COMPACT FLOW RATE
CONTROLLER FCM SERIES
CC-793A 7
Micro processed sensor
chip for quick response is
equipped
High accuracy
and multi-function are achieved
by mounting microcomputer
Stainless steel body
Applicable fluid and flow rate
0.015 to 50 ℓ/min
0.015 to 50 ℓ/min
0.015 to 10 ℓ/min
0.06 to 20 ℓ/min
Weight: approx. 480 g
Resin body
Rectification structure with
improved low pressure loss and
reproducibility
Applicable fluid and flow rate
0.015 to 100 ℓ/min
Weight: approx. 200 g
Compact flow rate controller FCM Series
Compact flow rate sensor FSM, gathered technologies of compact solenoid
valve.
High performance and economic efficiency for all of sensor function,
proportional control function, valve function, to satisfy various purposes
Compact flow rate controller FCM Series.
Compatible with different fluids
Applicable fluid: various gas including air, nitrogen, argon, oxygen,
methane, propane. Now hydrogen and helium are added to the applicable
fluid. This controller can be used with a diverse range of applications.
Low differential pressure models are added
Flow rate control for combustion gas whose supplying pressure
is low (for example,fire control of burner) is now possible.
Compact and light weight
Dimensions: 70 × 70 × 30 (depth × lateral × width).
It can be installed in narrow space or moving section, and helps
to make equipments more compact and light.
Volume
Approx.
Weight
Approx.
30%
20%
Mounted digital display, which allows
us to see control status at a glance
• Flow rate value is digital displayed in 3 digits
• As well as error display, output status (switch output
ON-OFF) is displayed.
Output display 3-digit number LED display
Flip vertical display is
selectable according to
installed direction
(optional)
Parallel input type is available
as standard
compared to conventional model
Controllable with parallel input (ON/OFF signal of PLC
etc., 10bit resolution 1024). Analog input/output device
including D/A converter etc.
is not necessary.
compared to conventional model
0.5 s high-speed control
High-speed control of 0.5sec is possible with adopting platinum
sensor chip on which silicon micro machining is applied.
Various purposes will be fulfilled.
Analog output (%FS)
Input signal
Microcomputer realizes
multi-function
100
80
Error display function
60
Notifies error events with display and electric signal.
40
Zero/span adjustment function
20
0
-0.5
Zero span of input signal can be adjusted as you like.
00
0.5
1.0 1.5 2.0
Time (sec)
2.5
3.0
3.5
Dedicated electric power is not required
Power supply voltage is 24 VDC. It operates with
general single electric power.
1
3
Reproducibility, which impacts Repeatability ± % F.S.
on flow rate control is improved
Accuracy ± % F.S.
by our unique rectification
structure.
RoHS compliant
Dimensions
Switch output function
Switch output function with setting upper/lower limitations
of flow rate is equipped. (over current protect is built-in)
Flow rate integration function
Flow rate integration display (up to 6 digits) and pulse
output for integration are available.
Auto shutdown function
Harmful substances such as lead and hexavalent chrome that adversely
affect the global environment are never used in the materials.
1
Direct memory function
Even if input signals from an external source are not used,
control flow rate is freely adjusted with controller operation keys.
Highly trusted flow rate control
Specifications
Preset input function
When four random flow rate points are set, the flow rate is controlled by
inputting a 2-bit signal from an external source (signals from PLC, etc.).
7
Explanation
of functions
Valves are shutdown automatically at the time of error or
emergency.
12
Operation
method
25
Examples of applications
Useful in different fields
Applicable fluid
This compact flow rate controller is used for different applications including machinery, automobile, and precision
device fields, advanced fields such as semiconductors and biotechnology, medicine and food.
Flow rate (ℓ/min)
Semiconductor
0.1
1
10
100
Wire bonding
Appropriate for wire bonding tension
control requiring high accuracy.
Dry
air
Liquid crystal
Glass floating transport
Appropriate for floating (non-contact)
transport of large FPD glass, etc.
N2
Liquid crystal
Ionizer purge gas flow rate control
Compatibility with different flow rate ranges enables
air flow rates to be controlled.
Food
N2 gas control for laser oscillator and
semiconductor manufacturing equipment.
Adding and packaging
Semiconductor
Ideal for adding inert gas for food packages, etc.
Purge gas flow rate control
Compatibility with different flow rate ranges.
The flow rate of purge gas, etc., is controlled.
Ar
Automobile, etc.
This controller can handle a variety of flow ranges
enabling the flow rate of argon gas for welding to be
controlled.
Combustion
gas
O2
H2
Control of argon gas flow rate for welding
Glass processing
Burner flame control
The low-pressure gas supply enables burner
flame, etc., to be controlled.
FCM Series
Applicable fluid and flow rate control ranges
Applicable
fluid
Gas type
Gas type
Gas type
Air type
Model No.
FCM-9500 AI
FCM-0001 AI
FCM-0002 AI
FCM-0005 AI
FCM-0010 AI
FCM-0020 AI
FCM-0050 AI
FCM-0100 AI (only resin type)
FCM-9500 AR
FCM-0001 AR
FCM-0002 AR
FCM-0005 AR
FCM-0010 AR
FCM-0020 AR
FCM-0050 AR
FCM-9500 O2/LN/C1/C3
FCM-0001 O2/LN/C1/C3
FCM-0002 O2/LN/C1/C3
FCM-0005 O2/LN/C1/C3
FCM-0010 O2/LN/C1/C3
FCM-0002 H2/HE
FCM-0005 H2/HE
FCM-0010 H2/HE
FCM-0020 H2/HE
Flow rate control range ( /min)
0.01
0.1
1
10
Body material
100
0.015 to 0.5
AIR
Port size
Resin
Resin
0.03 to 1
ø6 push in
0.06 to 2
ø8 push in
0.15 to 5
Air
SUS
SUS
N2
0.3 to 10
Nitrogen
0.6 to 20
Rc1/4
1.5 to 50
9/16-18 UNF
3 to 100
0.015 to 0.5
SUS
0.03 to 1
0.06 to 2
Ar
Argon
Rc1/4
0.15 to 5
9/16-18 UNF
0.3 to 10
0.6 to 20
1.5 to 50
O2
0.015 to 0.5
13A
0.03 to 1
CH4
0.06 to 2
Oxygen
City gas
Methane
SUS
Rc1/4
9/16-18 UNF
0.15 to 5
C 3H 8
0.3 to 10
Propane
0.06 to 2
SUS
0.15 to 5
Hydrogen
0.3 to 10
Helium
0.6 to 20
Rc1/4
9/16-18 UNF
1/4"
double barbed joint
1/4"
JXR male joint
Input/output specifications
Input
Input signal: Specifications
Analog: 0 to 10 V
bit
Pre-set: 4 points (2bit) (Note)
Analog: 0 to 5 V
bit
Pre-set: 4 points (2bit) (Note)
Analog: 4 to 20 mA
bit
bit
Pre-set: 4 points (2bit) (Note)
Parallel: 10bit
Model No.
FCM-*-*0AN
FCM-*-*0AP
FCM-*-*0SN
FCM-*-*0SP
FCM-*-*1AN
FCM-*-*1AP
FCM-*-*1SN
FCM-*-*1SP
FCM-*-*2AN
FCM-*-*2AP
FCM-*-*2SN
FCM-*-*2SP
FCM-*-*PAN
FCM-*-*PAP
FCM-*-*PSN
FCM-*-*PSP
Output
Output type
Analog
NPN
PNP
Switch
Analog
NPN
PNP
Switch
Analog
NPN
PNP
Switch
Analog
NPN
PNP
Switch
Specifications
Error output
1 to 5 V
NPN
PNP
1 to 5 V
NPN
PNP
1 to 5 V
NPN
PNP
1 to 5 V
NPN
PNP
NPN
PNP
NPN
PNP
NPN
PNP
NPN
PNP
NPN
PNP
NPN
PNP
NPN
NPN
PNP
PNP
Note: Preset 8-point (3-bit) input is used customized. The external integration reset signal input cannot be used. Contact your CKD Sales Office for details.
Compact flow rate controller
FCM Series
For air, nitrogen, argon, oxygen, city gas, methane, propane (flow rate range: 0.5 to 100ℓ/min)
For hydrogen, helium (flow rate range: 0 to 20ℓ/min)
For air, nitrogen, argon, oxygen, city gas, methane, propane FCM series
Sp ec i f i c a t i o n s
Descriptions
FCM-[*1] [*2]-[*3] [*4] [*5]
Valve drive type
Proportional solenoid valve When not energized: Closed
AI (air, nitrogen) AR (argon) O2 (oxygen) LN (city gas) C1 (methane) C3 (propane)
Low differential press.
(only stainless steel)
Standard model
Flow rate range
9500 0 to 500mℓ/min
0001 0 to 1ℓ/min
0002 0 to 2ℓ/min
0005 0 to 5ℓ/min
0010 0 to 10ℓ/min
0020 0 to 20ℓ/min
Full scale flow rate
*1
0050 0 to 50ℓ/min
Note 1
0100 0 to 100 ℓ/min (only resin type)
L9500 0 to 500mℓ/min
L0001 0 to 1ℓ/min
L0002 0 to 2ℓ/min
L0005 0 to 5ℓ/min
L0010 0 to 10ℓ/min
AI Compressed air, nitrogen
AR Argon
Applicable fluid
O2 Oxygen (oil-prohibit specifications)
*2
LN City gas (13A)
Note 3
Note 2
C1 Methane (CH4 100%)
C3 Propane (C3H8 100%)
H6 ø6 push in, resin (excluding 50, 100ℓ/min)
Port size,
H8 ø8 push in, resin
*3
8A Rc1/4, stainless steel
Body material
UF 9/16-18UNF, stainless steel
Precision scope of guarantee
9500 to 0020, L9500 to L0010
Response time *1
0050 to 0100
Accuracy
Control
Repeatability
Temperature characteristics
Pressure characteristics
Standard differential pressure
Note 4
Operation differential rated pressure
Note 5
Pressure
H6/H8 (resin body)
Proof pressure *3
8A/UF (SUS body)
Ambient temperature and humidity
0
Input signal/
1
*4
2
Pre-set input
P
AN
Input/output
Output signal *5
AP
SN
SP
Display method
Display range and resolution
Integrating function
Power supply Power supply voltage
voltage
Current consumption
Mounting orientation
H6/H8 (resin body)
Wetted area material *3
8A/UF (SUS body)
H6/H8 (resin body)
Weight
*3
8A/UF (SUS body)
Degree of protection
Protective circuit
EMC Directive
Flow rate display
1
3 to 100% F.S.
Within 0.5 sec at setting ±5%F.S. (TYP)
Within 1 sec at setting ±5%F.S. (TYP)
±3% F.S. or less
±1% F.S. or less
±0.1% F.S./˚C or less (25˚C standard)
±1%F.S. or less per 98kPa (standard differential pressure reference)
Refer to separate table.
Refer to separate table.
490 kPa
980 kPa
0 to 50 ˚C, 90% RH or less (with no dew condensation)
0 to 10 VDC (6.7kΩ)/4 points (2bit)
0 to 5 VDC (10kΩ)/4 points (2bit)
4 to 20 mA DC (250 Ω)/4 points (2bit)
Parallel 10bit/none
Analog output: 1-5V (connected load impedance 500kΩ and over)
Error output: NPN open collector output, 50mA or less, voltage drop 2.4V or less
Analog output: 1-5V (connected load impedance 500kΩ and over)
Error output: PNP open collector output, 50mA or less, voltage drop 2.4V or less
Switch output: NPN open collector output, 50mA or less voltage drop 2.4V or less
Error output: NPN open collector output, 50mA or less, voltage drop 2.4V or less
Switch output: PNP open collector output, 50mA or less, voltage drop 2.4V or less
Error output: PNP open collector output, 50mA or less, voltage drop 2.4V or less
3-digit 7-segment LED, display accuracy: control accuracy ± 1 digit
Refer to separate table.
Refer to separate table.
