Ultra High Vacuum Stepper Motors
•
•
•
•
•
•
1.8° Step angle
Suitable for use below 1 x 10-10 mBar
Bakeable to 200°C
Embedded K type thermocouple
Operational range -65°C to +175°C
Custom options available
Fourth Generation Hybrid UHV Stepper Motors
AML stepper motors are specifically designed for use in UHV environments making them ideally suited for low
speed precision in-vacuum manipulation without the use of particle generating motion feed-throughs. The considerable reduction in mechanical complexity, absence of metal to metal sliding surfaces and low outgassing characteristics make these motors especially suitable for sensitive handling applications
The model D motors are two phase hybrid stepper motors, available in a range of standard sizes and torque ratings. Standard motors provide 200 full steps per revolution and are suitable for use between -65°C to +175°C.
Extended low temperature range (-196°C) versions, radiation hard versions (1 x 107 Gy), shaft modifications and
hybrid bearings are all available options.
All motors are designed, cleaned and hand assembled to UHV standards in an ISO Class 7 cleanroom.
Technical Data
Model
Phase Inductance
A
Phase
Resistance
at 20°C
Ώ
190
1.0
4.7
3.8
15
350
1.0
5.3
6.6
9
15
470
1.0
6.8
10.5
102
9
15
610
1.0
8.5
19.5
300
20
60
700
1.0
10.5
27.0
Holding
Torque
Detent
Torque
Rotor
Inertia
Max.Axial
Force
Mass
Current
Per Phase
kgf
Max.
Radial
Force (1)
kgf
mNm
mNm
gcm2
g
D35.1
70
8
10
9
15
D42.1
180
8
35
9
D42.2
360
14
68
D42.3
450
20
D57.1
800
30
Operating temperature
Bakeout temperature
Step angle
Step angle tolerance
Lead length
-65°C to +175°C
200°C
1.8°
5%
1.5m
mH
(1) Refer to application note 27 for details
Version 1.7
Speed vs torque characteristics
The performance shown on these graphs was obtained using an SMD210 drive operating with standard settings
for step division.
SMD210 is a switch-mode, bipolar, current-regulating drive with a nominal source of 67volts, optimised for use with
vacuum motors. At low speed where step division is active the RSS (root sum of squares) of phase current is set
to the nominal current. Over most of the speed range the drive operates in wave mode with nominal set current in
only one energised phase.
Different drives will produce different speed / torque curves. Drives capable of producing a total phase current of
more than 1A RSS may damage the insulation. Drives with significantly lower source voltages may result in poor
high speed performance. Use of the embedded thermocouple is essential for motor protection.
D35.1
150
1.0A
100
To
orque (mNm)
0.8A
0.6A
50
0.4A
0
10
100
1000
10000
Step Frequency (Hz)
SMD210Drive,nominalsourceof67Volts.
D42.1
D42.2
Speed (rpm)
3
30
300
Speed (rpm)
3
3000
30
300
100
1000
3000
500
250
450
400
200
1.0A
1.0A
To
orque (mNm)
To
orque (mNm)
350
0.8A
150
0.6A
100
0.4A
0.8A
300
0.6A
250
200
0.4A
150
100
50
50
0
0
10
100
1000
10
10000
SMD210Drive,nominalsourceof67Volts.
SMD210Drive,nominalsourceof67Volts.
D42.3
Speed (rpm)
3
30
300
D57.1
Speed (rpm)
3
3000
30
300
100
1000
3000
900
500
1.0A
850
1.0A
450
800
0.8A
750
0.8A
400
700
650
350
0.6A
600
Torque (mNm)
T
To
orque (mNm)
10000
Step Frequency (Hz)
Step Frequency (Hz)
0.6A
300
250
0.4A
200
550
500
450
400
0.4A
350
300
150
250
200
100
150
100
50
50
0
0
10
100
1000
10000
10
SMD210Drive,nominalsourceof67Volts.
10000
Step Frequency (Hz)
Step Frequency (Hz)
SMD210Drive,nominalsourceof67Volts.
Dimensions
D35.1
1.5m
Lead length
Leads terminated with
1.5mm crimp sockets
ITT Cannon P/N 192990-0090
M3 thread x 6.5
5.00
4.98
35
22.0
21.9
26
4 x Ø3.2 Pumping
ports on 26.0 PCD.
Both ends.
26
2.0
20
35
27±1
D42.X
1.35m
Lead length
Leads terminated with
1.5mm crimp sockets
ITT Cannon P/N 192990-0090
M3 thread x 8.5
5.00
4.98
42
22.0
21.9
31
31
8 x Ø3.2 Pumping
ports on 31.0 PCD.
Both ends
2.0
23.0
42
L 1
D57.1
Leads terminated with
1.5mm Crimp sockets
ITT Cannon P/N 192990-0090
1.35m
Lead length
5.2 X 4
Mounting Holes
5.4
6.35
6.34
56
38.13
38.07
47
1.6
47
56
20
55±1
8-off Ø3.3 Pumping ports
on 44.0 PCD. Both Ends.
Motor
Length L
D42.1
D42.2
D42.3
35
49
61
Ordering information
Bearings:Standard motors are fitted with open stainless steel bearings lubricated with NyeTorr® 6300 UHV grease.
