Special Edition
JUNE 2005
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Business and technical news from Unaxis Data Storage
Project Managers / Editors
Christophe Laurent
Ursina Kesseli
Unaxis Data Storage
Marketing Communications
Photography
Michael Reinhard Photography
(Herrliberg, Switzerland)
Unaxis Photography
unless stated otherwise
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Doubletake Design
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If you have any comments,
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For more information on
Unaxis Data Storage please
visit our website:
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Tracks
will return…
9th edition out early 2006
Dear Readers,
Welcome to Tracks Special Hard Disk
Dr. Stefan Seifried
Dr. Ralph-Christian Ohr
The very stimulating news in the Hard Disk market makes it especially timely that we publish this
Tracks Special Edition. The transition to the new PMR technology together with the very positive
changes in the use of Hard Disk technology for consumer electronic applications will require an
increase in capacity in the next years. For us as a supplier of manufacturing solutions this means
getting the right system platform and processes ready for our customers.
During the last years when the Hard Disk business was running on a rather small level, Unaxis
decided to relocate the Hard Disk activities from Unaxis Alzenau, Germany to the new Data
Storage Center in Balzers, Liechtenstein. These activities, mainly in R&D and Supply Chain were
consolidated with the strong Optical Storage business already established for many years in
Balzers. A new Hard Disk Business Unit was formed and with support from Unaxis Germany the
technology transfer has been completed.
Jörg Frey
In the last two years our efforts were mainly focussed on completing product developments
mandatory for the PMR technology, like soft magnetic underlayer cathode solutions, a selfcleaning PECVD source for thin carbon overcoat and last but not least a full flexible software
concept based on the WONDERWARE™. The strong in-house engineering force and our many
years of experience in cathode development have already made us PMR process ready.
Dr. Oliver Rattunde
Following intensive discussions with our customers, we were able to identify the best future
platform to support our well proven cathode and process technology. The result is our new linear
concept “Racetrack” system, which we are launching today.
Hartmut Rohrmann
Dr. Jens Baumann
I am convinced that RACETRACK, equipped with today’s and future technology, will revolutionize
the Hard Disk industry. Beside the technology, the small footprint, ease of maintenance and use
as well as low running costs are just a few of the features which will make RACETRACK the
ideal production solution. The Unaxis philosophy is that software and hardware are of the same
importance. The new RACETRACK will of course come with the proven WONDERWARE™
concept.
Our Hard Disk business will be a vital part of our division’s future success and we have already
started planning additional investments in hardware and manpower allowing us to be ready for
the ramp-up in the years to come.
Tony Sisca
Andreas Meyer
My special thanks go to our customers who supported us in the last years with whom we have
made significant steps forward in our technology capabilities. We look forward to further
developing and improving these partnerships.
I wish you much success in 2005 and hope you will find this special edition of our yearly
magazine an informative and enjoyable overview about the capabilities Unaxis Data Storage has
to offer for the Hard Disk industry.
Peter Tinner,
Executive Vice President, Unaxis Data Storage
Unaxis Data Storage Magazine
RACETRACK
‘Revolution by Revolution’
Dr. Stefan Seifried
BU Manager Hard Disk
3
Revolution by Revolution
Introduction
An introduction to Unaxis’
The transition to Perpendicular Magnetic Recording (PMR) will
definitely come true in 2005. The first PMR Hard Disk Drive
product is already announced and others will follow soon.
However, the first PMR media products will most likely be
produced on the existing equipment found in the manufacturing
field. A shift to new hardware is not required at this point due to
minimal demands by the current PMR layer stack design and
manufacturers want to gain as much production experience as
possible with this new process technology before making any
major new purchases. Conversely, upcoming PMR developments
will have to utilize new system hardware employing additional
process steps to make any further areal density gains.
new PMR machine
RACETRACK - Revolution by Revolution
3
Unaxis concept for sputter processes
7
Deposition of Softmagnetic Under Layers (SUL)
9
New Carbon Gun
10
7
Sputter Processes
Combining the best of
Hard Disk and Optical Disc
Substrate heating and temperature control Co
12
Cooling processes
13
Unaxis and the research for future hard disks
14
Nano-patterned perpendicular anisotropy magnetic
18
recording media fabricated on Unaxis CIRCULUS
Miniature HDDs to Fuel Industry Growth in 2005 –
technologies
New systems are currently being tested and qualified. Unaxis, a
world leader in thin film technology, first focused on getting the
Jörg Frey
Project Manager RACETRACK
PMR technology component ready, by confirming all our capability
for the necessary processes before considering a new platform.
This has allowed Unaxis to gain much process experience that
can be easily transferred to our customers – the media
manufacturers. Equally, by starting first with the components
Unaxis was able to benefit from huge insights in component
integration and fast handling, creating an exceptional new
dedicated system platform that will serve current and future Hard
Disk media. The new RACETRACK, the name chosen because of
its speed and high throughput, is a single disk system processing
one disk at a time.
In less than one and half years, the new revolutionary Unaxis
RACETRACK system platform was realized. It addresses exactly
the needs of a future Hard Disk Media Plant. Its introduction will
change Hard Disk manufacturing, as we now know it. Let the
revolution begin....
12
Substrate Heating
High uniform temperatures
19
in a cool environment
Infrastructure to See Wave of Investment
The race of RACETRACK started…
20
When only the best supply chain will do!
22
20
Unaxis Data Storage around the world
24
The Race is on...
How it all started
24
Contacts
Unaxis Data Storage
around the world
2 | Tracks Unaxis
3
Unaxis
Unaxis Tracks
Tracks || A
Unaxis Data Storage Magazine
Process Chamber:
Process environment
with shield, Meissner trap
and disk-carrier
Customer oriented concept
The RACETRACK system has a vertical layout addressing the
double-sided simultaneous deposition required for all substrate
form factors. After the previous Unaxis generations of circular
operating systems, the RACETRACK process chambers are
linearly aligned in two rows. Disks arriving from the clean room
area are loaded into the system by means of a three vacuum
stage loading module. In the third stage, the transfer-unit, the
disk is then transferred into a carrier for process and transport.
The process chambers are separated by enhanced gate valves
for clean processing and independent venting.
Generally, Unaxis Data Storage sputter systems are industry
known for their high uptime and offering the lowest cost per disk.
One reason for this is the high target utilization as result of
intense cathode and process development. A target utilization up
to 60%, a target exchange time of less than 60 sec. (after
chamber venting), and the possibility of independent venting of
each process chamber are key facts for achieving a minimum
downtime in the manufacturing environment. In addition to this,
customer oriented engineering allows consumables for both
sides to be reached by accessing the tool just from one side.
The linear transport works independently for each chamber
without any feed-through, the driving force is only applied
through the chamber walls.
Both linear drive and gate valve are the fastest in the market and
as integrated unit in the chamber already considered for other
applications inside Unaxis. Transport from one row to the other is
performed by two lift modules at each end of the rows.
4 | Tracks Unaxis
Market trends show the small form factor disk to have the
biggest growth in the next years. As in the past Unaxis offers
with the new RACETRACK system also small form factor disk
handling, loading and processing concepts. Focus of the work
was on a particle free reliable concept with maximum throughput
and minimum footprint.
