Action Entry
Dresden-Team
Author: Torsten Boehme
Created: 01/08/2015 09:14 AM
Last edited by: Torsten Boehme
Modified: 01/08/2015 11:17 AM
Laser:
Laser Serial #:
Model / Site / Tool:
Sitronics / A52 (61577)
61577
Action Category:
Troubleshooting
Action Date: 01/08/2015
Laser ShotCt.:
SR #:
ELS-6600 / Sitronics / A52
Scheduled Downtime
Action Plan #:
Unscheduled Downtime
N/A
Special Config/Registry Changed
Action Description:
Status:
During processing a batch some wafers have rejected. In batch report window we see a “Dose Error” in front of
rejected wafers and “HV/Ep (upper & lower) level of energy too small” in “Warnings” window.
open
Actions:
1/8/2015 09:16 AM : Torsten
- original customer request:
- checked history due to problem still reported last year and not closed:
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HISTORY
10/03/2014 09:30 AM :
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04/22/2014
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09/11/2014
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9/17/2014
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- main recommendation: 9/11/2014:
- not done so far or no information recieved that customer ordered parts
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Laser report:
- data anlysis of costumer Sitronics system A52
Model: ELS 6600
Laser:SerialNo 61577
FEW report
FEW report
E 73 Gas supply prs high
E 73 Gas supply prs high
12-21-14 17:23:11
12-21-14 17:05:35
- E73 error cutomer feedback:
- checked last related diags:
D 44 F2 supply prs
D 45 Ne supply prs
D 46 He supply prs
515.4
552.6
448.8
kPa
kPa
kPa
- result: KrNe and KrFNe still above the gas requirements
W
W
W
W
W
W
151 Bad remote HV data
01-05-15 00:15:29
100 Inject orifice cal.
01-04-15 23:51:10
100 Inject orifice cal.
01-04-15 15:22:40
100 Inject orifice cal.
01-04-15 01:40:04
100 Inject orifice cal.
01-03-15 04:24:54
101 CCI Volts too high
12-30-14 09:06:19
W100, possibly related to the FAC supply pressure above SPEC
- recommend to adjust FAC supply pressure against MANIFOLD reading to adjust properly
Lifetime report
Lifetime report
automatic detection based on current Configuratin setting:
D 140 MN
B
D 141 LF
B
D 151
D 153
D 154
D 155
D 156
D 157
D 158
D 159
D 160
D 161
D 162
D 163
D 164
D 165
D 166
D 167
Shot total
Front window
Rear window
Laser chamber
Filter
Front optics
Rear optics
WCM module
HV pwr supply
Comprssn head
Commutator
Beam splitter
Controller
F2 trap
Shutter
Bearing life
13719 M
13963 M
real values due to counter adjustment by customer:
13963 M
real values due to counter adjustment by customer:
13963 M
real values due to counter adjustment by customer:
13963 M
real values due to counter adjustment by customer:
13718 M
real values due to counter adjustment by customer:
13718 M
real values due to counter adjustment by customer:
13718 M
real values due to counter adjustment by customer:
13718 M
real values due to counter adjustment by customer:
13718 M
real values due to counter adjustment by customer:
13718 M
real values due to counter adjustment by customer:
13718 M
real values due to counter adjustment by customer:
13718 M
real values due to counter adjustment by customer:
260.5 cycles
1941
Kcycles
21431
Hr Exp. LT 12000 hours, almost doubled
15249
15249
15249
15249
15004
15004
15004
15004
15004
15004
15004
15004
- all module lifetimes over limit
- even C274/275 are violating the safety aspect:
C 274 3000 F2TrapMt
C 275 3500 F2TrapLf
must be set to 2400
must be set to 3000
Maintenance Report
Maintenance Report
GsXdcrMt GL value = 8766 hours (MENSOR / Transduce calibration chamber pressure sensor)
curent reading:
C 220 48987 GsXdcrTm
- recommend to perform MENSOR calibration for CH/MAN/VAC
Energy / Valtage analysis
Energy / Valtage analysis
GR
- HV clipping in single pulses
- bad WL sigma
G2
- BW decrease and HV increase over gas life
G3
- HV mean reached maximum due to the offset needed for scanner HveP calibration
D 213
D 214
D 216
D 108
Avg10kVMinC
Avg10kEngy
Avg10kVlts
Energy Sigma
878
9831
899
1.6
V
uJ
V
%
WCM report
WCM report
D 75 Lambda Fine
2326.2 pm
D 76 Lambda Coarse
2326.1 pm
D 77 Lambda Dscrpncy 0.1
pm
D 78 Lambda Error
-0.01 pm
D 79 Lambda Linewidth 0.37
pm
D 80 Lambda Center
310
D 81 Lambda Stat:
L
D 82 Lambda Video floor 0.30
V
D 83 Lambda Video peak 2.98
V
D 84 Lambda Fe PCell 1.25
V
D 85 Lambda Left peak 1.74
V
D 86 Lambda Right peak 1.82
V
D 87 Lambda Temperature 27.61 DegC
D 88 Lambda dT/dt
0.01
DegC/min
D 89
D 90
D 91
D 92
D 93
Lambda Temp comp. -0.17 pm
AWR Lambda
248.3271 nm
AWR Lambda Error -0.01 pm
AWR Linwidth
0.83
pm
AWR PCell Dip
43
%
- values OK
FAC report
FAC report
D 44 F2 supply prs
D 45 Ne supply prs
D 46 He supply prs
515.4
552.6
448.8
kPa
kPa
kPa
- E73 error cutomer feedback:
- checked last related diags:
