8. Semiconductors What does it mean semiconductor? • the term semiconductor indicates that the electrical conductivity of such materials is lying in between that one of metals and insulators • good metals have at room temperature an electrical resistivity of about 10-7… 10-8Ωm, whereas good insulators have values of about 1012Ωm; for semiconductors the resistivity varies typically between 104Ωm and 107Ωm • semiconducting elements with a simple crystal lattice can be found in the 4th main group of the periodic table, where mainly silicon and germanium (diamond-type semiconductors) are of industrial importance; diamond (carbon) belongs rather to the insulators and lead to the metals; thin can appear as metallic or semiconducting allotrope • further semiconducting elements are: red phosphorus, baron, selenium and tellurium with quite complicated crystal structures • nomenclature for semiconductor compounds: (1) compounds of chemical formula AB, where A is a trivalent element and B is a pentavalent element, are called III-V (three-five) semiconductors; examples are gallium arsenide (GaAs) and indium antimonite (InSb); GaAs of some interest for high-speed electronic devices 380 (2) where A is divalent and B is hexavalent, the compound is called II-VI semiconductor; examples are zinc sulphide (ZnS) and cadmium sulphide (CdS) (3) an example for a IV-IV compound is silicon carbide (SiC) • at zero temperature semiconductors behave like insulators: the lower energy bands are completely occupied with electrons while the bands above are completely empty so that no charge transport occurs • at finite temperatures there are electrons in the conduction band, which are thermally excited from the valence band; both, the electrons in the conduction band as well as the holes in the valence band contribute to electrical conductivity • for technical applications, the deliberate addition of impurities and imperfections (doping) drastically affect the electrical properties of semiconductors • the doping of semiconductors allows to modify the physical properties of the material in accordance with the technical needs 8.1. Intrinsic Crystalline Semiconductors Band Gap and Optical Absorption • in semiconductors the uppermost completely occupied energy band is called valence band, while the empty band above is called conduction band 381 electron energy overlap EC conduction band Fermi level EV metal semiconductor valence band insulator EG= EC-EV band gap (forbidden band) band scheme for intrinsic conductivity in semiconductors; at T = 0K the conductivity is zero as all states of the valence band are filled and all states of the conduction band are vacant; if the temperature is increased, the electrons are thermally excited and pass on from the valence band to the conduction band, where they become mobile; such carriers are called intrinsic; the energy of the lower edge of the conduction band is EC, the energy of the upper edge of the valence band is EV; the forbidden band (or energy gap) is EG=EC-EV • the energy of the upper edge of the valence band is EV, the energy of the lower edge of the conduction band is EC; the band gap EG=EC-EV in between these two bands is for many electronic properties of great significance • the band gap depends only weakly on temperature; from low temperatures upward the gap decreases first quadratically and then linearly with temperature; the total decreases up to room temperature is only about 10% and is caused by thermal expansion and effects of electron-phonon interaction • if the maximum of the valence band (valence band edge) and the lowest minimum of the conduction band (conduction band edge) occur at the Γ point (the origin of the first Brillouin zone), the gap is called direct band gap and the semiconductor is called direct semiconductor 382 • if both extreme occur not at the same point, we have an indirect gap and the semiconductor is said to be an indirect semiconductor • band gap for some selected semiconductors at room temperature, zero temperature and type of gap semiconductor EG (T = 300K) [eV] EG(T = 0K) [eV] type of band gap diamond 5.47 5.48 indirect Si 1.12 1.17 indirect Ge 0.66 0.75 indirect GaP 2.26 2.32 indirect GaAs 1.43 1.52 direct InSb 0.18 0.24 direct InP 1.35 1.42 direct CdS 2.42 2.58 direct after Hunklinger • the electronic band structure of the technically important semiconductors gallium arsenide and germanium are shown below; the graphs show calculations of the electronic band structure, the results of which were fitted to the data of spectroscopic measurements • silicon is the semiconductor of greatest technical importance, the electronic band structure of silicon is very similar to that of germanium 383 4 EG 0 energy E [eV] energy E [eV] 4 - 4 - 8 -12 - 4 - 8 -12 L (a) EG 0 Γ X U,K wavevector k L Γ (b) Γ X U,K wavevector k Γ after Hunklinger electronic band structure of gallium arsenide (a) and germanium (b); the band gap is shown in grey; (a) valence band maximum and conduction band minimum meet each other at the Γ point, gallium arsenide is a direct semiconductor; (b) for the indirect semiconductor germanium the valence band maximum occurs at the Γ point while the lowest conduction band minimum occurs at L point • as can be seen from the graph, GaAs is a direct semiconductor: the valence band maximum and the r conduction band minimum occur at the same value of k • for germanium the valence band maximum also occurs at the Γ point; however, the conduction band minimum from across has not the smallest distance in energy to the valence band; the lowest conduction band minimum occurs in the 111 direction at the L point 384 • optical absorption allows to measure the band gap in a very simple manner: a phonon is absorbed by the crystal with the creation of an electron and a hole; the electron transits into the conduction band, while in the valence band a hole remains (inter-band transition) EC ħωγ EV absorption α [cm-1] energy E • note: for a vacuum wave length λ = 500 nm (green light) we get ħωγ = 2.48 eV which is in the same order of magnitude as for example the band gap of cadmium sulfide (CdS) at room temperature EG = 2.42 eV! 104 InSb 102 T = 77 K 0 (a) wavevector k 100 (b) 0.2 0.4 0.6 0.8 after Hunklinger energy ħωγ [eV] optical absorption for direct semiconductors; (a) schematic diagram of the absorption process; the fat blue arrow represents the transition with the lowest possible energy; at higher photon energies deeper-seated electrons are excited; (b) optical absorption coefficients α (I = I0e-αd, d thickness of crystal sample) of indium antimonite in a logarithmic scale as a function of the energy of the irradiated photons 385 • in a direct absorption process the transition of rthe electron in the electronic band scheme appears to be vertical as the momentum of the phonon h k γ is small compared to the typical momentum of a crystal electron • as the electron has to jump over the band gap, a photon can only be absorbed, if its energy exceeds the minimum value (threshold energy) hω γ = E C − E V = EG • therefore, many semiconductors are transparent in the near infrared (NIR); note: for λ = 1.5µm we get hω γ = 0.8 eV • above the threshold energy, which is given by the band gap, the optical absorption increases rapidly with increasing frequency, cf. the graph for indium antimonite; such a steep slope is typical for direct semiconductors • the indirect absorption process is a little more complicated 386 absorption α [cm-1] energy E E′C EC EV 103 T = 300K T = 77K 101 Ge 0 (a) wavevector k km 10-1 0.6 (b) 0.7 0.8 0.9 energy ħωγ [eV] 1.0 after Hunklinger optical absorption in the case of an indirect band gap: (a) schematic diagram of the absorption processes; the energy of the conduction band minimum at the Γ point is denoted by E'C; the transition with smallest possible energy (solid arrow) requires the assistance of a phonon; the direct transition is shown by a dashed arrow; (b) optical absorption coefficient α of germanium in a logarithmic scale as a function of the energy of the irradiated photons; the weaker indirect absorption comes in before the direct absorption process starts • the absorption comes in already at photon energies smaller than the energy difference of conduction band and valence band at the Γ point E'C −E V 387 r • if the lowest conduction band minimum occurs at k m ≠ 0, than a direct transition is impossible because of the small value of the photon momentum; for reasons of conservation of energy and quasi momentum the assistance of a phonon is required r r • if ω q is the circular frequency of the phonon and q is the wavevector, we find for the generation of an electron-hole pair with the smallest possible energy the following conditions hω γ ± hω rq = EG r r r and hkγ ± hq = h km r r • for the indirect absorption process we get hω << EG and kγ << km ,or, roughly speaking, the photon provides the energy and the phonon the required momentum for the transition r q • the probability of the occurrence of an indirect absorption process is much smaller than that of the direct absorption as the electrons have to couple to the phonons; consequently, indirect processes give rise to weak absorption effect as can be seen from experimental results above • the absorption coefficient is rather small at the threshold energy (absorption edge) and is increasing with the photon energy; obviously, the slope of the absorption graph further increases at the onset of the direct processes • note: the absorption edge varies with temperature as the band gap EG increases with decreasing temperature 388 Effective Mass of Electrons and Holes • the electrical properties of semiconductors are mostly determined by the electrons at the minimum of the conduction band and the holes at the maximum of the valence band; therefore, the band structure in these ranges of energy needs to be studied in more detail • as known from elsewhere, the effective mass of electrons and holes is determined by the band curvature; around the extremes of the band the curvature of the energy curves is approximately constant and therewith also the dynamic effective mass m*, which is just there in good agreement with the cyclotron mass 0.0 cyclotron resonance measurements at a germanium sample at 4K and 23 GHz; for the crystal orientation chosen here, all types of charge carriers can be observed while varying the magnitude of applied magnetic field; the maxima caused by the electrons originate from different extremal orbits in the conduction band; the maxima marked with a star (*) are higher harmonics of heavy holes heavy mass holes electrons electrons absorption light mass holes electrons • for semiconductors the cyclotron resonance is a very useful method to determine the masses of electrons and holes; as in semiconductors the skin depth in the microwave range is quite large, mostly one single resonance is observed for a given mass 0.1 0.2 0.3 magnetic field B [T] 0.4 after Hunklinger 389 • for cyclotron resonance experiments microwaves are used: from ωC= eB/mel (mel is the rest mass of the electron) we get for a magnetic field of B = 1T a resonance frequency of fC= 23GHz • as can be seen from the experiment, a number of resonances appear if the magnetic field is tuned; these resonances can be attributed to electrons and holes in different energy bands • in the experiment shown here, the germanium crystal was oriented in such a way, that all different effective masses can be observed simultaneously • in order to get significant signals, the electrons have to run though the orbit several times without any collision, i.e. ωCτ >> 1 must be fulfilled • as at room temperature the mean time between collision τ is about 10-13s, one can get useful results only for very clean samples at low temperatures • however, in this case the small number of charge carriers is a problem; trick: by irradiation with light of energy higher than the band gap, the number of charge carriers in the sample can be increased artificially • choosing the strength and the direction of the magnetic field in a suitable manner, the masses of the different electrons and holes can be measured • for semiconductors with a direct band gap (for example GaAs) the conduction band at the Γ point determines essentially the energy is practically independent r the electronic properties; as at this point ∗ of the direction in k space, we find only one effective mass mn for electrons 390 • the dispersion relation takes the simple form h 2k 2 En = EC + ∗ 2mn (note: we use here the same indices “n” and “p” as already used elsewhere in order to distinguish between electrons and holes) • effective mass