From Technologies to Markets
Status of the
MEMS Industry
2021
Market and Technology
Report 2021
Sample
© 2021
GLOSSARIES
ADAS:
Advanced Driver Assistance System
FBAR:
Thin-Film Bulk Acoustic Resonator
OIS:
Optical Image Stabilization
AF:
Auto-Focus
GPF:
Gasoline Particulate Filter
pMUT:
Piezo Micromachined Ultrasound Transducer
AHRS:
Attitude & Heading Reference System
GPU:
Graphics Processing Unit
PVS:
Personal Vision Systems
AI:
Artificial Intelligence
HMD:
Head-Mounted Display
PZT:
Lead Zirconate Titanate
AR:
Augmented Reality
HUD:
Heads-Up Display
RF:
Radio Frequency
ANC:
Active Noise Cancellation
HVAC:
Heating, Ventilation & Air Conditioning
ROV:
Remotely Operated Vehicle
ASIC:
Application Specific Integrated Circuit
IC:
Integrated Circuit
SAW:
Surface Acoustic Wave
ASP:
Average Selling Price
IDM:
Integrated Device Manufacturer
SNR:
Signal to Noise Ratio
AUV:
Autonomous Underwater Vehicle
IJ:
Ink Jet
SoC:
System on Chip
BAP:
Barometric Air Pressure
IMU:
Inertial Measurement Unit
SOI:
Silicon On Insulator
BAW:
Bulk Acoustic Wave
IoT:
Internet of Things
TPMS:
Tire Pressure Monitoring Systems
CAGR:
Compound Annual Growth Rate
IP:
Intellectual Property
UAV:
Unmanned Aerial Vehicle
CIS:
CMOS Image Sensor
IR:
Infra Red
UGV:
Unmanned Ground Vehicle
cMUT:
Capacitive Micromachined Ultrasound Transducer
LWIR:
Long Wave Infra Red
V2X:
Vehicle To Everything
CPU:
Central Processing Unit
M&A:
Mergers & Acquisitions
VOA:
Variable Optical Attenuator
DLP:
Digital Light Processing
MAP:
Manifold Air Pressure
VOC:
Volatile Organic Compound
DOF:
Degree Of Freedom
MEMS:
Micro-Electro-Mechanical System(s)
VR:
Virtual Reality
DPF:
Diesel Particulate Filter
MIMO:
Multiple Input Multiple Output
WLO:
Wafer Level Optics
DSP:
Digital Signal Processing
MOEMS: Micro Opto-Electro-Mechanical System(s)
YoY:
Year-on-Year
ECG:
ElectroCardioGram
MOS:
Metal Oxide Semiconductor
ECM:
Electret Condenser Microphone
NDIR:
Non-Dispersive Infra Red
ESC:
Electronic Stability Control
NED:
Nanoscopic Electrostatic Drive
FADEC: Full Authority Digital Engine Control
NPU:
Neural Processing Unit
Status of the MEMS Industry 2021 | Sample | www.yole.fr | ©2021
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DEFINITIONS
• MEMS (micro electro mechanical systems) are semiconductor devices that include moving parts in the µm - mm range
and use a photolithography process for manufacturing. A MEMS sensor converts physical values (such as velocity,
temperature…) into an electric signal.
Supply chain positioning of MEMS sensors:
Front-end
Back-end
Sensor + ASIC
packaged
Sensor alone or sensor + ASIC chips
(multi-chip packages or monolithic)
First-level packaging: devices
mainly considered for
market forecasts
Second-level packaging
(module, transducer, transmitter)
Systems
(automotive, ex. powertrain)
• MEMS sensor chips are made of silicon (front-end manufacturing), generally assembled with an ASIC chip, and
packaged in first-level packaging (back-end manufacturing). Second-level packaging adds further electronics, robust
housing, and connectors. In this report we only consider first-level packaging’s value, and not 2nd-level,
module value.
• Exceptions: For applications that integrate chips directly in second-level packaging (automotive HVAC or oil, etc),
we consider a theoretical first-level packaging value.
Status of the MEMS Industry 2021 | Sample | www.yole.fr | ©2021
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APPLICATIONS TRACKED BY YOLE DÉVELOPPEMENT FOR EACH MEMS DEVICE (1/3)
Inkjet heads
Large/wide format printers for graphics and technical
Consumer and office
Thermal disposable head
Thermal permanent head
Piezoelectric permanent head
Thermal permanent printhead
Piezoelectric permanent head
Si microphones
Industrial & printing (digital
press, label, ceramics,
textile..)
