Realizing high-cycle lightweight compact vacuums
series
Vacuum ejector/vacuum unit
Vacuum unit VSX/VSXP
Features
This lightweight compact vacuum according to market needs.
Normally closed and power-saving double solenoid supply valves are available. Both valves have
responsiveness enabling high-cycle vacuums to be structured.
Ejector type and vacuum pump-correspondence type are available to match the application.
The vacuum unit VSX is installed two ways. Direct installation fixes the component with screws,
etc., from the side, and DIN rail installation installs the unit on DIN rails. Select the installation to
match the application.
A vacuum sensor with highly visible LED display and an inexpensive analog output vacuum sensor
are available. The 2-point switch output or analog output vacuum sensor with LED display is
selected to match various applications and budgets. Connector wiring facilitates wiring layout.
Three nozzle diameters are available: 05 (ø0.5), 07 (ø0.7) and 10 (ø1.0).
Weight:
Width:
* The above weight is the value for the common exhaust vacuum sensor with LED display for ejector type.
109
Example of using ejectors type
Vacuum ejector/vacuum unit
Vacuum generating
solenoid valve
Vacuum sensor (with LED display)
An LED display makes it easy to set the vacuum degree.
A 2-point switch output and analog output are available.
An inexpensive vacuum sensor with only the analog
output is also available.
Part of filter
This filter prevents
dirt, etc., sucked in
from the pad from
entering the VX.
Vacuum release air flow rate adjusting needle
The release air decreases when turned right, and
increases when turned left.
Filter regulator
Compressor
Use a filter regulator that ensures the VSX's
specified pressure and specified flow rate.
Vacuum pad
Example of using vacuum pumps correspondence type
Vacuum release solenoid valve
This solenoid valve accurately
separates the work piece.
The vacuum release air is generated
when energized.
Vacuum supply solenoid valve
This solenoid valve supplies
and stops the vacuum.
Vacuum sensor (with LED display)
An LED display makes it easy to set the vacuum degree.
A 2-point switch output and analog output are available.
An inexpensive vacuum sensor with only the analog
output is also available.
Part of filter
This filter prevents
dirt, etc., sucked in
from the pad from
entering the VX.
Vacuum release air flow rate
adjusting needle
The release air decreases when turned
right, and increases when turned left.
Pilot air supply
Vacuum related components
This solenoid valve
generates the vacuum.
Inch/NPT specifications
This solenoid valve accurately
separates the work piece.
The vacuum release air is generated
when energized.
Related components
Vacuum release solenoid valve
Vacuum
pump
Vacuum pad
The vacuum pump's correspondence 3-way valve Pilot valve
OFF
signal
specifications use a 3-way valve for the main vacuum
supply valve. This greatly reduces the time required to
Vacuum release with atmospheric pressure
Vacuum
+ vacuum release air (3-way valve type)
reach atmosphere from a vacuum state (vacuum
Vacuum release using vacuum
release time).
release air (2-way valve type)
The 2-way valve (VSXP-D) maintains the vacuum
immediately after the main valve is turned OFF, so Atmospheric
pressure
vacuum release is done only with the vacuum air
Time
release. The 3-way valve specifications (VSXP-T)
Time required to reach atmospheric pressure
from vacuum (vacuum release time)
send air into the vacuum circuit when the main valve
turns OFF, so the vacuum is broken with atmospheric pressure and vacuum air release.
Up to ten stations are used with the manifold piping specifications.
Vacuum pad
110
Vacuum ejector/vacuum unit
VSX series
Vacuum ejector unit structure drawing
Example) VSX-
-
S-
-
Type with vacuum sensor
Vacuum generating pilot valve
Connector
Sensor unit
Vacuum port
Vacuum release pilot valve
Vacuum release air flow rate
adjusting needle
Air supply port
Filter element
Valve unit
Silencer element
Ejector unit
Example) VSX-
-
S-
Type without vacuum sensor
Vacuum generating pilot valve
Connector
Vacuum port
Vacuum release pilot valve
Vacuum release air flow rate
adjusting needle
Air supply port
Filter element
Silencer element
Valve unit
Ejector unit
111
Example) VSXP-D
-
-
Type with vacuum sensor
Vacuum supply pilot valve
Connector
Sensor unit
Vacuum port
Vacuum release pilot valve
Vacuum pad
Vacuum switching unit: 2-way valve specifications structure drawing
Vacuum ejector/vacuum unit
VSXP series
Vacuum release air flow rate
adjusting needle
Vacuum supply port
Pilot air supply port
Vacuum related components
-
Type without vacuum sensor
Vacuum supply pilot valve
Connector
Vacuum port
Vacuum release pilot valve
Vacuum release air flow rate
adjusting needle
Vacuum supply port
Pilot air supply port
Valve unit
Filter element
Inch/NPT specifications
Example) VSXP-D
Filter element
Related components
Valve unit
112
Vacuum ejector/vacuum unit
VSXP series
Vacuum switching unit: 3-way valve specifications structure drawing
Example) VSXP-T
-
-
Type with vacuum sensor
Vacuum supply pilot valve
Valve filter element
Connector
Sensor unit
Vacuum port
Vacuum release pilot valve
Vacuum release air flow rate
adjusting needle
Vacuum supply port
Pilot air supply port
Valve unit
Example) VSXP-T
Filter element
-
Type without vacuum sensor
Vacuum supply pilot valve
Connector
Filter element for valve
Vacuum port
Vacuum release pilot valve
Vacuum release air flow rate
adjusting needle
Vacuum supply port
Pilot air supply port
Valve unit
113
Filter element
Vacuum ejector system: Manifold type structure drawing
Example) VSXM-
-
S-
-
-
Type with vacuum sensor
Vacuum generating pilot valve
Connector
Sensor unit
Vacuum port
Vacuum break pilot valve
Vacuum pad
Vacuum ejector/vacuum unit
VSX series
Vacuum release air flow rate
adjusting needle
Air supply port
Valve unit
Filter element
S-
Vacuum related components
-
-
Type without vacuum sensor
Vacuum generating pilot valve
Connector
Filter element
Vacuum port
Vacuum release pilot valve
Vacuum release air flow rate
adjusting needle
Valve unit
Air supply port
Silencer element
Ejector unit
Inch/NPT specifications
Example) VSXM-
Silencer element
Related components
Ejector unit
114
Vacuum ejector/vacuum unit
VSXP series
Vacuum switching unit: 2-way valve specifications manifold type structure drawing
Example) VSXPM-D
-
-
-
Type with vacuum sensor
Vacuum supply pilot valve
Connector
Sensor unit
Vacuum port
Vacuum release pilot valve
Vacuum release air flow rate
adjusting needle
Valve unit
Vacuum supply port
Example) VSXPM-D
-
Filter element
Pilot air supply port
-
Type without vacuum sensor
Vacuum supply pilot valve
Connector
Filter element
Vacuum port
Vacuum release pilot valve
Vacuum release air flow rate
adjusting needle
Valve unit
Vacuum supply port
115
Pilot air supply port
Vacuum supply pilot valve
Valve filter element
Connector
Sensor unit
Vacuum port
Vacuum release pilot valve
Vacuum release air flow rate
adjusting needle
Valve unit
Vacuum supply port
Example) VSXPM-T
-
Filter element
Pilot air supply port
-
Type without vacuum sensor
Vacuum supply pilot valve
Connector
Valve filter element
Filter element
Vacuum port
Vacuum release pilot valve
Vacuum release air flow rate
adjusting needle
Valve unit
Vacuum supply port
Vacuum ejector/vacuum unit
-
Pilot air supply port
Vacuum related components
-
Inch/NPT specifications
-
Type with vacuum sensor
Related components
Example) VSXPM-T
Vacuum pad
Vacuum switching unit: 3-way valve specifications manifold type structure drawing
116
Vacuum ejector/vacuum unit
VSX series
Vacuum ejector unit: Double solenoid type operation explanation drawing
(1) When vacuum generating pilot valve is OFF (vacuum generation is stopped)
Vacuum generating pilot valve
Connector
Sensor unit
Vacuum port
Vacuum release pilot valve
Vacuum release air flow rate
adjusting needle
Valve unit
Air supply port
Filter element
Ejector unit
Silencer element
(2) When vacuum generating pilot valve is ON (vacuum is generated)
ON
Vacuum air
Supplied air
Exhaust air
(3) When vacuum generating pilot valve is OFF (vacuum generated state is maintained)
OFF
Vacuum air
Supplied air
Exhaust air
(4) When vacuum release pilot valve is ON (vacuum generation is stopped, vacuum release air is supplied)
ON
Release air
Supplied air
117
Vacuum generating pilot valve
Connector
Sensor unit
Vacuum port
Vacuum release pilot valve
Vacuum release air flow rate
adjusting needle
Valve unit
Air supply port
Filter element
Ejector unit
Vacuum ejector/vacuum unit
(1) When vacuum generating pilot valve is OFF (vacuum generation is stopped)
Vacuum pad
Vacuum ejector: Normally closed type operation explanation drawing
Silencer element
(2) When vacuum generating pilot valve is ON (vacuum is generated)
Vacuum air
Exhaust air
(3) When vacuum generating pilot valve is OFF (vacuum generation is stopped)
Inch/NPT specifications
OFF
Supplied air
(4) When vacuum break pilot valve is ON (vacuum release air is supplied)
ON
Release air
Related components
Supplied air
Vacuum related components
ON
Supplied air
118
Vacuum ejector/vacuum unit
VSX/VSXP series
Specifications
Type
Working fluid
Working pressure range
Ambient temperature range
Working vacuum pressure range
Vacuum ejector unit
Vacuum changeover unit
Air
0.3 to 0.7MPa
5 to 50˚C
0 to -101kPa
Ejector characteristics
VSX-H05...
VSX-L05...
VSX-E05...
VSX-H07...
VSX-L07...S
VSX-L07...J
VSX-E07...
VSX-H10...S
VSX-H10...J
VSX-L10...S
VSX-E10...S
VSX-E10...J
Type
Nozzle diameter(mm) Supply pressure(MPa) Ultimate vacuum(-kPa) Suction flow( /min(ANR)) Consumed flow( /min(ANR))
Atmospheric
90.4
7
Common exhaust
0.5
11.5
Atmospheric
0.5
66.5
12
Common exhaust
Atmospheric
90.4
3
0.35
8
Common exhaust
Atmospheric
93.1
13
Common exhaust
0.5
23
Atmospheric
24
0.7
66.5
Common exhaust
22
Atmospheric
0.35
90.4
10.5
17
Common exhaust
Atmospheric
24
93.1
Common exhaust
0.5
20
46
Atmospheric
1.0
66.5
26
Atmospheric
20
0.35
90.4
34
Common exhaust
19
Solenoid valve specifications
Pilot valve
Item
Operation method
Valve structure
Rated voltage
Allowable voltage fluctuation range
Surge protective circuit
Power consumption
Manual operation
Operation display
Connection method
Vacuum generating solenoid valve (VSX type)
Vacuum release solenoid valve
Vacuum supply solenoid valve (VSXP type)
Direct operation
Rubber seal, poppet valve
100V AC
24V DC
100V AC
24V DC
100V AC 10%
24V DC 10%
100V AC 10%
24V DC 10%
Bridge diode
Surge absorber
Bridge diode
Surge absorber
1.2 W (with LED) 1.5 VA (with LED) 1.2 W (with LED) 1.5 VA (with LED)
Push type non-locking type
During coil exciting: Red LED ON
Connector (Cable length: 500 mm)
Red: 24V DC
Red: 24V DC
Blue
Blue
Black: COM
Black: COM
Switching valve (VSX, VSXP-D type)
Vacuum generating solenoid valve
Item
Operation method Air pressure operation using pilot valve
Rubber seal, poppet valve
Valve structure
1.05MPa
Pressure proof
Normally closed
Valve type
Not required
Lubrication
Air
supply
port size ø4: 3.5mm2
Effective
sectional area
Air supply port size ø6: 4.5mm2
119
Switching valve (VSXP-T type)
Vacuum generating solenoid valve
Item
Operation method Air pressure operation using pilot valve
Rubber seal, poppet valve
Valve structure
1.05MPa
Pressure proof
Normally closed
Valve type
Not required
Lubrication
Vacuum
supply
port size ø4: 3.0mm2
Effective
sectional area Vacuum supply port size ø6: 3.6mm2
Vacuum break function
VSX,VSXP-D type
Valve type
Normally closed
Double solenoid
Release air flow rate
0 to 7.5 /min(ANR)
0.2 to 2 /min(ANR)
*1. These values apply when the supply pressure is 0.5 MPa.
*2. When using the double solenoid, valve responsiveness may
not satisfy specifications if the above flow rate setting range is
not observed.
*3. The release flow rate varies based on the vacuum piping
diameter and length (piping resistance, etc.).
VSXP-T type
Valve type
Normally closed
Release air flow rate
0 to 3.5 /min(ANR)
*1. These values apply when the supply pressure is 0.5 MPa.
*2. The air release flow rate varies based on the vacuum piping
diameter and length (piping resistance, etc.).
