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ACCESSORIES
GENERAL CATALOG
AIR TREATMENT, AUXILIARY, VACUUM,
AND FLUORORESIN PRODUCTS
VACUUM REGULATORS
CONTENTS
759
760
761
762
763
764
765
767
768
VACUUM REGULATORS
Small Vacuum Regulators
Features
Specifications, Order Codes, Flow Rate Characteristics,
Pressure Characteristics
Dimensions, Inner Construction and Major Parts,
Major Parts and Materials
Handling Instructions and Precautions
Pilot Type Vacuum Regulators
Features
Specifications, Order Codes
Inner Construction and Major Parts
Dimensions
Handling Instructions and Precautions
Caution
Before use, be sure to read the “Safety Precautions” on p. 49.
758
SMALL VACUUM
REGULATORS
VR100
●Offer any vacuum pressure setting when mounted on vacuum lines.
●Push lock type regulator knob for light, smooth pressure regulation.
●Panel mounting is also a simple process, by opening holes in the panel.
●Suction flow rate VR100: MAX.45r/min [1.59ft.3/min.] (ANR)Note1
● Lightweight (110g [3.88oz.]), compact (28×28×78mm [1.102×1.102×3.071in.])Note2
Notes: 1. Values may change depending on operating conditions.
2. Excluding options.
Application Example
qMultiple vacuum pressured devices required
VR100
Vacuum pump Capacity tank
wVacuum adjustment used for a vacuum packaging
Vacuum
solenoid valve
VR100
Vacuum pump Capacity tank
Filter
Vacuum
solenoid valve
Filter
Vacuum packaging
Vacuum pad
Workpiece
Symbol
Operation Principle
When the knob is pulled firmly out,
rotating the knob to the right applies
compression force to the pressure
regulating spring, acting through a
diaphragm to lift up the pressure
regulating valve assembly, which then
passes through the VAC (vacuum
pump side) and SET (pressure
regulating side) to reduce pressure on
the regulating side. The vacuum
pressure on the pressure regulating
side passes through a bypass hole to
enter a chamber on the lower part of
the diaphragm, activating the
diaphragm. Here, it resists the
compression force of the pressure
regulating spring, with the VAC side
and SET side closed by the valve
assembly to obtain a balance that
regulates the required vacuum
pressure level. If vacuum pressure on
the pressure regulating side falls
below the setting value, air flows into
the pressure regulating side from the
atmosphere, maintaining the proper
level.
759
Knob
(with lock mechanism)
O-ring
Pressure regulating spring
Bonnet
Hexagon nut
(for panel mounting)
Diaphragm
Vacuum bypass
Inlet for outside air
Outside air
VAC
(Vacuum pump side)
SET
(Pressure regulating side)
Valve pin
Valve
Body
O-ring
C type snap ring
Cover
Order Codes
Specifications
Model
Item
VR100
VR100
Air
Media
Setting pressure range kPa [in.Hg]
−6.5∼−100 [−1.9∼−29.54]Note
Setting pressure sensitivity kPa [in.Hg]
0.26 [0.08]Note
Repeatability
Proof pressure
kPa [in.Hg]
±0.8 [±0.24]Note
MPa [psi.]
0.2 [29]
Suction flow rate R/min [ft.3/min.] (ANR)
MAX. 45 [1.6]
Operating temperature range °C [°F]
5∼60 [41∼140]
Pressure characteristics
Bracket
Blank
B
Non-ion specification
Blank
Standard specification
NCU
Non-ion specification
Note
ΔP＝4 [1.2]
kPa [in.Hg]
M5× 0.8, Rc1/8
Port size
Vacuum gauge connection port size
Mass
Small vacuum regulator
1/8
Rc
No bracket
With bracket
Vacuum gauge
Blank
No vacuum gauge
G
With vacuum gauge
Port size
M5×0.8
M5
01
Rc1/8
0.11 [0.24]
kg [lb.]
