Measurement and
control
Vacuum gauges
Active Pirani gauge
Active ion gauge
Active inverted magnetron gauge
Active wide range gauge
Active thermocouple gauge
Active strain gauge
Barocel capacitance manometers
224
227
229
230
231
232
233
Vacuum displays and controllers
Active ion gauge controller
TIC instrument controller
Active gauge controller
Pirani 501 and PRE10K
Active gauge display
Active digital display
Model 1575 Pressure Display
Model 652 Power Supply
237
238
243
244
245
246
247
248
Gauge and controller installation
examples
249
Pressure control
252
Capsule dial gauges, vacuum switches and
McLeod gauges
255
Mass flow measurement and control
[y
A
shop online: www.bocedwards.com
258
7
PAGE
221
as a stand-alone transducer connected to an appropriate power supply and
control system analog input.
VACUUM MEASUREMENT AND
CONTROL SYSTEMS
The BOC Edwards range of instruments offers:
• Measurement over the range 2000 to 10-11 mbar
• Advanced microprocessor based controllers
• Calibration of instruments to UK national standards
Selecting your vacuum gauge
BOC Edwards offers a wide choice of vacuum measurement and control
products - from dial gauges to microprocessor based gauge controllers.
Within each product range, there is a family of models designed to meet
the widest user specification.
The first step in selecting the right gauge to meet your application is to
decide the range of pressures that you want to measure at each of your
measuring points. The chart below indicates the broad pressure ranges
covered by the spectrum of BOC Edwards instruments: use this chart as a
primary guide to the choice of gauge head.
The second step is to establish your requirement for the output of the
pressure measurement. If you simply want an indication that a certain level
of vacuum has been reached (for example, to open a valve or start a
process), then a vacuum switch or Active gauge head alone may be appropriate. If you want to display the pressure locally, then a dial gauge may be
suitable. If you need the pressure display to be remote from the measurement point (for example, in a control panel) then select the Pirani 501,
Active Gauge Display, Active Gauge Controller or Active Digital Display,
depending on the features you require. (You will also need to select appropriate gauge head(s) to accompany these displays and controllers.) If your
control system (such as a PLC, PC or dedicated microprocessor controller) needs to know the pressure to make sequence decisions but you do
not need a separate vacuum display, then you can use an Active gauge head
7
10-11
10-10
10-9
10-8
10-7
UHV
10-6
HIGH VACUUM
10-5
10-4
Thirdly, you need to select a gauge suitable for the process gases and constructed to withstand exposure to the external environment of your vacuum system. Consider both whether the gauge will survive in the process
and also whether the process gases will effect the gauge's measurement.
For example, the measurement made by mechanical gauges (vacuum
switches, dial gauges, strain gauges and capacitance manometers) is not
affected by gas composition, whereas that made by other types of gauges
is gas dependent.
Calibration for different gases
All of our gauge heads are calibrated for dry nitrogen; the calibration for
dry air is the same. If you use thermal conductivity or ionization gauges
with gases other than nitrogen or air, you may need to apply a gas correction factor for an accurate indication of your system pressure. Please contact us if you need more information.
Gauge head installation
How you install the gauge head into your vacuum system will affect the
accuracy and reliability of your pressure measurement. For best performance we recommend that you:
• Connect the gauge head to your vacuum system with a straight, short
branch pipe. This pipe should have an internal diameter no less than that
of the gauge tube itself. Long, narrow or angled connections can cause
a significant measurement error. Note that the indicated pressure may
be higher or lower than the actual pressure.
• Connect the gauge head as close as possible to the point where you
want to measure the system pressure.
• Orient the gauge head so that it is vertical, with the connection to the
vacuum system at its base. This prevents debris falling into the gauge.
10-3
10-2
10-1
MEDIUM VACUUM
1
10
102
LOW VACUUM
PAGE
222
ACTIVE STRAIN GAUGE
CG16K
PIRANI 501 & PRE10K
ACTIVE THERMOCOUPLE GAUGE
ACTIVE PIRANI
CAPACITANCE MANOMETER
ACTIVE INVERTED MAGNETRON
WIDE RANGE GAUGE
ACTIVE ION GAUGE CONTROLLER
shop online: www.bocedwards.com
103
torr
The Active gauge concept
Barocel capacitance manometers
•
•
•
•
•
Operate from standard power supplies for simple installation
Gauge type identification signal and common 0-10 V DC output
Cable lengths of up to 100 m for remote operation
Range of microprocessor based Active Gauge Controllers
The Active gauge range with Active Gauge Controller give continuous
measurement from 2000 mbar to 10-11 mbar
• Low cost analog and digital displays and controllers available
BOC Edwards Active vacuum gauges and controllers are a new generation
of instruments that give unrivalled performance, flexibility and ease of use.
Traditionally, vacuum gauges consist of a sensing element and a separate
display/controller. With BOC Edwards' Active gauges, the functions that
are specific to the gauge type (such as signal conditioning and specialized
power supplies) have been moved from the dedicated controller and
incorporated in the head itself. Now the gauge head can be used as a standalone transducer: it requires only a simple power supply and it provides a
2 to 10 V output. Alternatively, you can connect the gauges to a BOC
Edwards display or universal controller: these will accept all gauge types in
any combination for the most flexible solution.
The Active gauge range
Active Pirani Gauge A range of Pirani gauges measuring from atmosphere to 10-4 mbar, with integral set-point for OEM use.
Active Ion Gauge A new range of small self-contained active ion gauges
with a measuring range from 5 x 10-2 to 5 x 10-10 torr. The gauges incorporate degas, automatic emission current switching, automatic filament
protection, a push button adjustable set point and status indicating LED.
Active Inverted Magnetron Operating through the range 10-2 mbar
to 10-9 mbar, with integral set-point for OEM use. A low external magnetic
active field version is available.
Wide Range Gauge
A range of gauges measuring from atmosphere to 10-9 mbar with a linear
output and integral set-point for OEM use. A low external magnetic field
version is available.
Active Thermocouple Gauge A range of gauges measuring from
atmosphere to 10-3 mbar, with integral setpoint for OEM use and LED
indication of vacuum status.
Active Strain Gauge A range of strain gauges measuring from 2000
mbar to 1 mbar. This type of gauge is extremely rugged and offers accurate, gas independent measurement.
Active Ion Gauge Controller The Active Ion Gauge Controller can
operate one or two ion gauge tubes, as well as an Active low vacuum interlocking gauge. It has a measurement range of 5 × 10-3 to 2 × 10-11 mbar,
with 3 levels of emission current and electron bombardment type degas.
The Barocel 655, 658 and 659 capacitance manometers incorporate a
hermetically sealed and heated enclosure containing the pressure sensing
element and critical electronic circuitry. This means that changes in ambient temperature, humidity and atmospheric pressure have minimal effect
on the reading giving excellent long term zero repeatability and stability.
The three models offer a choice of 45, 100 or 123 °C temperature regulation.
• Full scale ranges from 0.05 torr to 1000 mbar
• Temperature controlled
Active controllers and displays
The BOC Edwards Active range of gauges can operate as stand-alone pressure transducers requiring only a simple power supply and providing a 2 to
10 V analog output.
TIC Instrument Controller A compact instrument controller with a
large clear graphical display, an intuitive user interface and serial communications providing full remote control and data logging functions for one
or more TIC systems via a new WindowsTM based PC program.
The controller supports automatically recognizes up to three gauges from
the BOC Edwards range (excluding IGC and Barocels), with coverage from
2000 to 6.6 x 10-10 mbar
Active Gauge Controller The Active Gauge Controller (AGC) is a
universal, intelligent vacuum controller capable of operating up to 6 Active
gauges in any combination. This gives vacuum measuring capability from
2000 mbar to 2 × 10-11 mbar. The standard AGC is supplied with 6 independent setpoint outputs which can be controlled by any of the gauges.
Options include RS232 connection for full remote control and single or triple gauge display.
Active Gauge Display The Active Gauge Display (AGD) is a low cost
controller capable of operating two Active gauge heads (of the same type)
from the following: Pirani, inverted magnetron and thermocouple. The
AGD has a clear, easy-to-read analog display and is available with two
optional 3A change-over relays for process control.
Active Digital Display The Active Digital Display (ADD) offers control
of a single Active strain gauge or Barocel capacitance manometer. The
ADD has a clear, four-digit display with selectable pressure units. Like the
Active Gauge Display, the ADD has two optional 3A change-over relays
for process control.
Other instruments
In addition to the range of Active gauges, BOC Edwards offers a variety of
more traditional vacuum measurement and control products.
Our simple dial gauges provide rugged, local indication of pressures from
atmosphere to 1 mbar and are ideal for vacuum chambers in an industrial
environment. Vacuum switches, with high current ratings, give a simple
method of directly controlling loads without the need for additional relays
or power supplies.
The Pirani 501 display with PRE10K gauge head offers a simple, low cost
solution to measurement in the range 10 to 10-3 mbar. It is ideal for benchtop use in a laboratory, or for fitting into an industrial control panel.
The range of Vacustat McLeod gauges offers traditional absolute vacuum
measurement for laboratory or light industrial applications.
shop online: www.bocedwards.com
MEASUREMENT AND CONTROL
The Barocel manometers provide high accuracy, high stability, gas independent pressure measurement making them ideal for a wide range of industrial process, research and calibration applications. Their Iconel/Monel
construction means that they can also be used with corrosive and radioactive gases.
• Accuracy 0.15% of reading
• True total pressure measurement, independent of gas species
• Very high corrosion resistance
• Fast response
• Wide range, 4 decade range with single head
• Excellent stability
7
PAGE
223
APG ACTIVE PIRANI GAUGE
ATMOSPHERE TO 10 -4 mbar
TECHNICAL DATA
C = 0.55
(14)
• Integral adjustable set point for process control
• Medium and low pressure versions available
• Choice of stainless steel or aluminum gauge tubes with a selection of
vacuum fittings and filament material to suit your application
• Low output impedance and integral Faraday shield gives high level of
noise immunity and permits long cable runs (up to 100 m)
• Electronics contained within the gauge head - allows stand-alone
operation
Internal volume
Weight
Aluminum
Stainless steel
Socket connector
Vacuum fitting
Standards
Electronic design
Electrical noise immunity
Flame-retardant casing
Atmosphere to 10-3 mbar
Atmosphere to 10-4 mbar
6 bar absolute
20 to 36 V DC (max 1 V ripple)
1.5 W max
2 to 10 V DC
Set vacuum and set atmosphere
5% to 95% full-scale voltage
7% full-scale voltage
±2% full-scale voltage
40 V DC, 100mA max
5 to 60 °C
0 to 70 °C
Gold-coated tungsten
Platinum/rhodium (90/10)
Aluminum HETF, nickel, fluoroelastomer, PTFE, stainless steel 316
NW: 6cm3 15mm O.D.: 10cm3
120g
200g
8 way FCC68 compatible
NW 16 or NW 25 or 15 mm O.D.
tube
EN 61010-1
EN 50081-1, EN 50082-1
UL94
V
7
Pressure range
APG-M
APG-L
Maximum over pressure
Power supply
Power consumption
Output signal
Adjustments
Set point
Range of set point
Fixed hysterisis
Level setting resolution
Rating
Temperature range
Operating
Storage
Materials exposed to vacuum
Filament
APG-M, APG-L
APG-MP
Other materials
A
PAGE
224
3.86 (98)
ORDERING INFORMATION 1-800-848-9800
B
PRODUCT DESCRIPTION
A
S
2.20 (56)
NW16
NW25
15 mm OD
1.34 (34)
A
B
0.86 (22)
0.86 (22)
2.05 (52)
4.72 (120)
4.88 (124)
5.91 (150)
C = Allowance for cable and connector
11
10
9
8
APG-L
V
7
6
5
APG-M, APG-MP
4
3
2
1
-5
10
10
-4
10
-3
10
-2
10
-1
10
0
10
1
10
2
10
3
APG-M-NW16 AL
APG-M-NW16 ST/ST
APG-M-NW25 ST/ST
APG-M 15 mm O.D. ST/ST
APG-MP-NW16 ST/ST
APG-MP-NW25 ST/ST
APG-MP 15 mm O.D. ST/ST
APG-L-NW16 AL
APG-L-NW16 ST/ST
APG-L-NW25 ST/ST
APG-L 15 mm O.D. ST/ST
The above gauges may be supplied with a calibration certificate.
Active gauge cables FCC68 compatible connections at both ends
0.5 m
1m
3m
5m
10 m
15 m
25 m
50 m
100 m
Non-standard lengths available on request
torr
shop online: www.bocedwards.com
ORDERING NUMBER
D021-71-000
D021-75-000
D021-72-000
D021-76-000
D021-85-000
D021-82-000
D021-86-000
D021-73-000
D021-77-000
D021-74-000
D021-78-000
Call for details
D400-01-005
D400-01-010
D400-01-030
D400-01-050
D400-01-100
D400-01-150
D400-01-250
D400-01-500
D400-01-999
APGX ACTIVE LINEAR PIRANI GAUGE
ATMOSPHERE TO 10 -4 mbar
TECHNICAL DATA
Pressure range
APGX-M
APGX-L
Response time
Maximum over pressure
Power supply
Power consumption
APGX-M & APGX-MP
• Integral electronics with 1 volt per decade linear output allows standalone operation and makes for easy integration into OEM control
systems, with up to 100m cable runs.
• New diagnostics facility enables gauge to report out of range, broken
filament and calibration errors.
• Two, easy to use, integral push-button adjustable set points, for process
control and/or diagnostics reporting.
• Innovative electronics design enables compliance with low emission and
high immunity EMC standards.
• Corrosion resistant versions available.
• Medium and low pressure versions available.
• Choice of stainless steel or aluminum gauge tubes with a selection of
vacuum fittings and filament materials to suit your application.
