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MICROELECTR NIC &
INFORMATION CIENCES
CENTER
NEWSLETTER
August/September, 1983
Vol. 1, No. 1
INSTITUTE OF TECHNO OGY
UNIVERSITY OF MINNE OTA
227 Lind Hall I 207 Church Street S.E.
Minneapolis, Minnesota 55455
612/376-9122
The MEIS Newsletter is intended to bring you information on the peo le and
programs of the MEIS Center every other month. You are welcome to opy the
newsletter for circulation among interested people. Any items you ould like
to have included in the Newsletter should be sent to the MEIS Offic or call
376-9122.
SEMINARS: The MEIS SEMINAR SERIES will sponsor ten speakers duri g '83-84.
The following seminars have been scheduled:
Oct. 18
King-ning Tu (IBM)
Interdiffusion of Thin Film
Nov. 1
Nov. 15
Don Pederson (UC Berkeley)
Rolf Landauer (IBM)
Dec.
Scott Kirtpatrick (IBM)
Jan. 17
W.E. Spicer (Stanford)
Feb. 21
Dick Foss (Mosaid)
Computer Aided Design
Physical Limitations of Com utational
Processes
Optimization in Computer De ign and
Statistical Mechanics
Surfaces and Interfaces on n "Atomic"
Scale: GaAs, InP, GaSp
MOS Memory
Mar.
James Meindl (Stanford)
VLSI and Beyond
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MEIS seminars will be held in ME108 at 2:15 pm with coffee and disc ssion
following at 3:00. The seminars are open to the technical communit of the
Twin Cities. For directions or parking information, call 376-9122.
The first Van Vleck Lecture in Physics will feature P.W. Anderson (ell Labs),
Nobel Laureate, on October 26, 4:00 in Coffman Union Theater. His ecture on
"Disordered Materials" will be followed by a reception in the Campu Club.
As part of the Control Data Corporation-sponsored Visiting Professo ship in
Computer Science, the following guest lecturers will give seminars. The
MEIS office is assisting V. Berzins, computer science, in schedulin meetings
with the visiting lecturers. For more information call 376-9122.
Oct. 3
Oct. 17
Oct. 24
L. Belady (IBM)
Raymond Yeh (U Maryland)
C.V. Ramamoorthy
(UC Berkeley)
Software Engineering in Jap n
The State of the Software I dustry
Some Experiments with Proce s
Control Software
MEIS Newsletter, Vol. 1, No. 1.
Page 2
WORKSHOP: The Test Technology Curriculum Workshop, cosponsored by MEIS and
IEEE, will be held Nov. 15-16 at the Marquette Inn in Minneapolis, for information or registration,call 376-9122 orAl Tuszynski, conference coordinator,
373-2970.
SYMPOSIUM: For those interested in organic thin films, a symposium on
"Organic Chemistry and Microelectronics" will be held at UM December 2-3, 1983.
Cosponsored by MEIS, Chemistry Dept., and UM Grad School,the symposium is
organized by Larry Miller, chemistry.
ME IS TECHNICAL REPORTS;
376-9122.
MEIS Technical Reports are available by calling
Recently issued are:
Technical Report /tl: "A Three-Dimensional-CMOS Design Methodology,"
June 83
B. Hoefflinger, S.T. Liu, B. Vadjic
Technical Report /12: "An Interface Catalytic Effect: Cr at the Si(III)-Au
Interface," July 83
A. Franciosi, D.G. O'Neill, J. Weaver
VISITORS: Professor Dennis Hess, UC Berkeley, will be on campus as an MEIS
Faculty Fellow during the '83-84 academic year. Hess will bring to UM his
active research program in processes for microelectronic materials and will
participate in a lecture series.
NEW fACULTY: A program of faculty expansion sponsored by the MEIS Center has
brought the following new faculty members to UM in MEIS areas:
Chemical Engineering & Material Science
Alfonso Franciosi, asst. prof./electronic physics of semiconductor-metal
interfaces
John Weaver, prof. and coordinator, Synchrontron Radiation X-ray Beamline
Laboratory/electronic materials, X-ray beamline spectroscopy
Computer Science
Parviz Afshari, asst. prof./computer architecture and performance evaluation
Peter Borgwardt, asst. prof./VLSI design and computer architecture
Maria Gini, asst. prof./programming languages for robots
Electrical Engineering
In Hwang, asst. prof./error detection and correction in computer systems
Mark Perkowski, visiting prof./CAD logic and layout design
FUNDING: Deadline for proposals submitted to MEIS Small Grants Program is
Sept. 30. Deadline for proposals to MEIS Major Projects Program will be
announced. For further information, contact MEIS office, 376-9122.
Deadline for submission of proposals to DOD University Research Instrumentation
program for F84 is Dec. 15, 1983. Guidelines will be available in late October
from Dr. Al Fregley, 202-767-5021.
LEGISLATIVE APPROPRIATION: The state of Minnesota has approved $1.2 million for the biennium '83-85 for the Microelectronic and Information Sciences
Center. This money requires matching with funds from other sources. The
Minnesota High Technology Council assisted greatly in providing information
on Minnesota's need for research and education in the microelectronic and
information sciences.
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MEIS Newsletter, Vol. 1
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No. 1.
Page 3
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ME IS FELLOWSHIP RECIPIENTS;
Recipients of the MEIS '82-83 Fellowship
Award have successfully completed their first year of graduate studies. Many
have been employed in the MEIS member companies for the summer. Stu~ents/
faculty advisors, departments include:
K. Ryan/J. c~rlis, CSci
J. Fuchs/P. Cohen, EE
R.
B.
W.
J.
R.
D.
A.
Enbody/D. Du, CSci
Greenwood/J. Evans, Chern
Couture/A. Goldman, Physics
Smith/B. Hoefflinger, EE
Zingg/B. Hoefflinger, EE
McGregor/J. Holte, EE
Eiriksson/R. Kain, EE
J.
W.
H.
J.
McGee/L. Kinney, EE
Smith/W. Munro, CSci
Lin/1-J. Munro, CSci
Bhasker/S. Sahni, CSci
s. Nahar/S. Sahni, CSci
T. Gabara/M. Shur, EE
J. Slavik/W. Thompson, cs!Ci
D. Keyani/H. Wechsler, EE
Fellowship recipients '83-84 will begin their graduate studies F83 ip the
following departments:
P.
B.
P.
D.
J.
Anderson/Physics
Saad/EE
Boyle/Chem
Brown/EE
Budenske/CSci
c. Butler/CSci
B. Clements/Physics
L. Gerholz/CSci
v. Hietala/EE
B.
J.
K.
K.
T.
Loehle/CSci
Martin/CSci
Mechelke/CSci
Riggs/MatSci
Schmitz/CSci
u. Schwuttke/EE
B. Soumekh/EE
A. Wall/MatSci
L. Wheeler/Chem
A meeting of '82-83 fellowship recipients and '83-84 fellowship recipients will
be held on Thursday, Oct. 6, 4:00pm in 227 Lind Hall. An overview o MEIS
Center's activities will be presented at the meeting, and plans for ~eetings
during the year will be established.
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MEIS SMALL GRANTS:
Small grants '82-83 were awarded by MEIS for:
Design and Analysis of a Network Computer
S. Bruell/Computer Science
P. Afshari/Computer Science
Automatic Error Recovery in Robot Programming
M. Gini/Computer Science
Experimental and Theoretical Studies of Chemical Vapor Deposition Processes
K. Jensen/Chemical Engineering & Material Sciences
Language-Directed Computer Design for Prolog and Modula - 2
P. Borgwardt/Computer Science
Some Aspects of an In-Situ Circuit Fabrication Technology
W. Feria/Electrical Engineering
Algorithmic Study of Combinatorial Problems
S. Sahni/Computer Science
Modeling of Multilayered Modulation Doped FET's
M. Shur/Electrical Engineering
Surface Forces Apparatus
M. Tirrell/Chemical Engineering & Material Sciences
Studies of Electronic and Structural Interactions at Metal and Sem conductor
Interfaces
J. Weaver/Chemical Engineering & Material Sciences
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MEIS Newsletter, Vo. 1, No. 1.
Page 4
NEW COURSES: Partly through MEIS sponsorship, seventeen new courses in
areas related to microelectronic and information sciences were initiated in
'82-83 by the Computer Science, Electrical Engineering and Chemical Engineering
& Material Sciences departments.
Computer Science/373-0132
5180 - Software Engineering I
5181 - Software Engineering II
5280 - Computer Aided Design I
5281 - Computer Aided Design II
Electrical Engineering/373-2577
3351 - Introduction to Logic Design and Microprocessors
3352 - Microprocessors
5571 - VLSI Systems
5572 - VLSI Circuit Design
5573 - Test and Diagnostics
5574 - VLSI Technology
5575 - VLSI Design Laboratory
5576 - VLSI Device Modeling
5670 - Basic Microelectronics
8451 - Design Automation of VLSI Digital Systems
Chemical Engineering and Material Sciences/373-2300
5013 - Introduction to Electronic Properties of Materials
8213 - Electronic Properties of Materials
8214 - Advanced Topics in Electronic Properties of Materials
Enclosed listings identify courses offered '83-84 which include aspects of
microelectronic and information sciences. Courses initiated through MEIS
sponsorship are noted with an asterisk.
MEIS '83: Mr. William Norris, Chairman of the Board and Chief Executive
Officer, Control Data Corporation, gave the 1983 MEIS Cornerstone Lecture,
"Technical Cooperation: A National Imperative," on June 2, 1983. The Cornerstone Event also included an overview presentation by the MEIS Executive
committee, a poster session of MEIS-sponsored research, and tours of MEISsponsored laboratory facilities. Representatives of the technical and
financial communities of Minnesota were invited to the event.
SEMICONDUCTOR RESEARCH CORPORATION: On June 27, 1983 R. Burger,
Assistant Director of Research Programs, SRC, and R. Lucie, SRC, met with the
following faculty receiving SRC sponsorship:
G. Robinson/EE
Low Resistance Ohmic Contacts for VLSI
R. Warner, Jr./EE
Very Low Temperature Silicon Epitaxy
R. Mueller and W. Robbins/EE
Application of Acoustical Microscopy to the Examination of Integrated
Circuits
and also talked with other faculty who are submitting proposals to SRC. The
MEIS Center hosted a .dinner and research poster session for the SRC's Technical
Advisory Board in conjunction with the TAB's meeting in Minneapolis. SRC
continues to fund new proposals in scientific study and experimentation directed
toward increasing knowledge and understanding in the fields of engineering and
physical sciences related to semiconductors. For more information on submitting
proposals to SRC, contact Dr. Robert Burger, (919) 549-9333.
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UNIVERSITY OF MINNESOTA
CHEMICAL ENGINEERING AND MATERIAL SCIENCES DEPARTMENT
1983-84
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COURSES IN MICROELECTRONIC AND INFORMATION SCIENCES
*
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*ChEn 5902
11:15-1:00 TTh
Microelectronics Processing (3 cr - Fall)
Jensen & Hess
*MatSci 5013
8:00-9:00 MWThF
Introduction to Electronic Properties (4 cr - Spring)
Weaver
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*MatSci 8213
12:15-2:00 MWF
Electronic Properties of Materials (3 cr - Winter)
Weaver
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*MatSci 8214
10:15-12:00 TTh
Electronic Properties of Materials (3 cr - Spring)
Franciosi
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ChEn 8403
14:15-16:00 TTh
Chemical Bonding at Surfaces (3 cr - Fall)
Griffin & Schmidt
UNIVERSITY OF MINNESOTA
COMPUTER SCIENCE DEPARTMENT
1983-84
COURSES IN MICROELECTRONIC AND INFORMATION SCIENCES
The courses listed below are of special relevance to the MEIS Center. For a
catalog giving complete listings of courses offered in the Computer Science
Department, call 373-0132.
J,.
*CSci 5180
15:15-17:00 W plus lab
Software Engineering I (5 cr - Fall)
Berzins & Gray
*CSci 5181
8:15-10:00 M
8:15-9:00 w
13:15-14:00 WF
Software Engineering II (5 cr - Winter)
Berzins & Gray
*CSci 5280
9:15-10:00 w
8:15-10:00 F
Computer Aided Design I (4 cr - Winter )
Berzins & Singley
*CSci 5281
8:15-9:30 MW
Computer Aided Design II (4 cr - Spring)
Sahni
CSci 8199
15:30-17:00 F
Research Seminar in Design Databases (3 cr - Fall,
Winter, Spring) Berzins
CSci 8499
10:15-11:30 MW
Topics in VLSI (1-3 cr - Winter)
Venkatesan
*CSci 8599
13:15-14:30 TTh
Topics in Robotics (1-3 cr - Spring)
Gini
CSci 8799
(Section 1)
15:45-17:00 TTh
Seminar in Physical Database Design (1-3 cr - Fall)
Carl is
CSci 8799
(Section 2)
1:30-4:30 WF
Sept. 28 - Oct. 28
Software Engineering (4 cr - Fall)
Ramamoorthy, Yeh, and Belady
CSci 8799
10:15-11:30 TTh
Topics in Database Design (1-3 cr - Winter)
Du
CSci 8799
13:30-15:00 TTh
Topics in Programming Languages (1-3 cr - Spring)
(Sponsored by Cray Research Inc.)
Hoare
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UNIVERSITY OF MINNESOTA
ELECTRICAL ENGINEERING DEPARTMENT
1983-84
COURSES IN MICROELECTRONIC AND INFORMATION SCIENCES
*EE 3352
Microprocessors (4 cr - Fall, Spring)
13:15-14:00 MWF plus lab
Hwang
EE 5150
9:15-10:00 MTWF
Electrical Engineering Materials (4 cr - Fall)
Cohen
EE 5511
14:15-15:00 MWF
Digital Filters and Signal Processing (3 cr - Fall)
Shenoi
*EE 5571
9:15-11:00 M
9:15-10:00 w
VLSI Systems (3 cr - Fall)
Tuszynski
*EE 5572
VLSI Circuit Design (3 cr - Winter)
Tuszynski
*EE 5573
Test and Diagnostics (3 cr - Spring)
Tuszynski
*EE 5574
10:15-11:00 w
9:15-11:00 F
VLSI Technology (3 cr - Fall)
Hoefflinger
*EE 5575
VLSI Design Laboratory (3 cr - Winter)
*EE 5576
VLSI Device Modeling (3 cr - Spring)
EE 5654
8:15-9:00 MWF
High-Speed, Compound Semiconductor Devices (3 cr - Fall)
Robinson
EE 5660
11:15-12:00 MWF
Semiconductor Properties and Devices (3 cr - Fall)
Nussbaum
EE 5666
11:15-12:30 TTh
Magnetic Properties of Materials and Applications
(3 cr - Fall)
Judy
*EE 5670
Basic Microelectronics (4 cr - Spring)
Robinson
•
EE 5702
11:15-13:00 T
11:15-12:00 Th
Stochastic Processes and Optimum Filtering (3 cr - Fall)
Kumar
I
EE 5750
11:15-12:00 MWF
Topics in Systems Analysis (3 cr - Fall)
Bailey
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EE 5852
11:15-12:00 MWF
Digital Computer Systems (3 cr - Fall)
Wechsler
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EE 8250
12:45-14:00 TTh
Advanced Control Topics (3 cr - Fall)
Lee
EE 8451
Advanced Topics In Electrical Engineering (ar cr - Fall)
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COLLOQUIUM SCHEDULE
DEPARTMENT OF COMPUTER SCIENCE
FALL QUARTER 1983
'
Oct 3
Dr. L. Belady
Software engineering in Japan
Oct 10
Prof. Valdis Berzins, University of Minnesota
Functional specifications for software
Oct 17
Prof. Raymond Yeh, University of Maryland
The state of the software industry
Oct 24
Prof. C.V. Ramamoorthy, Univeristy of California, Berkeley
Some experiments with process control software
Oct 31
WPE Faculty Meeting.
Nov 7
Mr. Craig Peterson, Intel
Building multiprocessors with VLSI
Nov 14
Mr. Keith Morgan, Intel
A database processor for the local network environment
Nov 21
Prof. Lou Rosier, University of Texas at Austin
Modeling communication protocols with communicating finite
state devices
Nov 28
To be announced
No Colloquium
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Unless otherwise stated, all colloquiums will be held in Mech. Eng. 108 from
3:30 pm to 4:30 pm. Abstracts will be posted outside Lind Hall 114 about a
week in advance.
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Students registered for CSci 8899
To get a grade of S in this course, you must attend at least 7 colloquiums.
An attendence sheet will be passed out at each colloquium.
For more information, call 373-0132.
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WORKSHOP
TECHNICAL REPORTS
A two-day national workshop,
"Curriculum for Test Technology"
will be held at the Marquette Inn
November 16-17, 1983. Topics
include automation, yield and fault
tolerance, as well as other issues
of test technology for large dense
chips. Invited to participate are
researchers and managers in
industry, government and academia.
A registration-social hour will be
held on Tuesday, November 15 at the
Marquette Inn, 6:30 p.m. The
workshop is co-sponsored by the
Test Technology Committee of the
IEEE Computer Society and the MEIS
Center. For more information or
registration call Dr. Alfons
Tuszynski, Electrical Engineering,
373-2970.
New MEIS Technical Reports
available from the MEIS Center are:
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SYMPOSIUM
BOOKS
l,
"Organic Chemistry and
Microelectronics," a two-day symposium emphasizing electronic properties of organic polymers and the
application of polymer films in
microelectronics, will be held
December 2-3, 1983. Graduate students and faculty of the University
of Minnesota and scientists and
engineers from the Minnesota
microelectronics community are
invited. (See attached schedule.)
For more information, Call Dr.
Larry Miller, Chemistry, 373-2324.
The symposium is co-sponsored by
the MEIS Center, the Department of
Chemistry and the University of
Minnesota Graduate School.
New books written by MEIS affiliated faculty include:
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#3
"A Systolic Design Rule
Checker, " R. Kane and S.
Sahni, October 1983.
"Modeling of Chemical
Vapor Deposition Reactors for
the Fabrication of
Microelectronic Devices," K.
Jensen, October 1983.
114
#5
"Tunneling Anomalies and
the Coexistence of Ferromagnetism and Superconductivity
in ErRh4B4 Films," A. Goldman,
A.M. Kadin, L-J. Lin, C.P.
Umbach, October 1983.
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Transistors: Fundamentals for
the Integrated Circuit
Engineer.
R.M. Warner,
Jr., and B.L. Grunge (New York:
John Wiley Sons, Inc.) October
1983.
"The Study of Superconductive
Order Parameter Dynamics: An
Application of the Josephson
Effect," A. Goldman, in Near
Zero: New Frontiers in Physics.
C.W.F. Everett ed.
(San
Francisco: W.H. Freeman and
Co.) 1983.
INSTITUTE OF TECHNOLOGY /UNIVERSITY OF MINNESOTA
227 Lind Hall/207 Church Street S.E./Minneapolis, Minnesota 55455/(612) 376-9122
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MEIS MAJOR RESEARCH PROGRAMS
Major research projects funded by
the MEIS Center in 1982-83 have
resulted in over fifty scientific
papers and more than twenty-five
presentations given at professional
meetings. Over sixty undergraduate
and graduate students and postdoctoral assistants have been supported in part by research projects
conducted by faculty involved in
MEIS major projects.
3-D Integrated Circuits
Research - studying transistor
and circuit configurations that
lend themselves to 3-D allsemiconductor implementation;
methods for realizing such
structures, development of
near-term 3-D technologies,
e.g., stacked CMOS; modeling
devices; and quantitative
diagnostic tools.
Major research projects sponsored
in 1982-83 were:
Faculty working on this project
have obtained eleven grants
totaling $511,400 from agencies
such as DOE, SRC, NSF, ECD, M/A
COM, McDonnell-Douglas,
Honeywell and NOSC. Additional
proposals for $1,575,600 have
been submitted to NSF, ONR,
SRC, Air Force, and ARO. The
3-D project has received gifts
of a system 9000 computer and
hard-disk drive from IBM
Instruments, Inc. and sputtering system components for
silicon deposition. Faculty on
this project include: P.
Cohen, B. Hoefflinger, R.
Mueller, A. Nussbaum, W.
Robbins, M. Shur, A. Tuszynski,
R. Warner, and G. Wehner from
the Electrical Engineering
Department. M. Liu, adjunct
professor of the Electrical
Engineering Department and
Honeywell scientist, has participated in this project as
well.
Ultra Small Electronic Research
- studying the formation and
physical properties of very
thin films and very narrow
wires; electronic transport in
films, wires and submicron
devices; and development of
chemical techniques for the
synthesis of materials for
ultrasmall devices.
Faculty collaborating on the
USER project have obtained a
$90K equipment grant from DOD,
a $70K research grant from NRO,
and have three proposals
pending for a total of $585K.
These faculty have included:
A. Goldman, Physics; C.
Dasgupta, Physics; 0.
Valls, Physics; D. Dahlberg,
Physics; C.C. Huang, Physics;
c. Campbell, Physics; M. Tirrell,
Chemical Engineering and Materials Science; L. Schmidt,
Chemical Engineering and Materials Science; P. Cohen,
Electrical Engineering;
B. Hoefflinger, Electrical
Engineering; G. Robinson, Electrical Engineering; M. Shur,
Electrical Engineering;
L. Miller, Chemistry; W. Miller,
Chemistry; S. Prager, Chemistry;
and R. Hexter, Chemistry.
Page 2
MEIS NEWS 1:2, 1983
Processor Array Concepts for
Engineering - studying array
architectures, fault tolerant
design, supporting technologies
and algorithm development to
achieve better tools for VLSI
design on advanced computational structures.
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Equipment acquisitions to the
PACE project have included
workstations, 4 desktop
workstations with peripherals,
3 interactive colorgraphics
workstations color display, 42"
platter, integrated circuit
tester, programmable data
generator, and a micromanipulator probe station and have been
coordinated with the VLSI
Laboratory. Research funds of
$55,800 have been received from
the University of Minnesota
Graduate School and NOSC.
Proposals pending include one
to NSF for $312,600 and a white
paper submitted to SRC.
Faculty affiliated with the
PACE project have been:
R. Kain,Electrical Engineering;
L. Kinney, Electrical Engineering; I. Hwang, Electrical
Engineering; B. Hoefflinger,
Electrical Engineering;
A. Tuszynski, Electrical Engineering and S. Sahni, Computer
Science.
In 1982-83, the MEIS Center allocated $625K in major research project grants, $150K in small grants
and $813K in laboratory development. During this period faculty
affiliated with the MEIS Center's
research programs received $4,312K
in research grants and contracts
from the following external
agencies:
Air Force Office of Scientific
Research
Army Research Office
DARPA
Department of Energy
General Electric
Hewlett Packard
IBM
McDonnell Douglas
National Science Foundation
Navy Office of Scientific
Research
Semiconductor Research
Corporation
University of Minnesota
Graduate School
WFAFB
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Design Automation Software
Engineering - developing efficient
algorithms for
language and systems software,
high performance architectures, and applications of high
performance computers.
The DASE project has included:
S. Sahni, P. Afshari, V.
Berzins, D. Du, B. Borgwardt,
S. Bruell, J. Carlis, 0.
Ibarra, D. Boley, J.B. Rosen,
and W. Thompson in the
Computer Science Department. A
5 year $5M proposal has been
submitted to NSF and a 2 year
$140K proposal, also to NSF.
Equipment proposals totaling
$650K to NSF and DOD are being
prepared. Two workstations, an
array processor and a fortran
77 compiler for array processor
have already been acquired.
Activity in the major projects and
the small grants projects have
helped form the basis for current
plans to focus the MEIS Center's
1983-85 major research program
planning in the following areas:
eArtificial Intelligence
eArtificially Structured
Materials
eiii-V Compounds and High Speed
Devices
•3-D Approach to
High-Performance Integrated
Circuits
Groups are presently writing proposals for MEIS Center and external
agency support in these areas.