●Order codes for vacuum gauge only
Note: Values may vary depending on conditions. These values do not
guarantee performance in practical conditions. Please take note.
GV-40-01 (Standard specification)
GV-40-01-NCU (Non-ion specification)
Flow Rate Characteristics
●VR100-M5
●VR100-01
kPa
0
Vacuum pressure on regulating side
Vacuum pressure on regulating side
kPa
0
−21
−40
−48
−75
−80
−101
0
20
40
60
Suction flow rate R/min
（ANR）
−21
−40
−48
−75
−80
−101
0
20
40
60
Suction flow rate R/min
（ANR）
1R/min = 0.0353ft.3/min.
−100kPa = −29.54in.Hg
Pressure Characteristics
●VR100-M5
●VR100-01
kPa
−53.3
−54.7
Set point
−56.0
−101
−95 −88 −81 −75 −68 −61
Vacuum pressure on vacuum pump side
kPa
−53.3
Set point
−54.7
−56.0
−101
−95 −88 −81 −75 −68 −61
kPa
Vacuum pressure on vacuum pump side
−100kPa = −29.54in.Hg
760
VACUUM REGULATORS
Vacuum pressure on regulating side
Vacuum pressure on regulating side
kPa
Dimensions of Small Vacuum Regulators
(mm)
27
□28
VR100
Hexagon nut
width across flats
40
26
Bracket
（-B）
M24×1.5
φ22
（54）
20
□28
2
5
2
22
φ42.5
78
(When locked: 75)
M5：41.5
01 ：43.5
M5：21.5
01 ：23.5
SET
M5：23
01 ：21
VAC
Inlet for outside air
(Opposite side)
M5：2-M5×0.8
Vacuum gauge 01 ：2-Rc1/8
（-G）
20
M5：25
01 ：23.5
M5：19.5
01 ：21
M5：45
01 ：43.5
2-Rc1/8
Vacuum gauge
connection port
(with 1 plug)
Remark: The mounting hole for installing the VR100 to a panel, etc., is φ24.5. For mounting, use the provided hexagon nut.
Dimensions of Vacuum Gauge
(mm)
GV-40-01
44
26.5
R1/8
M5×0.8
Depth 5
40
80
φ42.5
20
0
100
−kPa
Inner Construction and Major Parts
Knob
(with lock mechanism)
10
（4）
O-ring
□14
60
17.5
Vacuum Gauge Specifications
Model
Item
GV-40-01
Air
Media
Pressure regulating spring
0∼−100 [0∼−29.54]
Pressure indicator range kPa [in.Hg]
F.S.±3%
Accuracy
Bonnet
Hexagon nut
(for panel mounting)
5∼60 [41∼140]
Operating temperature range °C [°F]
R1/8 (female M5×0.8)
Port size
Diaphragm
Mass
0.08 [0.18]
kg [lb.]
Vacuum bypass
Inlet for outside air
Major Parts and Materials
Outside air
Parts
Body
VAC
(Vacuum pump side)
SET
(Pressure regulating side)
Valve pin
Valve
O-ring
C type snap ring
Cover
761
Bonnet
PBT
Knob
ABS
Diaphragm
Body
Materials
Aluminum alloy
Synthetic rubber (NBR)
Cover
Polyacetal
O-ring
Synthetic rubber (NBR)
Valve
Brass＋Synthetic rubber (NBR)
Handling Instructions and Precautions
Pressure regulation
1. When regulating the pressure, connect a
vacuum gauge to the vacuum gauge
connection port (VR100: Rc1/8) on the
vacuum regulator.
2. Always pull the knob out firmly to perform
pressure regulation, rotating it to the right
(clockwise) to reduce the pressure
“atmospheric pressure ➞ vacuum
pressure” and rotating it to the left
(counterclockwise) to increase the
pressure “vacuum pressure ➞
atmospheric pressure.”
