Registered Address: Exyte Technology Shanghai Co., Ltd., No. 139 Beimin Road, Chedun, Songjiang, Shanghai, China Contact Tel: +86 21 3783 8360 Fax: +86 21 3783 7681 Managing Director: Thomas Bernhardt CUSTOMER SERVICE REPORT CSR NO. M-004 DATE: DECEMBER 14,2022 Customer Name: Micron Semiconductor Asia Pte Ltd Address: 1 North Coast Drive, Singapore 757432 NATURE OF PROBLEM Detail Problem Reported: • CMAU Discharge Damper edges leakage found during operation SERVICE RECOMMENDATION & WORK DESCRIPTION Service Recommendation: • Adjusted and added the new gasket Work Description: • Re-adjustment the edges and adding new gasket to reduce air leakage Equipment No: Classified MAUs at Micron F10A (Phase 1 & Phase 2) that was supplied by Exyte Technology. CMAU 05 & 06 Mock-up units Brand (New Replaced): Geiger Type/ Model: JK-G-08L Reported by: Kelvin Leong Date: December 14, 2022 Location of Installation: Micron Fab10A-1 Level 1 Time: 0900HRS to 1700HRS SERVICE DETAILS Geiger-Discharge Damper Fixture (BEFORE): Geiger-Discharge Damper New Gasket Fixture (AFTER): Remarks: Status after Service: We will inspect and carry out the rectification work, if needed (Please circle) The same approach will be used for all remaining CMAUs Complete/ Incomplete/ Pending for spares/ Under Observation/ Working solution provided Defects found on inspection: Not found. Company Prepared by Approved by Acknowledged by Accepted by Exyte Technology Exyte Technology Exyte Singapore Micron Zack Thiem Jia Lin Tao / Sze Yuen Chan Charles.mao Signature Print Name Kelvin Leong Charles Mao Date 15 Dec 2022 16 Dec 2022 Discharge Damper Rectification Works Plan Schedule Discharge Damper Rectification Works Description / Unit No. Start End CMAU #5&6 14-Dec-22 9:00 AM 14-Dec-22 5:00 PM Remarks CMAU #1&2 CMAU #3&4 CMAU #7&8 CMAU #9&10 CMAU #11&14 CMAU #15&16 CMAU #17&18 CMAU #19&20 CMAU #21&22 TBA the Dates for Remaining CMAU