Measurement and control Vacuum gauges Active Pirani gauge Active ion gauge Active inverted magnetron gauge Active wide range gauge Active thermocouple gauge Active strain gauge Barocel capacitance manometers 224 227 229 230 231 232 233 Vacuum displays and controllers Active ion gauge controller TIC instrument controller Active gauge controller Pirani 501 and PRE10K Active gauge display Active digital display Model 1575 Pressure Display Model 652 Power Supply 237 238 243 244 245 246 247 248 Gauge and controller installation examples 249 Pressure control 252 Capsule dial gauges, vacuum switches and McLeod gauges 255 Mass flow measurement and control [y A shop online: www.bocedwards.com 258 7 PAGE 221 as a stand-alone transducer connected to an appropriate power supply and control system analog input. VACUUM MEASUREMENT AND CONTROL SYSTEMS The BOC Edwards range of instruments offers: • Measurement over the range 2000 to 10-11 mbar • Advanced microprocessor based controllers • Calibration of instruments to UK national standards Selecting your vacuum gauge BOC Edwards offers a wide choice of vacuum measurement and control products - from dial gauges to microprocessor based gauge controllers. Within each product range, there is a family of models designed to meet the widest user specification. The first step in selecting the right gauge to meet your application is to decide the range of pressures that you want to measure at each of your measuring points. The chart below indicates the broad pressure ranges covered by the spectrum of BOC Edwards instruments: use this chart as a primary guide to the choice of gauge head. The second step is to establish your requirement for the output of the pressure measurement. If you simply want an indication that a certain level of vacuum has been reached (for example, to open a valve or start a process), then a vacuum switch or Active gauge head alone may be appropriate. If you want to display the pressure locally, then a dial gauge may be suitable. If you need the pressure display to be remote from the measurement point (for example, in a control panel) then select the Pirani 501, Active Gauge Display, Active Gauge Controller or Active Digital Display, depending on the features you require. (You will also need to select appropriate gauge head(s) to accompany these displays and controllers.) If your control system (such as a PLC, PC or dedicated microprocessor controller) needs to know the pressure to make sequence decisions but you do not need a separate vacuum display, then you can use an Active gauge head 7 10-11 10-10 10-9 10-8 10-7 UHV 10-6 HIGH VACUUM 10-5 10-4 Thirdly, you need to select a gauge suitable for the process gases and constructed to withstand exposure to the external environment of your vacuum system. Consider both whether the gauge will survive in the process and also whether the process gases will effect the gauge's measurement. For example, the measurement made by mechanical gauges (vacuum switches, dial gauges, strain gauges and capacitance manometers) is not affected by gas composition, whereas that made by other types of gauges is gas dependent. Calibration for different gases All of our gauge heads are calibrated for dry nitrogen; the calibration for dry air is the same. If you use thermal conductivity or ionization gauges with gases other than nitrogen or air, you may need to apply a gas correction factor for an accurate indication of your system pressure. Please contact us if you need more information. Gauge head installation How you install the gauge head into your vacuum system will affect the accuracy and reliability of your pressure measurement. For best performance we recommend that you: • Connect the gauge head to your vacuum system with a straight, short branch pipe. This pipe should have an internal diameter no less than that of the gauge tube itself. Long, narrow or angled connections can cause a significant measurement error. Note that the indicated pressure may be higher or lower than the actual pressure. • Connect the gauge head as close as possible to the point where you want to measure the system pressure. • Orient the gauge head so that it is vertical, with the connection to the vacuum system at its base. This prevents debris falling into the gauge. 10-3 10-2 10-1 MEDIUM VACUUM 1 10 102 LOW VACUUM PAGE 222 ACTIVE STRAIN GAUGE CG16K PIRANI 501 & PRE10K ACTIVE THERMOCOUPLE GAUGE ACTIVE PIRANI CAPACITANCE MANOMETER ACTIVE INVERTED MAGNETRON WIDE RANGE GAUGE ACTIVE ION GAUGE CONTROLLER shop online: www.bocedwards.com 103 torr The Active gauge concept Barocel capacitance manometers • • • • • Operate from standard power supplies for simple installation Gauge type identification signal and common 0-10 V DC output Cable lengths of up to 100 m for remote operation Range of microprocessor based Active Gauge Controllers The Active gauge range with Active Gauge Controller give continuous measurement from 2000 mbar to 10-11 mbar • Low cost analog and digital displays and controllers available BOC Edwards Active vacuum gauges and controllers are a new generation of instruments that give unrivalled performance, flexibility and ease of use. Traditionally, vacuum gauges consist of a sensing element and a separate display/controller. With BOC Edwards' Active gauges, the functions that are specific to the gauge type (such as signal conditioning and specialized power supplies) have been moved from the dedicated controller and incorporated in the head itself. Now the gauge head can be used as a standalone transducer: it requires only a simple power supply and it provides a 2 to 10 V output. Alternatively, you can connect the gauges to a BOC Edwards display or universal controller: these will accept all gauge types in any combination for the most flexible solution. The Active gauge range Active Pirani Gauge A range of Pirani gauges measuring from atmosphere to 10-4 mbar, with integral set-point for OEM use. Active Ion Gauge A new range of small self-contained active ion gauges with a measuring range from 5 x 10-2 to 5 x 10-10 torr. The gauges incorporate degas, automatic emission current switching, automatic filament protection, a push button adjustable set point and status indicating LED. Active Inverted Magnetron Operating through the range 10-2 mbar to 10-9 mbar, with integral set-point for OEM use. A low external magnetic active field version is available. Wide Range Gauge A range of gauges measuring from atmosphere to 10-9 mbar with a linear output and integral set-point for OEM use. A low external magnetic field version is available. Active Thermocouple Gauge A range of gauges measuring from atmosphere to 10-3 mbar, with integral setpoint for OEM use and LED indication of vacuum status. Active Strain Gauge A range of strain gauges measuring from 2000 mbar to 1 mbar. This type of gauge is extremely rugged and offers accurate, gas independent measurement. Active Ion Gauge Controller The Active Ion Gauge Controller can operate one or two ion gauge tubes, as well as an Active low vacuum interlocking gauge. It has a measurement range of 5 × 10-3 to 2 × 10-11 mbar, with 3 levels of emission current and electron bombardment type degas. The Barocel 655, 658 and 659 capacitance manometers incorporate a hermetically sealed and heated enclosure containing the pressure sensing element and critical electronic circuitry. This means that changes in ambient temperature, humidity and atmospheric pressure have minimal effect on the reading giving excellent long term zero repeatability and stability. The three models offer a choice of 45, 100 or 123 °C temperature regulation. • Full scale ranges from 0.05 torr to 1000 mbar • Temperature controlled Active controllers and displays The BOC Edwards Active range of gauges can operate as stand-alone pressure transducers requiring only a simple power supply and providing a 2 to 10 V analog output. TIC Instrument Controller A compact instrument controller with a large clear graphical display, an intuitive user interface and serial communications providing full remote control and data logging functions for one or more TIC systems via a new WindowsTM based PC program. The controller supports automatically recognizes up to three gauges from the BOC Edwards range (excluding IGC and Barocels), with coverage from 2000 to 6.6 x 10-10 mbar Active Gauge Controller The Active Gauge Controller (AGC) is a universal, intelligent vacuum controller capable of operating up to 6 Active gauges in any combination. This gives vacuum measuring capability from 2000 mbar to 2 × 10-11 mbar. The standard AGC is supplied with 6 independent setpoint outputs which can be controlled by any of the gauges. Options include RS232 connection for full remote control and single or triple gauge display. Active Gauge Display The Active Gauge Display (AGD) is a low cost controller capable of operating two Active gauge heads (of the same type) from the following: Pirani, inverted magnetron and thermocouple. The AGD has a clear, easy-to-read analog display and is available with two optional 3A change-over relays for process control. Active Digital Display The Active Digital Display (ADD) offers control of a single Active strain gauge or Barocel capacitance manometer. The ADD has a clear, four-digit display with selectable pressure units. Like the Active Gauge Display, the ADD has two optional 3A change-over relays for process control. Other instruments In addition to the range of Active gauges, BOC Edwards offers a variety of more traditional vacuum measurement and control products. Our simple dial gauges provide rugged, local indication of pressures from atmosphere to 1 mbar and are ideal for vacuum chambers in an industrial environment. Vacuum switches, with high current ratings, give a simple method of directly controlling loads without the need for additional relays or power supplies. The Pirani 501 display with PRE10K gauge head offers a simple, low cost solution to measurement in the range 10 to 10-3 mbar. It is ideal for benchtop use in a laboratory, or for fitting into an industrial control panel. The range of Vacustat McLeod gauges offers traditional absolute vacuum measurement for laboratory or light industrial applications. shop online: www.bocedwards.com MEASUREMENT AND CONTROL The Barocel manometers provide high accuracy, high stability, gas independent pressure measurement making them ideal for a wide range of industrial process, research and calibration applications. Their Iconel/Monel construction means that they can also be used with corrosive and radioactive gases. • Accuracy 0.15% of reading • True total pressure measurement, independent of gas species • Very high corrosion resistance • Fast response • Wide range, 4 decade range with single head • Excellent stability 7 PAGE 223 APG ACTIVE PIRANI GAUGE ATMOSPHERE TO 10 -4 mbar TECHNICAL DATA C = 0.55 (14) • Integral adjustable set point for process control • Medium and low pressure versions available • Choice of stainless steel or aluminum gauge tubes with a selection of vacuum fittings and filament material to suit your application • Low output impedance and integral Faraday shield gives high level of noise immunity and permits long cable runs (up to 100 m) • Electronics contained within the gauge head - allows stand-alone operation Internal volume Weight Aluminum Stainless steel Socket connector Vacuum fitting Standards Electronic design Electrical noise immunity Flame-retardant casing Atmosphere to 10-3 mbar Atmosphere to 10-4 mbar 6 bar absolute 20 to 36 V DC (max 1 V ripple) 1.5 W max 2 to 10 V DC Set vacuum and set atmosphere 5% to 95% full-scale voltage 7% full-scale voltage ±2% full-scale voltage 40 V DC, 100mA max 5 to 60 °C 0 to 70 °C Gold-coated tungsten Platinum/rhodium (90/10) Aluminum HETF, nickel, fluoroelastomer, PTFE, stainless steel 316 NW: 6cm3 15mm O.D.: 10cm3 120g 200g 8 way FCC68 compatible NW 16 or NW 25 or 15 mm O.D. tube EN 61010-1 EN 50081-1, EN 50082-1 UL94 V 7 Pressure range APG-M APG-L Maximum over pressure Power supply Power consumption