a remote PC when the handheld
keypad is disconnected from the laser device.
The remote PC is used to run the COMPex with a program of
your need that uses the COMPex remote software.
Tools and Materials
•
•
RS232C wire with 25 pole D-type connector of the following
specifications (at laser side):
PIN
Signal
Specific.
Description
2
TXD
O, RS232
Transmit Data
3
RXD
I, RS232
Receive Data
7
GND
-
Signal Ground
Appropriate screwdriver for the RS232 plugs.
Connecting the Remote PC to the Laser Device
1. Connect the RS232 cable to the laser device RS232 port
(see Figure 28).
2. Fasten the plug screws at the port.
3. Connect the RS232 cable to a serial port of the Remote PC.
4. Fasten the plugs screws at the port.
A0300COM.00
The remote software is detected automatically by the
communication interface within the laser device.
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INSTALLATION
6.5.4
Connect the Main Power Supply Line
The COMPex must be connected with a General Power Outlet.
WARNING
Risk of Electrocution!
The mains supply line must be installed by instructed
persons only, under the supervision and guidance of a
skilled electrician and in accordance with electrical
engineering rules and regulations.
Tools and Materials
•
•
•
Wire cutter and stripper
If used, plug for your local mains socket
The mains plug (30 A) is to be approved in accordance with
valid national and local electrical standards!
Appropriate screwdrivers for the plug used
Connecting the Laser Device to the General Power Outlet
CAUTION
Laser device can be damaged!
Ensure that laser device is designed for your local voltage
and frequency. You may know this by the laser identification
plate on the rear side of the laser device (lower left corner).
1. Switch the key switch to OFF.
2. Switch the main switch to OFF.
3. Blank the ends of the power supply wire (attached to the
laser device).
4. Connect blanked ends to the plug or to the General Power
Outlet (the colors of the cables depend on the power supply
version)
black or brown:
phase,
white or blue:
neutral,
green or yellow/green:
ground.
5. If used, insert the prepared laser device’s plug into the
mains socket.
The COMPex now is supplied with current.
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User Manual COMPex
Exhaust Lines Installation
6.6
Exhaust Lines Installation
The COMPex has two exhaust lines:
¯ the exhaust line of the laser device housing,
¯ the laser tube exhaust line (including the vacuum pump and
halogen filter, which is also described in this section).
WARNING:
Toxic hazard!
Ensure that a halogen sensor and an evacuating system
are installed in the area of the vacuum pump to avoid
hazardous halogen gas concentrations in case of gas
leaks during laser tube evacuation.
6.6.1
Install Exhaust Line of Laser Device Housing
To prevent poisoning hazards, all gas from the laser must be
completely removed, even when the gas escapes as a result
of an accident.
Tools and Materials
•
•
•
•
•
4 mm Allen key (from service case)
Exhaust line assembly (delivered with the COMPex)
Connections to your own ventilation output (minimum
internal diameter 150 mm, flow min. 200 m3/ h)
Additional blower (when exhaust line is longer than 5m)
Additional exhaust pipe (when exhaust line exceeds 5m)
Installing the Exhaust Line of the Laser Device Housing
A0300COM.00
1. Remove the two 4 mm Allenhead screws at the exhaust fan
outlet on the rear side of the laser device (Figure 30).
2. Connect the exhaust pipe to the exhaust fan outlet using
the (just removed) two 4 mm Allenhead screws.
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INSTALLATION
Figure 30: Loosen the exhaust fan outlet
WARNING
Toxic hazard!
Lead laser and vacuum pump exhaust hose to an
appropriate ventilation system.
Do not connect the exhaust to breathing air systems
(i.e. air conditioning or ventilating systems).
3. Connect the other end of the exhaust tube to a suitable
ventilation output.
4. Check that the air input filters on the front of the laser are
fitted properly and are not obstructed.
5. Switch on the laser main switch.
6. Check that the exhaust fan, mounted on the top rear of the
laser device, is working and sucking air out of the machine.
7. Switch off the laser main switch.
8. Check that there are no leaks around the exhaust pipe
clamp.
Possible contamination within the laser device housing will now
be directed into your exhaust duct system.
6.6.2
Install Laser Tube Exhaust Line
(Including the Vacuum Pump)
To remove gas from the laser tube, the tube has to be
evacuated. This gas contains toxic halogens, which are filtered
out of the exhaust gas by a halogen filter. Both, the vacuum
pump and the halogen filter have to be assembled.
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User Manual COMPex
Exhaust Lines Installation
Tools and Materials
•
•
•
•
•
•
Vacuum pump (delivered with the COMPex)
Vacuum hose (delivered with the COMPex)
Gas exhaust hose ( ¾” flexible hose)
36 mm wrench (from service case)
19 mm wrench (from service case)
6 mm Allen key
Installing the Laser Tube Exhaust Line
Consult the vacuum pump manual (attached to this manual)
for a basic description of the installation of the vacuum pump
and basic function tests.
NOTE
While mounting the vacuum pump and halogen filter, five
plugs are to be removed. Keep these plugs in the service
case for future use.
1. Remove the plug from the vacuum pump (see Figure 31).
A0300COM.00
Figure 31: Remove the plug from the vacuum pump
2. Remove the plastic plug from the halogen filter.
3. Set two of the halogen filter threaded rods into the
anti-torsion fork with the arrow on filter pointing downwards
(see Figure 32).
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INSTALLATION
Figure 32: Insert the halogen filter
4. (If anti-torsion fork is not properly adjusted) Adjust
anti-torsion fork with 6 mm Allen key at adjustment screw
(see Figure 33).
Figure 33: Adjust the anti-torsion fork
5. Tighten halogen filter at vacuum pump with 36 mm wrench.
6. Remove the center plug on top of the halogen filter.
7. Mount the vacuum hose at the halogen filter with the 19 mm
wrench.
8. Remove the plastic plug from the laser device connection
marked “VACUUM PUMP”.
9. Mount the (white) vacuum hose at the laser device
connection with the 19 mm wrench.
10. Remove the plug from the vacuum pump outlet socket.
11. Mount the ¾” gas exhaust hose at the vacuum pump outlet
socket.
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User Manual COMPex
Exhaust Lines Installation
WARNING
Poisoning hazard!
Lead laser and vacuum pump exhaust hose to an
appropriate ventilation system.
Do not connect the exhaust to breathing air systems (i.e.
air conditioning or ventilating systems).
12. Connect the gas exhaust hose to a suitable ventilation
output.
A0300COM.00
The exhaust line installation is now complete.
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INSTALLATION
6.7
Install Gas Lines
The laser device’ s gas solenoid valves are installed in such a
way to allow gas supply from separate gas cylinders. In
addition, premix gas cylinders and/or the optional halogen
source can be used. Thus, the gas line installation varies:
Configuration
Single gas
Premix and helium
Premix, helium
and halogen source
Gas Types
Connection
Halogen
Halogen
Helium
Inert
Neon
Buffer
as specified
Rare
Premix
Buffer (standard)
Helium
Inert
Premix
Buffer
Halogen source
Halogen
Helium
Inert
To obtain optimum laser performance, observe the following
instructions for the gas line installation:
•
•
•
•
Only use gases specified in Section 5.5.
Only use materials specified in Section 5.5.4. This prevents
impurities from entering the gas system.
Store gas cylinders in a dry cabinet to avoid moisture.
Never expose the halogen line to moisture while it contains
halogen or traces of halogen because it will corrode
immediately.
•
Avoid long and complicated line routings. This is a source of
impurities entering the system.
•
Only use clean and oil-free leak-proof fittings throughout the
gas line. Avoid complicated fittings.
•
•
Carefully check for leaks.
Never use gas lines that have been used for other gases.
NOTE
All unused connections must be blanked off with stainless
steel plugs delivered with the laser device.
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User Manual COMPex
Install Gas Lines
Gas Line Requirements
Gas Connections:
6 mm Gyrolok
Gas Lines
Stainless steel 316L, electro polished.
The fluorine supply line is recommended
to be a double-wall tubing.
Tools And Materials
•
Gas supply lines (stainless steel 6x4) with Gyrolok
connectors
•
•
•
•
Panel key (from service case)
9/16” wrench (from service case)
13 mm wrench (from service case)
Tools for shaping and cutting stainless steel tubing
NOTE
Use only gas cylinders with sufficient pressure (see Section
5.5.2).
Installing the Gas Supply Lines
NOTE
See Chapter 11 of this manual for a gas flow diagram.
1. Check that pressure regulators are connected to the gas
cylinders.
2. Check that the gas supply lines are laid and connected to
the pressure regulators (or a halogen source).
CAUTION
Gas connectors can be damaged!
Cut stainless steel lines only with an appropriate tool.
Do not use a saw. Do not use lubricants.
A0300COM.00
3. Fit each line with a 6 mm Gyrolok fitting.
4. Check that all gas supply valves are closed.
5. Remove the blanking plug from the appropriate gas
connector on the laser device.
NOTE
Keep the blanking plug in the service case for future use.
LAMBDA PHYSIK LASERTECHNIK - 03/00
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INSTALLATION
6. Fit the gas line to the appropriate connector using the
Gyrolok fittings.
7. Tighten the Gyrolok fittings using the 9/16” wrench and
the 13 mm wrench.
8. Repeat steps 5 to 7 until all supply lines are connected.
Final Checks
9. Check that all connections are properly matched and
sealed tightly.
10. Perform a leak test on all newly fitted lines according to
Section 10.7.1 of this manual.
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User Manual COMPex
7
OPERATION
This chapter contains information on how to use the COMPex
with the handheld keypad coupled with the local software part
of the communication interface. All maintenance instructions
are described separately in Chapter 8.
NOTE
The remote software is described in Chapter 9.
7.1
Overview of this Chapter
The individual buttons are explained on the pages given in this
overview.
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1
2
3
4
5
6
7
COUNTS
GAS
MENU
SEL
NEW
FILL
SEL
F1
F6
RESET
F2
F7
8
9
RUN
STOP
TRIGGER
EXT/INT
MODE
7
8
9
HV
RESET
FLUSH
LINE
4
5
6
EGY
EGY
CAL
PURGE
LINE
F3
F8
1
2
3
PURGE
F4
F9
0
,
CLEAR
F5
F10
13
12
16
REPRATE
RESERVOIR
ENTER
15
EXE
BREAK
14
1. Start laser operation
Stop laser operation
p. 111
p. 111
2. Trigger Mode
p. 117
3. Running Mode
p. 119
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11
107
OPERATION
4. Repetition Rate
p. 118
5. Select Counter
p. 124
6. Reset User Counter
p. 125
7. Select Gas Menu
p. 114
8. Help
not described
9. Emergency Fill
(Manual Fill with Inert Gas)
p.126
10. Manual Halogen Injection
p.129
11. Gas Mode
p.116
12. Charge On Demand
p.122
13. Temperature Control
p.128
14. Reset Gas Menu
p.115
15. Set Beam Energy
p.121
16. Set HV Constant
p.121
NOTE
A) The function keys <F2> and <F9> are for service only and
therefore protected with a password.
B) To abort software related procedure without saving changes, press <BREAK>.
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User Manual COMPex
Fundamental Laser Operations
7.2
Fundamental Laser Operations
Please note the difference between “laser device” and ”laser”
(see Section 2.1.3 on page 12).
7.2.1
Switch on the Laser Device
Starting the laser device means:
¯ starting the 24 V circuit,
¯ checking the data ring and laser modules with a self-test,
¯ warming up the thyratron.
The last two steps are performed automatically.
Tools and Materials
•
None
Preparation
WARNING
Risk of serious injury
Ensure that only authorized and instructed personnel
operate the laser.
1. Ensure that the installation has been completed.
2. Ensure that a leak test has been performed.
3. Check the beam path (see Section 7.2.5 on page 112).
4. Close all gas cylinder valves.
5. Close all pressure regulators in the gas lines.
6. Open gas cylinder valves.
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7. Set pressure regulators to max. 4 bar (abs).
8. Observe the maintenance schedule.
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OPERATION
Switching On the Laser Device
9. (COMPex 110 and 205 only)
Switch on the cooling water (for adjustment, see Section
7.2.6 on page 112).
A
C
B
KEY SWITCH
CONTROL
SUPPLY
24V AC
F1
F3
F5
F2
F4
F6
D
MainS
POWER ON
LINE
Figure 34: Power switches and lamps on the laser device
10. Turn the key-switch from “0” to ”I” (A, Figure 34).
11. Turn the main switch (C) from OFF to ON.
12. The control supply lamp and the power on lamp (B and D)
are now illuminated.
The laser device performs a self-test.
In case “FATAL ERROR” is displayed in the second line
during the self-test, see Section 10.2)
After a succesfull self-test, the laser device warms up the
thyratron for eight minutes, displaying the message
“WARMUP xx min” (“xx” is the remaining time in minutes).
NOTE
During the warm-up period, the laser is off but can perform
commands that do not require laser beam generation.
The warm-up period can be used to perform maintenance
actions:
¯ check parameter settings (see Section 7.2.7 on page 113)
¯ flush the lines (see Section 8.4.1 on page 134) or
¯ perform a new gas fill (see Section 8.4.3 on page 139).
After warm-up, the laser is ready for laser operation (see
Section 7.2.2).
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User Manual COMPex
Fundamental Laser Operations
7.2.2
Start Laser Operation
Tools and Materials
•
Protective eyewear
Starting Laser Operation
NOTE
Don’t start laser operation at the max. high voltage level. The
max. HV value should be set only after a few minutes of laser operation (see Section 7.5.3 on page 121).
1. Open the beam shutter.
2. Press <RUN/STOP>.
The laser now needs a few seconds to initialize the power
supply before emitting laser light with the given repetition
rate. You recognize it by the clicking noises: the higher the
repetition rate, the quicker the clicking.
7.2.3
Stop Laser Operation
Tools and Materials
•
Protective eyewear
Stopping Laser Operation
1. Press <BREAK> twice.
2. Close the beam shutter.
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NOTE
The button <RUN/STOP> can also be used, but it fails to
stop the laser when operating within a command, that requires input.
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OPERATION
7.2.4
Switch off the Laser Device
Tools and Materials
•
None
Switching Off the Laser Device
1. Turn the main switch to OFF.
2. Turn the key switch to ‘0’.
7.2.5
Check the Beam Path
WARNING
Danger to health!
Keep the beam path free of reflecting objects.
Shield the laser beam.
Do not wear any reflectives (like rings, watches, etc.)
Read safety instructions carefully before running the laser.
Ensure that nobody accidentally looks into or touches the laser
beam or reflections.
7.2.6
Adjust the Cooling Water Flow Rate
(COMPex 110 and 205 only)
The cooling water adjustment depends on the current laser
device configuration:
7.2.6.1
Laser Device with Optional Temperature Control
Tools and Materials
•
None
Adjusting the Cooling Water Flow Rate
1. Open the cooling water valve.
The temperature control adjusts the flow rate on its own.
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User Manual COMPex
Fundamental Laser Operations
7.2.6.2
Laser Device without Temperature Control
Tools and Materials
•
Thermometer, scaled from 0°C to 50 °C (32 °F to 122 °F)
Adjusting the Cooling Water Flow Rate
1. Open the cooling water valve.
2. Switch on the laser device.
3. Start laser operation for about 1000 shots to warm up the
laser tube.
4. Measure the water outlet temperature. It must be within
25°C to 30 °C (77 °F to 86 °F). This results in a laser tube
temperature of 30 °C to 38 °C (86 °C to 100 °F).
5. If the water temperature is wrong, adjust the water flow.
6. Stop laser operation.
7. Switch off the laser device.
7.2.7
Check Parameter Setting
The actual settings of the main parameters displayed by the
COMPex are:
1
3
2
4
5
6
MODE: HV
10 Hz 28.0 kV
>
0 mJ
3030 mbar
KrF
1 - Running Mode (see Section 7.5),
2 - Repetition Rate (see Section 7.4.2),
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3 - Charging Voltage (see Section 2.5.2),
4 - (if Running Mode is HV Constant) actual value measured by
the Energy Monitor (see Section 2.5.2);
(otherwise) preset Energy Constant Value (see Section 7.5.2),
5 - Laser Tube Pressure,
6 - Excimer Gas (Gas Menu).
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OPERATION
7.3
Gas Menu
Besides other data, the gas menus contain all partial gas
pressures. Some lasers only have one gas menu. If your laser
is designed to run with different gas mixtures you must select
the required gas menu. The laser saves this selection even
after being switched off.
7.3.1
Select the Gas Menu
Select the gas menu to change the excimer gas.
The gas menu displays the following parameters:
¯ menu number,
¯ gas mixture,
¯ partial pressures (step by step).
Tools and Materials
•
None
Preconditions
•
Laser in Stand-by mode
Selecting a Gas Menu
1. Press <BREAK> twice to stop laser operation.
2. Press the MENU button <SEL>.
In the second line of the handheld keypad a short-cut of the
present menu is displayed.
3. Press the left or right cursor to select the number of the gas
menu.
4. Press <ENTER> to confirm.
5. Press <ENTER> for next partial pressure.
NOTE
The factory settings of the partial pressures are optimized according to state-of-the-art. We strongly recommend that settings are only changed when the Lambda gas specifications
are changed. Reset the gas menu to re-obtain the factory
setting (see Section 7.3.2.)
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User Manual COMPex
Gas Menu
6. If needed, type new partial pressure value using numerical
keys.
The limit values of the partial pressures are ± 20% of the
partial pressures of the factory settings.
7. Repeat steps 5. and 6. for the next gas component.
8. Press <ENTER> to confirm the gas menu.
The laser will perform the next new gas fill with the new gas
menu data.
7.3.2
Reset the Gas Menu to Factory Settings
The COMPex allows to reset all gas menus to the factory
settings. This resets:
¯ partial pressures,
¯ gas mode,
¯ repetition rate,
¯ energy filter.
Tools and Materials
•
None
Preconditions
•
Laser device switched on
NOTE
If the laser is in Off mode, this command is only available twice.
Resetting the Gas Menus
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1. Press <BREAK> twice to stop laser operation.
2. Press the MENU button <RESET>.
3. Press <EXE> to reset to default.
The gas menu is now set to the factory settings.
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OPERATION
7.3.3
Select the Gas Mode
This function allows to select the gas mode:
¯ Single gas mode
all gas components are connected as several single gas
cylinders, the partial gas pressures are mixed by the control
of the laser.
¯ Premix gas mode
all gas components are premixed in one gas cylinder.
If the factory setting is PREMIX, it may be impossible to choose
SINGLE GASES and vice versa. This depends on the Gas
Menu only.
NOTE
A) Unless other arrangements have been made with
Lambda Physik, a premix cylinder must be connected to the
BUFFER gas inlet and a helium cylinder to the INERT gas inlet. All other connections must be blanked off with stainless
steel plugs delivered with the laser device.
B) When resetting the Gas Menu, the Gas Mode is reset to
factory settings too.
Tools and Materials
•
None
Preconditions
•
Laser in Off mode
Selecting the Gas Mode
1. Press <BREAK> twice to stop laser operation.
2. Press function button <F8>.
3. Press cursor left or right to select Gas Mode.
4. Press <ENTER> to confirm.
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User Manual COMPex
Change Triggering
7.4
Change Triggering
To “trigger” the laser means to cause it to emit a single laser
pulse. There are two trigger modes:
¯ internal trigger:
laser pulses are triggered by the laser’s own trigger
generator,
¯ external trigger:
laser pulses are triggered by an external trigger signal via
the Ext. Trig. socket at the rear of the COMPex (for
specifications of the signal see Section 5.3.4).
7.4.1
Change the Trigger Mode
The trigger mode is to be changed to switch between internal
and external triggering.
Tools and Materials
•
None
Preconditions
•
Laser device switched on
Changing the Trigger Mode
1. Press <TRIGGER INT/EXT>.
2. Press cursor left or right to select trigger mode.
3. Press <ENTER> to confirm.
The current trigger mode is displayed.
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4. Press <ENTER> to quit.
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OPERATION
7.4.2
Change the Repetition Rate
The repetition rate determines the number of laser pulses per
second. The repetition rate is given in Hz (that is 1/s).
The minimum repetition rate is 1 Hz. The maximum repetition
rate depends on the laser type noted on your laser test sheet.
Only integer numbers are accepted.
NOTE
Due to the power range limits of the power supply, some laser types do not support maximum repetition rate with HVmax.
Tools and Materials
•
None
Preconditions
•
Laser device switched on
Entering the Repetition Rate
1. Press <REPRATE>.
2. Type in the new repetition rate using numerical buttons.
3. Press <ENTER> to confirm.
The new value is displayed in the first line of the display.
NOTE
An acoustic signal warns the user of out-of-range input. The
last acceptable value is retained.
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User Manual COMPex
Running Modes
7.5
Running Modes
Even in a well designed and passivated excimer laser the laser
gas degrades due to slow impurity generation during laser
operation. Most impurities are removed by the built-in
electrostatic filter. Nevertheless, the gas quality is continuously
degraded which affects the output data. To compensate this,
the COMPex can be operated in three different running modes
(see also Section 2.5.2):
CAUTION
Work application could be endangered!
While a Partial Gas Replacement (EGY PGR) takes place,
pulse energy may fluctuate more strongly than normal.
Ensure that this does not endanger your application.
1. Energy Constant Mode with Partial Gas Replacement
(EGY PGR)
The laser keeps the output energy of the laser pulses constant
by increasing the charging voltage HV.
If the charging voltage exceeds the replacement value HVrepl
and HIs were not successful, a partial gas replacement takes
place (see also flow diagram, page 26). This value is
predetermined by the gas menu (see Section 7.3).
The EGY PGR shall be used,
¯ for precise beam energy with peak-to-peak fluctuations of
beam energy allowed.
2. Energy Constant Mode, No Gas Replacement
(EGY NGR)
The laser keeps the energy of the laser pulses constant by
increasing the charging voltage HV.
A0300COM.00
There will be a warning but no gas replacement if charging
voltage exceeds the threshold limit value voltage HVrepl.
The EGY NGR mode shall be used,
¯ for precise beam energy with no peak-to-peak fluctuations
allowed,
¯ if some gases are currently not connected to the laser device,
¯ when using premix gas supply.
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OPERATION
3. High Voltage Constant Mode (HV)
The laser keeps the charging voltage constant and therefore
the beam energy slowly decreases. The beam energy in
HV Constant Mode with a new fill is up to 40% higher than in
any EGY Mode.
The HV Mode shall be used
¯ for maximum beam energy for a short time,
¯ if precise beam energy is not necessary, especially for
service purposes.
NOTE
The replacement value HVrepl can be obtained by pressing
the <HV> button while the laser is in Energy Constant Mode
(see also Section 2.5.2).
7.5.1
Select the Running Mode
The current running mode is displayed in the upper left corner
of the handheld keypad.
Tools and Materials
•
None
Preconditions
•
Laser device switched on
Selecting the Running Mode
1. Press <MODE>.
2. Press left or right cursor to select the required running
mode.
3. Press <ENTER> to confirm.
The new mode is displayed in the upper left corner of the
display.
NOTE
The message “PRESET ENERGY TOO HIGH” indicates that
a new gas fill is needed (see Section 8.4.3).
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User Manual COMPex
Running Modes
7.5.2
Adjust the Energy Constant (EGY) Mode
In the Energy Constant (EGY) Modes the laser keeps the
beam energy constant. You must input the stabilization beam
energy. The range of possible energy values is predetermined
by the gas menu (see Section 7.3).
Tools and Materials
•
None
Preconditions
•
Laser is running in Energy Constant mode
Entering a Beam Energy Value
1. Press <EGY>.
2. Type new beam energy value (in mJ) using numerical
buttons.
3. Press <ENTER> to confirm the value.
The new value is displayed in the first line of the handheld
keypad display.
NOTE
An acoustic signal warns the user of out-of-range input. The
last acceptable value is retained.
7.5.3
Adjust the High Voltage Constant (HV) Mode
A0300COM.00
In HV Constant (HV) Mode the laser keeps the charging
voltage HV constant (see also Section 2.5.2). The minimum
and maximum high voltage values are specified in the Gas
Menu (see Section 7.3). The constant charging voltage (HV
Constant Value) must be within this range.