Stainless steel tube
C = 0.55
(14)
Filament
APGX-L & APGX-M
APGX-MP
Internal volume
Weight
Aluminum tube
Stainless steel tube
External interface connectors
Interface cables
B
3.86 (98)
Vacuum fitting
Standards
Electronic design
Electrical noise immunity
Flame-retardant casing
Enclosure rating
Pin allocation
1. Power supply positive
2. Power supply common
3. Gauge output
4. Gauge identification
A
2.20 (56)
NW16
NW25
15 mm OD
Diagnostics
Under range
Over range
Broken filament
Calibration error
Adjustments
Set points (2 off)
Maximum voltage
Maximum current
Temperature range
Operating temperature
Storage temperature
Materials exposed to vacuum
Aluminum tube
1.34 (34)
A
B
0.86 (22)
0.86 (22)
2.05 (52)
4.72 (120)
4.88 (124)
5.91 (150)
C = Allowance for cable and connector
10
9
8
7
V
6
5
4
3
2
1
0
-4
10
APGX
10
-3
10
-2
10
-1
10
0
10
1
10
2
10
3
torr
shop online: www.bocedwards.com
2.0 to 9.0 V DC over the range
1000 to 10-4 mbar
3.0 to 9.0 V DC over the range
1000 to 10-3 mbar
1.9 V
9.1 V
9.5 V
9.6 V
Set atmosphere & set vacuum
2 open collector transistor
40 V DC
100 mA max
5 to 55° C
0 to 70° C
Aluminum (HETF), Nickel,
Fluoroelastomer, PTFE
Stainless steel (316), Nickel,
Fluoroelastomer, PTFE
Gold coated tungsten
Platinum/rhodium (90/10)
26 cm3
0.12 Kg
0.20 Kg
8 way FCC68 socket
Use existing range of active
gauge cables
NW16, NW25 & 15 mm OD
EN 61010-1
EN 50081-1, EN 50082-2
UL 94
IP 40
5.
6.
7.
8.
Signal common
Set-point 1 output
Remote calibration input
Set-point 2 output
MEASUREMENT AND CONTROL
Output signal
APGX-L
Atmosphere to 10-3 mbar
Atmosphere to 10-4 mbar
100 msec in the range 1000 to
1 x 10-3 mbar
10 bar absolute (145 psi)
14.5 to 36 V DC
1.5 W max (M and MP version)
2.0 W max (L version)
7
PAGE
225
ORDERING INFORMATION 1-800-848-9800
PRODUCT DESCRIPTION
7
ORDERING NUMBER
APGX-M-NW16 AL
APGX-M-NW16 ST/ST
APGX-M-NW25 ST/ST
APGX-M 15 mm O.D. ST/ST
APGX-MP-NW16 ST/ST
APGX-MP-NW25 ST/ST
APGX-MP 15 mm O.D. ST/ST
APGX-L-NW16 AL
APGX-L-NW16 ST/ST
APGX-L-NW25 ST/ST
APGX-L 15 mm O.D. ST/ST
The above gauges may be supplied with a calibration certificate.
Active gauge cables FCC68 compatible connections at both ends
0.5 m
1m
3m
5m
10 m
15 m
25 m
50 m
100 m
Non-standard lengths and screened cables available on request
Other accessories and supporting products
Wire mesh filter replacement kit (5 off)
NW10/16 sintered filter
Surge protector
D023-71-000
D023-75-000
D023-72-000
D023-76-000
D023-85-000
D023-82-000
D023-86-000
D023-73-000
D023-77-000
D023-74-000
D023-78-000
Call for details
D400-01-005
D400-01-010
D400-01-030
D400-01-050
D400-01-100
D400-01-150
D400-01-250
D400-01-500
D400-01-999
D021-71-810
D021-10-760
D400-06-000
PAGE
226
shop online: www.bocedwards.com
N EW
S versions
AIGX ACTIVE ION GAUGE
5 x 10 -2 torr to 5 x 10 -10 torr
6
115
70
70
106
MEASUREMENT AND CONTROL
85
98
94
107
D versions
125
70
70
96
A compact active ion gauge with dual yttria coated iridium filaments, a wide
measuring range from 5 x 10-2 to 5 x 10-10 torr (6.6 x 10-2 to 6.6 x 10-10
mbar) and a 1 Volt/decade linear output.
The new AIGX gauge from BOC Edwards incorporates all the benefits of
the industry standard active gauging concept, with integral electronics and
replaceable tube. The gauge has a degas facility and includes features to
protect and extend the life of the filaments.
75
117
8.7
8
The AIGX benefits from extremely low emissions of charged particles,
which makes it an excellent choice for processes where background noise
is undesirable.
7
7
6
PAGE
227
5
mbar
V
Features & benefits
88
104
• Full 8-decade measurement capability, to 5 x 10-10 torr
(6.6 x 10-10 mbar).
• Two versions available, each with three vacuum coupling variants:
- ‘D’ versions have a 9-pin ‘D’ connector and standard interface.
- ‘S’ versions have enhanced functionality and are fully compatible with
the range of BOC Edwards controllers.
• Up to a thirty-fold reduction in charged particle process contamination
compared to leading competitors.
• Automatic filament protection against switching on at atmosphere and
running or degassing at high pressure.
• Gauge sensitivity remains constant over the whole measuring range,
thus maintaining output accuracy at higher pressures.
• Continuous pressure measurement output during degas.
• Innovative design eliminates the effects of X-ray limits.
• Bi-color LED gives local indication of gauge status.
• Wide input voltage range.
• Electronics very easily removable for bakeout at up to 200°C.
• ‘S’ versions provided with seamless automatic emission current
switching, for prolonged filament life.
• ‘S’ versions provided with diagnostic outputs indicating ‘emission off’,
‘broken filament’ and ‘overpressure trip’ to help with troubleshooting.
• ‘S’ versions provided with a push-button adjustable set point.
4
3
Pascal
2
1
0
-10
-9
-8
10
10
10
-7
10
10
-6
-5
-4
10
10
Pressure
-3
10
-2
10
-1
10
10
0
10
1
TECHNICAL DATA
Pressure range
Power supply
Power consumption
Output signal
Response time
Tube details
Accuracy*
Repeatability
Filaments
Degas
Emission current
‘S’ versions
‘D’ versions
Maximum overpressure
shop online: www.bocedwards.com
5 x 10-2 to 5 x 10-10 torr
(6.6 x 10-2 to 6.6 x 10-10 mbar)
+14.5 to +30.0 V dc
Normal operation: 7W (Max),
Degas: 14W (Max)
Linear, 1 Volt / decade
> 10-8 torr (1.33 x 10-8 mbar) ≈100ms
< 10-8 torr (1.33 x 10-8 mbar) ≈1-2s
Typically +/-15% of reading
(better with optional calibration)
+/-5%
Manually selectable dual yttria coated
iridium
Three minute electron bombardment cycle
0.1mA & 1mA
Automatically switches at 10-5 torr
(1.33 x 10-5 mbar) to protect filaments at
higher pressures
Manual control
10 bar absolute
NEW
Materials exposed to vacuum
Vacuum fittings
Bakeout
Diagnostics (error/status gauge output)
Note: all errors require a
manual off/on re-start
Emission off
(supply on, emission off)
Emission error
(e.g. selected filament broken)
Overpressure trip
(protection against turn-on
at atmosphere)
Diagnostics (error/status - LED)
Supply connected, emission off
Emission initiation
Normal operation
Degas
Overpressure error
Emission error
Protection
High pressure shutdown
7
PAGE
228
Tungsten, Tantalum Pt clad Mo, Yttria
coated Iridium, St St 304L and UHV
compatible glass/ceramic
NW25, DN16CF & DN40CF
(CF couplings rotatable)
Max 200° C with electronics removed
‘S’ versions‘D’ versions
9.0 V
10.0 V
9.5 V10.0 V
Pin allocation
Gauge on/off control
Supply common
Signal output
Supply positive
Set point
Degas status
Degas on/off control
Signal common
ID resistor
Emission current select
Emission status
‘S’ versions‘D’ versions
7 1
2 2
3 3
1 4
8 - 5
6 6
5 7
4 - 8
- 9
*
Accuracy is reduced at the lower limit of the measuring range
†
EN 61326 supersedes EN 50081-1 & EN 50082-2
9.7 V10.0 V
ORDERING INFORMATION 1-800-848-9800
Amber
Green / amber alternating flash
Green
Green flash
Red
Red flash
In all cases, the gauge will shut down at
> 5 x 10-2 torr (6.6 x 10-2 mbar), requiring
an off/on cycle to re-start
Degas
In degas, if the pressure rises above
1 x 10-4 torr (1.33 x 10-4 mbar), degas will
be turned off, but the degas timer will
continue to run. Degas will automatically
resume when the pressure falls below
3 x 10-5 torr (4 x 10-5 mbar) if the degas
timer has not timed-out.
Adjustments
No user calibration adjustments required
Set point (open collector transistor)
1 on ‘S’ versions only
Maximum voltage
30 V dc
Maximum current
100 mA max
Temperature range
Operating temperature
0° to +40° C
Storage temperature
-30° to +70° C
External interface connectors
‘S’ versions
8-way FCC68/RJ45 socket
‘D’ versions
9-way ‘D’ type plug (pins)
Interface cables
‘S’ versions
Using a BOC Edwards instrument
controller or 24 V supply, a maximum cable
run of 30m may be achieved using the cables
specified. (Lower supply voltages will
reduce cable lengths)
‘D’ versions
Maximum cable lengths for given conductor
cross sections and supply voltages are
shown in the table below.
Conductor24 V Supply15 V Supply
section
0.75 mm2100 m10 m
0.50 mm275 m6 m
0.34 mm250 m4.5 m
0.22 mm230 m3 m
Weight
NW25DN16CFDN40CF
‘S’ & ‘D’ versions
260g300g 510g
Standards
Electronic design
EN 61010-1
Electromagnetic compatibility EN 61326 Industrial Location, Class B
Emissions †
EN 61000-4-6 (conducted RF at 10 V)
Enclosure rating
IP30
Compatibility
The AIGX is supported by all new AGC’s
with serial numbers greater than
006737476 (non-RS 232 versions) and
006741851 (RS 232 versions).
Earlier controllers will require a software
upgrade.
PRODUCT DESCRIPTION
Gauges
AIGX-S-NW25
AIGX-S-DN16CF
AIGX-S-DN40CF
AIGX-D-NW25
AIGX-D-DN16CF
AIGX-D-DN40CF
ACCESSORIES & SPARES
ORDERING NUMBER
D048-50-000
D048-51-000
D048-52-000
D048-60-000
D048-61-000
D048-62-000
ORDERING NUMBER
Electronics modules
AIGX-S
D048-50-800
AIGX-D
D048-60-800
Spare fuses
AIGX spare fuse kit (Pk 5)
D048-50-805
Replacement tubes
NW25
D048-50-801
DN16CF
D048-51-801
DN40CF
D048-52-801
Cables
‘ S’ versions (include FCC68 compatible connections at both ends)
0.5m active gauge cable
D400-01-005
1.0m active gauge cable
D400-01-010
3.0m active gauge cable
D400-01-030
5m active gauge cable
D400-01-050
10m active gauge cable
D400-01-100
15m active gauge cable (24 AWG)
D400-05-150
30m active gauge cable (24 AWG)
D400-05-300
‘ D’ versions
Supplied by customer
Non standard lengths and screened cables available on request
Other accessories and supporting products
NW25 trapped ‘ O’ ring carrier (Viton)
C105-14-490
DN16CF annealed copper gasket (Pk 5)
C100-01-270
DN16CF M4 nut, bolt and washer kit (Pk 25)
C100-01-630
DN40CF annealed copper gasket (Pk 5)
C100-05-270
DN40CF M6 nut, bolt and washer kit (Pk 25)
C100-05-630
Surge protector
D400-06-000
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AIM ACTIVE INVERTED MAGNETRON
10 -2 TO 10 -9 mbar
TECHNICAL DATA
0.59
(15)
Ø2.84 (72)
4.57 (116)
0.79
(20)
1.61 (41)
A = Allowance for cable and connector
11
10
9
ORDERING INFORMATION 1-800-848-9800
PRODUCT DESCRIPTION
AIM-S-NW25
AIM-S-NW35CF
AIM-X-NW25
AIM-X-NW35CF
The above gauges may be supplied with a calibration certificate.
