894 IEEE TRANSACTIONS ON ELECTRON DEVICES, VOL. 50, NO. 4, APRIL 2003 Design and Performance of Tunnel Collector HBTs for Microwave Power Amplifiers Rebecca J. Welty, Member, IEEE, Kazuhiro Mochizuki, Senior Member, IEEE, Charles R. Lutz, Roger E. Welser, and Peter M. Asbeck, Fellow, IEEE Abstract—AlGaAs/GaAs/GaAs and GaInP/GaAs/GaAs n-p-n heterojunction bipolar transistors (HBTs) are now in widespread use in microwave power amplifiers. In this paper, improved HBT structures are presented to address issues currently problematic for these devices: high offset and knee voltages and saturation charge storage. Reduced HBT offset and knee voltages ( and ) are important to improve the power amplifier efficiency. Reduced saturation charge storage is desirable to increase gain under conditions when the transistor saturates (such as in over-driven Class AB amplifiers and switching mode amplifiers). It is shown in this paper that HBT structures using a 100-Å-thick layer of GaInP between the GaAs base, and collector layers are to 30 mV and measured at a effective in reducing collector current density of 2 104 A cm2 to 0.3 V (while for conventional HBTs = 0 2 V and = 0 5 V are typical). A five-fold reduction in saturation charge storage is simultaneously obtained. Index Terms—GaAs/GaInP, heterojunction bipolar transistors, saturation charge storage, switching mode microwave power amplifiers, tunnel transistors. I. INTRODUCTION G aInP/GaAs/GaAs n-p-n heterojunction bipolar transistors (HBTs) are now in widespread use in microwave power amplifiers. Amplifier efficiency is a key issue, particularly problematic at low power supply voltages. In representative mobile handset applications, Class AB amplifiers are predominantly used as a compromise between the requirements for high linearity and efficiency. With battery voltages of 3 to 5 V, these amplifiers are generally limited to an efficiency of 35–40% in linear applications, such as code divison multiple access (CDMA), and 55 % in saturated output applications, such as the global system for mobile communications (GSM) family of standards. To improve the amplifier efficiency, it is important to reduce the HBT offset and knee voltages, which yields a larger available voltage swing. For saturated output applications, higher efficiency can also be obtained with overdriven Class B, Class F, and switching-mode amplifiers, whose efficiency can reach over Manuscript received August 27, 2002; revised December 3, 2002. This work was supported in part by the U.S. Army Research Office. The review of this paper was arranged by Editor C.-P. Lee. R. J. Welty is with the Lawrence Livermore National Laboratory, Livermore, CA 94550 USA (e-mail: welty2@llnl.gov). P. M. Asbeck is with the University of California at San Diego, La Jolla, CA 92037-0407 USA. K. Mochizuki is with the Central Research Laboratory, Hitachi, Ltd., Tokyo 185-8601, Japan. C. R. Lutz and R. E. Welser are with Kopin Corporation, Taunton, MA 02780 USA. Digital Object Identifier 10.1109/TED.2003.812088 70% at microwave frequencies. Bipolar transistors are not typically used in these modes because of the large saturation charge storage, which occurs when the device is in the “on” state. When the bipolar transistor switches into saturation, holes diffuse into the collector from the base. The stored charge must be eliminated before the device can switch off [1], which introduces a significant switching delay. In order to improve the performance of these types of amplifiers, it is necessary to reduce the HBT saturation charge storage. Fig. 1 shows a calculated energy-band diagram for a representative single HBT (SHBT) and double HBT (DHBT) (wide bandgap material in the collector region) using the GaAs/GaInP material system. The calculated energy band diagrams in this work were done with a one-dimensional (1–D) Schrödinger/Poisson Solver. The SHBT has numerous features that make it attractive for use in power amplifiers, including high microwave gain, high output power per unit-chip area, and high ruggedness. However, the SHBT has the drawbacks of a high offset voltage and saturation charge storage because of the homojunction base–collector junction. The DHBT has advantages due to reduced offset and knee [1], [2] voltages, as well as reduced saturation charge storage due to the sizable valence-band