Design of Self-Biased Fully Differential Receiver and Crosstalk Cancellation for Capacitive Coupled Vertical Interconnects in 3DICs Myat Thu Linn Aung1, Eric Lim2, Takefumi Yoshikawa3, Tony T. Kim1 1 VIRTUS, School of EEE, Nanyang Technological University, Singapore (aung0038@e.ntu.edu.sg; thkim@ntu.edu.sg). Panasonic Semiconductor, Singapore. 3Mixed-signal Technology Development Division, Panasonic Corporation, Japan. 2 Abstract—Interconnect density in traditional capacitive coupling electrodes array is limited by capacitive crosstalk between electrodes. In this work, we propose an array structure where single-ended and differential pair electrodes (designed in the common-centroid structure) are alternatively placed horizontally and vertically. The proposed structure not only cancels out the crosstalk noise but also reduces the spacing requirement between electrodes. A novel self-biased fully differential receiver suppresses the common-mode coupled crosstalk in the differential electrodes. The receiver provides CMRR of 25dB and can recover wide band (10 kHz ~ 1 GHz) signals with 32dB gain. It consumes 25 µW at 1 GHz. It is designed and simulated in a 1.5V 0.13µm CMOS technology. I. INTRODUCTION Three dimensional (3D) integration technology has been considered as a solution to complex system integration making heterogeneous integration viable. With the 3D integration, vertical interconnects become possible, which improve the interconnect density, communication distance, propagation delay, dynamic power consumption, and form factor. Microbump technologies provide face-to-face connections between two dies while through-silicon-via (TSV) technologies facilitate the stacking of multiple dies. Nonetheless, these benefits come with huge cost due to additional post processing and fabrication process steps. Moreover, the TSV technologies are not mature yet and have various issues related to mechanical and thermal stresses. Additional constraints such as dummy TSVs and large guard spaces have to be considered to relieve the mechanical stress in TSVs during manufacturing resulting in substantial silicon area overheads [1]. Alternative low cost options have been studied in literature such as inductive coupling [2] and capacitive coupling interconnects [3]. The use of coupling effect eliminates physical connections where ESD protection is essential, improving the overall performance of the coupling electrodes. The performance of the inductive coupling interconnect is comparable to TSVs in term of silicon usage, data rate, power consumption and ability to integrate multiple dies. Additional benefits are low cost, relaxed overlay alignment, high yield, and higher reliability compared to the physical counterparts Figure 1. An example of capacitive coupling interface with face-to-face die stacking [4]. Compared with the above interconnect technologies, capacitive coupling based interconnects allow better performance except it is only limited to the face-to-face configuration. In this interconnect, digital signal can be directly transferred to the receiving die through the coupling node [5]. Moreover, [6] demonstrated the signal recovery circuit using Non-Return-To-Zero (NRZ) coding achieving 1.27Gb/s/pin. [7] pushed the data rate even further to 10Gb/s/pin by implementing UWB impulse-shaping and RF modulation scheme into capacitive coupling interconnect. Several approaches have been reported to better utilize the capacitive electrode area by introducing bi-directional [8] and simultaneous bi-directional signaling [9]. Despite the above advancements, [10] pointed out that the density of capacitive coupling interconnects is limited by capacitive crosstalk. Due to this, interconnects are spaced by a distance, which contributed to area overhead, in order to minimize the crosstalk as well as to improve Bit-Error-Rate (BER) [7]. In this work, we propose a design solution to solve the crosstalk issue by careful planning in electrodes array layout and receiver design for the direct digital signal transmission. A novel self-biased fully differential receiver is incorporated to reject any common-mode noise occurred at the differential pair electrodes. With the proposed solution, the capacitive coupling interconnects can be placed closer improving overall interconnect density. II. As demonstrated in Fig. 1, coupling capacitors are formed when the TX electrodes and RX electrodes meet face-to-face. Panasonic Semiconductor, Singapore sponsors this work under Join Industrial Postgraduate Scholarship. 