MEIS NEWS 1:2, 1983 Page 3
MEIS SMALL GRANTS
Based on recommendations of the
Technical Coordinating Committee,
the MEIS 1983-84 Small Grants
Program has awarded matching funds
to the following investigators:
Drs. Parviz Afshari and
Peter Borgwardt, "Evaluation of
Caching and Design of a VLSI
Architecture for Prolog",
$20,000
Dr. Keith s. Champlin " Investigation of Nonlinear GaAs
Distributed Structures with
Application to Ultramicrowave
Integrated Circuits", $20,000
Dr. Philip Cohen, "Reflection
High-Energy Electron
Diffraction Studies of
Epitaxial Growth", $20,000
Dr. Albert van der Ziel, "Study
of Electromigration in Metal
Films With the Help of 1/f
noise", $19,295
Dr. Stephen Wellinghoff, "Stable
Processable Conducting Polymers
for Electronics Applications",
$18,366
These MEIS awards will complement
funds received from external
research sponsoring agencies.
Members of the MEIS Technical
Committee include:
H. Ted Davis, Chairman,
Chemical Engineering and
Materials Science
Martha Russell,Vice Chairman,
MEIS
Thomas Ensign, 3M
Dr. Alfonso Franciosi, "Microscopic Control of Semiconductor
Interface Reactivity", $20,000
Dr. Allen Goldman, "Artificial
Barrier Superconducting Junctions with Refractory Electrodes", $20,000
William Franta, Computer
Science
Allen Goldman, Physics
Dennis Hammil*, 3M
Richard Kain,
Engineering
Electrical
Drs. C.C. Huang and Wayland E.
Noland, "Characterizing and
Synthesizing Chiral Smectic
Materials for Fast Switching
Device Application", $20,000
Wallace Lindemann, Control Data
Corporation
Dr. Klavs Jensen, "A New Reactor
for Studies of Plasma Deposition
position", $20,000
William Sackett, Honeywell
Richard Petschauer * , Sperry
Larry Walker, Sperry
Drs. Richard Kain and
Larry Kinney, "Dynamically Reconfigurable Networks within
VLSI Wafers", $17,968
Dr. William P. Robbins, "Magnetically Soft, High Magnetostrictive Thin Films", $15,000
Page 4
MEIS NEWS 1:2, 1983
John Weaver, Chemical
Engineering and Materials
Science
*Alternates
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Microelectronic and Information Sciences Center
and
Department of Chemistry
University of Minnesota
Symposium
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ORGANIC CHEMISTRY AND MICROELECTRONICS
FridaY-L December
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2:45 pm
Coffee
3:15 pm
Dr. Klaus Bechgaard
Department of General &
Organic Chemistry
H. c. Orsted Institute, Denmark
Organic Compounds as
Superconductors
4: 15 pm
Dr. Gary N. Taylor
Bell Labs
Murray Hill, NJ
Materials and Processes at
the Leading Edge of Each
Lithographic Technology
Saturday, December 3
9:00 am
Coffee
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9:30 am
Professor Alan MacDiarmid
Department of Chemistry
University of Pennsylvania
Polyacetylene and Conducting
Polymers
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10:30 am
Professor Gareth Roberts
Department of Applied Physics
and Electronics
University of Durham, England
The Use of Langmuir-Blodgett
Films in Microelectronics
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THE LECTURES WILL BE PRESENTED IN ROOM 325 SMITH HALL
For information call Larry Miller, Department of Chemistry
\bl2) 373-2324
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MEIS MAIN OFFICE
MEIS DIRECTOR SEARCH
The MEIS Center welcomes Teri
Holberg, senior secretary and
extends best wishes to Connie Galt,
who has moved to the Department of
Chemical Engineering and Materials
Science, and to Jane Hermel, who
has moved to the University of
Minnesota, Waseca.
The MEIS Management Board has
announced the position of MEIS
Director. The MEIS Director will
continue the scientific and technical leadership which has been
provided by the MEIS Executive
Committee (Dr. H. Ted Davis,
Chemical Engineering and Materials
Science, Executive Committee,
Chairman, Dr. Kurt Maly, Computer
Science; and Dr. Bruce Lee, Electrical Engineering.) The Search
Committee for the MEIS Director is
being chaired by Dr. Ray Warner,
Electrical Engineering Minnesota
and includes:
FACILITIES DIRECTORY
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A survey of MEIS related laboratory
facilities at the University of
Minnesota and at the MEIS member
companies was conducted by the
Facilities Coordinating Committee.
At the Committee's recommendation,
a directory of those facilities
which are available on a shared-use
basis is being prepared. Members
of the FCC include:
Oscar Ibarra/Computer Science
Bill Sackett/Honeywell
Fred Hiatt, Honeywell
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John Weaver, Chemical
Engineering and Materials
Science
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Ken Meinelt/Sperry
Thomas Ensign,3M
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Denny Hammill/3M
E. Rex Krueger/Control Data
Richard Kain, Chairman,
Facilities Coordinating Committee, Electrical Engineering
William Thompson, Computer
Science
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Allen Goldman/Physics
FACULTY RESEARCH INTEREST SUMMARY
A summary of MEIS affiliated
faculty research interests is
available from the MEIS Center.
This summary identifies the current
and proposed research areas related
to microelectronic and information
sciences. Nearly forty faculty at
the University of Minnesota are
listed in the summary.
Al Tuszynski/Electrical
Engineering
John Weaver/Chemical
Engineering and Materials
Science
For information on the position
opening, contact Dr. Ray Warner,
373-2479.
MEIS NEWS
1:2, 1983
Page 5
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CALENDAR OF UPCOMING MEIS EVENTS
November 15
Seminar by Dr. Rolf Landauer
IBM T.J. Watson Research Center
"Physical Limitations of Computational Processes"
ME 108 2:15p.m. - 3:00p.m.
Coffee following in 227 Lind Hall
November 15-17 Workshop - "Curriculum for Test Technology"
Marquette Inn
Social Hour: 6:30 - 7:30 p.m. Tuesday
Workshop from: 8:30 a.m. - 9:00 p.m. Wednesday
8:30 a.m. - 5:00 p.m. Thursday
November 21
MEIS Management Board Meeting
December 2-3
Symposium "Organic Chemistry
325 Smith Hall
2:45 p.m. - 5:00 p.m. Friday
9:00 - 12:00 Saturday
December 5
Seminar by Dr. Per Brench Hansen/USC
"Software Engineering in Edison"
ME 108 3:30 - 4:15 p.m.
Coffee preceding in 114 Lind Hall at 3:00p.m.
December 6
Seminar by Dr. Scott Kirkpatrick
IBM T.J. Watson Research Center
"Optimization in Computer Design and Statistical
Mechanics"
ME 108 2:15p.m. - 3:00p.m.
Coffee following in 227 Lind Hall
Microelectronic and Information Sciences
Center
Dr. Martha Russell, Executive Director
University of Minnesota
227 Lind Hall, 207 Church Street S.E.
Minneapolis, MN 55455
612/376-9122
Page 6
MEIS NEWS 1:2, 1983
and Microelectronics"
MICROELECTRONIC &
INFORMATION SCIENCES
CENTER
NEWS
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Volume 2; Number 1, January/February, 1984
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MEIS SPECIAL LECTURE
MEIS SEMINARS
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February 21
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March 6
James Meindl
Stanford
"VLSI and Beyond"
April 2
Raj Reddy
Carnegie-Mellon
University
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Co-sponsored
with Computer
Science Dept.
ME108
3:30 p.m.
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Dick Foss
Mosaid
"MOS Memory"
April 26
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P.B. Ghate
Texas Instr.
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Co-sponsored
with Corrosion
Center
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Jack Kilby
Texas Instr.
Seminars will be held in ME108 at
2:15p.m. (unless otherwise indicated) with coffee and discussion
following at 3:00 p.m. in 227 Lind
Hall. The seminars will be broadcast live and interactive on UNITE
Channel A.
On February 16th, Dennis Hess, MEIS
Visiting Professor from UC Berkeley,
will give a special lecture on
"Plasma Enhanced Deposition of
Tungsten Films." The lecture will
be held in ME108 at 2:15 pm with
coffee and discussion following in
227 Lind Hall.
MEIS TECHNICAL REPORTS
New MEIS Technical Reports available
include:
#6 "Nature of the
Smectic-A-Smectic-C Transition Near
a Nemactic-Smectic-A-Smectic-C
Multicritical Point," C.C. Huang and
S.C. Lien, Jan. 1984.
#7 "Performance Bounds on
Multi-Processor Schedules," R. Kain
and A. Raie, Jan. 1984.
#8 "Parasitic MESFET in (Al, Ga
As/GaAs Modulation Doped FETs and
MODFET Characterization," K. Lee, M.
Shur, T.J. Drummond, and H. Morkoc,
MEIS Technical Reports are available
by calling the MEIS Center,
376-9122.
MEIS CENTER DIRECTOR
The MEIS Center is seeking a
research scientist of proven managerial ability to serve as its
Director. Applications should be
sent before March 1, 1984 to Dr. Ray
Warner at the address below, or call
373-2479.
INSTITUTE OF TECHNOLOGY /UNIVERSITY OF MINNESOTA
227 Lind Hall/207 Church Street S.E./Minneapolis, Minnesota 55455/(612) 376-9122
fVElS
GALLIUM ARSENIDE LECTURES
Two MEIS-sponsored lecture in January discussed gallium arsenide in
high speed devices. Dr. William
Spicer, Stanford University, presented a lecture as a part of the
MEIS Seminar Series. He spoke on
"Surfaces and Interfaces on an
'Atomic' Scale: GaAs, InP, GaSp."
GaAs, InP, GaSp," Dr. Spicer
Dr. Tim Anderson, University of
Florida, presented a special lecture on "Applications of Thermodynamics to Processing of III-IV
Semiconductors." His lecture was
co-sponsored by the MEIS Center and
the Chern Eng and Mat Sci Dept.
MEIS RESEARCH PINNACLES DEFINED
MEIS research funds have been
awarded to three team projects,
selected on the basis of quality of
research proposed, its relevance to
the microelectronic and information
sciences, and potential for
establishing pinnacles of research
excellence. A multi-year commitment (based on favorable annual
review, approval of second and
third year plans, and availability
of funds) includes seed and
matching funds for 1984 and
matching funds for 1985 and 1986.
The three projects awarded are:
oiii-V Compounds and High Speed
Devices
oHigh Performance Integrated
Circuits
ointelligent Systems
In addition, the MEIS Center has
funded a planning group on
Artificially Structured Materials
for Microelectronics. This group
will develop a proposal for another
MEIS research pinnacle.
Page 2 MEIS NEWS 2:1, 1984
III-V Compounds and High Speed
Devices
Alfonzo Franciosi, Chern Eng
and Mat Sci
Klavs Jensen, Chern Eng and
Mat Sci
Gary Robinson, EE
Michael Shur, EE
John Weaver, Chern Eng and
Mat Sci
The objective of this project
is to incorporate new methods of
surface and interface preparation of
GaAs and related III-V semiconductors into new solid-state devices
which will have an impact on high
speed integrated circuits.
Activities of this project will
integrate basic materials research
with device fabrication and device
performance, including:
1. Scientifically-fundamental and
technologically-relevant studies of
metal-GaAs interface properties,
with emphasis on electronic and
structural modifications as interfacial chemical and physical parameters are changed, to lead to new
methods of surface/interface
control.
2. Implementation of these new
surface/interface preparation
methods on III-V device structures
using molecular beam epitaxy (MBE)
and metal-organic chemical vapor
deposition (MOCVD), thereby immediately exploiting the scientific
developments.
3. Characterization and performance
evaluation of III-V field-effect
devices incorporating the advances
made possible by interface modification and synthesis.
$140K seed and $160K matching funds
have been awarded for 1984.
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High Performance Integrated
Circuits
Phil Cohen, EE
R. Mueller, EE
Alan Nussbaum, EE
William Robbins, EE
Alfons Tuszynski, EE
Ray Warner, EE
G. Wehner, EE
This project addresses the
conceptual, theoretical, and analytical inovations and the modeling
and fabrication technologies which
contribute toward the long-term
goal of monolithic 3-D integration.
This group will address 3-D technology in four projects.
1. Design, modeling and fabrication of device, circuit and heterojunctions in a multiuse
configuration. Modeling includes
analytical and numerical micro and
macro modeling techniques.
2. Use of sputter epitaxy to
achieve monocrystalline films witt
silicon with the goals of studying
doping control techniques, examining the properties of PN junctions, achieving lateral definition
of doping patterns using a combination of shadow mask and atomicplane doping, and fabricating
prototype devices.
3. Studying the combined use of
steered ion beam and MBE in growing
crystals, as a function on ion
energy, crystal orientation,
crystal growth rate, and atmosphere
in the chamber.
Intelligent Systems
Paul Johnson, Management
Information Sciences
William Thompson, Comp Sci
Harry Wechsler, EE
Albert Yonas, Child
Psychology
This project focuses on the
development of high performance
computing systems which incorporate
human reasoning techniques. One
emphasis will study the determination of spatial relationships
based on motion of the sensor
and/or motion of objects. Signal
detection analysis will be used to
develop a technique which provides
partial, qualitative specification
of the scene properties. A second
emphasis in expert diagnostic
systems will investigate and develop expert systems for fault
diagnosis using both causal and
diagnostic reasoning.
The fundamental research
planned for this pinnacle will have
applications to such areas as robotics, vehicle navigation, construction of fault localization programs
for complex systems, CAD/CAM
systems, and more powerful AI
systems. Industry-university
collaboration on aspects of the
research, development of new courses, and collaboration with faculty
at other universities are planned
by this project.
$70K seed and $130K match have been
awarded for 1984.
SUMMER RESEARCH OPPORTUNITIES
4. Refinement and use of laserscanned acoustic microscopy to
assess electrically functional
complex circuits and to tests and
evaluate 3-D integrated circuits.
$140K seed and $160K matching funds
awarded for 1984.
The Air Force Office of Scientific
Research and the Southeast Center
for Electrical Engineering Education are sponsoring 10-week summer
research opportunities for faculty
and graduate students at USAF laboratories and centers across the
U.S. For more information, contact
Captain McNally, 373-2205 or 373-2206.
MEIS NEWS
2:1, 1984 Page 3
Artificially Structured
Materials for Microelectronics
Planning Group
Paul Barbara, Chem
Charles Campbell, Physics
E.D. Dahlberg, Physics
John Evans, Chem
E.A. Franciosi, Chem Eng
and Mat Sci
F. William Gerberich,
Chem Eng and Mat Sci
Allen Goldman, Physics
Robert Hexter, Chem
Larry Miller, Chem
Lanny Schmidt, Chem Eng
and Mat Science
Oriol Valls, Physics
This group is developing a proposal for a team project which will
study electrical and magnetic properties of multilayer heterostructure and thin films, characterize
the morphology, defects, electronic
structure and chemical composition
of such structures, and develop new
techniques for synthesis of artificial materials.
$50K seed funds awarded for
planning for January - May, 1984.
MEIS GRADUATE FELLOWSHIP AWARDS
Applications for the 1984-85
MEIS Graduate Fellowship Awards are
solicited. These one-year
fellowships are designed to bring
outstanding students to the
University of Minnesota for study
in the microelectronic and information sciences. Fellowships
include a 9 month stipend of
$10,000 plus tuition and fees for
up to 44 credits (tax-free equivalent of $14,000). In addition,
opportunities will be available for
summer research employment at the
University of Minnesota or in the
Twin Cities microelectronic
industries.
Eligibility for the MEIS Fellowship
includes undergraduate technical
degree received by 1984, outstanding
academic record, and a commitment to
obtaining a Ph.D. degree. Deadline
for applications is February 15,
1984. Sixteen fellowships will be
awarded for the 1984-85 year
5 in
Electrical Engineering, 5 in
Computer Science, and 2 each in
Material Science, Physics and
Chemistry.
SUMMER JOBS FOR MEIS FELLOWSHIP
RECIPIENTS
Microelectronic and Information Sciences
Center
Dr. Martha Russell, Executive Director
University of Minnesota
227 Lind Hall, 207 Church Street S.E.
Minneapolis, MN
55455
612/376-9122
Page 4
MEIS NEWS 2:1, 1984
Meetings have been held during
January to acquaint MEIS Fellowship
recipients with opportunities for
summer employment in member companies and opportunities for
research assistantships in MEIS
research pinnacle projects.
Doctoral students sponsored by MEIS
Fellowships are encouraged to work
in research laboratories of member
companies during the summer
following their first year of graduate study. Resumes of MEIS
Fellowship recipients are on file at
the MEIS Center Office, 376-9122.
MICROELECTRONIC &
INFORMATION SCIENCES
CENTER
NEWS
Volume 2; Number 2, March/April/May, 1984
OPEN HOUSE
Microelectronics Laboratory
The newly remodeled
Microelectronics Laboratory will be
on display Thursday, June 14th at
an Open House cosponsored by the
MEIS Center and the microelectronics research group. An afternoon
program (1-5 pm) is planned to
review faculty and student research
conducted in this laboratory and to
tour the laboratory facilities.
The remodeling, financed by U
of M and the MEIS Center, has
expanded the laboratory to 6036 sq.
ft. which includes 560 sq. ft. of
clean room space, supportr facilities and additional instrumentation. The Microelectronics
Laboratory includes instrumentation
for mask making, lithography, diffusion, CVD, ion implantation,
metalization, assembly and testing
devices and service systems.
Operation of the Microelectronics Laboratory is supported by
the MEIS Center, the corporate
affiliates program in the
Electrical Engineering Department,
federal grants, and charges for
services to the industrial and university community. The laboratory
serves university faculty and students. Use of laboratory by
industrial scientists can be
arranged through Dr. Bill Robbins,
principal coordinator, 373-9719, or
Steve Gilbert, laboratory manager,
373-4562.
Open House, 1-5 pm Thursday
June 14th. Parking available Ramp
B. For more information, 376-9122
or 373-9719.
MEIS TECHNICAL REPORTS
New MEIS Technical Reports
available include:
#9. "Analysis and Design in
MSG: Formalizing Functional
Specificiations", by V. A. Berzins
and M. Gray
#1 0. "An Approach to Custom
Design of VLSI Circuit Design
Automation", by M. Perkowski, E. B.
Lee, and C. Kim
1111. "Modelling of Chemical
Vapor Deposition Reactors", by
K. F. Jensen
#12. "Analysis of
Multicomponent LPCVD Processes:
Deposition of Pure and In Situ
Doped Poly-Si", by K. F. Roenigk
and K. F. Jensen
#13. "Modeling the Inversion
Layer at Equilibrium", by D. H. Ju
and R. M. Warner, Jr.
#14. "Field and Related
Semiconductor-Surface and
Equilibruim-Step-Junction Variables
in Terms of the General Solution",
by R. M. Warner, Jr., R. P. Jindal,
and B. L. Grung
These and other MEIS Technical
Reports are available from the MEIS
Center, IT Library, and libraries at
sponsoring companies.
INSTITUTE OF TECHNOLOGY /UNIVERSITY OF MINNESOTA
227 Lind Hall/207 Church Street S.E./Minneapolis, Minnesota 55455/(612) 376-9122
MEIS WELCOMES DEAN INFANTE
Ettore F. Infante, director of
the division of mathematical
science at the National Science
Foundation (NSF) and professor at
Brown University, has been named
dean of the Institute of Technology
at the University of Minnesota. He
succeeds Roger W. Staehle, who
resigned last May, and V. Rama
Murthy, who has been acting dean
since September. He will assume
his duties shortly after July 1.
Infante holds degrees in aeronautical engineering and mathematics from the University of Texas
at Austin, where he received a
Ph.D. in 1962. His major field is
applied mathematics, especially
control theory and various aspects
of macroeconomics and mechanics.
As Dean of the Institute of
Technology, Infante will join the
MEIS Management Board. "Dr.
Infante brings to the university
that combination of academic
values, administrative talent·and
research reputation that we seek in
a dean," said Kenneth Keller, Vice
President for Academic Affairs and
ex officio member of the MEIS
Management Board. "His awareness
of the new and exciting directions
in the fields of physical science
and engineering and his sensitivity
to the important relations between
the Institute of Technology and its
natural industrial constituency
suggest that we have found an outstanding leader for the institute."
INFORMATION TECHNOLOGY FOR A
DEVELOPING WORLD
In March 1984, S. L. Gilbert
and Professor R. M. Warner, Jr.,
both of the EE Department, participated in the preparation and
execution of an international conference on Information Technology
for the Developing World, a meeting
held in Vienna, Austria. Their
involvement was at the invitation
of the United Nations Industrial
Development Organization (UNIDO).
MEIS SEMINAR VIDEOS
The following video tapes of
MEIS Seminars and Special Lectures
are available on loan from the MEIS
Center:
VLSI AND BEYOND" by
Dr. James Meindl, Stanford
University, presented March 6, 1984
(1 hr.+)
2) "ARTIFICIAL INTELLIGENCE
AND MANUFACTURING" by Dr. Raj Reddy,
carnegie-Mellon University, presented April 2, 1984 (48 mins.)
3) "METALLIZATION FOR VLSI
CIRCUITS" by P. B. Ghate, Texas
Instruments, presented April 26,
1984 (48 mins.)
4) "CREATIVITY IN ENGINEERING",
by Jack Kilby, Consulting Engineer,
presented May 1, 1984 (49 mins.)
1)
11
Students or faculty wishing to
view the tape, may borrow the tape
for one day, no charge. A drivers
license or $50.00 deposit is
required. Industry scientists may
borrow the tape for a 1 week period,
no charge. A $50.00 deposit is
required, plus postage costs.
Tapes are on 3/4" cassettes.
Call the MEIS Center, 376-9122, to
arrange.
Page 2 MEIS NEWS 2:2, 1984
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MEIS RESEARCH PINNACLES
This article is the first of
three describing the projects and
faculty constituting the MEIS
Center's research pinnacle
programs.
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HIGH-PERFORMANCE INTEGRATED
CIRCUITS
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Ray Warner, project coordinator
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scaling down in feature size and the
scaling up in circuit size have been
accompanied by two monolithic IC:
Its active volume has the form of
a thin layer, and its manufacture
involves a long series of discrete
steps. It is our proposal that by
abandoning these two constraints on
2-D circuit design we can not only
escape their costs, but can also bypass the problems currently associated with scaling.
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We are aiming at a monolithic
three-dimensional-all-semiconductor
IC, wherein the semiconductor
crystal is grown in a continuous
fashion, with the requisite 3-D
doping pattern being incorporated
as it grows. The growth process
will be carried out in continuous
fashion in a matter of hours under
automatic control. The fabrication
of today's IC typically involves
three days of fabrication time, and
three to six weeks of waiting time.
By doing away with discrete-step
manufacture and attendant waiting
time, we shall eliminate contamination possibilities. Adding
to this a radical reduction in the
number of interfaces between dissimilar materials, we foresee unprecedented reliability.
This 3-D proposal is the ultimate step in the direction taken by
the monolithic IC, which produced a
sharp reliability improvement. The
twenty-five years since the monolithic integrated circuit made its
appearance have seen two trends:
feature-size downscaling and
circuit-size upscaling. But both
trends are saturating. The shrinking of device dimensions has been
accompanied by incremental overall
performance improvement, but the
increments have now become marginal
or even negative. Projected increases in circuit size will be
confronted by the rigid barrier of
signal-propagation speed. The
Further, we foresee accompanying improvements in cost, performance, and size. The proposed
approach will involve new
constraints, such as the need for
devices, circuits, and systems of
extremely low power dissipation,
and the need to live with somewhat
larger bus and lead parasitic
resistances and capacitances per
unit length than are presently the
norm. Among the new advantages are
much smaller average lengths for
buses and leads, significantly
relaxed minimum-feature size,
improved volumetric density, and
relative freedom from gross
interchip parasitics.
