Security C - TSMC Secret e\ Library Names: tphn28hpmgv18 tphn28hpgv18 tphn28hplgv18 tphn28lpgv18 tphn28hpcpgv18 tphn28hpmgv2od3 tphn28hplgv2od3 tphn28lpgv2od3 tphn28hpcgv2od3 Version 1.4 Nov. 6, 2015 TSMC N28 General I/O Library Application Note 1 TSMC Confidential Information 977746 Muse\ Semiconductor\ LLC 03/28/2019 n io at m or LC nf lI \L tia or en 746 uct fid 77 nd 9 on 9 co 01 i 2 C m 28/ C Se 03/ M TS us M TSMC N28 GENERAL I/O LIBRARY APPLICATION NOTE Security C - TSMC Secret Copyright 2015, Taiwan Semiconductor Manufacturing Company, Ltd. All Rights Reserved. No part of this publication may be reproduced in whole or in part by any means without prior written consent. e\ Taiwan Semiconductor Manufacturing Company Ltd. reserves the right to make changes in the contents of this document without notice. No responsibility is assumed by Taiwan Semiconductor Manufacturing Company Ltd. for any infringements of patents or other rights of the third parties that may result from its use. Taiwan Semiconductor Manufacturing Company Ltd. assumes no responsibility for any error that appears in this document. TSMC N28 General I/O Library Application Note i TSMC Confidential Information 977746 Muse\ Semiconductor\ LLC 03/28/2019 n io at m or LC nf lI \L tia or en 746 uct fid 77 nd 9 on 9 co 01 i 2 C m 28/ C Se 03/ M TS us M NOTICE Security C - TSMC Secret Revision History Version Date Special Notes and Changes Correct the typo on page.5 from “錯誤! 找不到參照來源。” to “Section3.3”. 1.3 2015-07-06 Add statements in Section 1.6 for Latch-Up Prevention 1.2 2015-06-18 1. This document is applicable to some of N28 libraries which are listed on the front cover. 2. Mention that the priority of library release note is higher than the application note, if any conflict, in Section 1.2. 3. Rename Chapter 3 from “The Power-On-Control Cell” to “Power-Up/Down” and update the contents. 4. Remind of leakage when V(PAD) > V(VDDPST) when VDDPST is ON, in Section 4.1 5. Add a rule “It is required to disable the pull function when PAD is driven by external voltage that is greater than VDDPST” in Section 4.2 6. Since PADxxGAU/PADxxNAU was removed and replaced by PADxxGU/PADxxNU starting from tpbn28v_130a, update this document accordingly. 7. Update PENDCAP_G/PENDCAPA_G related rules to refer to a separate file “ApplicationGuide_N28_AAIO” 8. Update double I/O ring related rules to refer to a separate file “ApplicationGuide_N28_AAIO” 9. Add a section for “AAIO Application” 10. Add a chapter for “TSMC9000 Overview” 1.10 2012-04-20 1.00 2010-01-22 TSMC Confidential Information 977746 Muse\ Semiconductor\ LLC 03/28/2019 2015-11-06 e\ us M n io at m or LC nf lI \L tia or en 746 uct fid 77 nd 9 on 9 co 01 i 2 C m 28/ C Se 03/ M TS 1.4 To revise typo and update application requirements in Chapter 1, 2, 3, 6, 8, 9, 10, 11, 12, 14, 18. The first released version of general application note for TSMC N28 I/O Library. TSMC N28 General I/O Library Application Note ii Security C - TSMC Secret Table of Contents Chapter 1 1.2 Related Documentation ........................................................................................... 1 1.3 N28 Hybrid I/O Library & Cell Naming Convention.............................................. 1 1.4 N28 I/O Application ................................................................................................ 2 1.5 ESD Target .............................................................................................................. 3 1.6 Latch-Up Prevention................................................................................................ 3 1.7 Document Content ................................................................................................... 3 1.8 Terms ....................................................................................................................... 3 The Digital Power/Ground Cells & LVS Consideration ......................................... 4 2.3 The Analog Power / Ground Cells Compatible with Digital I/O............................. 6 2.3.1 The Analog Power PVDD1ANA_V/H_G & PVDD2ANA_V/H_G to Internal Macro ............................................................................................ 6 2.3.2 Analog Signal Transmission ....................................................................... 7 2.3.3 The Analog Ground PVSS1ANA_V/H_G & PVSS2ANA_V/H_G to Internal Macro ............................................................................................ 9 2.3.4 Application Example ................................................................................ 10 Power-Up/Down ............................................................................................................ 11 Power-Up ............................................................................................................... 11 3.1.1 Ramp-Up Time Restriction ...................................................................... 11 3.1.2 Power-Up Sequence in Digital Domain ................................................... 11 3.2 Power-Down Sequence in Digital Domain............................................................ 11 3.3 Power On Control (POC) ...................................................................................... 12 3.4 POC Implementation ............................................................................................. 13 3.5 Chapter 5 e\ 2.2 3.1 Chapter 4 The Digital I/O Power/Ground Rail ........................................................................ 4 us 2.1 Chapter 3 n io at m or LC nf lI \L tia or en 746 uct fid 77 nd 9 on 9 co 01 i 2 C m 28/ C Se 03/ The Power Arrangement for N28 Digital I/O............................................................... 4 3.4.1 When There Is No Digital Function I/O in the Domain ........................... 13 3.4.2 LVS Consideration for the POC Signal .................................................... 14 The Stand-By Leakage Current of PVDD2POC_V/H_G...................................... 14 The N28 Function I/O ................................................................................................... 15 4.1 DGZ_V/H_G Cell Name Suffix ............................................................................ 15 4.2 Programmable Pins ................................................................................................ 16 4.3 Open Drain Emulation ........................................................................................... 17 The N28 Oscillator I/O ................................................................................................. 18 TSMC N28 General I/O Library Application Note iii TSMC Confidential Information 977746 Muse\ Semiconductor\ LLC 03/28/2019 Purpose .................................................................................................................... 1 M TS 1.1 M Chapter 2 Introduction..................................................................................................................... 1 Security C - TSMC Secret 5.1 Chapter 6 5.1.1 Tank Circuit .............................................................................................. 19 5.1.2 Pin Order .................................................................................................. 19 5.1.3 Back Annotation ....................................................................................... 20 5.1.4 Staggered CUP Bond Pads for the Oscillator I/O ..................................... 20 5.1.5 Clock Input Buffer .................................................................................... 20 Accessory Cells for N28 Digital I/Os ........................................................................... 22 The PFILLERx_G Filler Cell ................................................................................ 22 6.2 The PCORNER_G Corner Cell ............................................................................. 23 6.3 The PRCUT_G Power-Cut Cell for Digital Domain Separation ........................... 23 6.4 The PENDCAP_G Guard-Band Closure Cell ....................................................... 24 n io at m or LC nf lI \L tia or en 746 uct fid 77 nd 9 on 9 co 01 i 2 C m 28/ C Se 03/ Simultaneously Switching Output Considerations .................................................... 26 M 7.1 Terminology and Definition .................................................................................. 26 us 7.1.1 Chapter 8 e\ 7.1.2 Simultaneously Switching Output ............................................................ 26 Simultaneously Switching Noise .............................................................. 26 7.1.3 Driving Index ............................................................................................ 26 7.1.4 Driving Factor........................................................................................... 26 7.1.5 Sum of Driving Factors ............................................................................ 26 7.2 SSO Simulation Model .......................................................................................... 27 7.3 Calculate the Required Number of I/O Power/Ground Cell .................................. 27 7.4 How to Reduce SSN .............................................................................................. 28 The ESD & Latch-Up Considerations for N28 Digital I/Os ...................................... 29 8.1 The ESD Network ................................................................................................. 29 8.2 The Global ESD Bus ............................................................................................. 29 8.3 The Dummy Power / Ground Cell ......................................................................... 30 8.4 The ESD Power / Ground Metal Bus Resistance Requirement ............................. 31 8.5 The 20pF Requirement .......................................................................................... 32 8.6 The Required Power / Ground Cell Number ......................................................... 33 8.7 The ESD Clamp Macro ......................................................................................... 34 8.7.1 PCLAMPC_V/H_G ESD Core-Clamp Macro ......................................... 34 8.7.2 PCLAMP_G ESD I/O-Clamp Macro ....................................................... 34 8.7.3 Implement PCLAMPC_V/H_G / PCLAMP_G Macro on the Core Side 34 8.8 The PCORNER_G Corner Cell ............................................................................. 35 8.9 The PRCUT_G Power-Cut Cell for Digital Domain Separation ........................... 35 8.10 The PENDCAP_G Guard-Band Closure Cell ....................................................... 35 8.11 How to Integrate TSMC I/O with Other IP ........................................................... 35 TSMC N28 General I/O Library Application Note iv TSMC Confidential Information 977746 Muse\ Semiconductor\ LLC 03/28/2019 6.1 M TS Chapter 7 Oscillator I/O Introduction .................................................................................... 18 Security C - TSMC Secret Chapter 9 The N28 Analog I/O ...................................................................................................... 38 9.2 PDB3A_V/H_G, PDB3AC_V/H_G Analog Signal Cell ...................................... 38 9.3 PVDD3A_V/H_G / PVDD3AC_V/H_G Analog Power Cell ............................... 41 9.4 PVSS3A_V/H_G, PVSS3AC_V/H_G Analog Ground Cell ................................. 42 9.5 PVDD1A_V/H_G / PVDD1AC_V/H_G Analog Power Cell ............................... 43 9.6 PVSS1A_V/H_G, PVSS1AC_V/H_G Analog Ground Cell ................................. 43 9.7 PVSS2A_V/H_G, PVSS2AC_V/H_G Global ESD Ground Bus VSS Supply ..... 45 9.8 PFILLERxA_G, PCORNERA_G, PRCUTA_G, PENDCAPA_G Accessory Cell ............................................................................................................................... 46 9.8.1 The PFILLERxA_G Filler Cell ................................................................ 46 n io at m or LC nf lI \L tia or en 746 uct fid 77 nd 9 on 9 co 01 i 2 C m 28/ C Se 03/ The PCORNERA_G Corner Cell ............................................................. 47 9.8.3 The PRCUTA_G Power-Cut Cell for Analog-Digital I/O Domain Separation or Analog-Analog I/O Domain Separation ............................. 47 us M 9.8.2 9.8.4 The PENDCAPA_G Guard-Band Closure Cell ....................................... 48 e\ Chapter 10 The ESD & Latch-Up Considerations for N28 Analog I/O....................................... 50 10.1 The ESD Network ................................................................................................. 50 10.2 The Global ESD Bus ............................................................................................. 51 10.3 The Dummy Analog Power/Ground Cell Insertion ............................................... 52 10.4 The ESD Analog Power / Ground Metal Bus Resistance Requirement ................ 53 10.5 The 20pF Requirement .......................................................................................... 54 10.6 The Required Analog Power / Ground Cell Number ............................................ 55 10.7 The ESD Clamp Macro ......................................................................................... 56 10.7.1 PCLAMPC_V/H_G ESD Core-Clamp Macro ......................................... 56 10.7.2 PCLAMP_G ESD I/O-Clamp Macro ....................................................... 56 10.7.3 Implement PCLAMPC_V/H_G, PCLAMP_G ESD Clamp Macro on the Core Side .................................................................................................. 56 10.8 The PRCUTA_G Power-Cut Cell for Analog-Analog or Analog-Digital Domain Separation .............................................................................................................. 56 10.9 The PCORNERA_G Corner Cell .......................................................................... 56 10.10 The PENDCAPA_G Guard-Band Closure Cell .................................................... 56 10.11 How to Integrate TSMC I/O with Other IP ........................................................... 56 Chapter 11 The Bond Pad for N28 I/O ........................................................................................... 58 11.1 The Bond Pad Library ........................................................................................... 58 11.2 The Naming Convention for the Bond Pad ........................................................... 58 11.3 The Library Hierarchy ........................................................................................... 59 11.4 CUP Bond Pad Type.............................................................................................. 59 11.4.1 The Staggered CUP Pads for I/O .............................................................. 59 TSMC N28 General I/O Library Application Note v TSMC Confidential Information 977746 Muse\ Semiconductor\ LLC 03/28/2019 Analog I/O Power / Ground Rail ........................................................................... 38 M TS 9.1 Security C - TSMC Secret Chapter 12 Applications ................................................................................................................... 61 12.1 The Back-End Kit Directory .................................................................................. 61 12.2 CUP (Circuit under Pad) Wire Bond ..................................................................... 61 12.3 RDL (Re-Distribution Layer) Flip Chip ................................................................ 62 12.3.1 PCLAMP_G/PCLAMPC_V/H_G usage as ESD clamp cell for RDL flip chip ........................................................................................................... 63 12.4 Double I/O Rings ................................................................................................... 63 M TS Chapter 13 Electromigration (EM) Consideration ........................................................................ 67 13.1 EM Capacity of the Power/Ground Cell ................................................................ 67 13.1.1 Determine the Maximum Allowable Current ........................................... 67 n io at m or LC nf lI \L tia or en 746 uct fid 77 nd 9 on 9 co 01 i 2 C m 28/ C Se 03/ 13.1.2 Determine the Required Number of Power/ Ground Cells ....................... 67 M 13.1.3 Locate the EM Critical Point .................................................................... 67 us 13.1.4 EM vs. Temperature ................................................................................. 67 13.2 EM Capacity of the Bond Pad ............................................................................... 67 e\ 13.3 EM Capacity Enhancement ................................................................................... 68 13.3.1 Double/Triple Bonds ................................................................................ 68 13.3.2 Connect Top Two Metal Lines from the CUP Pad to Core ...................... 68 Chapter 14 Library Integration Notes ............................................................................................ 72 14.1 GDSII Number Mapping ....................................................................................... 72 14.2 ESD Mask .............................................................................................................. 72 14.3 GDSII Change to Mask Revision .......................................................................... 72 Chapter 15 Simulation Notes ........................................................................................................... 73 15.1 LPE Netlist ............................................................................................................ 73 15.2 Characterization Conditions .................................................................................. 73 15.3 Power / Ground Pin Information ........................................................................... 74 Chapter 16 Layout Considerations ................................................................................................. 76 Chapter 17 The Absolute Maximum Rating .................................................................................. 77 Chapter 18 N28 I/O Usage Checklist............................................................................................... 78 18.1 Review Checklist ................................................................................................... 78 Chapter 19 Contact Us ..................................................................................................................... 85 Chapter 20 TSMC9000 Overview ................................................................................................... 86 TSMC N28 General I/O Library Application Note vi TSMC Confidential Information 977746 Muse\ Semiconductor\ LLC 03/28/2019 12.5 AAIO (Area Array I/O) Application ..................................................................... 