www.acsami.org Research Article Enhancement of Room-Temperature Photoluminescence and Valley Polarization of Monolayer and Bilayer WS2 via Chiral Plasmonic Coupling Gaohong Liu, Xuanli Zheng, Haiyang Liu, Jun Yin, Congming Ke, Weihuang Yang, Yaping Wu,* Zhiming Wu,* Xu Li, Chunmiao Zhang, and Junyong Kang Downloaded via MISSOURI UNIV SCIENCE & TECHNOLOGY on November 12, 2021 at 09:50:56 (UTC). See https://pubs.acs.org/sharingguidelines for options on how to legitimately share published articles. Cite This: ACS Appl. Mater. Interfaces 2021, 13, 35097−35104 ACCESS Metrics & More Read Online Article Recommendations sı Supporting Information * ABSTRACT: Transition-metal dichalcogenides with intrinsic spin-valley degree of freedom have enabled great potentials for valleytronic and optoelectronic applications. However, the degree of valley polarization is usually low under nonresonant excitation at room temperature due to the phonon-assisted intervalley scattering. Here, achiral and chiral Au arrays are designed to enhance the optical response and valley polarization in monolayer and bilayer WS2. A considerable band edge emission with 7 times increment is realized under the resonant coupling with Au dimerprism arrays. Valley polarization enhancement is quantitatively predicted by the inherent mechanisms from elevated electromagnetic field intensity and radiation efficiency and further realized in polarized photoluminescence. A tunable valley polarization up to 30.0% is achieved in bilayer WS2 under a nonresonant excitation at room temperature. All of these results provide a promising route toward the development of room-temperature valley-dependent optoelectronic devices. KEYWORDS: WS2, chiral plasmonic coupling, photoluminescence, Raman, valley polarization ■ symmetry and interlayer coupling.11,13,14,25 The indirect optical transition process greatly depletes the phonon mode at the Γ point and brings in exceptionally robust valley polarization in bilayer WS2.14 However, since the indirect band gap structure and the nonradiative recombination channels produced by the interlayer coupling, the light emission of bilayer WS2 is seriously suppressed. Previous studies have provided various strategies to improve the valley polarization of WS2. Resonant excitation can effectively reduce the intervalley scattering and promote the valley polarization.13 Nevertheless, appropriate pumping condition with certain energy as well as low-temperature environment is generally needed. Stacking monolayer TMDCs with graphene is beneficial for valley-polarized excitons owing to the quick radiative recombination, while serious photoluminescence (PL) quenching and short exciton life are inevitable.26 Electrical, magnetic, and strain have also been INTRODUCTION Valleys refer to the extreme points of energy in the momentum space, which are perceived as an additional degree of freedom besides of charge and spin.1−3 Valleytronic materials, such as transition-metal dichalcogenides (TMDCs), hold a great potential for manipulating the polarization optovalleytronic applications.4−9 WS2 is a layered TMDC material with intralayer S−W−S covalent bonding and interlayer van der Waals (vdW) stacking.10 Monolayer WS2 is a direct band gap semiconductor, possessing two inequivalent valleys at K and K′ points in the hexagonal Brillouin zone due to the broken inversion symmetry and strong spin−orbital coupling, which offer a promising platform for detecting and tuning the valley degree of freedom.11−14 Valley-polarized pumping is a feasible approach to distinguish any single valley through the unique optical selection rules, i.e., the left- and right-handed circularly polarized (LCP and RCP) photons coupling to the interband transitions in the K′ and K valley, respectively.15,16 However, due to the phonon-assisted intervalley scattering and the intervalley electron−hole interaction, it is difficult to obtain a clear valley contrast at room temperature.17−24 Moreover, the excitation photon energy needs to be carefully controlled to suppress the loss of the valley polarization.13,20 Bilayer WS2 is more superior in valleytronic devices because of its structural © 2021 American Chemical Society Received: April 11, 2021 Accepted: July 2, 2021 Published: July 14, 2021 35097 https://doi.org/10.1021/acsami.1c06622 ACS Appl. Mater. Interfaces 2021, 13, 35097−35104 ACS Applied Materials & Interfaces www.acsami.org Research Article Figure 1. (a, b) SEM images of the fabricated Au(I) and Au(II) arrays on SiO2/Si substrates. Insets are the AFM images with the scale bar of 200 nm. The height profiles are