Non-standard lengths available on request
AIM-S
8
AIM-X
V
7
6
5
4
3
2
10
-8
10
-7
10
-6
10
-5
10
-4
EN 61010-1
EN 50081-1, EN 50082-1
UL94
Replacement electronics and magnet housing
AIM-S
AIM-X
Replacement body tube assembly NW25
Replacement body tube assembly NW35CF
Body tube service kit for NW25
Body tube service kit for NW35CF
Active gauge cables FCC68 compatible connections at both ends
0.5 m
1m
3m
5m
10 m
15 m
25 m
50 m
100 m
Ø3.11 (79)
-9
5 - 60 °C
0 - 70 °C
300 °C (electronics removed)
Stainless steel 304, 316 and 347
Fluoroelastomer, glass
Copper, ceramic
23 cm3
700 g
8 way FCC68 compatible
NW25 or NW35CF
ACCESSORIES & SPARES
A = 0.43
(11)
10
10-2 to 10-9 mbar
6 bar absolute
13.5 to 36 V DC (max 1 V ripple)
2 W maximum
2 to 10 V DC
10
-3
10
-2
10
-1
torr
shop online: www.bocedwards.com
ORDERING NUMBER
D146-41-000
D146-61-000
D146-42-000
D146-62-000
Call for details
MEASUREMENT AND CONTROL
• Integral, adjustable set-point for process control
• Extended range AIM-X with linear output, measuring down to
10-9 mbar
• AIM-S compatible with previous gauges
• Improved electronics offers reduced ion current at higher pressure and
so longer intervals between cleaning
• Unique striker aids rapid striking even at high vacuum or in
contaminating conditions
• Interchangeable body tube - rapid replacement without pre-calibration
• Electrode service kit allows user cleaning and maintenance
• Standard analog 2 to 10 V DC output, plus gauge identifier signal
Pressure range
Maximum over pressure
Power supply
Power consumption
Output signal
Temperature range
Operating
Storage
Baking (NW35CF)
Materials exposed to vacuum
NW25 version
NW35CF version
Internal volume
Weight
Socket connector
Vacuum fitting
Standards
Electronic design
Electrical noise immunity
Flame-retardant casing
ORDERING NUMBER
D146-41-800
D146-42-800
D145-45-801
D146-61-801
D145-45-802
D146-61-802
D400-01-005
D400-01-010
D400-01-030
D400-01-050
D400-01-100
D400-01-150
D400-01-250
D400-01-500
D400-01-999
7
PAGE
229
10
WRG ACTIVE WIDE RANGE GAUGE
ATMOSPHERE TO 10 -9 mbar
V
8
6
4
WRG
2
10
-9
10
-8
10
-7
10
-6
10
-5
10
-4
10
-3
10
-2
10
-1
10
0
10
1
10
2
10
3
torr
TECHNICAL DATA
5 to 60 ºC
0 to 70 ºC
Stainless steel (AISI 304, 316, 321, 347),
fluoroelastomer, soda lime glass, tungsten,
trace of nickel and nickel iron
26 cm3
800 g
8 way FCC68 socket
9 way D-type socket
NW25 or NW35CF
EN 61010-1
EN 50081-1, EN 50082-2
UL 94
IP 40
IP 44
PRODUCT DESCRIPTION (02)
4.57 (116)
3.54 (90)
Ø2.76 (70)
Internal volume
Weight (NW25 version)
Socket connector
S version
D version
Vacuum flange
Standards
Electronic design
Electrical noise immunity
Flame-retardant casing
Enclosure rating
S version
D version
Atmosphere to 10-9 mbar
6 bar (87 psia)
+14.5 to +36 V DC
2W
1.8 to 10.2 V DC
Set trip and set atmosphere
1 open collector transistor
40 V DC
100 mA
ORDERING INFORMATION 1-800-848-9800
0.91
(23)
Ø2.56 (65)
4.17 (106)
0.24
(6)
0.35
(9)
The WRG meets EMC requirements for both light industrial emissions and
heavy industrial immunity. A D-type connector version with a higher IP
rating and cable strain relief is also available.
4.17 (106)
PAGE
230
For ease of operation and more accurate pressure reading, the vacuum
setting of the Pirani gauge is set automatically, while a single pushbutton
sets atmospheric pressure. The WRG has an easy-to-program set-point
which operates over the entire measurement range.
0.55
(14)
7
The Active WRG is a combined Pirani and magnetron gauge with a measurement range from atmosphere to 10-9 mbar. The intergral microprocessor signal processing gives seamless transition between Pirani and
magnetron outputs and provides a linear output (on linear log scale). The
magnetron uses an advanced technique for highly reliable striking, even at
high vacuum or in relatively contaminated conditions. To optimize the lifetime of the gauge, the magnetron HT voltage is reduced after ignition and
the magnetron operates with a low discharge current.
Pressure range
Maximum overpressure
Power supply
Maximum power consumption
Output signal
Adjustments
Set point
Maximum voltage
Maximum current
Temperature range
Operation
Storage
Materials exposed to vacuum
WRG-S-NW25
WRG-S-NW40CF
WRG-D-NW25
WRG-SL-NW25
The above gauges may be supplied with a calibration certificate.
SPARES
Electronics and magnet housing
WRG-S-NW25
WRG-D-NW25
Replacement body tube assembly
NW25
NW40CF
Electrode assembly kit
Pirani tube replacement kit
Full body tube service kit
shop online: www.bocedwards.com
ORDERING NUMBER
D147-01-000
D147-03-000
D147-02-000
D147-11-000
Call for details
ORDERING INFORMATION
D147-01-800
D147-02-800
D147-01-801
D147-03-801
D147-01-802
D147-01-803
D147-01-804
ATC ACTIVE THERMOCOUPLE GAUGE
65 TO 1.3 × 10 -3 mbar
TECHNICAL DATA
ATC-E electronics module
Power supply
Power consumption
Output signal
Adjustments
Integral adjustable set point with LED indication
Choice of medium and low pressure gauge tubes
Accepts thermocouple tubes from other manufacturers
Runs from standard power supply 13.5 to 36 V DC
4.53 (115)
Ø1.26 (32)
Ø2.28 (58)
2.20 (56)
2% to 90% full scale voltage
12% full scale voltage
±2% full scale voltage
40 V DC, 100 mA max
5 - 60 °C
0 - 70 °C
110 g
8 way FCC68 compatible
EN 61010-1
EN 50081-1, EN 50082-1
UL94
65 to 65 × 10–2 mbar
1.3 to 1.3 × 10–3 mbar
10 bar absolute
3 bar absolute
55 g
1 cm3
8 cm3
!/8 inch NPT
ORDERING INFORMATION 1-800-848-9800
PRODUCT DESCRIPTION
0.47
10
ACCESSORIES & SPARES
(12)
0.63
(16)
A = 0.79
(20)
11
ATC-ED
ATC-EM
ATC-E electronics module
ATC-D-!/8 inch NPT gauge tube
ATC-M-!/8 inch NPT gauge tube
The above gauges may be supplied with a calibration certificate.
A = Allowance for cable and connector
!/8 inch NPT to NW16 adaptor
Active gauge cables FCC68 compatible connections at both ends
0.5 m
1m
3m
5m
10 m
15 m
25 m
50 m
100 m
9
8
7
V
6
ATC-M
5
ATC-D
4
3
2
1
10
-5
10
-4
10
-3
10
-2
10
-1
10
0
10
1
10
2
10
3
Non-standard lengths available on request
torr
shop online: www.bocedwards.com
ORDERING NUMBER
D335-14-000
D355-15-000
D351-08-000
D355-12-000
D355-13-000
Call for details
ORDERING NUMBER
D355-12-050
D400-01-005
D400-01-010
D400-01-030
D400-01-050
D400-01-100
D400-01-150
D400-01-250
D400-01-500
D400-01-999
MEASUREMENT AND CONTROL
•
•
•
•
Set point
Range of set point
Fixed hysteresis
Level setting resolution
Rating
Temperature range
Operating
Storage
Weight
Socket connector
Standards
Overall design
Electrical noise immunity
Flame-retardant casing
ATC-D, ATC-M gauge tubes
Pressure range
ATC-D
ATC-M
Maximum over pressure
ATC-D
ATC-M
Weight
Internal volume
ATC-D
ATC-M
Vacuum fitting
13.5 to 36 V DC (maximum 1 V ripple)
540 mW max
2 to 10 V DC
Adjust set point visually with
potentiometer
7
PAGE
231
ASG ACTIVE STRAIN GAUGE
2000 TO 1 mbar
TECHNICAL DATA
Full scale pressure ranges
Maximum overpressure
Burst pressure
Accuracy
Stability
Temperature coefficient
Power supply
Power consumption
Output signal
Adjustments
Temperature range
Operating
Storage
Materials exposed to vacuum
Weight
Electrical connector
Head only
With adaptor cable
Vacuum fitting
Standards
Electronic design
Electrical noise immunity
Note: ASG adaptor cable supplied separately.
•
•
•
•
•
•
1000 or 2000 mbar full scale versions available
Accuracy ±0.2% full scale with good long term stability
Measures true pressure - non-gas dependent
Rugged, corrosion resistant
High burst pressure
Fast response
3.94 (100)
3.03 (77)
0.49 (12.5)
Non-standard lengths available on request
NW16
1
V
ASG 1000 mbar
0.1
ASG 2000 mbar
0.01
0.001
10
100
1000
ORDERING NUMBER
D357-26-000
D357-28-000
D357-25-000
D357-27-000
D400-03-060
ORDERING NUMBER
Active gauge cables (including FCC68 compatible connections at both ends)
0.5 m
D400-01-005
1m
D400-01-010
3m
D400-01-030
5m
D400-01-050
10 m
D400-01-100
15 m
D400-01-150
25 m
D400-01-250
50 m
D400-01-500
100 m
D400-01-999
10
1
EN 61010
EN 50081-1, EN 50082-1
ASG NW16 1000 mbar
ASG NW16 2000 mbar
ASG !/8 inch NPT 1000 mbar
ASG !/8 inch NPT 2000 mbar
ASG adaptor cable (0.5 m) miniature DIN to female
FCC68
ACCESSORIES & SPARES
0.1
Miniature DIN
8 way FCC68 compatible
!/8 inch NPT male or NW16
PRODUCT DESCRIPTION
PAGE
232
1.34 (34)
10 - 50 °C
-40 to 125 °C
Stainless steel 316
150 g
ORDERING INFORMATION 1-800-848-9800
1.02 (26)
7
1000 or 2000 mbar
2 × full scale
180 bar
±0.2% full scale
0.2% full scale
0.05% full scale per °C
13.5 to 36 V DC
0.4 W
0 to 10 V DC
Set full scale and set zero
10000
torr
shop online: www.bocedwards.com
BAROCEL 600 CAPACITANCE
MANOMETER
Output signal, linear with pressure 0-10 V DC
Electrical supply
Supply
±15 V DC ±5%
Regulation
±1% at 30 mA
RFI suppression
Standard on all models
Weight
0.7 kg
1 Ranges to 10,000 torr also available.
2 Barocel 600 with accuracy 0.5% of reading also available.
0.40
(10.16)
Ø0.50
(12.70)
2.20 (56)
ORDERING INFORMATION 1-800-848-9800
:
0
D
The Barocel 600 absolute pressure transducer is an advanced design
capacitance manometer which uses patented technology to improve zero
stability with temperature changes and pressure overloads. The welded
integral vacuum reference contains a gettering material to ensure longterm stability.
Connector Type
Terminal Block
15 pin sub D-connector
0
2
3
The Barocel 600 is the ideal replacement for McLeod, Pirani, or thermocouple gauge. The pressure measurement is gas independent because pressure is sensed by measurement of the displacement of a thin metal
membrane caused by pressure changes.
Barocel type
Absolute pressure
With removable filter and flush option
Gauge pressure
W6
-
1
-
1
7
PAGE
233
Dirty or corrosive gases, and even radioactive gases such as tritium, may
be measured without affecting accuracy because the electrically active portion of the sensor is contained in the sealed vacuum reference.
Pressure range*
10 torr
10 mbar
100 torr
100 mbar
1000 torr
1000 mbar
The transducer’s analog output is directly proportional to pressure and
can be displayed with a BOC Edwards display or controller, or recorded
by data acquisition system.
• Wide range - 4 decades
• High accuracy - 0.15% of reading
• High resolution - 0.01% full scale
• True total pressure, reading independent of gas composition
• High level DC output - 0-10 volts, linear with pressure
• Superior zero stability - patented design eliminates errors due to
temperature and overpressure effects. Repeats within 0.01% full scale
after exposure to 2.4 bar.
• Versatile - compatible with a variety of displays and controllers
• Corrosion resistant - only Inconel and Monel exposed to the process.
21
22
31
32
41
42
Pressure fitting
!/2 inch od tube
8VCR
8VCO
NW16
1
6
7
8
* Other ranges are available
TECHNICAL DATA
0-10, 0-100, 0-1000 mbar
0-10, 0-100, 0-1000 torr
Accuracy2
0.15% of reading
Resolution
< 1 in 10000
Operating temperature
0 - 65 °C
Temperature effect on zero
< 0.005% full scale/°C
Temperature effect on sensitivity < 0.02% reading/°C
Overpressure without damage
1.25 x full scale range or
2.4 bar (whichever is greater)
Overpressure effect
Repeats within 0.01% full scale
after 2.4 bar exposure
Material exposed to process
Inconel and Monel
Internal volume
8.3 cm3 (includes ½ inch Ø tube)
Time constant
8 ms
MEASUREMENT AND CONTROL
Ø3.00 (76.20)
2.60 (66.27)
ACCESSORIES
Pressure ranges available1
Barocel 600 cables
Adaptor, terminal to Active Controller/ Display
Terminal to Model 1575 Pressure Display
D-connector to Model 1575 Pressure Display
Terminal to Model 1800 Pressure Controller
D-connector to Model 1800 Pressure Controller
Terminal to Model 1501C Pressure Controller
D-connector to Model 1501C Pressure Controller
l
shop online: www.bocedwards.com
ORDERING INFORMATION
D400-03-010
W189-97-005
W189-92-005
W189-97-005
W189-92-005
W189-97-005
W189-92-005
2.20
(55.88)
2.61
(66.30)
Ø0.50
(12.70)
Ø3.00
(76.20)
3.00 (76.20)
4.00 (101.60)
5.12 (130.05)
0.44
(11.18)
24.00
(609.60)
BAROCEL 622 BAKEABLE CAPACITANCE
MANOMETER
1.69
(42.93)
4 x Ø0.187 (4.75)
6.00 (152.40)
ORDERING INFORMATION 1-800-848-9800
:
The Barocel 622 is an adaptation of the proven Barocel 600, with the same
high performance features. In the Barocel 622, the signal conditioning electronic components are separated from the sensor which allows it to be
operated up to 200° C. Typical applications are processes involving condensable gases, some nuclear processes, and those requiring high temperature sterilization.
A temperature sensor inside the 622 transducer head provides zero sensitivity compensation to maintain accuracy over a wide temperature range.
A cable connector on the electronics package helps to simplify installation.
