Demonstration of a High Speed 4-Channel Integrated Silicon Photonics WDM Link with Hybrid Silicon Lasers Andrew Alduino I nt el Corporat ion, 2200 Mission College Boulevard, Sant a Clara CA 95054 1 1 Outline • Introduction • Previous Results • WDM Silicon Photonics Link • Link Testing Results • Summary 2 Previous Silicon Photonics Results Lasers 1st Continuous Wave Silicon Raman Laser (Feb. ‘05) Data Encoders Light detectors Silicon Modulators 40 Gbps PIN Photodetectors 1GHz ( Feb ‘04) 10 Gbps (Apr ‘05) 40 Gbps (July ’07) (Aug. ’07) Basic Light Routing Hybrid Silicon Laser (Sept. ‘06) 3 Waveguides, multiplexers, demultiplexers, couplers… 340 GHz Gain*BW Avalanche Photodetector (Dec ’08) Integration Vision ECL Modulator Multiple Channels Filter Drive rs CMOS Circuitry DEMUX TIA Passive Alignment TIA Photodetector FUTURE M onolit hic? MUX 4 Le ve l of int e gr a t ion D e t e r m ine d by Applica t ion/ cost Outline • Introduction • Previous Results • WDM Silicon Photonics Link • Link Testing Results • Summary 5 High Speed Silicon Modulator input 1x2 MMI 2x1 MMI output pn phase shifters Metal contact Si modulator on PCB Phase shifter waveguide SEM picture of p-n phase shifter 6 • Reversed biased pn diode based devices • Travelling wave electrode designs • Mach-Zhender configuration • Stable over temperature and wavelength 40Gbps Data Transmission Optical Roll-off Normalized Modulator Output (dB) 1 0 -1 -2 -3 -4 ~30 GHz roll-off -5 -6 -7 -8 0 1 10 Frequency (GHz) 40Gbps Data Transmission “Eye” diagram from large signal, psuedo-random bit sequence (prbs) testing 7 Small Signal Testing Optical 3 dB roll off ~30 GHz L. Liao, A. Liu, D. Rubin, J. Basak, Y. Chet rit , H. Nguyen, R. Cohen, N. I zhaky, and M. Paniccia, “ 40 Gbit / s silicon opt ical m odulat or for high- speed applicat ions,” Elect ron. Let t . Vol. 43, No. 22, 25 t h Oct ober 2007. 100 SiGe Waveguide Photodetector Design Top View N-Ge i- Ge SEM Cross- Sect ion • Photodetector concepts rely upon the epitaxial growth of Ge on SOI substrate • Ge absorption scales to ~1600nm SEM Cross- Sect ion 8 SiGe WG PIN - High Speed Performance 31 GHz Opt ical Bandwidt h 40 Gbps Eye Diagram 95% Quantum Efficiency Operating at λ ~1.56um < 200nA of dark current 9 “ 31 GHz Ge n- i- p waveguide phot odet ect ors on Silicon- on- I nsulat or subst rat e” ; Tao Yin, Ram i Cohen, Mike M. Morse, Gadi Sarid, Yoel Chet rit , Doron Rubin, and Mario J. Paniccia Opt ics Express, Vol. 15, I ssue 21, pp. 13965- 13971 Hybrid Silicon Laser (Developed with UCSB) Creating a Silicon-based laser by bonding a III-V material (Indium Phosphide) onto Silicon SEM of Cross Section InP bonded to Si Cross Section of Hybrid Laser InP emits light when electrically stimulated Light bounces back and forth in silicon, and is amplified by the InP based material Mirrors are gratings etched into the silicon Grating pitch defines the laser wavelength 10 One bond, no alignment needed Single Wavelength Hybrid Laser • Photolithographically defined grating mirrors fabricated in silicon. • Creating low cost, HVM compatible wavelengthspecific laser channels Typical Device ~ 1000µm ~ 150µm 11 Outline • Introduction • Previous Results • WDM Silicon Photonics Link • Link Testing Results • Summary 12 Integrated 4 Channel CWDM Silicon Photonics Architecture • Silicon Hybrid Laser and Transm it t er com ponent s int egrat ed on one silicon die • Receiver com ponent s int egrat ed ont o a separat e silicon die 13 Integrated Transmitter Chip 1101001110 Integrates Hybrid Silicon Lasers With Modulators for data encoding and a Multiplexer to put 4 optical channels onto 1 fiber Electrical data in… Up to 12.5 Gbps/channel Alignment Pin Connector 14 50Gbps out on one optical fiber Integrated Receiver Chip Integrates a coupler to receive incoming light with a demultiplexer to split optical signals and Ge-on-Si photodetectors to convert photons to electrons Electrical data out… Up to12.5 Gbps per channel Alignment Pin 1101001110 Coupler 1101001110 