During transport and all process steps the disk is held in a
carrier. The upper part of the carrier holds the disk with four
notched springs based on an improved design from the
CIRCULUS system. The lower part is optimized for fast transport
and also avoids possible particle creation by a special wear
protective coating.
Processing takes places in up to 23 of the maximum 24
chambers with which the system can be configured. While the
carrier with the disk is arriving and being positioned in the
chamber the gate valve is closed simultaneously for a total
separation of the process chambers from each other.
Proven cathode concept
Fast transport is not just one of the drivers to achieve a high
throughput manufacturing environment, but also in combination
with the excellent vacuum level (<5 x 10-8 mbar) the key to
achieve a good magnetic performance by minimum
contamination at the interfaces of the layers. Although some
processes require a longer process time, clean interfaces allow
the possibility to split up processes to gain throughput for
manufacturing reasons.
Fastest transport in the market
With a throughput of up 1000 disks/hour (at a 2.9 sec. process
time) the RACETRACK is the fastest system in the market
transporting a single medium at a time. The keys to fast transport
are:
a minimized transport distance by a dimension optimized
chamber design
a specially developed linear magnetic drive with a transport
time of less than 0.3 sec. from chamber to chamber, including
positioning inside the chamber with an accuracy better than
0.2 mm
a specially designed gate valve with an opening and closing
time well below 0.2 sec.
Small form factor solutions
Without a doubt the
most famous MP3
player, Apple's iPod
led the move to new
applications for the
hard disk industry with
up to 60 GB capacity
As part of Unaxis Data Storage philosophy the manufacturing
proven ARQ cathodes also formed the backbone for the
RACETRACK system. The focus of development was on easy to
handle and cost competitive solutions while keeping Unaxis
known process performance.
All PMR necessary processes are available:
SUL Sputtering
DC Sputtering
RF Sputtering
Heating
Cooling
Multilayer
IBD Carbon
Bias on glass disk
In brief, for DC sputtering the proven compact layout with an
internal asynchronous motor without belt will be used which will
be adjusted for the soft-magnetic applications by a modified
base plate and yoke. The RF cathode is based on the production
solution of the DVD Sprinter cathode with dimensions adjusted
for the smaller disk diameter. This RF cathode employs fully
integrated software manageable tuning. As a carbon overcoat
solution a self-biasing and self-cleaning PECVD source will be
employed. Other carbon overcoat solutions are also under
investigation for the future.
Customers already using Unaxis equipment for Hard Disk
production can benefit from their process know-how and very
easily transfer existing processes to the RACETRACK system.
Clever engineering allowed us to design a process geometry
which is downwards compatible to the CIRCULUS by means of
adapter kits.
Currently, the handling, loading and processing of small
formfactor disks is done by means of pallets where up to 5 disks
can be handled and processed at a time. Our complete solution
with less than 5 sqm footprint works with two independent
robots where one is working for loading the SFF disks in the
pallet and the other taken over to load the pallet into the
machine’s conveyor system. The concept is independent of the
regular system, can be easily integrated, and is already running
in today’s LMR manufacturing areas.
Easy modular and flexible setup
Future media manufacturing requires flexibility with respect to
hardware and software changes. The RACETRACK system
allows addition and subtraction of process chambers in
increments of four without any special alignment procedure up to
a total of 24 chambers. This allows our customers to purchase
only what is needed for their growth strategy. As the smallest
unit, the so called process module (PM) comprises 4 process
chambers and comes complete with all necessary hardware
services and power supplies for an easy link up and efficient use
of space. Overall, an impressively small footprint was realized
which can be less than 25 sqm for a 20 chamber system
including all supplies. Each process chamber can be addressed
independently of the others for greater process flexibility and
transport control. The RACETRACK system with its flexible
proprietary software and hardware, will give our customers
superior manufacturing flexibility, meeting today’s and future
needs.
Maintenance
Every manufacturing system has to receive preventive
maintenance to work according to the specification and
manufacturing requirements. One of the main focus areas during
the development of RACETRACK was on achieving excellent
accessibility of all parts which might be maintained or exchanged
from time to time. Parts involved in the sputter process like
targets and shields can be accessed and exchanged for both
sides by just opening the chamber from one side. Parts of the
gate valves, e.g. the gate itself can be exchanged without taking
out the entire body. Cabling and supplies are clearly arranged for
fast error diagnostics. All fundamental maintenance can be
carried out without the use of pulleys or similar tools.
Unaxis Tracks | 5
Unaxis Data Storage Magazine
UNAXIS CONCEPT FOR
SPUTTER PROCESSES
Software
We placed great emphasis on getting the
software right. The RACETRACK system
runs on the WONDERWARE™ concept
which has been a great success story on
the DVD-SPRINTER systems and also
successfully operating on the Unaxis
CIRCULUS family worldwide, both under
24/7 manufacturing conditions.
A PLC controller layout visualized by a
logical, concise and real-time operating
user interface based on WONDERWARE™
is at its heart. This concept allows a full
flexible and easy configuration of the
RACETRACK system. Adding, changing
or subtracting components e.g.
cathodes, pumps, mass flow controllers
is very easy and self-explaining and
could be done by any trained operator.
Teaching of components involved in the
handling and transport can be done
without any other external controllers, just
by the PC. Recent process parameters,
like sputter pressure, gas-flows, sputtervoltage and current can be saved with
their min., max. and average value in
the disk logging file.
6 | Tracks Unaxis
The desired process variance level which
might be different for R&D in comparison
to manufacturing can be easily adjusted.
An easy transfer of recipes from system to
system can be taken for granted. Of
course options can also be limited to
certain user levels by means of password
security. Finally, software updates based
on customer or Unaxis input can be done
during regular system maintenance.
Glass Bias solution
Although maybe not considered in the first
stage of PMR, Unaxis can offer already a
solution for applying a bias to glass
substrates. The concept is both simple
and clever using standard parts already
used in other areas of the system. The
glass bias station can be integrated and
moved very easily to any chamber of the
system. Parts of the transfer-unit, the
spring-opening devices are used to
release the disk from the carrier while a
gripper (hub) takes over. The gripper unit
lifts backwards and turns the disk by a
certain angle before lifting towards the
carrier for further processing. A solution
for up to four SFF disks processed in a
pallet is already engineered but will be
disclosed later for patent reasons.
COMBINING THE BEST OF HARD DISK
AND OPTICAL DISC TECHNOLOGIES
Revolutions in summary:
world’s highest single-disk throughput:
1000 disks per hour at 2.9 sec. process
world’s fastest transport time of 0.3 sec.
resulting in 0.7 sec. plasma to plasma
(process to process) time
excellent base pressure of less than
5x10-8 mbar for clean processing
maximum 23 process chambers separated by enhanced gate valves
easy modular setup - allowing for full
flexible configuration
serves all form factors from 0.8 to 3.5 inch
proven handling, loading and processing
concepts for small form factor disks
fast target exchange time < 1 minute
(after chamber venting), ensuring a quick
return to production and profit
easy access to all maintenance relevant
parts and consumables from one side of
the system without any special lifts or
pulleys
Hartmut Rohrmann
Senior Scientist R&D
Dr. Oliver Rattunde
R&D Manager Hard Disk
Components
As part of the Unaxis philosophy the manufacturing proven
cathodes are at the heart of the RACETRACK sputter processes.