An integral vacuum reference of all-welded construction contains gettering
material to ensure long term stability and eliminates the need for reference
vacuum pumps.
7
PAGE
234
21
31
41
22
32
42
W
6
2
2
-
The Barocel 622 is the ideal replacement for McLeod, Pirani, or thermocouple gauges. The pressure measurement is gas independent because
pressure is sensed by measurement of the displacement of a thin metal
membrane caused by pressure changes.
The transducer’s analog output is directly proportional to pressure and
can be displayed with a BOC Edwards display or controller, or recorded
by data acquisition system.
TECHNICAL DATA
Pressure ranges1
Accuracy2
Resolution
Operating temperature
Sensor
Signal conditioner
Temperature effect on zero
Temperature effect on sensitivity
Overpressure without damage
Overpressure effect
Material exposed to process
Internal volume
Time constant
Output signal, linear
Electrical supply
Supply
Regulation
RFI suppression
Weight
0-10, 0-100, 0-1000 torr
0-10, 0-100, 0-1000 mbar
0.15% of reading
< 1 in 10000
-
1
3
6
7
8
Dirty or corrosive gases, and even radioactive gases such as tritium, may
be measured without affecting accuracy because the electrically active portion of the sensor is contained in the sealed vacuum reference.
Pressure range
10 torr
100 torr
1000 torr
10 mbar
100 mbar
1000 mbar
Barocel 622 to AGC adaptor cable
Barocel 622 to 1575 cable
Barocel 622 to 1501 cable
0 to 200 °C
0 to 65 °C
< 0.005% full scale/°C
< 0.02% reading/°C
1.25 x full scale range or
2.4 bar (whichever is greater)
Repeats within 0.01% full scale
after 2.4 bar exposure
Inconel and Monel
8.3 cm3 (includes ½ inch Ø tube)
8 ms
0-10 V DC
±15 V DC
±5% to ±1% at 30 mA
Standard on all models
1.3 kg
1 Ranges to 10,000 torr also available.
2 Barocel 600 with accuracy 0.5% of reading also available.
shop online: www.bocedwards.com
1
Pressure fitting
!/2 inch od tube
Mini Conflat
8VCR
8VCO
NW16
The above gauges may be supplied with a calibration certificate.
ACCESSORIES
1
Call for details
ORDERING INFORMATION
D400-03-030
W189-99-005
W189-99-005
TEMPERATURE CONTROLLED BAROCEL
655, 658 AND 659
658
659
Output signal, linear
Output impedance
Output noise (0-2 kHz)
Weight
500 mA
700 mA
0 - 10 V DC
< 0.1 Ω
< 0.002% of full scale rms
0.55 kg
Ø0.50
1.33
(33.78)
• The Barocel 655 (45 °C) is for most general vacuum and semiconductor
processes.
• The Barocel 658 (100 °C) is suitable for processes that have
condensable by-products such as in CVD and some etch processes.
• The Barocel 659 (123 °C) is ideal for high temperature semiconductor
processes.
0.21
(5.33)
3.65 (92.71)
ORDERING INFORMATION 1-800-848-9800
:
The Barocel 655, 658 and 659 transducers have a number of proprietary
design features to enhance reliability and performance in today’s demanding applications. The sensing cell has a unique diaphragm design and stitch
welding process, and a new sensing cavity geometry which provides
enhanced resistance to particulate contamination. Performance is further
improved by isolating the sensor in a patented, temperature controlled,
hermetically sealed enclosure which neutralizes the effects of barometric
pressure, humidity and ambient temperature changes. The result is a transducer that offers long term stability and that is an order of magnitude better than some previously available.
5
8
9
Barocel type
Barocel 655
Barocel 658
Barocel 659
Pressure range
05 50 mtorr (655 only)
16 100 mtorr (655 &
658 only)
11 1 torr
12 1 mbar
14 2 torr
21 10 torr
22 10 mbar
31 100 torr
32 100 mbar
41 1000 torr
42 1000 mbar
The 655, 658 and 659 manometers are ideal for use in vacuum systems
where zero stability and resistance to process contamination are critical to
successful operation. Only Inconel and Monel surfaces are exposed to the
process gases and all welded joints are designed to permit rapid degassing.
There is no loss of accuracy due to changes in gas composition or the presence of electrically conductive gases.
TECHNICAL DATA
Pressure ranges available1
0-50, 0-100 mtorr
0-1, 0-2, 0-5, 0-10, 0-100 torr and mbar
0.15% of reading + 0.005% of full scale
± 0.01% of full scale
0.005% of full scale
2 hours
Accuracy
Repeatability
Resolution
Warm-up time
Control temperature
655
45 °C
658
100 °C
659
123 °C
Ambient operating temperature
655
15 - 40 °C
658, 659
15 - 70 °C
Storage temperature
-45 - 85 °C
Temperature effect on zero
< 0.005% of full scale/°C
Ambient condition effect on sensitivity
Temperature
< 0.02% of reading/°C
Barometric pressure
< 0.005% of full scale/760 torr
Relative humidity (0 - 95% RH) <0.005% of FS
Overpressure limit
3.1 bar
Internal volume
8.33 cm3 (includes ½ inch od tube)
Materials exposed to process
Inconel and Monel
Electrical supply
Supply
± 15 VDC ± 5%
Regulation
1%
Maximum current
655
250 mA
1.97
(50.03)
W
6
5
-
-
1
1
3
6
7
8
ACCESSORIES
Barocel 655, 658 and 659 cables
655 to AGC adaptor
655 to 1800 cable
655 to 1575 cable
655 to 652 cable
shop online: www.bocedwards.com
7
PAGE
235
1
Pressure
fitting
!/2 inch od tube
Mini Conflat
8VCR
8VCO
NW16
The above gauges may be supplied with a calibration certificate.
MEASUREMENT AND CONTROL
Ø3.00 (76.20)
(12.70)
1 Other ranges are available
Call for details
ORDERING INFORMATION
D400-03-050
W189-92-005
W189-92-005
W189-92-005
BAROCEL 590 CAPACITANCE
MANOMETER
A
1.44
(36.58)
2.87
(73.02)
1
6.00 (152.40)
0.31
(7.94)
1.68
(42.56)
4.13 (104.78)
5.28 (134.14)
0.36
(9.13)
ORDERING INFORMATION 1-800-848-9800
:
0
1
The Barocel 590 capacitance manometer has integral signal conditioning to
provide a 0 ± 10 V DC output signal compatible with digital voltmeters and
data acquisition systems.
The all-welded construction makes it suitable for use in high vacuum systems. It may be supplied with two pressure ports for measuring gauge or
differential pressure or with a single pressure port and internal vacuum reference for measuring absolute pressure. The high resolution and stability
Barocel 590 is suitable for applications that require measurement of a wide
range of pressures with a single transducer. Edwards offers a wide selection of displays, controllers, and multi-channel switching units for use with
the Barocel 590.
7
PAGE
236
Measurement mode
Differential
Absolute
Pressure range
11 1 torr*
21 10 torr
31 100 torr
41 1000 torr
12 1 mbar*
22 10 mbar
32 100 mbar
42 1000 mbar
50 10 inches H2O
60 100 inches H2O
70 10 inches Hg
80 100 inches Hg
TECHNICAL DATA
Pressure ranges available1
Absolute and differential
Absolute only
Accuracy
Standard
Optional
Repeatability
Resolution
Approximate line pressure range
(0-10,000 torr)
Operating temperature
Compensated temperature range
Temperature effect on zero2
Standard
Optional
Temperature effect on sensitivity3
Standard
Optional
Overpressure without damage
Material exposed to pressure media
Internal volume (each side)3
Time constant
Output signal (floating)
Signal
Impedance
Electrical supply
RFI suppression
Weight
1, 10, 1,000 and 10,000 torr and mbar
1, 10, 100 and 1,000 in. H2O, 10 and
100 inches. mercury
W**
WH***
250 psi
5°C - 70°C
10°C - 50°C
2
3
4
8
1
3
Temperature coeffecients
Zero 0.003 % of full scale/°C, sensitivity 0.03 % 1
of reading/°C
Zero 0.001 % of full scale/°C, sensitivity 0.005 % 2
of reading/°C
All 1 torr and 1 mbar units
9
0.003% full scale/°C
0.001% full scale/°C
0 to ±10 V DC into 5 KW load
<25 Ω
18-35 V DC or 18-25 V AC rms at
75mA.,
50-60 Hz
Standard on all models
1 kg
9
Pressure fittings
!/8-27 NPT
Mini-Conflat
Cajon 4VCR
NW16
Accuracy
0.15%
0.05%
0.15% of reading
0.05% of reading
0.01% of reading +0.005%
of maximum applied pressure
1 in 105
0.03% full scale/°C
0.005% full scale/°C
1.5 x full scale + 1000 torr
Inconel, palladium silver,
Monel, ceramic, 316 SS
5 cm3
8 ms
5
* Supplied fitted with thermal base and cover
** Standard
*** With thermal base and cover
ACCESSORIES
525B thermal base
Thermal base mounting
Thermal cover
Barocel 590 cables
590 to 1575 cable, 15
590 to AGC adaptor
1 Other ranges and engineering units are available
2 1 torr and 1 mbar units are fitted with thermal base and cover to optimize performance.
3 Increases by approximately 0.16 cm3 at full pressure
shop online: www.bocedwards.com
ORDERING INFORMATION
W579-91-301
W599-99-991
W599-93-000
W189-96-005
D400-03-020
PCSP interface
EN61010
EN 50081-1, EN 50082-1
• Accepts industry standard ion gauge tubes
• Standard analog output 0 to 10 V DC plus gauge identifier for easy
interface with AGC, computer or PLC
• Vacuum interlock using an auxiliary low vacuum Active gauge
The BOC Edwards Active Ion Gauge Controller (IGC) provides all the
power, control and signal conditioning necessary to sequentially run one
or two ion gauge tubes. It can be directly connected to any of the gauge
head sockets on an Active Gauge Controller using a standard Active gauge
head cable. Full control of all the ion gauge functions comprising gauge tube
sensitivity, head and filament selection, emission current (0.1, 1.0, 10.0
mA), filament turn on and degas control is available through the AGC. Filament protection is integral to the ion gauge controller and additional protection can be provided through the AGC using a low vacuum gauge like
an Active Pirani gauge.
For users who do not require a local display, a PCSP (parallel command
status port) alternative is available. This allows all the functions normally
accessed by the AGC to be available through a parallel connection.
Switching is carried out by simple switch closure and the signal is available
as a 0 to 10 V DC output. Additional filament interlocking can be achieved
by direct connection of a low vacuum Active gauge (APG or ATC) to the
IGC using its integral set point.
Note that the PCSP interface is an alternative to connecting the IGC to an
AGC. You must therefore select a BOC Edwards IGC if you want to connect the IGC to an AGC. Select a PCSP IGC if you want to use the parallel
connection.
TECHNICAL DATA
Pressure range
Electrical supply
Voltage
Frequency
Power consumption
Output signal
Emission current
Filament supply
Voltage V DC max
Current A max
Power W max
Degas power (EBEAM)
Auxiliary gauge supply
Current
Sensitivity adjustment
Temperature range
Operating
Storage
Relative humidity
Enclosure rating
Weight
-3
5 × 10 to 2 × 10
-11
mbar
90 to 265 V AC (auto-adjusting)
45 to 70 Hz
150 W
1 to 10 V DC logarithmic
0.1, 1.0 or 10 mA (selectable)
8
5
40
60 W max (adjustable)
24V DC nominal
100 mA max.
6 mbar-1 to 26 mbar-1
8.78 (223)
0.13 (3.2)
5.79 (147)
10.75 (273)
2.99 (76)
3.46 (88)
ORDERING INFORMATION 1-800-848-9800
PRODUCT DESCRIPTION
IGC EBEAM 2 head PCSP
IGC EBEAM 2 head BOC Edwards
19 inch rack mounting kit
Glass encapsulated ion gauge tubes (X-ray limit 3 ×10 -10 mbar)
¾ inch port, Kovar dual tungsten filaments
¾ inch port, Kovar thoriated iridium filament
1 inch port, Kovar dual tungsten filaments
1 inch port, Kovar thoriated iridium filament
2¾ inch ConFlat ® , Kovar ¾ inch port dual
tungsten filaments
2¾ inch ConFlat ® , Kovar ¾ inch port
thoriated iridum filament
Ion gauge cables for above tubes
1.8 m
3m
Nude ion gauge tubes (X-ray limit 4 ×10 -10 mbar)
2¾ inch ConFlat ®, nude, dual tungsten
filaments
2¾ inch ConFlat ®, nude thoriated iridium
filament
Ion gauge cables for above tubes
1.8 m
3m
Nude ion gauge tubes (X-ray limit 2 ×10 -11 mbar)
2¾ inch ConFlat ®, dual tungsten filaments
2¾ inch ConFlat ®, dual thoriated iridum
filament
Ion gauge cables for above tubes (bakeable to 250°C)
2m
3m
The above gauges may be supplied with a calibration certificate.
Electrical supply cable USA plug 2m
10 - 50 °C
-20 to 70 °C
10% to 90%
IP20 (BS) IP205 (IEC)
1.8 kg
shop online: www.bocedwards.com
ORDERING NUMBER
D048-46-000
D048-47-000
D048-30-300
D029-98-010
D029-98-040
D029-98-070
D029-98-110
D029-98-140
D029-98-170
D048-31-060
D048-31-100
D029-98-380
D029-98-390
D048-46-060
D048-46-100
D029-99-380
D029-99-390
D048-47-060
D048-47-100
Call for details
D400-13-120
MEASUREMENT AND CONTROL
8.15 (207)
PCSP interface socket
BOC Edwards interface socket
Auxiliary gauge socket
Ion gauge socket
Electrical supply socket
Standards
Overall design
Electromagnetic compatibility
Active low (less than 3 V) with
internal pull up resistors
(150kΩ) to 28 V
15 way female D-type
8 way FCC68 compatible
8 way FCC68 compatible
7 way circular multipole
IEC 320
9.45 (240)
IGC ACTIVE ION GAUGE CONTROLLER
5 × 10 -3 TO 2 × 10 -11 mbar
7
PAGE
237
NEW
TIC INSTRUMENT CONTROLLER
Compact instrument
• TIC is packaged in a compact case and may be panel or rack (¼ 19" rack
3U) mounted. With the addition of the bezel it becomes an attractive
bench-top instrument.
