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NV6200

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A Resource for Semiconductor Manufacturers
6200 AV SKM Source With Vaporizer For Eaton NV6200
P/N 10250V
P/N 10260V
P/N 10250V
P/N 10260V
PO Box 217 Leander, TX USA 78646-0217
800-621-9598 [email protected] www.glemco.com
G-30-006AH12 Rev01
A Resource for Semiconductor Manufacturers
1
14
10
13
2
4
3
5
8
11
12
6
9
7
15
Item
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
P/N
10301
10650
30105
30120
30130
30140
30200
30210
30500
30505
30515
30565
82415
82623
30106A
Description
Corona Shield
3 Pc. SKM Arc Chamber Assembly
No.2 Mounting Stage, Dual Gas
Filament Insulator, Boron Nitride
Outer Electrode Insulator
SKM Inner Electrode Insulator
Filament Buss Assembly
Filament Clamp
Filament Electrode
SKM Electrode Connector
Tungsten Retainer Clip
SKM Filament, Tungsten
6-32 X 1/2” SHCS, SST
4-40 X 3/16” BHSS, SST
Arc Chamber Mounting Stage
PO Box 217 Leander, TX USA 78646-0217
800-621-9598 [email protected] www.glemco.com
OEM
0342-0934-3001
0897-0033-0001
No Reference
3111-0004-0001
3111-0005-0001
3113-0015-0001
0342-0369-3001
0951-0003-1001
1550-0016-0001
1001-0016-0001
6692-0083-0001
1979-0004-0001
1231200608
1236200404
No Reference
1
QTY
1
1
1
2
2
2
2
2
2
1
2
1
4
8
1
G-30-006AH12 Rev01
A Resource for Semiconductor Manufacturers
6
3
4
2
12
1
9
5
13
11
10
7
8
Item
1
2
3
4
5
6
7
8
9
10
11
12
13
P/N
10300
10304
10305
10306
10307
10609
40100
40800
82412
82447
82486
82623
10623A-5
Description
Source Can
Magnet Shunt, Set
Magnet Pole
Copper Thermal Seal
Source Magnet
Dual Gas Cooling Plate
Vapor Source Crucible
Open Crucible Coupling
6-32 X 1/4”, SHCS, SST 18-8
SHCS 1/4-20 X 2 1/2” SST
Washer 1/4” Standard 18-8 SST
4-40 X 3/16” BHSS, SST
Gas Feed Tube
PO Box 217 Leander, TX USA 78646-0217
800-621-9598 [email protected] www.glemco.com
OEM
0342-0562-2001 / 2791-0028-0001
7120-0001-2001
5936-0001-2001
7058-0001-1001
4630-0002-2001
No Reference
0342-0519-2001
1066-0006-1001
6973-0002-6202
No Reference
No Reference
1236200404
No Reference
2
QTY
1
1
2
2
1
1
1
1
6
2
2
8
1
G-30-006AH12 Rev01
A Resource for Semiconductor Manufacturers
2
5
6
1
7
3
Item
1
2
3
4
5
6
7
P/N
10145
10146
40104
40116
82412
82606
40115V
4
Description
Vaporizer Tube, 6200 Series
Vaporizer Heater Wire Assembly, 6200 Series
Vapor Source Clamp, Set
Thermocouple Assembly
6-32 X 1/4”, SHCS, SST 18-8
No.6 Regular Spring Washer, 18-8 SST
Manifold Vapor Source, Vaporizer Version
PO Box 217 Leander, TX USA 78646-0217
800-621-9598 [email protected] www.glemco.com
3
OEM
No Reference
No Reference
0951-0008-1001
No Reference
6973-0002-6202
4400034
No Reference
QTY
1
1
1
1
2
2
1
G-30-006AH12 Rev01
A Resource for Semiconductor Manufacturers
P/N 10250V
P/N 10260V
P/N 10611A
Source Plate Sub-Assembly
Vaporizer
PO Box 217 Leander, TX USA 78646-0217
800-621-9598 [email protected] www.glemco.com
P/N 10611B
Source Plate Sub-Assembly
Vaporizer, Push On Feedthru
4
G-30-006AH12 Rev01
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