measured along the red lines. (c) Normalized extinction spectra of the Au(I) and Au(II) arrays measured at room temperature. (d, e) SEM images of WS2 transferred on Au(I) and Au(II) arrays, respectively. (f, g) Raman spectra of the monolayer WS2 (MLWS2) and bilayer WS2 (BL-WS2) taken in the areas without and with the Au(I) and Au(II) arrays beneath, respectively. (h, i) PL spectra of the ML-WS2 and BL-WS2 taken in the areas without and with the Au(I) and Au(II) arrays beneath, respectively. employed to manipulate the valleys.27−30 However, both the efficiency and controllability are still far from practical applications. A universal approach for realizing considerable valley polarization at room temperature is of fundamental importance. Resonant plasmonic coupling can effectively enhance the interaction between light and materials, which has been considered as a promising strategy to enhance the optical response and manipulate the polarization of twodimensional (2D) layer materials.31,32 Sergio Catalan-Gomez et al. fabricated monolayer MoS2-gallium hemispherical nanoparticle (Ga NP) hybrids, which increased the photoluminescence (PL) intensity of monolayer MoS2 by more than 9 times.33 By embedding monolayer MoS2 into a compact plasmonic nanocavity, Jiawei Sun demonstrated a 48.7% valley polarization of in MoS2 at room temperature.34 By utilizing a chiral stacked Au plasmonic nanorod, Te Wen et al. obtained a high valley polarization up to 47% in monolayer MoS2.35 However, there are very few reports on the study of plasmonic enhancement of the valley polarization characteristics in WS2, especially the chemical vapor deposition (CVD)-grown films, which are beneficial for the scalable device applications. Moreover, the thickness dependence of the enhancement effect is still lacking. Concerning the superior spin and valley properties of bilayer WS2, it is significantly important to study its resonant plasmonic enhancement. It is also exciting to tailor the valley polarization with plasmonic coupling and the chiral light−matter interactions. In this work, enhanced optical response and valley-polarized PL are investigated in heterostructures with Au plasmonic arrays and CVD-grown monolayer/bilayer WS2 at room temperature. Two kinds of Au arrays composed of achiral single units and chiral dimer units are designed. Surfaceenhanced Raman scattering (SERS) and PL intensity are demonstrated with both structures, and even more pronounced for the latter. Strongly increased valley polarization is predicted by analysis by the electromagnetic field intensity distribution from the finite-difference time-domain (FDTD) method and further realized under nonresonant optical excitation (532 nm), especially with the chiral plasmonic coupling for bilayer WS2. ■ RESULTS AND DISCUSSION Large-area single-prism (Au(I)) and dimer-prism (Au(II)) arrays are fabricated through the nanosphere lithography approach on SiO2/Si substrates (Figure S1). Figure 1a shows the scanning electron microscopy (SEM) and atomic force microscopy (AFM) morphologies of the Au(I) arrays, which exhibit a P6mm symmetry. Each prism unit possesses an inplane triangular shape with side length of about 130 nm and height around 60 nm, as measured from the height profile along the red line in the inset. Different from Au(I), Au(II) is composed of one large and one small prism with an in-plane triangular shape (Figure 1b). The height is around 60 nm for both, and the side lengths are 120 and 70 nm, respectively. Normalized extinction spectra for the two structures are measured at room temperature (Figure 1c) that show a wide extinction range above 600 nm for both. The surface plasmon resonance peak is approximately centered at 630 nm for Au(I) 35098 https://doi.org/10.1021/acsami.1c06622 ACS Appl. Mater. Interfaces 2021, 13, 35097−35104 ACS Applied Materials & Interfaces www.acsami.org arrays and red-shifts to 640 nm for Au(II) arrays, almost consistent with the absorption edge of monolayer and bilayer WS2, respectively. Compared with that of Au(I) arrays, the resonance peak intensity of Au(II) arrays increases to about 1.5 times, which means that the Au(II) arrays can be more effective for enhancing the optical response of WS2. Monolayer and bilayer WS2 with high quality is then transferred onto the top of Au arrays through a typical wettransfer approach. The SiO2/Si, monolayer, and bilayer regions can be well distinguished from the different contrasts in the SEM images in Figure 1d,e. The rotation angle between the two stacking layers is about 60°. Raman and PL spectra are measured and compared to study the