Thermal permanent printhead
Piezoelectric permanent head
Consumer
Medical
Cellphone
Tablets
Laptops
Medical
Wearables
(Hearing aids)
Others (Home Automation, PMP,
Laptop, handheld GPS, PC peripherals,
toys…)
Automotive
Others
Automotive
Industrial,
defense, high
end
Pressure sensors
Pressure sensors for automotive
MAP Power Train
BAP Power Train
Particle Filter (DPF, GPF) Power Train
Fuel Tank Evaporation (EVAP) Power Train
Exhaust Gas Recirculation (EGR) Power Train
Engine Oil Power Train
Automatic Transmission Oil Power Train
TPMS Safety
Brake Booster Safety
Side Airbags Safety
Pedestrian protection Safety
HVAC
Thermal runaway
Pressure sensors
for industrial
Process control
HVAC
Transportation
Single accelerometers for consumer
Accelerometers for automotive
Cellphone
Tablets
Gaming
Remote controls
Wearables
Others (Home automation, PMP, Laptop,
handheld GPS, PC peripherals, toys…)
Standalone airbag front sensor
Airbag peripheral sensor
ESC acceleration sensor
Roll over sensing
TPMS
Other: integrated GPS, active suspension,
safety, vibration, EPB
Pressure sensors
for consumer
Pressure sensors for
medical
Pressure sensors
for aeronautics
Smart phones &
Blood monitoring invasive
tablets
Blood monitoring non-invasive
Air Data
Drones
Respiratory
FADEC
Wearables
Smart inhaler
Hydraulic & others
Smart homes/buildings
Others
Electronic cigarettes
Accelerometers
Accelerometers
for medical
Accelerometer for
pacemakers
Accelerometer for
other healthcare
applications
Accelerometers for industrial
Accelerometers for Accelerometers for
aeronautics
defense
Seismic - geophones
Antenna stabilization
Industrial vibration monitoring
Inclinometers
Offshore - Directional drilling + survey
GPS aiding, agriculture / mobile mapping
Other industrial applications
Missiles, guided
AHRS
munitions, bombs
Navigation
Defense stabilization
Other aero (vibration
systems
monitoring...)
Navigation and other
defense applications
Status of the MEMS Industry 2021 | Sample | www.yole.fr | ©2021
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APPLICATIONS TRACKED BY YOLE DÉVELOPPEMENT FOR EACH MEMS DEVICE (2/3)
Gyroscopes for
automotive
Single Gyroscopes for consumer
Mobile phone
Mobile phone (OIS)
Tablets
Gaming
Remote controls
Wearables
Others (DSC, PMP, laptop, handheld GPS,
PC peripherals, toys…)
Roll over
ESC gyroscope
GPS navigation
Gyroscopes
Gyroscopes for
Gyroscopes for industrial
medical
Stabilization systems
GPS aiding - Mobile mapping
ROVs / AUVs navigation for offshore
First responder systems
Drilling
Fall detection
Other commercial applications
Mobile phone
Tablets
Others
Auto
Optical
Optical MEMS Optical MEMS for
MEMS for
for telecom
medical
industrial
Switches
VOAs
Others (tunable
filters, optical
benches,
transceivers)
Microspectrometers
HMDs
Gyroscopes for defense
AHRS for general aviation / backup instrument
Flight control for civil helicopters and aircrafts /
navigation for civil & paramilitary UAVs / Others
Space satellites, spacecraft & skyrockets
Platform stabilization
Missile guidance, Guided munitions /
bombs
Defense UAV & UGV navigation /
control , Others
Inertial combos
Consumer accel
Consumer accel
Consumer 9 DOF
magneto
gyro combos
combos
combos
Magnetometers
Single Magnetometers Magnetometers
for consumer
for automotive
Cell phones
Tablets
Other consumer
applications (wearables)
Wearables
Gyroscopes for aeronautics
Adaptive
optics
Digital Cinema
Mobile phone
Tablets
Others
Optical MEMS
Optical
Optical
MEMS for
MEMS for
automotive aeronautics
HUDs
LiDAR
HUDs
Auto combos
accel gyro
Mobile phone
Tablets
Medical
Others (Wearables, Home
Automation, PMP, Laptop…)
Optical MEMS for
consumer
Optical MEMS
for defense
Home cinema projector
(including laser TV)
Pico projector (stand
alone and embedded)
Office projector
Autofocus
AR
HMDs
ESC combo,
Rollover
Robotic cars
Status of the MEMS Industry 2021 | Sample | www.yole.fr | ©2021
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APPLICATIONS TRACKED BY YOLE DÉVELOPPEMENT FOR EACH MEMS DEVICE (3/3)
Thermopiles 1-4 pixels
Thermopile arrays - 1x8 to
64x80 pixels
Wearable (spot
thermometer)
Industrial T measure, gas & fire
detection, HVAC, smart buildings
Medical
Microfluidics
Microdispensers & drug
Si biochips
delivery
Inhalers
MEMS Micropumps &
Microvalves
Microneedles
Thermal sensing/imaging MEMS
Microbolometers for
Microbolometers for industrial
automotive
Firefighting, maritime, surveillance,
thermography, PVS, Predictive
maintenance, building, process
control
Night vision
Microbolometers for defense
Microbolometers for
consumer
Soldier night vision, weapon sights,
enhanced driver vision, missile seekers
Mobiles, tablets & other
commercial (UAV, EVS, etc..)