Output signal Adjustments Set point Range of set point Fixed hysterisis Level setting resolution Rating Temperature range Operating Storage Materials exposed to vacuum Filament APG-M, APG-L APG-MP Other materials A PAGE 224 3.86 (98) ORDERING INFORMATION 1-800-848-9800 B PRODUCT DESCRIPTION A S 2.20 (56) NW16 NW25 15 mm OD 1.34 (34) A B 0.86 (22) 0.86 (22) 2.05 (52) 4.72 (120) 4.88 (124) 5.91 (150) C = Allowance for cable and connector 11 10 9 8 APG-L V 7 6 5 APG-M, APG-MP 4 3 2 1 -5 10 10 -4 10 -3 10 -2 10 -1 10 0 10 1 10 2 10 3 APG-M-NW16 AL APG-M-NW16 ST/ST APG-M-NW25 ST/ST APG-M 15 mm O.D. ST/ST APG-MP-NW16 ST/ST APG-MP-NW25 ST/ST APG-MP 15 mm O.D. ST/ST APG-L-NW16 AL APG-L-NW16 ST/ST APG-L-NW25 ST/ST APG-L 15 mm O.D. ST/ST The above gauges may be supplied with a calibration certificate. Active gauge cables FCC68 compatible connections at both ends 0.5 m 1m 3m 5m 10 m 15 m 25 m 50 m 100 m Non-standard lengths available on request torr shop online: www.bocedwards.com ORDERING NUMBER D021-71-000 D021-75-000 D021-72-000 D021-76-000 D021-85-000 D021-82-000 D021-86-000 D021-73-000 D021-77-000 D021-74-000 D021-78-000 Call for details D400-01-005 D400-01-010 D400-01-030 D400-01-050 D400-01-100 D400-01-150 D400-01-250 D400-01-500 D400-01-999 APGX ACTIVE LINEAR PIRANI GAUGE ATMOSPHERE TO 10 -4 mbar TECHNICAL DATA Pressure range APGX-M APGX-L Response time Maximum over pressure Power supply Power consumption APGX-M & APGX-MP • Integral electronics with 1 volt per decade linear output allows standalone operation and makes for easy integration into OEM control systems, with up to 100m cable runs. • New diagnostics facility enables gauge to report out of range, broken filament and calibration errors. • Two, easy to use, integral push-button adjustable set points, for process control and/or diagnostics reporting. • Innovative electronics design enables compliance with low emission and high immunity EMC standards. • Corrosion resistant versions available. • Medium and low pressure versions available. • Choice of stainless steel or aluminum gauge tubes with a selection of vacuum fittings and filament materials to suit your application. Stainless steel tube C = 0.55 (14) Filament APGX-L & APGX-M APGX-MP Internal volume Weight Aluminum tube Stainless steel tube External interface connectors Interface cables B 3.86 (98) Vacuum fitting Standards Electronic design Electrical noise immunity Flame-retardant casing Enclosure rating Pin allocation 1. Power supply positive 2. Power supply common 3. Gauge output 4. Gauge identification A 2.20 (56) NW16 NW25 15 mm OD Diagnostics Under range Over range Broken filament Calibration error Adjustments Set points (2 off) Maximum voltage Maximum current Temperature range Operating temperature Storage temperature Materials exposed to vacuum Aluminum tube 1.34 (34) A B 0.86 (22) 0.86 (22) 2.05 (52) 4.72 (120) 4.88 (124) 5.91 (150) C = Allowance for cable and connector 10 9 8 7 V 6 5 4 3 2 1 0 -4 10 APGX 10 -3 10 -2 10 -1 10 0 10 1 10 2 10 3 torr shop online: www.bocedwards.com 2.0 to 9.0 V DC over the range 1000 to 10-4 mbar 3.0 to 9.0 V DC over the range 1000 to 10-3 mbar 1.9 V 9.1 V 9.5 V 9.6 V Set atmosphere & set vacuum 2 open collector transistor 40 V DC 100 mA max 5 to 55° C 0 to 70° C Aluminum (HETF), Nickel, Fluoroelastomer, PTFE Stainless steel (316), Nickel, Fluoroelastomer, PTFE Gold coated tungsten Platinum/rhodium (90/10) 26 cm3 0.12 Kg 0.20 Kg 8 way FCC68 socket Use existing range of active gauge cables NW16, NW25 & 15 mm OD EN 61010-1 EN 50081-1, EN 50082-2 UL 94 IP 40 5. 6. 7. 8. Signal common Set-point 1 output Remote calibration input Set-point 2 output MEASUREMENT AND CONTROL Output signal APGX-L Atmosphere to 10-3 mbar Atmosphere to 10-4 mbar 100 msec in the range 1000 to 1 x 10-3 mbar 10 bar absolute (145 psi) 14.5 to 36 V DC 1.5 W max (M and MP version) 2.0 W max (L version) 7 PAGE 225 ORDERING INFORMATION 1-800-848-9800 PRODUCT DESCRIPTION 7 ORDERING NUMBER APGX-M-NW16 AL APGX-M-NW16 ST/ST APGX-M-NW25 ST/ST APGX-M 15 mm O.D. ST/ST APGX-MP-NW16 ST/ST APGX-MP-NW25 ST/ST APGX-MP 15 mm O.D. ST/ST APGX-L-NW16 AL APGX-L-NW16 ST/ST APGX-L-NW25 ST/ST APGX-L 15 mm O.D. ST/ST The above gauges may be supplied with a calibration certificate. Active gauge cables FCC68 compatible connections at both ends 0.5 m 1m 3m 5m 10 m 15 m 25 m 50 m 100 m Non-standard lengths and screened cables available on request Other accessories and supporting products Wire mesh filter replacement kit (5 off) NW10/16 sintered filter Surge protector D023-71-000 D023-75-000 D023-72-000 D023-76-000 D023-85-000 D023-82-000 D023-86-000 D023-73-000 D023-77-000 D023-74-000 D023-78-000 Call for details D400-01-005 D400-01-010 D400-01-030 D400-01-050 D400-01-100 D400-01-150 D400-01-250 D400-01-500 D400-01-999 D021-71-810 D021-10-760 D400-06-000 PAGE 226 shop online: www.bocedwards.com N EW S versions AIGX ACTIVE ION GAUGE 5 x 10 -2 torr to 5 x 10 -10 torr 6 115 70 70 106 MEASUREMENT AND CONTROL 85 98 94 107 D versions 125 70 70 96 A compact active ion gauge with dual yttria coated iridium filaments, a wide measuring range from 5 x 10-2 to 5 x 10-10 torr (6.6 x 10-2 to 6.6 x 10-10 mbar) and a 1 Volt/decade linear output. The new AIGX gauge from BOC Edwards incorporates all the benefits of the industry standard active gauging concept, with integral electronics and replaceable tube. The gauge has a degas facility and includes features to protect and extend the life of the filaments. 75 117 8.7 8 The AIGX benefits from extremely low emissions of charged particles, which makes it an excellent choice for processes where background noise is undesirable. 7 7 6 PAGE 227 5 mbar V Features & benefits 88 104 • Full 8-decade measurement capability, to 5 x 10-10 torr (6.6 x 10-10 mbar). • Two versions available, each with three vacuum coupling variants: - ‘D’ versions have a 9-pin ‘D’ connector and standard interface. - ‘S’ versions have enhanced functionality and are fully compatible with the range of BOC Edwards controllers. • Up to a thirty-fold reduction in charged particle process contamination compared to leading competitors. • Automatic filament protection against switching on at atmosphere and running or degassing at high pressure. • Gauge sensitivity remains constant over the whole measuring range, thus maintaining output accuracy at higher pressures. • Continuous pressure measurement output during degas. • Innovative design eliminates the effects of X-ray limits. • Bi-color LED gives local indication of gauge status. • Wide input voltage range. • Electronics very easily removable for bakeout at up to 200°C. • ‘S’ versions provided with seamless automatic emission current switching, for prolonged filament life. • ‘S’ versions provided with diagnostic outputs indicating ‘emission off’, ‘broken filament’ and ‘overpressure trip’ to help with troubleshooting. • ‘S’ versions provided with a push-button adjustable set point. 4 3 Pascal 2 1 0 -10 -9 -8 10 10 10 -7 10 10 -6 -5 -4 10 10 Pressure -3 10 -2 10 -1 10 10 0 10 1 TECHNICAL DATA Pressure range Power supply Power consumption Output signal Response time Tube details Accuracy* Repeatability Filaments Degas Emission current ‘S’ versions ‘D’ versions Maximum overpressure shop online: www.bocedwards.com 5 x 10-2 to 5 x 10-10 torr (6.6 x 10-2 to 6.6 x 10-10 mbar) +14.5 to +30.0 V dc Normal operation: 7W (Max), Degas: 14W (Max) Linear, 1 Volt / decade > 10-8 torr (1.33 x 10-8 mbar) ≈100ms < 10-8 torr (1.33 x 10-8 mbar) ≈1-2s Typically +/-15% of reading (better with optional calibration) +/-5% Manually selectable dual yttria coated iridium Three minute electron bombardment cycle 0.1mA & 1mA Automatically switches at 10-5 torr (1.33 x 10-5 mbar) to protect filaments at higher pressures Manual control 10 bar absolute NEW Materials exposed to vacuum Vacuum fittings Bakeout Diagnostics (error/status gauge output) Note: all errors require a manual off/on re-start Emission off (supply on, emission off) Emission error (e.g. selected filament broken) Overpressure trip (protection against turn-on at atmosphere) Diagnostics (error/status - LED) Supply connected, emission off Emission initiation Normal operation Degas Overpressure error Emission error Protection High pressure shutdown 7 PAGE 228 Tungsten, Tantalum Pt clad Mo, Yttria coated Iridium, St St 304L and UHV compatible glass/ceramic NW25, DN16CF & DN40CF (CF couplings rotatable) Max 200° C with electronics removed ‘S’ versions‘D’ versions 9.0 V 10.0 V 9.5 V10.0 V Pin allocation Gauge on/off control Supply common Signal output Supply positive Set point Degas status Degas on/off control Signal common ID resistor Emission current select Emission status ‘S’ versions‘D’ versions 7 1 2 2 3 3 1 4 8 - 5 6 6 5 7 4 - 8 - 9 * Accuracy is reduced at the lower limit of the measuring range † EN 61326 supersedes EN 50081-1 & EN 50082-2 9.7 V10.0 V ORDERING INFORMATION 1-800-848-9800 Amber Green / amber alternating flash Green Green flash Red Red flash In all cases, the gauge will shut down at > 5 x 10-2 torr (6.6 x 10-2 mbar), requiring an off/on cycle to re-start Degas In degas, if the pressure rises above 1 x 10-4 torr (1.33 x 10-4 mbar), degas will be turned off, but the degas timer will continue to run. Degas will automatically resume when the pressure falls below 3 x 10-5 torr (4 x 10-5 mbar) if the degas timer has not timed-out. Adjustments No user calibration adjustments required Set point (open collector transistor) 1 on ‘S’ versions only Maximum voltage 30 V dc Maximum current 100 mA max Temperature range Operating temperature 0° to +40° C Storage temperature -30° to +70° C External interface connectors ‘S’ versions 8-way FCC68/RJ45 socket ‘D’ versions 9-way ‘D’ type plug (pins) Interface cables ‘S’ versions Using a BOC Edwards instrument controller or 24 V supply, a maximum cable run of 30m may be achieved using the cables specified. (Lower supply voltages will reduce cable lengths) ‘D’ versions Maximum cable lengths for given conductor cross sections and supply voltages are shown in the table below. Conductor24 V Supply15 V Supply section 0.75 mm2100 m10 m 0.50 mm275 m6 m 0.34 mm250 m4.5 m 0.22 mm230 m3 m Weight NW25DN16CFDN40CF ‘S’ & ‘D’ versions 260g300g 510g Standards Electronic design EN 61010-1 Electromagnetic compatibility EN 61326 Industrial Location, Class B Emissions † EN 61000-4-6 (conducted RF at 10 V) Enclosure rating IP30 Compatibility The AIGX is supported by all new AGC’s with serial numbers greater than 006737476 (non-RS 232 versions) and 006741851 (RS 232 versions). Earlier controllers will require a software upgrade. PRODUCT DESCRIPTION Gauges AIGX-S-NW25 AIGX-S-DN16CF AIGX-S-DN40CF AIGX-D-NW25 AIGX-D-DN16CF AIGX-D-DN40CF ACCESSORIES & SPARES ORDERING NUMBER D048-50-000 D048-51-000 D048-52-000 D048-60-000 D048-61-000 D048-62-000 ORDERING NUMBER Electronics modules AIGX-S D048-50-800 AIGX-D D048-60-800 Spare fuses AIGX spare fuse kit (Pk 5) D048-50-805 Replacement tubes NW25 D048-50-801 DN16CF D048-51-801 DN40CF D048-52-801 Cables ‘ S’ versions (include FCC68 compatible connections at both ends) 0.5m active gauge cable D400-01-005 1.0m active gauge cable D400-01-010 3.0m active gauge cable D400-01-030 5m active gauge cable D400-01-050 10m active gauge cable D400-01-100 15m active gauge cable (24 AWG) D400-05-150 30m active gauge cable (24 AWG) D400-05-300 ‘ D’ versions Supplied by customer Non standard lengths and screened cables available on request Other accessories and supporting products NW25 trapped ‘ O’ ring carrier (Viton) C105-14-490 DN16CF annealed copper gasket (Pk 5) C100-01-270 DN16CF M4 nut, bolt and washer kit (Pk 25) C100-01-630 DN40CF annealed copper gasket (Pk 5) C100-05-270 DN40CF M6 nut, bolt and washer kit (Pk 25) C100-05-630 Surge protector D400-06-000 shop online: www.bocedwards.com AIM ACTIVE INVERTED MAGNETRON 10 -2 TO 10 -9 mbar TECHNICAL DATA 0.59 (15) Ø2.84 (72) 4.57 (116) 0.79 (20) 1.61 (41) A = Allowance for cable and connector 11 10 9 ORDERING INFORMATION 1-800-848-9800 PRODUCT DESCRIPTION AIM-S-NW25 AIM-S-NW35CF AIM-X-NW25 AIM-X-NW35CF The above gauges