SERS effect and enhanced PL at room temperature. The signals are taken for WS2 in the areas covering and uncovering the Au arrays, respectively. The Raman spectrum of monolayer (bilayer) WS2 on SiO2/Si substrate contains two characteristic peaks located at 358.8 (357.1) cm−1 and 418.8 (419.4) cm−1, as shown in Figure 1f,g, which correspond to the in-plane (E2g1) and outof-plane (A1g) vibration modes, respectively.36 In the WS2/Au area, ∼1.7 cm−1 redshift for the peak position of the E2g1 mode and ∼0.7 cm−1 for the A1g mode are observed. This can be attributed to the electron−phonon coupling caused by the strong near-field interaction, the increased electron concentration, and the interfacial stress as well.37,38 It is observed that the Raman signal is significantly enhanced in both WS2/Au systems, demonstrating a typical SERS effect. The intensities of bilayer are all higher than those of the monolayer, and the signal enhancement is more pronounced for Au(II) arrays than that of Au(I) arrays. Compared with the SERS effect, the enhancement PL is even more pronounced when introducing the Au prism arrays (Figure 1h,i). Pristine monolayer WS2 without the plasmonic coupling has a single PL peak centered at 617 nm, consistent with its neutral exciton emission.39 When coupling with Au(I) and Au(II) plasmonic arrays, the PL intensity is more than 4 and 7 times for WS2, respectively. Simultaneously, the peak positions are red-shifted slightly, which can be mainly attributed to change of the dielectric environment40 and the plasmon−exciton coupling interaction.41,42 The PL uniformity is confirmed by the mapping images in Figure S2, where the enhancement is globally larger for monolayer WS2 on Au(II) arrays than on Au(I) arrays. The PL enhancement may be accompanied by the fluorescence quenching effect because the WS2 is directly contacted with Au. To clarify the competitive relation between these two mechanisms, PL enhancements with and without a 1.0 nm Al2O3 insulating layer between WS2 and Au are compared, as shown in Figure S3. The enhancement effect is only slightly improved when adding the insulating layer, which suggests that plasmonic coupling effect plays a dominant role in the PL enhancement. Different from the monolayer results, the PL intensity of original bilayer WS2 on SiO2/Si is much smaller, and simultaneously the peak positions have a redshift for about 12 nm owing to the interlayer coupling. The PL intensity is enhanced by more than 3 and 3.5 times with Au(I) and Au(II) arrays, respectively. In addition to the surface plasmonic effect, the interaction between Au and the underlying top layer of WS2 will weaken the interlayer coupling within the bilayer WS2. Thereby, the nonradiative recombination is suppressed and the PL intensity is distinctly increased. The global uniformity of PL enhancement is also demonstrated by the mapping images in Figure S2. Although the enhancement is not so high as that of monolayer WS2 due to the indirect band gap and interlayer coupling, it still provides a promising strategy for the light emission of bilayer WS2. The notably SERS effect and enhanced PL emission demonstrate that the Au prism arrays have a distinct plasmonic coupling effect with the 2D WS2. To reveal the mechanism of different Au structures, electromagnetic field intensity distributions of monolayer and bilayer WS2/Au heterostructures under 532 nm are simulation through the FDTD method, as shown in Figure 2a−d and 2e−h, respectively. In both Research Article Figure 2. Near-field intensity distribution of (a−d) monolayer and (e−f) bilayer WS2/Au heterostructures at 532 nm (log scale). (a, e) and (c, g) Cross sections along the x−y plane on the WS2/Au interface for WS2/Au(I) and WS2/Au(II), respectively. (b, f) and (d, h) Cross sections along the x−z plane on the black dashed lines in (a) and (c), respectively. heterostructures, the near-field intensity distributions are notably concentrated on WS2/Au and Au/SiO2 interfaces, especially on the edge and tip of the Au prisms. For both monolayer and bilayer WS2, WS2/Au(II) heterostructures show a higher electromagnetic field intensity than that of the corresponding WS2/Au(I) heterostructures, which is attributed to the additional “hot spots” effect between two adjacent Au prisms within each dimer structure, as well as the larger Au amount in the dimer arrays. The near-field intensity distribution at the Au/SiO2 interface is roughly similar to that at the Au/WS2 interface, as shown in Figure S5. The enhanced PL signals of WS2 provide a solid base to study the valley polarization modulation by resonant