of electrons at the conduction band minimum; the indices “L” and “T” denote longitudinal or transversal, respectively (see below) semiconductor m∗n /m mn,∗ L /m m∗n, T /m GaAs 0.067 - - GaSb 0.047 - - InSb 0.015 - - InP 0.073 - - Si - 0.98 0.19 Ge - 1.64 0.082 • note: in most cases the effective mass of electrons is much smaller than the mass of the free electrons; the interaction of the electrons apparently results in a reduction of mass 391 • for semiconductors with an indirect band gap, such as silicon or germanium, the band structure is more complex; as already mentioned, for germanium the conduction band minimum is parallel to the 111 direction close to the L points and for silicon one finds the minima parallel to the 100 direction close to the X points r close to the minimum the E(k) surface is not isotropic but has an ellipsoidal shape • in the reduced zone scheme the surfaces of constant energy of the conduction band in germanium are halves of ellipsoids located of the L points with the major axes parallel to the 111 directions surfaces of constant energy (halves of ellipsoids) of the conduction electrons in germanium shown in the reduced zone scheme (first Brillouin zone); the conduction band minima appear parallel to the 111 directions at the L points, which are the centres of the ellipsoids in the periodic zone scheme after Hunklinger 392 • in the periodic zone scheme the energy surfaces are complete ellipsoids on which the electrons are circulating at cyclotron resonance measurements; depending on the direction of the magnetic field different extremal orbits contribute to the signal if the cyclotron resonance is measured at several tilt angles of the sample in the magnetic field, the shape of the energy surfaces can be investigated • because of the ellipsoidal shape, the effective mass is determined by two quantities, the longitudinal mass m∗n,Land the transversal mass m∗n,T; therefore, the energy surface close to the minimum is given by the relation 2 k12 + k 22 k 3 , En = EC + h + 2m∗n, T 2m∗n, L where the origin of the coordinate system is the corresponding minimum • for germanium the direction of k3 corresponds to the 111 direction and for silicon it corresponds to the 100 direction 2 • as the radiuses of curvature are rather different along the different directions, also the corresponding effective masses are different (for silicon and germanium see table above) • note: in the graph of cyclotron resonance shown above the four maxima, which can be attributed to the electrons, are caused by extremal orbits on different ellipsoids as the sample was not aligned along one of the preferred directions 393 • note: from the graph of the energy band structure for GaAs and Ge shown elsewhere we can see, that for those semiconductors two energy bands overlap each other in the valence band maximum; due to the different curvature of the two bands the corresponding holes have different masses and are referred as heavy mass holes or light mass holes, respectively • note: in the graph of the cyclotron resonance shown above one can find both types of holes • note: in the graph of the energy band structure a third band appears; the valence band maximum of this band is lowered by an energy ∆ compared to the two other two maxima; the charge carriers of this band are called split-holes with the effective mass m∗∆ • this lowering of energy is due the spin-orbit interaction (interaction of the electron spin with motion of electron which causes a split energy levels) • for the vast majority of semiconductors in a rough approximation the valence bands can be considered to be spherically close to the Γ point; consequently, one effective mass per band is sufficient in order to characterise the valence bands • table of effective masses of the different types of holes as well as the energy of the spin-orbit splitting for various semiconductors; the indices “H” and “L” indicate the heavy mass and the light mass holes, respectively (see below) 394 m∗p,H /m m∗p,L /m m∗∆ /m ∆ [eV] GaAs 0.45 0.082 0.17 0.34 GaSb 0.3 0.06 0.14 0.80 InSb 0.39 0.021 0.11 0.82 InP 0.4 0.078 0.15 0.11 Si 0.49 0.16 0.23 0.044 Ge 0.28 0.044 0.075 0.29 semiconductor after Hunklinger Charge Carrier Density • in semiconductors electrons as well as holes contribute to the charge transport; therefore, we get the electrical conductivity the more general expression σ = e(nµn + pµp) , where n and p are the densities of the free electrons or holes, respectively and µn and µp the corresponding mobility's • the contribution of the low mass holes dominates the total contribution of the holes to the charge transport • the density of charge carriers depends strongly on temperature, therefore also the conductivity varies strongly with temperature 395 • the intrinsic conductivity can be observed at very clean semiconducting samples: thermally excited electron are transferred into the conduction band while a hole in the valence band is left • in calculating the charge carrier concentration it is not necessary to distinguish between the direct and indirect semiconductors as in the thermal equilibrium the particular way of excitation does not play any role • the concentration of electrons n in the conduction band can be calculated from and integration of the product of the density of states and the corresponding probability of occupancy f(E,T) • as the Fermi-Dirac distribution decays rapidly with increasing energy, only the states close to the lower edge of the conduction band matter; therefore, the energy of the upper band edge can be substituted by infinity • a similar argument holds for the calculation of the concentration of holes p ∞ EV EC −∞ n = ∫ DC (E)f(E, T)dE and p = ∫ D V (E)[1 − f(E, T)]dE, where the probability of the holes is given by 1-f(E,T) as they originate from unoccupied electron states • as close to the extrema of the bands the dispersion relations have a parabolic shape, we can use for the densities of states DC and DV the expressions derived for the free-electron gas; however, the ∗ ∗ effective masses mn and mp for the different bands have to be taken into account: 396 DC (E) = D V (E) = 3 ∗ 2 n 2 3 E − EC 3 ∗ 2 p 2 3 E V − E for E < E V 2(m ) 2π h 2(m ) for E > E C 2π h • note, that conduction band and valence band are separated by the band gap EG = EC- EV; there are no states in the energy range EV < E < EC • as we will show elsewhere, in the case of the intrinsic conduction the Fermi energy is positioned about in the middle of the energy gap; this means, that the distances of the Fermi energy to the band edges |EC- EF| and |EV- EF| are much greater than the thermal energy kBT at room temperature • this allows us to simplify the integrals for the carrier concentration as we can approximate the FermiDirac distribution quite well as follows: f (E,T ) = 1 e (E −EF )/k B T 1 − f (E,T ) = e +1 1 (EF −E )/k B T ≅ e −(E −EF )/kB T +1 ≅ e −(EF −E )/kB T for E > EF for E < EF as only the decaying slopes of the Fermi-Dirac function extend into the bands, the states available there are rather poorly occupied and the classical Boltzmann distribution can be applied for the description of the charge carriers in semiconductors 397 • therefore, the electrons in the conduction band and the holes in the valence band move largely like atoms in classical gases and can be described by means of the Kinetic gas theory • note however, that this is valid as long as the Fermi level is sufficiently far away from the band edge; as we will show later this approximation of non-degeneracy can be used for intrinsic semiconductors or semiconductors with a low density of impurities • for highly doped semiconductors the Fermi energy is shifted close to the band edges or may even positioned inside the band; in this case the approximation breaks down and the semiconductor is called degenerate semiconductor • for the subsequent considerations it is important to note that the term “Fermi energy” is used in literature differently; often the chemical potential at T = 0 is called Fermi energy; we will use for the value of the chemical potential µ(T) rather the term “Fermi level” EF or EF(T) in order to avoid confusion with the term “mobility” µ (“Lieber konsequent inkonsequent; nur nicht immer dieses ewige Hin-und-Her”, Max Steenbeck) • substituting the Fermi-Dirac distribution by the Boltzmann distribution the charge carrier concentrations can be calculated easily; for example, we get for the electrons n = ∫ DC (E)f (E)de = ∞ • and with ∫ 0 (2m )32 ∗ n 2π 2 h 3 ∞ e EFkBT ∫ E − EC e −E/kBT dE EC π x e dx = 2 (R.G., p. 148, # 3.225,3) −x 398 • we find for the integral an analytical solution 3 2 m∗nk BT −(EC −EF )/k BT −(E C −EF ) /k B T n = 2 e N e = C 2 2π h 3 2 and m∗p k BT −(EV −EF )/k BT − (E V −EF ) /k B T p = 2 e = N e V 2πh 2 where the effective densities of state NC and NV introduced here, depend only weakly on temperature compared to the exponential factor • in this way we get an extensive simplification: in this approximation it looks like that we have not wide bands but two energy levels EC and EV; we will take advantage of this interpretation elsewhere • from the result we can conclude that the density of charge carriers depends on the position if the Fermi level, however the product n p not; taking into account, that the band gap is given by EG = EC- EV we get 3 n ⋅ p = NCN V e −EG /kBT ( ) 3 kBT ∗ ∗ 2 −EG /k B T = 4 ⋅ m e nm p 2 2πh 399 • the product of the carrier densities is completely characterized by the effective mass and the energy gap and has a characteristic value for each non-degenerate semiconductor at a given temperature • following the notation of thermodynamics the relation n p = const. is often called law of mass action • in the thermal equilibrium new charge carriers are permanently generated by thermal activation; after a short time they disappear again by recombination processes; during the time of its existence they diffuse along a certain distance, which is called diffusion length • note: so far we did not restrict our discussion to the case of intrinsic semiconductors; we will use the above relations and in particular the law of mass action also for the doped semiconductors • we consider now the case of intrinsic semiconductors for which the conduction electrons exclusively accrue from the valence band; in this case we get n i = pi, where the index “i” denoted quantities of the intrinsic semiconductor: ni = pi = NCN V e −EC /2kB T • band gap and calculated intrinsic charge carriers densities for some major semiconductors at 300K 400 EG [eV] ni [m-3] germanium 0.66 2.4 1019 Silicon 1.12 1.1 1016 gallium arsenide 1.42 1.8 1012 semiconductor after Hunklinger • for Si and GaAs the charge carrier density at room temperature is very low; it is nearly impossible to observe intrinsic conduction at ambient temperatures in such materials, as the carrier density due to lattice impurities is higher than the intrinsic one • the position of the Fermi level and its temperature dependence can be derived in general from the requirement of charge neutrality (all charge in a volume adds to zero); with ni = p i; for the intrinsic conduction we get m∗p NV E C + E V 3 EC + EV 1 + k B T⋅ ln = EF = + k B T⋅ ln ∗ m 2 2 2 4 NC n • at T = 0 the Fermi level is in the middle of the forbidden energy gap; if the effective masses of electrons and holes are equal (valence and conduction band have the same curvature) the position of the Fermi level does not change with temperature • different effective masses cause a shift of the Fermi level; however, the temperature variation is small compared to the energy gap 401 energy E energy E EC EF EV EC EF EV after Hunklinger (a) density of states D(E), Fermi-Dirac distribution f(E) (b) density of states D(E), Fermi-Dirac distribution f(E) density of states D(E) and Fermi-Dirac distribution for the valence and conduction band at T > 0; the electrons are shown in light blue, the holes in white; (a) semiconductor with equal densities of states in the valence as well as in the conduction band: NC=NV; (b) semiconductor with NV > NC, i.e. with a larger number of charge carriers at the valence band edge • initially the number of excited electrons (or holes correspondingly) is increasing at the band edges due to the parabolic shape of the density of states • at higher excitation energies however, the number of excited electrons drops down again because of the decreasing probability of occupancy • as for intrinsic semiconductors the numbers of electrons and holes are equal, the light blue area in the conduction band and the while area in the valence band are equal also 402 • for different