Available online at www.sciencedirect.com ScienceDirect Available online at www.sciencedirect.com Procedia Engineering 00 (2017) 000–000 ScienceDirect www.elsevier.com/locate/procedia Procedia Engineering 216 (2017) 144–151 9th International International Conference Conference on on Materials Materials for for Advanced Advanced Technologies Technologies(ICMAT (ICMAT2017) 2017) 9th 100 Gbps (4 × 25 Gbps) Optical Receiver Module Packaged in Chip-on-Board Based on Germanium Photodetector Do-Won Kim*, Andy Eu Jin Lim, M. Kumarasamy Raja, Jason Liow Tsung Yang, Vishal Vinayak Kulkarni, Surya Bhattacharya, and Guo Qiang Lo Institute of Microelectronics (IME), A*STAR (Agency of Science, Technology, and Research), 2 Fusionopolis Way #08-02, Innovis Tower, Singapore 138634 Abstract 100 Gbps (4 × 25 Gbps) optical receiver (Rx) module is demonstrated using Germanium (Ge) photodetector (PD) which is fabricated through Silicon-photonics process using 750 ohm-cm of high-resistivity silicon oxide insulator (SOI) wafer. Transimpedance amplifier (TIA) and Ge PD are packaged with chip-on-board (COB) manner on a printed circuit board (PCB). High speed PCB for the assembly of both electronic and photonic devices in COB package is precisely designed from the material selection to the device footprint layout and transmission line design. The layout on PCB is optimized using high frequency simulation tool of HFSS to minimize RF loss happening in the transmission line and electrical interconnection points of bond wires. Electrical-optical (EO) S-parameter measurement for the Ge PD shows 22 GHz of transmittance (S21) 3dB bandwidth. Photocurrents of the photodetector induced by the optical input power are analyzed for signal integrity both TIA ON and OFF states. Photocurrent changes by the misalignment of the lensed optical fiber coupled to the edge coupler of the Ge PD shows that 3dB misalignment tolerances are 5.5 µm in the longitudinal and around +/-1 µm in the lateral directions. This COB packaging technique of optical Rx module can be applied for the integration and assembly of the optical module of higher data rate of 100 Gbps and beyond. © 2017 The Authors. Published by Elsevier Ltd. © 2017 The Authors. Published by Elsevier Ltd. Selection ICMAT. Selection and/or and/or peer-review peer-review under under responsibility responsibility of of the the scientific scientific committee committee of of Symposium Symposium 2017 2017 ICMAT. Keywords: Receiver module, COB packaging, GE PD, silicon photonics. 1. Introduction The explosive data use in both mobile and wired access is driving the emerging of optical data centers especially by huge internet companies such as Google, Amazon, and Facebook, which are planning to invest for the upgrade of data centers up to 2018 [1]. Ericsson estimated mobile and fixed data traffic will be 170.5 exabyte/month in 2020, which is tremendous increase from 53.3 exabyte/month in 2014 [2]. This data usage has motivated high-speed optical transceivers over 40 Gbps, and 100 Gbps to become dominant players for optical interconnections platforms 1877-7058 © 2017 The Authors. Published by Elsevier Ltd. Selection and/or peer-review under responsibility of the scientific committee of Symposium 2017 ICMAT. 1877-7058 © 2017 The Authors. Published by Elsevier Ltd. Selection and/or peer-review under responsibility of the scientific committee of Symposium 2017 ICMAT. 10.1016/j.proeng.2017.10.019 2 Do-Won Kim et al. / Procedia Engineering 216 (2017) 144–151 Do-Won Kim, et al. / Procedia Engineering 00 (2017) 000–000 145 including silicon photonics integrated circuit (Si-PIC) based ones. Higher data rate of 400 Gbps and beyond is expected to be commercially realized in near future. Optical transceiver based on vertical cavity surface emitting laser (VCSEL) has been mainly applied for the optical interconnections of both inter and intra data centers with lower cost especially for short reach links. However, VCSEL based optical transceiver has critical drawbacks such as dispersion of the laser signal in the multimode fiber (MMF) for longer distance over 10 km, which is common for connections of inter/intra data centers, and relatively higher cost of parallel link compared with coarse wavelength division multiplexing (CWDM) link for longer reach [3]. As Intel announced commercialization of the Si-PIC based 100 Gbps Quadrature small form factor (QSFP) optical transceivers in Aug. 2016, Si-PIC based CWDM optical transceiver with single mode fiber (SMF) is a strong competitor to the VCSEL based one. QSFP is an industry jointed standard of small form factor (SFF) committee specifications of SFF 8635 and SFF 8665 evolving from 4 × 10 Gbps to 4 × 28 Gbps to meet the demands on data-density [4-5]. IEEE 802.3ba specifies the PHY layer of 40/100 Gigabit Ethernet standard in which 100 Gbps QSFP can be applied [6]. Recently IMEC in Belgium demonstrated silicon PIC based 4 × 20 Gbps optical interconnection [7]. QSFP can be packaged and assemble in COB manner for the data rate up to 100Gbps. For the higher data rates up to 400 Gbps, 800 Gbps, 1 Tbps, and 1.6 Tbps, new packaging technology should be developed. 