plasmonic effect. Pure WS2 generally possesses a low valley polarization, especially under nonresonant excitation at room temperature. The loss of valley polarization is mainly induced by intervalley 1 scattering according to the relation: DVP ∝ 1 + 2Γ / Γ ,35 ν 0 where DVP stands for the degree of valley polarization, recombination rate (Γ0), and intervalley scattering rate (Γν) that dominantly depend on the intrinsic properties of WS2, excitation energy, and ambient temperature. Intrinsic valley polarizations of monolayer and bilayer WS2 are measured as 3.0 and 6.6% in our experiments, respectively, corresponding to an intervalley scattering rates of Γν ≈ 16.17 Γ0 and 7.07 Γ0. The competition between Γ0 and Γν is crucial to determine the valley helicity.35 When introducing the Au arrays, the behaviors of valley excitons can be described by the steady-state equations35 dn+ = P+ − n+(Γatot+ + Γ0tot) + (n− − n+)Γv = 0 dt 35099 (1) https://doi.org/10.1021/acsami.1c06622 ACS Appl. Mater. Interfaces 2021, 13, 35097−35104 ACS Applied Materials & Interfaces www.acsami.org Research Article Figure 3. Total decay rates (a, b) and radiative efficiency (c, d) for σ± dipoles in monolayer and bilayer WS2/Au heterostructures. (e, f) Schematic illustrations of the modulation of valley excited PL process without and with Au(II) under σ+ excitation. dn− = P − − n−(Γatot− + Γ0tot) − (n− − n+)Γv = 0 dt observed under LCP and RCP excitations, as shown in Figures S6 and S7 for monolayer and bilayer WS2, respectively. Despite the promotion and chirality of the exciton decay, the presence of Au structures may also depolarize the valley polarization of the detected far-field PL signals during the excitation and emission processes. The excitation process involves a conversion from far field to near field, and electromagnetic field intensity distributions at 532 nm are simulated to analyze the near-field components ER and EL, as shown in Figures 4 and S8, where EL = 1/2(Ex − iEy) and ER = (2) where n± stands for the valley population, P± represents the valley pumping rate, and Γtot a± is the Au-modulated decay rate of excitons on K and K′ valleys. To study the plasmonic enhancement in the exciton decay process, 112 pairs of σ+ and σ− dipoles are employed in the simulations of total decay rates and radiation efficiency in WS2/Au systems, as shown in Figure 3a−d. The total decay tot rates (Γtot a− and Γa+ ) of Au(II) are significantly larger than that of Au(I), especially for coupling with bilayer WS2, which indicates the enhancement of exciton generation. The radiation efficiency (ηa− and ηa+) of Au(I) is almost consistent under σ− and σ+ excitons at the emission wavelength (620 nm for monolayer and 635 nm for bilayer), while it is different for Au(II). This chiral radiation efficiency results from the asymmetrical structure of Au(II). Figure 3e,f presents the basic mechanism for increasing and tailoring the valley polarization in the energy band framework. When the K(K′) valley is coupled with RCP (LCP) light, the σ+(σ−) excitons are generated and occupy in the lowest energy level (Figure 3e). Some σ+(σ−) excitons scatter into K′(K) valley in the channel of phonon scattering, and the pseudo-spin state is changed to σ−(σ+). When the Au plasmonic structures are introduced, the polarized light will strongly undergo collective oscillation with localized surface plasmons, which will enhance the electromagnetic field intensity and radiation efficiency of excitons through the Purcell effect (Figure 3f). At the same time, the chiral radiation efficiency further provides a possibility to manipulate the valley polarization of WS2. Quantitative evaluation is performed in bilayer WS2/Au as an instance. Considering the emission wavelength of bilayer tot tot WS2 (635 nm), for the Au(I) structure, Γtot a+ ≈ 6.3 Γ0 , Γa− ≈ tot tot 5.3 Γ0 , and ηa−/ηa+ ≈ 1.8:2, where Γ0 is the total decay rate of excitons without Au modulation. In consequence, the degree of valley polarization for the exciton transition will reach 30.8% under σ− excitation and 34.9% under σ+ excitation. For the tot tot Au(II) structure, Γtot and ηa−/ηa+ ≈ a+ ≈ Γa− ≈ 11.6 Γ0 0.048:0.060. The degree of valley polarization will reach 38.0 and 55.3% under σ− and σ+ excitations, respectively. Given the above predictions, distinctly elevated valley polarization with tailorable chirality can be theoretically expected in WS2, with the assistance of Au plasmonic structures, especially the Au(II) arrays. Chiral near-field intensity distributions are further Figure 4. Near-field intensity distribution (a−d) EL and (e−h) ER in bilayer WS2/Au heterostructures, with LCP and RCP excitation at 532 nm (log scale). 