densities of states (see graph on the right) this is only possible, if the Fermi level is moving towards the band with the lower density of states 8.2. Doped Semiconductors Doping • in growing real crystals the contamination with impurities cannot be avoided; normally such impurities are electrically active, i.e. they cause additional charge carriers in the bands • in very pure samples of silicon or germanium one can find about 1018 and in GaAs samples 1022 charge carriers per cubic metre instead of the intrinsic values given elsewhere intrinsic properties can be observed in germanium only • in any case, for technical purposes the electrical conductivity is too low because of the low density of charge carriers; for example, for silicon one finds for the intrinsic conductivity σi≡ n ieµn the small value σi≡10-4(Ωm)-1 • doped semiconductors: simple examples the tetravalent elements silicon and germanium; the atoms of these crystals show a tetrahedral bonding configuration to the next neighbours • inserting pentavalent atoms such as P, As or Sb into the Si crystal, the tetravalent neighbouring silicon atoms enforce the fourfold covalent bonding; the impurity atom has one excess electron not needed for the tetrahedral binding 403 • this electron cannot take part in crystal binding but is (at low temperatures) still bonded to the positive atomic core due to the Coulomb interaction impurity atoms in silicon; (a) electron donor: metaphorically speaking, the unbound electron orbits the positively charged atomic core or arsenic; (b) electron acceptor: the negatively charged atomic core of the boron is apparently surrounded by a positive charge after Hunklinger • as we will show later, the excess electrons are bounded that weakly that they already disassociate from the atomic core at room temperature • pentavalent impurity atoms in crystals with a fourfold binding are called donors as they yield an electron at room temperature • also trivalent impurity atoms such as B, Al, Ga or In can be embedded into the crystal structure at regular lattice sites; however, one electron is missing to complete the fourth bond • the missing electron is alternately (randomly) taken from one of the neighbouring silicon atoms; from outside it looks as if a positive charge is orbiting the positively charged atomic core of the impurity atom 404 • at room temperature the positive charge is yielded to the crystal lattice, or in other words one electron is permanently transferred to the impurity atom; therefore, the trivalent impurity atoms are called acceptors • Which are the physical consequences of the existence of donors in the crystal lattice? the optical absorption of donors can be described by means of the Bohr theory as in a simple approximation the motion of the electron around the positive atomic core of the impurity atom is similar to the hydrogen atom • the eigenvalues of the energy are given by 1 m * e4 1 Eν = − ⋅ 2 (4πεr ε 0 )2 h 2 ν 2 where ν is the principal quantum number (ν is used here in order to avoid confusion with the density of particles), m* is the effective mass (not the free-electron mass as for the hydrogen model), and the dielectric constant εr takes into account the screening of the Coulomb potential due to the neighbouring silicon atoms • the latter quantities cause a 100 to 1,000 times lower energy eigenvalue compared to the hydrogen atom; it is worth to note, that the effective Bohr radius 4πε r ε 0h 2 a0 = m * e2 is about 50 times larger than the radius of the hydrogen atom; about 1,000 lattice atoms are enclosed by the electron orbit! 405 • for ν = 1 one gets the ionisation energy denoted as Ed or Ea, respectively; for the donors in silicon we have εr, Si = 11.7 and m*n ≡ 0.3m and get Ed ≡ 30 meV; as the vacuum for the hydrogen atom corresponds to the conduction band in the semiconductor the ground state of the donor is 30meV below the lower edge of the conduction band energy E n-type semiconductor p-type semiconductor Ed ED EC acceptor bound energy level donor bound energy level Ea EA EV (a) x (b) x after Hunklinger energy levels of impurity atoms in semiconductors; (a) the ground state of the donor is just below the lower band edge of the conduction band EC; the ionisation energy is Ed; (b) the ground state of the acceptor is directly above the upper band edge of the valence band EV, Ea is the ionisation energy of the holes 406 • for germanium we have εr, Ge ≡ 15.8 and m*n ≡ 0.15m, therefore the ionisation energy is as low as Ed ≡ 9 meV • donor and acceptor atoms themselves are not mobile; they do not contribute directly to the conductivity; at low temperatures the impurity atoms are in the ground state and electrically neutral; at room temperatures they are charged positively or negatively because of their low ionisation energy • in the frame of the simple hydrogen model the ionisation energy does not depend on the particular donor or acceptor atom; for silicon and germanium one get the following figures donor P As Sb Bi silicon 45 49 39 69 germanium 12 12.7 9.6 - acceptor B Al GA In silicon 45 57 65 16 10.4 10.2 10.8 11.2 germanium ionisation energies given in meV for donors and acceptors in silicon and germanium • keeping in mind the very rough approximation given by the hydrogen model, we find a surprisingly good agreement with the experimental values; apparently, the screening effect can be described quite-well by the dielectric constant; the reason for that is the large radius of the “hydrogen atom” 407 • the ionisation of the donors is small and corresponds approximately to the thermal energy at room temperature; therefore, the donors are already ionised at that temperature; this is also true for the acceptors absorption coefficient α/cm-1 • from the hydrogen model one would further energy eigenvalues corresponding to the different values of the principal quantum number ν; this is indeed the case as experiments on infrared absorption show 25 Ge:Sb 20 infrared absorption of germanium doped with 7 1026m-3 antimony atoms at 9K T = 9K 15 10 5 after Hunklinger 0 6 8 10 12 photon energy E/meV 14 408 • measurements where made at low temperatures that the non-binding electron sits in the ground state; the spectrum shows a couple of absorption lines • however, the spectrum is not that simple as could be expected from the simple hydrogen model; the electrons of the donors are moving here in the crystal field with a cubical symmetry and not in the Coulomb field with spherical symmetry • above the ionisation energy of 9.6 meV (for germanium yields εr2m/m* ≡ 1,500) we can see the transition into continuous states, namely the states of the conduction band • similar spectra can be observed also for other impurity atoms as well as for other semiconductor acting as the host crystal • the theoretical description of the energy states of impurity atoms can be improved by taking into account the solid state properties of the semiconductor, in particular the real behaviour of the local electrical field (causing a splitting of the ground state and selection rules for the optical transitions) • comparing the influence of the different impurity atoms and the different host crystals we have to take into account additionally the corresponding covalent bindings and the corresponding effective masses as well as their directional dependence 409 germanium energy levels of impurity atoms in germanium; the number indicate the distance to the nearest band edge in meV; the letters A and D denote acceptor or donor levels, respectively (just in the case if the classification of the level cannot be directly derived from its position) after Hunklinger • apparently the position of the impurity atoms which not belong to the third or fifth main group cannot be explained by the simple model; in particular, chemical elements such as zinc, chromium and copper can have several charge states with different energies; gold can form in silicon four different levels and appear as donor as well as acceptor 410 Charge Carrier Density and Fermi Level • in real semiconductor materials unwanted impurities cannot be completely eliminated; therefore, also unintended donors and acceptors appear; the donors (placed at the upper edge of the energy gap) will dispense the electrons to the acceptors (placed lower energies) • this electron transfer does not create free charge carriers but the effect of the impurities compensate each other • the method to prepare highly resistive semiconductor materials where unavoidable impurities are compensated by means of a systematic addition of depends is called compensation • the energy of the quantum states forming band is practically independent of the occupation of the states; the energy does not depend on whether the state is empty, occupied with one electron or two electrons (with antiparallel spins) • this is easy to understand as the electrons are delocalised (smeared out over the whole crystal); they do not “see” each other; the single-electron approximation is valid • in contrast to that the electrons at the impurities are specially localised; apart from very sophisticated impurity atoms with different energy levels the impurity state can be empty, single or double occupied (similar to the quantum states in the bands) • in the case of a double occupation the energy of the impurity is increased significantly; this due to the increased Coulomb repulsion for the localised electrons • therefore, in terms of energy double occupied impurity states lie mostly inside the conduction band; only the neutral or single charged impurity states of importance 411 • as the impurities are either neutral or ionised we can split their density nD and nA in a neutral and a charged part: nD = nD0 + nD+ nA = n0A + n−A • the occupation of the ground state (the probability that the impurity atom is ionised) can be calculated from the Fermi-Dirac distribution −1 −1 0 0 nD 1 (ED −EF )/kBT nA 1 (EF −E A )/kB T = ⋅e + 1 = ⋅e + 1 nD gD nA g A the weightings gD and gA take into account the degeneration of the impurity states so that the usual expression for the Fermi-Dirac statistics is a little modified • for example, in a simple donor the electron can sit either spin-up or spin-down; these two possibilities give the impurity state the two fold statistical weight gD= 2; the situation is more complicated for the acceptor states where, in addition, the degeneration of the valence band has to be taken into account • in order to simplify the further considerations we drop the problem of degeneration (we are only interested in the general features) • free charge carriers can be generated either by an excitation of electrons from the valence band or by ionisation of impurity atoms • the expressions for the excitation of the band states derived elsewhere for the intrinsic semiconductors can be also used for the doped ones (note: we have not used assumption restricting the results to intrinsic charge carriers) 412 • furthermore, we have to take into account the charge neutrality of the doped semiconductors: n + n−A = p + nD− • even for our simplified approach the situation is quite complex as we have to consider four different charge carrier concentrations in a temperature dependent equilibrium • we restrict ourselves to the simple bur realistic case where one type of impurity atoms dominates: we consider a n-type semiconductor containing many donors but only a few acceptors nD>> nA n = NC e − (E C −EF )/kBT (undegenerated semiconductor with EC-EF >> kBT assumed here) nD = nD0 + nD+ nA = n0A + n−A nD0 1 = (ED −EF )/k BT nD e +1 n + n−A = nD+ + p • the doping is assumed to be that high that the contribution of the impurities to the free charge carrier concentration dominates nD+ >> p, i.e. we have extrinsic conduction; the density of the thermally excited electrons n i from the valence band can be neglected compared to the contribution from the impurity atoms 413 • a further simplification results from the assumption of a n-type semiconductor nD>> nA; in this case nearly all acceptors trap an electron from the donors and neutral acceptors practically not appear; we can neglect n 0A and get n A ≅ n −A • the charge neutrality can be written as n + n A = nD+ the occupation of states in a compensated ntype semiconductor; the states occupied by electrons are shown in blue; as representatives for the unwanted impurities (acting here as acceptors), the density of states for two acceptor levels is shown and labelled with ‘EA’ energy E EC EF ED ‘EA’ EV density of states D(E) after Hunklinger • the donors are partially ionised and have dispensed their electrons either to the conduction band or to the acceptor