2.5D/3D multi-chip module (MCM) using interposer or through silicon via (TSV) has been intensively studied and reporting noticible RF performance [8-9]. In this study, we demonstrate chip-on-board (COB) packaged 4 channel × 25 Gbps (100 Gbps) optical receiver (Rx) module using Ge photodetector (PD). The Ge PDs are fabricated at a commercial foundry with IME’s silicon photonics technology platform. Typical bandwidth performance of Ge PD is over 20 GHz with ~10 nA of dark current and larger than 1 A/W of responsivity for C-band operation [10]. COB packaging technique, even though its data rate limitation caused by PCB board and bond wires, is still mainly applied for the packaging of high-speed optical transceiver because of its specific features such as high reliability, low cost, well compatibility for mass manufacturing, and good rework ability in laboratory level test [11]. When it is designed to have well optimized compact footprints on board layout, smaller form factored optical modules is capable to be implemented. 2. 4 channel (4ch) Ge on Si photodetector Fig. 1 (a) shows the die-attached and wire bond packaged vertical Ge pin PD array fabricated using IME’s silicon photonics technology [10]. Each Ge PD has a 2.5 µm × 2.5 µm size of edge coupler of inversed Si nano-taper for optical coupling of the external lensed optical fiber [See Fig. 1 (b)]. Lensed optical fiber which has 2.5 µm of spot size is coupled to the edge coupler to supply optical modulated signal to Ge PD as shown in Fig. 1 (c). (a) (b) (c) Fig. 1. (a) Packaged 4ch Ge PD, (b) 2.5 µm × 2.5 µm of edge coupler array in Ge PD, and (c) coupled lensed optical fiber of 2.5 µm of spot size to the edge coupler of the Ge PD. Do-Won Kim et al. / Procedia Engineering 216 (2017) 144–151 Do-Won Kim, et al. / Procedia Engineering 00 (2017) 000–000 146 3 Fig. 2 (a) shows the measured frequency response of the Ge PD. This is measured using optical-electrical (OE) measurement method of the network analyzer. The 3dB bandwidth is at around 22 GHz for both 1 V and 2 V of biasing voltages. Fig. 2 (b) shows the measured photocurrent of the Ge PD itself. The dark current is around 10 nA for -1 V of reverse biasing. (a) (b) Fig. 2. (a) Measured frequency response, and (b) photocurrent of the Ge PD. The performance of the packaged Ge PD on PCB is evaluated. Fig. 3 (a) shows the measured I-V curves of the Ge PD packaged with TIA on PCB. It is measured with biasing power to the TIA both switched ON and OFF states. The dark current range of the Ge PD shows almost similar around 2~30 nA for the both biasing power ON and OFF states. The dark current region is shifted from -0.6~1.24 V at TIA OFF state to 2.24~4.37 V at TIA ON state due to the bias provided by the self-biased from TIA, at its input to Ge PD. As shown in Fig. 3 (b) photocurrent changes by input optical power changes. The 1550 nm laser from the tunable laser source is supplied to the Ge PD through the edge coupler coupled with lensed optical fiber which has 2.5 µm of spot size. As optical power increases from 1.1dBm to 4.2dBm, PD photocurrent increases almost linearly within measured optical power range. The measured eye diagram at 10 Gbps has increased vertical jitter when photocurrent goes over around 3 mA, which is shown in Fig. 3 (b). This is due to the photo current saturation of TIA. The input overload current of the TIA is 4 mA. (a) (b) Fig. 3. (a) Measured I-V curve of the Ge PD in a packaged state with TIA on PCB with TIA biasing on and off respectively, and (b) Measured photocurrent by increasing input optical power. Eye diagrams at 10 Gbps are shown for several selected photocurrent values. Fig. 4 shows the photocurrent behavior by misalignment of the coupled lensed optical fiber to the edge coupler of the Ge PD. Some photocurrent drops come from the fiber oscillation during movement. The optical input power to Do-Won Kim et al. / Procedia Engineering 216 (2017) 144–151 Do-Won Kim, et al. / Procedia Engineering 00 (2017) 000–000 4 147 Ge PD is 9.58dBm. Measured photocurrent curve in Fig. 4 (a) is for the longitudinal misalignment, -x direction, and Fig. 4 (b) is for the lateral misalignment, +/-y and +/-z directions. 