Clear, easy to use graphical user interface
• The large 128 x 64 pixel backlit graphics LCD and mobile phone style
menu system simplifies programming and with a choice of summary
screens excellent visibility of displayed parameters is assured.
Universal power supply
• TIC will operate from mains supplies with voltages between 90 and
264 V ac, and frequencies between 47 and 63 Hz. No user intervention
being required.
Serial communications
• To enable complete integration into PC and PLC controlled processes,
all TIC variants include RS232 and RS485 interfaces as standard.
WindowsTM PC program
• TIC is supplied with a new WindowsTM PC program which enables full
setup and control from a PC. Using the RS485 interface, multiple TIC
installations may be monitored and controlled from a central point.
Software upgrades
• As new compatible products are released, TIC software may be simply
upgraded using the special utility supplied with the WindowsTM PC
program.
• TIC software upgrades will be made available via e-mail and the Internet.
A compact instrument controller with a large clear graphical display, an
intuitive user interface and serial communications providing full remote
control and data logging functions for one or more TIC systems via a new
WindowsTM based PC program.
7
PAGE
238
The controller supports and automatically recognizes up to three gauges
from the BOC Edwards range (excluding IGC and Barocels), with coverage
from 2000 to 6.6 X 10-10 mbar. Low pressure gauges may be controlled
and protected by high pressure gauges and there are three open collector
set point outputs. An optional relay box uses these outputs to control
three 3A mains changeover relays.
The TIC instrument controller may be either rack or bench mounted and
provides a useful hub for the flexible operation of a wide range of vacuum
system configurations.
Features & benefits
Universal vacuum gauge controller
• TIC automatically recognizes and controls up to three active gauges
including Pirani, linear Pirani, thermocouple, strain, inverted magnetron,
wide range and active ion gauges.
Relay options
• TIC has three pressure related set points, which operate open collector
outputs rated at 24 V dc 50 mA. Using the optional relay box, these may
be linked to three mains changeover relays rated at 230 V 3 A to provide
a useful accessory control capability.
• All relay boxes include a logic bypass facility for further system
integration.
Simple system configuration
• In most instances, TIC systems may be simply and quickly configured
using the range of standard cables on offer. There is therefore no need
for the customer to prepare loom assemblies or relay boxes and special
interfaces.
Direct pressure readout
• TIC includes lookup tables for a range of commonly encountered
process gasses (N2, He, Ar, CO2, Kr & Ne). Selecting the appropriate
gas enables direct readout of the correct pressure without the need to
apply conversion factors.
TECHNICAL DATA
Gauge inputs
Logic Interface
Control inputs
Gauge enable 1, 2, 3
System interlock SYSI
Status outputs
Analogue output
Gauge set point A, B, C
Alarm
Serial interface
Mains input
Electrical supply
Power consumption (max)
Peak inrush current
Fuse
Earth stud
Interface cables
shop online: www.bocedwards.com
Instrument supporting TIC variants
recognize and control the following
gauges:
APG, APGX, ATC, ASG, AIM, WRG &
AIGX*
The logic interface connector includes
the functions listed below.
It may be used either to link to system
relays, a higher-level control system, or
an optional relay box. By utilizing the
relay box pass-through connector,
a combination of a higher-level control
system and relay box may be used.
Closed when low: < 0.5 V dc
Open when high: 4 to 24 V dc
Closed when low: < 0.5 V dc
Open when high: 4 to 24 V dc
0-10 V dc
O/C 24 V dc 50 mA
O/C 24 V dc 50m A
The TIC has two built-in communications protocols, RS232 and RS485.
This may be used either to interface to
a PLC or, using the WindowsTM PC
software package supplied, connected
to a PC for full control of either a single
TIC system (RS232) or multiple networked systems (RS485)
90 to 264 V ac 47 to 63 Hz
55 VA
4.4 A @ 110 V ac
12 A @ 230 V ac
TIC is self-protecting and has no user
replaceable fuse. The unit will recover
when the overload is removed
M4
Use cables as specified in 'Ordering
Information'
N EW
Dimensions
Electronics housing
External interfaces
Front panel
106.4
1.31 kg
+0° to +40° C
-30° to +70° C
90% RH non-condensing at 40° C
3000m
EN 61010-1
EN 61326 Industrial Location,
Class B Emissions
Enclosure rating
IP20
* No more than one AIGX gauge may be connected to TIC at a time
128.6
Bench and rack mounting options (1/4 19" 3U sub rack)
BOC
EDW
ARD
S
Display - 128 x 64 pixel backlit graphics LCD
Front panel keypad control functions include:
Scroll up button
Scroll down button
Enter/Select button
1
Menu/Back button
Cycle button
2
1
TIC
2
Front panel securing screw and washer
7
Rear panel
1
PAGE
239
2
BOC
EDW
ARD
S
3
1
6
2
1
Rack
2
Unit securing screw and washer
MEASUREMENT AND CONTROL
Front panel
Weight
TIC instrument controller RS232
Operating storage data
Operating temperature
Storage temperature
Maximum ambient operating
humidity
Maximum operating altitude
Standards
Electronic design
Electromagnetic compatibility
110 mm high x 105 mm wide x
245 mm deep
106 mm wide x 128 mm high
5
4
1
Gauge inputs FCC68 (RJ45)
4
Earth stud M4
2
Logic Interface 25-way 'D' socket
5
Mains input CEE/IEC 320 plug
3
RS232/485 9-way 'D' socket
6
Mains on/off switch
shop online: www.bocedwards.com
NEW
WindowsTM PC program
Display interface
TIC is supplied with a fully functional variant sensitive WindowsTM based
PC program, which replicates and adds to the TIC control menus. It
enables single or multiple TIC systems to be configured, controlled and
monitored from a single PC.
System normal
AIM
1.20
APGX
3.20
x10
-04
AIGX
8.10
x10
-10
ALARMS
mbar
R1 R2 R3
x10
The PC program also supports data logging and individual TIC system configurations may be created and saved for use at a later date.
-05
System view screens are divided into two. The top half provides a system
overview, the lower half being sub-divided into tabs.
The 'system status' tab provides an alerts log…
TIC software is structured through a series of easily accessible screens,
similar to a mobile telephone.
TIC automatically recognizes what is directly connected and displays the
appropriate information on the default summary screen. Scrolling and
selecting accesses the control and set-up menus for that item.
System status is displayed, giving a clear indication of what is currently happening in the vacuum system.
The output from connected gauges may be displayed in a variety of ways
for maximum clarity. Either individually in large text for maximum impact,
or in multiples with an option to display one gauge in larger text.
If an alarm event occurs, ’ALARM’ will flash on the screen. When selected,
the alarm message may be read and the system re-set for normal operation.
Display units may be in mbar, torr, Pa or Volts.
…and further tabs enable configuration and direct push-button control of
pumps, accessories and gauges.
The three set point relays may be allocated to any of the connected gauges.
When tripped, they are highlighted.
Relay box (optional)
General description A relay box has been developed to allow the TIC
set point outputs to operate three 230 V ac 3 A (non inductive) mains
changeover relays.
The relay box is connected to the TIC via the logic interface connector,
which is also provided with a bypass connector for interfacing with OEM
equipment.
Relay box
SETPOINT
RELAYS
1
2
The PC program includes a software upgrade utility, which enables the TIC
software to be upgraded over the serial link from files supplied electronically, either on magnetic media, by e-mail, or from a website.
LOGIC INTERFACE
30V MAX
7
PAGE
240
USER
4
1
Mains changeover relays
9-way Positronic plug
2
Logic interface (from TIC)
25-way 'D' plug
3
Logic bypass (to PC, PLC etc.) 25-way 'D' socket
4
Earth stud M4
TIC
3
shop online: www.bocedwards.com
N EW
Configuration examples
ORDERING NUMBER
DESCRIPTION
A
D397-00-000
D400-13-120
D021-71-000
D048-50-000
D357-28-000
D400-03-060
D400-01-030
TIC inst 3 head RS232
B
C
D
E
F
G
G
2m US mains cable
G
APGX-M-NW16 AL
G
A
AIGX-S-NW25
C
ASG NW16 2000 mbar
F
0.5m ASG adaptor cable
D
3m active gauge cable
MEASUREMENT AND CONTROL
ITEM
E
B
L
ITEM
ORDERING NUMBER
DESCRIPTION
A
D397-00-000
D400-13-120
D021-71-000
D146-41-000
D147-01-000
D048-50-000
D400-01-020
D400-01-050
D397-00-834
N/A
D397-00-833
TIC inst 3 head RS232
B
C
D
E
F
G
H
J
K
L
J
K
2m US mains cable
APG-M-NW16 AL
AIM-S-NW25
WRG-S-NW25
G
AIGX-S-NW25
G
2m active gauge cable
H
5m active gauge cable
A
2m RS232 I/F cable (optional)
C
PC with RS232 interface (optional)
D
F
2m Logic I/F cable
7
B
PAGE
241
E
M
ITEM
ORDERING NUMBER
DESCRIPTION
A
D397-00-000
D400-13-120
D021-71-000
D146-41-000
D147-01-000
D048-50-000
D400-01-010
D397-00-834
N/A
D397-00-804
D397-00-833
D397-00-833
TIC Inst 3 head RS232
B
C
D
E
F
G
H
J
K
L
M
L
H
J
2m US mains cable
APG-M-NW16 AL
AIM-S-NW25
WRG-S-NW25
G
AIGX-S-NW25
K
1m active gauge cable
G
2m RS232 I/F cable (optional)
G
A
PC with RS232 interface (optional)
TIC relay box instruments
C
2m logic I/F cable
2m logic I/F cable
F
D
B
E
shop online: www.bocedwards.com
NEW
.
ORDERING INFORMATION 1-800-848-9800
PRODUCT DESCRIPTION
Controllers
TIC Instrument Controller RS232
Relay boxes (supplied with)
TIC relay box instruments
Cables
Interface cables
2m logic interface cable
2m RS232 interface cable
Active gauge cables (include FCC68 compatible
connections at both ends)
0.5m active gauge cable
1m active gauge cable
3m active gauge cable
5m active gauge cable
10m active gauge cable
15m active gauge cable
15m active gauge cable (24 AWG)
25m active gauge cable
30m active gauge cable (24 AWG)
50m active gauge cable
100m active gauge cable
Other accessories and supporting products
TIC front bezel kit (spare)
ORDERING NUMBER
D397-00-000
D397-00-804
D397-00-833
D397-00-834
D400-01-005
D400-01-010
D400-01-030
D400-01-050
D400-01-100
D400-01-150
D400-05-150
D400-01-250
D400-05-300
D400-01-500
D400-01-999
D397-00-822
7
PAGE
242
shop online: www.bocedwards.com
AGC ACTIVE GAUGE CONTROLLER
Turbomolecular pump interface
The Active Gauge Controller can be linked, through a suitable adaptor
cable, to a BOC Edwards turbomolecular pump system. This makes it possible for a single AGC to operate the whole vacuum system.
Capacitance manometers
The CM versions of the Active Gauge Controller can accept Barocel 600,
622 and 655 capacitance manometers as well as any of the Active gauge
heads. This is particularly advantageous where a combination of basic
vacuum gauges together with the highly accurate and reproducible capacitance manometers is required.
• Worlds first truly universal gauge controller
• Accepts 3 or 6 Active gauges from, Pirani, wide range gauge,
thermocouple, strain, inverted magnetron and ion gauges
• Can also accept up to 3 Barocel capacitance manometers (only one 655)
• 6 independent relays controlled by any of the gauges as standard
• RS232 serial port for full remote control
• Operates from 90-265 V AC, 45-70 Hz
The Active Gauge Controller (AGC) can drive up to 6 Active gauges automatically recognizing the types of Active gauge connected. This allows the
unit to scale the output accordingly to display the correct pressure range.
Reconfiguring the controller is as simple as unplugging one head and
plugging in another.
Power supply
Input voltage range
Input frequency range
Temperature range
Operating
Storage
Chart recorder outputs
Active gauges
Capacitance manometers
Standard relays
Voltage (maximum)
Current (maximum)
Optional relay board
Voltage (maximum)
Current (maximum)
Optional DIN rail mounting relay unit
Voltage (maximum)
Current (maximum)
Dimensions
90 - 265 V AC (auto adjusting)
45 - 70 Hz
0 - 40 °C
-20 to 70 °C
2 - 10 V DC
0 - 10 V DC linear
6 open collector transistor outputs
40 V DC
100 mA
6 electromagnetic relay outputs
240 V AC
3A (non-inductive load)
6 electromagnetic relay outputs
240 V AC
5A (non-inductive load)
Half 19 inch rack, 2U
7
Relay options
8.78 (223)
The relay set point criteria along with all other user defined parameters
are stored in non-volatile memory, and so are retained even after the
power is turned off.
0.13 (3.2)
2.76 (70)
Automatic range switching
Gauge heads which only operate at lower pressure, such as inverted magnetron and ionization gauges, can be switched on and off manually as
appropriate. Alternatively these heads can be interlocked to the pressure
measured by one of the other gauges, eg., Pirani or thermocouple. The display can also switch to give continuous pressure indication over the range.