The new cathode designs combine the best features of the
Unaxis hard disk and optical disc deposition sources. This
results in easy to handle and cost competitive solutions while
keeping Unaxis known process performance.
Highlights
All cathodes are compact and lightweight. The rotating magnet arrays are
directly driven by asynchronous motors. They are easily accessible from the
rear without breaking the vacuum.
The cathodes take form factor optimized target sizes of up to 160 mm
diameter and the target substrate distance TSD can be adjusted to 25 mm or
to 32 mm, depending on the process requirements.
A newly developed geometry for sputter gas management provides
homogenous plasma conditions on the targets and symmetry for the process
on both sides of the disk substrate.
Unaxis Tracks | 7
Unaxis Data Storage Magazine
DEPOSITION OF
SOFTMAGNETIC
UNDERLAYERS
Process compatibility
The process conditions in RACETRACK are downwards compatible to
existing Unaxis equipment. Production process know-how can be easily
transferred. The layout of the cathodes offers the freedom to take targets
and magnet arrays of CIRCULUS M12 and CIRCULUS M14 systems at an
identical process geometry (target - shield - substrate holder geometry,
target substrate distance, target magnet distance). Thus established magnet
array - target combinations can be run on the new system with guaranteed
performance.
DC & DC-SUL sputter cathode
The key technology for PMR media production
The sputter workhorse to serve most applications
By reducing the demands on the new sputter source onto the essentials for
thin film deposition we designed a compact, easily to handle cathode for all
DC and pulsed DC sputter applications.
The design is UHV compatible with only two sealings (O-rings for mounting
the target base plate to the chamber). For critical applications these Viton
rings can be replaced by metal seals.
RACETRACK DC & DC-SUL sputter cathode
A spacious compartment for easily accessible magnet arrays (max. diameter
172 mm, height up to 50 mm) allows flexibility in the magnetron design.
High magnetic fields for strongly magnetic targets can be provided by
long permanent magnets. For the demands of different magnetic and
nonmagnetic target alloys a variety of dedicated magnet arrays are available.
Increased storage density of PMR relies on SUL
Performance data
The upcoming generation of PMR media promises a further increase in storage
density. The main advantage for reducing the bit size by going perpendicular
comes from the soft magnetic underlayer (SUL). It draws the magnetic flux from
the writing pole through the storage layer generating far higher writing fields than
made possible with longitudinal recording. This allows the introduction of storage
alloys of increased magnetic anisotropy giving long term magnetic stability for
smaller grains/bits.
Target thickness
Deposition rate
Thickness uniformity
Target inventory
Magn. anisotropy of SUL
Hartmut Rohrmann
Senior Scientist R&D
Marcel Neusch
Project Manager R&D
more than 6 mm Fe, more
than 10 mm CoTaZr
up to 25nm/sec
better than ± 4% for whole
target life
2.2 mm for 6 mm Fe target
radial easy axis (CoTaZr, NiFe)
Pre-magnetisation of the target, a Unaxis solution for SUL sputtering
The deposition of soft magnetic layers is a challenge. Targets of only a few
millimeter thickness already shorten the magnetron sputter field of standard
magnet arrays. A Unaxis solution is to introduce pre-magnetisation of the targets
by static magnets and flux guides surrounding the target. Then the rotating
magnet array has to provide less extra field to saturate and penetrate the target
locally. This cathode layout also supports a further demand on the SUL sputter
source: During film deposition it provides a radial magnetic field at the substrate
resulting in a radially oriented easy axis of the soft magnetic layer.
The sputter deposition of softmagnetic underlayers is provided by a special
version of the DC cathode, using a modified target base plate with multimagnet option.
RF Sputtering
Expertise from an installed base of over 600 cathodes
The SUL cathode in RACETRACK follows this design principle already well
proven in CIRCULUS. It is based on the standard DC cathode with a specially
designed target base plate and target environment. Complex computer
modeling and simulation was performed to optimize the magnet layout for
maximized target thickness, target inventory and film uniformity without losing
the radial easy axis.
Since RF processes may become more important for future Hard Disk
technologies the new RACETRACK system features a new, dedicated RF
cathode with fully integrated RF matching. This planar magnetron cathode
has been adapted from the well proven Unaxis SPRINTER ARQ 21 RF
cathode with an installed base of over 600 cathodes worldwide.
Efficiency of SUL source (6mm Fe target)
RF sputter source with integrated, software-manageable RF matching
The new RACETRACK version features:
Compact size for targets of up to 160 mm diameter, 32 mm target substrate
distance
Fully integrated, software manageable RF matching
RF plasma ignition with well defined, very short (~100ms) pressure pulse
through small aperture diaphragm independent of preset sputter pressure
Synchronized RF power supplies with accurate phase control for A-/B-side
uniformity
8 | Tracks Unaxis
For tests with extremely high Bs material pure Fe (target thickness up to 7mm)
was chosen. The measured erosion profile matches the results of the simulation
closely. Towards the end of the target life the magnetron effect is enhanced at
the outer diameter by the residual target material. This effect is obvious for high
Bs targets. To minimize this the magnet array design has to be matched to the
individual magnetic properties of the chosen target material.
Tests with CoTaZr targets showed a well defined radial easy axis in the softmagnetic underlayers.
Erossion profile of 6mm Fe target on SUL cathode
Numerical simulation & experimental data
Unaxis Tracks | 9
Unaxis Data Storage Magazine
NEW CARBON GUN
Proven manufacturing solution for ultrathin carbon overcoats
Dr. Oliver Rattunde
R&D Manager
Hard Disk Components
Dr. Ralph-Christian Ohr
Product Manager
Hard Disk Systems
PMR layer architecture requires sophisticated solutions for ultrathin carbon
overcoats down to 2 nm with maximum wear and corrosion protection.
Taking the best from the proven Unaxis CIRCULUS solution, the new
RACETRACK Carbon Gun comes with the same plasma beam source and
Acetylene based PECVD process with in-situ oxygen cleaning. Furthermore,
the new RACETRACK machine layout and exceptional carrier transport
system result in a number of process advantages related to higher
throughput and less particle generation. In addition, the self-biasing
characteristic of the plasma beam source offers major advantages with
respect to processing small form factor (SFF) glass disks.
Advantages of the new RACETRACK layout
Process Information
Carbon Gun in-situ oxygen plasma cleaning (ashing) has been proven to be very
effective in preventing particle generation, but oxygen gas must not come in contact
with the sensitive layer stack on the disk. In CIRCULUS systems with their central spider
wheel an elaborate shutter mechanism has been put in place to isolate the Carbon Gun
chamber from the rest of the machine during oxygen cleaning.
The carbon deposition process is based on a capacitively coupled and
magnetically enhanced RF discharge at 27 MHz with Acetylene (C2H2) as
the process gas. The specific design of the patented plasma beam source
with a transparent extraction grid on ground potential results in an inherent
homogeneous neutralization of the beam. The positive ions are accelerated
onto the grid by means of the RF self bias (up to 100 eV per C-atom) and
are then directed towards the substrate which is not part of the RF circuit.
