SELFA
SELFA
Valves & Fittings
HOW TO ORDER
M4.1
Valves & Fittings
PA R T N U M B E R
MT
2
2V1
3
l
4
/
K
5
A/B : B1/4
6
MS
7
1 - Va l v e S e r i e s a n d S u r f a c e F i n i s h
2-
Valve Actuation (Standard: Normally Closed=NC)
M4.1U
M4.1V
M4.1S
QT
MT
LP
HP
Manually actuated - Quarter Turn
Manually actuated - Multi Turn
Pneumatically actuated - Low Pressure
Pneumatically actuated - High Pressure
(Add - NO - for Normally Open version)
(Add - NF - for Normally Close version)
Ra 0,15µm EP (6 µin Ra)
Ra 0,25µm EP (10 µin Ra)
Ra 0,4µm nonEP (15 µin Ra)
3 - Va l v e C o n f i g u r a t i o n s
2V1
2 ports in line
See below for other configurations
4 - Body Material (others on request)
5 - Seat Material
K
V
P
M
Standard colour:
for handles: white (other colours on request)
for LP actuators: NO=green NF=blue
for HP actuators: NO/NF=white
A
I
H
PCTFE (Kel-F®)
PI (Vespel®)
PVDF
Metal (on request)
AISI 316L, VAR
AISI 316L
Hastelloy® (on request)
6 - End Connections
7 - Options
MS
FT
—
CI
Valve fitted with locking service
Panel mounting
Back mounting
Electric limit switch (LP actuators only)
GAZEL® -Female
(face seal)*
GAZEL® -Male
(face seal)*
V1/4-F
V1/4-M
B1/4
B6
RDB 6
RDB 1/4
GAZEL® 1/4" - Female (Face Seal)*
GAZEL® 1/4" - Male (Face Seal)*
BWO 1/4" - Standard (Orbital Weld)
BWO 6 mm (Orbital Weld)
SAGALOK Double ring Fittings: 6 mm
SAGALOK Double ring Fitting: 1/4”
BWO for standard
welding heads
SAGALOK Double
ring Fitting
M4.1-leaf 09-2
Valve configurations
ROTAREX
Group
SELF
A-V
alves & Fittings S.A. - L-7505 Lintgen, G.-D. of Luxembourg
SELFA-V
A-Valves
Tel. *352 - 32 78 32 - 1, fax *352 - 32 78 32 322, www.rotarex.com, info@selfa.rotarex.com
A total component solution, from source to process
M4.1
SPRINGLESS DIAPHRAGM VALVES
FOR HP AND UHP APPLICATIONS
(STANDARD AND GAS SPECIFIC)
M
4.1
M4.1-leaf 09-2
M4.1V
1
*All GAZEL® Face Seals are VCR ® compatible. VCR ® is a registered trade mark of CAJON CO., HASTELLOY® is a registered trade mark of CABOT Corp. , Kel-F®
is a registered trade mark of 3M company, Vespel® is a registered trade mark of DUPONT, ELGILOY® is a registered trade mark of ELGILOY Company.
Example :
ROTAREX
Group
SELFA
SELFA
Valves & Fittings
Valves & Fittings
FEATURE a unique proven design
M4.1
Selected Stainless Steels for low
sulfur content as well as
optimized impurity levels
Individual Serial number,
for full traceability
T E C H N I CA L DATA
Fully functional
from vacuum to
rated pressure
Precision
electropolishing
of all internal surfaces
Tied diaphragm
design for positive
seat opening and
retraction
Laser welded
diaphragm for
maximum reliability
Low particule
generation
Aerodynamic fully
swept flow passage
Unique high pressure
outboard leak test port
Excellent purgeability
AR PROCESS
Manufactured to the THREE ST
STAR
Body
M4.1V
M4.1U
SS 316L
SS 316L
SS 316L VAR
< 0,4 µm non EP (15µin Ra)
< 0,25 µm EP (10µin Ra) < 0,15 µm EP (6µin Ra)
Diaphragm
Non-wetted
Backup diaphragms
parts
all others
M4.1 Manual
vacuum to 240 bar (3500 PSI)
M4.1 Pneumatic - Low Pressure
17 bar (250 PSI)
M4.1 Pneumatic - High Pressure
200 bar (2900 PSI)
Pneumatic actuator opening pressure
5 - 7 bar (75 - 105 PSI)
Temperature range
-20°C to + 80°C (-4° F to 176°F)
Burst Pressure
Flow Capacity (Cv)
850 bar (12500 PSI)
M4.1 Manual
Cv = 0.26
M4.1 Pneumatic
Cv = 0.26
Certified max. Helium inboard leak rate
< 1.10-9 mbar.l/sec
Certified max. Helium outboard leak rate (at max. pressure)
< 1.10-9 mbar.l/sec
Certified max. Helium across the seat leak rate (at max. pressure) < 1.10-9 mbar.l/sec
Wetted volume
< 1.2 cc
Mounting
Panel or back mounting
Nominal seatDiameter
4 mm (0,16”)
Materials
M4.1S
Seat Material
Max working pressure
Standard, High and Ultra High Purity, corrosive and non-corrosive gases
DIMENSIONS
Va l v e G r a d e &
Wetted parts Surface Finish
Fluid Media
®
CONSTRUCTION MATERIALS
Parts
Hastelloy®
Kel-F® (Vespel®, PVDF, metal on request)
Elgiloy®
Stainless Steel or alloys
M4.1 - Pneumatic Valve
Low Pressure
Manual Actuation
Pneumatic Actuation
Parts for all valve grades
Parts
Upper spindle
Brass
Actuator Body SS 316 L
Handle
Aluminum or
Piston
Extruded Plastic
O-rings
Stainless Steel or Alloys
All others
All others
M4.1
Assembling, testing & Packaging
in cleanroom Cl. 10
Visual Open/Close indicator
(ON/OFF window
on Multiturn version)
Compact size
T E C H N I CA L DATA
Low Pressure
M4.1
Multiturn valve
(MT) with open/
close window
High Pressure
Aluminum
Aluminum
NBR - PC 851
Stainless Steel or Alloys
M4.1 - Pneumatic valve
High Pressure
M4.1 - Quarter turn (QT) valve
ROTAREX
Group
ROTAREX
Group
M4.1-leaf 09-2
M4.1-leaf 09-2
M4.1
bottom view
SELFA
SELFA
Valves & Fittings
HOW TO ORDER
U4/U6
Valves & Fittings
PA R T N U M B E R
MT
2
2V1
3
l
4
/
K
5
A/B:B1/4
6
1 - Va l v e S e r i e s a n d S u r f a c e F i n i s h
2 - Valve Actuation (Standard: Normally closed)
U4-U6 U UHP - Ra 0,15µm EP (6µin Ra)
U4-U6 V HP - Ra 0,25µm EP (10µin Ra)
U4-U6 S Standard - Ra 0,4µm (15 µin Ra)
MT
3QT
MS
LP
HP
3 - Va l v e C o n f i g u r a t i o n s
2V1
5 - Seat Material
K
V
M
4 - Body Material
I
PCTFE (Kel-F )
PI (Vespel®)
AISI 316L Metal seat*
*not available for HP applications
AISI 316L
®
7 - Options
FT
—
MRE1
MRE2
S
Panel mounting
Back mounting
Electric limit switch (LP/HP actuators)
Electric limit switchES (LP/HP actuators)
Security Bonnet in case of bellows failure
GAZEL® -Male
(face seal)*
GAZEL® -Female
(face seal)*
6 - End Connections
V1/4-F
V1/4-M
B1/4
B1/4-S
B6
B12
RDB 1/4
RDB 6
SW 1/4
SW 6
GAZEL® 1/4" - Female (Face Seal)*
GAZEL® 1/4" - Male (Face Seal)*
BWO 1/4" - Standard (Butt Weld Orbital)
BWO 1/4" - Short (Butt Weld Orbital)
BWO 6 mm (Butt Weld Orbital)
BWO 12 mm (Orbital Weld)
SAGALOK Double ring fitting: 1/4"
SAGALOK Double ring fitting: 6 mm
SW 1/4" (Socket Weld)
SW 6 mm (Socket Weld)
BWO for microwelding heads
SAGALOK Double
ring fitting
Valve Configurations
U4/U6-leaf 09-2
A total component solution, from source to process
Multi-turn handwheel
3 Quarter-turn handwheel
Multi-turn security handwheel with lock
Pneumatically actuated - Low Pressure
Pneumatically actuated - High Pressure
(Add - NO - for Normally Open version)
(Add - NF - for normally close version)
2 ports in line
Refer to the selection guide for other configurations
ROTAREX
Group
FT
7
SELF
A-V
alves & Fittings S.A. - L-7505 Lintgen, G.-D. of Luxembourg
SELFA-V
A-Valves
Tel. *352 - 32 78 32 - 1, fax *352 - 32 78 32 322, www.rotarex.com, info@selfa.rotarex.com
U4-U6
BELLOWS SEALED VALVES
FOR HP AND UHP APPLICATIONS
(STANDARD AND GAS SPECIFIC)
U
4/6
U4/U6-leaf 09-2
U4 U
1
*All GAZEL® Face Seals are VCR ® compatible. VCR ® is a registered trade mark of CAJON CO., HASTELLOY® is a registered trade mark of CABOT Corp. , Kel-F®
is a registered trade mark of 3M company, Vespel® is a registered trade mark of DUPONT, ELGILOY® is a registered trade mark of ELGILOY Company.