24VDC±10% (stabilized power with ripple rate 2% or less)
Note 11
250 mA or less
Free
Polyamide resin, fluoro rubber, stainless steel, alumina, silicon, solder
Stainless steel, fluoro rubber, alumina, silicon, solder
Approx. 200g
Approx. 480g
IEC standards IP40
Note 6 Power reverse connection protection, switch output reverse connection protection, switch output load short-circuit protection
EN55011, EN61000-6-2, EN61000-4-2/3/4/6/8
FCM Series
Specifications
Pr e s s u r e
Standard differential pressure and operation differential pressure Note 4, 5
(Standard model)
Applicable fluid *2
AI
AR
O2
LN/C1
C3
Standard differential
pressure (kPa)
Operation differential
pressure (kPa)
Standard differential
pressure (kPa)
Operation differential
pressure (kPa)
Standard differential
pressure (kPa)
Operation differential
pressure (kPa)
Standard differential
pressure (kPa)
Operation differential
pressure (kPa)
Standard differential
pressure (kPa)
Operation differential
pressure (kPa)
Flow rate range *1
0005
0010
9500
0001
0002
0020
0050
50
100
100
100
100
150
200
0100
300
20 to 150
50 to 200
50 to 250
50 to 250
50 to 250
100 to 300
150 to 300
250 to 350
50
100
100
100
100
150
200
20 to 150
50 to 200
50 to 250
50 to 250
50 to 250
100 to 300
150 to 300
50
100
100
100
100
20 to 150
50 to 200
50 to 250
50 to 250
50 to 250
50
50
50
50
50
20 to 150
20 to 150
20 to 150
20 to 150
30 to 150
50
50
50
50
50
20 to 150
20 to 150
20 to 150
20 to 150
30 to 150
L9500
L0001
Flow rate range *1
L0002
L0005
L0010
20
20
20
20
20
5 to 50
5 to 50
5 to 50
5 to 50
10 to 50
Applicable fluid *2
(Low differential pressure model)
AI/O2
LN/C1
C3
Standard differential
pressure (kPa)
Operation differential
Note 7 pressure (kPa)
Display and integrating function
Flow rate
display
Display range
Display resolution
Display range
Integrating
function
Display resolution
Note 10 Pulse output rate
Flow rate range *1
0005
0010
L0005
L0010
9500
L9500
0001
L0001
0002
L0002
0 to 500mℓ/min
0.00 to 1.00ℓ/min
0.00 to 2.00ℓ/min
0.00 to 5.00ℓ/min
0.0 to 10.0ℓ/min
0020
0050
0100
0.0 to 20.0ℓ/min
0.0 to 50.0ℓ/min
0 to 100ℓ/min
1mℓ/min
0.01ℓ/min
0.01ℓ/min
0.01ℓ/min
0.1ℓ/min
0.1ℓ/min
0.1ℓ/min
1ℓ/min
999999mℓ
9999.99ℓ
9999.99ℓ
9999.99ℓ
99999.9ℓ
99999.9ℓ
99999.9ℓ
999999ℓ
1mℓ
0.01ℓ
0.01ℓ
0.01ℓ
0.1ℓ
0.1ℓ
0.1ℓ
1ℓ
5mℓ
0.01ℓ
0.02ℓ
0.05ℓ
0.1ℓ
0.2ℓ
0.5ℓ
1ℓ
Note 1: Converted to volumetric flow rate at 20°C 1 barometric pressure (101 kPa). Also, full scale means the maximum flow rate within flow rate range.
Note 2:When using for other than compressed air, use dry gas that does not contain corrosive elements such as chlorine, sulfur, or acids, and clean gas that does
not contain dust or oil mist.
When using compressed air, use clean air that complies to JIS B8392-1: 2012 (ISO 8573-1: 2010) [1.1.1 to 1.6.2]. Compressed air from the compressor
contains drainage (water, oxidized oil, foreign matter, etc.). Install a filter, air dryer (minimum pressure dew point: 10°C or less), and oil mist filter (maximum
oil concentration: 0.1 mg/m3) on the primary side of this product to maintain product functions.
<Recommended circuit> Oil mist filter
(micro alescer)
Filter
Pneumatics
pressure source
Air dryer
Regulator
FCM Series
<Recommended components>
Air filter: F series
Oil mist filter: M series
Note 3: City gas 13A is a value for methane (CH4) 88% gas.
Note 4: Standard differential pressure is one at the product's calibration. (secondary side atmospheric release)
Note 5:Operation differential pressure is necessary differential pressure for the product's normal actuation. It differs depending on flow rate range or applicable fluid.
Also, the minimum value of operation differential pressure is necessary differential pressure, to flow full scale flow rate at secondary side atmospheric
release.
Note 6:This product’s protective circuit is effective only against specific incorrect connections and load short circuits. It does not necessarily provide protection
against all incorrect connections.
Note 7: It is out of operation differential rated pressure, at low pressure line (1 to 2.5 kPa) of city gas.
Note 8: Valve inside of this product cannot be used as a stop valve that has no leakage. Specifications allow leakage to a certain degree.
Note 9:Output impedance for the analog output voltage is approximately 1KΩ. If the impedance of the connecting load is low, the margin of error and the output
value will increase.
Make sure to check the errors on connecting load impedance before use.
Note 10:Integrated flow rate is a reference value. Also, it will be reset if power is turned off.
Note 11: Current at 24 VDC, load not-connected, full scale flow rate. Current consumption varies with the load status.
2
FCM Series
Hydrogen and helium FCM Series
Sp ec i f i c a t i o n s
Descriptions
FCM-[*1][*2]-[*3][*4][*5]
Valve drive type
Proportional solenoid valve When not energized: Closed
Flow rate range
Full scale flow
rate
*1
Note 1
Applicable fluid
Note 2
Port size
0002
0 to 2 ℓ/min
0005
0 to 5 ℓ/min
0010
0 to 10 ℓ/min
0020
0 to 20 ℓ/min
H2
Hydrogen
HE
Helium
*2
*3
8A
Rc1/4
UF
9/16-18UNF
4S
1/4" double barbed joint
H2 (Hydrogen)
HE (helium)
4RM 1/4" JXR male joint
Precision scope of guarantee
Response time
Control
3 to 100%F.S.
*1
Accuracy
±3% F.S. or less
Reproducibility
±1% F.S. or less
Temperature characteristics
±0.2% F.S./°C or less (25°C standard)
Pressure characteristics
Standard differential pressure
Pressure Operation differential rated pressure
±1%F.S. or less per 98kPa (standard differential pressure reference)
Note 3
Refer to separate table.
Note 4
Refer to separate table.
Proof pressure
980kPa
Ambient temperature and humidity
0 to 50 °C, 90% RH or less (with no dew condensation)
1×10-6 less than Pa・m3/s (helium leak rate)
External leakage
0
Input signal/
pre-set input
*4
0 to 10 VDC (6.7kΩ)/4 point (2bit)
1
0 to 5 VDC (10kΩ)/4 point (2bit)
2
4 to 20 mADC (250Ω)/4 point (2bit)
P
Parallel 10 bit/none
Analog output: 1 to 5 V (connected load impedance 500 kΩ and over)
AN
Input/
output
Error output: NPN open collector output, 50 mA or less, voltage drop 2.4 V or less
Analog output: 1 to 5 V (connected load impedance 500 kΩ and over)
AP
Output signal
Error output: PNP open collector output, 50 mA or less, voltage drop 2.4 V or less
*5
Switch output: NPN open collector output, 50 mA or less voltage drop 2.4 V or less
SN
Error output: NPN open collector output, 50 mA or less, voltage drop 2.4 V or less
Switch output: PNP open collector output, 50 mA or less, voltage drop 2.4 V or less
SP
Error output: PNP open collector output, 50 mA or less, voltage drop 2.4 V or less
Flow rate Display method
display
3-digit 7-segment LED, display accuracy: control accuracy ±1 digit
Display range and resolution
Refer to separate table.
Integrating function
Refer to separate table.
Power supply Power supply voltage
voltage
24 VDC±10% (stabilized power with ripple rate 1% or less)
Current consumption Note 9
270mA or less
Mounting orientation
Free
Wetted area material
Stainless steel, fluoro rubber, alumina, silicon, solder
Weight
*3
8A/UF
Approx. 480g
4S/4RM
Approx. 560g
Protection structure
Protection circuit EMC Directive
3
Within 0.5 sec at setting ±5%F.S. (TYP)
IEC standards IP40
Note 5
Power reverse connection protection, switch output reverse connection protection, switch output load short-circuit protection
EN55011, EN61000-6-2, EN61000-4-2/3/4/6/8
FCM Series
Specifications
Pressure
Standard differential pressure and operation differential pressure
Applicable fluid *2
0002
H2
HE
Flow rate range *1
0005
0010
0020
Standard differential
pressure (kPa)
20
50
50
50
Operation differential
pressure (kPa)
10 to 50
30 to 80
30 to 80
30 to 80
Standard differential
pressure (kPa)
50
100
100
100
Operation differential
pressure (kPa)
20 to 100
50 to 150
50 to 150
50 to 150
Display and integrating function
0002
0020
0.00 to 2.00ℓ/min
0.00 to 5.00ℓ/min
0.0 to 10.0ℓ/min
0.0 to 20.0ℓ/min
Display resolution
0.01ℓ/min
0.01ℓ/min
0.1ℓ/min
0.1ℓ/min
Display range
Integrating
function
Display resolution
Note 8 Pulse output rate
9999.99ℓ
9999.99ℓ
99999.9ℓ
99999.9ℓ
0.01ℓ
0.01ℓ
0.1ℓ
0.1ℓ
0.02ℓ
0.05ℓ
0.1ℓ
0.2ℓ
Flow rate
display
Display range
Flow rate range *1
0005
0010
Note 1: Converted to volumetric flow rate at 20°C 1 barometric pressure (101 kPa). Also, full scale indicates the maximum flow rate within flow rate range.
Note 2:When using for other than compressed air, use dry gas that does not contain corrosive elements such as chlorine, sulfur, or acids, and clean gas that does
not contain dust or oil mist.
Note 3: Standard differential pressure is one at the product's calibration. (secondary side atmospheric release)
Note 4:Operation differential pressure is necessary differential pressure for the product's normal actuation. It differs depending on flow rate range or applicable
fluid.
Also, the minimum value of operation differential pressure is necessary differential pressure, to flow full scale flow rate at secondary side atmospheric
release.
Note 5:This product’s protective circuit is effective only against specific incorrect connections and load short circuits. It does not necessarily provide protection
against all incorrect connections.
Note 6: Valve inside of this product cannot be used as a stop valve that has no leakage. Specifications allow leakage to a certain degree.
Note 7:Output impedance for the analog output voltage is approximately 1KΩ. If the impedance of the connecting load is low, the margin of error and the output
value will increase.
Make sure to check the errors on connecting load impedance before use.
Note 8:Integrated flow rate is a reference value. Also, it will be reset if power is turned off.
Note 9: Current at 24 VDC, load not-connected, full scale flow rate. Current consumption varies with the load status.
4
FCM Series
For air, nitrogen, argon, oxygen, city gas, methane, propane
How to order
FCM
9500
H6 0 AN R 1 B T
AI
Model No.
H
I Traceability
Bracket
Symbol
A
A
Flow rate range
Flow rate range
Descriptions
Applicable fluid
0 to 0.5 ℓ/min
0 to 1 ℓ/min
0 to 2 ℓ/min
0 to 5 ℓ/min
0 to 10 ℓ/min
0 to 20 ℓ/min
0 to 50 ℓ/min
0 to 100 ℓ/min
0100
(only resin body)
0 to 0.5 ℓ/min
L9500
0 to 1 ℓ/min
L0001
0 to 2 ℓ/min
L0002
0 to 5 ℓ/min
L0005
0 to 10 ℓ/min
L0010
AI
AR
O2
LN
C1
C3
LN
C1
C3
Low differential press.
(Only stainless steel)
Standard model
9500
0001
0002
0005
0010
0020
0050
B
B
Applicable fluid
C
C
Port/body material
D
<Example of model No.>
Input specifications
E
Output specifications
Note on model No. selection
Note 1: Refer to the dimensions on page 7 for the
9/16-18UNF screw shape.