The new RACETRACK system however, with its innovative carrier transport system and
gate valves between each process station, enables carriers to be moved out of a
process station individually and independently of the overall handling cycle. Thus,
cleaning will take place after the processed disk has been moved out of the Carbon Gun
chamber to an empty position e.g. in the lift module. Additional shutter mechanisms can
be eliminated which offers a number of process advantages:
No more moving parts, especially those which can get carbon covered, and the same
geometry for deposition and cleaning process – assuring even lower particle counts.
Reduced chamber size resulting in less gas volume to be pumped out (approx. 10 liter
total chamber volume in the RACETRACK compared to two times 23 liters for CIRCULUS
M12) which enables faster evacuation of process gases, especially in between cleaning
and deposition process.
Smaller distance between plasma beam source and substrate are possible which results
in higher deposition rate (see page 11) and less carbon stray coverage in the chamber
(less amount of carbon to be cleaned).
The last two points contribute to a significantly increased throughput of 750 disks/hour
with one Carbon Gun station and 1000 disks/hour for two consecutive Carbon Gun
stations.
10 | Tracks Unaxis
Manufacturing solution for SFF glass disks
As ion energy results from RF self bias and not from a DC bias which has to
be applied to the substrate carrier, the Carbon Gun is also ideally suited for
the manufacturing of SFF glass disks. In conventional systems, a bias
voltage can only be applied to glass disks after the metal coated disks have
been re-gripped, usually by means of a rotation station, which turns out to
be very difficult to realize for several small disks being located in a FF95
carrier. The Unaxis Carbon Gun offers the big advantage of high quality IBD
carbon coating without having to apply substrate bias.
Deposition rate at 1E-3mbar C2H2 pressure as a function of distance
between plasma beam source and substrate
Film Properties
Thickness uniformity
C-C sp3 content
Hydrogen content
Density
Roughness (on Si wafer)
AFM scratch resistance
± 5% (FF95 disk)
55 - 60 %
25 - 30 %
2.4 g/cm3 Room Temperature (RT)
# 0.12 nm
2.7 times higher than sputtered CNx films
Unaxis Tracks | 11
Unaxis Data Storage Magazine
COOLING PROCESS
High Rate Cooling with optional applied magnetic field
Dr. Jens Baumann
R&D Manager Key Components
Hartmut Rohrmann
Senior Scientist R&D
SUBSTRATE HEATING AND
TEMPERATURE CONTROL
High uniform temperatures in a cool environment
For the heating process the RACETRACK can rely on the
excellent performance of the Circulus heating stations. It was
possible to introduce a more compact simplified design by
containing the process relevant geometries and properties.
The infrared radiation is generated by resistive carbon elements
at temperatures of about 1000°C. The emitted wavelength
spectrum is of high efficiency for metal and glass substrate
heating. Water cooled reflectors form a highly reflecting cavity
around substrate and heater elements providing three benefits:
High energy transfer even for low absorbing substrate surfaces
Low heat load for the disk carrier and the process chamber
Fast response without long term drifts. The thermal equilibrium is
reached 30 sec. after power has been switched on
In 0.6 mm glass substrates a rate of temperature raise of up to
45°C/sec was achieved without breaking the disks.The station
itself would be able to deliver doubled power if required in future.
The heating element geometries were optimized for
12 | Tracks Unaxis
homogenous circumferential temperature on the disks and
distinctive radial temperature ramps. By combining a hot ID
heater with a hot OD heater in the opposing positions of a
station the radial temperature ramp can be set by the power
ratio of the heaters.
A set of two heating stations with identical heaters showed the
following performance for a mean temperature of ~240°C on
65 mm disks:
Heater type
Radial ramp
Circumferential
Flat
+1.3°C
< ±1.7°C
Hot ID
+12.0°C
< ±1.6°C
Uniformity of the radially oriented magnetic field for two different disk form factors.
Efficient and reliable cooling stations - made by
UNAXIS - are already successfully integrated in
CIRCULUS hard disk machines as well as in DVD
SPRINTER systems for optical storage media. The
existing knowhow was integrated into a new,
compact and user-friendly design for the cooling
station of the RACETRACK system. All disk form
factors can be addressed by simply changing the
front cooling plate. The cooling rate is increased by
decreasing the temperature of the cooling plate and
by increasing the pressure of the cooling gas in the
station.
Current and future HD technologies ask for cooling
steps adjusted to different applications: Substrate
cooling is one way to improve the properties of the
protective carbon overcoat or to influence the
microstructure of the storage layer. On the other
hand, PMR technology may require a cooling step
after deposition of the soft magnetic underlayer in the
presence of a radially oriented magnetic field. For the
new RACETRACK cooling station, permanent magnet
arrays are available as an option for all disk
dimensions.
Hot OD
-7.0°C
< ±1.7°C
The substrate temperature is controlled by fast pyrometers ‘on
the fly’. On half way during the disk transport to the next station
a sensor with a raise time less than 5 msec looks on the
speeding disk. The read temperature is displayed on the screen
and stored in the data logging for enhanced process control.
Unaxis Tracks | 13
Unaxis Data Storage Magazine
UNAXIS AND THE RESEARCH
FOR FUTURE HARD DISKS
HIDEMAR (High Density Magnetic
Recording) is a research project
supported by the European
Hartmut Rohrmann
Community. A consortium of 8
Senior Scientist R&D
partners (CNR Rome, NCSR’D’
Athens, UPMC Paris, CSIC Madrid, CNRS Paris,
TU Vienna, STM Milano and Unaxis Balzers)
investigates different approaches for future hard
disks. A main focus is on Co/Pd and Co/Pt
multilayers and on fct phases of FePt and CoPt as
storage layers. Broad interest is given to
patterning, especially to techniques that may fit for
mass production, and to the magnetic behaviour
and the read/write properties of patterned media.
These experiments are supported by computer
modeling and read/write simulations. In parallel the
approach of self assembled media is pursued to
get comparative evaluations.
All Co/Pd multilayers were prepared on Unaxis
Hard Disk systems in Balzers using the
TRIATRON, and magnetic characterisation was
done in the Unaxis lab. The reports from TU
Vienna and CSIC Madrid show a small part of the
experiments and results on the Unaxis multilayers
investigated in the HIDEMAR project.
14 | Tracks Unaxis
MICROSTRUCTURE AND MAGNETIZATION
REVERSAL IN CoPd PERPENDICULAR
RECORDING MEDIA
Prof. Josef Fidler
Dr. Sabine Höfinger
Prof. Thomas Schrefl
Vienna University of Technology, Institute of Solid State Physics
TEM investigation of microstructure
Transmission electron microscopic (TEM) investigations of the microstructure of
novel magnetic multilayer materials in combination with micromagnetic
simulations of the magnetization reversal processes reveal guidelines for the
influence of the real microstructure on the switching processes of newly
developed magnetic media with superior recording densities. The main
objectives of these investigations are to obtain upper limits for the bit writing of
the highest density recording media based on realistic microstructural features.