66 Security C - TSMC Secret Chapter 1 1.1 Introduction Purpose This General Application Note provides information on I/O features, usage instruction, and general application guideline for the TSMC N28 I/O Libraries. In addition to this document, it is mandatory to refer to the library release note to check if there is any more stringent application requirement in particular for the library in use. Related Documentation Table 1.1: N28 I/O Library Documents e\ us M n io at m or LC nf lI \L tia or en 746 uct fid 77 nd 9 on 9 co 01 i 2 C m 28/ C Se 03/ M TS This application note provides general usage guidelines for the N28 libraries listed on the front cover. For library–dependent information, please refer to the library release note, databook, and silicon report (if applicable) as indicated in Table 1.1. Note: This application note is for general cases, while the library release note is specific for that library. In case there is a conflict between the application note and a library release note, the priority of the library release note is higher than the application note, and please follow the rules in the release note. Type Information Coverage Library Release Note Library information Update history Design kit version dependency table Characterization conditions Known problems & limitations Special notes (application guide) EM table Library contents The required tape-out layers Physical information Electrical characteristics Cell description SSO DF (Simultaneously Switching Output Noise Driving Factors) for the digital output drivers Data sheets Library Databook How to Access Packed within the library rln kit (e.g. tphn28hpgv18_100a_rln.tar.gz) After unzip & untar the rln kit, look for the file name with prefix RN, where RN stands for release note Packed within the library doc kit (e.g. tphn28hpgv18_100a_doc.tar.gz) After unzip & untar the doc kit, look for the file name with prefix DB, where DB stands for databook Library Silicon Report Silicon characterization results (For the library that is silicon proven) Download from Design Portal at TSMC Online General Application Note General usage instruction & application guideline Download from Design Portal at TSMC Online 1.3 N28 Hybrid I/O Library & Cell Naming Convention The TSMC N28 hybrid I/O library naming follows the conventions below: TSMC N28 General I/O Library Application Note 1 TSMC Confidential Information 977746 Muse\ Semiconductor\ LLC 03/28/2019 1.2 Security C - TSMC Secret [Category] – [Geometry] – [Process node] – [Layout style] – [Process voltage] Category: TPH: the library provides both digital and analog I/O cells. Geometry: N28: For TSMC N28 process. Process node: defines the TSMC process flavor (for example, HP or HPL or HPM) Layout style: M TS GV - staggered layout style. Process voltage: n io at m or LC nf lI \L tia or en 746 uct fid 77 nd 9 on 9 co 01 i 2 C m 28/ C Se 03/ 18: For 1.8V process 25: for 2.5V process 25OD3: for 2.5V process but following the overdrive rules. 25UD18: for 2.5V process but following the underdrive rules. e\ us M For example: TPHN28HPGV18 can be decomposed as TPH-N28-HP-GV-18, which indicates TSMC analog and digital I/O library in 28nm HP process with staggered layout style, designed for 1.8V process. The following indicates suffix of I/O cell naming convention: [Cell name] – [Usage] – [_Orientation] – [_Layout style] Usage: A/AC: analog I/O cell All the letters except A and AC: digital I/O cell, or cells that can be used for analog and digital Orientation: V: for vertical placement H: for horizontal placement none: cells that can be used for both vertical and horizontal placement Layout style: G: staggered layout style For example: PDB3A_V_G: analog I/O cell for vertical placement with staggered layout style PDUW08DGZ_H_G: digital I/O cell for horizontal placement with staggered layout style 1.4 N28 I/O Application TSMC N28 I/O can support CUP (Circuit Under Pad) wire bond and RDL (Re-Distribution Layer) flip chip applications. For non-CUP wire bond, please contact TSMC in request for customization service. TSMC N28 General I/O Library Application Note 2 TSMC Confidential Information 977746 Muse\ Semiconductor\ LLC 03/28/2019 Security C - TSMC Secret 1.5 ESD Target The guidelines/rules mentioned in this Application Note are for HBM 2KV and MM 100V. For the cases with CDM spec, please contact us. 1.6 Latch-Up Prevention For latch-up prevention, please make sure the I/O placement meets all the latch-up rules defined in DRM. DRC might not be able to cover all latch-up rule checks, please use DRC and PERC for complete latch-up rule check. M TS Some recommendations of filler cell insertion can be found in the library release note, however, note that those are not hard rules and they do not cover all combinations of I/O placements. To prevent from latch-up, please pass DRC+PERC check for sign-off. n io at m or LC nf lI \L tia or en 746 uct fid 77 nd 9 on 9 co 01 i 2 C m 28/ C Se 03/ 1.7 Document Content M The document is organized with the following chapters: e\ us Chapter 2 to Chapter 8: Dedicated to the digital I/O and the analog power & ground cell compatible with the digital I/O. Chapter 9 to Chapter 10: Dedicated to the analog I/O and its integration with the digital I/O. Chapter 1, Chapter 11 to Chapter 19: Applicable to both digital and analog I/O cells. 1.8 Terms Terms in this document: 1. Bonded: connected to wire-bond pad/package or connected to flip chip bump/package 2. Dummy: not-bonded 3. DRM: TSMC Design Rule Manual 4. N/A: Not Applicable TSMC N28 General I/O Library Application Note 3 TSMC Confidential Information 977746 Muse\ Semiconductor\ LLC 03/28/2019 To let DRC and PERC perform the correct latch-up rule check, it is required to set the correct pin text name in the run deck. Security C - TSMC Secret Chapter 2 The Power Arrangement for N28 Digital I/O This Chapter covers the following topics: The Digital I/O Power/Ground Rail The Digital Power/Ground Cells & LVS Consideration The Analog Power/Ground Cells Compatible with the Digital I/O The PVDD2ANA_V/H_G Analog Signal Transmission M TS 2.1 The Digital I/O Power/Ground Rail (2) (3) (4) (7) (4) (1) Internal control and signal pins to the core logics e\ us M (1) n io at m or LC nf lI \L tia or en 746 uct fid 77 nd 9 on 9 co 01 i 2 C m 28/ C Se 03/ This section provides information on the digital I/O power/ground rail configuration. Please make sure that the power & ground rail(s) of each I/O cell is connected by abutting with another I/O cell / the P&R cells (Filler Cells, Corner Cells) / the guard-band closure cell (PENDCAP_V/H_G) / the power-cut cell (PRCUT_V/H_G). Figure 2.1 presents a typical TSMC I/O layout. (2) Power rail VDD: connects to the core power ring & the predriver (3) Ground rail VSS: connects to the core ground ring & the predriver (4) Power rail VDDPST: connects to the I/O power ring for levelshifters and post-driver (5) Guard ring (5) (6) (6) Ground rail VSSPST: connects to the I/O ground ring for the post-driver (7) Connection to the bond pad Figure 2.1: I/O layout example 2.2 The Digital Power/Ground Cells & LVS Consideration The TSMC N28 I/O libraries include power and ground cells that supply different voltages to the core, pre-drivers, and post-drivers. The text is attached to the pad to separate multi-power / ground routing, and is used for Layout vs. Schematic (LVS) purposes. Table 2.1 describes the route pin to the core side and the attached pad text for LVS. TSMC N28 General I/O Library Application Note 4 TSMC Confidential Information 977746 Muse\ Semiconductor\ LLC 03/28/2019 Security C - TSMC Secret Table 2.1: Pin Information for Digital Power/Ground Cells Default pin to core Default label in gds and lvs netlist PVDD1DGZ_V/H_G core cells + pre-drivers VDD VDD PVDD2DGZ_V/H_G PVDD2POC_V/H_G post-drivers None VDDPST PVSS1DGZ_V/H_G core cells + pre-drivers VSS VSS post-drivers None VSSPST all the transistors VSS VSS PVSS2DGZ_V/H_G PVSS3DGZ_V/H_G n io at m or LC nf lI \L tia or en 746 uct fid 77 nd 9 on 9 co 01 i 2 C m 28/ C Se 03/ There are two ground schemes that can be chosen when using TSMC N28 I/O library. It is required to use the specific ground cell along with the corresponding LVS netlist for LVS check. M The separate ground scheme separates (the core & the pre-drivers) VSS ground from (the post-driver) VSSPST for noise consideration. As shown in Table 2.1, PVSS1DGZ_V/H_G & PVSS2DGZ_V/H_G are the separate ground cells for this scheme. The common ground scheme provides only one VSS ground source to all transistors. PVSS3DGZ_V/H_G is the digital ground cell that supplies the core, pre-drivers, and postdrivers. e\ us It is suggested to use the separate ground scheme for a less-noisy ground source, as core and I/O grounds are separate from each other. The common ground scheme is for when the ground noise is less critical or when the pad-limited design is required. In regard to power, it is required to implement both digital core power cell and digital I/O power cell in each digital domain. Specifically for the PVDD2POC_V/H_G usage guide, please refer to Section 3.3 for details. For each of these ground schemes, Table 2.2 indicates the necessary power and ground I/O cells needed. For each I/O, the sub-circuit contains both VSS and VSSPST pins, for example: .SUBCKT PRDW04DGZ_H_G C PAD I OEN REN VDD VDDPST VSS VSSPST POC In a separate ground scheme environment, this example would be called as: X1 C1 PAD1 I1 OEN1 REN1 VDD1 VDDPST18 VSS VSSPST18 POC1 PRDW04DGZ_H_G Where: VDD1 is the core power supplied by PVDD1DGZ_V/H_G VDDPST18 is the I/O power supplied by PVDD2DGZ_V/H_G VSS is the core ground supplied by PVSS1DGZ_V/H_G VSSPST18 is the I/O ground supplied by PVSS2DGZ_V/H_G POC1 is the POC signal generated by PVDD2POC_V/H_G While a common ground scheme would be: X1 C1 PAD1 I1 OEN1 REN1 VDD1 VDDPST18 VSS1 VSS1 POC2 PRDW04DGZ_H_G Where: TSMC N28 General I/O Library Application Note 5 TSMC Confidential Information 977746 Muse\ Semiconductor\ LLC 03/28/2019 Connected to M TS Power/Ground Cells Security C - TSMC Secret VDD1 is the core power supplied by PVDD1DGZ_V/H_G VDDPST18 is the I/O power supplied by PVDD2DGZ_V/H_G VSS is the shared I/O and core ground supplied by PVSS3DGZ_V/H_G POC2 is the POC signal generated by PVDD2POC_V/H_G Table 2.2: The Power/Ground Scheme Power Supply Separate Ground Scheme Core + Pre-drivers PVDD1DGZ_V/H_G PVSS1DGZ_V/H_G us M 1. The purpose of I/O power & ground cells (PVDD2DGZ_V/H_G) & (PVSS2DGZ_V/H_G) is to supply the I/O pad ring. In the phantom view of I/O power/ground cell, there is no pin on the core side. However, there exists a pin for bond pad connection. e\ 2. Since the VSS rail is used as the global ESD rail, and has to be continued through the whole I/O ring, all of I/Os supplying this rail must share the same label. 2.3 The Analog Power / Ground Cells Compatible with Digital I/O The I/O library contains the analog power (PVDD1ANA_V/H_G, PVDD2ANA_V/H_G) & analog ground cell (PVSS1ANA_V/H_G, PVSS2ANA_V/H_G) that can be placed right next to the digital I/O for PLL/RAM/Voltage-Island applications, with no need to implement the power-cut cell (PRCUT_G) in between. In other words, this type of analog power/ground cell can share a common domain with the digital I/O. Please refer to Figure 2. for illustration. 2.3.1 The Analog Power PVDD1ANA_V/H_G & PVDD2ANA_V/H_G to Internal Macro PVDD1ANA_V/H_G: The analog power supply to internal macro with core voltage. PVDD2ANA_V/H_G: The analog power supply to internal macro with I/O voltage. Note 1. It is not necessary to place a power-cut cell (PRCUT_G) in between the (PVDDxANA_V/H_G, PVSSxANA_V/H_G) and the digital I/O. Please refer to Figure 2., as well as Section 6.3 for PRCUT_G usage information. 2. When PVDD1ANA_V/H_G cell is in use, it is required to implement the PCLAMPC_V/H_G ESD core-clamp macro for ESD robustness. Please refer to the Section 8.7 for details. 3. When PVDD2ANA_V/H_G cell is in use, it is required to implement the PCLAMP_G ESD I/O-clamp macro for ESD robustness. Please refer to Section 8.7 for details. 4. It is required to comply with the 1-ohm rule for PVDD2ANA_V/H_G implementation. Please refer to Section 8.4 for details. TSMC N28 General I/O Library Application Note 6 TSMC Confidential Information 977746 Muse\ Semiconductor\ LLC 03/28/2019 Attention PVDD1DGZ_V/H_G PVDD2DGZ_V/H_G (PVDD2POC_V/H_G) PVSS3DGZ_V/H_G n io at m or LC nf lI \L tia or en 746 uct fid 77 nd 9 on 9 co 01 i 2 C m 28/ C Se 03/ M TS PVDD2DGZ_V/H_G (PVDD2POC_V/H_G) PVSS2DGZ_V/H_G Post-drivers Common Ground Scheme Security C - TSMC Secret 2.3.2 Analog Signal Transmission The design of (PVDD1ANA_V/H_G, PVDD2ANA_V/H_G) is optimized for analog power supply rather than analog signal transmission, where PVDD1ANA_V/H_G is the core-voltage analog power supply, and PVDD2ANA_V/H_G is the I/O-voltage analog power supply. For analog signal transmission: PVDD2ANA_V/H_G is designed as analog power cell. It might be used as the I/O-voltage analog signal cell only under certain conditions, but can never be used as the core-voltage analog signal cell. When using PVDD2ANA_V/H_G as signal, please pay attention on the latch-up rule check. Please refer to Section 1.6 for details. n io at m or LC nf lI \L tia or en 746 uct fid 77 nd 9 on 9 co 01 i 2 C m 28/ C Se 03/ The following are the conditions where the PVDD2ANA_V/H_G can be used as the I/O-voltage analog signal cell. us M Condition 1: Connect the PVDD2ANA_V/H_G signal pin to the gate of I/O device e\ As illustrated in Figure 2.2, it is required to implement your own secondary ESD protection device (with proper dimensions) as specified in the ESD guidelines of TSMC Design Rule Manual. Also, it is a must to ensure that PVDD2ANA_V/H_G is connected to internal I/O device following the allowed analog victim type in Figure 2.3. Added secondary ESD devices AVDD PAD ESD NMOS Signal Input Output PVDD2ANA_V/H_G Figure 2.2: The Secondary ESD Protection to the Gate of I/O Device TSMC N28 General I/O Library Application Note 7 TSMC Confidential Information 977746 Muse\ Semiconductor\ LLC 03/28/2019 PVDD1ANA_V/H_G can NEVER be used as the core-voltage analog signal cell or the I/O-voltage analog signal cell. M TS Security C - TSMC Secret Passive load or active load (note: for active load, the “stacked” devices is needed Analog Signal Out to internal circuitry Analog Signal Out to internal circuitry Analog Signal In from PVDD2ANA Analog Signal In from PVDD2ANA Analog Signal Out to internal circuitry The Prohibited Analog Victim Type M TS TSMC Confidential Information 977746 Muse\ Semiconductor\ LLC 03/28/2019 The Allowed Analog Victim Type Analog Signal In from PVDD2ANA Figure 2.3: The Allowed Analog Victim Type n io at m or LC nf lI \L tia or en 746 uct fid 77 nd 9 on 9 co 01 i 2 C m 28/ C Se 03/ e\ us M TSMC N28 General I/O Library Application Note 8 Security C - TSMC Secret Condition 2: Connect the PVDD2ANA_V/H_G signal pin to the drain side of internal I/O device It is required to implement your own secondary ESD protection device (with proper dimensions) specified in the ESD guidelines of TSMC Design Rule Manual, as illustrated in Figure 2.4. Reminder: The node A cannot be directly connected to power; the node B cannot be directly connected to ground. Added secondary ESD devices M TS AVDD PAD Signal Input Output I/O voltage ESD Post driver ground n io at m or LC nf lI \L tia or en 746 uct fid 77 nd 9 on 9 co 01 i 2 C m 28/ C Se 03/ B PVDD2ANA_V/H_G us M e\ Figure 2.4: The Secondary ESD Protection Device to the Drain Side of Internal I/O Device However, just in case the secondary ESD protection device cannot be implemented in your application, it is a must to ensure that the internal P & N transistors (marked in yellow) of Figure 2.5 with drain side connected to the analog signal pin closely follow the ESD guidelines of TSMC Design Rule Manual. Under this condition, the node A can be directly connected to power, and the node B can be directly connected to ground. A AVDD PAD Signal Input Output PVDD2ANA_V/H_G I/O voltage Post driver ground B Figure 2.5: The Internal P & N Transistor Need to Follow ESD Guidelines 2.3.3 The Analog Ground PVSS1ANA_V/H_G & PVSS2ANA_V/H_G to Internal Macro PVSS1ANA_V/H_G: The analog ground supply corresponding to PVDD1ANA_V/H_G. PVSS2ANA_V/H_G: The analog ground supply corresponding to PVDD2ANA_V/H_G. TSMC N28 General I/O Library Application Note 9 TSMC Confidential Information 977746 Muse\ Semiconductor\ LLC 03/28/2019 A Security C - TSMC Secret 2.3.4 Application Example The PVDDxANA_V/H_G and PVSSxANA_V/H_G analog power & ground cells can be placed in the digital domain without having to use the PRCUT_V/H_G / PRCUT power cut cell to save the pin count, as shown in the below Figure. … n io at m or LC nf lI \L tia or en 746 uct fid 77 nd 9 on 9 co 01 i 2 C m 28/ C Se 03/ Figure 2.6: Implement PVDDxANA_V/H_G & PVSSxANA_V/H_G without the Power-Cut Cell e\ us M If the coupling noise of digital I/O cell is a critical concern for analog power/ground, it is preferred to create a pure analog domain without digital I/O cells. Please refer to Chapter 9 for more information TSMC N28 General I/O Library Application Note 10 TSMC Confidential Information 977746 Muse\ Semiconductor\ LLC 03/28/2019 Digital I/O Digital I/O PVSS2ANA_V/H_G PVDD2ANA_V/H_G PVSS1ANA_V/H_G M TS PVDD1ANA_V/H_G Digital I/O Digital I/O … Security C - TSMC Secret Chapter 3 Power-Up/Down This chapter covers the following topics: Power-down sequence in digital domain Power On Control (POC) PVDD2POC_V/H_G cell implementation LVS consideration for the POC signal The stand-by leakage of PVDD2POC_V/H_G Power-Up 3.1.1 Ramp-Up Time Restriction n io at m or LC nf lI \L tia or en 746 uct fid 77 nd 9 on 9 co 01 i 2 C m 28/ C Se 03/ 3.1 3.1.2 us M For the powers supplied by the power cells or connected to power clamp macro cells from the TSMC N28 I/O libraries, the ramp-up must be longer than 10us. Power-Up Sequence in Digital Domain e\ There are 3 options for the power-up sequence in digital domain: Option 1: Preferred Power up the I/O power (VDDPST) first and then the core power (VDD) (PVDD2POC_V/H_G cell would generate Power-On-Control signal to have the post-driver NMOS and PMOS off, so that the crowbar current would not occur in the post-driver fingers when the I/O voltage is on while the core voltage remains off.) Option 2: Acceptable Power up I/O power and core power simultaneously Option 3: Not recommended Power up the core power first and then the I/O power (Although this is not preferred, turning on the core power prior to the I/O power is also allowed. However, note that ~uA core power leakage current may occur when VDD on and VDDPST off. P.S. “~uA” is based on “all input control pins, e.g. OEN, set to a fixed state”.) Note: 1. If PVDD2ANA_V/H_G is in use, ensure that the PVDD2ANA_V/H_G is powered up after the digital I/O power PVDD2DGZ_V/H_G (or PVDD2POC_V/H_G) cell is on. 2. The VDD/VDDPST power must be fully on before the input signals of digital I/O cells toggle, e.g. I, OEN, etc. 3. Note that PAD might have unknown state during power ramp-up. 3.2 Power-Down Sequence in Digital Domain It’s the reverse of power-up sequence If PVDD2ANA_V/H_G is in use, ensure that the PVDD2ANA_V/H_G is powered down before the digital I/O power PVDD2DGZ_V/H_G (or PVDD2POC_V/H_G) cell is off. TSMC N28 General I/O Library Application Note 11 TSMC Confidential Information 977746 Muse\ Semiconductor\ LLC 03/28/2019 Power-up M TS Security C - TSMC Secret 3.3 Power On Control (POC) The Power-On-Control is to avoid I/O crowbar current or bus contention when the I/O voltage is up before the core voltage. In addition to POC signal generation, the bonded PVDD2POC_V/H_G plays the same role as PVDD2DGZ_V/H_G digital I/O power supply that contains the I/O ESD power clamp between VDDPST and VSSPST. The POC signal is transmitted to I/Os through cell abutment. Therefore, no POC routing is required. Note that the POC signal would be cut if inserting a power-cut (PRCUTx_G) cell. When the I/O power is on while the core power remains off, the POC signal can turn off the N- and P-MOS in the post-driver fingers. As such, I/O cell would be in the Hi-Z state during power-up. When POC is on, the pull-up/down resistor is disabled. n io at m or LC nf lI \L tia or en 746 uct fid 77 nd 9 on 9 co 01 i 2 C m 28/ C Se 03/ 1.8 V Vdd 0.85 V e\ us M Vddpst 0 0 1.8 V POC 0 PAD Don’t care Hi-Z Normal behavior Figure 3.1: Signal Waveforms (Example for Vddpst=1.8 V; Vdd=0.85 V) Details on the relationship among VDD, VDDPST, and POC: POC fully turns on when VDDPST reaches around 0.5V (This value varies, depending on the process technology.) POC goes off when VDD reaches its threshold point around 0.7V (This value varies, depending on process technology.) If VDD stays off when VDDPST is on first, the POC stays on, such that there is NO crowbar leakage current. In case VDDPST powers up first at "slow" rate, and VDD powers up afterwards at "fast" rate, our POC circuit can still work as long as VDDPST is greater than (pre-driver voltage VDD + one diode voltage) during power-up. POC is always on until VDD reaches its threshold point. TSMC N28 General I/O Library Application Note 12 TSMC Confidential Information 977746 Muse\ Semiconductor\ LLC 03/28/2019 The POC circuitry is implemented within the PVDD2POC_V/H_G cell to detect the VDDPST-then-VDD power-up sequence, so that PVDD2POC_V/H_G would transmit the POC signal to every digital I/O cell in the same domain. M TS Security C - TSMC Secret Once VDD reaches its threshold point, POC turns off. Then, the state of the pad is controlled by "I" (signal pin on the output path) and “OEN” (output enable) pin. VDDPST POC n io at m or LC nf lI \L tia or en 746 uct fid 77 nd 9 on 9 co 01 i 2 C m 28/ C Se 03/ M TS us M Figure 3.2: An Example of How PVDD2POC_V/H_G Cell Functions e\ 3.4 POC Implementation It is mandatory to use ONE-and-Only-One PVDD2POC_V/H_G in each digital domain that contains digital function I/O cell as illustrated in Figure 3.3. Implementation of POC cell can be achieved by replacing one PVDD2DGZ_V/H_G with one PVDD2POC_V/H_G in each digital I/O domain. The PVDD2POC_V/H_G cell can be either bonded out (as a POC signal generator and the post-driver power supply), or not (as a POC signal generator only). 