discontinuity at the base–collector heterojunction. The wide bandgap GaInP material in the collector region of the DHBT also provides a 1.6 time increase in breakdown voltage over that of GaAs due to the larger breakdown field [3]. However, a prominent design challenge for DHBTs is to eliminate the barrier at the base–collector junction, which blocks carriers from reaching the collector, causing a significant decrease in (that in both the peak collector current and gain as well as ). The tunnel-collector HBT turn leads to a reduction in (TC-HBT) presented here addresses the requirements of low offset and knee voltages and reduced saturation charge storage, while maintaining good electron transport at the base–collector junction. Although GaInP has a smaller electron velocity than GaAs, the thickness of GaInP added to the collector of the of the device remains high. TC-HBT is at a minimum, so the The increase in thermal resistance, which exacerbates thermal runaway problems, that is expected for thick GaInP collector layers is also avoided. Various research groups have used tunnel and barrier layers to design high-performance HBTs [4]–[8]. DC characteristics of collector-up (C-up) TC-HBTs have been reported [4]. These devices have almost zero offset voltage due to the asymmetry of the band discontinuity between GaInP and GaAs, depending on the growth direction. GaAs grown on GaInP has a smaller than GaInP grown on GaAs; therefore a C-up approach 0018-9383/03$17.00 © 2003 IEEE WELTY et al.: DESIGN AND PERFORMANCE OF TUNNEL COLLECTOR HBTs 895 Fig. 2. Energy-band schematic of a mass filter. Tunneling of electrons is permitted (smaller barrier and effective mass), but tunneling of holes (larger barrier and effective mass) is suppressed. Fig. 3. Fig. 1. Calculated energy-band diagrams for a representative (a) SHBT and (b) DHBT in the GaAs/GaInP material system using E (GaAs) = 1:42eV and E (GaInP) = 1:89eV. The conduction band discontinuity is taken to be 0.18 eV with the remaining difference in the valence band. will have a smaller amount of electron blocking at the base–collector (BC) junction. The smallest offset voltage can be achieved at the BC junction. using a C-up approach due to minimal Emitter-up (E-up) TC-HBTs are inherently easier to fabricate, however. To date, RF characteristics of E-up TC-HBTs have not been reported. In this paper, RF results on TC-HBTs are presented, which show that these devices are promising candidates for higher efficiency power amplifiers. In this paper, high-performance TC-HBTs are demonstrated with a 100-Å-thick tunnel layer between the base and collector. These devices have low offset and knee voltages of mV and V at a representative collector current density of 2 10 A cm , respectively, together with a high dc peak incremental current gain of 200. For small area devices 10 A cm , the at a collector current density of of 76 GHz and of 89 GHz. In comparTC-HBT has an ison with conventional GaInP/GaAs HBTs, these devices have a five-time reduction in saturation charge storage. II. DESIGN CONSIDERATIONS The aim of the TC-HBT is to combine the positive attributes of SHBTs and DHBTs into one device by reducing the thickness of the wide bandgap material in the collector to a minimum, such that electrons can tunnel through the base–collector con- Calculated energy-band diagram of a representative TC-HBT. duction-band barrier, but simultaneously kept large enough so that it blocks holes in the base from diffusing into the collector when the base–collector junction is forward biased. The approach is based on the “mass filter” concept, as shown in Fig. 2. ) to Electrons having a smaller effective mass and barrier ( tunnel through will have a higher tunneling probability than the ) to tunnel holes, which have a larger mass and barrier ( through. In doing this, the majority of advantages of SHBTs and DHBTs are combined into one device. The TC-HBT design will allow reduced offset voltage, knee voltage, and saturation charge storage compared with a conventional GaAs collector. A calculated energy-band diagram for the TC-HBT is shown in Fig. 3. The TC-HBT design depends on the relative tunneling probabilities for electrons ( ) and light holes ( ) through barriers and . For simplification, the barrier at of magnitude the base–collector junction can be approximated as a