levels • the simplifications discussed above, allow us now to calculate the concentration of the conduction electrons n and the temperature dependence 1 n = n − nA = (nD − n ) − n A = nD 1 − (ED −EF )/ kB T − n A + 1 e + D 0 D 414 • expressing the Fermi energy by means of the effective density of states NL one obtains n(n + nA ) = NC e −Ed /kBT , nD − nA − n where Ed= EC- ED is the energy difference between the conduction band and the donor level electron density log n • qualitative temperature dependence of the conduction electron density n e e − E d /2kB T e − E d /kB T α energy E − E g /2k BT β γ δ EC ED EF reciprocal temperature T-1 electron density in the conduction band of a n-type semiconductor (top) and the position of the Fermi level (bottom) as a function of the reciprocal temperature T-1; discussion of the different temperature regions α to δ see elsewhere E C + EV 2 EV after Hunklinger 415 • compensation region (region δ): at very low temperatures kBT << Ed n << nA<< nD is valid and we get the approximate expressions − E d /k B T nD n ≅ NC e nA nD n EF = EC + k BT ln ≅ EC − Ed + kBT ln nA NC • for T 0 is the position of the Fermi level defined by the donors: EF≅ EL-Ed= ED; the donors are partially charged due to the compensation effect; therefore, the Fermi energy corresponds to the donor energy at very low temperatures • with increasing temperature the donors dispense also electrons to the conduction band, the charge carrier density is increasing exponentially; the Fermi energy increases linearly • impurity reserve (region γ): the electron density is increasing fast with temperature and exceeds at least the density of acceptors n A, which is in our example much smaller than the density of donors; consequently we have n A<< n << nD and n ≅ nDNC e −Ed/2kB T EF = EC + kB T ln n E 1 N ≅ E C − d − k BT ⋅ ln C NC 2 2 nD 416 • the Fermi energy is about in the middle between the conduction band and the donor level; the exponent responsible for the increase of the conduction electrons is reduced by a factor of two compared to the case of very low temperatures • to put it simply, the donors play here the role of an electron source (similar to the valence band in intrinsic semiconductors); in this temperature range a significant fraction of the donors is still not ionised; this situation is called impurity reserve • impurity depletion (region β): at room temperature we have kBT ≅ Ed and in good approximation exp (-Ed/kBT) ≅ 1, taking into account nA<< n we find n2 ≅ NC (nD-n) as n << NC we get nD-n ≅ 0: the density of the free charge carriers is given the number of impurities and depends not on temperature • as NA can be neglected it results n ≅ nD = const, NC , nD i.e. the Fermi level is decreasing EF ≅ E C − k BT ln • as now all impurities are ionised (n ≅ nD) it is called impurity depletion • intrinsic conduction (range α): with further increasing temperature charge carriers from the valence band are excited and the assumption p << nD becomes invalid and intrinsic conduction dominates the Fermi level moves to the middle of the band gap and the number of free charge carriers increases rapidly with temperature, just as known from the intrinsic 417 semiconductors n = NC e EF ≅ − E g / k BT EL + E V 2 • example: measured density of free electrons in n-type germanium as a function of reciprocal temperature charge carrier density n [m-3] 1024 Ge 1020 density of charge carriers in n-type germanium as a function of the reciprocal temperature, measured by means of the Hall effect; the range of intrinsic conductivity is shown by a dashed line; the concentration of the arsenic dopant is increased stepwise by one order of magnitude and covers the range from 1019 m-3 to 1024 m-3 1017 0.0 0.02 0.04 0.06 0.08 0.1 reciprocal temperature T-1 [K -1] after Hunklinger • the concentration of the donors can be directly read off the graphs at higher temperatures (range β); more or less pronounced one can see the ranges of intrinsic conductivity, the impurity depletion and of the impurity reserve 418 • an exception is the sample with the highest donor concentration (nD= 1023 m-3) where the charge carrier density is nearly independent of the temperature; at such high impurity concentrations the distance between the donor levels is that small that the neighbouring wave functions are overlapping, consequently, the electrons of the donors are not longer localised • this effect is known as metal-isolator transition: at increasing concentration of donors (or acceptors) a transition from a semiconducting to a metallic phase appears conductivity σ [Ω-1cm-1] 1000 Si:P 100 10 isolator metal electrical conductivity of a highly doped silicon sample; the metal-isolator transition can be observed at an electron concentration of n = 3.74 1024 m-3 1 0 2 4 6 8 density of electrons n [1024 m-3] after Hunklinger 419 • for the phosphorus-doped silicon the metal-isolator transition can be observed at n = 3.74 1024 m-3; for the arsenic-doped germanium at n = 3.5 10 24 m-3; in such cases of highly doped semiconductors the Fermi level is positioned in side of the conduction band and the charge carrier concentration is independent of temperature; the sample shows metallic behaviour • most commonly the concentration of the free charge carrier is measured by means of Hall experiments; for semiconductors both types of charge carriers contribute to; as already derived elsewhere the Hall constant RH is given by RH = ρµρ2 − nµn2 e (ρµρ + nµn ) 2 • the sign of the Hall constant is determined by the charge carriers contributing most to the charge transport; if one type of charge carrier dominates (p << n or vice versa) their concentration can be derived directly from the measured Hall voltage (in this case RH does not depend on the mobility) • compared to metals the Hall constant is quite large because of its relatively small concentration of charge carriers • example: Hall measurements at n-type and p-type indium antimonide (InSb) samples 420 Hall constant |RH| [cm3A-1s-1] 105 InSb 104 Hall constant of indium antimonide as a function of reciprocal temperature; the graphs for the n-type samples are shown in black, the graphs for the p-type samples are blue coloured 103 102 10 1 2 3 4 5 6 7 8 -1 -3 -1 reciprocal temperature T [10 K ] after Hunklinger • in the range of impurity depletion (right-hand side) one type of charge carriers is dominating; the expression for the Hall constant can be simplified to RH ≅ −1/en ≅ −1/enD or R H ≅ 1/eρ ≅ 1/enA • in this case, the density of charge carriers is constant; the mobility does not affect the Hall voltage • at high temperatures (range of intrinsic conductivity) the Hall constant decreases exponentially with the temperature as the density of charge carriers is increasing exponentially 421 • because of their extremely high mobility electrons contribute most to the conductivity and Hall constant (see elsewhere); as a consequence the p-type samples a very remarkable temperature behaviour: at the transition from the hole conduction to the intrinsic conduction the Hall constant goes to zero and changes the sign afterwards Mobility and Electrical Conductivity • to get the complete understanding of the electrical conductivity the mobility of the charge carriers µ = eτ/m* has to be discussed • typical values of the mobility µn and µp for electrons and holes for some selected materials at room temperature mobility [cm²/Vs] C Si Ge GaAs InSb µn 1.800 1.900 3.800 9.200 80.000 µp 1.400 480 1.800 400 1.250 • effective masses as well as the mean free time between collision affect the mobility; in semiconductors the electrons are mainly scattered by the phonons; the electron- electron interaction can be neglected because of their low density compared to metals • negatively and positively charged carriers act similar in terms of the mean times between collisions as also the scattering of holes can be finally attributed to an electron scattering 422 • example: mobility of the electrons in aluminium- doped Mg2Ge mobility µ/cm2V-1s-1 103 mobility of the electrons in aluminium- doped Mg2Ge, measured by means of the Hall effect; the samples contain 1.3 1022, 4.2 1022 and 8.2 1023 impurity atoms per m3; sample no.(3) shows metallic behaviour 102 after Hunklinger 101 5 10 20 50 100 200 temperature / K • no. (3) is the most highly doped sample and shows metal-like behaviour • sample no. (1) was not knowingly doped but its impurity concentration is 1.3 1022m-3; for sample no. (2) the aluminium concentration is 4.2 1022m-3 • apart from no. (3) the mobility's show a steep increase of mobility at low temperatures, a maximum at about 50K too 100K followed by a steep decrease • similar to metals at low temperatures the scattering processes at the impurity atoms are dominating; as the impurity atoms are charged we have to take the Rutherford scattering in order to describe the scattering mechanism correctly 423 • the integral cross section σsc is proportional to the forth power of the mean velocity νof the scattering particles (see nuclear physics) σ sc ∝ • note: 1 ϑ4 , with 3 m* 2 kBT = ν → ν = 3kB T/m * 2 2 the kinetic theory of gases can be used here as the charge carriers in non degenerated semiconductors obey the Boltzmann distribution • for the mean free path l we get l −1 = n sc σ sc ∝ nsc , where nsc is the density of charged impurity 4 ν atoms • for simplicity we assume that the number of charged impurity atoms does not depend on temperature: 1 ν nsc ν nsc = ∝ 4 ∝ 3/2 τ l ν T or eτ T 3/2 µ= ∝ m * nsc • in reality, the number charged scatter centres depends on temperature as well as on the detail of the compensation mechanism in the sample, therefore the measured temperature dependence of the mobility very often differs from the simple T3/2 law (see graphs elsewhere) 424 • nevertheless, we use the simple model in order to estimate the scattering cross- section of the aluminium ions: for the mobility of sample (2) at 30K we find µ ≅ 500 cm²/Vs; with 1 1 e σ sc = = = nsc ν l ⋅ hsc τ ⋅ νhsc m * µ we get σsc ≈ 2.26 10-11 cm2 (for m* = me) and a scattering diameter of about 500Ǻ, which is quite large • note: in metals the scattering capability of point defects is much less effective because of the screening of the Coulomb potential by the free electron gas • above the maximum, at higher temperatures (room temperatures), the collision of the charge carriers with acoustic phonons are dominating; in order to find out the temperature dependence of the mobility µ in this range of temperature we use again the relationship between mean free path l and scattering cross- section rsc • at room temperature the phonons with the Debye frequency ωD dominate; therefore the scattering cross- section is independent of temperature; for T >> θ we get for the phonon density nph ∝ T • taking into account the reciprocal mean time between collisions is 1 ν = = ν nphσ sc ∝ ν nph ∝ T 3 / 2 τ l or µ ∝ T −3 / 2 this temperature dependence is in good agreement with the experimental results 425 • the metal- like behaviour of sample no. (3) becomes apparent in the weak temperature dependence as well as in the high values of the mobility at low temperatures • in conclusions we consider the electrical conductivity; example: temperature dependence of ntype germanium temperature T/K electrical conductivity σ/Ω-1m-1 105 100 50 20 10 electrical conductivity of n- type germanium; samples are identical with those used elsewhere for the experimental determination of the charge carrier density; the sample with the highest electrical conductivity shows a metal- like behaviour 104 103 102 101 after Hunklinger 100 0.00 0.02 0.04 0.06 0.08 reciprocal temperature T-1/K-1 0.10 • starting at low temperatures the electrical conductivity is increasing exponentially with the increasing concentration of charge carriers; the temperature dependence of the mobility and of the effective density of states is not very important 426 • in the range of the impurity depletion, where the concentration of the charge carriers is nearly constant, the electrical conductivity is decreasing in temperature due to the temperature dependence of the mobility • at high temperatures the intrinsic conductivity appears which can be observed at the sample with the smallest impurity concentration (lowermost graph) • an exception is the sample with the highest doping (uppermost graph) of nD=1024m-3, where the conductivity does nearly not vary with temperature; in this sample the concentration of the charge carriers in practically independent of temperature as already discussed elsewhere • note: r r Ohm’s law j =r neµ E is only valid as long as the mobility µ does not depend on the electrical field E; indeed, for semiconductors of technical importance the mobility decreases for fields beyond 105 V/m r r • in this case, the drift velocity ν D = µE reaches is threshold value of about 105 m/s • reason for that is the electron- phonon coupling: at high fields the energy gain of the electrons in the electrical field is sufficiently high to create optical phonons; because of its high density of states this process is very efficient and limits the drift velocity of electrons and holes • note: this limitation of the drift velocity is important for the modern semiconductor devices as there, because of their small size, fields up to 107 V/m may appear 427 8.3. Inhomogeneous Semiconductors • we consider here the basic physical ideas which are important to understand the technical applications of semiconductors • semiconductors where the doping or the chemical composition varies spacially are called in this regard inhomogeneous semiconductors • example: p- n junction p-n junction • the spatial variation of the concentration of impurity atoms is a /conditio sine qua non/ for the application of semiconductors in the solid state electronics • to this end the impurity atoms are either implanted or diffused into well-defined region of the host material • for the lateral definition of the doped regions in the micrometer and nanometer rang several methods are applied; by for the most widely used method is the photo lithography not discussed in detail in the context of our basic considerations • for the following considerations we assume abrupt transitions, where the concentration of depends varies step-like; the technical implementation of such a transition is of course only an approximate approach 428 • example: p-n junction semiconductor semiconductor EPF EA EPV (a) EnC ED EnF EPC energy E n- type energy E E P C p- type EnV X EnV (b) X after Hunklinger position of the energy levels of the impurity atoms, of the band edges and of the Fermi level at the p- n junction; (a) position of the energy levels at separated p- type and n- type crystals; (b) p- n junction in the (thermodynamic) equilibrium; the gap edges are shifted to each other by the diffusion voltage VD; the dots denote the electrons, the open circles the holes • EPC and EnC denote the edge of the conduction band, EPV and EnV the edge of the valence band of the p- type or n-type semiconductor, respectively; EPFand EnFare the Fermi levels of the isolated crystals or the respective Fermi levels in a sufficiently large distance from the interface between the two differently doped crystal regions of the p- n junction 429 • depending on the doping the Fermi level is at room temperature either slightly below the donor level or slightly above the acceptor level; if p-type and n-type semiconductors are in a close contact, the Fermi levels adapt each other or more general, from the thermo dynamical point of view: in the equilibrium the chemical potentials have to be the same all over the crystal • this is archived by a diffusion of charge carriers from the respective regions of high concentration into the regions of lower concentration: electrons are diffusing from the n- type into the p-type semiconductor and the holes /vice versa/ • the small charge transfer by diffusion leaves behind on the p side and excess of (-) ionised acceptors and on the n side an excess of (+) ionised donors; in this way a charge double layer is forming which creates an electric field directed from n to p • this electrical field inhibits diffusion and thereby main taints the separation of the two carrier types; the electrical potential in the crystal takes a jump in passing the region of the junction • the jump of the voltage causes a shift in the chemical potentials in such a way that an uniform value is arising across the whole crystal; as a consequence the bending of the bands occurs • the effect of the concentration gradient exactly cancels the electrostatic potential V and effectively the net particle flow of each carrier type is zero (we neglect for the moment the recombination processes) 430 (a) (a) variation of the hole and electron concentration across an unbiased (zero applied voltage) p- n junction; (b) ~ electrostatic potential V ( x) from acceptor (-) to donor (+) ions near the junction interface; the potential gradient inhibits the diffusion of holes from the p side to the n side, and it inhibits diffusion of electrons from the n side to the p side; the electrical field in the junction region is called built- in electrical field after Kittel X (b) ~ • the bending of the band can be described by means of the macroscopic potential V ( x) • the diffusion voltage VD, the potential difference between the two differently doped regions of the semiconductor characterises the p- n junction; its value is given by the Fermi levels of the two doped crystals and here with essentially by the band gap of the semiconductor: 431 eVD = EFn − EPF N N NN = EC − k B T ln C − E V − ln V = EG − k B T ln C V nD nA nD ⋅ n A or eVD = k B T ln nD ⋅ nA n2i where the Fermi levels are calculated for the state of impurity depletion of the semiconductor which is a good approximation at room temperatures; furthermore have used the law of mass action as derived elsewhere • as a first approximation we find eVD ≅ EG • charge carriers which are moving in the region of the corresponding doping, i.e. electrons in the n- region and holes in the p- region are called majority charge carriers (or minority carriers) • notation:majority carriers: nn and pp minority carriers: np and pn • at a larger distances from the interface of the p- n junction we have nn ≅ nD+ ≈ nD and p p = n−A ≈ n A 432 • in conformity with the law of mass action n(x) p(x) = const. must be valid at any position of the junction pn pp = nn pn = nip i taking into account the usual doping concentrations it follows that the density of majority carriers is much higher than the density of the intrinsic charge carriers where as the density of minority carriers is much lower than the density of the intrinsic carriers charge carrier density log n, p • modelling the p-n interface p-type n-type semiconductor semiconductor − A n pp nD+ nn ni ,pi np concentration of free charge carriers and ionised impurity atoms at the p- n junction in logarithmic scale; it is assumed that the density of donors (tinted in grey) overbalances the acceptor density (tinted in blue); the depletion layers is shown schematically in lighter colour tints pn x=0 after Hunklinger 433 • close to the interface of junction the density f charge carriers in changing rapidly; taking not ~ account the potential curve V ( x) , the spatial behaviour of the edge of the conduction band is ~ E C ( x) = EPC − eV( x ); (note: a similar expression can be found for the valence band) • assuming that the semiconductor is in the state of impurity depletion in which the impurity atoms are completely ionised, the density of the free charge carriers can be calculated (see section 8.1) h( x) = np e ~ eV ( x ) / k B T and p( x) = p p e ~ − V ( x ) / k BT ; the corresponding graphs are shown in the figure above in logarithmic scale • from the expression for the free charge carriers we can see the law of mass action n(x) p(x) is valid along the whole p- n junction; as a consequence, the concentration of the charge carriers close to the p- n interface is significantly reduced; this situation is known as charge carrier depletion region • in this region the charge of the ionised donors or acceptors, respectively is not completely compensated by the free charge carriers and a space charge appears 434 carrier concentration [log scale] neutral region space charge region electrons holes p-doped diffusion force on holes E-field force on holes neutral region n-doped E-field x diffusion force on electrons E-field force on electrons a p-n junction in thermal equilibrium with zero bias voltage applied; electrons and holes concentration are reported respectively with blue and red lines; grey regions are charge neutral; light red zone is positively charged; light blue zone is negatively charged; the electric field is shown on the bottom, the electrostatic force on electrons and holes and the direction in which the diffusion tends to move electrons and holes 435 • the space charge is given by ρ(x) = e[nD+ − nn (x) + p n (x)] for x > 0 n- type semiconductor for x > 0 p- type semiconductor ionised majority minority donors carriers carriers ρ(x) = − e[n+A + np (x) − pp (x)] ~ • the potential curve V ( x) and the space charge ρ(x) are interlinked by the Poission equation ~ ∂ 2 V(x) ρ(x) = − ∂x 2 ε0 εr • from a mathematical point of view the solution of this equation is not that simple as the space charge depends again on the potential; for the solution a self- consistency procedure must be applied 436 • for simplicity we use here the Schottky model, which takes into account that in the region of space charge close to the interface the concentration of free charge carriers is very low and can be even neglected in a first approximation: ρ(x) = 0 for x < -dp -enA for -dp < x < 0 enD for 0 < x < dn 0 for x > dn where dn and dp denote the thickness f the corresponding space charge regions • note: as the regions of space charge must be in total electrically neutral the two areas nA dp and nDdn must be the same • for an rectangular space charge the Poission equation can be easily solved region wise; for 0 < x < dn we get 2 ~ ∂ V(x) enD − ≅ ∂x 2 ε 0ε r ~ ∂V en Ex = − = − D (dn − x) ∂x ε 0 εr en ~ ~ V(x) = Vn (∞ ) − D (dn − x) 2 2ε 0ε r 437 • similar equations can be derived for the n region; taking into account the neutrality of electrical charge nD dn = nAdp and the continuity of the electrical potential at x = 0 en en ~ ~ Vp (-∞) + A dp2 = Vn (∞) − D dn2 2ε 0ε r 2ε 0ε r or ~ ~ Vn (∞) - Vp (- ∞) = VD = e (nA d2p + nDd2n ) 2ε 0ε r we find for the thickness of the space charges 2ε 0 ε r VD n A 1 dn = ⋅ ⋅ e nD (n A + nD ) 2ε 0 εr VD nD 1 and dp = ⋅ ⋅ e nA (nA + nD ) ~ • schematic representation of ρ(x), Ex(x) and − V( x) Schottky mode for the space charge region; (a) space charge in a rectangular approximation, a more realistic graph for the charge density is shown schematically by a dotted line; (b) electrical field strength Ex(x); (c) graph of the ~ electrical potential − V( x) , note the negative sign of the potential curve (a) (b) (c) x after Hunklinger 438 • in order to estimate the size of the space charge region we assume eVD ≅ EG ≅ 1eV and nA ≅ nD ≅ (1020 … 1024)m-3; then the thickness of the space charge region is dn ≅ dp ≅ 1µm … 10nm; the electrical field strength is Ex ≅ (106 … 108)V/m Electrical Currents in the p-n Junction • even in thermal equilibrium there is a small flow of electrons from n to p side (and vice versa holes flow from p to n) where the electrons and their life's by combination with holes at the other side, this current is a consequence of the different concentration of charge carriers at both sides of the junction and is called diffusion current (sometimes recombination current) • the drift current is balanced by the field current (sometimes drift current) where electrons which are thermally generated in the p region and which are pushed by the built- in field to the n region (and vice versa the holes in the opposite direction) • if jf is the field current and jd the diffusion current we have jf + jd = 0 both currents are composed of electrons and holes j f = j fn + jpf and j d = jdn + jdp as neither the holes nor the electrons can accumulate somewhere in the crystal also the single components compensate each other jnf + jdn = 0 and jpf + jpd = 0 439 • the field current is generated by the minority carriers which where pushed by the built- in electrical field into the region of the majority carriers; assuming for simplicity that the region of space charge is small (smaller than the mean free path) and that the rate of recombination is also small there nearly all minority carriers reach the majority region the field current does nearly not depend on the particular shape of the potential • on the other hand, the majority carriers (for example electrons in the h region) must climb the energy wall eVD from the low side of the barrier to the high side; only a few charge carriers can successfully climb the wall, the Boltzmann factor gives us the fraction of the „successful“ charge carriers jd = α(T) e-eVD/kBT , where α is the amplitude depending weakly on temperature • taking into account the thermal equilibrium the magnitude of the current densities are | jt| = | jd| = α(T) e-eVD/kBT Biased p-n Junction • i the p-n junction