may be supplied with a calibration certificate. Non-standard lengths available on request AIM-S 8 AIM-X V 7 6 5 4 3 2 10 -8 10 -7 10 -6 10 -5 10 -4 EN 61010-1 EN 50081-1, EN 50082-1 UL94 Replacement electronics and magnet housing AIM-S AIM-X Replacement body tube assembly NW25 Replacement body tube assembly NW35CF Body tube service kit for NW25 Body tube service kit for NW35CF Active gauge cables FCC68 compatible connections at both ends 0.5 m 1m 3m 5m 10 m 15 m 25 m 50 m 100 m Ø3.11 (79) -9 5 - 60 °C 0 - 70 °C 300 °C (electronics removed) Stainless steel 304, 316 and 347 Fluoroelastomer, glass Copper, ceramic 23 cm3 700 g 8 way FCC68 compatible NW25 or NW35CF ACCESSORIES & SPARES A = 0.43 (11) 10 10-2 to 10-9 mbar 6 bar absolute 13.5 to 36 V DC (max 1 V ripple) 2 W maximum 2 to 10 V DC 10 -3 10 -2 10 -1 torr shop online: www.bocedwards.com ORDERING NUMBER D146-41-000 D146-61-000 D146-42-000 D146-62-000 Call for details MEASUREMENT AND CONTROL • Integral, adjustable set-point for process control • Extended range AIM-X with linear output, measuring down to 10-9 mbar • AIM-S compatible with previous gauges • Improved electronics offers reduced ion current at higher pressure and so longer intervals between cleaning • Unique striker aids rapid striking even at high vacuum or in contaminating conditions • Interchangeable body tube - rapid replacement without pre-calibration • Electrode service kit allows user cleaning and maintenance • Standard analog 2 to 10 V DC output, plus gauge identifier signal Pressure range Maximum over pressure Power supply Power consumption Output signal Temperature range Operating Storage Baking (NW35CF) Materials exposed to vacuum NW25 version NW35CF version Internal volume Weight Socket connector Vacuum fitting Standards Electronic design Electrical noise immunity Flame-retardant casing ORDERING NUMBER D146-41-800 D146-42-800 D145-45-801 D146-61-801 D145-45-802 D146-61-802 D400-01-005 D400-01-010 D400-01-030 D400-01-050 D400-01-100 D400-01-150 D400-01-250 D400-01-500 D400-01-999 7 PAGE 229 10 WRG ACTIVE WIDE RANGE GAUGE ATMOSPHERE TO 10 -9 mbar V 8 6 4 WRG 2 10 -9 10 -8 10 -7 10 -6 10 -5 10 -4 10 -3 10 -2 10 -1 10 0 10 1 10 2 10 3 torr TECHNICAL DATA 5 to 60 ºC 0 to 70 ºC Stainless steel (AISI 304, 316, 321, 347), fluoroelastomer, soda lime glass, tungsten, trace of nickel and nickel iron 26 cm3 800 g 8 way FCC68 socket 9 way D-type socket NW25 or NW35CF EN 61010-1 EN 50081-1, EN 50082-2 UL 94 IP 40 IP 44 PRODUCT DESCRIPTION (02) 4.57 (116) 3.54 (90) Ø2.76 (70) Internal volume Weight (NW25 version) Socket connector S version D version Vacuum flange Standards Electronic design Electrical noise immunity Flame-retardant casing Enclosure rating S version D version Atmosphere to 10-9 mbar 6 bar (87 psia) +14.5 to +36 V DC 2W 1.8 to 10.2 V DC Set trip and set atmosphere 1 open collector transistor 40 V DC 100 mA ORDERING INFORMATION 1-800-848-9800 0.91 (23) Ø2.56 (65) 4.17 (106) 0.24 (6) 0.35 (9) The WRG meets EMC requirements for both light industrial emissions and heavy industrial immunity. A D-type connector version with a higher IP rating and cable strain relief is also available. 4.17 (106) PAGE 230 For ease of operation and more accurate pressure reading, the vacuum setting of the Pirani gauge is set automatically, while a single pushbutton sets atmospheric pressure. The WRG has an easy-to-program set-point which operates over the entire measurement range. 0.55 (14) 7 The Active WRG is a combined Pirani and magnetron gauge with a measurement range from atmosphere to 10-9 mbar. The intergral microprocessor signal processing gives seamless transition between Pirani and magnetron outputs and provides a linear output (on linear log scale). The magnetron uses an advanced technique for highly reliable striking, even at high vacuum or in relatively contaminated conditions. To optimize the lifetime of the gauge, the magnetron HT voltage is reduced after ignition and the magnetron operates with a low discharge current. Pressure range Maximum overpressure Power supply Maximum power consumption Output signal Adjustments Set point Maximum voltage Maximum current Temperature range Operation Storage Materials exposed to vacuum WRG-S-NW25 WRG-S-NW40CF WRG-D-NW25 WRG-SL-NW25 The above gauges may be supplied with a calibration certificate. SPARES Electronics and magnet housing WRG-S-NW25 WRG-D-NW25 Replacement body tube assembly NW25 NW40CF Electrode assembly kit Pirani tube replacement kit Full body tube service kit shop online: www.bocedwards.com ORDERING NUMBER D147-01-000 D147-03-000 D147-02-000 D147-11-000 Call for details ORDERING INFORMATION D147-01-800 D147-02-800 D147-01-801 D147-03-801 D147-01-802 D147-01-803 D147-01-804 ATC ACTIVE THERMOCOUPLE GAUGE 65 TO 1.3 × 10 -3 mbar TECHNICAL DATA ATC-E electronics module Power supply Power consumption Output signal Adjustments Integral adjustable set point with LED indication Choice of medium and low pressure gauge tubes Accepts thermocouple tubes from other manufacturers Runs from standard power supply 13.5 to 36 V DC 4.53 (115) Ø1.26 (32) Ø2.28 (58) 2.20 (56) 2% to 90% full scale voltage 12% full scale voltage ±2% full scale voltage 40 V DC, 100 mA max 5 - 60 °C 0 - 70 °C 110 g 8 way FCC68 compatible EN 61010-1 EN 50081-1, EN 50082-1 UL94 65 to 65 × 10–2 mbar 1.3 to 1.3 × 10–3 mbar 10 bar absolute 3 bar absolute 55 g 1 cm3 8 cm3 !/8 inch NPT ORDERING INFORMATION 1-800-848-9800 PRODUCT DESCRIPTION 0.47 10 ACCESSORIES & SPARES (12) 0.63 (16) A = 0.79 (20) 11 ATC-ED ATC-EM ATC-E electronics module ATC-D-!/8 inch NPT gauge tube ATC-M-!/8 inch NPT gauge tube The above gauges may be supplied with a calibration certificate. A = Allowance for cable and connector !/8 inch NPT to NW16 adaptor Active gauge cables FCC68 compatible connections at both ends 0.5 m 1m 3m 5m 10 m 15 m 25 m 50 m 100 m 9 8 7 V 6 ATC-M 5 ATC-D 4 3 2 1 10 -5 10 -4 10 -3 10 -2 10 -1 10 0 10 1 10 2 10 3 Non-standard lengths available on request torr shop online: www.bocedwards.com ORDERING NUMBER D335-14-000 D355-15-000 D351-08-000 D355-12-000 D355-13-000 Call for details ORDERING NUMBER D355-12-050 D400-01-005 D400-01-010 D400-01-030 D400-01-050 D400-01-100 D400-01-150 D400-01-250 D400-01-500 D400-01-999 MEASUREMENT AND CONTROL • • • • Set point Range of set point Fixed hysteresis Level setting resolution Rating Temperature range Operating Storage Weight Socket connector Standards Overall design Electrical noise immunity Flame-retardant casing ATC-D, ATC-M gauge tubes Pressure range ATC-D ATC-M Maximum over pressure ATC-D ATC-M Weight Internal volume ATC-D ATC-M Vacuum fitting 13.5 to 36 V DC (maximum 1 V ripple) 540 mW max 2 to 10 V DC Adjust set point visually with potentiometer 7 PAGE 231 ASG ACTIVE STRAIN GAUGE 2000 TO 1 mbar TECHNICAL DATA Full scale pressure ranges Maximum overpressure Burst pressure Accuracy Stability Temperature coefficient Power supply Power consumption Output signal Adjustments Temperature range Operating Storage Materials exposed to vacuum Weight Electrical connector Head only With adaptor cable Vacuum fitting Standards Electronic design Electrical noise immunity Note: ASG adaptor cable supplied separately. • • • • • • 1000 or 2000 mbar full scale versions available Accuracy ±0.2% full scale with good long term stability Measures true pressure - non-gas dependent Rugged, corrosion resistant High burst pressure Fast response 3.94 (100) 3.03 (77) 0.49 (12.5) Non-standard lengths available on request NW16 1 V ASG 1000 mbar 0.1 ASG 2000 mbar 0.01 0.001 10 100 1000 ORDERING NUMBER D357-26-000 D357-28-000 D357-25-000 D357-27-000 D400-03-060 ORDERING NUMBER Active gauge cables (including FCC68 compatible connections at both ends) 0.5 m D400-01-005 1m D400-01-010 3m D400-01-030 5m D400-01-050 10 m D400-01-100 15 m D400-01-150 25 m D400-01-250 50 m D400-01-500 100 m D400-01-999 10 1 EN 61010 EN 50081-1, EN 50082-1 ASG NW16 1000 mbar ASG NW16 2000 mbar ASG !/8 inch NPT 1000 mbar ASG !/8 inch NPT 2000 mbar ASG adaptor cable (0.5 m) miniature DIN to female FCC68 ACCESSORIES & SPARES 0.1 Miniature DIN 8 way FCC68 compatible !/8 inch NPT male or NW16 PRODUCT DESCRIPTION PAGE 232 1.34 (34) 10 - 50 °C -40 to 125 °C Stainless steel 316 150 g ORDERING INFORMATION 1-800-848-9800 1.02 (26) 7 1000 or 2000 mbar 2 × full scale 180 bar ±0.2% full scale 0.2% full scale 0.05% full scale per °C 13.5 to 36 V DC 0.4 W 0 to 10 V DC Set full scale and set zero 10000 torr shop online: www.bocedwards.com BAROCEL 600 CAPACITANCE MANOMETER Output signal, linear with pressure 0-10 V DC Electrical supply Supply ±15 V DC ±5% Regulation ±1% at 30 mA RFI suppression Standard on all models Weight 0.7 kg 1 Ranges to 10,000 torr also available. 2 Barocel 600 with accuracy 0.5% of reading also available. 0.40 (10.16) Ø0.50 (12.70) 2.20 (56) ORDERING INFORMATION 1-800-848-9800 : 0 D The Barocel 600 absolute pressure transducer is an advanced design capacitance manometer which uses patented technology to improve zero stability with temperature changes and pressure overloads. The welded integral vacuum reference contains a gettering material to ensure longterm stability. Connector Type Terminal Block 15 pin sub D-connector 0 2 3 The Barocel 600 is the ideal replacement for McLeod, Pirani, or thermocouple gauge. The pressure measurement is gas independent because pressure is sensed by measurement of the displacement of a thin metal membrane caused by pressure changes. Barocel type Absolute pressure With removable filter and flush option Gauge pressure W6 - 1 - 1 7 PAGE 233 Dirty or corrosive gases, and even radioactive gases such as tritium, may be measured without affecting accuracy because the electrically active portion of the sensor is contained in the sealed vacuum reference. Pressure range* 10 torr 10 mbar 100 torr 100 mbar 1000 torr 1000 mbar The transducer’s analog output is directly proportional to pressure and can be displayed with a BOC Edwards display or controller, or recorded by data acquisition system. • Wide range - 4 decades • High accuracy - 0.15% of reading • High resolution - 0.01% full scale • True total pressure, reading independent of gas composition • High level DC output - 0-10 volts, linear with pressure • Superior zero stability - patented design eliminates errors due to temperature and overpressure effects. Repeats within 0.01% full scale after exposure to 2.4 bar. • Versatile - compatible with a variety of displays and controllers • Corrosion resistant - only Inconel and Monel exposed to the process. 21 22 31 32 41 42 Pressure fitting !/2 inch od tube 8VCR 8VCO NW16 1 6 7 8 * Other ranges are available TECHNICAL DATA 0-10, 0-100, 0-1000 mbar 0-10, 0-100, 0-1000 torr Accuracy2 0.15% of reading Resolution < 1 in 10000 Operating temperature 0 - 65 °C Temperature effect on zero < 0.005% full scale/°C Temperature effect on sensitivity < 0.02% reading/°C Overpressure without damage 1.25 x full scale range or 2.4 bar (whichever is greater) Overpressure effect Repeats within 0.01% full scale after 2.4 bar exposure Material exposed to process Inconel and Monel Internal volume 8.3 cm3 (includes ½ inch Ø tube) Time constant 8 ms MEASUREMENT AND CONTROL Ø3.00 (76.20) 2.60 (66.27) ACCESSORIES Pressure ranges available1 Barocel 600 cables Adaptor, terminal to Active Controller/ Display Terminal to Model 1575 Pressure Display D-connector to Model 1575 Pressure Display Terminal to Model 1800 Pressure Controller D-connector to Model 1800 Pressure Controller Terminal to Model 1501C Pressure Controller D-connector to Model 1501C Pressure Controller l shop online: www.bocedwards.com ORDERING INFORMATION D400-03-010 W189-97-005 W189-92-005 W189-97-005 W189-92-005 W189-97-005 W189-92-005 2.20 (55.88) 2.61 (66.30) Ø0.50 (12.70) Ø3.00 (76.20) 3.00 (76.20) 4.00 (101.60) 5.12 (130.05) 0.44 (11.18) 24.00 (609.60) BAROCEL 622 BAKEABLE CAPACITANCE MANOMETER 1.69 (42.93) 4 x Ø0.187 (4.75) 6.00 (152.40) ORDERING INFORMATION 1-800-848-9800 : The Barocel 622 is an adaptation of the proven Barocel 600, with the same high performance features. In the Barocel 622, the signal conditioning electronic components are separated from the sensor which allows it to be operated up to 200° C. Typical applications are processes involving condensable gases, some nuclear processes, and those requiring high temperature sterilization. A temperature sensor inside the 622 transducer head provides zero sensitivity compensation to maintain accuracy over a wide temperature range. A cable connector on the electronics package helps to simplify installation. An integral vacuum reference of all-welded construction contains gettering material to ensure long term stability and eliminates the need for reference vacuum pumps. 