D
FCM
AC1
AC3
PC1
PC3
LB1
5
F
Display direction
G
Cable
E
Descriptions
9-conductor analog cable 1m
9-conductor analog cable 3m
15-conductor parallel cable 1m
15-conductor parallel cable 3m
Bracket
Analog 0 to 10 VDC
Analog 0 to 5 VDC
Analog 4 to 20 mADC
Parallel 10bit
1 to 5 V analog error (NPN)
1 to 5 V analog error (PNP)
Switch (NPN), error (NPN)
Switch (PNP), error (PNP)
Positive direction
Reverse direction
Cable
Blank
1
3
I
O2
Display direction
Blank
R
G
AR
Output specifications
AN
AP
SN
SP
F
AI
Input specifications
None
1m
3m
Bracket
Blank
B
AC1
Symbol
Port/body material
0
1
2
P
H
Discrete option model
Compressed air, nitrogen gas
Argon
Oxygen (oil-prohibit specifications)
City gas (13A)
Methane (CH4)
Propane (C3H8)
Applicable fluid
Push in (ø6), resin body
H6
(Excluding flow rate ranges 0050 and 0100)
Push in (ø8), resin body
H8
Rc1/4, stainless steel body
8A
UF Note 1 9/16-18 UNF, stainless steel body
FCM-0001AI-H81ANR1BK
Model: Small size flow rate controller FCM series
A Flow rate range : 0 to 1 ℓ/min
B Applicable fluid
: Compressed air, nitrogen
C Port/body material : Push in (ø8), resin body
D Input specifications : Analog 0 to 5 VDC
E Output specifications : 1 to 5 V analog, error (NPN)
F Display direction : Reverse direction
G Cable
:1m
H Bracket
: With bracket
I Traceability
: Inspection results included
Applicable fluid
AI
AR
O2
LN
C1
C3
None
With bracket
Traceability
Blank
T
K
None
Traceability certificate, system diagram, inspection results included
Inspection results included
FCM Series
How to order
Hydrogen and helium
Ho w t o o r d e r
FCM
0002
H2
8A 0 AN R 1 B T
Model no.
H
I Traceability
Bracket
Symbol
A
A
Flow rate range
B
Applicable fluid
B
Applicable fluid
C
C
Port
0002
0 to 2 ℓ/min
0005
0 to 5 ℓ/min
0010
0 to 10 ℓ/min
0020
0 to 20 ℓ/min
Hydrogen
HE
Helium
Applicable fluid
Input specification
E
Output
specifications
F
<Example of model number>
FCM-0002H2-8A1ANR1BK
Flow rate range
: 0 to 2ℓ/min
Applicable fluid
: Hydrogen
C Port
: Rc1/4
D Input specification : Analogue 0-5 VDC
E Output specification: 1 to 5 analogue, error (NPN)
F Display direction : Reverse
G Cable
: 1m
H Bracket
: Bracket attached
I Traceability
: Certificate
Display
direction
G
Cable
D
E
F
8A
Rc1/4
UF
9/16-18UNF
D i s c r e t e o p ti on mod e l
Input specification
0
Analog 0 to 10 VDC
1
Analog 0 to 5 VDC
2
Analog 4 to 20 mADC
P
Parallel 10bit
Output specifications
AN
1 to 5 V analog error (NPN)
AP
1 to 5 V analog error (PNP)
SN
Switch (NPN), error (NPN)
SP
Switch (PNP), error (PNP)
Display direction
R
Reverse direction
Cable
Blank
B
H
None
1
1m
3
3m
Bracket
Blank
B
I
HE
1/4" double barbed joint
Positive direction
A
H2
1/4" JXR male joint
Blank
G
HE
Port
4RM
D
H2
Applicable fluid
H2
4S
FCM
Descriptions
Flow rate range
None
With bracket
Traceability
Blank
None
T
Traceability certificate, system diagram, inspection results included
K
Inspection results included
AC1
Symbol
Descriptions
AC1 9-conductor analog cable 1m
AC3 9-conductor analog cable 3m
PC1
15-conductor parallel cable 1m
PC3
15-conductor parallel cable 3m
LB1
Bracket
6
FCM Series
Dimensions
Body material: Resin, port size: ø6, ø8
The display direction is reverse for the FCM-*-*R*.
FCM-*-H8/H6*
2-# 4-40UNC
16
70
12
33.5
46
58.5
D sub-connector 15 pin/plug
30
70
15
Port size
ø6 push-in joint or
ø8 push-in joint
2-M3 depth 5
30
Body material: Stainless steel, port size: Rc1/4, 9/16-18UNF
The display direction is reverse for the FCM-*-*R*.
FCM-*-8A/UF
2-# 4-40UNC
16
70
12
33.5
46
58.5
D sub-connector 15 pin/plug
30
70
Port size
Rc1/4 or
9/16-18UNF
9/16-18UNF
Mesh filter
15.25
7
15
Seal surface
12˚
11.5
45˚
ø15.6
2.5
9/16-18UNF
Effective length of threaded part 11.5
2-M3 depth 5
30
FCM Series
Dimensions
Dimensions
Port size: 1/4" double barbed joint
FCM-*-4S
The display direction is reverse for the FCM-*-*R*.
2-#4-40UNC
16
12
58.5
46
33.5
70
D sub-connector 15 pin/plug
30
Port size
1/4" double
barbed joint
70
(121.4)
15
30
2-M3 depth 5
Port size: 1/4" JXR male joint
FCM-*-4RM
The display direction is reverse for the FCM-*-*R*.
2-#4-40UNC
16
12
58.5
46
33.5
70
D sub-connector 15 pin/plug
30
70
Port size
1/4" JXR
male joint
(117.8)
15
30
2-M3 depth 5
8
FCM Series
Dedicated bracket (Floor installation type)
Discrete model: FCM-LB1
65
4-R
30
13
8-
R
1.
75
4-3.5
40
50
15
4-6
.5
3
-φ
4
5
30
3
1
Weight: 28g
Cable option dimension drawing
9-conductor cable for analog input type
Discrete option model: FCM-AC1, AC3
28.5
Shield cable
11
D sub
socket pin
no.
33.4
18.9
1
2
1000
3000
3
4
Insulator color Brown Orange Yellow
Name
Type of input
Pre-set input
signal
Bit 1
Bit 2
Cable
9-AWG26
(φ6)
(φ10)
*Connect the shield cable to the
power supply voltage- (0 V).
-
Integration
Not
reset
used
signal
100
Weight g
FCM-AC1
68
FCM-AC3
166
5
6
7
8
9
10
11
12
13
14
15
Red
-
-
-
-
Gray
White
-
Green
Blue
Black
Input signal
Not
used
Power
supply
voltage+
+24
VDC
Not
used
Not
used
Not
used
Not
Common
used
0 to 10 0 to 5 4 to 20
VDC VDC mADC
Not
used
Analog Switch Error
output output output Power
supply
NPN or NPN voltage1 to 5
PNP or PNP (0 V)
VDC
output output
Note: The No. 10 pin common is common for the preset input and integration reset signal (No. 1 to 3 pins).
15-conductor cable for parallel input type
Discrete option model: FCM-PC1, PC3
28.5
Shield cable
11
D sub
socket pin
no.
1
2
(φ6.5)
33.4
18.9
(φ10)
*Connect the shield cable to the
power supply voltage- (0 V).
1000
3000
3
4
Insulator color Brown Orange Yellow Purple
Name
Type of input
Bit 2
Bit 3
100
5
6
7
Red
Light
blue
Pink
Power
supply
voltage+
Parallel input signal
Bit 1
Cable
15-AWG26
Bit 4
+24
VDC
8
9
White
Red
(with
(with
black line) black line)
Parallel input signal
Bit 5
Bit 6
Bit 7
Bit 8
9
82
FCM-PC3
205
10
11
12
13
14
15
Gray
White
Green
(with
black line)
Green
Blue
Black
Parallel input Analog Switch Error
signal
output output output Power
supply
Common
NPN or NPN or voltage1 to 5
Bit 9 Bit 10
PNP
PNP
(0 V)
VDC
output output
Note: The No. 10 pin common is common for the parallel input signal (No. 1 to 4, 6 to 9, 11, 12 pins).
Weight g
FCM-PC1
FCM Series
Technical data
Wiring method
Example of internal circuit and load connection, parallel input type
Caution Care must be taken for mis-connection.
FCM-*-*0/1/2 AN*
(Analog input, analog output + error output type NPN output)
FCM-*-*0/1/2 AP*
(Analog input, analog output + error output type PNP output)
5 pin (power supply voltage+)
5 pin (power supply voltage+)
11 pin (analog input)
13 pin (monitor output)
-
+
3 pin (integrating reset)
10 pin (common)
Load
2 pin (pre-set bit 2)
Load
Output short-circuit
protection
Signal generator
1 pin (pre-set bit 1)
13 pin (switch output)
Load
Load
14 pin (error output)
15 pin (power supply voltage -)
Max. 50 mA
14 pin (error output)
11 pin (analog input)
Main circuit
Main circuit
2 pin (pre-set bit 2)
+
Output short-circuit
protection
1 pin (pre-set bit 1)
-
Signal generator
3 pin (integrating reset)
10 pin (common)
Max. 50 mA
15 pin (power supply voltage -)
FCM-*-*0/1/2 SN*
(Analog input, switch output + error output type NPN output)
FCM-*-*0/1/2 SP*
(Analog input, switch output + error output type PNP output)
5 pin (power supply voltage +)
5 pin (power supply voltage+)
1 pin (pre-set bit 1)
+
3 pin (integrating reset)
-
10 pin (common)
Main circuit
Main circuit
2 pin (pre-set bit 2)
13 pin (switch output)
Max. 50 mA
Max. 50 mA
14 pin (error output)
11 pin (analog input)
+
Signal generator
Signal generator
-
Output short-circuit protection
11 pin (analog input)
1 pin (pre-set bit 1)
Load
Output short-circuit protection
13 pin (switch output)
2 pin (pre-set bit 2)
Load
14 pin (error output)
15 pin (power supply voltage -)
Max. 50 mA
Max. 50 mA
Load
Load
3 pin (integrating reset)
10 pin (common)
15 pin (power supply voltage -)
Connector pin layout (body side)
[Analog input type]
The analog input type does not have the 4, 6, 7, 8, 9 or 12 pins.
10
FCM Series
Example of internal circuit and load connection, parallel input type
Caution Care must be taken for mis-connection.
FCM-*-*PAN*
(Parallel input, analog output + error output type NPN output)
FCM-*-*PAP*
(Parallel input, analog output + error output type PNP output)
5 pin (power supply voltage+)
5 pin (power supply voltage+)
Load
10 pin (common)
Max. 50 mA
15 pin (power supply voltage -)
FCM-*-*PSP*
(Parallel input, switch output + error output type PNP output)
5 pin (power supply voltage+)
5 pin (power supply voltage+)
Output short-circuit protection
Load
13 pin (switch output)
Load
14 pin (error output)
15 pin (power supply voltage -)
Connector pin layout (body side)
[Parallel input type]
Main circuit
+
Main circuit
10 pin (common)
Max. 50 mA
13 pin (switch output)
Max. 50 mA
14 pin (error output)
12 pin (MSB bit 10)
11 pin (bit 9)
9 pin (bit 8)
8 pin (bit 7)
7 pin (bit 6)
6 pin (bit 5)
4 pin (bit 4)
3 pin (bit 3)
2 pin (bit 2)
1 pin (LSB bit 1)
Max. 50 mA
Max. 50 mA
10 pin (common)
15 pin (power supply voltage -)
+
15 pin (power supply voltage -)
12 pin (MSB bit 10)
11 pin (bit 9)
9 pin (bit 8)
8 pin (bit 7)
7 pin (bit 6)
6 pin (bit 5)
4 pin (bit 4)
3 pin (bit 3)
2 pin (bit 2)
1 pin (LSB bit 1)
Output short-circuit protection
Load
14 pin (error output)
FCM-*-*PSN*
(Parallel input, switch output + error output type NPN output)
11
Load
Load
-
Output short-circuit
protection
13 pin (monitor output)
+
12 pin (MSB bit 10)
11 pin (bit 9)
9 pin (bit 8)
8 pin (bit 7)
7 pin (bit 6)
6 pin (bit 5)
4 pin (bit 4)
3 pin (bit 3)
2 pin (bit 2)
1 pin (LSB bit 1)
Main circuit
-
10 pin (common)
Max. 50 mA
14 pin (error output)
-
Output short-circuit
protection
13 pin (monitor output)
+
Main circuit
12 pin (MSB bit 10)
11 pin (bit 9)
9 pin (bit 8)
8 pin (bit 7)
7 pin (bit 6)
6 pin (bit 5)
4 pin (bit 4)
3 pin (bit 3)
2 pin (bit 2)
1 pin (LSB bit 1)
Load
Load
FCM Series
Technical data
Compact flow rate controller Functions of FCM Series
Functional explanation
Compatible models
Analog input
Parallel input
Operation
Analog output Switch output Analog output Switch output
P14, 15
Direct memory Key input is available for target value. Even if input signals from an external source
function
are not used, control flow rate is freely adjusted with controller operation keys.