RF MEMS
PoC testing
Next gen sequencing
& sample preparation
RF switches for telecom
RF switches for
industrial
Switch for Space
RF switches for defense
RF MEMS for cellphones
RF switches for base stations
RF switches for small cells
RF switches for ATE & RF
Instrumentation
Redundant matrix
Commutation matrix
Radar & communications
RF switches for
communications
RF switches for radars
BAW filters & duplexers
RF switches (antenna)
Antenna tuners
Oscillators and resonators
Microtips
Flowmeter
Consumer
Industrial
Automotive
Infrastructure &
telecom
Microtips & probes
Flow meter
TV, DSLR
Mobile, wearable, IoT
IIoT
Automotive
Base stations, servers,
routers,…
Microtips for AFM
Probes for ATE
Flow meter for medical and Diagnostics
flow meter for industrial
Environmental MEMS
Others
Humidity
Gas
Combos (multi-gas, humidity,
temperature, pressure)
Humidity for automotive
Humidity for consumer
Humidity for industrial
Chemical MEMS / Gas
sensor
Environmental hub
Microstructures, microvalves
Ultra sonic fingerprint
Microspeaker
Status of the MEMS Industry 2021 | Sample | www.yole.fr | ©2021
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TABLE OF CONTENTS
Part 1/5
Glossaries
2
Definitions
3
Applications tracked by Yole Développement
for each MEMS device
4
Table of contents
7
Scope of this report
12
Methodologies & definitions
13
About the authors
16
Companies cited in this report
18
What we got right, what we got wrong
19
Yole Group of companies related analyses
20
How to use our data?
24
3-Page summary
25
Executive summary
29
Context
72
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Semiconductors in the time of COVID-19
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End-markets
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The Human senses – Sensors to the rescue
Next consumer electronics revolution?
Automotive & mobility
Where are MEMS sensors needed in the car?
Robotic transportation - Key drivers
Market dynamics : global medical technology market
MEMS in the medical field
Healthcare megatrend: the changes are beneficial to the MEMS
industry
Chronic diseases, addictions…and many more
Medical applications
Industrial applications
Main trends in telecom & infrastructure
2020 estimated military budget by country (TOP 10)
Semiconductors for the soldier of the future
Defense and aerospace end-system trends
Electronic megatrends accelerating MEMS adoption
73
The two last years in perspective
Supply chain
Some Mems sensors at the heart of the covid-19 pandemic
Acceleration of pre-existing trends
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TABLE OF CONTENTS
Part 2/5
Market forecasts
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Forecasts by end-market
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Global MEMS forecasts by end market (by volume & value)
Consumer (by volume & value)
Automotive (by volume & value)
Industrial (by volume & value)
Medical (by volume & value)
Telecom (by volume & value)
Defense & aerospace (by volume & value)
MEMS market dynamics by end-market
Market share (by value) of the 6 main MEMS markets
The best growth opportunities in each market (by device type)
Forecasts by device
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103
MEMS market forecasts by device (by volume & value)
Inkjet heads (by volume & value)
Pressure (by volume & value)
Microphone (by volume & value)
Accelerometer (by volume & value)
119
Gyroscope (by volume & value)
Magnetometer (by volume & value)
Inertial combos (by volume & value)
Optical (by volume & value)
Thermal imaging/sensing (by volume & value)
Si-microfluidic (by volume & value)
RF (by volume & value)
Oscillators (by volume & value)
Environmental (by volume & value)
Future (by volume & value)
MEMS market dynamics by device
Wafer starts
Wafer starts – volume detail
Analysis
Market trends
148
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New products
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MEMS inkjet printheads
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Pressure MEMS - Consumer trends
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Outlook for powertrain MEMS pressure sensors
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TABLE OF CONTENTS
Part 3/5
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Scenarios for powertrain MEMS pressure sensors in the long term
Market shares & supply chain
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Automotive market
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Microphones market trends
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Microphone and inertial MEMS market trends
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Inertial MEMS market trends
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Inertial MEMS have gone to Mars
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Two battlefronts for thermal detectors & imagers
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Microbolometer trends (thermography)
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Microbolometer trends - Automotive
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Optical MEMS market trends
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Optical mems: stand-alone mirrors
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Microfluidic Device – Market trends
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BAW Filters – Market trends
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MEMS switching – Market trends
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MEMS Timing – Market trends
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Ultrasound market trends
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MEMS microspeaker market trends
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Environmental Impact of MEMS
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Evolution of sensing?