In high areal density recording media the microstructure, especially the grain size
has to be in the order of 5-10 nm and the magnetic layer thickness in the range
between 10 und 15 nm, respectively. Since the important length scales of thin
film media are in the nanometer range, transmission electron microscopy (TEM)
with the capability of high resolution imaging is an important tool for the study of
thin film media. In commercial hard disks which have been used so far, the easy
axis of magnetization lies in the plane of the recording layer and hence the
media is called longitudinal recording media. In order to show the rapid
development of the microstructure and recording density the micrograph of Fig.
1 depicts a cross-sectional view of a commercial hard disk of ~1 Gbit/in2 areal
density which was state of art about 10 years ago. An underlayer (UL) of about
80 nm is employed to control the crystallographic texture and the grain size of
the magnetic layer (ML). The magnetic layer is in the order of ~50 nm, the
particle size ~30-40 nm, respectively. Due to the large bit size of about
3100x150 nm2 for the low recording density the grain size was in the right order
to give a low signal to noise ratio of the bit signal to the recording heads.
To achieve a high areal recording density beyond 100 Gbit/in2 with a bit size
of about 130 x 45 nm2 a reduction of the grain size to the order of 6-8 nm
has been necessary and a shift from longitudinal recording to perpendicular
recording technology will be necessary. Since the magnetization direction
during reading and writing process is perpendicular to the thin magnetic
layer, the soft magnetic underlayer (SUL) forms a flux closure and therefore
acts as a part of the head. The intermediate layer is used to decouple the
SUL from the recording layer and also to control the grain and texture
growth of the recording layer. All the layers in perpendicular recording media
except the SUL are required to be as thin as possible to decrease the
distance between the head and the media and SUL [1]. A schematic
configuration of a perpendicular recording media is given in Fig. 2.
Promising materials for novel perpendicular recording media are Co-Pd
multilayer structures, which have a preferred orientation perpendicular to the
magnetic layer with Co-layer thickness (0,2 – 0,3 nm) [2]. The samples which
have been investigated in this study constisted of a magnetic multilyer
system (12 nm Pd layer, followed by alternating Co-Pd layers) and were
directly sputtered on a soft magnetic underlayer. Differences in the
microstructure were found in dependence on different sputter-gases and gas
pressure. The structure of sputtered thin films is responsible for their
properties. The context between layer growth, morphology and mechanical
properties can be described by Thornton´s structure zone model [3]. The
magnetic properties (especially the Hc-value) of samples sputtered with high
pressure are increased compared with samples sputtered with low gas
pressure. That fact can be explained by the magnetic decoupling of the
grains. The decoupling of the grains is a result of the columnar growth and
shadowing effect. A columnar growth is clearly seen in samples sputtered
with higher gas pressure (see Fig. 3 plane view, and Fig. 4 cross sectional
view).
Fig.1: TEM bright field image of a conventional hard disk of
~1Gbit/in2 areal density (state of the art in the year 1995)
Lubricant
Intermediate Layer
Overlayer
Soft Underlayer
Magnetic Layer
Substrate
Fig.2: Schematic configuration of the layer system of perpendicular
recording media
The crystallographic parameters and orientations of the investigated hard
disk specimen can be easily obtained and associated with any specific
region by means of selected area electron diffraction (SAD). SAD is therefore
often used to determine the identity of phases and grain textures in
recording media. The comparison between the experimental SAD pattern,
and theoretical calculated diffraction rings of a CoPd disordered fcc and
ordered fct phase is given in Fig. 5. The experimental pattern fits very well
with the calculated fcc phase pattern. Distinctive differences between fcc
and fct phase can be seen by the splitting of the second and fourth
diffraction ring.
Fig.3: Plane view of decoupled magnetic grains of a CoPd hard disk
specimen for perpendicular recording
Unaxis Tracks | 15
Unaxis Data Storage Magazine
Modelling and numerical micromagnetic simulations of bit
writing in CoPd mulilayer
We have used a three dimensional micromagnetic model
describing the granular microstructure of magnetic thin film
recording media and taking into account long range magnetic
stray field interactions and short range direct exchange
interactions in order to show and calculate the switching of the
magnetization during the application of a local external head field
[4]. The size of the model allows us to simulate two written bits
and study their interactions and stability. Recording data
densities larger than 100 Gbit/in2 are possible when the media
have thermally stable, magnetically decoupled grains with grains
sizes less than 10 nm.
Fig.4: Cross sectional view of a CoPd hard disk specimen for
perpendicular recording with soft magnetic NiFe underlayer
Fig.5: Selected area diffraction pattern (SAD) of CoPd
multilayer structure (top) and calculated pattern of
CoPd fcc (bottom left) and CoPd fct (bottom right)
16 | Tracks Unaxis
Micromagnetics is a continuum theory to describe magnetization
processes on a length scale which is large enough to replace the
atomic spins by a continuous magnetization vector and small
enough to resolve the magnetization transition inside a domain
wall. Depending on the magnetocrystalline anisotropy the
characteristic length scale, the domain wall width or the minimum
discretisation size, is in the order of several nanometers to
micrometers. Computational micromagnetism leads to a deeper
understanding of hysteresis effects at an intermediate length
scale between magnetic domains and atomic distances by
visualization of the magnetization reversal process. Switching of
small particles, thin film elements and nano-wires becomes
increasingly important in magnetic storage and
magnetoelectronic devices. The magnetization reversal processes
are studied using a 3D hybrid finite element/ boundary element
micromagnetic model. Transient magnetization states during
switching are investigated numerically in thin nanoelements and
multilayers of various shapes and dimensions. Switching
dynamics are calculated for different external field profiles and
frequencies. The numerical solution of Brown’s equations can be
effectively performed using finite-element and related methods
that easily handle complex microstructures and take into account
the long-range magnetostatic interactions and short-range
exchange coupling between the grains in granular thin films.
Dynamic finite-element simulations successfully predict the
influence of microstructural features like grain size, particle
shape, intergranular phases, and surface irregularities on the
magnetic properties. Theoretical limits for remanence, coercive
field, switching behaviour at a short time scale of less than 1 ns,
and other properties have successfully been calculated for a
large number of materials. The numerical finite element
micromagnetic technique is based on the standard Galerkin
discretisation on tetrahedral meshes with linear basis functions. A
static energy minimization, dynamic time integration and the
nudged elastic band method have been implemented. In the light
of the importance of the granular microstructure of magnetic
materials the finite element method has been chosen. For the
calculation of the demagnetising field a hybrid finite element/
boundary element method is used. The total energy of a
micromagnetic system is given by the Gibbs free energy, which
depends on the magnetic polarization, the external field and
some temperature dependent material parameters. It includes
macroscopic contributions such as the Zeeman energy and the
magnetostatic energy as well as microscopic contributions like
the magnetocrystalline anisotropy energy and the exchange
energy. The minimization of the total energy yields an equilibrium
magnetization distribution.