978-1-4673-5762-3/13/$31.00 ©2013 IEEE PREVIOUS SINGLE-ENDED RECEIVER AND LAYOUT 966 To form reasonable amount of capacitance, the distance between two electrodes is maintained in a few µm range. Due to vertical integration, overall interconnect distance is short leading the signal flight time across interconnect to be shorter than the signal rise or fall time. Therefore, it can be modelled as lumped capacitive load and the coupled voltage at RX can be approximated as: ∆V= CC CC +CPRX ×VDD (1) where CC is coupling capacitance and CPRX is the parasitic capacitance associated with RX electrode. Equation 1 suggests that parasitic capacitance should be minimized to improve the coupling voltage. However, when implementing high-density capacitive coupling electrodes, one of the most challenging issues is the crosstalk between neighbouring electrodes. Two types of crosstalk (inductive and capacitive crosstalk) have been discussed in the literatures but in this voltage mode interconnect, capacitive crosstalk is dominant. Fig. 2(a) illustrates parasitic coupling components between two interconnects including the crosstalk components such as CRX, CTR, and CTX. CTX is less significant among the three crosstalk components because both TX<0> and TX<1> are low impedance nodes driven by two transmitters. Although the value of CTR is small compared to that of CRX, its crosstalk effect is also significant as it is direct coupling from a low impedance node to a high impedance node. Figure 2. (a) Illustration of capacitive components between two interconnects. (b) Simple demonstration of capacitive crosstalk components in 3 × 3 array. Figure 3. Single-ended receiver with gain stage and a latch. A 3 × 3 RX array is demonstrated in Fig. 2(b) where all the crosstalk components associated with RX are lumped into CLUMP where (2) Obviously, the central electrode, RX<4> undergoes the largest amount of crosstalk noise, possibly leading to a failure in data recovery. This is especially for the single ended receiver whose input is adaptively biased at a voltage level with high sensitivity (Fig. 3) [11]. Fig. 4 shows the transient response of the receiver output (RX_OUT) when the emulated crosstalk noise at 2GHz with 70mVp-p is added to the RX node. The receiver output (RX_OUT) demonstrates its vulnerability to ac noise that is also amplified together with the input signal. Failure in data recover happens when the output noise exceeds the noise margin of the latch. III. Figure 4. Transient response of the single-ended receiver in the present of crosstalk noise. RX<6> RX<6> In this section, a novel electrode array (extendable to n × n array) structure is proposed to tackle the crosstalk effect together with the newly developed self-biased fully differential amplifier. A. Electrode Array Layout As explained in the previous section, single-ended capacitive interconnects have limitation in placement due to the multiple crosstalk factors. They require sufficient spacing between electrodes to minimize crosstalk. The impact of crosstalk in electrode spacing is presented in [10] where the single-ended capacitive electrodes require more than 3µm 967 RX<8> RX<7> Differential crosstalk currents are cancelled PROPOSED SELF-BIASED FULLY-DIFFERENTIAL RECEIVER AND ELECTRODE ARRAY LAYOUT RX<8> Crosstalk component RX<3> RX<4> RX<4> ICM IDF ICM RX<0> ICM ICM IDF IDF RX<0> Mutual Coupling RX<1> Single‐ended electrode CC CPRX CC+CPRX RX<5> IDF Common‐mode crosstalk currents are added equally RX<2> RX<2> Common‐centroid differential pair electrode CLUMP =CTR + Figure 5. Proposed distributed array structure in 3 × 3 array configuration. spacing so that the receiver can properly recover the data. However, this spacing is also subject to the electrode size and the type of data transmission whether it is direct transmission, coded transmission or RF modulation [7]. Shielding and twisted differential line structures can be a solution to suppress crosstalk between long transmission lines. However, it is not feasible in capacitive electrodes since they are only implemented in a top metal plane. This provides no room to cancel the capacitive crosstalk from neighbouring multiple electrodes. To address this issue, we propose a distributed single-ended and differential electrodes structure (Fig. 5). In the distributed structure, the single-ended and differential pair electrodes are placed in an alternate fashion in the horizontal and vertical directions in a top metal plane. The common-centroid differential pair electrodes not only achieve good matching between the electrodes pair but also cancel out the capacitive crosstalk. For example, when electrodes are perfectly aligned, signal transitions in differential electrode (RX<4>) does not cause crosstalk to the facing single-ended electrodes (RX<1, 3, 5, 7>) as the crosstalk currents (IDF) are always cancelling each other. This help to improve the performance of the neighbouring singleended electrodes. In addition, signal transitions in the singleended electrode (RX<5>) only affect the common-modevoltage of the differential electrodes (RX<2, 4, 