Propagation constant and characteristic impedance: The propagation constant and characteristic impedance of a transmission line are two key physical parameters. They can be directly determined from its measured S-parameters [1] as follows: (Z C ) = 2 2 ZREF (1 + (1 − 2 S11 ) −S21 2 2 S11 ) −S21 0.30 3.5 unit, um 3.0 25 20 signal 2.5 50 40 0.25 solder resist 0.20 FR4 ground 12 0.15 microstrip 2.0 0.10 1.5 0.05 0 10 20 30 frequency, GHz 40 Frequency-variant RLCG( f ) characteristics: The frequency-variant capacitance and conductance can be determined by C(f ) = Kg 1′r (f )10 (7) G(f ) = G0 + 2pfKg 1′′r (f )10 = G0 + vC(f ) tan d(f ) (8) The geometry-related constant (Kg) including the effective conductor resistivity and metal roughness effect can be determined by combining (1) and (2). The extracted parameters are shown in Fig. 2. 6 25 5 R L 20 4 15 3 10 2 5 0 (1) 10 2.5 (2) Frequency-variant complex permittivity: The frequency-variant complex permittivity of a dielectric material can be represented with the Debye model [2] (3) 1(v) = 10 1′r (v) − j1′′r (v) n = 10 11 + D1′i / 1 + jvti − j s/v10 (4) 0.00 50 Fig. 1 Real and imaginary part of extracted permittivity 0 2 0.35 imaginary part of permittivity, e r 0.40 er er 4.0 1 where γ, ZC and ZREF are the propagation constant, characteristic impedance and measurement reference impedance, respectively. Although the propagation constant can be stably extracted in the broad frequency band, the characteristic impedance is sensitive to resonance effects. To stably determine the transmission line parameters in the broad frequency band, the frequency-variant complex permittivity has to be determined. i=1 4.5 C, pF/cm e− g ℓ ⎡ ⎤−1 2 2 2 2 2 2 S − S + 1 − ( 2S ) 1 − S + S 11 11 21 11 21 ⎦ =⎣ + 2S21 (2S21 )2 where N is the number of total data points. β m and β e are the measured and evaluated phase constants, respectively. R, Ω/cm Introduction: In very high-speed digital systems and microwave circuits, planar transmission lines are considered essential circuit components. In such high-frequency systems, signal loss due to metal roughness effects, frequency-variant skin effects, dielectric polarisation and electromagnetic radiation of the planar transmission lines have a very significant effect on system performance. The field-solver-based numerical analysis using nominal cross-sectional dimensions and material parameters (i.e. resistivity, manufacturer-provided dielectric constant and dissipation factor) may not be accurate. In practice, these variations from nominal values may become more serious as the metal pitch shrinks and the metal thickness becomes thinner. Therefore, experimental characterisations of the transmission lines are crucial for accurate circuit design. In this Letter, for the experimental characterisations, we measured S-parameters for the designed test patterns over a broad frequency band (i.e. from 40 MHz to 50 GHz) by using a vector network analyser. We determined the complex permittivity (dielectric constant and loss tangent) of the inter-metal dielectric material, which is frequency-variant rather than constant. Then, we determined the parameters of the frequency-variant transmission line circuit model (i.e. the propagation constant and characteristic impedance) in the measured frequency band. As a result, the thin and fine transmission line loss mechanism can be accurately characterised. We propose that there are three critical frequencies: a frequency ( fskin) where the skin effect becomes significant, a frequency ( fdie) where the dielectric loss becomes significant, and a frequency ( frad) where the electromagnetic radiation loss becomes significant. Note that although the conductive loss follows the skin-effect model [1] below the critical frequency frad, this is not really the case above the frequency frad. Furthermore, it is noteworthy that the skin effect may not vary by the square root of the frequency. Thus, a new rigorous skin-effect model is necessary. the complex permittivity can be determined as shown in Fig. 1 by using a fitness function (Δ) [4, 5] N 1 bm − be / maxbm 2 D= (6) N i=1 20 G 30 40 0 50, GHz 6 C 5 2.0 4 1.5 3 1.0 2 0.5 1 0 0 G, mS/cm New frequency-variant losses of planar thin film transmission lines are experimentally investigated in a broad frequency range. The frequency-variant transmission line parameters are accurately determined in the measured frequency band (i.e. from 40 MHz to 50 GHz). Then, it is shown that there are three critical frequencies that characterise the loss mechanism of thin film transmission lines. The conventional skineffect model is not