FP2313R1
5/96
FP2313R2
10/11/96
FP2313R3
7/2/97
FP2313R4
10/27/00
FP2313R5
02/11/02
MATCHPRO CPMX-2500
AUTOMATIC MATCHING NETWORK
Copyright © 2003 by Comdel, Inc.
The information contained in this manual is proprietary to Comdel, Inc. and is protected by copyright and trademark laws.
You may not modify, copy, reproduce, republish, post, transmit, or distribute in any way any material from this manual except as may be
expressly permitted in writing by Comdel, Inc.
Comdel, Inc. • 11 Kondelin Road, Gloucester, MA 01930 • Phone: 800-468-3144 • www.comdel.com
Table of Contents
I.
Introduction
II. Inspection
III. Safety Information
IV. Installation
V. Description
VI. Interface Connector Pin-Outs
VII. Adjustments
VIII. Figures
FP2313RX
FA0728RX
FA0118RX
FP2313RX
Block Diagram
MATCHPRO Contoller/Motor Drive Assembly
Power Monitor Assembly
CPMX2500 Control Drawing
I. Introduction
The Comdel CPMX-2500 MATCHPRO is an automatic matching network that is designed to maximize power
transfer from a 50 ohm RF power source to a wide range of load impedances. The purpose of this manual is to
explain the use and operation of the MATCHPRO CPMX-2500.
II. Inspection
Prior to installation, insure that the shipping container does not show evidence of damage. If damage is
evident, follow your company’s procedure for damage claims.
III. Safety Information
Warning Label and Safety Marking Explanations:
The following symbols and terms may be found on an instrument or used in this manual.
This label indicates a general warning or caution condition.
This symbol indicates the presence of high voltages in or around the unit.
This symbol indicates the presence of RF energy in or around the unit.
This label indicates a
presence of high voltage in or
around the equipment, which
may cause sever injury or
death. All appropriate
precautions should be
observed when installing,
operating or servicing this
equipment.
This label indicates the presence
of Radio Frequency energy in
and around the equipment,
which may cause burns or other
injuries. All appropriate
precautions should be followed
when installing, operating or
servicing this equipment.
Terms in This Manual:
The WARNING heading used in this manual explains dangers that might result in personal injury or death.
Always read the associated information very carefully before performing the indicated procedure.
The CAUTION statements identify conditions or practices that could result in damage to the equipment or
other property.
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QUALIFIED SERVICE TECHNICIAN, QUALIFIED ELECTRICIAN, QUALIFIED PERSONELL –
These terms indicate persons specifically trained to install, service or other wise handle electronic equipment
of the character and hazard potential of this unit.
Terms as Market on Equipment:
DANGER indicates a personal injury hazard immediately accessible as one reads the marking.
CAUTION indicates a personal injury hazard not immediately accessible as one reads the markings, or a
hazard to property, including the equipment itself.
Read And Understand This Section Fully Before Installing or Operating This Equipment.
WARNING: This equipment must be installed, operated and serviced only by trained, qualified persons.
CAUTION: There are no user or operator serviceable parts inside this equipment. Refer all service to a
qualified service technician.
Line Power Source
•
This product is intended to operate from a power source that does not apply more than 130 volts RMS
between the supply conductors or between either supply conductor and ground. A protective ground
connection by way of the grounding conductor in the power cord is essential for safe operation.
General Safety Precautions
•
WARNING: This product is grounded through the grounding conductor of the power cord. To avoid
electrical shock, plug the power cord into a properly wired receptacle before connecting to the product
input or output terminals. A protective ground connection by way of the grounding conductor in the
power cord is essential for safe operation.
•
WARNING: Upon loss of the protective-ground connection, all accessible conductive parts (including
knobs and controls that may appear to be insulating) can render and electric shock.
•
Use only the power cord and connector specified for your product. To avoid hazard, use only a fuse of the
correct type and current rating as specified on the rear panel of your product.
•
WARNING: To avoid personal injury, do not remove the product covers or panels. Do not operate the
product without the covers and panels properly installed.
Servicing Safety Instructions
•
WARNING: Dangerous voltages exist at several points in this product. To avoid personal injury, do not
touch exposed connections or components while power is on.
•
Disconnect power before removing protective panels, soldering, or replacing components.
Power Source
This product is intended to operate from a power source that does not apply more than 130 volts RMS between
the supply conductors or between either supply conductor and ground. A protective ground connection by way
of the ground conductor in the power cord is essential for sage operation.
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IV. Installation
•
Keep the unit as close to the load (chamber) as possible. Use low inductance, high conductivity
conductors and connectors.
•
Make sure that there is adequate RF ground return to the chamber.
•
Mount the MATCHPRO so that there is at least 2” clearance near all vented surfaces.
V. Description
The Comdel MATCHPRO Matching Network contains (A)optional DC power supplies, (B)an RF power
monitoring PCB FA0118Rx, (C ) a control/interface PCB FA0728Rx, (D)and RF tuning elements.
A. The DC Power supply is normally configured to run off 115 VAC, 50-60 Hz line voltage and can be
modified for 230 VAC. The supply produces +24 (2A) VDC for the logic, control , and motor drive
circuitry.
WARNING: High voltages are present on and around power supply.