NOTE
If the current running mode is one of the Energy Constant
Modes (EGY), pressing the button <HV> displays HVrepl, the
replacement value for partial gas replacement (see also Section 2.5.2).
LAMBDA PHYSIK LASERTECHNIK - 03/00
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OPERATION
Tools and Materials
•
None
Preconditions
•
Laser running in HV mode
Adjusting the HV Constant Value
NOTE
Due to the power range limits of the power supply, some lasers types do not support maximum repetition rate with
HVmax.
1. Press <HV>.
2. Type the new HV Constant Value using the numerical
buttons.
3. Press <ENTER> to confirm the choice.
The new HV Constant Value is displayed on the handheld
keypads display.
NOTE
An acoustic signal warns the user of out-of-range input. The
last acceptable value is retained.
7.5.4
Choose Charge On Demand (COD)
NOTE
This function is only available, if the “Charge On Demand” is
built-in.
This function toggles between normal charging and Charge On
Demand (COD). COD overcomes the self-firing effect of the
thyratron in order to limit the period of time that HV is applied to
the thyratron. The trigger signal enables the power supply to
charge the storage capacitors, so without a trigger signal, there
is no HV (see also Chapter 12).
The trade-off for this advantage is an additional jitter of about
2.5 µs (the typical jitter for the COMPex is only 2 ns). Since the
COD can be activated or deactivated, the COMPex is
adaptable to both, jitter sensitive applications and those which
do not allow additional pulses.
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User Manual COMPex
Running Modes
NOTE
Due to the capacitor charging time of 20 ms, COD supports
repetition rates only up to 50 Hz. Higher values are automatically replaced with 50 Hz and the error message “WARNING! REPRATE FOR COD > 50 HZ” is displayed.
The COD should be used:
¯ to avoid, that laser stands by for some time, while capacitors
are charged. This may cause the laser to self-fire.
¯ if the firing frequency is less than 50 Hz and jitter and delay
are not critical.
The COD command can also be used to know the COD time
delay, as it is displayed during selection of the COD.
Tools and Materials
•
None
Preconditions
•
Laser in Off mode
Toggeling between COD On or Off
1. Press <BREAK> twice to stop laser operation.
2. Press function button <F10>.
If current status is “ON”, the time delay is displayed in µsec.
This is the time between trigger signal and laser pulse; in
other words, the time the capacitors need to be charged
before each laser pulse.
3. Press cursor left or right to select ON or OFF.
4. Press ENTER to confirm.
A0300COM.00
The COD status is saved. If COD has been switched on,
“COD” is displayed.
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7.6
Pulse Counter
The COMPex has two different pulse counters:
¯ Total Counter;
counts the total number of laser pulses emitted by the laser
since its first use.
¯ User Counter;
counts the number of laser pulses emitted since the last
counter reset (see Section 7.6.2).
7.6.1
Select the Pulse Counter
You may use this command:
¯ to check if scheduled actions are required,
¯ to determine the actual number of pulses.
Tools and Materials
•
None
Preconditions
•
Laser device switched on
Selecting the Counter
1. Press the COUNT button <SEL>.
2. Press left or right cursor to select the counter.
3. Press <ENTER> to confirm.
The selected counter and the current counter value are
displayed in the second line of the communication interface
display.
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User Manual COMPex
Pulse Counter
7.6.2
Reset the User Counter
The user counter is one of the COMPex pulse counters. The
total counter, however, cannot be reset.
Tools and Materials
•
None
Preconditions
•
Laser in Off mode
Resetting the User Counter
1. Press <BREAK> twice to stop laser operation.
2. Press the COUNT button <RESET>.
3. Press <EXE> to confirm.
A0300COM.00
The user counter is now set to zero.
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OPERATION
7.7
Emergency Fill
An emergency fill is required to fill up the tube to a pressure
higher than atmospheric pressure. This will protect the laser
tube from intruding gases or humidity for some time, even in
the case of a malfunction. The COMPex emergency fill is called
“Manual Fill with Inert Gas”.
7.7.1
Manual Fill with Inert Gas
NOTE
This is possible only if a gas cylinder is attached to the inert
gas line. If not, make a transportation fill instead (see Section
8.10.1).
The COMPex offers to manually inject inert gas into the tube.
The injection lasts 10 second and is used to increase the tube
pressure.
The laser tube is to be filled manually with inert
¯ if a procedure has been interrupted, while tube pressure is
less than 1050 mbar,
¯ if the laser tube leaks (or is suspected to leak) so that the
tube pressure remains higher than atmospheric pressure.
Tools and Materials
•
Gas cylinders with a minimum of 5 bar remaining pressure
Preconditions
•
Laser in Off mode
Preparation
1. Press two times <BREAK> to stop laser operation.
The laser is now off. Next prepare the gas line:
2. Close inert gas pressure regulator.
3. Open valve on the inert gas cylinder.
4. Set inert gas pressure regulator to 4 bar.
Now a manual fill of inert gas can be performed.
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User Manual COMPex
Emergency Fill
Performing a Manual Fill with Inert Gas
5. Press <F6>.
6. Press cursor left or right to select MANUAL INERT.
7. Press <ENTER> to confirm.
8. Press <EXE> to execute the manual fill of inert gas.
A0300COM.00
The laser head valve and the inert gas valve open for 10
seconds and afterwards close automatically. The new
pressure is displayed. If a higher pressure is required,
repeat step 8.
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OPERATION
7.8
Additionals
7.8.1
Temperature Control (optional)
The temperature control can be activated to maintain a given
tube temperature.
Tools and Materials
•
None
Preconditions
•
Laser in Off mode
Activating the Temperature Control
1. Press <BREAK> twice to stop laser operation.
2. Ensure that the cooling water valve is open.
3. Press button <F5>.
4. Press cursor left or right to select ON or OFF.
5. Press <ENTER> to confirm.
If the temperature control is on, it keeps the tube
temperature constant by actuating the water valve.
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User Manual COMPex
Additionals
7.8.2
Manual Halogen Injection (for service only!)
NOTE
This is only available with a separate halogen gas cylinder.
Injects halogen into the laser tube. The partial pressure
injected depends on the value saved in the gas menu. This
operation may be performed to inject halogen manually if the
beam power decreases.
CAUTION
Laser tube can be damaged!
Impurities will accumulate within the tube and may damage
tube and tube elements.
Never perform more than three manual halogen injections
before next PGR is performed.
Tools and Materials
•
Halogen gas cylinder with a minimum of 5 bar remaining
pressure
Preconditions
•
Laser in Off mode
Performing a Halogen Injection
1. Press <BREAK> twice to stop laser operation.
2. Close halogen gas pressure regulator.
3. Open valve of halogen gas cylinder.
4. Set halogen gas pressure regulator to 4 bar.
5. Press button <F7>.
6. Press <ENTER> to confirm.
A0300COM.00
7. Press <EXE> to inject halogen.
The laser head valve and the halogen valve open for
2 seconds and then close automatically.
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User Manual COMPex
8
MAINTENANCE
This chapter describes regular maintenance actions using the
handheld keypad and the local software of the
communications interface. Additionally, it contains a
maintenance schedule.
See Chapter 9 for the remote software codes.
8.1
Overview of this Chapter
2 3
COUNTS
GAS
MENU
SEL
NEW
FILL
SEL
F1
F6
RESET
F2
F7
4
RUN
STOP
TRIGGER
EXT/INT
MODE
7
8
9
HV
RESET
FLUSH
LINE
4
5
6
EGY
EGY
CAL
PURGE
LINE
F3
F8
1
2
3
PURGE
RESERVOIR
F4
F9
0
,
CLEAR
BREAK
F5
F10
REPRATE
ENTER
EXE
8
A0300COM.00
5
1
7
6
1. New Gas Fill
p. 139
2. Flush Gas Line
p. 134
3. Purge Gas Line
p. 137
4. Passivating Laser Tube
p. 146
5. Transportation Fill
Emergency Fill
p. 174
p. 126
6. Halogen Filter Filling Ratio
Halogen Filter Reset
p. 169
p. 173
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MAINTENANCE
7. Purging Laser Tube
Clean and Replace Optics
(”Windows Cleaning”)
p. 145
p. 148
8. Calibrating Energy Monitor
p. 159
Maintenance Actions without Handheld Keypad
•
•
•
•
Exchanging Gas Cylinders
p. 143
Checking Thyratron
p. 165
Exchanging Halogen Filter
p. 170
Disconnecting Gas Lines
p. 176
NOTE
To cancel software related maintenance actions, press
<BREAK>. The routines “New Fill” and “Purge Laser Tube”
cannot be canceled when the gas action is in progress.
8.2
Laser Logbook
It is important to continuously keep track of the characteristic
data for the laser operation. For this purpose you should
prepare a laser logbook. This is an important aid in scheduling
necessary maintenance and searching for problems.
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User Manual COMPex
Maintenance Schedule
8.3
Maintenance Schedule
For proper and safe operation of the COMPex follow the
maintenance schedule supplied here.
Procedure
Flushing Gas Lines
(Section 8.4.1)
New Gas Fill
(Section 8.4.3)
-
Time
Other Conditions
-
Time
Req. [h]
before a new gas fill
-
after a week of nonoperation
-
•
if beam energy too
low for your
application
0.5
•
•
5-101)
1-3 weeks2)
Exchanging Gas Cylinders (Section 8.4.4)
-
-
•
if pressure < 5 bar
0.5
Cleaning Tube Optics
(Section 8.6)
15 - 30
-
•
all 3-5 new gas fills
1.0
•
after cleaning the
optics the 5th time3)
1.0
•
if optics are
damaged
1.0
•
whenever the tube
optics have been
maintained
0.2
-
Exchanging Tube Optics (Section 8.6)
A0300COM.00
Pulses
[Million]
-
-
Calibrating Energy Monitor (Section 8.7)
-
-
Cleaning Beam Splitter
(Section 8.7)
-
-
•
with every energy
monitor calibration
Exchanging Halogen Filter (Section 8.9.2)
-
1 year
•
after 30 new gas fills
0.2
Transportation Fill (Section 8.10.1)
-
•
•
before a transport
0.2
-
before storage
0.2
1)
2)
3)
Typical values for Dynamic Gas Lifetime. XeCl tends to be greater than the other gases.
Typical values for Static Gas Lifetime. XeCl tends to be greater than the other gases.
with ArF every 3rd time.
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MAINTENANCE
8.4
Gas System Maintenance
The gas quality is a crucial factor in excimer laser operations.
Pay special attention to the maintenance of the gas system and
gases.
NOTE
When flushing or purging the external gas supply lines, the
buffer solenoid valve opens automatically after switching off
the vacuum pump to refill the internal gas system with the
gas connected to “Buffer”.
8.4.1
Flush Gas Lines
Flushing a gas line consists of evacuating the line for two
seconds. It is intended to fill the line with fresh gas afterwards.
This command is used
¯ to evacuate a line (see Section 8.4.1.1)
¯ to fill a gas line with pure gas (e.g. after a leak test or
changing a gas cylinder, or before starting the laser after a
week of standstill); the corresponding gas cylinder must be
open (see Section 8.4.1.2).
NOTE
To completely flush a line from the gas cylinder valve to the
laser, set the pressure regulator to 5 bar. If pressure regulator setting is lower, gas residues could remain in the line between pressure regulator and gas cylinder valve.
8.4.1.1
Evacuate a Gas Line
Tools and Materials
•
None
Preconditions
•
134
Laser in Off mode
User Manual COMPex
Gas System Maintenance
Evacuating the Line
1. Press <BREAK> twice to stop laser operation.
2. Close the pressure regulator of the gas line to be evacuated.
3. Close the corresponding gas cylinder valve.
4. Set the pressure regulator to 5 bar.
The line is now open, but no gas will enter from the gas
cylinder.
5. Press <FLUSH LINE> to execute the flushing procedure.
A message including the currently selected gas line as well
as other choices is displayed.
6. Press cursor left or right to select gas line to be evacuated.
7. Press <ENTER> to confirm.
8. Press <EXE> to execute the flushing.
The message ”FLUSH x.L.” appears (where ”x” represents
the first letter of the type of gas). The gas inlet is closed and
the vacuum pump will run for two seconds.
NOTE
Depending on the length of the gas line, this procedure is to
be repeated two or three times to evacuate the line completely.
8.4.1.2
Refill a Gas Line with Fresh Gas
Tools and Materials
•
Gas cylinders with a minimum of 5 bar remaining pressure.
Preconditions
•
Laser in Off mode
A0300COM.00
Evacuating the Line
1. Press <BREAK> twice to stop laser operation.
The laser is now off. Next prepare the gas line:
2. Close pressure regulator of the gas line to be filled.
3. Close gas cylinder valve of the corresponding gas line.
4. Set pressure regulator to 5 bar.
The line is now open, but no gas will enter from the gas
cylinder.
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MAINTENANCE
5. Press <FLUSH LINE> to flush the gas line.
A message including the currently selected gas line as well
as other choices is displayed.
6. Press cursor left or right to choose desired gas line to
evacuate.
7. Press <ENTER> to confirm the choice.
8. Press <EXE> to execute the flushing.
The message ”FLUSH x.L.” appears (where ”x” represents
the first letter of the type of gas). The gas inlet is closed and
the vacuum pump will run for two seconds.
NOTE
Depending on the length of the gas line, this procedure is to
be repeated two or three times to evacuate the line completely.
Filling the Line with Fresh Gas
9. Close pressure regulator corresponding to the desired gas
line.
10. Open the gas cylinder valve corresponding to the desired
gas line.
11. Set pressure regulator to 5 bar (abs.).
Gas from the gas cylinder fills the line.
NOTE
It is recommended to repeat this procedure at least once to
refill the gas line completely.
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User Manual COMPex
Gas System Maintenance
8.4.2
Purge Gas Lines
Purging a gas line means: The line is evacuated for five
seconds and afterwards filled with the gas connected to the
inert gas line. This is done using the PURGE LINE procedure.
NOTE
This function is only possible with an inert gas cylinder attached to the inert gas line.
This command is used
¯ to protect lines against impurities when the laser device is
not to be used for several days,
¯ to prevent emission of toxic gases before replacing a gas
cylinder,
¯ to prevent a poisoning hazard when performing a leak test
on the halogen line.
NOTE
To completely purge a line from gas cylinder valve to laser,
set the pressure regulator to 5 bar. If pressure regulator setting is lower toxic gas residue can remain in the line between
pressure regulator and gas cylinder valve.
Tools and Materials
•
Gas cylinders with a minimum of 5 bar remaining pressure.
Preconditions
•
Laser in Off mode
Purging a Gas Line
A0300COM.00
1. Press <BREAK> twice to stop laser operation.
NOTE
Ensure, that the gas cylinders connected to the gas lines are
open. Otherwise the error message ”NO GAS FLOW” appears
while purging the line.
2. Close gas cylinder valve of line to be purged.
3. Set pressure regulator in this line to 5 bar.
4. Close pressure regulator in the inert gas line.
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MAINTENANCE
5. Open gas cylinder valve in the inert gas line.
6. Set pressure regulator of inert line to 5 bar.
7. Press <PURGE LINE>.
8. Press <EXE> to start purging the gas line.
A message including the currently selected gas line as well
as other choices is displayed.
9. Press cursor left or right to select gas line to be evacuated.
10. Press <ENTER> to confirm the choice.
11. Press <EXE> to execute the purging.
The vacuum pump runs for 5 seconds to evacuate the line
and the message ”PURGE LINE, x.L.” is displayed (where
”x” represents the first letter of the type of gas). Then the
inert gas valve opens for two seconds to allow inert gas flow
into the line.
NOTE
Depending on the length of the gas line, this procedure is to
be repeated two or three times to fill the line completely with
inert gas.
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User Manual COMPex
Gas System Maintenance
8.4.3
New Gas Fill
A new gas fill replaces gases of insufficient quality in the tube
with fresh gases. This is done using the NEW FILL Procedure.
The NEW FILL procedure differs, whether the laser device is
equipped with a halogen source or not. Both cases are
described below.
The composition and pressure of the fresh gas mixture is
specified by the gas menu.
A new gas fill is recommended:
¯ if static gas lifetime is exceeded,
¯ if dynamic gas lifetime is exceeded,
¯ if the warning or error message ”PRESET ENERGY TOO
HIGH” appears (remote: ON:2 and OFF:2) if the gas is not
new,
¯ if the warning or error message ”NEW GAS FILL NEEDED”
appears (remote: ON:8 and OFF:8),
¯ if the error message ”LOW LIGHT” appears (remote:
OFF:26),
¯ if the energy monitor is to be calibrated,
¯ if laser optics have been cleaned or replaced,
¯ if the tube has been re-passivated,
Gas lifetime and energy yield of the gases depend greatly on
operational conditions. Thus you should protocol the frequency
you need a new gas fill, so as to develop a maintenance
schedule on your own. Record the total counter number and
the date of each new gas fill into your laser logbook. Note that
the following situations shorten the gas lifetime or reduce the
energy yield of the gases:
A0300COM.00
¯ Laser tube has just been passivated.
¯ First fill has been made after several weeks without
operation.
¯ Another wavelength has been selected.
¯ Laser tube optics are soiled,
¯ high energy values in Energy Constant Mode.
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MAINTENANCE
CAUTION
Laser tube can be damaged!
If evacuation time exceeds 11.5 minutes, a gas leak is likely.
The laser control software performs an automatic Safety Fill up
to 1050 mbar with the gas connected to “Buffer”. Proceed
according to the safety instructions.
NOTE
Only in case of danger press <BREAK> while the NEW FILL
procedure is in progress, because the procedure will be terminated immediately. The fill is not completed, so tube pressure may be insufficient. If this has occurred, manually fill the
tube to 1050 mbar with inert gas (see Section 7.7) or start a
New Fill again.
8.4.3.1
New Gas Fill without Halogen Source
Tools and Materials
•
•
Gas cylinders with a minimum of 10 bar remaining pressure.
New halogen filter (in stock).
Preconditions
•
Laser in Off mode
Performing a New Gas Fill
1. Press <BREAK> twice to stop laser operation.
The laser is now off.
2. If the laser has not been run for more than a month, purge
the tube and the gas lines to remove impurities (to purge
the laser tube, see Section 8.5.1; to purge the gas lines,
see Section 8.4.2).
3. Close all pressure regulators.
4. Open all gas cylinder valves.
5. Set pressure regulators to 5 bar.
6. Press <NEW FILL>.
7. Press <EXE> to start the NEW FILL procedure.
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User Manual COMPex
Gas System Maintenance
The halogen filter ratio is checked. If it exceeds 99%, the
message ”RENEW HALOGEN FILTER” is displayed and
the NEW FILL procedure is terminated. Replace the
halogen filter (see Section 8.9.2).
If the ratio is in range, the vacuum pump starts to evacuate
the tube. The current pressure and the message ”NEW
FILL, EVAC” are displayed. After reaching 30 mbar the
vacuum pump stops.
The laser then enters a two-minute stand-by phase for a
laser tube gas leak check. The message ”NEW FILL, WAIT”
is displayed.
If everything is all right, the message changes to ”NEW
FILL, FILL”. The halogen gas valve opens and the laser
tube is filled to the preset value (from Gas Menu) with
halogen. Then the halogen gas valve closes and procedure
continues with the next gas, until the new gas fill is
completed.
8.4.3.2
New Gas Fill with Halogen Source
Tools and Materials
•
•
Gas cylinders with a minimum of 10 bar remaining pressure.
New halogen filter (in stock).
Preconditions
•
Laser in Off mode
Performing a New Gas Fill
A0300COM.00
1. Press <BREAK> twice to stop laser operation.
The laser is now off.
2. If the laser has not been run for more than a month, purge
the tube and the gas lines to ensure that gas lines are free
from impurities (to purge the laser tube, see Section 8.5.1;
to purge the lines, see Section 8.4.2).
3. Close all pressure regulators.
4. Open all gas cylinder valves and source valve.
5. Set pressure regulators to 5 bar.
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MAINTENANCE
6. Set pressure regulator on gas cylinder that controls the
halogen source’s pilot valve to 6.5 bar.
7. Press <NEW FILL>.
8. Press <EXE> to start the NEW FILL procedure.
The source’s remaining filling ratio is displayed in percent
(e.g. CAP. LEFT = 85 %). If it is near 0%, replace halogen
source until the next new gas fill.
The halogen filter ratio is also checked. If it exceeds 99%,
the message ”RENEW HALOGEN FILTER” is displayed
and the NEW FILL procedure terminates. Replace the
halogen filter (see Section 8.9.2).
If the ratio is within range:
9. Press <ENTER> to continue.
If a chlorine source is present, additional steps are required
whether the current room temperature is above (HIGH) or
below (LOW) 22 °C (72 °F).
10. (only with chlorine source)
Press cursor left or right to choose “HIGH” or “LOW”.
11. (only with chlorine source) Press <ENTER> to confirm.
12. Press <EXE> to continue the NEW FILL procedure.
The vacuum pump starts to evacuate the tube, the current
pressure and the message ”NEW FILL, EVAC” are
displayed. After reaching 30 mbar the vacuum pump stops.
The laser then enters a two-minute stand-by phase for a
laser tube gas leak check. The message ”NEW FILL, WAIT”
is displayed.
If everything is all right, the message changes to ”NEW
FILL, FILL”. This may last a few minutes, depending on the
ratio of the source.
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8.4.4
Replacing Gas Cylinders
The gas cylinders are to be replaced when
¯ remaining pressure is below 5 bar,
¯ the gas cylinders have expired (as specified by gas supplier).
The replacement procedure for a halogen gas cylinder is
slightly different from that for other gases.
Tools and Materials
•
•
•
•
•
•
9/16” wrench
13 mm wrench
Stainless steel cap to seal the halogen line
SNOOP® or other suitable leak detector
Ethanol
Cleaning paper
CAUTION
Risk of laser tube contamination!
Only use gas cylinders with a pressure of at leat 5 bar (abs.).
•
8.4.4.1
Gas cylinders as specified
Replace Halogen Cylinder
A0300COM.00
NOTE
The following assumes that an inert gas cylinder is attached
to the inert gas line used for purging. If this is not the case,
seal the halogen line while the gas cylinder is disconnected.
CAUTION
Risk of corrosion!
The halogen line must not be open for more than 2 minutes.
Replacing the Halogen Cylinder
1. Press <BREAK> twice to stop laser operation
2. Close the valve of the halogen gas cylinder.
3. Close the pressure regulator of the halogen gas cylinder.
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MAINTENANCE
4. Close the pressure regulator of the inert gas cylinder.
5. Set the pressure regulator of halogen gas cylinder to 5 bar.
6. Open valve of inert gas cylinder.
7. Set pressure regulator of inert gas cylinder to 5 bar.
8. Purge halogen line for at least four times (see Section 8.4.2).
9. Close valve of inert gas cylinder.
10. Close pressure regulators.
The halogen line is now free of halogen, so no halogen may
pollute your environment.
11. Unscrew connection fittings in gas line.
12. Seal halogen line with the cap to prevent corrosion.
13. Replace gas cylinders.
14. Remove the cap from halogen line.
15. Screw line fittings to pressure regulator.
16. Perform a leak test (see Section 10.7).
17. Flush the line and fill with pure gas at least 3 times (see
Section 8.4.1).
8.4.4.2
Replace Rare, Buffer or Inert Gas Cylinders
As all other excimer gases are non-toxic, these gas lines shall
not be purged.
Replacing the Gas Cylinders
1. Press <BREAK> twice to stop laser operation.
2. Close valve on gas cylinder to be replaced.
3. Close the pressure regulator for the cylinder to be replaced.
4. Unscrew connection fittings in gas line.
5. Replace gas cylinder.
6. Screw line fittings to pressure regulator.
7. Perform a leak test (see Section 10.7).
8. Flush the line and fill with pure gas at least three times (see
Section 8.4.1).
The cylinder replacement is now complete.