For example, a Pirani gauge can interlock an ion gauge to prevent accidental power-up at high pressures and can be used to give continuous pressure display from atmosphere to 2 × 10-11 mbar.
RS232 communication
The RS232 serial communication option gives full remote control of the
AGC by a host computer. An ASCII character string protocol allows all
functions to be controlled and data to be captured for storage and processing. There is also a data logging mode for use with serial printers.
Display options
The AGC is available with either a single or triple line display which can
continuously show the reading from any three heads.
shop online: www.bocedwards.com
11.22 (285)
2.99 (76)
3.46 (88)
9.45 (240)
PAGE
243
8.15 (207)
All the controllers have six set point outputs as standard, rated at 40 V
DC, 100 mA which can be controlled by any of the gauge heads connected
using high and low pressure set points. If a higher rating is required then
there is a choice of an internally fitted card with 6 electromagnetic
changeover relays rated at 240 V AC, 3A or a separate DIN rail mounted
module with six 240 V 5A relays.
MEASUREMENT AND CONTROL
TECHNICAL DATA
ORDERING INFORMATION 1-800-848-9800
PRODUCT DESCRIPTION
7
PAGE
244
PIRANI 501 AND PRE10K
ORDERING NUMBER
CM versions can accept capacitance manometers as well as Active Gauges
AGC single display 3 head
D386-55-000
AGC single display 6 head
D386-54-000
AGC single display 6 head CM
D386-53-000
AGC single display RS232 3 head
D386-52-000
AGC single display RS232 6 head
D386-51-000
AGC single display RS232 6 head CM
D386-50-000
AGC triple display RS232 3 head
D386-62-000
AGC triple display RS232 6 head
D386-61-000
AGC triple display RS232 6 head CM
D386-60-000
AGC relay expansion board
D386-51-800
DIN mounting relay unit
D385-04-110
Half 19 inch rack blanking kit
D048-30-301
Half 19 inch rack joining kit
D048-30-302
WindowsTM software driver
D386-62-800
Active gauge cables (FCC68 compatible connection at both ends)
0.5 m
D400-01-005
1m
D400-01-010
3m
D400-01-030
5m
D400-01-050
10 m
D400-01-100
15 m
D400-01-150
25 m
D400-01-250
50 m
D400-01-500
100 m
D400-01-999
Non-standard lengths available on request
Barocel capacitance manometer adaptor cables
Barocel 600 to female FCC68 0.5 m
D400-03-010
Barocel 622 to female FCC68 0.5 m
D400-03-030
Barocel 655 to female FCC68 0.5 m
D400-03-050
Active strain gauge adaptor cable (ASG to female
D400-03-060
FCC68) 0.5 m
Interface cables RS232C, 3m
Terminates in 25 way D (female)
D386-50-400
Terminates in 9 way D (female)
D386-50-500
Turbomolecular pump controller interface cables
EXC100 to female FCC68, 0.5 m
D400-03-070
EXC120 to female FCC68, 0.5 m
D400-03-080
EXC300 to female FCC68, 0.5 m
D400-03-090
Electrical supply cable USA plug 2m
D400-13-120
•
•
•
•
•
•
•
•
•
Wide range on clear 230° scale
Continuous reading - no range switching necessary
Recorder output
mbar and torr scales
Electrical supply on/off indication
Power input: IEC connector with fuse and voltage selector
Simple controls: easy to set-up or calibrate at atmosphere and vacuum
Compact units to DIN 43700
Includes detachable feet and panel mounting clamps
A low cost, single channel Pirani display and gauge head.
TECHNICAL DATA
Pressure range
Maximum overpressure
Operating temperature
Controller
Gauge head
Storage temperature
Materials exposed to vacuum
Power supply (controller)
Input voltage range
Input frequency range
Dimensions
Vacuum fitting
5 to 1 × 10-3 mbar
2 bar absolute
0 - 50 °C
5 - 60 °C
-10 to 70 °C
Aluminum HETF, tungsten, PTFE, nickel
94 to 127 or 188 to 254 V
50/60Hz
DIN 43700 96 × 96 mm
NW10
ORDERING INFORMATION 1-800-848-9800
PRODUCT DESCRIPTION
Pirani 501 with 2 m electrical supply cable
Pirani PRE10K gauge head with head cable 2 m
PRE10K extension cable 5 m
PRE10K extension cable 15 m
PRE10K extension cable 30 m
shop online: www.bocedwards.com
ORDERING NUMBER
D395-11-000
D024-28-000
D368-36-005
D368-36-015
D368-36-030
Voltage (maximum)
Current (maximum)
Dimensions
Standards
Electronic design
Electromagnetic compatibility
AGD ACTIVE GAUGE DISPLAY
250 V ac
3A (non-inductive load)
DIN 43700 standard 96 x 96mm
EN 61010-1
EN 61326 (Class B Emissions)
Examples of compatible gauges
The BOC Edwards Active Gauge Displays are a range of simple,
low cost units for the measurement and control of vacuum
from atmosphere to 10-9 mbar. They are designed for use with
BOC Edwards gauges and therefore give the user unrivalled performance,
flexibility and ease of use with this range of vacuum instruments.
ORDERING INFORMATION 1-800-848-9800
Now includes Pa as well as mbar / torr versions.
PRODUCT DESCRIPTION
Features & benefits
• Accepts two active gauge heads
- Single switch with LED indication for gauge head selection
• Option of two adjustable set-points with relay status indication
- Two single pole change-over relays each rated at 3 A 250 V
• Standard 2 to I0 V dc analog chart recorder outputs
- Continuous independent output for each gauge head plus switched
output corresponding to selected gauge head
• Bench top use or panel mounting
- Supplied with tilt feet for convenient bench top mounting and panel
mounting kit to DIN 43700 standard
• Mains power input via IEC connector
- Fuse and voltage selector allows operation from 90 to 265 V ac, 45
to 70 Hz
• Continuous reading - no range changing necessary
- Clear analog display covers the whole gauge head pressure range
In addition to the features of the unit itself, use of the Active Gauge Display
gives all the benefits of Active gauging
These include flexible cabling with standard lengths up to 100m,
a high level of immunity to electrical noise and rugged,
96
92
compact surface mount electronics
70
140
16
96
TECHNICAL DATA
Power Supply
Input voltage range
Input frequency range
Temperature range
Operating
Storage
Chart recorder outputs
AGD
AGD
AGD
AGD
AGD
AGD
AGD
AGD
AGD
AGD
AGD
AGD
AGD
AGD
AGD
AGD
AGD
AGD
AGD
AGD
AGD
AGD
AGD
AGD
AGD
AGD
AGD
AGD
AGD
AGD
AGD
AGD
for
for
for
for
for
for
for
for
for
for
for
for
for
for
for
for
for
for
for
for
for
for
for
for
for
for
for
for
for
for
for
for
APG-M with control relays (mbar/Torr)
APG-M with control relays (Pa)
APG-L with control relays (mbar/Torr)
APG-L with control relays (Pa)
APGX with control relays (mbar/Torr)
APGX with control relays (Pa)
AIM-S with control relays (mbar/Torr)
AIM-S with control relays (Pa)
AIM-X with control relays (mbar/Torr)
AIM-X with control relays (Pa)
ATC-M with control relays (mbar/Torr)
ATC-M with control relays (Pa)
ATC-D with control relays (mbar/Torr)
ATC-D with control relays (Pa)
WRG with control relays (mbar/Torr)
WRG with control relays (Pa)
APG-M (mbar/Torr)
APG-M (Pa)
APG-L (mbar/Torr)
APG-L (Pa)
AIM-S (mbar/Torr)
AIM-S (Pa)
ATC-M (mbar/Torr)
ATC-M (Pa)
AIM-X (mbar/Torr)
AIM-X (Pa)
APGX (mbar/Torr)
APGX (Pa)
ATC-D (mbar/Torr)
ATC-D (Pa)
WRG (mbar/Torr)
WRG (Pa)
90 to 120 V ac
185 to 265 V ac (selectable)
45 to 70 Hz
5 to 60°C
-10 to +70°C
2 to 10 V dc
Relays
shop online: www.bocedwards.com
ORDERING NUMBER
D395-60-000
D395-60-600
D395-61-000
D395-61-600
D395-71-000
D395-71-600
D395-62-000
D395-62-600
D395-70-000
D395-70-600
D395-63-000
D395-63-600
D395-64-000
D395-64-600
D395-80-000
D395-80-600
D395-65-000
D395-65-600
D395-66-000
D395-66-600
D395-67-000
D395-67-600
D395-68-000
D395-68-600
D395-75-000
D395-75-600
D395-76-000
D395-76-600
D395-69-000
D395-69-600
D395-85-000
D395-85-600
MEASUREMENT AND CONTROL
Active Pirani Gauges
APG-M & APG-MP
Atmosphere to 10-3 mbar
APG-L
Atmosphere to 10-4 mbar
Active Linear Pirani Gauges
APGX-M & APGX-MP
Atmosphere to 10-3 mbar
APGX-L
Atmosphere to 10-4 mbar
Active Thermocouple Gauges
ATC-D
65 to 6.5 x 10-2 mbar
ATC-M
1.3 to 1.3 x 10-3 mbar
Active Inverted Magnetron Gauges
AIM-S, AIM-SL & AIM-X
10-2 to 10-9 mbar
Active Wide Range Gauges
WRG-S, WRG-SL & WRG-D Atmosphere to 10-9 mbar
7
PAGE
245
ORDERING INFORMATION 1-800-848-9800
SPARES & ACCESSORIES
ADD ACTIVE DIGITAL DISPLAY
ORDERING NUMBER
Cables (including FCC68 compatible connection at both ends)
0.5 m
1m
3m
5m
10 m
15 m
25 m
50 m
100 m
Non standard lengths and screened cables available on request
Electrical supply cable USA plug 2m
D400-01-005
D400-01-010
D400-01-030
D400-01-050
D400-01-100
D400-01-150
D400-01-250
D400-01-500
D400-01-999
D400-13-120
•
•
•
•
•
Compatible with Active Strain gauge, 600, 622 and 655 Barocels
Clear 4 digit display with choice of pressure unit
Auto ranging facility when used with Barocels
Bench top or panel mounting to DIN 43200 standard
Option with two 3A changeover relays for set-point process control
A single Active Strain Gauge or Barocel 600, 622 or 655 capacitance
manometer can be connected using appropriate adaptor cable and a
standard Active gauge cable. Units of pressure display can be selected independent of gauge full scale units. Auto range features for Barocels gives
4 decade display.
Relay version gives one falling pressure setpoint with adjustable hysteresis
and one rising pressure setpoint with fixed hysteresis.
7
PAGE
246
TECHNICAL DATA
Power supply
Input voltage range
Input frequency range
Temperature range
Operating
Storage
Chart recorder outputs
Relays
Voltage (maximum)
Current (maximum)
Dimensions
Face depth
90 - 120 V or 185 - 265 V AC
(switchable)
45 - 70 Hz
5 - 60 °C
-10 to 70 °C
0 - 10 V DC
250 V DC
3 A (non-inductive load)
DIN 43700 standard 96×96 mm
5.51 inch (140 mm)
ORDERING INFORMATION 1-800-848-9800
PRODUCT DESCRIPTION
ORDERING NUMBER
ADD
D395-56-000
ADD with control relays
D395-57-000
For adaptor cables, Active gauge cables and electrical supply cables see page 224.
shop online: www.bocedwards.com
1.77 (45)
1.89 (48)
MODEL 1575 PRESSURE DISPLAY
3.62 (92)
5.65 (144)
3.78 (96)
5.82 (148)
ORDERING INFORMATION 1-800-848-9800
PRODUCT DESCRIPTION
ACCESSORIES
The Model 1575 Pressure Display is a low cost, microprocessor based, digital display and set point controller for the Barocel 600, 622 and 655 capacitance manometers. The Model 1575 incorporates power supply, digital
display, four user-selectable set-points, along with analog and optional
RS232 outputs in a compact 1/8 DIN package.
Cable (15ft, 4.5 m)
Barocel 600
Barocel 622
Barocel 655
652 Power supply
Push button or remote zero adjustment - To adjust the transducer
zero, simply press the front panel membrane switch. Alternatively, earth
(ground) a rear panel connection.
Push button full scale calibration - Use the full scale calibration feature if you want to display engineering units which are different from the
transducer calibration, or to incorporate arbitrary coefficients for the
transducer.
User selectable set-points with open collector contacts - There
are four user programmable solid-state, open collector set points; two
high and two low. The hysteresis band associated with each set point can
also be adjusted to meet system requirements.
Easy to read LED display - The 10 mm bright red, high efficiency LED
display is easily visible from normal viewing angles and in most lighting conditions.
Optional RS232 output - An RS232 port is available, at minimal cost,
for digital pressure output.