We have identified and are
pursuing two approaches to the
crystal-growth requirement. The
first is a combination of
molecular-beam epitaxy (MBE) and
steered ion beams for delivering
dopant atoms. The MBE technology
using binary and ternary III-V
semiconductors is a mature technology. Heterojunctions thus
achieved have opened new device
opportunities in both the BJT and
FET families. They may also open
new junction-isolation possibilities, of great interest to us.
Steered ion beams for doping are in
their infancy. Our combination of
these two technologies with the aim
of growing an all-semiconductor 3-D
crystal is probably unique. The
MEIS NEWS 2:2, 1984 Page 3
High-Performance Integrated Circuits (cont.)
second approach will employ sputter
epitaxy (proposed by one of our
team members in 1959) combined with
atomic-plane doping, on which
feasibility has recently been
demonstrated. (Here our material
of choice is silicon.) Lateral patterns will be controlled by physical masking. The step-free
crystal-growth feature of this
novel combination is all-important
in a 3-D application.
A carryover challenge is the
testing of a complex IC. In place
of the binary (good-bad) abstraction
that is conventionally employed, one
of our teams has recently pointed out
that there exists a practical reality
that is ternary -- good, bad, and
marginal. The marginality intended
here is closely related to the
design issue of noise margins,
which in turn are related both to
yield and to reliability.
Besides crystal growth there
are other challenges -- some new,
and some carried over from 2-D
VLSI. A new one is nondestructive
assessment of a 3-D structure. In
the 2-D case, much of the manufacturing history can be read by optical or SEM examination of the free
surface. In the 3-D case, one of
the most promising lines of attack
is the acoustic-microscopy approach
we are now pursuing.
The possibility of a yieldreliability link has long been a
subject for speculation, but the
relationships just sketched point
the way to data collection. The
issue is of supreme importance
because yield is directly observable in manufacture, and reliability is not. Data establishing
such a connection would mean that
eventually product from high-yield
lots would command a higher price
than "identical" parts from lowyield lots. In fact, there are
instances wherein this marketing
principle is already being applied
because some are already persuaded
that a yield-reliability link does
exist. This in turn leads to the
interesting real-world problem that
pricing cannot be done with assurance
until manufacturing is complete.
Finally, the analytic (and numerical)
micromodeling cited above must be
augmented by macromodeling of large
circuit aggregations to complete the
design-support function.
In the matter of design support, we must identify devices and
circuits that lend themselves to
3-D realization. A constantly recurring isolation requirement in
such ~tructures has led us to an
"orthogonal-isolator" concept, a
device that also shows promise as
driver and level shifter. In
optimum form, it (as well as other
3-D devices) calls for ideally
abrupt step junctions. Long an
academic abstraction, such junctions
are now a practical reality because
of MBE and (soon) sputter epitaxy.
Design optimization of devices
containing such junctions calls for
accurate modeling. Approximateanalytic methods developed here are
uniquely applicable to this
problem. Heterojunction modeling,
on the other hand, requires
starting farther back, because
there remain unresolved basicbandstructure issues.
Page 4 MEIS NEWS 2:2, 1984
PRINCIPAL INVESTIGATORS
P. I. Cohen
Has sought a detailed understanding of surface morphology
during epitaxial crystal growth, and
has developed reflection-high-energyelectron diffraction (RHEED) into a
quantitative tool for this purpose.
High Performance Integrated Circuits (cont.)
R. K. Mueller
Long experience in theoretical
and experimental physics, optics,
acoustic microscopy and tomography.
THE FOUR PROJECTS AND FACULTY
PARTICIPANTS IN THE
HIGH-PERFORMANCE IC PROGRAM
1.
W. P. Robbins
Well-known for his work on the
theory, fabrication, and application of surface-acoustic-wave (SAW)
devices, and more recently, on
acoustic microscopy.
A. Nussbaum
Long experience in solid-state
physics, optics, group theory,
semiconductor-junction theory.
Author of seven technical books.
A. Tuszynski
Long experience in all aspects
of linear and digital design. VLSI
specialist with design experience
on microprocessors and large
memories. Acknowledged memory-test
authority -- organizer and chairman
of recent highly successful
IEEE/MEIS Workshop on Curriculum
for Test Technology.
R. M. Warner, Jr.
Long experience in exploratorydevice development, and modeling of
novel and well-established devices
and phenomena; two books on
integrated-circuit topics.
Principal Coordinator of
High-Performance IC Program.
G. K. Wehner
The Father of Sputtering.
Discoverer of "Wehner spots." Long
career of achievements and honors
for developing a technology that is
now a standard item in the arsenal
of the microelectronics industry as
well as other basic industries.
Design Support (AT, AN, RMW).
Several junction-isolated, allsemiconductor, 3-D static memory
cells have been devised. An isolating, level-shifting, and driving
device useful in such structures
has been proposed, and prototypes
are in fabrication. The modeling
necessary to design it has been
developed (an approximate-analytic
method), and spin-off application
of it has been made to the conventional MOSFET. Analytic and
numerical heterojunction modeling
has been undertaken as an approach
to determining the correct band
picture. An approach has been
outlined for testing (for the first
time) the hypothesis that IC yield
and reliability are linked. An
IEEE/MEIS Workshop on Curriculum
for Test Technology was organized
and conducted in Minneapolis, with
enthusiastic participation by
people from all over the U.S.
2. 3-D ICs and Sputter Epitaxy
(RMW, GKW).
The feasibility of silicon-onsilicon sputter epitaxy has been
shown. Electron channeling has
been applied successfully to our
grown layers, demonstrating their
monocrystallinity; the maximum
layer thickness assessed by this
method ( 0. 1,.. m) is about right for
our films. A criterion has been
established for signaling the
removal by sputtering of the native
oxide from silicon target and
substrate. Several sources of contamination have been eliminated.
The approximately equivalent capabilities of our argon and mercury
sputtering systems have been
demonstrated, except with respect
to the criterion for native-oxide
removal.
MEIS NEWS 2:2, 1984 Page 5
High Performance Integrated Circuits (cont.)
3. Ion-Beam Technology for 3-D ICs
(PIC, RMW).
RHEED has been applied on the
MBE crystal-growth problem (GaAs),
and has yielded quantitative information on surface structure and
morphology. Surface diffusion
lengths of gallium have been estimated. This kind of information
will be important to determining
how dopant atoms are incorporated
in the growing surface, and the
limits on doping-pattern resolution. Commercially available ion
sources have been assayed, and
choices have been made in anticipation of near-term capital funding.
4.
Acoustic Microscopy (WPR, RKM)
The goal of this program is to
develop an acoustic microscope of
the nondestructive examination of
integrated circuits, especially
buried or subsurface features. The
program is a three-phase effort
consisting of modifications of both
hardware and software for an
existing microscope, testing and
checkout of the microscope using
test samples with known subsurface
features, and finally application
of the microscope to the study of
"real" integrated circuits.
Last year (1983) was the first
year of the project and our efforts
concentrated on phase one of the
project. The most significant
milestones were the demonstration
of computer control of all aspects
of microscope operation, including
data acquisition and storage, and
the successful simulation of software algorithms for processing the
raw data into useful images.
Currently, test samples having
known features are being fabricated. These test samples include
silicon wafers with oxide features
buried 10 to 100~m beneath polysi-
Page 6 MEIS NEWS 2:2, 1984
licon. In the coming year the
testing of the microscope with
these samples will be started and
the potential utility of the system
will be experimentally
demonstrated.
fVElS
THE NATIONAL TECHNOLOGICAL
UNIVERSITY
The National Technological
University will begin in the Fall
1 84 with eight courses in computer
science and electrical engineering.
This nonprofit institution is sponsored by industries, including
Control Data, and is headquartered
in Colorado. The university will
grant M.S. degrees and seeks to
serve the large body of students
who are working {n industry and are
geographically mobile over the time
required to complete the degree.
Faculty members at the University
of Minnesota will be contributing
courses to NTU.
Professor Sartaj Sahni, computer science department, has been
serving on the Executive Committee
for Computer Engineering for the
NTU. The first degree to be
offered by the NTU is an M.S. in
computer engineering -- one of six
degree programs planned in fields
in which M.S. lev~l shortages
exist.
For additional information
regarding these new courses, call
Morry Nicholson, 373-3132 or Peter
Zetterberg, 373-3486.
NEW COMPUTER SCIENCE FACULTY
,
.I
J,,
jl
The MEIS Center welcomes
Dr. James Slagle to the Computer
Science Department and the U of M
community of MEIS. Slagle, whose
background is mathematics, is the
first of four new MEIS-sponsored
faculty additions in CS. He is
currently Special Assistant at the
Navy Center for Applied Research in
Artificial Intelligence in
Washington D.C. Slagle will join
the U of M this summer and will
continue his research on expert
systems, pattern recognition, robotics and control strategies •
GUGGENHEIM FELLOWSHIP
Oscar H. Ibarra, professor,
Computer Science, has been awarded
a John Simon Guggenheim Memorial
Foundation Fellowship for the
period September 1984 to July 1985.
During this time he will be on sabbatical and will continue his
research on systolic systems.
Professor Ibarra is investigating the use of simplified models
of (uni-processor) serial computers
to analyze systolic systems. His
research is exploring the automated
transformation of programs designed
for serial computers into programs
for systolic systems. Ibarra's
research interests also include
theory of computation, algorithms,
computational complexity and
parallel computing.
NSF PRESIDENTIAL SCHOLARS NAMED
Four of the six U of M faculty
named as NSF Presidential Scholars
have research interests in
microelectronic and information
sciences areas. This NSF award
goes to promising young faculty
members. It includes a $25,000
award plus NSF matching of grants
from industry up to a total of
$100,000. MEIS-affiliated faculty
to receive the NSF Presidential
Scholars Awards include:
Name
Klavs Jensen
Matthew Tirrell
Max Donath
Paul Barbara
CEMS
CEMS
Mech Eng
Chemistry
MEIS NEWS 2:2, 1984 Page 7
FIRST MEIS FELLOW GRADUATES
MEIS FELLOWS ATTEND MIDWEST EXPO
Dr. Karen Ryan, MEIS Fellow
82-83, is the first of the students
sponsored by the MEIS Center to
graduate. Ryan will stay in the
Twin Cities and will begin employment June, 1984 as Principal
Research Scientist in the Information Systems Architecture at
Honeywell's Computer Sciences
Center. Ryan's degrees in Computer
Science and Linguistics culminate
her studies in automatic generation of representative querrie sets
and in the grammar of English
comparatives.
Eight MEIS Fellowship
Recipients participated in the
Midwest Electronics Show held at
the St. Paul Civic Center May 2 and
3. Students described MEIS
programs and were able to survey a
wide cross section of microelectronic products and technologies.
SHORT COURSE OFFERED
Professor Dennis Hess, MEIS
Visiting Professor from University
of California, Berkeley, and
Professor Klavs Jensen, Chemical
Engineering and Materials Science
Department, will present a short
course, "Chemical Vapor Deposition
and Plasma Processing," May 31 and
June 1, 1984. The course is presented by the Twin Cities Section of
the Electrochemical Society and will
be held at the L'Hotel Sofitel,
Mpls. For more information or
registration call Dr. Lawrence
Casper, Honeywell, 541-2508.
Microelectronic and Information Sciences
Center
Dr. Martha Russell, Associate Director
University of Minnesota
227 Lind Hall, 207 Church Street, S.E.
Minneapolis, MN 55455
612/376-9122
Page 8 MEIS NEWS 2:2, 1984
UM/3M POSTER SESSION
Several MEIS related research
projects will be presented at the
annual U of M/3M Research Poster
Session to be held in Earle Brown
Center on May 23. Professor Klavs
Jensen and Karl Roenigk, Chemical
Engineering and Computer Science,
will discuss "Modelling and Analysis
of LPCVD Processes." Professor
Alfons Franciosi, Shu Chang and
C. Caprile, also Chemical Engineering and Computer Science, will
discuss "Surface and Interface
Properties of Variable Gap Semimagnetic Semiconductors."
MEIS FELLOWS PRESENT PAPERS
Warren Smith, MEIS Fellow 82-83,
presented a paper, "Evaluation
Method for Analysis of Weighted
Voting Algorithm for Replicated
"Data" at the 4th Annual Conference
on Distributed Computing Systems,
May 12-15, 1984, San Francisco.
Smith is working part time at
Honeywell Corporate Development
Center while continuing his doctoral
studies.
Art Wall, MEIS Fellow 83-84,
coauthored a paper, "Multiple Layer
Techniques in Optical Lithography:
Applications to Fine Line MOS
Production," which was presented at
the March 1984 SPIE Conference held
in Santa Clara. Coauthors were
M.A. Lestvan, M. Swanson, and S.A.
Campbell, Sperry. The paper reports
results of research conducted during
Wall's summer employment at Sperry.
MICROELECTRONIC &
INFORMATION SCIENCES
CENTER
NEWS
Volume 2; Number 3, September/October, 1984
PIERRE AIGRAIN TO VISIT MEIS
Dr. Pierre Aigrain, scientific and
technical director of Thomson CSF
and Thomson BRANDT, France will
present a MEIS seminar, "France
Facing The High Tech Challenge", on
Monday, October 15, 3:15 pm, 105
Murphy Hall. An informal reception
will be held following the seminar
at 4:00 pm in 227 Lind Hall.
RECENT EQUIPMENT DONATIONS TO
MICROELECTRONICS LABORATORY
Honeywell - Plasma etcher,
projection mask aligner, and
reactive ion etcher
IBM - Step and repeat camera and ion
implanter
Litton Industries - Electron beam
evaporation system
Aigrain was Secretary of State in
Charge of Research for Prime
Minister D'Estaing, has been
involved in ESPRIT, and is recipient of the Prix Robin from the
Societe Francaise de Physique.
Sperry - Electron beam pattern
generator
NEW MEIS TECHNICAL REPORTS
Thornton Assoc. - Deionized water
system
New MEIS Technical Reports now
available include:
#15 "Multiple Layer Techniques in
Optical Lithography: Applications
to Fine Line MOS Production", by
M. A. Listvan, M. Swanson, A. Wall,
S. A. Campbell
#16 "Designing Systolic Algorithms
Using Sequential Machines", by
0. H. Ibarra, M. A. Palis,
S. M. Kim
These and other MEIS Technical
Reports are available from MEIS
Center (call 376-9122), the IT
Library, and libraries of all sponsoring companies.
Physical Electronics - Molecular beam
epitaxy system
MEIS SEMINARS AND LECTURES IN
OCTOBER
*oct. 9 - T. T. Sheng Bell Labs
"Cross-Sectional Transmission
Electron Microscopy of Electronic
and Photonic Devices"
3:15 pm ME 108
Oct. 15 - Pierre Aigrain Thomson CSF
"France Facing The High Tech
Challenge"
3:15pm Murphy 105
*oct. 16 - James Key
SRC
"Research Frontiers at
Semiconductor Research Corporation"
3: 15 pm ME 108
*Broadcast live and interactive over
UNITE
INSTITUTE OF TECHNOLOGY /UNIVERSITY OF MINNESOTA
227 Lind Hall/207 Church Street S.E./Minneapolis, Minnesota 55455/(612) 376-9122
MEIS WELCOMES NEW IT FACULTY
MEIS-affiliated departments in the
Institute of Technology have
announced new faculty members for
fall of 1984:
Chem. Eng. & Mat. Sci.
Asst Prof. Henry White
Chemistry
Asst Prof. Margaret Etter
Asst Prof. Hung-wen (Ben) Liu
Computer Science
Prof. James Slagle
Asst Prof. Anastasios Vergis
Asst Prof. Ting-Chuen Pong
Electrical Engineering
Prof. Pramod Khargonekar
Prof. William Plice
Prof. Naikuan Huang
Physics
Asst. Prof. Yutaka Hosotani
Visiting Prof. Charles Kuper
NEW FRONTIERS IN SEMICONDUCTOR
MATERIALS WORKSHOP
The MEIS Center and the Graduate
School sponsored a workshop on New
Frontiers in Semiconductor
Materials on August 13th. The
workshop, organized by Professor
Alfonso Franciosi, Chemical
Engineering and Materials Science,
featured prominent U.S. and
European scientists. The speakers
addressed several of the top
priority recent developments in
semiconductor research and
discussed promising frontiers of
investigation. The workshop provided a framework for the
discussion of new controversial
issues and for the exchange of
ideas among participants from
industry and university. Over half
of the 85 attendees were from
industry.
Page 2 MEIS NEWS 2:3, 1984
Speakers and topics at the workshop
on New Frontiers in Semiconductor
Materials included:
Professor F. Bassani, Scuola
Normale Superiore, Pisa Italy:
OPTICAL PROPERTIES OF
SEMICONDUCTORS
Professor A. Baldereschi, Ecole
Polytechnique Federale, Lausanne,
Switzerland:
MICROSCOPIC SEMICONDUCTOR
STRUCTURES
Dr. L. J. Brillson, Xerox Webster
Research Center:
SEMICONDUCTOR INTERFACES:
CHARACTERIZATION AND CONTROL
Dr. L. Ley, Max Planck Institut,
Stuttgart, Federal Republic of
Germany:
AMORPHOUS SEMICONDUCTORS
Professor G. Margaritondo,
University of Wisconsin-Madison:
SEMICONDUCTOR HETEROJUNCTIONS
Professor W. Monch, University of
Duisberg, Federal Republic of
Germany:
TRANSITION FROM ADSORPTION
TO FILM GROWTH ON SEMICONDUCTORS
Professor R. Reifenberger, Purdue
University:
MAGNETIC SEMICONDUCTORS
Professor J. W. Taylor, University
of Wisconsin-Madison:
X-RAY LITHOGRAPHY
Professor J. H. Weaver, University
of Minnesota:
METAL-SEMICONDUCTOR REACTIONS
MEIS RESEARCH PINNACLES
These articles are the second and
third of four describing projects
and faculty constituting the MEIS
Center's research pinnacle program.
III-V SEMICONDUCTOR MATERIALS AND
HIGH SPEED DEVICES PINNACLE
Professor Klavs Jensen, Coordinator
The objectives of this pinnacle
program are to incorporate new
methods of surface and interface
preparation of GaAs and related
III-V semiconductors into new
solid-state devices which will have
an impact on high speed integrated
circuits. The research team consists of experts in fundamental
materials science and in device
modeling and technology who have
established internationally
recognized research programs. The
pinnacle allows them to focus on a
major project by combining their
talents and resources, building on
MEIS-sponsored facilities, and
substantially increasing the size
and scope of their programs.
Students, postdocs, and visitors
participating in this research project are developing a broad based
expertise in microelectronic
materials and device technology.
Coordinated research thrusts have
been established which integrate
basic materials research with
device fabrication and device performance (physics, chemistry,
electrical engineering, and chemical engineering):
1. Scientifically-fundamental
and technologically-relevant
studies of metal-GaAs interface properties, with emphasi8
on electronic and structural
modifications as interfacial
chemical and physical para-
meters are changed, to lead to
new methods of surface/
interface control.
2. Implementation of these new
surface/interface preparation
methods on III-V device structures using molecular beam
epitaxy (MBE) and metalorganic chemical vapor deposition (MOCVD), thereby
immediately exploiting the
scientific developments.
3. Characterization and performance evaluation of III-V
field-effect devices incorporating the advances made
possible by interface modification and synthesis.
We have identified four research
projects for phase one of our pinnacle program. Our overall strategy is to create a link between
basic materials research and IC
device development. By using MBE
and MOCVD, we incorporate the
results of basic interface and surface studies into the development
of higher performance solid-state
devices. We focus on high speed
field effect devices because of
their technical potential - potential which is critically dependent
on the quality of metalsemiconductor and insulatorsemiconductor interfaces.
We expect the combination of novel
fundamental interface research with
device fabrication and processing
techniques (MBE and MOCVD) to place
this research group in the
forefront of III-V research. By
concentrating on compound semiconductors, the group has several
options for future expansions in
the sensor and optical device
areas.
MEIS NEWS 2:3, 1984 Page 3
PRINCIPAL INVESTIGATORS
J. H. Weaver - Chemical
Engineering and Materials Science,
presently heads a group of four PhD
students, four postdocs, and two
visiting professors focussing on
electronic and structural interactions at metal-semiconductor interfaces. He directs the MEIS
synchrotron radiation x-ray
beamline project at the University
of Wisconsin; has authored over 120
refereed papers, chapters, and
reviews; and holds appointments
with both the Ames and the Argonne
National Laboratories. In
September 1982, through initiatives
of the MEIS Center, he joined the
faculty of the University of
Minnesota after nine years at the
University of Wisconsin.
M. Shur - Electrical Engineering,
presently supervises a group of
seven graduate students and one
postdoc working on GaAs FETs, modulation doped FETs, GaAs ICs,
amorphous and crystalline Si FETs,
and amorphous Si solar cells. He
has authored more than 180 refereed
publications and three books. His
research interests lie primarily in
device physics, modeling, and computer assisted design. He is
involved in joint research programs
with Honeywell Corporate Technology
Center and the University of
Illinois. Before joining the
University of Minnesota in 1979, he
was a visiting scientist at Cornell
University and the IBM T. J. Watson
Research Center.
K. F. Jensen - Chemical
Engineering and Materials Science,
heads a group of eight PhD and two
MSc students focussing on process
control and reaction engineering
with emphasis on chemical vapor
deposition of microelectronic
Page 4 MEIS NEWS 2:3, 1984
materials. He joined the faculty
of the University of Minnesota in
1980 and has established a program
in processing of electronic
materials. He is the recipient of
a 1984 NSF Presidential Young
Investigator Award and is the coordinator of the GaAs pinnacle.
A. Franciosi - Chemical
Engineering and Materials Science,
heads a group of two PhD students
and one postdoc. He joined the
faculty at Minnesota in September
1983 through initiatives of the
MEIS Center. He completed his PhD
in physics at the University of
Rome and has been active in
research on metal-semiconductor
interfaces, first at the
Polytechnic of Milan and then at
the University of Wisconsin
Synchrotron Radiation Center.
During 1981 he was a visiting professor at the University of
Calabria. His research program
focuses on semiconductor interface
reactivity and interface catalysis.
The pinnacle members are very
interested in collaboration with
MBE specialists in industry to fill
the MBE expertise desired for a
complete approach to the problem.
THE FOUR PROJECTS
1. Metal Overlayers on
Semiconductor Surfaces (JHW, AF)
This project emphasizes the reactions that occur on metal/GaAs
interfaces, starting with the
arrival of the first isolated adatom
and continuing through the final
stages of interface compound formation. These are technologically
relevant because they examine the
mechanisms for Schottky barrier
formation, and they are scientifically interesting because they
probe the changing environment of
the adatom during the evolving
chemical reactions.
I
Surface and interface reactions of
GaAs with both transition and
nontransition metals are being
studied, starting with the junctions between GaAs and refractory
(Cr, Ti, V), near-noble (Pd, Ni),
and noble metals (Au) and extending
ultimately to studies of GaAs
interactions with rare earth and
alkali earth metals. These are
investigated in detail combining
the techniques of synchrotron
radiation photoemission, inverse
photoemission, and Auger
spectroscopy to examine occupied
and empty states and to correlate
that electronic information with
structural information obtained by
using LEED and electron energy loss
fine structure spectroscopy.
Initial room temperature studies
will be extended to both higher and
lower temperatures to examine reaction kinetics. The information
obtained will guide modeling of
metal-semiconductor bonding. The
project is unique because it uses
experimental techniques available
nowhere else in studies of new
metal-GaAs junctions.
2. New Gate and Insulating
Materials for GaAs (AF, KFJ, JHW)
A large number of chemical reactions take place at semiconductor
surfaces during solid state
electronic device fabrication. At
present no attempt is made to
exploit catalytic effects to
control these reactions, in sharp
contrast with what occurs for
chemical processes. Our work has
shown that an "interface catalytic
effect" exists in which the surface
reactivity of semiconductors is
dramatically changed by pretreating the surface with metallic
impurities. We have demonstrated
that the concentration of catalyst
atoms controls both the reaction
kinetics and the composition of the
reaction products. Earlier work
with metal-silicon interfaces has
shown the potential of this effect
in modulating reactions, and new
studies show that similar effects
take place on GaAs surfaces. The
goal is to exploit these effects to
synthesize new metallic and insulating materials on GaAs surfaces.