3.4.1 When There Is No Digital Function I/O in the Domain When there is no digital function I/O cell in the I/O domain, it is not required to implement the PVDD2POC_V/H_G cell. To prevent POC rail from floating, it is required to tie the POC rail to ground. POC1 Digital domain 1 PVDD2POC_H_G Power cut Analog domain Power cut Power cut POC2 PVDD2POC_V_G Digital domain 2 ANA cells Figure 3.3: Example of PVDD2POC_V/H_G Implementation TSMC N28 General I/O Library Application Note 13 TSMC Confidential Information 977746 Muse\ Semiconductor\ LLC 03/28/2019 VDD Security C - TSMC Secret 3.4.2 LVS Consideration for the POC Signal For LVS purpose, it is necessary to put a label (for example: POC1) on the top level of POC rail. The number of added label texts should be the same as the number of PVDD2POC_V/H_G cell implemented on the chip, which has to be done before LVS check. If there were no PVDD2POC_V/H_G cell implemented per digital domain as instructed, it would lead to the floating POC node. In general, the POC rail is located in the pre-driver area. 3.5 The Stand-By Leakage Current of PVDD2POC_V/H_G n io at m or LC nf lI \L tia or en 746 uct fid 77 nd 9 on 9 co 01 i 2 C m 28/ C Se 03/ M TS e\ us M TSMC N28 General I/O Library Application Note 14 TSMC Confidential Information 977746 Muse\ Semiconductor\ LLC 03/28/2019 In N28 technology, the stand-by leakage current of PVDD2POC_V/H_G cell is around ~μA level. Please refer to the library datasheet packed in “doc” kit for the value in different PVT conditions. Security C - TSMC Secret Chapter 4 The N28 Function I/O The N28 I/O library contains digital bidirectional I/Os. The digital function I/O is named according to the following naming convention: P - [Slew rate] - [Pull select] - [Drive] - [Interface] - [Orientation]_G Where: Slew rate: defines if the I/O is with slew rate control or not. R: with slew rate Pull select: DW: pull-down selectable UW pull-up selectable n io at m or LC nf lI \L tia or en 746 uct fid 77 nd 9 on 9 co 01 i 2 C m 28/ C Se 03/ M Drive: the I/O output driving capability, it is a 2-digit number us Interface: defines the PAD type CDG: regular DGZ: fail-safe DGH: high voltage tolerant Orientation: e\ _V: for vertical placement _H: for horizontal placement For example: PDDW04DGZ_V_G is a bidirectional I/O with non-slew-rate-control, programmable pull-down, 4mA driving strength, failsafe and for vertical use. 4.1 DGZ_V/H_G Cell Name Suffix The fail-safe digital I/O cell name has DGZ_V/H_G suffix, where DGZ_V/H_G indicates the fail safe with staggered aspect ratio. For example: PDDW04DGZ_V/H_G: The fail-safe digital I/O with staggered aspect ratio indicated by the “gv” type of I/O library (e.g. tphn28hpmgv18). The design of TSMC fail-safe digital I/O is in particular for the “fail-safe” application that requires I/O pad to sustain voltage without current flowing from bus to the chip, when both VDDPST (IO / post-driver power) and VDD (core / pre-driver power) are off. As illustrated in Figure 4.1, both chip A and C stay on while chip B is off. In this case, if Chip B is not implemented with fail-safe I/O, current would thus flow from bus to chip B. TSMC N28 General I/O Library Application Note 15 TSMC Confidential Information 977746 Muse\ Semiconductor\ LLC 03/28/2019 D: regular M TS Security C - TSMC Secret Chip B (OFF) If there were no fail-safe digital I/O in Chip B interface, current would flow from Bus into Chip B Bus Chip C (ON) M TS Figure 4.1: Illustration of Non-Fail-Safe Scenario n io at m or LC nf lI \L tia or en 746 uct fid 77 nd 9 on 9 co 01 i 2 C m 28/ C Se 03/ Note: M 1. The oscillator I/O cells available from the N28 hybrid library cannot be fail-safe. e\ us 2. “Fail-safe” means “no leakage current” when power is off. When power is on, there might be a leakage if the PAD voltage is higher than the VDDPST voltage, e.g. V(PAD)=1.98V, V(VDDPST)=1.8V, which is similar to Regular I/O. 4.2 Programmable Pins The programmable pins for the fail-safe digital I/O include: OEN: To enable /disable the output path from I PAD REN: To enable/disable the internal Pull-up/Pull-down Resistor Please refer to the truth table in the library databook for logic information. Figure 4.2: An Example to Illustrate The Programmable Pins Note: 1. It is required to disable the “pull” functions when PAD is driven by external voltage that is greater than VDDPST. TSMC N28 General I/O Library Application Note 16 TSMC Confidential Information 977746 Muse\ Semiconductor\ LLC 03/28/2019 Chip A (ON) Security C - TSMC Secret 4.3 Open Drain Emulation TSMC digital I/O does not feature open drain. However, open drain can be emulated using the tristate output buffer. An open drain terminal is connected to ground at the logic “0” state, but has high impedance at the logic “1” state. “Open drain” requires an external pull-up resistor connected to the positive voltage rail (logic 1). M TS Tri-state Output Buffer n io at m or LC nf lI \L tia or en 746 uct fid 77 nd 9 on 9 co 01 i 2 C m 28/ C Se 03/ Bus PAD e\ us M I External PullUp Resistor OEN Figure 4.3: The Open Drain Emulation Diagram As shown in Figure 4.3, the port “I” is tied to ground “0”: When OEN=”0," the output is enabled, I = “0” would be transmitted, and the PAD turns “0”. When OEN=”1”, the output is disabled (Hi-Z), and the PAD is pulled high by the external pull-up resistor. Note: Do not use the tri-state output buffer with regular input (i.e. non-fail-safe / non-high-voltinput tolerance) for open drain emulation, unless the pull-up voltage (Vpull-up) is less than the I/O voltage (VDDPST) TSMC N28 General I/O Library Application Note 17 TSMC Confidential Information 977746 Muse\ Semiconductor\ LLC 03/28/2019 Vpull-up Security C - TSMC Secret Chapter 5 The N28 Oscillator I/O The N28 oscillator I/O cell is designed to oscillate with crystal samples from 2MHz to 30MHz in the fundamental mode, but not designed to work in the KHz band or in overtone oscillation. The tank circuit provided herein for fundamental oscillation is for your reference. This section covers the following topics: Tank circuit Pin order Back annotation CUP bond pads for the oscillator I/O cells n io at m or LC nf lI \L tia or en 746 uct fid 77 nd 9 on 9 co 01 i 2 C m 28/ C Se 03/ 5.1 Oscillator I/O Introduction M There is one type of oscillator cell: PDXOEDG_V/H_G. The oscillator I/O comes with an enabling signal ‘E’, active high. It contains two pins (DS0 and DS1) to control the driving strength and signal gain (gm) level. To ensure the oscillation start-up, the negative resistance (-Re) of tank circuit must be at least five times greater than the equivalent series resistance (ESR) of the crystal model. The greater the negative resistance is, the faster the crystal starts to oscillate. For the same capacitive load (CL), the higher gm leads to more negative resistance, and thus, the oscillation can start up easier. However, the power consumption would be greater. To select the proper oscillator I/O, a pre-check on the specification of the crystal model would be crucial. The key parameters for oscillation start-up are CL and the maximum ESR at the target frequency. Reducing the CL would help to increase the negative resistance of the tank circuit. However, if CL is too small, the deviation from the target frequency would get increased. Therefore, there is a trade-off between the start-up time and frequency deviation in deciding the CL. e\ us Once the CL and ESR are chosen, please refer to Table 5.1 for selection guide on the oscillator I/O cell. Note that this table is for reference only, and can only be applicable to the typical condition. If the start-up time is less critical, the smaller gm is preferred for less power consumption. Some conditions might require a high gm set. According to that table, if you have a 14.31818MHz crystal part with CL=12 pF and the maximum ESR=80 Ohm, set (II) would be the first choice. However, if CL=20pF, then set (IV) is recommended, especially when the start-up time is also a consideration. Table 5.1: Selection Guide for the PDXOEDG_V/H_G Target Freq (Hz) 2M ~ 3M 3M ~ 6M 6M ~ 10M 10M ~ 20M 20M ~ 30M CL (pF) 25 20 16 12 8 Maximum ESR (Ohm) 1K 400 100 80 40 (I)~(IV) (I)~(IV) (I)~(IV) (II)~(IV) (II)~(IV) Selection TSMC N28 General I/O Library Application Note 18 TSMC Confidential Information 977746 Muse\ Semiconductor\ LLC 03/28/2019 N28 oscillator I/O introduction M TS Security C - TSMC Secret (I) DS1=0, DS0=0 (II) DS1=0, DS0=1 (III) DS1=1, DS0=0 (IV) DS1=1, DS0=1 5.1.1 Tank Circuit A reference tank circuit suitable for crystal model that oscillates in the fundamental mode is shown in Figure 5.1. The tank circuit is composed of the oscillator I/O together with external components (Rf, Rd, C1, C2) to ensure the oscillation start-up and stability. DS1 DS0 E XC n io at m or LC nf lI \L tia or en 746 uct fid 77 nd 9 on 9 co 01 i 2 C m 28/ C Se 03/ XIN XOUT e\ us M Rf C1 Rd Crystal C2 Figure 5.1: Tank Circuit for the Fundamental-Mode Oscillation Rf represents the feedback resistor to bias the inverter in the high gain region. Rf cannot be too low, or the loop might fail to oscillate. In general, an Rf of 1M Ohm is sufficient for MHz band application. Rd represents the damping resistor that helps to increase stability, save power, and suppress gain at high frequency. The trade-off of Rd is the reduction of negative resistance. As such, Rd cannot be too large, or the loop could fail to oscillate. C1 and C2 can be chosen based on the crystal model or resonator CL specification. In the steady state of oscillation, CL is defined as (C1 x C2)/(C1+C2). But since the I/O ports, bond pad, and package pins all contribute the parasitic capacitance to C1 and C2, we can rewrite CL to be (C1* x C2*) / (C1*+C2*), where C1* = (C1+Cin, parasitic) and C2* = (C2+Cout, parasitic). In this example, the required C1 and C2 can be reduced. The tank circuit is for parallel resonance rather than series resonance. As C1, C2, Rd, and Rf depend on the crystal specification and the type of oscillator I/O in use, there is no single set of components that can be applicable for a wide range of oscillation frequency. 5.1.2 Pin Order There are two pins labeled “XIN” and “XOUT” for each oscillator I/O, and the layout is symmetrical. The cell can be mirrored, so that the pin order of “XIN” and “XOUT” is reversed. Although the mirrored oscillator I/O is functionally equivalent, problems could occur in the test mode (bypass mode) because the external clock signal is supposed to trigger “XIN,” but not “XOUT”. To avoid this TSMC N28 General I/O Library Application Note 19 TSMC Confidential Information 977746 Muse\ Semiconductor\ LLC 03/28/2019 M TS N28 Oscillator I/O Security C - TSMC Secret problem, it is required to check the pin order carefully while dropping text onto the corresponding I/O pin 5.1.3 Back Annotation The XC output is derived from the XOUT through an inverter as Figure 5.1 shows. Hence, the delay path is characterized for (A) XIN XOUT and (B) XOUT XC Here is an example of Standard Delay Format (SDF) output by Synopsys: n io at m or LC nf lI \L tia or en 746 uct fid 77 nd 9 on 9 co 01 i 2 C m 28/ C Se 03/ IOPATH XIN XOUT (A1:A1:A1) (A2:A2:A2) IOPATH XOUT XC (B1:B1:B1) (B2:B2:B2) us M The XIN XC path delay would be (A2+B1:A2+B1:A2+B1) (A1+B2:A1+B2: A1+B2) when back annotated to Synopsys. e\ Verilog cannot specify delays from output to output. All delay paths must be from input to output. Therefore, the timing path in Verilog is modeled as XIN XC instead of XOUT XC. This causes a back-annotation problem when annotating Synopsys SDF in Verilog. An error message, "SDFA Error: Could not find path XOUT to XC", would show up. The workaround is to modify the Synopsys SDF output as follows: IOPATH XIN XOUT (A1:A1:A1) (A2:A2:A2) IOPATH XIN XC (A2+B1:A2+B1:A2+B1) (A1+B2:A1+B2:A1+B2) 5.1.4 Staggered CUP Bond Pads for the Oscillator I/O For the CUP-wire-bond application, it is required to connect the PADxNU and PADxGU to the staggered oscillator I/O as illustrated in Figure 5.2. Both pads are available from the bond pad library. 5.1.5 Clock Input Buffer The oscillator I/O is designed for oscillation using crystal model, but NOT for the clock input buffer. To use the oscillator I/O as an input buffer, it is required to drive the clock directly to XIN pin and measure at XC, leaving XOUT "unloaded". The input speed would depend on the load at XC. Since the DC characteristic (e.g. Vt, Vil, etc.) of the oscillator I/O would be different from that of the digital I/O cell, it is required to run simulation your own to determine the DC characteristic. TSMC N28 General I/O Library Application Note 20 TSMC Confidential Information 977746 Muse\ Semiconductor\ LLC 03/28/2019 M TS Obviously, the delay from XIN XC is the sum of (A) and (B), which is required since the XIN XC delay depends on both the XOUT load and the XC load, and the Synopsys tool is operated using this model. XIN XOUT has one timing table and XOUT XC has another one. If only one table (XIN XC) is in use, the delay would only depend on the XC load, which is certainly not the reality. Security C - TSMC Secret PADxNU Oscillator I/O TSMC Confidential Information 977746 Muse\ Semiconductor\ LLC 03/28/2019 n io at m or LC nf lI \L tia or en 746 uct fid 77 nd 9 on 9 co 01 i 2 C m 28/ C Se 03/ M TS e\ us M PADxGU Figure 5.2: The Staggered Oscillator I/O Note: The oscillator I/O cell available from the fail-safe library cannot be fail-safe. TSMC N28 General I/O Library Application Note 21 Security C - TSMC Secret Chapter 6 Accessory Cells for N28 Digital I/Os The accessory cells, such as filler cell (PFILLERx_G), power-cut cell (PRCUT_G), guard-band closure cell (PENDCAP_G), and corner cell (PCORNER_G), are included in the front-end design kits, such as Verilog and Synopsys, but no behavior is defined. They are included in the back-end design kits, such as Apollo, Silicon Ensemble, and GDSII, where these cells have power/ground bus connections, but no transistors nor functions. This chapter covers the following topics: The PCORNER_G Corner Cell The PRCUT_G Power-Cut Cell for Digital Domain Separation The PENDCAP_G Guard-Band Closure Cell n io at m or LC nf lI \L tia or en 746 uct fid 77 nd 9 on 9 co 01 i 2 C m 28/ C Se 03/ 6.1 The PFILLERx_G Filler Cell M us The filler cell is named PFILLERx_G, where x is related to the pr-boundary width. For example the PFILLER1_G is 1 μm wide; PFILLER05_G is 0.5 μm wide. e\ It is required to insert the wide fillers first and then the narrow fillers afterwards. To avoid the metalslot-rule violation, do not only use narrow filler cells to fill the large I/O space. For example, to fill 30μm space between two digital I/O cells, use one 20μm pitch filler cell (PFILLER20_G) and one 10μm pitch filler cell (PFILLER10_G) instead of using 6 “5μm pitch” filler cells (PFILLER5_G). PAD60NU PFILLER x PAD60GU Figure 6.1: The Filler-Cell Implementation For ESD robustness, if the empty space is longer than one digital I/O cell width, we strongly recommend to implement the dummy digital core power cell (PVDD1DGZ_V/H_G) or the dummy digital I/O power cell (PVDD2DGZ_V/H_G) together with the filler cells to fill the gap, where dummy means “not-bonded”, but used as filler cell. However, doing so would increase the stand-by leakage current that results from the digital power cells. Please justify it based on your leakage spec. TSMC N28 General I/O Library Application Note 22 TSMC Confidential Information 977746 Muse\ Semiconductor\ LLC 03/28/2019 The PFILLERx_G Filler Cell M TS Security C - TSMC Secret I/O Filler cells I/O I/O Dummy digital power I/O e\ 6.2 The PCORNER_G Corner Cell The N28 corner cell is named PCORNER_G. It is needed to implement the PCORNER_G corner cell available from the I/O library in the digital domain that spans two sides of the chip. Note: It is required to implement the bonded digital I/O ground cell (PVSS2DGZ_V/H_G, PVSS3DGZ_V/H_G) right next to each side of the corner cell for ESD consideration. 6.3 The PRCUT_G Power-Cut Cell for Digital Domain Separation The N28 power cut cell for domain separation is named PRCUT_G. The PRCUT_G power-cut cell contains no device. The power (VDD, VDDPST), POC rail, and the ground (VSSPST) bus are open within the PRCUT_G cell, while only the VSS bus (i.e. global ESD bus) stays connected through the power-cut cell. In addition, the PRCUT_G contains the N-well guard ring in order to close up the guard bands of the adjacent digital I/O domains as illustrated in Figure 6.3, which can safeguard the cross-domain latchup protection. Please refer to the top of the following page for the power-cut cell usage requirement. TSMC N28 General I/O Library Application Note 23 TSMC Confidential Information 977746 Muse\ Semiconductor\ LLC 03/28/2019 n io at m or LC nf lI \L tia or en 746 uct fid 77 nd 9 on 9 co 01 i 2 C m 28/ C Se 03/ M TS us M Figure 6.2: The Dummy Digital Power Cell Implementation. Filler cells (left) are replaced with dummy digital power (right) Security C - TSMC Secret POC1 VDD1 (e.g. 0.85V) POC2 VDD2 (e.g. 0.8V) VSS VSS VDDPST1 (e.g. 1.8V) VDDPST (e.g. 1.5V) M TS Digital Domain I PRCUT_G PRCUT_G Digital Domain II Figure 6.3: The PRCUT Cell Scheme & Layout us M n io at m or LC nf lI \L tia or en 746 uct fid 77 nd 9 on 9 co 01 i 2 C m 28/ C Se 03/ Guard band closure on both sides e\ Note 1. It is required to implement the PRCUT_G cell between two digital I/O domains implemented with the I/O cells that belong to the same I/O library but are operated at different domain voltage. 2. For the robust cross-domain ESD & latch-up protection, it is required to implement the digital ground (PVSS1DGZ_V/H_G / PVSS3DGZ_V/H_G) right next to the power-cut cell. Doing so can shorten the ESD discharge path across domains. 6.4 The PENDCAP_G Guard-Band Closure Cell The guard band closure cell is named PENDCAP_G. When digital I/O cells are not implemented in a ring (e.g. L shape), it is required to implement the PENDCAP_G guard-band-closure cell on the domain edge for latch-up protection. Different from the PRCUT_G power-cut cell that can close the guard bands on both sides of PRCUT_G, the PENDCAP_G can close the guard band on one side. In other words, it is required to mirror PENDCAP_G horizontally to close the guard band on the other side of the domain edge. The mirrored PENDCAP_G N28 digital I/Os PENDCAP_G It is required to implement either digital Power or digital Ground cell right beside the PENDCAP_G cell TSMC N28 General I/O Library Application Note 24 TSMC Confidential Information 977746 Muse\ Semiconductor\ LLC 03/28/2019 VSSPST VSSPST Security C - TSMC Secret Note 1. When using PENDCAP_G cell, please fulfill the rules described in a separate file named “ApplicationGuide_N28_AAIO”, which is available on tsmc online. 