3dB misalignments to the longitudinal and lateral directions are 5.5 µm, and around +/-1 µm respectively. In photonics packaging, precise control of the alignment state under submicron is required. Thus, when we assume the volume of the epoxy resin is 3 × 3 × 3 mm3, low volumetric shrinkage less than 0.4% UV curable epoxy should be used for the fixture of the lensed fiber to the silicon photonics ICs to make less misalignment than 1 µm. (a) (b) Fig. 4. (a) Measured photocurrent of the Ge PD by misalignment to the longitudinal direction, -x, and (b) to the lateral directions of +/-y, and +/-z. 3. Chip-on-board packaging and measurement results 3.1. RF loss management In COB packaging for high-speed optical transceiver requires highly precise control of the RF and optical losses. RF loss and optical loss should be controlled to be as minimum as possible for the high signal integrity. Optical loss can be minimized by the optimized design of the coupler and accurate coupling of the optical fiber to the coupler. Fiber coupling can be accomplished through both active and passive alignment methods [12-13]. In edge coupling of the fiber to the PIC, active alignment is preferred since the edge coupler size relatively smaller than grating coupler. The main RF loss comes from transmission lines on printed circuit board (PCB) and bond wire between ICs or IC and PCB. Dielectric loss, conductor loss, impedance mismatch, crosstalk, radiation loss, and conductor roughness on PCB are RF loss sources to be controlled. These loss sources degrade signal integrity by reducing the amplitude of the signal or making longer the rise/fall times with thicker jitter [14-15]. Dielectric loss is the signal energy attenuation by the substrate dielectrics. It comes from the dissipation factor or loss tangent (δ) which is a function of the dielectric material’s molecular structure [16]. Conductor loss is a loss coming from the metal transmission lines such as surface roughness, DC and AC resistance, and skin effects [14-15]. Radiation loss and crosstalk loss are minor when the transmission lines are optimally designed. Crosstalk loss is negligible by designing with 4W “rule of thumb”, that is the distance between adjacent transmission lines should be larger than 4 times of the transmission line width [17]. In COB packaging of this study, we applied wire bonding technique to electrically interconnect between ICs and lines on PCB with Au bond wire of 1 mil of diameter. The RF signal transmission loss for bond wire is analysed since the signal integrity is degraded even by short length of hundreds µm of bond wire in high-speed operation of tens GHz. The effect of the number and length of bond wires is analysed using RF simulation tool of HFSS. Since the bond wire connects between ICs or IC and PCB in free space, the dielectric loss can be ignored (loss tangent is almost 0 for air). Thus the major RF loss source in wire bond is conductor loss, which is divided into DC loss and AC loss. The DC loss, which degrades signal amplitude, is a loss from the DC resistance of conductor which depends proportionally on the length and inversely proportionally on the cross-sectional area. Therefore shorter and Do-Won Kim et al. / Procedia Engineering 216 (2017) 144–151 Do-Won Kim, et al. / Procedia Engineering 00 (2017) 000–000 148 5 multiple bond wire can have better signal integrity. In AC loss, which degrades amplitude as well as rise time and fall time of the signal, signal tends to flow on the surface of the conductor with a certain depth that is called skin depth decided by the conductor material. In a same way as for DC loss, thus shorter and multiple bond wires can reduce the AC loss [15]. The HFSS simulation results are shown in Fig. 5 (a) and (b). The slope of the loss of 900 µm of bond wire length is 3 times larger than 300 µm of bond wire length. Multiple bond wires also reduce the RF loss. In this Rx packaging, bond wire length is less than 300 µm with multiple bond wires to reduce the RF loss. (a) (b) Fig. 5. (a) Simulated transmittance (S21) results of bond wire length, and (b) number of bond wires. 