Vacuum filter specifications
Element material
Filtration degree
Filter area
Replacement filter element ordering model
PVF (Poly-vinyl formal)
10µm
502mm2
VSX-E
Vacuum ejector/vacuum unit
With 2-point switch output
With analog output
Only analog output
(-DW)
(-DA)
(-A0)
-50kPa (SW1), -10kPa (SW2)
-50kPa
Factory set value
15mA or less
40mA or less
Current consumption
Carrier diffusion type semiconductor pressure switch
Pressure detection method
-100 to 0kPa
Working pressure range
-99 to 0kPa
Set pressure range
0.2MPa
Pressure proof
-20 to 80˚C (atmospheric pressure, humidity 60%RH or less)
Storage temperature range
0 to 50˚C (with no freezing)
Working temperature range
35 to 85%RH (no dew condensation)
Working humidity range
12 to 24V DC 10% ripple (P-P) 10% or less
Power supply voltage
IEC Standards IP40 or equivalent
Protective structure
Number of pressure setting points
2
1
Operation accuracy
3%F.S. max. (at Ta = 25˚C)
Variable (Approx. 0 to 15% F.S.)
Hysteresis
Fixed (2% F.S. or less)
NPN open collector output 30 V 80 mA or less
Switch output
Residual voltage 0.8 V or less
Output voltage
1 to 5V
Zero point voltage
1 0.1V
Span voltage
4 0.1V
Analog output
Output current 1 mA or less (load resistance 5 kΩ or more)
LIN/HYS
0.5%F.S.max.
0.5%F.S.max.
0 to -99kPa (2-digit red LED display)
Display
Approx. 4 times/sec
Number of displays
3%F.S. 2digit
Display accuracy
1digit
Resolution
Red LED turns ON when SW1 is above set pressure
Red LED turns ON when above set pressure
Operation display
Green LED turns ON when SW2 is above set pressure
1. MODE switching switch (ME, S1 or S2) 1. MODE switching switch (ME or SW)
2. S1 setting trimmer (2/3 rotation trimmer) 2. SW setting trimmer (2/3 rotation trimmer)
Function
3. S2 setting trimmer (2/3 rotation trimmer) 3. HYS setting trimmer (Approx. 0 to 15% of set value)
Vacuum pad
Specifications
Vacuum related components
Vacuum sensor
Inch/NPT specifications
Vacuum sensor with LED display
Related components
Vacuum sensor specifications
120
Characteristics
30
40
20
ow
ed fl
onsum
C
20
10
L type suction flow
0.3
0.4
0.5
0.6
Supply pressure (MPa)
um
VSX-H10 VSX-L10 VSX-E10 -
um
te v
acu
tim
60
L
0
0.3
L type suction flow
20
0
0
0.3
0.4
0.5
0.6
Supply pressure (MPa)
100
100
80
80
0.7
S
S
S
100
H type ultimate vacuum
60
mmon
flow (co
t)
exhaus
exhaust)
20
ma
ulti
ype
60
cu
te
ma
va
ow
um
m
nsu
Co
fl
ed
60
i
L
e
typ
ult
L type suction flow (ø6 atmospheric)
40
40
L type suction flow (ø4 atmospheric)
H type suction flow (atmospheric)
20
20
E type suction flow (atmospheric)
0
0.4
0.5
0.6
Supply pressure (MPa)
80
Et
m
Ultimate vacuum (-kPa)
nsu
ow
Flow rate ( /min(A.N.R))
te v
uction
121
ommon
n flow (c
uctio
E type s
0.2
30
10
0.2
40
H type s
flow
H type suction flow
te v
ma
ulti
pe
Co
fl
ed
40
0
med
su
Con
t
VSX-H10 VSX-L10 VSX-E10 -
60
20
ul
20
J
J
J
E ty
Ultimate vacuum (-kPa)
80
e
yp
40
0.7
H type ultimate vacuum
acu
100
40
0.7
0
0
0.2
0.3
0.4
0.5
0.6
Supply pressure (MPa)
0.7
Flow rate ( /min(A.N.R))
0.2
e
at
E type suction flow
H type suction flow
E type suction flow
0
um
cu
va
um
L
ult
50
Flow rate ( /min(A.N.R))
im
e
typ
ma
80
ulti
40
H type ultimate vacuum
E ty
pe
e
at
100
acu
60
um
cu
va
50
Ultimate vacuum (-kPa)
80
H type ultimate vacuum
Flow rate ( /min(A.N.R))
100
VSX-H07
VSX-L07
VSX-E07
E typ
e ult
imat
e va
cuum
VSX-H05
VSX-L05
VSX-E05
Ultimate vacuum (-kPa)
Vacuum ejector/vacuum unit
VSX series
05
(3)
D
(4)
4
(5)
4
(6)
S
(7)
3
(8)
A0
(9)
D
(10)
(10) Mounting method
Symbol
D
Blank
Mounting method
DIN rail mounting type
Direct mounting type
(9) Vacuum sensor specifications
Symbol
DW
DA
A0
Blank
Vacuum sensor specifications
2-point NPN output with LED display
1-point NPN output + analog output with LED display
Analog output
No vacuum sensor
(8) Solenoid valve voltage
3: 24V DC
1: 100V AC
Vacuum ejector/vacuum unit
H
(2)
(7) Exhaust port (EX)
S: Atmospheric exhaust type
J: ø6 mm push-in joint common exhaust type
(6) Air supply port (PS)
4: ø4 mm push-in joint
6: ø6 mm push-in joint
(5) Vacuum port (V)
4: ø4mm push-in joint
6: ø6mm push-in joint
(4) Valve type
B: normally closed type
D: double solenoid type
(3) Nozzle diameter
Symbol
05
07
10
H type
Nozzle
diameter Vacuum degree Suction flow
7 /min(ANR)
-90.4kPa
0.5mm
(7 /min(ANR))
13 /min(ANR)
-93.1kPa
0.7mm
(13 /min(ANR))
24 /min(ANR)
-93.1kPa
1.0mm
(20 /min(ANR))
L type
E type
Vacuum degree Suction flow Vacuum degree Suction flow
11 /min(ANR)
3 /min(ANR)
-66.5kPa
-90.4kPa
(11 /min(ANR))
(3 /min(ANR))
24 /min(ANR)
10.5 /min(ANR)
-66.5kPa
-90.4kPa
(22 /min(ANR))
(10.5 /min(ANR))
20 /min(ANR)
-66.5kPa 26 /min(ANR) -90.4kPa
(19 /min(ANR))
*1. The supply pressure for the H type and L type is 0.5MPa, and 0.35MPa for the E type.
*2. Values given in parentheses for the intake flow rate apply to the common exhaust type.
(2) Vacuum characteristics
H: High vacuum medium flow rate type
L: Medium vacuum large flow rate type
E: High vacuum small flow rate type
(1) Vacuum ejector unit individual type: VSX
Inch/NPT specifications
mm L (medium vacuum large flow rate) type.
Vacuum related components
*. The common exhaust type J is not available for the nozzle diameter ø1.0
Related components
VSX
(1)
Vacuum pad
How to order vacuum ejector unit individual type (Example)
122
Vacuum ejector/vacuum unit
VSXP series
How to order vacuum switching unit individual type (Example)
VSXP
(1)
T
(2)
6
(3)
6
(4)
6
(5)
3
(6)
A0
(7)
D
(8)
(8) Mounting method
Symbol
D
Blank
(7) Vacuum sensor specifications
Symbol
DW
DA
A0
Blank
Vacuum sensor specifications
2-point NPN output with LED display
1-point NPN output + analog output with LED display
Analog output
No vacuum sensor
(6) Solenoid valve voltage
3: 24V DC
1: 100V AC
(5) Vacuum supply port (PV)
4: ø4 mm push-in joint
6: ø6 mm push-in joint
(4) Air supply port (PS)
4: ø4 mm push-in joint
6: ø6 mm push-in joint
(3) Vacuum port (V)
4: ø4 mm push-in joint
6: ø6 mm push-in joint
(2) Valve type
D: 2-way valve specifications
T: 3-way valve specifications
(1) Vacuum switchover unit discrete type: VSXP
*. The double solenoid type is not available for the vacuum switching unit.
123
Mounting method
DIN rail mount type
Direct mounting type
VSXM
(1)
H
(2)
05
(3)
D
(4)
4
(5)
10
(6)
10
(7)
3
(8)
8
(9)
A0
(10)
(10) Vacuum sensor specifications
Symbol
DW
DA
A0
Blank
Z
Vacuum sensor specifications
2-point NPN output with LED display
1-point NPN output + analog output with LED display
Analog output
No vacuum sensor
For mixed specifications (Indicate details in specification sheet.)
(9) Number of manifold stations
Symbol
No. of stations
2
2
3
3
4
4
5
5
Symbol
No. of stations
7
7
8
8
9
9
10
10
6
6
Vacuum pad
How to order vacuum ejector unit manifold type (Example)
Vacuum ejector/vacuum unit
VSX series
(5) Vacuum port (V)
4: ø4 mm push-in joint
6: ø6 mm push-in joint
CX: For mixed joints (Indicate details in specification sheet.)
(4) Valve type
B: normally closed type
D: double solenoid type
Z: For mixed specifications (Indicate details in specification sheet.)
(3) Nozzle diameter
Symbol
05
07
10
00
H type
L type
E type
Nozzle
diameter Vacuum degree Suction flow Vacuum degree Suction flow Vacuum degree Suction flow
7 /min(ANR)
11 /min(ANR)
3 /min(ANR)
0.5mm
-90.4kPa
-66.5kPa
-90.4kPa
(7 /min(ANR))
(11 /min(ANR))
(3 /min(ANR))
13 /min(ANR)
24 /min(ANR)
10.5 /min(ANR)
0.7mm
-93.1kPa
-66.5kPa
-90.4kPa
(13 /min(ANR))
(22 /min(ANR))
(10.5 /min(ANR))
24 /min(ANR)
20 /min(ANR)
1.0mm
-93.1kPa
-66.5kPa 26 /min(ANR) -90.4kPa
(20 /min(ANR))
(19 /min(ANR))
For mixed specifications (Indicate details in specification sheet.)
*1. The supply pressure for the H type and L type is 0.5MPa, and 0.35MPa for the E type.
*2. Values given in parentheses for the intake flow rate apply to the common exhaust type.
Note) When (2) Vacuum characteristics if "Z", only "00" can be
(2) Vacuum characteristics
selected for (3) Nozzle diameter.
H: High vacuum medium flow rate type
When (3) Nozzle diameter is "00", only "Z" can be selected
L: Medium vacuum large flow rate type
for (2) Vacuum characteristics.
E: High vacuum small flow rate type
Z: For mixed specifications (Indicate details in specification sheet.)
(1) Vacuum ejector unit manifold type: VSXM
Inch/NPT specifications
(6) Air supply port (PS)
4: ø4 mm push-in joint
6: ø6 mm push-in joint
8: ø8 mm push-in joint
10: ø10 mm push-in joint
Related components
(7) Exhaust port (EX)
S: Atmospheric type
6: ø6 mm push-in joint
8: ø8 mm push-in joint
10: ø10 mm push-in joint
Vacuum related components
(8) Solenoid valve voltage
3: DC24V
1: AC100V
*. Consult with CKD Sales when using the vacuum ejector unit and operating each station simultaneously.
*. Consult with CKD Sales for manifolds having more than 10 stations.
124
Vacuum ejector/vacuum unit
VSXP series
How to order vacuum switching unit manifold type (Example)
VSXPM
(1)
T 4 6
(2) (3) (4)
10
(5)
3
(6)
6
(7)
A0
(8)
(8) Vacuum sensor specifications
Symbol
DW
DA
A0
Blank
Z
Vacuum sensor specifications
2-point NPN output with LED display
1-point NPN output + analog output with LED display
Analog output
No vacuum sensor
For mixed specifications (Indicate details in specification sheet.)
(7) Number of manifold stations
Symbol
No. of stations
2
2
3
3
4
4
5
5
Symbol
No. of stations
7
7
8
8
9
9
10
10
(6) Solenoid valve voltage
3: 24V DC
1: 100V AC
(5) Vacuum supply port (PV)
4: ø4 mm push-in joint
6: ø6 mm push-in joint
8: ø8 mm push-in joint
10: ø10 mm push-in joint
(4) Air supply port (PS)
4: ø4 mm push-in joint
6: ø6 mm push-in joint
8: ø8 mm push-in joint
10: ø10 mm push-in joint
(3) Vacuum port (V)
4: ø4 mm push-in joint
6: ø6 mm push-in joint
CX: For mixed joints (Indicate details in specifications.)
(2) Valve type
D: 2-way valve specifications
T: 3-way valve specifications
Z: For mixed specifications (Indicate details in specifications.)
(1) Vacuum switchover unit manifold type: VSXPM
*. As with the individual type, the double solenoid type is not available for the vacuum switching unit.
*. Consult with CKD for manifolds having more than 10 stations.