2. Please make sure that the N-Well /P-Sub in the circuit layout around the PENDCAP_G cell is connected to power/ground solidly. It is recommended to have the connection resistance within 1 ohm. M TS Figure 6.4: The PENDCAP_G Cell Implementation n io at m or LC nf lI \L tia or en 746 uct fid 77 nd 9 on 9 co 01 i 2 C m 28/ C Se 03/ e\ us M TSMC N28 General I/O Library Application Note 25 TSMC Confidential Information 977746 Muse\ Semiconductor\ LLC 03/28/2019 3. The I/O library design uses VSS as global ESD bus. Therefore, VSS bus of all the I/O cells must be connected together for ESD robustness even if PENDCAP_G is in use. It is required to have VSS connection complied with the "Maximum ESD Current Density for Via, and Metal" table in DRM. Security C - TSMC Secret Chapter 7 Simultaneously Switching Output Considerations This chapter provides information about the following topics: Terminology and Definition SSO Simulation Model Calculation for the Required Number of I/O Power & Ground cells Time to Valid State M TS Terminology and Definition 7.1.1 Simultaneously Switching Output n io at m or LC nf lI \L tia or en 746 uct fid 77 nd 9 on 9 co 01 i 2 C m 28/ C Se 03/ 7.1 Simultaneously Switching Noise e\ 7.1.2 us M The Simultaneously Switching Output (SSO) effect occurs when I/O output buffers are switching simultaneously in the same direction (H L, HZ L or L H, LZ H), resulting in noise on the I/O power & ground bus. The Simultaneously Switching Noise (SSN) is the noise produced by simultaneously switching output buffers. SSN changes the voltage levels of power/ground nodes, creating the so-called “Ground Bounce Effect”, which is tested at the device output by keeping one stable output at low “0” or high “1,” while all the other output device are switching simultaneously. The noise that occurs at the stable output node is called “Quiet Output Switching” (QOS). If the input low voltage is defined as Vil, the QOS of Vil is considered the maximum noise that the system can endure. 7.1.3 Driving Index The Driving Index (DI) is the maximum number of I/O output drivers switching from high to low simultaneously without making the voltage on the quiet output “0” higher than a threshold value “Vil” when a single I/O ground cell is applied. 7.1.4 Driving Factor The Driving Factor (DF) is the SSN amount that the output buffer contributes to at the I/O power & ground rails. The DF value of an output buffer is proportional to dI/dt, the derivative of the current on the output buffer. DF can be obtained by: DF = 1/DI 7.1.5 Sum of Driving Factors The Sum of Driving Factors (SDF) is the sum of DF values of all the digital output drivers in a single I/O domain, which can be used to determine the required number of “bonded” I/O power & “bonded” I/O ground cells in this particular domain to avoid the ground-bounced noise effect (SSN). For the SSO case (i.e. the I/O cell is used as an output driver) The required number of “bonded” digital I/O ground cell = SDF The required number of “bonded” digital I/O power cell = SDF / 1.1 Reminder: As for the required number of “bonded” digital I/O power & “bonded” digital I/O ground cells, it is required to meet the SSO requirement as well as the VDDPST & VSSPST TSMC N28 General I/O Library Application Note 26 TSMC Confidential Information 977746 Muse\ Semiconductor\ LLC 03/28/2019 Security C - TSMC Secret metal-bus resistance requirement (i.e. 1 ohm), which can be found in Section 8.4. For the non-SSO case (i.e. the I/O cell is used as an input buffer) If all the digital I/O cells in the I/O domain function as input buffers, to determine the required number of “bonded” digital I/O power and “bonded” digital I/O ground cells, it is a must to take the VDDPST (I/O power) and VSSPST (I/O ground) metal bus resistance requirement into account. Please refer to Section 8.4 for details. SSO Simulation Model n io at m or LC nf lI \L tia or en 746 uct fid 77 nd 9 on 9 co 01 i 2 C m 28/ C Se 03/ M TS As Figure 7.1 shows, each I/O power/ground net and output node are modeled with individual RLC circuit based on the package type. Rvdd us M Cvdd Lvdd e\ Vi Lpin Quiet I/O cell Rpin Cpin Vin Vo Cload Lpin A SSO I/O cells Rpin Cpin Vout Cload Lvss Cvss Rvss Figure 7.1: The Model for SSO Simulation Vin represents the input node of SSO I/O cells. When Vin toggles, all the SSO I/O cells are switching simultaneously and the change of the current (I) on Lvss could be high. Therefore, the noise of [Lvss * (dI/dt)] would be generated at node A. Meanwhile, another quiet I/O cell grounded to node A is transmitting a “0” through Vo at the same time. The “0” could be recognized as “1” if the noise at Vo is greater than Vil at node A. DI is the minimal number of SSO I/O cells that contribute noise of Vil at Vo. DF can be calculated from DI: 1/DI = DF The worst SSN happens in the Fast-Fast process corner with + 10% pre-driver & + 10% post-driver power at low temperature. As such, the DF is characterized in the low-temp process condition, and available in the library databook. 7.3 Calculate the Required Number of I/O Power/Ground Cell By referring to the DF table in the library databook, we can calculate the required number of bonded I/O power/ground cell to avoid SSN in each digital domain, if there is any I/O cell used as the output driver. TSMC N28 General I/O Library Application Note 27 TSMC Confidential Information 977746 Muse\ Semiconductor\ LLC 03/28/2019 7.2 Security C - TSMC Secret For example, 1. Check the DF value for a specific output driving strength: If four copies of the SSO I/O cell with one ground cell (Lvss) cause noise “Vil,” the DI is 4 and the DF is 1/4 = 0.25. You can check the DF table in the library databook corresponding to the package bond wire inductance (Lvdd, Lvss, Lpin) and different capacitive loads. Below is an example. e\ SDF can be obtained by summing up the total DF values applicable to each digital I/O domain. For example, consider the design with ten 8 mA output buffers, six 12 mA output buffers, and twelve 16 mA slew-rate-controlled output buffers. If the DF value (based on 7.8 nH bond-wire inductance and 15 pF capacitive load) corresponding to 8 mA, 12 mA, and 16 mA output driving strength are 0.352, 0.556, and 0.649, respectively, the SDF can be calculated as: 10 x 0.352 + 6 x 0.556 + 12 x 0.649 = 14.644 3. Obtain the required number of “bonded” digital I/O power & “bonded” digital I/O ground cells for SSO case: The required number of bonded digital I/O ground cell = 14.644 15 The required number of bonded digital I/O power cell = 14.644 / 1.1 = 13.31 14 As calculated above, to avoid SSN effect, the required number of bonded digital I/O ground cell is 15; the required number of bonded digital I/O power cell is 14. 7.4 How to Reduce SSN Use the output driver with small driving strength. Use the output driver with slew-rate control, if possible. Insert sufficient number of bonded digital I/O power and bonded digital I/O ground cells. Place the noise-sensitive cells away from the SSO I/Os. Apply double bonds to 2 identical digital I/O power or 2 identical digital I/O ground cells to reduce bond-wire inductance. TSMC N28 General I/O Library Application Note 28 TSMC Confidential Information 977746 Muse\ Semiconductor\ LLC 03/28/2019 n io at m or LC nf lI \L tia or en 746 uct fid 77 nd 9 on 9 co 01 i 2 C m 28/ C Se 03/ M TS us M 2. Calculate the SDF in each digital I/O domain: Security C - TSMC Secret Chapter 8 The ESD & Latch-Up Considerations for N28 Digital I/Os This chapter provides information about the following topics: The Global ESD bus The Dummy Power/Ground Cell Insertion The Power/Ground Metal Bus Resistance Requirement The 20pF Requirement The Required Power/Ground Cell Number The ESD Clamp Macro The PRCUT_G Power-Cut Cell and PENDCAP_G Guard-Band Closure Cell How to Integrate TSMC I/O with the 3rd Party IP n io at m or LC nf lI \L tia or en 746 uct fid 77 nd 9 on 9 co 01 i 2 C m 28/ C Se 03/ us M 8.1 The ESD Network e\ The digital I/O, Power, Ground cells of TSMC I/O library contain the ESD clamping circuitry to To internal macro To digital core PCLAMPC_V/H_G PCLAMP_G VDD AVSS AVDD AVSS C AVDD VSS VDD ESD clamp ESD clamp ESD clamp ESD clamp ESD clamp ESD clamp ESD clamp ESD clamp ESD clamp VSS VDDPST ESD clamp ESD clamp ESD clamp ESD clamp ESD clamp ESD clamp ESD clamp ESD clamp ESD clamp ESD clamp VSSPST PVSS1ANA_V/H_G PVSS2ANA_V/H_G PVDD1ANA_V/H_G PVDD1DGZ_V/H_G PVDD2ANA_V/H_G PVSS1DGZ_V/H_G PVDD2DGZ_V/H_G I/O PVDD2POC_V/H_G PVSS2DGZ_V/H_G construct the ESD protection network as illustrated in Figure 8.1. Figure 8.1: ESD Protection Scheme for Power/Ground/IO Cells 8.2 The Global ESD Bus TSMC I/O design is using VSS as global ESD bus. TSMC N28 General I/O Library Application Note 29 TSMC Confidential Information 977746 Muse\ Semiconductor\ LLC 03/28/2019 The ESD Network M TS Security C - TSMC Secret VSS global ESD bus I/O ring Core Figure 8.2: Global ESD Bus – VSS To achieve robust ESD protection, it is required to have VSS pin of PVSS1DGZ_G or PVSS3DGZ_G connected to VSS core ground mesh to make the VSS as chip-level global. e\ us M L-Shape I/O Placement U-Shape I/O Placement Core P/G Mesh Core P/G Mesh Figure 8.2: I/O Implementation in L Shape / U Shape When the I/O cell placement does not form a ring (e.g. L shape), it is required to have VSS connection from the I/O domain to the 3rd party IP nearby. All the connections mentioned above must comply with "Maximum ESD Current Density for Via, and Metal" table in DRM. 8.3 The Dummy Power / Ground Cell To achieve short ESD discharge path, it is strongly suggested to replace some of the filler cells with the dummy power or ground cells if space is allowed, where dummy means “not bonded”, simply used as the filler cells. Please refer to Figure 8.3 for illustration. TSMC N28 General I/O Library Application Note 30 TSMC Confidential Information 977746 Muse\ Semiconductor\ LLC 03/28/2019 n io at m or LC nf lI \L tia or en 746 uct fid 77 nd 9 on 9 co 01 i 2 C m 28/ C Se 03/ M TS Die edge Security C - TSMC Secret Note that the power/ground cells contain ESD clamp circuitry; whereas the filler cells do not. At the package phase, dummy power/ground is not bonded, so that the total pin count would not get impacted. However, the only trade-off is increase in the stand-by leakage current of the dummy power/ground cell. Please judge it based on the total stand-by leakage spec. I/O I/O I/O us M n io at m or LC nf lI \L tia or en 746 uct fid 77 nd 9 on 9 co 01 i 2 C m 28/ C Se 03/ M TS Dummy digital power Filler cells Filler cells e\ Figure 8.3: Replace Filler Cells with Dummy Power Cells 8.4 The ESD Power / Ground Metal Bus Resistance Requirement The ESD power/ground metal bus resistance “R” from cell A to cell B can be calculated as illustrated in Figure 8.4. R = Rsheet x L/W, where Rsheet is available from the spice model card. TSMC N28 General I/O Library Application Note 31 TSMC Confidential Information 977746 Muse\ Semiconductor\ LLC 03/28/2019 Filler cells I/O Security C - TSMC Secret Core W Bus Line L Cell B Cell A “Bonded” pad “Bonded” pad n io at m or LC nf lI \L tia or en 746 uct fid 77 nd 9 on 9 co 01 i 2 C m 28/ C Se 03/ Within the same digital domain, it is required to ensure that the metal bus resistance CANNOT be greater than the value listed in the Table 8.1. M PVSS2DGZ_V/H_G PVDD1ANA_V/H_G PVSS1ANA_V/H_G PVDD2ANA_V/H_G PVSS2ANA_V/H_G PVDD2DGZ_V/H_G PVDD2POC_V/H_G PVSS1DGZ_V/H_G PVDD1DGZ_V/H_G PVDD2DGZ_V/H_G PVDD2POC_V/H_G Function I/O PVDD1DGZ_V/H_G Function I/O e\ us Table 8.1: The max resistance between different I/O types 3 1 3 1 N/A N/A N/A N/A 3 1 3 1 1 N/A N/A 1 1 N/A N/A 1 3 3 1 1 3 3 N/A N/A N/A N/A 1 N/A N/A N/A N/A 3 1 3 3 1 1 1 3 1 3 PVDD1ANA_V/H_G N/A 1 N/A 1 N/A PVSS1ANA_V/H_G N/A 1 N/A 1 N/A 1 PVDD2ANA_V/H_G N/A N/A 1 3 N/A N/A N/A PVSS2ANA_V/H_G N/A N/A 3 3 N/A N/A N/A PVSS1DGZ_V/H_G PVSS2DGZ_V/H_G 8.5 1 1 The 20pF Requirement The minimal capacitive load between the “AVDD” pin on the core side of (PVDD1ANA_V/H_G, PVDD2ANA_V/H_G) and the “AVSS” pin on the core side of (PVSS1ANA_V/H_G, PVSS2ANA_V/H_G) is 20pF. If insufficient, it is required to insert the decoupling capacitor. Please refer to Figure 8.5 for illustration. TSMC N28 General I/O Library Application Note 32 TSMC Confidential Information 977746 Muse\ Semiconductor\ LLC 03/28/2019 M TS Figure 8.4: Illustration of Bus Resistance Calculation Security C - TSMC Secret AVSS AVDD AVSS AVDD > 20 pF > 20 pF VDD ESD Clamp ESD Clamp ESD Clamp ESD Clamp VSS M TS ESD Clamp ESD Clamp ESD Clamp n io at m or LC nf lI \L tia or en 746 uct fid 77 nd 9 on 9 co 01 i 2 C m 28/ C Se 03/ ESD Clamp ESD Clamp VSSPST us M PVSS1ANA_V/H_G PVSS2ANA_V/H_G e\ PVDD1ANA_V/H_G PVDD2ANA_V/H_G Figure 8.5: The 20pF Requirement 8.6 The Required Power / Ground Cell Number To achieve robust ESD/latch-up protection, it is required to meet the cell-number requirement in each power domain as mentioned below: PVDD1DGZ_V/H_G digital core power cell: “At least” 3 bonded ones. PVDD2DGZ_V/H_G digital I/O power cell: “At least” 2 bonded ones. The total number of the bonded cells must meet the SSO requirement as well as the 1-ohm or 3-ohm VDDPST bus resistance requirement. PVDD2POC_V/H_G Power-on-Control cell: It is required to implement “one and only one” POC cell, which can be either bonded or not. When POC cell is bonded, it can function as a digital I/O power supply and POC signal generator. When POC cell is not bonded, it simply functions as a POC signal generator. PVSS1DGZ_V/H_G, PVSS3DGZ_V/H_G digital core ground cell: “At least” 1 bonded one. The total number of the bonded cells must meet the 1-ohm or 3-ohm VSS bus resistance requirement. PVSS2DGZ_V/H_G, PVSS3DGZ_V/H_G digital I/O ground cell: “At least” 1 bonded one. The total number of the bonded cells must meet the SSO requirement as well as the 1-ohm or 3-ohm VSSPST/ VSS bus resistance requirement. PVDD1ANA_V/H_G core-voltage analog power cell: When core-voltage analog power cell is needed, PVDD1ANA_V/H_G can be an option. The minimal required cell number for bonded PVDD1ANA_V/H_G is 3 for ESD robustness. For instance, place three PVDD1ANA cells together and triple bond them. PVDD2ANA_V/H_G IO-voltage analog power cell: When IO-voltage analog power cell is needed, PVDD2ANA_V/H_G can be an option. The minimal required cell number for bonded TSMC N28 General I/O Library Application Note 33 TSMC Confidential Information 977746 Muse\ Semiconductor\ LLC 03/28/2019 VDDPST Security C - TSMC Secret PVDD2ANA_V/H_G is 2 for ESD robustness. For instance, place two PVDD2ANA cells together and double bond them. PVSS1ANA_V/H_G, PVSS2ANA_V/H_G analog ground cell: When analog ground cell is needed, PVSSxANA_V/H_G can be an option. It can be used in pair with PVDDxANA_V/H_G analog power. Note: PVDDxANA_V/H_G/PVSSxANA_V/H_G cannot be implemented alone in a single domain without bonded digital power and bonded digital ground cells. Please refer to Chapter 2 for details. 8.7.1 PCLAMPC_V/H_G ESD Core-Clamp Macro When to use it: While using PVDD1ANA_V/H_G (core-voltage analog power), it is required to use at least one PCLAMPC_V/H_G together with PVDD1ANA_V/H_G analog power and PVSS1ANA_V/H_G analog ground pair. PCLAMP_G ESD I/O-Clamp Macro e\ us M 8.7.2 n io at m or LC nf lI \L tia or en 746 uct fid 77 nd 9 on 9 co 01 i 2 C m 28/ C Se 03/ When to use it: While using PVDD2ANA_V/H_G (IO-voltage analog power), it is required to use at least one PCLAMP_G together with PVDD2ANA_V/H_G analog power and PVSS2ANA_V/H_G analog ground pair. Note: The PCLAMP_G can be implemented together with PVDD2ANA_V/H_G and PVSS2ANA_V/H_G, only if PVDD2ANA_V/H_G is used as the I/O-voltage analog power cell. It is prohibited to use PCLAMP_G if PVDD2ANA_V/H_G is used as the I/O-voltage analog signal cell. 8.7.3 Implement PCLAMPC_V/H_G / PCLAMP_G Macro on the Core Side The procedure to implement PCLAMPC_V/H_G / PCLAMP_G macro are as follows, where x can be “1” or “2”, depending on the type of analog power & ground pair in use. Step 1: Place PVDDxANA_V/H_G analog power and PVSSxANA_V/H_G analog ground cell of the same type (i.e. either for core voltage or I/O voltage) together. Step 2: Place PCLAMPC_V/H_G cell in between (the PVDD1ANA_V/H_G analog power & PVSS1ANA_V/H_G analog ground pair) and internal core; or place PCLAMP_G cell in between (the PVDD2ANA_V/H_G analog power & PVSS2ANA_V/H_G analog ground pair) and internal core Step 3: Connect from AVDD pin of the PVDDxANA_V/H_G to VDDESD pin of the PCLAMPC_V/H_G / PCLAMP_G macro. Step 4: Connect from AVSS pin of PVSSxANA_V/H_G to VSSESD pin of the PCLAMPC_V/H_G / PCLAMP_G macro. Step 5: Connect from VDDESD and VSSESD rails of PCLAMPC_V/H_G / PCLAMP_G macro to internal power rail and ground rail respectively, as illustrated in Figure 8.6. TSMC N28 General I/O Library Application Note 34 TSMC Confidential Information 977746 Muse\ Semiconductor\ LLC 03/28/2019 The ESD Clamp Macro M TS 8.7 Security C - TSMC Secret Analog Macro To internal core power and ground PCLAMPC_V/H_G/PCLAMP_G Metal connection between Analog P/G and the PCLAMP macro Std I/Os Std I/Os e\ us M Figure 8.6: Illustration of PCLAMPx Macro Implementation 8.8 The PCORNER_G Corner Cell It is required to implement the bonded digital I/O ground (PVSS2DGZ_V/H_G, PVSS3DGZ_V/H_G) right next to the PCORNER_G corner cell (on both sides) for ESD consideration. Please refer to Section 6.2 for details. 8.9 The PRCUT_G Power-Cut Cell for Digital Domain Separation It is required to implement the PRCUT_V/H_G power-cut cell between TWO digital I/O domains using the same I/O library. Please refer to Section 6.3 for details. It is also required to implement the bonded digital ground (PVSS1DGZ_V/H_G, PVSS3DGZ_V/H_G) beside the PRCUT_V/H_G. 8.10 The PENDCAP_G Guard-Band Closure Cell The PENDCAP_G guard-band-closure cell is to insert the guard ring on the domain edge. Different from the PRCUT_G power-cut cell that can close the guard bands on both sides of power-cut cell, PENDCAP_G can close the guard band on one side. Please refer to Section 6.4 for details. 8.11 How to Integrate TSMC I/O with Other IP VSS is the global ESD bus for TSMC I/O. To integrate TSMC I/O with other IP, it is required to comply with the following rules to avoid the detrimental application issue resulting from inappropriate integration. Note 1. TSMC cannot guarantee the ESD & latch-up if the TSMC I/O is mixed with other IP in a common domain. TSMC N28 General I/O Library Application Note 35 TSMC Confidential Information 977746 Muse\ Semiconductor\ LLC 03/28/2019 n io at m or LC nf lI \L tia or en 746 uct fid 77 nd 9 on 9 co 01 i 2 C m 28/ C Se 03/ M TS PVDDxANA_V/H_G + PVSSxANA_V/H_G Security C - TSMC Secret 2. It is required to implement the PENDCAP_G guard-band closure cell between the digital I/O domain and other IP. Furthermore, it is required to comply with the application requirements stated in Section 6.4. 3. As to the power/ground metal connection at the domain interface, it is necessary to avoid the 90-degree metal bus connection as illustrated in Figure 8.7. For ESD robustness, please adopt the 135-degree metal connection as illustrated in Figure 8.8. 4. It is required to connect the global ESD bus of other IP to the VSS bus of TSMC I/O (e.g. through mesh, or direct metal connection). The VSS connection must comply with the "Maximum ESD Current Density for Via, and Metal" table in DRM. e\ us M n io at m or LC nf lI \L tia or en 746 uct fid 77 nd 9 on 9 co 01 i 2 C m 28/ C Se 03/ M TS TSMC Confidential Information 977746 Muse\ Semiconductor\ LLC 03/28/2019 5. Other IP design & implementation must comply with TSMC ESD rules/guidelines. Figure 8.7: Illustration of the 90-degree Metal Connection TSMC N28 General I/O Library Application Note 36 Security C - TSMC Secret 37 TSMC N28 General I/O Library Application Note TSMC Confidential Information 977746 Muse\ Semiconductor\ LLC 03/28/2019 e\ n io at m or LC nf lI \L tia or en 746 uct fid 77 nd 9 on 9 co 01 i 2 C m 28/ C Se 03/ M TS us M Figure 8.8: Illustration of the 135-degree Metal Connection Security C - TSMC Secret Chapter 9 The N28 Analog I/O The analog I/O cells are available from the N28 hybrid I/O library, featuring a single library that contains both analog I/O and the corresponding digital I/O cells. For the application requirements on digital I/O, please refer to Section 1.5 for read guide. This chapter covers the following topics: The PDB3A_V/H_G, PDB3AC_V/H_G analog I/O signal cell The PVDD3A_V/H_G, PVDD3AC_V/H_G analog power cell The PVSS3A_V/H_G, PVSS3AC_V/H_G analog ground cell The PVDD1A_V/H_G, PVDD1AC_V/H_G analog power cell The PVSS1A_V/H_G, PVSS1AC_V/H_G analog ground cell The PVSS2A_V/H_G, PVSS2AC_V/H_G global ESD ground bus (VSS) supply The PFILLERxA_G, PCORNERA_G, PRCUTA_G, PENDCAPA_G accessory cell n io at m or LC nf lI \L tia or en 746 uct fid 77 nd 9 on 9 co 01 i 2 C m 28/ C Se 03/ us M Analog I/O Power / Ground Rail e\ 9.1 This section provides information on the analog I/O power/ground rail configuration. Please make sure that the power & ground rail(s) of each analog I/O cell are well connected through cell abutment. TAVDD/TACVDD Power Bus: As indicated in Figure 9.2, the analog I/O is powered by the TAVDD/TACVDD power rail, where TAVDD is for analog domain supplied by the I/O voltage, whereas TACVDD is for analog domain supplied by the core voltage. VSS Global ESD Bus: VSS of the analog I/O is used as the global ESD ground bus. TAVSS/TACVSS Ground Bus: As indicated in Figure 9.2, the TAVSS/ TACVSS bus is only implemented within the staggered analog I/O, where TAVSS is for analog domain supplied by the I/O voltage, whereas TACVSS is for analog domain supplied by the core voltage. 