Chemisorption studies on GaAs surfaces are being performed as a
function of the interface catalyst
under controlled temperature,
pressure and surface preparation
conditions. The characterization
of catalyst-assisted reactions is
made through a combination of
direct/inverse photoemission and
transport/capacitance measurements
of MIS test structures. MBE fabrication of MIS test structures will
be explored with in situ catalyst
deposition prior to insulator and
metal layers formation on MBE-grown
GaAs.
3. MOCVD and MBE Synthesis of
AlGaAs and GaAs Heterojunctions
(KFJ, AF, MS)
Studies of the controlled growth of
GaAs, AlGaAs, and metal-GaAs structures by MOCVD have been initiated.
The goal is to develop a means for
insuring film thickness and composition uniformity by developing a
MOCVD reactor facility with well
controlled flow, temperature, and
concentration fields. The tight
control of deposition conditions
will make it possible to produce
modulation-doped III-V structures
and eventually superlattices.
These will in turn provide new
opportunities for device structures.
MEIS NEWS 2:3, 1984 Page 5
The MOCVD reactor will have a dual
purpose. First, it will produce
III-V structures and devices which
can be directly compared, through
collaboration, with those made by
MBE. Second, the MOCVD reactor
will allow a careful examination of
fundamental chemical mechanisms and
physical rate processes underlying
MOCVD, using measurements of growth
rates and gas phase compositions.
These later results are crucial for
predicting the composition of films
deposited from the gas phase and
are essential in process scale up.
In addition to thermally-driven
MOCVD, the feasibility of producing
special III-V structures by plasmaand photo-enhanced CVD is being
investigated. These techniques are
currently under study for metal and
dielectric film growth.
4. Fabrication, Characterization,
and Modeling of III-V FETs
- (MS, KFJ)
Devices studied in this project
include GaAs field effect transistors, AlGaAs-GaAs modulation
doped devices (considered to be the
fastest solid state devices in the
world), AlGaAs-GaAs bipolar heterojunction transistors and novel
structures such as submicron
ballistic devices. Design rules
have been formulated to optimize
device structures. New characterization techniques have been
developed to determine important
device parameters by in situ
measurements or special characterization patterns including a new
test structure (a gated transmission line model pattern). The
device models are incorporated into
a new GaAs integrated circuit simulator useful for GaAs gate array
design. Parts of the device work
are joint with Honeywell
(self-aligned modulation doped
Page 6 MEIS NEWS 2:3, 1984
transition, 2k GaAs gate array),
University of Illinois (modulation
doped transitors with extremely
high transconductances), and
Cornell University (ballistic device
and novel multilayered modulation
doped FETs).
In addition to the device modeling,
characterizations of FET structures
grown by MBE and MOCVD are planned
to determine the parameters limiting
the device performance. The goal
will be to characterize the
influence of materials parameters
(interface and bulk traps, doping
variations) on threshold voltage,
transconductance, and contact
resistance. Both AlGaAs/GaAs HEMTs
and conventional GaAs MESFETs will
be examined and the work will be
extended to MISFETs.
External funding for the projects
comes from the Army Research Office,
the National Science Foundation, the
Office of Naval Research, the
Department of Defense equipment
grant program, and Honeywell, Inc.
III-V PROGRAM REVIEW OCTOBER 31
A review of the III-V Compounds and
High Speed Devices Pinnacle will be
held Wednesday, October 31.
Presentations of research by faculty
and graduate students, a luncheon,
and tours of laboratories will take
place from 9:30 a.m. to 3:00 p.m.
There is no fee for attending the
presentations. Reservations for the
luncheon are $9.00. For location,
parking and luncheon reservations
call Carol Siegel at 376-9122.
t
i
COLLOQUIUM SCHEDULE
DEPARTMENT OF COMPUTER SCIENCE
FALL QUARTER 1984
Sept 24
Dr. Steve Chen, VP for Development, Cray Research
"University research - Industry designers, Cooperation in the
design and use of supercomputers, Today and Tomorrow"
Oct 1
Professor James P. Cohoon, University of Virginia
"A Fast Line Intersection Routing Method For Optimal Wiring"
Oct 8
Dr. Nelson Marquina, Honeywell, Minneapolis
"Graph theoretic research issues at Honeywell"
Oct 15
Professor Jean-Loup Baer, University of Washington, Seattle
"The Evolution of Computer Architectures"
Oct 22
WPE Faculty Meeting.
Oct 29
Professor Larry Snyder, University of Washington, Seattle
"Parallel Programming and the Poker Programming Environment"
Nov 5
Dr. Mark Furtney, Cray Research
"A history of parallel processing"
Nov 12
Professor Jean-Loup Baer, University of Washington, Seattle
"Cache Coherence in Multiprocessor Systems"
Nov 19
Dr. Anastasia Czerniakewicz, INTEL Corporation
"Ada as a systems implementation language."
Nov 26
To be announced.
No Colloquium.
All colloquiums will be held in Mech. Eng. 108 from 3:30 pm to 4:30 pm. The
colloquiums will also be broadcast live over UNITE. Abstracts will be posted
outside Lind Hall 114 about a week in advance.
I
INTELLIGENT SYSTEMS PINNACLE
William Thompson
Paul Johnson, coordinators
I
The field of Artificial
Intelligence is rapidly extending
the power and flexibility of modern
computers. Working systems exist
is areas such as expert level
problem solving, automated perception, the organization and
retrieval of complex data, and
natural language understanding.
The difficulties and complexities
of the problems attacked by
researchers in Artificial
Intelligence (AI) require expertise in a wide variety of disciplines. Sophisticated software is
needed to effectively represent and
utilize complex knowledge bases.
Often, specialized computer architectures are called for to efficiently execute AI programs.
Psychology provides representations
of knowledge and skill based upon
insight into how people solve similar problems. Electrical and
mechanical engineering skills allow
the construction of sensors for
perception and robots to effect
actions.
TWO EXAMPLES
The nature of research in AI is
illustrated by considering two
examples. The examples demonstrate
not only the complexity of AI
problems, but also show why there
is a clear need to integrate expertise in a broad range of scientific
and engineering disciplines.
1. Sensor-based robots.
The first example deals with the
development of sensor based robots.
The robot manipulators currently
used for manufacturing have little
or no capability to directly
acquire any information about the
environment in which they are
operating. Unlike their human
counterparts, they have neither
vision nor touch. As a result,
contemporary robots are typically
limited to performing a preprogrammed set of operations. They
require a carefully controlled
workplace and are unable to inspect
their own work or deal with unexpected situations. Artificial
Intelligence techniques are being
investigated as a means for greatly
increasing the flexibility of
robots. This activity requires an
understanding of the mechanics of
robot manipulators, as well as
knowledge of sensory processes such
as vision and of the problem
solving techniques that can determine the appropriate actions to
take based on interpretations of
sensory input.
2.
Faults in computer systems
The second example concerns the
problems associated with developing
a program capable of diagnosing
faults in computer systems.
Obviously, such a program depends
on an understanding of how computer
systems operate and the sorts of
failures that are likely. Still,
the complexity of computer systems
and the wide variety of faults that
are possible preclude any sort of
combinatorial search. Fortunately,
many system designers and field
engineers have, through extensive
experience in diagnosing actual
fault, developed powerful problem
solving skills for dealing with
these problems. It is possible to
formally model these skills. When
these models are combined with
appropriate representations of the
form and function of the hardware,
sophisticated diagnostic systems
are possible.
MEIS NEWS 2:3, 1984 Page 7
PRINCIPAL INVESTIGATORS
The Minnesota group in Artificial
Intelligence has gained national
recognition through its affiliation
with the 8 member SUMEXAIM computer
network sponsored by the Stanford
University Heuristic Programming
Project and the National Library of
Medicine, through presentations at
national and international conferences on Artificial
Intelligence, and via numerous
journal publications. Members of
the group share students as well as
resources. Joint advising of Ph.D.
students has already taken place
between Computer Science and
Management. For the last two
years, Professors Thompson and
Johnson have jointly offered a
graduate course in expert systems.
The course has received substantial
interest from students throughout
the University and the industrial
community.
Four courses in artificial intelligence are either currently offered
by the Computer Science Department
or will be in place by the 1984-85
academic year. Computer Science,
Electrical Engineering, Mechanical
Engineering, Management, and
Psychology also teach a number of
courses in the areas of robotics,
vision, computer architectures for
AI programming, and formal models
of problem solving.
W. Thompson, Computer Science
Department.
Professor Thompson is actively
investigating problems in computer
vision and in expert systems. His
work in vision is focused on discovering the processes involved in
perceiving the spatial relationships between objects and surfaces. Significant results have
been achieved in describing how
Page 8 MEIS NEWS 2:3, 1984
motion provides information about
spatial organization. For the last
five years, Thompson has also been
active in the study of expert
systems. Together with Paul
Johnson, he has developed a formal
model of diagnostic reasoning
capable of expert level performance.
P. Johnson, Department of
Management Science.
Professor Johnson's research focuses
on the investigation of expertise in
professional and technical fields
including science and engineering,
medicine, management, and law. He
heads the GALEN project which is
developing computational models for
fault diagnosis and has constructed
a high performance diagnostic expert
system at Minnesota. Johnson's
current work addresses two major
barriers to the development of more
effective expert systems: 1) the
need for tools and techniques for
identifying and transferring expertise from human to computer environments, and 2) the lack of an
understanding of efficiency mechanisms employed by human experts in
order to avoid exhaustive search of
large data bases in solving relatively unstructured problems.
H. Wechsler, Department of
Electrical Engineering.
Professor Wechsler's work is in the
area of computational vision. He
has concentrated on developing
models of the visual system which
derive their utility from a compact
and coherent collection of fundamental principles. His current
work is based around the development of transform techniques for
encoding visual data in a manner
particularly well suited for a wide
range of analysis tasks. Such
techniques may be crucial to the
effective operation of computer
vision systems. Wechsler is also
working on methods for integrating
vision and world knowledge-based
system for target identification
and video tracking.
flow field indicating the velocity
of the image of points on a sensor
plane due to the motion of the sensor and/or visible objects. These
investigators have previously developed a number of successful techniques for estimating optical flow.
A. Yonas, Institute of Child
Development.
The majority of available research
on analyzing optical flow has dealt
with situations involving a sensor
moving through an otherwise static
environment. Current work in this
project deals with general motion,
where both the sensor and objects
under view may be moving.
Professor Yonas is a psychologist
specializing in the field of visual
perception. His research deals
with two related areas: the study
of the development of spatial perception and the psychophysical
study of the basic mechanisms of
spatial vision. A primary goal
underlying his research is to
understand the properties of pictorial data that make the perception of spatial relationships
possible. He is using discoveries
about the mechanisms of biological
vision to assist in the construction of computer vision systems.
STRUCTURE FROM MOTION
1. Optical Flow
This program is developing techniques for using optical flow to
discover the spatial organization
of a scene. Visual motion is a
powerful source of information
about the shape, position and trajectories of objects and surfaces
under view. Under the appropriate
circumstances, motion can be used
to find the range to objects,
determine the three-dimensional
shape of objects, estimate surface
orientation, find object boundaries, locate moving objects, predict collisions, estimate
trajectory parameters for the
motion of sensors and/or visible
objects, and many other useful
image understanding tasks. Visual
motion is specified by an optical
The lack of a single, global specification of motion-induced changes
makes it difficult to determine precise distances to surfaces. The
approach being developed by this
group is based on techniques which
provide partial, qualitative specification of the scene properties in
question. By understanding which
spatial properties are actually
required and limiting the analysis
to the determination of those properties, significant improvements in
accuracy, generality, and efficiency
are possible.
2.
Object Boundaries
Major strides have been realized in
the analysis of object boundaries
based on motion. A segmentation
scheme based on optical flow has
been developed. The approach is
similar to edge-based segmentation
for normal luminance images (edges
are found by systematically locating
areas of rapid change in the optical
flow field.) Because motion-based
boundary detection is sensitive only
to depth discontinuities and/or
object boundaries, unlike intensitybased edge detection, all detected
edge points are of direct significance to the interpretation of
object shape.
MEIS NEWS 2:3, 1984 Page 9
This motion-based edge detection
has recently been extended, leading
to a method for analyzing dynamic
occlusion to determine which sides
of a detected boundary correspond
to occluding and occluded surfaces.
3.
Accretion and Deletion
This new method is crucial to producing a three-dimensional description of the scene. Two complementary techniques are being
explored. The first uses patterns
of change in optical flow at a
boundary to identify occluding surfaces. The second exploits a phenomenon known as accretion and
deletion. Accretion is the appearance over time of visible texture
on a surface that is being uncovered due to a dynamic occlusion.
Deletion is the corresponding
disappearance of visible surface
texture over time. The new method
can detect regions of accretion and
deletion in image sequences and use
this information to locate occluded
surfaces.
The two techniques taken together
provide redundancy, plus allow the
correct interpretation of a number
of ambiguous situations involving
rotation. Currently, the group is
exploring the information about
spatial relationships and surface
shape available due to dynamic
occlusion.
SUMMARY
The Intelligent Systems Research
Pinnacle at the University of
Minnesota draws on support from the
University, MEIS, local industrial
groups, and research funding agencies. Pinnacle activities contribute to other research areas
ranging from robotics to CAD/CAM,
and, in turn, will be able to capitalize on the significant increases
Page 10 MEIS NEWS 2:3, 1984
in computing power ar~s~ng from VLSI
implementations and distributed processing technologies.
Research in the field of artificial
intelligence requires extensive
experimentation with extremely
complex software and hardware
systems. Three types of hardware
will be acquired. Work in expert
systems will be supported by high
speed, special purpose symbolic computers. The purchase of several
Lisp machines will provide significantly higher processing capacity
than is currently available. In
addition, access will be gained to
much of the public domain AI software currently unusable.
INTELLIGENT SYSTEMS PROGRAM REVIEW
The Intelligent Systems Pinnacle
held a program review on September
14th. Over sixty people attended
the review to hear presentations of
research results by faculty and
graduate students and tour laboratories. Invited guests at the
review included Christopher M.
Brown, University of Rochester,
William J. Clancey, Stanford
University, and Roger Wagner,
Institute for Emerging Technology,
Control Data Corporation.
HIGH-PERFORMANCE INTEGRATED CIRCUITS
PROGRAM REVIEW OCTOBER 30
A review of the High-Performance
Integrated Circuits Program will be
held Tuesday, Oct. 30. Presentations of research by faculty and
graduate students, a luncheon, and
tours of laboratories will take
place from 10:00 a.m. to 3:00 p.m.
There is no fee for attending the
presentations. Reservations for the
luncheon are $9.00. For location,
parking and luncheon reservations,
call Teri Holberg at 376-9122.
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MEIS FELLOWS SUMMER WORK
NEW MEIS FELLOWS
Many MEIS Fellows have spent their
summers working in laboratories of
MEIS member companies:
Fourteen superior students have
accepted MEIS Doctoral Fellowship
awards for 1984-85. They come from
a variety of schools to be a part of
the MEIS community in several
departments.
Sperry:
P. Andersen and A. Wall worked
for Steve Campbell at the
Semiconductor facility.
L. Gerholz worked at the Defense
System in Eagan.
B. Jayaram worked for Lee Tod in
Computer Design.
S. Nahar worked for Jon Barron in
Computer Aided Design.
Honeywell:
D. Brown
J. Budenske worked for Durga Panda
at the Systems Research Center.
W. Smith worked for Paul Decitre.
K. Ryan began permanent full time
work in Information Systems
Architecture.
~:
B. Loehle worked for Ron Martin in
Engineering Systems Division.
Control Data:
J. McGee worked for Ira Wald.
These opportunities for interaction
between university and industry are
key in the transfer of technology
and the motivation to excellence
for all participants.
I
Several MEIS fellows continued
coursework and study for oral or
written examinations:
P. Boyle, C. Butler, B. Clements,
R. Enbody, J. Martin, K. Mechelke
U. Schwuttke, J. Slavik,
L. Wheeler.
Other fellows worked on campus as
research assistants:
S. Bedros for Prof. Kaveh
W. Couture for Prof. Goldman
V. Hietala for Prof. Champlin
P. Pukite for Prof. Cohen
K. Riggs for Prof. Weaver
B. Soumekh for Prof. Mueller
Electrical Engineering:
Mark Clare - Ball State Univ
Christopher Conger - Univ of MO
Donald Koski - Iowa State Univ
Steven Murphy - John Hopkins Univ
Andrew Wowchak - Univ of MN
Computer Science:
Diane Glinsman - Univ of MN
Steven Ratering - Central College
Nancy Reed - Univ of MN
Richard Roiger - Mankato State Univ
Michael Wick - Univ of WI-Eau Claire
Chern Eng and Mat Sci:
Mark Kozlowski - Univ of IL
Cheinan Marks - Univ of Delaware
Physics:
Matthew Schmidt - Gustavus Adolphus
College
Duane Lenn - Northwest Nazarene
College
Chemistry:
Laurie Lynch - Canisius College
Roland Schulze - Univ of MN, Duluth
The '84-85 Fellowship will provide
a $10,000 stipend for nine months
plus tuition and fees for up to 44
credits. The new fellows were
introduced to the community of MEIS
fellows at a July update meeting in
the home of Dr. Martha Russell.
SRC WHITE PAPER
Professors Richard Kain and Larry
Kinney, Electrical Engineering, will
present a white paper on Dynamically
Reconfigurable Networks at the
Sept. 20 - 21st workshop on WaferScale-Integration sponsored by the
Semiconductor Research Corporation.
MEIS NEWS 2:3, 1984 Page 11
ACTING HEAD OF EE APPOINTED
STUDENT CONFERENCE
MEIS welcomes Professor Robert
Collins, Electrical Engineering,
as Acting Head of the EE Department.
In this capacity, Prof. Collins
succeeds Prof. E. Bruce Lee and
will represent EE as a member of
the MEIS Executive Committee.
The IEEE Student Branch will sponsor a one-day conference on "Student
Professional Awareness", 3:30 to
9:30p.m., October 17, 1984.
IEEE AWARDS
Two MEIS sponsored reseachers
received IEEE 1984 Centennial
Medals as "Deserving Members of the
Engineering Community". Professors
A. Nussbaum and A. van der Ziel,
both of Electrical Engineering,
received the awards as part of IEEE
100 year anniversary celebration.
SECOND UM/3M RESEARCH POSTER
SESSION
3M Academic/Industrial Interface
Committee (comprised of members
from the University of Minnesota
and 3M) sponsored a half-day
research poster session on
May 23, 1984. The intent of this
program was to promote personal
contact and collaboration between
individuals with similar interests.
"Modelling and analysis of LPCVD
process." by K. F. Roenigk and
K. F. Jensen
"Surface and interface properties
of variable gap semimagnetic
semiconductors." by A. Franciosi,
S. Chang and C. Caprile.
Microelectronic and Information Sciences
Center
Dr. Martha Russell, Associate Director
University of Minnesota
221 Lind Hall, 207 Church Street, S.E.
Minneapolis, MN 55455
612/376-9122
Page 12 MEIS NEWS 2:3, 1984
Topics will be presented by members
of IEEE Minnesota and include career
planning, communications, engineering professionalism, professional ethics, and advanced
degrees.
Registration fee includes dinner.
Before Oct. 12: members - $2; nonmembers - $8. After Oct. 12: members - $5; nonmembers - $12. For
registration or information call
Alex Dietz, Chairman IEEE Student
Branch, or Professor Jim Holte,
Faculty Advisor, at 373-2577.
DECEMBER SHORT COURSE
Professor R. M. Warner, Jr. will
teach a short course in December
based on his book, Transistors:
Fundamentals for the IntegratedCircuit Engineer. Prof. Warner
coauthored the book with
B. L. Grung.
The course will consist of:
one 3-day session, "Semiconductor
and Junction Fundamentals," on
December 10-12; and
two 1-day sessions, "The MOSFET,"
on December 13 and "Bipolar Junction
Transistors," on December 14.
For further information contact
Leslie Denny, 220 Nolte Center for
Continuing Education Conferences,
373-5325.
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MICROELECTRONIC &
INFORMATION SCIENCES
CENTER
NEWS
Volume 2; Number 4, November/December, 1984
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MEIS RECEIVES CONTRIBUTIONS
NEW MEIS TECHNICAL REPORTS
MEIS has received a $400,000 contribution
from 3M, one of its major sponsors. This is
the first contribution by a member company to
exceed the initial seed monies. The contribution will help MEIS to continue, and further
develop its research, education, and technology transfer programs in microelectronic and
information sciences.
New MEIS Technical Reports are now available:
Other major sponsors who have contributed
seed money for the establishment of the
MEIS Center are Control Data Corporation,
Honeywell, and Sperry. The contributions
and active participation of researchers from
MEIS member companies is essential to the
two-way interaction of the technical community represented by the MEIS Center.
Cray Research has joined MEIS as the first
associate sponsor. The new associate sponsor program compliments the major sponsor
program by Inviting the participation of companies with interests in specific MEIS affiliated projects.
Benefits of major and associate membership
include highly leveraged research, participation in the research liaison program, priority
access to research ideas produced by MEIS
sponsored research projects, visiting research
fellow program, continuing education programs, facilitated interaction with faculty and
graduate students on research topics, meeting participation, MEIS publications and
technical reports, staff recruiting assistance,
tax
advantages,
special
events,
and
increased recognition.
For more information on the major and associate sponsor programs, contact Dr. Martha
Russell, Associate Director, MEIS Center,
376-9122.
#17 Derivation of Optical Flow Using a
Spatiotemporai-Frequency Approach, by L.
Jacobson and H. Wechsler
# 18 Critical Development Stages for the
Reactive Cr-GaAs (110) Interface, by J. H.
Weaver, M. Grioni and J. Joyce
# 19 Normalization in Semiconductor Problems, by R. M. Warner, Jr.
#20 Explaining the Saturation of Potential
Drop on the High Side of a Grossly Asymmetric Junction, by R. M. Warner, Jr., R. D.
Schrimpf, and P. D. Wang
#21 Reaction at a Refractory Metal Semiconductor Interface: V/GaAs (11 0), by M. Grioni,
J. Joyce, and J. H. Weaver
#22 Heterojunction Discontinuities:
Current Position, by A. Nussbaum.
The
These and other MEIS Technical Reports are
available from MEIS (call 376-9122), the IT
Library, and libraries of sponsoring companies.
DOCTORAL FELLOVVS TO TOUR
SPONSOR COMPANIES
MEIS doctoral fellows will tour various facilities of member companies in January.
Honeywell, Sperry, 3M, Control Data, and
Cray Research will host tours of intelligent
systems, microelectronics, semiconductor,
and materials research related facilities.
INSTITUTE OF TECHNOLOGY /UNIVERSITY OF MINNESOTA
227 Lind Hall/207 Church Street S.E.!Minneapolis, Minnesota 55455/(612) 376·9122
MEIS GRANTS LEVERAGE FUNDS
The 1983-84 Small Grants program identified
thirteen proposals to receive MEIS matching
grants of up to $20,000. Eight of those proposals obtained external support and have
brought $1,295,671 to the U of M for research
in MEIS areas. The eight proposals are:
Microscopic Control of Semiconductor Interface Reactivity, by A. Franciosi, CEMS
Investigation of Nonlinear GaAs Distributed
Structures with Application to Ultramicrowave
Integrated Circuits, by K. S. Champlin, EE
How to Design Efficient ECAD Databases, by
D. H. Du and V. Berzins, CSci
A Proposal to Investigate Methods to Solve
Large Scale Eigenvalue Problems and Systems of Linear Equations, by D. Boley, CSci
Electronic Properties and Interface Chemistry
of Variable Gap Semimagnetic Semiconductors, by A. Franciosi, CEMS
Diffusion of Small Molecules in Bulk Polymers
and Polymer Solutions Near the Glass Transition Temperature by Forced Rayleigh
Scattering, by T. P. Lodge and M. Tirrell,
CEMS
Characterizing and Synthesizing Chiral Smectic C Materials for Fast Switching Device
Applications, by C. C. Huang, Physics
SAW Transducers Using Magnetostrictive
Thin Films, by W. Robbins, EE
Reflection High-Energy Electron Diffraction
Studies of Epitaxiai Growth, by P. I. Cohen,
EE
Global Optimization for Large Scale Problems
Using Vector Processing, by J. B. Rosen,
CSci
Electronegative Gas Glow Discharge Investigations, by L. M. Chanin, EE
Layout of Structured Integrated Circuits, by S.