125
6
6
Vacuum ejector/vacuum unit
VSX/VSXP series
How to order only the manifold base for the vacuum ejector unit (Example)
VSXM
(1)
8 S
(2) (3)
4
(4)
(4) Number of manifold stations
Symbol
No. of stations
2
2
3
3
4
4
5
5
6
6
7
7
8
8
9
9
10
10
Vacuum pad
(3) Exhaust port (EX)
S: Atmospheric exhaust type
6: ø6 mm push-in joint
8: ø8 mm push-in joint
10: ø10 mm push-in joint
(2) Air supply port (PS)
4: ø4 mm push-in joint
6: ø6 mm push-in joint
8: ø8 mm push-in joint
10: ø10 mm push-in joint
8 6
(2) (3)
5
(4)
(4) Number of manifold stations
Symbol
No. of stations
2
2
3
3
4
4
(3) Air supply (PS) port size
4: ø4 mm push-in joint
6: ø6 mm push-in joint
8: ø8 mm push-in joint
10: ø10 mm push-in joint
(2) Vacuum supply (PV) port size
4: ø4 mm push-in joint
6: ø6 mm push-in joint
8: ø8 mm push-in joint
10: ø10 mm push-in joint
(1) Vacuum switching unit manifold type: VSXPM
5
5
6
6
7
7
8
8
9
9
10
10
Inch/NPT specifications
VSXPM
(1)
Related components
How to order only the manifold base for the vacuum switching unit (Example)
Vacuum related components
(1) Vacuum ejector unit manifold type: VSXM
126
Vacuum ejector/vacuum unit
VSX/VSXP series
How to order the discrete vacuum ejector unit for manifold (Example)
VSXM
(1)
E
(2)
07
(3)
B
(4)
6
(5)
3
(6)
DA
(7)
(7) Vacuum sensor specifications
Symbol
DW
DA
A0
Blank
Vacuum sensor specifications
2-point NPN output with LED display
1-point NPN output + analog output with LED display
Analog output
No vacuum sensor
(6) Solenoid valve voltage
3: 24V DC
1: 100V AC
(5) Vacuum port (V)
4: ø4 mm push-in joint
6: ø6 mm push-in joint
(4) Valve type
B: normally closed type
D: double solenoid type
(3) Nozzle diameter
Symbol
05
07
10
H type
Nozzle
diameter Vacuum degree Suction flow
7 /min(ANR)
-90.4kPa
0.5mm
(7 /min(ANR))
13 /min(ANR)
-93.1kPa
0.7mm
(13 /min(ANR))
24 /min(ANR)
-93.1kPa
1.0mm
(20 /min(ANR))
L type
E type
Vacuum degree Suction flow Vacuum degree Suction flow
11 /min(ANR)
3 /min(ANR)
-66.5kPa
-90.4kPa
(11 /min(ANR))
(3 /min(ANR))
24 /min(ANR)
10.5 /min(ANR)
-66.5kPa
-90.4kPa
(22 /min(ANR))
(10.5 /min(ANR))
20 /min(ANR)
-66.5kPa 26 /min(ANR) -90.4kPa
(19 /min(ANR))
*1. The supply pressure for the H type and L type is 0.5MPa, and is 0.35MPa for the E type.
*2. Values given in parentheses for the intake flow rate apply to the common exhaust type.
(2) Vacuum characteristics
H: High vacuum medium flow rate type
L: Medium vacuum large flow rate type
E: High vacuum small flow rate type
(1) Vacuum ejector unit manifold type
How to order the discrete vacuum switching unit for manifold (Example)
VSXPM
(1)
D 6
(2) (3)
3
(4)
DA
(5)
(5) Vacuum sensor specifications
Symbol
DW
DA
A0
Blank
Vacuum sensor specifications
2-point NPN output with LED display
1-point NPN output + analog output with LED display
Analog output
No vacuum sensor
(4) Solenoid valve voltage
3: 24V DC
1: 100V AC
(3) Vacuum port (V)
4: ø4 mm push-in joint
6: ø6 mm push-in joint
(2) Valve type
D: 2-way valve specifications
T: 3-way valve specifications
(1) Vacuum switching unit manifold type
127
*. As with the individual type, the double solenoid type is not available for the vacuum switching unit.
Vacuum ejector/vacuum unit
Fixing method
(1). Direct installation
Tighten and fix with M3 screws using the two fixing holes on
the resin component. See the dimensions for the fixing hole
pitch.
Circuit diagram
VSX normally closed type
VSXP normally closed type 2-way valve specifications
PS
PV
PS
V
V
VSX double solenoid type
VSXP normally closed type 3-way valve specifications
PS
PV
PS
V
V
Inch/NPT specifications
Fit the product on the DIN rail, and using an appropriate Phillips
screwdriver, tighten and fix the DIN rail fixing screws. If vibration
or impact could affect the product, attach commercially available
DIN rail brackets on the product, and securely fix it.
Related components
(2). DIN rail installation
Vacuum related components
Vacuum pad
;
;
128
129
Special precautions
WARNING
Read before using. See pages 3 to 6 in the introduction for Safety Precautions and Precautions common to
products. See pages 3 to 5 in the introduction for Precautions common to vacuums.
1. Check that leakage current is 1 mA or less when operating the valve. Malfunctions may result from the
leakage current and cause problems.
2. The 2-way valve specifications correspondence with vacuum pumps (VSXP-D ) has a vacuum holding
function that tolerates a leak. Thus, if the vacuum must be maintained for a long time, provide separate
safety measures. The 3-way valve specifications (VSXP-T) do not have a vacuum holding function.
3. When continuously energizing the pilot valve for a long time, heat generated from the coil could cause
burns or adversely affect peripheral devices. Contact a CKD sales office when using energizing
continuously for a long time.
4. When using a double solenoid (VSXA...), the switching valve location is neutral when the pilot air
supply is stopped and then restarted, including when first used after delivery. When restarting the pilot
air supply, issue a signal to the pilot valve or switch the valve manually.
5. When using the DIN rail, if vibration or impact could affect the product, attach commercially available
DIN rail brackets on the product, and securely fix it.
6. Stop the supplied air and release the residual pressure before attaching or removing the unit from the
manifold.
7. When installing the unit on the manifold, insert the lock lever into the back and securely fix it with a
screw. Vibration could cause the lock lever to dislocate and the unit to pop out.
CAUTION
Vacuum ejector/vacuum unit
VSX/VSXP series
1. Do not apply excessive tension or bending to the pilot valve or vacuum sensor leads. Wires or
connectors may break.
2. Compressed air contains large amounts of drainage (water, oxidized oil, tar, foreign matter, etc.) that may
adversely affect VSJ/VSJP performance. Dehumidify air with an after cooler or dryer and improve air quality.
3. Do not use a lubricator.
4. Rust, etc., in piping may result in operation faults. Install a 5 µm or smaller filter preceding the supply
port. Flush pipes before use and at an appropriate cycle.
5. Avoid using this vacuum ejector in environments with corrosive or flammable gas. Do not use this unit
for fluids.
6. When replacing the cartridge joint at the supply (PS, PV) port, remove all foreign matter from the seal,
and securely insert the set pin.
7. When replacing the vacuum (V) port cartridge joint, confirm that window packing has not dropped off. Wipe
off all foreign matter from the seal, and securely tighten the set screw with the specified tightening torque.
8. With the vacuum pump-correspondence 3-way valve specifications, the vacuum is broken with
atmospheric pressure. If large amounts of dust or dirt adhere to the valve filter element, filter element
pressure loss increases, and could result in a delayed vacuum relese time. Regularly clean and replace
the valve filter element.
9. When installing the unit on the manifold, check that the air supply (vacuum supply) and exhaust (air
supply) port's O-rings have not fallen off and are not protruding.
10. Select the piping (Supply port) diameter, piping length, and other components for the vacuum port so
that a sufficient effective sectional area is ensured.
Related components
Inch/NPT specifications
Vacuum related components
Vacuum pad
Vacuum ejector/vacuum unit
MEMO
130
Vacuum ejector unit: Atmospheric exhaust type with no vacuum sensor
Direct mounting type
Approx. 500
Approx. 500
LED
Manual button
6
6
Vacuum generating pilot valve
2-ø3.3
16
26
6.5
6.5
3 18.5
Vacuum releasepilot valve
øD (PS port)
øD (V port)
LED
58
Manual button
55.5
Vacuum ejector/vacuum unit
VSX series
10.5
C2
L2
3.5
EX
C1
L1 11.8 20.5
21
69
8.4
12.4
-
EX
(Needle stroke length)
Unit: mm
Applicable tube O. D. (øD) C1 C2 L1 L2
4
11.2 11.2 6.1 13.5
12.0 12.0 9.0 13.8
6
Type
VSX-
Vacuum release air flow rate
adjusting needle
S-
DIN rail mounting type
Approx. 500
LED
Manual button
Approx.
500
Vacuum generating pilot valve
øD (V port)
6
6
DIN rail
Vacuum release air flow rate
adjusting needle
LOCK
10.5
9.3
RELEASE
DIN rail
11.8
C1
L1
21
EX
20.5
35.5
27.5
75
(*)23.7
(*)33.7
64.3
(*)5.2
øD (PS port)
DIN rail fixing screw
(*)63.2
(*)7.5
61.8
18.5
Vacuum break pilot valve
LED
(*)14.2
Manual button
C2 EX
L2
3.5(Needle stroke length)
6.4
Note) The dimensions marked with an asterisk (*) apply for the 7.5 mm DIN rail height.
Type
VSX-
131
-
S-
-D
Unit: mm
Applicable tube O. D. (øD) C1 C2 L1 L2
4
11.2 11.2 6.1 7.5
12.0 12.0 9.0 7.8
6
Vacuum sensor with LED display
S1
SW2
S2
Switch 2 pressure setting trimmer
MODE switching switch
Vacuum generating pilot valve
109.5
6
Approx. 500
6
6
2-ø3.3
LED
øD (V port)
16
26
6.5
6.5
10.5
øD (PS port)
Shield wire
3 18.5
Vacuum release pilot valve
58
55.5
Manual button
C2
L2
3.5
EX
C1
L1
21
11.8 20.5
8.4
69
12.4
-
S-
EX
(Needle stroke length)
Unit: mm
Applicable tube O. D. (øD) C1 C2 L1 L2
4
11.2 11.2 6.1 13.5
12.0 12.0 9.0 13.8
6
Type
VSX-
Vacuum release air flow rate
adjusting needle
-DW
DIN rail mounting type
LED
Vacuum sensor with LED digital display
Manual button
MODE SW1
kPa
ME
S1
SW2
S2
MODE switching switch
Approx.
500
DIN rail
Switch 1 pressure setting trimmer
6
6
Vacuum release air flow rate
adjusting needle
DIN rail fixing screw
LOCK
10.5
9.3
RELEASE
DIN rail
11.8
C1
L1
21
EX
20.5
35.5
27.5
75
C2
L2
3.5(Needle stroke length)
6.4
(*)23.7
(*)33.7
Shield wire
(*)5.2
64.3
(*)14.2
Vacuum release pilot valve
øD (PS port)
øD (V port)
LED
(*)63.2
(*)7.5
61.8
18.5
Manual button
Approx. 500
6
109.5
Approx.
500
Switch 2 pressure setting trimmer
Vacuum switching pilot valve
EX
Unit: mm
Applicable tube O. D. (øD) C1 C2 L1 L2
4
11.2 11.2 6.1 7.5
12.0 12.0 9.0 7.8
6
Note) The dimensions marked with an asterisk (*) apply for the 7.5 mm DIN rail height.
Type
VSX-
-
S-
-DW-D
Related components
Approx.
500
Switch 1 pressure setting trimmer
Vacuum related components
ME
Inch/NPT specifications
MODE SW1
kPa
Approx.
500
LED
Manual button
Vacuum ejector/vacuum unit
Direct mounting type
Vacuum pad
Vacuum ejector unit: Atmospheric exhaust type with vacuum sensor with LED display and 2-point switch output
132
With vacuum ejector unit atmospheric release type LED with display, analog output and switch output
Direct mounting type
Vacuum sensor with LED display
LED
MODE
kPa
Vacuum generating pilot valve
SW
HYS
SW
ME
Hysteresis setting trimmer
Approx.
500
MODE switching switch
Pressure setting trimmer
109.5
6
Manual button
Approx.
500
Manual button
Approx. 500
6
2-ø3.3
6
LED
6.5
6.5
10.5
øD (PS port)
Shield wire
3 18.5
Vacuum release pilot valve
16
26
55.5
øD (V port)
58
Vacuum ejector/vacuum unit
VSX series
C2
L2
3.5
EX
C1
L1
21
11.8 20.5
8.4
69
12.4
-
S-
EX
(Needle stroke length)
Unit: mm
Applicable tube O. D. (øD) C1 C2 L1 L2
4
11.2 11.2 6.1 13.5
12.0 12.0 9.0 13.8
6
Type
VSX-
Vacuum release air flow rate
adjusting needle
-DA
DIN rail mounting type
Vacuum sensor with LED digital display
LED
Manual button
MODE
kPa
ME
HYS
DIN rail
MODE switching switch
Pressure setting trimmer
6
6
LOCK
10.5
9.3
RELEASE
DIN rail
11.8
C1
L1
21
EX
20.5
35.5
27.5
75
C2
L2
3.5(Needle stroke length)
6.4
(*)23.7
(*)33.7
64.3
DIN rail fixing screw
Shield wire
(*)5.2
øD (PS port)
(*)63.2
(*)7.5
61.8
18.5
Vacuum release pilot valve
øD (V port)
Vacuum release air flow rate
adjusting needle
LED
(*)14.2
Manual button
Approx. 500
6
109.5
Approx.
500
Hysteresis setting trimmer
Vacuum generating pilot valve
Approx.
500
SW
SW
EX
Unit: mm
Applicable tube O. D. (øD) C1 C2 L1 L2
4
11.2 11.2 6.1 7.5
12.0 12.0 9.0 7.8
6
Note) The dimensions marked with an asterisk (*) apply for the 7.5 mm DIN rail height.
Type
VSX-
133
-
S-
-DA-D
Direct mounting type
Vacuum sensor (only analog output)
6
6
6
LED
6.5
10.5
øD (PS port)
C2
L2
3.5
EX
C1
L1
21
11.8 20.5
8.4
69
12.4
-
S-
EX
(Needle stroke length)
Unit: mm
Applicable tube O. D. (øD) C1 C2 L1 L2
4
11.2 11.2 6.1 13.5
12.0 12.0 9.0 13.8
6
Type
VSX-
Vacuum releas air flow rate
adjusting needle
-A0
DIN rail mounting type
Vacuum sensor (only analog output)
LED
Vacuum generating pilot valve
Approx.