square barrier; then, the tunneling probability is expressed in (1) and (2) is the size of the barrier, is the incident energy, [9], where is the thickness of the barrier, is Planck’s constant, and is the wave vector, which is dependent on the above-mentioned parameters, as well as the effective mass of the carrier in the tunnel layer (1) (2) eV and According to these expressions, using eV for the heterojunction between GaAs and dis[10] and ordered GaInP, and 896 IEEE TRANSACTIONS ON ELECTRON DEVICES, VOL. 50, NO. 4, APRIL 2003 [9] for GaInP, the ratio is 4 10 for an incident eneV. The ratio of for a 50-, 100-, and ergy of , there is ade200-Å barrier is shown in Fig. 4. For large quate suppression of holes diffusing into the collector and small . If the barrier is too thick, then the electron transport will be impeded, causing the knee voltage to be increased. Experimentally, we have found that a device with a 200-Å-tunnel layer does block electrons at the base–collector junction, as determined from a significant increase in the amount of output conductance in the common emittercurrent–voltage ( – ) curves for the 200-Å tunnel layer compared to the 100-Å tunnel layer device. In this paper, a 100-Å tunnel layer is used. A 50-Å spacer layer is inserted before the tunnel layer to further lower the conduction band, which eases the tunneling requirements for electrons. The TC-HBT epilayer structure is shown in Table I. For comparison, an SHBT was processed at the same time, with an identical epilayer design with the exception of the tunnel and spacer layers. The TC-HBT device design uses the GaAs/GaInP material system using disordered GaInP lattice-matched to GaAs with an indium composition of 0.5. GaInP can be selectively etched (using HCl) over GaAs, which makes the device etching routine. The device processing was done with a nonself-aligned conventional process using wet chemical etching, contact lithography, electron-beam metal evaporation, and polyimide for the interlayer dielectric. Fig. 4. Calculated transmission ratio T =T for a GaInP square barrier with GaAs on both sides using the following values: E : eV, E eV, m : m , m : m . : 0 29 = 0 092 = 0 145 1 = 0 18 1 = TABLE I EPILAYER STRUCTUREOF THE TC-HBT III. DEVICE RESULTS AND DISCUSSION A. DC Characterization DC measurements were done to determine the offset and knee voltages. Fig. 5 shows the common–emitter – curves for the TC-HBT with a 100-Å tunnel layer and for comparison, an SBHT. Both devices have excellent peak incremental current gain: 201 and 218 for the TC-HBT and SHBT, respectively, as shown in Fig. 6. The TC-HBT has a smaller offset and knee is related to voltage than the SHBT. The offset voltage associated the difference between the base–emitter voltage and the base–collector voltage associated with a given with the same amount of forward current of the base–collector junction. For the SHBT the offset voltage is relatively large because the base–emitter and base–collector heterojunctions are not electrically symmetrical. In SHBTs, the base–collector is a homojunction; therefore, the diode current will be due to both electrons and holes. In DHBTs, by contrast, the base–emitter junction is a heterojunction, and the only significant contribution to base–collector junction current will be from the electrons in the emitter diffusing into the base (the holes are blocked by the valence-band discontinuity). It is the decrease in base–collector current of the DHBT that decreases the offset voltage. This is illustrated in Fig. 7. When the forward diode current A cm , the offset voltage is significantly reduced, and component of the current at lower current densities, the dominates and the offset voltage is not significantly reduced. mV (meaThe TC-HBT has an offset voltage of and A), which is a 140-mV resured at duction compared to the SHBT, as shown in Fig. 5. Expressions for the offset voltage have been developed, taking into account the specific device structure [11]–[13]. The expression for offset voltage can be determined from Ebers–Moll equations [12] (3) The first term is due to the emitter resistance. The second term is due to the difference in collector and emitter geometries. The third term is from the electrical differences between each junction. For SHBTs, the difference in electrical junctions is the dominant term. The