7 PAGE 234 21 31 41 22 32 42 W 6 2 2 - The Barocel 622 is the ideal replacement for McLeod, Pirani, or thermocouple gauges. The pressure measurement is gas independent because pressure is sensed by measurement of the displacement of a thin metal membrane caused by pressure changes. The transducer’s analog output is directly proportional to pressure and can be displayed with a BOC Edwards display or controller, or recorded by data acquisition system. TECHNICAL DATA Pressure ranges1 Accuracy2 Resolution Operating temperature Sensor Signal conditioner Temperature effect on zero Temperature effect on sensitivity Overpressure without damage Overpressure effect Material exposed to process Internal volume Time constant Output signal, linear Electrical supply Supply Regulation RFI suppression Weight 0-10, 0-100, 0-1000 torr 0-10, 0-100, 0-1000 mbar 0.15% of reading < 1 in 10000 - 1 3 6 7 8 Dirty or corrosive gases, and even radioactive gases such as tritium, may be measured without affecting accuracy because the electrically active portion of the sensor is contained in the sealed vacuum reference. Pressure range 10 torr 100 torr 1000 torr 10 mbar 100 mbar 1000 mbar Barocel 622 to AGC adaptor cable Barocel 622 to 1575 cable Barocel 622 to 1501 cable 0 to 200 °C 0 to 65 °C < 0.005% full scale/°C < 0.02% reading/°C 1.25 x full scale range or 2.4 bar (whichever is greater) Repeats within 0.01% full scale after 2.4 bar exposure Inconel and Monel 8.3 cm3 (includes ½ inch Ø tube) 8 ms 0-10 V DC ±15 V DC ±5% to ±1% at 30 mA Standard on all models 1.3 kg 1 Ranges to 10,000 torr also available. 2 Barocel 600 with accuracy 0.5% of reading also available. shop online: www.bocedwards.com 1 Pressure fitting !/2 inch od tube Mini Conflat 8VCR 8VCO NW16 The above gauges may be supplied with a calibration certificate. ACCESSORIES 1 Call for details ORDERING INFORMATION D400-03-030 W189-99-005 W189-99-005 TEMPERATURE CONTROLLED BAROCEL 655, 658 AND 659 658 659 Output signal, linear Output impedance Output noise (0-2 kHz) Weight 500 mA 700 mA 0 - 10 V DC < 0.1 Ω < 0.002% of full scale rms 0.55 kg Ø0.50 1.33 (33.78) • The Barocel 655 (45 °C) is for most general vacuum and semiconductor processes. • The Barocel 658 (100 °C) is suitable for processes that have condensable by-products such as in CVD and some etch processes. • The Barocel 659 (123 °C) is ideal for high temperature semiconductor processes. 0.21 (5.33) 3.65 (92.71) ORDERING INFORMATION 1-800-848-9800 : The Barocel 655, 658 and 659 transducers have a number of proprietary design features to enhance reliability and performance in today’s demanding applications. The sensing cell has a unique diaphragm design and stitch welding process, and a new sensing cavity geometry which provides enhanced resistance to particulate contamination. Performance is further improved by isolating the sensor in a patented, temperature controlled, hermetically sealed enclosure which neutralizes the effects of barometric pressure, humidity and ambient temperature changes. The result is a transducer that offers long term stability and that is an order of magnitude better than some previously available. 5 8 9 Barocel type Barocel 655 Barocel 658 Barocel 659 Pressure range 05 50 mtorr (655 only) 16 100 mtorr (655 & 658 only) 11 1 torr 12 1 mbar 14 2 torr 21 10 torr 22 10 mbar 31 100 torr 32 100 mbar 41 1000 torr 42 1000 mbar The 655, 658 and 659 manometers are ideal for use in vacuum systems where zero stability and resistance to process contamination are critical to successful operation. Only Inconel and Monel surfaces are exposed to the process gases and all welded joints are designed to permit rapid degassing. There is no loss of accuracy due to changes in gas composition or the presence of electrically conductive gases. TECHNICAL DATA Pressure ranges available1 0-50, 0-100 mtorr 0-1, 0-2, 0-5, 0-10, 0-100 torr and mbar 0.15% of reading + 0.005% of full scale ± 0.01% of full scale 0.005% of full scale 2 hours Accuracy Repeatability Resolution Warm-up time Control temperature 655 45 °C 658 100 °C 659 123 °C Ambient operating temperature 655 15 - 40 °C 658, 659 15 - 70 °C Storage temperature -45 - 85 °C Temperature effect on zero < 0.005% of full scale/°C Ambient condition effect on sensitivity Temperature < 0.02% of reading/°C Barometric pressure < 0.005% of full scale/760 torr Relative humidity (0 - 95% RH) <0.005% of FS Overpressure limit 3.1 bar Internal volume 8.33 cm3 (includes ½ inch od tube) Materials exposed to process Inconel and Monel Electrical supply Supply ± 15 VDC ± 5% Regulation 1% Maximum current 655 250 mA 1.97 (50.03) W 6 5 - - 1 1 3 6 7 8 ACCESSORIES Barocel 655, 658 and 659 cables 655 to AGC adaptor 655 to 1800 cable 655 to 1575 cable 655 to 652 cable shop online: www.bocedwards.com 7 PAGE 235 1 Pressure fitting !/2 inch od tube Mini Conflat 8VCR 8VCO NW16 The above gauges may be supplied with a calibration certificate. MEASUREMENT AND CONTROL Ø3.00 (76.20) (12.70) 1 Other ranges are available Call for details ORDERING INFORMATION D400-03-050 W189-92-005 W189-92-005 W189-92-005 BAROCEL 590 CAPACITANCE MANOMETER A 1.44 (36.58) 2.87 (73.02) 1 6.00 (152.40) 0.31 (7.94) 1.68 (42.56) 4.13 (104.78) 5.28 (134.14) 0.36 (9.13) ORDERING INFORMATION 1-800-848-9800 : 0 1 The Barocel 590 capacitance manometer has integral signal conditioning to provide a 0 ± 10 V DC output signal compatible with digital voltmeters and data acquisition systems. The all-welded construction makes it suitable for use in high vacuum systems. It may be supplied with two pressure ports for measuring gauge or differential pressure or with a single pressure port and internal vacuum reference for measuring absolute pressure. The high resolution and stability Barocel 590 is suitable for applications that require measurement of a wide range of pressures with a single transducer. Edwards offers a wide selection of displays, controllers, and multi-channel switching units for use with the Barocel 590. 7 PAGE 236 Measurement mode Differential Absolute Pressure range 11 1 torr* 21 10 torr 31 100 torr 41 1000 torr 12 1 mbar* 22 10 mbar 32 100 mbar 42 1000 mbar 50 10 inches H2O 60 100 inches H2O 70 10 inches Hg 80 100 inches Hg TECHNICAL DATA Pressure ranges available1 Absolute and differential Absolute only Accuracy Standard Optional Repeatability Resolution Approximate line pressure range (0-10,000 torr) Operating temperature Compensated temperature range Temperature effect on zero2 Standard Optional Temperature effect on sensitivity3 Standard Optional Overpressure without damage Material exposed to pressure media Internal volume (each side)3 Time constant Output signal (floating) Signal Impedance Electrical supply RFI suppression Weight 1, 10, 1,000 and 10,000 torr and mbar 1, 10, 100 and 1,000 in. H2O, 10 and 100 inches. mercury W** WH*** 250 psi 5°C - 70°C 10°C - 50°C 2 3 4 8 1 3 Temperature coeffecients Zero 0.003 % of full scale/°C, sensitivity 0.03 % 1 of reading/°C Zero 0.001 % of full scale/°C, sensitivity 0.005 % 2 of reading/°C All 1 torr and 1 mbar units 9 0.003% full scale/°C 0.001% full scale/°C 0 to ±10 V DC into 5 KW load <25 Ω 18-35 V DC or 18-25 V AC rms at 75mA., 50-60 Hz Standard on all models 1 kg 9 Pressure fittings !/8-27 NPT Mini-Conflat Cajon 4VCR NW16 Accuracy 0.15% 0.05% 0.15% of reading 0.05% of reading 0.01% of reading +0.005% of maximum applied pressure 1 in 105 0.03% full scale/°C 0.005% full scale/°C 1.5 x full scale + 1000 torr Inconel, palladium silver, Monel, ceramic, 316 SS 5 cm3 8 ms 5 * Supplied fitted with thermal base and cover ** Standard *** With thermal base and cover ACCESSORIES 525B thermal base Thermal base mounting Thermal cover Barocel 590 cables 590 to 1575 cable, 15 590 to AGC adaptor 1 Other ranges and engineering units are available 2 1 torr and 1 mbar units are fitted with thermal base and cover to optimize performance. 3 Increases by approximately 0.16 cm3 at full pressure shop online: www.bocedwards.com ORDERING INFORMATION W579-91-301 W599-99-991 W599-93-000 W189-96-005 D400-03-020 PCSP interface EN61010 EN 50081-1, EN 50082-1 • Accepts industry standard ion gauge tubes • Standard analog output 0 to 10 V DC plus gauge identifier for easy interface with AGC, computer or PLC • Vacuum interlock using an auxiliary low vacuum Active gauge The BOC Edwards Active Ion Gauge Controller (IGC) provides all the power, control and signal conditioning necessary to sequentially run one or two ion gauge tubes. It can be directly connected to any of the gauge head sockets on an Active Gauge Controller using a standard Active gauge head cable. Full control of all the ion gauge functions comprising gauge tube sensitivity, head and filament selection, emission current (0.1, 1.0, 10.0 mA), filament turn on and degas control is available through the AGC. Filament protection is integral to the ion gauge controller and additional protection can be provided through the AGC using a low vacuum gauge like an Active Pirani gauge. For users who do not require a local display, a PCSP (parallel command status port) alternative is available. This allows all the functions normally accessed by the AGC to be available through a parallel connection. Switching is carried out by simple switch closure and the signal is available as a 0 to 10 V DC output. Additional filament interlocking can be achieved by direct connection of a low vacuum Active gauge (APG or ATC) to the IGC using its integral set point. Note that the PCSP interface is an alternative to connecting the IGC to an AGC. You must therefore select a BOC Edwards IGC if you want to connect the IGC to an AGC. Select a PCSP IGC if you want to use the parallel connection. TECHNICAL DATA Pressure range Electrical supply Voltage Frequency Power consumption Output signal Emission current Filament supply Voltage V DC max Current A max Power W max Degas power (EBEAM) Auxiliary gauge supply Current Sensitivity adjustment Temperature range Operating Storage Relative humidity Enclosure rating Weight -3 5 × 10 to 2 × 10 -11 mbar 90 to 265 V AC (auto-adjusting) 45 to 70 Hz 150 W 1 to 10 V DC logarithmic 0.1, 1.0 or 10 mA (selectable) 8 5 40 60 W max (adjustable) 24V DC nominal 100 mA max. 6 mbar-1 to 26 mbar-1 8.78 (223) 0.13 (3.2) 5.79 (147) 10.75 (273) 2.99 (76) 3.46 (88) ORDERING INFORMATION 1-800-848-9800 PRODUCT DESCRIPTION IGC EBEAM 2 head PCSP IGC EBEAM 2 head BOC Edwards 19 inch rack mounting kit Glass encapsulated ion gauge tubes (X-ray limit 3 ×10 -10 mbar) ¾ inch port, Kovar dual tungsten filaments ¾ inch port, Kovar thoriated iridium filament 1 inch port, Kovar dual tungsten filaments 1 inch port, Kovar thoriated iridium filament 2¾ inch ConFlat ® , Kovar ¾ inch port dual tungsten filaments 2¾ inch ConFlat ® , Kovar ¾ inch port thoriated iridum filament Ion gauge cables for above tubes 1.8 m 3m Nude ion gauge tubes (X-ray limit 4 ×10 -10 mbar) 2¾ inch ConFlat ®, nude, dual tungsten filaments 2¾ inch ConFlat ®, nude thoriated iridium filament Ion gauge cables for above tubes 1.8 m 3m Nude ion gauge tubes (X-ray limit 2 ×10 -11 mbar) 2¾ inch ConFlat ®, dual tungsten filaments 2¾ inch ConFlat ®, dual thoriated iridum filament Ion gauge cables for above tubes (bakeable to 250°C) 2m 3m The above gauges may be supplied with a calibration certificate. Electrical supply cable USA plug 2m 10 - 50 °C -20 to 70 °C 10% to 90% IP20 (BS) IP205 (IEC) 1.8 kg shop online: www.bocedwards.com ORDERING NUMBER D048-46-000 