65 7.5. The Mesh Analysis The performance of pnCCDs as X-ray detectors is characterized by electronic noise, energy resolution and a usable energy range with the lowest and highest detectable X-ray energy in particular. Usually these performance parameters determine the suitability of a specific CCD for a given application. However, these parameters do not define in which way the pnCCD pixel array reacts to incident X-ray photons when hitting the pixel structure at their boundaries. To view an individual description of the X-ray response, the signal amplitude of neighbouring pixels surrounding the pixel with the highest electron density can be parameterized with the so called mesh analyis: It shows how the signal charge generated by an X-ray photon is distributed over the pixel array of a CCD. By using the mesh analysis the position resolution of X-ray pnCCDs is improved to the order of one micrometers. Furthermore it is also employed to correct, verify and optimize device simulations and the realization of pnCCD designs. The Japanese group around H. Tsunemi employed mesh analysis to enhance the position resolution of X-rays in MOS-CCDs. The method was later adapted and extended for the development of pnCCDs by MPI HLL. Scanning the CCD surface with a narrow X-ray beam (of about three to five μm) in an energy range of 0.2 to 10 keV with several 100,000 individual X-rays per pixel is very time consuming and inefficient. These difficulties can be overcome by placing an opaque metal foil – called mesh – with a regular hole grid in front of the pnCCD (Figure 2). A slight rotation of the mesh with respect to the pixel structure ensures that every hole has a different position relative to the pixel below (Figure 1). The geometrical mesh parameters are tailored to the pixel sizes of pnCCDs of 150 μm, 75 μm as well as 51 μm. As the hole distance is one, two or three times the pixel size, data analysis shows a Moiré pattern (Figure 1), resulting from the fact that hole positions near the middle of a pixel repeat in a regular pattern caused by the small rotation angle of the mesh. Our advanced mesh data analysis reconstructs all occurring positions of mesh holes on the pnCCD. The mesh position and data measurements are then translated into a virtual scanning process of one reconstructed pixel. This is facilitated by the uniformity of the pixel array of a pnCCD, i.e. all pixels react in the same way to a given position of incidence of an X-ray photon. The foil deployed by MPI HLL is of gold, 10 μm thick, with a hole diameter of 5 μm, every hole being displaced by 150 μm from the adjacent hole. It remains opaque for X-rays with energy of up to 5.4 keV, being the energy of the Cr-K emission line. The size of the mesh is 11 mm by 16 mm. One result of the mesh analysis is a charge collection map. It shows the reconstructed charge collection function (CCF) of a pnCCD for a given X-ray energy. The CCF is the relative amount of signal charge being collected in a pixel depending on the incidence position of an X-ray photon (Figures 5 to 7). 66 pnCCDs Figure 1. Schematic drawing of the mesh on top of a pixel array. Bright shades indicate pixels with large signals. Figure 2. Schematic drawing of X-ray tube setup with CCD and mesh. Figure 3 and 4. Comparison of the measured and simulated CCF in the charge transfer direction. Left plot the results for a pixel size of 75 μm are shown, the right plot features results for a pixel size of 51 μm. Both examples are for a photon energy of 4.5 keV/ Ti-K . Figure 1. Figure 2. A charge collection function (CCF) is displayed in a three by three pixel map as a pixel also shows a signal if an X-ray photon has an incidence position lying below a certain distance outside of the pixel border (Figures 5 to 7). (Figures 3 and 4). This way, the accuracy of the simulations was improved by the application of the correct model for the drift and diffusion of signal electron clouds. A detected X-ray photon can cause a signal pattern of up to four neighbouring pixels. In combination with the charge collection function, the detected signal pulse heights in the pattern are used to reconstruct the incidence position of the photon with a precision of down to one micron. The CCF of a pnCCD can be simulated with the device simulator program TeSCA. The simulations of the pnCCDs used for mesh measurements have been compared to the reconstructed charge collection functions Figure 3. MPI HLL Recently the mesh analysis has been applied successfully to the DEPMOSFET-pixel arrays (see Chapter 8. and 8.1.) produced in the MPI HLL. They show very clearly the regions within a pixel where charge spreading is enhanced. By comparing the measured data with the simulations we are able to reconstruct details of the potential distribution within a pixel. In the future all position resolving X-ray detectors made by MPI HLL will be analyzed with this method. Figure 4. pnCCDs Figures 5 to 7. Charge collection functions (CCF) for X-ray energy of the Ti-K emission line with mean photon energy of 4.5 keV. From top down CCF maps of devices with pixel sizes of 150 microns, 75 microns and 51 microns are shown. Figure 5. Figure 6. Figure 7. 67