Sahni, CSci
A New Reactor for Experimental and Model·
ling Studies of Plasma Deposition Processes,
by K. F. Jensen, CEMS
Design, Optimization, and Statistical Simulation of Self-tuning Fully Integrated Analog
High-Frequency Filters, by R. Schaumann,
EE
Experimental Research in Computer Algorithms, by S. Sahni, CSci
Research on Stable Processible Conducting
Polymers for Electronic Applications, by S. T.
Wellinghoff, CEMS.
At the November 15th meeting of the MEIS
Technical Coordinating Committee, the following proposals were recommended for MEIS
Small Grant funding for 1984-85:
Views for ECAD Databases, by V. Berzins,
CSci
A Logical Data Modeling Formalism to Support an ECAD Environment, by V. Berzins,
CSci
A Datamodel for Integrated CAD Databases,
by V. Berzins, CSci
Page 2 MEIS NEWS 2:4, 1984
Low Frequency Noise in Solid State Devices,
by A. van der Ziel, EE
Morphology and Electronic Structure of
Buried and Lateral Metal/Semiconductor Interfaces, by J. H. Weaver, CEMS.
The MEIS Small Grants program is intended
to encourage U of M faculty to submit grants
to external funding agencies for support of
research in microelectronic and information
sciences. Proposals are selected on the basis
of:
* relevance to objectives of the MEIS Center
*
*
*
*
and contribution to momentum of the Center
quality of the proposed research
contribution to state of the art research
potential of research success
potential of funding success.
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M:lS
MEIS RESEARCH PINNACLES
This is the final article in a series of four
describing projects and faculty constituting the
MEIS Center's research pinnacle program.
ARTIFICIALLY STRUCTURED MATERIALS
.EQB MICROELECTRONICS
Professor Allen Goldman, Coordinator
The crucial issues in artificially structured
materials are: to develop better ways to fabricate and characterize them; and to study the
unique properties which they have due to
their unusual structure. These two issues· are
the focal points of this project.
The ASM project is comprised of two complimentary thrusts which are both directed at the
study of the fundamental building blocks of
artificially structured materials. The first thrust
deals with the fabrication and characterization
of novel thin film structures, small particle
structures and coupled small structures using
physical vapor deposition techniques, as well
as chemical techniques which heretofore
have not been utilized in the preparation of
microelectronic
materials.
The
growth
processes which affect the final chemical
composition, phases, defects and stresses in
these structues are being closely examined.
The second area consists of the study of the
electronic, magnetic and optical properties of
the structures to be produced and characterized by the techniques and procedures discussed in the first thrust. We expect that the
small particles and ultra thin films being studied will exhibit novel properties attributable to
their reduced size and dimensionality. Thus
these materials require special study since
their physical properties cannot be inferred by
extrapolation of those of the bulk materials.
The research team consists of experts in fundamental materials science, chemistry, and
condensed matter physics who have internationally recognized fundamental research programs. These investigators have combined
their resources and talents and significantly
broadened their research interests, thus
enhancing the scope of their activities. The
students, postdoctoral associates and visitors
engaged in this research provide an infrastructure of research expertise in the area of
artificially structured materials. By initially
concentrating on rather simple problems and
model systems, the expertise for future
expansion into the development of more elaborate artificial structures is being developed .
Fabrication and Characterization .a.f Artificially
Structured Materials
Preparation of Materials and Structures using
Physical Vapor Deposition Techniques:
Thin film materials used in these investigations are being prepared using a variety of
vapor deposition methods which Include electron beam evaporation, molecular beam epitaxy (MBE), non-epitaxial molecular beam
vapor deposition, and diode and triode
sputtering.
Small particles are being
prepared using plasma techniques. Films are
characterized using Auger electron spectroscopy (AES), reflection high energy electron
diffraction (RHEED), x-ray diffraction analysis,
scanning electron microscopy (SEM) and
scanning transmission electron microscopy
(STEM). AES and STEM are particularly
useful in characterizing small particle systems. Selection area electron diffraction
(SAED) and energy dispersive x-ray techniques are also important diagnostic tools.
Studies on the Interfacial Growth and Structure of Ultra-Thin Film Composites:
Problems related to the processing and structure of thin films focus specifically on the physical structure at the interfaces with the substrate. This involves the· study of the
geometry of these interfaces on an atomic
scale by studying the growth process, stability, chemical composition, phases, stresses,
and defects of thin metal films deposited on
insulators, semiconductors and metals.
Novel Fabrication and Characterization of
Small Structures on Surfaces:
To compliment the techniques and characterization procedures discussed in the preceding
MEIS NEWS 2:4, 1984 Page 3
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two subsections, and to also provide newer
(albeit higher risk) avenues for the production
of complicated structures having nanometer
scale dimensions, this team is also involved
in the development of fabrication strategies
based on oriented chemistry and on chemistry initiated by low energy collisions between
charged particles and reactive surface
species. Furthermore, a new x-ray characterization technique is being applied to establish
the extent to which success has been
attained in using these techniques to gener.ate very small, well defined patterns.
Electronic, Magnetic and Optical Properties of
Small Structures
Electronic Properties of Ultra-Thin Films and
Heterostructure Interfaces:
This study focuses on electronic localization
in ultra-thin films by studying their electrical
conductivity, magnetoconductivity, Hall effect,
thermoelectric power, and electronic density
of states. The latter is being investigated by
measuring electron tunneling characteristics.
Particular attention is being paid to the effect
of varying amounts of disorder on localization
by comparing the results of measurements on
amorphous films with single crystal films
prepared using molecular beam epitaxy
(MBE). The investigations of electronic properties are accompanied by studies of structure in an attempt to correlate physical and
chemical structure with electronic properties.
chemical structure of thin films and, in general, surface adsorbed species at interfaces.
Furthermore, non-linear optical phenomena
may be of practical importance in the emerging technology of ultrafast optical computation
via optically bistable devices. Non-linear optical spectroscopy (especially optical second
harmonic generation) will also be applied to
the investigation of the electronic properties of
many of the artificially prepared materials
described above. The optical experiments
compliment the various measurements
described previously and are particularly
important in studying samples with low surface area coverage, for which conductivity
measurements become less informative.
Brief Description of Investigators
.P.. E. Barbara, Assistant Professor of Chemis·
try and Chemical Physics, presently supervises a group of eight graduate students
working on different aspects of molecular
photophysics. He has authored 15 refereed
publications. His research interests are in
ultrafast chemical and physical phenomena of
molecular substances as probed by time
resolved (picosecond) laser spectroscopy.
Prof. Barbara's research group recently
developed a new approach to picosecond
spectroscopy that allows the detection of
extraordinary subtle photophysical effects.
He is presently an Alfred P. Sloan fellow and
a Presidential Young Investigator.
.C.. E.. Campbell, Professor of Physics and
Magnetic Properties of Thin Films and Small
Particles:
The study of the development of magnetism
in ultra-thin films is complicated by the diffi·
culty in fully characterizing magnetism at
thicknesses on the order of a few atomic
layers. Our approach to the problem involves
two types of investigations, studies of thin
films and studies of aggregates of small parti·
cles.
Non-Linear Optical Properties:
Non-linear optical spectroscopy is rapidly
being developed as a powerful technique for
studying the electronic properties and
Page 4 MEIS NEWS 2:4, 1984
Head, School of Physics and Astronomy, is a
many-body theorist with a research program
during the last eleven years at the University
of Minnesota focusing primarily on the
microscopic structure of quantum fluids and
adsorbed systems. This program has been
sponsored continuously by the National Sci·
ence Foundation during this period, and usually consists of one post-doctoral research
associate and one to three students, as well
as substantial international collaboration with
other physicists. Approximately 40 refereed
publications and numerous invited papers
have come out of this program, as well as
involvement in the organization of a number
of major international conferences and
workshops. Most recently the research focus
rvElS
has been expanded to include the study of
correlation effects in electronic systems.
.E.. 0.. Dahlberg, Assistant Professor of Physics, directs a research group consisting of
seven graduate students.
His present
research interests primarily involve the experimental study of the effects of dimensional
constraints and disorder on the electric and
magnetic properties of metals. The studies
involve measurements of the magnetoresistance, thermoelectric effect, specific heat,
magnetization and magnetic susceptibility.
He presently has authored 20 refereed publications. He is currently an Alfred P. Sloan
fellow.
J.o.hn .E. Evans, Associate Professor of Chemistry, is presently engaged in research relating to the preparation and characterization of
thin films with unusual properties. Within the
context of these studies Professor Evans and
his group are involved in the use of nonequilibrium plasma chemistry for the fabrication of
modified electrodes and for the etching of
polymer overlays on metal/metal oxide composites. The chemistry and physics of low
energy (10-1000 eV) ion and electron bombardment of reactive or bound species
resident on solid surfaces is under study with
regard to the involvement of such processes
in the plasma surface interactions associated
with the deposition or etching of surface films.
Professor Evans supervises a group of fourteen graduate students and one postdoctoral
research associate.
He was recently
awarded an Alfred P. Sloan Foundation fellowship for the period 1983-85.
William W.. Gerberich, Professor of Materials
Science, received a B.S. from Case-Western
University and an M.S. at Syracuse University
before working in the Aerospace Industry
from 1959-1967, including JPL at Cal Tech.
He subsequently returned to Academia
through Lawrence Berkeley in 1971. Since
then he has been with the Department of
Chemical Engineering and Materials Science
and is currently Associate Head.
His
research program centers on the physical
and mechanical characterization of solids and
interfaces with special reference to fracture.
This has resulted in 44 M.S. and Ph.D.
degrees and approximately 140 published
papers and book chapters, mostly with his
students. He won the William Spraragen
Award of the American Welding Society for
the best research paper in 1968 and is
currently on the Board of Review or Board of
Publications of Metallurgical Transactions,
ASM International Me1al.a Reviews and Ada
Metallurgical. His research program currently
has six graduate students and a commitment
from DOE and NSF over the next three
years.
AJ.J.en M... Goldman; Professor of Physics,
presently supervises a group of six graduate
students and one research associate working
on a number of experimental problems relating to thin films and tunneling junctions. He
has authored more than 82 refereed publications and is the co-editor of a book on percolation, localization and superconductivity
which has been published by Plenum Press.
His research interests are primarily in the
physics of superconductivity and magnetism
with an emphasis on the effects of disorder
and dimensional constraints on such systems
and the use of electron tunneling as a probe.
Professor Goldman was a pioneer in the
investigation of the Josephson effect and in
the use of surface analytical techniques in
superconducting materials research. He is a
fellow of the American Association for the
Advancement of Science and was an Alfred
P. Sloan Foundation Fellow 1966-70.
.Bobe.rt M... Hexter, Professor of Physical
Chemistry, presently supervises a group consisting of a graduate student, a research
associate, and a senior scientist working in
two areas: surface-enhanced Raman spectroscopy and x-ray microscopy. He has
authored more than 45 refereed publications
and is co-author of a monograph on molecular vibrations in crystals. His research
interests have been in molecular spectroscopy with emphasis on vibrational and electronic spectroscopy of molecular crystals at
low temperatures, rapid scanning infrared
spectroscopy, Raman spectroscopy and x-ray
absorption spectroscopy. Professor Hexter is
known for first introducing the concepts of the
vibration exciton and of librational motion in
molecular crystals. He is also credited with
MEIS NEWS 2:4, 1984 Page 5
the first use of modulation excitation infrared
spectroscopy
using
excitation
in
the
ultraviolet-visible region and detection in the
infrared. Finally, he is also known for the
design and construction of a rapid scan
infrared spectrometer, having a scan rate
(20,000 per second) which has not been
exceeded. He held both NSF and NRC Postdoctoral Fellowships as well as Fulbright and
Guggenheim Fellowships. Professor Hexter
was Chairman of the Department of Chemistry from 1969 to 1975; Acting Director, MEIS
1981-1982; and Co-Director, NSF Regional
tnstrumentation Facility for Surface Analysis,
1979-present.
.L. M.i.Uer. Professor and Chairman of the
Department of Chemistry, supervises a group
of twelve co-workers working on a range of
problems In organic chemistry, plasma chemistry, electrochemistry and surface synthesis.
Dr. Miller has taught at Colorado State
University, and has been a Visiting Professor
at the University of Southampton, England;
the University of Aarhus, Denmark; and the
Weizmann Institute of Science, Israel. He
has published more than 100 papers, held
both A. P. Sloan and J. S. Guggenheim Fellowships, and been elected a Fellow of the
Japan Society of the Promotion of Science.
~
L ~ Associate Professor of Physics,
is the author of more than thirty research articles in various areas of theoretical of condensed matter physics.
He has also
authored several review articles. His current
research interests are in the area of nonequilibrium phenomena, kinetics of twodimensional
systems,
superconductivity,
phase transitions and superfluidity.
He
presently supervises one doctoral student and
one post-doctoral fellow. He has been a
Miller Fellow and a Visiting Professor at the
University of Paris.
Qri.ol
Special EQuipment .and Facilities
* Superconducting susceptometer
* Computer-controlled Electron-Beam Deposi-
tion System
* UHV System for in-situ low-temperature
electrical studies of thin films
* Dilution Refrigerator Systems
* Surface Analysis Center
* Single-Crystal Analysis System
* Helium Liquification System
* Chemistry Department Laser Facility
* Transport Properties of Materials Facility
IEEE HONORS RESEARCHERS
~
~
Schmidt. Professor of Chemical
Engineering and Materials Science, supervises 12 graduate students in research
related to surface chemistry.
He has
authored approximately 115 publications. He
received a Ph.D. degree from the University
of Chicago in Physical Chemistry in 1964 and
has been at the University of Minnesota since
1965. His research interests include adsorption and reaction of well-defined metal surfaces, reaction kinetics, crystallographic
anisotropies in adsorption and reaction, surface morphology, sintering of supported parti·
cles, and reaction engineering. Experimental
techniques employed include temperature
programmed desorption, Auger electron spectroscopy, low energy electron diffraction, photoelectron spectroscopy, scanning electron
microscopy,
and
transmission
electron
microscopy. He has supervised theses of
approximately 20 Ph.D. students and 10
M.S. students at the University of Minnesota.
Page 6 MEIS NEWS 2:4, 1984
Two MEIS sponsored researchers received
honors as part of the IEEE 100 year anniversary celebration. Professor A. van der Ziel, of
Electrical Engineering, received an IEEE
1984 Centennial Medal as a "Deserving
Member of the Engineering Community".
Professor A. Nussbaum, also of EE, was
elected to the grade of IEEE Fellow effective
January 1, 1984.
Microelectronic and Information Sciences
Center
Dr. Martha Russell, Associate Director
University of Minnesota
227 Lind Hall, 207 Church Street, S.E.
Minneapolis, MN 55455
(612) 376-9122
I
I
MICROELECTRONIC &
INFORMATION SCIENCES
CENTER
I
NEWS
Volume 3; Number 1, January/February, 1985
MEIS WINTER SEMINARS
Seminars during Winter Quarter 1985 will
take place on Tuesdays at 3:15 pm in the
Mechanical Engineering Building, room 108
and will be broadcast live and interactive on
UNITE Channel A (exceptions are noted). All
are welcome for coffee and discussion following seminars in 227 Lind Hall.
Note that some arrangements have changed
since the seminar schedule was originally
announced.
Feb. 12 - "The Relationship Between Materials and VLSI" by Dr. Paul Ho, Thomas J.
Watson Research Laboratory, IBM, Yorktown
Heights, New Jersey.
Feb. 18 (Monday, in Physics Building room
210, will not be broadcast on UNITE)- "Radiation Effects on Power MOS" by Dr. Kenneth
Galloway, Chief of Semiconductor Devices
and Circuits Division, National Bureau of
Standards, Washington, D.C.
Feb. 19 - "Corrosion of Thin Films Used in
Semiconductor and Magnetic Recording
Technologies" by Dr. Jerome Eldridge,
Manager, Device Structure Processing, IBM,
San Jose, California. Cosponsored with Corrosion Center and Magnetic Information Technology Center.
Feb. 22 (Friday) - "Implementation of High
Clock Rate Signal Processors Using GaAs
Integrated Circuit Technology" by Dr. Barry
Gilbert, Scientist, Special Purpose Processor
Development Group, Mayo Foundation.
Feb. 26 - "Fat-Trees: Universal Networks for
Hardware-Efficient Supercomputing" by Dr.
Charles E. Leiserson, Professor, Laboratory
for Computer Science, Department of Electrical Engineering and Computer Science, MIT.
March 5 - "VLSI and Beyond" (taped) by Dr.
James Meindl, Professor, Department of
Electrical Engineering, Stanford University.
March 12 - "Fundamental Limits on Communication and Storage of Information" by Dr.
Aaron Wyner, Head, Communication Analysis
Research Department, AT&T Bell Labs.
NEW MEIS TECHNICAL REPORTS
New MEIS Technical Reports now available
include:
#23 The Role of Knowledge in the Architecture of a Robust Robot Control, By M. Gini,
R. Doshi, M. Gluch, R. Smith, and I. Zualkernan.
#24 A Precise Scaling Length for Depleted
Regions, by R. D. Schrimpf and R. M.
Warner, Jr.
#25 Transition from Single-Layer to DoubleLayer Steps on GaAs(11 0) Prepared by
Molecular Beam Epitaxy, by J. Fuchs, J. M.
Van Hove, P. R. Pukite, G. J. Whaley, and P.
I. Cohen.
These and other MEIS Technical Reports are
available from MEIS (call 376-9122), the IT
Library, and libraries of member companies.
INSTITUTE OF TECHNOLOGY /UNIVERSITY OF MINNESOTA
227 Lind Hallt207 Church Street S.E./Minneapolis, Minnesota 55455/(612) 376-9122
MEIS REQUEST SUBMITIED TO
LEGISLATURE BY UNIVERSilY
MEIS FELLOWS TOUR MEMBER
COMPANIES
MEIS is requesting funds from the state legislature for fiscal years 1986 and 1987. An
increase of $450,000 and $900,000 respectively, is being sought for the biennium to
continue and strengthen MEIS programs.
MEIS Fellows are touring facilities of member
companies. Many of these students will be
working for member companies this summer.
Dates and facilities are:
Funds in addition to those appropriated in the
1983-85 biennium are needed to supplement
monies from private industry and to attract
additional funds from federal and other agencies for the completion of the first program
cycle.
The program cycle is based on the amount of
time necessary to establish research programs, to complete graduate students' dissertation research integrated into programs, and
to disseminate findings through publications
and through the movement of new scientists
into the workplace.
Contributions by member companies will supplement funds from the State of Minnesota.
The recent contribution by 3M and associate
membership by Cray Research are the first
industrial contributions since initial seed
monies were committed. These contributions
point to a realization of annual commitments
by member companies and participation by
small and medium-sized companies as
planned.
3M - January 24th: Software and Electronics
Resource Center and Engineering Systems &
Technology facility.
Honeywell - January 31st: Solid State Electronics Division, Physical Sciences Center,
and Computer Science Center.
Cray Research - February 2nd: Advanced
Research, Development, and Manufacturing
facilities.
Sperry - February 5th: Commercial Division
and Semiconductor Operations.
Control Data - February 14th: Microcircuits
Division and Artificial Intelligence Group.
MEIS VIDEOTAPE
MEIS Makes a Difference, a 13-minute videotape presentation has recently been produced. The videotape uses commentary by
students, industry scientists, and other
members of the MEIS Community to describe
the research, education, and technology
transfer programs of MEIS.
PROFESSIONAL MEETINGS
Tuesday, Feb. 12, 11:45 a.m. at the Ramada
Inn, Bloomington. "Packaging for High Performance Integrated Circuits" by Tom Steele,
Sperry Corp. Sponsored by the Twin Cities
IEEE Electron Devices Society. Contact Dimitri Dokos at 456-4133 for reservations.
Tuesday, Feb. 26, 2:00 p.m. at Control Data
Corp., Arden Hills Facility.
"Prefailure
Analysis" by John Morgen, Sperry Corp.
Sponsored by the Minnesota Microelectronics
Laboratory Group.
Includes tour and
workshops. Contact A. Kostic at 574-3183
for reservations.
Page 2 MEIS NEWS 3:1, 1985
Target audiences for the videotape include
public groups, current and potential sponsors,
and potential graduate students in MEISrelated areas. Copies of the tape are available from MEIS (call 376-9122) in 3/4-inch
and 1/2-inch VHS formats.
Microelectronic and Information Sciences
Center
Dr. Martha Russell, Associate Director
University of Minnesota
227 Lind Hall, 207 Church Street, S.E.
Minneapolis, MN 55455
(612) 376-9122
MICROELECTRONIC &
INFORMATION SCIENCES
CENTER
NEWS
Volume 3; Number 2, March/April, 1985
MEIS IS AMONG LEADERS OF
INFORMATION TECHNOLOGY R&D
A recent report prepared by the U.S.
Congressional Office of Technology Assessment (OTA) described the MEIS Center as
one of five leading university programs for
information technology research and development. The report by OTA was released by
Rep. George E. Brown, Jr. (D-Calif.). The
following summary of the report was released
February 28, 1985:
By all historical measures, U.S. research and
development (R&D) in information technology
-- communications, computer technology -- is
not only robust, but is adapting rapidly to
changing regulatory structures and increasing
world-wide economic competition.
!
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l
II
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f
I
I
Federal and private investments are increasing, universities and industry are forming new
institutional arrangements, new technical
advances continue to be made, and increasing numbers of students are entering information technology programs, says OT A.
OT A stresses that despite this adaptation,
continued congressional concern is warranted: patterns for the conduct of R&D in the
U.S. that have been successful in the past
may be undercut by government-coordinated
programs in other nations.
Information technology is critically important
worldwide, economically and socially. The
quality of our R&D is a key factor in our ability to meet rapidly mounting foreign competition in world-wide markets and to realize
social benefits of new computer and communication systems, says OTA.
OT A points out that changes in products and
services based on microelectronics are likely
to be as revolutionary In the next decade as
they have been over the last. Most areas of
information technology examined by OTA -including microelectronics, fiber optics, artificial intelligence, computer design, and
software engineering -- are still in the early
stages. Thus, R&D will be Important in
improving and expanding their capabilities.
According to OTA, the changes taking place
in funding and Institutional structure for Information technology R&D may create issue
such as:
1. Funding. Whether current levels of federal
R&D support for Information technology
(including research on the social Impacts of
these technologies) are adequate both overall
and in the balance of civilian/military priorities,
and whether further coordination of research
programs within and among agencies is
needed.
The federal government is a major supporter
of information technology R&D, with the
Department of Defense providing over 80% of
the federal funding, and civilian funding agencies such as NASA and NIH providing the
balance. Private computer and communications firms also have made major contributions, but reduced regulation of telecommunications and divestiture of AT&T have
changed the environment for R&D In Industrial laboratories. For example, the funding
mechanism and, to some extent, the goals of
AT &T's Bell Laboratories have changed significantly. Although serious harm to Bell Labs'
R&D activities is unlikely In the short-term
and other R&D institutions may be positively
INSTITUTE OF TECHNOLOGY /UNIVERSITY OF MINNESOTA
227 Lind Hall/207 Church Street S.E./Minneapolis, Minnesota 55455/(612) 376-9122
affected by these changes, the changing
overall patterns of industrial research need to
be watched to see whether the anticipated
surge in innovation occurs and whether an
increased focus on short-term development
will detract from basic research.