D048-47-000 D048-30-300 D029-98-010 D029-98-040 D029-98-070 D029-98-110 D029-98-140 D029-98-170 D048-31-060 D048-31-100 D029-98-380 D029-98-390 D048-46-060 D048-46-100 D029-99-380 D029-99-390 D048-47-060 D048-47-100 Call for details D400-13-120 MEASUREMENT AND CONTROL 8.15 (207) PCSP interface socket BOC Edwards interface socket Auxiliary gauge socket Ion gauge socket Electrical supply socket Standards Overall design Electromagnetic compatibility Active low (less than 3 V) with internal pull up resistors (150kΩ) to 28 V 15 way female D-type 8 way FCC68 compatible 8 way FCC68 compatible 7 way circular multipole IEC 320 9.45 (240) IGC ACTIVE ION GAUGE CONTROLLER 5 × 10 -3 TO 2 × 10 -11 mbar 7 PAGE 237 NEW TIC INSTRUMENT CONTROLLER Compact instrument • TIC is packaged in a compact case and may be panel or rack (¼ 19" rack 3U) mounted. With the addition of the bezel it becomes an attractive bench-top instrument. Clear, easy to use graphical user interface • The large 128 x 64 pixel backlit graphics LCD and mobile phone style menu system simplifies programming and with a choice of summary screens excellent visibility of displayed parameters is assured. Universal power supply • TIC will operate from mains supplies with voltages between 90 and 264 V ac, and frequencies between 47 and 63 Hz. No user intervention being required. Serial communications • To enable complete integration into PC and PLC controlled processes, all TIC variants include RS232 and RS485 interfaces as standard. WindowsTM PC program • TIC is supplied with a new WindowsTM PC program which enables full setup and control from a PC. Using the RS485 interface, multiple TIC installations may be monitored and controlled from a central point. Software upgrades • As new compatible products are released, TIC software may be simply upgraded using the special utility supplied with the WindowsTM PC program. • TIC software upgrades will be made available via e-mail and the Internet. A compact instrument controller with a large clear graphical display, an intuitive user interface and serial communications providing full remote control and data logging functions for one or more TIC systems via a new WindowsTM based PC program. 7 PAGE 238 The controller supports and automatically recognizes up to three gauges from the BOC Edwards range (excluding IGC and Barocels), with coverage from 2000 to 6.6 X 10-10 mbar. Low pressure gauges may be controlled and protected by high pressure gauges and there are three open collector set point outputs. An optional relay box uses these outputs to control three 3A mains changeover relays. The TIC instrument controller may be either rack or bench mounted and provides a useful hub for the flexible operation of a wide range of vacuum system configurations. Features & benefits Universal vacuum gauge controller • TIC automatically recognizes and controls up to three active gauges including Pirani, linear Pirani, thermocouple, strain, inverted magnetron, wide range and active ion gauges. Relay options • TIC has three pressure related set points, which operate open collector outputs rated at 24 V dc 50 mA. Using the optional relay box, these may be linked to three mains changeover relays rated at 230 V 3 A to provide a useful accessory control capability. • All relay boxes include a logic bypass facility for further system integration. Simple system configuration • In most instances, TIC systems may be simply and quickly configured using the range of standard cables on offer. There is therefore no need for the customer to prepare loom assemblies or relay boxes and special interfaces. Direct pressure readout • TIC includes lookup tables for a range of commonly encountered process gasses (N2, He, Ar, CO2, Kr & Ne). Selecting the appropriate gas enables direct readout of the correct pressure without the need to apply conversion factors. TECHNICAL DATA Gauge inputs Logic Interface Control inputs Gauge enable 1, 2, 3 System interlock SYSI Status outputs Analogue output Gauge set point A, B, C Alarm Serial interface Mains input Electrical supply Power consumption (max) Peak inrush current Fuse Earth stud Interface cables shop online: www.bocedwards.com Instrument supporting TIC variants recognize and control the following gauges: APG, APGX, ATC, ASG, AIM, WRG & AIGX* The logic interface connector includes the functions listed below. It may be used either to link to system relays, a higher-level control system, or an optional relay box. By utilizing the relay box pass-through connector, a combination of a higher-level control system and relay box may be used. Closed when low: < 0.5 V dc Open when high: 4 to 24 V dc Closed when low: < 0.5 V dc Open when high: 4 to 24 V dc 0-10 V dc O/C 24 V dc 50 mA O/C 24 V dc 50m A The TIC has two built-in communications protocols, RS232 and RS485. This may be used either to interface to a PLC or, using the WindowsTM PC software package supplied, connected to a PC for full control of either a single TIC system (RS232) or multiple networked systems (RS485) 90 to 264 V ac 47 to 63 Hz 55 VA 4.4 A @ 110 V ac 12 A @ 230 V ac TIC is self-protecting and has no user replaceable fuse. The unit will recover when the overload is removed M4 Use cables as specified in 'Ordering Information' N EW Dimensions Electronics housing External interfaces Front panel 106.4 1.31 kg +0° to +40° C -30° to +70° C 90% RH non-condensing at 40° C 3000m EN 61010-1 EN 61326 Industrial Location, Class B Emissions Enclosure rating IP20 * No more than one AIGX gauge may be connected to TIC at a time 128.6 Bench and rack mounting options (1/4 19" 3U sub rack) BOC EDW ARD S Display - 128 x 64 pixel backlit graphics LCD Front panel keypad control functions include: Scroll up button Scroll down button Enter/Select button 1 Menu/Back button Cycle button 2 1 TIC 2 Front panel securing screw and washer 7 Rear panel 1 PAGE 239 2 BOC EDW ARD S 3 1 6 2 1 Rack 2 Unit securing screw and washer MEASUREMENT AND CONTROL Front panel Weight TIC instrument controller RS232 Operating storage data Operating temperature Storage temperature Maximum ambient operating humidity Maximum operating altitude Standards Electronic design Electromagnetic compatibility 110 mm high x 105 mm wide x 245 mm deep 106 mm wide x 128 mm high 5 4 1 Gauge inputs FCC68 (RJ45) 4 Earth stud M4 2 Logic Interface 25-way 'D' socket 5 Mains input CEE/IEC 320 plug 3 RS232/485 9-way 'D' socket 6 Mains on/off switch shop online: www.bocedwards.com NEW WindowsTM PC program Display interface TIC is supplied with a fully functional variant sensitive WindowsTM based PC program, which replicates and adds to the TIC control menus. It enables single or multiple TIC systems to be configured, controlled and monitored from a single PC. System normal AIM 1.20 APGX 3.20 x10 -04 AIGX 8.10 x10 -10 ALARMS mbar R1 R2 R3 x10 The PC program also supports data logging and individual TIC system configurations may be created and saved for use at a later date. -05 System view screens are divided into two. The top half provides a system overview, the lower half being sub-divided into tabs. The 'system status' tab provides an alerts log… TIC software is structured through a series of easily accessible screens, similar to a mobile telephone. TIC automatically recognizes what is directly connected and displays the appropriate information on the default summary screen. Scrolling and selecting accesses the control and set-up menus for that item. System status is displayed, giving a clear indication of what is currently happening in the vacuum system. The output from connected gauges may be displayed in a variety of ways for maximum clarity. Either individually in large text for maximum impact, or in multiples with an option to display one gauge in larger text. If an alarm event occurs, ’ALARM’ will flash on the screen. When selected, the alarm message may be read and the system re-set for normal operation. Display units may be in mbar, torr, Pa or Volts. …and further tabs enable configuration and direct push-button control of pumps, accessories and gauges. The three set point relays may be allocated to any of the connected gauges. When tripped, they are highlighted. Relay box (optional) General description A relay box has been developed to allow the TIC set point outputs to operate three 230 V ac 3 A (non inductive) mains changeover relays. The relay box is connected to the TIC via the logic interface connector, which is also provided with a bypass connector for interfacing with OEM equipment. Relay box SETPOINT RELAYS 1 2 The PC program includes a software upgrade utility, which enables the TIC software to be upgraded over the serial link from files supplied electronically, either on magnetic media, by e-mail, or from a website. LOGIC INTERFACE 30V MAX 7 PAGE 240 USER 4 1 Mains changeover relays 9-way Positronic plug 2 Logic interface (from TIC) 25-way 'D' plug 3 Logic bypass (to PC, PLC etc.) 25-way 'D' socket 4 Earth stud M4 TIC 3 shop online: www.bocedwards.com N EW Configuration examples ORDERING NUMBER DESCRIPTION A D397-00-000 D400-13-120 D021-71-000 D048-50-000 D357-28-000 D400-03-060 D400-01-030 TIC inst 3 head RS232 B C D E F G G 2m US mains cable G APGX-M-NW16 AL G A AIGX-S-NW25 C ASG NW16 2000 mbar F 0.5m ASG adaptor cable D 3m active gauge cable MEASUREMENT AND CONTROL ITEM E B L ITEM ORDERING NUMBER DESCRIPTION A D397-00-000 D400-13-120 D021-71-000 D146-41-000 D147-01-000 D048-50-000 D400-01-020 D400-01-050 D397-00-834 N/A D397-00-833 TIC inst 3 head RS232 B C D E F G H J K L J K 2m US mains cable APG-M-NW16 AL AIM-S-NW25 WRG-S-NW25 G AIGX-S-NW25 G 2m active gauge cable H 5m active gauge cable A 2m RS232 I/F cable (optional) C PC with RS232 interface (optional) D F 2m Logic I/F cable 7 B PAGE 241 E M ITEM ORDERING NUMBER DESCRIPTION A D397-00-000 D400-13-120 D021-71-000 D146-41-000 D147-01-000 D048-50-000 D400-01-010 D397-00-834 N/A D397-00-804 D397-00-833 D397-00-833 TIC Inst 3 head RS232 B C D E F G H J K L M L H J 2m US mains cable APG-M-NW16 AL AIM-S-NW25 WRG-S-NW25 G AIGX-S-NW25 K 1m active gauge cable G 2m RS232 I/F cable (optional) G A PC with RS232 interface (optional) TIC relay box instruments C 2m logic I/F cable 2m logic I/F cable F D B E shop online: www.bocedwards.com NEW . ORDERING INFORMATION 1-800-848-9800 PRODUCT DESCRIPTION Controllers TIC Instrument Controller RS232 Relay boxes (supplied with) TIC relay box instruments Cables Interface cables 2m logic interface cable 2m RS232 interface cable Active gauge cables (include FCC68 compatible connections at both ends) 0.5m active gauge cable 1m active gauge cable 3m active gauge cable 5m active gauge cable 10m active gauge cable 15m active gauge cable 15m active gauge cable (24 AWG) 25m active gauge cable 30m active gauge cable (24 AWG) 50m active gauge cable 100m active gauge cable Other accessories and supporting products TIC front bezel kit (spare) ORDERING NUMBER D397-00-000 D397-00-804 D397-00-833 D397-00-834 D400-01-005 D400-01-010 D400-01-030 D400-01-050 D400-01-100 D400-01-150 D400-05-150 D400-01-250 D400-05-300 D400-01-500 D400-01-999 D397-00-822 7 PAGE 242 shop online: www.bocedwards.com AGC ACTIVE GAUGE CONTROLLER Turbomolecular pump interface The Active Gauge Controller can be linked, through a suitable adaptor cable, to a BOC Edwards turbomolecular pump system. This makes it possible for a single AGC to operate the whole vacuum system. Capacitance manometers The CM versions of the Active Gauge Controller can accept Barocel 600, 622 and 655 capacitance manometers as well as any of the Active gauge heads. This is particularly advantageous where a combination of basic vacuum gauges together with the highly accurate and reproducible capacitance manometers is required. • Worlds first truly universal gauge controller • Accepts 3 or 6 Active gauges from, Pirani, wide range gauge, thermocouple, strain, inverted magnetron and ion gauges • Can also accept up to 3 Barocel capacitance manometers (only one 655) • 6 independent relays controlled by any of the gauges as standard • RS232 serial port for full remote