500
DIN rail
6
6
Shield wire
LOCK
10.5
9.3
RELEASE
DIN rail
11.8
C1
L1
21
EX
20.5
35.5
27.5
8.4
75
(*)23.7
(*)33.7
DIN rail fixing screw
64.3
(*)5.2
øD (PS port)
Vacuum releas air flow rate
adjusting needle
(*)63.2
(*)7.5
61.8
18.5
Vacuum break
pilot valve
øD (V port)
LED
(*)14.2
Manual button
Approx. 500
6
103.5
Approx.
500
Manual button
C2
EX
L2
3.5(Needle stroke length)
6.4
Note) The dimensions marked with an asterisk (*) apply for the 7.5 mm DIN rail height.
Type
VSX-
-
S-
-A0-D
Unit: mm
Applicable tube O. D. (øD) C1 C2 L1 L2
4
11.2 11.2 6.1 7.5
12.0 12.0 9.0 7.8
6
Vacuum related components
6.5
3 18.5
58
55.5
Vacuum break pilot valve
øD (V port)
Shield wire
16
26
Manual button
Approx. 500
2-ø3.3
Inch/NPT specifications
103.5
Vacuum pad
Vacuum generating pilot valve
Related components
LED
Approx.
500
Approx.
500
Manual button
Vacuum ejector/vacuum unit
Vacuum ejector unit: Atmospheric exhasut type with analog output vacuum sensor
134
Vacuum ejector unit: Common exhaust type with no vacuum sensor
LED
Approx. 500
Manual button
6
6
Vacuum generating pilot valve
L2
C2
2-ø3.3
LED
øD (PS port)
58
6.5
6.5
3 18.5
Vacuum release pilot valve
øD (V port)
16
26
Manual button
Approx. 500
Direct mounting type
55.5
Vacuum ejector/vacuum unit
VSX series
10.5
C1
L1
8.4
8.7
11.7
11.8 20.5
21
69
3.5
(Needle stroke length)
-
ø6 (EX port)
12.4
Unit: mm
Applicable tube O. D. (øD) C1 C2 L1 L2
4
11.2 11.2 6.1 13.5
12.0 12.0 9.0 13.8
6
Type
VSX-
Vacuum release air flow rate
adjusting needle
J-
DIN rail mounting type
Manual button
Approx. 500
LED
Approx.
500
Vacuum generating pilot valve
6
6
DIN rail
DIN rail fixing screw
(*)5.2
64.3
(*)63.2
(*)7.5
61.8
18.5
(*)14.2
Vacuum release pilot valve
øD (PS port)
C2
LED
LOCK
10.5
9.3
RELEASE
DIN rail
11.8
C1
L1
21
20.5
35.5
27.5
8.4
75
8.7
(*)23.7
(*)33.7
Manual button
øD (V port)
Vacuum release air flow rate
adjusting needle
L2
ø6 (EX port)
3.5(Needle stroke length)
11.7
6.4
Unit: mm
Applicable tube O. D. (øD) C1 C2 L1 L2
4
11.2 11.2 6.1 7.5
12.0 12.0 9.0 7.8
6
Note) The dimensions marked with an asterisk (*) apply for the 7.5 mm DIN rail height.
Type
VSX-
135
-
J-
-D
Vacuum sensor with LED display
MODE SW1
kPa
ME
S1
SW2
S2
Switch 2 pressure setting trimmer
MODE switching switch
Vacuum generating pilot valve
Approx.
500
Switch 1 pressure setting trimmer
109.5
6
6
2-ø3.3
6
LED
6.5
C1
L1
21
8.7
11.8 20.5
L2
3.5(Needle stroke length)
11.7
8.4
69
12.4
-
J-
ø6 (EX port)
Unit: mm
Applicable tube O. D. (øD) C1 C2 L1 L2
4
11.2 11.2 6.1 13.5
12.0 12.0 9.0 13.8
6
Type
VSX-
Vacuum release air flow rate
adjusting needle
-DW
DIN rail mounting type
LED
Vacuum sensor with LED pressure display
Manual button
MODE SW1
kPa
ME
S1
SW2
S2
Approx.
500
MODE switching switch
DIN rail Switch 1 pressure setting trimmer
6
6
Shield wire
(*)5.2
C2
64.3
(*)63.2
(*)7.5
61.8
18.5
øD (PS port)
LED
(*)14.2
Vacuum release pilot valve
øD (V port)
Vacuum release air flow rate
adjusting needle
DIN rail fixing screw
LOCK
10.5
9.3
RELEASE
DIN rail
11.8
C1
L1
21
20.5
35.5
27.5
8.4
8.7
75
L2
3.5(Needle stroke length)
11.7
6.4
(*)23.7
(*)33.7
Manual button
Approx. 500
6
109.5
Approx.
500
Switch 2 pressure setting trimmer
Vacuum generating pilot valve
ø6 (EX port)
Unit: mm
Applicable tube O. D. (øD) C1 C2 L1 L2
4
11.2 11.2 6.1 7.5
12.0 12.0 9.0 7.8
6
Inch/NPT specifications
6.5
10.5
øD (PS port)
Shield wire
16
26
C2
3 18.5
Vacuum release pilot valve
58
55.5
øD (V port)
Note) The dimensions marked with an asterisk (*) apply for the 7.5 mm DIN rail height.
Type
VSX-
-
J-
-DW-D
Related components
Manual button
Approx. 500
Vacuum related components
LED
Approx.
500
Manual button
Vacuum ejector/vacuum unit
Direct mounting type
Vacuum pad
Vacuum ejector unit: Common exhaust type with vacuum sensor with LED display and 2-point switch output
136
Vacuum ejector unit: Common exhaust type with vacuum sensor with LED display, analog output and switch output
Direct mounting type
Vacuum sensor with LED display
LED
MODE
kPa
ME
SW
HYS
SW
Hysteresis setting trimmer
MODE switching switch
Vacuum generating pilot valve
Approx.
500
Pressure setting trimmer
109.5
6
Manual button
Approx.
500
Manual button
Approx. 500
6
2-ø3.3
6
øD (V port)
55.5
LED
16
26
6.5
6.5
10.5
øD (PS port)
Shield wire
C2
3 18.5
Vacuum break pilot valve
58
Vacuum ejector/vacuum unit
VSX series
C1
L1
21
8.7
11.8 20.5
69
12.4
-
J-
ø6 (EX port)
Unit: mm
Applicable tube O. D. (øD) C1 C2 L1 L2
4
11.2 11.2 6.1 13.5
12.0 12.0 9.0 13.8
6
Type
VSX-
Vacuum release air flow rate
adjusting needle
L2
3.5(Needle stroke length)
11.7
8.4
-DA
DIN rail mounting type
Vacuum sensor with LED display
LED
Manual button
MODE
kPa
ME
SW
HYS
SW
MODE switching switch
Pressure setting trimmer
Approx.
500
DIN rail
6
6
DIN rail
10.5
LOCK
RELEASE
11.8
C1
L1
21
20.5
35.5
27.5
8.4
8.7
75
L2
3.5(Needle stroke length)
11.7
6.4
(*)23.7
(*)33.7
64.3
DIN rail fixing screw
Shield wire
(*)5.2
18.5
C2
9.3
øD (PS port)
(*)63.2
(*)7.5
61.8
Vacuum release pilot valve
øD (V port)
Vacuum release air flow rate
adjusting needle
LED
(*)14.2
Manual button
Approx. 500
6
109.5
Approx.
500
Hysteresis setting trimmer
Vacuum generating pilot valve
ø6 (EX port)
Unit: mm
Applicable tube O. D. (øD) C1 C2 L1 L2
4
11.2 11.2 6.1 7.5
12.0 12.0 9.0 7.8
6
Note) The dimensions marked with an asterisk (*) apply for the 7.5 mm DIN rail height.
Type
VSX-
137
-
J-
-DA-D
Vacuum sensor (only analog output)
LED
Approx.
500
Vacuum generating pilot valve
103.5
6
Approx. 500
6
6
2-ø3.3
LED
6.5
16
26
C2
10.5
C1
L1
8.7
11.7
L2
3.5(Needle stroke length)
11.8 20.5
8.4
21
69
ø6 (EX port)
12.4
Unit: mm
Applicable tube O. D. (øD) C1 C2 L1 L2
4
11.2 11.2 6.1 13.5
12.0 12.0 9.0 13.8
6
Type
VSX-
Vacuum release air flow rate
adjusting needle
-
J-
-A0
DIN rail mounting type
LED
Vacuum sensor (only analog output)
Vacuum generating pilot valve
Approx.
500
DIN rail
6
Shield wire
DIN rail
10.5
(*)5.2
LOCK
RELEASE
11.8
2-C
L1
21
20.5
35.5
27.5
8.4
8.7
75
L2
3.5(Needle stroke length)
11.7
6.4
(*)23.7
(*)33.7
DIN rail fixing screw
64.3
18.5
C2
9.3
(*)63.2
(*)7.5
61.8
øD (PS port)
LED
(*)14.2
Vacuum release pilot valve
øD (V port)
Vacuum release air flow rate
adjusting needle
ø6 (EX port)
Unit: mm
Applicable tube O. D. (øD) C1 C2 L1 L2
4
11.2 11.2 6.1 7.5
12.0 12.0 9.0 7.8
6
Inch/NPT specifications
6
Manual button
Approx. 500
6
103.5
Approx. 500
Manual button
Note) The dimensions marked with an asterisk (*) apply for the 7.5 mm DIN rail height.
Type
VSX-
-
J-
-A0-D
Related components
øD (PS port)
øD (V port)
Shield wire
3 18.5
6.5
Vacuum release pilot valve
58
55.5
Manual button
Vacuum related components
Approx.
500
Manual button
Vacuum ejector/vacuum unit
Direct mounting type
Vacuum pad
Vacuum ejector unit: Common exhaust type with vacuum sensor with analog output
138
Vacuum switching unit: 2-way valve specifications with no vacuum sensor
Direct mounting type
Approx. 500
Approx. 500
LED
Manual button
6
6
Vacuum supply pilot valve
2-ø3.3
Manual button
6.5
16
26
58
55.5
6.5
Vacuum release pilot valve
øD (PV port)
øD (V port)
LED
3 18.5
Vacuum ejector/vacuum unit
VSXP series
10.5
2-C1
2-L1 11.8 20.5
21
69
C2
3.5
8.4
L2
12.4
(Needle stroke length)
Type
VSXP-D
Vacuum release air flow rate
adjusting needle
-
øD (PS port)
Unit: mm
Applicable tube O. D. (øD) C1 C2 L1 L2
4
11.2 11.2 6.1 13.5
12.0 12.0 9.0 13.8
6
DIN rail mounting type
Manual button
Approx. 500
LED
Approx.
500
Vacuum supply pilot valve
6
6
DIN rail
64.3
DIN rail fixing screw
(*)5.2
øD (PV port)
(*)14.2
Vacuum release pilot valve
(*)63.2
(*)7.5
61.8
18.5
LED
LOCK
10.5
9.3
RELEASE
DIN rail
11.8
2-C1
2-L1
21
20.5
35.5
27.5
2.4
75
(*)23.7
(*)33.7
Manual button
øD (V port)
Vacuum release air flow rate
adjusting needle
C2
øD (PS port)
L2
3.5(Needle stroke length)
6.4
Unit: mm
Applicable tube O. D. (øD) C1 C2 L1 L2
4
11.2 11.2 6.1 7.5
12.0 12.0 9.0 7.8
6
Note) The dimensions marked with an asterisk (*) apply for the 7.5 mm DIN rail height.
Type
VSXP-D
139
-
-D
Vacuum sensor with LED display
MODE SW1
kPa
ME
S1
Switch 2 pressure setting trimmer
MODE switching switch
Vacuum supply pilot valve
Switch 1 pressure setting trimmer
Approx.
500
SW2
S2
109.5
6
Approx. 500
6
6
2-ø3.3
LED
6.5
2-C1
2-L1 11.8 20.5
21
69
L2
3.5(Needle stroke length)
8.4
Vacuum release air flow rate
adjusting needle
øD (PS port)
12.4
Unit: mm
Applicable tube O. D. (øD) C1 C2 L1 L2
4
11.2 11.2 6.1 13.5
12.0 12.0 9.0 13.8
6
Type
VSXP-D
-
-DW
DIN rail mounting type
Vacuum sensor with LED pressure display
LED
Manual button
MODE SW1
kPa
ME
S1
Approx.
500
MODE switching switch
DIN rail
Switch 1 pressure setting trimmer
6
Approx. 500
øD (V port)
Vacuum release air flow rate
adjusting needle
LED
DIN rail fixing screw
LOCK
10.5
9.3
RELEASE
DIN rail
11.8
2-C1
2-L1
21
20.5
35.5
27.5
2.4
75
C2
L2
3.5(Needle stroke length)
6.4
(*)23.7
(*)33.7
Shield wire
(*)5.2
64.3
(*)63.2
(*)7.5
61.8
18.5
(*)14.2
Manual button
Vacuum release
pilot valve
øD (PS port)
Unit: mm
Applicable tube O. D. (øD) C1 C2 L1 L2
4
11.2 11.2 6.1 7.5
12.0 12.0 9.0 7.8
6
Inch/NPT specifications
6
6
109.5
Approx.
500
Switch 2 pressure setting trimmer
Vacuum supply pilot valve
øD (PV port)
SW2
S2
Note) The dimensions marked with an asterisk (*) apply for the 7.5 mm DIN rail height.