accurate in thin and fine transmission lines. real part of permittivity, e r D. Kim, H. Kim and Y. Eo where ε0 is the free space permittivity and εr is the relative permittivity. The Debye model has several parameters: the real part of the relative permittivity at high frequencies (ε∞), the variation in the real part of relative permittivity (Δε′i), the relaxation time constant (τi) and the dielectric conductivity (σ). Since the phase constant (β) of a dielectric material can be represented as follows [3]: 1/2 2 m 10 mr 1′r (v) 1 + 1′′r (v)/1′r (v) + 1 b=v 0 (5) 2 L, nH/cm Experimental characterisations of thin film transmission line losses Fig. 2 Frequency-variant RLCG Therefore, the frequency-variant resistance and inductance can be determined as R(f ) = Re g2 / G(f ) + jvC(f ) (9) L(f ) = Im g2 / G(f ) + jvC(f ) /v (10) The frequency-variant conductive loss can be modelled as −1 R(f ) = l swd(f ) , ∀t ≥ d(f ) (11) where l, w, t and δ( f ) are the length, width, thickness and skin depth [3], respectively. The classical skin-effect model that follows the square root dependency with frequency overestimates the conductive resistance as ELECTRONICS LETTERS 15th August 2013 Vol. 49 No. 17 shown in Fig. 3, which is given by d(f )square = 1/ pf ms (12) 20 f ) uare ffect, d( sq R, W/cm 15 skin-e 10 fskin ffect, d( 5 skin-e frad f ) eo 0 0 a, Np/cm 0.3 10 fdie 20 30 frad a= 0.2 0.1 + a C+a D 50, GHz 40 a rad arad aD Conclusion: Thin film transmission lines are characterised with S-parameter measurements from 40 MHz to 50 GHz. The frequencyvariant transmission line parameters are stably determined in the measured frequency band. Then, it is shown that there are three critical frequencies (i.e. fskin, fdie and frad) that characterise the transmission line loss mechanism. Only the skin-effect model underestimates the total loss in the frequency exceeding frad. As the frequency increases, the electromagnetic radiation loss can no longer be neglected. Furthermore, it is shown that the skin effect may not follow the conventional square root dependency with frequency. aC Acknowledgment: This work was supported by the Development of Technologies for Next-generation Electromagnetic Wave Measurement Standards, project of the Korea Research Institute of Standards and Science under grant no. 12011016. © The Institution of Engineering and Technology 2013 26 April 2013 doi: 10.1049/el.2013.1444 One or more of the Figures in this Letter are available in colour online. 0 Fig. 3 Transmission line losses with frequency-variations Assuming a finite metal thickness, Eo [1] derived a more rigorous modified skin-effect model, which is more accurate than (12) (13) d(f )eo = d(f )square 1 − exp −t/d(f )square (1 + t/w) The critical frequency fskin where the skin effect becomes significant can be defined as a frequency corresponding to d(f )eo ≃ t. The skin-effect model of (13) is much more accurate than that of (12) as shown in Fig. 3. In contrast, the critical frequency fdie at which the dielectric loss becomes significant can be defined as a frequency where the loss due to the dielectric (αD) is similar to the conductive loss (αC). Note that the fdie ≃ 7 GHz. The skin-effect model using (13) is accurate up to frad, but it underestimates the resistance above the critical frequency frad. Above the critical frequency frad, it is clear that the radiation effect may become an additional loss mechanism. The frad can be defined as a frequency where the ηrad is not negligibly small, which is defined as −1 hrad ; R(f )measured − l swd(f )eo (14) D. Kim, H. Kim and Y. Eo (Department of Electronics and Communication Engineering, Hanyang University, Ansan, Gyeonggido 426-791, Republic of Korea) E-mail: eo@giga.hanyang.ac.kr References 1 Eo, Y., and Eisenstadt, W.R.: ‘High-speed VLSI interconnect modeling based on S-parameter measurements’, IEEE Trans. Compon. Hybrid. Manuf. Technol., 1993, 16, (5), pp. 555–562 2 Djordjević, A.R., Biljić, R.M., Likar-Smiljanić, V.D., and Sakar, T.K.: ‘Wideband frequency-domain characterization of FR-4 and time-domain causality’, IEEE Trans. Electromagn. Compat., 2001, 43, (4), pp. 662–667 3 Hayt, W.H., and Buck, J.A.: ‘Engineering electromagnetics’ (McGraw-Hill, New York, 2001, 6th edn) 4 Davis, L.: ‘Handbook of genetic algorithms’ (Van Norstrand Reinhold, New York, 1991) 5 Zhang, J., Koledintseva, M.Y., Antonini, G., Drewniak, J.L., Orlandi, A., and Rozanov, K.N.: ‘Planar transmission line method for characterization of printed circuit board dielectrics’, Prog. Electromagn. Res., 102, 2010, pp. 267–286 ELECTRONICS LETTERS 15th August 2013 Vol. 49 No. 17