ECE 584 Semiconductor Device Fundamentals Chapter 4 PN Junction (2) Qiliang Li 4.3 Reverse-Biased PN Junction + V – N P Wdep = Ec qφbi Ec Ef Ev Ef Ev (a) V = 0 2ε s (φi − Va ) 2ε s ⋅ potential barrier = qN qN 1 1 1 1 = + ≈ N Nd Na lighter dopant density Ec qφbi - qVa Ec Efn qV Ev (b) reverse-biased Efp Ev Does the depletion layer widen or shrink with increasing reverse bias? Reverse-Biased PN Junction: Depletion Capacitance Reverse biased PN junction is a capacitor. Depletion capacitance per unit area N Nd Conductor P Na Insulator Wdep Cdep = εs Wdep Cdep = Conductor εs Wdep qε s 1/ 2 =[ ] 1 1 2( + )(φi − Va ) Na Nd • Is Cdep a good thing? • How to minimize junction capacitance? Capacitance-Voltage Characteristics (how to measure doping profile N(x) 1/C dep 2 1 Cdep 2 = Wdep εs 2 2 Capacitance data 2(φi − V ) = qNε S Slope = 2/qN εsA2 – φbi Vr Increasing reverse bias • From this C-V data can Na and Nd be determined? • How can we detect the doping profile N(x) of a Si bar? P+N and N+P junction EXAMPLE: A P+N junction has Na=1020 cm-3 and Nd =1017cm-3. What is a) its built in potential, b)Wdep , c)xN , and d) xP ? Solution: a) 10 20 ×1017 cm −6 kT N d N a φbi = ln = 0.026V ln ≈1V 2 20 −6 q ni 10 cm 1/ 2 b) W ≈ 2ε sφbi = 2 ×12 × 8.85 ×10 ×1 dep 1.6 ×10 −19 ×1017 qN d −14 c) xN ≈ Wdep = 0.12 µm d) xP = xN N d N a = 1.2 × 10 −4 µm = 1.2 Å ≈ 0 = 0.12 µm P+N and N+P junction P+ N Metal/Semi. junction Wdep N+ Wdep P Wdep N M P M Wdep 4.4 Junction Breakdown Peak Electric Field N+ N 0 a Neutral Region increasing reverse bias P xp E Ep 2qN E p = E(x=0)= (φi + | Va |) εs increasing reverse bias x p VB = x ε s Ecrit2 2qN − φi 1/ 2 4.4.2 Avalanche Breakdown E c original electron E E fp v • impact ionization: an energetic electron generating electron and hole, which can also cause impact ionization. • Impact ionization + positive feedbackavalanche breakdown VB = electron-hole pair generation E Ec fn ε s Ecrit 2 2qN 1 1 1 VB ∝ = + N Na Nd Lower doping High breakdown voltage 4.4.3 Tunneling Breakdown (Zener Breakdown) Dominant if both sides of a junction are very heavily doped. Filled States- Empty States Ec Ev B qBL J = G exp(- ) ≈ G exp() ε Eg If assume: average electric field ε =Eg/qL The field changes with applied voltage Va I V Breakdown To have TB, the field must be larger than 6 = ≈ 10 V/cm Ep Ecrit 4.5 Junction FET Depletion of the channel to shut off the conduction How about metal-semiconductor FET?