T hin films deposition

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Thin films deposition
A
WIDE RANGE OF THIN FILMS
The
environment
friendly
vacuum
deposition
technologies enable various nature of substrates to
be coated (metals, ceramics, polymers, glass) with
layers over a wide range of compositions. The
components could be treated at
low temperature (as low as 50°C),
without surface finishing.
The PEMS™ technology, developed by HEF™ Groupe offers an
optimization
of
the
1
2
coatings
properties in a large field of
applications,
such
as
mechanical,
tooling,
decorative, optical, electromagnetic shielding…
3
4
E XAM PLES
OF VARIOUS FI E LDS OF
APPLICATIONS
5
1.
2.
3.
4.
5.
:
M ECHAN ICAL ,
DECORATION ,
E LECTROMAG N ETIC ,
TOOLI NG ,
OPTICAL .
PROPE RTI ES
O F C O M P O N E N T S T R E AT E D W I T H
HEF™ GROUPE
THIN FILMS
The thin films bring to the surface of parts and
components multiple properties :
Low friction coefficient :
• Self-lubricating layers.
Wear resistance :
• Abrasion ;
• Erosion ;
• Adhesion.
Cosmetics :
• Metallic aspect on polymers, glasses ;
• Hard films on metals, glasses.
Optical properties :
• Non reflecting ;
• Filter ;
1
• Reflector.
Electrical properties :
• Conductivity ;
• Electromagnetic shielding.
2
3
1. P LASMA
2. C OATI NG EQU I PM E NT I N CLEAN ROOM
3. T H I N FI LM CROSS SECTION M ICROG RAPH
PEMS™ :
The
A FLEXIBLE TECHNOLOGY
PE MS™
(Plasma
Enhanced
Magnetron
Sputtering) technology developed and patented by
HEF™ Groupe produce high quality coatings.
The PEMS™ technology allows several benefits :
• Combination of the advantages of magnetron
sputtering (consistent and accurate composition of
the layers, wide range of composition achievable,
absence of surface defects on the coatings…) and
high ionization to produce coatings with maximum
density.
• Operations :
- in PVD (Physical Vapor Deposition) mode,
- in hybrid PAVCD (Plasma Assisted Chemical
Vapor Deposition) / PVD mode,
1
- in plasma treatment mode for duplex coatings
(example : plasma nitriding followed by hard
coating deposition).
• Independent adjustment of the ion flow and
energy, which ensures optimization of process
parameters whatever the nature of the hard
coating.
• An efficient homogeneous etching of the parts
while sputter cleaning the targets, in order to
create a good adhesion and an accurate compo-
C OATI NG DE NSITY
( ARBITRARY U N ITS )
sition of the layers.
(A R I O N
B IT
RA
F LO
RY W
UN
I TS
O PTI M IZATION
EN
)
OF TH E DE NSITY OF A
(A R
TiN
ADJ USTM E NT OF TH E PROCESS PARAM ETE RS
E N E RGY ).
Y
E R G I TS )
UN
I O N R A RY
B IT
FI LM BY I N DE PE N DE NT
( ION
FLOW AN D ION
2
1. C OM PON E NTS I N A PLASMA SOU RCE
2. D U PLEX COATI NG CROSS SECTION
M ICROG RAPH ( ION N ITRI DI NG + Cr N)
A
C O M P L E T E S E R I E S O F C O AT I N G S
HEF™ Groupe has developed a series of coatings that covers all applications of thin films : friction and wear reduction applications on components, tool lifetime enhancement, electromagnetic shielding on polymers,
decorative and optical purpose on polymers and glass, corrosion
resistance on aluminum alloy.