Example :
ROTAREX
Group
SELFA
SELFA
Valves & Fittings
Valves & Fittings
FEATURE a unique proven design
U4-U6
T E C H N I CA L DATA
U4-U6
T E C H N I CA L DATA
Fully contained seat
Small gas absorption
and desorption from
seat material
Visual indication of valve position
(open /closed)
Laser or electron beam welded
bellows ensure high leak
tightness integrity
Unique high pressure
outboard leak test port
Metal to metal sealing to
the atmosphere
High leak integrity
Fluid Media
Max working pressure
Standard, High and Ultra High Purity, corrosive and non-corrosive gases
U4/U6 Manual
240 bar (3500 PSI)
U4/U6 Pneumatic - Low Pressure
30 bar (435 PSI)
U4/U6 Pneumatic - High Pressure
200 bar (2900 PSI)
Min. operating pressure
Vacuum
Pneumatic actuator opening pressure
5 to 7 bar (75 to 100 PSI)
Temperature range
Flow coefficient
-20°C to + 80°C (-2°F to 176°F)
U4
Cv = 0.3
U6
Cv = 0.7
Certified max. Helium inboard leak rate (at max. pressure)
< 1.10-9 mbar.l/sec
Certified max. Helium outboard leak rate (at max. pressure)
< 1.10-9 mbar.l/sec
Nominal seat diameter
4 mm (0.16”)
Weight
U4
U6
6 mm (0.23”)
U4/U6 Manual
0,250 kg
U4/U6 Pneumatic - Low Pressure
0,500 kg
U4/U6 Pneumatic - High Pressure
0,750 kg
AR PROCESS®
Manufactured to the THREE ST
STAR
DIMENSIONS
CONSTRUCTION MATERIALS
Va l v e G r a d e &
Parts
Materials
S
V
Body
< 0,4 µm non EP (15µin Ra)
Stainless Steel 316L
Non-wetted parts
Stainless Steel or alloys
Seat material
PCTFE (Kel-F®)
Manual Actuation
Pneumatic Actuation
Parts for all valve grades
Parts
Upper spindle
Brass
Bellows
Handle
Aluminum or
Seat
PCTFE / PI (Vespel®)
Extruded Plastic
Actuator body
Anodized aluminum
All others
U4/U6-leaf 09-2
< 0,25 µm EP (10µin Ra) < 0,15 µm EP (6µin Ra)
Bellows and gas wetted parts
Stainless Steel or Alloys
Low Pressure
High Pressure
Stainless Steel 316L
(white-painted for U grade)
ROTAREX
Group
U4/U6-leaf 09-2
Body Surface Finish
ROTAREX
Group
U
Stainless Steel 316L
SELFA
SELFA
Valves & Fittings
HOW TO ORDER
SIR100
Valves & Fittings
PART NUMBER
Example :
SIR 100 U
1
2V1
2
A
3
/
K
4
7b
5
A/B:V1/4M
6
1 - Series & Surface finish
2 - Ports configurations
SIR 100 U - Ra 0.15µm Ep. (6µin Ra)
SIR 100 V - Ra 0.25µm Ep. (10µin Ra)
SIR 100 S - Ra 0.4µm non Ep. (15µin Ra)
2V1
2 ports in line
See below for other ports configurations
A total component solution, from source to process
SIR 100
DIAPHRAGM PRESSURE REGULATOR
FOR HP & UHP APPLICATIONS
AISI 316L, VAR
AISI 316L
Hastelloy® on request
5 - Outlet regulated pressure
2b
2 bar - 30 psig
4b
4 bar - 60 psig
7b
7 bar - 100 psig
Inlet pressure upto 50 bar (725 psig)
PCTFE (Kel-F®)
PI (Vespel®)
PVDF
6 - End Connections
V 1/4-F
V 1/4-M
V 1/4-FI
B 1/4
B6
NPT FI
GAZEL® 1/4" - Female (Face Seal*)
GAZEL® 1/4" - Male (Face Seal*)
GAZEL® 1/4" - Internal (Face Seal*)
BWO 1/4" - Standard (Orbital Weld)
BWO 6 mm (Orbital Weld)
1/4 NPT - Inlet threads
SIR100-leaf 09-2
Configurations
ROTAREX
Group
SELF
A-V
alves & Fittings S.A. - L-7505 Lintgen, G.-D. of Luxembourg
SELFA-V
A-Valves
Tel. *352 - 32 78 32 - 1, fax *352 - 32 78 32 322, www.rotarex.com, info@selfa.rotarex.com
SIR
A
I
H
K
V
P
100
SIR100-leaf 09-2
3 - Body Material (others on request)
*All GAZEL® Face Seals are VCR ® compatible. VCR ® is a registered trade mark of CAJON CO., HASTELLOY® is a registered trade mark of CABOT Corp. , Kel-F®
is a registered trade mark of 3M company, Vespel® is a registered trade mark of DUPONT, ELGILOY® is a registered trade mark of ELGILOY Company.
4 - Seat Material
ROTAREX
Group
SELFA
SELFA
Valves & Fittings
Valves & Fittings
FEATURE a unique proven design
SIR100
The SIR 100 Regulator was created in response to the industry’s needs for a low pressure non tied
diaphragm regulator for specialty source gas service, i.e. gas cabinets. The design and material
of construction, plus some unique features make it an ideal choice for gas source applications
with the reactive and hazardous gases the Semiconductor and Allied Industries use.
Individual Serial number,
for full traceability
Assembling, testing & Packaging
in cleanroom Cl. 10
Ergonomic Design
Controlled (PC)
electropolishing for better
corrosion resistance
Spherical ball for ultra
smooth control
2,3,4,5, or 6 ports options
available
Metal to metal seal
to atmosphere
T E C H N I CA L DATA
SIR100
T E C H N I CA L DATA
Fluid Media
Standard, HP, UHP, corrosive and non-corrosive gases
Inlet pressure
50 bar (725 PSI)
Outlet pressure
2 - 4 -7 bar (30 - 60 - 100 PSI)
Temperature range
-20°C to + 65°C (-4°F to 150°F)
Flow Coefficient
CV = 0.2
Certified max. Helium inboard leak rate (at max. pressure)
< 1.10-9 mbar.l/sec
Cerified max. Helium outboard leak rate (at max. pressure)
< 1.10-9 mbar.l/sec
Cerified max. Helium across the seat leak rate (at max. pressure)
< 1.10-9 mbar.l/sec
Number of ports
2, 3, 4, 5 or 6
FLOW CURVES
diaphragm counter
balance springs
Minimal wetted surfaces
for optimal purging
Excellent response at low
pressures (droop, hysteresis,
creep)
Gas specific solutions
(Body and seat materials)
AR PROCESS®
Manufactured to the THREE ST
STAR
CONSTRUCTION MATERIALS
Wetted Parts
Non-wetted parts
DIMENSIONS
Parts
Materials
Body
AISI 316L, VAR
Diaphragm
Hastelloy®
Seat
PCTFE (Kel-F®) / PI (Vespel®) /PVDF
Poppet
AISI 316L, VAR
Bonnet
Nickel Plated Brass
Handle
Extruded Plastic
Others
Stainless Steel or alloys
S U R FA C E F I N I S H
ROTAREX
Group
V: <Ra 0.25µm Ep. (10µin Ra)
S: <Ra 0.4µm non Ep. (15µin Ra)
ROTAREX
Group
SIR100-leaf 09-2
SIR100-leaf 09-2
U: <Ra 0.15µm Ep. (6µin Ra)
SELFA
SELFA
Valves & Fittings
HOW TO ORDER
SI 240 / 260
Valves & Fittings
PA R T N U M B E R
2V1
2
A
3
/
K
4
7b
5
A/B : V-M
6
1 - Serie & Sur face Finish
2 - Ports Configurations
SI 240/260 U Ra 0,15µm Ep. (6µin Ra)
SI 240/260 V Ra 0,25µm Ep. (10µin Ra)
SI 240/260 S Ra 0,4µm nonEP(15µin Ra)
2V1
3 - Body Material (others on request)
A
I
H
AISI 316L, VAR
AISI 316L
Hastelloy® (on request)
2 ports in line
4 - Seat Material
K
V
P
PCTFE (Kel-F®)
PI (Vespel ®)
PVDF
6 - End Connections
V-F
V-M
V-FI
GAZEL® 1/4" - Female (face seal)*
GAZEL® 1/4" - Male (face seal)*
GAZEL® 1/4" - Internal (face seal)*
SI240-260 leaf 09-2
Configurations
ROTAREX
Group
SI 240 /260
See below for other ports configurations
5 - Outlet regulated Pressure
2b
2 bar - 30 PSI
4b
4 bar - 60 PSI
7b
7bar - 100 PSI
Note : Inlet Pressure: upto 240 bar (3500 PSI)
A total component solution, from source to process
SELF
A-V
alves & Fittings S.A. - L-7505 Lintgen, G.-D. of Luxembourg
SELFA-V
A-Valves
Tel. *352 - 32 78 32 - 1, fax *352 - 32 78 32 322, www.rotarex.com, info@selfa.rotarex.com
SPRINGLESS TIED DIAPHRAGM
PRESSURE REGULATOR
FOR UHP APPLICATIONS
SI
SI 240
SI 260
SI240-260 leaf 09-2
SI 240 U
1
*All GAZEL® Face Seals are VCR ® compatible. VCR ® is a registered trade mark of CAJON CO., HASTELLOY® is a registered trade mark of CABOT Corp. , Kel-F®
is a registered trade mark of 3M company, Vespel® is a registered trade mark of DUPONT, ELGILOY® is a registered trade mark of ELGILOY Company.
Example :
ROTAREX
Group
SELFA
SELFA
Valves & Fittings
Valves & Fittings
FEATURE a unique proven design
SI 240 / 260
240 Regulator was created in response to the industry’s need for a High Pressure, Springless, Tied Diaphragm Regulator
and the SI 260 Regulator for a High Flow, High Pressure, Springless, Tied Diaphragm Regulator for specialty source gas service,
T E C H N I CA L DATA
SI 240 / 260
The SI
i.e. gas cabinets.The design and materials of construction, plus some unique features make it an ideal
choice for gas source applications with reactive and hazardous gases the Semiconductor and Allied Industries use.
• Unique features include a special leak test port that enables the diaphragm seal to be outboard leak tested ‹10-9 mbar.l/sec range
at high pressure.
• Precise control of the gas discharge with minimum deviation caused by the supply pressure effect.