P25
Function
Descriptions
Preset input
function
When four random flow rate points are set, the flow rate is controlled by
inputting a 2-bit signal from an external source (signals from PLC, etc.).
P16
P25
Analog input
function
Flow rate control is available with analogue input signal.
P18
P25
Parallel input
function
Flow rate control is available with parallel 10-bit (signal from PLC etc.).
Expensive input/output device including D/A converter etc. is not necessary.
P19
P24
Integrating
function
Integrates flow rate. Other than integrating flow rate display, functions
below are available.
Close and stop solenoid valve at set integrating flow rate
Integration pulse function (switch output type only) Note 1
Switch ON the switch at set integrating flow rate (switch output type only)
Note 1
How to reset the integrating value
Analogue input type: external input, button operation
Parallel input type: button operation only
P20
P21
P24
P26
P27
(Note 1)
(Note 1)
The following switch functions are selected.
(1)Tolerance mode: The switch turns ON when the level is within the
tolerance (random set) of control target.
(2)Range designation mode: The switch turns ON when the level is not
within the designated flow rate range.
(3)Integrated pulse: The integrated pulse is output during integration.
(4)ON when higher than set integration: The switch turns ON at the set
integrated flow.
<Mode 1: Tolerance mode> <Mode 2: Range designation mode> Switch
output
function
H (+ allowance side)
Input signal set point
L (- allowance side)
Output
H (upper limit side)
P21
P22
P23
P26
L (lower limit side)
ON
Output
OFF
ON
OFF
<Mode 3: Integrated pulse> <Mode 4: ON when higher than set integration>
Approx. 50 msec
ON
ON
OFF
OFF
Refer to page 20 and 21 for
pulse output rate.
Set integration value
Zero point and span point of input signal can be changed
<When invalid> 100%
Control flow rate
Input signal
zero/span
adjustment
function
<When valid> 100%
Span point (H) setting range
10 to 100%
Zero point (L) setting range
0 to 50%
0%
100%
0%
Input signal
P26
100%
Input signal
Zero point
adjustment
Adjusts the zero point of flow rate output
P27
Automatic
power off
The flow rate display turns OFF if there are no operations for one minute (Control does not stop when the
auto power OFF function activates). Power is saved since the display is turned OFF when not needed.
P26
Error
display
function
Enables displaying error status. Other than error display, functions below are available
Error output is turned ON if an error occurs.
Control automatically stops if an error occurs.
P13
P27
Stops control and fully opens or fully closes valve, and enables the error
output, at the time of error
P27
Disables setting changes to prevent mis-operation
P24
Error automatic
shutoff
Key lock
Setting
reset
Settings are returned to defaults
(
Input signal selection, switch output, input signal
zero span adjustment, auto power off only
)
P24
12
FCM Series
Display/operating section names and functions
Output display (red)
3 digit numeric LED display (green)
The instantaneous flow rate display and function setting details are displayed in
the RUN mode (instantaneous flow rate).
*When the function setting configuration is displayed, it displays setting mode
number and setting configuration.
It displays values, etc., when setting data.
It displays error code No. at the time of error display.
"F" is displayed at the time of function setting confirmation.
"-" is displayed when the switch output ON.
(Switch output type only)
* Flashes when an over current is detected.
* It doesn't flick on integration pulse output.
"E" is displayed when the error output is ON.
* Flashes when an over current is detected.
<Instantaneous flow rate display> *In case upper/lower limitation is set for function settings, or
integrating flow rate display indicates higher/lower-order digit,
It displays
or
<Setting details display> <Error output> Setting details
Setting mode no.
<Invalid display> Code no.
Setting details
Setting mode no.
.
UP key (MODE key)
Use to count up the value, etc.
Use to change the setting mode.
Use to change the setting items.
key
Shift key (OFF key)
Use to confirm the setting mode.
Use to confirm the setting items.
Use to switch to integration display.
+
key (ENT key)
Use to select digit of numeric value, etc.
Use to return from forcible OFF at the time of
forcible OFF (stopping control).
+
Use to confirm the numeric value.
Use to unlock the key.
Use to reset the integration.
key (DOWN key)
Use to count down the value, etc.
Use to lock the key.
+
key
Use to initialize.
Error code list
Error display
Cause
Countermeasures
Power supply voltage is supplied outside of rated voltage.
(detected under 19.5 VDC, detection accuracy ±10％F.S.)
Check controller power specifications, set power supply
voltage within the rated range, and turn power ON again.
The input signal exceeded the rated range.
(detected over input 110％F.S., detection accuracy ±1％
F.S.)
Check the controller input signal type, set the input signal
within the rated range, and turn power ON again.
An error occurred during EEPROM reading or
writing.
Contact your nearest CKD sales office or dealer.
An error occurred during memory reading or writing.
Contact your nearest CKD sales office or dealer.
The flow rate did not reach the setting for five or more
consecutive seconds.
(In case the difference between set value and
control value is over ±20％, detection accuracy ±6％
F.S.)
Check the primary pressure, supply pressure within the
rated operating pressure differential range, and turn power
ON again.
Check that there are no leaks from piping, fittings, or other
devices, correct connect pipes, and turn power ON again.
Contact your nearest CKD sales office or dealer.
Output abnormalities are occurred for sensor.
Stop the supply of fluids to the controller, set the flow rate
to zero, and turn the controller power ON again.
If this error occurs again, contact your nearest CKD Sales
Office or dealer.
Over current protection circuit is actuating for switch
output.
Check whether load current exceeds the rating, correctly
connect the controller, and turn power ON again.
Error automatic shutoff
Applicable error (Note 1)
(Note 2)
Errors are basically automatically reset. However, if the error is not reset, turn power OFF, check the cause and correct the error. Then, turn power ON again.
Note 1: Automatic error shutdown is set to OFF (valve fully closed if an error occurs) at the default setting. Refer to page 27 for details.
Note 2: It will be turned OFF (valve fully closed if an error occurs), regardless of setting of automatic error shutdown.
13
FCM Series
How to operate
Controlling the flow rate
(1) Controlling the flow rate with direct memory
The target is input with keys. Even if input signals from an external source are not used, control flow rate is freely adjusted with controller operation keys.
Direct memory has two operation modes.
• Direct memory (1): Settings are applied when the value is changed.(Even if the value is not set, the flow rate is adjusted by
changing the value. This is handy for finely adjusting the flow rate. Set the setting once the flow rate is determined.)
• Direct memory (2): Changes are applied when the value is set. (The flow rate does not change unless the value is set.)
<Direct memory (1) operation>
(1) Turn power ON. The instantaneous flow rate is displayed.
(2)When the
<Instantaneous flow rate display >
The instantaneous flow rate display is
redisplayed after 3 s.
key is pressed, the <F1: Input signal confirmation>
screen is displayed. The current input signal setting state is displayed.
The current input signal type and input are alternately displayed.
(The instantaneous flow rate display is displayed if 3 seconds pass without
a button being pressed.)
(3)"F1.dr" blinks when the
key is held down for 2
seconds.
(4)Hold down the
<F1: Input signal confirmation>
<Input display>
Alternate display
Hold down for 2 s. <Input signal type >
Direct memory input
Analog input 0 to 10V
Analog input 0 to 5V
Analog input 4 to 20 mA
Parallel input
Pre-set input
Hold down for 2 s.
: dr
: A0
: A1
: A2
: PA
: P1
key for 2 seconds and open the
<Direct Memory 1 Setting screen>.
<Target setting>
key : Moves the digit
(5) The flow rate changes when the value is changed. The flow rate
is adjusted by changing the value even if the value is not set.
<Flow rate setting range>
key : Counts up the value
key : Count down the value
Full-scale flow rate
Valve fully opened
Flow rate: zero
Hold down for 2 s.
Set flow rate
<F1: Input signal confirmation>
(6)Hold down the
and
keys together for 2
seconds, and set the value. The <F1: input signal
<Input display>
Alternate display
confirmation> screen is displayed.
<Instantaneous flow rate display >
(7) The instantaneous flow rate display is redisplayed
after 3 seconds.
Forced OFF (flow rate zero)
The controller is forcibly stopped (flow rate zero) by
holding down the
<Forced OFF display>
Flow rate control stopped state
key for 2 seconds in the flow
rate control state (instantaneous flow rate display).
The flow rate control state is entered again by holding
down the
<Instantaneous flow rate display>
Flow rate control state
key for 2 seconds in the flow rate
Hold down for 2 s.
The solenoid valve forced
OFF state is displayed.
Control is forcibly stopped
even the input signal is input.
control stopped state (forced OFF).
14
FCM Series
Controlling the flow rate
<Direct memory (2) operation>
(1) Turn power ON. The instantaneous flow rate is displayed.
(2) When the
<Instantaneous flow rate display >
The instantaneous flow rate display is
redisplayed after 3 s.
key is pressed, the <F1: Input signal confirmation>
screen is displayed. The current input signal setting state is displayed.
The current input signal type and input are alternately displayed.
<F1: Input signal confirmation>
<Input display>
Alternate display
(The instantaneous flow rate display is displayed if 3 seconds pass
Hold down for 2 s.
without a button being pressed.)
(3) "F1.dr" blinks when the
key is held down for 2
seconds.
<Input signal type >
Direct memory input
Analog input 0 to 10V
Analog input 0 to 5V
Analog input 4 to 20 mA
Parallel input
Pre-set input
: dr
: A0
: A1
: A2
: PA
: P1
Hold down for 2 s.
(4) Hold down the
and
keys for 2 seconds, and
open the <direct memory (2) setting screen>.
<Target setting>
key : Moves the digit
key : Counts up the value
key : Count down the value
(5) Change the value.
(The flow rate does not change unless the value is set.)
Hold down for 2 s.
<F1: Input signal confirmation>
(6) Hold down the
and
keys together for 2
<Input display>
Alternate display
seconds, and set the value. The <F1: input signal
confirmation> screen is displayed.
<Instantaneous flow rate display >
(7) The instantaneous flow rate display is redisplayed after 3
seconds.
Forced OFF (flow rate zero)
The controller is forcibly stopped (flow rate zero) by
holding down the
<Forced OFF display>
Flow rate control stopped state
key for 2 seconds in the flow rate
control state (instantaneous flow rate display).
The flow rate control state is entered again by holding
down the
<Instantaneous flow rate display >
Flow rate control state
key for 2 seconds in the flow rate control
Hold down for 2 s.
The solenoid valve forced
OFF state is displayed.
Control is forcibly stopped
even the input signal is input.
stopped state (forced OFF).
Note:
• Control does not stop while setting direct memory. Take safety into consideration, and stop control (forced stop)
if necessary.
• The flow rate control/forced OFF state (setting) is held even if power is turned OFF.
15
FCM Series
How to operate
Controlling the flow rate
(2) Controlling the flow rate with preset input (only analog input)
When four random flow rate points are set, the flow rate is controlled by inputting a 2-bit signal from an external source.
Example: To control 0, 1, 2, and 5ℓ/min with preset input,
select Preset Input for the input setting mode, and
set each of the following:
P1: 0ℓ/min P2: 1ℓ/min
P3: 2ℓ/min P4: 5ℓ/min
When signals are input from a PLC, etc., as
indicated in the table at right, the flow rate is
controlled to each preset flow rate.
<Controlling with the preset input signal>
D-sub socket pin No.
2
1
Cable option insulator color
Orange
Brown
Type of input
Bit 2
Bit 1
OFF
OFF
P1
OFF
ON
P2
ON
OFF
P3
ON
ON
P4
Input signal
Pre-set
memory No.
<Instantaneous flow rate display >
(1) Turn power ON. The instantaneous flow rate is displayed.
