Motion Control Products Rotation Motorized Stages SGSP-YAW Stepping motor driven rotation stages fitted with bearing guide and worm gear feed mechanism. ◦Motorized stages suitable for positioning for measuring, inspection and evaluation instruments. Application Systems Optics & Optical Coatings Guide ▶Rotation Range Minus limit sensor: −2.5° Scale: 0° Holders Bases Counterclockwise CCW direction to ∞ Clockwise CW direction Stops at near 0° (−2.5°) Manual Stages ▶Homing of rotation motorized stages is performed using the CW limit sensor as the origin sensor. ▶Origin detection is adjusted so that the stage stops at 0 degrees when homing is performed in the MINI system at half step. Actuators Attention Motoeized Stages ▶Attention is required when mounting in upside down direction or on a vertical plane. ▶Precision and load capacity specifications may be partly not satisfied depending on the mounting direction. Light Sources Index Specifications SGSP-40YAW Part Number Rotation Range SGSP-60YAW-0B SGSP-60YAW-W-0B Move in the counterclockwise CCW direction to ∞, and stop at near 0 degree (−2.5°) in the clockwise CW direction. Guide Table Size [mm] φ40 φ60 φ60 Controllers/Drivers Travel Mechanism (reduction ratio) Worm gear (1:144) Worm gear (1:144) Worm gear (1:144) Positioning Slide Bearing method Bearing method Bearing method Aluminum / Aluminum bronze Aluminum / Aluminum bronze Aluminum / Aluminum bronze Mechanical Specifications Softwares Stage Material Stepping Motor Weight [kg] 0.35 0.45 1.0 (Full) [°/pulse] 0.005 0.005 0.005 (Half) [°/pulse] AC Servo Motor Resolution 0.0025 0.0025 0.0025 Cables MAX Speed [°/sec] 30 30 30 Positioning Accuracy [ ° ] 0.1 0.1 − Positional Repeatability [ ° ] 0.02 0.02 0.02 19.6 (2.0kgf) 29.4 (3.0kgf) 29.4 (3.0kgf) 2 1 − Lost Motion [ ° ] 0.05 0.05 0.05 Backlash [ ° ] 0.1 0.1 0.1 Parallelism [μm] 50 50 − Concentricity [μm] 30 30 − 0.02 0.02 − Micro Photoelectric Sensor: PM-R24 (SUNX Co., Ltd.) Micro Photoelectric Sensor: PM-R24 (SUNX Co., Ltd.) Piezo Accuracy Specifications Load Capacity [N] Moment Stiffness [″/N・cm] Wobble [mm] X Translation Sensor Part Number Micro Photoelectric Sensor: PM-F24 (SUNX Co., Ltd.) Theta Rotation Limit Sensor Equipped (NORMAL CLOSE) Equipped (NORMAL CLOSE) Equipped (NORMAL CLOSE) Origin Sensor None None None Proximity Origin Sensor None None None Sensor Goniometer Vacuum Options □40mm □60mm Motor / Sensor Specifications Type Motor Step Angle □80mm Power Voltage □85mm □100mm Motor Part Number Sensor □120mm Current Consumption Control Output Output Logic Others 5-phase stepping motor 0.66A/phase (Tamagawa Seiki Co., Ltd.) TS3664N4 (□24mm) 0.72° DC5 − 24V ±10% 15mA or lower NPN open collector output DC30V or lower, 50mA or lower When shaded: Output transistor OFF (no conduction) Compatible Driver / Controller Control System G074 Compatible Driver Compatible Controller SG-5M, SG-5MA, SG-55M, SG-55MA, SG-514MSC, MC-7514PCL GSC-01, GSC-02, SHOT-702, GIP-101, SHOT-302GS, SHOT-304GS, HIT-M・HIT-S, PGC-04 Catalog Code W9027 Outline Drawing SGSP-60YAW-0B Hexagon socket head cap screw M3×15…3 screws Hexagonal socket head cap screw M4×10…3 screws (91) Optics & Optical Coatings 