B. FA0118Rx Power monitor assembly. There are three detectors mounted on the RF Power Monitoring
PCB: Forward power, phase and magnitude detector. The forward power detector produces a signal
related to the forward power component in the transmission line between the matching network and
the RF generator. The phase and magnitude detectors generate bipolar signals that are used to
determine direction of capacitor rotation in the auto tune mode. The phase detector output is typically
used to control the series capacitor speed/direction and the magnitude detector is used to control the
shunt capacitor speed/direction. The Control/Interface PCB uses all of these signals. The
components in this assembly are different depending on the frequency and power of the CPMX-2500
NETWORK.
C. FA0728Rx CPMX M/N CONTROLLER/MOTOR DRIVE (CPMXCNTL PCB) can be analyzed in
three functional blocks:
1. Auto control circuitry
2. Servo drive circuitry
3. DC power supplies
1.
The auto control circuitry of the CPMXCNTL PCB derives power compensated error signals
by using analog multiplier ICs to divide: magnitude/forward and phase/forward. Each error
signal is summed with the position feedback voltage of a capacitor position to provide a
setpoint for that capacitor.
2.
The two motor drive circuits are physically located on the CPMXCNTL PCB, each circuit is
identical and can be analyzed in three separate blocks: Proportional speed and position
control, Motor drive circuit, Range limiting circuit
2.1 The proportional speed and position control circuit works by comparing the voltage
feedback from a pot mechanically coupled to the capacitor and the position setpoint
voltage fed into Pin 3 of P2 of the motor servo circuits. The greater the difference
between setpoint and the feedback voltage the higher the motor speed. A fixed
resistor, R39, determines the minimum speed. The dead band adjustment pot R32
determines the minimum difference voltage the motor stops.
2.2 The high power motor drive circuit is an H bridge sensefet IC U4, driven by a pulse
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width modulator U3. This motor drive IC has the capability of driving up to 8 amps
continuous but is current limited to 3 amps for reliability. The motor drive circuits
are used to drive the high speed, high torque gear motors directly coupled to the two
vacuum variable capacitors.
2.3 The capacitor tuning range can be limited by adjusting span pot R19 and centering
pot R22. Limiting capacitor ranges can greatly improve both tuning speed as well
as tuning reliability.
3.
The CPMXCNTL PCB is powered by 24VDC. On the CPMXCNTL PCB board there are 2
supplies to make +/-15VDC. The +15VDC is made with a linear regulator and the –15VDC
is made from a switching regulator.
D. RF Tuning Elements
The RF Tuning elements vary from application to application. The staff at Comdel Inc. will work with
your to determine optimal values for your matching network. Refer to block diagram at the end of
this manual for the specific values used in your application.
VI. Interface Connector Pin-Outs
Refer to FA0728Rx schematic for pin outs.
VII. Adjustments
The MATCHPRO is pre-adjusted at the factory. However, some of these adjustments may be optimized for a
particular application.
A. Zeroing The Phase And Mangitude Detectors
WARNING: There are hazardous voltages on and around the rf detectors.
1.
2.
3.
4.
5.
Remove front cover.
Set the MATCHPRO in the manual mode through the remote interface.
Position the capacitors until there is no reflected power indicated by the RF generator.
Adjust phase trim pot located on the front face of the matching network until the voltage read
on Pin 12 of analog multiplier next to S2 reads zero.
Adjust magnitude trim pot located on right side of the matching network until the voltage
read on Pin 12 of analog multiplier next to S3 reads zero.
B. Adjusting The Motor Servo Dead Bands
The dead band may need to be adjusted if the reflected power is high after the motors stop, or the
motors never seem to stop. Each motor has its own dead band adjustments. R32 for each motor servo
PCB is the adjustment for dead band. A CW adjustment opens up the dead band. Turning the dead
band too far CCW may cause the motor/caps to jitter, resulting in poor tuning stability. Too far CW
will cause the motor/caps to stop before an optimum tune point is found.
C. Span And Zero Adjust
CAUTION: Improper setup of limits can result in the motors over-driving the range of the capacitors
Span and zero adjustments are set the maximum values at the factory. These adjustments rarely need
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to be moved. If the load is such that manual tuning of the CPMX2500 is very sharp, some
improvement can be realized by limiting the travel range of either or both capacitors. If an attempt is
made to improve the response of the CPMX2500 by adjusting the span and zero pots, adjust first the
capacitor that is most sensitive.
When setting the span pots R19 a CCW adjustment will decrease the capacitor tuning range while a
CW adjustment increases the range. The zero adjustment pots R22 sets the center of the tuning span.
The following is a procedure for adjusting the range of a given capacitor. This example is for the
series cap:
1.
2.
3.
4.
5.
Connect the matching network into its end use load. In MANual mode, tune to zero reflected
power to be sure a good match can be achieved.
Decrease the span of the series (tune) capacitor to its minimum value by adjusting series span
pot R19 to full CW limit.
Set the series cap position control knob to midpoint (50%).
Slowly adjust series cap zero pot R22, until a good match is achieved.
Open up series cap span by adjusting R19 CCW to achieve the required tuning range to tune
all load conditions. This can be tested by turning the series cap position control knob back
and forth to test the range of tunability.
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