ratio of collector to emitter geometries for . This term the layout of the device in Fig. 5 is mV. Therefore, the TC-HBT alone results in a with a 100-Å tunnel layer is effective to reduce the difference in diode current between the base–emitter and base–collector. In order to further reduce the offset voltage, scaling of the collector to emitter layout geometries should be carried out. An important determinant of amplifier efficiency is the knee at which there is a transition between saturation voltage and forward-active mode. Emitter and collector resistance plus the voltage drops associated with any internal barriers will inabove . The TC-HBT has a knee crease the value of V, while the SHBT has a value of voltage of WELTY et al.: DESIGN AND PERFORMANCE OF TUNNEL COLLECTOR HBTs 897 Fig. 6. Peak incremental current gain for the SHBT (H TC-HBT (H = 201). = 218) and Fig. 5. Common emitter I –V curves of the TC-HBT compared to an SHBT. The insert shows an expanded view of common emitter I -V curves, illustrating the reduction in offset voltage for the TC-HBT, I = 25, 50, 75, and 100 A. V, measured at representative operational current densities of 2 10 A cm . However, the knee voltage of the TC-HBT is a “soft knee” compared to the SHBT. Nonetheless, the reduction in the knee voltage of the TC-HBT directly impacts the power added efficiency (PAE) of the transistor. For example, for class A, AB, or B operation, the PAE is dependent on according to PAE (4) is the battery supply voltage. Taking to be 3.4 where V as appropriate for a Li ion cell, an increase of PAE by 7% may be expected from the reduction in knee voltage from 0.5 to 0.3 V. This increase in PAE is an important development for HBT power amplifiers. Ruggedness is also of importance for power amplifiers. The breakdown voltage is determined by the avalanche breakdown in the collector region and is easily varied by changing the doping and thickness in the collector. However, this is a design tradeoff with , since as the collector thickness is increased, the transit time through the collector will increase, which will of the device. The breakdown characteristics decrease the of the TC-HBT were compared to the SHBT. Measurements V and show equivalent breakdown behavior: V. B. Scattering Parameter Characterization To further characterize the TC-HBT, measurements were done to determine the transistors’ cut-off frequency. Scattering parameter measurements were carried out with on-wafer probing using an HP8510C network analyzer from 0.5 to 50 10 A cm , GHz. At a collector current density of of 68 GHz and of the SHBT control device has an 80 GHz. At the same current density, the TC-HBT has an of 54 GHz and of 68 GHz, which are somewhat lower values than for the SHBT. It is likely that the barrier to electrons at the base–collector junction decreases slightly and of the TC-HBT, as is further discussed in the Section III-D. Even though the frequency response is reduced in the TC-HBT, it is still sufficient for most microwave power Fig. 7. Diode characteristics of the base–collector junction for the TC-HBT and SHBT compared to the base–emitter current, showing the reduced offset voltage for the TC-HBT. amplifier applications. In fact, the observed gain roll-off for the TC-HBT is pushed to a higher current density than the 10 A cm , the TC-HBT has a peak SHBT. At GHz with a GHz, as shown in Fig. 8. C. Saturation Charge Storage Measurements In SHBTs, holes are blocked from diffusing into the emitter but not into the collector, when the transistor goes into saturation mode (both base–emitter and base–collector junction forward-biased). The holes that enter the collector will take a finite amount of time to recombine. This slow recombination process limits the use of bipolars in many switching circuit applications. For silicon bipolar transistors, the collector region can be doped with gold, which forms deep centers [14]. These recombination centers reduce the recovery time of the saturated diode. However, the added recombination centers will also decrease the of the device by increasing the charging time of the collector region. Saturation-charge storage measurements were done by Chen et al., showing that the charge storage is reduced for DHBTs [15]. Here, saturation charge storage measurements on TC-HBTs are done using the same measurement technique. The base–collector diode is driven with a sine wave, and the output voltage response is measured with a high-speed oscilloscope (HP54120T). Bias tees are used to set up the dc bias condition. 