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Achieving emotion sensing
Player’s ranking
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182
2020 mems players rankings
Top mems player’s technology breakdown
Business model diversity
Comments on MEMS players rankings
Similarity between semicon parent and child
MEMS foundries ranking
Foundries map
MEMS foundries device capabilities
Comments on foundry players
Market shares
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Mems inkjet heads market shares
Pressure mems market shares
Mems microphones market shares
Mems accelerometers market shares
Mems gyroscopes market shares
Mems magnetometers market shares
Inertial combos market shares
Optical mems market shares
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TABLE OF CONTENTS
Part 4/5
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Thermopiles market shares
Microbolometers market shares
Si microfluidics market shares
Rf mems market shares
Mems oscillators market shares
Ecosystem dynamics
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General MEMS trends
217
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Manufacturing trends
218
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Investments, fundraisings & Ipos of the year
M&A and partnerships of the year
MEMS startup recent history
MUT technology supply chain
Promising mems players to follow
Conclusions
Technology trends
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Thinning roadmap for MEMS devices
Identified photolithography step COUNT
manufacturing
Lithography process
Lithography process key parameters
MEMS lithography requirements and trends
IN
MEMS
die
General bonding requirement for MEMS & sensors
Permanent bonding adoption in MEMS
Specific bonding requirements/challenges by mems & sensors type
W2W permanent bonding adoption for MtM devices and capping
Focus on MEMS 3D integration
Synthesis
Device technology trends
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PiezoMEMS technologies
Inkjet Heads - Technology trends
Pressure MEMS technology trends
Intelligent TPMS from Melexis
Intelligent tires
Inertial sensors technology trends
Inertial and optical technology trends: MOEMS-based sensor
Optical mems: micromirrors array
Optical mems: Stand-alone mirrors
Optical MEMS: STMicroelectronic’s micromirrors
Microbolometer technology trends in Automotive
Microfluidic Device – Technology trends
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TABLE OF CONTENTS
Part 5/5
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New types of MEMS devices?
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Heterogeneous integration: Moving up the signal chain
Keeping a perfect balance
More data fed to telematics
The next phase of growth could come from data insights
the value chain follows the data flow
Cloud and edge computing
Ai is coming down from the cloud and towards the edge
Type of AI targeted
EDGE AI Startups related to MEMS
Conclusions
Outlook
270
MEMS based force/touch sensors & haptics
Energy harvesting
Xray MEMS
From sensor to system
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RF MEMS – Technology trends
MEMS Filters - Acoustic filter technology at a turnaround
MEMS oscillators technology trends
Mems for optical image stabilization
MEMS sensor-shift OIS: a future opportunity?
Mems probe cards
Environmental MEMS – Gas sensors
Environmental sensors – Key detection principles
MUT technology
Competition and penetration of CMUT & PMUT
Mems microspeakers: different structures
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MEMS market dynamics forecast by end-market
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MEMS market dynamics by device
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Evolution of MEMS sensors
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How to revitalize the MEMS Market
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From senses to emotions
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General conclusions
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Outlook
Appendix
294
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Manufacturing process flows
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Reverse Costing ® Structure, Process and Cost Analyses
Status of the MEMS Industry 2021 | Sample | www.yole.fr | ©2021
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SCOPE OF THIS REPORT
Markets
MEMS devices
Forecasts
Players
Trends
Inkjet heads
Pressure
Consumer
Microphones
Forecasts
Players and ranking
Market Trends
Market shares
Technology Trends
Accelerometers
Gyroscopes
Automotive
Units
Magnetometers
Inertial combos
Optical
Industrial
Microbolometer
$US Dollar
Thermopiles
8’’
Si-microfluidics
Medical
Oscillators
Microtips
Telecommunications
The objectives of this report are to provide:
o
o
Flowmeters
Environmental (humidity, gas
sensors, env. hubs)
Defense & Aerospace
Wafers
RF
Future (microspeaker,
cMUT/pMUT for medical, pMUT
for ultrasonic fingerprint)
o
o
o
A global view about the future of MEMS
An understanding of the MEMS markets and
applications (consumer, automotive, industrial,
medical, telecom, and defense & aeronautics)
MEMS players’ rankings, dynamics and market
shares
MEMS market data in $M, units, and wafers for
2020 – 2026 and 2019-2026
A presentation of MEMS market and technology
trends
Are your needs
outside the scope
of this report?
Contact us for a customized report:
Status of the MEMS Industry 2021 | Sample | www.yole.fr | ©2021
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METHODOLOGIES & DEFINITIONS
Yole’s market forecast model is based on the matching of several sources:
Preexisting
information
Market
Volume (in Munits)
ASP (in $)
Revenue (in $M)
Information
Aggregation
Status of the MEMS Industry 2021 | Sample | www.yole.fr | ©2021
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ABOUT THE AUTHORS
Biographies & contacts
Dimitrios Damianos, PhD
Dimitrios Damianos is a Senior Technology & Market Analyst, part of the Photonics & Sensing division at Yole Développement (Yole). Based on solid technical expertise in imaging,
sensing, display, lighting, and photonics, Dimitrios oversees the day-to-day production of valuable technology & market reports and custom consulting projects. Dimitrios also serves as a
member of the Custom Project Business Development division (CPBD), supporting the development of strategic projects and following Yole’s leading customers within the
semiconductor industry. Dimitrios regularly presents and delivers keynotes at international conferences and exhibitions. He has also authored and co-authored several technical & market
reports as well as scientific papers in international peer-reviewed journals.Dimitrios holds a BSc in Physics and an MSc in Photonics, both from the University of Patras (GR), and a Ph.D.
in Optics & Microelectronics from the University of Grenoble-Alpes (FR).