• Counter balance springs outside the gas stream to ensure the unit functions correctly with downstream vacuum and upstream high
pressure
• A unique spherical ball pressure pad to give ultra smooth delivery pressure adjustment
• Choice of delivery pressure: 2, 4 or 7 bar / 30, 60 or 100 psi
The SI
The SI
240 regulator is designed with minimum face to face dimensions, to meet the requirements of all gas system manufacturers.
260 regulator is designed for high flow rates of HCl and N2O etc.
Individual Serial number,
for full traceability
Assembling, testing & Packaging
in cleanroom Cl. 10
Ergonomic Design
Controlled (PC)
electropolishing
for better corrosion resistance
Metal to metal seal to
atmosphere
T E C H N I CA L DATA
Fluid Media
Inlet pressure
Standard, High and Ultra High Purity, corrosive and non-corrosive gases
240 bar (3500 PSI)
Outlet pressure
2 - 4 - 7 bar (30 - 60 - 100 PSI)
Temperature range
-20°C to + 80°C (-2F to 176F)
Nominal Flow
150 slpm (N2)
Flow Coefficient (Cv)
SI 240: CV = 0,09 / SI 260: CV = 0,2
Certified max. Helium inboard leak rate
< 1.10-9 mbar.l/sec
Certified max. Helium outboard leak rate (at max. pressure) < 1.10-9 mbar.l/sec
Certified max. Helium across the seat leak rate (at max. pressure)
< 1.10-9 mbar.l/sec
Number of ports
2, 3, 4, 5 or 6
FLOW CURVES
No spring in the wetted area
for zero particle emission
Spherical ball for ultra
smooth control
2,3,4 or 6 ports options
available
Sealed bonnet for
extra protection
diaphragm counter
balance springs
Minimal wetted surfaces for
optimal purging
Excellent response at high
and low pressures (droop,
hysteresis, creep)
Gas specific solutions
(Body and Seat Materials)
SI 240
SI 260
AR PROCESS®
Manufactured to the THREE ST
STAR
CONSTRUCTION MATERIALS
Wetted parts
DIMENSIONS
Parts
Materials
Body
AISI 316L, VAR, Hastelloy®
Diaphragm
Hastelloy®
Seat
PCTFE (Kel-F®) / PI (Vespel®) / PVDF
Poppet
AISI 316L, VAR, Hastelloy®
Non-wetted parts Bonnet
Nickel Plated Brass
Handle
Extruded Plastic
Others
Stainless Steel or others
S U R FA C E F I N I S H
ROTAREX
Group
V: < Ra 0,25µm Ep. (10µin Ra)
S:< Ra 0,4µm nonEP(15µin Ra)
ROTAREX
Group
SI240-260 leaf 09-2
SI240-260 leaf 09-2
U: < Ra 0,15µm Ep. (6µin Ra)
SELFA
SELFA
Valves & Fittings
HOW TO ORDER
SI 220
Valves & Fittings
PA R T N U M B E R
Example :
SI 220U
1
2V1
2
A
3
/
K
4
10 b
5
A/B : V-3/8 F
6
1 - Serie & Sur face Finish
2 - Ports Configurations
SI 220 U
SI 220 V
SI 220 S
2V1
Ra 0,15µm Ep. (6µin Ra)
Ra 0,25µm Ep. (10µin Ra)
Ra 0,4µm nonEP(15µin Ra)
A total component solution, from source to process
2 ports in line
SI 220
See below for other ports configurations
DIAPHRAGM
PRESSURE REGULATOR
FOR HP & UHP APPLICATIONS
AISI 316L, VAR
AISI 316L
Hastelloy® (on request)
4 - Seat Material
K
PCTFE (Kel-F®)
5 - Outlet regulated Pressure
3b
8b
10b
15b
25b
50b
3 bar - 45 PSI
8 bar - 116 PSI
10 bar - 145 PSI
15 bar - 217 PSI
25 bar - 365 PSI
50 bar - 725 PSI
Note : Inlet Pressure: upto 240 bar (3500 PSI)
6 - End Connections
V-1/4 F
V-3/8 F
V 1/4 M
V-3/8 M
V-FI
GAZEL® 1/4" - Female (face seal)
GAZEL® 3/8" - Female (face seal)
GAZEL® 1/4" - Male (face seal)
GAZEL® 3/8" - Male (face seal)
GAZEL® 1/4" - Internal Female (face seal)
SI220-leaf 09-2
Configurations
ROTAREX
Group
SELF
A-V
alves & Fittings S.A. - L-7505 Lintgen, G.-D. of Luxembourg
SELFA-V
A-Valves
Tel. *352 - 32 78 32 - 1, fax *352 - 32 78 32 322, www.rotarex.com, info@selfa.rotarex.com
SI
SI 220
SI220-leaf 09-2
A
I
H
*All GAZEL® Face Seals are VCR ® compatible. VCR ® is a registered trade mark of CAJON CO., HASTELLOY® is a registered trade mark of CABOT Corp. , Kel-F®
is a registered trade mark of 3M company, Vespel® is a registered trade mark of DUPONT, ELGILOY® is a registered trade mark of ELGILOY Company.
3 - Body Material (others on request)
ROTAREX
Group
SELFA
SELFA
Valves & Fittings
Valves & Fittings
FEATURE a unique proven design
SI 220
220 Regulator was created in response to the industry’s need for a Highflow, High Pressure, Springless, Tied Diaphragm
Regulator for specialty source gas service, i.e. gas cabinets.The design and materials of construction, plus some unique features make it an
TECHNICAL DATA
SI 220
The SI
ideal choice for gas source applications with reactive and hazardous gases the Semiconductor and Allied Industries use.
• Unique features include a special leak test port that enables the diaphragm seal to be outboard leak tested ‹10-9 mbar.l/sec
range at high pressure.
• Precise control of the gas discharge with minimum deviation caused by the supply pressure effect.
• Counter balance springs outside the gas stream to ensure the unit functions correctly with downstream vacuum and upstream
high pressure
• A unique spherical ball pressure pad to give ultra smooth delivery pressure adjustment
• Choice of delivery pressure: 3, 8, 10, 15, 25 or 50 bar / 45, 116, 145, 217, 365 or 725 psi
Individual Serial number,
for full traceability
Assembling, testing & Packaging
in cleanroom Cl. 10
Ergonomic Design
Controlled (PC)
electropolishing
for better corrosion resistance
Spherical ball for ultra
smooth control
T E C H N I CA L DATA
Fluid Media
Inlet pressure
Standard, High and Ultra High Purity, corrosive and non-corrosive gases
Outlet pressure
3 - 8 - 10 - 15 - 25 - 50 bar (45-116-145-217-365-725 PSI)
Temperature range
-20°C to + 60°C (-2F to 140F)
240 bar (3500 PSI)
Nominal Flow
170 slpm (N2)
Flow Coefficient (Cv)
CV = 0,2
Certified max. Helium inboard leak rate
< 1.10-9 mbar.l/sec
Certified max. Helium outboard leak rate (at max. pressure) < 1.10-9 mbar.l/sec
Certified max. Helium across the seat leak rate (at max. pressure)
< 1.10-9 mbar.l/sec
Number of ports
2, 3, 4, 5 or 6
FLOW CURVES
No spring in the wetted area
for zero particle emission
Metal to metal seal to
Atmosphere
2,3,4 or 6 ports options
available
Sealed bonnet for
extra protection
diaphragm counter
balance springs
Minimal wetted surfaces for
optimal purging
Excellent response at high
and low pressures (droop,
hysteresis, creep)
Gas specific solutions
(Body and Seat Materials)
AR PROCESS®
Manufactured to the THREE ST
STAR
CONSTRUCTION MATERIALS
Wetted parts
DIMENSIONS
Parts
Materials
Body
AISI 316L, VAR, Hastelloy®
Diaphragm
Hastelloy®
Seat
PCTFE (Kel-F®)
Poppet
AISI 316L, VAR, Hastelloy®
Non-wetted parts Bonnet
Nickel Plated Brass
Handle
Extruded Plastic
Others
Stainless Steel or others
S U R FA C E F I N I S H
ROTAREX
Group
V: < Ra 0,25µm Ep. (10µin Ra)
S:< Ra 0,4µm nonEP(15µin Ra)
ROTAREX
Group
SI220-leaf 09-2
SI220-leaf 09-2
U: < Ra 0,15µm Ep. (6µin Ra)
SELFA
SELFA
Valves & Fittings
HOW TO ORDER
SI 15
Valves & Fittings
PA R T N U M B E R
2V1
2
A
3
/
K
4
8b
5
A/B : V-M
6
1 - Serie & Sur face Finish
2 - Ports Configurations
SI 15 U
SI 15 V
SI 15 S
2V1
Ra 0,15µm Ep. (6µin Ra)
Ra 0,25µm Ep. (10µin Ra)
Ra 0,4µm nonEP(15µin Ra)
A
I
H
N
8b
8 bar - 120 psi
Note: Inlet Pressure = upto 25 bar (360 psi)
NBR
6 - End Connections
V-F
V-M
V-FI
GAZEL® 1/2" - Female (face seal)*
GAZEL® 1/2" - Male (face seal)*
GAZEL® 1/2" - Internal (face seal)*
SI15-leaf 09-2
Configurations
ROTAREX
Group
HIGH FLOW DIAPHRAGM
PRESSURE REGULATOR
FOR HP & UHP APPLICATIONS
See below for other ports configurations
4 - Seat Material
5 - Outlet Regulated Pressure
SI 15
2 ports in line
3 - Body Material (others on request)
AISI 316L, VAR (on request)
AISI 316L
Hastelloy® (on request)
A total component solution, from source to process
SELF
A-V
alves & Fittings S.A. - L-7505 Lintgen, G.-D. of Luxembourg
SELFA-V
A-Valves
Tel. *352 - 32 78 32 - 1, fax *352 - 32 78 32 322, www.rotarex.com, info@selfa.rotarex.com
SI
SI 15
SI15-leaf 09-2
SI 15U
1
*All GAZEL® Face Seals are VCR ® compatible. VCR ® is a registered trade mark of CAJON CO., HASTELLOY® is a registered trade mark of CABOT Corp. , Kel-F®
is a registered trade mark of 3M company, Vespel® is a registered trade mark of DUPONT, ELGILOY® is a registered trade mark of ELGILOY Company.