H ARDN ESS
CERTESS ™
F RICTION
O XI DATION
C OLOR
Mechanical applications
RESISTANCE
CERTESS™ X
••
••
••
Steel
HEF™ Groupe tradename CERTESS™ covers low
CERTESS™ N
•
•
•••
Steel
friction and wear protection coatings. These
CERTESS™ TiN
••
•
••
Gold
CERTESS™ SD
••••
••
•••
Champagne
CERTESS™ TiCN
•••
•
••
Blue gray
CERTESS™ TiAlN
••
•
••••
Mauve
CERTESS™ DLC
•
••••
•
Black
coatings are developed to meet the requirements
of customers who design precision components
subjected to friction and wear. These tribological
C OM PARISON
OF TH E PROPE RTI ES OF TH E VARIOUS
E LECTROMAG N ETIC
C E RTESS ™
A DH ESION
ON POLYM E R
C ORROSION
P ROCE M ™ 1
••••
••••
••
Silver
P ROCE M ™ 2
••••
••••
•••
Nickel
OF TH E PROPE RTI ES OF TH E VARIOUS
D ECORATIVE
R E FLECTIVITY
( ACCORDI NG
C OLOR
RESISTANCE
P ROCE M ™
assessing their behaviour on the Tribology
Department test rigs. This department belongs to
the research center of HEF™ Groupe.
LAYE RS
SH I E LDI NG
C OM PARISON
coatings properties have been optimized by
Electrical applications
LAYE RS
C ORROSION
C OLOR
RESISTANCE
Decorative applications
TO WAVE LE NGTH )
A LU M I N U M
ASPECT
N ICKE L C H ROM E
G OLD
ASPECT
ASPECT
C OM PARISON
BASE D
A LU M I N U M
G OLD
BASE D
BASE D
C OM PARISON
•••
Aluminum
••
•••
Nickel
•
•••
Gold
OF TH E PROPE RTI ES OF TH E VARIOUS DECORATIVE LAYE RS
O PTICAL
C OPPE R
•••
R E FLECTIVITY
( ACCORDI NG TO WAVE LE NGTH )
C OLOU R
•••
Silver
••
Aluminum
•
Gold
Optical applications
OF TH E PROPE RTI ES OF TH E VARIOUS OPTICAL LAYE RS
HEF™ R&D, research center of HEF™ Groupe, also
develops custom-made coatings for specific requirements.
THIN
F I L M S A P P L I C AT I O N S
Components parts :
• Automotive : piston, piston ring, piston wrist
pin, rocker arm, tappet, injector ;
CERTESS™ SD
• Hydraulic : slide valve, ball valve ;
U LTRA HARD NANOCRYSTALLI N E LAYE RS
• Medical (prostheses, tools), textiles (thread
ON TOOLS
guide) ;
• Miscellaneous : pulleys, ball bearings, gears,
axles…
• Precision parts.
Tools :
• Stamping, punching, dies ;
• Abrasive material cutting ;
CERTESS™ TiN
FU NCTIONAL HARD DE POSITS
• Moulding, polymers injection ;
• Machining (milling, turning, tapping,
drilling…).
Decorative, optical and electrical :
• Trim components ;
• Bottles coatings ;
• Logos ;
O PTICAL
• Reflectors ;
COATI NGS WITH RE FLECTIVE PROPE RTI ES
• Antennas ;
OR ATTE N UATION
• Circuit breakers contacts.
E LECTRICAL
CON DUCTIVE COATI NGS FOR TH E SH I E LDI NG
OF POLYM E RS AN D COM POSITE MATE RIALS
FOR E LECTROMAG N ETIC COM PATI BI LITY
CERTESS™ DLC :
SE LF - LU BRICATI NG HARD
D ECORATION
LAYE RS
DECORATIVE COATI NGS ON G LASS SU PPORT
ON COM PON E NTS AN D TOOLS
E QU I PM E NT
OF
2
M OF DIAM ETE R AN D
2
M
H E IG HT FOR TH E PROCESSI NG
OF LARG E PARTS OR G REAT SE RI ES
HEF™ GROUPE :
SERVICES SUPPLIER
Specific developments to meet your
Customized access to the technology :
specialized technical need :
HEF™ Groupe is able to adapt their technology
Thanks to continuous innovation, renewal of
offer and their technology transfer to the
coatings and equipment research, HEF™ Groupe
customer’s need, as following :
offers you the best solution for your project.
