AL614 MagnetoResistive Length and Angle Sensor Data sheet The AL614 is an Anisotropic Magneto Resistive (AMR) position sensor. The sensor contains two Wheatstone bridges shifted against each other with separate supply pins and a common ground. The output signals are proportional to sine and cosine of the coordinate to be measured (see Fig.2). The MR strips of this FIXPITCH® sensor geometrically match to a pole length of 5 mm (equal to a magnetic period of 10 mm). Additionally, the sensor layout incorporates PERFECTWAVE® technology, i.e. the position of each block of MR strips has a special arrangement to filter higher harmonics and to increase the signal quality. The amplitude is almost constant up to a distance of 2.5 mm between sensor and magnetic scale. It is not necessary to operate the sensor with a stabilizing field. The bond version of AL614 is available as bare die or on wafer. For SMD processing, the sensor is available in a SIL6 package. Product overview of AL614 AL614AKA Features Article description Package Delivery Type AL614ACA-AA Bare Die Waffle Pack AL614ACA-AB Die on Wafer 1) Waferbox AL614AKA-AA AL614ACA SIL6 (7.6 x 1.4 x 3.5 mm) Based on the Anisotropic Magneto Resistive (AMR) effect Contains two Wheatstone bridges on Chip Sine and Cosine output Adapted to 5 mm poles Temperature range from Carrier 1) Minimum order quantities apply. -40 °C to +125 °C Quick reference guide Symbol Parameter Min. Typ. Max. Unit P Pitch (magnetic pole length) - 5 - mm VCC Supply voltage (per bridge) - 5 5.5 V Voff Offset voltage per VCC -1 - +1 mV/V Signal amplitude per VCC 9 11 13 mV/V Bridge resistance 2 3 4 k Vpeak RB Advantages Contactless angle and position measurement Large air gap High signal amplitude Excellent accuracy Insensitive to interference field Minimized offset voltage Negligible hysteresis Absolute maximum ratings In accordance with the absolute maximum rating system (IEC60134). Symbol Parameter Min. Max. Unit VCC1 Supply voltage of bridge 1 - 5.5 V VCC2 Supply voltage of bridge 2 - 5.5 V Tamb Ambient temperature -40 +125 °C Tstg Storage temperature -65 +150 °C Applications Incremental or absolute encoder for linear or rotary movements in various industrial applications, for example: Motor integrated encoder Motorfeedback system Microscope table positioning Stresses beyond those listed under “Absolute maximum ratings” may cause permanent damage to the device. This is a stress rating only and functional operation of the device at these or any other conditions beyond those indicated in the operational sections of this specification is not implied. Exposure to absolute maximum rating conditions for extended periods may affect device reliability. LK14.001.00.00.00.DSE.01 www.sensitec.com © Sensitec GmbH Data sheet Page 1 of 6 Subject to technical changes October 2009 AL614 MagnetoResistive Length and Angle Sensor (5 mm) Magnetic data Symbol Hext Parameter Conditions Magnetic field strength Min. Typ. Max. Unit 3 6 - kA/m Min. Typ. Max. Unit - 5 5.5 V See Fig.2 -1 - +1 mV/V Tamb = (-20...+85)°C - ±3 ±10 (µV/V)/K See Fig.2 9.0 11.0 13.0 mV/V Tamb = (-20...+85)°C -4.8 -4.0 -3.2 10-3 /K 2 3 4 k 2.0 2.6 3.2 %/K Min. Typ. Max. Unit - 50 - µm - 0.1 1 % of Vpeak 1) 1) The stimulating magnetic field in the sensor plane to ensure minimum error specified in note 7. Electrical data Tamb = 25 °C; Hext = 25 kA/m; VCC1 = 5 V; VCC2 = 5 V; unless otherwise specified. Symbol Parameter Conditions VCC Supply voltage Voff Offset voltage per VCC TCVoff Vpeak TCVpeak RB TCRB 2) TCVoff = Temperature coefficient of Voff Signal amplitude per VCC 2) 3) Temperature coefficient of Vpeak 4) Bridge resistance 5) Temperature coefficient of RB Voff(T2) - Voff(T1) T2 - T1 6) Tamb = (-20...+85)°C with T1 = -20 °C; T2 = +85 °C. 3) Maximal output voltage without offset influences. Periodicity of Vpeak is sin(2P) and cos(2P). 4) TCVpeak = 100 · Vpeak(T2) - Vpeak(T1) with T1 = -20 °C; T2 = +85 °C. Vpeak(T1) · (T2 - T1) 5) Bridge resistance between pins 6 and 4, 5 and 4, 2 and 3, and 1 and 7. 