(2) When the
The instantaneous flow rate display is
redisplayed after 3 s.
key is pressed, the <F1: Input signal confirmation> screen
is displayed. The current input signal setting state is displayed.
<F1: Input signal confirmation>
The current input signal type and input are alternately displayed.
<Input display>
Alternate display
(The instantaneous flow rate display is displayed if 3 seconds pass without a
button being pressed.)
Hold down for 2 s.
(3) "F1.dr" blinks when the
<Input signal type >
Direct memory input
Analog input 0 to 10V
Analog input 0 to 5V
Analog input 4 to 20 mA
Parallel input
Pre-set input
key is held down for 2
seconds.
(4) When the
: dr
: A0
: A1
: A2
: PA
: P1
key is pressed twice, "F1.P1" will blink.
Hold down for 2 s.
<Confirming P1 setting>
(5) Hold down the
key for 2 seconds, and open the P1
<Input display>
Alternate display
setting confirmation screen.
Hold down for 2 s.
(6) Hold down the
key for 2 seconds, and open the
target input screen.
Input the target.
Hold down for 2 s.
<Input display>
<Confirming P2 setting>
(7) When the
and
keys are held down for 2
seconds, the target is set in memory, and the P2 setting
Alternate display
Repeat to P4
confirmation screen is displayed.
Set all of the targets up to P4 with this.
(8) The instantaneous flow rate display is redisplayed after 3
seconds.
The flow rate is controlled with preset input.
<Target setting>
<Instantaneous flow rate display >
key : Moves the digit
key : Counts up the value
key : Count down the value
16
FCM Series
Controlling the flow rate
(3) Changing settings with shortcut keys (only when using direct memory and preset input)
When controlling the flow rate using direct memory or preset input, the setting change screen is opened with a single key operation.
Note: The input signal setting change screen opens the instant that the shortcut key is pressed.
(Example: The P2 setting change screen opens when controlling the flow rate with the preset input P2.)
This cannot be used when controlling the flow rate with analog input or parallel input.
<Changing the setting with a shortcut>
(1) Turn power ON. The instantaneous flow rate is displayed.
(This is used only when controlling with direct memory or
preset input.)
<Instantaneous flow rate display >
Control when flowing with preset memory P2
Hold down for 3 s.
<F1: input signal confirmation> and <input display>
are alternately displayed during this time.
(2) When the
key is held down for 3 seconds, and the
key is pressed, the input signal setting change
<Target setting>
key : Moves the digit
screen is displayed.
key : Counts up the value
key : Count down the value
(3) The flow rate changes when the value is changed. The
flow rate is adjusted by changing the value even if the
Hold down for 2 s.
value is not set.
<F1: Input signal confirmation>
(4) Hold down the
and
keys together for 2
<Input display>
Alternate display
seconds, and set the value. The <F1: input signal
confirmation> screen is displayed.
<Instantaneous flow rate display >
(5) The instantaneous flow rate display is redisplayed after 3
seconds.
Note: Do not change the preset external input while changing the setting with the shortcut key.
The setting could be set into an incorrect preset No.
Data is not saved in memory if power is turned OFF before setting the value. Set the value before turning power OFF.
17
FCM Series
How to operate
Controlling the flow rate
(4) Controlling the flow rate with analog input (Only analog input)
The flow rate is controlled with analog input signals.
<Controlling with analog input signals>
<Instantaneous flow rate display >
(1) Turn power ON. The instantaneous flow rate is displayed.
(2) When the
The instantaneous flow rate display is
redisplayed after 3 s.
key is pressed, the <F1: Input signal confirmation>
screen is displayed. The current input signal setting state is displayed.
The current input signal type and input value are alternately displayed.
<F1: Input signal confirmation>
<Input display>
Alternate display
(The instantaneous flow rate display is displayed if 3 seconds pass
without a button being pressed.)
Hold down for 2 s.
(3) "F1.dr" blinks when the
<Input signal type >
Direct memory input
Analog input 0 to 10V
Analog input 0 to 5V
Analog input 4 to 20 mA
Parallel input
Pre-set input
key is held down for 2
seconds.
(4) When the
key is pressed once, "F1.A 0 " will blink.
(The number shown in
: dr
: A0
: A1
: A2
: PA
: P1
differs based on the model.)
Hold down for 2 s.
(5) Hold down the
key for 2 seconds and set the value.
The <F1: input signal confirmation> screen is displayed.
<F1: Input signal confirmation>
<Input display>
Alternate display
<Instantaneous flow rate display >
(6) The instantaneous flow rate display is redisplayed
after 3 seconds.
The flow rate is controlled with analog input.
Note: Fully open (FUL) cannot be set with analog input.
18
FCM Series
Controlling the flow rate
(5) Controlling the flow rate with parallel input (Only parallel input)
The flow rate is controlled with a parallel 10-bit (signal from PLC, etc.) Expensive input/output devices, such as a D/A converter, are not required.
The parallel input signal is a 10-point signal so when converted to a decimal, it becomes 0-1023. A 0.1% resolution is attained.
Input signal = Set flow/full-scale flow rate x 1023
Example: To set 300 mℓ/min with a full-scale flow rate 500 mℓ/min
300 (mℓ/min)/500 (mℓ/min) x 1023 = 613.8 —> 614
When 614 (decimal) is converted to binary, it becomes 1001100110. 1 sets the input signal ON, and 0 sets the input signal OFF.
(Refer to following table.)
D-sub socket pin No.
12
Cable option insulator color
Green
(Black line)
11
9
White
Type of input
Bit 10
MSB
Bit 9
Bit 8
Binary
[For 614 (decimal)]
1
0
Input signal
ON
OFF
8
7
6
4
3
2
1
Pink
Light blue
Purple
Yellow
Orange
Brown
Bit 7
Bit 6
Bit 5
Bit 4
Bit 3
Bit 2
Bit 1
LSB
0
1
1
0
0
1
1
0
OFF
ON
ON
OFF
OFF
ON
ON
OFF
Red
White
(Black line) (Black line)
<Controlling with parallel input signals>
<Instantaneous flow rate display >
(1) Turn power ON. The instantaneous flow rate is displayed.
(2) When the
The instantaneous flow rate display is
redisplayed after 3 s.
key is pressed, the <F1: Input signal
confirmation> screen is displayed. The current input signal
<F1: Input signal confirmation>
setting state is displayed.
<Input display>
Alternate display
The current input signal type and input are alternately displayed.
(The instantaneous flow rate display is displayed if 3 seconds
Hold down for 2 s.
pass without a button being pressed.)
(3) "F1.dr" blinks when the
<Input signal type >
Direct memory input
Analog input 0 to 10V
Analog input 0 to 5V
Analog input 4 to 20 mA
Parallel input
Pre-set input
key is held down for 2
seconds.
(4) When the
key is pressed once, "F1.PA" will blink.
: dr
: A0
: A1
: A2
: PA
: P1
Hold down for 2 s.
<F1: Input signal confirmation>
(5) Hold down the
key for 2 seconds and set the value.
<Input display>
Alternate display
The <F1: input signal confirmation> screen is displayed.
(6) The instantaneous flow rate display is redisplayed after 3
seconds.
<Instantaneous flow rate display >
The flow rate is controlled with parallel input.
Note: Fully open (FUL) cannot be set with parallel input.
<Reference>
If a high resolution is not required, the number of input points is reduced.
Example: If 2% resolution is acceptable, operate with a 6-point input (0-63 when converted to decimal).
Bits 5 to 1 in the above table are shorted in a bundle. When turned ON and OFF as one bit (LSB), control is executed with
6 points.
19
FCM Series
How to operate
Integrating the flow rate
(1) Displaying the integrated flow rate
The flow rate is integrated and displayed. The display range is shown below. Integrated flow rate is a calculated (reference) value.
9500
L9500
0001
L0001
0002
L0002
0005
L0005
0010
L0010
0020
0050
0100
Display range
0 to 500
mℓ/min
0.00 to 1.00
ℓ/min
0.00 to 2.00
ℓ/min
0.00 to 5.00
ℓ/min
0.0 to 10.0
ℓ/min
0.0 to 20.0
ℓ/min
0.0 to 50.0
ℓ/min
0 to 100
ℓ/min
Display range
999999
mℓ
9999.99
ℓ
9999.99
ℓ
9999.99
ℓ
99999.9
ℓ
99999.9
ℓ
99999.9
ℓ
999999
ℓ
Display resolution
1 mℓ
0.01ℓ
0.01ℓ
0.01ℓ
0.1ℓ
0.1ℓ
0.1ℓ
1ℓ
Pulse output rate
5 mℓ
0.01ℓ
0.02ℓ
0.05ℓ
0.1ℓ
0.2ℓ
0.5ℓ
1ℓ
Model No. FCMFlow rate
display
Integrating
function
<Integrated display>
(1) Instantaneous flow rate display
The integration starts when power is turned ON.
(The integrated value is reset when power is turned OFF.)
(2) The integrated display screen opens when the
is held down for 2 seconds. Press the
key
key for 2
<Instantaneous flow rate display >
Hold down for 2 s.
Hold down for 2 s.
<Integrated flow rate display>
High-order 3-digit display
Low-order 3-digit display
seconds to return to the instantaneous flow rate display.
The display digit changes when the
(3) Integration is reset when the
and
key is pressed.
keys are
held down for 2 seconds. With analog, integration is reset
Hold down for 2 s.
Integration reset
with the external input (No. 3 pin). Integration is also reset
when power is turned OFF.
(2) Closing and stopping the solenoid valve with set integrated flow rate
The solenoid valve is closed and stopped when the set integrated flow rate is attained.
This is suitable for processes in which a set amount is supplied, etc.
<Operation>
The instantaneous flow rate display
is redisplayed after 3 seconds.
Press five times
(1) Instantaneous flow rate display
(2) Press the
<Instantaneous flow rate display >
<F5: Integrated automatic shutoff setting screen>
<Target setting>
key five times and open the <F5: integration
key : Moves the digit
automatic shutoff setting screen>. If integration automatic shutoff
is valid, "F5.on" and the current setting are alternately displayed.
(The instantaneous flow rate display is displayed if 3 seconds
key : Counts up the value
Hold down for 2 s.
<When not using instantaneous automatic shutoff>
After setting, the <F5 screen>
is redisplayed, and after 3 s,
the instantaneous flow rate
screen is displayed.
pass without a button being pressed.)
(3) When the
key is held down for 2 seconds, "F5.--" blinks.
When not using integration automatic shutoff, hold down the
key for 2 seconds. The <F5 screen> is redisplayed, and
key : Count down the value
<When using instantaneous automatic shutoff>
<High-order digit setting>
after 3 seconds, the instantaneous flow rate screen is displayed.
(4) To use integration automatic shutoff, press the
down the
key so that "F5.on" blinks. Then, hold
Hold down for 2 s.
key for 2 seconds.
After setting the high-order digit, hold down the
key and
key for 2 seconds.
After setting the low-order digit, hold down the
key and
key for 2 seconds.
The <F5 screen> is displayed, and after 3 seconds, the instantaneous flow rate screen is displayed.
After setting, the <F5 screen>
is redisplayed, and after 3 s,
the instantaneous flow rate
screen is displayed.
Hold down for 2 s.
<Low-order digit setting>
Hold down for 2 s.
* Only in this mode, the integrated value is reset when the input signal reaches zero. (Valid only after automatic shutoff.)
* The solenoid valve is automatically shut off and the switch functions when the set integrated flow rate is reached.
* If the display for automatic shutoff is "OFF", the switch output lamp does not turn ON. The flow rate display is redisplayed when the
integrated value is reset (button operation or external input).
* Even if automatic shutoff is invalidated during automatic shutoff, it does not function until the integrated value is reset.
* The integrated value is reset when automatic shutoff is set to "on" and the value is set.
20
FCM Series
Integrating the flow rate
(3) Outputting the integrated pulse (Only switch output)
The integrated pulse is output. Refer to the table on page 20 for the pulse rate.
Refer to the connection (page 9), examples of internal circuit and load connection (pages 10 and 11) for details on connecting switch output.
<Operation >
<Instantaneous flow rate display >
(1) Instantaneous flow rate display
(2) Press the
key four times and open the <F4: switch
output setting screen>. If switch output setting is valid,
"F4.