9.2 PDB3A_V/H_G, PDB3AC_V/H_G Analog Signal Cell Figure 9.1 illustrates the general structure of (PDB3A_V/H_G, PDB3AC_V/H_G) analog signal cell with the ESD clamping device to power/ground bus. Power ESD device To PAD side To analog macro Signal Input Output ESD device Ground Figure 9.1: The PDB3A/AC_V/H_G General Structure TSMC N28 General I/O Library Application Note 38 TSMC Confidential Information 977746 Muse\ Semiconductor\ LLC 03/28/2019 The Analog I/O Power/Ground Rail M TS Security C - TSMC Secret Table 9.1: Analog Signal Cell Category Domain Type For the domain supplied by core voltage In-Pairs PDB3AC_V/H_G Pair up with PVDD3AC_V/H_G, PVSS3AC_V/H_G, PVSS2AC_V/H_G, PCLAMPC_V/H_G in the corevoltage analog domain separated by PRCUTA_G power-cut cell or PENDCAPA_G guard-ring closure cell. PDB3A_V/H_G M TS Pair up with PVDD3A_V/H_G, PVSS3A_V/H_G, PVSS2A_V/H_G, PCLAMP_G in the I/O-voltage analog domain separated by PRCUTA_G power-cut cell or PENDCAPA_G guard-ring closure cell. The Figure 9.2 below depicts the ESD scheme of PDB3A_V/H_G / PDB3AC_V/H_G with staggered n io at m or LC nf lI \L tia or en 746 uct fid 77 nd 9 on 9 co 01 i 2 C m 28/ C Se 03/ AIO (to Analog Macro) us M AIO (to Analog Macro) VSS (Global ESD Bus) VSS (Global ESD Bus) e\ ESD Device ESD Device TAVDD (Power Bus) TACVDD (Power Bus) ESD Device ESD Device ESD Device ESD Device TACVSS (ESD Ground Bus) TAVSS (ESD Ground Bus) To PAD PDB3A_V/H_G To PAD PDB3AC_G (for Analog Domain supplied by I/O Voltage) aspect ratio. (for Analog Domain supplied by Core Voltage) Figure 9.2: The ESD Scheme of Analog I/O Signal Cell Note 1. Due to the poly orientation restriction in the N28 design rule, the cells containing “_V” are for vertical usage, while the ones containing “_H” are for horizontal usage. 2. The equivalent capacitance of the I/O cell can be obtained from the library datasheet or Synopsys timing power design kit. It is necessary to verify by simulation if the PDB3A/AC_V/H_G is suitable for your application. 3. For signal integrity, the signal swing cannot exceed the power rail voltage (Core or I/O) by 0.3V, nor go under the ground rail voltage by 0.3V. 4. If PDB3A/AC_V/H_G is connected to the internal gate, it is required to insert the secondary ESD protection devices as illustrated in Figure 9.3 to ensure optimal ESD protection. 5. If PDB3A/AC_V/H_G is connected to the internal drain, it is required to either insert the secondary ESD protection devices as illustrated in Figure 9.5, or follow the ESD guideline TSMC N28 General I/O Library Application Note 39 TSMC Confidential Information 977746 Muse\ Semiconductor\ LLC 03/28/2019 For the domain supplied by I/O voltage Cell Name Security C - TSMC Secret specified in TSMC Design Rule Manual. 6. The PDB3AC_V/H_G can only be connected to internal core device; whereas the PDB3A_V/H_G can only be connected to internal I/O device. The following are the conditions where the PDB3A_V/H_G / PDB3AC_V/H_G is connected to internal analog macro. Condition 1: Connect the PDB3A_V/H_G / PDB3AC_V/H_G to the internal gate AIO ESD NMOS e\ Signal Input Output PDB3A/AC_V/H_G Figure 9.3: The Secondary ESD Protection Device to Internal Gate Passive load or active load (note: for active load, the “stacked” devices is needed Analog Signal Out to internal circuitry Analog Signal In from PDB3A/AC Analog Signal Out to internal circuitry Analog Signal In from PDB3A/AC Analog Signal Out to internal circuitry Analog Signal In from PDB3A/AC The Allowed Analog Victim Type The Prohibited Analog Victim Type Figure 9.4: The Allowed Analog Victim Type Condition 2: Connect the PDB3A_V/H_G / PDB3AC_V/H_G to the drain side of internal device It is required to implement your own secondary ESD protection device (with proper dimensions) as specified in the ESD guideline of TSMC Design Rule Manual, as illustrated in Figure 9.5. TSMC N28 General I/O Library Application Note 40 TSMC Confidential Information 977746 Muse\ Semiconductor\ LLC 03/28/2019 us M AIO Added secondary ESD devices n io at m or LC nf lI \L tia or en 746 uct fid 77 nd 9 on 9 co 01 i 2 C m 28/ C Se 03/ M TS Figure 9.3 illustrates that it is required to implement your own secondary ESD protection device (with proper dimensions) as specified in the ESD guideline of TSMC Design Rule Manual. Note that PDB3A_V/H_G must get connected to internal I/O device, and PDB3AC_V/H_G must get connected to internal core device. Figure 9.4 denotes the allowed analog victim type that needs your attention. Security C - TSMC Secret Added secondary ESD devices AIO AIO ESD Signal Input Output n io at m or LC nf lI \L tia or en 746 uct fid 77 nd 9 on 9 co 01 i 2 C m 28/ C Se 03/ M TS Figure 9.5: The Secondary ESD Protection Device to Internal Drain e\ us M However, if the secondary ESD protection device cannot be implemented in your application, it is a must to ensure that the internal P & N transistors (as indicated in yellow) with drain side connected to the analog signal pin closely follow the ESD guidelines of TSMC Design Rule Manual. 9.3 PVDD3A_V/H_G / PVDD3AC_V/H_G Analog Power Cell The PVDD3A_V/H_G / PVDD3AC_V/H_G is the analog power supply to both analog macro and I/O power rail, where the PVDD3AC_V/H_G is to supply both analog macro and TACVDD I/O power rail with core voltage, while PVDD3A_V/H_G is to supply both analog macro and TAVDD I/O power rail with I/O voltage. The Figure 9.6 depicts the ESD scheme of PVDD3A_V/H_G and PVDD3AC_V/H_G cell. AVDD (to Analog Macro) AVDD (to Analog Macro) Dummy resistor Dummy resistor VSS (Global ESD Bus) ESD Device VSS (Global ESD Bus) ESD Device TAVDD (Power Bus) ESD Device TACVDD (Power Bus) ESD Device TACVSS (ESD Ground Bus) TAVSS (ESD Ground Bus) PVDD3A_V/H_G PVDD3AC_V/H_G (for Analog Domain supplied by I/O Voltage) (for Analog Domain supplied by Core Voltage) Figure 9.6: The ESD Scheme for Analog Power Cell Note: 1. It is prohibited to mix PVDD3A_V/H_G and PVDD3AC_V/H_G in a common domain. 2. For the powers supplied by the power cells or connected to power clamp macro cells from the TSMC N28 General I/O Library Application Note 41 TSMC Confidential Information 977746 Muse\ Semiconductor\ LLC 03/28/2019 PDB3A/AC_V/H_G Security C - TSMC Secret TSMC I/O libraries, the ramp-up must be longer than 10us. Table 9.2: Analog Power Cell Category Cell Name Port to core Port to PAD Power & Ground Bus Core Voltage PVDD3AC_V/H_G AVDD TACVDD TACVDD, VSS, TACVSS I/O Voltage PVDD3A_V/H_G AVDD TAVDD TAVDD, VSS, TAVSS M TS 9.4 PVSS3A_V/H_G, PVSS3AC_V/H_G Analog Ground Cell n io at m or LC nf lI \L tia or en 746 uct fid 77 nd 9 on 9 co 01 i 2 C m 28/ C Se 03/ us M Figure 9.7 presents the PVSS3A_V/H_G, PVSS3AC_V/H_G ESD scheme. The PVSS3AC_V/H_G is to supply both analog macro and TACVSS I/O ground rail and needs to be implemented in the core-voltage analog domain, while the PVSS3A_V/H_G is to supply both analog macro and TAVSS I/O ground rail and needs to be implemented in the I/O-voltage analog domain. AVSS (to Analog Macro) AVSS (to Analog Macro) e\ Dummy resistor Dummy resistor VSS (Global ESD Bus) VSS (Global ESD Bus) ESD Device ESD Device TAVDD (Power Bus) TACVDD (Power Bus) ESD Device ESD Device TACVSS (ESD Ground Bus) TAVSS (ESD Ground Bus) PVSS3A_V/H_G PVSS3AC_V/H_G (for Analog Domain supplied by I/O Voltage) (for Analog Domain supplied by Core Voltage) Figure 9.7: The ESD Scheme for Analog Ground Cell Note: PVSS3A_V/H_G needs to be used with PVDD3A_V/H_G, while PVSS3AC_V/H_G needs to be used with PVDD3AC_V/H_G. Table 9.3: Analog Ground Cell Category Analog Domain Cell Name Port to core Port to PAD Power & Ground Bus Core Voltage PVSS3AC_V/H_G AVSS TACVSS TACVDD, VSS, TACVSS I/O Voltage PVSS3A_V/H_G AVSS TAVSS TAVDD, VSS, TAVSS TSMC N28 General I/O Library Application Note 42 TSMC Confidential Information 977746 Muse\ Semiconductor\ LLC 03/28/2019 Analog Domain Security C - TSMC Secret 9.5 PVDD1A_V/H_G / PVDD1AC_V/H_G Analog Power Cell The PVDD1A_V/H_G / PVDD1AC_V/H_G is the analog power supply to the analog macro, where the PVDD1AC_V/H_G is to supply the analog macro with core voltage, while the PVDD1A_V/H_G is to supply the analog macro with I/O voltage. Figure 9.8 depicts the ESD scheme of PVDD1A_V/H_G and PVDD1AC_V/H_G cell. AVDD (to Analog Macro) n io at m or LC nf lI \L tia or en 746 uct fid 77 nd 9 on 9 co 01 i 2 C m 28/ C Se 03/ M TS AVDD (to Analog Macro) VSS (Global ESD Bus) VSS (Global ESD Bus) us M ESD Device ESD Device ESD Device ESD Device TAVDD (Power Bus) e\ TACVDD (Power Bus) TACVSS (ESD Ground Bus) TAVSS (ESD Ground Bus) PVDD1A_V/H_G (for Analog Macro supplied by I/O Voltage) PVDD1AC_V/H_G (for Analog Macro supplied by Core Voltage) Figure 9.8: The ESD Scheme for PVDD1A_V/H_G / PVDD1AC_V/H_G Note that there is no connection between the ‘AVDD’ of the PVDD1A_V/H_G / PVDD1AC_V/H_G and the TAVDD / TACVDD power rail. As such, PVDD1A_V/H_G and PVDD1AC_V/H_G can be used in the same power domain. That is, PVDD1A_V/H_G can be directly placed in an analog power domain supplied with core voltage. Similarly, PVDD1AC_V/H_G can be used in an analog power domain supplied with I/O voltage, for example 1.8V. Note: 1. PVDD1AC_V/H_G is to supply a core analog macro made of core devices, while PVDD1A_V/H_G is to supply a core analog macro made of I/O devices. 2. For the powers supplied by the power cells or connected to power clamp macro cells from the TSMC I/O libraries, the ramp-up must be longer than 10us. 9.6 PVSS1A_V/H_G, PVSS1AC_V/H_G Analog Ground Cell Figure 9.9 presents the PVSS1A_V/H_G, PVSS1AC_V/H_G ESD scheme. The PVSS1A_V/H_G / PVSS1AC_V/H_G is the analog ground supply to the analog macro. The PVSS1AC_V/H_G needs to TSMC N28 General I/O Library Application Note 43 TSMC Confidential Information 977746 Muse\ Semiconductor\ LLC 03/28/2019 PVDD1A_V/H_G / PVDD1AC_V/H_G is to supply the analog macro with dedicated power, and cannot be used for Tx/Rx power and ground. For this case, it is necessary to use the PVDD3A_V/H_G / PVDD3AC_V/H_G. Security C - TSMC Secret be used with the PVDD1AC_V/H_G. The PVSS1A_V/H_G needs to be used with the PVDD1A_V/H_G. TSMC Confidential Information 977746 Muse\ Semiconductor\ LLC 03/28/2019 n io at m or LC nf lI \L tia or en 746 uct fid 77 nd 9 on 9 co 01 i 2 C m 28/ C Se 03/ M TS e\ us M TSMC N28 General I/O Library Application Note 44 Security C - TSMC Secret AVSS (to Analog Macro) AVSS (to Analog Macro) VSS (Global ESD Bus) ESD Device VSS (Global ESD Bus) ESD Device TAVDD (Power Bus) ESD Device ESD Device ESD Device TACVSS (ESD Ground Bus) PVSS1A_V/H_G PVSS1AC_V/H_G n io at m or LC nf lI \L tia or en 746 uct fid 77 nd 9 on 9 co 01 i 2 C m 28/ C Se 03/ M TS TAVSS (ESD Ground Bus) (for Analog Macro supplied by I/O Voltage) (for Analog Macro supplied by Core Voltage) 9.7 e\ us M Figure 9.9: The ESD Scheme for PVSS1A_V/H_G / PVSS1AC_V/H_G PVSS2A_V/H_G, PVSS2AC_V/H_G Global ESD Ground Bus VSS Supply The PVSS2A_V/H_G, PVSS2AC_V/H_G cell is to supply the VSS global ESD bus in analog I/O domain. Figure 9.10 presents the (PVSS2A_V/H_G, PVSS2AC_V/H_G) ESD scheme. Note that PVSS2A_V/H_G and PVSS2AC_V/H_G have pin out to core, and can be used to supply the common ground to the core region, as well as to supply the global ESD ground bus, VSS, in the analog domain. It is required to implement the “bonded” PVSS2A_V/H_G in the I/O-voltage analog domain, and the “bonded” PVSS2AC_V/H_G in the core-voltage analog domain. Please refer to Chapter 10 for details. VSS (Global ESD Bus) VSS (Global ESD Bus) TAVDD (Power Bus) TACVDD (Power Bus) ESD Device ESD Device ESD Device ESD Device TACVSS (ESD Ground Bus) TAVSS (ESD Ground Bus) PVSS2A_V/H_G PVSS2AC_V/H_G (for Analog Domain supplied by I/O Voltage) (for Analog Domain supplied by Core Voltage) Figure 9.10: The ESD Scheme for the VSS ESD Ground Bus Supply Note: It is prohibited to mix PVSS2A_V/H_G with PVSS2AC_V/H_G in a common domain. TSMC N28 General I/O Library Application Note 45 TSMC Confidential Information 977746 Muse\ Semiconductor\ LLC 03/28/2019 ESD Device TACVDD (Power Bus) Security C - TSMC Secret Table 9.4: The VSS ESD Bus Supply Cell Category Analog Domain Cell Name Port to core Port to PAD Power & Ground Bus Core Voltage PVSS2AC_V/H_G VSS VSS TACVDD, VSS, TACVSS I/O Voltage PVSS2A_V/H_G VSS VSS TAVDD, VSS, TAVSS 9.8.1 The PFILLERxA_G Filler Cell M n io at m or LC nf lI \L tia or en 746 uct fid 77 nd 9 on 9 co 01 i 2 C m 28/ C Se 03/ PFILLERxA_G, PCORNERA_G, PRCUTA_G, PENDCAPA_G Accessory Cell us The filler cell for analog domain is named PFILLERxA_G, where x is related to the pr-boundary width. For example the PFILLER1A_G is 1 μm wide; PFILLER05A_G is 0.5 μm wide. e\ It is required to insert the wide fillers first and then the narrow fillers afterwards. To avoid the metalslot-rule violation, do not only use narrow filler cells to fill the large I/O space. For example, to fill 30μm space between two analog I/O cells, use one 20μm pitch filler cell (PFILLER20A_G) and one 10μm pitch filler cell (PFILLER10A_G) instead of using 6 “5μm pitch” filler cells (PFILLER5A_G). PADxxNAU PADxxGAU PFILLERxA_G Figure 9.11: The Filler-Cell Implementation For ESD robustness, if the empty space is longer than one analog I/O cell width, we strongly recommend to implement the dummy analog power cell (PVDD3A_V/H_G, PVDD3AC_V/H_G) together with the PFILLERxA_G filler cells to fill the gap, where dummy means “not-bonded”, but TSMC N28 General I/O Library Application Note 46 TSMC Confidential Information 977746 Muse\ Semiconductor\ LLC 03/28/2019 M TS 9.8 Security C - TSMC Secret used as filler cell. Figure 9.12 is an example. However, doing so would increase the stand-by leakage current that results from the analog power cells. Please justify it based on your leakage spec. Filler cell I/O I/O I/O I/O Figure 9.12: The Dummy Analog Power Cell Implementation us M The PCORNERA_G Corner Cell e\ 9.8.2 The N28 corner cell for analog domain is named PCORNERA_G. It is required to implement the PCORNERA_G corner cell available from the I/O library in the analog I/O domain that spans two sides of the chip. Furthermore, it is required to implement the bonded analog ground (PVSS3A_V/H_G, PVSS3AC_V/H_G) right next to each side of the PCORNERA_G corner cell for ESD robustness. 9.8.3 The PRCUTA_G Power-Cut Cell for Analog-Digital I/O Domain Separation or Analog-Analog I/O Domain Separation For domain separation, it is required to implement PRCUTA_G power-cut cell between two analog I/O domains, or, between analog I/O domain and the corresponding digital I/O domain. Similar to PRCUT_G, the PRCUTA_G power-cut cell contains no device, where all the metal bus is cut, except that the VSS bus (the global ESD bus) stays connected through the PRCUTA_G cell. Please refer to Figure 9.13 for illustration. TSMC N28 General I/O Library Application Note 47 TSMC Confidential Information 977746 Muse\ Semiconductor\ LLC 03/28/2019 n io at m or LC nf lI \L tia or en 746 uct fid 77 nd 9 on 9 co 01 i 2 C m 28/ C Se 03/ M TS Dummy power cell Security C - TSMC Secret VSS TAVDD or TACVDD TAVDD or TACVDD TAVSS or TACVSS TAVSS or TACVSS PRCUTA_G PRCUTA_G Analog Domain II Figure 9.13: The PRCUTA_G Scheme & Layout e\ us M n io at m or LC nf lI \L tia or en 746 uct fid 77 nd 9 on 9 co 01 i 2 C m 28/ C Se 03/ Guard band closure on both sides 1. For the robust cross-domain ESD & latch-up protection, it is required to implement the analog power (PVDD3A_V/H_G, PVDD3AC_V/H_G) or analog ground (PVSS3A_V/H_G, PVSS3AC_V/H_G) right next to the PRCUTA_G power-cut cell. Doing so can shorten the ESD discharge path across different domains. 2. There is no limitation on the number of I/O domains separated by the PRCUTA_G or PRCUT_G power-cut cell, as long as domains on both sides of PRCUTA_G or PRCUT_G are implemented with I/O cells. If either side of the power-cut cell is implemented with the 3rd party IP, TSMC cannot guarantee the cross-domain ESD/latch-up performance. 9.8.4 The PENDCAPA_G Guard-Band Closure Cell When analog I/O cells are not implemented in a ring (e.g. L shape), it is required to implement the PENDCAPA_G guard-band-closure cell on the analog domain edge for latch-up protection. Different from the PRCUTA_G that can close the guard bands on both sides of power-cut cell, the PENDCAPA_G can close the guard band on one side. In other words, it is required to mirror PENDCAPA_G horizontally to close the guard band on the other side of the domain edge. Please refer to Figure 9.14 for illustration. TSMC N28 General I/O Library Application Note 48 TSMC Confidential Information 977746 Muse\ Semiconductor\ LLC 03/28/2019 M TS Analog Domain I Note VSS Security C - TSMC Secret The mirrored PENDCAPA_G N28 analog I/Os PENDCAPA_G Note M n io at m or LC nf lI \L tia or en 746 uct fid 77 nd 9 on 9 co 01 i 2 C m 28/ C Se 03/ Figure 9.14: The PENDCAPA_G Cell Implementation us 1. When using PENDCAPA_G cell, please fulfill the rules described in a separate file named “ApplicationGuide_N28_AAIO” , which is available on tsmc online. e\ 2. Please make sure that the N-Well /P-Sub of the circuit layout around the PENDCAPA_G cell is connected to power/ground solidly. It is recommended to have the connection resistance within 1 ohm. 3. The I/O library design uses VSS as global ESD bus. Therefore, VSS bus of all the I/O cells must be connected together for ESD robustness even if PENDCAPA_G is in use. It is required to have VSS connection complied with the "Maximum ESD Current Density for Via, and Metal" table in DRM. TSMC N28 General I/O Library Application Note 49 TSMC Confidential Information 977746 Muse\ Semiconductor\ LLC 03/28/2019 M TS It is required to implement either analog Power or analog Ground cell right beside the PENDCAPA_G cell Security C - TSMC Secret Chapter 10 The ESD & Latch-Up Considerations for N28 Analog I/O This chapter provides information about the following topics: Analog I/O Placement The Dummy Analog Power/Ground Cell Insertion The Power/Ground Metal Bus Resistance Requirement The 20pF Requirement The Required Analog Power/Ground Cell Number The ESD Clamp Macro for Analog Power-Ground Pair The Power-Cut Cell and Guard-Band Closure Cell How to Integrate TSMC analog I/O with the 3rd Party IP C C on fid us M 10.1 The ESD Network e\ tia m at n io ESD Clamp or ESD Clamp ESD Clamp ESD Clamp ESD clamp ESD clamp ESD clamp TACVDD LC ESD Clamp nf ESD Clamp ESD Clamp ESD Clamp \L VDDPST ESD Clamp lI ESD Clamp or ESD Clamp VSS ct ESD Clamp AVSS AVDD du ESD Clamp PCLAMPC_V/H_G AVSS 19 ESD Clamp 20 8/ VSS To Analog Macro 46 AVDD AVSS VDD en AIO 77 PCLAMP_G /2 AVSS on 03 PCLAMPC_V/H_G AVDD To Analog Macro ic To Analog Macro 97 m Se TSMC analog I/O, power, ground cells contain the ESD clamp circuitry to construct the ESD protection network as illustrated in Figure 10.1 (where the I/O rail is supplied with core voltage) and in Figure 10.2 (where the I/O rail is supplied with I/O voltage). ESD Clamp ESD Clamp VSSPST TACVSS domain + internal analog ground for internal analog analog macro macro VSS rail macro PVSS1A_V/H_G PRCUTA_G Core level voltage for internal PVSS1AC_V/H_G I/O level voltage for PVDD1AC_V/H_G PVSS2AC_V-H_G Analog PVDD1A_V/H_G PDB3AC_V/H_G PVSS3AC_V/H_G Analog I/O PVDD3AC_V/H_G PRCUTA_G Digital Domain Other Analog Domain Or Digital Domain Core level voltage for analog It is required to implement the secondary ESD protection device together with PDB3AC_V/H_G analog signal cell Figure 10.1: ESD Network for Analog I/O, with