Document Owners:
Release Date: 8/20/10
MTW Facilities
Management, MTW EH&S
MacroTechnology Works
Document Title:
Document No:
Document Rev: 0
Equipment Decontamination
Purpose –
The purpose of this document is to provide a uniform procedure to ensure that all ASU
equipment that is removed from service or is relocated at the MacroTechnology Works is
reviewed for compliance with Facilities Management and EH&S decontamination requirements.
Removing or relocating any equipment MUST BE completed in a manner designed to minimize or
eliminate the opportunity for harm to personnel, to the facility, and to the environment. Any piece of
equipment, component, or sub-assembly that has been exposed to or contained any hazardous or
toxic material must be decontaminated (cleaned) to the greatest extent possible. The determination
of appropriate methods and means to accomplish this task will be determined on a case-by-case
basis. Tenants/lessees are required to adopt their own standards for the handling of tenant/lessee-owned
equipment. Tenant/lessee-owned equipment may be inspected by ASU personnel to ensure the safety of
ASU personnel and the MacroTechnology Works facility.
Scope –
This document applies to all ASU equipment located at the ASU MacroTechnology Works (ASUMTW or MTW) including research and development, production, laboratory, point-of-use abatement,
metrology, test, and other equipment that can present an electrical, radiation, mechanical,
environmental, fire, ventilation, or chemical hazard. In addition, this document applies to equipment
that is connected to or provides facility services such as house exhaust, waste drains, chemical dispense
systems, toxic gas monitoring, fire protection, house air/vacuum systems, and other systems that have
been or may be contaminated. This document covers the removal and decontamination of any
component of a piece of equipment that may be or may have been contaminated. Facilitysupport equipment such as exhaust ductwork, vacuum interconnection piping, drain piping,
chemical distribution systems, etc. are included in the scope of this document. This
document applies to all aspects of all ASU operations at the ASU-MTW and only to activities at the MTW.
Reference Documents –
EHS 104
Laboratory Use of Hazardous Chemicals
EHS 105
Personal Protective Equipment
EHS 113
Radiation Safety in Research and Teaching
EHS 403
Chemical Release Emergency Response
EHS 405
Laboratory Check-in/Check-out
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Equipment Decontamination
Regulatory and Safety Drivers and Resources –
SEMI S12
Guidelines for Equipment Decontamination
SEMI S16
Environmental, Health and Safety Guidelines for Semiconductor Manufacturing
Equipment Disposal
49CFR171-178
Department of Transportation (DOT)
40CFR260-271
Resource Conservation & Recovery Act (RCRA)
29CFRI910
Occupational Health & Safety Administration (OSHA)
Procedure –
1.0 EQUIPMENT DECONTAMINATION GUIDELINES:
This section describes the guidelines for the decontamination of process-related equipment/tools, research
equipment, point-of-use abatement, metrology, test, and laboratory equipment/tools and the individual
components of such equipment.
An approval/review/sign-off requirement for the decontamination
procedures to be used to perform the decontamination process is included in this guideline to ensure
applicable regulations are met.
Included in the equipment decontamination process are the following equipment/tool situations:
Relocation (for re-installation within same bay/room or within site boundaries)
Moved to storage/staging on-site for possible future use
Sent off-site (transferred/sold to another company; sent for refurbishment, repair or maintenance)
Sent off-site for final disposal
Exception: this protocol does not cover parts being removed to be sent to parts clean operations
or for vacuum pump repairs - provided that a written procedure has been developed regarding the safe
handling/shipping of equipment with residual contamination
And in addition, if the equipment/tool has any one of the following features:
Uses, contains, or comes in contact with a hazardous chemical
Connects to a facility system such as house exhaust, waste drains, chemical feed, toxic gas
monitoring, fire alarm and/or suppression, and house air/vacuum systems
Contains any ionizing or non-ionizing radiation source (i.e. laser, RF, microwave, X-ray, etc.).
NOTE: Transportation, safety, and environmental regulations prohibit the improper transportation and
disposal of hazardous materials. Contaminated equipment and support facilities must be decontaminated
prior to removal. When sufficient decontamination is not attained or is unfeasible, equipment and/or
support materials will be packaged, labeled, transported, and disposed-of as regulated waste. The
costs of such handling and disposal will be the responsibility of the tool/equipment owner.