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User Manual COMPex
Laser Tube Maintenance
8.5
Laser Tube Maintenance
8.5.1
Purge Laser Tube
Purging the tube means that the laser tube gas is replaced
with inert gas. The tube is evacuated and filled to 1050 mbar
with the gas connected to the inert gas line. The required
procedure is the purge reservoir procedure.
NOTE
A) This function only is possible with an inert gas cylinder attached to the inert gas line.
B) The button <PURGE RESERVOIR> governs two different
procedures; the purge reservoir procedure and the window
exchange procedure (page 148). This section explains the
first procedure.
Purging the tube is recommended:
¯ when the laser has not been operated for more than a month,
¯ after repairing a leak at the laser tube,
¯ before and after replacing the laser tube.
NOTE
Do not press <BREAK> during the Purge Reservoir procedure as the procedure is terminated immediately. The fill is
not complete and thus the tube pressure may be insufficient.
If this has occurred, manually fill the tube with inert gas to
1050 mbar (see Section 7.7) or restart the Purge Reservoir
procedure.
Tools and Materials
A0300COM.00
•
Inert gas cylinders with a remaining pressure of at least
10 bar (abs.).
Preconditions
•
Laser in Off mode
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MAINTENANCE
Purging the Tube with Inert Gas
1. Press <BREAK> twice to stop laser operation.
2. Close all gas cylinder valves.
3. Close all pressure regulators.
4. Open valve of inert gas cylinder.
5. Set inert pressure regulator to 5 bar.
6. Press <PURGE RESERVOIR>.
7. Press cursor left or right to select “PURGE RESERVOIR”.
8. Press <ENTER> to confirm the choice.
9. Press <EXE> to execute the reservoir purge.
The message ”FLUSHING...” is displayed. The vacuum
pump starts to evacuate the tube, the current pressure is
displayed. After reaching 30 mbar, the vacuum pump stops
and the tube is filled up with inert to 1050 mbar.
Finalization
10. To run the laser, perform a new gas fill (see Section 8.4.3).
8.5.2
Re-Passivate Laser Tube
NOTE
This function is only available if separate halogen and helium
gas cylinders are used. It cannot be carried out using a halogen source.
Halogen gases are aggressive substances. To protect the tube
and components, the tube consists of a material that develops
a passivation layer in the presence of halogen.
The laser tube is to be passivated:
¯ when tube passivation layer has been damaged by air in the
tube.
The passivation fill lasts one day.
CAUTION
Laser tube can be damaged!
Do not use this procedure for re-passivation when changing
the type of halogen gas (fluorine to chlorine or vice versa).
Call authorized service.
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User Manual COMPex
Laser Tube Maintenance
Tools and Materials
•
Halogen and helium gas cylinders with a minimum of 10 bar
remaining pressure,
•
Protective eyeware.
Preconditions
•
Laser in Off mode
Passivating the Laser Tube
1. Press <BREAK> twice to stop laser operation.
2. Close valves of halogen and helium gas cylindes.
3. Close all pressure regulators.
4. Open valve on halogen gas cylinder.
5. Open valve on helium gas cylinder.
6. Set halogen pressure regulator to 4 bar.
7. Set helium pressure regulator to 4 bar.
8. Press <F3>.
9. Press <EXE> to confirm.
The tube is evacuated to 30 mbar and filled with 200 mbar
halogen gas and 900 mbar helium.
10. Let laser stand for at least 8 hours with the passivation fill
(e.g. overnight).
Finalization
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11. Perform a new gas fill (see 8.4.3).
The halogen displaces oxygenic compounds on tube walls
and built-in elements. The displaced compounds are
removed in the evacuation before the new gas fill.
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MAINTENANCE
8.6
Tube Optics Maintenance
The laser tube optics at COMPex are:
¯ rear mirror,
¯ output coupler.
Soiled laser tube optics must be cleaned. Damaged laser tube
optics must be replaced.
Cleaning the tube optics is recommended
¯ if the maintenance interval is reached (see Section 8.3).
¯ when the pulse energy is too low (see Section 10.9),
¯ when the beam profile is bad.
Replacing the tube optics is recommended:
¯ when the optics are damaged,
¯ when the optics cannot be cleaned (e.g. due to burned-in dust),
¯ if the maintenance interval is reached (see Section 8.3).
Cleaning or replacing the tube optics lasts approx. one hour.
Tools and Materials
•
•
•
•
•
•
•
•
•
•
•
148
4 mm Allen key (from service case)
3 mm Allen key (from service case)
2.5 mm Allen key (from service case)
Optics wrench (from service case)
Lens cleaning tissues (from service case)
Vienna Chalk (from service case)
Rubber gloves
Tap water
Pure alcohol (96%)
Sealing plate or premounted optics mounts
External energy meter (for handling, see energy meter manual)
User Manual COMPex
Tube Optics Maintenance
NOTE
The output coupler and the rear mirror must be changed in
two procedures to ensure that one of the optics is always adjusted. The replaced optics can then be aligned with the optics that are still adjusted.
Otherwise, the tube optics adjustment can only be performed
by specially trained personnel or authorized service.
Cleaning and replacing the tube optics consists of following steps:
¯ Start flushing procedure,
¯ Unmount one tube optics,
¯ Clean and replace optics,
¯ Remount the tube optics,
¯ Let laser perform a leak test,
¯ Perform a New Fill (see Section 8.4.3),
¯ Re-adjust the tube optics,
¯ Calibrate the energy monitor (see Section 8.7).
After adjusting the first optics, the next optics can be
exchanged.
Flushing the Laser Tube
The flushing procedure is a software procedure that allows to
replace the tube optics.
1. Close all gas cylinder valves except inert gas.
2. Close all pressure regulators.
3. Open inert gas cylinder, if closed yet.
4. Set pressure regulator of inert gas cylinder to 5 bar.
5. Press <PURGE RESERVOIR>.
6. Press cursor left or right to select “WIN.EXCHANGE”.
A0300COM.00
7. Press <ENTER> to confirm the choice.
8. Press <EXE> to proceed.
The vacuum pump starts to evacuate the laser tube. After
reaching 30 mbar, the vacuum pump stops, inert gas valve
opens and the tube is filled to 1200 mbar with inert. The
inert gas valve then closes.
After that, you are requested to change the tube optics. The
message “REPLACE WINDOWS (enter)” appears.
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MAINTENANCE
Unmounting One Tube Optics
This step explains how to remove the optics mount. When
dismounting the rear mirror, skip steps 9-11!
CAUTION
Laser tube can be damaged!
Do not press <ENTER> when tube optics are removed.
NOTE
Always wear rubber gloves when handling the optics.
9. Dismount mirror access panels of the laser .
10. Dismount (magnetic) beam shielding (see Figure 35, A).
11. Loosen the single screw at energy monitor (B).
B
A
Figure 35: Energy monitor without mirror access panel
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User Manual COMPex
Tube Optics Maintenance
12. Turn energy monitor to the side (see Figure 36).
Figure 36: View of optics mount, energy monitor removed
13. Loosen the six 3 mm Allen screws on the optics mount and
remove the optics mount.
You will hear a short hissing sound due to overpressure in
the tube. The laser tube is now open.
The inert gas valve opens to compensate for pressure drop
with inert gas so that no air will enter. If the laser tube has
not been closed, this will happen about every two seconds.
CAUTION
Laser tube can be damaged!
Do not press <ENTER> when tube optics are removed.
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14. Immediately mount the sealing plate (see Figure 37).
Figure 37: Optic mount dismounted, sealing plate
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MAINTENANCE
To shorten the maintenance time, prepared optics mounts
(see Figure 38) can be mounted instead of the sealing plate.
Figure 38: Side and front view of the optics mount
If you need more than a minute, a message will be
displayed ”CLOSE RESERVOIR (enter)”.
Cleaning and Exchanging the Optics
The third step is disassembling the optics. Work on a smooth
support pad at a clean place (for nomenclature, see Figure 39):
G
F
E
A
B
C
D
Figure 39: Disassembled optical mount.
Key to Figure 39:
A - counter window mount
C - optics spacer
E - window mount
G - optics wrench
152
B - lens
D - optics collar
F - threaded insert
User Manual COMPex
Tube Optics Maintenance
15. Use the optics wrench to loosen the threaded inset (approx.
5 turns).
16. Loosen the three 2.5 mm Allen screws (do not lose the
washers!).
17. Remove window mount from counter window mount.
18. Disassemble optics collar, lens, and optics spacer.
The optics are now ready to be cleaned or to be removed.
Cleaning the Optics
CAUTION
Risk of damaging coated optics!
Use only ethanol to polish coated side of optics.
Polish carefully with gentle pressure.
Wear rubber gloves.
You recognize the coating:
¯ either by a pencil marking at the side of the coating (as the
marking becomes blurred over the course of time we
recommended to renew the marking carefully with a pencil
before or after cleaning the optics).
¯ or by a greenish patina on the lens surface, surrounded by a
non-coated ring (if you recognized the coating this way,
make a pencil marking at the side of your optics).
Cleaning the coated side of coated optics is only necessary if it
is contaminated (e.g. by fingerprints or dust).
To clean the coated side of coated optics:
19. Put a few drops of ethanol onto the surface close to one
edge.
20. Wipe a lens cleaning tissue over the surface to clean the
lens with ethanol.
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To clean non-coated optics or the uncoated side of coated
optics:
21. Position 3 layers of lens cleaning tissues on top of each
other.
22. Mix 2 teaspoons of water with 1 teaspoon of vienna chalk
on the tissues.
23. Rinse the dirty components of the optics under a stream of
(lukewarm) water.
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MAINTENANCE
24. Place optics dirty-side-down on the vienna chalk slurry and
polish with figure-eight movement and gentle pressure for
about 3 minutes.
Figure 40: Polish the optics
25. Polish the other side if necessary (and not coated!).
26. Rinse under water.
27. Dry optics with a fresh cleaning tissue.
28. Put a few drops of ethanol onto the surface.
29. Wipe a lens cleaning tissue over the surface to clean the
lens with the ethanol.
30. Visually inspect the optics (in a well-lit place). The surface
must be dry and clean.
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User Manual COMPex
Tube Optics Maintenance
Reassemble and Remount the Optics Mount
31. Place optics spacer in optics collar (see Figure 36).
A
B
C D
E
F
G
H
I
K
Figure 41: Reassembling the optics mount
Key to Figure 41:
A - Counter Window Mount
C - Coating Mark
E - Optics Collar
G - Window Mount
I - Washer
B - Lens
D - Optics Spacer
F - Unlosable Screws
H - Threaded Insert
K - 2.5 mm screw
CAUTION
Risk of damaging lens coating!
When using a coated lens, ensure that the coated side only
contacts the optics spacer, not the counter optics mount.
The coated side is marked with a pencil marking.
32. Place the lens assembly (lens up) onto the support pad and
place the counter window mount over lens assembly.
33. Remove the sealing plate.
34. Place lens in optics collar (watch coated side).Tighten the
window mount evenly with three included 2.5 mm screws.
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35. Hand-tighten threaded inset with optics wrench.
36. Tighten optics mount uniformly with six included 3mm Allen
screws at laser tube.
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MAINTENANCE
Performing a Leak Test
37. Press <ENTER>.
The laser executes a laser tube leak test with 3000 mbar of
inert gas for 15 minutes. During this time the message
”LEAK TEST” is displayed. If a leak is detected, the
message ”Leak!-Check Windows” appears. Repeat this
procedure, beginning with step 13. (page 151).
If tight:
38. Press <ENTER> to proceed.
In this step, the laser tube is:
- evacuated to 30 mbar,
- filled to 500 mbar,
- evacuated to 30 mbar,
- filled to 500 mbar,
- evacuated to 30 mbar again,
- filled to 1080 mbar.
The laser is now leak-tested.
39. Perform a New Fill procedure as described in Section 8.4.3.
NOTE
We recommend to run the laser afterwards for several minutes to warm the excimer laser gas mixture.
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User Manual COMPex
Tube Optics Maintenance
Adjusting the Tube Optics
NOTE
Always adjust the replaced output coupler or rear mirror before exchanging the other optics using the external energy meter. This ensures that the replaced optics can be aligned with
those which is still adjusted.
WARNING
Injury hazards to eyes and skin!
Laser radiation can cause serious damage to your health.
Carefully read safety instructions before running the laser.
Never look into laser beam or reflections.
Never contact laser beam.
Wear safety glasses specifically intended for the laser’s
wavelength.
40. Place the external energy meter within the beam path (for
handling, see energy meter manual).
41. Set running mode to HV constant mode (see Section 7.5).
42. Enter repetition rate given in data sheet for the specified
beam energy (see Section 7.4.2 and data sheet).
43. Enter maximum high voltage according to laser data sheet
(see Section 7.5.3 and data sheet).
44. Start the laser (see Section 7.2).
45. Maximize beam energy by turning the horizontal optics
adjustment screw clockwise or counterclockwise (see
Figure 42, 1).
46. Repeat previous step with vertical optics adjustment screw
(see Figure 42, 2).
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1
2
Figure 42: Horizontal and vertical optics adjustment
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MAINTENANCE
47. If the laser beam energy is still insufficient (see the laser
data sheet for requested energy output data), repeat steps
45. and 46.
If the laser beam does not meet the data sheet values, see
Chapter 10 (Troubleshooting) or call service.
48. Mount the energy monitor.
Finalization
49. Calibrate the energy monitor as described in Section 8.7.
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User Manual COMPex
Energy Monitor Calibration
8.7
Energy Monitor Calibration
The COMPex energy monitor is built into the beam path inside
the laser. It controls:
¯ if the laser fires any laser pulses
¯ the energy of the laser pulses.
The energy monitor must be calibrated:
¯ if it has been dismounted,
¯ whenever the tube optics have been maintained.
The energy monitor calibration procedure deletes the value of
your energy monitor reading and calculates a new calibration
factor based on the reading from the external energy meter.
Calibrating the energy monitor takes approximately 10 minutes
(see also flow diagram in Figure 43 on page 160).
Tools and Materials
A0300COM.00
•
•
•
•
•
•
•
•
•
•
Pencil and paper
Rubber gloves
4 mm Allen key (from service case)
3 mm Allen key (from service case)
Vienna Chalk (from service case)
Lens cleaning tissues (from service case)
Ethanol
Water
Attenuators (from service case)
External energy meter or power meter (for handling, see
energy meter manual)
NOTE
In the following ”energy meter” also means “power meter”.
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MAINTENANCE
Start
Make a New Fill
OPMODE=NEW FILL
Switch to HV
Constant Mode
MODE=HV
Make a few
thousand shots
OPMODE=ON
OPMODE=OFF
Choose HV
Choose Reprate
Insert or Remove
Attenuators
Start Energy
Calibration
Laser Adjusts
Energy Monitor
Reading
OPMODE=OFF
Stop Energy
Calibration
No
Yes: OPMODE? returns ENERGY CAL CONT
No : OPMODE? returns OFF:7
Energy Monitor
Reading within
Range of 99-200?
HV=<xy>
REPRATE=<xy>
OPMODE=ENERGY CAL
EGY?
OPMODE?
Yes
Input ext. Energy
Meter Reading
EGY=<xyz>
End
Figure 43: Energy monitor calibration procedure
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User Manual COMPex
Energy Monitor Calibration
Preparation
1. Perform a New Fill to ensure optimum calibration conditions
(see Section 8.4.3).
This takes about 20 minutes.
NOTE
Do not press <BREAK> during the new fill procedure, because the procedure is terminated immediately. The fill is not
completed and the tube pressure may thus be insufficient. If
this is the case start new fill again.
Cleaning the Beam Splitter
2. Make sure that laser cannot be started while the beam
splitter is being cleaned.
3. Dismount mirror access panel.
4. Dismount (magnetic) beam shielding (A, Figure 35, p. 150).
5. Put on rubber gloves.
6. Hold beam splitter by the beam splitter handle
(D, Figure 44).
A
B
C
D
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Figure 44: View onto the beam splitter
A - Attenuator
C - Fixing Screw
B - Beam Splitter
D - Beam Splitter Handle
7. Remove single fixing screw (see Figure 44, C).
8. Remove beam splitter (B).
9. Clean beam splitter in the same manner as uncoated optics
(described in Section 8.6, steps 21. to 29., page 153).
10. Re-mount beam splitter.
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Obtain External Energy Reading
11. Place and prepare the external energy meter according to
your energy meter manual.
NOTE
For best results, calibrate the energy monitor at a repetition
rate you normally work at, with maximum HV. We recommend
a repetition rate of 10 Hz in the following only because most
energy and power meters can be operated at this value. In
case of doubt consult your energy or power meter manual.
12. Press <REPRATE>.
13. Enter 10.
14. Press <ENTER> to confirm input.
15. Press <HV>.
16. Enter maximum HV given on the laser data sheet.
17. Press <ENTER> to confirm input.
DANGER
Injury hazards to eyes and skin!
Laser radiation can cause serious damage to your health.
Carefully read safety instructions before running the laser.
18. Start laser operation.
19. Read external energy meter.
20. Make a note of the energy meter data.
21. Stop laser operation.
Energy Monitor Calibration
22. Press <EGY CAL>.
23. Press <EXE> to confirm to start procedure.
In the second display line ”Wait...” appears for a short time.
The laser starts operation with the chosen reprate and HV.
24. Observe the displayed values. They must be within a range
of 99 to 200.
The laser now tries to adjust the energy monitor gain so
that the (AD converter) reading is within the range of 99 to
200. If the reading is out of range, take note if it is too high
or too low.
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User Manual COMPex
Energy Monitor Calibration
If the adjustment failed [display reads ”ENERGY CAL
ERROR”; remote: OFF=7], go to step 25. If successful
[display reads ”READING=”; remote: ENERGY CAL
CONT], continue with step 33.
Correct the Energy Monitor Beam Input
(if adjustment failed)
25. Press <BREAK> to stop the energy monitor calibration.
26. Remove mirror access panel.
27. Remove (magnetic) beam shielding.
The attenuators are now accessible (see Figure 44 on page
161, A).
CAUTION
Risk of damaging attenuators and beam splitter!
The attenuators are fixed with two clamps and might be
difficult to remove.
Use rubber gloves.
Do not use any other tools.
Be careful of the beam splitter.
28. Change the attenuators to correct the energy monitor beam
input (see Figure 44 on page 161, A); if it is too difficult to
remove the attenuators, remove the beam splitter as
described in step 6. to 8. of this section (page 161).
29. Correct the energy meter beam input:
If the displayed internal calculation value was less than
99:
Remove an attenuator or replace with a coarser meshed
attenuator.
If the displayed internal calculation value was 200 or
higher:
Add an attenuator or replace with an closer meshed
attenuator.
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30. Mount (magnetic) beam shielding.
31. Mount mirror access panel.
32. Return to step 11.
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Input External Energy Measuring Data
(if adjustment succeeds)
NOTE
A) When the adjustment succeeds, the display changes to
”READING=” (if not, return to step 8).
B) Input values must be in mJ (1/1000 Joule). If you use an
external power meter, obtain the Input value with the following equation:
E ext =
Pext
1000
f
where Eext is the input value [in mJ], Pext is the reading from
the external power meter [in W] and f is the repetition rate [in
Hz].
33. Enter the external energy measuring data in mJ.
34. Press <ENTER> to confirm input.
The laser device sets the external energy measuring data
equal to the internal calculation value.
The energy monitor is now calibrated. To check this,
measure a few laser pulses with the external energy meter
and compare these values with those displayed by the
energy monitor values. They should differ no more than 2%
to 3%.
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User Manual COMPex
Electrical Maintenance
8.8
Electrical Maintenance
The only electrical maintenance required on the COMPex is to
check the thyratron.
8.8.1
Check Thyratron
The thyratron is the main power switch of the COMPex. It is a
3” gas filled triode tube in grounded cathode operation mode.
It needs 8 minutes warm up time after the laser device has
been started, otherwise severe damage can result.
Both voltages can be adjusted in 0.2 V intervals at the
thyratron adjustment panel (Figure 45). It is situated in the
middle upper part of the right side panel (as viewed from the
beam exit).
UH and UR must be monitored to compensate for cathode
fatigue and thyratron gas loss. Additionally, the tube grid
voltage UBIAS should be recorded.
Checking the thyratron is recommended:
8
¯ every 3*10 pulses,
¯ after an error (see Chapter “Troubleshooting”)
Tools and Materials
•
•
•
3 mm Allen key
TRMS Voltmeter (TRMS=True Root Mean Square)
Laser logbook
Preconditions
•
Laser device switched on, laser in Off mode
A0300COM.00
Preparation
NOTE
If your COMPex is not equipped with a thyratron access panel (see 2 in Figure 2 on page 13), remove the right side panel (as seen from beam exit) instead.
1. Remove thyratron access panel (see Figure 2, page 13).
You see the thyratron adjustment (Figure 45).
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max
max
UH
UR
min
50Hz
60Hz
min
MAINTENANCE
FUSE
AUX
BIAS
HEAT
RES
GND
Figure 45: Thyratron adjustment
Measure UH:
Check the heating voltage of the thyratron. On the test sheet
the value UH is called ”UHEATER”.
2. Measure UH between the jacks GND and HEAT with TRMS
Voltmeter.
3. Record the value measured in your laser logbook.
Measure UR:
Check the heating voltage of the hydrogen reservoir. On the
test sheet the value UR is called URESERV.
4. Measure UR between the jacks GND and RES.
5. Record the new value in your laser logbook.
Measure UBIAS:
Note, that UBIAS is a direct current value.
6. Measure UBIAS between the jacks GND and BIAS.
7. Record the value measured in your laser logbook.
8. Measure UBIAS between GND and AUX.
9. Record the value measured in your laser logbook.
NOTE
The value for UBIAS must be within the range of -140 to -160 V.
If not, a varistor is exhausted. Call authorized service.
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Electrical Maintenance
8.8.2
Adjust Thyratron
The thyratron adjustment differs if it is scheduled maintenance
or if it is due to an error.
If any stepping switch on the thyratron adjustment panel is
already on the highest setting, the thyratron or its reservoir are
exhausted. Call service.
Adjusting for Scheduled Maintenance or due to Errors: Missing Pulses, No Trigger or Low Beam Energy
1. Move the stepping switch UH one or two steps higher (in the
direction of the arrow, see Figure 45).
2. Move the stepping switch UR one or two steps higher (in the
direction of the arrow, see Figure 45).
3. After adjustment wait 3-4 minutes to allow the thyratron to
stabilize. If additional pulses should occur, decrease UR
one step, otherwise proceed.
4. Measure UH between GND and HEAT again.
5. Measure UR between GND and RES again.
6. Record the new values in your laser logbook.
Adjusting due to Errors:
Additional Pulses, Error Message OVERLOAD
1. Move the stepping switch UR one or two steps lower
(opposite the direction of the arrow, see Figure 45).
2. After adjustment, wait 3 to 4 minutes to allow the thyratron
to stabilize.
3. Measure UR between GROUND and RES again.
4. Record the new value in your laser logbook.
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5. Start laser operation at lowest possible HV value for stable
energy output.
6. Operate the laser for 5 minutes at max. repetition rate.
7. Increase the HV value in steps of 1 kV each 5 minutes until
the max. HV value is reached and operate the laser at max.
HV for 15 minutes.
If no additional pulses occur, the thyratron is adjusted.
Otherwise, proceed with step 1.
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MAINTENANCE
Adjusting due to Error: Jitter too High
This only affects at jitter-sensitive applications.
1. Move the stepping switch UR one or two steps higher (in the
direction of the arrow, Figure 45).
2. After adjustment, wait 3-4 minutes to allow the thyratron to
stabilize. If additional pulses should occur, decrease UR
one step.
3. Measure UR between GND and RES again.
4. Record the new value in your laser logbook.
Clean-up after Adjustment
1. Reinstall the cover of the thyratron adjustment.
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User Manual COMPex
Halogen Filter Maintenance
8.9
Halogen Filter Maintenance
Lambda Physik excimer lasers utilize a halogen filter to
remove molecular species of fluorine from laser gas mixtures
expelled from the laser tube.