analog I/O ring supplied with core voltage TSMC N28 General I/O Library Application Note 50 TSMC Confidential Information 977746 Muse\ Semiconductor\ LLC 03/28/2019 The ESD Network M TS Security C - TSMC Secret To Analog Macro To Analog Macro PCLAMP_G PCLAMP_G AVDD To Analog Macro AVSS AVDD VSS AIO PCLAMPC_V/H_G AVSS AVDD AVSS VDD VSS VSS ESD Clamp ESD Clamp ESD Clamp ESD Clamp ESD Clamp ESD Clamp ESD Clamp VDDPST TAVDD ESD Clamp VSSPST TAVSS PVSS1AC_V/H_G PVDD1AC_V/H_G PVSS1A_V/H_G PRCUTA_G Other Analog Domain Or Digital Domain Analog I/O level voltage for Core level voltage for internal ground for internal analog analog macro Analog I/O e\ macro ESD Clamp ESD Clamp PVDD1A_V/H_G domain + internal analog ESD clamp ESD clamp ESD Clamp PVSS2A_V-H_G I/O level voltage for analog ESD Clamp n io at m or LC nf lI \L tia or en 746 uct fid 77 nd 9 on 9 co 01 i 2 C m 28/ C Se 03/ PDB3A_V/H_G us M PVSS3A_V/H_G PVDD3A_V/H_G PRCUTA_G Digital Domain ESD Clamp ESD Clamp M TS ESD clamp ESD Clamp TSMC Confidential Information 977746 Muse\ Semiconductor\ LLC 03/28/2019 ESD Clamp VSS rail macro It is required to implement the secondary ESD protection device together with PDB3AC_V/H_G analog signal cell Figure 10.2: ESD Network for Analog I/O, with analog I/O ring supplied with I/O voltage 10.2 The Global ESD Bus TSMC I/O design is using VSS as global ESD bus. VSS global ESD bus Core I/O ring Die edge Figure 10.3: Global ESD Bus – VSS To achieve robust ESD protection, it is required to have VSS pin of PVSS2A_G/PVSS2AC_G (in analog domain) connected to VSS core ground mesh to make the VSS as chip-level global. TSMC N28 General I/O Library Application Note 51 Security C - TSMC Secret L-Shape I/O Placement U-Shape I/O Placement Core P/G Mesh Core P/G Mesh When the I/O cell placement does not form a ring (e.g. L shape), it is required to have VSS connection from the I/O domain to the 3rd party IP nearby. All the connections mentioned above must comply with "Maximum ESD Current Density for Via, and Metal" table in DRM. e\ us 10.3 The Dummy Analog Power/Ground Cell Insertion To achieve short ESD discharge path, it is strongly suggested to replace some of the filler cells with the dummy analog power or ground cells if space is allowed, where dummy means “not bonded”, simply used as the filler cells. Please refer to Figure 10.3 for illustration. Note that the analog power/ground cells contain ESD clamp circuitry; whereas the filler cells do not. At the package phase, dummy analog power/ground is not bonded, so that the total pin count would not get impacted. However, the only trade-off is an increase in the stand-by leakage current of the I/O Filler cell I/O I/O I/O Dummy power cell dummy analog power/ground cell. Please judge it based on the total stand-by leakage spec. Figure 10.3: Replace Filler Cells with Dummy Analog Power Cells TSMC N28 General I/O Library Application Note 52 TSMC Confidential Information 977746 Muse\ Semiconductor\ LLC 03/28/2019 n io at m or LC nf lI \L tia or en 746 uct fid 77 nd 9 on 9 co 01 i 2 C m 28/ C Se 03/ M TS M Figure 10.4: I/O Implementation in L Shape / U Shape Security C - TSMC Secret 10.4 The ESD Analog Power / Ground Metal Bus Resistance Requirement Similar to the resistance calculation for digital I/Os explained in section 8.4, the ESD power/ground metal bus resistance “R” from cell A to cell B can be calculated as illustrated in Figure 10.4. R = Rsheet x L/W, where Rsheet is available from the spice model card. Core M TS Cell B Bus Line L Cell A n io at m or LC nf lI \L tia or en 746 uct fid 77 nd 9 on 9 co 01 i 2 C m 28/ C Se 03/ “Bonded” pad “Bonded” pad e\ us M Figure 10.4: Illustration of Bus Resistance Calculation Within the same analog domain, it is required to ensure that the metal bus resistance CANNOT be greater than the value listed in the Table 10.1. TSMC N28 General I/O Library Application Note 53 TSMC Confidential Information 977746 Muse\ Semiconductor\ LLC 03/28/2019 W Security C - TSMC Secret PVDD3A/AC_V/H_G PVSS3A/AC_V/H_G PVSS2A/AC_V/H_G PVSS1DGZ_V/H_G PVDD1A/AC_V/H_G PVSS1A/AC_V/H_G 1 3 1 1 1 3 1 1 M TS 1 1 PVSS3A/AC_V/H_G 1 1 PVSS2A/AC_V/H_G PVSS1DGZ_V/H_G 3 3 3 1 1 1 3 1 1 1 3 Analog I/O PVDD3A/AC_V/H_G n io at m or LC nf lI \L tia or en 746 uct fid 77 nd 9 on 9 co 01 i 2 C m 28/ C Se 03/ us M PVDD1A/AC_V/H_G e\ PVSS1A/AC_V/H_G 3 1 1 3 3 1 1 Note that the bus resistance between analog I/O, PVDD1A/AC_V/H_G, PVSS1A/AC_V/H_G listed in the table above is for the case where the circuit is placed between these I/Os. There is no max. bus resistance if there is no circuit placed between them. The measurement method shown in Figure 10.5 is required when PVSS2A_V/H_G / PVSS2AC_V/H_G / PVSS1DGZ_V/H_G is not implemented in the same I/O domain. Core W Cell B VSS Bus Line Line L “Bonded” pad Cell A “Bonded” pad Figure 10.5 Measure the VSS Bus Resistance from any Analog Signal Cell to the Closest Bonded Digital Pre-Driver Ground Supply in the Adjacent Digital I/O Domain 10.5 The 20pF Requirement The minimal capacitive load between the “AVDD” pin on the core side of (PVDD3A_V/H_G, PVDD3AC_V/H_G, PVDD1A_V/H_G, PVDD1AC_V/H_G) and the “AVSS” pin on the core side of (PVSS3A_V/H_G, PVSS3AC_V/H_G, PVSS1A_V/H_G, PVSS1AC_V/H_G) is 20pF. TSMC N28 General I/O Library Application Note 54 TSMC Confidential Information 977746 Muse\ Semiconductor\ LLC 03/28/2019 Analog I/O Table 10.1: The max resistance between different I/O types Security C - TSMC Secret AVDD AVSS AVDD >20pF AVSS AVDD >20pF AIO AVSS >20pF VDD VSS VSS ESD Clamp ESD Clamp ESD Clamp ESD Clamp ESD Clamp ESD Clamp ESD Clamp VDDPST TACVDD ESD Clamp ESD Clamp ESD Clamp TACVSS PVSS2AC_V-H_G PVSS1AC_V/H_G PVDD1AC_V/H_G PVSS1A_V/H_G PVDD1A_V/H_G n io at m or LC nf lI \L tia or en 746 uct fid 77 nd 9 on 9 co 01 i 2 C m 28/ C Se 03/ PDB3AC_V/H_G PVSS3AC_V/H_G us M PVDD3AC_V/H_G PRCUTA_G PRCUTA_G M TS ESD clamp ESD clamp ESD Clamp VSSPST ESD Clamp ESD Clamp e\ If insufficient, it is required to insert the decoupling capacitor. Please refer to Figure 10.6 for illustration. Figure 10.6: The 20pF Requirement 10.6 The Required Analog Power / Ground Cell Number To achieve robust ESD/latch-up protection, it is required to implement: For I/O-voltage analog domain: PVDD3A_V/H_G analog power cell with I/O voltage: “at least” 2 bonded analog power to supply TAVDD analog power bus. The total number of the bonded PVDD3A_V/H_G must also meet the TAVDD bus resistance requirement. PVDD1A_V/H_G dedicated analog power cell with I/O voltage: If in use, “at least” 2 bonded PVDD1A_V/H_G dedicated analog power cells connected to the same package pin. PVSS3A_V/H_G analog ground cell: “at least” 1 bonded analog ground cell to supply TAVSS analog ground bus. The total number of the bonded PVSS3A_V/H_G must also meet the TAVSS bus resistance requirement. PVSS2A_V/H_G global ESD ground bus supply: this cell is needed in case the VSS bus resistance requirement cannot be fulfilled by the digital PVSS1DGZ_V/H_G. The PVSS2A_V/H_G / PVSS1DGZ_V/H_G must meet the VSS bus resistance requirement. For core-voltage analog domain: PVDD3AC_V/H_G analog power cell with core voltage: “at least” 3 bonded analog power to supply TACVDD analog power bus. The total number of the bonded PVDD3AC_V/H_G must meet the TACVDD bus resistance requirement. PVDD1AC_V/H_G dedicated analog power cell with core voltage: If in use, “at least” 3 bonded PVDD1AC_V/H_G dedicated analog power cells connected to the same package pin. PVSS3AC_V/H_G analog ground cell: “at least” 1 bonded analog ground cell to supply TACVSS analog ground bus. The total number of the bonded PVSS3AC_V/H_G must meet the TACVSS bus resistance requirement. TSMC N28 General I/O Library Application Note 55 TSMC Confidential Information 977746 Muse\ Semiconductor\ LLC 03/28/2019 ESD Clamp Security C - TSMC Secret PVSS2AC_V/H_G global ESD ground bus supply: this I/O is needed in case thethe VSS bus resistance requirement cannot be fullfilled by the digital PVSS1DGZ_V/H_G. The PVSS2AC_V/H_G / PVSS1DGZ_V/H_G must meet the VSS bus resistance requirement. 10.7 The ESD Clamp Macro 10.7.1 PCLAMPC_V/H_G ESD Core-Clamp Macro 10.7.2 PCLAMP_G ESD I/O-Clamp Macro e\ us M When to use it: While using PVDD3A_V/H_G (I/O-voltage analog power) and PVSS3A_V/H_G (the corresponding analog ground cell), or when using PVDD1A_V/H_G (dedicated I/O-voltage analog power) and PVSS1A_V/H_G (the corresponding dedicated analog ground cell), it is required to use at least one PCLAMP_G ESD clamp macro along with the I/O voltage analog power-ground pair. 10.7.3 Implement PCLAMPC_V/H_G, PCLAMP_G ESD Clamp Macro on the Core Side The implementation is identical to the implementation with digital PVDD1ANA_V/H_G / PVSS1ANA_V/H_G for PCLAMPC_V/H_G; identical to PVDD2ANA_V/H_G / PVSS2ANA_V/H_G for PCLAMP. Please refer to section 8.7 for details. 10.8 The PRCUTA_G Power-Cut Cell for Analog-Analog or Analog-Digital Domain Separation It is required to implement the PRCUTA_G power-cut cell between two analog I/O domains, or between the analog I/O domain and the corresponding digital I/O domain. Please refer to Section 9.8.2 for details. 10.9 The PCORNERA_G Corner Cell It is required to implement the bonded ground cell (PVSS3A_V/H_G / PVSS3AC_V/H_G) right next to each side of the PCORNERA_G corner cell for ESD robustness. Please refer to Section 9.8.3 for details. 10.10 The PENDCAPA_G Guard-Band Closure Cell The PENDCAPA_G guard-band-closure cell implementation is to close the guard band on the domain edge. Different from the PRCUTA_G power-cut cell that can close the guard bands on both sides of the power-cut cell, the PENDCAPA_G can close the guard band on one side. Please refer to Section 9.8.4 for details. 10.11 How to Integrate TSMC I/O with Other IP VSS is the global ESD bus for TSMC I/O. To integrate TSMC I/O with other IP, it is required to comply with the following rules. TSMC N28 General I/O Library Application Note 56 TSMC Confidential Information 977746 Muse\ Semiconductor\ LLC 03/28/2019 n io at m or LC nf lI \L tia or en 746 uct fid 77 nd 9 on 9 co 01 i 2 C m 28/ C Se 03/ M TS When to use it: While using PVDD3AC_V/H_G (core-voltage analog power) and PVSS3AC_V/H_G (the corresponding analog ground cell), or when using PVDD1AC_V/H_G (dedicated core-voltage analog power) and PVSS1AC_V/H_G (the corresponding dedicated analog ground cell), it is required to use at least one PCLAMPC_V/H_G ESD core-clamp macro along with the core voltage analog power-ground pair. Security C - TSMC Secret Note 1. TSMC cannot guarantee the ESD & latch-up if the TSMC I/O is mixed with other IP in a common domain. 2. It is required to implement the PENDCAPA_G guard-band closure cell between the analog I/O domain edge and other IP. Furthermore, it is required to comply with the application requirements stated in Section 9.8.4 for PENDCAPA_G placement. n io at m or LC nf lI \L tia or en 746 uct fid 77 nd 9 on 9 co 01 i 2 C m 28/ C Se 03/ 4. It is required to connect the global ESD bus of other IP to the VSS bus of TSMC I/O (e.g. through mesh, or direct metal connection). The VSS connection must comply with the "Maximum ESD Current Density for Via, and Metal" table in DRM. 5. Other IP design & implementation must comply with TSMC ESD rules/guidelines. e\ us M Figure 10.7: Illustration of the 135-degree Metal Connection TSMC N28 General I/O Library Application Note 57 TSMC Confidential Information 977746 Muse\ Semiconductor\ LLC 03/28/2019 M TS 3. As to the power/ground metal connection at the domain interface, it is necessary to avoid the 90-degree metal bus connection. For ESD robustness, please adopt the 135-degree metal connection as illustrated in Figure 10.7. Security C - TSMC Secret Chapter 11 The Bond Pad for N28 I/O The bond pads compatible with N28 I/O cells are available from the tpbn28v library. This chapter covers the following topics: The Bond Pad Library The Naming Convention for the CUP Bond Pad and Flip Chip Bumps The Library Hierarchy The Bond Pad Type M TS 11.1 The Bond Pad Library n io at m or LC nf lI \L tia or en 746 uct fid 77 nd 9 on 9 co 01 i 2 C m 28/ C Se 03/ The I/O cell is designed to support either CUP wire bond or RDL flip chip in consideration of area saving, where the CUP bond pads for I/O and the flip chip bumps are available from the bond pad library. The TSMC N28 bond pad library naming follows the conventions below: M us [Category] –[geometry] – [layout style] e\ Category: TPB - bond pad library provides wire-bond pads and flip chip bumps. Geometry: N28 - TSMC N28 process. Layout style: V - combo layout style. As an example, TPBN28V can be decomposed as TPB-N28-V, which indicates TSMC bond pad library, in 28nm process with combo layout style. 11.2 The Naming Convention for the Bond Pad The naming convention for bond pad: PAD-[Pitch] - [Category] PAD: indicates bond pad or flip chip bump Pitch: x μm pitch for bond pad or x μm UBM width for bump Category: GU: staggered outer CUP wire-bond pads for digital I/O (Note that “outer” vs. “inner” is with respect to core.) NU: staggered inner CUP wire-bond pads for digital I/O APB: flip chip bump for AP RDL MTB: flip chip bump for RDL with top metal For examples, The PAD60GU is the staggered outer CUP pad (with 60um staggered pitch) for the I/O. The PAD60NU is the staggered inner CUP pad (with 60um staggered pitch) for the I/O. The PAD80APB is the bump cell with 80um x 80um UBM dimension for the AP RDL application. TSMC N28 General I/O Library Application Note 58 TSMC Confidential Information 977746 Muse\ Semiconductor\ LLC 03/28/2019 Security C - TSMC Secret The PAD80MTB is the bump cell with 80um x 80um UBM dimension for the MT RDL application. 11.3 The Library Hierarchy The N28 bond pad library design kits have two directories, namely “cup” for CUP wire bond, “fc” for flip-chip bump. fc directory MTRDL/Metal Scheme/ PADxAPB PADxMTB Figure 11.1 The Back-End Hierarchy of the Bond Pad Library 11.4 CUP Bond Pad Type It is required to insert the appropriate number of filler cell if the target pad pitch is bigger than the I/O pitch. It should also be noted that, depending on the pitch, the CUP bonding pad could extend over the I/O edge (towards chip edge) as well as the core region, therefore blocking some metal layers for place and route, it is necessary to first place the CUP bonding pads prior to P&R. Please refer to the I/O library release note for information. 11.4.1 The Staggered CUP Pads for I/O The I/O library name contains “GV” characters (e.g. tphn28hpmgv18), and the corresponding staggered CUP pads are PADxNU and PADxGU, where PADxNU is the staggered inner pad, and PADxGU is the staggered outer pad. The “inner” and “outer” are with respect to core as illustrated in Figure 11.2 To connect the CUP pad to I/O cell, it is required to instance the I/O and the corresponding bond pad at the same coordinates. TSMC N28 General I/O Library Application Note 59 TSMC Confidential Information 977746 Muse\ Semiconductor\ LLC 03/28/2019 Flip Chip Type APRDL e\ us M (Library Name: tpbn28v PADxNU PADxGU n io at m or LC nf lI \L tia or en 746 uct fid 77 nd 9 on 9 co 01 i 2 C m 28/ C Se 03/ The Bond Pad Library M TS cup directory Metal Scheme e.g. 9m/9M_6X2Z … … … Security C - TSMC Secret PAD60NU Figure 11.2 The PADxGU and PADxNU Staggered CUP Pads n io at m or LC nf lI \L tia or en 746 uct fid 77 nd 9 on 9 co 01 i 2 C m 28/ C Se 03/ Note e\ us M 1. For CUP wire-bond, after the CUP pad is implemented on top of the I/O cell, the CUP pad would extend toward CORE and die edge, respectively. TSMC N28 General I/O Library Application Note 60 TSMC Confidential Information 977746 Muse\ Semiconductor\ LLC 03/28/2019 M TS PAD60GU Security C - TSMC Secret Chapter 12 Applications This chapter covers the following topics: The Back-End Kit Directory CUP Wire Bond RDL Flip Chip Double I/O Rings AAIO (Area Array I/O) Application M TS 12.1 The Back-End Kit Directory n io at m or LC nf lI \L tia or en 746 uct fid 77 nd 9 on 9 co 01 i 2 C m 28/ C Se 03/ The I/O library design kit has “.tar.gz” file name extension (e.g. tphn28hpgv18_100a_gdsu6lm.tar.gz). After un-zip followed by un-tar, the following back-end directory would be generated: M /TSMCHOME/digital/Back_End/ design-kit type (e.g. gds) /libraryname_designkit version (e.g. tphn28hpgv18_100a) /mt_2 /metal layer number (e.g. 9lm) / design kit (the target file) e\ us Where mt_2 indicates that this particular design kit contains metals up to two metal layers below the target top metal. For instance, the gds under /mt_2/9lm/ directory contains metal layers up to metal 7, which is 2 metal layers below the target 9 metal layer tape-out. Table 12.1 lists the name of the back-end directory, where you can find the back-end design kit for CUP wire bond or RDL flip-chip application. Table 12.1: The Back-End Kit Directory Application CUP Wire Bond RDL Flip Chip I/O Back-End Kit mt_2 mt_2 Bond Pad Back-End Kit Cup Fc Note: Please do not use Apollo frame view (apf design kit) to stream out the gds. 12.2 CUP (Circuit under Pad) Wire Bond CUP stands for Circuit under Pad, which means, the bond pad is placed on top of the I/O cell, commonly known as the CUP wire-bond application. The CUP pad pin of the staggered I/O is located close to the center of the I/O cell. To connect the CUP pad to the I/O cell, it is required to instance the I/O and the corresponding bond pad at the same coordinates. Note 1. It is necessary to place the CUP bonding pads on top of the I/O prior to running P&R. 2. To achieve the desired metal scheme, it is required to correctly select the design kit from the applicable back-end directory, by referring to the back-end-directory table in the bond pad library release note for various metal scheme options. For Example: To tape out 1P6M (6 metal layers) with 4X1Z metal scheme, it is necessary to read the bond pad library release note, where there is table that shows how to realize 6M_4X1Z metal scheme by adopting the design kit from the applicable back-end directory. Please refer to Figure 12.1 for example. TSMC N28 General I/O Library Application Note 61 TSMC Confidential Information 977746 Muse\ Semiconductor\ LLC 03/28/2019 Security C - TSMC Secret n io at m or LC nf lI \L tia or en 746 uct fid 77 nd 9 on 9 co 01 i 2 C m 28/ C Se 03/ In this example, 1P6M with 4X1Z metal scheme can be achieved as follows: I/O: Adopt gds under “mt_2/6lm” directory. CUP pad: Adopt gds under “cup/6m/6M_4X1Z” directory. e\ us M Metal 4 VIA 3 Metal 3 VIA 2 Metal 2 VIA 1 Metal 1 Metals from I/O body Metal 6 64 VIA 5 Metal 6 64 VIA 5 Metal 5 4VIA 4 Metal 5 4VIA 4 Metal 4 VIA 3 Metal 3 VIA 2 Metal 2 VIA 1 Metal 1 Metals from CUP bonding pad Combination of metals from I/O body and CUP bonding pad Figure 12.2: Illustration for I/O & CUP Pad Combination 12.3 RDL (Re-Distribution Layer) Flip Chip Flip Chip, the direct electrical connection of face-down (hence "flipped") electronic components onto the substrate, features the following benefits: Reduce the required board area. Reduce the inductance and capacitance of inter-connections, improving the accuracy of impedance control. Provide effective heat dissipation using bumps. N28 I/O can support APRDL / MTRDL. Please refer to the bond pad library release note for details. For Example: To tape out 1P6M (6 metal layers) with 4X1Z metal scheme using MTRDL, it is necessary to read the bond pad library release note, where there is table that shows how to realize 6M_4X1Z metal scheme by adopting the design kit from the applicable back-end directory: TSMC N28 General I/O Library Application Note 62 TSMC Confidential Information 977746 Muse\ Semiconductor\ LLC 03/28/2019 M TS Figure 12.1: The Back-End Directory Combination for Various Metal Schemes (snapshot from tpbn28v release note) Security C - TSMC Secret As indicated in Figure 12.1, 1P6M with 4X1Z metal scheme can be realized as follows: I/O: Adopt gds under “mt_2/6lm” directory, where gds contains metals up to metal 4. APRDL Flip-Chip Bump: Adopt gds under “fc/MTRDL/6m/6M_Z” directory. Note M TS 2. It is required to implement the ESD clamp macro (PCLAMP_G, PCLAMPC_V/H_G) between the power and ground mesh. n io at m or LC nf lI \L tia or en 746 uct fid 77 nd 9 on 9 co 01 i 2 C m 28/ C Se 03/ 12.3.1 PCLAMP_G/PCLAMPC_V/H_G usage as ESD clamp cell for RDL flip chip e\ us M RDL flip chip relies on power/ground mesh to supply the core and the I/O ring. In this case, the ESD clamp protections embedded in the PVDD1DGZ_V/H_G and PVDD2DGZ_V/H_G are far from the bump, which results in degrading the ESD protection on the core region because of the mesh metal resistance. Therefore, it is mandatory to implement PCLAMP_G and PCLAMPC_V/H_G ESD clamp macro by following the below requirements to ensure effective ESD protection: It is required to implement at least 2 ESD clamp macro (PCLAMPC_V/H_G for core power; PCLAMP_G for I/O power) within a single power domain between power and ground mesh. The max resistance from core power bump (VDD) or I/O power bump (VDDPST) to a clamp cell (PCLAMPC_V/H_G or PCLAMP_G, respectively) is 0.1 Ohm, and the max resistance from core ground bump (VSS) or I/O ground bump (VSSPST) to a clamp cell is also 0.1 Ohm, as illustrated in Figure 12.3. The metal rails connecting from VDD and VSS bumps to the (PCLAMPC_V/H_G or PCLAMP_G) must satisfy the design rule for the total width of metal lines connected from the bond pad / bump to ESD device (PCLAMPC_V/H_G or PCLAMP_G). < 0.1 Ohm < 0.1 Ohm Figure 12.3: Illustration of PCLAMPx implementation for RDL flip chip 12.4 Double I/O Rings The double I/O ring can be used for the high-pin-count application. It is a must to comply with the following requirements for implementation. TSMC N28 General I/O Library Application Note 63 TSMC Confidential Information 977746 Muse\ Semiconductor\ LLC 03/28/2019 1. It is required to read the bond pad library release note for information on the required tapeout layer, the special usage note, which directory to access for various metal scheme options, etc. Security C - TSMC Secret CORE I/O Inner I/O Ring Corner n io at m or LC nf lI \L tia or en 746 uct fid 77 nd 9 on 9 co 01 i 2 C m 28/ C Se 03/ Figure 12.4: Illustration for the Double I/O Rings us M Note e\ 1. In consideration of signal integrity, the following steps can be helpful to the place & route. a. Route the I/O signal first. b. Insert the routing blockage layer in the top two metals. (By default, routing is not blocked in the top two metals.) c. Finally, route the internal signal afterwards. 