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Equipment Decontamination
ASU and state regulations govern radiation sources and they must be properly managed and inventoried
when removed or relocated. See “EHS 113: Radiation Safety in Research and Teaching” for further
information.
The tool/equipment owner must identify any components such as batteries, capacitors, lamps, mercury
switches, etc. or any materials contained in the equipment (PCBs, dioxins, mercury, lead, lubricants,
coolants, etc.) that require special disposal procedures. These items must be handled as required by
various environmental laws and regulations.
The tool/equipment owner must identify all components such as flow controllers, chemical source tanks or
controllers, etc. and any materials contained in the equipment (reactives, corrosives, flammables,
pyrophorics, etc.) that require special decontamination or disposal procedures. These items must be
handled as required by various environmental laws and regulations.
Visible and detectable contamination, as evidenced by odors, residues, liquids, powders, flakes, or films
on or in equipment should be assumed to be hazardous contamination that must be removed unless
determined to be otherwise.
If possible, equipment should be decontaminated “in place” in order to take advantage of exhaust
systems, drains, and other support facilities that are available. If “in place” decontamination is not
possible, proper protection of workers, the facility, the environment, neighbors, etc. must be provided.
Any equipment still containing hazardous materials after decontamination has been attempted must be
treated as hazardous waste and disposed of accordingly.
All liquid residues must be removed from all pipes, tanks, etc. or said pipes, tanks, etc. must be capped,
plugged or otherwise sealed.
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Equipment Decontamination
1.1 Equipment Engineer/Tool Owner Responsibilities to Prepare Decontamination Plan:
1.
Identify equipment/tool and/or tool components that are to be removed and the intended
final disposition of tool or part (sale, salvage, scrap, reuse, storage, repair, etc.). Begin
documentation process including ASU asset transfer. Begin preparation of checklist.
2. Meet with ASU-MTW Facilities Management Director, ASU-MTW EH&S Director, Lab
Director/Manager, and lab/department EH&S Compliance Officer to determine scope of
project.
3. Collect available data to determine what chemicals and chemical byproducts are or were
present in equipment or components to be removed.
4. Determine appropriate means and methods to remove contamination. This may include
the use of water, solvents, acids, neutralizers, etc. or physical means (wipes, bead blasting,
etc.) to clean the equipment or components. Note that approval for any new chemicals to
be used is required per MacroTechnology Works protocols and proper disposal methods
for used cleaning solutions/materials must be identified. Perform Job Hazard Analysis if
appropriate. Identify methods and means to minimize hazards.
5. Identify the proper location for such cleaning activities (in place, in a hood, etc.). Consider
the possibility of outgassing and unplanned reactions that might occur during the cleaning
process. Describe preventative measures to be taken to ensure no exposure of
surrounding employees/area to hazards during decontamination.
6. Determine and procure proper Personal Protective Equipment (PPE) required to safely
perform the decontamination process.
7. Identify proper means and methods to prove that the decontamination process/procedure
has been successful and that the item can be safely dispositioned.
8. Identify proper personnel (contractors, employees, etc.) to perform decontamination
process and identify and provide appropriate training, if necessary.
9. Meet with ASU-MTW Facilities Management Director, ASU-MTW EH&S Director, Lab
Director/Manager, and lab/department EH&S Compliance Officer to review items 3-8 above
and the checklist.
10. Once approval has been granted, obtain PPE, chemicals, tools, containers, etc. to be used
for decontamination work and waste collection.
11. Once the above steps have been completed, decontamination work may proceed, with
proper supervision of the work at all times.
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Equipment Decontamination
1.2 Equipment Engineer/Tool Owner Responsibilities to Perform Decontamination:
1. Verify that all preparatory tasks listed above have been completed and that tool and/or tool
components that are to be removed are ready for decontamination. This may include
purging, capping of lines, etc. Provide a copy of the checklist to the person(s) performing
the decontamination tasks.
2. Supervise decontamination of tool/component following the procedures in the checklist. If
unplanned events are observed, STOP work immediately.