3.2. PCB design To minimize the RF loss in transmission lines for the design of high-speed PCB, accurate control is required in every design step from the material selection to the fabrication and assembly of PCB transmission lines and footprints. Specialized dielectric core materials can be used for the high-speed PCB for optical transceiver applications. Some of them which are generally used in manufacturing and R & D are summarized in Table 1. with their major characteristics for high-speed PCB design application. For this study, Rogers RT5880 of 250 µm of dielectric thickness and ½ oz. of copper layer thickness in both sides is used. Rogers RT5880 is used for only top dielectric for the fabrication of 6-layered PCB. FR4 is used for other lower dielectric layers. This PCB layer structure does not degrade signal integrity bur cost down around 6 times compared with whole 6-layered RT5880 structure. The dielectric constant of the RT5880 is 2.2 @ 8~40 GHz, and its dissipation factor is 0.0009 @ 10 GHz, 23 ºC. Table 1. Characteristic of the high-speed PCB dielectric materials. Dielectric Material Dielectric Constant, �r Dissipation Factor, tan� Data Rate (Gbps) FR4 4.34 @ 1 GHz 0.017 ~10 Rogers RO3003 3.0 @ 8~40 GHz º ~50a º 0.0013 @ 10 GHz 23 C Rogers RT5880 2.20 @ 8~40 GHz 0.0009 @ 10 GHz 23 C ~50a Panasonic Megtron 6 3.38~4.07 @ 1~50 GHz 0.004 @ 12 GHz ~50a a The transmission line length is recommended shorter less than 3 cm for over 50 Gbps operation. The microstrip high-speed data transmission lines of the PCB are designed to be impedance matched using RF tool of HFSS. Fig. 6 (a), and (b) show the simulated transmittance (S21) results of the single-ended transmission line and differential line respectively. For the single-ended line, the width of the transmission line is 0.75 mm. For the differential line, the width is 0.55 mm, and gab distance between the lines is 0.35 mm. Do-Won Kim et al. / Procedia Engineering 216 (2017) 144–151 Do-Won Kim, et al. / Procedia Engineering 00 (2017) 000–000 6 (a) 149 (b) Fig.6. Simulated transmittance (S21) result of the microstrip transmission lines; (a) single-ended, and (b) differential lines. 3.3. COB packaging of the electronic and photonic ICs As shown in Fig. 7 (a), all the electronic and photonic ICs are packaged on the PCB. Four TIAs are die attached using conductive thermally curable epoxy adhesive for GND connection to PCB common GND, and 4ch Ge PD is die attached using nonconductive thermally curable polymeric adhesive. The Ge PD and TIA are electrically connected by the single-ended transmission line on PCB and bond wires which connect pads of the TIA and PD. TIA output pads are electrically connected through the bond wires to the differential transmission lines on PCB. SMA connectors are used for the signal output ports linked to the sampling oscilloscope. Fig. 7 (b) shows the package details of the four TIAs and Ge PD on PCB. The length of the bond wire is controlled to be as short as possible around 300 µm with multiple bonding to reduce the parasitic effect to signal. High-speed photocurrent signal of each channel is transmitted to the signal input of ach TIA through single-ended transmission line. Current to voltage conversion as well as single-ended to differential conversion are carried out by the TIA and the amplified high-speed voltage signal from the TIA is sent to the sampling oscilloscope connected to the SMA connector through differential transmission lines on PCB. (a) (b) Fig. 7. (a) COB packaged 4ch Rx module using 4ch Ge PD and commercial TIAs, and (b) wire bonded TIAs and Ge PD. 3.4. Measured Eyediagrams Fig. 8 shows the measurement set-up for 4 × 25 Gbps Rx module. Continuous wave (CW) with 1550 nm of wavelength is provided from the tunable laser source. For the generation of the modulated optical signal at 25 Gbps, commercial optical Tx module packaged with photonic modulator and driver IC is used. The modulated optical signal at 25 Gbps is supplied to the each channel of the packaged 4ch Ge PD through the coupling of the lensed optical fiber of which 2.5 um of spot size. Active alignment method is used to accurately couple the lensed optical fiber to the edge coupler of the Ge PD. The peak alignment point of the lensed fiber is searched by monitoring the photocurrent. Do-Won Kim, et al. / Procedia Engineering 00 (2017) 000–000 Do-Won Kim et al. / Procedia Engineering 216 (2017) 144–151 150 7 Fig. 8. Measurement set-up. Fig. 9 shows the successfully measured 100 Gbps (4 × 25 Gbps) eye diagrams of the 4ch Rx module at the data rate of 25 Gbps of each channel. The pseudo random bit sequence (PRBS) signal with a 10 -7-1 of duty cycle and ½ of mark ratio is supplied. The rise time and fall time of the signal is around 33 ps. And the signal amplitude is 204.8 mV which is a little smaller than the 225 mA of TIA typical output in the data sheet. Some portion of the thick jitter comes from the long RF cable connected from SMA connector to Sampling Oscilloscope. Fig. 9. Measured eye diagrams of the COB packaged 4ch Rx module at 25 Gbps. 4. Conclusions 100 Gbps of 4 × 25 Gbps Rx module is successfully demonstrated. 4ch Ge PD and 4 TIAs are packaged on PCB with chip-on-board manner and interconnected by wire bonds and transmission lines on PCB. This can be applied for 100 Gbps of QSFP based on silicon photonics ICs. 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