TECHNICAL DATA
Signal input
± 10 V DC
DC output
Transducer input signal
A/D resolution
± 25,000 counts
± 0.005% of reading ± 2 counts
Accuracy1
Full scale temperature coefficient 20 ppm/ °C
Zero temperature coefficient
.001 ppm/ °C
Zero suppression
± 100% of full scale
Transducer supply
±15 V DC at 250mA (maximum)
Electrical supply (50 - 60 Hz)
Standard
115 V AC ± 10%
Optional
230 V AC or 100 V AC ± 10%
Set-points (4 open collector transistors)
Voltage (maximum)
50 V
Current (maximum)
100 mA
Hysteresis (both set-points)
0 - 99 counts
Control status
LEDs indicate controls actuated
Temperature range
Operation
0 to 55 °C
Storage
-40 to 85 °C
Warm-up time (at 25 °C)
30 minutes
List of compatible transducers
Barocels
600, 622, 655
1 Not including transducer error
shop online: www.bocedwards.com
ORDERING NUMBER
W608-10-000
W608-10-004
W608-20-000
W608-20-004
ORDERING INFORMATION
W189-97-005
W189-99-005
W189-92-005
W189-92-005
MEASUREMENT AND CONTROL
Model 1575 Pressure Display
Analog output 115V
RS232 output, 115V
Analog output 230V
RS232 output, 230V
7
PAGE
247
MODEL 652 POWER SUPPLY
ORDERING INFORMATION 1-800-848-9800
PRODUCT DESCRIPTION
Model 652 Power Supply
ACCESSORIES
Model 652 cables
Barocel 600
Barocel 622, 655, 658 and 659
Adaptor, to AGC (with capacitance
manometer board) 0.5 m
Adaptor, to AGC (without capacitance
manometer board) 0.5 m
Model 1575 controller (15 ft, 4.6 m)
Model 1501C controller (15 ft, 4.6 m)
Model 1800 controller (15 ft, 4.6 m)
7
PAGE
248
The Model 652 Power Supply supplies regulated power to up to three
Barocel 600, 622, 655, 658, or 659 capacitance manometers. The Model
652 therefore expands the capabilities of the Active Gauge Controller,
Model 1575 and Model 1501C Pressure Controller. The linear 0 - 10 V
Barocel outputs are relayed through connections on the rear panel of the
Model 652 to a pressure display or controller.
• Provides up to 1.5 A
• Allows the AGC to display and control multiple heated Barocels (like
the Barocel 658).
• Expands the display capability of the Model 1575 Controller to include
Barocel 655, 658 and 659.
• Allows the Model 1501C Pressure Controller to control from the
output of Barocel 655, 658 or 659.
TECHNICAL DATA
Supply voltage (selectable)
90-240 V AC (no voltage selection
required)
Supply current
2 A max
Supply frequency
48 - 62 Hz
Output voltage
±15 V ±0.1 V @ 1.5 A
Output current range
0-2.25 A (short circuit protected)
Regulation of ±15V outputs
<±100 mV over full load
Ripple and noise in ±15V outputs
<20 mV
Signal loading from DC to 100 kHz
No appreciable loading
Noise introduced onto Barocel signal <1 mV (with standard 15’ cable)
Signal input, linear
0-10 V DC
Reset time
10 s
Operating temperature
-10 - 40 °C
Operating humidity
10 - 90 %
Weight
6.5 lb (3 kg)
Dimensions:
Height
3.5 inch (90 mm)
Length
9.5 inch (245 mm)
Width
9.25 inch (238 mm)
shop online: www.bocedwards.com
ORDERING NUMBER
W569-96-120
ORDERING INFORMATION
W189-97-005
W189-92-005
D400-03-050
W659-99-511
W189-92-005
W189-92-005
W189-92-005
GAUGE AND CONTROLLER
INSTALLATION EXAMPLES
The Active range of vacuum gauges and controllers gives you the flexibility
to design and configure a system which will fulfil your needs precisely. Our
technical support team is on hand to advise you on the best system for
your application. Examples of typical systems are show below:
D
Active gauge display system
A
ITEM
QUANTITY
ORDERING NUMBER
DESCRIPTION
A
1
AGD for APG-M
B
1
C
2
D
2
D395-65-000
D400-13-120
D021-71-000
D400-01-030
B
MEASUREMENT AND CONTROL
US electrical supply cable
APG-M
3 m Active gauge cable
C
C
TIC system 1
ITEM
ORDERING NUMBER
DESCRIPTION
A
D397-00-000
D400-13-120
D021-71-000
D048-50-000
D357-28-000
D400-03-060
D400-01-030
TIC inst 3 head RS232
B
C
D
E
F
G
G
G
2 m US mains cable
G
A
APGX-M-NW16 AL
C
AIGX-S-NW25
7
F
ASG NW16 2000 mbar
PAGE
249
D
0.5 m ASG adaptor cable
3 m Active gauge cable
E
B
M
TIC system 2
L
ITEM
ORDERING NUMBER
DESCRIPTION
A
D397-00-000
D400-13-120
D021-71-000
D146-41-000
D147-01-000
D048-50-000
D400-01-010
D397-00-834
N/A
D397-00-804
D397-00-833
D397-00-833
TIC inst 3 head RS232
B
C
D
E
F
G
H
J
K
L
M
H
J
2 m US mains cable
APGX-M-NW16 AL
AIM-S-NW25
G
K
WRG-S-NW25
G
AIGX-S-NW25
G
A
1 m Active gauge cable
C
2 m RS232 I/F cable (optional)
PC with RS232 interface (optional)
F
D
TIC relay box instruments
2 m Logic I/F cable
B
2 m Logic I/F cable
E
shop online: www.bocedwards.com
Active gauge controller, system 1
M
ITEM
QUANTITY
ORDERING NUMBER
DESCRIPTION
A
1
AGC-6 head, RS232
B
1
D386-51-000
D400-13-120
D146-41-000
D048-51-000
D021-73-000
D147-01-000
D351-08-000
D355-13-000
D357-26-000
D400-03-060
D400-01-030
D386-50-500
C
1
D
1
E
1
F
1
G
1
H
1
J
1
K
1
L
4
M
1
L
US electrical supply cable
AIM-S
AIGX-S
A
APG-L
WRG-S
ATC-E
ATC-M
E
K
ASG
G
B
ASG adaptor cable
3 m gauge cable
RS232 interface cable
H
J
C
F
D
H
Active gauge controller, system 2
ITEM
7
PAGE
250
QUANTITY
A
1
B
1
C
1
D
1
E
1
F
1
G
1
H
3
J
1
ORDERING NUMBER
D386-55-000
D400-13-120
D146-41-000
D048-50-000
D021-73-000
D147-01-000
D396-16-000
D400-01-030
D400-03-080
H
A
DESCRIPTION
H
J
AGC-3 head
US electrical supply cable
AIM-S
G
AIGX-S
APG-L
B
E
WRG-S
EXC120
3 m Active gauge cable
EXC120 adaptor cable
F
C
D
H
Active gauge controller, system 3
ITEM
QUANTITY
ORDERING NUMBER
DESCRIPTION
A
1
AGC-CM version
B
1
D386-60-000
D400-13-120
W655-12-811
W600-42-811
D021-73-000
D400-03-010
W400-03-050
D400-01-030
C
1
D
1
E
1
F
1
G
1
H
3
G
US electrical supply cable
A
F
Barocel 655
Barocel 600
C
APG-L
D
600 adaptor cable
655 adaptor cable
E
3 m Active gauge cable
shop online: www.bocedwards.com
B
B
H
Active gauge controller, system 4
ITEM
QUANTITY
ORDERING NUMBER
DESCRIPTION
A
1
AGC-3 head
B
2
C
1
D
1
E
1
F
1
G
1
H
3
D386-55-000
D400-13-120
D146-41-000
D021-71-000
D048-47-000
D029-99-390
D048-47-060
D400-01-030
A
US electrical supply cable
E
APG-M
C
IGC Ebeam, BOC Edwards
B
Ion gauge tube
Ion gauge cable
F
3 m Active gauge cable
Active digital display system
ITEM
QUANTITY
ORDERING NUMBER
DESCRIPTION
A
1
ADD
B
1
C
1
D
1
E
1
D395-56-000
D400-13-120
D357-26-000
D400-03-060
D400-01-030
US electrical supply cable
D
MEASUREMENT AND CONTROL
G
AIM-S
ASG
ASG adaptor cable
3 m Active gauge cable
7
PAGE
251
shop online: www.bocedwards.com
UPSTREAM PRESSURE CONTROL
Use the 1501C Controller and the DM20 valve for upstream pressure control.
DM20 PROPORTIONAL FLOW CONTROL
VALVE
DM20
A
B
C
1501C
D
A Gas supply
C Barocel capacitance manometer
B Process/ vacuum chamber
D Gas exhaust or vacuum pump
The DM20 is a smooth-acting electromagnetic proportional flow control
valve used with the Controller 1501C for automatic upstream pressure
control. The valve orifices can be changed locally, to change the flow range
of the valve. The valve is normally closed and is made from corrosion
resistant 316 stainless steel.
PRESSURE CONTROLLER 1501C
0.48
(12.19)
Flow ranges
Maximum recommended flowrate
Minimum controllable flowrate
Operating pressure
Maximum pressure
Operating temperature
Materials exposed to process
Weight
7
• PID control
• 4½ digit display
• Dual set point relays
Use the 1501C Controller with a DM20 valve for automatic upstream
closed-loop control of vacuum and pressure systems. The Controller
1501C compares the actual system pressure (input from a Barocel 600 and
622, or 590 capacitance manometer) with the required system pressure,
and then continuously adjusts the DM20 valve to maintain actual pressure
equal to required pressure.
Pressure and set-point are displayed to 0.01% and control values can be
set to four significant figures.
Display
Output signal (linear)
Set-point relays
Electrical supply (50/60 Hz)
Compatible with Barocel
Overall dimensions
Width
Height
Depth
Approximate weight
0.90
(22.86)
0.90
(22.86)
1.00 (25.4)
PAGE
252
0-20 sccm - 0-10 slpm
10 slm
1 % full scale (0.2 sccm with smallest orifice)
14.5 - 180 psi (1 - 12.4 bar)
515 psi (35.5 bar)
0 - 60 °C
316 stainless steel, Viton or Kalrez
0.64 lb (0.29 kg)
4½ digits
0 - 10 V DC
2
115 or 230 V AC ± 10%
600, 622, 590
0.75
(19.05)
1.00 (25.4)
:
W
8
9
0
-
0
Flow range* (N2)
10 slpm
5 slpm
2 slpm
500 sccm
200 sccm
50 sccm
10 sccm
ORDERING INFORMATION 1-800-848-9800
1501C Pressure controller (115V or 230V, 50/60 Hz)
Cables (15 ft, 4.6m)
Barocel 600
Barocel 622
Barocel 590
L
ORDERING INFORMATION 1-800-848-9800
9.49 inch (241 mm)
3.46 inch (88 mm)
13.74 inch (349 mm)
7 lb (3.2 kg)
PRODUCT DESCRIPTION
1.73 (43.94)
2 x ¼" UNC -2B
x 0.235 (5.97)
ORDERING NUMBER
0
-
3
4
5
6
7
8
9
W606-30-000
W189-97-005
W189-99-005
W189-96-005
2
3
4
Pressure fitting
!/4 inch Swagelok
!/4 inch VCR
* For upstream pressure 1035 - 3360 torr absolute and downstream pressure 0 - 773 torr absolute,
maximum differential 2625 torr. For other pressure conditions, consult BOC Edwards or your local
supplier
ACCESSORIES
Cable DM20 to Controller 1501C (15 ft, 4.5 m)
shop online: www.bocedwards.com
ORDERING INFORMATION
W189-99-105
DOWNSTREAM PRESSURE CONTROL
CONTROLLER 1800
• High accuracy and reproducibility. Measures Barocel output to 0.002%
FSD and controls valve throttle plate to within 0.1 degree.
• Auto tune mode ‘learns’ system characteristics so no need for lengthy
manual adjustment.
• Simple computer interface with bi-directional RS232 or with optional
fiber optic connections.
• Unique control algorithm gives fastest system response.
In most semiconductor processes and vacuum furnace applications, downstream control of system pressure is the method of choice over upstream
control. Optimum resident time and proper pressure is achieved by independent control of the mass flow of input gases while at the same time
controlling the total pressure of the gas mixture. Transient loads of reaction by-products may be rapidly removed by increasing input gas flow
which will automatically open the throttle valve to increase pumping speed.
Clean-up between process steps is expedited by fully opening the valve
while still under control, eliminating the need for expensive by-pass valves.
Use the throttle valve Controller 1800 and the throttle valve 1850 for
downstream, closed loop pressure control, with process set points up to
50 torr.
B
RS232
A
1800
1850
C
A Process/ vacuum chamber
B Barocel capacitance manometer
C Gas exhaust or vacuum system
The RS232 link is optional
Process repeatability Accurate and repeatable process pressure is vital
in many exacting applications. The Barocel capacitance manometers are
highly accurate, with Barocel 655, 600 and 590 recommended for the best
performance. The Controller 1800 has a 16 bit analog-to-digital converter
and the stepper motor can control the 1800 throttle valve to within 0.1
degree.
Easy to link to control system The Controller 1800 is easy to link to
a computer or PLC to achieve maximum process efficiency in fully automated systems. Use either the bi-directional RS232 link, or specify the
optional fiber optic coupling.
Input step settling time1
Time for valve closed to open
Accuracy
Resolution
Allowed process time-constant
Pressure signal input
Full scale range
Other
Electrical supply input
Voltage AC (selectable)
Voltage tolerance
Frequency
Power
Electrical supply outputs
Throttle valve supply
Transducer supply
Serial communications
Standard configuration
Baud rate
Protocol
Optional
Compatible with Barocel
Operating temperature range
Mounting options
1 To 0.2% final value
shop online: www.bocedwards.com
< 7 x system volume/conductance ratio
0.3 s
0.2% full scale
0.01% full scale
0.5 - 8 s
0 - 10 V DC
Differential, 100 kl 100 kΩ minimum
100, 120, 220 and 240 V
+10%, -15%
50/60 Hz
100 VA
yes
+15 V DC 1 A
RS232 serial link
19200, 9600, 4800, 2400 bps
Even, no parity, 7 or 8 data bits, 1 or 2 stop
bits
Fiber optic coupling
600, 622, 655, 658, 659, 590 with full scale
range of 50 torr or less
10 - 40 ºC
½ 19 inch rack or ½ DIN
MEASUREMENT AND CONTROL
Auto tune The auto tune mode allows the Model 1800 controller to
learn the static and dynamic characteristics of the vacuum system. The
data collected is processed and used to supply the necessary parameters
to maintain correct system pressure.