2. Unintended barriers to R&D. Federal policy not directly related to science and technology (e.g., anti-trust, taxation, immigration, and
intellectual property) can inhibit investments in
and the conduct of R&D. Congress may wish
to remove these barriers in cases where
other important policy objectives are not
compromised. The passage in 1984 of the
Semiconductor Protection Act and the
National Cooperative Research Act are examples of congressional action in this area.
3. Access. Computers (including supercomputers), on-line electronic data bases, and
communication networks have become major
research tools in a variety of science and
engineering disciplines. Improved access to
these facilities by researchers Is vitally important to the U.S. R&D effort. For example,
Congress may wish to take steps to improve
Executive Branch coordination and management among their supercomputer research
centers, to encourage access to them through
high speed data communication networks,
and to support research on software problems involved with advanced computer architectures.
4. Technical Manpower. Federal programs
have traditionally encouraged a steady supply
of technical manpower and provided equality
of access to technological careers. To
achieve their purpose, these programs need
to be long-term and stable. Attempts to make
short-term corrections to narrowly defined
temporary shortages have generally failed
because of the long lead-time required for a
program to have an effect, and the errors of
predictions.
5. Information policy. Innovation in information technology both Influences and is shaped
by many federal policies regarding information and its use -- including privacy, computer
crime, trade and information, and intellectual
property. Many foreign nations incorporate
Page 2 MEIS NEWS 3:2, 1985
their R&D programs in broader comprehensive national information policies that are
based on their concepts of the economic and
social role of information and information
technologies. A more integrated approach to
U.S. information policy would help Congress
establish priorities and appropriate funding
levels for R&D in the technology.
Copies of the report, Information Technology
R/:'jD: Critical Trends and Issues, are available to the public at the U.S. Government
Printing Office (GPO), Superintendent of
Documents, Washington, D.C. 20402. The
GPO stock number is 052-003-00976-5, the
price is $5.50.
GRADUATE SCHOOL AWARDS
SUMMER GRANTS FOR FACULTY
RESEARCH
Several MEIS-affiliated faculty members were
awarded Graduate School research awards
for summer 1985:
Daniel Boley, Computer Science.
Topic: Parallel algorithms for large eigenvalue
problems, design, analysis and implementation issues.
Maria Gini, Computer Science.
Topic: Representation of knowledge about
objects for assembly robots.
Ting-Chuen Pong, Computer Science.
Topic: Determining three-dimensional shape
from topographic image patterns.
SCHEDULES ENCLOSED
Enclosed in this issue of MEIS News are
schedules for MEIS seminars, Computer Science colloquia, and Electrical Engineering
colloquia for spring quarter. All presentations
will be broadcasted over UNITE.
COLLOQU~SCHEDULE
DEPARTMENT OF COMPUTER SCIENCE
SPRING QUARTER 1985
April 1
Dr James Levenick, University of Michigan
Knowledge representation and intelligent systems: From semantic networks
to cognitive maps.
April 3
Dr Vincent Hwang, University of Maryland
SIGMA: A control structure for image understanding systems
April 4
Mr Uttam Mukhopadhyay, University of South Carolina
A two layer system for customized document retrieval.
April 8 Mr Neta Amit, Yale University
A common denominator of supercompilers and program readability.
April 10 Mr Gad Dafni, University of Texas, Austin
Design and performance evaluation of the Texas object based system.
April 15
April 17 Mr Dehrooz Shirazi, University of Oklahoma
April 22 Professor Karel Culik II, University of Waterloo
Translation of systolic algorithms between systems with different topology.
April 29 Professor Ken Kennedy, Rice University, Distinguished Lecture Series
Semiautomatic generation of parallel programs
April 30 Professor Ken Kennedy, Rice University, Distinguished Lecture Series
Interprocedural data flow analysis in a Fortran programming environment
May 6
May 13 Professor Bruce Berra, Syracuse University, Cray Lectureship
Computer Architecture for Data and Knowledge Dases
May 20 Dr Woody Bledsoe, MCC, Austin, Distinguished Lecture Series
Some thoughts on artificial intelligence research
May 21 Dr Woody Bledsoe, MCC, Austin, Distinguished Lecture Series
Some ideas on using analogy in automated theorem proving
May 27 Memorial Day. No Colloquium.
June 3
To be announced
All Monday colloquiums will be held in Mech. Engg. 108 from 3:30 pm to 4:30 pm.
These and some of the Tuesday colloquiums will be broadcast live over UNITE.
Abstracts will be posted outside Lind Hall 114 about a week in advance.
Students registered for CSCi 8899
To get a grade of S in this course, you must attend at least as many colloquiums as are
broadcast over UNITE. An attendence sheet will be passed out at each colloquium.
~~··•••W••'''''W"'"(;•ll•'·''h'i'~~"'""~g; t
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ELECTRICAL ENGINEERING COLLOQUIA
SPRING QUARTER 1985
3:15 IN MECH ENG 108
(HOT CIDER AND COOKIES AT 4:00 PM IN EE 136)
APRIL 11
APRIL 25
MICROWAVE HOLOGRAMS
MAY 9
PERSPECTIVES ON BIOMEDICAL ENGINEERING
NEAL GALLAGHER
J. E. HOLTE
SCHOOL OF ELECTRICAL ENGINEERING
PURDUE UNIVERSITY
DEPT. OF ELECTRICAL ENGINEERING
UNIVERSITY OF MINNESOTA
LAFAYETTE, IN
MINNEAPOLIS, MN
ROBUST AND OPTIMAL CONTROL
PRAMOD KHARGONEKAR
DEPT. OF ELECTRICAL ENGINEERING
UNIVERSITY OF MINNESOTA
MINNEAPOLIS, MN
MAY 23
ACID RAIN: NATURE, ORIGIN, EFFECTS AND CONTROL
EVILLE GORHAM
ECOLOGY AND BEHAVIORAL BIOLOGY
UNIVERSITY OF MINNESOTA
MINNEAPOLIS, MN
NOTE TO UNITE MEMBERS
THESE COLLOQUIA WILL BE CARRIED LIVE-INTERACTIVE ON UNITE, CHANNEL A FOR THE CONENIENCE OF
EMPLOYEES OF COMPANIES HAVING UNITE FACILTIES.
PLEASE PUBLICIZE WITHIN YOUR ORGANIZATION. FOR FURTHER INFORMATION, CONTACT: K.S.P. KUMAR
373-5228
PROGRAM REVIEW FOR ARTIFICIALLY STRUCTURED MATERIALS
HIGH-PERFORMANCE IC'S GROUP
TO MEET
MEIS extends an open invitation for you to
attend the program review of the Artificially
Structured Materials for Microelectronics project. Artificially Structured Materials is one of
four major interdisciplinary research programs
sponsored by MEIS. Speakers will present
goals and activities of faculty and graduate
students involved in the project.
Researchers
in
the
High-Performance
Integrated Circuits team will meet April 4th,
3:00 p.m. in Mechanical Engineering, room
108. High-Performance Integrated Circuits is
one of four major interdisciplinary research
programs sponsored by MEIS. Faculty
members will discuss recent progress and
results. Industrial liaisons are welcome. For
more information, call Dr. William Robbins,
373-9719.
The program review will begin at 8:30a.m. in
the Mississippi Room of the Coffman
Memorial Union, 300 Washington Ave. S.E.,
Minneapolis (East Bank Campus).
1
I
I!
l
The focal points of the Artificially Structured
Materials program are the development of
better ways to fabricate and characterize artificially structured materials and the study of
the unique properties they may have due to
their unusual structure.
The project is comprised of two complimentary thrusts. The first deals with the fabrication and characterization of novel thin films
structures, small particle structures and coupled small structures using physical vapor
deposition techniques and new chemical
techniques. Growth processes which affect
the final chemical composition, phases,
defects and stresses in these structures are
being closely examined.
The second thrust involves study of the electronic, magnetic and optical properties of the
structures produced. The small particles and
ultra-thin films being studied exhibit novel properties attributable to their reduced size and
dimensionality. Detailed study of the physical
properties of these materials is required since
their behavior cannot be inferred by extrapolation from information on the properties of
bulk materials.
There is no charge for attending the program
review. If you wish to attend the luncheon at
the Campus Club, the cost is $9.00 per person. Please call Sharon Kauth at MEIS,
376-9122, by April 1st for location, parking
and luncheon reservations.
RYAN ELECTED PRESIDENT OF
TWIN CITIES SIGART
Karen Ryan of Honeywell, a former MEIS
Fellow, has been elected President of the
Twin Cities Special Interest Group on Artificial
Intelligence.
The charter of Twin Cities SIGART is to promote the Interaction of people working on
artificial intelligence at the University and in
industry. The group is part of a national
organization and its focus is on maintaining a
network for people in the Twin Cities area
who are interested in artificial intelligence.
Twin Cities SIGART holds monthly meetings
at which speakers discuss artificial intelligence projects. The group's next meeting is
on Wednesday, April 10th, 6:00- 8:00p.m. in
Mechanical Engineering, room 18 (U of M,
East Bank Campus). Contact Karen Ryan,
887-6492, for more information.
FELLOVVS TO TOUR CRAY
Cray Research has invited the MEIS Fellows
to tour the Software Division in Mendota
Heights on Thursday, April 18th. Transportation will be provided by University bus. Contact John Cornwell at MEIS, 376-9122, for
details.
MEIS NEWS 3:2, 1985 Page 3
fVElS
MEIS
IS BENEFITING
FROM
INDUSTRIAL PARTICIPATION
Several people from MEIS member companies have recently become members of
MEIS committees. Industrial participation in
MEIS programs Is helping the Center to realIze its objectives. The committees are:
MEIS Management Board:
Robert Collins, EE
H. Ted Davis, CEMS
Ennio Fatuzzo, 3M
Robert Hexter, Chemistry
Robert Holt, Dean, Graduate School
E. F. Infante, Dean, IT
Ken Keller, President, U of M, ex-officio
John Lacey, Control Data
Kurt Maly, Computer Science
Martha Russell, MEIS
William Sackett, Honeywell
David Turcotte, Sperry
Technical Coordinating Committee:
Don Boyd, Honeywell
Krzysztof Burhardt, 3M
H. Ted Davis, CEMS
Allen Goldman, Physics
Richard Kain, EE
Wallace Lindemann, Control Data
Martha Russell, MEIS
James Slagle, Computer Science
Larry Walker, Sperry
John Weaver, CEMS
In addition, several people have recently
become Industrial liaisons to MEIS team
research projects. Industrial liaisons are:
Artificially Structured Materials:
Steve Bezuk, Sperry
Ray Bodnar, 3M
Chuck Naber, Control Data, VTC
Steve Nelson, Cray Research
Obert Tufte, Honeywell
High-Performance Integrated Circuits:
Del Eberlein, Cray Research
Fred Hampton, Control Data, VTC
Robert Ore, Sperry
Obert Tufte, Honeywell
Bill Weaver, 3M
Page 4 MEIS NEWS 3:2, 1985
III- V Compounds & High Speed Devices:
Mark Fleming, 3M
T. C. Lee, Honeywell
Wallace Lindemann, Control Data, VTC
Steve Nelson, Cray Research
Bryan Seymour, Sperry
Intelligent Systems:
John Dehne, Honeywell
Nigel Dolby, Sperry
Joseph Hesse, 3M
Roger Wagner, Control Data
PROFESSIONAL MEETING
The Viking Chapter of the International
Society for Hybrid Microelectronics will hold
its annual meeting, Microsymposium, on
Wednesday, April 24th, at the Sheraton Park
Place. Technical presentations begin at 9:00
a.m. The exhibit area will be open from 9:30
to 4:30. Attendance to both the technical
presentations and exhibits is free. The luncheon and noon address require advance
registration, $10, by April 15th. For information or reservations, contact Allan Callander,
Program Chairman, 934-7624.
VISITING SCIENTIST WORKING
WITH MEIS AFFILIATED PROF.
Professor Claus Hamann of Technische
Hochschule Kari-Marx-Stadt, East Germany,
is working with Professor Wehner, Electrical
Engineering, for the next three months. Professor Hamann is an expert on materials with
unusual electrical-switching properties and
one-dimensional organic semiconductors.
Microelectronic and Information Sciences
Center
Dr. Martha Russell, Associate Director
John Cornwell, MEIS News Editor
University of Minnesota
227 Lind Hall, 207 Church Street, S.E.
Minneapolis, MN 55455
(612) 376-9122
MICROELECTRONIC &
INFORMATION SCIENCES
CENTER
5
NEWS uPDATe
MEIS REQUESTS SUPPORT FROM STATE OF MINNESOTA
The MEIS Center is requesting an increase of
$1,350,000 in order to provide full implemen·
tation of its first program cycle during the
1985·87 biennium. During this period MEIS
expects to continue to strengthen the Center's
research, education, and technology transfer
programs, to increase the level of active col·
laboration and cooperation with industry and
other centers and universities, and to broaden
the financial base of the Center.
The 83·85 State appropriation to MEIS
($600,000 per year) was allocated as a State
Special Appropriation beyond the University
of Minnesota's Request. For the 85·87 biennium, all State Special Requests have been
aggregated and submitted as Special
Appropriations through the University of
Minnesota's Request. The allocation process
involves two steps. First, the level of State
Appropriations to the U of M will be esta·
blished by the State of Minnesota. Second,
the U of M will determine what portion of the
Special Appropriation will go to ME IS. The U
of M 85·87 Special Appropriations request is
for an additional $14.19 million (the increase
of $1.35 million requested by MEIS is part of
this). The total MEIS request for the 85·87
biennium is $2.55 million: $1.05 million in FY
86 and $1.5 million in FY 87.
The Governor has recommended that the
85·87 Special Appropriations to U of M be cut
by $11.64 million. Dean Infante has been
actively involved in presenting information on
MEIS and other IT programs to the Senate
Education Subcommittee, Senator Waldorf,
Chair, 296·3809, and to the Education Divi·
sion of the House Appropriations, Representative
Haukoos,
Chair,
296·8216,
to
encourage them to propose higher levels of
State spending for the U of M Special
Appropriations.
Once the level of U of M Special Appropria·
tions has been determined, the U of M
Budget Executive Committee (Vice Presidents
Kegler, Lilly and Vanselow, and Acting Vice
President Murthy, with President Keller) will
determine the appropriation to MEIS.
In three years MEIS has been established
and has been recognized nationally and inter·
nationally. Activities in the first program cycle
have been designed to achieve fast start-up.
Programs are now about mid-way through the
first cycle. The program cycle is based on
the amount of time necessary to establish a
research program, to incorporate graduate
student dissertation research into the pro·
gram, and to prepare the new knowledge for
publication and scientists for employment.
MEIS currently supports approximately 100
graduate students and postdoctoral assistants
through fellowships and research assistantships. The first sizable component of this
group is expected to begin graduating in
1987. Several of the MEIS sponsored gradu·
ate students have completed their degree
programs and are now working in Minnesota
for MEIS member companies.
As a major Minnesota resource, there is justification for requesting a significant portion of
sponsorship for MEIS from the State of Min·
nesota. Industrial contributions seeded the
Center's activities. The U of M has made
commitments to faculty positions, laboratory
expansion and building requests for departments in which microelectronic and information sciences are housed. Full scale commit·
ment from the State of Minnesota is impera·
tive for realization of the Center's full potential
as a state and regional resource.
INSTITUTE OF TECHNOLOGY /UNIVERSITY OF MINNESOTA
227 Lind Hall/207 Church Street S.E./Minneapolis, Minnesota 55455/(612) 376-9122
t...-: j)' •'·-.
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MICROELECTRONIC &
INFORMATION SCIENCES
CENTER
NEWS
Volume 3; Number 3, May/June, 1985
AEA HELPS CHANNEL INDUSTRIAL CONTRIBUTIONS TO I.T.
A major campaign by the Minnesota Council
of the American Electronics Association
(AEA) to bolster the state's engineering education program has received $764,000 in support from local electronics firms.
The fund-raising effort is part of AEA's Electronics Education Foundation, which has collected more than $7.5 million nationally from
AEA member companies.
AEA's Minnesota Council neared its goal of
$780,000 following a $491 ,000 equipment
donation by Zycad Corp., a 4-year-old Arden
Hills company with 224 employees. The
company's contribution of a $425,000 logic
evaluator, the Zylos software package valued
at $30,000 and a $36,000 maintenance contract which may be renewed annually, will go
to the University of Minnesota's Institute of
Technology. A logic evaluator is used in
designing advanced semiconductors and
electronic systems. It allows the user to
rapidly test any design for flaws before entering the actual production stage.
"I think it's important that universities have the
latest and most modern equipment to use in
the educational process," said Zycad
President Richard Offerdahl of his company's
donation. "Modern equipment also helps
universities to attract the top students."
"We have a commitment to the education and
advancement of tomorrow's design engineers.
A study recently released by the AEA noted
that only 16 percent of all academic research
equipment in 1982 was characterized as
state-of-the-art;
research
equipment
in
academia is twice as old as that in industrial
and government labs; and ninety percent of
all department chairmen said equipment shortages inhibited critical research. We are
pleased to be working with the AEA to do our
part to alleviate this problem," Offerdahl said.
The Institute of Technology also will be the
beneficiary of five fellowship-loans for U.S.
citizens who plan to earn doctorate degrees
in electrical and computer engineering or
computer science and then teach at the
university level. ADC Telecommunications,
Cray Research, Data Card, Dicomed and
Honeywell each will sponsor one four-year
fellowship worth $52,000. Fifty percent of the
fellowship is a loan which is forgiven if the
recipient earns a Ph.D. and teaches
engineering for three years at a university. In
addition, ADC Telecommunications is sponsoring a $13,000 student assistance grant.
Identification of candidates and selection of
recipients will be done by departmental graduate programs. MEIS will administer the fellowships and the activities of MEIS will be
extended to include the AEA Fellows.
"High quality technical education is critical to
the creation of new jobs and a stronger economy in Minnesota during the 1980's," said
Cray Research Chairman and Chief Executive Officer John A. Rollwagen, who is chairAEA continued on page 4.
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INSTITUTE OF TECHNOLOGY /UNIVERSITY OF MINNESOTA
227 Lind Hall/207 Church Street S.E./Minneapolis, Minnesota 55455/(612) 376-9122
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MEIS VIDEOTAPES AVAILABLE
Videotapes of MEIS seminars are now available for use by participating companies:
#1 VLSI and Beyond, by James Meindl,
Stanford University, presented March 6, 1984.
#2 Artificial Intelligence and Manufacturing,
by Raj Reddy, Carnegie-Mellon University,
presented April 2, 1984.
#3 Metallization for VLSI Circuits, by P. B.
Ghate, Texas Instruments, presented April
26, 1984.
#4 Creativity in Engineering, by Jack Kilby,
Consultant, presented May 1, 1984.
#5 Cross-sectional Transmission Electron
Microscopy of Electronic and Photonic Devices, by T. T. Sheng, AT&T Bell Laboratories,
presented October 9, 1984.
#6 Research Frontiers at Semiconductor
Research Corporation, by James Key, Semiconductor Research Corporation, presented
October 16, 1984.
# 7 H91-xCdxTe Thin-film Growth: An Overview, by C. A. Castro, Texas Instruments,
Inc., presented January 15, 1985.
#8
Microwave
Semiconductor
Device
Research at Lincoln Laboratory, by R. A.
Murphy, Lincoln Laboratory, MIT, presented
January 22, 1985.
#9 The Physics of Deep Impurity Levels in
Semiconductors, by John D. Dow, University
of Notre Dame, presented February 5, 1985.
#1 0 Contamination Control in Semiconductor
Manufacturing, by Graydon B. Larrabee,
Texas Instruments, presented February 6,
1985.
#11 Materials Science for VLSI Technology:
Perspective and Opportunities, by Paul S. Ho,
IBM T. J. Watson Research Center,
presented February 12, 1985.
Page 2 MEIS NEWS 3:3, 1985
# 12 Radiation Effects on Power MOS, by
Kenneth F. Galloway, National Bureau of
Standards, presented on February 18, 1985.
#13 Architectural and Design Issues for High
Performance Signal Processors: the Synergism Between Algorithms and Technology,
Barry K. Gilbert, Mayo Foundation, presented
February 22, 1985.
#14 Fat Trees: Universal Networks for
Hardware-Efficient
Supercomputing,
by
Charles E. Leiserson, Laboratory for Computer Science, MIT, presented February 26,
1985.
#15 Fundamental Limits on Communication
and Storage of Information, Aaron D. Wyner,
AT&T Bell Laboratories, presented March 12,
1985.
# 16 Materials Modifications Using Ion Beams
and Lasers, by C. W. White, Oak Ridge
National Laboratory, presented April 2, 1985.
#17 Topics on Tetrahedrally Bonded Amorphous Semiconductors, by Shashanka S.
Mitra, University of Rhode Island, presented
April 12, 1985.
#18 New Materials for Integrated Circuit
Fabrication, by Shyam P. Murarka, Center for
Integrated Electronics, RPI, presented April
23, 1985.
#19 Interface Studies on 111-V Compound
Semiconductors, by Rudi Ludeke, IBM T. J.
Watson Research Center, presented April 30,
1985.
#20 Interactive Expert Systems in Technology Planning, by Karol Pelc, Technical
University of Warsaw, Poland, presented May
3, 1985.
#21 Introduction to the Quantum Hall Effect
with Application to GaAs Heterostructures, by
Steve Girvin, National Bureau of Standards,
presented May 7, 1985.
Videotapes are available on loan from MEIS
to participating companies; call 376-9122.
MICROELECTRONICS
CANCER RESEARCH
HELPS
IN
Researchers at the U of M in the Medical
School and the Department of Electrical
Engineering are collaborating on a microelectronic device for analyzing cancer cells. If
successful, the device would permit scientists
to study neoplastic cells (cells growing at a
tumorous rate) in many chemical environments.
Work on the device began two years ago
when Dr. James Holte, a professor in the
Department of Electrical Engineering was
contacted by Dr. Vincent Garry, Department
of Laboratory Medicine and Pathology. WeiChen Chu, an EE Master's student who is
now designing VLSI circuits for Sperry Corp.,
designed the original device.
This first experimental chip was then fabricated on a wafer by Microcircuits, a division
of VTC Incorporated, an offspring of Control
Data Corp. John Shier, of Microcircuits, provided "invaluable participation," Dr. Holte
says. The industrial participation accelerated
the research by one year, according to Dr.
Holte.
The goal of the device is the ability to measure the electrical environments outside animal
cells. By detecting the electrical potential
differences in the cellular membrane, inherent
impulse patterns and amplitudes of cells can
be established. Once sample cells have
been analyzed, tissue cells and neoplastic
cells may be compared.
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Previous technology for this type of research
often involved impaling the cell with a probing
electrode. The new device takes readings
from cells topically which does not damage
the cells. This makes it possible to study
cells while growing them in different chemical
environments. The researchers hope the
new device will also make it possible to study
clusters of cells in addition to individual cells,
yielding information about cell interaction.
~
Research on the device is still underway and
many new designs will be tested before
results can be determined. New undergraduate and graduate students have shown
interest in further research and major support
for the effort is being pursued. Future plans
for similar devices include extending its functions to observe thermal activity of cells.
LAB COURSE TEACHES FABRICATION TECHNIQUES
A
laboratory course offered
by the
University's
Department
of
Electrical
Engineering is giving students experience in
circuit fabrication techniques. Students use
experiments involving a series of steps
through metallizing and testing the circuits.
Because of new facilities in the Microelectronics Laboratory, the course is now centered
around MOS technology. The emphasis was
on bipolar devices before the lab was
updated, according to Professor Bill Robbins
who teaches the course. One of the experiments takes place in the lab's new cleanroom. New test equipment also makes it
possible for students to make more accurate
measurements.
Students in the course first make decisions
about the type of circuit to be fabricated, such
as a logic gate or analog circuit. The students then perform a series of fabrication
steps involving etching of the metal, metal
interconnect, and testing.