Example :
ROTAREX
Group
SELFA
SELFA
Valves & Fittings
Valves & Fittings
FEATURE a unique proven design
The SI 15 Regulator was created in response to the industry’s needs for
source gas service, i.e. gas cabinets.
SI 15
High Flow Applications (tipically 1/2")
T E C H N I CA L DATA
SI 15
for specialty
T E C H N I CA L DATA
• The balanced valve minimizes the effect of inlet pressure fluctuations on outlet pressure and reduces the efforts on the seat to
increase life time of the regulator
• Precise control of the gas discharge with minimum deviation caused by the supply pressure effect.
• Excellent performance characteristics
• A unique spherical ball pressure pad to give ultra smooth delivery pressure adjustment
• Delivery pressure of 8 bar (120 psi)
Assembling, testing & Packaging
in cleanroom Cl. 10
Individual Serial number,
for full traceability
Ergonomic Design
Controlled (PC)
electropolishing
for better corrosion resistance
Spherical ball for ultra
smooth control
Fluid Media
Inlet pressure
Standard, High and Ultra High Purity, corrosive and non-corrosive gases
Outlet pressure
8 bar (120 PSI)
Temperature range
-20°C to + 60°C (-2F to 140F)
Nominal Flow
840 slpm (N2)
Certified max. Helium inboard leak rate
< 1.10-8 mbar.l/sec
25 bar (360 PSI)
Certified max. Helium outboard leak rate (at max. pressure) < 1.10-8 mbar.l/sec
Certified max. Helium across the seat leak rate (at max. pressure)
< 1.10-8 mbar.l/sec
Number of ports
2, 3, 4, 5 or 6
FLOW CURVES
2,3,4 or 6 ports options
available
Sealed bonnet for
extra protection
Seat design for high flow uses
Minimal wetted
surfaces for
optimal purging
Excellent response
(droop, hysteresis,
creep)
AR PROCESS®
Manufactured to the THREE ST
STAR
CONSTRUCTION MATERIALS
Wetted parts
DIMENSIONS
Parts
Materials
Body
AISI 316L, VAR, Hastelloy®
Diaphragm
AISI 304
Seat
NBR
Poppet
AISI 316L, VAR, Hastelloy®
Non-wetted parts Bonnet
Nickel Plated Brass
Handle
Extruded Plastic
Others
Stainless Steel or others
S U R FA C E F I N I S H
ROTAREX
Group
V: < Ra 0,25µm Ep. (10µin Ra)
S:< Ra 0,4µm nonEP(15µin Ra)
ROTAREX
Group
SI15-leaf 09-2
SI15-leaf 09-2
U: < Ra 0,15µm Ep. (6µin Ra)
SELFA
SELFA
Valves & Fittings
HOW TO ORDER
M8.1
Valves & Fittings
PA R T N U M B E R
MT
2
2V1
3
l
4
/
K
5
A/B:B3/8
6
MS
7
1 - Va l v e S e r i e s a n d S u r f a c e F i n i s h
2 - Valve Actuation (Standard: Normally closed)
M8.1U
M8.1V
M8.1S
QT
MT
LP
HP
Manually actuated - Quarter Turn
Manually actuated - Multi Turn
Pneumatically actuated - Low Pressure
Pneumatically actuated - High Pressure
(Add - NO - for Normally Open version)
(Add - NF - for normally close version)
Standard colour:
for handles: white (other colours on request)
for LP actuators: NO=green NF=blue
for HP actuators: NO/NF=white
Ra 0,15µm EP (6 µin Ra)
Ra 0,25µm EP (10 µin Ra)
Ra 0,4µm nonEP (15 µin Ra)
3 - Va l v e C o n f i g u r a t i o n s
2V1
2 ports in line
See below for other configurations
4 - Body Material (others on request)
A
I
H
5 - Seat Material
PCTFE (Kel-F®)
PI (Vespel®)
PVDF
Metal (on request)
K
V
P
M
6 - End Connections
7 - Options
MS
FT
—
CI
Valve fitted with locking device (manual)
Panel mounting
Back mounting
Electric limit switch (LP actuators only)
GAZEL® -Female
(face seal)*
AISI 316L, VAR
AISI 316L
Hastelloy® (on request)
GAZEL® -Male
(face seal)*
V3/8-F
V3/8-M
B3/8
B1/2
B10
B12
RDB 10
RDB 12
RDB 1/2
RDB 3/8
GAZEL® 3/8 - Female (Face Seal)*
GAZEL® 3/8 - Male (Face Seal)*
BWO 3/8" - Standard (Orbital Weld)
BWO 1/2" - (Orbital Weld)
BWO 10 mm (Orbital Weld)
BWO 12 mm (Orbital Weld)
SAGALOK Double ring fitting: 10 mm
SAGALOK Double ring fitting: 12 mm
SAGALOK Double ring fitting: 1/2”
SAGALOK Double ring fitting: 3/8”
BWO for standard
welding heads
SAGALOK Double
ring fitting
M8.1-leaf 09-2
Valve Configurations
ROTAREX
Group
SELF
A-V
alves & Fittings S.A. - L-7505 Lintgen, G.-D. of Luxembourg
SELFA-V
A-Valves
Tel. *352 - 32 78 32 - 1, fax *352 - 32 78 32 322, www.rotarex.com, info@selfa.rotarex.com
A total component solution, from source to process
M8.1
SPRINGLESS DIAPHRAGM VALVES
FOR HP AND UHP APPLICATIONS
(STANDARD AND GAS SPECIFIC)
M
8.1
M8.1-leaf 09-2
M8.1S
1
*All GAZEL® Face Seals are VCR ® compatible. VCR ® is a registered trade mark of CAJON CO., HASTELLOY® is a registered trade mark of CABOT Corp. , Kel-F®
is a registered trade mark of 3M company, Vespel® is a registered trade mark of DUPONT, ELGILOY® is a registered trade mark of ELGILOY Company.
Example :
ROTAREX
Group
SELFA
SELFA
Valves & Fittings
Valves & Fittings
FEATURE a unique proven design
M8.1
The M8-1 was designed in response to the industry’s needs for a compact HIGH FLOW high/low pressure valve dedicated to gas
distribution techniques that require high flow rates. This valve is ideal for handling high flow gases such as HCl, N2O, etc. upstream and
downstream of the source regulator. Its compact size and standard panel mount holes enable it to be integrated into gas supply
systems where previously only standard valves with low Cv’s could be used.
T E C H N I CA L DATA
M8.1
T E C H N I CA L DATA
Fluid Media
Individual Serial number,
for full traceability
Assembling, testing & Packaging
in cleanroom Cl. 10
Selected Stainless Steels for low sulfur
content as well as optimized impurity
levels
Visual Open/Close
indicator
Compact size
Precision
electropolishing
of all internal surfaces
Fully functional
from vacuum to
rated pressure
Unique high pressure
outboard leak test port
Laser welded
diaphragm for
maximum reliability
Tied diaphragm design
for positive seat opening
and retractation
Low particule
generation
Excellent
purgeability
Max working pressure
Standard, High and Ultra High Purity, corrosive and non-corrosive gases
M8.1 Manual
vacuum to 240 bar (3500 PSI)
M8.1 Pneumatic - Low Pressure
17 bar (250 PSI)
M8.1 Pneumatic - High Pressure
200 bar (2900 PSI)
Pneumatic actuator operating pressure
5 - 7 bar (75 - 105 PSI)
Temperature range
-20°C to + 80°C (-2°F to 176°F)
Burst Pressure
Flow Capacity (Cv)
850 bar (12500 PSI)
M8.1 Manual
Cv = 0.53
M8.1 Pneumatic
Cv = 0.53
Certified max. Helium inboard leak rate
< 1.10-9 mbar.l/sec
Certified max. Helium outboard leak rate (at max. pressure)
< 1.10-9 mbar.l/sec
Certified max. Helium across the seat leak rate (at max. pressure) < 1.10-9 mbar.l/sec
Wetted volume
< 1.6 cc
Mounting
Front or back mounting
Nominal seat Diameter
8 mm (0,32”)
Aerodynamic fully
swept flow passage
AR PROCESS
Manufactured to the THREE ST
STAR
®
CONSTRUCTION MATERIALS
DIMENSIONS
Va l v e G r a d e &
Materials
Parts
M8.1S
M8.1V
M8.1U
Body
SS 316L
SS 316L
SS 316L VAR
< 0,4 µm non EP (15µin Ra)
< 0,25 µm EP (10µin Ra) < 0,15 µm EP (6µin Ra)
Wetted parts Surface Finish
Diaphragm
Seat Material
Non-wetted
Backup diaphragms
parts
all others
Hastelloy®
Kel-F® (Vespel®, PVDF, metal on request)
Elgiloy®
Stainless Steel or alloys
M8.1 Quarter turn (QT) valve
Parts for all valve grades
Parts
Upper spindle
Brass
Actuator Body SS 316 L
Handle
Aluminum or
Piston
Extruded Plastic
O-rings
Stainless Steel or Alloys
All others
All others
M8.1-leaf 09-2
Pneumatic Actuation
Low Pressure
(
High Pressure
ø 25.4 (1.0)
Aluminum
Aluminum
M8.1- High Pressure
Pneumatic valve
NBR - PC 851
Stainless Steel or Alloys
M8.1 Multi turn valve (MT)
with on/off window
ROTAREX
Group
1.14”)
M8.1
Bottom view