2. For the double I/O rings with RDL, at least one layer should be reserved for routing from the outer I/O ring to core. Please refer to Figure 12.5 for illustration. 3. For latch-up prevention, please treat the inner ring as AAIO placement and follow the rules described in a separate file named “ApplicationGuide_N28_AAIO” which is available on TSMC online. 4. Do not flip the I/O cells in the inner ring. That is, the core side of the I/O cells in the outer ring should face the pad side of the I/O cells in the inner ring (i.e. the head-to-tail style). In this case, the corner cell at the outer corner should have the same orientation as the one at the inner corner. 5. A power domain is the region where there are the dedicated power & ground supply. Since the I/O domain in the inner ring is considered a different power domain from that in the outer ring, it is required to implement the correct power/ground cells in each inner I/O domain. Furthermore, in case a domain is on both outer and inner rings, it is required to connect from the power/ground cells of the inner I/O ring to those of the outer, and each connection must comply with the “Maximum ESD Current Density for Via, and Metal" table in DRM. Please refer to Figure 12.6 for illustration. 6. It is required to implement “one and only one” PVDD2POC_V/H_G / PVDD2POC in each digital I/O domain of the inner and the outer ring. Though the power/ground cells of inner and outer I/O rings are connected as instructed in Note 5, the POC rail remains disconnected. 7. It is required to implement the power-cut cell (PRCUT_G, PRCUTA_G) between different power domains. On the other hand, if I/O domains cannot form a ring, it is required to implement the (PENDCAP_G / PENDCAPA_G) cell at each domain edge to close up the guard ring. Also, it is mandatory to follow the associated requirements stated in Sections TSMC N28 General I/O Library Application Note 64 TSMC Confidential Information 977746 Muse\ Semiconductor\ LLC 03/28/2019 M TS Outer I/O Ring Security C - TSMC Secret 6.4 and 8.10. Please refer to Figure 12.6 and Figure 12.7 for illustration. Core Inner I/O Figure 12.5: Illustration of RDL to Core with Double I/O Rings e\ us M CORE Inner I/O Ring Outer I/O Ring Power/Ground Cell Corner I/O Cell Power-Cut Cell Figure 12.6: Illustration of the Power/Ground Cell Connection between the Inner and the Outer I/O Ring TSMC N28 General I/O Library Application Note 65 TSMC Confidential Information 977746 Muse\ Semiconductor\ LLC 03/28/2019 n io at m or LC nf lI \L tia or en 746 uct fid 77 nd 9 on 9 co 01 i 2 C m 28/ C Se 03/ M TS Outer I/O Security C - TSMC Secret Note: Since the inner domain A and B are disconnected in the inner I/O region, it is required to ensure that the VSS bus of these 2 domains is connected and the connection must comply with the “Maximum ESD Current Density for Via, and Metal" table in DRM. CORE A B M TS n io at m or LC nf lI \L tia or en 746 uct fid 77 nd 9 on 9 co 01 i 2 C m 28/ C Se 03/ Corner Outer I/O Ring M Power/Ground Cell I/O Cell PENDCAP/A_G e\ us Figure 12.7: Illustration of the PENDCAP Cell Implementation 12.5 AAIO (Area Array I/O) Application Our N28 I/O libraries are designed for peripheral I/O placement which means that all I/O cells are placed on the chip edge and no other circuit layout outside the I/O ring. In case customers need AAIO placement, which means that there is other circuit layout surrounding the I/O cells, e.g. Figure 12.8, please fulfill all the rules described in a separate document named “ApplicationGuide_N28_AAIO”, which is available on TSMC online, for details. Chip edge peripheral I/O placement AAIO placement PENDCAP* Other circuit layout Figure 12.8: Illustration of AAIO Placement TSMC N28 General I/O Library Application Note 66 TSMC Confidential Information 977746 Muse\ Semiconductor\ LLC 03/28/2019 Inner I/O Ring Security C - TSMC Secret Chapter 13 Electromigration (EM) Consideration This chapter provides information on the following topics: EM Capacity of the Power/Ground Cell EM Capacity of the Bond Pad EM Capacity Enhancement M TS TSMC N28 I/O library contains several sets of power/ground cells to supply current to the core and the I/O. n io at m or LC nf lI \L tia or en 746 uct fid 77 nd 9 on 9 co 01 i 2 C m 28/ C Se 03/ 13.1.1 Determine the Maximum Allowable Current e\ us M To determine the maximum allowable current that each power/ground cell can supply, it is required to refer to the layout as well as to the maximum DC current density (Jmax) and temperature derating factor tables of the TSMC design rule manual. Then, multiply the most critical metal width by Jmax and the temperature rating factor to come up with the maximum EM value. Please refer to the I/O library release note for the calculated EM values. Note that the EM bottleneck might lie in the metal routing between TSMC power/ground cell and the internal macro (e.g. narrow metal width, insufficient via number, etc.) Please pay attention to the inter-connection between the power/ground cell and the internal core. 13.1.2 Determine the Required Number of Power/ Ground Cells The EM table that lists the maximum allowable current for each power/ground cell can be found in the library release note, which can be used for calculating the required number of power/ground cell to supply sufficient current based on the estimated power consumption. Specifically to determine the required number of digital I/O power/ground cells, it is required to consider the Simultaneously Switching Outputs (SSO) effect. Please refer to the Chapter 7 for details. 13.1.3 Locate the EM Critical Point EM is a reliability factor in chip manufacturing. EM may not cause chip failure immediately upon power up, but could degrade the performance over time. To locate a possible EM weak point, the EDA tool analysis of the current distribution and EM criterion is strongly recommended. Nevertheless, performing a layout review focused on the connecting ports to power/ground cells is needed, particularly for via number and metal width. Adding via arrays or stacked metal can help to increase the maximum allowable current. 13.1.4 EM vs. Temperature The magnitude of EM capacity would vary with temperature. For example, EM at 110°C is greater than that at 125°C. Attention to the temperature associated with your EM criteria is needed. To convert EM from one temperature to another, it is required to multiply it by the DC rating factor available from the Design Rule Manual. 13.2 EM Capacity of the Bond Pad As long as TSMC I/O is connected to the corresponding TSMC bond pad, the EM bottleneck would lie in the I/O rather than the bond pad. Therefore, the bond pad EM capacity is not given in the bond pad library release note. TSMC N28 General I/O Library Application Note 67 TSMC Confidential Information 977746 Muse\ Semiconductor\ LLC 03/28/2019 13.1 EM Capacity of the Power/Ground Cell Security C - TSMC Secret 13.3 EM Capacity Enhancement 13.3.1 Double/Triple Bonds When the package pin count is limited, double or triple bonds to the same package power or ground pin is recommended for EM enhancement. Figure 13.1 shows an example of double bonds with the core power & ground supply. With this method, the EM capacity can be significantly increased. The ESD performance can also benefit from the reduced bond wire inductance resulting from the double/triple bonds. Single bond on core power/ground cells Double bonds on core power/ground cells TSMC Confidential Information 977746 Muse\ Semiconductor\ LLC 03/28/2019 n io at m or LC nf lI \L tia or en 746 uct fid 77 nd 9 on 9 co 01 i 2 C m 28/ C Se 03/ M TS e\ us M Die Edge VDD VSS Package Pins VDD VSS Figure 13.1: Double Bonds with the Core Power & Ground Supply 13.3.2 Connect Top Two Metal Lines from the CUP Pad to Core TSMC N28 General I/O Library Application Note 68 Security C - TSMC Secret Option 1: Simply connect top two metal lines from the core CUP pad (PADxNU_SL) as illustrated in Direct connection with the power/gnd mesh To core region VIA array between CUP pad and the power mesh. e\ To core region Direct connection with the power/gnd mesh VIA array between CUP pad and the power mesh. Figure 13.2: EM Enhancement by Top Two Metal Connections (Option 1) Option 2: To connect the top 2 metal lines from the staggered outer CUP pad to core, it would be needed to insert filler cells to enlarge the space in between. Please refer to Figure 13.3 for illustration. TSMC N28 General I/O Library Application Note 69 TSMC Confidential Information 977746 Muse\ Semiconductor\ LLC 03/28/2019 n io at m or LC nf lI \L tia or en 746 uct fid 77 nd 9 on 9 co 01 i 2 C m 28/ C Se 03/ M TS us M Figure 13.2. It is also possible to make a direct connection between the CUP bonding pad extending over the core region and the power/gnd mesh Security C - TSMC Secret Insert filler cells on both sides of the power/ground cell & connect the top 2 metal lines from the CUP outer pad to core for EM enhancement us M Option 3: To connect the top 2 metal lines from the staggered outer CUP pad to core, instead of inserting filler cells as mentioned in Option 2, simply implement another identical Power or Ground cell beside to enlarge the space in between. e\ Then, modify the CUP pad pin of two identical Power or Ground cells, to which you can implement the CUP pad in the middle of two cells. Finally, connect the top two metal lines from the CUP pad to core for EM enhancement. Please refer Place two identical Power or Ground cells together, modify the CUP pad pin to which CUP pad can be connected in the middle; connect the top 2 metal lines from the CUP pad to core for EM enhancement to Figure 13.4 for illustration. TSMC N28 General I/O Library Application Note 70 TSMC Confidential Information 977746 Muse\ Semiconductor\ LLC 03/28/2019 n io at m or LC nf lI \L tia or en 746 uct fid 77 nd 9 on 9 co 01 i 2 C m 28/ C Se 03/ M TS Figure 13.3: EM Enhancement by Top Two Metal Connections (Option 2) Security C - TSMC Secret Place two identical Power or Ground cells together, modify the CUP pad pin to which CUP pad can be connected in the middle; connect the top 2 metal lines from the CUP pad to core for EM enhancement n io at m or LC nf lI \L tia or en 746 uct fid 77 nd 9 on 9 co 01 i 2 C m 28/ C Se 03/ e\ us M Compared with Option 2, Option 3 is preferable in terms of ESD robustness, since the ESD clamp circuitry is embedded within the power/ground cell. As a result, placing two identical power or ground cells together is more robust than the filler-cell insertion. TSMC N28 General I/O Library Application Note 71 TSMC Confidential Information 977746 Muse\ Semiconductor\ LLC 03/28/2019 M TS Figure 13.4: EM Enhancement by Top Two Metal Connections (Option 3) Security C - TSMC Secret Chapter 14 Library Integration Notes To correctly tape out TSMC I/O cells, it is required to closely follow the TSMC masking layers and bias documents described in the “tape-out layer information” of the library release note; and refer to this chapter for general tape-out information. 14.1 GDSII Number Mapping M TS Warning: The mixed or incorrect mapping of GDSII layers would result in serious mask issue and silicon failure. n io at m or LC nf lI \L tia or en 746 uct fid 77 nd 9 on 9 co 01 i 2 C m 28/ C Se 03/ 14.2 ESD Mask e\ us M The ESD implant layer is required for N28 I/O library. Please make sure all the ESD-related GDSII layers are taped out correctly according to the “Masking Layers & Bias” table as well as to the library release note for the required tape-out layers together with special note on the ESD mask generation, if any. 14.3 GDSII Change to Mask Revision A minor change in the GDSII layer might lead to a significant change in mask set. For example, modification of the OD2 GDSII layer not only changes the OD2 mask but also other masks, such as PW1V, PW2V, NW1V, NW2V, PO, N2V, and so forth. It is required to review the “Masking Layers & Bias” document beforehand. TSMC N28 General I/O Library Application Note 72 TSMC Confidential Information 977746 Muse\ Semiconductor\ LLC 03/28/2019 For libraries from different vendors, the GDSII numbers defined for each process node and dummy layers might be different. Therefore, it is required to comply with the definition in the technologydependent “GDS Layer Usage Description File” that can be downloaded from TSMC Online. Security C - TSMC Secret Chapter 15 Simulation Notes 15.1 LPE Netlist As both parasitic interconnect resistance and capacitance have an impact on electrical performance, the N28 I/O library layout is extracted with both R and C. Moreover, three lpe netlists are provided within the lpe kit. Table 15.1: LPE netlist name and RC command file RC command file M TS {library name}_{version number}_lpe.spi Typical {library name}_{version number}_lpe_best.spi Cbest n io at m or LC nf lI \L tia or en 746 uct fid 77 nd 9 on 9 co 01 i 2 C m 28/ C Se 03/ {library name}_{version number}_lpe_worst.spi Cworst us M 15.2 Characterization Conditions e\ The characterization conditions of TSMC N28 I/O libraries in different PVT (Process Voltage Temperature) combinations are listed below. The condition coverage would vary. Table 15.2: Corner definition and PVT conditions Description Low Temp Best Case Typical Case Worst Case Worst Case Low Temp. Worst Case Zero Degree Maximum Leakage Global Maximum Leakage LPE Netlist Core Voltage I/O Voltage Temp Process _lpe_best.spi 1.1*Vdd 1.1*Vddpst -40 FF _lpe_best.spi 1.1*Vdd 1.1*Vddpst 0 FF _lpe.spi 1.0*Vdd 1.0*Vddpst 25 TT _lpe_worst.spi 0.9*Vdd 0.9*Vddpst 125 SS _lpe_worst.spi 0.9*Vdd 0.9*Vddpst -40 SS _lpe_worst.spi 0.9*Vdd 0.9*Vddpst 0 SS _lpe_best.spi 1.1*Vdd 1.1*Vddpst 125 FF _lpe_best.spi 1.1*Vdd 1.1*Vddpst 125 FFG The characterization corner is named according to the following naming convention: [Process corner][core voltage]v[I/O voltage]v[Temperature]c Where: Process corner: defines which spice corner is used for characterization Core voltage: defines the Vdd core voltage I/O voltage: defines the Vddpst I/O voltage Temperature: Defines the temperature For examples: tt0p81v1p8v25c corresponds to characterization with TT process, 0.81 V Vdd voltage, 1.8 V Vddpst voltage, and 25 °C. TSMC N28 General I/O Library Application Note 73 TSMC Confidential Information 977746 Muse\ Semiconductor\ LLC 03/28/2019 LPE netlist name Security C - TSMC Secret ff1v1p98vm40c corresponds to characterization with FF process, 1 V Vdd voltage, 1.98 V Vddpst voltage, and -40 °C. Note 1. PVT (Process Voltage Temperature) characterization corners are available in the library release note. Note that TSMC in-house N28 I/O library is designed to operate within the offered PVT conditions. If your design is beyond the given PVT conditions, it is required to contact TSMC. M TS 15.3 Power / Ground Pin Information n io at m or LC nf lI \L tia or en 746 uct fid 77 nd 9 on 9 co 01 i 2 C m 28/ C Se 03/ In both digital and analog I/Os, power, ground and POC pin appear at the subcircuit definition, allowing user to use the I/Os in voltage islands. They follow certain naming conventions. M Here is the list of power/ground/POC pins that appear in the digital I/O subcircuit definition: VDD: core voltage (supplied by PVDD1DGZ_V/H_G) VDDPST: I/O voltage (supplied by PVDD2DGZ_V/H_G) VSSPST: post driver ground voltage (supplied by PVSS2DGZ_V/H_G) VSS: pre-driver and core region voltage (supplied by either PVSS1DGZ_V/H_G or PVSS3DGZ_V/H_G) POC: POC signal (supplied by PVDD2POC_V/H_G) e\ us Resulting in a subcircuit definition as follows (example): .SUBCKT PRDW04DGZ_H_G C PAD I OEN REN VDD VDDPST VSS VSSPST POC For analog I/Os, the convention differs, depending on whether the analog I/O is to be placed in a core voltage domain or an I/O voltage domain. For the analog I/Os that will be placed in a core voltage domain, the convention is: TACVDD: analog core voltage (supplied by PVDD3AC_V/H_G) TACVSS: analog core ground (supplied by PVSS3AC_V/H_G) VSS: digital core ground (supplied by either: PVSS2AC_V/H_G or PVSS1DGZ_V/H_G or PVSS3DGZ_V/H_G) Resulting in a subcircuit definition as follows (example): .SUBCKT PDB3AC_H_G AIO TACVDD TACVSS VSS For the analog I/Os that will be placed in an I/O voltage domain, the convention is: TAVDD: analog core voltage (supplied by PVDD3A_V/H_G) TAVSS: analog core ground (supplied by PVSS3A_V/H_G) VSS: digital core ground (supplied by either: PVSS2A_V/H_G or PVSS1DGZ_V/H_G or PVSS3DGZ_V/H_G) Resulting in a subcircuit definition as follows (example): .SUBCKT PDB3A_V_G AIO TAVDD TAVSS VSS TSMC N28 General I/O Library Application Note 74 TSMC Confidential Information 977746 Muse\ Semiconductor\ LLC 03/28/2019 2. For re-characterization or customization request that requires modification on off-the-shelf I/O, unless specifically requested in Statement of Work (SOW) form, it would still be based on the characterization conditions of the original library. Security C - TSMC Secret Note that for simplification, this document always uses the above conventions. For example, VDDPST is the digital I/O voltage. TSMC Confidential Information 977746 Muse\ Semiconductor\ LLC 03/28/2019 n io at m or LC nf lI \L tia or en 746 uct fid 77 nd 9 on 9 co 01 i 2 C m 28/ C Se 03/ M TS e\ us M TSMC N28 General I/O Library Application Note 75 Security C - TSMC Secret Chapter 16 Layout Considerations TSMC N28 design rule manual defines a unique vertical poly orientation. As TSMC I/Os can be placed in a ring, it is necessary to provide two sets of cells: one that can be placed vertically, that is at the bottom and top of the I/O ring, and another one that can be placed horizontally, at the left and right sides. For this, each function I/O cell comes with two different layout styles: {cell_name}_V_G: the I/O is to be used as-is in vertical direction, at the bottom and top sides of the chip {cell_name}_H_G: the I/O needs to be rotated and placed horizontally at the left and right sides of the chip. n io at m or LC nf lI \L tia or en 746 uct fid 77 nd 9 on 9 co 01 i 2 C m 28/ C Se 03/ M TS Since only the core oxide needs to follow this poly orientation, some cells are not offered with _V_G or _H_G extension. This is the case for example for the I/O voltage ESD clamp (PCLAMP_G). Also, cells that do not contain any device come with one type only, for example filler and corner cells. User needs to refer to the library release note for more information. us M Both sets of cells (_V_G and _H_G) are fully modeled in terms of design kits. Behavioral models are identical, while minor difference in terms of timing/power can be expected. User can refer to the nldm design kit. e\ It should be noted that the library contains all cells placed vertically. In this case when running a DRC at cell level the _H_V cells would return the poly orientation violation. However when correctly placed in a ring the violation would not be reported. On the other hand rotating a _V_G cell and placing it at the left and right sides of a chip would be caught when running DRC. Core transistors in the correct orientation Core transistors rotated Thick transistors Thick transistors Digital I/O with vertical layout style Digital I/O with horizontal layout style Figure 16.1: Layout snapshot of the I/O predriver for the same I/O. The I/O with horizontal layout style requires rotation so that all core devices follow single poly orientation TSMC N28 General I/O Library Application Note 76 TSMC Confidential Information 977746 Muse\ Semiconductor\ LLC 03/28/2019 Security C - TSMC Secret Chapter 17 The Absolute Maximum Rating Note: Long-term exposure to absolute maximum ratings may affect device reliability, and permanent damage may occur if the operation exceeds the maximum ratings listed in Table 17.1:. The I/O should be operated under the recommended operating conditions specified in the library databook. Table 17.1: Absolute Maximum Ratings n io at m or LC nf lI \L tia or en 746 uct fid 77 nd 9 on 9 co 01 i 2 C m 28/ C Se 03/ Parameter Value Power Supply Voltage M Input Voltage, VI Please check TSMC Online Please check TSMC Online Please check TSMC Online e\ us Output Voltage, VO -40C ~ +125C Operation Temperature, TOPT TSMC N28 General I/O Library Application Note 77 TSMC Confidential Information 977746 Muse\ Semiconductor\ LLC 03/28/2019 M TS The maximum voltage levels in the table below should be determined by using the e-Reliability Model System > Overall Reliability Assessment from TSMC-Online by entering the required input and product lifetime conditions. Security C - TSMC Secret Chapter 18 N28 I/O Usage Checklist To ensure the I/O usage correctness, it is necessary to go through the checklist below based on your chip implementation. 