Type
VSXP-D
-
-DW-D
Related components
6.5
10.5
øD (PV port)
Shield wire
16
26
C2
3 18.5
Vacuum release pilot valve
58
øD (V port)
55.5
Manual button
Vacuum related components
LED
Approx.
500
Manual button
Vacuum ejector/vacuum unit
Direct mounting type
Vacuum pad
Vacuum switching unit: 2-way valve specifications with vacuum sensor with LED display and 2-point switch output
140
Vacuum switching unit: 2-way valve specifications with vacuum sensor with LED display, analog output and switch output
Direct mounting type
Vacuum sensor with LED display
MODE
kPa
Vacuum supply pilot valve
SW
HYS
SW
ME
Hysteresis setting trimmer
MODE switching switch
Approx.
500
Pressure setting trimmer
109.5
6
Approx.
500
LED
Manual button
Approx. 500
6
2-ø3.3
6
øD (V port)
LED
C2
6.5
6.5
10.5
øD (PV port)
Shield wire
3 18.5
Vacuum release pilot valve
16
26
55.5
Manual button
58
Vacuum ejector/vacuum unit
VSXP series
2-C1
2-L1 11.8 20.5
21
69
8.4
12.4
-
øD (PS port)
Unit: mm
Applicable tube O. D. (øD) C1 C2 L1 L2
4
11.2 11.2 6.1 13.5
6
12.0 12.0 9.0 13.8
Type
VSXP-D
Vacuum release air flow
rate adjusting needle
L2
3.5(Needle stroke length)
-DA
DIN rail mounting type
Vacuum sensor with LED display
LED
Manual button
MODE
kPa
ME
SW
Approx.
500
MODE switching switch
Pressure setting trimmer
6
6
Vacuum release air flow rate
adjusting needle
DIN rail fixing screw
LOCK
10.5
9.3
RELEASE
DIN rail
11.8
2-C1
2-L1
21
20.5
35.5
27.5
2.4
75
C2
L2
3.5(Needle stroke length)
6.4
(*)23.7
(*)33.7
Shield wire
(*)5.2
64.3
(*)14.2
Vacuum release pilot valve
øD(PV port)
øD (V port)
LED
(*)63.2
(*)7.5
61.8
18.5
Manual button
Approx. 500
6
109.5
Approx.
500
Hysteresis setting trimmer
Vacuum supply pilot valve
DIN rail
HYS
SW
øD (PS port)
Unit: mm
Applicable tube O. D. (øD) C1 C2 L1 L2
4
11.2 11.2 6.1 7.5
6
12.0 12.0 9.0 7.8
Note) The dimensions marked with an asterisk (*) apply for the 7.5 mm DIN rail height.
Type
VSXP-D
141
-
-DA-D
Vacuum sensor (only analog output)
Vacuum supply pilot valve
6
103.5
Approx. 500
6
6
2-ø3.3
øD (V port)
LED
Shield wire
6.5
L2
12.4
øD (PS port)
Unit: mm
Applicable tube O. D. (øD) C1 C2 L1 L2
4
11.2 11.2 6.1 13.5
6
12.0 12.0 9.0 13.8
Type
VSXP-D
Vacuum release air flow
rate adjusting needle
3.5(Needle stroke length)
8.4
-
-A0
DIN rail mounting type
Vacuum supply pilot valve
Approx.
500
DIN rail
6
Approx. 500
øD (V port)
6
6
103.5
Approx. 500
Vacuum sensor (only analog output)
LED
Manual button
Vacuum release air flow rate
adjusting needle
LED
DIN rail fixing screw
LOCK
10.5
9.3
RELEASE
DIN rail
11.8
2-C1
2-L1
21
20.5
35.5
27.5
2.4
75
C2
L2
3.5(Needle stroke length)
6.4
(*)23.7
(*)33.7
64.3
(*)5.2
øD (PV port)
Shield wire
(*)63.2
(*)7.5
61.8
18.5
Vacuum release pilot valve
(*)14.2
Manual button
øD (PS port)
Unit: mm
Applicable tube O. D. (øD) C1 C2 L1 L2
4
11.2 11.2 6.1 7.5
6
12.0 12.0 9.0 7.8
Note) The dimensions marked with an asterisk (*) apply for the 7.5 mm DIN rail height.
Type
VSXP-D
-
-A0-D
Vacuum related components
2-C1
2-L1 11.8 20.5
21
69
Inch/NPT specifications
6.5
10.5
øD (PV port)
16
26
C2
3 18.5
Vacuum release pilot valve
58
55.5
Manual button
Related components
LED
Approx.
500
Approx.
500
Manual button
Vacuum ejector/vacuum unit
Direct mounting type
Vacuum pad
Vacuum switching unit: 2-way valve specifications with vacuum sensor and analog output
142
Vacuum switching unit: 3-way valve specifications with no vacuum sensor
Direct mounting type
LED
Approx. 500
Approx.
500
Manual button
6
Vacuum supply pilot valve
6
2-ø3.3
Manual button
6.5
16
26
62
55.5
6.5
Vacuum release pilot valve
øD (PV port)
øD (V port)
LED
3 18.5
Vacuum ejector/vacuum unit
VSXP series
10.5
2-C1
2-L1 11.8 20.5
21
69
8.4
L2
12.4
(Needle stroke length)
øD (PS port)
Unit: mm
Applicable tube O. D. (øD) C1 C2 L1 L2
4
11.2 11.2 6.1 13.5
6
12.0 12.0 9.0 13.8
Type
VSXP-T
Vacuum release air flow
rate adjusting needle
C2
3.5
-
DIN rail mounting type
LED
Approx. 500
Manual button
Approx.
500
Vacuum supply pilot valve
6
DIN rail
6
øD (V port)
Vacuum release air flow rate
adjusting needle
2-ø3.3
LED
LOCK
DIN rail
10.5
9.3
RELEASE
11.8
2-C1
2-L1
21
20.5
35.5
27.5
2.4
75
(*)23.7
(*)33.7
68.3
DIN rail fixing screw
(*)5.2
øD (PV port)
(*)14.2
Vacuum release pilot valve
(*)63.2
(*)7.5
61.8
18.5
Manual button
C2
øD (PS port)
L2
3.5(Needle stroke length)
6.4 Note) The dimensions marked with an asterisk (*) apply
for the 7.5 mm DIN rail height.
Type
VSXP-T
143
-
-D
Unit: mm
Applicable tube O. D. (øD) C1 C2 L1 L2
4
11.2 11.2 6.1 7.5
6
12.0 12.0 9.0 7.8
Vacuum sensor with LED display
MODE SW1
kPa
Vacuum supply pilot valve
ME
SW2
S2
S1
Switch 2 pressure setting trimmer
MODE switching switch
Approx.
500
Switch 1 pressure setting trimmer
109.5
6
Approx. 500
6
6
2-ø3.3
øD (V port)
LED
16
26
6.5
6.5
10.5
øD (PV port)
Shield wire
C2
3 18.5
Vacuum release pilot valve
62
55.5
Manual button
2-C1
2-L1 11.8 20.5
21
69
Vacuum release air flow
rate adjusting needle
L2
3.5(Needle stroke length)
8.4
øD (PS port)
12.4
Unit: mm
Applicable tube O. D. (øD) C1 C2 L1 L2
4
11.2 11.2 6.1 13.5
6
12.0 12.0 9.0 13.8
Type
VSXP-T
-
-DW
DIN rail mounting type
LED
Manual button
Vacuum sensor with LED display
MODE SW1
kPa
ME
S1
SW2
S2
Vacuum supply pilot valve
Approx.
500
109.5
6
Approx.
500
Switch 2 pressure setting trimmer
MODE switching switch
DIN rail
Switch 1 pressure setting trimmer
Approx. 500
2-ø3.3
Vacuum release air flow rate
adjusting needle
LOCK
11.8
2-C1
2-L1
21
20.5
35.5
27.5
2.4
75
C2
L2
3.5(Needle stroke length)
6.4
øD (PS port)
Unit: mm
Applicable tube O. D. (øD) C1 C2 L1 L2
4
11.2 11.2 6.1 7.5
6
12.0 12.0 9.0 7.8
Note) The dimensions marked with an asterisk (*) apply for the 7.5 mm DIN rail height.
Type
VSXP-T
-
-DW-D
Related components
10.5
9.3
RELEASE
DIN rail
(*)23.7
(*)33.7
64.3
Shield wire
(*)5.2
øD (PV port)
DIN rail fixing screw
(*)63.2
(*)7.5
61.8
18.5
Vacuum release pilot valve
LED
(*)14.2
Manual button
Inch/NPT specifications
6
6
øD (V port)
Vacuum related components
LED
Approx.
500
Manual button
Vacuum ejector/vacuum unit
Direct mounting type
Vacuum pad
Vacuum switching unit: 3-way valve specifications with vacuum sensor with LED display and 2-point switch output
144
Vacuum switching unit: 3-way valve specifications with vacuum sensor with LED display, analog output and switch output
Direct mounting type
Vacuum sensor with LED display
MODE
kPa
Approx.
500
Vacuum supply pilot valve
SW
HYS
SW
ME
Hysteresis setting trimmer
MODE switching switch
Pressure setting trimmer
109.5
6
Approx.
500
LED
Manual button
Approx. 500
6
2-ø3.3
6
LED
øD (V port)
55.5
6.5
6.5
10.5
øD (PV port)
Shield wire
C2
3 18.5
Vacuum release pilot valve
16
26
Manual button
62
Vacuum ejector/vacuum unit
VSXP series
2-C1
2-L1 11.8 20.5
21
69
Vacuum release air flow
rate adjusting needle
L2
3.5(Needle stroke length)
8.4
øD (PS port)
12.4
Unit: mm
Applicable tube O. D. (øD) C1 C2 L1 L2
4
11.2 11.2 6.1 13.5
6
12.0 12.0 9.0 13.8
Type
VSXP-T
-
-DA
DIN rail mounting type
Vacuum sensor with LED display
LED
Manual button
MODE
kPa
ME
SW
Approx.
500
MODE switching switch
Pressure setting trimmer
109.5
6
Approx.
500
Hysteresis setting trimmer
Vacuum supply pilot valve
DIN rail
HYS
SW
Approx. 500
2-ø3.3
6
6
øD (V port)
Vacuum release air flow rate
adjusting needle
LOCK
10.5
9.3
RELEASE
DIN rail
11.8
2-C1
2-L1
21
20.5
35.5
27.5
2.4
75
C2
L2
3.5(Needle stroke length)
6.4
(*)23.7
(*)33.7
68.3
DIN rail fixing screw
Shield wire
(*)5.2
øD (PV port)
(*)14.2
Vacuum release pilot valve
(*)63.2
(*)7.5
61.8
18.5
LED
Manual button
øD (PS port)
Unit: mm
Applicable tube O. D. (øD) C1 C2 L1 L2
4
11.2 11.2 6.1 7.5
6
12.0 12.0 9.0 7.8
Note) The dimensions marked with an asterisk (*) apply for the 7.5 mm DIN rail height.
Type
VSXP-T
145
-
-DA-D
103.5
6
Approx. 500
6
6
2-ø3.3
LED
6.5
8.4
L2
12.4
øD (PS port)
Unit: mm
Applicable tube O. D. (øD) C1 C2 L1 L2
4
11.2 11.2 6.1 13.5
6
12.0 12.0 9.0 13.8
Type
VSXP-T
Vacuum release air flow
rate adjusting needle
3.5(Needle stroke length)
-
-A0
DIN rail mounting type
Vacuum supply pilot valve
Approx.
500
DIN rail
103.5
6
Approx.
500
Vacuum sensor (only analog output)
LED
Manual button
Approx. 500
2-ø3.3
6
6
øD (V port)
Vacuum release air flow rate
adjusting needle
Shield wire
DIN rail fixing screw
68.3
(*)5.2
(*)63.2
(*)7.5
61.8
18.5
øD (PV port)
(*)14.2
Vacuum release pilot valve
LOCK
10.5
9.3
RELEASE
DIN rail
11.8
2-C1
2-L1
21
20.5
35.5
27.5
2.4
75
C2
L2
3.5(Needle stroke length)
6.4
(*)23.7
(*)33.7
LED
Manual button
øD (PS port)
Unit: mm
Applicable tube O. D. (øD) C1 C2 L1 L2
4
11.2 11.2 6.1 7.5
6
12.0 12.0 9.0 7.8
Note) The dimensions marked with an asterisk (*) apply for the 7.5 mm DIN rail height.
Type
VSXP-T
-
-A0-D
Vacuum related components
2-C1
2-L1 11.8 20.5
21
69
Inch/NPT specifications
6.5
16
26
C2
10.5
øD (PV port)
øD (V port)
Shield wire
3 18.5
Vacuum release pilot valve
62
55.5
Manual button
Related components
Approx.
500
Vacuum supply pilot valve
Approx.
500
Vacuum sensor (only analog output)
LED
Manual button
Vacuum ejector/vacuum unit
Direct mounting type
Vacuum pad
Vacuum switching unit: 3-way valve specifications with vacuum sensor and analog output
146
Vacuum ejector unit: Manifold type with no vacuum sensor
VSXM common exhaust type
Manual button
Joint dimensions table
2-øD2 (supply port)
Applicable
tube
C1
O.D. øD1
4
10.9
6
11.7
Vacuum generating pilot valve
LED
11 x n (n = No. of stations)
18 + 11 x n (n = No. of stations)
36 + 11 x n (n = No. of stations)
Vacuum release pilot valve
Manual button
Approx.