3. After regulating pressure, push the knob
back into the body and lock it in place.
LOCK
RELEASE
To decrease
pressure
To increase
pressure
LOCK
Mounting and Piping
1. If mounting the vacuum regulator as a
single unit, use a bracket (optional). A
ring nut can also be used for panel
mounting.
2. While any mounting direction is
acceptable, mount so that the knob can
be operated.
3. Do not perform any machining on the
body of the unit, etc., for mounting. Its
functions could be damaged.
4. For piping to the vacuum regulator,
connect so that the VAC mark is on the
vacuum pump side. Piping connections
on the opposite side must not be made.
5. Since performance is affected by the
capability of the vacuum pump used, take
special care in selecting the vacuum
pump. If the set pressure is undergoing a
large change, either change the vacuum
pump or change the piping. If the vacuum
pump cannot be changed, install a
capacity tank on the VAC side.
General precautions
1. Always thoroughly blow off (use
compressed air) the piping before
plumbing.
Entering chips, sealing tape, rust, etc.,
generated during plumbing could result in
air leaks or other defective operation.
2. Use air for the media. For the use of any
other media, consult us.
3. If using in locations subject to dripping
water, dripping oil, etc., or to large
amounts of dust, use something to cover
and protect the unit.
VACUUM REGULATORS
Caution: The vacuum regulator constantly sucks
in a minute amount of atmospheric
pressure air to maintain a balance. As a
result, be careful to avoid blocking the
body's inlet for outside air. Pressure
cannot be set when the inlet hole is
blocked.
762
PILOT TYPE VACUUM
REGULATORS
NVR200, NVRA200
●Uses the vacuum pilot method (diaphragm indirect operation type).
●Achieves superior pressure stability in the face of fluctuating flow rates.
Conventional product
NVR□200
●Small change in the set pressure
when flow rate increases.
●Large change in the set pressure
when flow rate increases.
Regulated pressure
Vacuum
pressure
Low
Regulated pressure
Vacuum
pressure
Low
High
High
Small
Flow rate
Large
Small
Suction flow rate
Flow rate
Large
Suction flow rate
※These graphs are image diagrams. Results vary depending on the performance and conditions of the vacuum pump used.
●Use of the indirect operation type achieves lightweight (0.20kg [0.44lb.]) and compact (50×40 ×109cm [1.969 × 1.575×
4.291in.]) design with a large flow rate.
Note: Varies depending on conditions.
Suction flow rate MAX.200R/min [7.06ft.3/min.] (ANR) Note
●External pilot type (NVRA200) for cases where pressure regulation operations are difficult such as inside panel
applications.
Enables remote operation by using the vacuum regulator for pilot pressure regulation.
●Select from two piping port diameters (Rc1/8, Rc1/4).
Application Examples
qNVR200
e Vacuum pressure regulation using vacuum packaging
NVR200
Vacuum
pump
Capacity
tank
Solenoid
vacuum valve
Solenoid
vacuum valve
1 unit
Vacuum
pump
Filter
Capacity
tank
NVR200
Filter
Vacuum
packaging
Vacuum pad
Workpiece
w Multiple vacuum pressure units required
r Vacuum pressure regulation using vacuum plate
Solenoid
vacuum valve
Solenoid
vacuum valve
Vacuum
pump
Capacity
tank
NVR200
Filter
Vacuum
pump
Capacity
tank
Workpiece
NVR200
Filter
Vacuum pad
Vacuum plate
Workpiece
Vacuum regulator for pilot pressure regulation
(Ex.: VR100)
● NVRA200 (External pilot type)
When using NVRA200, the boxed part of the circuit
above
is instead configured as shown to the right.