1/2(Ex + iEy), respectively. Although the single prism of Au(I) is achiral in its configuration, the staggered arrangement of the units can also produce some general chirality into the near-field components for Au(I) arrays. And the chirality of the near-field components in Au(II) is even more pronounced for both global arrays and each dimer-prism unit. Different from the primitive WS2, pure circularly polarized excitation in WS2/Au heterostructures can generate excitons in both the K and K′ valleys, producing a pumping rate of P+ P− ∼ ER 2 |. EL Taking into account this depolarization mechanism, the degree of valley polarization is decreased to 27.9% (33.0%) under σ− excitation and 31.6% (48.0%) under σ+ excitation for bilayer WS2/Au(I) (bilayer WS2/Au(II)). Moreover, during the emission process, the presence of Au structures will scatter the light from near field to far field. Modulation of the circularly polarized emission from σ+ and σ− dipole pairs will bring about 35100 https://doi.org/10.1021/acsami.1c06622 ACS Appl. Mater. Interfaces 2021, 13, 35097−35104 ACS Applied Materials & Interfaces www.acsami.org additional depolarization effect, which should also be concerned when estimating the final valley polarization. Therefore, compared with the above values, the practical polarization for detected PL signals may be slightly suppressed, as well as that of the chirality. The increase of the radiation decay rate indicates a reduction of the carrier lifetime, which is further investigated through the time-resolved photoluminescence (TRPL) measurements, as shown in Figure S9. For instance, the carrier lifetimes of pristine bilayer WS2 and bilayer WS2/Au(I) and Au(II) hybrids are measured as 283, 243, and 221 ps, respectively. The reduced exciton lifetimes after coupling with the Au plasmonic structures are consistent with enhanced exciton radiation recombination processes of WS2. Derived from the framework of the theoretical design, higher valley polarizations can be achieved under σ+ excitation. Accordingly, the room temperature valley-polarized PL spectra of monolayer and bilayer WS2 are taken under an RCP light with 532 nm nonresonant excitation, as shown in Figure 5. The temperature and resonance excitation were always necessary to obtain a relatively high polarization in WS211,13,14 because the intervalley scattering and spin relaxation can be effectively suppressed. Therefore, combining the plasmonic coupling effect and the low temperature or resonance excitation can be expected to further improve the optical response and valley polarization of WS2. Given this, a 589 nm excitation closer to resonant pumping is further employed to study the valleypolarized PL spectra of monolayer and bilayer WS2, as shown in Figure S10. Considering the neutral exciton emission, the valley polarization of the monolayer (bilayer) WS2 is increased from 11.0% (15.4%) to 23.8% (45.1%) after coupling with Au structures. Although large valley polarizations can be obtained under low temperature or resonance excitation, the test conditions and environment are relatively harsh. However, we achieve considerable enhancement of the valley polarization under nonresonant excitation at room temperature, which has a more crucial significance in practical applications. In addition to the valley and spin indexes, the bilayer WS2 also has an additional index called layer polarization, which can provide information on the location of charge carriers. The stronger enhancement of the valley polarization in bilayer WS2 just demonstrates this layer polarization, which is aroused from not only the interlayer interactions but also the higher responsivity to the chiral plasmonic effect. Research Article ■ CONCLUSIONS In summary, two kinds of Au plasmonic arrays with achiral single prisms and chiral dimer prisms are designed for the study of enhanced optical response and valley polarization in monolayer and bilayer WS2. Raman and PL spectra of WS2/Au heterostructures exhibit marked and uniform enhancement effect, which is more prominent for the WS2/Au(II) system. Near-field intensity distribution evidences the formation of localized surface plasmon resonance, and thus is responsible for the promoted optical response. Resonant enhancement on the valley polarization is further investigated by analyzing the increased electromagnetic field intensity, exciton decay rate, and radiation efficiency. The value is not only layer-dependent but also associated with the chirality of Au periodic structures. Possible