500
2-øD2 (exhaust port)
4-4.5
34
66.5
85.6
Unit: mm
Applicable
tube
C2
L1
L2
O.D. øD2
4
14.9 3.5
0.2
6
17
-0.1
8.1
8
18.2 9.6
10
20.7 13.2
Manifold mounting hole (4 holes)
5.4
Approx.
500
Vacuum ejector/vacuum unit
VSX series
Vacuum release air flow rate adjusting needle
6
6
LED
C1 L1
7
147
96.4
4-17
8
70
2-L2
26.5
4-C2
2-C2
(26.5)
2-L2
30.5
40.5
72.5
øD1 (vacuum port)
Fixing screw
Lock lever
VSXM common exhaust type
Vacuum sensor with LED display
Pressure display section
LED
MODE change-over switch
Manual button
Switch 1 pressure setting trimmer
Vacuum generating pilot valve
Joint dimensions table
Applicable
tube
C1
O.D. øD1
4
10.9
6
11.7
MODE
kPa
Vacuum release pilot valve
Manual button
Approx. 500
2-øD2 (exhaust port)
SW2
SW1
SW2
SW1
SW2
ME S1 S2
MODE
kPa
SW2
SW1
ME S1 S2
MODE
kPa
SW1
ME S1 S2
ME S1 S2
4-4.5
34
66.5
85.6
109.5
Manifold mounting hole (4 holes)
5.4
6 Approx. 500
Approx. 500
MODE
kPa
11 x n (n = No. of stations)
18 + 11 x n (n = No. of stations)
36 + 11 x n (n = No. of stations)
Switch 2 pressure setting trimmer
Unit: mm
Applicable
tube
C2
L1
L2
O.D. øD2
4
14.9 3.5
0.2
6
17
-0.1
8.1
8
18.2 9.6
10
20.7 13.2
Vacuum pad
2-øD2 (supply port)
Vacuum ejector/vacuum unit
Vacuum ejector unit: Manifold type with vacuum sensor with LED display and 2-point switch output
Vacuum release air flow rate adjusting needle
Lock lever
Vacuum related components
Fixing screw
Inch/NPT specifications
96.4
4-17
8
26.5
4-C2
C1 L1
7
øD1 (vacuum port)
Shield cable
Related components
Shield wire
2-C2
(26.5)
30.5
40.5
72.5
70
2-L2
2-L2
6
6
LED
148
Vacuum ejector unit: Manifold type with vacuum sensor with LED display, analog output and switch output
VSXM common exhaust type
Vacuum sensor with LED display
2-øD2 (supply port)
Pressure display section
LED
MODE change-over switch
Manual button
Pressure setting trimmer
Vacuum generating pilot valve
Hysteresis setting trimmer
ME
kPa
ME
ME
Manual button
Approx. 500
Vacuum release pilot valve
ME
HYS
SW
HYS
SW
HYS
SW
MODE
kPa
HYS
SW
SW
MODE
kPa
SW
SW
MODE
SW
4-4.5
34
66.5
85.6
109.5
Unit: mm
Applicable
tube
C2
L1
L2
O.D. øD2
4
14.9 3.5
0.2
6
17
-0.1
8.1
8
18.2 9.6
10
20.7 13.2
Manifold mounting hole (4 holes)
5.4
6 Approx. 500
Approx. 500
MODE
kPa
2-øD2 (exhaust port)
Joint dimensions table
Applicable
tube
C1
O.D. øD1
4
10.9
6
11.7
11 x n (n = No. of stations)
18 + 11 x n (n = No. of stations)
36 + 11 x n (n = No. of stations)
Vacuum ejector/vacuum unit
VSX series
Vacuum release air flow rate adjusting needle
26.5
4-C2
C1 L1
7
149
Shield wire
øD1 (vacuum port)
2-C2
(26.5)
30.5
40.5
72.5
4-17
8
70
2-L2
2-L2
6
6
LED
96.4
Fixing screw
Lock lever
VSXM common exhaust type
2-øD2 (supply port)
Joint dimensions table
LED
Vacuum generating pilot valve
11 x n (n = No. of stations)
18 + 11 x n (n = No. of stations)
36 + 11 x n (n = No. of stations)
Vacuum sensor (only analog output)
Manual button
4-4.5
34
66.5
85.6
103.5
Unit: mm
Applicable
tube
C2
L1
L2
O.D. øD2
4
14.9 3.5
0.2
6
17
-0.1
8.1
8
18.2 9.6
10
20.7 13.2
Manifold mounting hole (4 holes)
5.4
6 Approx. 500
Approx. 500
Vacuum break pilot valve
Approx. 500
2-øD2 (exhaust port)
Applicable
tube
C1
O.D. øD1
4
10.9
6
11.7
Vacuum pad
Manual button
Vacuum ejector/vacuum unit
Vacuum ejector unit: Manifold type with analog output vacuum sensor
Vacuum release air flow rate adjusting needle
6
6
LED
Vacuum related components
Lock lever
Inch/NPT specifications
Fixing screw
Related components
96.4
4-17
8
26.5
4-C2
C1 L1
7
72.5
Shield cable
2-C2
(26.5)
30.5
40.5
70
2-L2
2-L2
øD1 (vacuum port)
Shield wire
150
Vacuum ejector unit: Manifold type with no vacuum sensor
VSXM atmospheric exhuast type
Joint dimensions table
Manual button
2-øD2 (supply port)
LED
EX
Applicable
tube
C1
O.D. øD1
4
10.9
6
11.7
11 x n (n = No. of stations)
18 + 11 x n (n = No. of stations)
36 + 11 x n (n = No. of stations)
Vacuum generating pilot valve
Manual button
Unit: mm
Applicable
tube
C2
L1
L2
O.D. øD2
4
14.9 3.5
0.2
6
17
-0.1
8.1
8
18.2 9.6
10
20.7 13.2
Manifold mounting hole (4 holes)
5.4
Approx. 500
Vacuum release pilot valve
4-4.5
66.5
85.6
Approx. 500
Vacuum ejector/vacuum unit
VSX series
Vacuum release air flow rate adjusting needle
6
6
LED
C1 L1
7
151
96.4
4-17
8
26.5
2-C2
30.5
40.5
72.5
70
2-L2
øD1 (vacuum port)
Fixing screw
Lock lever
VSXM atmospheric exhaust type
Vacuum sensor with LED display
Joint dimensions table
Pressure display section
LED
MODE change-over switch
Manual button
Switch 1 pressure setting trimmer
Vacuum generating pilot valve
MODE
kPa
Manual button
SW2
SW1
SW2
ME S1 S2
4-4.5
66.5
85.6
109.5
Approx. 500
Vacuum release pilot valve
SW2
SW1
ME S1 S2
MODE
kPa
SW2
SW1
ME S1 S2
MODE
kPa
SW1
Unit: mm
Applicable
tube
C2
L1
L2
O.D. øD2
4
14.9 3.5
0.2
6
17
-0.1
8.1
8
18.2 9.6
10
20.7 13.2
Manifold mounting hole (4 holes)
5.4
6 Approx. 500
Approx. 500
MODE
ME S1 S2
11 x n (n = No. of stations)
18 + 11 x n (n = No. of stations)
36 + 11 x n (n = No. of stations)
Switch 2 pressure setting trimmer
EX
kPa
Applicable
tube
C1
O.D. øD1
4
10.9
6
11.7
Vacuum pad
2-øD2 (supply port)
Vacuum ejector/vacuum unit
Vacuum ejector unit: Manifold type with vacuum sensor with LED display and 2-point switch output
Vacuum release air flow rate adjusting needle
Fixing screw
Lock lever
Inch/NPT specifications
96.4
4-17
8
30.5
40.5
26.5
2-C2
C1 L1
7
Vacuum related components
øD1 (vacuum port)
72.5
70
2-L
Shield wire
Related components
6
6
LED
152
Vacuum ejector unit: Manifold type with vacuum sensor with LED display, analog output and switch output
VSXM atmospheric type
Vacuum sensor with LED display
2-øD2 (supply port)
Pressure display section
LED
MODE change-over switch
Manual button
Pressure setting trimmer
Vacuum generating pilot valve
Hysteresis setting trimmer
EX
ME
kPa
ME
ME
Manual button
HYS
SW
HYS
SW
4-4.5
66.5
85.6
109.5
Approx. 500
Vacuum release pilot valve
ME
HYS
SW
SW
MODE
kPa
HYS
SW
SW
MODE
kPa
SW
SW
MODE
Unit: mm
Applicable
tube
C2
L1
L2
O.D. øD2
4
14.9 3.5
0.2
6
17
-0.1
8.1
8
18.2 9.6
10
20.7 13.2
Manifold mounting hole (4 holes)
5.4
6 Approx. 500
Approx. 500
MODE
kPa
Joint dimensions table
Applicable
tube
C1
O.D. øD1
4
10.9
6
11.7
11 x n (n = No. of stations)
18 + 11 x n (n = No. of stations)
36 + 11 x n (n = No. of stations)
Vacuum ejector/vacuum unit
VSX series
Vacuum release air flow rate adjusting needle
6
6
LED
Shield wire
øD1 (vacuum port)
C1 L1
7
153
96.4
4-17
8
26.5
2-C2
30.5
40.5
72.5
70
2-L
Shield cable
Fixing screw
Lock lever
Manual button
2-øD2 (supply port)
Joint dimensions table
LED
Vacuum generating pilot valve
Vacuum sensor (only analog output)
11 x n (n = No. of stations)
18 + 11 x n (n = No. of stations)
36 + 11 x n (n = No. of stations)
EX
Unit: mm
Applicable
tube
C2
L1
L2
O.D. øD2
4
14.9 3.5
0.2
6
17
-0.1
8.1
8
18.2 9.6
10
20.7 13.2
Manifold mounting hole (4 holes)
5.4
6 Approx. 500
Approx. 500
Manual button
Approx. 500
Vacuum release pilot valve
4-4.5
66.5
85.6
103.5
Applicable
tube
C1
O.D. øD1
4
10.9
6
11.7
Vacuum release air flow rate adjusting needle
Vacuum ejector/vacuum unit
VSXM atmospheric exhaust type
Vacuum pad
Vacuum ejector unit: Manifold type with analog output vacuum sensor
6
6
LED
øD1 (vacuum port)
Lock lever
Vacuum related components
Fixing screw
Inch/NPT specifications
96.4
Related components
C1 L1
7
4-17
8
26.5
2-C2
30.5
40.5
72.5
70
2-L2
Shield wire
154
Vacuum switching unit: 2-way valve specifications, manifold type with no vacuum sensor
VSXPM-D*
Manual button
Joint dimensions table
2-øD2 (vacuum supply port)
Applicable
tube
C1
O.D. øD1
4
10.9
6
11.7
Vacuum supply pilot valve
LED
11 x n (n = No. of stations)
18 + 11 x n (n = No. of stations)
36 + 11 x n (n = No. of stations)
Vacuum release pilot valve
Manual button
Approx. 500
2-øD2 (pilot air supply port)
4-4.5
34
66.5
85.6
Unit: mm
Applicable
tube
C2
L1
L2
O.D. øD2
4
14.9 3.5
0.2
6
17
-0.1
8.1
8
18.2 9.6
10
20.7 13.2
Manifold mounting hole (X4)
5.4
Approx. 500
Vacuum ejector/vacuum unit
VSXP series
Vacuum release air flow rate adjusting needle
6
6
LED
C1 L1
7
155
96.4
4-17
8
26.5
4-C2
70
2-L2
2-C2
(26.5)
2-L2
30.5
40.5
72.5
øD1 (vacuum port)
Fixing screw
Lock lever
VSXPM-D*
Vacuum sensor with LED display
Joint dimensions table
Pressure display section
LED
MODE change-over switch
Manual button
Switch 1 pressure setting trimmer
Vacuum supply pilot valve
MODE
kPa
Manual button
Approx. 500
Vacuum release pilot valve
SW2
SW1
SW2
SW1
SW2
ME S1 S2
MODE
kPa
SW2
SW1
ME S1 S2
MODE
kPa
SW1
ME S1 S2
4-4.5
34
66.5
85.6
109.5
Unit: mm
Applicable
tube
C2
L1
L2
O.D. øD2
4
14.9 3.5
0.2
6
17
-0.1
8.1
8
18.2 9.6
10
20.7 13.2
Manifold mounting hole (X4)
5.4
6 Approx. 500
Approx. 500
MODE
ME S1 S2
11 x n (n = No. of stations)
18 + 11 x n (n = No. of stations)
36 + 11 x n (n = No. of stations)
Switch 2 pressure setting trimmer
kPa
2-øD2 (pilot air supply port)
Applicable
tube
C1
O.D. øD1
4
10.9
6
11.7
Vacuum pad
2-øD2 (vacuum supply port)
Vacuum ejector/vacuum unit
Vacuum switching unit: 2-way valve specifications, manifold type with vacuum sensor with LED display and 2-point switch output
Vacuum release air flow rate adjusting needle
26.5
4-C2
C1 L1
7
96.4
Fixing screw
Lock lever
Vacuum related components
øD1 (vacuum port)
Inch/NPT specifications
Shield cable
Related components
Shield wire
2-C2
(26.5)
30.5
40.5
72.5
4-17
8
70
2-L2
2-L2
6
6
LED
156
Vacuum switching unit: 2-way valve specifications, manifold type with vacuum sensor with LED display, analog output and switch output
VSXPM-D*
Vacuum sensor with LED display
Joint dimensions table
2-øD2 (vacuum supply port)
Pressure display section
LED
MODE change-over switch
Manual button
Pressure setting trimmer
Vacuum supply pilot valve
Hysteresis setting trimmer
ME
kPa
ME
ME
Approx. 500
Manual button
HYS
SW
HYS
SW
4-4.5
34
66.5
85.6
109.5
2-øD2 (pilot air supply port)
Vacuum release pilot valve
ME
HYS
SW
SW
MODE
kPa
HYS
SW
SW
MODE
kPa
SW
SW
MODE
Unit: mm
Applicable
tube
C2
L1
L2
O.D. øD2
4
14.9 3.5
0.2
6
17
-0.1
8.1
8
18.2 9.6
10
20.7 13.2
Manifold mounting hole (X4)
5.4
6 Approx. 500
Approx. 500
MODE
kPa
Applicable
tube
C1
O.D. øD1
4
10.9
6
11.7
11 x n (n = No. of stations)
18 + 11 x n (n = No. of stations)
36 + 11 x n (n = No. of stations)
Vacuum ejector/vacuum unit
VSXP series
Vacuum release air flow rate adjusting needle
26.5
4-C2
C1 L1
7
157
Shield wire
øD1 (vacuum port)
2-C2
(26.5)
30.5
40.5
72.5
4-17
8
70
2-L2
2-L2
6
6
LED
96.4
Fixing screw
Lock lever
VSXPM-D*
2-øD2 (vacuum supply port)
LED
Vacuum sensor
(only analog output)
11 x n (n = No. of stations)
18 + 11 x n (n = No. of stations)
36 + 11 x n (n = No. of stations)
Vacuum supply pilot valve
Joint dimensions table
Applicable
tube
C1
O.D. øD1
4
10.9
6
11.7
Manual button
4-4.5
34
66.5
85.6
103.5
Manifold mounting hole (X4)
5.4
6 Approx. 500
Approx. 500
Vacuum release pilot valve
Approx. 500
2-øD2 (pilot air supply port)
Unit: mm
Applicable
tube
C2
L1
L2
O.D. øD2
4
14.9 3.5
0.2
6
17
-0.1
8.1
8
18.2 9.6
10
20.7 13.2
Vacuum pad
Manual button
Vacuum ejector/vacuum unit
Vacuum switching unit: 2-way valve specifications, manifold type with analog output vacuum sensor
Vacuum release air flow rate adjusting needle
6
6
LED
Vacuum related components
Lock lever
Inch/NPT specifications
Fixing screw
Related components
96.4
4-17
8
26.5
4-C2
C1 L1
7
72.5
Shield cable
2-C2
(26.5)
30.5
40.5
70
2-L2
2-L2
øD1 (vacuum port)
Shield wire
158
Vacuum switching unit: 3-way valve specifications, manifold type with no vacuum sensor
VSXPM-T*
Manual button
Joint dimensions table
2-øD2 (vacuum supply port)
Applicable
tube
C1
O.D. øD1
4
10.9
6
11.7
Vacuum supply pilot valve
LED
11 x n (n = No. of stations)
18 + 11 x n (n = No. of stations)
36 + 11 x n (n = No. of stations)
4-4.5
34
66.5
85.6
Vacuum release pilot valve
Manual button
Approx. 500
2-øD2 (pilot air supply port)
Unit: mm
Applicable
tube
C2
L1
L2
O.D. øD2
4
14.9 3.5
0.2
6
17
-0.1
8.1
8
18.2 9.6
10
20.7 13.2
Manifold mounting hole (X4)
Approx. 500
Vacuum ejector/vacuum unit
VSXP series
5.4
6
6
LED
Vacuum release air flow rate adjusting needle
C1 L1
7
159
96.4
76.5
4-17
8
26.5
4-C2
2-C2
(26.5)
30.5
40.5
70
2-L2
2-L2
øD1 (vacuum port)
Fixing screw
Lock lever
VSXPM-T*
Vacuum sensor with LED display
2-øD2 (vacuum supply port)
Pressure display section
LED
MODE change-over switch
Manual button
Switch 1 pressure setting trimmer
Vacuum supply pilot valve
kPa
SW2
SW1
SW2
ME S1 S2
4-4.5
34
66.5
85.6
109.5
Manifold mounting hole (X4)
5.4
6 Approx. 500
96.4
Fixing screw
Lock lever
Vacuum related components
2-L2
2-C2
(26.5)
30.5
40.5
26.5
4-C2
C1 L1
7
Inch/NPT specifications
øD1 (vacuum port)
76.5
70
2-L2
Shield wire
Related components
6
6
LED
Vacuum release air flow rate adjusting needle
4-17
8
Manual button
Approx. 500
Vacuum release pilot valve
SW2
SW1
ME S1 S2
MODE
kPa
SW2
SW1
ME S1 S2
MODE
kPa
SW1
Unit: mm
Applicable
tube
C2
L1
L2
O.D. øD2
4
14.9 3.5
0.2
6
17
-0.1
8.1
8
18.2 9.6
10
20.7 13.2
Vacuum pad
MODE
Approx. 500
MODE
ME S1 S2
11 x n (n = No. of stations)
18 + 11 x n (n = No. of stations)
36 + 11 x n (n = No. of stations)
Switch 2 pressure setting trimmer
kPa
2-øD2 (pilot air supply port)
Joint dimensions table
Applicable
tube
C1
O.D. øD1
4
10.9
6
11.7
Vacuum ejector/vacuum unit
Vacuum switching unit: 3-way valve specifications, manifold type with vacuum sensor with LED display and 2-point switch output
160
Vacuum switching unit: 3-way valve specifications, manifold type with vacuum sensor with LED display, analog output and switch output
VSXPM-T*
Vacuum sensor with LED display
2-øD2 (vacuum supply port)
Pressure display section
LED
MODE change-over switch
Manual button
Pressure setting trimmer
Vacuum supply pilot valve
Hysteresis setting trimmer
ME
kPa
ME
ME
HYS
SW
HYS
SW
4-4.5
34
66.5
85.6
109.5
Manifold mounting hole (X4)
5.4
6 Approx. 500
Vacuum release air flow rate adjusting needle
6
6
LED
øD1 (vacuum port)
26.5
4-C2
2-L2
2-C2
(26.5)
30.5
40.5
76.5
70
2-L2
Shield wire
C1 L1
7
161
Unit: mm
Applicable
tube
C2
L1
L2
O.D. øD2
4
14.9 3.5
0.2
6
17
-0.1
8.1
8
18.2 9.6
10
20.7 13.2
96.4
4-17
8
Manual button
Approx. 500
Vacuum release pilot valve
ME
HYS
SW
SW
MODE
kPa
HYS
SW
SW
MODE
kPa
SW
SW
MODE
Approx. 500
MODE
kPa
2-øD2 (pilot air supply port)
Joint dimensions table
Applicable
tube
C1
O.D. øD1
4
10.9
6
11.7
11 x n (n = No. of stations)
18 + 11 x n (n = No. of stations)
36 + 11 x n (n = No. of stations)
Vacuum ejector/vacuum unit
VSXP series
Fixing screw
Lock lever
VSXPM-T*
2-øD2 (vacuum supply port)
LED
Vacuum sensor
(only analog output)
11 x n (n = No. of stations)
18 + 11 x n (n = No. of stations)
36 + 11 x n (n = No. of stations)
Vacuum supply pilot valve
Joint dimensions table
Applicable
tube
C1
O.D. øD1
4
10.9
6
11.7
5.4
6 Approx. 500
Vacuum release air flow rate adjusting needle
6
6
LED
Approx. 500
Manifold mounting hole (X4)
96.4
Fixing screw
Lock lever
Inch/NPT specifications
C1 L1
7
Related components
26.5
4-C2
2-L2
2-C2
(26.5)
30.5
40.5
70
2-L2
Shield wire
Vacuum related components
øD1 (vacuum port)
76.5
Manual button
4-4.5
34
66.5
85.6
103.5
4-17
8
Vacuum release pilot valve
Approx. 500
2-øD2 (pilot air supply port)
Unit: mm
Applicable
tube
C2
L1
L2
O.D. øD2
4
14.9 3.5
0.2
6
17
-0.1
8.1
8
18.2 9.6
10
20.7 13.2
Vacuum pad
Manual button
Vacuum ejector/vacuum unit
Vacuum switching unit: 3-way valve specifications, manifold type with analog output vacuum sensor
162
Vacuum ejector/vacuum unit
VSX/VSXP series
Individual type weight table
VSXVSXVSXVSXVSXVSXVSXP-D
VSXP-D
VSXP-D
VSXP-T
VSXP-T
VSXP-T
-
Type
S- -D
J- -D
S- -A0
J- -A0
SJ- -D
- -A0
- -D
- -A0
-
Unit details
Vacuum ejector unit (Atmospheric, with vacuum sensor with LED display)
Vacuum ejector unit (Common exhaust, with vacuum sensor with LED display)
Vacuum ejector unit (Atmospheric, with analog output vacuum sensor)
Vacuum ejector unit (Common exhaust, with analog output vacuum sensor)
Vacuum ejector unit (Atmospheric exhasut, with no vacuum sensor)
Vacuum ejector unit (Common exhaust, with no vacuum sensor)
Vacuum switching unit 2-way valve specifications (Vacuum sensor with LED display)
Vacuum switching unit 2-way valve specifications (Analog output vacuum sensor)
Vacuum switching unit 2-way valve specifications (No vacuum sensor)
Vacuum switching unit 3-way valve specifications (Vacuum sensor with LED display)
Vacuum switching unit 3-way valve specifications (Analog output vacuum sensor)
Vacuum switching unit 3-way valve specifications (No vacuum sensor)
Weight (g)
81
84
78
81
71
74
85
82
75
88
85
78
*. The DIN rail installed is about 5 g heavier than the weight indicated above.
Manifold type weight table
VSXVSX-
Type
S-
-D
-D
Details of unit with manifold
-2 Vacuum ejector unit, atmospheric exhaust with vacuum sensor with LED display, 2-station manifold
-2 Vacuum ejector unit, common exhaust with vacuum sensor with LED display, 2-station manifold
Weight (g)
310
330
*. The weight increases by 90 g with each additional station.
VSXP-D
-
-D
-2
Vacuum switching unit 2-way valve specifications with vacuum sensor with LED display, 2-station manifold
340
*. The weight increases by 95 g with each additional station.
VSXP-T
-
-D
-2
Vacuum switching unit 3-way valve specifications with vacuum sensor with LED display, 2-station manifold
350
*. The weight increases by 100 g with each additional station.
*. The above weights are for the with vacuum sensor with LED display. The type with analog output vacuum sensor (vacuum sensor with no
display) is 3 g/station lighter than the above weights. The type with no sensor is 10 g/station lighter than the above weights.
163
LED display section
ME
SW
MODE SW1
HYS
kPa
SW
MODE change-over switch
ME
S1
SW2
S2
MODE change-over switch
Hysteresis setting trimmer
Pressure setting trimmer
Switch 2 pressure setting trimmer
Switch 1 pressure setting trimmer
Vacuum sensor with LED display
(Analog output, switch output type)
Vacuum sensor with LED display
(2-point switch output type)
3. Connection method
ANALOG OUT (Gray)
COM (Blue)
Vacuum sensor with LED display
(Analog output, switch output type)
Load
SW1 OUT (Black)
Load
SW2 OUT (Gray)
COM (Blue)
Vacuum sensor with LED display
(2-point switch output type)
V+ (Brown)
Main circuit
Load
SW OUT (Black)
V+ (Brown)
Main circuit
Main circuit
V+ (Brown)
ANALOG OUT (Gray)
COM (Blue)
Analog output vacuum sensor
Inch/NPT specifications
MODE
kPa
Related components
LED display section
Vacuum pad
1. Setting pressure
(1) Energizing (checking wiring and supplying DC power.)
(2) Set the MODE switching switch to the pressure setting mode (ME S1 or S2, SW).
(2)-2. Only for analog output vacuum sensors
Set the hysteresis setting trimmer (HYS) completely to the left (CCW) to set the hysteresis setting to the
minimum.
(3) Turn the pressure setting trimmer (S1 or S2, SW) with a small screwdriver, setting it to the required
setting.
(4) Set the MODE switching switch to the pressure display mode (ME), apply pressure and confirm that the sensor
actually operates.
• For vacuum sensors with 2-point switch output:
Switch output 1 (S1): The operation LED (red) turns on when set pressure is exceeded.
Switch output 2 (S2): The operation LED (green) turns on when set pressure is exceeded.
• For vacuum sensors with analog output:
Switch output (SW): The operation LED (red) turns on when set pressure is exceeded.
2.Setting hysteresis
(1) The hysteresis is adjusted with the hysteresis setting trimmer (HYS).
(2) The hysteresis adjustment range is about 0 to 15% F.S. Hysteresis increases when the trimmer is turned to
CW.
(3) Checking hysteresis
Set the MODE switching sensor to the pressure display mode (ME), and gradually increase and decrease the
pressure near the set pressure. Read the values at which the operation indicator turns ON and OFF. The
difference of the displayed values is the hysteresis.
[Example of hysteresis adjustment]
· If pressure has a pulse and output is thin and intermittent, use large hysteresis.
· To set the tolerable range of the pressure drop:
Vacuum related components
Handling the vacuum sensor
Vacuum ejector/vacuum unit
Precautions
164
Vacuum ejector/vacuum unit
VSX/VSXP series
Precautions related to vacuum sensor
(1) Do not use this vacuum sensor in fluids or in an atmosphere with corrosive substances. The sensor may fail.
(2) Do not use wiring or applications that may cause noise (surge), etc., to be applied. The sensor may fail.