is biased by an external voltage V a large current will flow if we apply a voltage across the junction in one direction, but if the voltage is in the opposite direction only a very small current will flow • if an alternating voltage is applied the current will flow chiefly in one direction; the p- n junction rectifies the current 440 • the applied external voltage affects the balance of field current and diffusion current or, in other words the thermal equilibrium; if however, the p- n junction is in a steady state and not far away from the thermal equilibrium, the following model works well: the applied voltage V drops chiefly in the region of space charge (or depletion region) where the concentration of free charge carriers is low and which is consequently shows a high resistance the remaining part of the semiconductor is nearly field- free: (note: the sign of the bias voltage V is chosen such that a positive voltage is directed opposite to the diffusion voltage VD and therefore reduces the potential difference) • within this sign convention the rectification property of the p- n junction the polarity: if the polarity of the p region is positive the p- n junction is operated in the forward direction (or pass direction) if the polarity of the p region is negative the p- n junction is operated in the reverse direction • influence of the bias voltage on the energy bands and the Fermi level 441 p- type n- type p- type EρC EρC EnC E nF ρ F ρ V E E − e( VD + | V |) energy E − e( VD − | V |) energy E n- type EρF EnC EρV EnF EnV EnV (a) x (b) x p-n junction biased with an external voltage V the quasi Fermi level of the electrons in shown as a blue dotted line, the quasi Fermi level of the holes is shown as a black dotted line; (a) forward direction: the voltage +V decreases the potential hill; (b) reverse direction: the voltage –V increases the potential hill after Hunklinger 442 • in the region of the space charge the charge carriers are not in the thermodynamic equilibrium; there is no joint Fermi level; however, electrons and holes are in an equilibrium state among themselves • therefore, two separate quasi Fermi levels can be defined, which can be treated independently; as we will see elsewhere this is of importance for semiconductor lasers • How does the bias voltage affect the field current and the diffusion current? • the field current is nearly unaffected; once in the sphere of influence the built- in pushes the minority carriers through the region of space charge to the majority side; this is to a large extend independent from the field strength; for the electrons for example jnf ( V ) ≅ jnf (0) • on the other hand the bias voltage modifies the height of potential hill; instead f eVD the majority carriers have to overcome the potential wall VD-V • therefore, the diffusion current will change jdn (V) = α(T)e − e(VD − V)/kBT = jdn (0)e eV/kBT and the two current components, field current and diffusion current, flow in opposite direction we find the following net current for the electrons jn (V) = jnd (V) - jnf = jnf e eV/kBT − jnf = jnf (e eV/kBT − 1) where we have used | jn (0) |=| jn ( 0) | d f 443 • adding together the contributions of electrons and holes the total current is j(V) = ( jnf + jpf )(eeV/kBT − 1) = j f (e eV/kBT − 1) • current- voltage characteristic of the p- n junction (p- n diode) 500 current I/µA 400 p- n diode 300 current- voltage characteristic of a p- n diode; notice the different scales in the forward direction and in the reverse direction 200 100 0.1 0.0 -0.1 after Hunklinger -0.2 0.0 0.2 voltage V/volts 444 • the very non linear behaviour of the characteristic indicate clearly the rectifier properties of the pn diode • foe the forward direction the potential wall is given by e(VD-V) which can be climbed more and more easily with increasing voltage V • for the polarity in the reverse direction the maximum current is given by the very small field current; a further increase is impossible as the generation of minority carriers cannot be controlled (it is given by temperature) • note: a further increase of the bias voltage at a p- n junction with a high doping in reverse direction may cause a sudden high current just in reverse direction; for silicon diodes with a concentration of 1025m-3 dopands or higher the critical voltage is about 2 volts • at p-n junctions with high doping a high electrical field s can appear in the small depletion layer; as a result the lower edge of the conduction band of the n-region is shifted below the upper edge of the valence band; as a result electrons can tunnel from the valence band of the p- type semiconductor into the conduction band of the n-type semiconductor • the voltage at which the sudden large current flow in the reverse direction appears is known as breakdown voltage or Zener voltage (after C. Zener); in electronic circuits Zener diodes are used for the generation of constant reference voltages 445 I reverse breakdown schematic diagram of the current-voltage characteristic of a p-n junction diode (not to scale); Von is known as cut-in voltage or on-voltage or diode forward voltage drop, Vbr is the breakdown voltage forward Vbr Von V • capacitance of the depletion layer is given by the thickness of the zone of space charge and the bias voltage; in the frame of the Schottky model we have simply to substitute the diffusion voltage VD by (VD-V) dn (V) = dn (0) 1 − V VD and d p (V) = d p (0) 1 − V VD where dn(0) and dp(0) denote the thicknesses at zero bias voltage 446 • let be A the sectional area of the p- n junction, then we get from the Schottky model for the stored charge Q Q = -enD dn(V) A and therefore for the capacitance of the space charge C= dQ d dn(V) A 2e ε 0 ε r n A nD = − enD A = ⋅ dV dV 2 VD − V nA + nD • as the capacitance depends on the number of impurity atoms the voltage dependence of the depletion layer is often used to experimentally determine the impurity concentration • in electronic circuits p- n junctions are often used as tuneable capacitances, known as varicap diodes or varactor diodes, in order to tune the resonance frequency in resonant circuits (RLC circuits) for electronic filters or oscillators Metal- Semiconductor Junction • the electrical contact between a metal and a semiconductor is very important for electronic circuitry; ideally electrons may enter or leave the semiconductor; indeed this is a simple exceptional case • instead of an ohmic contact very often a blocking contact is observed, which strongly constrains the current flow; the reason for it are the different work functions Φ of both materials, the value of which is given by the distance of the Fermi levels to the vacuum energy level 447 • in the case of a n- type semiconductor we have Φsc > Φme : ohmic junction, Φsc < Φme : blocking junction; for p- type semiconductors it is just contrariwise; the indices “sc” and “me” denote here the semiconductor or the metal, respectively • example: n- type semiconductor with Φsc > Φme Φme energy E Φsc > Φme Φsc me (a) EC ED EF energy E Evac n- type sc Φme me x Φsc n- type sc x (b) EF me (c) Φsc Φme EC ED EF energy E Φsc < Φme energy E Evac n- type sc x Φme me (d) Φb Φsc metal n- type semiconductor junction before (left) and after (right) bringing the two materials in a close contact; top: ohmic contact, the free electrons at the boundary layer are tinted in black; bottom: Schottky junction, the positive space charge in the depletion region is marked by the plus sign n- type sc x after Hunklinger 448 • the situation of a n- type semiconductor with a larger work function than the metal is shown in the top left figure (a), where the position of the vacuum potential, the gap edges, the donor states, the Fermi levels as the work functions are plotted • as soon as both materials are put in close contact electrons start to flow from the metal into the semiconductor; as a result the potentials start to change in both materials to balance the two Fermi levels • similar to the p- n junction also here the bands of the semiconductor are bended close to the metal- semiconductor interface as shown in the top right figure • in the semiconductor close to the interface an enrichment of electrons can be observed as there the Fermi level is just inside of the conduction band; under influence of an bias voltage electrons can flow through the interface into the semiconductor (bottom left) ohmic behaviour is observed • if the work function of the metal is larger than that one of the semiconductor then, contrariwise the electrons from the semiconductor to the metal to balance the Fermi levels • as a consequence, at the boundary surface of the semiconductor a highly resistive depletion layer appears which is blocking the current flow; this junction is known as Schottky junction • the potential barrier between the semiconductor and the metal Φb is called Schottky barrier; typical values are p-GaAs Φb ≅ 0.95eV, n-GaAs Φb ≅ 0.47eV 449 • Schottky barriers can be consider as one half of a p- n junction where the metal plays the role of the p- type semiconductor and the formulas of the p- n junction can be used • for a n- type semiconductor and a metal we have to take into account nD<<nA as the number of states in the metal exceeds the number of states of the p- type semiconductor; for a metal- ptype semiconductor junction the argument is just the other way around • the rectifying properties of Schottky junctions were already applied in the very early days of radio engineering at the beg in of the 20th century in a device known as crystal detector Semiconductor Heterostructures and Superlattices • by means of thin film processes such as Molecular Beam Epitaxy (MBE) or Metal Organic Chemical Vapor Phase Epitaxy (MOCVPE) it is possible to deposit layers of different semiconductors with nearly perfect overall crystalline structure, which are known as hetero junctions • here it is important, that the lattice parameters of the systems GaP/Si, GaAs/Ge or InAs/GaSb as well as for ternary and quaternary alloy as AlxGa1-xAs or GaxIn1-xAsyP1-y • by changing the mixing ration the band gap can be adjusted in a certain range to the particular application case; for the AlxGa1-xAs system the energy gap can be adjusted continuously between 1.4eV (GaAs) and 2.2eV (AlAs) • bringing together two semiconductors with different band gap at the interface a band bending or band discontinuity can be observed 450 before contact energy E A B ∆EL EF EL EF ∆ EV EV equilibrium established EL energy E EF EV hetero junction of two n- type semiconductors with different band gaps; semiconductor A has a stronger impurity doping than semiconductor B; top: bands and Fermi levels of the original materials before contact; bottom: after the equilibrium is established the Fermi levels are balanced; at the interface the band discontinuities ∆EC and ∆EV as well as the band bending can be observed; the degenerated electron gas close to the interface in the B semiconductor is finished in black after Hunklinger x • as the transition from one band gap to the other one occurs within one atomic distance the band discontinuity is very sharp; therefore, the associated electric fields can be in the order of magnitude of the atomic fields of about 1010V/m • the band discontinuity appears at both valence band and conduction band; for GaAs/Ge typical values are ∆EV= 0.49eV and ∆EC= 0.28eV • similar to the p- n junction also for the hetero junctions the Fermi levels are balanced in the thermal equilibrium; consequently also the band bending can be observed 451 • depending on the charge carrier density the band bending extends over a length of a few hundreds of Angstroms; the resulting electric fields are in the order of magnitude of 107 V/m • isotype hetero junctions are structures with two different semi conducting materials but the same type of doping; example for n- type material see figure above • as in the thermal equilibrium the Fermi levels are balanced free electrons accumulate in the semiconductor with the smaller band gap (semiconductor B) close to the interface • it is even possible that close to the interface the Fermi level is inside of the conduction band and we have a degenerated semiconductor there; on the opposite side of the interface (in the semiconductor A) we have a depletion layer as the electrons from the stronger doped material pass over to the weakly doped semiconductor B with the energetically lower quantum well • this is also true if the material B is an intrinsic (e.g. undoped) semiconductor; then we have the unusual situation of an undoped semiconductor where nearly all free electrons remain and where this