763
Capacity
tank
NVRA200
Symbols
Internal pilot
External pilot
P-VAC
VAC
VAC
SET
SET
Specifications
Model
Item
Pilot specification
Port size
NVR200
NVRA200
Internal vacuum pilot type
External vacuum pilot type
1/8
Rc
1/4
Media
Set pressure range Note1 kPa [in.Hg]
Set pressure sensitivityNote1 kPa [in.Hg]
RepeatabilityNote1
Proof pressure
1/8
− 2.5 ∼− 95 [− 0.74 ∼− 28.06]
0.1 [0.03]
% (F.S.)
2
0.6
0.5 [73]
MPa [psi.]
Suction flow rateNote1 R/min [ft.3/min.] (ANR)
MAX.130 [4.59]
MAX.200 [7.06]
Operating temperature range °C [°F]
Vacuum gauge port diameter Rc
MassNote2
1/4
Air
MAX.130 [4.59]
MAX.200 [7.06]
5 ∼ 60 [41 ∼ 140]
1/4
kg [lb.]
0.20 [0.44]
0.17 [0.37]
Notes: 1. May vary depending on conditions on the SET (pressure regulation) side and pump performance on the VAC (vacuum pump) side.
These figures are for the case connected to a vacuum pump with exhaust speed of 1000R/min [35.3ft.3/min.] or higher, and a maximum vacuum level of
− 101kPa [− 29.84in.Hg] or more. (Reference)
2. Excluding the option
Order Codes
NVR
200
Bracket
Blank
No bracket
B
With bracket
Pilot specification
Blank
Internal pilot
A
External pilot
Body
model
Vacuum gauge
Blank
No gauge
G
E1
With GV40 vacuum gauge
With EG110 pressure gauge with electronic switch (negative specification)Note
Port size Rc
01：Rc 1/8
02：Rc 1/4
Pilot type vacuum regulator
● Order Code only for vacuum gauge
GV-40
(standard)
VACUUM REGULATORS
● Order code for pressure gauge with electronic switch (negative pressure specification)Note
EG110
Note: For specifications, dimensions, and handling of the pressure gauge with
electronic switch, see p.177, pressure gauge with electronic switch.
764
Inner Construction and Major Parts
Internal Pilot
NVR200
Pilot portion
Knob
(With locking mechanism)
Bonnet
Major Parts and Materials
Parts
Materials
Body
Aluminum die-casting
Bonnet
Plastic
Knob
Plastic
Ring nut
Atmospheric pressure
air intake hole
Pilot diaphragm
Pilot valve
Atmospheric pressure air
Body
Main valve diaphragm
Pilot diaphragm
Synthetic rubber
Main valve diaphragm
Pilot valve
Pressure regulating spring
Synthetic rubber ＋ Aluminum alloy
Valve
Brass
Relief valve
Aluminum alloy
Relief plug
Plastic
Valve
SET
VAC
(Regulating side)
(Vacuum pump side)
Screen
Relief valve
Relief plug
Relief
External Pilot
NVRA200
P-VAC
(External vacuum regulator)
Major Parts and Materials
Parts
Body
Main valve diaphragm
Valve
Ring nut
Materials
Aluminum die-casting
Main valve
diaphragm
Body
Synthetic rubber
Brass
Relief valve
Aluminum alloy
Relief plug
Plastic
Valve
VAC
SET
(Regulating side)
(Vacuum pump side)
Screen
Relief valve
Relief plug
Relief
Configuration and Features of Vacuum Pilot Type (Diaphragm Indirect Operation Type)
Refer to NVR200 inner construction
When rotating the knob to regulate the vacuum pressure, the pressure regulation spring compression force does not directly operate on the main
valve diaphragm in this configuration. Instead, pressure on the upper part of the body (the pilot) is regulated, so that only a constantly maintained
vacuum pilot pressure operates on the main valve diaphragm. As a result, even if the flow rate is increased when required by conditions, it
eliminates the effect of fluctuations in the pressure regulation spring force on the main valve diaphragm operation stroke, and achieves a stable
flow rate characteristic that shows little change in set vacuum pressure due to a rising flow rate.