control • Operates from 90-265 V AC, 45-70 Hz The Active Gauge Controller (AGC) can drive up to 6 Active gauges automatically recognizing the types of Active gauge connected. This allows the unit to scale the output accordingly to display the correct pressure range. Reconfiguring the controller is as simple as unplugging one head and plugging in another. Power supply Input voltage range Input frequency range Temperature range Operating Storage Chart recorder outputs Active gauges Capacitance manometers Standard relays Voltage (maximum) Current (maximum) Optional relay board Voltage (maximum) Current (maximum) Optional DIN rail mounting relay unit Voltage (maximum) Current (maximum) Dimensions 90 - 265 V AC (auto adjusting) 45 - 70 Hz 0 - 40 °C -20 to 70 °C 2 - 10 V DC 0 - 10 V DC linear 6 open collector transistor outputs 40 V DC 100 mA 6 electromagnetic relay outputs 240 V AC 3A (non-inductive load) 6 electromagnetic relay outputs 240 V AC 5A (non-inductive load) Half 19 inch rack, 2U 7 Relay options 8.78 (223) The relay set point criteria along with all other user defined parameters are stored in non-volatile memory, and so are retained even after the power is turned off. 0.13 (3.2) 2.76 (70) Automatic range switching Gauge heads which only operate at lower pressure, such as inverted magnetron and ionization gauges, can be switched on and off manually as appropriate. Alternatively these heads can be interlocked to the pressure measured by one of the other gauges, eg., Pirani or thermocouple. The display can also switch to give continuous pressure indication over the range. For example, a Pirani gauge can interlock an ion gauge to prevent accidental power-up at high pressures and can be used to give continuous pressure display from atmosphere to 2 × 10-11 mbar. RS232 communication The RS232 serial communication option gives full remote control of the AGC by a host computer. An ASCII character string protocol allows all functions to be controlled and data to be captured for storage and processing. There is also a data logging mode for use with serial printers. Display options The AGC is available with either a single or triple line display which can continuously show the reading from any three heads. shop online: www.bocedwards.com 11.22 (285) 2.99 (76) 3.46 (88) 9.45 (240) PAGE 243 8.15 (207) All the controllers have six set point outputs as standard, rated at 40 V DC, 100 mA which can be controlled by any of the gauge heads connected using high and low pressure set points. If a higher rating is required then there is a choice of an internally fitted card with 6 electromagnetic changeover relays rated at 240 V AC, 3A or a separate DIN rail mounted module with six 240 V 5A relays. MEASUREMENT AND CONTROL TECHNICAL DATA ORDERING INFORMATION 1-800-848-9800 PRODUCT DESCRIPTION 7 PAGE 244 PIRANI 501 AND PRE10K ORDERING NUMBER CM versions can accept capacitance manometers as well as Active Gauges AGC single display 3 head D386-55-000 AGC single display 6 head D386-54-000 AGC single display 6 head CM D386-53-000 AGC single display RS232 3 head D386-52-000 AGC single display RS232 6 head D386-51-000 AGC single display RS232 6 head CM D386-50-000 AGC triple display RS232 3 head D386-62-000 AGC triple display RS232 6 head D386-61-000 AGC triple display RS232 6 head CM D386-60-000 AGC relay expansion board D386-51-800 DIN mounting relay unit D385-04-110 Half 19 inch rack blanking kit D048-30-301 Half 19 inch rack joining kit D048-30-302 WindowsTM software driver D386-62-800 Active gauge cables (FCC68 compatible connection at both ends) 0.5 m D400-01-005 1m D400-01-010 3m D400-01-030 5m D400-01-050 10 m D400-01-100 15 m D400-01-150 25 m D400-01-250 50 m D400-01-500 100 m D400-01-999 Non-standard lengths available on request Barocel capacitance manometer adaptor cables Barocel 600 to female FCC68 0.5 m D400-03-010 Barocel 622 to female FCC68 0.5 m D400-03-030 Barocel 655 to female FCC68 0.5 m D400-03-050 Active strain gauge adaptor cable (ASG to female D400-03-060 FCC68) 0.5 m Interface cables RS232C, 3m Terminates in 25 way D (female) D386-50-400 Terminates in 9 way D (female) D386-50-500 Turbomolecular pump controller interface cables EXC100 to female FCC68, 0.5 m D400-03-070 EXC120 to female FCC68, 0.5 m D400-03-080 EXC300 to female FCC68, 0.5 m D400-03-090 Electrical supply cable USA plug 2m D400-13-120 • • • • • • • • • Wide range on clear 230° scale Continuous reading - no range switching necessary Recorder output mbar and torr scales Electrical supply on/off indication Power input: IEC connector with fuse and voltage selector Simple controls: easy to set-up or calibrate at atmosphere and vacuum Compact units to DIN 43700 Includes detachable feet and panel mounting clamps A low cost, single channel Pirani display and gauge head. TECHNICAL DATA Pressure range Maximum overpressure Operating temperature Controller Gauge head Storage temperature Materials exposed to vacuum Power supply (controller) Input voltage range Input frequency range Dimensions Vacuum fitting 5 to 1 × 10-3 mbar 2 bar absolute 0 - 50 °C 5 - 60 °C -10 to 70 °C Aluminum HETF, tungsten, PTFE, nickel 94 to 127 or 188 to 254 V 50/60Hz DIN 43700 96 × 96 mm NW10 ORDERING INFORMATION 1-800-848-9800 PRODUCT DESCRIPTION Pirani 501 with 2 m electrical supply cable Pirani PRE10K gauge head with head cable 2 m PRE10K extension cable 5 m PRE10K extension cable 15 m PRE10K extension cable 30 m shop online: www.bocedwards.com ORDERING NUMBER D395-11-000 D024-28-000 D368-36-005 D368-36-015 D368-36-030 Voltage (maximum) Current (maximum) Dimensions Standards Electronic design Electromagnetic compatibility AGD ACTIVE GAUGE DISPLAY 250 V ac 3A (non-inductive load) DIN 43700 standard 96 x 96mm EN 61010-1 EN 61326 (Class B Emissions) Examples of compatible gauges The BOC Edwards Active Gauge Displays are a range of simple, low cost units for the measurement and control of vacuum from atmosphere to 10-9 mbar. They are designed for use with BOC Edwards gauges and therefore give the user unrivalled performance, flexibility and ease of use with this range of vacuum instruments. ORDERING INFORMATION 1-800-848-9800 Now includes Pa as well as mbar / torr versions. PRODUCT DESCRIPTION Features & benefits • Accepts two active gauge heads - Single switch with LED indication for gauge head selection • Option of two adjustable set-points with relay status indication - Two single pole change-over relays each rated at 3 A 250 V • Standard 2 to I0 V dc analog chart recorder outputs - Continuous independent output for each gauge head plus switched output corresponding to selected gauge head • Bench top use or panel mounting - Supplied with tilt feet for convenient bench top mounting and panel mounting kit to DIN 43700 standard • Mains power input via IEC connector - Fuse and voltage selector allows operation from 90 to 265 V ac, 45 to 70 Hz • Continuous reading - no range changing necessary - Clear analog display covers the whole gauge head pressure range In addition to the features of the unit itself, use of the Active Gauge Display gives all the benefits of Active gauging These include flexible cabling with standard lengths up to 100m, a high level of immunity to electrical noise and rugged, 96 92 compact surface mount electronics 70 140 16 96 TECHNICAL DATA Power Supply Input voltage range Input frequency range Temperature range Operating Storage Chart recorder outputs AGD AGD AGD AGD AGD AGD AGD AGD AGD AGD AGD AGD AGD AGD AGD AGD AGD AGD AGD AGD AGD AGD AGD AGD AGD AGD AGD AGD AGD AGD AGD AGD for for for for for for for for for for for for for for for for for for for for for for for for for for for for for for for for APG-M with control relays (mbar/Torr) APG-M with control relays (Pa) APG-L with control relays (mbar/Torr) APG-L with control relays (Pa) APGX with control relays (mbar/Torr) APGX with control relays (Pa) AIM-S with control relays (mbar/Torr) AIM-S with control relays (Pa) AIM-X with control relays (mbar/Torr) AIM-X with control relays (Pa) ATC-M with control relays (mbar/Torr) ATC-M with control relays (Pa) ATC-D with control relays (mbar/Torr) ATC-D with control relays (Pa) WRG with control relays (mbar/Torr) WRG with control relays (Pa) APG-M (mbar/Torr) APG-M (Pa) APG-L (mbar/Torr) APG-L (Pa) AIM-S (mbar/Torr) AIM-S (Pa) ATC-M (mbar/Torr) ATC-M (Pa) AIM-X (mbar/Torr) AIM-X (Pa) APGX (mbar/Torr) APGX (Pa) ATC-D (mbar/Torr) ATC-D (Pa) WRG (mbar/Torr) WRG (Pa) 90 to 120 V ac 185 to 265 V ac (selectable) 45 to 70 Hz 5 to 60°C -10 to +70°C 2 to 10 V dc Relays shop online: www.bocedwards.com ORDERING NUMBER D395-60-000 D395-60-600 D395-61-000 D395-61-600 D395-71-000 D395-71-600 D395-62-000 D395-62-600 D395-70-000 D395-70-600 D395-63-000 D395-63-600 D395-64-000 D395-64-600 D395-80-000 D395-80-600 D395-65-000 D395-65-600 D395-66-000 D395-66-600 D395-67-000 D395-67-600 D395-68-000 D395-68-600 D395-75-000 D395-75-600 D395-76-000 D395-76-600 D395-69-000 D395-69-600 D395-85-000 D395-85-600 MEASUREMENT AND CONTROL Active Pirani Gauges APG-M & APG-MP Atmosphere to 10-3 mbar APG-L Atmosphere to 10-4 mbar Active Linear Pirani Gauges APGX-M & APGX-MP Atmosphere to 10-3 mbar APGX-L Atmosphere to 10-4 mbar Active Thermocouple Gauges ATC-D 65 to 6.5 x 10-2 mbar ATC-M 1.3 to 1.3 x 10-3 mbar Active Inverted Magnetron Gauges AIM-S, AIM-SL & AIM-X 10-2 to 10-9 mbar Active Wide Range Gauges WRG-S, WRG-SL & WRG-D Atmosphere to 10-9 mbar 7 PAGE 245 ORDERING INFORMATION 1-800-848-9800 SPARES & ACCESSORIES ADD ACTIVE DIGITAL DISPLAY ORDERING NUMBER Cables (including FCC68 compatible connection at both ends) 0.5 m 1m 3m 5m 10 m 15 m 25 m 50 m 100 m Non standard lengths and screened cables available on request Electrical supply cable USA plug 2m D400-01-005 D400-01-010 D400-01-030 D400-01-050 D400-01-100 D400-01-150 D400-01-250 D400-01-500 D400-01-999 D400-13-120 • • • • • Compatible with Active Strain gauge, 600, 622 and 655 Barocels Clear 4 digit display with choice of pressure unit Auto ranging facility when used with Barocels Bench top or panel mounting to DIN 43200 standard Option with two 3A changeover relays for set-point process control A single Active Strain Gauge or Barocel 600, 622 or 655 capacitance manometer can be connected using appropriate adaptor cable and a standard Active gauge cable. Units of pressure display can be selected independent of gauge full scale units. Auto range features for Barocels gives 4 decade display. Relay version gives one falling pressure setpoint with adjustable hysteresis and one rising pressure setpoint with fixed hysteresis. 