Storage
Filters must be stored in unopened packaging in accordance
with all relevant regulations. According to the Accident
Prevention Rule ”Protection from Hazardous Chemical
Substances (VBG 1a, FR Germany)”, unopened filters can be
stored for a period of up to 4 years. The filter’s lifetime is
printed on the packaging. Filters should always be stored in a
dry place in the original, unopened packaging, to protect from
damage. A Filter with visible damage (e.g. dents) must be
removed regardless of its shelf life.
8.9.1
Check the Halogen Filter Filling Ratio
The COMPex allows to monitor the halogen filter filling ratio.
The scale ranges from 0 (new filter) to 100 (filter exhausted,
replace it).
NOTE
Remember to reset the filter filling ratio after filter replacement.
Tools and Materials
•
None
Preconditions
•
Laser in Off mode
A0300COM.00
Checking the filter filling ratio
1. Press <BREAK> twice to stop laser operation.
2. Press <F4>.
3. Read filling ratio.
4. Press <BREAK> to leave the function.
Please remember to order a new halogen filter in time.
LAMBDA PHYSIK LASERTECHNIK - 03/00
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MAINTENANCE
8.9.2
Halogen Filter Exchange
This section describes the replacement of the halogen filter.
Deviation from this procedure is unsafe as the filter contains
hazardous chemicals.
The halogen filter is in the aluminum housing above the
vacuum pump (see Figure 46).
Figure 46: View of the halogen filter
Tools and Materials
•
•
•
•
•
Set of Allen keys
Plastic gloves
Sealable plastic bag
Safety glasses
Pliers
WARNING
Toxic hazard!
Filter contains fluorine and/or chloride components.
Keep filter in a well ventilated place.
Wear safety glasses and gloves.
Preconditions
•
170
Laser device switched off
User Manual COMPex
Halogen Filter Maintenance
Removing the Halogen Filter
CAUTION
Toxic hazard!
The vacuum line may contain halogen. To ensure that there
is no halogen in the line, purge the inert line.
1. Perform the PURGE INERT LINE procedure (see section
8.4.2).
2. Remove the four wing nuts and washers on top of the
halogen filter housing.
From Laser Tube
Top Cover
O-Ring Ø 85 × 4
Spring
Filter Cartridge
A0300COM.00
Filter Housing
To Vacuum pump
Figure 47: Disassembling the halogen filter housing
3. Lift off the top cover of the filter housing.
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MAINTENANCE
4. Remove the spring.
5. Lift out the filter cartridge using pliers. Take care not to
remove the bottom o-ring.
6. Check the condition of the upper and lower o-rings in the
filter housing. Replace the o-rings if damaged.
Filter Cartridge Disposal
Reduce the toxic contamination of the filter so it can be
disposed by following this procedure.
WARNING
Toxic hazards!
Filter may still contain F2 that has not reacted. A storage
period is necessary for safety reasons. Observe the
storage periods described below.
7. Store the filter cartridge for 6 hours in a well-ventilated place.
8. Immerse the filter cartridge in 10 liters of water for 24 hours.
9. Place the filter cartridge inside the plastic bag removed from
the new filter and seal the bag by means of the supplied
twist-tie.
10. Dispose the filter cartridge in accordance with local
regulations.
11. Dispose the water according to all relevant regulations.
NOTE
The water contains no hazardous substances. Local waste
water regulations may require that the water be neutralized
the water. For neutralization, use calcium hydroxide if pH<7
or acetic acid if pH>7.
Replacing the New Filter
12. Place the new filter cartridge in the filter housing. Ensure
that the arrow on the filter cartridge points to the vacuum
pump.
13. Place the spring on top of the filter cartridge.
14. Re-install the top of the filter housing.
15. Fit the four wing nuts and hand tighten.
The filter filling ratio must now be reset to zero (see below).
172
User Manual COMPex
Halogen Filter Maintenance
8.9.3
Reset Halogen Filter Filling Ratio
After replacing the halogen filter the halogen filter filling ratio
must be reset.
Tools and Materials
•
None
Preconditions
•
•
New halogen filter inserted
Laser in Off mode
Resetting the Filter Filling Ratio
1. Press <BREAK> twice to stop laser operation.
2. Press <F4>.
3. Press the numerical button ”0" to reset the filter.
4. Press <ENTER> to confirm.
A0300COM.00
The filling ratio of the halogen filter is now set to zero.
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MAINTENANCE
8.10
Prepare Gas System for Transportation
and Storage
During longer periods of non-operation, gases can enter
¯ the laser tube and damage the passivation layer,
¯ the gas lines and cause corrosion.
To prevent this, the laser device must be carefully prepared for
transportation and storage periods. The laser tube must be
filled with a Transportation Fill and the gas lines must be sealed.
8.10.1
Transportation Fill
NOTE
This function is only possible with a buffer gas cylinder attached to the buffer gas line.
The operation evacuates and fills the tube to 1500 mbar with
buffer gas, preparing it for storage or transportation.
A transportation fill is recommended:
¯ if laser device is to be non-operational for a long period,
¯ if laser device is to be transported.
NOTE
Do not press <BREAK> during the TRANSPORTATION FILL
procedure as this terminates the procedure immediately. The
fill is not completed, so tube pressure may be insufficient. If
this occurs, start Transportation Fill again.
Tools and Materials
•
Buffer gas cylinders with at least 10 bar remaining pressure
connected to the buffer gas line
Preconditions
•
174
Laser in Off mode
User Manual COMPex
Prepare Gas System for Transportation and Storage
Performing a Transportation Fill
1. Close all pressure regulators
2. Close all gas cylinder valves.
3. Open buffer gas cylinder valve.
4. Set buffer pressure regulator to 5 bar.
5. Press <F6>.
6. Press cursor left or right to select “TRANSPORT”.
7. Press <ENTER> to confirm.
8. Press <EXE> to start the transportation fill.
The tube is evacuated to 30 mbar and filled to 1500 mbar
with buffer gas.
A0300COM.00
NOTE
The message ”SAFETY FILL” appears (remote command
OPMODE? returns SAFETY FILL), if the evacuation failed. A
leak is likely and a safety fill takes place (see also Section
8.4.3).
LAMBDA PHYSIK LASERTECHNIK - 03/00
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MAINTENANCE
8.10.2
Disconnecting Gas Lines
For de-installing, transporting and storing the laser device, the
gas supply lines are to be disconnected.
CAUTION
Risk of gas lines corrosion!
Prevent humidity and air from entering into the gas lines.
To prevent corrosion of the halogen lines, no halogen may
remain in the lines. Replace the halogen gas in the lines with
inert gas before disconnecting the gas lines.
This section describes measures to prevent corrosion.
There are three different procedures:
¯ Disconnect a halogen line (see Section 8.10.2.1).
¯ Disconnect a premix line (see Section 8.10.2.2)
If your laser runs with gas premix containing halogen and if
this premix is lead through another line than the halogen
supply line, treat it as it were a halogen line.
¯ Disconnect gas supply lines except halogen line (see
Section 8.10.2.3)
8.10.2.1
Disconnect a Halogen Line
Tools and Materials
•
•
•
•
9/16 inch wrench
13 mm wrench
Gyrolok stainless steel cap to seal the halogen line
Stainless steel plug included with the laser device to seal the
halogen connection at the laser device.
Disconnecting the Halogen Line
1. Close the main valve of the halogen gas cylinder.
2. Make sure that the pressure regulator of the halogen gas
line is open.
3. Make sure that the pressure regulator of the inert gas line is
closed.
4. Open the main valve of the inert gas cylinder.
176
User Manual COMPex
Prepare Gas System for Transportation and Storage
5. Set the pressure regulator of the inert gas line to 5 bar.
6. Purge the halogen line at least four times (see Section 8.4.2).
7. Close main valve of the inert gas cylinder.
8. Close the pressure regulator of the inert gas line.
9. Disconnect the halogen line.
10. Immediately seal the halogen connector at the laser device
with the plug.
11. Immediately seal the halogen line with the cap.
The sealed halogen line may remain in this state for a longer
period of time now.
8.10.2.2
Disconnect a Premix Line
To prevent corrosion of the halogen lines, no halogen may
remain in the lines. The premix gas in the lines is to be
removed with inert gas before disconnecting the gas lines.
NOTE
The premix gas is usually connected to BUFFER. For
reasons of safety, identify the connection of the premix gas.
If the premix gas is connected to another connector than
BUFFER, the following instructions must be carried out for
the other connector and the premix gas line.
Tools and Materials
A0300COM.00
•
•
•
•
9/16 inch wrench
13 mm wrench
Gyrolok stainless steel cap to seal the premix line
Stainless steel plug included with the laser device to seal the
premix connection at the laser device.
Disconnecting the Premix Line
1. Close the main valve of the premix gas cylinder if it is open.
2. Make sure that the pressure regulator of the premix gas line
is open.
3. Make sure that the pressure regulator of the inert gas line is
closed.
4. Open the main valve of the inert gas cylinder.
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MAINTENANCE
5. Set the pressure regulator of the inert gas line to 5 bar.
6. Purge premix line at least four times (see Section 8.4.2).
7. Disconnect premix line.
8. Immediately seal the premix connector at the laser device
with the plug.
9. Immediately seal the premix gas line with the cap.
The sealed premix line may remain in this state for a longer
period of time now.
8.10.2.3
Disconnect Gas Supply Lines except Halogen Line
All gas lines, except the halogen lines, are not as endangered
by corrosion as the halogen line. Nevertheless, they must be
protected against humidity and air too.
Tools and Materials
•
•
•
•
9/16 inch wrench
13 mm wrench
Gyrolok stainless steel cap to seal the line
Stainless steel plugs included with the laser device to seal
the connection at the laser device.
Disconnecting the Gas Lines
1. Close the main valve of the respective gas cylinder.
2. Disconnect the gas supply line with an appropriate wrench.
3. Seal the gas connection at the laser device with the plug.
4. Seal the gas supply line with the cap.
The sealed lines may remain in this state for a longer period of
time now.
178
User Manual COMPex
9
REMOTE SOFTWARE
This section is intended for programmers, who want to design
a user shell to run the COMPex with an external computer.
The necessary software is provided in the remote software of
the communication interface.
The Remote Software is divided into three types of commands:
¯ Operation Commands (OPMODEs): Commands to operate
the COMPex,
¯ Parameter Commands: Commands to set parameter values,
¯ Polling Commands: Commands to request values and the
state of the COMPex.
Before reading this chapter, become familiar with the
operations of the COMPex as described in Chapters 7 and 8.
The software described is COMPex software version 4.85. You
may know your software version with the polling command
“VERSION?” (see page 209).
9.1
Nomenclature within this Chapter
•
Software states are emphasized with an eye-catcher ( ).
ITALIC CAPITAL LETTERS give names of error states.
Descriptions and solutions are the same as the error
messages in the Local Software, as described in Chapter 10.
Typewriter Letters show an example.
A0300COM.00
In the explanations of OPMODES (pages 181 to 193), the first
line gives the state message (received with OPMODE?). The
following lines shortly describe the state. The “Corresponding
Errors” are also described in this way.
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REMOTE SOFTWARE
9.2
Remote Software Basics
This section deals with the basics of the remote software:
¯ how to choose the remote software part of communication
interface,
¯ the required software syntax.
The interface required is described in Section 5.3.2. Any other
hardware is not prescribed.
9.2.1
Choosing Remote Software
All communication with the COMPex is transferred via an
RS232 interface attached to the Communication Interface. The
communication interface does not differentiate between a
handheld keypad attached to the RS232 or an external PC.
Thus, you do not have to choose between remote or local
software. if the codes originate from an external PC, the
communication interface automatically uses the remote
software package.
9.2.2
Software Syntax
All software codes must be transferred in ASCII code, closed
with a carriage return. You may use any ASCII editor.
It does not matter, if you use upper case or lower case
characters.
180
User Manual COMPex
Operation Commands (OPMODE)
9.3
Operation Commands (OPMODE)
OPMODE is the abbreviation for “operating mode”. OPMODEs
are all the commands executable by the COMPex. They are
listed in this section in alphabetical order.
OPMODE state
The operator may inquire about the state of the COMPex at
any given time. All possible state messages are given in this
section with the corresponding OPMODE.
Inquiries about the state may always be made using the polling
command OPMODE? (see Section 9.5).
Many of the OPMODEs execute multiple-step programs on the
laser device; thus, they pass more than one state.
A state followed by a colon and a number indicates an error or
a warning. These errors and warnings are described under the
corresponding state.
Most OPMODEs have similar commands for the local software
and will also display messages at the handheld keypad to
show the state (or error). The error messages are listed in
Section 10.
OPMODE Syntax
To execute a command, type
OPMODE=<COM>
followed by a carriage return (<COM> means the desired
OPMODE).
Example:
A0300COM.00
OPMODE=NEW FILL
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REMOTE SOFTWARE
9.3.1
OPMODE=CAPACITY RESET
Sets the halogen source capacity indicator to the value given
with the Parameter Command “CAP.SET=”.
Corresponding States
•
None
Corresponding Errors
•
9.3.2
None
OPMODE=CONT
The flushing procedure (see 9.3.5) stops twice to wait for user
actions. The user continues the procedure with OPMODE=CONT.
Corresponding States
•
None
Corresponding Errors
•
9.3.3
None
OPMODE=ENERGY CAL
Starts the Energy Monitor Calibration procedure (see Figure 48;
the steps are listed in the boxes, outside in capital letters the
necessary commands).
Corresponding States
•
ENERGY CAL
Energy Monitor Calibration procedure running.
•
ENERGY CAL CONT
Waiting for entering the reading from external energy meter.
The reading is entered using the Parameter Command
“EGY=” or ”EGY SET=” (see 9.4.6 and 9.4.8 and step “Input
ext. Energy Meter Reading”, Figure 48 on page 183).
Corresponding Errors
•
182
None
User Manual COMPex
Operation Commands (OPMODE)
Start
Perform a New Fill
Switch to HV
Constant Mode
MODE=HV
Make a few
thousand shots
OPMODE=ON
OPMODE=OFF
Choose HV
Choose
Repetition Rate
Insert or Remove
Attenuators
Start Energy
Calibration
Laser Adjusts
Energy Monitor
Reading
OPMODE=OFF
Stop Energy
Calibration
No
OPMODE=NEW FILL
Energy Monitor
Reading within
Range of 99-200?
Yes: OPMODE? returns ENERGY CAL CONT
No : OPMODE? returns OFF:7
HV=<xy>
REPRATE=<xy>
OPMODE=ENERGY CAL
EGY?
OPMODE?
Yes
A0300COM.00
Input ext. Energy
Meter Reading
EGY=<xyz>
End
Figure 48: Flow diagram for energy monitor calibration
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REMOTE SOFTWARE
9.3.4
OPMODE=FLUSH <xy> LINE
Evacuates <xy> line for two seconds; <xy> represents the name
of the line; <xy> may be BUFFER, HALOGEN, INERT or RARE.
Example:
OPMODE=FLUSH HALOGEN LINE
evacuates the halogen line.
Corresponding States
•
FLUSH <xy> LINE
Flushing line <xy> in progress, where <xy> represents the line.
Corresponding Errors
•
9.3.5
None
OPMODE=FLUSHING
Starts the Flushing Procedure to clean or replace tube optics
(see Figure 49, page 185 ).
Corresponding States
•
FLUSHING CONT
Laser tube filled with inert gas. During this time the tube optics
may be removed/replaced or cleaned. The Flushing Procedure
pauses until sending “OPMODE=CONT” (see Section 8.6).
•
FLUSHING LEAKTEST
Leak test is performed during the flushing procedure.
•
FLUSHING LEAKTEST CONT
During flushing no leaks were detected. The Flushing
Procedure pauses until sending “OPMODE=CONT”.
Corresponding Errors
184
•
FLUSHING:3
NO GAS FLOW was detected in one of the gas lines.
•
FLUSHING LEAKTEST:3
NO GAS FLOW was detected during the leak test.
•
FLUSHING LEAKTEST CONT:30
LEAKTEST...ERROR. Tube or optics are leaky. The flushing
procedure pauses, until you enter “OPMODE=CONT”.
User Manual COMPex
Operation Commands (OPMODE)
Note:
If no gas leak is detected,
the message
"FLUSHING LEAKTEST CONT"
appears. Continue with
"OPMODE=CONT". If a gas leak
is detected, the message
"FLUSHING LEAKTEST CONT:30"
appears. Continue with
"OPMODE=CONT" to reduce the
tube pressure to 1200 mbar inert gas.
After that the reservoir pressure
will be compensated automatically
to atmospherical pressure.
Continue with "OPMODE=CONT"
to perform the leak test again.
Use the time of the leak test to
search for the leak with a leak tester.
TRANSFER POLLING
OPMODE=FLUSHING
Evacuate reservoir and refill to
500 mbar with inert gas
OPMODE?
FLUSHING
or
FLUSHING:3 (no gas flow)
Evacuate reservoir and refill to
500 mbar with inert gas
OPMODE?
FLUSHING
or
FLUSHING:3 (no gas flow)
Evacuate reservoir and refill to
1200 mbar with inert gas
OPMODE?
FLUSHING
or
FLUSHING:3 (no gas flow)
Compensate to atmosphere
Delay: 20 sec
Replace windows
(Check windows)
OPMODE?
FLUSHING CONT
OPMODE=CONT
Reduce to 1200 mbar
Fill to 3000 mbar with inert gas
OPMODE?
FLUSHING LEAKTEST
or
FLUSHING LEAKTEST:3 (no gas flow)
Delay: 5 min
OPMODE?
FLUSHING LEAKTEST
Leaktest: 10 min
OPMODE?
FLUSHING LEAKTEST
OPMODE=
CONT
Yes
OPMODE?
FLUSHING LEAKTEST CONT
Gas leak?
OPMODE?
FLUSHING
LEAKTEST CONT:30
No
OPMODE=CONT
OPMODE?
FLUSHING
or
FLUSHING:3 (no gas flow)
A0300COM.00
Evacuate reservoir and refill to
500 mbar with inert gas
Evacuate reservoir and refill to
1050 mbar with inert gas
End
OPMODE?
FLUSHING
or
FLUSHING:3 (no gas flow)
OPMODE?
OFF
or
OFF:0
Figure 49: Flow diagram for flushing procedure
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REMOTE SOFTWARE
9.3.6
OPMODE=HI
Performs a halogen injection. The partial pressure of halogen
injected depends on the value entered in the Gas Menu. With
halogen source, this command will be executed after 3 minutes.
Corresponding States
•
None
Corresponding Errors
•
9.3.7
None
OPMODE=LL OFF
Disables the Low Light function. If the Low Light function is
activated, laser operation will be interrupted if more than 30 %
of all laser pulses are missing within a 10 sec. interval.
Corresponding States
•
LL OFF
Low Light function disabled
Corresponding Error
•
9.3.8
OFF:26
LOW LIGHT criteria was detected
OPMODE=MANUAL FILL INERT
Opens the inert valve for 10 seconds to perform a manual fill of
inert gas into the tube. The command will only be accepted if
“OPMODE=OFF:0" and gas reservoir pressure below 3800 mbar.
Corresponding States
•
MANUAL FILL INERT
Inert valve open.
Corresponding Errors
•
186
None
User Manual COMPex
Operation Commands (OPMODE)
9.3.9
OPMODE=NEW FILL
Starts the new fill procedure.
Corresponding States
•
NEW FILL
The new fill procedure has been started.
•
NEW FILL,EVAC
Evacuating the tube.
•
NEW FILL,WAIT
(only with a fluorine source)
Performing leak test in evacuated tube or
during the new fill procedure while halogen source is heated.
•
NEW FILL, FILL
Refilling tube with a new gas fill
Corresponding Errors
•
9.3.10
NEW FILL:3
NO GAS FLOW was detected in one of the gas lines.
OPMODE=OFF
Switches laser off.
A0300COM.00
Corresponding States
•
OFF
Laser is off, no messages or warnings.
•
OFF:0
Laser is off, no messages or warnings (only available with
certain lasers).
•
OFF,WAIT
While starting the laser: The laser is waiting for power
supply standby and gas circulation fan powering up
(duration: approx. 5 seconds).
Corresponding Errors
•
OFF:1
Laser off, an INTERLOCK occurred.
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REMOTE SOFTWARE
188
•
OFF:2
Laser off, PRESET ENERGY TOO HIGH. Charging HV
exceeds HVmax.
•
OFF:4
Laser off, a WATCHDOG has been activated.
•
OFF:5
Laser off, FATAL ERROR, LWL-DATALINK failed (LWL
Datalink means the Data Ring).
•
OFF:6
Laser off, POLLING; at least one laser module did not
respond.
•
OFF:7
Laser off, ENERGY CAL. ERROR. Monitor calibration
values can not be adjusted within a range of 99 to 200.
•
OFF:8
Laser off, NEW GAS FILL NEEDED. Charging HV exceeds
HVmax.
•
OFF:9
Laser off, NO VACUUM. Tube may be leaky. A Safety Fill
has been performed successfully. All activities have been
interrupted.
•
OFF:10
(with a fluorine source only) Laser off, LOW PRESSURE.
Because the sixth fluorine fill did not succeed, the fluorine
source is detected to be empty.
•
OFF:11
(with a halogen source only) Laser off, NO CAPACITY
LEFT. The halogen source is detected to be empty.
•
OFF:12
(with a halogen source only) Laser off, ERROR
TEMPERATURE MEASUREMENT. The halogen source
temperature measurement failed.
•
OFF:13
(with a fluorine source only) Laser off, FLUORINE VALVE
NOT OPEN. The fluorine source valve test failed or a
malfunction during filling.
•
OFF:21
WARM-UP 8min. This is the warm-up phase of the laser
devices, required by the thyratron.
User Manual COMPex
Operation Commands (OPMODE)
OFF:26
Laser off, LOW LIGHT. Energy monitor does not detect light
pulses after trigger pulses. Caused, if at least 30% of all
pulses within 10 seconds are missing.
•
OFF:27
Laser off, WRONG PRESSURE. The tube pressure is out of
range. Tube pressure must be within ± 20 % of default tube
pressure as specified by the Gas Menu.
•
OFF:29
Laser off, memory check failed, Gas Menu data are lost.
•
OFF:31
Laser off, TIMEOUT. There was no data transfer via the
RS232 within one second.
•
OFF:33
(halogen source only) Laser off, HALOGEN PRESSURE
TOO HIGH. The preset partial pressure for halogen in the
Gas Menu is too high for a halogen source (> 15mbar).
•
OFF:35
(halogen source only) Laser off, NOT AVAILABLE. A
function not possible with a halogen source was chosen
(e.g. the EGY PGR Mode).
•
OFF:39
Laser off, INERT VALVE CLOSED. The inert valve was
closed after a manual fill of inert gas (see Section 7.7),
because:
a) valve has been open for 10 seconds or
b) tube pressure exceeded 3800 mbar.
•
OFF:41
Laser off, entered energy value exceeds +5 % of the set
value in the menu data.
A0300COM.00
•
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REMOTE SOFTWARE
9.3.11
OPMODE=ON
Starts the laser (with a starting delay of 4.1 sec, see 9.3.10,
OFF,WAIT). The starting procedure is interruptable by sending
“OPMODE=OFF”
Corresponding States
•
ON
Laser on, no warnings or messages.
•
ON:0
Laser on, no warnings or messages (only available with
certain lasers).
Corresponding Warnings
190
•
ON:2
(EGY PGR Mode only) Laser on, PRESET ENERGY TO
HIGH. Charging HV exceeds Charging Threshold Voltage
HVmax.
•
ON:03
(some lasers only) Laser on, Duty Cycle exceeded (more
than 12000 pulses in any 20 minutes).
•
ON:8
(EGY NGR Mode only) Laser on, NEW GAS FILL NEEDED.
Charging HV exceeds Threshold Voltage HVrepl.
•
ON:9
(fluorine source only) Laser on, NO VACUUM. During a
halogen injection, the evacuation of the source did not reach
30 mbar after 130 sec.
•
ON:10
(fluorine source only) Laser on, LOW PRESSURE. During a
New Fill Procedure, the sixth attempt to fill did not succeed.
Fluorine source empty.
•
ON:13
(fluorine source only) Laser on, FLUORINE VALVE NOT
OPEN. The fluorine valve test failed.