Contact: dimitrios.damianos@yole.fr
Jérôme Mouly
Jérôme Mouly is Team Lead Analyst in the Sensing & Actuating team within the Photonic & Sensing Division at Yole Développement (Yole). Jérôme manages the expansion of the
technical expertise and market know-how of the team. He actively supports and assists in the development of a dedicated collection of market & technology reports as well as custom
consulting projects. He has conducted more than 100 marketing and technological analyses for industrial groups, start-ups, and institutes in the field of MEMS and sensing technologies.
Jérôme has been also deeply engaged in Yole's finance activities with a dedicated focus on the commercial exploitation of smart system technologies and access to funding opportunities.
Jérôme is regularly involved in international conferences, with presentations and keynotes. Jérôme Mouly earned a Master of Physics degree from the University of Lyon (FR).
Contact: jerome.mouly@yole.fr
Pierre Delbos
Pierre DELBOS is a Technology & Market Analyst in the Photonics & Sensing division at Yole Développement. Pierre is involved in the development of technology and market reports
covering MEMS & sensing technologies, including inertial sensors, microphones, gas sensors and electronic noses. He also collaborates with his team on custom studies for key players in
the MEMS Industry. Pierre is preparing his Microelectronics and Photonics Engineering degree at the Grenoble Institute of Technology PHELMA (Grenoble, France).
Contact: pierre.delbos@yole.fr
Status of the MEMS Industry 2021 | Sample | www.yole.fr | ©2021
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COMPANIES CITED IN THIS REPORT
AAC, AKM, Alps Electric, Amphenol, Ams, Analog Devices, Apple, Arioso, Asia Pacific Microsystems, Aspinity,
Atomica (ex IMT), Audiopixels, Boehringer Ingelheim Microparts, Bosch, Broadcom, Butterfly Network, Canon,
Cartesiam, Colibrys, Collins Aerospace (EX UTC), Cirrus Logic, CSEM, Denso, DRS, Epcos, Epson, First Sensor
Technology, FLIR Systems, Formfactor, Fraunhofer IPMS, Fujifilm Dimatix, Gettop, Goermicro (Goertek), Google,
Hanking Electronics, Hewlett Packard, Honeywell, Imec, Infineon Technologies, Knowles Electronics, Lynred,
Maxim, Melexis, Memscap, Memsensing, Memsic, Micralyne, Murata, Nxp, Omron, On Semi, Panasonic, Qorvo,
Qualcomm, Raytheon, RF360, Rohm, Samsung, Sensata, Sensirion, Si Time, Silex Microsystems, Silicon Sensing
Systems, Sintef, SMI, Sony, STmicroelectronics, Syntiant, Taiyo Yuden, TDK, TE Connectivity, Teledyne Dalsa, Texas
Instruments, TowerSemi,VIS (Vanguard International Semiconductor),VTT, TSMC, UMC, Usound, X-Fab, Xmems,
and more.
Status of the MEMS Industry 2021 | Sample | www.yole.fr | ©2021
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WHAT WE GOT RIGHT, WHAT WE GOT WRONG
•
Strong momentum for pressure MEMS,
thermopiles, microbolometers as well as
cMUT due to the pandemic
•
The effect of covid-19 on 2020 MEMS
shipments and revenues was not negative, as
initially thought.
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Effects on automotive MEMS were negative,
altough less than what initially expected
•
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The move toward more intelligence (software,
processing, algorithms and the advent of AI)
on the edge, proven by recent developments
(new products, collaborations, funding,
acquisitions)
Some players’ revenues for 2019 had been
overestimated (Broadcom) and
underestimated (Bosch) which we have now
corrected (associated comments in the
report). We also adjusted NXP’s revenue to
reflect the pure MEMS sensor business (we
consider only 3-axis and 6-axis
magnetometers for eCompass as MEMS)
Status of the MEMS Industry 2021 | Sample | www.yole.fr | ©2021
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SUPPLY CHAIN
Chip shortage – The reasons
Multiple
reasons to
explain the
chip shortage.
The pandemic prompted chip
factories to start shutting down early
last year. COVID-19 also started a
new way of working: home office for
adults and for children, learning from
home.
When people began working from
home and children were attending
school remotely, it caused a massive
spike in PCs, tablets and consumer
electronics. Stay-at-home orders
drove a surge in consumer
electronics sales.
Where are my chips?
During the past year, the US-China trade
tensions strengthened the supply chain.