Press four times
The instantaneous flow rate display
is redisplayed after 3 s.
<F4: switch output setting screen>
" and the current setting are alternately displayed.
(The instantaneous flow rate display is displayed if 3
Hold down for 2 s.
seconds pass without a button being pressed.)
(3) Hold down the
key for 2 seconds, and enter
switch output setting mode.
(4) When the
When the
Press three times
key is pressed three times, "F4.3" blinks. <Integrated pulse setting screen >
key is held down for 2 seconds, the
After setting, the <F4
screen> is redisplayed, and
after 3 s, the instantaneous
flow rate screen is displayed.
integrated pulse output is set. The <F4 screen> is
redisplayed, and after 3 seconds, the instantaneous flow
Hold down for 2 s.
rate screen is displayed.
(4) Turning the set integrated flow rate ON with a switch (Only switch output)
Switch output is turned ON at the set integrated flow rate.
See the connection (page 9), examples of internal circuit and load connection (pages 10 and 11) for details on connecting switch output.
<Operation >
<Instantaneous flow rate display >
(1) Instantaneous flow rate display
(2) Press the
key four times and open the <F4: switch
output setting screen>. If switch output setting is valid,
"F4.
Press four times
The instantaneous flow rate display
is redisplayed after 3 s.
<F4: switch output setting screen>
" and the current setting are alternately displayed.
(The instantaneous flow rate display is displayed if 3
Hold down for 2 s.
seconds pass without a button being pressed.)
(3) Hold down the
key for 2 seconds, and enter
switch output setting mode.
(4) When the
Press four times
key is pressed four times, "F4.4" blinks.
Hold down the
key for 2 seconds, and open the
Hold down for 2 s.
target setting screen.
After setting the high-order 3 digits of the target, hold
down the
and
<Target setting>
<High-order digit setting>
key : Counts up the value
keys for 2 seconds.
key : Count down the value
After setting the low-order 3 digits of the target, hold
down the
and
keys for 2 seconds. The
integrated value is reset after the target is set.
Hold down for 2 s.
<Low-order digit setting>
After setting, the <F4
screen> is redisplayed, and
after 3 s, the instantaneous
flow rate screen is displayed.
(5) The <F4 screen> is displayed, and after 3 seconds, the
instantaneous flow rate screen is displayed.
21
key : Moves the digit
Hold down for 2 s.
FCM Series
How to operate
Using switch output (Only switch output)
(1) Using the tolerance mode
Switch output turns ON when the level is within the tolerance of
the input signal setting.
The tolerance is set for both the plus side and minus side as a
%FS (full-scale)
See the connection (page 9), examples of internal circuit and load
connection (pages 10 and 11) for details on connecting switch
output.
H (+ tolerance)
Input signal setting
L (- tolerance)
ON
Output
OFF
<Operation >
(1) Instantaneous flow rate display
(2) Press the
<Instantaneous flow rate display >
key four times and open the <F4: switch
Press four times
output setting screen>. If switch output setting is valid,
"F4.
" and the current setting are alternately displayed.
The instantaneous flow rate display is
redisplayed after 3 s.
<F4: switch output setting screen >
(The instantaneous flow rate display is displayed if 3
seconds pass without a button being pressed.)
(3) Hold down the
Hold down for 2 s.
key for 2 seconds, and enter
switch output setting mode.
Press once
(4) When the
down the
key is pressed once, "F4.1" blinks. Hold
<Target setting>
key for 2 seconds, and open the target
key : Moves the digit
setting screen.
key : Counts up the value
Hold down for 2 s.
(5) After setting the tolerance (minus side), hold down the
and
key : Count down the value
<- tolerance setting (%)>
keys for 2 seconds.
Minus side setting range: -50 to 0% FS
Hold down for 2 s.
(6) After setting the tolerance (plus side), hold down the
and
<+ tolerance setting (%)>
keys for 2 seconds.
Plus side setting range: 0 to 50% FS
Hold down for 2 s.
(7) The <F4 screen> is redisplayed, and after 3 seconds,
the instantaneous flow rate screen is displayed.
After setting, the <F4 screen>
is redisplayed, and after 3
seconds, the instantaneous
flow rate screen is displayed.
22
FCM Series
Using switch output (Only switch output)
(2) Using the range designation mode
The switch turns ON when the level is not within the designated flow
rate range. The upper and lower limit values are set regardless of the
input signal setting (control target).
Both the upper limit and lower limit are set as % FS (full-scale).
Refer to the connection (page 9), examples of internal circuit and load
connection (pages 10 and 11) for details on connecting switch output.
H (upper limit side)
L (lower limit side)
Output
ON
OFF
<Operation >
<Instantaneous flow rate display >
(1) Instantaneous flow rate display
(2) Press the
key four times and open the <F4: switch
output setting screen>. If switch output setting is valid,
"F4.
Press four times
The instantaneous flow rate display
is redisplayed after 3 s.
<F4: switch output setting screen >
" and the current setting are alternately displayed.
(The instantaneous flow rate display is displayed if 3
Hold down for 2 s.
seconds pass without a button being pressed.)
(3) Hold down the
key for 2 seconds, and enter
switch output setting mode.
Press twice
(4) When the
key is pressed twice, "F4.2" blinks. Hold
down the
<Target setting>
key for 2 seconds, and open the target
key : Moves the digit
setting screen.
key : Counts up the value
Hold down for 2 s.
(5) After setting the lower limit value, hold down the
and
key : Count down the value
<Lower limit setting (%)>
keys for 2 seconds.
Lower limit value setting range: 0 to 90% FS
Hold down for 2 s.
(6) After setting the upper limit value, hold down the
and
<Upper limit setting (%)>
keys for 2 seconds.
Upper limit value setting range: 10 to 100% FS
Note that the gap between the upper and lower limits
Hold down for 2 s.
must be 10% FS and over.
(7) The <F4 screen> is redisplayed, and after 3 seconds,
the instantaneous flow rate screen is displayed.
23
After setting, the <F4 screen>
is redisplayed, and after 3 s,
the instantaneous flow rate
screen is displayed.
FCM Series
How to operate
Operation (List)
Note: • Keys are unlocked when the controller is shipped. Lock keys if necessary.
The key lock/unlock state is held even if power is turned OFF.
• Control does not stop during the F1: input signal selection or F2: input signal zero/span setting. Take safety into
consideration and stop control (forced stop) if necessary.
• The flow rate control/forced OFF state is held even if power is turned OFF.
<Normal display>
<Key lock>
<Instantaneous flow rate display >
Flow control state
The current instantaneous flow
rate is displayed.
The instantaneous flow rate
display is displayed after 2 s.
Hold down together for 2 s.
<Key unlock>
Hold down for 2 s.
Hold down together for 5 s.
The instantaneous flow rate
display is displayed after 2 s.
<Forced OFF display>
Flow control stopped state
<Initialization>
The solenoid valve forced OFF
state is displayed. Control is
forcibly stopped even when the
input signal is input.
<Automatic shutoff display>
Flow control stopped state
Hold down for 2 s.
The integration automatic
shutoff state is displayed.
The instantaneous flow rate
display is displayed after 2 s.
Hold down together for 3 s.
Function settings below will
return to the default status.
Input signal selection
Switch output
Input signal zero span adjustment
Automatic power off
Note: The flow rate control/forced OFF state
is held even if power is turned OFF.
<Integrated flow rate display>
Low-order 3-digit display
High-order 3-digit display
Hold down together for 2 s.
Integration reset
<F1: input signal selection >
The current integrated flow rate is displayed. Integration starts when power is turned ON.
Integration is reset when the
and
keys are held down. With analog,
integration is reset with the external input.
Integration is also reset when power is turned OFF.
24
FCM Series
Operation (List)
<F1: input signal selection >
After 3 seconds
<Instantaneous
flow rate display>
Select which input style to use for control.
<F1 screen >
Hold down for 2 s.
Alternate display
Direct memory (1): The setting is applied when the value is changed.
<Direct memory input setting>
After setting, the
setting mode is exited,
and the <F1 screen>
is displayed.
Hold down for 2 s.
Hold down together for 2 s.
Input signal type
Direct memory (2): The setting is applied after it is set.
After setting, the
setting mode is exited,
and the <F1 screen>
is displayed.
Input display
Hold down together for 2 s.
Hold down together for 2 s.
<Target setting>
key : Moves the digit
key : Counts up the value
<Analog input (parallel input) setting>
After setting to the analog
input (parallel input) mode,
the <F1 screen> is displayed.
Hold down for 2 s.
<Preset input setting> (Not used for parallel input)
Hold down for 2 s.
key : Count down the value
<Input signal type >
Direct memory input
Analog input 0 to 10V
Analog input 0 to 5V
Analog input 4 to 20 mA
Parallel input
Pre-set input
Target setting
P1 target display
Alternate display
: dr
: A0
: A1
: A2
: PA
: P1
Hold down for 2 s.
Hold down together for 2 s.
P2 target display
Target setting
Alternate display
Hold down for 2 s.
Set P3 target in same manner
P4 target display
Setting mode is
exited, and the <F1
screen> is displayed.
<Flow rate setting range>
Alternate display
Hold down together for 2 s.
Target setting
Hold down for 2 s.
Full scale flow rate
Hold down together for 2 s.
Flow rate: zero
Valve fully open
Set flow rate
After setting, the
setting mode is exited,
and the <F1 screen>
is displayed.
Note: Integration automatic shutdown (F5.on) does not function while the input signal is set. However, once the setting is
set, the integrated automatic shutdown is applied. If the integrated flow rate is higher than the set value at this time,
automatic shutdown will occur.
<F2: input signal zero span adjustment >
25
FCM Series
How to operate
Operation (List)
After 3 s
<Instantaneous flow
rate display>
<F2: input signal zero span adjustment >
When using with full-scale
<F2 screen >
Hold down for 2 s.
Hold down for 2 s.
<Target setting>
After setting, the
setting mode is exited,
and the <F2 screen>
is displayed.
key : Moves the digit
key : Counts up the value
key : Count down the value
When using with zero span adjusted
<Span point adjustment (%)>
<Zero point adjustment (%)>
Hold down for 2 s.
Hold down together for 2 s.
Hold down together for 2 s.
After setting, the
setting mode is
exited, and the
<F2 screen> is
displayed.
Note: If the preset memory input or direct memory input is selected with F1 (input signal selection function), this function cannot
be used. Full-scale applies.
If the zero point is changed, the integration automatic shutoff cannot be reset (reset by zero input signal).
After 3 s
<Instantaneous flow
rate display>
<F3: Automatic power off setting >
When not using auto power OFF function
<F3 screen >
Hold down for 2 s.
Hold down for 2 s.
After setting, the
setting mode is exited,
and the <F3 screen>
is displayed.
* If any key is pressed during auto power
OFF, the display turns ON.
* The auto power OFF setting time is one
minute. This time cannot be changed.
* Control does not stop during auto power
OFF.
When using auto power OFF function
Hold down for 2 s.
After 3 s
<Instantaneous flow
rate display>
After setting, the
setting mode is exited,
and the <F3 screen>
is displayed.
<F4: switch output setting >
When not using switch output
<F4 screen >
Hold down for 2 s.
Hold down for 2 s.
<Target setting>
After setting, the
setting mode is exited,
and the <F4 screen>
is displayed.
key : Moves the digit
key : Counts up the value
key : Count down the value
When using mode 1 (tolerance mode)
<+ tolerance setting (%)>
<- tolerance setting (%)>
Hold down for 2 s.
After setting, the
setting mode is
exited, and the
<F4 screen> is
displayed.
Hold down together for 2 s.
Hold down together for 2 s.
- tolerance setting range: -50 to 0% FS + tolerance setting range: 0 to 50% FS
When using mode 2 (range designation mode)
<Upper limit setting (%)>
<Lower limit setting (%)>
Hold down for 2 s.
After setting, the
setting mode is
exited, and the
<F4 screen> is
displayed.
Hold down together for 2 s.
Hold down together for 2 s.
Lower limit setting range: 0 to 90% FS Upper limit setting range: 10 to 100% FS
Note that the gap between the upper and lower limits must be 10% FS and over.
When using mode 3 (integrated pulse)
Hold down for 2 s.
After setting, the
setting mode is exited,
and the <F4 screen>
is displayed.