high concentration of electrons is specially separated from the donors • note that in common semiconductors a high concentration of charge carriers always goes together with a high density of impurity atoms • in classical semiconductors the mobility of electrons is limited at low temperatures by the strong impurity scattering where as in the hetero structures discussed here even at high charge carrier densities high values of mobility can be expected as the electrons are moving in a region with a low density of impurity atoms • with the increasing progress in MBE technology indeed enormous mobilities at low temperatures could be demonstrated 452 mobility µ/cm2V-1s-1 progress in increasing the electron mobility of AlGaAs/GaAs hetero structure by improvement of MBE technology from the mid 80’s to the mid 90’s; numbers at the graphs denote the year of sample fabrication; the largest values of mobility shown here are from a Al0.35Ga0.65As/GaAs system temperature T/K after Hunklinger • the sample with the largest value of electron mobility shown here had a complicated layer structure in order to minimise the scattering processes at the interface; the dopands were Silicon atoms in a Al0.35Ga0.65As layer which has a larger band gap than the GaAs material • the electrons of the donor atoms are delivered to the energetically lower conduction band of the adjacent intrinsic GaAs material • as the epitaxial GaAs layer is to a large extent free of any impurities one can observe an increase of the mobility by about four orders of magnitude compared with the conventionally doped GaAs crystals • systems, where different materials are put together periodically are called superlattices; a sequence of the hetero structures discussed above is called Composition- modulated Superlattice (modulation of doping) 453 energy E Composition- Modulated Superlattice E AC EF E BC EBV E AV energy E A B A B A B E AC EF E BC E AV EBV spatial variation of the band gap in a composition- modulated superlattice; top: band edges and Fermi levels of the primary materials; bottom: superlattice with quantum well structure where the 2D electron gas (tinted in grey) is located after Hunklinger z • alternating sequence of layers of the semiconductor A with strong n- doping and layers of the nearly intrinsic semiconductor B; because of the new band structure the electrons concentrate in the quantum wells of the undoped semiconductor B where as in the respective highly doped layers of the semiconductor A depletion zones occur • the electrons capture in the quantum wells show different physical properties along and perpendicular to the interfaces: in parallel to the interfaces the wave function of the electrons can be described in terms of travelling Bloch waves 454 • perpendicular to the interfaces (z direction) the quantum well limits the propagation of the electrons significantly; for the shake of discussion the eigenvalues of the electrons we approximate the quantum well by a potential box in the z direction • this corresponds exactly to the situation of the 2D electron gas discussed elsewhere; the eigenvalues of the energy are given by E j (k x ,k y ) = h 2 (k 2x + k 2y ) 2m * xy + Ej where m*x,y denotes the effective mass for the electron propagation in the xy plane and Ej is the transversal energy • as the electrons can only move freely in the xy plane, such hetero structures provide a 2D electron gas; note: a similar consideration is also true for the holes in the maxima of the valence band • for the 2D electron gas the density of states is constant (see elsewhere); for each sub band j we have D j (E) = m * xy πh 2 ; the existence of the step- like density of states can be demonstrated by means of optical absorption experiment or photoluminescence 455 • note: the transverse energy levels Ej are only sharp if the single quantum wells forming the superlattice are sufficiently far from each other; if the distance between two quantum wells is smaller than about 100Ǻ the overlap of the wave functions gets noticeable and leads to a splitting of the energy level • this effect is completely similar to the level splitting described by the “tight binding model” discussed elsewhere and leads to the formation of so- called superlattice miniband structure • superlattices offer the opportunity to systematically vary the distance between the quantum wells or the overlap of the wave functions Doping Superlattice • doping superlattices are semiconductors which are alternately doped as n- type and p- type material; the period of spatial repetition can be varied over a wide range, however a typical value is some 100Ǻ • as in- between the n- region and the p- region a small intrinsic transition zone appears (or even knowingly deposited), such superlattices are also called n-i-p-i structures 456 energy ECA EBC EF EF EAV EBV energy A B A B A ECA EF E AV B EBC Eeff g spatial variation of the band gap in a doping superlattice; top: band edges and Fermi levels of the primary materials; bottom: in the superlattice a wavelike potential develops; the effective band gap as well as the free charge carriers (labelled by plus sign and minus sign) are also shown EF EBV after Hunklinger • the doping superlattice shows a wavelike band structure; this is caused by the chemical potential, which must have the same value all over the semiconductor • because of the edge of the valence band are closer to the Fermi level; as a consequence excited free electrons can be found in the minima of the conduction band and holes in the maxima of the valence band • the two species of charge carriers are spatially separated what hinders recombination processes and increases significantly the life time of electrons and holes • furthermore, the modulation of the band edges causes a decrease of the effective optical band gap 457 8.4. Semiconductor Circuit Elements and Devices • now a days data processing in date transfer is mainly based on integrated circuits fabricated in silicon technology; optoelectronic devices such as optical detectors, light-emitting diodes, or semiconductor lasers mostly make use of III-V semiconductors • semiconductor electronics devices can be subdivided into two-terminal devices (diodes) and three-terminal devices (transistors); in diodes the properties of the current flow between two electrodes is used, while in transistors the current or voltage between two electrodes is controlled by the external voltage at a third electrode • most of the optoelectronic devices are diodes while in the field of data processing or power electronics transistors are widely used • depending on whether only one or two types of charge carriers are involved the devices are said to be unipolar or bipolar Devices based on p-n Junctions Solar Cell • in a p-n junction the ionising radiation produces free electrons and holes; the number of electrons is proportional to the energy transmitted by the radiation to the semiconductor 458 • if the absorption of a photon takes place in the depletion region (space charge region), both charge carriers are separated there by the existing electrical field • thus an additional electrical current IL is generated, which adds on the field current flowing without illumination, see p- n junction I = IS ( e diffusion current eV − 1) − IL kBT field current current I [mA] • current- voltage characteristic of α silicon solar cell of 4cm2 under illumination rectangle of maximum power current- voltage characteristic of a silicon solar cell under illumination; the optimum working point is where the area of the blue tinted rectangle and therefore the supplied electrical power is a maximum; on top left the schematic of the electric circuit as well as the load resistance is shown after Hunklinger voltage V[v] 459 • for the calculation of the current-voltage characteristic typical values as IL= 100mA and IS= 1nA were used; the circuit schematic includes the load resistance the vale of which has to be optimised • the electric circuit is characterised by the off-load voltage (I=0) and the short-circuit current (U=0) for I = 0 we get for the voltage at the p- n junction k B T IL k B T IL V= ln + 1 ≅ ln ≅ 0.5V (typical value) e IS e IS and for V = 0 I = IL; in this case the current is solely determined by the light-induced component and is directly proportional to the illuminace (transmitted radiation energy per unit area) • the solar energy exploitation is optional if the yield of electric power P = VI reaches its maximum, or in other words, the area of the blue rectangle must be as large as possible • usually this is the case if the operating voltage is about 80% of the off-load voltage; they get a high efficiency the load resister has to be matched to the parameters of the solar cell 460 • Why is the achievable efficiency of solar cells relatively small? on the one hand photons with energies smaller than the band gap cannot contribute to the photocurrent, on the other hand the energy excess of the energy-rich photons gets lost as they are only able to generate one electron-hole pair • the efficiency ŋ of solar cells depends strongly on the band gap of the semiconductor used and on the local solar spectrum • ideal efficiency of solar cells taking into account the relative positions of the solar spectrum and the band gap of the corresponding semiconductor devices efficiency ŋ [%] ideal efficiency of solar cells as a function of the band gap; the efficiency can be derived from the intersection of the vertical lines for the band gap of the semiconductor with the blue tinted graph; the weak oscillations are caused by the absorption of the Earth’s atmosphere; here the Reference Solar Spectral Irradiance AM 1.5 was supposed band gap EG [eV] after Hunklinger 461 • for the solar spectrum the “Reference Solar Spectral Irradiance at Hir Mass 1.5” (AM 1.5) was used what means that the sun is at an elevation of 41.8° above the horizon (zenith: 90° AM 1.0) • without any further provisions (such as focussing of light or a more complicated set- up of semiconductors with different band gaps in a row) the maximum efficiency that can be achieved is 31% • this efficiency can be achieved theoretically only if the band gap is matched to the maximum of the solar spectrum; in reality, the achieved efficiencies are significantly smaller • solar cells from amorphous Silicon (a-Si) currently achieve an efficiency of 10%, from polycrystalline Silicon 15%, and from monocyrstalline Silicon 20% • high efficiencies of 25% one can get from solar cells with GaAs which consist of three layers Photodiode • also photo diodes are very often based on the p-n junction; as already discussed the irradiation of light generates an additional photocurrent IL in the p-n junction • as the absorption of one photon generates in each case one electron- hole pair at a given wavelength the current IL in the p-n junction is proportional to the intensity of the incident light 462 current I [mA] current-voltage characteristic of a photodiode at two different intensities of the incident light; with increasing intensity the characteristic is shifted downwards; the dots indicate the typical working points; the circuit schematic with the load resistance is also shown after Hunklinger voltage V [v] • under increasing illumination the current- voltage characteristic is shifted downwards resulting in a change of the voltage drop at the load resistor • in order to get a signal which is largely independent of the bias voltage the photodiode is operated in reverse biasing Light-Emitting Diode (LED) • LED are widely used in everyday life • LEDs benefit from the effect that for diodes in forward-biasing the majority carriers recombine after leaving the depletion region within the diffusion length; for semiconductors with direct band gap the transition of an electron from the conduction band into p hole of the valence band is 463 very often attended bay a photon emission • this process in just the reversal of the optical absorption process discussed elsewhere • for semiconductors with indirect band gap (phonon-assisted transition processes) the recombination is mostly radiation less; the recombination energy is completely transferred to the phonons (or to the lattice) • in order to use also such semiconductor materials so-called recombination centres are embedded into the crystal lattice; such recombination centres are lattice defects with an energy level close to the valance band which enable transitions under photon emission epoxy lens/case bond wire anode (long leg) flat = cathode flat spot (at cathode) reflective cavity with semiconductor die photograph and schematic representation of a