Fears of sanctions prompted tech
companies in China to stockpile chips
and prepare for the worst to protect
against U.S. export restrictions .
Severe winter weather in Texas has
forced chip makers to shut down their
factories. A fire at a Japanese chipmaking factory owned by Renesas also
worsened the situation. Taiwan’s worst
drought in decades added pressure to
the global chip shortage.
Status of the MEMS Industry 2021 | Sample | www.yole.fr | ©2021
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ACCELERATION OF PRE-EXISTING TRENDS
Industry 4.0
Cloud technologies
5G technologies
Edge computing
AR/VR
Robotics & Automation
Mobility (electrification,
ADAS, AV, transportation, etc)
Biometrics
Status of the MEMS Industry 2021 | Sample | www.yole.fr | ©2021
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MEMS MARKET DYNAMICS FORECAST BY END-MARKET
Consumer
Industrial
Telecom
Automotive
Medical
Defense & Aerospace
$0.14B
CAGR
16.9%
$2.1B
$11.27B
CAGR 6%
$0.06B
CAGR 7.9%
$1.47B
$7.13B
CAGR 5.8%
$2.03B
$0.55B
$0.8B
2020
$0.72B
$2.86B
$1.18B
CAGR 4.5%
CAGR 6.7%
CAGR2020-2026
7.2%
2026
$18.2B
$12.1B
Status of the MEMS Industry 2021 | Sample | www.yole.fr | ©2021
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MEMS MARKET DYNAMICS BY DEVICE
Inkjet heads
Microbolometers
Pressure
Optical
Microphones
Environmental
Future
$1,871M
Microfluidics
Accelerometers
RF
Gyroscopes
Oscillators
5.2%
$4,049M
$481M
12%
-3.2%
Magnetometers
$1,394M
Inertial combos
$2,362M
$1,381M
Thermopiles
$753M
3.5%
3.8%
$2,127M
4.9%
$2,050M
2.4%%
$916M
$601M
$1,134M
6%
$967M
$584M
$385M
9.5%
$1,768M
$338M
9.2%
$1,363M
18.1%
$1,503M
19.1%
$199M
$142M
$546M
0.6%
16.5%
$204M
$842M
$530M
$182M
$176M
CAGR2020-2026
7.2%
$395M
12.1%
Forecast 2026: $18.2B
Revenues
$M
CAGR19-25
$72M $199M
Revenues 2020: $12.1B
Status of the MEMS Industry 2021 | Sample | www.yole.fr | ©2021
20
TOP-30 PLAYERS GROWTH RANKING
Player
RF MEMS
companies
had the
biggest MEMS
business
growths
followed by
thermal
MEMS and
microphones.
2020
YoY
GUIDE IR
$
2019
20
$
84
331%
SI TIME
$
84
$
116
38%
QORVO
$
490
$
672
37%
AAC
$
131
$
165
26%
FLIR SYSTEMS
$
110
$
137
24%
MELEXIS
$
61
$
74
21%
BROADCOM
$
991
$ 1,189
20%
CANON
$
222
$
264
19%
GOERMICRO
$
400
$
470
18%
LYNRED (ex-ULIS)
$
101
$
116
15%
AMPHENOL
$
108
$
120
11%
INFINEON TECHNOLOGIES
$
305
$
333
9%
ROBERT BOSCH
$
1,599
$ 1,716
7%
STMICROELECTRONICS
$
604
$
611
1%
TDK
$
393
$
397
1%
AKM
$
224
$
220
-2%
ALPS ALPINE
$
118
$
114
-3%
EPSON
$
86
$
82
-4%
RF 360 (Qualcomm+EPCOS)
$
82
$
77
-6%
331%
38%
37%
26%
24%
21%
20%
19%
18%
15%
11%
9%
7%
1%
1%
-2%
-3%
-4%
-6%
ANALOG DEVICES
$
255
$
238
-7%
-7%
KNOWLES ELECTRONICS
$
465
$
432
-7%
-7%
HONEYWELL
$
290
$
261
-10%
-10%
MURATA
$
240
$
216
-10%
-10%
HEWLETT PACKARD
$
493
$
442
-10%
SENSATA
$
149
$
132
-12%
TE CONNECTIVITY
$
300
$
260
-13%
-13%
NXP
$
301
$
260
-14%
-14%
COLLINS AEROSPACE
$
120
$
102
-15%
-15%
PANASONIC
$
285
$
241
-15%
-15%
TEXAS INSTRUMENTS
$
595
$
494
-17%
-10%
-12%
-17%
-20%
-10%
0%
10%
20%
30%
40%
Status of the MEMS Industry 2021 | Sample | www.yole.fr | ©2021
21
MEMS FOUNDRIES RANKING
YoY%
10%
-3%
-6%
7%
17%
25%
4%
10%
10%
2%
8%
18%
-6%
-14%
0%
10%
20%
15%
-20%
-10%
0%
10%
20%
Status of the MEMS Industry 2021 | Sample | www.yole.fr | ©2021
30%
22
MEMS MICROSPEAKERS: DIFFERENT STRUCTURES
Arioso Systems
• Size: 10mm²
• Up to 120 dB SPC
• Tech: All-Silicon Nanoscopic
Electrostatic Drive (NED)
AudioPixels
• Tech: Digital Sound
Reconstruction (DSR) – arrays
of pressure generating drivers
Sonic Edge
N/A
Principle: modulation of an
ultrasound signal to generate
a high quality sound
xMEMS
• Full bandwidth (20Hz-20kHz)
with flat frequency response at
115dB SPL (sealed)
• Size: 50mm3
• Thickness: <1mm thickness
• Better SPL/mm3
• Tech: Monolithically integrated
piezo-MEMS
Usound
•
•
•
•
Size: 4.7mm x 6.7mm
Width: 1.6 mm
Up to 74 dB SPC
Tech: MEMS PZT actuators
with classic membrane on top
Status of the MEMS Industry 2021 | Sample | www.yole.fr | ©2021
23
OPTICAL MEMS STAND-ALONE MIRRORS
Bubble MEMS for LiDAR and AR/VR applications
With a simple planar packaging, it is impossible to have a 180° scanning → limited performances at large scanning angles
Bubble MEMS
could be the
next
generation of
packaging for
stand-alone
mirrors.