8>) as the same amount of crosstalk current (ICM) is flowing to each of the neighbouring differential pair. Such common-mode shift is effectively suppressed by the proposed receiver addressed in section III (B). With the aid of the proposed crosstalk cancellation technique, the achievable minimum spacing between electrodes is only limited by the fabrication capability and alignment precision between two dies. Figure 6. Proposed self-biased fully differential receiver. Figure 7. Input and output waveforms of the proposed receiver. B. Receiver Design Followings are the key features of the proposed receiver for recovering the capacitively coupled differential signal. • Transistors count has to be small so that it can be placed just underneath its electrodes. • High common-mode-rejection-ratio (CMRR) is necessary to reject any common-mode noise caused by the neighbouring single-ended electrodes. • Self-biasing at the input would be advantages especially to detect small voltage change. • Native mutual coupling in the common-centroid differential pair electrodes (Fig. 5) results in attenuation of coupled signal. Moreover, when the electrodes in the array are placed close to one another, stray capacitance increases and the signal is further attenuated. Therefore, a high gain receiver is required to provide enough voltage swing at the output. To meet the above requirements, we propose a receiver (Fig. 6) with two differential amplifiers where two inputs (RX and RX ) are connected to either positive or negative input of each differential pairs. The current mirror load at each amplifier is essential to achieve high CMRR. In addition, the diode connected transmission gates (T1 and T2) 968 Figure 8. (a) Simulation results of receiver gain and its output phase shift. (b) Common-mode-rejection-ratio of the receiver. provide self-biasing capability to each amplifier's input. The impedance of the diodes are dynamically varied depending on the amplifier output voltage bringing the voltage level of both coupled signals (RX and RX) to a DC level (VDD ⁄2) after an output transition occurs (Fig. 7). This leaves the input impedance high after that and ready to sense the next signal transition. The threshold voltage drop across the diode connected transmission gates limits the peak-to-peak output swing (OUT and OUT ). The output swing can be approximated as: VDD ⁄2 VTHP < VOUT < VDD ⁄2 IV. VTHN (3) SIMULATION RESULTS This section analyses voltage gain, phase shift, commonmode-rejection-ratio and transient waveforms of the proposed receiver. The receiver is designed and simulated using a commercial 0.13µm CMOS technology. The simulation includes the coupling capacitance (CC) of 1fF, the stray capacitance of 500aF, and 1fF for the mutual coupling between RX and RX respectively. Two transistors inverter is used as a load at the output of each differential receiver. Simulation result (Fig. 8(a)) shows that the maximum voltage gain of receiver is 32dB and its cut-off frequency is around 1GHz. At the frequency of higher than 1GHz, total biasing time (tSB) which is limited by the RC of T1 or T2, becomes larger than the period of the signal resulting in next signal transition to happen before completing the biasing. As a result, the receiver becomes less sensitive to coupled signal and the voltage gain drastically rolls off beyond 1GHz. Despite the bandwidth of 1GHz, the receiver still provides a reasonable voltage gain up to a few GHz. Positive phase at the lower frequency is due to the leakage injected into the input nodes mainly through the transmission gate. Therefore, the lowest and safest operating frequency of the receiver is concluded as 10 kHz. Based on Fig. 8(b), the CMRR of the receiver is as large as 25dB within the pass-band where the maximum CMRR of 28dB is located at 5MHz. Figure 9. Transient waveforms demonstrating the common-mode suppression. Transient analysis is also conducted to see the effect of CMRR in time domain. In this analysis, a 500Mbps differential signal is applied to the input node (IN and IN). In addition, a 2GHz common-mode noise signal having 200mV peak-to-peak voltage (more than two times the magnitude of the injected noise to RX in Fig. 4) is also applied to RX and RX . The recovered signals from two differential outputs clearly show that the inserted common-mode noise is effectively suppressed as shown in Fig. 9. The proposed receiver consumes 25µW at 1GHz. V. CONCLUSION We have presented both the electrode array layout and circuit approaches to achieve highest interconnects density by eliminating capacitive crosstalk. Parting from the conventional electrodes array structure, we introduce the distributed array wherein single-ended and differential pair electrodes are placed in alternative fashion. 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