Techniques learned in the course represent
processes used in the microelectronics industry and prepare students for further research
work. Students are typically Seniors and
Graduate Students in Electrical Engineering,
Physics, and Chemical Engineering & Materials Science.
The course, titled Basic Microelectronics, is
offered once a year during Spring Quarter. In
the past three years, the MEIS Technical
Coordinating Committee has played an
advisory role in providing input and resources
for courses in microelectronic and information
sciences.
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AEA (continued from page 1)
MBE WORKSHOP AT U OF M
man of both AEA's national and Minnesota
Engineering and Technical Education Com·
mittees. "These gifts from members of the
Minnesota Council will help redress the shortage of engineering and computer science
faculty which is restricting undergraduate
enrollments and decreasing educational qual·
ity."
The University of Minnesota will host an MBE
conference this summer, sponsored by the
American Vacuum Society. The Sixth Annual
Molecular Beam Epitaxy Workshop will be
held at the Radisson University Hotel (East
Bank Campus) on August 14-16, 1985. The
Coordinator of the Workshop is Philip I.
Cohen, Department of Electrical Engineering.
E. F. Infante, Dean of the Institute of Technology, said the AEA fellowship program "really
goes to the root of the problem. Like everybody else (other universities), we have a
number of faculty positions vacant in the
engineering and computer science areas.
There are not enough graduate students pursuing advanced degrees in these fields," he
said. "If the American Electronics Association and American industry continues this
level of support, it will help close the faculty
gap."
The program will include sessions on: growth
of new materials, characterization of MBE
growth processes, advances in techniques
and equipment, fabrication of high-speed devices by MBE, optoelectronic MBE devices,
and novel MBE devices.
Dean Infante said he is very pleased with the
Zycad donation. "I and the faculty of the
Institute of Technology are delighted with
Zycad's donation of a logic evaluator. The
logic evaluator will play an enormous part in
our instructional and research activities, especially in our digital electronics laboratory.
Because it provides logic simulation at
speeds which are orders of magnitude above
anything else available, the logic evaluator
makes possible the design of advanced circuits and systems that are not attainable with
our present fabrication facilities. This dona·
tion from Zycad represents the best possible
cooperation between industry and academia
to their mutual benefit," he said.
In addition to fellowship-loans and equipment
donations, AEA contributions include faculty
development grants to aid universities in
recruitment and retention of electrical
engineering, computer engineering and com·
puter science faculty.
The
American
Electronics
Association
represents 109 electronics and information
technology companies in Minnesota and
maintains a regional office in Minneapolis.
Page 4 MEIS NEWS 3:3, 1985
Papers on all aspects of molecular beam epitaxy will be considered for inclusion in the
program. Ten copies of a 300-500 word
abstract must be received on or before June
30, 1985 by Gary Y. Robinson, Department of
Electrical Engineering, Colorado State University, Fort Collins, CO 80523, (303) 491-6575.
The abstract should clearly state the research
objectives, techniques used, specific results,
and the significance of the findings. Authors
of accepted papers will be requested to submit a manuscript of 3,000 words or less to the
Program Chairman for publication in the
Workshop Proceedings, which will again
appear in the Journal of Vacuum Science and
Technology. The final manuscript must be
submitted at the Workshop.
The MBE Workshop is open to members of
the MEIS Technical Community. For more
information, contact Phil Cohen, (612) 3733025.
Microelectronic and Information Sciences
Center
Dr. Martha Russell, Associate Director
John Cornwell, MEIS News Editor
University of Minnesota
227 Lind Hall, 207 Church Street S.E.
Minneapolis, MN 55455
(612) 376-9122
fv11W
('l~Jr.::B":,'\
MICROELECTRONIC &
INFORMATION SCIENCES
CENTER
NEWS
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Volume 3; Number 4, July/August, 1985
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DIRECTOR TO JOIN IN OCTOBER
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Dr. Wallace W. Lindemann, formerly vice
president of Control Data Corporation's Microcircuits Division, will join the Institute of Technology in October as Director of MEIS and
Professor of Electrical Engineering.
Lindemann has been a strong supporter of
MEIS since its early days, according to Dr.
Martha Russell, MEIS Associate Director. His
active participation includes membership on
the MEIS Technical Coordinating Committee
and his facilitation of working relationships
between MEIS affiliated faculty and CDC
scientists and engineers.
"As MEIS moves into its next phase of
development, we are looking forward to Dr.
Lindemann's leadership in building engineering capabilities in the Microelectronics
Laboratory and in strengthening the interaction of MEIS scientific research with the
laboratory," says Russell.
Lindemann says he is committed to MEIS'
contribution to the Minnesota economy
through further development of the vital link
between the Institute of Technology and the
Minnesota microelectronics industry.
In addition to his involvement with MEIS,
Lindemann has participated actively in the
Semiconductor Research Corporation as
CDC's representative to the Technical
Advisory Board. Lindemann is also an
alumnus of the Institute of Technology in
Electrical Engineering.
IEEE BIPOLAR CIRCUITS AND
TECHNOLOGY CONFERENCE
--- Call for Papers --The 1986 IEEE Bipolar Circuits and Technology Meeting will be held in Minneapolis during the second or third week of September,
1986. The meeting has been organized to
provide a ~rum for technical communication
focused specifically on the needs and
interests of the bipolar community.
Members of the Organizing Committee
include John S. Shier, VTC Inc. (General
Chairman) and Raymond M. Warner, Jr.,
Department of Electrical Engineering, University of Minnesota.
Papers covering the design, performance,
fabrication, testing, and application of bipolar
and bipolar/FET integrated circuits and
discrete devices are invited. All papers
should be suitable for a 20-minute presentation. Text and figures must not have been
presented at other conferences, or published
or announced prior to the IEEE Bipolar Circuits and Technology Meeting.
For further information on the Bipolar Circuits
and Technology Meeting, including the mailing of the Advance Program, send complete
address to: Robert A. Stehlin, Texas Instruments Inc., P.O. Box 225012, Dallas, TX
75265. The deadline for receipt of abstracts
is April 4, 1986.
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INSTITUTE OF TECHNOLOGY /UNIVERSITY OF MINNESOTA
227 Lind Hall/207 Church Street S.E./Minneapolis, Minnesota 55455/(612) 376-9122
GaAs SEMINAR HELD AT U OF M
Several industrial scientists from Control
Data, Cray Research, Gould, Honeywell,
Perkin-Elmer, VTC, and 3M joined over
twenty-five faculty members and graduate
students for a seminar on gallium arsenide
(GaAs) research held at the University of
Minnesota on July 15, 1985.
The seminar included presentations by indus·
trial and U of M scientists as well as informal
discussions on issues related to GaAs
research.
Martha Russell, of MEIS, welcomed the group
and presented data on interorganizational col·
laboration in GaAs research in industry,
universities, and government.
Peter Erickson of Perkin-Elmer spoke on
compound semiconductor material research
at Physical Electronics and discussed recent
developments in Molecular Beam Epitaxy
(MBE) for the pilot production of GaAs devices.
T. C. Lee of Honeywell gave a presentation
on GaAs research at Honeywell's Physical
Sciences Center.
Tho Vu of Honeywell discussed GaAs
research and development at Honeywell's
Systems and Research Center.
Tushar Gheewala of Sperry presented information on practical GaAs circuits including
circuit design, packaging, and problems associated with the present manufacture of GaAs
integrated circuits.
Steve Nelson of Cray Research discussed
GaAs research and development at Cray
including goals, facilities, staff, device
features, equipment and process features.
John Weaver, Department of Chemical
Engineering and Materials Science, U of M,
talked about research on GaAs-metal sur·
faces and interfaces.
Page 2 MEIS NEWS 3:4, 1985
Phil Cohen,
Department of Electrical
Engineering, U of M, discussed material char·
acterization and preparation in MBE.
Aldert van der Ziel, Department of Electrical
Engineering, U of M, presented data on the
causes and characteristics of 1/f noise in
GaAs devices.
Klavs Jensen, Department of Chemical
Engineering and Materials Science, U of M,
discussed metal-organic chemical vapor
deposition (MOCVD) of compound semiconductors.
Allen Nussbaum, Department of Electrical
Engineering, U of M, presented a new
approach to the theory of heterojunctions.
Ray Warner, Jr., Department of Electrical
Engineering, U of M, discussed novel threedimensional integrated circuit concepts for sill·
con and GaAs devices.
Dan Dahlberg, Department of Physics, U of
M, presented information on the effects of
modulation doped structures at low tempera·
tures.
Michael Shur, Department of Electrical
Engineering, U of M, discussed simulation,
design
and
testing
of
GaAs
and
AIGaAs/GaAs integrated circuits. Professor
Shur was the Coordinator of the GaAs Seminar.
The GaAs Seminar is an example of the
technology transfer efforts of MEIS. An active
network of scientists helps to promote interaction and communication of ideas and issues
important to the MEIS technical community.
To
facilitate this
development,
MEIS
encourages an active exchange of information between university and industry scientists
on new methodological approaches, analytical
techniques and conceptual designs in sub·
jects related to microelectronic and informa·
tion sciences.
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MEIS TECHNICAL REPORTS
MEIS Technical Reports offer early access to
research results and provide a means for
disseminating technical information to university and Industrial scientists.
Copies of each report are available in the
Institute of Technology Library and libraries of
member companies. Copies may also be
requested from MEIS using the form on the
back of this page.
The following MEIS Technical Reports are
now available:
#1 A Three-Dimensionai-CMOS Design
Methodology," by B. Hoefflinger, S. T. Liu
and B. Vajdic.
#2 An Interface Catalytic Effect: Cr at the
Si(111)-Au Interface," by A. Franciosi, D. G.
O'Neill and J. H. Weaver.
#3 A Systolic Design Rule Checker," by R.
Kane and S. Sahni.
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#4 Modeling of Chemical Vapor Deposition
Reactors for the Fabrication of Microelectronic Devices," by K. F. Jensen.
#5 Tunneling Anomalies and the Coexistence
of Ferromagnetism and Superconductivity in
ErRh4B4 Films, by A. M. Goldman, A. M.
Kadin, L. J. Lin and C. P. Umbach.
#10 An Approach to Custom Design of VLSI
Circuit Design Automation, by M. Perkowski,
E. B. Lee and C. Kim.
#11 Modeling of Chemical Vapor Deposition
Reactors, by K. F. Jensen.
#12 Analysis of Multicomponent LPCVD
Processes: Deposition of Pure and In Situ
Doped Poly-Si, by K. F. Roenigk and K. F.
Jensen.
# 13 Modeling the Inversion Layer at Equilibrium, by D. H. Ju and R. M. Warner, Jr.
#14 Field and Related SemiconductorSurface and Equilibrium-Step-Junction Variables in Terms of the General Solution, by R.
M. Warner, Jr., R. P. Jindal and B. L. Grung.
#15 Multiple Layer Techniques in Optical
Lithography: Applications to Fine Line MOS
Production, by M. A. Listvan, M. Swanson, A.
Wall and S. A. Campbell.
#16 Designing Systolic Algorithms Using
Sequential Machines, by 0. H. Ibarra, M. A.
Palls and S. M. Kim.
#17 Derivation of Optical Flow Using a
Spatiotemporai-Frequency Approach, by L.
Jacobson and H. Wechsler.
#18 Critical Development Stages for the
Reactive Cr-GaAs(11 0) Interface, by J. H.
Weaver, M. Grioni and J. Joyce.
#6 Nature of the Smectic-A-Smectic-C Transition Near a Nematic-Smectlc-A-Smectic-C
Multicritlcal Point, by C. C. Huang and S. C.
Lien.
#19 Normalization in Semiconductor Problems, by R. M. Warner, Jr.
# 7 Performance Bounds on Multiprocessor
Schedules, by R. Y. Kaln and A. A. Raie.
#20 Explaining the Saturation of Potential
Drop on the High Side of a Grossly Asymmetric Junction, by R. M. Warner, Jr., R. D.
Schrimpf and P. D. Wang.
#8 Parasitic MESFET in (AI, Ga) As/GaAs
Modulation Doped FET's and MODFET Characterization, by K. Lee, M. Shur, T. J. Drummond and H. Morkoc.
#9 Analysis and Design in MSG: Formalizing
Functional Specifications, by V. A. Berzins
and M. Gray.
#21 Reaction at a Refractory Metal Semiconductor Interface: V/GaAs(11 0), by M. Grioni,
J. Joyce and J. H. Weaver.
#22 Heterojunction Discontinuities:
Current Position, by A. Nussbaum.
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MEIS NEWS 3:4, 1985 Page 3
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#23 The Role of Knowledge in the Architecture of a Robust Robot Control, by M. Gini, R.
Doshi, M. Gluch, R. Smith, and I. Zualkernan.
#24 A Precise Scaling Length for Depleted
Regions, by R. D. Schrimpf and R. M.
Warner, Jr.
#25 Transition from Single-Layer to DoubleLayer Steps on GaAs(11 0) · Prepared by
Molecular Beam Epitaxy, by J. Fuchs, J. M.
Van Hove, P. R. Pukite, G. J. Whaley and P.
I. Cohen.
#26 Syncrotron Radiation Photoemission
Studies of Interfaces, by J. H. Weaver.
Chapter 2 in Analysis and Characterization of
Thin Films: Treatise on Materials Science and
Technology, ed. K. N. Tu and R. Rosenberg,
Vol. 28 (Academic Press).
#27 VLSI Architectures for LU Decomposition, by K. H. Cheng and S. Sahni.
#28 Electronic Structure of Ternary Semimagnetic Semiconductors, by A. Franciosi, S.
Chang, C. Caprile, R. Reifenberger, and U.
Debska.
#29 Microscopic Control of Semiconductor
Surface Oxidation, by A. Franciosi, S. Chang,
P. Phillip, C. Cap rile, and J. Joyce.
#30 Efficient Algorithms for Layer Assignment Problems, by K. C. Chang and H. C.
Du.
#31 The Importance and Design of the
Student-Model Data Structure, by R. Doshi,
B. Koski, D. Hu, H. Wechsler, and M. Wick.
#32 The Development of Sensitivity to
Kinetic, Binocular and Pictorial Depth Information in Human Infants, by A. Yonas and C.
Granrud.
#33 Application of Acoustic Microscopy to
the Examination of Integrated Circuits, by W.
P. Robbins and R. K. Mueller.
ORDER FORM
To order Technical Reports, specify the number of copies desired next to the report number.
Send this form to: MEIS, 227 Lind Hall, 207 Church Street S.E., Minneapolis, MN 55455.
--#1
--#10
--#19
--#28
--#2
--#11
--#20
--#29
--#3
--#12
--#21
--#30
--#4
--#13
--#22
--#31
--#14
--#23
--#32
--#6
--#15
--#24
--#33
--#7
--#16
--#8
--#17
--#25
_ _ #26
--#9
--#18
--#27
--#5
Please type or print name, company name, address, zip code and telephone number below.
Page 4 MEIS NEWS 3:4, 1985
MEIS SPARKS DEVELOPMENT OF
NEW COURSES IN DEPARTMENTS
MEIS programs over four years have facilitated the development of curricula in
microelectronic and information sciences.
Many new courses now offered through
departments of the Institute of Technology
complement research thrusts' and other MEIS
activities.
New courses added or redirected in the last
four years, some of which are new courses
this year, are among those listed below.
8502 - Expert Systems
8551 - Artificial Intelligence Techniques
in Robotics
Electrical Engineering
3351 - Introduction to Logic Design
3352 - Introduction to Microprocessors
5355 - Microprocessor Interfacing and
System Design
5571 - VLSI Engineering: Circuit Design
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Chemical Engineering
and Materials Science
5013 - Introduction to Electronic Properties
of Materials
5572 - VLSI Engineering: Chip Layout
5573 - VLSI Engineering: Test Technology
~
8213 - Electronic Properties of Materials
5574- Computer-Aided VLSI Design
Laboratory I
I
8214- Advanced Topics in Electronic
Properties of Materials
5575 - Computer-Aided VLSI Design
Laboratory II
8403 - Chemical Bonding at Surfaces
5576 - VLSI Modeling and Processing
8903 - Microelectronics Processing
5654 - High Speed Compound
Semiconductor Devices I
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Computer Science
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5180- Software Engineering I
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5181 - Software Engineering II
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5280 - Computer Aided Design I
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5281 - Computer Aided Design II
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5511 - Artificial Intelligence I
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5512 - Artificial Intelligence II
5531 -Artificial Intelligence Programming
Techniques
5599 - Problems: Artificial Intelligence
8501 -Computer Vision
5655- High Speed Compound
Semiconductor Devices II
5656- High Speed Compound
Semiconductor Devices Ill
5666 - Magnetic Properties of Materials
and Applications I
5667 - Magnetic Properties of Materials
and Applications II
5668 - Magnetic Properties of Materials
and Applications Ill
5670 - Basic Microelectronics
5702 - Stochastic Processes and Optimum
Filtering
MEIS NEWS 3:4, 1985 Page 5
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fVEIS
NEW FULBRIGHT SCIENTIFIC
RESEARCH MISSIONS TO FRANCE
CONFERENCE ON 111-V AND II-VI
COMPOUND SEMICONDUCTORS
From the lnBtitute of International Education:
--- Call for Papers ---
The United States Information Agency and
the Franco-American Commission for Educational Exchange have announced an experimental pilot project of two-week scientific
research missions under the auspices of the
Fulbright program to take place during 19861987 in France.
A Topical Conference on 111-V and II-VI Compound Semiconductor Surfaces sponsored by
the American Physical Society will be held at
the Marriott Downtown Hotel, Atlanta, Georgia, January 27-28, 1986. Topics will include
structure, composition and electrical properties.
Applications will be accepted from those who
have received their Ph.D.'s no earlier than
1983 in Biotechnology, Microelectronics, or
Physics of New Materials. Three or four
awards will be made in each field.
Papers on MBE, MOCVD, GaAs and other
subjects are welcome. Abstracts of papers
should be sent to: Topical Conference,
Microelectronics Research Center, Bldg.
0250, Georgia Institute of Technology,
Atlanta, Georgia 30332. The deadline for
abstracts is October 11, 1985.
Members of each subject matter group will be
given grants of $2000 each to cover round
trip international transportation, internal
French travel and room and board, plus $250
for the purchase of scientific publications and
miscellaneous items. Since the schedule will
be demanding and strictly professional, no
provisions will be made for spouses.
In cooperation with the Centre National de Ia
Recherche Scientifique (CNRS), the itinerary
for each two week mission will be developed,
keeping in mind the wishes of group participants. The missions can take place between
March 15 and June 15, 1986 at a time mutually agreed upon by the members of each
group.
Applicants must be U.S. citizens, with a
recent Ph.D. in one of the above disciplines,
who have received the majority of their high
school and undergraduate education in the
U.S. Although French comprehension and
conversational ability are preferred, they are
not obligatory.
Applications may be obtained from the U.S.
Student Program Division, Institute of International Education, 809 United Nations Plaza,
New York, NY 10017 (Telephone: 212 8838266). Completed applications must be
received by October 31, 1985.
Page 6 MEIS NEWS 3:4, 1985
DATA GENERAL CORP. DONATES
SUPERMINICOMPUTER TO U OF M
Data General Corp. has announced a gift to
the U of M of an ECLIPSE MV/10000, one of
the computer industry's most powerful superminicomputers. The system is valued at
$514,000.
The new computer, which has been installed
in Lind Hall, will be used by the Department
of Computer Science in classroom teaching
and for research on data base systems. In
addition to University students, engineers
from several local companies will use the
computer through the UNITE program.
Microelectronic and Information Sciences
Center
Dr. Martha Russell, Associate Director
John Cornwell, MEIS NewB Editor
University of Minnesota
227 Lind Hall, 207 Church Street S.E.
Minneapolis, MN 55455
(612) 376-9122
MICROELECTRONIC &
INFORMATION SCIENCES
CENTER
l
NEWS
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Volume 3; Number 5, September/October, 1985
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MEIS MATCHES NSF GRANT
TO COMPUTER SCIENCE
MEIS WELCOMES NEW HEADS
IN CS AND EE DEPARTMENTS
The National Science Foundation has
awarded a grant of $3.62 million to a group of
seven faculty members led by Professor
Sahni of the Computer Science Department.
Other principal investigators are Professors
Boley, Ibarra and Rosen. Participating faculty
are Professors Du, Venkatesan, and Vergis.
David Fox, Prof. of Computer Science, and
Robert Collins, Prof. of Electrical Engineering,
assume responsibilities as heads of their
departments this fall. In those capacities,
they will serve as members of the MEIS Executive Committee, in its advisory role, to the
Director and Associate Director of MEIS.
This award recognizes the significant contributions made by these faculty members in
the Computer Science Department to the
area of high performance computing. The
grant is for a five-year period and will provide
resources for this group of faculty to develop
efficient methodologies for the use of ultra
high speed computers. Of special interest to
this group are pipelined and parallel computers. This award is one of five made this year,
following a very keen national competition.
Fox joins the Computer Science Department
after four years as the Director of Mathematical and Information Sciences, Air Force Office
of Scientific Research, Washington, D.C. and
twenty-five years at the Johns Hopkins
University.
Fox's academic background
includes physics, engineering mechanics, and
mathematics. His research interests currently
encompass applied mathematics, especially
the computation of eigen values.
Fox
succeeds Kurt Maly, Assoc. Prof. of Computer Science, who has served as the department head and as a member of the MEIS
Executive Committee.
MEIS will provide $362,000 to this project as
a portion of the University of Minnesota's
match to the award. Principal investigators
on this award are a subset of the faculty
members sponsored in 1982-83 under the
Design Automation for Software Engineering
project. The DASE project received $125,000
from MEIS to develop a group proposal in
this area. Professor Venkatesan came to UM
through an MEIS faculty expansion program.
Collins has been a professor in Electrical
Engineering at UM since 1963, with the
exception of a two-year leave to the Office of
Naval Research as Director of Electronic and
Solid State Physics. His research interests
include electro-optic research in the design
and use of lasers and coherent optical systems. He served as acting head of EE last
year and, in that capacity, participated in the
MEIS Executive Committee.
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227 Lind Hall/207 Church Street S.E./Minneapolis, Minnesota 55455/(612) 376-9122
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ADC AND VTC JOIN MEIS
MEIS welcomes ADC Telecommunications,
Inc. and VTC Incorporated as associate sponsors. These companies are the third and
fourth to join MEIS as associate sponsors.
The other MEIS associate sponsors are Cray
Research, Inc. and Zycad Corporation.
ADC is located in Bloomington, where its
major research and development facilities are
based. ADC designs, manufactures and sells
diverse electrochemical and electronic products for the telecommunications industry.
VTC, also in Bloomington, designs and markets high performance semiconductor devices. The VHSIC Technology Division specializes in high-speed CMOS logic and radiation
hardened devices. The Microcircuits Division
manufactures mainly bipolar devices.
ME IS THANKS MALY
Kurt Maly, Assoc. Prof. of Computer Science,
who has served as head of that department
since 1982 and as a member of the MEIS
Executive Committee and Management
Board, returns to teaching this fall.
Maly's research interests include the efficiency in data structures on the physical level
of implementation and the interface between
the user and the tools needed to write good
programs.
Maly has contributed substantially to planning
and implementing the start-up phase of MEIS,
especially regarding the role of the Computer
Science Department and faculty from that
department in MEIS programs and activities.
MEIS-affiliated faculty, students and industrial
partners thank Kurt for his contributions.
MEIS WELCOMES NEW
IT FACULTV MEMBERS
MEIS looks forward to working with several
new faculty members who join the Institute of
Technology this year.
Joining the Department of Computer Science
as Assistant Professors are: Neta Amit,
Patrick Powell and Wei-Tek Tsai.
Amit completed a Ph.D. at Yale University
and has research interests in programming
methodology, transformational programming,
supercomputing, and concurrency control of
distributed data base management systems.
Powell completed a Ph.D. at the University of
Waterloo in Ontario. His research interests
are in VLSI design, computer architectures,
software engineering, and real time systems.