In addition, use of the vacuum pilot type eliminates the need to set the pressure regulation spring to match the size of the main valve diaphragm,
to achieve a more compact, more lightweight body.
765
Flow Rate Characteristics
External pilot
NVR200-01
NVRA200-01
kPa
0
kPa
0
−20
−20
Regulated pressure
Regulated pressure
Internal pilot
−40
−60
−80
−40
−60
−80
−100
−100
0
40
80
120
160
0
200
40
80
NVR200-02
160
200
NVRA200-02
kPa
0
kPa
0
−20
−20
Regulated pressure
Regulated pressure
120
Suction flow rate R/min（ANR）
Suction flow rate R/min（ANR）
−40
−60
−80
−100
−40
−60
−80
−100
0
40
80
120
160
200
0
40
80
Suction flow rate R/min（ANR）
120
160
200
Suction flow rate R/min（ANR）
1R/min [0.353 ft.3/min.]
− 100kPa = − 29.54in.Hg
Remark: Characteristics when connected to a vacuum pump with exhaust speed of 1000 R/min [35.3 ft.3/min.] or higher, and a maximum vacuum level of
− 101kPa [− 29.84in.Hg] or more.
Pressure Characteristics
External pilot
NVR200-01, -02
NVRA200-01, -02
kPa
−52
kPa
−52
−53
−53
Regulated pressure
−54
−55
Set point
−56
−57
−100
−90
−80
−70
Pressure on vacuum pump side kPa
−60
−54
−55
Set point
−56
−57
−100
−90
−80
−70
−60
Pressure on vacuum pump side kPa
Remark: The external pilot type is affected by the characteristics of the pilot
pressure vacuum regulator.
− 100kPa = − 29.54in.Hg
VACUUM REGULATORS
Regulated pressure
Internal pilot
766
Dimensions of Pilot Type Vacuum Regulators
mm [in.]
Internal pilot
50 [1.969]
40 [1.575]
NVR200
30 [1.181]
2.6 [0.102]
5 [0.197]
SET
29.5
[1.161]
VAC
46.5 [1.831]
Inlet for
outside
air
M24×1.5
109 [4.291] (When locked: 106 [4.173])
7
[0.276]
20 [0.787]
30 [1.181]
-B
Relief
4
[0.157]
50
[1.969]
2-Rc1/4
Vacuum gauge port
(With 1 plug)
External pilot
NVR200
φ2.5 [0.098]
17 (Width across flats)
[0.669]
NVR200-01:2-Rc1/8
NVR200-02:2-Rc1/4
40
[1.575]
50 [1.969]
30 [1.181]
NVRA200
NVRA200
40 [1.575]
Rc1/8
2.6 [0.102]
5 [0.197]
-B
M24×1.5
29.5
[1.161]
SET
75.5 [2.972]
VAC
31 [1.220]
7
[0.276]
20 [0.787]
30 [1.181]
P-VAC
Relief
4
[0.157]
50
[1.969]
2-Rc1/4
Vacuum gauge port
(With 1 plug)
φ2.5 [0.098]
17 (Width across flats)
[0.669]
NVRA200-01:2-Rc1/8
NVRA200-02:2-Rc1/4
40
[1.575]
Dimensions of Vacuum Gauge and Pressure Gauge with Electronic Switches
GV-40
● Panel mount
vacuum gaugeNote1
46 [1.811]
26.5 [1.043] 19.5 [0.768]
12 [0.472]
R1/4
(6 [0.236])
M5×0.8
Depth5 [0.197]
40
20
0
−kPa
□14
[0.551]
φ42.5 [1.673]
60
80
100
GPV-40
54 [2.126]
EG110 Note2
(48 [1.890])
30 [1.181]
40 [1.575]
40 [1.575]
13
[0.512]
(6 [0.236])
Width across flats 14 [0.551]
M5×0.8 Depth6 [0.236]
R1/4
Notes: 1. The panel mounting type is available for vacuum gauge. See p.175.