7 PAGE 246 TECHNICAL DATA Power supply Input voltage range Input frequency range Temperature range Operating Storage Chart recorder outputs Relays Voltage (maximum) Current (maximum) Dimensions Face depth 90 - 120 V or 185 - 265 V AC (switchable) 45 - 70 Hz 5 - 60 °C -10 to 70 °C 0 - 10 V DC 250 V DC 3 A (non-inductive load) DIN 43700 standard 96×96 mm 5.51 inch (140 mm) ORDERING INFORMATION 1-800-848-9800 PRODUCT DESCRIPTION ORDERING NUMBER ADD D395-56-000 ADD with control relays D395-57-000 For adaptor cables, Active gauge cables and electrical supply cables see page 224. shop online: www.bocedwards.com 1.77 (45) 1.89 (48) MODEL 1575 PRESSURE DISPLAY 3.62 (92) 5.65 (144) 3.78 (96) 5.82 (148) ORDERING INFORMATION 1-800-848-9800 PRODUCT DESCRIPTION ACCESSORIES The Model 1575 Pressure Display is a low cost, microprocessor based, digital display and set point controller for the Barocel 600, 622 and 655 capacitance manometers. The Model 1575 incorporates power supply, digital display, four user-selectable set-points, along with analog and optional RS232 outputs in a compact 1/8 DIN package. Cable (15ft, 4.5 m) Barocel 600 Barocel 622 Barocel 655 652 Power supply Push button or remote zero adjustment - To adjust the transducer zero, simply press the front panel membrane switch. Alternatively, earth (ground) a rear panel connection. Push button full scale calibration - Use the full scale calibration feature if you want to display engineering units which are different from the transducer calibration, or to incorporate arbitrary coefficients for the transducer. User selectable set-points with open collector contacts - There are four user programmable solid-state, open collector set points; two high and two low. The hysteresis band associated with each set point can also be adjusted to meet system requirements. Easy to read LED display - The 10 mm bright red, high efficiency LED display is easily visible from normal viewing angles and in most lighting conditions. Optional RS232 output - An RS232 port is available, at minimal cost, for digital pressure output. TECHNICAL DATA Signal input ± 10 V DC DC output Transducer input signal A/D resolution ± 25,000 counts ± 0.005% of reading ± 2 counts Accuracy1 Full scale temperature coefficient 20 ppm/ °C Zero temperature coefficient .001 ppm/ °C Zero suppression ± 100% of full scale Transducer supply ±15 V DC at 250mA (maximum) Electrical supply (50 - 60 Hz) Standard 115 V AC ± 10% Optional 230 V AC or 100 V AC ± 10% Set-points (4 open collector transistors) Voltage (maximum) 50 V Current (maximum) 100 mA Hysteresis (both set-points) 0 - 99 counts Control status LEDs indicate controls actuated Temperature range Operation 0 to 55 °C Storage -40 to 85 °C Warm-up time (at 25 °C) 30 minutes List of compatible transducers Barocels 600, 622, 655 1 Not including transducer error shop online: www.bocedwards.com ORDERING NUMBER W608-10-000 W608-10-004 W608-20-000 W608-20-004 ORDERING INFORMATION W189-97-005 W189-99-005 W189-92-005 W189-92-005 MEASUREMENT AND CONTROL Model 1575 Pressure Display Analog output 115V RS232 output, 115V Analog output 230V RS232 output, 230V 7 PAGE 247 MODEL 652 POWER SUPPLY ORDERING INFORMATION 1-800-848-9800 PRODUCT DESCRIPTION Model 652 Power Supply ACCESSORIES Model 652 cables Barocel 600 Barocel 622, 655, 658 and 659 Adaptor, to AGC (with capacitance manometer board) 0.5 m Adaptor, to AGC (without capacitance manometer board) 0.5 m Model 1575 controller (15 ft, 4.6 m) Model 1501C controller (15 ft, 4.6 m) Model 1800 controller (15 ft, 4.6 m) 7 PAGE 248 The Model 652 Power Supply supplies regulated power to up to three Barocel 600, 622, 655, 658, or 659 capacitance manometers. The Model 652 therefore expands the capabilities of the Active Gauge Controller, Model 1575 and Model 1501C Pressure Controller. The linear 0 - 10 V Barocel outputs are relayed through connections on the rear panel of the Model 652 to a pressure display or controller. • Provides up to 1.5 A • Allows the AGC to display and control multiple heated Barocels (like the Barocel 658). • Expands the display capability of the Model 1575 Controller to include Barocel 655, 658 and 659. • Allows the Model 1501C Pressure Controller to control from the output of Barocel 655, 658 or 659. TECHNICAL DATA Supply voltage (selectable) 90-240 V AC (no voltage selection required) Supply current 2 A max Supply frequency 48 - 62 Hz Output voltage ±15 V ±0.1 V @ 1.5 A Output current range 0-2.25 A (short circuit protected) Regulation of ±15V outputs <±100 mV over full load Ripple and noise in ±15V outputs <20 mV Signal loading from DC to 100 kHz No appreciable loading Noise introduced onto Barocel signal <1 mV (with standard 15’ cable) Signal input, linear 0-10 V DC Reset time 10 s Operating temperature -10 - 40 °C Operating humidity 10 - 90 % Weight 6.5 lb (3 kg) Dimensions: Height 3.5 inch (90 mm) Length 9.5 inch (245 mm) Width 9.25 inch (238 mm) shop online: www.bocedwards.com ORDERING NUMBER W569-96-120 ORDERING INFORMATION W189-97-005 W189-92-005 D400-03-050 W659-99-511 W189-92-005 W189-92-005 W189-92-005 GAUGE AND CONTROLLER INSTALLATION EXAMPLES The Active range of vacuum gauges and controllers gives you the flexibility to design and configure a system which will fulfil your needs precisely. Our technical support team is on hand to advise you on the best system for your application. Examples of typical systems are show below: D Active gauge display system A ITEM QUANTITY ORDERING NUMBER DESCRIPTION A 1 AGD for APG-M B 1 C 2 D 2 D395-65-000 D400-13-120 D021-71-000 D400-01-030 B MEASUREMENT AND CONTROL US electrical supply cable APG-M 3 m Active gauge cable C C TIC system 1 ITEM ORDERING NUMBER DESCRIPTION A D397-00-000 D400-13-120 D021-71-000 D048-50-000 D357-28-000 D400-03-060 D400-01-030 TIC inst 3 head RS232 B C D E F G G G 2 m US mains cable G A APGX-M-NW16 AL C AIGX-S-NW25 7 F ASG NW16 2000 mbar PAGE 249 D 0.5 m ASG adaptor cable 3 m Active gauge cable E B M TIC system 2 L ITEM ORDERING NUMBER DESCRIPTION A D397-00-000 D400-13-120 D021-71-000 D146-41-000 D147-01-000 D048-50-000 D400-01-010 D397-00-834 N/A D397-00-804 D397-00-833 D397-00-833 TIC inst 3 head RS232 B C D E F G H J K L M H J 2 m US mains cable APGX-M-NW16 AL AIM-S-NW25 G K WRG-S-NW25 G AIGX-S-NW25 G A 1 m Active gauge cable C 2 m RS232 I/F cable (optional) PC with RS232 interface (optional) F D TIC relay box instruments 2 m Logic I/F cable B 2 m Logic I/F cable E shop online: www.bocedwards.com Active gauge controller, system 1 M ITEM QUANTITY ORDERING NUMBER DESCRIPTION A 1 AGC-6 head, RS232 B 1 D386-51-000 D400-13-120 D146-41-000 D048-51-000 D021-73-000 D147-01-000 D351-08-000 D355-13-000 D357-26-000 D400-03-060 D400-01-030 D386-50-500 C 1 D 1 E 1 F 1 G 1 H 1 J 1 K 1 L 4 M 1 L US electrical supply cable AIM-S AIGX-S A APG-L WRG-S ATC-E ATC-M E K ASG G B ASG adaptor cable 3 m gauge cable RS232 interface cable H J C F D H Active gauge controller, system 2 ITEM 7 PAGE 250 QUANTITY A 1 B 1 C 1 D 1 E 1 F 1 G 1 H 3 J 1 ORDERING NUMBER D386-55-000 D400-13-120 D146-41-000 D048-50-000 D021-73-000 D147-01-000 D396-16-000 D400-01-030 D400-03-080 H A DESCRIPTION H J AGC-3 head US electrical supply cable AIM-S G AIGX-S APG-L B E WRG-S EXC120 3 m Active gauge cable EXC120 adaptor cable F C D H Active gauge controller, system 3 ITEM QUANTITY ORDERING NUMBER DESCRIPTION A 1 AGC-CM version B 1 D386-60-000 D400-13-120 W655-12-811 W600-42-811 D021-73-000 D400-03-010 W400-03-050 D400-01-030 C 1 D 1 E 1 F 1 G 1 H 3 G US electrical supply cable A F Barocel 655 Barocel 600 C APG-L D 600 adaptor cable 655 adaptor cable E 3 m Active gauge cable shop online: www.bocedwards.com B B H Active gauge controller, system 4 ITEM QUANTITY ORDERING NUMBER DESCRIPTION A 1 AGC-3 head B 2 C 1 D 1 E 1 F 1 G 1 H 3 D386-55-000 D400-13-120 D146-41-000 D021-71-000 D048-47-000 D029-99-390 D048-47-060 D400-01-030 A US electrical supply cable E APG-M C IGC Ebeam, BOC Edwards B Ion gauge tube Ion gauge cable F 3 m Active gauge cable Active digital display system ITEM QUANTITY ORDERING NUMBER DESCRIPTION A 1 ADD B 1 C 1 D 1 E 1 D395-56-000 D400-13-120 D357-26-000 D400-03-060 D400-01-030 US electrical supply cable D MEASUREMENT AND CONTROL G AIM-S ASG ASG adaptor cable 3 m Active gauge cable 7 PAGE 251 shop online: www.bocedwards.com UPSTREAM PRESSURE CONTROL Use the 1501C Controller and the DM20 valve for upstream pressure control. DM20 PROPORTIONAL FLOW CONTROL VALVE DM20 A B C 1501C D A Gas supply C Barocel capacitance manometer B Process/ vacuum chamber D Gas exhaust or vacuum pump The DM20 is a smooth-acting electromagnetic proportional flow control valve used with the Controller 1501C for automatic upstream pressure control. The valve orifices can be changed locally, to change the flow range of the valve. The valve is normally closed and is made from corrosion resistant 316 stainless steel. PRESSURE CONTROLLER 1501C 0.48 (12.19) Flow ranges Maximum recommended flowrate Minimum controllable flowrate Operating pressure Maximum pressure Operating temperature Materials exposed to process Weight 7 • PID control • 4½ digit display • Dual set point relays Use the 1501C Controller with a DM20 valve for automatic upstream closed-loop control of vacuum and pressure systems. The Controller 1501C compares the actual system pressure (input from a Barocel 600 and 622, or 590 capacitance manometer) with the required system pressure, and then continuously adjusts the DM20 valve to maintain actual pressure equal to required pressure. Pressure and set-point are displayed to 0.01% and control values can be set to four significant figures. Display Output signal (linear) Set-point relays Electrical supply (50/60 Hz) Compatible with Barocel Overall dimensions Width Height Depth Approximate weight 0.90 (22.86) 0.90 (22.86) 1.00 (25.4) PAGE 252 0-20 sccm - 0-10 slpm 10 slm 1 % full scale (0.2 sccm with smallest orifice) 14.5 - 180 psi (1 - 12.4 bar) 515 psi (35.5 bar) 0 - 60 °C 316 stainless steel, Viton or Kalrez 0.64 lb (0.29 kg) 4½ digits 0 - 10 V DC 2 115 or 230 V AC ± 10% 600, 622, 590 0.75 (19.05) 1.00 (25.4) : W 8 9 0 - 0 Flow range* (N2) 10 slpm 5 slpm 2 slpm 500 sccm 200 sccm 50 sccm 10 sccm ORDERING INFORMATION 1-800-848-9800 1501C Pressure controller (115V or 230V, 50/60 Hz) Cables (15 ft, 4.6m) Barocel 600 Barocel 622 Barocel 590 L ORDERING INFORMATION 1-800-848-9800 9.49 inch (241 mm) 3.46 inch (88 mm) 13.74 inch (349 mm) 7 lb (3.2 kg) PRODUCT DESCRIPTION 1.73 (43.94) 2 x ¼" UNC -2B x 0.235 (5.97) ORDERING NUMBER 0 - 3 4 5 6 7 8 9 W606-30-000 W189-97-005 W189-99-005 W189-96-005 2 3 4 Pressure fitting !/4 inch Swagelok !/4 inch VCR * For upstream pressure 1035 - 3360 torr absolute and downstream pressure 0 - 773 torr absolute, maximum differential 2625 torr. For other pressure conditions, consult BOC Edwards or your local supplier ACCESSORIES Cable DM20 to Controller 1501C (15 ft, 4.5 m) shop online: www.bocedwards.com ORDERING INFORMATION W189-99-105 DOWNSTREAM PRESSURE CONTROL CONTROLLER 1800 • High accuracy and reproducibility. Measures Barocel output to 0.002% FSD and controls valve throttle plate to within 0.1 degree. • Auto tune mode ‘learns’ system characteristics so no need for lengthy manual adjustment. • Simple computer interface with bi-directional RS232 or with optional fiber optic connections. • Unique control algorithm gives fastest system response. In most semiconductor processes and vacuum furnace applications, downstream control of system pressure is the method of choice over upstream control. Optimum resident time and proper pressure is achieved by independent control of the mass flow of input gases while at the same time controlling the total pressure of the gas mixture. Transient loads of reaction by-products may be rapidly removed by increasing input gas flow which will automatically open the throttle valve to increase pumping speed. Clean-up between process steps is expedited by fully opening the valve while still under control, eliminating the need for expensive by-pass valves. Use the throttle valve Controller 1800 and the throttle valve 1850 for downstream, closed loop pressure control, with process set points up to 50 torr. B RS232 A 1800 1850 C A Process/ vacuum chamber B Barocel capacitance manometer C Gas exhaust or vacuum system The RS232 link is optional Process repeatability Accurate and repeatable process pressure is vital in many exacting applications. The Barocel capacitance manometers are highly accurate, with Barocel 655, 600 and 590 recommended for the best performance. The Controller 1800 has a 16 bit analog-to-digital converter and the stepper motor can control the 1800 throttle valve to within 0.1 degree. Easy to link to control system The Controller 1800 is easy to link to a computer or PLC to achieve maximum process efficiency in fully automated systems. Use either the bi-directional RS232 link, or specify the optional fiber optic coupling. Input step settling time1 Time for valve closed to open Accuracy Resolution Allowed process time-constant Pressure signal input Full scale range Other Electrical supply input Voltage AC (selectable) Voltage tolerance Frequency Power Electrical supply outputs Throttle valve supply Transducer supply Serial communications Standard configuration Baud rate Protocol Optional Compatible with Barocel Operating temperature range Mounting options 1 To 0.2% final value shop online: www.bocedwards.com < 7 x system volume/conductance ratio 0.3 s 0.2% full scale 0.01% full scale 0.5 - 8 s 0 - 10 V DC Differential, 100 kl 100 kΩ minimum 100, 120, 220 and 240 V +10%, -15% 50/60 Hz 100 VA yes +15 V DC 1 A RS232 serial link 19200, 9600, 4800, 2400 bps Even, no parity, 7 or 8 data bits, 1 or 2 stop bits Fiber optic coupling 600, 622, 655, 658, 659, 590 with full scale range of 50 torr or less 10 - 40 ºC ½ 19 inch rack or ½ DIN MEASUREMENT AND CONTROL Auto tune The auto tune mode allows the Model 1800 controller to learn the static and dynamic characteristics of the vacuum system. The data collected is processed and used to supply the necessary parameters to maintain correct system pressure. 