18.1 Review Checklist Remark M TS 2. For legibility, the cell names do not come with the _V/H_G extension. For example, PVDD2POC refers to PVDD2POC_V/H_G. n io at m or LC nf lI \L tia or en 746 uct fid 77 nd 9 on 9 co 01 i 2 C m 28/ C Se 03/ 3. Terms: 3.1. bonded: connected to bond pad/package 3.2. bumped: connected to flip-chip bump/package M e\ us 4. For the item with serial number that contains “y” letter (e.g. 15y.1), it is categorized as the subitem that needs to be checked if the mother question is applicable to your application (e.g. 15). For example, if you answer a “yes” for item 15, you also need to answer the sub-questions (15y.1, 15y.2) related to the question 15. Official Check Items Serial No. check item General Check criteria/spec or check method 1 All of the above libraries used in the chip are the most updated version? (Note: To determine whether the library version is the most up-to-date, please log onto TSMC Online Design Portal 2.0, or check with TSMC Field Application Engineer for information.) yes 2 Is customer's target process node the same as what these libraries are designed for (e.g. not porting N28HP tphn28hpgv18 I/O to N28HPL process node)? yes 3 Have you read the N28 I/O General Application Note to understand the general usage requirement? yes 4 Have you read the associated I/O & bond pad library release note(s) to understand the specific library usage requirement? yes 5 Do the required tape out layers listed in library release note exist in the tape-out GDS? yes 6 Do the required tape out layers listed in library release note will be / have been specified in tape-out MT form? yes Digital Domain Usage Requirement (If digital cells are implemented) TSMC N28 General I/O Library Application Note 78 TSMC Confidential Information 977746 Muse\ Semiconductor\ LLC 03/28/2019 1. Please ensure that you have read N28 I/O General Application Note as well as the associated library release note(s), understanding the usage constraints prior to filling out this checklist. Security C - TSMC Secret yes 8 Are there at least three PVDD1DGZ cells connected to package in each digital I/O domain? yes 9 Are there at least two PVDD2DGZ cells connected to package in each digital I/O domain? (one of them can be PVDD2POC) yes 10 Is there at least one PVSS1DGZ or PVSS3DGZ cell connected to package in each digital I/O domain? yes 11 Is there at least one PVSS2DGZ or PVSS3DGZ cell connected to package in each digital I/O domain? yes 12 Is the PVDD1DGZ used as a "core-voltage" power supply? yes 13 From the metal bus resistance point of view, does the cell placement follow the Table 8.1 of the TSMC N28 I/O General Application Note? 14 Is the bonded ground cell PVSS2DGZ (or PVSS3DGZ) implemented next to "both side" of the PCORNER corner cell? 15 Is this chip flip-chip application? yes or NA 15y.1 Is the metal bus resistance from the power / ground bump to the PCLAMPC ESD clamp macro cell less than 0.1 ohm? yes 15y.2 Is the metal bus resistance from the power / ground bump to the PCLAMP ESD clamp macro cell less than 0.1 ohm? yes 16 Is any PVDD1ANA implemented? yes or NA 16y.1 Is the PVDD1ANA used as the core-voltage analog power supply? yes 16y.2 Are there at least three PVDD1ANA cells connected to the same package pin? yes 16y.3 Is PCLAMPC implemented with PVDD1ANA? yes 16y.4 Is the capacitive load between the AVDD pin (on the core side of PVDD1ANA) and ground pin greater than or equal to 20pF? yes 17 Is any PVDD2ANA implemented as a power supply cell? yes or NA 17y.1 Is the PVDD2ANA connected to IO transistor, not core transistor? yes 17y.2 Is PCLAMP implemented with PVDD2ANA? yes 17y.3 Is PVDD2ANA powered up after the digital PVDD2DGZ power cell is on? yes 17y.4 Is the capacitive load between the AVDD pin (on the core side of PVDD2ANA) and ground pin greater than or equal to 20pF? yes 18 Is any PVDD2ANA implemented as an analog signal? yes or NA n io at m or LC nf lI \L tia or en 746 uct fid 77 nd 9 on 9 co 01 i 2 C m 28/ C Se 03/ e\ us M TSMC Confidential Information 977746 Muse\ Semiconductor\ LLC 03/28/2019 Is there “one and only one” PVDD2POC cell in each digital I/O domain? M TS 7 TSMC N28 General I/O Library Application Note yes yes 79 Security C - TSMC Secret yes 18y.2 Is the connection between PVDD2ANA and internal analog macro adequately made based on the N28 I/O application note (e.g. implement the secondary ESD protection device, etc.)? yes 18y.3 Is the maximum signal swing of PVDD2ANA cell lower than or equal to the nominal VDDPST + 0.3V? yes 18y.4 Is the minimum signal swing of PVDD2ANA cell higher than or equal to 0.3V? yes 19 By taking the worst SSO scenario into account [i.e. use the SSO DF (Driving Factor) given in the library databook & assume every bidirectional I/O to be used as output drivers], is the number of “bonded/bumped” PVDD2DGZ enough to avoid the SSO noise effect? yes 20 By taking the worst SSO scenario into account [i.e. use the SSO DF (Driving Factor) given in the library databook & assume every bidirectional I/O to be used as output drivers], is the number of “bonded/bumped” PVSS2DGZ or PVSS3DGZ enough to avoid the SSO noise effect? yes 21 Is the ramp-up time for digital power up of PVDD1ANA/PVDD1DGZPVDD2DGZ, respectively, longer than 10us? yes 22 If the empty gap space between two digital cells is larger than one cell width, is dummy digital power cell implemented prior to filler cells? (where “dummy” means “not-bonded”) yes n io at m or LC nf lI \L tia or en 746 uct fid 77 nd 9 on 9 co 01 i 2 C m 28/ C Se 03/ e\ us M TSMC Confidential Information 977746 Muse\ Semiconductor\ LLC 03/28/2019 Is the PVDD2ANA connected to IO transistor, not core transistor? M TS 18y.1 Analog Domain Usage Requirement (If analog cells are implemented) 23 Is PDB3AC implemented? yes or NA 23y.1 Is PDB3AC connected to core transistor, not IO transistor? yes 23y.2 Is PDB3AC analog signal cell implemented with PVDD3AC analog power and PVSS3AC analog ground in the core-voltage analog domain? yes 23y.3 Is the VSS metal bus resistance from any of PDB3AC analog signal cells to the nearest bonded / bumped VSS ground supply (either by PVSS2AC in the same domain or by PVSS1DGZ cell in the adjacent digital domain) less than 1 Ohm? yes 23y.4 Is the maximum signal swing of PDB3AC cell lower than or equal to the nominal TACVDD + 0.3V? yes 23y.5 Is the minimum signal swing of PDB3AC cell higher than or equal to 0.3V? yes 23y.6 Is the connection between PDB3AC and internal analog macro adequately made based on the N28 I/O application note (e.g. implement the secondary ESD protection device, etc.)? yes TSMC N28 General I/O Library Application Note 80 Security C - TSMC Secret yes or NA 24y.1 Is PDB3A connected to IO transistor? yes 24y.2 Is PDB3A analog signal cell implemented with PVDD3A analog power and PVSS3A analog ground in the IO-voltage analog domain? yes 24y.3 Is the VSS metal bus resistance from any of PDB3A analog signal cells to the nearest bonded / bumped VSS ground supply (either by PVSS2A in the same domain or by PVSS1DGZ cell in the adjacent digital domain) less than 1 Ohm? yes 24y.4 Is the maximum signal swing of PDB3A cell lower than or equal to the nominal TAVDD + 0.3V? yes 24y.5 Is the minimum signal swing of PDB3A cell higher than or equal to -0.3V? yes 24y.6 Is the connection between PDB3A and internal analog macro adequately made based on the N28 I/O application note (e.g. implement the secondary ESD protection device, etc.)? yes 25 Is PVDD3AC implemented? yes or NA 25y.1 Are there at least three PVDD3AC cells connected to package in each corevoltage analog domain? yes 25y.2 Is there at least one PVSS3AC connected to package in each core-voltage analog domain? yes 25y.3 Is the PVDD3AC connected to a core-voltage power supply, not an IOvoltage power supply? yes 25y.4 Is PCLAMPC implemented with PVDD3AC in each core-voltage analog domain? yes 26 Is PVDD3A implemented? yes or NA 26y.1 Are there at least two PVDD3A cells connected to package in each IOvoltage analog domain? yes 26y.2 Is there at least one PVSS3A connected to package in the IO-voltage analog domain? yes 26y.3 Is the PVDD3A connected to a IO-voltage power supply, not a corevoltage power supply? yes 26y.4 Is PCLAMP implemented with PVDD3A in each IO-voltage analog domain? yes 27 Is PVDD1AC implemented? yes or NA 27y.1 Are there at least three PVDD1AC cells connected to the same package pin? yes n io at m or LC nf lI \L tia or en 746 uct fid 77 nd 9 on 9 co 01 i 2 C m 28/ C Se 03/ e\ us M TSMC Confidential Information 977746 Muse\ Semiconductor\ LLC 03/28/2019 Is PDB3A implemented? M TS 24 TSMC N28 General I/O Library Application Note 81 Security C - TSMC Secret yes 27y.3 Is PCLAMPC implemented with PVDD1AC? yes 27y.4 Are there at least three PVDD3AC cells connected to package in each corevoltage analog domain? yes 27y.5 Is there at least one PVSS3AC connected to package in each core-voltage analog domain? yes 28 Is PVDD1A implemented? yes or NA 28y.1 Are there at least two PVDD1A cells connected to the same package pin? 28y.2 Is the PVDD1A connected to an IO-voltage power supply, not a corevoltage power supply? 28y.3 Is PCLAMP implemented with PVDD1A in each IO-voltage analog domain? 28y.4 Are there at least two PVDD3A cells connected to package in each IOvoltage analog domain? yes 28y.5 Is there at least one PVSS3A connected to package in the IO-voltage analog domain? yes 29 Is the ramp-up time for analog power up of PVDD3AC/PVDD3A/PVDD1AC/PVDD1A, respectively, longer than 10us? yes 30 From metal bus resistance point of view, does the cell placement follow the Table 10.1 of the TSMC N28 I/O General Application Note? yes 31 Is this chip flip-chip application? yes or NA 31y.1 Is the metal bus resistance from the power / ground bump to the PCLAMPC ESD clamp macro cell less than 0.1 ohm? yes 31y.2 Is the metal bus resistance from the power / ground bump to the PCLAMP ESD clamp macro cell less than 0.1 ohm? yes 32 Is the capacitive load between the “AVDD” pin (on the core side of PVDD3A / PVDD3AC / PVDD1A / PVDD1AC) and ground pin greater than or equal to 20pF, respectively? yes yes n io at m or LC nf lI \L tia or en 746 uct fid 77 nd 9 on 9 co 01 i 2 C m 28/ C Se 03/ e\ us M TSMC Confidential Information 977746 Muse\ Semiconductor\ LLC 03/28/2019 Is the PVDD1AC connected to a core-voltage power supply, not an IOvoltage power supply? M TS 27y.2 yes yes Digital Domain Interface Check TSMC N28 General I/O Library Application Note 82 Security C - TSMC Secret If the I/O cells aren't placed as an entire ring, the answer must be "yes". For other cases, the answer could be "NA". 34 Is PRCUT implemented? yes or NA 34y.1 Is the PRCUT power-cut cell implemented between two digital I/O domains, not analog-to-digital domains? yes 34y.2 Is digital ground PVSS1DGZ or PVSS3DGZ placed right next to both sides of the PRCUT power-cut cell? (Within 2 cell width from the PRCUT on each side is acceptable.) 35 Is PENDCAP implemented? 35y.1 It is prohibited to implement any memory IP beside the digital I/O domain enclosed by the PENDCAP. Do you follow this application rule? yes 35y.2 Is the distance between the edge of PENDCAP cell and other non-memory IP at least 20um apart? yes 35y.3 Is the N-Well / P-Sub of the non-memory IP adjacent to the digital domain enclosed by PENDCAP connected to power / ground supply within 1 ohm? yes 35y.4 For the power / ground bus connection from the nearby non-memory IP to the digital domain, is the total power/ground bus width of the same metal layer connected from this IP greater than or equal to the total power / ground bus width of the same metal layer in digital I/O cell? yes e\ us M n io at m or LC nf lI \L tia or en 746 uct fid 77 nd 9 on 9 co 01 i 2 C m 28/ C Se 03/ yes yes or NA Analog Domain Interface Check 36 Is PRCUTA or PENDCAPA cell implemented for analog domain separation/closure as instructed in the application note? If the I/O cells aren't placed as an entire ring, the answer must be "yes". For other cases, the answer could be "NA". 37 Is PENDCAPA implemented? yes or NA 37y.1 It is prohibited to implement any memory IP beside the analog domain enclosed by the PENDCAPA. Do you follow this application rule? yes TSMC N28 General I/O Library Application Note 83 TSMC Confidential Information 977746 Muse\ Semiconductor\ LLC 03/28/2019 Is PRCUT or PENDCAP cell implemented for digital domain separation/closure as instructed in the application note? M TS 33 Security C - TSMC Secret Is the distance between the edge of PENDCAPA cell and other nonmemory IP at least 20um apart? yes 37y.3 Is the N-Well / P-Sub of the non-memory IP adjacent to the analog domain enclosed by PENDCAPA connected to power / ground supply within 1 ohm? yes 37y.4 For the power / ground bus connection from the nearby non-memory IP to the analog domain, is the total power/ground bus width of the same metal layer connected from this IP greater than or equal to the total power / ground bus width of the same metal layer in analog I/O cell? yes M TS Bond Pad Check yes or NA 38y.1 Does prBoundary of bonding pads and I/Os originate at (0,0) coordinate? 38y.2 Have the bond pad cell name with "A" been implemented with analog cells, yes and the bond pad cell name without "A" been implemented with digital cells? n io at m or LC nf lI \L tia or en 746 uct fid 77 nd 9 on 9 co 01 i 2 C m 28/ C Se 03/ Do you use TSMC in-house wire bond pad? yes Double I/O Ring Check e\ us M 38 TSMC Confidential Information 977746 Muse\ Semiconductor\ LLC 03/28/2019 37y.2 39 Are the I/O cells implemented in both the inner and the outer domains (where inner and outer are with respect to core)? yes or NA 39y.1 Is the inner ring treated as AAIO placement and follow the rules described in a separate file named “ApplicationGuide_N28_AAIO” which is available on TSMC online? yes 39y.2 Does the core side of the I/O cells in the outer ring face the pad side of the I/O cells in the inner ring (i.e. the head-to-tail style)? yes 39y.3 Are the global VSS buses of inner and outer rings connected together with solid connection? (comply with the "Maximum ESD Current Density for Via, and Metal" table in DRM) yes TSMC N28 General I/O Library Application Note 84 Security C - TSMC Secret Chapter 19 Contact Us TSMC N28 I/O libraries are released under the supervision of TSMC standard quality assurance (QA) procedure. For any found issue, please refer to the library release note and designkit.info (packed as part of the deliverable kits) for guidance on how to tackle the known issues. For any technical questions, please contact TSMC regional application engineer or your library distributor for assistance. TSMC Confidential Information 977746 Muse\ Semiconductor\ LLC 03/28/2019 n io at m or LC nf lI \L tia or en 746 uct fid 77 nd 9 on 9 co 01 i 2 C m 28/ C Se 03/ M TS e\ us M TSMC N28 General I/O Library Application Note 85 Security C - TSMC Secret Chapter 20 TSMC9000 Overview TSMC9000, overall IP acceptance requirements and review procedure Memory9000, for SRAMs, register files, ROMs and CAMs IP9000, for a wide diversity of IP, including eDRAM/1TRAM, electrical-fuse, specialty I/O, mixed-signal/analog IP, non-volatile memory IP and high-speed PHY IP Soft-IP9000, for synthesizable IP based on an RTL implementation n io at m or LC nf lI \L tia or en 746 uct fid 77 nd 9 on 9 co 01 i 2 C m 28/ C Se 03/ Library9000, for standard cells, standard I/O and ESD IP e\ us M TSMC works on Library/Memory/IP quality assessment with IP ecosystem partners according to the TSMC9000 requirements. There are seven assessments defined for hard IP, three of them for physical review, DFM compliance, and pre-silicon assessment of the design and are performed before test chip tape-outs. The pre-silicon assessment includes design kits and design margin reviews that are specific to a certain IP: two of them are typical and split lot silicon assessments which are related to test chip reports, and the others are IP Validation Center and volume production record. The IP Validation Center audits IP testing results by the TSMC test laboratory and all IP are monitored in volume production for issues. Soft-IP9000, for synthesizable IP based on an RTL implementation, was created to extend TSMC9000 to cover Soft-IP. Based on the Soft-IP9000 requirements, two soft-IP quality assessments are done which include RTL code and physical implementation, and soft IP are monitored in volume production as well. TSMC9000 Levels of Acceptance TSMC N28 General I/O Library Application Note 86 TSMC Confidential Information 977746 Muse\ Semiconductor\ LLC 03/28/2019 M TS TSMC9000, TSMC library and IP quality management program, aims to provide customer with consistent, simple way to review set of minimum quality requirements for libraries and IP designed for TSMC process technologies. The reviews can be viewed via TSMC-Online using your login info. TSMC9000 team monitors ongoing IP quality and its requirements are documented and constantly revised to keep IP quality requirements up-to-date. TSMC IP Alliance members submit required TSMC9000 data and silicon reports to TSMC for assessments. TSMC9000 assessment results are posted to TSMC-Online after review. Customers can see the assessment results and scores on TSMCOnline and understand the IP confidence level and/or risk level of using the IP for reference and judgment. Having these assessment results readily available can significantly shorten design Lead Time (L/T), which also lowers Total Cost of Ownership (TCO) of the entire SoC design process. Certification by TSMC9000 is one of the key requirements for acceptance to TSMC IP Alliance Program. The TSMC9000 requirements are described in the following documents: