DP Series Springless Diaphragm Valves (1.125 in.)
Technical Report
Scope
This technical report provides data on
Swagelok® DP series diaphragm valves
(1.125 in.). The report covers:
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Inboard Helium
Leak Testing
Swagelok DP series diaphragm valves
(1.125 in.) processed to meet Swagelok
Ultrahigh-Purity Process Specification
(SC-01), MS-06-61, were evaluated
for inboard helium leak integrity of the
valve seat in accordance with SEMI-F1.
The 10 valves exhibited a helium
permeation response that was
significantly better than the 1 ⫻ 10 –9
std cm3/s leak rate at the 15 s test limit.
Statistical process control (SPC) allows Swagelok to provide consistent surface
finishes, as described in Swagelok Ultrahigh-Purity Process Specification (SC-01),
MS-06-61. The roughness average (Ra) specification we have established for the
wetted surfaces of Swagelok P or P1 finish is 5 μin. (0.13 μm) Ra on average.
1 ⫻ 10–6
Helium Leak Rate, std cm3/s
Surface Finish
surface finish
inboard helium leak testing
particle counting
moisture analysis
hydrocarbon analysis
ionic cleanliness
lab cycle testing.
Particle counting, moisture analysis,
hydrocarbon analysis, and ionic
cleanliness data show test results
from valves cleaned with deionized
(DI) water according to the techniques
described in Swagelok UltrahighPurity Process Specification (SC-01),
MS-06-61.
1 ⫻ 10–7
15 s Test Limit
1 ⫻ 10–9 std cm 3/s Limit
1 ⫻ 10–8
1 ⫻ 10–9
1 ⫻ 10–10
0
10
20
30
40
50
60
Time, s
3.0
Particle Counting
Static
1.3 per cubic foot
Particles Counted
Testing was performed in accordance
with ASTM F1394, measuring particles
greater than 0.02 μm in size. Static
particle emissions from a Swagelok DP
series diaphragm valve (1.125 in.) meet
the recommended performance of
fewer than 20 particles per cubic foot,
in accordance with SEMI E49.8.
Dynamic
2.3 per cubic foot
2.0
1.0
0
0
10
20
30
40
50
60
Time, min
www. swagelok.com
Moisture Analysis
Spool Piece
Reinstall
200
Moisture, ppb
A Swagelok DP series diaphragm valve
(1.125 in.) recovered from a 200 ppb
moisture spike in less than 10 min. This
is much faster than the 1 h guideline
of SEMI E49.8. Moisture analysis of
Swagelok SC-01 processed products
was performed in accordance with
SEMASPEC 90120397B-STD guidelines.
250
The lower graph shows the pattern
of elevated temperatures that were
applied to the valve during testing to
enhance the moisture sensitivity of the
system.
Valve Install
150
100
50
0
0
100
200
300
400
500
600
500
600
Time, min
Temperature, °C
80
Spool Piece Reinstall
Valve Install
60
40
20
0
100
200
300
400
Time, min
Hydrocarbon Analysis
Concentration, ppb
Hydrocarbon residues in a Swagelok
DP series diaphragm valve (1.125 in.) fall
within the background level produced
by the test instrument. Hydrocarbon
analysis of Swagelok SC-01 processed
products was conducted in accordance
with SEMASPEC 90120396B-STD
guidelines.
50
40
Spool Piece
Reinstall
Valve Install
30
20
10
The lower graph shows the pattern
of elevated temperatures that were
applied to a valve during testing to
drive off any hydrocarbon residues in
the system.
0
0
100
200
300
400
500
Time, min
Temperature, °C
80
Spool Piece Reinstall
Valve Install
60
40
20
0
100
200
300
Time, min
2
400
500
Ionic Cleanliness
1.0
Ionic Contamination, μg/mL
Residual ionic contamination is very
low (less than 1 μg/mL for SC-01
processed valves.)
Swagelok DP series diaphragm valves
(1.125 in.) were tested in accordance
with ASTM F1374:
■ Each valve was filled with
deionized (DI) water.
■ After 24 h, the sample was
extracted and analyzed.
Anions (–)
Cations (+)
Fluoride
Chloride
Nitrate
Phosphate
Sulfate
Lithium
Sodium
Ammonium
Potassium
Magnesium
Calcium
0.8
0.6
0.4
Cations
(+)
Anions
(–)
0.2
0
Normally Closed Pneumatically Actuated Valves
Lab Cycle Testing
The Swagelok DP series diaphragm
valve (1.125 in.) was evaluated for
cycle life under controlled laboratory
conditions. All valves were electronically
monitored during testing for envelope
seal integrity. At regular intervals the
valves were removed and evaluated
for seat seal integrity, envelope seal
integrity, flow performance, and
actuator seal performance.
These tests are not a guarantee of a
minimum number of cycles in service.
Laboratory tests cannot duplicate the
variety of actual operating conditions
and cannot promise that the same
results will be realized in service.