7 PAGE 253 H E 3.50 (89) 3.50 (89) 2.99 (76) 7.52 (191) 8.74 (222) K x ØD 9.60 (243.80) F 9.49 (241) ØG ØA ORDERING INFORMATION 1-800-848-9800 : C W 1 8 0 0 - 1 ØB 0 - H Display Display included No display 0 1 Pressure fitting !/2 19 inch rack mount 0 !/2 inch DIN mount 1 ACCESSORIES 7 PAGE 254 F ØA ORDERING INFORMATION Controller cables (15 ft, 4.5 m) Barocel 600 Barocel 622 Barocel 655, 658, 659 Barocel 590 1850 throttle valve RS232 Electrical supply cable USA plug 2m W189-97-005 W189-99-005 W189-92-005 W189-96-005 W189-93-005 W189-94-005 D400-13-120 C 0.25 - 31 ls-1 0.4 - 55 ls-1 0.7 - 300 ls-1 0.8 - 375 ls-1 1.0 - 500 ls-1 1.5 - 900 ls-1 2 - 2100 ls-1 3 - 3750 ls-1 NW40 1.5 2.16 2.25 6.59 NW50 1.99 2.95 2 7.15 ISO valves (inch) ISO63 2.36 5.12 0.94 0.35 8.57 4.33 4 ØA ØB C D F G K The 1850 butterfly throttle valve is designed for semiconductor and vacuum furnace applications where fast, accurate and reliable closed loop pressure control is required. 14.5 psi (1 bar) Contact BOC Edwards NW40 0.78 2.16 2.25 6.59 ØA ØB C F • A wide range of bores and flange sizes from NW40 to ISO 200 • High speed motor delivers valve closed-to-open in 0.3 seconds • Highly corrosion resistant - 316 stainless steel construction The valve’s motor drive system has a micro stepper motor to achieve extremely high speed and high resolution valve plate control. Typically, the open-to-closed time is less than 0.3 seconds. This speed, together with BOC Edwards propriety adaptive feedback control techniques, provides fast and accurate control, particularly in systems with small ratios for process chamber volume to conductance. ØB NW flange valves (inch) 1850 THROTTLE VALVE Maxumum pressure differential NW40 - NW80 valves Other valves Controllable conductance NW40 ØA = 0.78 NW40 ØA = 1.5 NW50 ISO63 ISO80 ISO100 ISO160 ISO200 E ISO80 3 5.75 0.94 0.35 9.59 4.92 8 ISO100 3.86 6.5 0.94 0.35 10.42 5.71 8 ISO160 5.75 8.86 0.94 0.35 12.84 7.78 8 ISO200 7.83 11.14 1.56 0.43 17.4 10.24 12 ORDERING INFORMATION 1-800-848-9800 : W 1 8 5 Flange NW40 NW50 ISO63 ISO80 ISO100 ISO160 ISO200 - 0 - 0 0 1 2 3 4 5 7 8 Flange ID All valves, except NW40 NW40, ØA=0.78 NW40, ØA=1.50 Contact BOC Edwards for ordering information about other valve sizes. shop online: www.bocedwards.com 1 1 2 CG16K CAPSULE DIAL GAUGES VS16K ADJUSTABLE VACUUM SWITCH The VS16K is a general purpose vacuum switch with a user adjustable set point and small switching differential. Reading independent of gas type Accurate to ±2% of full scale Barometrically independent Pipeline or panel mounting Easy to read linear scale Rugged construction Bezel removable for cleaning 2.01 (51) A 0.24 (6) 3.57 (90.75) 2.21 (56) NW16 2.76 (70) 0.59 (15) Ø4.37/4.41 (111/112) 2.66 (67.5) Ø4.53 (115) 1.89 (48) 2.28 (58) Ø4.02 (102) 1.02 (26) A = Mating half shown fitted 7 PAGE 255 TECHNICAL DATA NW16 0.47 (12) 0.24 (6) TECHNICAL DATA Ranges Accuracy Maximum applied pressure 25 mbar version Other versions Weight Vacuum connection Accessories supplied 0-1050 mbar 0-125 mbar 0-50 mbar 0-25 mbar 0-760 torr 0-100 torr 0-40 torr 0-20 torr ±2% of full scale deflection 1 bar absolute, 0 bar gauge 2 bar absolute, 1 bar gauge 1 kg NW16 flange Clamp and studs for panel mounting Range of adjustment Maximum switching differential Maximum working pressure Electrical rating Electrical connection plug Internal volume Materials in vacuum Leak rate Enclosure classification Weight Vacuum connection Accessories supplied CG16K, CG16K, CG16K, CG16K. CG16K, CG16K, CG16K, CG16K, 0-1050 mbar 0-125 mbar 0-50 mbar 0-25 mbar 0-1000 torr 0-100 torr 0-40 torr 0-20 torr 30 to 1000 mbar1 30 mbar 1 bar gauge (2 bar absolute) 10 A resistive, 5 A inductive at 250V AC Type 283 mPm 7 cm3 stainless steel < 1 × 10-9 mbar I s-1 IP52 0.7 kg NW16 Mating electrical socket Type 183 mPm 1 Set point varies with barometric pressure ORDERING INFORMATION 1-800-848-9800 PRODUCT DESCRIPTION VS16K adjustable vacuum switch ORDERING INFORMATION 1-800-848-9800 PRODUCT DESCRIPTION MEASUREMENT AND CONTROL • • • • • • • This diaphragm operated vacuum switch is high vacuum compatible and corrosion resistant with all wetted parts made from stainless steel. A high current rating allows direct switching of loads without additional relays or external power supplies. • Set point range 30-1000 mbar • User adjustable • Reproducible • Changeover contacts for normally open or normally closed operation • Switch point independent of gas composition • Corrosion resistant • Direct pipeline mounting ORDERING NUMBER D356-10-000 D356-11-000 D356-12-000 D356-13-000 D356-30-000 D356-31-000 D356-32-000 D356-33-000 shop online: www.bocedwards.com ORDERING NUMBER D059-15-000 IS16K VACUUM INTERLOCK SWITCH The IS16K vacuum interlock switch is designed to safeguard the operator by ensuring that electrical circuits in the vacuum chamber do not remain energized when the system is let up to atmosphere. Typical applications include interlocking of the HT cleaning or process circuits on thin film deposition and vacuum systems. The IS16K is high vacuum compatible and corrosion resistant, with all wetted parts made from stainless steel. A high current rating allows direct switching of loads without additional relays or external power supplies. BOC Edwards' exclusive design provides the following safety features: • Single non-adjustable set point, cannot be tampered with • Positive break switch, as required by BS4794/IEC 338-1 • Rapid contact separation, prevents arcing • Breaks circuit directly, no relays required • Corrosion resistant • Direct pipeline mounting 2.01 (51) A 7 2.21 (56) NW16 PAGE 256 Ø4.02 (102) 2.28 (58) 1.02 (26) A = Mating half shown fitted TECHNICAL DATA Fixed set point Maximum switching differential Maximum working pressure Electrical rating Electrical connection plug Internal volume Materials in vacuum Leak rate Enclosure classification Weight Vacuum connection Accessories supplied 640 ±120 mbar1 100 mbar 1 bar gauge (2 bar absolute) 10 A resistive, 5 A inductive at 250V AC Type 283 mPm 7 cm3 Stainless steel < 1 × 10-9 mbar Is-1 IP52 0.7 kg NW16 Mating electrical socket Type 183 mPm 1 Set point varies with barometric pressure ORDERING INFORMATION 1-800-848-9800 PRODUCT DESCRIPTION IS16K vacuum interlock switch ORDERING NUMBER D059-14-000 shop online: www.bocedwards.com VACUSTAT McLEOD GAUGES 1 TO 10 -3 mbar TECHNICAL DATA 10 - 10-2 mbar 1 - 10-3 mbar 97 g 140 g 900 g 85 g 105 × 180 mm 220 mm 87 × 159 mm 110 mm 95 mm BOC Edwards SC5 B14 cone (male) ORDERING INFORMATION 1-800-848-9800 A mercury charge is not supplied with these items and is not available from BOC Edwards. PRODUCT DESCRIPTION Vacustat Model 1 • Miniature McLeod gauge • Simple operation • Bench, panel or system mounting (model 2G) The BOC Edwards range of Vacustat gauges is a family of three miniature McLeod gauges designed for general laboratory or industrial duties. The gauge is normally positioned with the measuring capillary and scale horizontal. To take a measurement, the head is rotated through 90° around its rotary seal to bring the tube and scale upright. The rotation causes the mercury to move within the glassware and isolate a fixed volume of the gas whose pressure is to be measured. The trapped gas is then compressed into the closed capillary tube. When the mercury in the open capillary is level with the zero mark on the measuring scale, the system pressure is given by the height of the mercury column in the closed capillary against the scale (which is calibrated directly in mbar). ORDERING NUMBER Vacustat Model 1 D063-13-000 Vacustat Model 2 D063-14-000 Vacustat Model 2G D064-05-000 Model 1 and Model 2 supplied with: SC5 ‘ O’ ring, ‘ O’ ring carrier and nut, nozzle adapter for 7 mm bore rubber tube. Model 2G supplied with B14 cone (female) and retaining clip. SPARES Gauge head glassware Vacustat Model 1 Vacustat Model 2 Vacustat Model 2G Model 1: can be free-standing or panel mounted, measures from 10 to 10-2 mbar Model 2: can be free-standing or panel mounted, measures from 1 to 10-3 mbar Model 2G: is a lightweight glass gauge for mounting directly to the vacuum system. Measures from 1 to 10-3 mbar Vacustat Model 2G shop online: www.bocedwards.com ORDERING NUMBER D063-01-001 D063-03-001 D064-02-001 MEASUREMENT AND CONTROL Range Model 1 Model 2, Model 2G Mercury charge Model 1 Model 2, Model 2G Weight without mercury Model 1, Model 2 Model 2G Dimensions Model 1 and Model 2 fascia Model 1 and Model 2 height Model 2G Clearance needed for rotation Model 1, Model 2 Model 2G Vacuum connection Model 1, Model 2 Model 2G 7 PAGE 257 MASS FLOW MEASUREMENT AND CONTROL CONTROLLER 1605 Use our 831 mass flow transducers and 825 mass flow controllers in combination with the Controller 1605 for many common gas-handling systems, including: • Single and multiple channel gas flow control • Leak testing • Gas blending • Ion beam etching, ion implantation, plasma deposition and CVD systems • Sputtering systems and crystal growing MASS FLOW TRANSDUCERS AND CONTROLLERS • Multi-channel display • Control flows independently or as ratios • Multiple analog I/O for data acquisition and control The 2 or 5 channel (input) Controller 1605 controls the 831 mass flow transducers and 825 mass flow controllers either independently or in ratio. For each of the transducers/ controllers, a front panel switch changes the display between flow rate and set-point value, and allows the input of a gas calibration factor for that device. The Controller 1605 operates independently or can be used with an external computer based control system. 7 PAGE 258 • High accuracy with excellent repeatability, standard and fast response options available • True measurement of mass flow - independent of pressure and temperature • Easy calibration for different gases • Easily to clean, easy to replace sensors and change range on site • Corrosion resistant • 825 units have integral normally closed valves with low dead volume for rapid purging The 831 mass flow transducers are compact, low cost units that output a high level electrical signal which is directly proportional to mass flow. The 825 mass flow controllers have the same measurement function as the 831 transducers but also have an integral servo valve which controls flow proportional to external voltage signal. Full scale ranges available sccm slm Accuracy with N2 or air1 Maximum differential pressure Seals Fittings Output signal (into 2000 Ω min load) Electrical supply Weight Display Number of channels (inputs) Electrical supply Inputs† From 831 or 825 From external set-point reference Outputs1 Flow signal Flow signal conditioned for gas Flow control voltage Power to 831 or 825 Valve over-ride Dimensions Width Height Depth Weight 3½ digits 2 or 5 115/230 V AC +10%, 50/60 Hz 0-5 or 0-10 V DC 0-5 or 0-10 V DC 0-5 or 0-10 V DC 0-1 V DC (air) yes + 15 V DC yes 9.5 inch (241 mm) 3.46 inch (88 mm) 14.76 inch (375 mm) 10 lb (4.5 kg) 1 For each channel (input) ORDERING INFORMATION 1-800-848-9800 PRODUCT DESCRIPTION Contoller 1605, 115 V, 2 channel Contoller 1605, 115 V, 5 channel ACCESSORIES Cable to 831 or 825 (15 ft, 4.6 m) 5, 10, 20, 50, 100, 200, 500 1, 2, 5, 10, 20 ±1% full scale 2 psi Viton or Kalrez Swagelok, VCR or VCO 0 - 5 or 0 - 10 V DC ±15 V DC ± 5%, regulated 1.1 lb (0.5 kg) 1 Calibration for gases other than N2 is achieved with gas correction factors or special tests. Calibration is referenced to gas at standard conditions, (0 °C and 760 torr). shop online: www.bocedwards.com ORDERING NUMBER W827-11-000 W827-21-000 ORDERING INFORMATION W829-99-305