•
ON:34
(halogen source only) Laser on, HI IN PREP. Halogen
injection in preparation.
User Manual COMPex
Operation Commands (OPMODE)
9.3.12
•
ON:36
(COD Module only) Laser on, COD. Charge On Demand is
on.
•
ON:37
Laser on, WARNING! REPRATE FOR COD > 50 Hz.
Charge On Demand is on, but you input a repetition rate
greater than 50 Hz. Because the maximum possible
repetition rate with COD is 50 Hz, the value has been set to
50 Hz.
•
ON:40
Laser on, input energy is too low. The laser is running with
minimum possible HV, but output energy is still higher than
setting.
•
ON:41
Laser on, entered energy value exceeds +5 % of the set
value in the menu data.
OPMODE=PASSIVATION FILL
Starts a passivation fill.
Corresponding States
•
PASSIVATION FILL
Passivation fill is running.
Corresponding Errors
•
9.3.13
PASSIVATION FILL:3
NO GAS FLOW; While refilling, during the passivation fill, no
gas flow was detected in halogen line.
OPMODE=PGR
A0300COM.00
Performs a partial gas replacement.
Corresponding States
•
None
Corresponding Errors
•
None
LAMBDA PHYSIK LASERTECHNIK - 03/00
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REMOTE SOFTWARE
9.3.14
OPMODE=PURGE <xy> LINE
Fills <xy> line with the gas connected to the inert gas line,
where <xy> represents the name of the line; <xy> may be
BUFFER, HALOGEN, INERT or RARE.
Example:
OPMODE=PURGE HALOGEN LINE
fills the halogen line with inert gas.
Corresponding States
•
PURGE <xy> LINE
Filling of <xy> line is in progress, where <xy> represents the
name of the line.
Corresponding Errors
•
9.3.15
None
OPMODE=PURGE RESERVOIR
Starts the purge reservoir procedure.
Corresponding States
•
PURGE RESERVOIR
Purge reservoir procedure is running.
Corresponding Errors
•
192
PURGE RESERVOIR:3
NO GAS FLOW; While refilling, during purge reservoir
procedure, no gas flow was detected in one of the gas lines.
User Manual COMPex
Operation Commands (OPMODE)
9.3.16
OPMODE=SAFETY FILL
This OPMODE can only be executed by the communication
interface. It occurs due to an error during laser tube evacuation.
Corresponding States
•
SAFETY FILL
Evacuation time exceeded. Did not reach 30 mbar within
11.5 min. So a safety fill is being performed, i.e. the laser
tube is filled with the gas connected to “Buffer” up to a
pressure of 1050 mbar.
Corresponding Errors
•
9.3.17
SAFETY FILL:3
NO GAS FLOW; While performing a safety fill, no gas flow
was detected in the inert gas line.
OPMODE=SKIP
Terminates the thyratron warm-up period.
Corresponding States
•
None
Corresponding Errors
•
9.3.18
None
OPMODE=TRANSPORT FILL
Starts a transport fill.
A0300COM.00
Corresponding States
•
TRANSPORT FILL
A transport fill is running.
Corresponding Errors
•
TRANSPORT FILL:3
NO GAS FLOW; While refilling, during the passivation fill, no
gas flow was detected at the buffer line.
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REMOTE SOFTWARE
9.4
Parameter Commands
To execute a command, send
<COM>=XXX
followed by a carriage return (<COM> means a Parameter
Command, XXX the parameter to be set).
All parameter commands are written without spaces on either
side of the equals sign.
Numerical parameters must be integer values except for HV,
for which one decimal place is accepted.
Examples:
COD=ON
COUNTER=RESET
FILTER=8
HV=25.6
9.4.1
BUFFER=
Sets partial pressure of gas connected to buffer line. After
verification of conformity with the prescribed parameter range,
it will be entered into the selected Gas Menu.
Available
•
in OFF operating modes.
Parameter Range
•
194
depends on the factory settings of the Gas Menu.
User Manual COMPex
Parameter Commands
9.4.2
CAP.SET=
Sets the value for the halogen source capacity (in %). To
assume the new capacity value, this command is to be followed
by sending the command “OPMODE=CAPACITY RESET”.
Available
•
in OFF operating modes
Parameter Range
•
9.4.3
0 to 120
COD=
(with Charge on Demand only) Switches the Charge on
Demand (COD) on (“ON”) or off (“OFF”). See also Chapter 12
(Glossary).
NOTE
While running laser with COD on, use repetition rates not higher than 50 Hz. Higher repetition rates will cause missing pulses and thus are set to 50 Hz.
Available
•
in OFF operating modes
Parameter Range
•
9.4.4
ON, OFF
COUNTER=
A0300COM.00
Resets user counter to zero.
Available
•
in OFF operating modes.
Parameter Range
•
RESET
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9.4.5
COUNTS=
Sets value for a countdown. The laser now accepts only
external trigger pulses and only as many as specified by the
COUNTS value. Afterwards the laser stops and COUNTS is
reset to zero.
Available
•
in OFF operating modes
Parameter Range
•
9.4.6
0 to 65535
EGY=
Has three functions:
¯ In energy constant mode it sets the energy value at which
the laser shall be stabilized (”preset energy”). Will be reset
during the next start of the laser device.
On some lasers this function is done by the parameter
command “EGY SET”.
¯ Sending EGY=0 in the energy constant mode resets the
energy value to the to the set value, defined by the
parameter PRESET_EGY in the menu data.
¯ During energy calibration it is needed to input the external
energy reading.
Available
•
in ON and OFF operating modes only.
Parameter Range
•
196
depends on the factory settings of the Gas Menu.
User Manual COMPex
Parameter Commands
9.4.7
EGY RANGE=
Sets the energy tolerance range in percent, relative to preset
beam energy in EGY PGR- or EGY NGR-mode. Setting this
parameter is necessary for the indication of “POWER
STABILIZATION ACHIEVED”.
Available
•
in OFF operating modes only
Parameter Range
•
9.4.8
1 to 100
EGY SET=
(only some lasers) Sets the beam energy (”preset energy”) for
the EGY PGR- and EGY NGR-mode, otherwise it is ignored.
Will be reset the next time the laser device is started.
Available
•
in ON and OFF operating modes only
Parameter Range
•
9.4.9
depends on the factory settings of the Gas Menu
FILTER=
A0300COM.00
Sets the number of pulses used by the program to calculate an
average beam energy. If the input is out of parameter range,
the last FILTER value is kept. If you input “0", the program
automatically sets a filter value, dependent on the repetition
rate.
Available
•
in all operating modes
Parameter Range
•
0, 1, 2, 4, 8, 16
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9.4.10
FILTER CONTAMINATION=
Resets the halogen filter capacity in percent (after the halogen
filter have been replaced).
Available
•
in all operating modes
Parameter Range:
•
9.4.11
RESET
GASMODE=
Switches between premix and single gas operation.
Available
•
in OFF operating modes only
Parameter Range
•
9.4.12
SINGLE GASES, PREMIX
HALOGEN=
Sets partial pressure of gas connected to halogen line.
NOTE
The partial pressure for halogen cylinders must be about 20
times higher than that for the halogen source because in gas
cylinders there is 5% halogen dissolved in 95% inert gas.
After verification of conformity with the prescribed parameter
range, it will be entered into the selected Gas Menu.
Available
•
in OFF operating modes only
Parameter Range
•
198
depends on the factory settings for the Gas Menu
User Manual COMPex
Parameter Commands
9.4.13
HV=
Sets the charging voltage for the HV constant mode. Ignored
in other modes.
Available
•
in all operating modes
Parameter Range
•
9.4.14
depends on the factory settings for the gas menu. This
command accepts values to one decimal place
INERT=
Sets partial pressure of gas connected to inert line. After
verification of conformity with the prescribed parameter range,
it will be entered into the selected gas menu.
Available
•
in OFF operating modes only
Parameter Range
depends on the factory settings for the gas menu
A0300COM.00
•
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9.4.15
MENU=
Selects the Gas Menu (by number). This determines:
¯ name of the gas,
¯ wavelength,
¯ default gas mode (see GASMODE),
¯ partial pressures of the gases,
¯ default tube pressure (see OFF 27),
¯ HVmin, HVmax,
¯ default beam energy constant value.
MENU also resets the actual Gas Menu to factory settings. To
do so, send:
MENU=RESET
Available
•
in OFF operating modes only
Parameter Range
•
9.4.16
1 to 6 (depends on the number of the Gas Menu) and
RESET
MODE=
Selects the running mode (HV, EGY PGR or EGY NGR).
Available
•
in OFF operating modes, and in ON operating modes once
all gas handling procedures have been completed.
Parameter Range
•
200
HV, EGY PGR, EGY NGR
User Manual COMPex
Parameter Commands
9.4.17
OPMODE=
See previous section.
9.4.18
RARE=
Sets partial pressure of gas connected to rare gas line. After
verification of conformity with the prescribed parameter range,
it will be entered into the selected Gas Menu.
Available
•
in OFF operating modes
Parameter Range
•
9.4.19
depends on the factory settings of the Gas Menu
REPRATE=
Sets the internal repetition rate, if TRIGGER=INT has been
set. Else the value is remembered as repetition rate, when
switched to TRIGGER=INT.
Available
•
in ON and OFF operating modes only
Parameter Range
depends on the factory settings of the Gas Menu. High
repetition rate may be declined for high HV values.
A0300COM.00
•
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REMOTE SOFTWARE
9.4.20
ROOMTEMP=
(with HCl source only)
Informs the HCl source whether the room temperature is above
22 °C (72 °F) (“HIGH”) or not (“LOW”), because the chemical
reaction is temperature sensitive. Starting up the laser device
resets ROOMTEMP to HIGH (default value).
Available
•
in all operating modes
Parameter Range
•
9.4.21
HIGH, LOW
TEMP CONTROL=
(with temperature control module only)
Switches the temperature control module on (“ON”) or off
(“OFF”).
Available
•
in all operating modes
Parameter Range
•
9.4.22
ON, OFF
TIMEOUT=
Enables or disables the time-out control of the RS232. If
TIMEOUT is on and there is no data transfer to or from RS232,
laser is turned off and the Polling Command OPMODE?
displays OFF:31.
Available
•
in OFF operating modes only
Parameter Range
•
202
ON, OFF
User Manual COMPex
Parameter Commands
9.4.23
TRIGGER=
Specifies the triggering source, internal (“INT”) or external
(“EXT”).
Available
•
in ON and OFF operating modes only
Parameter Range
INT, EXT
A0300COM.00
•
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REMOTE SOFTWARE
9.5
Polling Commands
To execute a Polling Command, type
<COM>
followed by a carriage return (<COM> means a Polling
Command).
The actual parameter setting is displayed.
All polling commands are available in all operating modes.
Examples
OPMODE?
CAP.LEFT?
FILTER CONTAMINATION?
9.5.1
ACCU?
(with halogen source only)
Displays the current pressure in the accumulator of the halogen
source. If there is no halogen source the answer is zero. If
there is no accumulator (F2-I-Version) the answer is zero, too.
9.5.2
BUFFER?
Displays the current partial pressure of the buffer gas in mbar.
9.5.3
CAP.LEFT?
(with halogen source only)
Displays the current remaining capacity. The response ranges
from 1-120 (Fluorine source) or 1-100 (Chlorine source). This is
equivalent to 0-100 percent. If there is no halogen source the
answer is zero.
9.5.4
COD?
(with Charge on Demand only)
Displays the COD delay in microseconds. This value depends
only on the laser type.
204
User Manual COMPex
Polling Commands
9.5.5
COUNTER?
Displays the number of pulses accumulated (depending on the
software version, divided by 1000) since the user counter was
last reset.
9.5.6
COUNTS?
Displays the value input for the countdown counter (not the
momentary counter).
9.5.7
EGY?
The feedback differs depending on the actual operating mode:
¯ OFF operating mode: Displays the preset beam energy
value in mJ.
¯ ON operating mode: Displays the measured beam energy
value in mJ. If polled again before the next trigger pulse, it
will display “0".
¯ ENERGY CAL operating mode: Displays the momentary
monitor reading (no units).
9.5.8
EGY SET?
Displays the preset beam energy in mJ. Only provided with
certain lasers.
9.5.9
EGY RANGE?
A0300COM.00
Displays the current setting of the energy tolerance range in
percent.
9.5.10
FILTER?
Displays the number of pulses used by the program to
calculate a mean value of the beam energy. If “0" is displayed,
the program has automatically set a value, dependent on the
repetition rate.
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REMOTE SOFTWARE
9.5.11
FILTER CONTAMINATION?
Displays the capacity of the halogen filter in percent.
9.5.12
GASMODE?
Displays the current gas mode (PREMIX or SINGLE GASES).
9.5.13
HALOGEN?
Displays the current partial pressure of the halogen gas in
mbar.
9.5.14
HV?
Displays the value of the charging voltage HV.
9.5.15
INERT?
Displays the current partial pressure of the inert gas in mbar.
9.5.16
INTERLOCK?
Displays a listing of all activated interlocks (separated by
commas). If no interlocks are activated, the response is
“NONE”. After polling, the interlock messages are cleared.
9.5.17
LEAKRATE?
(with fluorine source only)
During new fill procedure; after the new gas has been filled, the
laser stands by to check for gas loss. LEAKRATE? displays the
loss of pressure in mbar per 2 minutes.
9.5.18
MENU?
Displays the current Gas Menu number, wavelength and gas
mixture.
206
User Manual COMPex
Polling Commands
9.5.19
MODE?
Displays the current running mode (“HV”, “EGY PGR” or “EGY
NGR”).
9.5.20
OPMODE?
Displays the actual OPMODE state (see section 9.3)
9.5.21
POWER STABILIZATION ACHIEVED?
Displays, whether the preset power stabilization EGY RANGE
was achieved (replies “YES”) or not (replies “NO”).
9.5.22
PRESSURE?
Displays the laser tube pressure.
9.5.23
PULSE DIFF?
Requests the difference between trigger pulses and pulses
received by the energy monitor.
If polled or if the laser starts, pulse difference is set to zero.
Negative values mean there were fewer light pulses than
trigger pulses (and vice versa).
While the laser is ON, the value may differ from the actual
value by ±1.
9.5.24
RARE?
A0300COM.00
Displays the current partial pressure of the rare gas in mbar.
9.5.25
RESERVOIR TEMP?
(only with optional temperature control)
Displays the current laser tube temperature in °C.
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REMOTE SOFTWARE
9.5.26
REPRATE?
Displays the current repetition rate value.
9.5.27
ROOMTEMP?
(only with HCl source)
Displays the setting for the room temperature value of the
source. If no HCl source is attached, the answer is HIGH.
9.5.28
TEMP?
(only with fluorine source)
Displays temperature of the heater of the integrated fluorine
source. If no fluorine source is attached, the return is ‘0’.
This can be polled in all operating modes; however, the current
heater temperature is only displayed in NEW FILL Mode.
9.5.29
TEMP CONTROL?
(only with temperature control module)
Displays the state of the (tube) temperature control module
(“ON” or “OFF”). If no temperature control module is build-in,
the answer is “N/A”.
9.5.30
TIMEOUT?
Displays, whether the CI is running in time-out control condition
(“ON”) or not (“OFF”).
9.5.31
TOTALCOUNTER?
Displays the number of pulses (divided by 1000) in the laser´s
lifetime, as recorded by the non-resetable total pulse counter.
9.5.32
TRIGGER?
Displays the current trigger setting (“INT” for internal trigger,
“EXT” for external trigger).
208
User Manual COMPex
Polling Commands
9.5.33
TYPE OF LASER?
Displays the model of your laser.
9.5.34
VERSION?
A0300COM.00
Displays the control software version executed by the
communication interface.
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REMOTE SOFTWARE
9.6
Priority of ON Code Messages
If the reply to the command OPMODE? is an ON code, it is
possible that two or more ON-codes apply. In this case the
COMPex replies with the ON code having the highest priority.
The priority for each code is listed in the following table. A
higher number corresponds to a higher priority. If two ON
codes have the same priority, the COMPex displays the first
ON code to occur.
NOTE
For all other codes there are no priorities. This means that
the last code displayed is the most current and the previous
code has been deleted.
Priority
Message
Meaning
5
ON:03
Duty Cycle exceeded
ON:9
NO VACUUM
ON:10
LOW PRESSURE
ON:13
FLUORINE VALVE NOT OPEN
ON:2
PRESET ENERGY TOO HIGH
ON:8
NEW GAS FILL NEEDED
ON:40
PRESET ENERGY TOO LOW
ON:34
HI in preparation
ON:36
COD on
ON:37
COD on at a repetition rate>50 Hz
ON
Laser on, no warning or message
ON:0
Laser on, no warning or message
4
3
2
1
0
210
User Manual COMPex
10
TROUBLESHOOTING
This chapter is intended to help you to solve possible problems
with the COMPex. It presupposes that you have read this
manual, especially the safety instructions.
This chapter does not include tasks that can only be performed
by Service as they can endanger the health and life of an
untrained person. Never try to service the COMPex yourself!
10.1
Overview of this Chapter
This chapter is structured according to the symptoms of
possible problems with the COMPex. It contains the following
sections:
•
•
•
•
•
p. 212
Interlocks
p. 228
Laser Fires a Beam Shot
without a Trigger Pulse (Self-Firing)
p. 233
No Trigger Signal
p. 233
Corrosion in Gas Lines
and Gas Connections
p. 234
Gas Leak
p. 235
Laser Device Does Not Start
p. 238
Beam Energy Too Low
p. 239
Low Light
p. 244
Fuses
p. 249
A0300COM.00
•
•
•
•
•
Warnings and Error Messages
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TROUBLESHOOTING
10.2
Warnings and Error Messages
This section describes warning and error messages sent by the
Communication Interface. They are different whether you use a
handheld keypad (Local Software) or an external PC (Remote
Software). To this section:
•
Within the section the messages are in alphabetical order
with respect to the messages of the handheld keypad. The
messages appropriate to the Remote Software are given in
brackets.
•
To allow quick access for users of the Remote Software, all
warning and error codes are given in the following table in
alphabetical order.
Remote Software
Message
Local Software
Message
Page
No Gas Flow
p. 221
FLUSHING LEAKTEST:3
212
FLUSHING LEAKTEST CONT:30
Leak!-Check Windows
p. 219
NEW FILL:3
No Gas Flow
p. 221
OFF:1
Interlock XXX
p. 219
OFF:2
Preset Energy too High
p. 224
OFF:4
Fatal Error, Watchdog
p. 218
OFF:5
Fatal Error, LWL-Datalink
p. 215
OFF:6
Polling
p. 224
OFF:7
Energy Cal. Error
p. 214
OFF:8
New Gas Fill Needed
p. 220
OFF:9
No Vacuum
p. 222
OFF:10
Low Pressure
p. 220
OFF:11
No Capacity Left
p. 221
OFF:12
Error Temperature
Measurement
p. 214
OFF:13
Fluorine Valve not Opened
p. 218
OFF:21
Warm-up 8min
p. 226
OFF:26
Low Light
p. 220
User Manual COMPex
Warnings and Error Messages
OFF:27
Wrong Pressure
p. 227
OFF:29
RAM Check Error
p. 225
OFF:31
Timeout
p. 225
OFF:33
Halogen Pressure too High
p. 218
OFF:35
Not Available
p. 223
OFF:39
Inert Valve Closed
p. 219
OFF:41
OFF:41
p. 223
ON:2
Preset Energy too High
p. 224
ON:03
Duty Cycle Exceeded
p. 214
ON:8
New Gas Fill Needed
p. 220
ON:9
No Vacuum
p. 223
ON:10
Low Pressure
p. 220
ON:13
Fluorine Valve not Opened
p. 218
ON:34
HI in Prep
p. 218
ON:37
Warning!
repetition rate for COD 50 Hz p. 226
ON:40
ON:40
p. 223
ON:41
ON:41
p. 224
No Gas Flow
p. 221
No Gas Flow
p. 221
SAFETY FILL:3
No Gas Flow
p. 221
TRANSPORT FILL:3
No Gas Flow
p. 221
PASSIVATION FILL:3
PURGE RESERVOIR:3
A0300COM.00
With Local Software there is an additional error message that
deals with the handheld keypads communication (”Fatal Error,
Com-Datalink”, page 215). There is of course no
corresponding error with the Remote Software.
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TROUBLESHOOTING
10.2.1
Duty Cycle Exceeded (ON:03)
Reason:
The laser has exceeded its duty cycle (more than 12000 pulses
in any 20 minutes).This warning message is only applicable to
some lasers.
Solution:
1. Run the laser with a lower repetition rate for a while.
10.2.2
Energy Cal. Error (OFF:7)
Reason:
During the Energy Calibration Procedure, the energy reading
could not be adjusted within a range of 99-200. The energy
calibration procedure is described comprehensively in Section
8.7.
Solution:
1. Add or remove an attenuator as described in Section 8.7.
10.2.3
Error Temperature Measurement (OFF:12)
This is an error message regarding the fluorine source. See
fluorine source manual.
10.2.4
Fatal Error, COM-Datalink (-)
(only with handheld keypad, thus there is no Remote Software
code)
Communication between the handheld keypad and the
Communication Interface is out of order.
Reason (1)
Handheld Keypad and laser are not connected properly.
Preparation for Solution:
1. Switch off laser device.
214
User Manual COMPex
Warnings and Error Messages
Solution:
2. Re-connect handheld keypad to laser.
Reason (2)
Communication link damaged.
Solution:
1. Call service.
10.2.5
Fatal Error, LWL-Datalink (OFF:5)
LWL is the german abbreviation for Lichtwellenleiter, a Fiber
Optics Light Waveguide (FOL).
Reason (1):
FOL data ring connected improperly.
Preparation for Solution:
1. Switch off laser device.
2. Remove right side panel.
3. Remove Communication Interface access panel.
4. Remove Communication Interface (FOLs remain connected).
Solution:
5. Ensure that all FOLs are connected properly. All FOLs are
equipped with a clip. The clip is marked with an abbreviation
corresponding to the port to which it must be connected.
Reason (2):
FOL data ring interrupted or a module damaged.
A0300COM.00
Preparation for Solutions:
1. Switch off laser device.
2. Remove right side panel.
3. Remove Communication Interface access panel.
4. Remove Communication Interface (FOLs remain connected).
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TROUBLESHOOTING
Solutions:
Switch off laser device and access FOLs.
5. Ensure that all FOLs are properly connected to their ports
(Energy Monitor, Communication Interface, Basic Module).
6. Check that all FOLs have a min. bending radius of 50 mm.
7. Ensure that the Communication Interface is sending a (red)
light pulse.
After switching on the 24V power supply, the Communication
Interface must send a light pulse for a few seconds.
To do so, you need help of a second person. Act as follows:
I.
(1st person) Disconnect the Data Out FOL on the
Communication Interface.
II.
(2nd person) Switch on the 24V power supply with the
key switch.
III. (1st person) Watch for a light signal in the Data Out
socket of the Communication Interface for several
seconds. If there is none the Communication Interface
is damaged. Call service.
IV. Switch off 24V power supply with the key switch.
V.
Re-connect the Data Out FOL to the Communication
Interface.
8. Ensure that the FOL data ring is closed:
To do so, you need help of a second person. Act as follows:
I.
(1st person) Disconnect the Data In FOL on the
Communication Interface.
II.
(2nd person) Switch on the 24V power supply with the
key switch.
III. (1st person) Watch for a light signal in the Data In FOL
for several seconds. If none appears, a module is
damaged. Call service
IV. Switch off 24V power supply with the key switch.
V.
216
Re-connect the Data In FOL to the Communication
Interface.
User Manual COMPex
Warnings and Error Messages
9. Check for defective FOLs.
To do so, you need help of a second person. Act as follows:
I.
(1st person) Disconnect Data In FOL from Energy Monitor.
II.
(2nd person) Switch on the 24V power supply with the
key switch.
III. (1st person) Watch for a light signal in the Data In FOL
for several seconds. If one appears, FOL is in order.
If not, remove the FOL.
IV. (2nd person) Switch off 24V power supply with the key
switch.