To increase data storage density, i.e. to decrease the bit size and
to increase the signal to noise ratio, higher symmetry textures
and narrow grain size distributions are necessary. In order to
separate individual data bits arrays of patterned thin film
elements are fabricated by lithographic and/or imprint
techniques. As an example, the magnetisation reversal dynamics
has been simulated for the granular microstructure of the
magnetic layer in combination with the soft underlayer as
described in Fig.6 consisting of abut 1000 textured grains with
about 10 nm grain size and 15 nm film thickness. In order to
simulate the write process in a 100 Gbit/in2 medium a bit size of
50 x 130 nm2 was assumed with a head speed of 20/ms
corresponding to a trapezoidal external field profile with 2.5 ns bit
writing time including 0.1 ns rise and 0.1 ns decay time. The
micromagnetic simulations start form the state of randomly
magnetized grains and clearly show in Fig.7 the switching of
individual fully decoupled grains in a thin film medium with
perpendicular magnetocrystalline anisotropy after writing two
individual bits (after 5 ns). The material parameters used for the
simulations are Js=0.30 T, K1=0.1 MJ/m3, A=10 pJ/m, α=0.02.
A random misorientation of the grains up to ±10° is taken into
account. Partially switched grains produce a large contribution to
the media noise. It is obvious from the domain images obtained
during the writing of two bits that the individual bit structure
cannot be stabilized in a granular film consisting of completely
coupled grains. The assumption of fully decoupled grains reveals
a clear bit pattern after writing two bits as shown in Fig. 7 (after 5
ns). The jagged bit shape obviously results in a contribution to
the media noise.
In summary it has been shown that finite element micromagnetics
in combination of microstructural investigations is the ideal tool
for the simulation of nanostructures and granular microstructures.
In novel thin film recording media, the coercive field, remanence
and switching properties can be tailored by controlling the grain
size, texture, shape, defects and intergranular coupling.
Numerical micromagnetic simulations are used to fully
understand new magnetic switching phenomena observed in
granular thin films and structures and for the design of future
magnetic recording devices with areal storaging densities larger
than 200 Gb/in2.
Fig.6: Micromagnetic model of 420 in plane randomly oriented grains
used for the simulation of the switching of two bits a medium
for perpendicular recording. The intergranular exchange
coupling between the grains is variable.
Fig.7: Simulation of the bit writing in a perpendicular CoPd thin film
with fully decoupled grains after 5 ns. Blue means magnetization
points outwards of plane and red means magnetization points
inwards.
[1] Peng, Y., T. Ohkubo, (2003), “The investigation of
nanostructures of magnetic recording media by TEM”,
Scripta Materialia 48, 937-942.
[2] Carcia, P. F., A. D. Meinhaldt, (1985), “Perpendicular
magnetic anisotropy in Pd/Co thin film layered structures”,
Appl. Phys. Lett. 47, 178-180.
[3] Thornton, J. A. (1977), “High Rate Thick Film Growth”,
Annual Review of Materials Science, 239-260.
[4] J. Fidler, J., Schrefl, T., Scholz, W., Suess, D., Dittrich, R.,
Kirschner, M., (2004), ”Micromagnetic modelling and
magnetization processes”, J. Magn. Magn. Mater. 272-276,
641-646
Unaxis Tracks | 17
Unaxis Data Storage Magazine
MINIATURE HDDs TO FUEL INDUSTRY GROWTH IN 2005 –
INFRASTRUCTURE TO SEE WAVE OF INVESTMENT
NANO-PATTERNED PERPENDICULAR
ANISOTROPY MAGNETIC RECORDING MEDIA
FABRICATED ON UNAXIS SPUTTER SYSTEMS
1
Prof. Dr. Fernando Briones Dra. Marisol Martín-González
Instituto de Microelectrónica de Madrid (CSIC), Spain
J. M. García-Martín
L. Vila & G. Faini
J. Montserrat
Hartmut Rohrmann
Senior Scientist R&D, Unaxis Data Storage
Instituto de Microelectrónica de Madrid (CSIC), Spain
Laboratoire de Photonique et de Nanostructures, LPN-CNRS, France
Institut de Microelectrònica de Barcelona (CSIC), Spain
But that is now changing. The HDD industry, after shipping 305
million units in 2004, will expand to 378 million units in 2005, a
growth rate of 24%. Looking out through 2010, unit and revenue
growth expectations, if met, will polish the image of HDDs and
provide competitive returns for investors. Over 600 million HDDs
will be sold in 2010, an impressive growth rate fueled by the vast
expansion of HDD usage throughout the consumer electronics
realm.
Present day magnetic hard disk recording density on longitudinal magnetic media is practically
reaching the superparamagnetic limit. For that reason, perpendicular and nanopatterned magnetic
storage media, able to overcome that limit, are widely investigated [1].
In this work, carried out within HIDEMAR, an EC funded collaboration program between European
Industrial and Academic Research Institutions, the possibility of defining a magnetic nano-patterning
process compatible with the current Unaxis vacuum based hard disk fabrication technology, has
been explored. The proposed approach is based on a local modification of the medium magnetic
properties by localized, in-situ, low energy ion implantation. A similar concept has been described
previously by Chappert et al. [2].
HDD manufacturer market shares, in unit terms, changed in
2004. Seagate Technology remains the leader, but several smaller
manufacturers gained additional share in 2004 with focused
product lines and strategies. A summary is as follows:
2
Seagate Technology
Western Digital
Maxtor
Hitachi GST
Samsung
Toshiba
Fujitsu
Others
Co/Pd multilayered films ~175 Å thick with a strong perpendicular anisotropy have been prepared
by means of a Circulus sputtering deposition system equipped with Triatron cathodes. 95mm hard
disk samples have been irradiated through an e-beam patterned mask with different ions (N, P and
As) at different energies (20-30 KeV). According to simulations, this ion energy range is appropriate
to cause interface disorder at the precise depth of the Co/Pd multilayers, locally reducing
magnetization and perpendicular anisotropy and contributing to isolate nanosize bit domains at
predefined track positions.
After implantation, no changes have been detected by X-ray Reflectrometry (XRR) and Atomic Force
Microscopy (AFM) on the ultra-smooth diamond-like carbon coated disk surface. Implantation
effects on magnetic characteristics have been analyzed by means of Extraordinary Hall effect,
Magneto-optical Kerr effect (MOKE) microscopy and Magnetic Force Microscopy (MFM).
The MFM images in fig.1 & 3 show the magnetic domains before and after irradiation, respectively.
Fig.2 gives an AFM image of a thin film with a lithographic mask aimed to study the effect of
localized implantation on both shape and location of magnetic domains
This work has been supported by the EC contract G5RD-CT-2002-00731.
M.S.M.G. and J.M.G.M. would like to thank the Ramon y Cajal program.
[1] M. Albrecht et. Applied Physics Letters, 81,15,2875 (2002)
[2] C. Chappert et al., Science 280 1919 (1998)
MFM Image of magnetic domains of the virgin sample in a demagnetized state 1
AFM image of photo resist mask with bits pattern prepared by SEM photolithography 2
MFM image from the edge of the nanopatterned area after 14N+ implantation 3
18 | Tracks Unaxis
For years, mention of the words “data storage” is evoked both
wonderment and winces from investors. This is particularly true
when talking about the HDD industry. It would be hard to find an
industry that has enjoyed so much growth, generated such a
high level of innovation, and provided more value to end-users.