• through their production units, TECHNIQUES
In order to optimize the thin film for your
SURFACES, present all over the world (and
particular application, HEF™ Groupe research
specially close to major customers),
center could generate specific developments.
Customized deposition systems can also be
• through their world wide Joint – Venture
network,
designed and manufactured thanks to its
expertise and flexibility.
• through their own international licensees
network,
• by integration of our technology on your
production site : technology transfer, technical
assistance, sale of equipment and consumables
HEF™ Groupe offers a large choice of technological transfers with the best customer’s service
in terms of quality, price, and delivery time.
An international quality policy :
HEF™ Groupe ensures to their customers that all
the treatments will be handled with the most
recent quality systems.
The procedure covers the monitoring and
control, from the inspection of incoming material
to their cleaning, processing, inspection and
1
2
shipment.
Production
units
such
as,
TECH N IQU ES
SU RFACES which are ISO 9002 certified,
enforce the quality policy. The licensees and
partners also comply with the quality standards
set by HEF™ Groupe.
4
3
1.
2.
3.
4.
TSD2200 COATI NG U N IT
C ONTROL OF TREATE D COM PON E NTS
A SSE M BLY HALL FOR TH E COATI NG U N ITS
TSD900 COATI NG U N IT
LICENSING
O F VA C U U M T R E AT M E N T S
H E F™ Groupe technologies are also available
through licensing. 350 licenses have been granted
by HEF™ Groupe in 30 countries, on different
patents.
Licensing covers technological transfer, equipment
and consumables supplying, staff training.
This technological transfer ensures the technical
assistance to partners companies for the resolution
of
specific
problems,
continuous
process
improvement through the introduction of the latest
1
technology developments.
EQUIPMENT
O F VA C U U M C O AT I N G S
Within HEF™ Groupe, TECMACHINE is the company
in charge of development and manufacturing of
H E F™ Groupe vacuum coating equipment. The
2
equipment range covers R&D systems to units
designed for large volume industrial production. All
units are equipped with State-of-The-Art systems for
pumping, process monitoring and control, safety.
• PEMS™ technology ;
• PVD, PACVD and hybrid PACVD/PVD modes in
standard ;
4
3
• Low pressure, low bias voltage arcless etching
for efficient and homogeneous substrate
cleaning ;
• OES (Optical Emission Spectroscopy) for
reactive gas flow control ;
• Independent control of ions flow and ions
energy for coatings properties optimization ;
• Multi-chamber multiplexing option ;
6
• Quick change magnetron sources ;
5
• Computer controlled and user-friendly
operations ;
• Batch processing parameters reports ;
• High performance and reliability pumping
systems ;
• Modem connection for remote maintenance.
These equipment have been validated through
several industrial operations years in our production
sites and in our partners.
1.
2.
3.
4.
5.
6.
C ATHODE
TSD800 COATI NG U N IT
C ONTROL MON ITOR
C OM PON E NTS I N A PLASMA
TSD350 COATI NG U N IT
TSD400 COATI NG U N IT
SOU RCE
RESEARCH
IN
HEF™ GROUPE
HEF™ Groupe latest developments rely upon its
research center.
HEF™ R&D center is one of the leading European
research centers, with more than 80 international
patents in the field of Surface Engineering. Their
team of 40 researcher has been involved in
20 European research projects (EUREKA, BRITEEURAM) and 7 on-going programs.
It has its own facilities for coatings and process
development,
as
well
as
friction
and
wear
assessment through its Tribology Department.
For constant renewal, this research center seeks
innovations
for
advanced
processes,
better
controlled treatment parameters and optimization of
material surface properties.
And specially in the following directions,
• Study of the influence of the chemical composition
of nanocrystalline TiBN coatings deposited by
1. A NALYSIS LABORATORY
2. L ABORATORY PROCESSI NG
LI N E
reactive cathodic magnetron sputtering.
• Study of the morphology of PVD coatings as a
function of ion bombardment parameters applied
during growth.
• Study of control of chemical composition of
coatings deposited in reactive mode through
plasma optical emission.
