SENSOR TECHNOLOGIES Abstract: Recent advances of sensor technologies have been powered by high-speed and low-cost electronic circuits, novelsignal processing methods, and advanced manufacturing technologies. The synergetic interaction of new developments inthese fields provides promising technical solutions increasing thequality, reliability, and economic efficiency of technical products.With selected examples, we will give an overview about the significant developments of methods, structures, manufacturing technologies, and signal processing characterizing today’s sensors andseI. INTRODUCTION: The Competition in markets requires the permanentenhancement of quality and reliability of products. Therising demand for automation, security, and comfort leads to completely new applications for sensor systems. The number ofsensor systems required and the diversity in most applicationsare permanently increasing. To keep up with the new requirements, the design of sensor systems is required to provide novelapproaches and solutions profiting from recent developments inscience and technology.Sensors and sensor systems achieve their function through aninterlocked interaction of sensor structure, manufacturing technology, and signal processing algorithms.The developments in sensor technology are consequentlybased on the permanent technical progress in these fields. Particularly, in the last years, a significant upturn is observed in these fields involving a great potential for completelynovel approaches of sensors and sensor systems. Using newtechnologies and signal processing methods, even well-knownmeasurement principles could be used, leading to considerablyimproved sensor features. SENSOR STRUCTURE: In the kernel of a sensor system is the sensor element,which changes its output depending on the measured quantity.In a preprocessing unit, the sensor signal is transformed in an adequate amplified and filtered signal using analog signalprocessing techniques. Using digital signal processing, themeasured quantity can be calculated under consideration ofmanufacturing variance, influence factors, and aging processesnsor systems. Predominantly observed development trends in thefuture are discussed. By means of low-cost analog-to-digital converters, signal processing is increasingly shifted from the higher system level in the sensor level. The diverse facilities in digital signal processing involve new approaches for the improvement of sensor properties. Calibration and consideration of several effects,such as manufacturing variance or cross sensitivity, become a simple task.Embedding other functions, such as online self-test or selfcalibration, is today winning a special importance, improvingthe system reliability, and reducing installation and maintenance costs.The structure of a sensor with self-monitoring differs from the standard structure in particular through the consideration of supplementary knowledge to the actual measurement information.Generally, specific relationships are required about the sensor behavior and the expected confidence limits of sensor properties .The state of the sensor system can be inspected by a comparison of the real output to the expected value due to the previously known relationships . For instance, acceleration sensors with a closed-loop structure compensate the inertial force acting on the mass through an electrically generated restoring force . Through the application of restoringforces with well-known values, self-tests can be carried out. TECHNOLOGY SENSOR: Many recent advances in the sensor technology become mainly possible by means of micro technologies. These new technologies offer high-volume manufacturable systems with small dimensions, lower power consumption, and higher reliability. Thereby, realized microsystems integrate sensors, actuators, mechanical, and electronic units. They provide low-cost solutions that were not realizable with microelectronic systems. Their development involves special challenges for device modeling, microfabrication, material, and packaging technologies. Micromachined systems are today already inherent components in automotives, color printers, mobile phones, and medical systems. The most popular micromachined sensors are pressure, angular rate , and acceleration sensors. They allowed the widespread implementation of low-cost airbag systems and catalytic converters. Silicon micromachining is one of the most significant micro technologies for sensor systems . The eminent properties of the silicon material, such as the freedom of hysteresis errors, and the earlier advances in the field of microelectronics have permitted this important technical evolution.In case of bulk micromachining, the substrate is structuredby means of wet and dry etching processes. The high etchingselectivity and reliability are the advantages of the bulk micromachining . In an isotropic process, the etching speed is independent from the direction in the substrate. In this case, theobtainable device configurations are limited and the silicon material may not be efficiently utilized. In an anisotropic process, the etching speed is orientation dependent. The manufactured structures in bulk micromachining have from the beginning a high aspect ratio. This means that the structure height is high relative to the minimal lateral dimension of the whole structure.This property involves considerable advantages for sensor performance, such as higher