3. Supervise/perform tests described in the decontamination verification protocol identified
above to prove that the decontamination process/procedure has been successful and the
item can be safely dispositioned. If the decontamination process has not removed all
contamination, STOP.
4. Once the decontamination process has been successfully completed, contact ASU
Facilities Management and ASU EH&S to review all data, including decontamination
verification test data. Once approval has been granted, decontaminated equipment or
components may be packaged for disposition.
5. Provide copies of all completed checklists, etc. to ASU EH&S to be stored in site
documents file.
6. Once affected equipment has been removed from lab, inspect area for any repairs needed.
Contact ASU Facilities Management for final inspection upon completion of project.
7. Comply with requirements of EHS 403, Laboratory Check-in/Check-out, as appropriate.
1.3 Person(s) Performing Decontamination Activities:
1. Verify that all preparatory tasks listed above have been completed and that tool and/or tool
components that are to be removed are ready for decontamination. This may include
purging, capping of lines, etc. See checklist.
2. Verify that you understand proper procedures to perform decontamination. Use PPE as
directed.
3. Begin decontamination of tool/component following the procedures in the checklist. If there
are unexpected problems, STOP work immediately and contact the tool owner and EH&S.
4. Perform tests identified above to prove that the decontamination process/procedure has
been successful. If the decontamination process has not removed all contamination,
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STOP. Contact tool owner for further instructions.
5. Once the decontamination process has been successfully completed, clean up all
materials, supplies, tools, PPE, etc. used for the decontamination process. Dispose of
used material properly. Dispose of excess cleaning materials as necessary.
6. Once decontamination verification approval has been granted, decontaminated equipment
or components may be prepared/packaged for disposition.
1.4 Lab/Department Management/EH&S Compliance Officer Responsibilities:
1. Provide assistance to equipment/tool owner in preparation of equipment decontamination
plan and checklist.
2. Review and approve completed equipment decontamination plan and checklist prior to plan
initiation.
3. Provide necessary resources/assistance to equipment/tool owner to ensure safe operation.
1.5 MTW Facilities Management/EH&S Responsibilities:
1. Provide assistance to equipment/tool owner in preparation of equipment decontamination
plan and checklist.
2. Review and approve completed equipment decontamination plan and checklist prior to plan
initiation.
3. Review decontamination verification data.
4. Inspect space once equipment has been removed and ensure that all necessary repairs
are completed.
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Equipment Decontamination
Equipment Decontamination Checklist
Equipment/Component Information:
Manufacturer:
Serial Number:
Location, Room Number:
Date:
Model Name/Number:
ASU Asset Number:
Bay, Floor, Column:
Description:
Chemical Information:
List all chemicals used in equipment and all byproducts formed in equipment:
Briefly describe process:
Decontamination Protocol Information:
Recommended Decontamination Process/Procedure:
Recommended Decontamination Chemicals to be Used:
Recommended Location for Decontamination Process to be Performed:
Recommended Disposal Method for Used Decontamination Chemicals:
Recommended Personal Protective Equipment Required:
Recommended Personnel to Perform Decontamination:
Describe Decontamination Verification Tests to be Performed:
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Equipment Decontamination
Describe, in detail, exact procedures to be used to perform decontamination and verification of
successful decontamination:
Reviewed/Approved:
Tool Owner:
Date:
Lab Director/Manager:
ASU EH&S Compliance Officer:
ASU Facilities Management:
ASU EH&S Management:
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Equipment Decontamination
Equipment Decontamination Verification
Equipment/Component Information:
Date:
Model Name/Number:
Manufacturer:
Serial Number:
ASU Asset Number:
Location, Room Number:
Bay, Floor, Column:
Description:
Chemical Information:
List all chemicals used in equipment and all byproducts formed in equipment:
Briefly describe process:
Decontamination Protocol Information:
Decontamination Process/Procedure Used:
Decontamination Verification Tests Performed:
Decontamination Verification Test Results:
Decontamination Has Been Successfully Completed:
Name of Tool Owner:
Signature of Tool Owner:
Name of Person(s) Performing Decontamination:
Signature(s) of Person(s) Performing Decontamination:
ASU EH&S Approval:
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