light-emitting diode • LEDs are available practically for the whole visible spectrum; the wavelength of the emitted light is given by the band gap; therefore, semiconductors with different band gaps are used 464 colour wavelength λ [nm] semiconductor material infrared λ > 760 red 610 < λ < 760 aluminium gallium arsenide (AlGaAs) gallium arsenide phosphide (GaAsP) aluminium gallium indium phosphide (AlGaInP) gallium (III) phosphide (GaP) green 500 < λ < 570 indium gallium nitride (InGaN) gallium nitride (GaN) gallium (III) phosphide (GaP) aluminium gallium indium phosphide (AlGaInP) gallium arsenide phosphide (GaAsP) blue 450 < λ < 500 zinc selenide (ZnSe) indium gallium nitride (InGaN) silicon carbide (SiC) as substrate Silicon (Si) as substrate under development ultraviolet 230 < λ < 400 diamant (C) Aluminium nitride (AlN) Aluminium gallium nitride (AlGaN) Aluminium gallium indium nitride (AlGaInN) down to 230nm white broad spectrum gallium arsenide (GaAs) aluminium gallium arsenide (AlGaAs) Blue/ UV diode with yellow phosphor semiconductors, commonly used for LED 465 • GaAs with a band gap of EG= 1.43eV is emitting in the infrared range; where as GaN with EG=3.37eV is emitting in the blue spectral range • note that the mixing system InxGa1-xN has a direct gap which can be varied from 0.7eV to 3.37eV depending on composition • white light LEDs are based either on individual LEDs that emit three primary colours and then mixing them or to convert monochromatic light from a blue or UV leas to broad spectrum white light similar to fluorescent light bulbs • currently, phosphor based LEDs are most advanced; here a LED of (mostly) blue colour is coated with phosphor of different colours to produce white light • it should be noted that LEDs can be also produced on the basis of heterostructures Transistor • transistors are widely used to amplify currents or voltages; there are basically two different types: unipolar transistors and bipolar transistors; the latter one is in principle a combination of two p- n junctions • the bipolar transistor (or bipolar junction transistor - BJT) was invented in 1947 by J. Bardeen, W. Brattain and W.B. Shockley, Nobel prize in physics 1956 • bipolar transistors are so named because of their operation involves both types of charge carriers: electrons and holes where as in unipolar transistors only one carrier type is involved in the charge flow 466 • the PNP (where the letters “P” and “N” refer to the majority charge carriers inside the different regions of the transistor) consist of emitter, base and collector emitter base collector holes IE p++ electrons IB VEB (a) emitter circuit recombination VBC RL collector circuit emitter collector base (b) p++ IC energy E ~ VE n bipolar transistor with forwardbiased E- B junction and reverse-biased B- C junction, (a) schematic representation of the set- up and the circuit of the PNP- type of transistor; the regions of depletion are tinted in grey; the relevant voltages and branch currents are shown; the plus sign indicates a high doping; (b) band scheme of the transistor; the position of the Fermi level in the different regions is shown by a dashdotted line x after Hunklinger 467 • for the function of the transistor it is important that the thickness of the base is sufficiently small (d < 1µm) so that the recombination does not play an important role • this holds similarly also for the NPN type transistor where in contrast to the PNP not the holes but the electrons carry the main current • the emitter- base junction is operated in forward biasing and is feeding holes into the base region; the holes diffuse towards the base- collector transition where as the base- collector transition is operated in reverse biasing • as they are minority charge carriers in the n- type base they can pass unhindered the basecollector transition; the holes are sucked of at the collector and flow through the load resistance RL into the collector circuit • it should be noted again: the generation of the holes is controlled by the emitter- base voltages VEB, but they are not allowed to recombine to a large extent with the numerous electrons in the base region • this can be achieved if the width of the base region is smaller than the diffusion length of the holes; in this case the base current is very small and most of the emitter current flows to the collector • emitter current and collector current are about the same and therefore independent of the basecollector voltage VBC and consequently also independent of the value of the load resistance RL • the voltage at the load resistance VL= ICRL can be much greater than the input signal V~E in the emitter circuit; in other words, the signal is amplified 468 • the amplification can be roughly estimated as follows: (a) ~ if the emitter voltage VE = UE + UEb and the emitter current IE are given, then we get for the base- emitter junction (see p- n junction) ( ) IE = IS,E e eVE / kBT − 1 ≅ IS,E e eVE / k BT where IS,E is the saturation current of the emitter- base junction at reverse- biasing (b) if α is the fraction of holes which diffuse through the base region without recombination and reach the collector, then the collector current is given by IC = IS,C + α IE ≅ α IE where the IS,C is the saturation current of the base- collector junction, which is small as the base- collector diode is operated in reverse biasing (c) the voltage at the load resistance is given by VL = ICR L = α R L IE (d) the amplification factor results from dUL eα ~ = k T R L IE dUE B k T • with typical values α ≅ 1, IE = 10mA, B ≅ 0.025V (at T = 300K), and R L = 1kΩ the e amplification factor is 400! 469 • here, we have considered the so- called common- base circuit (or grounded- base circuit) of the BJT amplifier where the base is grounded the emitter serves as the input and the collector is the output; this circuit is used for the amplification of voltage or power • the common- emitter circuit of the BJT amplifier is typically used to amplify currents; here the base serves as the input, the collector is the output, and the emitter is common to both • MOSFET stands for Metal- Oxide- Semiconductor Field- Effect Transistor • metal- oxide- semiconductor boundary for a weakly doped p- type semiconductor metal semiconductor metal EF EF VB (b) (a) oxide layer VB (c) semiconductor oxide layer EF EF schematic representation of the mode of operation of a metaloxide- semiconductor boundary; the electrons in the conduction band are marked by dots, the holes in the valence band by open circles; a positive voltage VB is applied, the counter electrode is not shown here; VB (d) after Hunklinger (a) position of gap edges and the Fermi level in absence of the field; (b) depletion region caused by the positive bias voltage; (c) n- type inversion layer at higher positive bias voltage; (d) inversion 470 layer with a degenerated electron gas indicated by the black- tinted area • if a positive biased voltage is applied to the metal electrode the holes in the semiconductor are rejected where as the electrons are attracted; because of the existing negatively charged acceptors a negative space charge is developed similar to the p- n transition • this causes a band bending and to a depletion of holes close to the boundary; with increasing voltage VB the bands drop further down and the electron density at the boundary layer increases • as here over a very small distance the conduction mechanism alters from p- type conduction to n- type conduction the layer is revered to as inversion layer • the inversion layer is separated from the p- type substrate by the insulating effect of the depletion region • at a further increase of the bias voltage the valence band edge drops below the Fermi level and a degenerated Fermi gas with metallic character appears • as this well- conducting channel is quiete small, the inversion layer can be considered as an experimental realisation of a 2D electron gas (see quantum Hall effect else where) 471 after Hunklinger MOSFET; the metal electrodes (tinted black) are direct contact to the n+- type regions of source and drain; the depletion region (white) separated the channel and the n+-type region from the p- type substrate; (a) gate voltage VG= 0; (b) the positive gate voltage causes the conductive channel (tinted in dark blue) • two highly doped n- type regions covered with a thin oxide layer are embedded into a p- type material; the oxide layer opened at the n- type source and the n- type drain in order to get a good electrical contact to source and drain • the third metal contact to the gate is separated by a 100nm thick oxide layer from the p- type substrate; this contact forms the metal- oxide- semiconductor (MOS) boundary (see above) • without a bias voltage at the gate is one of the p- n junction is reverse- biased and causes a high resistance 472 • at a sufficiently high positive gate voltage the low-resistive, metallic conductive channel appears; the channel as well as source and drain are separated from the p- type substrate by a depletion region; the width of the depletion region varies with the local electrical potential • by means of the gate voltage the transistor can by switched from the current-less state to the current- carrying state and back • the performance of the MOSFET largely on the quality of the SiO2 layer and the quality of the boundary; at variations of the gate voltage possible defects are also recharged so that only the voltage can only partially affect the inversion layer • the required high quality can be currently achieved only with Silicon; GaAs shows that many defects that working MOSFET’s cannot be produced Semiconductor Laser (Solid-State Laser) • another application of heterostructures with outstanding technical importance is the solidstate laser • we know already from the discussion of the photo diode: if the diode is forward- biased, then the electrons and holes recombine under the emission of photons after crossing the space charge region • in order to get laser action a population inversion is needed at the p- n junction; as the electrons and holes are preferably concentrated at the band edges the occupation probability at the band edges EC and EV must be investigated 473 • the required population inversion is given by f (E = EC ) > f (E = EV ) where −1 E V −EF EC −EnF f (EL ) = 1 + e kBT , f (E V ) = 1 + e kBT therefore, we get population inversion for p −1 EnF − EpF > EL − E V = EG EF EC EV (a) EF EL energy E energy E • this means, the quasi- Fermi levels EnF and EpF have in- band positions EC (b) x x after Hunklinger band scheme of a p++- n++ junction; (a) position of Fermi levels in the thermal equilibrium without an external bias voltage; (b) p++- n- - junction in forward bias with a voltage V; there appears a population in version resulting in a laser action 474 • in- band position of the quasi- Fermi levels can be achieved at very high dopting; indeed, GaAs diodes show laser action if the injection current is sufficiently high • however, the injection current can be significantly reduced, if a double hetero structure is used EF energy E energy E electron EC EFn |eV| EV (a) (b) x hole x double hetero structure injection laser from p-AlGaAs / i-GaAs / n-AlGaAs (i-GaAs is semi-insulating GaAs); (a) band scheme of the hetero junctions in the thermal equilibrium; (b) band scheme at a bias voltage V after Hunklinger • the active layer in the middle is weakly doped GaAs and is a semi-insulating material, which is embedded in between AlGaAs which has a wider band gap • the AlGaAs layers are of the p- type at the left side and of the n- type at the right side • the unbiased hetero structure shows the band scheme sketched above; in forward-bias at a sufficiently high voltage appear “band valleys” • the quasi- Fermi levels of electrons and holes are an in- band positions for the active layer in the middle so that a population in version accures 475 • holes flow from the p- type region and electrons flow from the n- type region into the active layer; the band discontinuities there prevent the flow off of charge carriers and cause an increased recombination under emission of photons • this effect is known as electrical confinement; in addition to that there is also an optical confinement; this is due to the higher refraction index of AlGaAs compared to GaAs • in this way, the generated light is totally reflected and confined in the active layer; without any further provisions the optical resonator is completed by the strongly reflecting boundary surfaces between the semiconductor and the air • commercial solid- state lasers are based on such devices 476