1101001110 50Gbps in on one optical fiber 1101001110 Connector 15 4λx10Gbps SiP Tx & Rx Packages Receiver Package I nt egrat ed 4λx10G SiP Tx Die Passive Opt ical Connect or I nt egrat ed 4λx10G SiGe PD Rx Die Driver I C Socket able Edge Connect or 16 Receiver ( TI A) I C Transm it t er Package Receiver and Transm it t er packages enable bot h separable ( passive) opt ical and elect rical connect ors End to End System Test Setup Fiber Support s Quadrat ure & Laser bias circuit ry Cont rol Receiver Test Board No lat ching m echanism used Driver I C cont rol int erface Receiver Package Transm it t er Heat Sink Air cooled Edge Connect or Socket 17 Edge Connect or Transm it t er Test Board Outline • Introduction • Previous Results • WDM Silicon Photonics Link • Link Testing Results • Summary 18 Integrated Transmitter Optical Eye Diagrams 1291nm 1331nm Perform ance param et ers • Ext inct ion Rat io = 4.4- 6.3dB • Rise/ Fall Tim e = 41- 44ps 1311nm 1351nm • Tot al Jit t er = 2334ps • 19 CW Silicon Hybrid Laser die out put power from 2m W t o 9m W Wavelength Channel Alignment • CWDM Channels were chosen – 20nm spacing ( 1291nm , 1311nm , 1331nm & 1351nm • No t em perat ure t uning or st abilizat ion was used • Alignm ent of laser, m ult iplexer and dem ult iplexer channels are ~ 1nm • Est im at ed λ m ism at ch loss < 0.3dB 20 40Gbps (4λx10Gbps) Link Performance 1291nm 1331nm • Out put elect rical eye diagram s • Travelling wave silicon MZ m odulat or 1311nm 1351nm • I nt el designed driver I C, wit h 1.35V across m odulat or • ER from 4.4dB t o 6.3dB • Rise/ Fall Tim e = 41- 44ps 21 10Gbps Link Margin Rx module optical loss = 7.8 dB 1331nm ( 0.5dBm rec’d) Link Margin = 6.7dB for BER of 10-12 Jit t er Measurem ent s • Link Tot al Jit t er • Random Jit t er • Det erm inist ic Jit t er 22 ~ 43ps ~ 1.6ps ~ 21ps 50Gbps (4λx12.5Gbps) Link Performance • Devices were “ overclocked” t o 12.5Gbps • Eyes rem ained open, link rem ained st able 1291nm 1331nm • Ch1- 3 BER < 10 - 12 , Ch4 ~ 3x10 - 10 • ER from 3.4dB t o 5.6dB 1311nm 23 1351nm • Rise/ Fall Tim e = 38- 42ps Outline • Introduction • Previous Results • WDM Silicon Photonics Link • Link Testing Results • Summary 24 The Path to Tera-scale Data Rates Today: 12.5 Gbps x 4λ = 50Gbps 25 Gbps x 4λ = 100Gbps Scale UP Scale OUT 12.5 Gbps x 8λ = 100Gbps Spe e d W idt h 12.5 x4 12.5 x8 25 x16 40 x25 40G, 100G… Ra t e 50G 100G 400G 1T Future Terabit+ Links x16, x32… 25 Could enable cost-effective high speed I/O for data-intensive applications Challenges: Optical Integration with CPU Monolit hic I nt egrat ion? Package t opside Connect ion? PROCESSOR ORGANIC PACKAGE FIBERS SOCKET FR4 MOTHERBOARD Board connect ion? Challenges: • Power: CPU’s operat e w it h Tem perat ures near ~ 85°C • Packaging: Com pat ibilit y wit h exist ing HVM packages • Test ing: Test ing co- packaged opt ical / elect rical CPU m odules Mult iple approaches. Must balance perform ance, flexibilit y and cost 26 Data Center: Remote Optical Memory Can increase design flexibilit y and drive down cost by ext ending CPU- m em ory dist ance CURRENT FUTURE Elect rical Opt ical Opt ical Link Potential Advantages • Higher capacity and higher B/W at reduced system cost • Distance flexibility as memory can be further from processor • Board cost reduction due to less complex routing • Potentially overall power reduction at system level • Thermal & mechanical challenges to co-package with/next to CPU 27 WDM Silicon Photonics Link Summary • Demonstrated the first silicon hybrid laser and modulator WDM link with all technologies required for system integration • Demonstrated a 4 channel WDM system at 10Gbps – aggregate bandwidth of 40Gbps • Further demonstrated the link at 50Gbps with channels operating at 12.5Gbps • Acknowledgements • Aurrion Ltd – For InP processing and hybrid laser developments • Micron (Numonyx) – For Silicon Photonics processing 28 Thank You! 29 To learn more, Visit www.intel.com/pressroom and www.intel.com/go/sp