Model
DP series diaphragm valve (1.125 in.)➀
Mode of Actuation
Normally closed pneumatically actuated
Quantity
6
6
6
Gas
6
5
Dry, filtered nitrogen
Temperature, ºF (ºC)
Inlet and Outlet Pressure
psig (bar)
Actuator Pressure
psig (bar)
70 (20)
70 (20)
70 (20)
–10 (–23)
302 (150)
125 (8.6)
Vacuum
125 (8.6)
125 (8.6)
125 (8.6)
75 (5.1)
75 (5.1)
120 (8.2)
120 (8.2)
120 (8.2)
Cycle Rate, cpm
600
600
600
420
60
Number of Cycles
1 million
1 million
1 million
1 million
1 million
Final Seat Seal Leakage
std cm3/s He
Final Envelope Leakage
std cm3/s He
< 1 ⫻ 10–9➁
< 1 ⫻ 10–9
< 1 ⫻ 10–9
< 1 ⫻ 10–9
< 1 ⫻ 10–9
< 1 ⫻ 10–9
< 1 ⫻ 10–9
< 1 ⫻ 10–9
< 1 ⫻ 10–9
< 1 ⫻ 10–9
➀ C-seal design only.
➁ One seat failure at 1 million cycles with assignable cause. Final leakage = 1 ⫻ 10–8 std cm3/s He.
Normally Open Pneumatically Actuated Valves and Manually Actuated Valves
DP series diaphragm valve (1.125 in.)➀
Model
Mode of Actuation
Quantity
Normally open
pneumatically actuated
5
5
Manual
12
Gas
Temperature, ºF (ºC)
Inlet and Outlet Pressure
psig (bar)
Actuator Pressure
psig (bar)
12
6
12
12
6
Dry, filtered nitrogen
70 (20)
302 (150)
70 (20)
302 (150)
–10 (–23)
70 (20)
302 (150)
–10 (–23)
35 (2.4)
125 (8.5)
0
0
0
145 (10)
145 (10)
145 (10)
80 (5.4)
80 (5.4)
—
—
—
—
—
—
Cycle Rate, cpm
60
60
10
10
10
10
10
10
Number of Cycles
1 million
1 million
15 000
15 000
15 000
30 000
30 000
30 000
Final Seat Seal Leakage
std cm3/s He
Final Envelope Leakage
std cm3/s He
< 1 ⫻ 10–9
< 1 ⫻ 10–9
< 1 ⫻ 10–9
< 1 ⫻ 10–9
< 1 ⫻ 10–9
< 1 ⫻ 10–9➁
< 1 ⫻ 10–9➂
< 1 ⫻ 10–9
< 1 ⫻ 10–9
< 1 ⫻ 10–9
< 1 ⫻ 10–9
< 1 ⫻ 10–9
< 1 ⫻ 10–9
< 1 ⫻ 10–9
< 1 ⫻ 10–9
< 1 ⫻ 10–9
➀ C-seal design only.
➁ One valve exhibited seat seal leakage above 1 ⫻ 10 –9 std cm3/s He after 30 000 cycles. Final leakage = 2.1 ⫻ 10–9 std cm3/s He.
➂ One valve exhibited seat seal leakage above 1 ⫻ 10 –9 std cm3/s He after 30 000 cycles. Final leakage = 2.9 ⫻ 10–9 std cm3/s He.
3
Referenced Documents
ASTM Standards ➀
Swagelok Specification
F1374 Standard Test Method for
Determination of Ionic/Organic
Extractables of Internal Surfaces—
IC/GC/FTIR for Gas Distribution
Systems Components
Ultrahigh-Purity Process Specification
(SC-01), MS-06-61
F1394 Standard Test Method for
Determination of Particle
Contribution from Gas Distribution
System Valves
➀ American Society for Testing and Materials,
100 Barr Harbor Dr., West Conshohocken, PA
19428, U.S.A.
➁ SEMATECH, Inc., 2706 Montopolis Dr.,
Austin,TX 78741, U.S.A.
➂ Semiconductor Equipment and Materials
International, 3081 Zanker Road, San Jose, CA
95134, U.S.A.
SEMATECH SEMASPECs➁
90120396B-STD Standard Test
Method for Determination of Total
Hydrocarbon Contribution by Gas
Distribution Systems Components
90120397B-STD Standard Test Method
for Determination of Moisture
Contribution by Gas Distribution
Systems Components
SEMI Standards➂
F1 Specification for Leak Integrity of
High-Purity Gas Piping Systems
and Components
E49.8 Guide for High-Purity and
Ultrahigh-Purity Gas Distribution
Systems in Semiconductor
Manufacturing Equipment
These tests do not simulate any specific application and are not a guarantee of
performance in actual service. Laboratory tests cannot duplicate the variety of
actual operating conditions. See the product catalog for technical data.
Safe Product Selection
When selecting products, the total system design
must be considered to ensure safe, trouble-free
performance. Function, material compatibility, adequate
ratings, proper installation, operation, and maintenance
are the responsibilities of the system designer and user.
Swagelok—TM Swagelok Company
© 2005, 2007 Swagelok Company
June 2007, R1
MS-06-21-E