ROTAREX
Group
M8.1-leaf 09-2
Manual Actuation
M8.1- Pneumatic valve
Low Pressure
SELFA
SELFA
Valves & Fittings
HOW TO ORDER
M4.1
VB
M4.1// M8.1
M8.1VB
Valves & Fittings
PA R T N U M B E R
A
3
K
4
A/B:B1/4 C:V1/4MMS
5
6
1 - Va l v e S e r i e s a n d S u r f a c e F i n i s h
2 - Valve Actuation (Standard: Normally closed)
M4.1/M8.1VB U
M4.1/M8.1VB V
M4.1/M8.1VB S
MT
QT
LP
HP
Ra 0,15µm EP (6 µin Ra)
Ra 0,25µm EP (10 µin Ra)
Ra 0,4µm nonEP (15 µin Ra)
VB= Standard vertical purge block
VT= Vee-Block with transverse purge port
VTD= Vee-Block with right-hand purge port
VTG= Vee-Block with left-hand purge port
Manually actuated - Multi Turn
Manually actuated - Quarter Turn
Pneumatically actuated - Low Pressure
Pneumatically actuated - High Pressure
(Add - NO - for Normally Open version)
(Add - NF - for normally close version)
3 - Body Material (others on request)
I
A
H
5 - M4.1 VB - End Connections - Port A-B-C-D
V 1/4-F GAZEL 1/4" - Female (face seal)*
V 1/4-M GAZEL 1/4" - Male (face seal)*
B 1/4
BWO 1/4" - Standard (Butt Weld Orbital)
B6
BWO 6 mm - Butt Weld Orbital
5 - M8.1 VB - End Connections - Port A-B-C-D
AISI 316L
AISI 316L, VAR
Hastelloy® (on request)
4 - Seat Material
PCTFE (Kel-F®)
PI (Vespel®)
PVDF
Metal (on request)
K
V
P
M
V 3/8-F
V 3/8-M
B 1/2
B 3/8
GAZEL 3/8" - Female (face seal)*
GAZEL 3/8" - Male (face seal)*
BWO 1/2" - Standard (Butt Weld Orbital)
BWO 3/8" - Butt Weld Orbital
SAGALOK Double ring fitting on request
6 - Options
A= Inlet Connection
B= Outlet Connection
C= Vertical Purge (right-hand purge for VT versions)
D= Left-hand Purge (when applicable)
MS
FT
—
CI
Valve fitted with locking device (manual)
Panel mounting
Back mounting
Electric limit switch (LP actuators only)
Dimensions mm (inches)
End Connection
L2
L3
L3VT
61
M4.1VB (2.40")
54,5
M8.1VB (2.14")
61
(2.40")
54,5
(2.14")
91
(3.58")
35,3
(1.39")
M4.1VB 52
(2.05")
M8.1VB 54,5
®
GAZEL -Female (face seal)*
(2.14")
52
(2.05")
54,5
(2.14")
75
(2.95")
35,3
(1.39")
46
(1.81")
46
(1.81")
83,2
(3.27")
35,3
(1.39")
GAZEL® -Male (face seal)*
L1
BWO 1/4" (orbital weld)
top port
side port
M4-8.1VB-leaf 09-2
Note: All purge ports in 1/4"
ROTAREX
Group
SELF
A-V
alves & Fittings S.A. - L-7505 Lintgen, G.-D. of Luxembourg
SELFA-V
A-Valves
Tel. *352 - 32 78 32 - 1, fax *352 - 32 78 32 322, www.rotarex.com, info@selfa.rotarex.com
A total component solution, from source to process
M4.1 / M8.1 VB
IN LINE VALVE VEE BLOCK
M
4.1 VB
8.1 VB
M4-8.1VB-leaf 09-2
MT/MT
2/2
*All GAZEL® Face Seals are VCR ® compatible. VCR ® is a registered trade mark of CAJON CO., HASTELLOY® is a registered trade mark of CABOT Corp. , Kel-F®
is a registered trade mark of 3M company, Vespel® is a registered trade mark of DUPONT, ELGILOY® is a registered trade mark of ELGILOY Company.
Example : M4.1VB U
1
ROTAREX
Group
SELFA
SELFA
Valves & Fittings
Valves & Fittings
FEATURE a unique proven design
M4.1/ M8.1VB
Individual Serial number,
for full traceability
Controlled (PC) electropolishing for
better corrosion resistance
T E C H N I CA L DATA
M 4.1/ M8.1VB
T E C H N I CA L DATA
Fluid Media
Standard, High and Ultra High Purity, corrosive and non-corrosive gases
Max working pressure M4.1/ M8.1VB Manual-Multi-turn -1/4 Turn
Developed from
proven M4.1/m8.1
valve technology
Assembling, testing & Packaging
in cleanroom Class 10
M4.1/ M8.1VB Pneumatic - Low Pressure
Pneumatic actuator operating pressure
5 - 7 bar (75 - 105 PSI)
Temperature range
-20°C to + 80°C (-2°F to 176°F)
Burst Pressure
850 bar (12500 PSI)
Flow Capacity (Cv)
Pneumatic and manual
actuation available
Gas specific solutions (body
and seat materials)
240 bar (3500 PSI)
17 bar (250 PSI)
M4.1/ M8.1VB Manual
M4.1VB:Cv = 0.26 / M8.1VB:Cv = 0.53
M4.1/ M8.1VB Pneumatic
M4.1VB:Cv = 0.26 / M8.1VB:Cv = 0.53
Certified max. Helium inboard leak rate
< 1.10-9 mbar.l/sec
Certified max. Helium outboard leak rate (at max. pressure)
< 1.10-9 mbar.l/sec
Certified max. Helium across the seat leak rate (at max. pressure) < 1.10-9 mbar.l/sec
Unique high pressure
leak test port
No spring in the wetted area
for zero particle emission
AR PROCESS
Manufactured to the THREE ST
STAR
®
CONSTRUCTION MATERIALS
DIMENSIONS
Va l v e G r a d e &
Parts
Body
Wetted parts Surface Finish
Materials
M4.1/ M8.1 VB S
M4.1/ M8.1 VB V
M4.1/ M8.1 VB U
SS 316L
SS 316L
SS 316L VAR
< 0,4 µm non EP (15µin Ra)
< 0,25 µm EP (10µin Ra) < 0,15 µm EP (6µin Ra)
Diaphragm
Seat Material
Non-wetted
Backup diaphragms
parts
all others
Hastelloy®
Kel-F® (Vespel®, PVDF, metal on request)
Elgiloy®
Stainless Steel or alloys
Refer to last page for L1, L2, L3 and L3VT
For right-hand purge only: please order under ref. M4.1-M8.1 VTD
For left-hand purge only: please order under ref. M4.1-M8.1 VTG
Parts for all valve grades
Parts
Upper spindle
Stainless Steel
Actuator Body SS 316 L
Handle
Aluminum or
Piston
Extruded Plastic
O-rings
Stainless Steel or Alloys
All others
M4-8.1VB-leaf 09-2
All others
ROTAREX
Group
Pneumatic Actuation
Low Pressure
Pneumatic
Actuator
High Pressure
Aluminum
Aluminum
NBR - PC 851
Stainless Steel or Alloys
Handwheel with
on/off window
4 mounting holes M5 thread located 45°
from center line on a 1.00 (25.4) circle
ROTAREX
Group
M4-8.1VB-leaf 09-2
Manual Actuation
SELFA
SELFA
Valves & Fittings
HOW TO ORDER
M20
Valves & Fittings
PA R T N U M B E R
MT
2
2V1
3
I
4
/
K
5
1- Valve Series
2 - Valve Actuation
M20-U
M20-V
M20-S
MT
PP2
UHP - Ra 0.15µm Ep. (6µin Ra)
HP/UHP - Ra 0.25µm Ep. (10µin Ra)
HP Version - Ra 0.4µm (15µin Ra) non EP
3 - Valve Configurations
2V1
2VPEG
2VPSG
2V1P2
2 ports in line
2 Ports in line, upstream purge port - left side
2 Ports in line, downstream purge port - left side
2 Ports in line, 2 purge ports upstream/
downstream/left side
For “Tee” configurations please refer to M12
A/B : B3/4
6
FT
7
Multi-Turn Handwheel
Pneumatically actuated
(Normally close version)
Standard colour for handles: white (other colours
on request)
for pneumatic actuators: blue
4 - Body Material (others on request)
I
H
AISI 316 L
Hastelloy (on request)
5 - Seat Material
K
V
P
6 - End Connections for 2VPEG/2VPSG/2V1P2/2VI
PCTFE (Kel-F®)
PI (Vespel®)
PVDF
7 - Options
FT
—
CI
Panel Mounting
Back Mounting
Electric Limit Switch (PP2 actuators)
GAZEL® -Female
(face seal)*
V 3/4-F
V 3/4-M
B 3/4
B1
V1-M
GAZEL® 3/4" - Female (Face Seal*)
GAZEL® 3/4" - Male (Face Seal*)
BWO 3/4" (Butt Orbital Weld)
BWO 1” (Butt Orbital Weld)
GAZEL® 1”- Male (Face Seal*)
SAGALOK Double Ring Fittings on request
Metric BWO available on request
Purge port available as GAZEL® 1/4” male
GAZEL® -Male
(face seal)*
BWO for standard
welding heads
M20-leaf 09-2
Configuration with
purge ports
ROTAREX
Group
A total component solution, from source to process
SELF
A-V
alves & Fittings S.A. - L-7505 Lintgen, G.-D. of Luxembourg
SELFA-V
A-Valves
Tel. *352 - 32 78 32 - 1, fax *352 - 32 78 32 322, www.rotarex.com, info@selfa.rotarex.com
M20
SPRINGLESS DIAPHRAGM VALVES
FOR HP AND UHP APPLICATIONS
(STANDARD AND GAS SPECIFIC)
M
20
M20-leaf 09-2
M20 U
1
*All GAZEL® Face Seals are VCR ® compatible. VCR ® is a registered trade mark of CAJON CO., HASTELLOY® is a registered trade mark of CABOT Corp. , Kel-F®
is a registered trade mark of 3M company, Vespel® is a registered trade mark of DUPONT, ELGILOY® is a registered trade mark of ELGILOY Company.