6) TCRB = 100 · RB(T2) - RB(T1) RB(T1) · (T2 - T1) with T1 = -20 °C; T2 = +85 °C. Accuracy Tamb = 25 °C; Hext = 25 kA/m; VCC1 = 5 V; VCC2 = 5 V; unless otherwise specified. Symbol ∆x k Parameter Measurement error Conditions 7) Amplitude synchronism 8) 7) ∆x = |xreal - xmeasured| without offset influences due to deviations from ideal sinusoidal characteristics (ascertained at an ideal magnetic scale). Vpeak1 8) k = 100 - 100 · Vpeak2 . Dynamic data Symbol f Parameter Conditions Frequency range Min. Max. Unit 0 >1 MHz General data Symbol Parameter Conditions Min. Typ. Max. Unit P Pitch (magnetic pole length) See Fig.1 - 5 - mm d Distance See Fig.1 - 1.5 2.5 mm Tamb Ambient temperature -40 - +125 °C Tstg Storage temperature -65 - +150 °C www.sensitec.com © Sensitec GmbH Data sheet Page 2 of 6 Subject to technical changes October 2009 AL614 MagnetoResistive Length and Angle Sensor (5 mm) P = 5 mm d 1 2 3 4 5 6 7 x 0 Fig.1: Arrangement of sensor and magnetic scale. In this example the sensor moves in x-direction along the fixed scale. VCC1 100 VCC2 VO2 +VO1 +VO2 -VO1 -VO2 50 Vpeak1 Output voltage (mV) VO1 Voff1 0 -50 -100 0 GND 2.5 5 (1P) 7.5 10 (2P) Length x (mm) Fig.2: left: Simplified circuit diagram. right: Output signals as function of linear displacements. www.sensitec.com © Sensitec GmbH Data sheet Page 3 of 6 Subject to technical changes October 2009 AL614 MagnetoResistive Length and Angle Sensor (5 mm) AL614 as bare die Pinning Pad Symbol Parameter 1 +VO2 Positive output voltage bridge 2 2 +VO1 Positive output voltage bridge 1 3 -VO1 Negative output voltage bridge 1 4 GND Ground 5 VCC2 Supply voltage bridge 2 6 VCC1 Supply voltage bridge 1 7 -VO2 Negative output voltage bridge 2 1 2 3 4 5 6 7 Top view Fig.3: Simplified layout of AL614. Mechanical data AL614ACA Sensitive area 5200 ± 100 5003 a b 2 1 3 4 5 6 I M O 1000 ± 100 75 (5) 99 (7) 117 (1) 133 (3) 178 (2, 6) 216 (4) 595 105 95 7 453 2088 2348 2614 2953 3206 4566 Pad Notes: ! All dimensions in µm. Pad dimensioning correlates to pad centre. The dashed outline drafted the dicing line. The shaded area denotes the active chip area. This area must not be touched during handling or assembly since this may cause damage to the chip. 1 2 3 4 5 6 7 axb 125 x 140 90 x 135 95 x 140 93 x 148 100 x 140 100 x 140 138 x 153 Fig.4: Chip outline for AL614ACA as bare die. Data for Packaging and Interconnection Technologies Parameter Value Unit Chip area (5.2 ± 0.1) x (1.0 ± 0.1) mm2 Chip thickness 525 ± 40 µm Pad size See Fig.4 - Pad thickness 0.6 Pad material AlCu www.sensitec.com © Sensitec GmbH µm - Data sheet Page 4 of 6 Subject to technical changes October 2009 AL614 MagnetoResistive Length and Angle Sensor (5 mm) Mechanical data AL614AKA Top view Marker white Side view On this side no contact Bottom view Notes: All dimensions in mm. Pad dimensioning correlates to pad centre. Pad dimensions: 0.6 mm x 5.5 mm Active chip area, This area must not be touched during handling or assembly since this may cause damage to the chip Fig. 5: SIL6 outline for AL614AKA. www.sensitec.com © Sensitec GmbH Data sheet Page 5 of 6 Subject to technical changes October 2009 AL614 MagnetoResistive Length and Angle Sensor (5 mm) General Information Product Status The product is in series production. Note: The status of the product may have changed since this data sheet was published. The latest information is available on the internet at www.sensitec.com. Right to make changes Sensitec GmbH reserves the right to make changes, without notice, in the products, including software, described or contained herein in order to improve design and/or performance. Sensitec GmbH assumes no responsibility or liability for the use of any of these products. Application Information Applications that are described herein for any of these products are for illustrative purposes only. Sensitec GmbH makes no representation or warranty that such applications will be suitable for the specified use without further testing or modification. Life critical applications These products are not qualified for use in life support appliances, aeronautical applications or devices or systems where malfunction of these products can reasonably be expected to result in personal injury. Sensitec GmbH Georg-Ohm-Straße 11 35633 Lahnau Germany Solutions for measuring: Position Angle Magnetic field Current Fon +49 (0) 64 41/ 97 88-0 Fax +49 (0) 64 41/ 97 88-17 E-Mail info@sensitec.com www.sensitec.com Copyright © 2009 by Sensitec GmbH, Germany All rights reserved. No part of this document may be copied or reproduced in any form or by any means without the prior written agreement of the copyright owner. The information in this document is subject to change without notice. Sensitec GmbH does not assume any liability for any consequence of its use. www.sensitec.com © Sensitec GmbH Data sheet Page 6 of 6 Subject to technical changes October 2009