At the same time, any traditional measurement of return on
investment, return on assets, and stock price appreciation makes
the HDD industry look like a black hole in space.
2004
26.9%
17.9%
17.6%
15.3%
7.6%
7.2%
5.8%
1.8%
2003
28.9%
17.2%
21.2%
16.5%
5.7%
5.8%
4.4%
0.5%
Change
-2.0%
+0.7%
-3.6%
-1.2%
+1.9%
+1.4%
+1.4%
+1.3%
Looking ahead, there three key factors that will positively
influence the HDD market and its infrastructure:
1. Consumer electronics
3
Devices are rapidly incorporating HDDs, complementing core
demand from PC and server markets. It’s not just digital video
recorders (DVRs) and gaming consoles, it’s the iPod and its
legion of clones that are stimulating innovation and investment.
Sales of HDDs to PCs and servers were exceptional in 2004, and
will continue to be the backbone of storage demand for years.
But HDD sales to CE applications will account for approximately
20% of unit output in 2005, and are on a trajectory to surpass
40% by 2008. Developed countries will go from about 2-3 HDDs
per household to nearly 10 HDDs within five years.
Hard disks can now be found in all sorts of
devices such as Samsung's YEPP video jukebox
or in the world's first mobile phone fitted with a
1.5 GB hard disk which it recently launched.
2. HDD industry dynamics are rapidly evolving
Growth momentum will be fueled by miniature HDDs, 1.8”, 1”,
and sub-1” devices used in a variety of CE products. However,
storage requirements for MP3 players, personal video players,
and mobile phones, many of which will employ HDDs the size of
postage stamps, are skyrocketing. TRENDFOCUS sees demand
for miniature drives doubling in 2005 and growing more than
50% yearly through 2009.
Mark Geenen
President,
TrendFOCUS
3. Investment is badly needed in the HDD infrastructure
Shortages abound through the HDD value chain, thanks to a
financial hangover brought on by overspending in the 1990s on
plant and equipment. Disk drive makers are now facing
manufacturing capacity limitations, an issue they haven’t
experienced in years. While all have expanded manufacturing
capabilities in small increments, demand from PC and CE
markets are already outstripping the industry’s ability to produce.
This will cause more expansion, and more spending on
equipment.
At the components level, there are shortages of glass substrates
and finished media. Ironically, after the HDD industry (over)spent
more than $1 billion on media capacity in the 1995-1998
timeframe, a glut of capacity forced consolidation and saw disk
prices fall by more than 60%. The last three years have seen only
modest capacity expansions, and near-term demand is far
exceeding the media/substrate industry’s ability to supply. Watch
for a sustained capital investment expansion through at least
2006 – but, hopefully, the industry won’t overextend itself like it
did 10 years ago.
Data storage is perhaps the most important element in IT and CE
markets. The digitization of content and information will create
never before anticipated opportunities for storage. High-definition
TV will quadruple the number of gigabytes consumed in a DVR.
High-speed, broadband communications will allow quick,
inexpensive transfer of huge video and audio files – all of which
need to be stored. Equipment companies such as Unaxis, with its
RACETRACK system for PMR, are likely to see increased spending
on their products - a welcome change from the last several years of
restricted capital investment. While we must carefully watch capital
spending and manage our companies more effectively than ever,
the future has never been brighter for the HDD industry!
Unaxis Tracks | 19
Unaxis Data Storage Magazine
THE RACE OF
RACETRACK
STARTED
…in the Swiss mountains at a point where
customers told us they needed a modular
concept for the future. So Unaxis Data Storage
took up the challenge.
Dr. Stefan Seifried
BU Manager Hard Disk
Tony Sisca
Sales Manager Hard Disk
North America
The team went for a two-day workshop to discuss possibilities for a
future hard disk platform addressing future needs. More than 20
members from all parts of the organization, such as R&D, Business
Unit, Supply Chain, Assembly, Sales & Service gathered in a small
village in October 2003.
They concluded that the most critical parameters in future media
manufacturing were:
small footprint
ease of maintenance
good vacuum level and fast transport for a clean processing
particle-free handling concepts
and these became the basis for all considerations and discussions.
20 | Tracks Unaxis
More than 50 ideas for various concepts were generated,
drafted, summarized and categorized into four groups.
Two concept groups were selected for further considerations
and developed. Although the last generations of Unaxis Data
Storage systems were circular ones, the company already
has a lot of experience in linear systems. As part of various
customer visits, these approaches were presented and
discussed in detail during Q1 2004.
We are very happy to offer this new platform to
our customers with a development time of less
than one and a half years.
Starting last and overtaking the competition is
a difficult task, but the RACE is not over yet, it
has just begun – on track with RACETRACK!
After the decision for the linear concept was made,
RACETRACK was brought to life. Engineering started,
leveraging synergies with existing Unaxis Data Storage
systems. Suppliers were newly chosen or taken from the
CIRCULUS base. And finally a name was selected out of 50
ideas. It closely associates the system with Formula 1 racing
in so far as the system offers the following:
focussed driving within a closed loop track
fastest speed in the league, with optimized design and weight
maintenance and parts exchange as quick as a flash
Focussing on our core competencies such as process
module design, cathode development and software
engineering, the development took place together with
selected partners. Our revolutionary fast
transport system, a key element, went
through many iterations which
involved changes in the chamber
design, the gate valve layout, the
linear drive dimensioning and of
course, the software, until we were
finally 100% satisfied.
Unaxis Tracks | 21
Unaxis Data Storage Magazine
HARD DISK - WHEN ONLY THE BEST SUPPLY CHAIN WILL DO!
Andreas Meyer
Head of Supply Chain
Management
The Supply Chain for RACETRACK is designed
to meet the exact technology, quality and
delivery requirements of Hard Disk customers.
Unaxis Data Storage has designed its
global Supply Chain Management to
ensure optimal support for the life
cycle of each product line starting with
the concept of a new product,
continuing through its production life
and ending with its phase out.
Standardized job profiles and structures
enable the organization to optimally
respond to changes in demand and
manage fluctuations. Additionally, it also
allows the back-up of local Hard Disk
supply chain management resources from
our regional supply chain organisation, in
so far as back-up resources can easily
step in. This gives us maximum flexibility
to cover peaks in demand and to act
globally.
The Hard Disk team receives support
throughout the whole life cycle of its
products from dedicated Supplier
Managers, responsible for setting up an
optimized supply base and for the
strategic supplier relationship, Supplier
Quality Engineers, responsible for best in
class supplier quality, and buyer/planners,
making sure that all deliveries are on time
and potential delays are resolved
immediately.
development tasks, our partners
contribute with specific solutions for
optimal manufacturability, serviceability
and ensure modularity of the machine.
From the very first idea for the
development of a new Hard Disk
sputtering machine, it has been essential
to have a strong network of development
partners. While Data Storage leads the
whole Racetrack concept and all
technology and process related
Besides the development partner network,
strong and reliable suppliers for serial
deliveries are also essential. A thorough,
multi step supplier qualification process
has been put in place to ensure that only
strong, capable partners are selected.