V.
(1st person) Disconnect Data In FOL from Basic Module.
VI. (2nd person) Switch on the 24V power supply with the
key switch.
VII. (1st person) Watch,for a light signal in the Data In FOL
for several seconds. If one appears, FOL is in order.
If not, remove the FOL.
VIII. (2nd person) Switch off 24V power supply with the key
switch.
If the COMPex has no built-in halogen source, leave out
steps IX to XII.
IX. (1st person) Disconnect Data In FOL of halogen source.
X.
(2nd person) Switch on the 24V power supply with the
key switch.
XI. (1st person) Watch for a light signal in the Data In FOL
for several seconds. If one appears, FOL line is in order.
If not, remove the FOL line.
XII. (2nd person) Switch off 24V power supply with the key
switch.
A0300COM.00
10. If all FOLs are working, one of the modules is damaged.
Call service.
Reason (3):
Software is not compatible with a newly-replaced module.
Solution:
1. Call service.
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TROUBLESHOOTING
10.2.6
Fatal Error, Watchdog (OFF:4)
Reason:
Basic Module did not respond.
Solution:
1. Switch off laser device, wait a minute and start again.
If trouble remains, call service.
10.2.7
Fluorine Valve Not Opened (OFF:13; ON:13)
This is a warning or error message regarding the fluorine
source. See fluorine source manual.
10.2.8
Halogen Pressure Too High (OFF:33)
This is an error message regarding the halogen source. See
halogen source manual.
10.2.9
HI in Prep (ON:34)
This is a warning message regarding the halogen source.
Reason:
The halogen source is just preparing a halogen injection. This
may last a few minutes.
Solution:
1. Wait a few minutes.
218
User Manual COMPex
Warnings and Error Messages
10.2.10
Inert Valve Closed (OFF:39)
Reason:
A manual fill of inert gas has been ended. This message is
both a warning and an error message.
¯ Warning: the inert valve was open for 10 seconds and is now
closed.
¯ Error message: the tube pressure exceeded 3800 mbar
during the fill. Therefore, the fill has been terminated.
Solution:
1. Warning:
Not necessary.
2. Error message:
Reduce tube pressure.
10.2.11
Interlock XXX(OFF:1)
Reason:
Major malfunction (XXX” represents the name of an interlock).
With a handheld keypad the name of the interlock is displayed.
When the laser is controlled with Remote Software, the
interlock can be identified using the command INTERLOCK?.
Solution:
1. See section 10.3.
10.2.12
Leak!-Check Windows
(FLUSHING LEAKTEST CONT:30)
A0300COM.00
Reason:
Leak test in the flushing procedure has failed.
Solution:
1. Check windows for leaks.
After solving the problem proceed by pressing <ENTER>
(with Remote Software: send OPMODE=CONT). The
flushing procedure repeats to evacuate the tube.
LAMBDA PHYSIK LASERTECHNIK - 03/00
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TROUBLESHOOTING
10.2.13
Low Light (OFF:26)
The Energy Monitor did not detect a beam pulse after a trigger
pulse.
Reason:
At least 30% of all pulses within 10 seconds are missing.
Solution:
1. see Section 10.10.
10.2.14
Low Pressure (OFF:10; ON:10)
This is an error message regarding a halogen source. See
halogen source manual.
10.2.15
New Gas Fill Needed (OFF:8; ON:8)
This message only occurs n Energy Constant Mode. It may be
either a warning or an error message.
¯ Warning: the charging voltage exceeded the Threshold
Voltage HVrepl.
¯ Error message: the charging voltage exceeded the maximum
possible voltage HVmax.
Reason (1):
Laser gas quality insufficient.
Solution:
1. Perform a New Fill (see Section 8.4.3).
Reason (2):
EGY Constant value too low, thus HV lower than lasing
threshold.
Solution:
1. Raise EGY Constant value (see Section 7.5.2)
If trouble remains, follow the flowchart “Beam Energy too
Low” (see Section 10.9).
220
User Manual COMPex
Warnings and Error Messages
10.2.16
No Capacity Left (OFF:11)
This is an error message regarding the halogen source. See
halogen source manual.
10.2.17
No Gas Flow (XX:3)
There was no gas flow detected in one of the gas lines. With
Remote Software XX” represents the name of the OPMODE at
which the error occurred.
Reason (1):
Cylinder Valve not opened.
Solution:
1. Open cylinder valve.
Reason (2):
Pressure regulator setting wrong
Solution:
1. Set pressure regulator to 4bar.
Reason (3):
Gas cylinder pressure low
Solution:
A0300COM.00
1. Replace gas cylinder (see Section 8.4.4).
LAMBDA PHYSIK LASERTECHNIK - 03/00
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TROUBLESHOOTING
10.2.18
No Vacuum (OFF:9)
This error message is displayed after a successful safety fill.
NOTE:
With a handheld keypad, do not confuse the warning and the
error message “No Vacuum”. The warning is a function of
the optional halogen source while injecting or filling the laser
tube with halogen. The error only occurs after an unsuccessful evacuation of the laser tube.
1. Symptom:
Vacuum Pump did not run.
Reason:
Vacuum Pump defective.
Preparation for Solution:
1. Switch off laser device.
Solution:
2. Ensure that the vacuum pump power supply line is properly
connected to the COMPex.
3. Check fuse of vacuum pump. Replace, if necessary.
4. Check power supply line of vacuum pump.
2. Symptom:
Vacuum Pump continues to run.
Reason (1):
Laser tube leaky.
Solution:
1. Test laser tube for a leak (see Section 10.7.2). In case of a
leak, tighten if possible. Otherwise call service.
2. Perform a leak test in the gas line to the vacuum pump. If
leaky, replace line.
3. Check halogen filter for leak. Tighten if possible, otherwise
replace filter (see Section 8.9.2).
If the problem remains, call service.
222
User Manual COMPex
Warnings and Error Messages
10.2.19
No Vacuum (ON:9)
This is a warning message regarding the halogen source. See
halogen source manual.
10.2.20
Not Available (OFF:35)
This is an error message regarding the halogen source. See
halogen source manual.
10.2.21
OFF:41 (OFF:41)
This error triggers the message OFF:41 in both the Local and
Remote Software.
Reason:
In Energy Constant Mode, the entered energy value exceeds
the set value in the menu data for more than +5 %. The laser
is OFF.
Solution:
1. If necessary, enter a valid value.
10.2.22
ON:40 (ON:40)
This error triggers the message ON:40 in both the Local and
Remote Software.
Reason:
A0300COM.00
In Energy Constant Mode, the HV is adjusted to the lowest
possible value but the beam energy cannot be stabilized as
low as requested.
Solution:
1. Raise Energy Constant Value (see Section 7.5.2).
LAMBDA PHYSIK LASERTECHNIK - 03/00
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TROUBLESHOOTING
10.2.23
ON:41 (ON:41)
This error triggers the message ON:41 in both the Local and
Remote Software.
Reason:
In Energy Constant Mode, the entered energy value exceeds
the set value in the menu data for more than +5 %. The Laser
is ON.
Solution:
1. If necessary, enter a valid value.
10.2.24
Polling (OFF:6)
Reason:
At least one module in the laser device did not respond.
Solution:
1. Switch off laser device and start laser again. If problem
remains, call service.
10.2.25
Preset Energy too High (OFF:2; ON:2)
This message can only occur if the Running Mode is an Energy
Constant Mode. It may be either a warning or an error
message.
¯ If a warning: the charging voltage exceeded the Threshold
Voltage HVrepl.
¯ If an error: the maximum possible voltage HVmax.
Reason (1):
Laser gas quality insufficient.
Solution:
1. Perform a New Fill (see Section 8.4.3).
224
User Manual COMPex
Warnings and Error Messages
Reason (2):
EGY Constant value too low, thus HV lower than lasing
threshold.
Solution:
1. Raise EGY Constant value (see Section 7.5.2)
If problem remains, follow the flowchart “Beam Energy too
Low” (see Section 10.9).
10.2.26
RAM Check Error (OFF:29)
This error message indicates incorrect menu data of the
Control Interface’s Zero Power RAM. The menu data can be
downloaded even in this failure szenario.
Reason:
RAM check failed. Communication Interface or connections
damaged.
Solution:
1. Call service.
10.2.27
Timeout (OFF:31)
This error message appears if no data transfer occurred via
the RS232 within one second.
Reason (1):
RS232 plug not properly connected.
Solution:
A0300COM.00
1. Check RS232 plug for proper connection.
Reason (2):
Control software failure.
Solution:
1. Switch off laser device and start laser device again.
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TROUBLESHOOTING
Reason (3):
Communications Interface damaged.
Solution:
1. Call service.
10.2.28
Warm-up 8min (OFF:21)
Reason:
Laser device was just started and is now warming up the
thyratron.
Solution:
1. Wait for eight minutes.
10.2.29
Warning! Repetition Rate for COD 50 Hz (ON:37)
This warning can only occur with an active COD.
Reason:
Although COD only supports repetition rates up to 50 Hz, the
preset repetition rate is more than 50 Hz; hence, the COMPex
has set the repetition rate to 50 Hz.
Solution:
1. Set repetition rate to less than 51 Hz.
226
User Manual COMPex
Warnings and Error Messages
10.2.30
Wrong Pressure (OFF:27)
Laser tube pressure out of range. The tube pressure must be
within a range of ± 20% of the default tube pressure as
specified in the Gas Menu.
Reason (1):
Pressure settings in the Gas Menu too high or too low.
Solution:
1. Reduce or increase settings in the gas menu, so that the
sum of all partial pressures does not exceed the default
pressure by more than ± 20 %.
Reason (2):
Laser tube leaky.
Solution:
1. Test laser tube for a leak. In case of a leak: tighten, if
possible, otherwise call service.
Reason (3):
Pressure detector at the laser tube defective.
Solution:
A0300COM.00
1. Call service.
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TROUBLESHOOTING
10.3
Interlocks
Interlock refers to an error message indicating a malfunction or
critical interference. The high voltage is switched off, but the
laser system remains on. The advantages of this method are
that the entire system does not need to be restarted when
there is a simple malfunction and communication with the
processor is still possible.
More than one interlock can occur at a time. To receive
information about the current interlocks:
1. Press the function button <F1>.
2. (if an interlock occurred) Press cursor left or right to select
interlock.
3. Press <ENTER>.
WARNING
Risk of electric shock!
Storage capacitors are charged with high voltage.
Never open the laser housing while high voltage
capacitors are charged.
Measurements and work on the electrical system and its
equipment must be carried out only by a skilled electrician.
The following interlocks may occur:
¯ Overload (see page 229)
¯ Remote (see page 230)
¯ Temp.Res. (see page 231)
¯ Ventilation (see page 232)
228
User Manual COMPex
Interlocks
10.3.1
Overload
This interlock is an electronic interlock for the HV power
supply. This interlock is activated if the high voltage charging
circuit does not reach the preset high voltage level.
Reason (1):
Thyratron no longer adjusted.
Solution:
1. Adjust thyratron settings (see Section 8.8.2).
Reason (2):
Malfunction in the HV circuit.
Solution:
A0300COM.00
1. Switch off the laser device and start again. If the problem
remains, call service.
LAMBDA PHYSIK LASERTECHNIK - 03/00
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TROUBLESHOOTING
10.3.2
Remote
A remotely located interlock switch must be connected to the
4-pin remote socket (see Section 5.3.3). The interlock has to
be connected between pins 2 and 3 of this socket and laser
operation is only possible as long as pin 2 and 3 are jumpered.
This Interlock also monitors the panels of the laser device.
Reason (1):
Pins 2 and 3 of the remote socket no longer make contact. This
may be due to an open switch, a detector or other device
connected to pins 2 and 3.
Solution:
1. Close contact between pins 2 and 3 of the remote socket.
Reason (2):
One of the laser device panels is open.
Solution:
1. Close all panels.
230
User Manual COMPex
Interlocks
10.3.3
Temp.Res.
This interlock is a thermal switch which is located on top of the
laser tube. The switch opens if the laser tube temperature
reaches 46 °C.
Reason (1):
(COMPex 110 and 205 only)
There is too little or no cooling water or the cooling water is too
warm.
Solutions:
1. Ensure that water flow matches the specifications (see
Section 5.4).
2. Ensure that the water inlet temperature is within range of
specifications (see Section 5.4).
3. Check for a water leak.
If trouble remains, call service.
Reason (2):
(all laser devices except COMPex 110 and 205)
There is too little or no cooling air or the cooling air is too warm.
Solutions:
1. Ensure that the housing ventilation entrances are not
blocked.
2. Ensure that the fan at the rear housing ventilation exit is
functional.
3. Ensure that the ambient temperature matches
specifications (see Section 5.8).
4. Check the duct system for malfunction.
A0300COM.00
If the problem remains, call service.
LAMBDA PHYSIK LASERTECHNIK - 03/00
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TROUBLESHOOTING
10.3.4
Ventilation
The motor which drives the gas circulation fan in the laser tube
is protected by this interlock.
Reason (1):
Malfunction of the motor fan for the laser tube.
Solutions:
1. Ensure that there is power to the fan motor,
2. Ensure that the fan motor is not damaged.
If the problem remains, call service.
Reason (2):
Damaged fan or fan bearings.
Solution:
1. Call service.
232
User Manual COMPex
Laser Pulses without Triggering (Self-Firing)
10.4
Laser Pulses without Triggering
(Self-Firing)
Reason (1)
(with COD only) COD not active.
Solution:
1. Switch COD on (see Section 7.5.4)
Reason (2):
Thyratron settings wrong
Solution:
1. Adjust Thyratron (see Section 8.8.1).
Reason (3):
Thyratron, varistors or Trigger Board defective.
Solution:
1. Call service.
10.5
No Trigger Signal
A0300COM.00
This malfunction causes the error message “LOW LIGHT” (see
Section 10.10 on page 244 ).
LAMBDA PHYSIK LASERTECHNIK - 03/00
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TROUBLESHOOTING
10.6
Corrosion in Gas System
Symptom:
¯ insufficient gas lifetime,
¯ beam specifications not met,
¯ visible corrosion at gas lines and connections.
Reason (1):
Halogen line has not been purged before a standstill. Thus,
halogen has come in contact with ambient humidity.
Solution:
1. Replace corroded lines.
Reason (2):
Halogen line has been purged before a standstill, but halogen
cylinder was not sealed properly.
Solutions:
1. Check pressure regulator in halogen line.
2. Check valve on halogen gas cylinder.
3. Replace corroded lines and pressure regulators.
234
User Manual COMPex
Gas Leak
10.7
Gas Leak
This procedure is divided into two sub-procedures:
•
•
Leak test gas lines (Section 10.7.1)
Leak test laser tube (Section 10.7.2)
NOTE
Leak check all lines with inert gas prior to use with halogens
or expensive rare gases.
Tools and Materials
•
•
•
•
10.7.1
Liquid leak tester SNOOP® (from service case)
Helium leak testing device
Ethanol
Cleaning paper
Leak Test Gas Lines
NOTE
The following assumes that an inert gas cylinder is attached
to the inert gas line to purge the gas lines. If this is not the
case, flush the line and fill line from a gas cylinder that does
not contain halogen (see Section 8.4.1).
Preconditions
•
Laser in OFF mode.
Leak Testing a Gas Line
1. Press <BREAK> to stop laser operation.
A0300COM.00
2. Close valve on gas cylinder to the line that will be
leak-tested.
3. Open valve for appropriate pressure regulator.
4. Open valve of inert gas cylinder.
5. Set pressure regulator for inert gas to 5 bar.
6. Purge the line to be leak-tested (see Section 8.4.2).
LAMBDA PHYSIK LASERTECHNIK - 03/00
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TROUBLESHOOTING
7. Close valve to the inert gas cylinder.
The line is now filled with inert gas at a pressure of 5 bar.
8. Spray SNOOP on the fitting in the line.
You can see small bubbles at a leaky fitting after a few
seconds.
9. Tighten leaky fittings.
10. Check for leak again.
11. Call service if it is not possible to seal the fittings.
12. Clean the fittings carefully with cleaning paper.
13. Wash the fittings with ethanol and dry them with cleaning
paper.
Finalization
14. Refill the gas lines with fresh gas (see Section 8.4.1).
10.7.2
Leak Test Laser Tube
Additional tools and Materials
•
Thermometer (best scale from 0 to 50 °C)
Preconditions
•
•
Gas lines within the laser device leak tested
Tube at room temperature
NOTE
Keep the tube temperature constant, because a temperature
drop of just 1 °C results in a pressure drop of 10 mbar. Thus
you would detect leaks that do not exist.
Leak Testing the Laser Tube
1. Stop laser.
2. Switch off cooling water.
3. Let laser stand for at least one hour to let the tube cool
down.
4. Fix a thermometer at the tube to check that the temperature
at the beginning of the leak test does not differ from that of
the end.
236
User Manual COMPex
Gas Leak
5. Perform a leak test while the pressure within the tube is
sufficiently above atmospheric pressure (best 3000 mbar).
6. Fill tube manually to 3000 mbar with helium (see Section 7.7).
7. Wait for 10 minutes to let the gas cool down.
8. Check the pressure drop in the tube.
The pressure drop may not exceed 2 mbar within one hour.
Test for at least two hours, although longer (e.g. overnight)
is better.
CAUTION:
Tube optics and connections can be soiled!
Do not use liquid leak tester at the tube. Use a special
Helium Leak Testing Device.
If the pressure drop exceeds 2 mbar within an hour, a leak at
the tube is likely.
9. Search for leaks with a helium leak testing device.
10. Seal the leak(s) if possible.
CAUTION
Tube may be damaged!
Call Lambda Physik Service if you cannot seal the leak.
Finalization
11. Perform a new fill (see Section 8.4.3).
A0300COM.00
Only when all leaks are sealed, the laser can be restarted.
LAMBDA PHYSIK LASERTECHNIK - 03/00
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TROUBLESHOOTING
10.8
Laser Device Does Not Start
Symptom:
After turning on the laser device with the mains and the key
switches, nothing happens (no lights, no sound).
Reason (1):
Mains supply line not properly connected or defective.
Solution:
1. Check mains supply line.
WARNING
Risk of Electrocution!
The mains supply line must be exchanged by instructed
persons only, under the supervision and guidance of a
skilled electrician and in accordance with electrical
engineering rules and regulations.
Reason (2):
Wrong mains supply.
Solution:
1. Check that the laser device is set to the proper mains
supply voltage and frequency.
Reason (3):
Fuse(s) defective.
Solution:
CAUTION
Power supply can be damaged.
A blown fuse suggests a malfunction in the power supply.
Inform service.
1. Check fuses F1 to F6 and replace, if necessary (see Figure
50). For ratings of the fuses see Section 10.11.
238
User Manual COMPex
Beam Energy Too Low
KEY SWITCH
CONTROL
SUPPLY
24V AC
F1
F3
F5
F2
F4
F6
MainS
POWER ON
LINE
Figure 50: Fuses on the rear side of the COMPex
Reason (4):
No line voltage.
Solution:
1. Check the main fuse of the connection box of the building.
10.9
Beam Energy Too Low
A0300COM.00
The pulse energy may be low for many different reasons. To
clearly detect the source of the problem, follow the flowcharts
shown on the following pages.
LAMBDA PHYSIK LASERTECHNIK - 03/00
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TROUBLESHOOTING
Beam Output Energy Low
Gas cylinders
just changed?
no
Continued on
next page
yes
Check for
gas leak
Leak?
yes
Tighten leak
New Fill
Problem solved?
no
yes
Stop
no
Purge Lines
3 times
Purge laser tube
Flush lines and
fill with fresh gas
New Fill
yes
Stop
Problem solved?
no
Check gas lines
for internal corrosion
Corroded
gas lines?
yes
Replace
gas lines
Re-passivate
laser tube
New Fill
no
no
Change gas
cylinders again
yes
Problem solved?
Stop
Re-passivate
laser tube
New Fill
Problem solved?
yes
Stop
no
Continued on
next page
Figure 51: Beam energy too low - part 1
240
User Manual COMPex
Beam Energy Too Low
Beam Output Energy Low
(Continue 1)
Measure beam energy
with ext. energy meter
yes
Beam energy
really too low?
no
Calibrate
energy monitor
Problem solved?
yes
Stop
no
Replace or
re-connect FOL
yes
FOL broken or
not properly
connected?
Check FOL from
beam splitter box
to energy monitor
no
Problem solved?
no
Energy monitor damaged
Call Service
yes
Stop
Has laser
been at a standstill
for a long time ?
no
Continued on
next page
Perform a
leak test
Purge lines
3 times
Flush lines and
fill with fresh gas
New Fill
Problem solved?
yes
Stop
A0300COM.00
no
Continued on
next page
Figure 52: Beam energy too low - part 2
LAMBDA PHYSIK LASERTECHNIK - 03/00
241
TROUBLESHOOTING
Beam Output Energy Low
(Continue 2)
yes
* F2, ArF about 40 °C
XeCl about 30 °C
all others about 35 °C
Laser tube
temperature
OK? *
no
(if available)
adjust waterflow
Make a few
thousand shots
Problem solved?
yes
Stop
no
Optics just changed
or cleaned?
no
Continued on
next page
yes
Has laser been
open for more
than 2 minutes?
yes
Re-passivate
laser tube
New fill
no
no
Check Optics
Right Optics?
(labeled at side
of optics)
no
Problem solved?
yes
Stop
Replace Optics
yes
Correct
mounting
no
Coated optics
properly mounted?
yes
Adjust tube
optics
yes
Problem solved?
Stop
no
Continued on
next page
Figure 53: Beam energy too low - part 3
242
User Manual COMPex
Beam Energy Too Low
Beam Output Energy Low
(Continue 3)
Laser tube
gases old?
yes
New Fill
no
Clean
tube optics
no
yes
Problem solved?
Stop
Clean
beam splitter
Adjust
tube optics
yes
Problem solved?
Stop
no
Check for
gas leak
no
Leak?
yes
Tighten leak
Problem solved?
yes
Stop
no
Thyratron
adjustment OK?
yes
no
A0300COM.00
Adjust Thyratron
Stop
yes
Problem solved?
no
Call service
Figure 54: Beam energy too low - part 4
LAMBDA PHYSIK LASERTECHNIK - 03/00
243
TROUBLESHOOTING
10.10
Low Light
The LOW LIGHT error may have several reasons. Use the
following flowcharts to trace the reason of the problem.
Low Light
Are there any
trigger pulses?
no
See flowchart
"Low LightNo Trigger Pulses"
yes
See flowchart
"Low LightMissing Pulses"
yes
Are light
pulses
missing?
no
Measure beam output energy
with external energy meter
Is beam output
energy accurate?
yes
See flowchart
"Low Light - Problem with
Energy Monitor"
no
Is there any
beam output
energy?
no
yes
See flowchart
"Low Light - Beam Output
Energy too low"
no
Major malfunction.
Call service
Raise EGY
const. value
Problem solved?
yes
EGY const. value has been
below lasing threshold.
Run with higher energies.
Figure 55: Low Light
244
User Manual COMPex
Low Light
Low Light No Trigger Pulses
Does the laser
receive any external
trigger signals?
yes
Is the laser set
to "EXT. TRIGGER"?
no
Check external
trigger device
yes
no
Switch to
"INT. TRIGGER"
Measure UH and UR
at thyratron
adjustment panel
Are there
any voltages?
no
no
Measure UBIAS at
thyratron adjustment
panel
Problem solved?
yes
Stop
Exchange thyratron fuse
(M07/F1; at thyratron
adjustment panel)
yes
Problem solved?
Stop
no
Defective power supply.
Call service
Is UBIAS between
-140 and -160 V?
no
Varistor or HV trigger
damaged. Call service
yes
Raise UH and UR
one or two steps
A0300COM.00
Problem solved?
yes
Stop
no
Major malfunction.
Call service
Figure 56: Low Light - no trigger pulses
LAMBDA PHYSIK LASERTECHNIK - 03/00
245
TROUBLESHOOTING
Low Light Missing Pulses
yes
Is laser in HV
Constant Mode?
Is laser gas old?
yes
Make a new fill
no
no
no
no
yes
Problem solved?