898 Fig. 8. IEEE TRANSACTIONS ON ELECTRON DEVICES, VOL. 50, NO. 4, APRIL 2003 Extrapolated f and f for the TC-HBT. The base–collector diode was biased at V. The input sine wave was at 300 MHz with 8-dBm input power. For the SHBT, as the diode turns on and conducts forward current, holes from the base diffuse into the collector, and electrons from the collector diffuse to the base. The base is doped 10 times greater than the collector. Therefore, the majority of saturation charge storage is due to holes diffusing from the base to the collector. When the diode becomes reverse-biased, the stored charge keeps the diode turned on, and the negative input voltage causes a reverse current, which extracts the stored charge. Fig. 9 shows the measured time-domain response for the SHBT and TC-HBT. The SHBT suffers from charge storage, which can be seen as the negative dip in the output waveform. The ideal response is a half-wave sinusoid. From the data, the TC-HBT has an estimated five–time reduction in saturation charge storage. The 100-Å tunnel layer in the base–collector junction of the TC-HBT effectively blocks holes from diffusing into the collector. This finding opens up the circuit designer’s freedom to use HBTs in switching mode amplifiers. Fig. 9. Measured time-domain response of the base–collector diode. Charge storage is evident in the SHBT by the dip in the waveform. Charge storage is = 1:1 V, f = 300 MHz, P = suppressed for a 100-Å tunnel layer (V 8 dBm). the output conductance for the TC-HBT is slightly decreased. Depending on the design of the setback layer and tunnel barrier, there can also be a component of electrons that accumulate in a potential well at the base–collector junction, as shown in the calculated base–collector conduction band diagram in Fig. 10. D. Barrier Effects The barrier at the base–collector of DHBTs often significantly blocks electrons from diffusing into the collector. Experimentally, the barrier has been shown to reduce the current gain of the device, as well as decrease the early voltage [16], [17]. Setback layers and delta doping can be used to decrease the barrier between the base and collector; however, there have been few attempts in the GaInP/GaAs material system where this was done successfully [1]. HBTs using GaInP in both the emitter and collector regions with AlGaAs with varying aluminum compositions across the base have been carried out and shows no evidence of a barrier at the base–collector junction [18]. In the TC-HBT, the barrier at the base–collector junction also slightly blocks electrons from diffusing into the collector. As a result, the minority carrier concentration at the collector edge of the base increases over that which is obtained in an SHBT at a given current density . In turn, the concentration of electrons throughout the base will undergo a slight increase. This minority carrier accumulation leads to reduced current gain and reduced . The barrier also leads to an increased output conductance in the – curves (as shown in Fig. 5) for the TC-HBT compared to the SHBT. With increased , the barrier is reduced, and E. Device Design Improvements The TC-HBT presented in this paper showed excellent dc and radio frequency (RF) results; however, there is room to reduce the barrier at the base–collector junction. With a reduced barrier at the base–collector junction, the resulting device will still , , and have the benefits of the hole barrier (reduced saturation charge storage) but can be optimized such that the electron transport at the base–collector junction is unimpeded. Two techniques to further engineer the base–collector junction are outlined here. Ordered versus Disordered Materials: There is a wide range of data published for the conduction band discontinuity for the GaInP/GaAs material system. Most of the reports find between 30–200 meV [19]–[21]. Some variance in the value is likely due to the different measurement techniques. of However, it is widely accepted that the appropriate value of is also technology-dependent. These values are believed to be influenced by compositional variations in the interface regions, as well as