Courtesy of OQmented
OQmented has developed “Bubble MEMS”: a wafer-level packaging
technique, using a spherical vacuum encapsulation. Done in 8” platform.
•
•
•
•
Spherical → 180° scanning
Wafer-level packaging → high volumes
Vacuum encapsulation
→ no moisture and dust
→ better reliability and lifetime
Unique Lissajous scanning:
Faster
screen
refresh
rate than
normal
scanning
Courtesy of OQmented
Status of the MEMS Industry 2021 | Sample | www.yole.fr | ©2021
24
MEMS FOR OPTICAL IMAGE STABILIZATION
New option for optical image stabilization: MEMS technology. Two major players → MEMSDrive (China) and Sheba
Microsystems (Canada)
Comparison between VCM and
MEMS technology:
The MEMS
OIS
technology
consumes less
power and is
more accurate
than the VCM
OIS
technology.
Courtesy of MEMSDrive
•
•
•
•
•
•
Five axis:
o Pitch
o Yaw
o Roll
o x/y translation
Sub-micron accuracy
In-compensation within10ms
100 times less energy consumption
than VCM OIS (~10 mW)
70% smaller than VCM
Compatible with SMT, Die-attach
Courtesy of Sheba Microsystems
•
•
•
•
Three axis:
• Pitch
• Yaw
• Roll
VCM
MEMSDrive
Submicron accuracy
200-500Hz depending on the load
Low power < 2 mW
Status of the MEMS Industry 2021 | Sample | www.yole.fr | ©2021
25
TECHNOLOGY TRENDS
PiezoMEMS technologies: trends in the deposition techniques
• PiezoMEMS family of products includes, among others sensors and actuators such as inkjet
printheads, BAW, microphones, microspeakers, optical MEMS, MEMS autofocus…
• Experience in piezoMEMS manufacturing is increasing, and we observe some changes in the
industry with PVD, and particularly sputtering techniques becoming the deposition technology of
choice.
Sol-Gel techniques
PVD – Sputtering techniques
*
* Keeping both sol-gel and sputtering techniques in-house
Status of the MEMS Industry 2021 | Sample | www.yole.fr | ©2021
26
HETEROGENEOUS INTEGRATION: MOVING UP THE SIGNAL CHAIN
SIGNAL CHAIN
From Data
to Information
to Knowledge
Sense &
Digitize
Process
Connect
Raw, analog
data
S/W,
algorithms
Communications
Analyze
Challenges for heterogeneous integration (source IRDS 2020):
• Increase sensor performance, signal integrity and system-level
performance while reducing cost
• Integration of different components (MEMS, ASIC, antennas, power
sources, etc) that use different materials and processes under the
same advanced package → SiP type, like its already used?
Predict &
React
Done typically in the cloud
From
Heterogeneous integration is key
to Actionable Insights
Wire Bond
Flip Chip/SMT
To
WB SiP (Stacked Die)
FC SiP
Emergence of new SiP-like packaging technologies will be
required to address the needs for heterogeneous integration
for functional performance and faster time-to-market.
Status of the MEMS Industry 2021 | Sample | www.yole.fr | ©2021
27
EVOLUTION OF MEMS SENSORS
Technology x market
development
MEMS 3.0
Sensing & Actuating
MEMS 2.5
MEMS 2.0
MEMS have a
long history
and are
continuously
evolving.
Exciting times
lie ahead with
acceleration of
development,
as sensors
become more
intelligent.