* Refer to 1.1 Specifications for details on the
integrated pulse rate.
* If reset is executed with external input, the
integration is reset, so pulses are not
output.
* The OUT light does not turn ON while
integrated pulses are output.
When using mode 4 (ON when above integration)
<High-order digit setting>
<Low-order digit setting>
Hold down for 2 s.
Hold down together for 2 s.
Hold down together for 2 s.
After setting, the
setting mode is
exited, and the
<F4 screen> is
displayed.
* The integrated value is cleared immediately
after mode 4 is set.
Note: Switch output setting mode cannot be entered with the analog output.
<F5: Integrated automatic shutoff setting screen>
26
FCM Series
Operation (List)
After 3 s
<Instantaneous
flow rate display>
<F5: Integrated automatic shutoff setting screen>
When not using integrated flow rate automatic shutoff
<F5 screen >
Hold down for 2 s.
Hold down for 2 s.
After setting, the
setting mode is exited,
and the <F5 screen>
is displayed.
When using integrated flow rate automatic shutoff
<Low-order digit setting>
<High-order digit setting>
Hold down for 2 s.
Hold down together for 2 s.
Hold down together for 2 s.
After setting, the
setting mode is
exited, and the
<F5 screen> is
displayed.
* Only in this mode, the integrated value is reset when the input signal reaches zero. (Valid only after automatic shutoff.)
* The solenoid valve is automatically shut off and the switch functions when the set integrated flow rate is reached.
* If the display for automatic shutoff is "OFF", the switch output light does not turn ON. The flow rate display is redisplayed when
the integrated value is reset (button operation or external input).
* Even if automatic shutoff is invalidated during automatic shutoff, it does not function until the integrated value is reset.
* The integrated value is reset when automatic shutoff is set to "on" and the value is set.
After 3 s
<Instantaneous
flow rate display>
<F6 screen >
<F6: Error automatic shutoff setting>
When not using error automatic shutoff
Hold down for 2 s.
Hold down for 2 s.
After setting, the
setting mode is exited,
and the <F6 screen>
is displayed.
When using error automatic shutoff
(Valve fully closed at error)
Hold down for 2 s.
* Errors causing error automatic shutoff
• Sensor error: State when sensor
signal error or input signal error has
occurred, or when power voltage is
not within range.
• Control error: State when flow rate
cannot be controlled to set value.
After setting, the
setting mode is exited,
and the <F6 screen>
is displayed.
When using error automatic shutoff
(Valve fully opened at error)
Hold down for 2 s.
After 3 s
<Instantaneous
flow rate display>
<F7: Zero adjust (flow rate output)>
<F7 screen >
Hold down for 2 s.
Alternate display
Current adjust value
<Instantaneous flow rate display >
27
After setting, the
setting mode is exited,
and the <F6 screen>
is displayed.
New adjust value
2 s. after new adjust
value is displayed, <F7
screen> is displayed.
Note: Execute forced OFF (stop control) before adjusting the zero point.
• To prevent malfunctions, the zero point cannot be adjusted unless forced OFF is executed.
•
is displayed when forced OFF is not executed.
• Purge to working gas before adjusting the zero point.
Safety Precautions
Always read before starting use.
When designing and manufacturing a device using CKD products, the manufacturer is obligated to check that device
safety mechanism, pneumatic control circuit, or water control circuit and the system operated by electrical control that
controls the devices is secured.
It is important to select, use, handle, and maintain the product appropriately to ensure that the CKD product is used safely.
Observe warnings and precautions to ensure device safety.
Check that device safety is ensured, and manufacture a safe device.
WARNING
This product is designed and manufactured as a general industrial machine part.
It must be handled by an operator having sufficient knowledge and experience in handling.
2 Use this product in accordance with specifications.
1
This product must be used within its stated specifications. It must not be modified or machined.
This product is intended for use as a general-purpose industrial device or part. It is not intended for use outdoors or
for use under the following conditions or environment.
(If you consult CKD upon adoption and consent to CKD product specification, it will be applicable, however,
safeguards should be adopted that will circumvent dangers in the event of failure.)
1 Use for special applications including nuclear energy, railway, aircraft, marine vessel, vehicle, medicinal devices,
devices or applications coming into contact with beverages or foodstuffs, amusement devices, emergency shutoff
circuits, press machine, brake circuits, or for safeguard.
2 Use for applications where life or assets could be adversely affected, and special safety measures are required.
3
Observe corporate standards and regulations, etc., related to the safety of device design and control, etc.
ISO 4414, JIS B 8370 (pneumatic system rules)
JFPS2008 (principles for pneumatic cylinder selection and use)
Including High Pressure Gas Maintenance Law, Occupational Safety and Sanitation Laws, other safety rules, body
standards and regulations, etc.
4
Do not handle, pipe, or remove devices before confirming safety.
1 Inspect and service the machine and devices after confirming safety of the entire system related to this product.
2 Note that there may be hot or charged sections even after operation is stopped.
3 When inspecting or servicing the device, turn off the energy source (air supply or water supply), and turn off power to the
facility. Discharge any compressed air from the system, and pay attention to possible water leakage and leakage of electricity.
4 When starting or restarting a machine or device that incorporates pneumatic components, make sure that the
system safety, such as pop-out prevention measures, is secured.
5
Observe warnings and cautions on the pages below to prevent accidents.
JJThe
safety cautions are ranked as "DANGER", "WARNING" and "CAUTION" in this section.
DANGER: When a dangerous situation may occur if handling is mistaken leading to fatal or serious
injuries, or when there is a high degree of emergency to a warning.
WARNING: When a dangerous situation may occur if handling is mistaken leading to fatal or serious
injuries.
CAUTION: When a dangerous situation may occur if handling is mistaken leading to minor injuries or
physical damage.
Note that some items described as "CAUTION" may lead to serious results depending on the situation.
In any case, important information that must be observed is explained.
Disclaimer
1
Warranty period
"Warranty Period" is one (1) year from the first delivery to the customer.
2
Scope of warranty
In case any defect attributable to CKD is found during the term of warranty, CKD shall, at its own discretion repair the
defect or replace the relevant product in whole or in part, according to its judgement.
Note that the following faults are excluded from the warranty term:
(1) Product abuse/misuse contrary to conditions/environment recommended in its catalogs/specifications
(2) Failure caused by other than the delivered product
(3) Use other than original design purposes
(4) Third-party repair/modification
(5) Faults caused by reason that is unforeseeable with technology put into practical use at the time of delivery
(6) Failure attributable to force majeure
The warranty mentioned here covers the discrete delivered product. Only the scope of warranty shall not cover losses
induced by the failure of the delivered product.
3
Compatibility confirmation
In no event shall CKD be liable for merchantability or fitness for a particular purpose, notwithstanding any disclosure
to CKD of the use to which the product is to be put.
28
Flow rate controller
Safety precautions
Always read this section before starting use.
Individual precautions: compact flow rate controller FCM Series
Design & Selection
1. Applicable fluid
DANGER
Do not feed gas which is inside of explosive limit
range. It may lead to an explosion accident.
Before using for hydrogen, be sure to purge piping
with inert gas such as nitrogen or argon. Using
without purge by inert gas may lead to an explosion
accident.
Do not feed oxygen gas to wetted sections that are
not oil-treated. There is a risk of fire. Even if the
product has oil treatment, if gas other than oxygen
gas has passed even once, do not use the product
for oxygen gas.
WARNING
This product cannot be used as a business meter.
This product does not comply with Measurement
Laws, and cannot be used for commercial business.
This product is dedicated to gas listed on the model
No. Use of noncompatible fluids lowers product
accuracy and controllability. If hydrogen or helium
gas is passed to a series not designated for these,
the sensor safety circuit may prevent operation. (If
the safety circuit operates, the flow rate cannot be
measured or controlled until power is turned off.)
Prevent gas from flowing in reverse, in case where
mixing hydrogen or helium gas with other gas. If
hydrogen or helium is passed to a series not
designated for these, the sensor safety circuit may
prevent operation. (If the safety circuit operates, the
flow rate cannot be measured or controlled until
power is turned off.) When shutting off gas, provide
shutoff valves and shut off each gas separately as
shown below to prevent gas from flowing in reverse.
Source of
gas supply
Source of
gas supply
29
FCM Series
(For hydrogen and helium)
Shut-off valve
FCM Series
Shut-off valve
(For other than hydrogen and helium)
Pay attention not to let foreign particles into the
product.
If foreign matter gets into this product (dirt, water,
or oil mist into pipes), accuracy and controllability
could drop or the product could fail.
If foreign matter could enter the product, install a
filter, dryer, or oil mist filter upstream from the
product.
The mesh provided in this product is used to rectify the flow
rate in pipes. It is not a filter for removing foreign matter.
Compressed air from the compressor contains drainage
(water, oxidized oil, foreign matter, etc.), so install a filter,
air dryer, and oil mist filter (microalescer) on the primary
side (upstream) from the product.
When using compressed air, use clean air that complies
to JIS B8392-1: 2012 (ISO 8573-1: 2010) [1.1.1 to 1.6.2].
<Recommended circuit> Filter
Pneumatics Air dryer
pressure source
Oil mist filter
Regulator
FCM Series
When using a valve on the primary side of this product,
only use an oil-prohibit specification valve. This controller
could malfunction or fail if subject to splattering grease or
oil, etc.
Use dry gas that does not contain corrosive elements
such as chlorine, sulfur, or acids, and clean gas that does
not contain dust or oil mist.
Some fluid may impact negatively against the
performance, if the fluid remained for a long time
because of its quality. Do not seal fluid inside of pipes for
a long time.
When using this controller for liquefied gas such as
propane gas, evaporate the gas. Flow rate of
liquefied gas into this product will cause failure.
When using this product to control burner air-fuel
ratio, take measures in the design stages to
prevent backfire, and to prevent adverse effect to
this product even if a backfire should occur. Rising
pressure or fire inside of the pipe because of a
backfire of burner will be a cause of malfunction.
Before the use, make sure that the pressure on the
fluid supply line is within the using differential rated
pressure.
Fluid will not flow rate, if the original pressure was
low or pressure on the secondary side became
high, as those situation don't generate differential
pressure.
FCM Series
Individual precautions
Design & Selection
2. Working environment
WARNING
Corrosive environment
Do not use this product in an environment
containing corrosive gases such as sulfurous acid.
Ambient temperature, fluid temperature
Keep the ambient temperature and fluid
temperature within 0 to 50°C.
Even if the temperature is within the specified
range, do not use it if the ambient temperature and
fluid temperature could suddenly change and
cause dew to condense.
Proof pressure, actuation differential rated pressure
Using this product at a level exceeding the
guaranteed proof pressure and operating pressure
difference could cause damage. Follow the specified
range. Fluid will not flow, if the original pressure was
low or pressure on the secondary side became high,
as those situation lowers the differential pressure.
Drip-proof environment
This product's degree of protection is IP40 or
equivalent. Do not install it where it could be exposed
to water, salt, dust, or cutting chips, or a compressed
or decompressed environment. This product cannot
be used where the temperature changes sharply or
in a highly humid environment where internal
damage could be caused by dew condensation.
Proportional electromagnetic valves inside of the
product don't have perfect close-stop function.
If the perfect close-stop is required, please apply
shut off valves out side separately.
When the external shutoff valve is closed, wait with
this product's valve fully closed (set flow rate: zero). If
this product is left in normal control while this external
shutoff valve is closed, an instant overflow could
occur when the external shutoff valve is opened.
When using for applications that turn ON/OFF at a
high frequency, the life of the proportional valve
may be shortened depending on use.
Due to wiring, the current input power ground and
signal common are the same.
When driving several of these products with one
PLC and D/A unit, depending on the D/A unit's
circuit, the correct signal may not be input because
of wiring problems. Consult with the PLC maker
before using.
Current input is used with input signal 1-5 V, but
unlike other rated voltage input, the input
impedance is small at 250 Ω, so a signal generator
that matches this impedance must be used.
Pay attention on pressure loss of piping.
When piping this product, check that the differential
pressure between the upstream side and
downstream side is within the operating pressure
difference range (refer to pages 2, 4). Controller
may not operate properly if used outside of the
operating pressure difference range.
