3.064 Hexapod HP-550 Vacuum
FACTS
s include antenna positioning, medical
Load characteristics
Fx(N)
Fy(N)
Fz(N)
FV
300
300
500
HV
300
300
500
research, laser technology, semiconductor
technology and optical systems. An
optimized
design
ensures
maximum
system stiffness and spatial resolutions
up to 0.5 µm. Vacuum versions are
The HP-550 Hexapod system can perform
available on request. The system use a
motions in all six degrees of freedom. Due
Delta-Tau controller includes advanced
to
algorithms
the
parallel
kinematic
design
for
inverse
kinematic
architecture, the system can achieve a
transformations within a user-friendly
much higher stiffness than a conventional
software package.
stages stack. Typical Hexapod applicationTECHNICAL DATA
Travel range
X, Y, Z (mm)
100 x 100 x 100 *
Rx, Ry, Rz (°)
40, 40, 60 *
Vacuum type
Speed max. X, Y, Z (mm/sec)
Speed max. Rx, Ry, Rz (°/sec)
Velocity Range (mm/sec)
Velocity Range (°/sec)
Weight (kg)
KEY FEATURES
■ Vacuum up to 10-9 hPa
■ Six axes Parallel Kinematic System
■ Travel ranges linear ( X,Y,Z ) 100x100x100 mm
■ Travel ranges rotation Rx, Ry 40°, Rz 60°
■ Maximum speed 2 mm/sec
■ Pivot Point can be set by the customer
■ User friendly software
■ Load capacity central ( Fx; Fy ) 30 kg / ( Fz ) 50 kg
FV
HV
2
0.25
1
0.125
0.001...2 **
0.001...0.25 **
0.01...1 **
0.01...0.125 **
33
33
Bi-directional Repeatability X, Y, Z (µm)
± 4, ± 4, ± 3
± 4, ± 4, ± 3
Bi-directional Repeatability Rx, Ry, Rz (°)
± 0.002
± 0.002
Resolution, calc. without load X, Y, Z (µm)
0.016
0.016
Resolution, calc. without load (height platf.) Rx, Ry, Rz (°)
ppp.
ppp.
Resolution typical without load X, Y, Z (µm)
0.05
0.05
Resolution typical without load Rx, Ry, Rz (°)
0.00057
0.00057
Current (A)
Voltage Range (V)
Stiffness, theoretical Kx, Ky, Kz (N/µm)
Material
Aluminum or Stainless steel, suitable for vacuum
Vacuum Note: * = The maximum travel ranges in the different coordinate directions ( X, Y, Z, RX, RY, RZ ) are interdependent. The
data for each axis in this table shows its maximum travel, where all other axes are at their zero positions. If the
other linear or rotational coordinates are not zero, the available travel may be less.
** = leg speed.
ppp. = depending on the pivot point position.
Please see "GLOSSARY Vacuum Specification" for all vacuum specification.
Vacuum Hexapod HP-550 3.065
APPLICATIONS
drawings for the corresponding
vacuum class must be
requested separately.
40
32
Ø250
9x n 6.6 / vn13 X 8
ROBOTICS
LINEAR STAGES
ROTATION STAGES
PIEZO STAGES
ACCESSORIES
APPENDIX
Y
SF-300 BS
SF-307 BS
SF-650 PS
SF-450 PS
SF-230 PS
HP-550
HP-430
HP-300
HP-140
H-811
H-824
H-850
P-911KNMV
50
40
360` #
Z
CONTROLLERS
75
50
2x n6H7 x 8
75
50
12x M6 x12
n230
4x M6 x12
n150
n260
FV
6005-V-
X
1 0 0 0
1
HV
2
UHVG (on request)
3
Y
25
18x M6 x 12
6x n9 /vn17 X 10
3x120°
30°
30°
125
125
526.3
175
50
175
200
75
20°
100
3x1
n550.2
Order No.
175
n130H7
n450
9x n9 / vn17 X 10
225
mm
www.pimicos.com // info@pimicos.com // phone: +49 (0) 7634-50 57 230 // fax: +49 (0)7634-50 57 393