MEMS 1.5
Smart sensors (edge AI)
Robotic
servants
Sensor Networks
Combos in a single
package
MEMS 1.2
MEMS 1.0
Combos
IoT nodes
Stand-alone
Smart
homes
Voice HMI
Wearables boom
Safety applications
Environmental hubs
Smartphone boom
Hearables/ VPA boom
Automotive
1990
20 years
2010
10 years
2020
Autonomous
vehicles
AR/VR
5 years
2025
5 years?
2030?
Acceleration of development
Status of the MEMS Industry 2021 | Sample | www.yole.fr | ©2021
28
EVOLUTION OF SENSING?
Technology x market
development
The next dimension for consumer/mobile/
IoT devices → add more senses
Taste?
From the first
image sensors
decades ago, to
current gas
sensors, the
capabilities of
sensors are ever
evolving.
6th Sense:
Emotion??
Smell
Touch
Hear
See
We still have yet
to see taste
sensors, but
emotion sensing
has already
appeared.
-CMOS image
sensor
1990
20 years
-Microphones
-Microspeakers
2010
-Touchscreen
-Inertial
10 years
-Environmental
-Gas
-E-nose
2020
5 years
2025
5 years?
2030?
Acceleration of development
Status of the MEMS Industry 2021 | Sample | www.yole.fr | ©2021
29
YOLE GROUP OF COMPANIES RELATED ANALYSES
Yole Développement
Gas and Particle Sensors –
Technology and Market Trends
2021
MEMS Pressure Sensors Technology and Market Trends
2021
Wearables for Consumer and
Medical markets 2020
Contact our
Sales Team
for more
information
LiDAR for Automotive and
Industrial Applications 2020
5G's Impact on RF Front-End and
Connectivity for Cellphones 2020
Status of the MEMS Industry 2021 | Sample | www.yole.fr | ©2021
30
YOLE GROUP OF COMPANIES RELATED ANALYSES
System Plus Consulting
Contact our
Sales Team
for more
information
Analog Devices High-End
Accelerometers and Gyroscopes
Comparison
Consumer MEMS Microphones
Comparison 2020
Status of the MEMS Industry 2021 | Sample | www.yole.fr | ©2021
31
HOW TO USE OUR DATA?
Yole Group of Companies, including Yole Développement,
System Plus Consulting and PISEO, are pleased to provide
you a glimpse of our accumulated knowledge.
We invite you to share our data with your own network,
within your presentations, press releases, dedicated
articles and more, but you first need approval from Yole
Public Relations department.
If you are interested, feel free to contact us right now!
We will also be more than happy to give you updated data
and appropriate formats.
Your contact: Sandrine Leroy, Dir. Public Relations
Email: leroy@yole.fr
Status of the MEMS Industry 2021 | Sample | www.yole.fr | ©2021
32
CONTACTS
REPORTS, MONITORS & TRACKS
Western US & Canada
Steve Laferriere - steve.laferriere@yole.fr
+ 1 310 600 8267
Eastern US & Canada
Chris Youman - chris.youman@yole.fr
+1 919 607 9839
Europe and RoW
Lizzie Levenez - lizzie.levenez@yole.fr
+49 15 123 544 182
Benelux, UK & Spain
Marine Wybranietz - marine.wybranietz@yole.fr
+49 69 96 21 76 78
›
›
DACH (North Germany, Austria, Switzerland)
Neha CHAUDHURY - neha.chaudhury@yole.fr
+49 172 97 47 248
South Germany & France
Martine Komono - martine.komono@yole.fr
+49 173 69 43 31
India and RoA
Takashi Onozawa - takashi.onozawa@yole.fr
+81 80 4371 4887
Greater China
Mavis Wang - mavis.wang@yole.fr
+886 979 336 809 +86 136 6156 6824
FINANCIAL SERVICES
CUSTOM PROJECT SERVICES
Jean-Christophe Eloy - eloy@yole.fr
+33 4 72 83 01 80
›
Ivan Donaldson - ivan.donaldson@yole.fr
+1 208 850 3914
Jérome Azémar, Yole Développement jerome.azemar@yole.fr - +33 6 27 68 69 33
› Julie Coulon, System Plus Consulting jcoulon@systemplus.fr - +33 2 72 17 89 85
Korea
Peter Ok - peter.ok@yole.fr
+82 10 4089 0233
Japan
Miho Ohtake - miho.ohtake@yole.fr
+81 34 4059 204
Japan and Singapore
Itsuyo Oshiba - itsuyo.oshiba@yole.fr
+81 80 3577 3042
Japan
Toru Hosaka – toru.hosaka@yole.fr
+81 90 1775 3866
GENERAL
›
Jean-Christophe Eloy, Marketing & Communication
eloy@yole.fr - +33 472 83 01 01
›
Sandrine Leroy, Public Relations
sandrine.leroy@yole.fr - +33 4 72 83 01 89
›
General inquiries: info@yole.fr - +33 4 72 83 01 80
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2021 | Sample | |www.yole.fr
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