Example :
ROTAREX
Group
SELFA
SELFA
Valves & Fittings
Valves & Fittings
FEATURE a unique proven design
M20
Tied diaphragm design for positive
seat opening and retractation
T E C H N I CA L DATA
M20
T E C H N I CA L DATA
Fluid Media
Max operating pressure
Assembling, testing and
packaging in
cleanroom class 10
Individual serial number
for full traceability
Small internal volume
Low particle emission
Easy purgeability
Fully swept flow path
Selected Stainless Steels for low
sulfur content as well as
optimized impurity levels
Reduced gas absorption and
desorption from seat material
Excellent flow coefficient
Clean operation, no rubbing
High and Ultra High Purity, corrosive and non-corrosive gases
M20 MT manual
15 bar (215 PSI)
M20 PP2 pneumatic
15 bar (215 PSI)
Min. operating pressure
Vacuum (for manual only)
Actuator opening pressure
5 to 7 bar (75 to 105 PSI)
Temperature range
-20°C to + 80°C (-4°F to 176°F)
Flow Coefficient
Cv = 3,5
Certified max. Helium inboard leak rate (at max. pressure)
< 10-9 mbar.l/sec
Certified max. Helium outboard leak rate (at max. pressure)
< 10-9 mbar.l/sec
Certified max. Helium across the seat leak rate (at max. pressure)
Nominal Seat Diameter
< 1.10-9 mbar.l/sec
20 mm (0.79”)
DIMENSIONS
Metal to Metal
sealing to
atmosphere
Fully contained
Seat
DIMENSIONS
M20-Bottom view
AR PROCESS®
Manufactured to the THREE ST
STAR
CONSTRUCTION MATERIALS
Va l v e G r a d e & M a t e r i a l s
Parts
S
Body Surface Finish
Wetted parts
Non-wetted parts
U
<0,4µm(15µin Ra)nonEP < 0,25 µm (10µin Ra) EP
< 0,15 µm (6µin Ra) EP
Diaphragms
Elgiloy®
Seat material
PCTFE (Kel-F®) / PVDF or Vespel® (on request)
Backup diaphragm
All others
Manual
M20-leaf 09-2
V
Stainless Steel 316L
Actuation
Elgiloy®
Stainless Steel or alloys
Pneumatic Actuation
Upper Spindle
Stainless Steel
Parts
PP2
Handle
Aluminum
O-ring
NBR
All others
Stainless Steel or Alloys
Actuator Body
Aluminum Anodized
M20-PP2
M20-MT
ROTAREX
Group
ROTAREX
Group
M20-leaf 09-2
Body
SELFA
SELFA
Valves & Fittings
HOW TO ORDER
M12
Valves & Fittings
PA R T N U M B E R
Example :
M12 U
1
MT
2
2V1
3
I
4
/
K
5
A/B : B1/2
6
1- Valve Series
2 - Valve Actuation
M12-U
M12-V
M12-S
MT
PP2
UHP - Ra 0.15 µm Ep. (6 µin Ra)
HP/UHP - Ra 0.25 µm Ep. (10 µin Ra)
HP Version - Ra 0.4 µm non EP (15 µin Ra)
FT
7
A total component solution, from source to process
Multi-Turn Handwheel
Pneumatically actuated
(Normally close version)
M12
SPRINGLESS DIAPHRAGM VALVES
FOR HP AND UHP APPLICATIONS
(STANDARD AND GAS SPECIFIC)
2V1
2VPEG
2VPSG
2V1P2
3VT
3VTPS
4 - Body Material (others on request)
2 ports in line
2 Ports in line, upstream purge port - left side
2 Ports in line, downstream purge port - left side
2 Ports in line, 2 purge ports upstream/
downstream/left side
2 ports in line, full passage, downstream
branch (“Te” Valve)
2 ports in line, full passage, downstream
branch, downstream purge port
I
H
6a - End Connections for 2VPEG/2VPSG/2V1P2/2VI
V 1/2-F
V 1/2-M
B 1/2
B 3/4
PCTFE (Kel-F®)
PI (Vespel®)
PVDF
6b - End Connections for 3VT/3VTPS
B 1/2
B 3/4
B1
V1/2-F
V1/2-M
V3/4-M
V3/4-F
7 - Options
FT
—
CI
BWO 1/2" - (Butt Orbital Weld)
BWO 3/4" (Butt Orbital Weld)
BWO 1” (Butt Orbital Weld)
GAZEL® 1/2" - Female (Face Seal*)
GAZEL® 1/2" - Male (Face Seal*)
GAZEL® 3/4" - Male (Face Seal*)
GAZEL® 3/4" - Female (Face Seal*)
SAGALOK (Double Ring Fittings on request)
Branch available as GAZEL® 1/4” or BWO 1/4” or 1/2”
Metric BWO available on request
Purge port available as GAZEL® 1/4” male
Panel Mounting
Back Mounting
Electric Limit Switch (PP2 actuators)
GAZEL® -Female
(face seal)*
GAZEL® 1/2" - Female (Face Seal*)
GAZEL® 1/2" - Male (Face Seal*)
BWO 1/2" - (Butt Orbital Weld)
BWO 3/4" (Butt Orbital Weld)
SAGALOK (Double Ring Fittings on request)
Metric BWO available on request
Purge port available as BWO 1/4” or GAZEL® 1/4” male
5 - Seat Material
K
V
P
AISI 316 L
Hastelloy® (on request)
GAZEL® -Male
(face seal)*
BWO for standard
welding heads
Configuration 3VT
M12-leaf 09-2
Configuration with
purge ports
ROTAREX
Group
SELF
A-V
alves & Fittings S.A. - L-7505 Lintgen, G.-D. of Luxembourg
SELFA-V
A-Valves
Tel. *352 - 32 78 32 - 1, fax *352 - 32 78 32 322, www.rotarex.com, info@selfa.rotarex.com
M
12
M12-leaf 09-2
3 - Valve Configuration
*All GAZEL® Face Seals are VCR ® compatible. VCR ® is a registered trade mark of CAJON CO., HASTELLOY® is a registered trade mark of CABOT Corp. , Kel-F®
is a registered trade mark of 3M company, Vespel® is a registered trade mark of DUPONT, ELGILOY® is a registered trade mark of ELGILOY Company.
Standard colour:
for handles: white (other colours on request)
for pneumatic actuators: blue
ROTAREX
Group
SELFA
SELFA
Valves & Fittings
Valves & Fittings
FEATURE a unique proven design
M12
T E C H N I CA L DATA
M12
TECHNICAL DATA
Tied diaphragm design for positive
seat opening and retractation
Fluid Media
Max operating pressure
Assembling, testing and
packaging in
cleanroom class 10
Individual serial number
for full traceability
Low particle emission
Small internal volume
Fully swept flow path
Easy purgeability
High Purity and UHP, corrosive and non-corrosive gases
M12 MT manual
15 bar (215 PSI)
M12 PP2 pneumatic
15 bar (215 PSI)
Min. operating pressure
Vacuum (for manual only)
Actuator opening pressure
5 to 7 bar (75 to 105 PSI)
Temperature range
-20°C to +80°C (-4°F to 176°F)
Flow coefficient
Cv = 1,75
Certified max. Helium inboard leak rate (at max. pressure)
<10-9 mbar.l/sec
Certified max. Helium outboard leak rate (at max. pressure)
<10-9 mbar.l/sec
Certified max. Helium leak rate across the seat (at max. pressure) <1.10-9 mbar.l/sec
Selected Stainless Steels for low
sulfur content as well as
optimized impurity levels
Reduced gas absorption and
desorption from seat material
Clean operation, no rubbing
Excellent flow coefficient
Metal to Metal
sealing to
atmosphere
Fully contained Seat
Nominal Seat Diameter
Weight
12 mm (0.47”)
M12 MT
1,4 kg
M12 PP2
3,1 kg
DIMENSIONS
DIMENSIONS
M12-Bottom view
AR PROCESS®
Manufactured to the THREE ST
STAR
CONSTRUCTION MATERIALS
Va l v e G r a d e & M a t e r i a l s
Parts
S
V
Body
U
Stainless Steel 316L
Body Surface Finish < 0,4 µm (15µin Ra) non EP < 0,25 µm (10µin Ra) EP < 0,15 µm (6µin Ra) EP
Wetted parts
Non-wetted parts
Diaphragms
Elgiloy®
Seat material
PCTFE (Kel-F ) / PVDF or Vespel® (on request)
®
Backup diaphragm
All others
Manual
Actuation
Elgiloy®
Stainless Steel or alloys
Pneumatic Actuation
Upper Spindle
Stainless Steel
Parts
PP2
Handle
Aluminum
O-ring
NBR
All others
Stainless Steel or Alloys
Actuator Body
Aluminum Anodized
M12-MT
ROTAREX
Group
ROTAREX
Group
M12-leaf 09-2
M12-leaf 09-2
M12-PP2
SELFA
SELFA
Valves & Fittings
HOW TO ORDER
L16
Valves & Fittings
PART NUMBER
MT
2
2V1
3
/
I
4
K
5
A/B:B1/2
6
7
1 - Valve Series & Surface finish
2-
L16 V - Ra 0.25µm Ep. (10 µin Ra)
MT
Multi-Turn Handwheel
LP
Pneumatically actuated - normally close
Standard Colour:
for handles: white (other colours on request)
for LP actuators: NF=blue
3 - Valve Configurations
2V1
3VT
2 ports in line
2 ports in Line « Full passage »;
downstream branch « Te valve »
Valve Actuation (Standard Normally closed = NF)
4 - Body Material (others on request)
I
AISI 316L
5 - Seat Material
K
6 - End Connections
PCTFE (Kel-F®)
7 - Options
FT
—
CI
Panel Mounting
Back Mounting
Electric Limit Switch (LP Actuator)
V 1/2-F GAZEL® 1/2" - Female (Face Seal*)
V 1/2-M GAZEL® 1/2" - Male (Face Seal*)
B 1/2
BWO 1/2" - (Butt Orbital Weld)
B 3/4
BWO 3/4" - (Butt Orbital Weld)
SAGALOK Double Ring Fittings and metric Butt
Orbital Weld available on request
2V1= 2 ports
3VT= Tee Valve
Dimensions
Connection 1/2"
L
138,7 (5,46")
A
100,85 (3,97")
B
125,7 (4,95")
Connection 3/4"
157,5 (6,20")
110,25 (4,34")
144,5 (5,69")
L 16-leaf 09-2
Same dimensions for : GAZEL® Male or Female (Face seal), and BWO (for Butt Orbital Weld)).