Option ‘H’ motors have hybrid bearings with silicon nitride ceramic balls, dry lubricated with molybdenum disulfide.
Options:H. Hybrid ceramic bearings
R. Radiation hardened to 1 x 107 Gy
X. Shaft modification. Please provide a sketch of your requirement
C. Cryogenic. Extended operating temperature range. -196°C to +175°C
Order code format
Order Code
D42.1
D35.1
70mNm UHV Stepper Motor
D42.1
180mNm UHV Stepper Motor
D42.2
360mNm UHV Stepper Motor
D42.3
480mNm UHV Stepper Motor
D57.1
800mNm UHV Stepper Motor
Order Code
Related products
SMD210
Stepper motor drive
MLF18F
18-way electrical feedthrough
MLF18NBL
3-metre lead, SMD210 to MLF18F
Option
Sales:
tectra GmbH
Reuterweg 65
D-60323 Frankfurt
Tel.: +49-69-720040
info@tectra.de
AML pursues a policy of continuous improvement and reserves the right to make detail changes to specifications without consultation. E and OE.
R
SMD210 Stepper Motor Drive
Dual sequential stepper motor controller
The SMD210 Vacuum-Compatible Stepper Motor Drive is designed to match AML motors. Two
motors may be driven sequentially under host computer control or by an internally stored
program. Manual operation is also available from the front panel switches or a hand-held
joystick.
Features
• Drives 2 UHV stepper motors sequentially.
• Advanced low-power drive techniques for minimum motor temperature rise and outgassing and maximum
operating time.
• Phase currents can be set from 0.1 to 1A in increments of 0.1A.
• Holding torque can be controlled independently of dynamic torque under program control, to reduce
power.
• Full, half, ÷4, ÷8 step drive modes with automatic transition at user selectable speeds. (Stops on full step
positions only. Micro-stepping used for control of resonance and smoother step transition.)
• Thermocouple amplifiers (type K) for motor temperature indication, protection and control of motor
bakeout.
• RS232C interface for host computer control. Drive programs can be developed and run from the computer
console (Remote Program Control) or downloaded for stand-alone operation (Internal Program Control).
• Motors may be operated manually with the front panel 'STEP' switches or with a joystick. Single-step or
multiple-step operation with smooth acceleration to the selected speed.
• 3 user inputs for interaction with program execution, in addition to two "End of travel" inputs for each
motor.
• 3 user outputs for switching under program control.
• Simple control language has many powerful commands which allow control of all aspects of motion or
position. Conditional operation, loops and jumps are possible.
• 1U high full-width, steel-cased instrument for easy rack-mounting.
• Operates from 100 to 240V, 50/60 Hz supply.
SPECIFICATIONS:
Switch-mode current-regulating power stage with a nominal source of 67volts, for bipolar control of 2-phase vacuum
stepper motors.
Command Summary
Ax
Bx
b
Cx
Dx
E
F
fx
G+/-x
g+/H+/hx,y
In
J,j
K
Ln
M
P
Q
Tx
Set user output x
Select motor x
Bakeout selected motor. (175°C)
Clear user output x
Delay x milliseconds, where x is 1 to 65535
Start execution of a resident program
Status request. (Busy, ready or error condition)
Preset position counter to x. (Sets a reference location at x=0)
Go to a defined location x steps from a reference location
Rotate at preset speed indefinitely in the specified direction
Go to a location 8 steps inside the specified (EOT+ or EOT-) limit switch
Set the power reduction parameters (time and phase current after hold time)
Initialise user output or position counter, as defined by n
Jump to another part of the program
Abort program execution
Loop through a sequence n times, where n is 1 to 255
Set the step rates for automatic ministep mode transition
Enter or exit the programming mode of operation
Read the program resident in memory back via RS232C
Define the current slew speed in steps per second, where x is between 10 and the maximum rate
defined by the x command (<6000)
Until. Continue executing the resident program until user input x is “low”
Status request. (Position, user inputs, temperature, software version, dynamic parameters)
Wait for user input p to go “low” before executing the next instruction
Define the acceleration / retardation parameters, where x is the start speed, y is the maximum
slew speed and z is the number of steps in the acceleration or retardation ramp
Reduce speed to zero with the defined retardation
Rotate x steps in the defined direction, where x is between 1 and 10E+6
Ux
Vx
Wp
Xx,y,z
Z
+/-x
The above is given for information purposes only and is not intended to be a rigorous specification for programming purposes
Order Code
SMD210
Dual UHV-Compatible Stepper Motor Drive
SPECIFICATIONS:
Related products
C14.1, C17.1, C17.2
UHV Compatible Stepper Motors
MLF18F
18-way Feedthrough (CF70)
MLF18NBL
Lead. SMD210 to MLF18F
SMDJOY
SMD210 Joystick
AML pursues a policy of continuous product improvement and reserves the right to make detail changes to specifications without consultation. E and OE.
Sales:
tectra GmbH
Reuterweg 65
D-60323 Frankfurt
Tel.: +49-69-720040
Fax: +49-69-720400
info@tectra.de
www.tectra.de