(3) Do not use this vacuum sensor in an atmosphere containing fluids or flammable or explosive gases. This device
is not explosion-proof, so faults may occur.
(4) Do not use this vacuum sensor where it may be exposed to water, oil, or dust. This device is not drip-proof, so
faults may occur.
(5) Do not use this vacuum sensor for applications that generate heat exceeding the working temperature
range. The sensor may fail.
(6) Turn power off before wiring. Check the lead wire color during wiring, and check that the output terminal, power
terminal, and COM terminal are not short-circuited. The sensor may fail if these terminals are shortcircuited.
(7) Do not apply excessive tension or bend the connector cable excessively. Wires or connector section may break.
(8) The performance will not change if a pressure of about 0.5 MPa is applied momentarily, but check that a pressure
of 0.2 MPa or more is not constantly applied during vacuum break.
(9) When setting pressure or hysteresis, use a small screwdriver, and gently turn the trimmer within its rotation range.
Do not force it. The trimmer or PCB may be damaged if excessive force is applied during adjustment.
(10) Use stabilized DC power.
(11) Insert a surge voltage absorption circuit in the relay or solenoid valve, etc., connected to the output
terminal or power terminal. Avoid uses in which current exceeds 80 mA.
(12) Ground the FG terminal when using unit power, such as switching power.
(13) Do not short-circuit the output terminal (black or gray lead) with other terminals.
(14) Do not apply excessive external impact or force to the sensor.
Adjusting the vacuum break air flow rate
When the vacuum break air flow rate adjusting needle is turned right (CW), the flow rate will decrease, and when
turned left (CCW), the flow rate will increase. After adjusting, securely tighten the lock nut with a tightening torque
of 0.1 to 0.3 N.m.
*. Use a flat-tip screwdriver when adjusting the vacuum release air flow rate.
Lock nut
Left turn: Increases vacuum
break air flow rate
Vacuum release air flow rate
adjusting needle
165
Right turn: Decreases vacuum
break air flow rate
Vacuum ejector/vacuum unit
Replacing the filter element
Filter packing
Filter element
(Type: VSX-E)
Filter window
Vacuum pad
To replace the filter element, first remove
the vacuum port piping. Loosen the screw in
the joint (at the back of the tube insertion
port) with a 2.5 mm diameter or smaller
Phillips screwdriver (Note), and remove the
vacuum port. Replace the filter element,
confirm that the filter packing is attached,
and install the filter element and filter
window on the vacuum port. Securely
tighten the vacuum port on the component
with a tightening torque of 0.3 to 0.5N.m.
Note: Check that the screwdriver does not
interfere with the lock jaw. The tube
tensile strength will drop if the lock jaw
is scratched or deformed.
Phillips
screwdriver
Vacuum related components
Replacing the silencer element
To replace the directly installed silencer
element, first remove the set pin with a flat-tip
screwdriver. After removing and replacing
the silencer element, securely insert the set
pin.
Silencer element
(Type: VSX-SE)
Silencer element
Type: VSX-EF (Vacuum characteristics: H10, L10, E10, H07, L07)
Type: VSX-ED (Vacuum characteristics: E07, H05, L05)
To replace the DIN rail installed silencer
element, first remove the DIN rail fixing
screw with a Phillips screwdriver. Next, use a
flat-tip screwdriver to remove the set pin.
Remove and replace the silencer element,
securely insert the set pin, and screw in the
DIN rail fixing screw.
Silencer element
Type: VSX-EF (Vacuum characteristics: H10, L10, E10, H07, L07)
Type: VSX-ED (Vacuum characteristics: E07, H05, L05)
Silencer element
Type: VSX-SE
Element holder
Spring
Phillips screwdriver
Nut
Related components
Stop pin
Inch/NPT specifications
Element holder
Stop pin
DIN rail fixing screw
166
Vacuum ejector/vacuum unit
VSX/VSXP series
Replacing the Valve filter element
To replace the Valve filter element, first
remove the pilot valve for vacuum supply.
After removing and replacing the valve filter
element, confirm that the pilot packing for
the vacuum supply pilot valve is attached,
and securely tighten the mounting screws
with a tightening torque of 0.3 to 0.35 N.m.
Pilot valve fixing screws
Pilot valve for vacuum supply
Valve filter element
(type: VSXP-E)
Removing and cleaning the nozzle and diffuser
Remove the silencer element and fixing screws (see drawing below), and pull out the diffuser with a pair of radio
pliers, etc. To prevent the nozzle from popping out, cover the exhaust port with a piece of cushioning
material (i.e., sponge), and supply the vacuum generating air (Note 5). The air will force the nozzle out, so remove
the cushioning material and remove the nozzle.
Remove all matter on the inner of the nozzle and diffuser and the seal with compressed air or by wiping it off (Note 6).
Assemble the nozzle on the diffuser, and carefully set it on the component so that the nozzle does not drop off.
Press the diffuser in so that the diffuser groove (see drawing below) and fixing screw holes are aligned, and
tighten the fixing screws with a tightening torque of 0.25 to 0.35 N.m. See "Replacing the silencer element" for
details on installing the silencer element.
(Note 5) <Warning> Do not face the nozzle outlet toward personnel while air is supplied to the product. The
nozzle could pop out and cause injury.
(Note 6) Do not scratch the inner nozzle and diffuser or the seal. The performance could drop.
Nozzle
Diffuser
167
Fixing screw
Vacuum ejector/vacuum unit
Replacing the unit with manifold
Vacuum related components
Vacuum pad
Removing the unit
· Stop the air supply, and exhaust any
residual pressure.
· Turn the power OFF and disconnect the
wiring.
· Remove the fixing screws with a Phillips
screwdriver.
· Using a flat-tip screwdriver, press the lock
lever fully and remove the unit.
Installing the unit
· Check that the O-rings are attached to the
supply port and exhaust port.
· Pull the lock lever fully toward the front,
and install the unit.
· Press down on the unit from above, and
securely fix the lock lever with the lock
lever fixing screw.
Lock lever
Lock lever fixing screw
Phillips screwdriver
Tapping screw
Silencer element
(Type: VSXPM-SE)
Silencer cover
Related components
Removing the silencer element
· Remove the four tapping screws with a
Phillips screwdriver.
· Remove the element cover, and replace
the silencer element (type: VSXPM-SE).
Installing the silencer element
· Tighten the four tapping screws with a
Phillips screwdriver (tightening torque: 0.4
to 0.5 N.m).
Inch/NPT specifications
Replacing the manifold silencer element
168
Vacuum ejector/vacuum unit
VSX series
Preparing the VSXM mixed manifold specifications
Mixed manifold model No. (Example)
VSXM -
(A)
(B)
(C)
Z
00
Z
(D)
- CX
(E)
(F)
6
5
(G)
-
(H)
3
-
5
(I)
- K
Mixed manifold specification sheet (Example)
Layout position
Vacuum ejector model No.
(D)
1
(I)
2
3
4
5
6
7
8
9
10
Quantity
(A)
(B)
(C)
VSXM -
H
07
B
-
4
- DW
2
VSXM -
E
07
B
-
6
- DW
2
VSXM -
E
07
A
-
6
- DA
1
VSXM -
-
-
VSXM -
-
-
<Specifications when only output port size joints are mixed>
Mixed manifold model No. (Example)
VSXM -
(A)
(B)
H
07
(C)
(D)
B - CX
(E)
(F)
4
4
(G)
-
(H)
3
-
5
(I)
- DW
Mixed manifold specification sheet (Example)
Layout position
Vacuum ejector model No.
(D)
(I)
1
2
3
4
5
6
7
8
9
10
Quantity
(A)
(B)
(C)
VSXM -
H
07
B
-
4
- DW
2
VSXM -
H
07
B
-
6
- DW
3
VSXM -
-
-
VSXM -
-
-
VSXM -
-
-
L side
Vacuum port (V)
Air supply port (PS)
St.1
St.2
St.3
St.4
169
Exhaust port (EX)
R side
<Completing the form>
· Piping locations start from the vacuum port, and are set in order from
the left.
· Indicate the total number of designated product models required at
the far right in the table.
Person in
charge
Quantity
sets
Slip No.
Vacuum ejector/vacuum unit
VSXM mixed manifold specification sheet
Date of issue:
Customer
name
Person in
charge
Delivery
Order No.
Order No.
Mixed manifold model No.
(B)
(C)
VSXM -
(D)
(E)
(F)
(G)
-
(H)
-
(A) Vacuum characteristics Note 1, Note 2
-
(I)
-
(F) Exhaust port (EX)
H
High vacuum medium flow rate type
S
Atmospheric exhaust with silencer
L
Medium vacuum large flow rate type
6
ø6 push-in joint common exhaust
E
High vacuum small flow rate type
8
ø8 push-in joint common exhaust
Z
For mixed specifications (Indicate details in specificationsheet.)
10
ø10 push-in joint common exhaust
(G) Solenoid valve voltage
(B) Nozzle diameter Note 1, Note 2
05
ø0.5
1
100V AC
07
ø0.7
3
24V DC
10
ø1.0
00
For mixed specifications (Indicate details in specificationsheet.)
(H) Number of manifold stations
(C) Valve type
Normally closed
D
Double solenoid
Z
For mixed specifications (Indicate details in specifications.)
ø6 push-in joint
1-point NPN output + analog output with LED display
AO
Analog output
Z
Note on model No. selection
For mixed joints (Indicate details in specificationsheet.)
Note 1: (A)E and (B)05 cannot be combined.
Note 2: Only (B)00 is selectable for (A)Z.
Only (A)Z is selectable for (B)00.
(E) Air supply port (PS)
4
ø4 push-in joint
6
ø6 push-in joint
8
ø8 push-in joint
10
ø10 push-in joint
For mixed specifications (Indicate details in specification sheet.)
Mixed manifold specification sheet
Layout position
Vacuum ejector model No.
(A)
(B)
(C)
(D)
(I)
VSXM -
-
-
VSXM -
-
-
VSXM -
-
-
VSXM -
-
-
VSXM -
-
-
1
2
3
4
5
6
7
8
9
10
Quantity
Inch/NPT specifications
6
2-point NPN output with LED display
DA
Related components
ø4 push-in joint
DW
Vacuum related components
Blank No vacuum sensor
(D) Vacuum port (V)
4
2 to 10 2 stations to 10 stations
(I) Vacuum sensor specifications
B
CX
Vacuum pad
(A)
170
Vacuum ejector/vacuum unit
VSXP series
Preparing the VSXPM mixed manifold specification sheet
Mixed manifold model No. (Example)
VSXPM -
(A)
(B)
(C)
(D)
Z
CX
6
8
(E)
-
3
(F)
-
5
(G)
-
Z
Mixed manifold specification sheet (Example)
Layout position
Vacuum switchover unit model No.
2
1
(G)
3
4
5
6
7
8
9
10
Quantity
(A)
(B)
VSXPM -
D
4
- DW
3
VSXPM -
D
4
- DA
1
VSXPM -
T
6
- DW
1
VSXPM -
-
VSXPM -
-
<Specifications when only output port size joints are mixed>
Mixed manifold model No. (Example)
VSXPM -
(A)
(B)
(C)
(D)
D
CX
6
6
(E)
-
3
(F)
-
5
(G)
- DW
Mixed manifold specification sheet (Example)
Layout position
Vacuum switchover unit model No.
1
(G)
2
3
4
5
6
7
8
9
10
Quantity
(A)
(B)
VSXPM -
D
4
- DW
3
VSXPM -
D
6
- DW
1
VSXPM -
-
1
VSXPM -
-
VSXPM -
-
L side
Vacuum port (V)
Vacuum supply port (PV)
St.1
St.2
St.3
St.4
St.5
St.6
St.7 St.8
171
R side
Pilot air supply port (PS)
<Completing the form>
· Piping locations start from the vacuum port, and are set in order
from the left.
· Indicate the total number of designated product models required
at the far right in the table.
Person in
charge
Quantity
Slip No.
sets
Vacuum ejector/vacuum unit
VSXPM mixed manifold specification sheet
Date of issue:
Customer
name
Person in
charge
Delivery
Order No.
Order No.
Mixed manifold model No.
(A)
(B)
(C)
(D)
(E)
VSXPM -
-
(F)
-
-
(F) Number of manifold stations
2 to 10 2 stations to 12 stations
D
2-way valve specifications
T
3-way valve specifications
Z
For mixed specifications (Indicate details in specificationsheet.)
(G) Vacuum sensor specifications
(B) Vacuum port (V)
Blank No vacuum sensor
DW
2-point NPN output with LED display
4
ø4 push-in joint
DA
1-point NPN output + analog output with LED display
6
ø6 push-in joint
AO
Analog output
CX
Vacuum pad
(A) Valve type
(G)
For mixed joints (Indicate details in specificationsheet.)
Z
For mixed specifications (Indicate details in specificationsheet.)
ø6 push-in joint
8
ø8 push-in joint
10
ø10 push-in joint
(D) Vacuum supply port (PV)
4
ø4 push-in joint
6
ø6 push-in joint
8
ø8 push-in joint
10
ø10 push-in joint
(E) Solenoid valve voltage
1
100V AC
3
24V DC
Mixed manifold specificationsheet
Layout position
Vacuum switchover unit model No.
(A)
(B)
(G)
VSXPM -
-
VSXPM -
-
VSXPM -
-
VSXPM -
-
VSXPM -
-
1
2
3
4
5
6
7
8
9
10
Quantity
Inch/NPT specifications
ø4 push-in joint
6
Related components
4
Vacuum related components
(C) Air supply port (PS)
172