The selection process starts with an
evaluation of the supply risk situation for each
module and core component of the
Racetrack. Quality demands, technical
expertise and ease of manufacturing are just
some of the areas which get evaluated to
assess the complexity of supplier
requirements. Soft factors are also taken into
account: environmental and occupational
health and safety risks also get evaluated to
give a complete picture. The result of this
whole process is a recommendation, if in
depth audit of a supplier is required for a
specific module or component.
Supply Chain, Manufacturing and Assembly,
Business Continuity Management, Information
Systems and Sustainability.
All new and existing suppliers for module and
components, which are assigned to be
critical, get audited on multiple capabilities:
Management, Finance, Quality Management,
Product Development, Customer Relationship,
During serial production the buyer/planners
take over the main responsibility for
coordinating all supplier deliveries. An
integrated SAP system facilitates the planning
of the customer deliveries and ensures total
In order to ensure the leadtime and quality
standards we have promised to our
customers, we built a reliable, flexible supply
chain with multiple capable suppliers who can
ramp up rapidly. Supplier Quality Engineers
with a strong background in assembly are
available to support and coach the suppliers
in such ramp-up phases. A first prototype
gets thoroughly qualified and serial production
gets verified by an initial pre-series.
transparency about all key deliveries. The
planning activities out of one hand ensure that
corrective measures can immediately be taken
as soon as necessary whenever a customer
delivery is at risk or even needs to be
brought forward. Quality is always our first
priority and our Supplier Quality Engineers
work hand in hand with the internal Quality
Assurance to proactively identify potential
weaknesses and to take counter measures.
A dedicated Supply Chain organization for the
hard disk business, backed up by a global
Supply Chain Management network, using
state of the art methodologies and an global
integrated SAP system, all designed for one
simple goal, to ensure that our customers will
receive the best technology, manufactured to
the highest quality standards and right on
time.
1
2
3
1 Key Sourcing and Supplier
Quality activities during the
development phase
2 Example for the result of a supply
risk assessment
3 Example for the result of an
On-Site Supplier Audit
22 | Tracks Unaxis
Unaxis Tracks | 23
Unaxis Data Storage around the world
Wherever and whenever you may need us – anywhere in the world.
Headquarters & Technology
Center, Unaxis Balzers
Liechtenstein/Switzerland
Unaxis Balzers
Aktiengesellschaft
P.O. Box 1000
FL-9496 Balzers
Liechtenstein/Europe
Tel +423 388 4870
Fax +423 388 5426
North America
Unaxis USA Inc.
Data Storage Division
18881 Von Karman Avenue
Suite 200
Irvine, CA 92612
USA
Tel +1 949 863 1857
Fax +1 949 863 1866
Peter Tinner
Executive Vice President
Unaxis Data Storage
peter.tinner@unaxis.com
Helfried Weinzerl
Director Sales and Service,
North America
Unaxis Data Storage USA
helfried.weinzerl@unaxis.com
David Bernegger
Genereal Manager CD/DVD
Unaxis Data Storage
david.bernegger@unaxis.com
Mike McBride
Eastern Regional Sales Manager
Unaxis Data Storage USA
mike.mcbride@unaxis.com
Allan Jaunzens
International Sales and Market
Manager, Europe
Unaxis Data Storage
allan.jaunzens@unaxis.com
Tony Sisca
Western Regional Sales
Manager
Unaxis Data Storage USA
tony.sisca@unaxis.com
Christophe Laurent
Marketing Manager
Unaxis Data Storage
christophe.laurent@unaxis.com
Russel O'Brien
Business Development Manager
Unaxis Data Storage USA
russel.obrien@unaxis.com
Hans Ebinger
General Manager Line Business
hans.ebinger@unaxis.com
Japan
harddisk@unaxis.com
info.datastorage@unaxis.com
www.datastorage.unaxis.com
24 | Tracks Unaxis
Unaxis Japan Co. Ltd.
3-2-1 Shinjuku, Shinjuku-ku
160-0022 Tokyo
Japan
Tel +81 3 3225 9020
Fax +81 3 3225 9043
Unaxis Europe and
Emerging Markets
Fiorenzo Slaviero
Sales Manager, Unaxis Italy
dorenzo.slaviero@unaxis.com
Unaxis Shanghai Co. Ltd.
#33 Building
No. 76, Fu Te Dong San Rd.
Waigaoqiao Free Trade Zone
Pudong, Shanghai 200131
P.R. China
Tel +86 21 5057 4646
Fax +86 21 5057 4647
Jim Bingen
Sales Manager North Europe
Unaxis Data Storage
jim.bingen@unaxis.com
Morning Zhao
Sales Representative
Unaxis Shanghai
morning.zhao@unaxis.com
Peter Henning
Sales Manager
Europe and Emerging Markets
peter.henning@unaxis.com
Stanley So
Sales Representative
stanley.so@unaxis.com
Egon Längle
Marketing & Sales Manager
South Europe and
Emerging Markets
egon.laengle@unaxis
Korea
Doroteo Gonzalez
Sales Manager, Unaxis Spain
doroteo.gonzalez@unaxis.com
Taiwan
Unaxis Taiwan Ltd.
No. 32 Fushing Road
Hsinchu Industrial Park
Hukou Hsiang, Hsinchu Hsien
Taiwan
Tel +886 3597 7771
Fax +886 3598 6161
Hong-Ji Chen
Local Division Manager Asia
Pacific
hong-ji.chen@unaxis.com
Yasuyoshi Tamura
Local Division Manager,
Unaxis Data Storage Japan
yasuyoshi.tamura@unaxis.com
Yung Tang
Sales Manager Asia Pacific
Unaxis Data Storage Taiwan
yung.tang@unaxis.com
Nobuo Mizuno
Deputy General Sales Manager
Unaxis Data Storage Japan
nobuo.mizuno@unaxis.com
Christy Liu
Sales Taiwan
Unaxis Data Storage Taiwan
christy.liu@unaxis.com
Yoshitaka Tokuhara
Sales Manager
Unaxis Data Storage Japan
yoshitaka.tokuhara@unaxis.com
Henfy Su
Sales Taiwan
Unaxis Data Storage Taiwan
henfy.su@unaxis.com
Hirofumi Iwanabe
Sales Manager
Unaxis Data Storage Japan
hirofumi.iwanabe@unaxis.com
China
Unaxis Korea Inc.
3rd Fl. Jellzone 2 Tower,
159-4, Jungja-dong
Pundang-Ku, Sungnam,
Kyungki-Do
Korea
Tel +82 31 785 1300
Fax +82 31 785 1385
Jung-Ki Jun
Local Division Manager
Unaxis Data Storage Korea
jung-ki.jun@unaxis.com
Singapore
Unaxis Singapore Pte Ltd
1 Science Park Road
#03-10
Capricorn Building
Singapore 117528
Tel +65 6873 1188
Fax +65 6873 1133
Han Chih-Heng
Local Division Manager
chihheng.han@unaxis.com
Andrew Loh
Sales Engineer
Data Storage Division
andrew.loh@unaxis.com