2: For specifications, dimensions, and handling of the pressure gauge with electronic switch, see p.177.
767
mm [in.]
Handling Instructions and Precautions
Pressure regulation
1. When regulating the pressure, connect a
vacuum gauge to the vacuum gauge
connection port (Rc1/4) on the pilot type
vacuum regulator.
2. Always pull the knob out firmly to perform
pressure regulation, rotating it to the right
(clockwise) to reduce the pressure
“atmospheric pressure ➞ vacuum
pressure” and rotating it to the left
(counterclockwise) to increase the
pressure “vacuum pressure ➞
atmospheric pressure.” To set the
pressure, rotate it to the right
“atmospheric pressure ➞ vacuum
pressure” direction. Using left rotation
“vacuum pressure ➞ atmospheric
pressure” to set may result in an
imprecise pressure setting.
After regulating pressure, push the knob
back into the body and lock it in place.
LOCK
RELEASE
To decrease
pressure
To increase
pressure
Mounting and Piping
1. If mounting the pilot type vacuum
regulator as a single unit, use a bracket
(optional). A ring nut can also be used for
panel mounting. Do not exceed a ring nut
tightening torque of 980.7N・cm [7.23ft・
lbf].
2. Set the mounting position so that the
knob is top. If the knob must unavoidably
be mounted facing down, there may be
noise from vibration. In this case, either
change the setting pressure, or adjust the
suction flow rate, etc.
3. Do not mount the pilot type vacuum
regulator in a location where it will be
directly subjected to strong shocks or
vibrations.
4. Do not perform any machining on the
body of the unit, etc., for mounting. Its
functions could be damaged.
5. For piping to the vacuum regulator,
connect so that the VAC mark is on the
vacuum pump side. Piping connections
on the opposite side must not be made.
6. Since performance is affected by the
capacity of the vacuum pump used, take
special care in selecting the vacuum
pump. If the set pressure is undergoing a
large change, either change the vacuum
pump or change the piping. If the vacuum
pump cannot be changed, install a
capacity tank on the VAC side.
General precautions
1. Always thoroughly blow off (use
compressed air) the piping before
plumbing.
Entering chips, sealing tape, rust, etc.,
generated during plumbing could result in
air leaks or other defective operation.
2. Use air for the media. For the use of any
other media, consult us.
3. If using in locations subject to dripping
water, dripping oil, etc., or to large
amounts of dust, use something to cover
and protect the unit.
LOCK
VACUUM REGULATORS
Cautions: 1. The vacuum regulator constantly
sucks in a minute amount of
atmospheric pressure air to maintain
a balance. As a result, be careful to
avoid blocking the body's inlet for
outside air. Pressure cannot be set
when the inlet hole is blocked.
2. At the start of operations, such as
when the vacuum pump operation is
restarted, or when vacuum pressure
fluctuations on the VAC side are
large, the set pressure on the SET
side may shift slightly. If precise
pressure settings are required,
perform the pressure regulation
operation again.
Cautions: 1. Avoid an application that involves
installing a valve partway along the
piping between the vacuum pump
and pilot type vacuum regulator, and
repeatedly switching the VAC side
vacuum pressure.
2. The pilot type vacuum regulator uses
a metal seal configuration for its
relief portion, which means that the
SET side vacuum pressure cannot
maintain the set pressure when the
VAC side supply stops due to
shutdown of the vacuum pump, etc.
To prepare for situations where the
VAC side supply has stopped while
a workpiece is in being transferred
using a vacuum pad, install check
mechanisms along the SET side
piping to prevent workpiece falls.
3. For φ4 [0.157in.]×φ2.5 [0.098in.]
tube, if piping using it is connected to
the external pilot type (NVRA200)
pilot port, we recommend the length
to 5m [16.4ft.] or less. A large piping
volume or piping resistance can
prevent a proper pressure setting.
768
769