by partial ordering of the GaInP [22], with associated changes in band energies and polarization effects [23]. Ordering depends on the conditions under which the growth was WELTY et al.: DESIGN AND PERFORMANCE OF TUNNEL COLLECTOR HBTs 899 with a barrier layer of 100 Å, the saturation charge storage has been reduced by a factor of five. ACKNOWLEDGMENT The authors wish to thank Peter J. Zampardi of Conexant Systems for insightful discussions and James Li of Rockwell Science Center for assistance with -parameter measurements. REFERENCES Fig. 10. Calculated conduction band edge of base–collector junction, with a 100 Å tunnel layer and a 50 Å spacer layer, showing accumulation of electrons trapped in the spacer layer. done including growth temperature, V/III ratio, and wafer misorientation. When GaInP is grown in the ordered regime, the is reported to be smaller than when it is grown measured in the disordered regime. However, what fraction of the bandgap reduction is in the conduction band for the ordered material is not accurately known. It is critical that the valence band discontinuity remains large enough to block holes from diffusing into the collector for the TC-HBT. In this paper, the TC-HBTs were grown in the disordered regime, which resulted in a small barrier at the base–collector junction. Using ordered GaInP at the base–collector junction could significantly reduce the barrier at the base–collector junction; therefore, this would be an ideal solution for the tunnel layer as well as for DHBTs. Graded Junctions: It has been reported that the base–emitter than the base–collector junction of a DHBT has a smaller junction [24]. It is known [24] that in molecular beam epitaxy (MBE) arsenic is incorporated into the growing layer with much greater efficiency than the phosphorus. Therefore, when switching from GaInP to GaAs (base–collector junction), gradual shuttering of the phosphorus has little effect. Conversely, the transition from GaAs to GaInP (base–emitter junction) has the opposite effect and the interface may become graded due to the incorporation of arsenic in the GaInP. It may be possible to force the base–collector junction to be graded by the switching of gases, which occurs naturally at the upper junction. This technique could be applied to TC-HBTs (as well as DHBTs) to reduce the barrier at the base–collector junction. IV. CONCLUSION The TC-HBT is shown to be an effective approach to combine the advantages of SHBTs and DHBTs into a single device. The TC-HBT in this work was implemented with a 100-Å tunnel layer with an E-up configuration. A peak incremental current gain of 201 was achieved with this device. The knee voltage is reduced to 0.3 V, and the offset voltage is reduced down to 30 meV. These reductions are beneficial to power amplifiers op, which will increase the efficiency. The erated at a small TC-HBT is capable of high frequency operation; at a current 10 A cm the TC-HBT has an of density of of 68 GHz. Additionally, we have shown that 54 GHz and [1] P.-F. Chen, Y. M. Hsin, R. J. Welty, P. M. Asbeck, R. L. Pierson, P. J. Zampardi, W.-J. Ho, M. C. V. Ho, and M. F. Chang, “Application of GaInP/GaAs DHBTs to power amplifiers for wireless communications,” IEEE Trans. Microwave Theory Tech., vol. 47, pp. 1433–1438, Aug. 1999. [2] W. Liu, Handbook of III-V Heterojunction Bipolar Transistors. New York: Wiley, 1998. [3] S.-L. Fu, T. P. Chin, M. C. Ho, C. W. Tu, and P. M. Asbeck, “Impact ionization coefficients in (100) GaInP,” Appl. Phys. Lett., vol. 66, no. 25, pp. 3507–3509, 1995. [4] K. Mochizuki, R. J. Welty, P. M. Asbeck, C. R. Lutz, R. E. Welser, S. J. Whitney, and N. Pan, “GaInP/GaAs C-up TC-HBTs: Optimization of fabrication process and epitaxial layer structure for high-efficiency high-power amplifiers,” IEEE Trans. Electron Devices, vol. 47, pp. 2277–2283, Dec. 2000. [5] J. Xu and M. Shur, “A tunneling emitter bipolar transistor,” IEEE Electron Device Lett., vol. EDL–7, pp. 416–418, July 1986. Ga P/GaAs [6] C. C. Wu and S. S. Lu, “Small offset-voltage In double-barrier bipolar transistors,” IEEE Electron Device Lett., vol. 13, pp. 418–420, Aug. 1992. [7] R. J. Welty, Y. G. Hong, H. P. Xin, K. Mochizuki, C. W. Tu, and P. M. Asbeck, “Nitrogen incorporation in GaInP for novel HBTs,” in Proc. IEEE Conf. High Performance Devices, Ithaca, NY, Aug. 2000, pp. 