Especially, if there is orifice size or restrictor on the
secondary side (down stream side), the product
may not operate normally. Care must be taken.
It also may lead to a situation to generate pressure
fluctuation at primary or secondary side repeatedly,
or flow rate control become unstable because of
insufficient control of the product.
Using conditions to comply with CE
This is CE marked products complied with EMC
Directive. EN61000-6-2; regulation matched to
immunity applies to this product. Conditions below
are necessary to comply with these standards.
Conditions
This product is assessed as signal line, with
using cable with a pair of signal lines.
It doesn't have resistance against serge
immunity. So provide serge countermeasures at
the equipment side.
3. Flow rate unit
CAUTION
This product's flow rate is measured at a mass flow
unaffected by temperature or pressure. The unit is
ℓ/min, but this is the display when the mass flow is
converted to volumetric flow rate at 20°C 1
barometric pressure (101 kPa).
Do not install this product on moving part or
location with vibration resistance. It may act
wrongly by vibration resistance or impact.
CAUTION
Check the leak current to prevent malfunction
caused by current leaking from other controllers.
When using a PLC, etc., the leak current could
cause this product to malfunction.
30
FCM Series
Installation & Adjustment
1. Wiring
DANGER
se power supply voltage and output within the
U
specified rated voltage.
If rated voltage exceeding the specified rated
voltage is applied, the sensor could malfunction or
be damaged, or electrical shock or fire could occur.
Do not use a load exceeding the output rating.
Failure to observe this could result in damage to
the output or fire.
WARNING
Check the connector pin and cable core wire color
when wiring. Incorrect connections could result in
sensor damage, problems, and malfunctions, so
check the wire color against the instruction manual
before wiring.
Check wiring insulation.
Check that wires do not contact other circuits and
that there are no ground faults or insulation faults
across terminals. An overcurrent could flow to the
product, and result in damage.
Use a DC stabilized power supply voltage, within
the specified rating, insulated from the AC power
supply voltage. Failure to insulate the power supply
voltage could result in electrical shock. If power is
not stabilized, the peak value could be exceeded in
hot summer. This could damage the product or
impair accuracy.
Stop the control device and machine devices, and
turn the power off before wiring. Starting operation
suddenly could result in unpredictable operation
and hazards. Conduct an energized test with
controllers and devices stopped, and set target
switch data. Discharge electrostatic accumulated in
personnel or tools before and during work. Connect
and wire bend-resistant material, such as robot
wire material, for movable sections.
Do not use this product at levels exceeding the
power supply voltage range. If rated voltage
exceeding the specified range or AC power (100
VAC) is applied, the controller could break or burn.
Separate this product and its wiring as far away as
possible from sources of noise such as high-rated
voltage lines. Provide separate measures for surge
applied to the power cable.
31
Do not short-circuit the load. This product could
rupture or burn.
Use stabilized DC power completely separated
from the AC primary side for stainless steel
construction. Connect either the plus or minus side
of the power supply voltage to the F.G. A varistor
(limit rated voltage. 40 V) is connected between the
stainless steel internal power circuit and stainless
steel device to prevent dielectric breakdown of the
sensor. Do not conduct a withstand rated voltage
test or withstand voltage test between the internal
power circuit and stainless steel device. Disconnect
wiring if this testing is required. An excessive
potential difference between power and stainless
body will burn internal parts.
After installing, connecting, and wiring the stainless
steel device, electrical welding of the device or
frame or short-circuit accidents, etc., could cause
the welding current, the excessive high rated
voltage caused by welding, or a surge rated
voltage, etc., to run through wiring or ground wire
connected between the above devices. This could
result in damage to wires or devices. Conduct work
such as electrical welding after removing this
device and disconnecting all electric lines
connected to the F.G.
CAUTION
The optional shield cable connector is a shielded
wire. Insulate wires that are not being used so that
they do not contact other wires, including shielded
wires. Unintended connection to the ground, etc.,
could cause malfunction or damage the product.
Check the direction and fit the D-sub connector into
the back.
Lock the D-sub connector so that it does not
dislocate. Before loosening the lock, fix the fixing
block with a tool, etc.
R
LLE
RO
NT
OW
SS
CO
FL
L MA
ITA
DIG
DE
IN
AN
JAP
MA
Extending cable
The cable longer than 3m may lead to larger
difference between analog output and analog input
signals due to wiring resistance, or unstable
control. CKD recommend to use cable shorter than
3m.
FCM Series
Individual precautions
Installation & Adjustment
When connecting pipes, wrap sealing tape in the
opposite direction from threads starting 2mm inside
from the end of piping threads.
2. Piping
CAUTION
heck that the fluid direction and the direction
C
indicated on the body are the same when piping.
Torque of fitting for 4S, 4RS connection diameter
type (hydrogen, helium models)
(1)Joint tightening method
4RM (1/4 inch JXR male fitting)…gasket material is
nickel SUS316
Tighten the nut by hand until the gasket contacts the
bead, then tighten 1/8 of a turn using a tool.
Bead
Holder
4S (double-barbed fitting) ... Confirm that the front
ferrule, back ferrule, and nut are correctly attached, and
insert tube until it contacts the back of the main body.
Tighten the nut by hand as far as possible, then tighten
1 1/4 of a turn using a tool.
Tube
Front ferrule
Back ferrule
Nut
Before piping, clean pipes with compressed air to
remove any foreign matter of cutting chips, etc. The
rectifying unit or platinum sensor could be
damaged if foreign matter or cutting chips get in.
When attaching piping to this product, use the
following torques as reference so that excessive
screwing torque or load torque is not applied to the
connection port.
Port thread
Tightening torque N·m
Rc1/4
6 to 8
9/16-18UNF
6 to 8
Solid
liquid
sealant
Solid
liquid
sealant
When using a liquid sealing agent, check that it does not get
on resin parts. Otherwise resin could be damaged.
Sealant may stick to thread part when piping is
removed.
Be sure to remove sealant before repiping.
Nut
Gasket
If sealing tape protrudes from pipe thread part, it could be
cut when screwed in. This could cause the tape to enter
the solenoid valve and lead to faults.
Attach a wrench to stainless body when tightening pipes
so that pressure is not applied to the resin section.
Check that sealing tape or adhesive does not get
inside during piping.
Connect a fitting even when using the stainless
steel device with the OUT side opened. The port
filter could come off.
When using resin construction, do not bend the
tube near the push-in fitting. When this product is
used for vacuum applications such as air supply,
do not bend the tube near the push in fitting.
When using resin construction, accurately insert the
tube and confirm that it does not dislocate even
when pulled. Cut tube at a right angle with a
dedicated cutter before use.
After piping, confirm that no gas is leaking.
When using this product for oxygen gas, monitor
the following points.
Piping should be performed by operator with professional
knowledge about dealing with oxygen gas.
Use pipes with oil-prohibit processed.
Remove any dirt or burrs from piping before attaching to
this product.
Attach a filter at the primary side of this product.
Do not install a regulator or solenoid valves before
the product. Incorrect flow rate could cause errors.
If necessary, adopt direct piping section.
While mounting orientation is indicated as "Vertical
or lateral as desired", the flow rate is subject to
difference between mounting orientation or piping
condition.
Do not install with contacting bodies closely. Self
generation of heat rise temperature of the product
bodies each other, and facilitates changes on
characteristic or resin. Keep more than 10mm
blank space in between, if use products next to
each other.
32
FCM Series
During Use & Maintenance
Use this product at the place without adopting dropping
impact or vibration resistance, as it uses micro sensor
chip. Also it requires being handled as precision
component while installation or transportation.
If a problem occurs during operation, immediately
turn power off, stop use, and contact your dealer.
After power is turned ON, this product does not operate
flow rate control for two seconds to complete selfdiagnosis. Provide a control circuit and program that
ignore signals for two seconds after power is turned on.
Keep this product's flow rate within the rated flow rate range.
Use this product within the operating pressure
differential range.
When the set value is changed, control devices could operate
unintentionally. Stop devices before changing settings.
Do not disassemble or modify this product. Doing
so could result in faults.
The case is made of resin. Do not use solvent,
alcohol or detergent in cleaning, or resin could
absorb it. Wipe off dirt with a rag soaked in a diluted
neutral detergent solution and wrung out well.
Pay attention to leading of surge current.
When controller power is shared with an inductive
load that generates a surge, such as a solenoid valve
or relay, if the circuit is cut off while the inductive load
is functioning, the surge current could enter the
switch output circuit and cause damage depending
on where the surge absorption element is installed.
Circuit cutoff with disconnection
or emergency stop Surge absorbingelement
(built-in)
Solenoid valve
Main circuit
Flow rate controller
Relay
Surge absorbingelement
(installed later)
ON
Surge current
PLC
PLC output
Take countermeasures as indicated to the right to
prevent damage caused by surge current leading.
33
Inputdevice
CAUTION
Inputdevice
Output accuracy is also affected by self generation of
heat cause by energizing in addition to temperature
characteristics. Provide a standby time (10 minutes
or more after turning power ON) when using.
(1)Separate the power supply voltage for output
comprising the inductive load, such as the
solenoid valve and relay, and input, such as the
flow rate controller.
(2)If separate power supplies cannot be used,
directly install a surge absorption element for
all inductive loads.Remember that the surge
absorption element connected to the PLC, etc.
protects only that device.
(3)Connect a surge absorption element to the
following places on the power wiring as shown
below as a measure against disconnections in
unspecific areas.
Inputdevice
WARNING
When the devices are connected to a connector,
the output circuit could be damaged by the above
phenomenon if the connector is disconnected while
the power is ON. Turn the power OFF before
connecting or disconnecting the connector.
A degree of precision may change from the initial
period, due to the using environment or condition.
CKD recommends to check actuation in regular
basis.
Sensor chip will deteriorate after a long time use
and it will be a cause of change of detected flow
rate. Please perform regular check.
FCM Series
FCM terminologies, relative products
FCM terminologies
Apply for compact flow rate controller FCM.
Terms
Explanation
Precision scope of guarantee Calibration range of this product.
Accuracy
Calibration difference from CKD basic device. (Condition: temperature 25±3°C, power supply voltage 24 VDC
±0.01 V, standard differential pressure, secondary side atmospheric release)
Reproducibility
(repeatability)
Calculate from differences (D = max - min), at the time when 0%F.S. and 50%F.S. flow rate control is repeated 20 times
continuously, in cycle where the control is stable enough. (reproducibility) = controlled flow rate of ±D/2/FS ×100[%]
Temperature
characteristics
It indicates fluctuation of flow rate value due to the change of ambient temperature or fluid temperature (standard temperature 25°C) with converting to per 1°C.
Calibration is performed at 25°C.
Pressure characteristics
It indicates fluctuation of flow rate value due to the change of working pressure.
Calibration is performed at standard differential pressure.
Standard differential pressure This is a differential pressure at calibration of this product. (secondary side is atmospheric release)
Operation differential pressure This is necessary differential pressure for the product's normal actuation.
Proof pressure
This is a pressure which doesn't damage this product.
Display resolution
This is a minimum step to change the display.
(Integrated) Pulse output rate Integrating flow rate per pulse, at the time of outputting integrated pulse.
LSB
It indicates the minimum digit of parallel input.
MSB
It indicates the maximum digit of parallel input.
digit
Digit. The minimum value of digital display with decimal point ignored.
AWG
Abbreviation of America Wire Gauge. Standards of cable.
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34
CKD
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- 0）2-267-6300 FAX +66（
- 0）2-267-6305
Website http://www.ckd.co.jp/
CKD SINGAPORE PTE. LTD.
U.S.A.
Bangrak, Bangkok 10500, Thailand
：Distributors
CKD KOREA CORPORATION
● HEADQUARTERS
(3rd Floor), 44, Sinsu-ro, Mapo-gu, Seoul 121-856, Korea
PHONE +82（
- 0）2-783-5201∼5203 FAX +82（
- 0）2-783-5204
The goods and their replicas, or the technology and software in this catalog are subject to complementary export
regulations by Foreign Exchange and Foreign Trade Law of Japan.
If the goods and their replicas, or the technology and software in this catalog are to be exported, laws require the exporter to
make sure they will never be used for the development or the manufacture of weapons for mass destruction.
●Specifications are subject to change without notice.
CKD Corporation 2014 All copy rights reserved.
2014.11