ROTAREX
Group
A total component solution, from source to process
SELF
A-V
alves & Fittings S.A. - L-7505 Lintgen, G.-D. of Luxembourg
SELFA-V
A-Valves
Tel. *352 - 32 78 32 - 1, fax *352 - 32 78 32 322, www.rotarex.com, info@selfa.rotarex.com
L 16
DIAPHRAGM LINE VALVE FOR
HIGH PURITY LIQUID APPLICATIONS
L
16
L 16-leaf 09-2
L16V
1
*All GAZEL® Face Seals are VCR ® compatible. VCR ® is a registered trade mark of CAJON CO., HASTELLOY® is a registered trade mark of CABOT Corp. , Kel-F®
is a registered trade mark of 3M company, Vespel® is a registered trade mark of DUPONT, ELGILOY® is a registered trade mark of ELGILOY Company.
Example :
ROTAREX
Group
SELFA
SELFA
Valves & Fittings
Valves & Fittings
FEATURE a unique proven design
L16
T E C H N I CA L DATA
L16
T E C H N I CA L DATA
Selected Stainless Steels for
low sulfur content as well as
optimized impurity levels
Assembling, testing and packaging
in cleanroom class 10
Fluid Media
Max working pressure
Standard, HP, High purity, corrosive and non-corrosive fluid
Manual
87 PSI (6 bar)
Pneumatic - Low pressure
87 PSI (6 bar)
Actuator operating pressure
Fully functional from
vacuum to rated pressure
Individual serial number
for full traceability
Aerodynamic fully
swept flow passage
Precision electropolishing
of all internal surfaces
75 - 100 PSI (5-7 bar)
Temperature range
Flow capacity
-20°C to + 65°C (-4°F to 150°F)
L16 manual
Cv = 3
L16 pneumatic
Cv = 3
Certified max. Helium outboard leak rate (at max. pressure)
<10-7 mbar.l/sec
Certified max. Helium across the seat leak rate (at max. pressure) <10-7 mbar.l/sec
Wetted volume
< 21.6 cc
Mounting
Panel or back mounting
Excellent purgeability
Low particule
generation
AR PROCESS®
Manufactured to the THREE ST
STAR
CONSTRUCTION MATERIALS
DIMENSIONS
L16 LP
L16 MT
Va l v e G r a d e & M a t e r i a l s
Parts
Wetted Parts
Non-wetted
Parts
L16V
Body
SS 316L
Surface Finish
< 0.25 µm EP (10 µin Ra)
Diaphragm
Elgiloy®
Seat material
PCTFE (Kel-F®)
Backup diaphram
Elgiloy®
All others
Brass, Stainless Steel or alloys
L16 Button-view
Pneumatic Actuation
ROTAREX
Group
Parts for all valve grades
Parts
Upper spindel
Brass
Actuator Body
Aluminium
Handle
All others
Aluminium
Stainless Steel 316L
Piston
Aluminium
Upper spindel
Brass
O-rings
Nbr-PC 851
All others
Stainless steel 316L
Dimensions
Manual MT
Pneumatic LP
H
Open
Close
103 (4,06”)
100,5 (3,96”)
141,5 (5,57”)
ROTAREX
Group
L 16-leaf 09-2
L 16-leaf 09-2
Manual Actuation
SELFA
SELFA
Valves & Fittings
DIMENSIONS
KD/KY
Valves & Fittings
K D f u l l f l o w Va l v e s - O u t l i n e d i m e n s i o n s
Length
Length
End Conn. Total
LEC
LT
Height
Body
HB
Height
Total
HBT
Height
Total+Grip
HBT*
Diameter Dim.
Dim.
Body
Handle
Ppi to Conn Ppo to Conn Width
WD
Ppi
Ppo
lg
Height to
tub. center
HTC
Aprox.
Weight
mm
mm
mm
mm
mm
mm
mm
mm
mm
mm
mm
Kg
KD12
2,5
74
100
274
73
140
-
80
4,5
62
44
11
1,6
KD20
13
90
100
290
88
190
227
125
9,5
75
62
27
4,2
KD25
25
90
100
290
88
190
227
125
9,5
75
62
27
4,3
K Y h i g h f l o w Va l v e s - O u t l i n e d i m e n s i o n s
KD/KY-leaf 09-2
Valve Serie
Flow
Coefficient
CV
Length
Body
LB
Length
Length
End Conn. Total
LEC
LT
Height
Body
HB
Height
Total
HBT
Height
Total+Grip
HBT*
Diameter Dimension Dimension
Handle
PPi to Conn. PP to PP
WD
Ppi
Ppo
Body
Width
lg
Height to
tube center
HTC
Aprox.
Weight
mm
mm
mm
mm
mm
mm
mm
mm
Kg
mm
mm
mm
KY32
38
94
100
294
92
195
231
125
15
79
62
27
4,3
KY50
79
125
100
325
115
223
260
125
20
105
80
35
6,5
KY80
182
198,5
100
398,5
184
376
435
250
26
172
124
48
24
KY100
328
241
100
441
220
442
499
300
40
201
164
70
48
ROTAREX
Group
SELF
A-V
alves & Fittings S.A. - L-7505 Lintgen, G.-D. of Luxembourg
SELFA-V
A-Valves
Tel. *352 - 32 78 32 - 1, fax *352 - 32 78 32 322, www.rotarex.com, info@selfa.rotarex.com
A total component solution, from source to process
KD/KY
BELLOWS SEALED SHUT OFF LINE VALVES FOR
UHP AND HP BULK GAS APPLICATIONS
K
KD/KY
KD/KY-leaf 09-2
Length
Body
LB
*All GAZEL® Face Seals are VCR ® compatible. VCR ® is a registered trade mark of CAJON CO., HASTELLOY® is a registered trade mark of CABOT Corp. , Kel-F®
is a registered trade mark of 3M company, Vespel® is a registered trade mark of DUPONT, ELGILOY® is a registered trade mark of ELGILOY Company.
Valve Serie Flow
Coefficient
CV
ROTAREX
Group
SELFA
SELFA
Valves & Fittings
Valves & Fittings
FEATURE a unique proven design
KD/KY
CONSTRUCTION MATERIALS
KD/KY
Materiels
Wetted
The KD and KY valves are bellows sealed shut off line valves designed for UHP and HP Piping systems.
The high integrity makes these valves suitable for a wide range of toxic hazardeous, corrosive or
flammable fluid applications: bulk gas distribution systems, indoors gas distribution systems, vacuum
piping systems, centralized distribution systems for solvents
Non-Wetted
Bellows
316L Stainless Steel
Body
316L Stainless Steel
Sealing disc
PCTFE (KEL-F®)
Spindel
Brass
Handle
Plastic
Other
SSt or Alloy
Surface finish
High resolution spindle
Integrated versions
available
Process
Ra. µinch
Ra. µm
Serie
Passivated
Ra<15 µinch
Ra<0,4 µm
KD12, KD20, KD25, KY32
Ra<30 µinch
Ra<0,8 µm
KY50
Ra<40 µinch
Ra<1 µm
KY80, KY100
Electro-polished
Ra<15 µinch
Ra<0,4 µm
KD12, KD20, KD25, KY32
Ra<30 µinch
Ra<0,8 µm
KY50
Ra<40 µinch
Ra<1 µm
KY80, KY100
CMP &
Ra<10 µinch
Ra<0,25 µm
KD12, KD20, KD25, KY32
Electro-polished
Ra<12 µinch
Ra<0,3 µm
KY50
Ra<30 µinch
Ra<0,8 µm
KY80, KY100
Easy grip handle
Tube extensions, purge
connections or fittings
available
Very smooth operation
even at 30 bar
No internal particle
shedding components
TECHNICAL DATA
Full flow bellow sealed Valve
from 1/2" up to 1"
Operating Specifications
Individual serial number
for full traceability
Positive shut off to prevent
over torquing of over
stressing the bellows
Assemblind, testing &
packaging in Class 10
Cleanroom
Very high Cv Values
30 bar
435 psi
Max operating T° (closed)
-20°C<T°<80°C
-4°F<T°<176°F
Max operating T° (open)
-20°C<T°<80°C
-4°F<T°<176°F
Leak tests
Double bag packaging
with Nitrogen supplied
from liquid source
Compact design
Max operating pressure
Inboard/Outboard
1x10-9 mbar.l/s He max
Across the seat
1x10-9 mbar.l/s He max.
Optional
Electro-polished wetted
surfaces down to Ra<10
µinch (0,25 µm)
Cleaned for high
purity service
Limited KEL-F surface
exposed to the fluid to
prevent from permeation
Upstream, downstream
and bellows purge ports
(Purge valves on request)
High Flow bellow sealed valve
11/2" up to 4"
Purging
Purge ports- Purge Valves
Sealing disc
Vespel, Tenic , other under request
Special tests
Particule, Moisture, THC
Analysis
SEM, Esca and Auger Analysis
K D f u l l f l o w & K Y h i g h f l o w Va l v e s - T u b e c o n n e c t i o n s
KD12
KD20
KD25
KY32
KY50
KY80
KY100
Nominal Diameter
9,4 mm
15,75 mm
22,1 mm
29,7 mm
47,5 mm
72,1 mm
97,38 mm
Stroke
14
20
20
20
25
45
55
Min. Dia. tube conn.
12 mm
19 mm
25,4 mm
33,7 mm
50,8 mm
76,1 mm
101,6 mm
Max. Dia. tube conn.