33–40. [8] R. J. Welty, K. Mochizuki, C. R. Lutz, and P. M. Asbeck, “Tunnel collector GaInP/GaAs HBTs for microwave power amplifiers,” in IEEE BiPolar BiCMOS Circuits Technol. Meeting, Minneapolis, MN, Oct. 2001, pp. 74–77. [9] J. H. Davies, Phys. Low-Dimensional Semicond.. Cambridge, U.K.: Cambridge Univ. Press, 1998. [10] P. Emanuelsson, M. Drechsler, D. M. Hofmann, B. K. Meyer, M. Moser, and F. Scholz, “Cyclotron resonance studies of GaInP and AlGaInP,” Appl. Phys. Lett., vol. 64, no. 21, pp. 2849–2851, 1994. [11] S. P. McAlister, W. R. McKinnon, and R. Driad, “Interpretation of the common–emitter offset voltage in heterojunction bipolar transistors,” IEEE Trans. Electron Devices, vol. 48, pp. 1745–1747, Aug. 2001. [12] T. Won, S. Iyer, S. Agarwala, and H. Morkoc, “Collector offset voltage of heterojunction bipolar transistors grown by molecular beam epitaxy,” IEEE Electron Device Lett., vol. 10, pp. 274–276, June 1989. [13] B. Mazhari, G. B. Gao, and H. Morkoc, “Collector-emitter offset voltage in heterojunction bipolar transistors,” Solid State Electron., vol. 34, no. 3, pp. 315–321, 1991. [14] S. Wang, Fundamentals of Semiconductor Theory and Device Physics. Englewood Cliffs, NJ: Prentice-Hall, 1989. [15] P. F. Chen, Y. M. Hsin, and P. M. Asbeck, “Saturation charge storage measurements in GaInP/GaAs/GaAs and GaInP/GaAs/GaInP HBTs,” in Proc. IEEE Twenty-Fourth Int. Symp. Compound Semicond., Sept. 1997, pp. 443–446. [16] F. Ren, C. R. Abernathy, S. J. Pearton, P. W. Wisk, and R. Esagui, “InGaP/GaAs based single and double heterojunction bipolar transistors grown by MOMBE,” Electron. Lett., vol. 28, no. 12, pp. 1150–1152, 1992. [17] W. S. Hobson, F. Ren, J. Lothian, and S. J. Pearton, “InGaP/GaAs singleand double- heterojunction bipolar transistors grown by organometallic vapor phase epitaxy,” Semicond. Sci. Technol., vol. 7, no. 4, pp. 598–600, 1992. [18] B. C. Lye, P. A. Houston, H. K. Yow, and C. C. Button, “GaInP/AlGaAs/GaInP double heterojunction bipolar transistors with zero conduction band spike at the collector,” IEEE Trans. Electron Devices, vol. 45, pp. 2417–2421, Dec. 1998. [19] T. Kobayashi, K. Taira, F. Nakamura, and H. Kawai, “Band lineup for a GaInP/GaAs heterojunction measured by a high-gain Npn heterojunction bipolar transistor grown by metalorganic chemical vapor deposition,” J. Appl. Phys. , vol. 65, no. 12, pp. 4898–4902, 1989. 900 [20] M. A. Haase, M. J. Hafich, and G. Y. Robinson, “Internal photoemission and energy-band offsets in GaAs-GaInP p-I-N heterojunction photodiodes,” Appl. Phys. Lett., vol. 58, no. 6, pp. 616–618, 1991. [21] M. A. Rao, E. J. Caine, H. Kroemer, S. I. Long, and D. I. Babic, “Determination of valence and conduction-band discontinuities at the (Ga,In)P/GaAs heterojunction by C-V profiling,” J. Appl. Phys., vol. 61, no. 2, pp. 643–649, 1987. [22] T. Kikkawa, K. Imanishi, K. Fukuzawa, T. Nishiok, M. Yokoyama, and H. Tanaka, “Deep level trap characterization of InGaP/GaAs heterointerface grown by LP-MOVPE,” in Proc. Int. Symp. Compound Semicond., St. Petersburg, Russia, Sept. 1996, pp. 877–880. [23] T. Tanaka, K. Takano, T. Tsuchiya, and H. Sakaguchi, “Ordering-induced electron accumulation at GaInP/GaAs hetero-interfaces,” J. Cryst. Growth, vol. 221, pp. 515–519, 2000. [24] T. W. Lee, P. A. Houston, R. Kumar, G. Hill, and M. Hopkinson, “Asymmetric characteristics of InGaP/GaAs double-heterojunction bipolar transistors grown by solid-source molecular beam epitaxy,” Semicond. Sci. Technol., vol. 7, no. 3, pp. 425–428, 1992. Rebecca J. Welty (S’97–M’02) received the B.S. degree in electrical engineering from the University of California at Davis (UCD) in 1997. She received the M.S. and Ph.D. degrees in electrical engineering, specializing in applied physics, from the University of California at San Diego (UCSD) in 1999 and in 2002, respectively. While at UCD, she was involved in developing fiber optic switches using bulk silicon micromachining techniques. Her dissertation research focused on the design, fabrication, and characterization of high-speed GaAs-based HBTs. While a student at UCSD, she was a visiting researcher at Rockwell Science Center in 1998, involved in GaInP/GaAs DHBT power amplifier fabrication and again in 2000 and 2001, developing GaInNAs-base DHBTs for reduced turn-on voltage. In 2002, she joined Lawrence Livermore National