Paramount® Mid-Frequency 2 MHz Series
Digitally controlled RF Power Supplies with Pulsing
and Sweep Frequency Tuning
The Paramount® platform enables the short process steps
Benefits
and evolving demands of advanced PECVD, dielectric
•Enhanced plasma stability and
process repeatability
and conductor etch, and sputtering applications. Digital
• Precise RF control
control, real-time power and impedance measurement,
• Fast response to plasma
changes
and dynamic response to process fluctuations enhance
process stability and repeatability. With frequency tuning,
pulsing, and pulse synchronization, the 2 MHz Paramount
series is an economical choice for mid-frequency RF
process innovation.
Electrical1
•Economical mid-frequency
RF power delivery
Features
• Full digital control
• Pulsing and pulse
synchronization
Paramount® 2 MHz
Output Power
• Frequency tuning
•Real-time power and
impedance measurement
RF Power Range
50 W to 5 kW
Regulation Modes
Forward, load, voltage
Frequency Range
1.8 to 2.2 MHz
• High VSWR capability
Frequency tuning ±10%
• Phase synchronization (CEX)
Frequency Resolution
1 Hz
Power Accuracy
Into ≤ 1.6:1 VSWR: ±1.5 W or ±1% of set point,
whichever is greater
Into ≤ 3.1 VSWR: ±1.5 W or ±2% of set point,
whichever is greater
Input Power
1
• Flexibility and adaptability
for advancing manufacturing
technologies
208 VAC, 50 or 60 Hz
Electrical specifications vary by model number. Please contact an AE representative for more information.
Available Features
Paramount® 2 MHz
Pulse Mode
Pulsing frequencies: 10 Hz to 10 kHz
Pulsing duty cycle: 10 to 90%
Pulse Synchronization
Master/slave pulse coordination
Individually programmable pulse on- and offtimes
Frequency Tuning
< 10 ms typical tune time
Arc Management
Programmable arc-management parameters,
including detect time, shutdown time, and
voltage level
Phase Synchronization (CEX)
Output waveform synchronization for
connected power supplies
User-adjustable phase offset, 0 to 359°
•Tightly regulated output power
Semiconductor Applications
• PECVD
•Dielectric and conductor etch
•Sputtering
Physical
Dimensions2
Paramount® 2 MHz
21.8 cm (H) x 46.7 cm (W) x 56.6 cm (D)
8.6" (H) x 18.4" (W) x 22.3" (D)
Weight
27.2 kg (60 lb)
Connector and Cable Specifications
2
Output Power
SQS, female
Input Power
Harting® Han®-Q with switch
User Port
25-pin, female, sub-miniature D
Host Port
9-pin, female, sub-miniature D
Dimensions do not include rear-panel connectors.
I/O Control
Paramount® 2 MHz
Analog Interface
25-pin, female, sub-miniature D
Serial Interface
Standard: RS-232/485
Available: Ethernet, DeviceNet®, EtherCAT®
485.82 cm
19.127"
485.82 cm
19.127"
For more information on Paramount® 2 MHz power supplies, visit
www.advanced-energy.com/en/Paramount.html
For more information on AE’s complete product portfolio, visit
www.advanced-energy.com/en/Products.html
World Headquarters
1625 Sharp Point Drive
Fort Collins, CO 80525 USA
970.221.4670 Main
970.221.5583 Fax
www.advanced-energy.com
Specifications are subject to change without notice.
© 2013 Advanced Energy Industries, Inc. All rights reserved. Advanced Energy®, A Powerful Advantage™, and Paramount® are
trademarks of Advanced Energy Industries, Inc. • DeviceNet® is a trademark of the Open DeviceNet Vendor Association, Inc. (ODVA).
• EtherCAT® is a trademark of Beckhoff Automation GmbH, LLC • Harting® and Han® are trademarks of Harting Elektronik GmbH.
ENG-Paramount2MHz-250-01 0M 1.13