Stop
Is laser running
with ArF or F2?
yes
Measure laser
tube temperature
Is temperature
less than 35 °C?
yes
yes
(If available)
Reduce water flow
Stop
Problem solved?
no
no
Raise environmental temperature
Make a few
thousand shots
Raise UH and UR one or
two steps at thyratron
adjustment panel
yes
Problem solved?
no
yes
Problem solved?
Stop
Stop
no
Major malfunction.
Call service
Figure 57: Low Light - missing pulses
246
User Manual COMPex
Low Light
Low Light - Problem
with Energy Monitor
Calibrate
energy monitor
Problem solved?
yes
Stop
no
Check FOL from
beam splitter box
to energy monitor
FOL broken or
not properly
connected?
yes
Replace or
re-connect FOL
no
Energy monitor damaged
Call Service
no
yes
Problem solved?
Stop
A0300COM.00
Figure 58: Low Light - problem with energy monitor
LAMBDA PHYSIK LASERTECHNIK - 03/00
247
TROUBLESHOOTING
Low Light - Beam
Output Energy too Low
Clean
tube optics
Clean
beam splitter
Check optics
Replace optics
no
Right optics?
(labeled at side
of optics)
yes
Coated
optics properly
mounted?
no
Correct mounting
yes
Adjust tube
optics
Problem solved?
yes
Stop
no
Major malfunction.
Call service
Figure 59: Low Light - beam energy too low
248
User Manual COMPex
Fuses
10.11
Fuses
10.11.1
Fuses Inside COMPex
The fuses inside COMPex are:
¯ at the rear side of the laser (seen from beam exit),
M03/
F6
M03/
F5
M03/
F4
M03/
F3
M03/
F2
M03/
F1
Figure 60: Fuses at the inner rear side of COMPex
max
max
UR
50Hz
60Hz
UH
¯ at the thyratron adjustment panel.
FUSE
AUX
BIAS
A0300COM.00
Figure 61: Fuse at the thyratron adjustment panel
Fuse
Value 110 V
Value 230 V
Protection
M03/F1
0.5 A slow blow
0.5 A slow blow
Fan 1 + 2
M03/F2
-
-
not used
M03/F3
8.0 A slow blow
8.0 A slow blow
Vacuum Pump
M03/F4
0.5 A slow blow
0.5 A slow blow
Servo Driver
M03/F5
2.5 A slow blow
2.5 A slow blow
Gas Circulation
M03/F6
0.063 A slow blow
0.063 A slow blow
Power Supply of Gas Purifier
Thyratron
2.5 A ultra slow blow
2.5 A ultra slow blow
Thyratron Supply Module
LAMBDA PHYSIK LASERTECHNIK - 03/00
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TROUBLESHOOTING
10.11.2
Fuses Outside COMPex
The fuses outside of COMPex are aside of the main switch,
located at the rear outside.
KEY SWITCH
CONTROL
SUPPLY
24V AC
F1
F3
F5
F2
F4
F6
MainS
POWER ON
LINE
Figure 62: Fuses at the rear outside of COMPex
Fuse
Value 110 V
Value 230 V
Protection
F1
12.5 A slow blow
12.5 A slow blow
secondary circuit isolating
transformer
F2
4.0 A slow blow
4.0 A slow blow
secondary circuit 24 V AC
transformer
F3
1 A slow blow
0.5 A slow blow
primary circuit 24 V AC transformer
F4
1 A slow blow
0.5 A slow blow
primary circuit 24 V AC transformer
F5
25 A slow blow
16 A slow blow
primary circuit main line
F6
25 A slow blow
16 A slow blow
primary circuit main line
250
User Manual COMPex
11
WIRING DIAGRAMS /
DIAGRAM SCHEMATICS
11.1
Gas Flow Diagrams
PS
Laser Tube
LH
PS
B
H
R
I
V
5 BAR
PRV
HF
VP
BUFFER
HALOGEN
RARE
INERT
GAS PORTS
exhaust
LH - LASERHEAD VALVE
PRV - PRESSURE VALVE
B - BUFFER VALVE
PS - PRESSURE SENSOR
H - HALOGEN VALVE
HF - HALOGEN FILTER
A0300COM.00
R - RARE VALVE
I
- INERT VALVE
V - VACUUM VALVE
VP - VACUUM PUMP
Figure 63: Laser gas flow diagram without Halogen Source
LAMBDA PHYSIK LASERTECHNIK - 03/00
251
WIRING DIAGRAMS / DIAGRAM SCHEMATICS
PS
Laser Tube
LH
PS
5 BAR
V
H
HB
PRV
HF
VP
Accu
B
R
I
F2
GAS PORTS
P
I
Reactor
6.5 BAR
HaloSafe™ Fluorine
LH - LASERHEAD VALVE
PRV - PRESSURE VALVE
B - BUFFER VALVE
PS - PRESSURE SENSOR
H - HALOGEN VALVE
R - RARE VALVE
I
- INERT VALVE
exhaust
HF - HALOGEN FILTER
HB - HALOGEN-BUFFER VALVE
P
- PILOT VALVE
V - VACUUM VALVE
VP - VACUUM PUMP
Figure 64: Laser gas flow diagram with Fluorine Source
252
User Manual COMPex
Gas Flow Diagrams
PS
Laser Tube
LH
PS
5 BAR
V
H
R
B
PRV
I
HF
VP
Accu
B
R
I
HR2
GAS PORTS
HB
B
Reactor
HR1
Reservoir
Halo Safe™ HCl
exhaust
LH - LASERHEAD VALVE
PS - PRESSURE SENSOR
HH - HALOGEN VALVE
HF - HALOGEN FILTER
R - RARE VALVE
A0300COM.00
PRV - PRESSURE VALVE
B - BUFFER VALVE
I
- INERT VALVE
V - VACUUM VALVE
VP - VACUUM PUMP
HB - HALOGEN-BUFFER VALVE
HR1 - HALOGEN-RESERVOIR VALVE
HR2 - HALOGEN-REACTOR VALVE
Figure 65: Laser gas flow diagram with HCl Source
LAMBDA PHYSIK LASERTECHNIK - 03/00
253
WIRING DIAGRAMS / DIAGRAM SCHEMATICS
11.2
Layout of the COMPex
Figure 66: Layout of COMPex 100 Series
254
User Manual COMPex
A0300COM.00
Layout of the COMPex
Figure 67: Layout of COMPex 200 and 300 Series
LAMBDA PHYSIK LASERTECHNIK - 03/00
255
WIRING DIAGRAMS / DIAGRAM SCHEMATICS
11.3
Maintenance Areas
Figure 68: Maintenance area of COMPex 100 Series
256
User Manual COMPex
A0300COM.00
Maintenance Areas
Figure 69: Maintenance area of COMPex 200 and 300 Series
LAMBDA PHYSIK LASERTECHNIK - 03/00
257
WIRING DIAGRAMS / DIAGRAM SCHEMATICS
11.4
258
Wiring Diagrams
User Manual COMPex
12
GLOSSARY
This chapter explains laser vocabulary used throughout this
manual.
Basic Module
Central module of the COMPex.
The Basic Module controls gas handling,
HV power supply and tube pressure. It is
controlled by the Communication Interface.
Beam Splitter
Laser optics which divide a beam into two
separate beams through reflection and
transmittance. On the COMPex, a beam
splitter deflects a part of the beam onto the
Energy Monitor. Some beam splitters have
an UV coating. This allows a minimum of
beam energy loss with a maximum of reflection and transmission.
Beam splitters may also act as a filter to
allow transmittance of only a small range
of wavelengths.
Buffer
Gas that provides optimum discharge abilities for the laser gas. Neon as a buffer is a
patent of Lambda Physik (US Patent
# 4,393,505).
Charging Current Current that charges the storage capacitors in the laser.
A0300COM.00
COD
LAMBDA PHYSIK LASERTECHNIK - 03/00
Abbreviation for Charge on Demand, an
optional function on the COMPex. With
COD the trigger signal enables the power
supply to charge the storage capacitors
(and thus the discharge capacitors). This limits the period of time HV is applied to the
thyratron. This means:
– HV is only used if needed and
– HV is not turned on without a trigger signal.
COD has been introduced to enhance components lifetime even further and to
prevent prefiring. Figure 70 shows a laser
triggering without COD, Figure 71 with
COD.
GLOSSARY - 259
GLOSSARY
1/repetition rate
Trigger In (from CI)
HV enabled
HV on capacitors
15µs
Time for possible
fail-triggering
TCharge
Figure 70: Laser triggering without COD
1/repetition rate
Trigger In (from CI)
HV enabled
HV on capacitor
15µs
TCharge=TDelay
20µs
Figure 71: Laser triggering with COD
Communication Interface
The central control unit of the COMPex.
Contains the local and remote software for
the laser. Abbreviation CI.
Data Ring
GLOSSARY - 260
Module´s information link in the laser. All laser modules are connected in series and
are constantly polled to watch their function. Realized as an FOL.
User Manual COMPex
GLOSSARY
Discharge Capacitors
See Peaking Capacitors.
Peaking Capacitors
The discharge of an excimer laser is fed
from discharge capacitors (“peaking capacitors”). These discrete ceramic high-voltage capacitors are coupled directly with
the discharge electrodes with minimum inductance. The peaking capacitors are charged by a current pulse supplied by the
storage capacitors.
Dynamic Gas Lifetime
Lifetime of the gas in the laser tube with respect to operation. Specified as the number of pulses it takes for the beam energy
to decrease from max. value (after new
gas fill) to half output energy (50%). To
test this the laser operates at maximum repetition rate with no interruption and max.
high voltage. Neither Halogen Injections
nor any other gas actions are performed.
See also Static Gas Lifetime.
EGY
Abbreviation for Energy.
EGY CONST
Abbreviation for Energy Constant Mode.
Energy Constant Mode
(EGY CONST)
Running Mode, that keeps the beam energy
constant by continuously increasing the HV.
If a given threshold HV is reached, the laser reacts with an HI or PGR or a warning,
depending on the Energy Constant Mode
chosen (see Figure 72).
High Voltage
Energy
HV
A0300COM.00
Energy
Time
Figure 72: EGY CONST mode without HI/PGR
LAMBDA PHYSIK LASERTECHNIK - 03/00
GLOSSARY - 261
GLOSSARY
Energy Monitor
Tool to measure the energy of the laser
beam via a detector. Fed by a beam splitter, that reflects 10% of the beam energy
onto the detector. The Energy Monitor electronics convert the light intensity into an 8bit signal, that is evaluated by the
Communication Interface.
The Energy Monitor is triggered with an
FOL line from the beam splitter box to the
energy monitor electronics. If there is laser
light within the beam splitter box, the FOL
line leads a light pulse to the energy monitor electronics causing it to function. Thus
it does not detect continuously but is triggered by the beam light itself.
Excimer Gas
Abbreviation for Excited State Dimer Gas.
See Excited State Dimer Gas
Excited State Dimer Gas
A short-lived diatomic molecule, composed
of an excited and a non-excited atom. In
an Excimer laser it is created by a high voltage discharge. When decomposing, the excimer gas emits the laser radiation.
Flushing
Evacuating a gas line.
Flushing Procedure
Procedure to allow optics replacement and
optics cleaning.
FOL
GLOSSARY - 262
Abbreviation for Fiber Optics Light Wave
Guide. Information link, that transmits via
light signals. Used in excimer lasers to
keep the information links free of electrical
interference. In some cases at COMPex
software the german abbreviation “LWL”
(for Lichtwellenleiter) is used.
User Manual COMPex
GLOSSARY
FWHM
Abbreviation for Full Width Half Maximum.
The width of a graph measured at 50% of
the peak transmission (see Figure 73).
h
½h
FWHM
Figure 73: Full Width Half Maximum (FWHM)
Gas Menu
A data file included with the Communication Interface. It contains information about
actual and default partial pressures of the
gases, allowed partial pressure ranges, default repetition rate and HV threshold settings.
Halogen
In excimer lasers either fluorine (F) or hydrogen chloride (HCl).
Halogen Injection Injects a single flash of halogen gas into
the laser tube. Afterward the beam energy
must stabilize again. Hence, there are increased pulse-to-pulse energy fluctuations
for a while. Supports to increase the gas lifetime to a great extent (see Figure 74).
Energy
repl
Energy
HV
max
HV
min
Time
A0300COM.00
Gasrefreshment
Figure 74: EGY CONST mode with HI
Halogen Source
LAMBDA PHYSIK LASERTECHNIK - 03/00
The HaloSafe® of Lambda Physik. A safe
way to provide halogen gas. Eliminates the
need for handling toxic halogen gas outside the laser device. Halogen only is provided if needed. The halogen source is
available as an option.
GLOSSARY - 263
GLOSSARY
Handheld Keypad A keypad specially designed to make laser
operations more comfortable. It provides
control over all necessary laser functions.
HI
Abbreviation for Halogen Injection.
HV
Abbreviation for High Voltage.
HV Constant Mode
(HV CONST)
Running Mode that keeps the charging current constant. Thus, the beam energy
slowly decreases during operation until the
next New Fill (see Figure 75).
Energy
HV
High Voltage
Energy
Time
Figure 75: HV CONST Mode
GLOSSARY - 264
HVrepl
See Threshold Voltage .
Inert
Gas, that does not react with any other
substances. Normally helium.
Interlock
A safety feature that occurs in case of a laser malfunction, switching the laser into a
safe mode (normally off).
LAN
Abbreviation for Local Area Network.
A network of intelligent modules forming a
decentralized control system.
The Data Ring of COMPex is a LAN.
Laser
Abbreviation for Light Amplification by Stimulated Emission of Radiation.
According to ISO 11 145 “laser” means the
lasing unit itself (see Laser Device and
Section 2.1.3).
Laser Device
According to ISO 11 145 the “laser device”
includes the laser and its supply unit (power supply, cooling supply, etc.).
See also Laser and Section 2.1.3.
User Manual COMPex
GLOSSARY
Lasing Threshold Lowest high voltage at which the laser is
able to emit laser radiation.
Local Software
The software for the COMPex that enables
operation with the handheld keypad.
LWL
German abbreviation “LWL” (for Lichtwellenleiter). This is equivalent to FOL (Fiber
Optics Light Wave Guide).
Mirrors
Mirrors are the part of the laser optics, that
forms the resonator. The rear mirror is a
highly reflective mirror, the front mirror is
translucent, thus acting as an output coupler. In most cases it has a dielectric coating depending on the operating
wavelength of the laser.
New Fill
Evacuates the laser tube and refills it with
fresh gases according to the settings in the
Gas Menu.
NGR
Abbreviation for No Gas Replacement.
No Gas Replacement
(EGY NGR)
No Gas Replacement is a Running Mode
of COMPex, where the laser control keeps
the beam energy constant. If the threshold
voltage HVrepl is exceeded, the software reacts with a warning. If it exceeds HVmax, the
laser is switched off and gives an error
message (see Figure 76).
Energy
repl
Energy
HV
max
HV
min
Time
A0300COM.00
"New gas fill needed"
Figure 76: EGY CONST mode with NGR
LAMBDA PHYSIK LASERTECHNIK - 03/00
GLOSSARY - 265
GLOSSARY
OPMODE
Abbreviation for Operating Mode in the Remote Software. All executable commands
are called OPMODE and are executed
with this command.
Passivation
Process that makes the surface of the laser
tube chemically inert to a halogen gas. During this process halogen gas reacts with
the surface of the tube building up a layer
of a halogen-metal complex. The layer is
inert to one specific halogen but not to water, oxygen or other molecules. Thus it can
be destroyed by humidity or other impurities that enter the tube. In this case the
tube must be re-passivated.
It requires a full passivation if the kind of
halogen gas has been changed. A full passivation can only be performed by service
personnel.
Partial Gas Replacement
(EGY PGR)
Partial Gas Replacement is a running
mode of the COMPex, where the laser
control keeps the beam energy constant. If
the threshold voltage HVrepl is exceeded
and a fixed number of Halogen Injections
were not successful, a part of the gas in
the laser tube is removed and replaced
with fresh gas (for a flow diagram see
Figure 14, page 26). Afterward, the beam
energy must stabilize again. Hence, there
are increased pulse-to-pulse energy
fluctuations for a while (see Figure 77).
Energy
repl
Energy
HV
max
HV
min
Time
HV decrease too low
Figure 77: EGY mode with PGR
GLOSSARY - 266
User Manual COMPex
GLOSSARY
Partial Pressure
In a gaseous mixture, the pressure exerted
by a single component is its partial pressure. The sum of all partial pressure of the
mixture equals the pressure of the mixture.
PGR
Abbreviation for Partial Gas Replacement.
Premix
Predetermined mixture of the laser gases
or its components.
Purging
Cleaning gas lines or the laser tube with
inert gas.
Rare
One of the components of the excimer
gas. Depending on the gas mixture it can
be argon, krypton or xenon.
Remote Software The COMPex software of the Communication Interface that enables operation with an
external (Remote) computer.
The number of beam pulses per second.
Units are Hz [1/s].
Reservoir
The hydrogen reservoir of the thyratron. It
provides the necessary hydrogen for thyratron operation.
Resonator
The optical resonator is formed using two
mirrors. The mirrors are arranged on opposite sides of the laser medium (the gas),
thus providing the necessary feedback for
the laser oscillator.
RS 232 C
An industry standard for serial communications connections. Adopted by the Electrical Industries Association, this
Recommended Standard (RS) defines the
specific lines and signal characteristics
used by serial communications controllers
to standardize the transmission of serial
data between devices. The letter C denotes the current version of the standard.
A0300COM.00
Repetition Rate
LAMBDA PHYSIK LASERTECHNIK - 03/00
GLOSSARY - 267
GLOSSARY
Safety Fill
A safety feature of the COMPex. A Safety
Fill is performed if the laser tube could not
be evacuated to 30 mbar (due to e.g. a
Gas Leak or a defective vacuum pump).
Fills the laser tube with inert gas, thus bringing it to a safe condition. See also Section 10.2.18.
Static Gas Lifetime
Lifetime of the gas in the laser tube while
non-operation. Specified as the time it takes for the beam energy to decrease from
maximum value (after a new gas fill) to half
energy (50%). To test this, the laser operates at maximum repetition rate with no interruption and maximum possible high
voltage, but only for one minute a day. Neither Halogen Injections nor any other gas
actions are performed. The decline in output from one day to the next is measured.
See also Dynamic Gas Lifetime.
Threshold Voltage
In Energy Constant Mode the charging
voltage is steadily increased to keep the
beam energy constant. The Threshold
Voltage HVrepl is a limit value at which the
COMPex reacts to this increase. The
reaction may be a warning (in EGY NGR),
an HI (in EGY PGR) or a PGR (also EGY
PGR after a number of unsuccessful HIs).
GLOSSARY - 268
Thyratron
Fast, high voltage switch to discharge the
storage capacitors as a reaction to a trigger signal. A hydrogen-filled ionization
tube. For details see Section 2.4.
Trigger
A signal that causes the laser to fire a single beam pulse.
Tube Optics
Consist of resonator optics (mirrors) and
windows. The COMPex only has resonator
optics.
User Manual COMPex
GLOSSARY
Abbreviation for Ultraviolet Light. The
portion of the electromagnetic spectrum
between 100 and 400 nm. A special part of
the UV range is the VUV range (see VUV).
VUV
Abbreviation for Vacuum Ultraviolet Light.
The portion of the electromagnetic spectrum between 100 and 200 nm. At these
very short wavelengths, air becomes
opaque; hence, experiments must be performed in a vacuum (or inert gas).
Watchdog
A switch that alters its logical level when
the reset pulses stop. All watchdogs are reset at least three times a second. If the reset fails, a breakdown is assumed. The
module concerned is switched to a safe, inactive state. The Basic Module is monitored by a watchdog.
Windows
Windows are parts of the laser optics that
only reflect a minimum of light. The COMPex do not have windows.
A0300COM.00
UV
LAMBDA PHYSIK LASERTECHNIK - 03/00
GLOSSARY - 269
GLOSSARY - 270
User Manual COMPex
LIST OF FIGURES
Figure 1: Laser components according to ISO 11145 . . . . 12
Figure 2: Front view of the COMPex (from beam exit) . . . 13
Figure 3: Rear view of the COMPex
. . . . . . . . . . . . 14
Figure 4: COMPex inside . . . . . . . . . . . . . . . . . . 16
Figure 5: COMPex control with remote computer . . . . . . 17
Figure 6: COMPex control with handheld keypad . . . . . . 17
Figure 7: Handheld keypad with RS232 Connector . . . . . 18
Figure 8: Profile of the NovaTube . . . . . . . . . . . . . . 19
Figure 9: Pulse energy as a function of charging voltage . . 22
Figure 10: Pulse energy as a function of charging voltage . 23
Figure 11: Energy drop in HV Constant Mode
. . . . . . . 23
Figure 12: Charging current with Halogen Injections . . . . 24
Figure 13: Charging current with Partial Gas Replacement . 24
Figure 14: Partial Gas Replacement
in Energy Constant Mode . . . . . . . . . . . . 26
Figure 15: Charging Current with
No Gas Replacement (NGR) . . . . . . . . . . 27
Figure 16: No Gas Replacement in Energy Constant Mode . 27
Figure 17: Remote interlock and laser warning light
. . . . 29
Figure 18: Labels on the front side of the COMPex . . . . . 56
Figure 19: Labels on the rear side of the COMPex . . . . . 58
Figure 20: Labels inside the COMPex
. . . . . . . . . . . 60
Figure 21: Remote socket . . . . . . . . . . . . . . . . . . 68
Figure 22: Permitted tilting gradients . . . . . . . . . . . . 82
A0300COM.00
Figure 23: Rigid transport packaging . . . . . . . . . . . . 85
Figure 24: Shock absorbing buffers . . . . . . . . . . . . . 86
Figure 25: Location of clip removal tool . . . . . . . . . . . 87
Figure 26: Removing the clips . . . . . . . . . . . . . . . . 88
Figure 27: Fittings for water lines . . . . . . . . . . . . . . 93
Figure 28: Connecting the RS232 plug to the laser device . 95
LAMBDA PHYSIK LASERTECHNIK - 03/00
LIST OF FIGURES - 1
LIST OF FIGURES
Figure 29: Connecting the RS232 plug to the keypad
. . . 96
Figure 30: Loosen the exhaust fan outlet . . . . . . . . . 100
Figure 31: Remove the plug from the vacuum pump . . . 101
Figure 32: Insert the halogen filter
. . . . . . . . . . . . 102
Figure 33: Adjust the anti-torsion fork . . . . . . . . . . . 102
Figure 34: Power switches and lamps on the laser device
110
Figure 35: Energy monitor without mirror access panel . . 150
Figure 36: View of optics mount, energy monitor removed
151
Figure 37: Optic mount dismounted, sealing plate . . . . 151
Figure 38: Side and front view of the optics mount . . . . 152
Figure 39: Disassembled optical mount.