- result: KrNe and KrFNe still above the gas requirements
W
W
W
W
W
W
151 Bad remote HV data
01-05-15 00:15:29
100 Inject orifice cal.
01-04-15 23:51:10
100 Inject orifice cal.
01-04-15 15:22:40
100 Inject orifice cal.
01-04-15 01:40:04
100 Inject orifice cal.
01-03-15 04:24:54
101 CCI Volts too high
12-30-14 09:06:19
- F2 supply pressure below specifications: needs to be adjusted within specification
- N2 supply pressure below specifications: needs to be adjusted within specification
Configuration GLIST check
Configuration GLIST check (base)
D 7 V3.3 BL9
- Gas configs set per cymer request
- F2 trap limits are violation current safety instruction
stability configuration
gas configuration
C 130 260 F_FilDPr
C 131 2500 LasngPrs
C 132 2900 T_FilPrs
C 135 45 InjktDPr
C 142 54 BledDPrs
C 143 44 BledOPrs
C 162 120 InjHrMin
C 163 300 InjDltaV
C 165 50 F2PerHr_
C 166 534 F2PerMSh
energy stability
C 304 100 SgmaLock
C 305 150 SgmaUnlk
C 306 300 SgmaPeak
C 307 40 ISHldOff
C 308 50 ISSgmaLk
C 309 250 ISSgmaPk
C 310 60 ISSgmaUL
C 311 50 ISWvLckB
C 331 3 WCntlBnd
C 332 8 LineWMax
C 333 5984 WLAvWn_L
C 334 5984 WLAvWn_U
C 335 0 WLAvBQ_U
C 336 225 WLVrBQ_U
C 337 0 BndW_Lim
C 338 0 AvgVarWn
C 339 30 WLockWin
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Action Plan:
short term:
1. Gas Adaption:






C130 to 280 (is 260)
C166 to 650 (is 534)
refill
fire laser in WSR mode (internal energy, 10mJ, selflock, SL BI = 0.2s, SL BC = 125, Rep rate 2000 Hz)
fill out table below right after refill and every day, take GR
provide feedback/ datas
Average Pulse Energy Output at Internal HV Mode ( ENERGY MODE)
Manual Mode ( TRIGGER MODE )
Trigger Mode: Selflock
Selflock Burst Count: 125
Selflock Rep Rate: 2000 Hz
BURST COUNT:0
HV (Volt)
950
850
750
Rep. Rate (Hz)
Continuous
2000
2000
2000
Date/Notes
675
2000
D107 Pulse Energy (mJ)
1000
High Voltage & Bandwidth
100
HV
Reading
2. Blower system adaption
after gas daption adjust blower motor speed to minimum WL sigma error
fire in WSR mode
take GR
make adjustments to C370 (stepwise minus 50rpm)
take GR
compare WL sigma charts in FST and leave C370 at minimum WL sigma value
long term
allready provide september last year:
Energy Mode: Internal Sigma (Energy Mode)
Selflock Pulse Interval: 0.1 sec ( REP RATE)
Energy =10.0 mJ
D 108
D 79
=< 2.0% =< 0.5 pm
D 83
=< 5.0 V
D 84
D 85
D 86
D 40
45 – 65C
D 25
A
D16
D 155
Chamber
Shots(M)
D 151
Total
Shots(M)
Parts list to order:
- as already reported in March and April 2014 all consumables are over EOL (end of life)
- as next step Mikron should order all EOL consumables and ask for a service to replace the parts
LNM
order PN S143731
Chamber
order PN S107594
OC
order PN S05-06168-00
WCM
order PN S136616
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