4-M2 depth 5 32 4-M3 depth 5 P.C.D.32 64 50 30 (26) 20 86 32 (70) 51.5 21 20 φ15( +0.025 +0.005 ) 32 (56) 21 (15) (14.5) +0.025 φ25( ) +0.005 (112) M6 depth 5 14 32 (14) Application Systems Holders 5 SGSP-40YAW 50 4-M3 depth 5.5 5 Bases 60 4-M4 depth 5.5 P.C.D.50 30 φ60 28 3-φ3.6 mounting hole φ6 counterbore SGSP-60YAW-W-0B 2-M6 depth 5 Hexagonal socket head cap screw M4×10…4 screws Actuators 5 (27.5) 14 28 0.5 0.5 14.5 11 φ40 (27.5) Manual Stages 107 3-φ4.6 mounting hole φ8 counterbore +0.025 φ25( ) +0.005 (155.5) Light Sources 60 32 100 60 2-M4 M16×1 55 110 Index 75 (128.5) (112) (52.5) Motoeized Stages 50 Guide 4-M4 depth 5.5 P.C.D.50 (60.8) When homing of SGSP-60YAW-W-0B is performed, the position will become as shown below. 60 (19.8) 32 50 30 4-M3 depth 5.5 Controllers/Drivers Softwares Stepping Motor 60 φ60 1 1 Motor lead 2 2 Motor lead 3 3 Motor lead 4 4 Motor lead 5 5 Motor lead 6 6 N.C. (not used) 7 7 +VS 8 8 GND (0V) 9 11 12 12 N.C. (not used) 75 40 4-φ4.5 mounting hole 5-Phase Stepping Motor E phase A phase D phase B phase C phase X Translation SUNX Co., Ltd. Micro photo sensor PM-F24/R24 ON when light enters 9 Machine origin sensor (CW limit sensor) 11 N.C. (not used) 10 Piezo 6 6.3 ■Connection Diagram Connector Pin Number Hirose Electric Co., Ltd. RP17-13RA-12SC Cables 6 41 20 (74.3) AC Servo Motor 10 Theta Rotation Machine origin sensor Note 1 (CW limit sensor) ■Compatible Controllers / Drivers and Cables Note 2 Controller Note 1 When a travel command in the “+” direction is issued, the mounting table rotates to ∞ in the CCW (counterclockwise) direction viewed from the top surface, but it is stopped by the machine origin sensor (CW limit sensor) in the CW (clockwise) direction. Detect the machine origin using the method (MINI system) that detects the origin with a machine origin sensor (CW limit sensor). Note 2 Compatible cable connector: Hirose Electric Co., Ltd. RP17-13PA-12PC/RP17-PC-122 ■Machine Origin Detection MINI System When the machine origin detection command is issued, the stage starts traveling in the CW (-) direction at the operating speed (F) set with the memory switch, and stops by the CW (-) side limit sensor. Then it travels in the CCW (+) direction at the operating speed (F) for 1000 pulses. After stop, it starts traveling in the CW (-) direction again at the starting speed (S), and stops by the CW (-) side limit sensor. After that, it travels in the CCW (+) direction at the operating speed (F) for 1000 pulses. This position is regarded as the machine origin. Operating speed (F) CW (−) Stage Operating speed (F) 1000 pulse travel CCW (+) GSC-01 GSC-02 SHOT-702 GIP-101 SHOT-302GS SHOT-304GS HIT-M/HIT-S PGC-04 [1 axis] [2 axes] [2 axes] [1 axis] [2 axes] [4 axes] [8 axes] [4 axes] G098 − G105 Driver Cable Stage Goniometer Vacuum Options □40mm □60mm □80mm D15RP-CA G108 Cable SGSP-40YAW SGSP-60YAW-OB SGSP-60YAW-W-OB □85mm □100mm □120mm Others Starting speed (S) CW (−) Operating speed (F) 1000 pulse travel CCW (+) Drivers MINI-CA-SG CW (−) side limit sensor WEB http://www.sigma-koki.com/english/ G020 − G021 E-mail international@sigma-koki.com G108 TEL +81-3-5638-8228 FA X +81-3-5638-6550 G075