7
PAGE
253
H
E
3.50 (89)
3.50 (89)
2.99 (76)
7.52 (191)
8.74 (222)
K x ØD
9.60 (243.80)
F
9.49 (241)
ØG
ØA
ORDERING INFORMATION 1-800-848-9800
:
C
W
1
8
0
0
-
1
ØB
0
-
H
Display
Display included
No display
0
1
Pressure fitting
!/2 19 inch rack mount 0
!/2 inch DIN mount
1
ACCESSORIES
7
PAGE
254
F
ØA
ORDERING INFORMATION
Controller cables (15 ft, 4.5 m)
Barocel 600
Barocel 622
Barocel 655, 658, 659
Barocel 590
1850 throttle valve
RS232
Electrical supply cable USA plug 2m
W189-97-005
W189-99-005
W189-92-005
W189-96-005
W189-93-005
W189-94-005
D400-13-120
C
0.25 - 31 ls-1
0.4 - 55 ls-1
0.7 - 300 ls-1
0.8 - 375 ls-1
1.0 - 500 ls-1
1.5 - 900 ls-1
2 - 2100 ls-1
3 - 3750 ls-1
NW40
1.5
2.16
2.25
6.59
NW50
1.99
2.95
2
7.15
ISO valves (inch)
ISO63
2.36
5.12
0.94
0.35
8.57
4.33
4
ØA
ØB
C
D
F
G
K
The 1850 butterfly throttle valve is designed for semiconductor and vacuum furnace applications where fast, accurate and reliable closed loop
pressure control is required.
14.5 psi (1 bar)
Contact BOC Edwards
NW40
0.78
2.16
2.25
6.59
ØA
ØB
C
F
• A wide range of bores and flange sizes from NW40 to ISO 200
• High speed motor delivers valve closed-to-open in 0.3 seconds
• Highly corrosion resistant - 316 stainless steel construction
The valve’s motor drive system has a micro stepper motor to achieve
extremely high speed and high resolution valve plate control. Typically, the
open-to-closed time is less than 0.3 seconds. This speed, together with
BOC Edwards propriety adaptive feedback control techniques, provides
fast and accurate control, particularly in systems with small ratios for process chamber volume to conductance.
ØB
NW flange valves (inch)
1850 THROTTLE VALVE
Maxumum pressure differential
NW40 - NW80 valves
Other valves
Controllable conductance
NW40 ØA = 0.78
NW40 ØA = 1.5
NW50
ISO63
ISO80
ISO100
ISO160
ISO200
E
ISO80
3
5.75
0.94
0.35
9.59
4.92
8
ISO100
3.86
6.5
0.94
0.35
10.42
5.71
8
ISO160
5.75
8.86
0.94
0.35
12.84
7.78
8
ISO200
7.83
11.14
1.56
0.43
17.4
10.24
12
ORDERING INFORMATION 1-800-848-9800
:
W
1
8
5
Flange
NW40
NW50
ISO63
ISO80
ISO100
ISO160
ISO200
-
0
-
0
0
1
2
3
4
5
7
8
Flange ID
All valves, except NW40
NW40, ØA=0.78
NW40, ØA=1.50
Contact BOC Edwards for ordering information about other valve sizes.
shop online: www.bocedwards.com
1
1
2
CG16K CAPSULE DIAL GAUGES
VS16K ADJUSTABLE VACUUM SWITCH
The VS16K is a general purpose vacuum switch with a user adjustable set
point and small switching differential.
Reading independent of gas type
Accurate to ±2% of full scale
Barometrically independent
Pipeline or panel mounting
Easy to read linear scale
Rugged construction
Bezel removable for cleaning
2.01 (51)
A
0.24 (6)
3.57 (90.75)
2.21 (56)
NW16
2.76 (70)
0.59
(15)
Ø4.37/4.41 (111/112)
2.66 (67.5)
Ø4.53 (115)
1.89 (48)
2.28 (58)
Ø4.02 (102)
1.02
(26)
A = Mating half shown fitted
7
PAGE
255
TECHNICAL DATA
NW16
0.47 (12)
0.24 (6)
TECHNICAL DATA
Ranges
Accuracy
Maximum applied pressure
25 mbar version
Other versions
Weight
Vacuum connection
Accessories supplied
0-1050 mbar
0-125 mbar
0-50 mbar
0-25 mbar
0-760 torr
0-100 torr
0-40 torr
0-20 torr
±2% of full scale deflection
1 bar absolute, 0 bar gauge
2 bar absolute, 1 bar gauge
1 kg
NW16 flange
Clamp and studs for panel mounting
Range of adjustment
Maximum switching differential
Maximum working pressure
Electrical rating
Electrical connection plug
Internal volume
Materials in vacuum
Leak rate
Enclosure classification
Weight
Vacuum connection
Accessories supplied
CG16K,
CG16K,
CG16K,
CG16K.
CG16K,
CG16K,
CG16K,
CG16K,
0-1050 mbar
0-125 mbar
0-50 mbar
0-25 mbar
0-1000 torr
0-100 torr
0-40 torr
0-20 torr
30 to 1000 mbar1
30 mbar
1 bar gauge (2 bar absolute)
10 A resistive, 5 A inductive at 250V AC
Type 283 mPm
7 cm3
stainless steel
< 1 × 10-9 mbar I s-1
IP52
0.7 kg
NW16
Mating electrical socket Type 183 mPm
1 Set point varies with barometric pressure
ORDERING INFORMATION 1-800-848-9800
PRODUCT DESCRIPTION
VS16K adjustable vacuum switch
ORDERING INFORMATION 1-800-848-9800
PRODUCT DESCRIPTION
MEASUREMENT AND CONTROL
•
•
•
•
•
•
•
This diaphragm operated vacuum switch is high vacuum compatible and
corrosion resistant with all wetted parts made from stainless steel. A high
current rating allows direct switching of loads without additional relays or
external power supplies.
• Set point range 30-1000 mbar
• User adjustable
• Reproducible
• Changeover contacts for normally open or normally closed operation
• Switch point independent of gas composition
• Corrosion resistant
• Direct pipeline mounting
ORDERING NUMBER
D356-10-000
D356-11-000
D356-12-000
D356-13-000
D356-30-000
D356-31-000
D356-32-000
D356-33-000
shop online: www.bocedwards.com
ORDERING NUMBER
D059-15-000
IS16K VACUUM INTERLOCK SWITCH
The IS16K vacuum interlock switch is designed to safeguard the operator
by ensuring that electrical circuits in the vacuum chamber do not remain
energized when the system is let up to atmosphere. Typical applications
include interlocking of the HT cleaning or process circuits on thin film
deposition and vacuum systems.
The IS16K is high vacuum compatible and corrosion resistant, with all
wetted parts made from stainless steel. A high current rating allows direct
switching of loads without additional relays or external power supplies.
BOC Edwards' exclusive design provides the following safety features:
• Single non-adjustable set point, cannot be tampered with
• Positive break switch, as required by BS4794/IEC 338-1
• Rapid contact separation, prevents arcing
• Breaks circuit directly, no relays required
• Corrosion resistant
• Direct pipeline mounting
2.01 (51)
A
7
2.21 (56)
NW16
PAGE
256
Ø4.02 (102)
2.28 (58)
1.02
(26)
A = Mating half shown fitted
TECHNICAL DATA
Fixed set point
Maximum switching differential
Maximum working pressure
Electrical rating
Electrical connection plug
Internal volume
Materials in vacuum
Leak rate
Enclosure classification
Weight
Vacuum connection
Accessories supplied
640 ±120 mbar1
100 mbar
1 bar gauge (2 bar absolute)
10 A resistive, 5 A inductive at 250V AC
Type 283 mPm
7 cm3
Stainless steel
< 1 × 10-9 mbar Is-1
IP52
0.7 kg
NW16
Mating electrical socket Type 183 mPm
1 Set point varies with barometric pressure
ORDERING INFORMATION 1-800-848-9800
PRODUCT DESCRIPTION
IS16K vacuum interlock switch
ORDERING NUMBER
D059-14-000
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VACUSTAT McLEOD GAUGES
1 TO 10 -3 mbar
TECHNICAL DATA
10 - 10-2 mbar
1 - 10-3 mbar
97 g
140 g
900 g
85 g
105 × 180 mm
220 mm
87 × 159 mm
110 mm
95 mm
BOC Edwards SC5
B14 cone (male)
ORDERING INFORMATION 1-800-848-9800
A mercury charge is not supplied with these items and is not available from BOC
Edwards.
PRODUCT DESCRIPTION
Vacustat Model 1
• Miniature McLeod gauge
• Simple operation
• Bench, panel or system mounting (model 2G)
The BOC Edwards range of Vacustat gauges is a family of three miniature
McLeod gauges designed for general laboratory or industrial duties.
The gauge is normally positioned with the measuring capillary and scale
horizontal. To take a measurement, the head is rotated through 90°
around its rotary seal to bring the tube and scale upright. The rotation
causes the mercury to move within the glassware and isolate a fixed volume of the gas whose pressure is to be measured. The trapped gas is then
compressed into the closed capillary tube. When the mercury in the open
capillary is level with the zero mark on the measuring scale, the system
pressure is given by the height of the mercury column in the closed capillary against the scale (which is calibrated directly in mbar).
ORDERING NUMBER
Vacustat Model 1
D063-13-000
Vacustat Model 2
D063-14-000
Vacustat Model 2G
D064-05-000
Model 1 and Model 2 supplied with: SC5 ‘ O’ ring, ‘ O’ ring carrier and nut, nozzle
adapter for 7 mm bore rubber tube. Model 2G supplied with B14 cone (female) and
retaining clip.
SPARES
Gauge head glassware
Vacustat Model 1
Vacustat Model 2
Vacustat Model 2G
Model 1: can be free-standing or panel mounted, measures from
10 to 10-2 mbar
Model 2: can be free-standing or panel mounted, measures from
1 to 10-3 mbar
Model 2G: is a lightweight glass gauge for mounting directly to the
vacuum system. Measures from 1 to 10-3 mbar
Vacustat Model 2G
shop online: www.bocedwards.com
ORDERING NUMBER
D063-01-001
D063-03-001
D064-02-001
MEASUREMENT AND CONTROL
Range
Model 1
Model 2, Model 2G
Mercury charge
Model 1
Model 2, Model 2G
Weight without mercury
Model 1, Model 2
Model 2G
Dimensions
Model 1 and Model 2 fascia
Model 1 and Model 2 height
Model 2G
Clearance needed for rotation
Model 1, Model 2
Model 2G
Vacuum connection
Model 1, Model 2
Model 2G
7
PAGE
257
MASS FLOW MEASUREMENT AND
CONTROL
CONTROLLER 1605
Use our 831 mass flow transducers and 825 mass flow controllers in combination with the Controller 1605 for many common gas-handling systems,
including:
• Single and multiple channel gas flow control
• Leak testing
• Gas blending
• Ion beam etching, ion implantation, plasma deposition and CVD systems
• Sputtering systems and crystal growing
MASS FLOW TRANSDUCERS AND
CONTROLLERS
• Multi-channel display
• Control flows independently or as ratios
• Multiple analog I/O for data acquisition and control
The 2 or 5 channel (input) Controller 1605 controls the 831 mass flow
transducers and 825 mass flow controllers either independently or in ratio.
For each of the transducers/ controllers, a front panel switch changes the
display between flow rate and set-point value, and allows the input of a gas
calibration factor for that device. The Controller 1605 operates independently or can be used with an external computer based control system.
7
PAGE
258
• High accuracy with excellent repeatability, standard and fast response
options available
• True measurement of mass flow - independent of pressure and
temperature
• Easy calibration for different gases
• Easily to clean, easy to replace sensors and change range on site
• Corrosion resistant
• 825 units have integral normally closed valves with low dead volume for
rapid purging
The 831 mass flow transducers are compact, low cost units that output a
high level electrical signal which is directly proportional to mass flow. The
825 mass flow controllers have the same measurement function as the 831
transducers but also have an integral servo valve which controls flow proportional to external voltage signal.
Full scale ranges available
sccm
slm
Accuracy with N2 or air1
Maximum differential pressure
Seals
Fittings
Output signal (into 2000 Ω min load)
Electrical supply
Weight
Display
Number of channels (inputs)
Electrical supply
Inputs†
From 831 or 825
From external set-point reference
Outputs1
Flow signal
Flow signal conditioned for gas
Flow control voltage
Power to 831 or 825
Valve over-ride
Dimensions
Width
Height
Depth
Weight
3½ digits
2 or 5
115/230 V AC +10%, 50/60 Hz
0-5 or 0-10 V DC
0-5 or 0-10 V DC
0-5 or 0-10 V DC
0-1 V DC (air)
yes
+ 15 V DC
yes
9.5 inch (241 mm)
3.46 inch (88 mm)
14.76 inch (375 mm)
10 lb (4.5 kg)
1 For each channel (input)
ORDERING INFORMATION 1-800-848-9800
PRODUCT DESCRIPTION
Contoller 1605, 115 V, 2 channel
Contoller 1605, 115 V, 5 channel
ACCESSORIES
Cable to 831 or 825 (15 ft, 4.6 m)
5, 10, 20, 50, 100, 200, 500
1, 2, 5, 10, 20
±1% full scale
2 psi
Viton or Kalrez
Swagelok, VCR or VCO
0 - 5 or 0 - 10 V DC
±15 V DC ± 5%, regulated
1.1 lb (0.5 kg)
1 Calibration for gases other than N2 is achieved with gas correction factors or special tests. Calibration
is referenced to gas at standard conditions, (0 °C and 760 torr).
shop online: www.bocedwards.com
ORDERING NUMBER
W827-11-000
W827-21-000
ORDERING INFORMATION
W829-99-305