19,05 mm
29 mm
48,3 mm
48,3 mm
63,5 mm
88,9 mm
114,3 mm
60,30 mm
88,9 mm
88,9 mm
114,3 mm
114,3 mm
-
KD/KY-leaf 09-2
Max. Conn. with adpater 38,1 mm
ROTAREX
Group
ROTAREX
Group
KD/KY-leaf 09-2
End connections in
various tube sizes
(metric and imperial)
SELFA
SELFA
Valves & Fittings
HOW TO ORDER
M4-SI
Valves & Fittings
PART NUMBER
Example :
M4SI V
1
BP
2
2V1
3
K
4
A/B:B1/4
5
1 - Valve Series, Surface finish & Body material
4 - Seat Material
M4-SI V - Ra 0.25 µm EP (10 µin Ra)-316 L VAR
M4-SI S - Ra 0.4 µm (15 µin Ra)-316 L low sulf.
K
V
P
6
A total component solution, from source to process
PCTFE (Kel-F®)
Pi (Vespel®) (optional)
PVDF (optional)
M4-SI (Reverse seat)
DIAPHRAGM LINE VALVES
FOR HP AND UHP APPLICATIONS
(STANDARD AND GAS SPECIFIC)
2 - Valve Actuation
BM
Multi-Turn Handwheel (8.6bar)
LM
Multi-Turn Handwheel (20bar)
HM
Multi-Turn Handwheel (240bar)
BPNF
Pneumatically actuated (8.6bar)
LPNF/LPNO* Pneumatically actuated (20bar)
HPNF/HPNO*Pneumatically actuated (240bar)
BQ
Quarter-Turn Handwheel (8.6bar)
LQ
Quarter-Turn Handwheel (20bar)
*NF=normally closed /NO=normally open
5 - End Connections
V 1/4 F
V 1/4 M
B 1/4
B6
GAZEL® 1/4" - Female (Face Seal*)
GAZEL® 1/4" - Male (Face Seal*)
BWO 1/4" (Butt Orbital Weld)
BWO 6 mm (Butt Orbital Weld)
6 - Options
FT
CI
Panel Mounting
Electric limit switch
3 - Valve Configurations
2V1
2 ports in line
See below for other configurations
BWO for standard
welding heads
SAGALOK Double
ring Fitting
Valve Configurations
SELF
A-V
alves & Fittings S.A. - 24 route de Diekirch, B.P.19, L-7505 Lintgen, Luxembourg
SELFA-V
A-Valves
Tel. +352 - 32 78 32 - 1, fax +352 - 32 78 32 322, www.rotarex.com, info@selfa.rotarex.com
M
4-SI
Blue
Blue
Blue
Green
White
Black
M4-SI-leaf 06-4
GAZEL® -Male
(face seal)*
BM,LM,HM :
BPNF
LPNF
LPNO
HPNF/HPNO
BQ,LQ
*All GAZEL® Face Seals are VCR ® compatible. VCR ® is a registered trade mark of CAJON CO.,
Kel-F® is a registered trade mark of 3M company, Vespel® is a registered trade mark of DuPont.
All rights of change reserved.
GAZEL® -Female
(face seal)*
Standard Colors
ROTAREX
Group
SELFA
SELFA
Valves & Fittings
Valves & Fittings
FEATURE a unique proven design
M4-SI
Selected Stainless Steels for
low sulfur content as well as
optimized impurity levels
T E C H N I CA L DATA
M4-SI
T E C H N I C A L DAT A
Assembling, testing &
Packaging in
cleanroom Cl. 10
Individual Serial number,
for full traceability
Fluid Media
Max working pressure
Compact size
Visual Open/Close
Indicator (ON/OFF
window on Multiturn
version)
Precision electropolishing
of all internal surfaces
Fully functional from
vacuum to rated
pressure
Long life technology
Standard, HP, UHP, corrosive and non-corrosive gases
M4-SI manual multiturn MT
3500 PSI (240 bar) or 290 PSI (20 bar) or 125 PSI (8.6bar)
M4-SI pneumatic BPNF
125 PSI (8.6 bar)
M4-SI pneumatic LPNF - LPNO
290 PSI (20 bar)
M4-SI 1/4 turn QT
125 PSI (8.6 bar) or 290 PSI (20 bar)
M4-SI pneumatic HPNF - HPNO
3500 PSI (240 bar)
Pneumatic actuator opening pressure
5 - 7 bar (75 to 105 PSI)
Temperature range
-20°C to+65°C (-4°F to 149°F)(Vespel®seat to:155°C/311°F)
Burst pressure
12500 PSI (850 bar)
Flow Capacity
Cv = 0.2
Certified max. Helium inboard leak rate
< 1.10-9 mbar.l/sec
Certified max. Helium outboard leak rate (at max. pressure)
< 1.10-9 mbar.l/sec
Certified max. Helium across the seat leak rate (at max. pressure) < 1.10-9 mbar.l/sec
Low particule
generation
Aerodynamic fully
swept flow passage
Wetted volume
< 1.2 cc
Mounting
Back mounting or optional Panel mounting
Nominal seat diameter
4 mm (0.16”)
Excellent
purgeability
AR PROCESS®
Manufactured to the THREE ST
STAR
CONSTRUCTION MATERIALS
Va l v e G r a d e & M a t e r i a l s
Parts
Body
Wetted Parts
M4-SI S
M4-SI V
SS 316 L
Surface Finish
SS 316 L VAR
< 0,4 µm (15µin Ra)
Diaphragm
Seat material
Non-wetted parts
< 0,25 µm EP (10µin Ra)
M4-SI
bottom view
Polished Nickel Alloy
Kel-F® (PVDF or Vespel® on request )
Backup diaphragms
Nickel Alloy
All others
Stainless Steel or alloys
M4-SI
Multiturn valve (MT)
with open/close
window
M4-SI - Quarter turn (QT) valve
Air connector
1/8”NPT
Air connector
1/8”NPT
ROTAREX
Group
Pneumatic Actuation
Parts for all valve grades
Parts
Upper Spindel
Brass
Actuator Body
Aluminium
Handle
All others
Plastic(Alu.optional for MT)
Stainless Steel
Piston
Brass
O-rings
NBR-PC 851
All others
Stainless Steel
M4-SI - Pneumatic valve
Medium Pressure (LPNF,
LPNO)
M4-SI Pneumatic valve
Low pressure (BPNF)
M4-SI Pneumatic valve
High Pressure (HPNF,
HPNO)
ROTAREX
Group
M4-SI-leaf 06-4
M4-SI-leaf 07-3
Manual Actuation
SELFA
SELFA
Valves & Fittings
HOW TO ORDER
DS4
Valves & Fittings
PA R T N U M B E R
I
3
/
1 - Va l v e S e r i e s
2-
RS- Reversed seat diaphragm valve
MT
QT
K
5
A/B : 4F
6
Valve Actuation
Multi-turn handwheel
1/4 turn lever
Standard colour:
for handles: black (other colours on request)
3 - Seat Material
K
V
P
PCTFE (Kel-F®)
PI (Vespel®)
PVDF
4I
B
5 - End connections
6-
1/4M
1/4F
RDB1/4
FT
FP
CP
Body Material
AISI 316L Stainless steel
Brass
Options
Panel mounting
Back mounting
Chrome plated
M4-1-leaf
09-2
1/4”NPT male
1/4”NPT female
1/4”compresion
ROTAREX
Group
A t o t a l c o m p o n e n t s o l u t i o n , f r o m s o u r c e t o p ro c e s s
SELF
A-V
alves & Fittings S.A. - L-7505 Lintgen, G.-D. of Luxembourg
SELFA-V
A-Valves
Tel. *352 - 32 78 32 - 1, fax *352 - 32 78 32 322, www.rotarex.com, info@selfa.rotarex.com
DS4
Direct seal
Diaphragm line valve
DS
4
09-2
MT
2
M4-1-leaf
RS
1
*All GAZEL® Face Seals are VCR ® compatible. VCR ® is a register ed trade mark of CAJON CO., HASTELLOY® is a registered trade mark of CABOT Corp. , Kel-F®
is a register ed trade mark of 3M company, Vespel® is a registered trade mark of DUPONT, ELGILOY® is a register ed trade mark of ELGILOY Company.
Example :
ROTAREX
Group
SELFA
SELFA
Valves & Fittings
Valves & Fittings
FEATURE a unique proven design
DS4
Individual Serial number,
for full traceability
T E C H N I CA L DATA
DS4
Assembling, testing & Packaging
in cleanroom Cl. 10
Multi-turn handwheel
1/4 turn optional
Compact size
T E C H N I CA L DA TA
Low internal volume
Panel mounting optional
Bar stock construction for
high-purity applications
(brass or 316L SS)
Available in a variety
of connection options
No springs, packings or
O-rings in wetted areas
to save gas integrity
AR PROCESS
Manufactured to the THREE ST
STAR
Seat Material
Seals
Inboard
<1x10 -9 mbar.l/sec
Outboard
<1x10 -9 mbar.l/sec
Across the seat
<1x10 -9 mbar.l/sec
Operation torque
2-3 Nm (1.5 - 2.2 ft.lbs)
Flow coefficient
max. Cv = 0.18
Seat orifice size
3mm
Approx. weight
0.26 kg
Standard connections
1/4” NPT male and female / double ring fittings Sagana
Connections on request
BWO
®
CONSTRUCTION MATERIALS
Pa r t s
Body
He Leak rates
207 bar / 3000 psi
Elgiloy diaphragms provide a
metal-metal seal to atmosphere
and a high cycle life
Replacable PCTFE seat
Va l v e G r a d e &
Max. working pressure
DIMENSIONS
Materials
DS4
Brass or SS 316L
PCTFE (PI or PVDF on request)
Metal to metal (Elgiloy® diaphragms) with Viton O-ring backup
Options
optional configurations
Back mounting
Panel mounting
DS4 - Multi-turn (MT) handwheel
DS4
fr ont view
Chromium plating
09-2
ROTAREX
Group
ROTAREX
Group
M4-1-leaf
M4-1-leaf
09-2
1/4 turn handwheel