depolarization effects are also assessed in the excitation and emission processes. After a good theoretical design, a tunable valley polarization up to 30.0% is achieved in bilayer WS2, with the plasmonic coupling with Au(II) arrays. Our work provides an important way for enhancing the optical signals of 2D materials and offers a potential platform to exploit the manipulation of valley degree of freedom in the plasmonic-based optoelectronic and valleytronic applications. Figure 5. (a−c) Valley-polarized PL spectra of monolayer WS2 on SiO2/Si, Au(I), and Au(II) arrays, respectively. (d−f) Valley-polarized PL spectra of bilayer WS2 on SiO2/Si, Au(I), and Au(II) arrays, respectively. The degrees of polarization distributions are denoted by the blue circles. The spectra are measured under a 532 nm nonresonant excitation at room temperature. ■ generated PL spectra are mixed with the RCP and LCP components, as denoted by the black and red curves. The profile and position of all of the valley-polarized peaks are consistent with previous results in Figure 1, with the degree of polarization distribution denoted by the blue circles. Considering the neutral exciton emission, monolayer WS2 exhibits a really low valley polarization of 3.0% on SiO2/Si surface (Figure 5a) and attain higher values of 7.7 and 13.3%, respectively, as coupling with Au(I) and Au(II) arrays (Figure 5b,c). Bilayer WS2 possesses an intrinsic higher valley polarization of 6.6% (Figure 5d), and the value is increased to 12.0 and 30.0%, respectively (Figure 5e,f). The enhancement of valley polarizations is well consistent with the theoretical analysis, and the magnitudes are reasonably a little lower than the predicted values. In the previous reports, low THEORETICAL AND EXPERIMENTAL SECTION Fabrication of Plasmonic Coupling Heterostructures. Nanosphere lithography method is employed to construct Au plasmonic arrays. Single-layer polystyrene (PS) nanospheres with a diameter of 530 nm are fabricated on a SiO2/Si substrate using the self-assembly technology to form hexagonal closed packages, as shown in Figure S1. Then, Au atoms are thermally evaporated perpendicularly onto the triangle gaps of the nanospheres, forming Au(I) arrays. To obtain the Au(II) arrays, angle-resolved nanosphere lithography (AR NSL) is adopted.40 By dissolving the nanospheres away with the tetrahydrofuran (THF) solution and thermal annealing at 200 °C, Au(I) and Au(II) arrays are successfully achieved. Monolayer WS2 is synthesized on the sapphire structure using the typical CVD growth process with sulfur (S) (Aladdin, 99.99%) and tungsten trioxide (WO3) (Alfa Aesar, 99.9%) precursors.43 As-grown WS2 is transferred through the 35101 https://doi.org/10.1021/acsami.1c06622 ACS Appl. Mater. Interfaces 2021, 13, 35097−35104 ACS Applied Materials & Interfaces www.acsami.org Zhiming Wu − Department of Physics, OSED, Fujian Provincial Key Laboratory of Semiconductor Materials and Applications, Xiamen University, Xiamen 361005, P. R. China; orcid.org/0000-0003-2310-5270; Email: zmwu@xmu.edu.cn polymethyl methacrylate (PMMA)-assisted wet-transfer method onto the top of Au(I) and Au(II) prism arrays. Thermal annealing is then performed with 100 sccm argon and 5 sccm hydrogen to remove the organic residual and achieve better contact between Au and WS2 films. Characterizations. Surface topography of all of the samples is observed through an FEI Quanta-600 FEG Environmental SEM with a beam voltage of 6 kV. The thickness of the Au(I) and Au(II) arrays is measured using an SPA400 Nanonavi AFM. Extinction spectra of Au(I) and Au(II) arrays are characterized by a UV/vis spectrophotometer (PerkinElmer, Lambda 850). Stoichiometry and bonding states of WS2 are confirmed by a Quantum 2000 X-ray photoelectron spectroscopy (XPS) (Figure S3). Raman and PL signals are pumped using a 532 nm excitation laser and detected through a Horiba LabRam HR Evolution confocal spectrometer with a 100× objective lens. The TRPL spectra were recorded on a microscope spectrometer (HORIBA, MicOS) using a 325 nm pulsed semiconductor laser. For the valley polarization measurements, a linear polarizer and a quarterwave plate are placed in the excitation path to produce the left- and right-handed circularly polarized excitation lights. The polarization of emission lights is analyzed by the quarter-wave plate and another broad-band linear polarizer before the spectrometer system. All of the characterizations are carried out at room temperature. FDTD Simulations. Commercial FDTD simulation software package (FDTD Solutions, Lumerical Solutions, Inc.) is employed to