. . . . . . . . . 152
Figure 40: Polish the optics . . . . . . . . . . . . . . . . 154
Figure 41: Reassembling the optics mount . . . . . . . . 155
Figure 42: Horizontal and vertical optics adjustment . . . 157
Figure 43: Energy monitor calibration procedure . . . . . 160
Figure 44: View onto the beam splitter . . . . . . . . . . 161
Figure 45: Thyratron adjustment . . . . . . . . . . . . . 166
Figure 46: View of the halogen filter . . . . . . . . . . . . 170
Figure 47: Disassembling the halogen filter housing . . . 171
Figure 48: Flow diagram for energy monitor calibration . . 183
Figure 49: Flow diagram for flushing procedure . . . . . . 185
Figure 50: Fuses on the rear side of the COMPex . . . . 239
Figure 51: Beam energy too low - part 1 . . . . . . . . . 240
Figure 52: Beam energy too low - part 2 . . . . . . . . . 241
Figure 53: Beam energy too low - part 3 . . . . . . . . . 242
Figure 54: Beam energy too low - part 4 . . . . . . . . . 243
Figure 55: Low Light
. . . . . . . . . . . . . . . . . . . 244
Figure 56: Low Light - no trigger pulses . . . . . . . . . . 245
Figure 57: Low Light - missing pulses . . . . . . . . . . . 246
Figure 58: Low Light - problem with energy monitor . . . 247
Figure 59: Low Light - beam energy too low . . . . . . . 248
Figure 60: Fuses at the inner rear side of COMPex . . . . 249
LIST OF FIGURES - 2
User Manual COMPex
List of Figures
Figure 61: Fuse at the thyratron adjustment panel . . . . 249
Figure 62: Fuses at the rear outside of COMPex . . . . . 250
Figure 63: Laser gas flow diagram without Halogen Source
251
Figure 64: Laser gas flow diagram with Fluorine Source . 252
Figure 65: Laser gas flow diagram with HCl Source
Figure 66: Layout of COMPex 100 Series
. . . 253
. . . . . . . . 254
Figure 67: Layout of COMPex 200 and 300 Series . . . . 255
Figure 68: Maintenance area of COMPex 100 Series
. . 256
Figure 69: Maintenance area
of COMPex 200 and 300 Series . . . . . . . . 257
Figure 70: Laser triggering without COD . . . . . . . . . 260
Figure 71: Laser triggering with COD . . . . . . . . . . . 260
Figure 72: EGY CONST mode without HI/PGR . . . . . . 261
Figure 73: Full Width Half Maximum (FWHM) . . . . . . . 263
Figure 74: EGY CONST mode with HI . . . . . . . . . . 263
Figure 75: HV CONST Mode . . . . . . . . . . . . . . . 264
Figure 76: EGY CONST mode with NGR . . . . . . . . . 265
. . . . . . . . . . . . . 266
A0300COM.00
Figure 77: EGY mode with PGR
LAMBDA PHYSIK LASERTECHNIK - 03/00
LIST OF FIGURES - 3
LIST OF FIGURES - 4
User Manual COMPex
INDEX
A
ACCU? . . . . . . . . . . . . . . . . . . . . . . . . . . 206
Air intake . . . . . . . . . . . . . . . . . . . . . . . . . . 77
B
Beam output position
Beam splitter
Cleaning . . . . .
BUFFER= . . . . . .
BUFFER? . . . . . .
. . . . . . . . . . . . . . . . . . . . 77
. . . . . . . . . . . . . . . . . . . 163
. . . . . . . . . . . . . . . . . . . 196
. . . . . . . . . . . . . . . . . . . 206
A0300COM.00
C
Calibrate energy monitor . . . .
CAP.LEFT? . . . . . . . . . . .
CAP.SET . . . . . . . . . . . .
CDRH-Class . . . . . . . . . . .
Change gas cylinders . . . . . .
Charge on demand . . . . . . .
Delay . . . . . . . . . . . . .
Charging voltage . . . . . . . .
CI
SEE Communication interface
Clip removal tool . . . . . . . .
COD= . . . . . . . . . . . . . .
COD? . . . . . . . . . . . . . .
Communication interface . . . .
COMPex
Layout . . . . . . . . . . . .
Conversion tables . . . . . . . .
Cooling Water . . . . . . . . . .
Adjusting flow rate . . . . . .
Connectors . . . . . . . . . .
Specifications . . . . . . . .
Countdown . . . . . . . . . . .
Counter . . . . . . . . . . . . .
COUNTER= . . . . . . . . . . .
COUNTER? . . . . . . . . . . .
COUNTS= . . . . . . . . . . . .
COUNTS? . . . . . . . . . . . .
LAMBDA PHYSIK LASERTECHNIK - 03/00
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134, 161, 184, 198, 207
. . . . . . . . . . 206
. . . . . . . . . . 197
. . . . . . . . . . . 64
. . . . . . . . . . 145
. . 110, 124, 197, 228
. . . . . . . . . . 206
. . . . . . . . . . . 22
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. . . . . . . . . . . . 9
. . . . . . . . . . . 70
. . . . . . . . . . 114
. . . . . . . . . . . 70
. . . . . . . . . . . 70
. . . . . . . . 198, 207
110, 126, 197, 207, 210
. . . . . . . . . . 197
. . . . . . . . . . 207
. . . . . . . . . . 198
. . . . . . . . . . 207
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. . . . . . . 87
. . . . . . 197
. . . . . . 206
17, 22, 133, 181
INDEX- 1
INDEX
D
Data ring . . . . . . . . . . . . . . . .
Selftest . . . . . . . . . . . . . . . .
Denomination of lasers . . . . . . . . .
Dimensions . . . . . . . . . . . . . . .
Disconnecting gas supply lines . . . . .
Gas supply lines except halogen line
Halogen line . . . . . . . . . . . . .
Premix line . . . . . . . . . . . . . .
Door interlock switch . . . . . . . . . .
Dynamic gas lifetime . . . . . . . . . .
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. 17, 22
28, 112
. . . 12
. 66, 84
. . 178
. . 180
. . 178
. . 179
. 29, 91
. . 141
E
EGY Const
SEE Energy constant mode
EGY RANGE= . . . . . . . . . . . . . . . . . . . . . . . 199
EGY RANGE? . . . . . . . . . . . . . . . . . . . . . . . 207
EGY SET= . . . . . . . . . . . . . . . . . . . . . . . . 199
EGY SET? . . . . . . . . . . . . . . . . . . . . . . . . 207
EGY-CONST . . . . . . . . . . . . . . . . . . . . . . . . 22
EGY= . . . . . . . . . . . . . . . . . . . . . . . . . . . 198
EGY? . . . . . . . . . . . . . . . . . . . . . . . . . . . 207
Emergency fill . . . . . . . . . . . . . . . . . . 110, 128, 188
Energy
Low energy . . . . . . . . . . . . . . . . . . . . . . . 241
Management . . . . . . . . . . . . . . . . . . . . . . . 22
Measurement . . . . . . . . . . . . . . . . . . . . . . 22
Polling . . . . . . . . . . . . . . . . . . . . . . . . . 207
Preset energy . . . . . . . . . . . . . . 23, 198, 199, 207
Set beam output energy . . . . . . . . . . . . . . . . 110
Tolerance range . . . . . . . . . . . . . . . . . . 199, 207
Energy cal. error . . . . . . . . . . . . . . . . . . . . . . 190
Energy calibration . . . . . . . . . . . 134, 161, 184, 198, 207
Energy constant mode . . . . . . . . . 22, 23, 121, 202, 209
Adjust . . . . . . . . . . . . . . . . . . . . . . . . . 123
Set beam output energy . . . . . . . . . . . 110, 123, 198
Energy monitor . . . . . . . . . . . . . . . . . . 22, 141, 152
Calculation of average beam output energy . . . . 199, 207
Calibration . . . . . . . . . . . . . . . 134, 161, 198, 207
Calibration Flow Diagram . . . . . . . . . . . . . 162, 185
Environmental conditions . . . . . . . . . . . . . . . . . . 78
Error messages . . . . . . . . . . . . . . . . . . . . . . 214
Evacuating gas line
SEE Flush gas line
INDEX- 2
User Manual COMPex
INDEX
Exchange gas cylinders
Excimer laser . . . . .
Exhaust . . . . . . . .
External trigger . . . .
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. . . . . . . . 134, 145
. . . . . . . . . . . 11
. . . . . . . . . 77, 99
69, 119, 198, 205, 210
F1 . . . . . . . . . . . . . .
F10 . . . . . . . . . . . . .
F3 . . . . . . . . . . . . . .
F4 . . . . . . . . . . . . . .
F5 . . . . . . . . . . . . . .
F6 . . . . . . . . . . . . . .
F7 . . . . . . . . . . . . . .
F8 . . . . . . . . . . . . . .
FILTER CONTAMINATION=
FILTER CONTAMINATION?
FILTER= . . . . . . . . . . .
FILTER? . . . . . . . . . . .
Flush gas line . . . . . . . .
Flushing procedure . . . . .
Fundamentals . . . . . . . .
Fuses . . . . . . . . . . . .
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. . . . . . . 110
. . . . . . . 125
. . . . . . . 149
. . . . . . . 177
. . . . . . . 130
. . . . . 128, 129
. . . . . . . 131
. . . . . . . 118
. . . . . . . 200
. . . . . . . 208
. . . . . . . 199
. . . . . . . 207
133, 136, 137, 186
. . . . . . 151, 186
. . . . . . . . . 11
. . . . 15, 240, 251
A0300COM.00
G
Gas cabinets . . .
Gas cylinders
Exchange . . .
Replace . . . .
Gas flow diagram .
Gas leak
Leaktest a line .
Leaktest the tube
Gas lines . . . . .
Evacuate . . . .
Flush . . . . . .
Purge . . . . . .
Gas menu . . . . .
Reset gas menu
Gas mixture . . . .
Gas mode . . . . .
Gas purifier . . . .
LAMBDA PHYSIK LASERTECHNIK - 03/00
. . . . . . . . . . . . . . . . . . . . . 76
. . . . . . . . . . . . . . . . . . . . 134
. . . . . . . . . . . . . . . . . . . . 145
. . . . . . . . . . . . . . . . . . 253, 255
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. . . . . . . . . . . . . 237
. . . . . . . . . . . . . 238
. . . . . . . . . 76, 105, 134
. . . . . . . . . . . 133, 136
. . . . . . . . . . . 133, 136
. . . . . . . . 133, 139, 194
110, 115, 196, 200, 202, 208
. . . . . . . . . . . . . 117
. . . . . . . . . . . . . . 71
. . . . . . . . 118, 200, 208
. . . . . . . . . . . . . . 20
INDEX- 3
INDEX
Gases
Gases required . .
Mixtures . . . . .
Optimum mixtures
Premix . . . . . .
Safety . . . . . .
GASMODE= . . . . .
GASMODE? . . . . .
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72
71
74
72
46
200
208
H
Halogen filter . . . . . . . . . 24, 71, 79, 133, 143, 200, 208
Check filter capacity . . . . . . . . . . . . . . . . . . 171
Reset filter capacity . . . . . . . . . . . . . . . . . . 175
Storage . . . . . . . . . . . . . . . . . . . . . . . . . 171
Halogen injection . . . . . . . . . . . . . . . . . . . . . . 24
Algorithms . . . . . . . . . . . . . . . . . . . . . . . . 25
Halogen source . . . . . . . . . . . . . . . . . . 12, 143, 208
HALOGEN= . . . . . . . . . . . . . . . . . . . . . . . . 200
HALOGEN? . . . . . . . . . . . . . . . . . . . . . . . . 208
Handheld keypad . . . . . . . . . . . . . . . 17, 18, 22, 133
Installation . . . . . . . . . . . . . . . . . . . . . . . . 95
HI
Halogen injection . . . . . . . . . . . . . . . . . . . . . 24
High voltage
Discharge . . . . . . . . . . . . . . . . . . . . . . . . 20
Maximum . . . . . . . . . . . . . . . . . . . . . . . . . 27
Replacement value . . . . . . . . . . . . . . . 24, 27, 121
High voltage constant mode . . . . . . . 22, 23, 122, 202, 209
Adjust . . . . . . . . . . . . . . . . . . . . . . . . . 123
Polling . . . . . . . . . . . . . . . . . . . . . . . . . 208
Set HV constant . . . . . . . . . . . . . . . 110, 123, 201
Housing interlock switch . . . . . . . . . . . . . . . . . . . 29
HV Const
SEE High voltage constant mode
HV= . . . . . . . . . . . . . . . . . . . . . . . . . . . . 201
HV? . . . . . . . . . . . . . . . . . . . . . . . . . . . . 208
HVmax
SEE High voltage, maximum
HVREPL
High Voltage, Replacement Value . . . . . . . . . . . . 24
INDEX- 4
User Manual COMPex
INDEX
I
INERT= . . . . . . . . . .
INERT? . . . . . . . . . .
Installation
Electrical lines . . . . .
Exhaust lines . . . . . .
Gas lines . . . . . . . .
Handheld keypad . . .
Remote PC . . . . . . .
Vacuum pump . . . . .
Water lines . . . . . . .
Intended audience . . . .
Interface . . . . . . . . . .
Specifications . . . . .
Interlock . . . . . . . . . .
Door interlock switch . .
Housing interlock switch
Overload . . . . . . . .
Remote . . . . . . . . .
Remote interlock . . . .
Temp.res. . . . . . . .
Ventilation . . . . . . .
INTERLOCK? . . . . . . .
Internal trigger . . . . . . .
ISO 11145 . . . . . . . . .
. . . . . . . . . . . . . . . . 201
. . . . . . . . . . . . . . . . 208
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. . . . 94, 98
. . . . . . 99
. . . . . 104
. . . . . . 95
. . . . . . 97
. . . . . . 94
. . . . 92, 93
. . . . . . . 2
. . . . . . 17
. . . . 68, 97
. . . 29, 230
. . . . 29, 91
. . . . . . 29
. . . . . 231
. . . 91, 232
. . . . 30, 68
. . . . . 233
. . . . . 234
. . . . . 208
119, 205, 210
. . . . . . 12
A0300COM.00
L
Labels . . . . . . . . . .
Laser
CDRH-Class . . . . .
Classification . . . . .
Denomination of lasers
Dimensions . . . . . .
Nomenclature of parts
Specifications . . . .
Start . . . . . . . . .
Stop . . . . . . . . .
Storage . . . . . . . .
Transport . . . . . . .
Warning Light . . . .
Laser device . . . . . . .
Switch off . . . . . . .
Switch on . . . . . . .
Laser logbook . . . . . .
LAMBDA PHYSIK LASERTECHNIK - 03/00
. . . . . . . . . . . . . . . . . . 55
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. . . . . . 64
. . . . . . 64
. . . . . . 12
. . . . . . 66
. . . . . . 13
. . . . . . 64
109, 113, 192
. . . 109, 189
. . . . . . 78
. . . . . . 78
. . . . 29, 91
. . . . . . 12
. . . . . 114
. . . . . 111
. . . 134, 141
INDEX- 5
INDEX
Laser tube
Diagram . . . .
Pressure . . . .
Purge . . . . . .
Temperature . .
Laser warning light
LEAKRATE? . . .
Local software . . .
Low light . . . . . .
LWL datalink
Data ring . . . .
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. . . . . . 19
. . . 115, 209
134, 147, 194
. . . . . 209
. . . . . . 29
. . . . . 208
. . . 17, 133
. . . . . 246
. . . . . . . . . . . . . . . . . . . . 190
M
Maintenance area . . . .
Maintenance schedule .
Manual fill of inert gas . .
Manual halogen injection
Measurement units . . .
MENU= . . . . . . . . .
MENU? . . . . . . . . .
MODE= . . . . . . . . .
MODE? . . . . . . . . .
Monitoring modules . . .
Multigas version . . . . .
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. . . . . 258
. . . . . 135
110, 128, 188
110, 131, 188
. . . . . . . 9
. . . . . 202
. . . . . 208
. . . . . 202
. . . . . 209
. . . . . . 28
. . . . 19, 72
N
New gas fill . . . . . . . . .
NGR
SEE No gas replacement
No gas replacement . . . . .
Flow Diagram . . . . . .
NovaTube® . . . . . . . . .
. . . . . . . 133, 141, 189, 208
. . . . . . . . . . . . . 27, 121
. . . . . . . . . . . . . . . . 27
. . . . . . . . . . . . . . . . 11
O
OFF
Errors . . . . . . . .
States . . . . . . .
ON
Message priority . .
States . . . . . . .
Warnings . . . . . .
Operating temperature
OPMODE . . . . . . .
INDEX- 6
. . . . . . . . . . . . . . . . . . 189
. . . . . . . . . . . . . . . . . . 189
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212
192
192
. 20
183
User Manual COMPex
INDEX
OPMODE=CAPACITY RESET .
OPMODE=CONT . . . . . . . .
OPMODE=ENERGY CAL . . . .
OPMODE=FLUSH xy LINE . . .
OPMODE=FLUSHING . . . . .
OPMODE=HI . . . . . . . . . .
OPMODE=LL OFF . . . . . . .
OPMODE=MANUAL FILL INERT
OPMODE=NEW FILL . . . . . .
OPMODE=OFF . . . . . . . . .
OPMODE=ON . . . . . . . . . .
OPMODE=PASSIVATION FILL .
OPMODE=PGR . . . . . . . . .
OPMODE=PURGE RESERVOIR
OPMODE=PURGE xy LINE . . .
OPMODE=SKIP . . . . . . . . .
OPMODE=TRANSPORT FILL .
OPMODE? . . . . . . . . . . .
OPTex
Designated use . . . . . . .
Optics . . . . . . . . . . . . . .
Adjust . . . . . . . . . . . .
Clean . . . . . . . . . . . . .
Exchange . . . . . . . . . .
Identify coating . . . . . . .
Reassemble . . . . . . . . .
Unmount . . . . . . . . . . .
Optional accessories . . . . . .
Ozone . . . . . . . . . . . . . .
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184
184
184
186
186
188
188
188
189
189
192
193
193
194
194
195
195
209
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. . . . . . . . . 31
134, 141, 150, 186
. . . . . . . . 159
. . . . . . . . 154
. . . . . . . . 154
. . . . . . . . 155
. . . . . . . . 157
. . . . . . . . 152
. . . . . . . . . 12
. . . . . . . 41, 77
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.
A0300COM.00
P
Packaging
Dimensions and Weight .
Removing inner cover . .
Removing rigid packaging
Parameter settings . . . . .
Partial gas replacement . . .
Algorithms . . . . . . . .
Flow Diagram . . . . . .
Partial pressures . . . . . .
Passivate laser tube . . . . .
Passivation . . . . . . . . .
Patents . . . . . . . . . . .
Power stabilization achieved
LAMBDA PHYSIK LASERTECHNIK - 03/00
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. . . . . 84
. . . . . 90
. . . . . 87
. . 115, 196
24, 121, 193
. . . . . 25
. . . . . 26
. . . . . 24
. . 133, 148
. . 19, 193
. . . . . . 6
. . 199, 209
INDEX- 7
INDEX
Power supply . . . . . .
Preionization . . . . . .
Premix . . . . . . . . . .
Preset energy . . . . . .
Pressure regulators . . .
PRESSURE? . . . . . .
PULSE DIFF? . . . . . .
Purge gas line . . . . . .
Purge laser tube . . . . .
Purge reservoir
SEE Purge laser tube
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. . . . . . . . . . 67
. . . . . . . . . . 20
71, 72, 118, 200, 208
. . . . . . . 23, 207
. . . . . . . . . . 76
. . . . . . . . . 209
. . . . . . . . . 209
. . . . 133, 139, 194
. . . . . . . 147, 194
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. . . . . . . . . . 203
. . . . . . . . . . 209
. . . 19, 141, 148, 193
. . . . 30, 68, 91, 232
. . . . . . 17, 97, 181
. . . . . . . . . . 182
. . . . . . . . . . 182
110, 115, 120, 203, 210
. . . . . . . . . . 203
. . . . . . . . . . 210
R
RARE= . . . . . . .
RARE? . . . . . . .
Re-passivation . . .
Remote interlock . .
Remote software . .
Basics . . . . . .
Syntax . . . . . .
Repetition rate . . . .
REPRATE= . . . . .
REPRATE? . . . . .
Requirements
Gas lines . . . . .
Water supply . . .
Reservoir
Heating voltage .
RESERVOIR TEMP?
Rigid packaging
Removal . . . . .
ROOMTEMP= . . . .
ROOMTEMP? . . . .
RS232 interface . . .
Specification . . .
Running mode . . . .
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. . . . . . . . . . . . . . . . . . . 105
. . . . . . . . . . . . . . . . . . . . 92
. . . . . . . . . . . . . . . . . . . . 21
. . . . . . . . . . . . . . . . . . . 209
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. . . . . . . . . . . 87
. . . . . . . . . . 204
. . . . . . . . . . 210
. . . . . . . . . . . 17
. . . . . . . . . 68, 97
109, 115, 121, 202, 209
Safety
General safety aspects
Physical hazards . . .
Special safety aspects
Safety fill . . . . . . . . .
Safety systems . . . . .
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S
INDEX- 8
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. 31
. 38
. 37
195
. 28
User Manual COMPex
INDEX
Self-firing . . . . . . .
Selftest . . . . . . . .
SI standard . . . . . .
Signal words . . . . . .
Single gas . . . . . . .
Specifications . . . . .
Start laser . . . . . . .
Static gas lifetime . . .
Stop laser . . . . . . .
Storage . . . . . . . .
Switch off laser device
Switch on laser device
Symbols . . . . . . . .
Syncronized output . .
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. . . . . 235
. . . 28, 112
. . . . . . . 9
. . . . . . . 3
118, 200, 208
. . . . . . 64
109, 113, 192
. . . . . 141
. . . 109, 189
. . . . . . 78
. . . . . 114
. . . . . 111
. . . . . . . 4
. . . . . . 69
A0300COM.00
T
TEMP CONTROL= . . . . . . . . . . . . . . . . . . . . 204
TEMP CONTROL? . . . . . . . . . . . . . . . . . . . . 210
TEMP? . . . . . . . . . . . . . . . . . . . . . . . . . . 210
Temperature control . . . . . . . . . . 110, 114, 204, 209, 210
Temperatures (conversion from °C to °F) . . . . . . . . . . . 9
Thyratron . . . . . . . . . . . . . . . . . . . . . . . . . 134
Adjust . . . . . . . . . . . . . . . . . . . . . . . . . 169
Checking . . . . . . . . . . . . . . . . . . . . . . 134, 167
Heating voltage . . . . . . . . . . . . . . . . . . . . . 21
Principles . . . . . . . . . . . . . . . . . . . . . . . . . 21
TIMEOUT= . . . . . . . . . . . . . . . . . . . . . . . . 204
TIMEOUT? . . . . . . . . . . . . . . . . . . . . . . . . 210
Total counter . . . . . . . . . . . . . . . . . . . . . 126, 210
TOTAL COUNTER? . . . . . . . . . . . . . . . . . . . . 210
Trademarks . . . . . . . . . . . . . . . . . . . . . . . . . . 8
Transport . . . . . . . . . . . . . . . . . . . . . . . . . . 78
Conditions . . . . . . . . . . . . . . . . . . . . . . . . 83
Floor loads . . . . . . . . . . . . . . . . . . . . . . . . 83
Lifting with packaging . . . . . . . . . . . . . . . . . . 86
Lifting without packaging . . . . . . . . . . . . . . . . . 89
Transport locks . . . . . . . . . . . . . . . . . . . . . . . 91
Transport packaging . . . . . . . . . . . . . . . . . . . . 85
Transportation fill . . . . . . . . . . . . . . . . . . . 133, 195
Trigger . . . . . . . . . . . . . . . . . . . . . . . . . . . 119
External . . . . . . . . . . . . . . . . . . . 119, 205, 210
Internal . . . . . . . . . . . . . . . . . . . . 119, 205, 210
Trigger signal . . . . . . . . . . . . . . . . . . . . . . . . 69
Trigger signal port . . . . . . . . . . . . . . . . . . . . . . 69
LAMBDA PHYSIK LASERTECHNIK - 03/00
INDEX- 9
INDEX
TRIGGER= . . . .
TRIGGER? . . . .
Troubleshooting . .
TYPE OF LASER?
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205
210
213
211
U
Ultraviolet Radiation
Safety . . . . . . . . . . . . . . . . . . . . . . . . 38, 42
User counter . . . . . . . . . . . . . . . 110, 126, 197, 207
V
Vacuum pump . . . . . . . . . . . . . . . . 79, 100, 143, 144
Installation . . . . . . . . . . . . . . . . . . . . . . . . 94
W
Warm-up period . . .
Warnings . . . . . .
Watchdogs . . . . .
Water
Adjusting flow rate
Specifications . .
Water lines . . . .
Wavelength . . . . .
Weight . . . . . . . .
Windows cleaning . .
Wiring diagram . . .
INDEX- 10
. . . . . . . . . . . . . . . . . 24, 112
. . . . . . . . . . . . . . . . . . . 214
. . . . . . . . . . . . . . . . . . . . 28
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. . 114
. . . 70
. 92, 93
71, 202
. . . 84
134, 150
. . 260
User Manual COMPex