I N T E R N AT I O N A L
I M P L A N TAT I O N
FRANCE
ALLEMAGNE
MEXIQUE
TECHNIQUES SURFACES
Kernen/Stuttgart GmbH
Tulpenstraße 52
71394 Kernen-Rommelshausen
Tél. (49) (0) 7151 42013
Fax (49) (0) 7151 48244
e-mail : [email protected]
ETSA
Fundidores N°18, Z.I.
Xhala Cuautitlan Izcali
Estado de Mexico 54800 - Mexico
Tél. (52) 5 872 85 20/870 2255
Fax (52) 5 872 0255
e-mail :
[email protected]
ESPAGNE
TECNICAS DE SUPERFICIES
Catalunya SL
Ctra Nacional 152, Km 24,2
POL. IND. ELS XOPS, C/BATZACS NAVE 7
08185 LLICA DE VALL (BARCELONA)
Tél. (34) 93 849 92 00
Fax (34) 93 849 62 23
e-mail : [email protected]
ITALIE
TECHNIQUES SURFACES Italia
Via Tanaro N°19
20010 Villastanza di Parabiago (Mi)
Tél. (39) 0 331 / 55 59 00 / 55 51 84
Fax (39) 0 331 / 55 71 70
e-mail : [email protected]
ROYAUME UNI
TECHNIQUES SURFACES United Kingdom
Wood Lane, Erdington
Birmingham B24 9QL
Tél. (44) 121 382 80 60
Fax (44) 121 377 89 28
e-mail : [email protected]
USA
HEF USA
2860 Fisher Road
Columbus, Ohio 43204
Tél. (1) 614 276 04 01
Fax (1) 614 276 63 77
e-mail : [email protected]
BRESIL
HEF Do Brasil
Estrada do Rufino 1182
Serraria - CEP 09980-380
Diadema - Sao Paulo
Tél. (55) 11 4056 44 33
Fax (55) 11 4056 25 02
e-mail : [email protected]
CANADA
SURFACE METALLURGICAL Inc.
295 Arvin Avenue
Stoney Creek, On.
L8E 2M3
Tel. (1) 905 664 1996
Fax. (1) 905 662 2907
e-mail: [email protected]
CHINE
HEF Shanghai
629 Lingling Road
Aihe building 2C
Xuhui District
Shanghai 200030
Tél. (86) (0) 21 64 87 43 90
Fax (86) (0) 21 34 24 04 32
e-mail : [email protected]
INDE
HEF India
3/5 Pattammal Street Mandaveli
CHENNAI 60028
Tél. (91) 44 49 36 647
Fax (91) 44 49 51 389
e-mail : [email protected]
JAPON
TECHNIQUES SURFACES Nanocoat Corp.
542-1, Tatsunokuchi, Tatsunokuchi - machi,
Nomi-gun,
Ishikawa-ken 923-1245
Tél. 0761 52 0575
Fax 0761 52 0576
e-mail : [email protected]
HONGRIE
HTS Ltd
Csokako u. 27
H-1164 BUDAPEST
Tél. (36-1) 400 2689
Fax (36-1) 400 0454
e-mail : [email protected]
MALAISIE
LORD TECHNIQUES SURFACES (M) SDN Bhd
Lot. 8326 Jalan 222 - Section 51A
46100 PETALING JAYA
SELANGOR
Tél. 00 603 757 8557
Fax 00 603 757 2751
e-mail : [email protected]
Edition n° 02 - 05-2002 - The information given in this brochure are the result of our research and experience. It is therefore susceptible to change, and we cannot accept responsability for any inaccuracies.
Headquarters :
Rue Benoit Fourneyron
42160 Andrézieux-Bouthéon cedex
Tél. (33) (0) 4 77 55 52 22
Fax (33) (0) 4 77 55 52 00
e-mail : [email protected]
Site Web : www.hef.fr
HEADQUARTERS :
Rue Benoit-Fourneyron / Z.I. SUD - 42160 Andrézieux-Bouthéon - France
Phone + 33 (0) 4 77 55 52 22 - Fax + 33 (0) 4 77 55 52 00
e-mail : [email protected] - Website : www.hef.fr
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