perform the near-field electromagnetic wave calculations.44 According to the periodicity of the structures, only one unit is considered in the simulations, where the periodic boundary conditions along the x and y axes are adopted. Plane waves are incident perpendicularly along the negative direction of the z-axis, and the reflection, transmission, and extinction are monitored using a group of power monitors. To perform circularly polarized excitation, two plane waves polarized perpendicular to each other on the X−Y plane with a ±90° phase offset. A total of 112 pairs of dipoles with a phase difference of ±90° are distributed in the simulation area with random phases and position to calculate the chiral emission. Electromagnetic fields and decay rates are simulated within the power monitors and transmission box, respectively. The refractive indexes and extinction coefficients of Si, SiO2, and Au are obtained from Palik’s Handbook of Optical Constants,45 and the dielectric functions of monolayer and bilayer WS2 are deduced from the firstprinciples simulations. ■ Authors Gaohong Liu − Department of Physics, OSED, Fujian Provincial Key Laboratory of Semiconductor Materials and Applications, Xiamen University, Xiamen 361005, P. R. China Xuanli Zheng − Department of Physics, OSED, Fujian Provincial Key Laboratory of Semiconductor Materials and Applications, Xiamen University, Xiamen 361005, P. R. China Haiyang Liu − Department of Physics, OSED, Fujian Provincial Key Laboratory of Semiconductor Materials and Applications, Xiamen University, Xiamen 361005, P. R. China Jun Yin − Department of Physics, OSED, Fujian Provincial Key Laboratory of Semiconductor Materials and Applications, Xiamen University, Xiamen 361005, P. R. China; orcid.org/0000-0003-4551-3515 Congming Ke − Department of Physics, OSED, Fujian Provincial Key Laboratory of Semiconductor Materials and Applications, Xiamen University, Xiamen 361005, P. R. China Weihuang Yang − Key Laboratory of RF Circuits and System of Ministry of Education, Hangzhou Dianzi University, Hangzhou 310018, P. R. China Xu Li − Department of Physics, OSED, Fujian Provincial Key Laboratory of Semiconductor Materials and Applications, Xiamen University, Xiamen 361005, P. R. China Chunmiao Zhang − Department of Physics, OSED, Fujian Provincial Key Laboratory of Semiconductor Materials and Applications, Xiamen University, Xiamen 361005, P. R. China Junyong Kang − Department of Physics, OSED, Fujian Provincial Key Laboratory of Semiconductor Materials and Applications, Xiamen University, Xiamen 361005, P. R. China ASSOCIATED CONTENT * Supporting Information sı The Supporting Information is available free of charge at https://pubs.acs.org/doi/10.1021/acsami.1c06622. ■ Research Article Complete contact information is available at: https://pubs.acs.org/10.1021/acsami.1c06622 Schematic diagrams of the preparation process of the PS nanospheres arrays and the Au single- and dimer-prism arrays, morphologies of WS2/Au heterostructures 2D PL mapping, XPS of as-grown monolayer WS2, near-field distribution of the monolayer and bilayer WS2/Au hybrids under linearly polarized excitation, near-field distribution in monolayer WS2/Au heterostructures under circularly polarized excitation, near-field distribution in bilayer WS2/Au heterostructures under circularly polarized excitation, and near-field distribution EL and ER in monolayer WS2/Au heterostructures (PDF) Author Contributions G.L., X.Z., and H.L. contributed equally to this work. The manuscript was written through contributions of all authors. All authors have given approval to the final version of the manuscript. Notes The authors declare no competing financial interest. ■ ACKNOWLEDGMENTS The authors gratefully acknowledge the National Science Fund for Excellent Young Scholars (grant no. 62022068), the National Natural Science Foundation of China (grant nos. 61874092, 61774128, 61974123, 61674124, and 61804129), Science and Technology Project of Fujian Province of China (grant nos. 2018I0017 and 2019H0002), and Science and Technology Key Project of Xiamen (grant no. 3502ZCQ20191001). AUTHOR INFORMATION Corresponding Authors Yaping Wu − Department of Physics, OSED, Fujian Provincial Key Laboratory of Semiconductor Materials and Applications, Xiamen University, Xiamen 361005, P. R. China; orcid.org/0000-0001-9325-2212; Email: ypwu@ xmu.edu.cn 35102 https://doi.org/10.1021/acsami.1c06622 ACS Appl. Mater. Interfaces 2021, 13, 35097−35104 ACS Applied Materials & Interfaces ■ www.acsami.org (13) Nayak, P. K.; Lin, F. C.; Yeh, C. 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