sensitivity, displacement, mechanical robustness, and reduced noise.In case of surface micromachining, three-dimensional mechanical structures are developed by a sequential deposition and selectively removing of sacrificial layers (e.g., SiO ) separating the individual layers in the structure. Recently, the use of reactive ion etching (RIE) allowed a cost-effective realization of structures FUTURE TRENDS IN SENSOR TECHNOLOGY: The development trends in sensor technology result frommarket-economical aspects, general customer requests, andspecific requirements of the target applications.Costs reductions and more improvement in accuracy and speed will be achieved in the future using measurement methods with higher performance, new manufacturing technologies, and sophisticated signal processing methods. The greater demand for environmental protection demands the development of highly reliable sensors. Maintenance-free sensors with long life expectancy and low electric power consumption will, thereby, be the focus of interests. The main development trends in sensor technology are, ingeneral, toward miniaturization and an increasing use of multisensor and wireless systems . Microsystem Technology Miniaturization: is an outstanding strategy of success in modern technologies. A reduction of characteristic dimensions usually results in shorter response times so that a correspondingly higher speed is achievable in signal generation and processing. In many cases, it reduces costs because of the higher integration rate, lower power consumption, and higher reliability. Miniaturization is generally gaining importance in all fields of applications, where smaller structures and greater precision are becoming decisive to the market acceptance of individual products. The development trend to miniaturization goes on within nanotechnologies, which will open up access to still smaller dimensions . For instance, for the monitoring of vital parameters of human beings, health care devices can be used so that an emergency call could be released automatically in case of unconsciousness ofthe observed person. For acceptance by users, the device should be light and provide unhindered mobility. The user should be able to ignore it and to live normally without being obliged to take it off in any situation during the whole day.The concept of the MIT-ring, as a highly miniaturized solution, fulfills the requirements for this special application. A light-emitting diode in the ring continuously emits lightinto the finger of the observed person. By an evaluation of thereflected light, the ring can measure the pulse rate, the potential l cardiac condition, and possibly blood pressure. By means f an embedded antenna, signals can be transmitted to a signal receiver nearby. Trend in use of sensor : The use of multisensor systems is becoming more important in widespread applications. Their applications reach from the monitoring and automation of manufacturing processes to robotics, automotive applications, smart home. Future trends in sensor technology.MIT-ring for healthcare, process control, environmental engineering, biotechnology, and life sciences. Multisensor systems provide the advantage that economical sensors can be used even for the achievement of a high level of precision and reliability. Thereby, a big amount of availableinformation is managed using sophisticated signal processing techniques so that the system achieves a better performance.Multisensor data fusion is in effect intrinsically performed by animals and human beings to achieve a more accurate assessment of the surrounding environment. A directly related example is the electronic nose, which consists of an array of different sensors that have been shown to respond to definite organic and inorganic compounds with low concentrations. In order to reach a high resolution at low concentrations, the response of a sensor array is used like in the real human nose. The applications of the electronic nose are widespread in the chemical analysis, environment monitoring, food and wine inspection, emission control, and narcotic detection.The development trends of multisensor systems are in the development of modular systems, which are easily extendible with new units without disturbing the already available functions. Trend in Wireless Systems: With the large amount of components, which are indispensable for the achievement of the required functionality, the electric wiring of spatially distributed systems becomes complex and causes difficulties in the system’s handling. The use of wireless systems implies a better convenience and leads to a considerable cost reduction. Wireless sensor systems have the advantage that they can be placed anywhere, and can,therefore, record the measured quantity closely to its occurrence, independent of potential harsh circumstances. Wireless sensors can communicate over ultrasonic or infraredsignals. For instance, surface acoustic wave devices(SAW transponders) can be used for object identificationand for the measurement of physical, chemical, and biological uantities such as temperature, pressure, torque, acceleration, or humidity.nergy-autonomous sensors will gain a particular importance mong wireless sensors [13] because, in this case, wires are no onger necessary, even for electricity supply. This kind of sensor s necessary for many applications in which long distances are o be bridged, or a large number of distributed components are necessary