Laboratory, Livermore, CA, as a Staff Research Engineer in the area of optoelectronic device development in InPand GaAs-based materials. Her research interests include device physics and process technology development. Dr. Welty won the BCTM best student paper award in 2001 for a paper on GaInP/GaAs Tunnel-Collector HBTs. Kazuhiro Mochizuki (SM’99) was born in Tokyo, Japan, in 1963. He received the B.E., M.E., and Ph.D. degrees in electronic engineering from the University of Tokyo in 1986, 1988, and 1995, respectively. In 1988, he joined the Central Reseach Laboratory, Hitachi, Ltd., Tokyo. He has worked in the areas of AlGaAs/GaAs and GaInP/GaAs HBTs, ZnMgSSe laser diodes, and AlGaAs/GaAs solar cells. His key emphasis was directed toward development of high-speed HBTs with buried poly-GaAs and SiO2 and low-resistivity solid-phase-epitaxial contact to ZnTe. He also worked on reliability of HBTs from the viewpoints of crystallographic orientation and dielectric stress. During 1999 and 2000, he was a visiting researcher at University of California at San Diego, La Jolla, where he proposed and demonstrated GaInP/GaAs collector-up tunneling-collector HBTs and GaN/W/WO3 collector-up metal base transistors. He authored and/or coauthored over 50 research papers. He is currently working as a Senior Researcher with the Communication Device Research Department, Central Research Laboratory, Hitachi, Ltd., Tokyo. IEEE TRANSACTIONS ON ELECTRON DEVICES, VOL. 50, NO. 4, APRIL 2003 Charles R. Lutz received the Ph.D. degree in electrical engineering from the University of Massachusetts, Amherst, in 1997. His dissertation research involved the design, fabrication, and characterization of quantum well devices with an emphasis on intersubband photodetectors and emitters. He joined Kopin Corporation, Taunton, MA, in 1996, where he is presently serving as senior research scientist. His responsibilities include developing new processes for improving the performance and reliability of III/V-based HBTs as well as investigating new material systems and structures for high-frequency device applications. He has authored and/or co-authored over 30 papers in the areas of semiconductor materials growth and device characterization. He has a strong interest in experimental and applied research in the area of semiconductor devices for photonic and high-frequency applications. Roger E.Welser received the B.S. degree in physics from Swarthmore College, Swarthmore, PA, in 1989 and the Ph.D. degree from Yale University, New Haven, CT, in 1995. He served as a post-doctoral research associate before joining Kopin Corporation, Taunton, MA, in 1996. He is presently serving as Director of Transistor Technology at Kopin Corporation and is responsible for overseeing the development of new processes and materials to improve the performance of III-V HBTs. While working on his dissertation at Yale University, he was awarded a Graduate Student Researchers Fellowship from NASA and concentrated his efforts on studying the nucleation process during MOCVD growth, using InAs-on-GaAs as a model material system. Peter M. Asbeck (M’75–SM’97–F’00) received the B.S. and Ph.D. degrees in 1969 and in 1975, respectively, from the Electrical Engineering Department, Massachusetts Institute of Technology, Cambridge. He is the Skyworks Chair Professor in the Department of Electrical and Computer Engineering, University of California at San Diego (UCSD), La Jolla. He worked at the Sarnoff Research Center, Princeton, NJ, and at Philips Laboratory, Briarcliff Manor, NY, in the areas of quantum electronics and GaAlAs/GaAs laser physics and applications. In 1978, he joined Rockwell International Science Center, where he was involved in the development of high-speed devices and circuits using III-V compounds and heterojunctions. He pioneered the effort to develop heterojunction bipolar transistors based on GaAlAs/GaAs and InAlAs/InGaAs materials and has contributed widely in the areas of physics, fabrication and applications of these devices. In 1991, he joined the UCSD. His research interests are in development of high-speed heterojunction transistors and their circuit applications. His research has led to more than 200 publications. Dr. Asbeck is a Distinguished Lecturer for the IEEE Electron Devices Society and the Microwave Theory and Techniques societies.