Tsai studied Computer Science and Electrical
Engineering for a Ph.D. at the University of
California, Berkeley. His main interests are in
research of distributed systems control,
software engineering, operating systems, and
theoretical computer science.
Joining the Department of Electrical Engineering as an Asst. Prof. is Anthony Valois who
completed his Ph.D. in EE here in 1985.
Valois is interested in molecular beam epitaxy, deep level transient spectroscopy, 111-V
semiconductor contacts, and semiconductor
devices.
Joining
the
Department
of Chemical
Engineering and Materials Science as an
Asst. Prof. is Martha MaCartney who completed her Ph.D. in materials science and
engineering at Stanford University. MaCartney has research interests in high temperature reactions of silicate glasses and in
ceramic materials.
MEIS welcomes all of these new members of
the Institute of Technology faculty.
Page 2 MEIS NEWS 3:5, 1985
TEAM RESEARCH PROGRAMS TO
HOLD REVIEVVS IN NOVEMBER
November 7:
Three of the four team research programs
sponsored by MEIS will hold annual program
reviews in November.
The team is developing high performance
computing systems that incorporate human
reasoning techniques. Work is being done in
both the areas of computer vision and expert
systems.
Computer vision research is
focused on space perception. Methods are
being developed for determining the spatial
relationships between objects in a scene
based on motion of the sensor or of objects.
Expert systems research is concentrated on
diagnostic systems which determine the
nature of faults in a malfunctioning system
given the symptom of the malfunction. Fault
diagnosis using two forms of diagnostic reasoning are being investigated.
November 5:
High Performance Integrated Circuits
The team is exploring three-dimensional
integrated circuits and devising a quasic?ntinuous fabrication process that could eliminate photoresist technology. Two methods
for growing a semiconductor single-crystal
monolith containing a 3-D doping pattern are
being developed. The first method is a combination of molecular beam epitaxy and
steered ion beams for delivering dopant
atoms. The second method uses sputter epitaxy combined with atomic-plane doping. The
team believes these novel approaches will
drastically reduce costly waiting time in
integrated-circuit fabrication.
Along with
improvements in cost, performance and size
of integrated circuits, the team is increasing
the possibility of smaller average lengths for
buses and leads, significantly relaxed
minimum-feature
size
and
improved
volumetric density.
November 6:
111-V Compound Semiconductors
and High Speed Devices
The team is incorporating new methods of
surface and interface preparation of galluim
arsenide (GaAs) and related 111-V compound
semiconductors into new solid-state devices.
This is seen as fundamental to the future
development of high speed integrated circuits
and photoelectronic devices. Techniques
being used include metal-organic chemical
vapor deposition, spectroscopic analysis of
metai-GaAs interfaces and innovative modeling. The integration of basic materials
research with device fabrication and performance evaluation places the group in a
unique position in 111-V research.
Intelligent Systems
Each review will be a day-long program of
research reports by faculty, post doc and graduate assistants. The reviews are open to
the academic and industrial technical community. A small registration fee covers lunch
and parking. Call MEIS at (612) 376-9122 for
more information about the program reviews.
The fourth team research project, Artificially
Structured Materials for Microelectronics, will
hold its review in the spring.
MEIS SEMINARS THIS FALL
WILL FEATURE UM FACULlY
Research projects sponsored by MEIS have
resulted in significant findings. This year's
MEIS seminars will feature faculty members
sponsored by MEIS. The fall seminars will
present topics covered by the Artificially
Structured Materials for Microelectronics
research team.
Seminars are held on Tuesdays at 3:15 in
room ME 108 and are broadcast live over
UNITE Channel A unless otherwise noted. A
schedule of fall seminars is enclosed with this
newsletter.
MEIS NEWS 3:5, 1985 Page 3
1985-86 MEIS AND AEA FELLOWS
MEIS awarded 12 fellowships for the 1985-86
academic year. These new fellows arrive
with outstanding academic records and a
commitment to a Ph.D. degree in some area
of microelectronic and information sciences.
Chemical Engineering
and Materials Science:
Norman Troullier earned a B.S. in Physics
and Mathematics from the University of
Wisconsin at Platteville where he also worked
as a research assistant.
Troullier is
interested in laser technology, vacuum systems, and physical properties of materials
under stress.
where he also worked as a research assistant for the Computer Science Department
and the Center for Supercomputer Research.
Harrison is interested in software systems
development, especially in the area of compiler design.
Kurt Krebsbach earned a B.A. with majors in
Mathematics, Computer Science and Music
from Lawrence University in Appleton,
Wisconsin. He has worked for Sperry at the
Knowledge Systems Center. Krebsbach is
interested in artificial intelligence, programming languages, numerical analysis, data
base management and optimization.
Thomas Wagener earned a B.S. in Physics at
St. John's University in Collegeville, Minnesota. Wagener is interested in surface science and semiconductors.
Jeffrey Naylor earned a B.A. in Psychology at
Haverford College, Pennsylvania. Naylor has
worked as a computer consultant at Haverford College and his research interests
include computer architecture, assembly
languages, operating systems and data base
systems.
Chemistry:
Electrical Engineering:
Martin Feyereisen earned a B.A. in Chemistry
at the College of St. Thomas in St. Paul, Minnesota. Feyereisen received a 3M scholarship for outstanding achievement and has
worked for 3M as a technical aide. His
research interests are in physical chemistry.
Jeffrey Brauch earned a B.S. in Electrical
Engineering at the University of Colorado,
Boulder. Brauch is Interested in control systems, robotics, and digital signal processing.
David Kaiser earned a B.A. in Chemistry at
Portland State University and received
several awards.
Kaiser has research
interests in physical chemistry, electronic and
magnetic effects at the atomic level, photochemistry, and laser chemistry.
David Craig earned a B.S. in Physics at
Southern Oregon State College. Craig is
interested in solid-state and condensed
matter physics, as well as microelectronics.
Computer Science:
Claude Fennema earned a B.S. in Mathematics at Massachusettes Institute of Technology
and an M.A. in Mathematics at the Johns
Hopkins University. Fennema intends on
specializing in artificial intelligence. He has
worked for Control Data as a principal
engineer and manager since 1978.
Williams Harrison earned a B.A. in English
and Political Science and an M.S. in Computer Science at the University of Illinois
Page 4 MEIS NEWS 3:5, 1985
Physics:
Lance Stover earned a B.A. in Physics at
Concordia College in Moorehead, Minnesota,
where he also worked as a laboratory assistant and tutor. Stover has worked as a student researcher at Argonne National Laboratory. His research interests are in solid-state
physics and biophysics.
Brian Trafas earned a B.S. in Physics at St.
John's University at Collegeville, Minnesota.
Trafas has worked for IBM at the Yorktown
Heights Semiconductor Plant and for 3M at
the Magnetic Memories Division.
His
research interests include semiconductors,
electronic devices, and solid-state electronics.
In addition to the MEIS fellows, MEIS administered 7 American Electronics Association
(AEA) fellowship-loan
awards for this
academic year.
Computer Science:
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Nancy Reed earned a B.S. in Biology at the
University of Minnesota, and has studied
computer science at the University of
Colorado, Boulder. Reed received an MEIS
fellowship her first year of graduate study during the 1984-85 term and has research
interests in artificial intelligence.
semiconductors, and integrated circuits.
Ross Smith earned a B.S. in Electrical
Engineering at the University of Minnesota.
Smith is interested in microprocessors, computer systems, control systems, artificial intelligence, gallium arsenide devices, quantum
physics, chemistry, languages, third world
development, and education.
MEIS congratulates all of the new MEIS and
AEA fellows and wishes them continued success in their academic and professional
endeavors.
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Michael Wick earned a B.S. in Computer Science and mathematics at the University of
Wisconsin, Eau Claire. Wick received an
MEIS fellowship his first year of graduate
study during the 1984-85 term and has
research interests in artificial intelligence with
an emphasis on expert systems.
Electrical Engineering:
John Bolkcom earned a B.A. in Physics from
Gustavus Adolphus College, St. Peter, Minnesota, and an M.S. in Atmospheric Sciences
at the University of Arizona. Bolkcom was
the manager of the Microcomputer Laboratory
at Gustavus and has also been a visiting
instructor and lecturer. His research interests
include digital computers and Fourier optics.
Jeff Conger earned a B.S. in Electrical
Engineering at Iowa State University, Ames,
where he worked on a study involving junction field-effect transition (JFET) fabrication.
Conger is interested in microelectronics and
has been employed at Honeywell since June
1985.
David Panzer earned a B.S. in Electrical
Engineering at the Milwaukee School of
Engineering. Panzer is interested in system
controls and plans a teaching career in electrical engineering.
MEIS TO HOST SYMPOSIUM
ON QUANTUM 1/F NOISE
MEIS will host a symposium on Quantum 1/f
Noise on Friday, October 25, 1985 from 9:00
to 4:30. The symposium will be held at Coffman Memorial Union, on the East Bank of the
Minneapolis
University
of
Minnesota's
campus.
Aldert van der Ziel, Professor of Electrical
Engineering, has made arrangements with 12
researchers who are actively engaged in
further testing or development of Quantum 1/f
Sixteen papers will be
Noise theory.
presented for discussion. These papers will
explore the parameters of 1/f theory inquiring
of the limits of noise reduction in many devices and materials.
On Friday, October 25, a luncheon will be
held in the Campus Club on the 4th floor of
the Coffman Union from 12:30-2:00 p.m. A
$6.00 registration fee, which includes lunch, is
requested prior to the symposium. Please
make checks payable to MEIS.
For additional information, including a list of
speakers, paper titles and scheduling times,
contact Susan Maddux of MEIS at (612)
376-9122.
Ron Schrimpf earned a B.S. and an M.S. in
Electrical Engineering at the University of
Minnesota. Schrimpf hopes to pursue an
academic career combining interests in teaching and research in the areas of electronics,
MEIS NEWS 3:5, 1985 Page 5
IT ALUMNI SOCIETY TO HOST
SCIENCE AND TECHNOLOGY DAY
CAIT PLAYS ADVOCATE ROLE IN
EXTENSION OF R&D TAX CREDIT
The annual meeting of the IT Alumni Society
this year is called Science and Technology
Day, and will be held on Friday, October 25,
1985, as part of the University of Minnesota
Homecoming and Reunion Weekend. This
year's theme is "Fifty Years of Individual
Achievement."
The Coalition for the Advancement of Industrial Technology honored Senator Durenbarger and Representative Frenzel for their
work on the extension of the R&D Tax Credit
at a reception in September. Members of the
R&D communities in the Twin Cities spoke on
the importance of the R&D Tax Credit as a
tool for moving science from the lab to the
marketplace, for providing educational institutions with equipment on which tomorrow's
scientists and engineers can be educated,
and for enabling industrial laboratories to
compete internationally in fields characterized
by expensive and rapidly changing instrumentation.
The program will include a luncheon at Coff·
man Union, followed by a symposium on
National Science Policy. Featured lecturers
include Dr. Frank Press, President of the
National Academy of Sciences and former
Science Advisor to the President; Dr. Mary
Good, President of Signal Research Center
and a member of the National Science Board;
Dr. George Pimentel, University of California
at Berkeley, President-Elect of the American
Chemical Society and chief author of an
upcoming report on chemistry and national
science policy.
E. F. Infante, Dean of IT, will welcome IT
Alumni at a reception in the Radisson University Hotel. The program then moves to the
Radisson South Hotel in Bloomington for a
social hour, banquet, and evening program.
This program features Gifford Pinchot,
management consultant and author of
Intrapreneuring: Why you Don't Have to Leave
the Corporation to Become an Entrepreneur.
Recognition will go to Emeritus Professors
and Outstanding Achievement Award recipients, and to the reunion classes of 1935,
1945, 1960, and 1975.
Activities continue Saturday with a breakfast
and tour of the latest IT facilities, reunion
lunches, and a presentation by Dean Infante.
IT has reserved a block of rooms for your
convenience at $59.95 per night for either single or double occupancy. To reserve a room,
call the Radisson University Hotel direct at
(612) 379·8888; ask for the IT reunion block.
For further information, call Linda Goertzen of
IT at (612) 376·2448.
Page 6 MEIS NEWS 3:5, 1985
Durenberger and Frenzel reaffirmed their support of the R&D Tax Credit. Proposed revisions in the new federal tax plan would have
mixed impact on research and development
in both industrial and academic organizations.
At this time it seems likely that the research
and development tax credits would survive;
however, proposed changes would reduce
these slightly and eliminate the 10 percent
investment tax credit and accelerated depreciation.
The Coalition for the Advancement of Industrial Technology has been active in promoting
support for the extension of the R&D tax
credit as a permanent credit before the
current credit expires, the continuation of the
basic research credit, and the minimization of
"cut-back" ammendments -· implemented in a
revenue neutrality mode. Further information
about CAIT's activities can be obtained from
Mr. Ken Kay, Executive Director, (202) 6281700.
Microelectronic and Information Sciences
Center
Prof. Wallace Lindemann, Director
Dr. Martha Russell, Associate Director
John Cornwell, MEIS News Editor
227 Lind Hall, 207 Church Street S.E.
Minneapolis, MN 55455
(612) 376-9122
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MICROELECTRONIC &
INFORMATION SCIENCES
CENTER
September 3, 1985
NEWS UPDATE
GROUND BREAKING EVENT TO CELEBRATE NEW BUILDING
Demolition of the Experimental Engineering
Building will begin on Tuesday, October 1,
1985. The building will be torn down, along
with two temporary wood frame structures
just east of Lind Hall, to make way for the
Institute of Technology's new Electrical
Engineering and Computer Science Building.
A "Ground Breaking" is planned for Tuesday,
October 1, 1985 to celebrate the first stage of
redevelopment of the site. All are welcome to
come and witness this historic event.
Construction of the new Electrical Engineering
and Computer Science Building is scheduled
for completion by Spring 1988. The new
building will help to address the needs of the
Institute of Technology (IT) to maintain and
increase the level of excellence in research
and education in electrical engineering and
computer science.
The design of the building will reflect its
importance in the IT complex on the east
bank campus. Classrooms and instructional
laboratories will serve as appropriate
demonstration areas for modern electrical,
communications, and computer technology.
Modular laboratories and offices will provide
for easy conversion and efficient sharing of
services and utilities.
Necessary services and utilities are incor·
porated in the design including temperature
and humidity controls, systems for voice and
data communication throughout the building,
and clean room facilities for microelectronic
circuit and device fabrication.
As a flexible facility for research and instruction, the building will meet today's needs and
also respond to the challenges of tomorrow's
technology. The building will contain approximately 160,000 assignable square feet in six
floors, according to the schematic design nar·
rative provided by the architectural, engineering and planning company of Hammel Green
and Abrahamson Inc.
Approximately 40 percent of the building area
will be underground to take advantage of the
economies and efficiencies provided by below
grade structures. The above ground portion
is designed to be compatible with surrounding
buildings. The exterior will be similar to the
existing IT buildings, particularly Lind Hall.
The building mass of six levels (two underground, four above) will be in a "U" shape
wrapping around a central outdoor space
which will be known as the IT rotunda. The
rotunda will serve as the heart of the entire IT
campus, providing a thoroughfare for pedes·
trians and meeting areas for students and
faculty. The plaza will face Washington Avenue and will become a new public front door
for all of IT.
The part of the exterior that faces the rotunda
and the entry plaza will have a contemporary
expression of high technology that will reflect
what Is happening within the building. The
transition from the old to the new will be
graduated and interlocked, responding to the
design objective of a contemporary building
expressing the future but with deep roots and
respect for the past.
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INSTITUTE OF TECHNOLOGY /UNIVERSITY OF MINNESOTA
227 Lind Hall/207 Church Street S.E./Minneapolis, Minnesota 55455/(612) 376-9122
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MICROELECTRONIC &
INFORMATION SCIENCES
CENTER
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Volume 3; Number 6, November/December, 1985
NEW SCIENTISTS ARE PRODUCTS OF MEIS RESEARCH
An important MEIS objective is to promote
the development of new scientists and
engineers in microelectronic and information
sciences. This complements the MEIS mission of conducting frontier research.
MEIS funds are matched by funds from external sources. The combination of these funds
is used to acquire laboratory equipment and
to employ graduate students as research
assistants.
In working toward this educational objective,
MEIS has sponsored programs that have
enhanced educational opportunities in the
Institute of Technology. MEIS has backed
the development of 30 courses and helped
create 13 new faculty positions, and funded
the expansion of laboratory facilities. Excellent graduate students have been drawn to IT
by MEIS programs.
MEIS is halfway through its first 5-7 year program cycle. This cycle is based on the
period required to initiate new lines of
research, prepare graduate students to assist
in that research, and allow students to complete their degrees. The second half of this
program cycle will bring these research projects to fruition. The new scientists who have
earned their Ph.D. degrees working on these
projects will move into the academic and
industrial workplace and take with them
knowledge they have helped create.
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The MEIS Doctoral Fellowship program has
attracted 64 outstanding graduate students to
affiliated departments. These students receive
financial support for their first year of graduate study and often work on MEIS sponsored
research projects.
After their first year, fellowship recipients are
encouraged to work in MEIS member companies during summer break. When the fellows return to continue work on their doctoral
degrees, many choose thesis topics in areas
of MEIS sponsored research. In some cases
the industrial supervisor, the student, and the
faculty advisor have formed a team effort
based on the student's industrial research
experience, degree work, and the faculty
member's research interests.
In addition to supporting graduate students
directly through fellowships, MEIS supports
faculty research which often involves student
research assistants.
GRAD TO TEACH AT BERKELEY
Dr. David Graves, a 1985 UM graduate In
Chemical Engineering and Materials Science,
has accepted a position as an Assistant Professor of Chemical Engineering at the University of California, Berkeley. Graves will teach
a course on numerical methods and may also
teach courses in transport phenomena and
fluid mechanics.
Graves' research at UM focused on numerical modeling of plasma and plasma processing. He has worked as a research assistant
for Prof. Klavs Jensen for the past four years.
MEIS provided a small grant for Jensen's
research project on which Graves worked,
and funded the acquisition of a plasma reactor system used in their investigations.
INSTITUTE OF TECHNOLOGY UNIVERSITY OF MINNESOTA
227 Lind Hall'207 Church Street S.E.,Minneapolis, Minnesota 55455,(612) 376-9122
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MEIS ENHANCES GRADUATE
STUDY IN I.T. DEPARTMENTS
Focused research is the basis for graduate
study and thesis work, but the rapid advancement of technology makes a broader perspective of science and engineering valuable
as well. Many recent advances have been
the result of researchers collaborating across
traditional disciplines.
When experts from different fields combine
their talents, they create a stimulating
environment for research. This teamwork of
experience creates synergy that is expanding
the frontiers of discovery.
MEIS helps graduate students experience
firsthand this new synergy of disciplines by
sponsoring research in four interdisciplinary
team projects. MEIS also sponsors research
in the form of small grants.
Several IT departments with interests in
microelectronic and information sciences contribute to the collaborative efforts of MEIS.
These include Chemical Engineering and
Materials Science, Chemistry, Computer Science, Electrical Engineering, and Physics.
Faculty members and graduate students in
these and other departments conduct the
research sponsored by MEIS. In addition to
the MEIS related opportunities, described
below, the departments conduct research in
their own related areas.
Chemical Engineering
and Materials Science
Many exciting research possibilities are available through this department in subjects
related to MEIS. Research opportunities
include physical and mechanical metallurgy,
corrosion, materials failure, semiconductors,
thin films, magnetic materials, ceramics, and
microelectronic materials.
Page 2 MEIS NEWS 3:6, 1985
Chemistry
MEIS related projects involve the preparation
or study of new materials that may have uses
in new electronic and optical devices, and
that are critical to the development of smaller
and faster circuitry. The fundamental properties that cause a material to exhibit electronic
conductivity or nonlinear optical activity
comprise a basic understanding that may
offer insights to the design of new compounds
that exhibit a particular, desired property.
Computer Science
This department offers a wide range of opportunities for graduate study. Exciting research
areas include software methodology, computer architecture, database systems, distributed computing, automata theory, numerical
analysis, computer-aided design, simulation,
machine intelligence, and expert systems.
Electrical Engineering
Graduate research opportunities in this
department Include In solid state and physical
electronics, surface physics, thin films,
sputtering, semiconductor properties and devices, VLSI and WSI engineering, and computer and systems engineering. The recent
remodeling of the Microelectronics Laboratory, sponsored in part by MEIS, gives students experience in integrated circuit fabrication techniques including work in a class 100
clean room.
Physics
Relevant studies in physics emphasize condensed matter physics. Students explore the
fundamental laws that govern the properties
of materials; these laws are essential to an
understanding of electronic devices. Another
emphasis is computational physics, in which
supercomputers and specialized computers
are used to obtain numerical solutions to
MEIS related problems In condensed matter
physics and elementary particle physics.
MEIS COORDINATES THE
AEA DOCTORAL FELLOWSHIPS
Seven Ph.D. students have been awarded
American Electronics Association (AEA) Electronics Education Foundation fellowships this
fall. Each fellowship includes four years of
financial support for tuition and living
expenses, approximately $13,000 per year.
Half of the support is a grant; the other half is
a loan which is forgiven when the recipient
teaches for three years at a university. The
students were selected based on their commitment to teaching, research interests and
superior academic performance.
The AEA faculty development program is
designed to help address the severe shortage
of university instructors in the fields of electrical engineering and computer science. The
program is a cooperative effort between AEA,
local member companies and IT. MEIS is
coordinating the program. In addition to fellowships, several AEA member companies
(Advanced Micro Devices, E. F. Johnson,
Research, Inc., Rosemount, Zycad) have
made generous donations of equipment and
grants for student and faculty research.
John Balkcom has a B.A. in Physics from
Gustavus Adolphus and an M.S. in Atmospheric Sciences from the University of
Arizona. John has worked as a solar design
consultant at Minnesota Tritec, Inc. He is
currently working on a doctorate degree in
Computer Science and is interested in
numeric analysis and the use of microcomputers in education. His AEA fellowship is
sponsored by Cray Research.
Jeffrey Conger earned a B.S. in Electrical
Engineering at Iowa State University. He has
worked as an advanced Schottky product
engineer at Texas Instruments and has
worked
at Honeywell's
Systems and
Research Center. Jeff has been a teaching
assistant at UM for the past two years and
has research interests in design simulation of
high-speed devices. His AEA fellowship is
sponsored by Dicomed Corporation.
David Panzer received a B.S. in Electrical
Engineering from the Milwaukee School of
Engineering. David worked as an intern at
the Waukesha Engine Division of Dresser
Industries where he was involved with solidstate electronics and integrated circuits. He
is especially interested in control systems.
His AEA fellowship is sponsored by ADC
Telecommunications.
Nancy Reed earned a B.S. in Biology here
at UM. She has worked on human hormone
research for three years at the Mayo Clinic
and spent a year conducting animal virus
research at the University of Colorado.
Nancy is pursuing a doctorate degree in
Computer Science. Her interests are in artificial intelligence, expert systems and efficient
algorithms. Her AEA fellowship is sponsored
by Data Card Corporation.
Ronald Schrimpf completed B.S. and M.S.
degrees in Electrical Engineering here at UM.
He has gained experience in semiconductor
processing from working in the Microelectronics Laboratory. Ron has interests in semiconductor device modeling and fabrication techniques for three-dimensional integrated circuits. His AEA fellowship is sponsored by
ADC Telecommunications.
Ross Smith earned a B.S. in Electrical
Engineering here at UM. He has worked as
an electrical engineering intern at Northern
States Power. Ross also worked as a
volunteer in Mexico and has an interest in
third world education. His research interests
range from microprocessors to artificial intelligence. His AEA fellowship is sponsored by
Network Systems.
Michael Wick has a B.S. in Computer Scien.ce an? Mathematics from the University of
W1scons1n, Eau Claire. He has worked as a
programming consultant for the Riker Pharmaceutical Research Division of 3M. Mike's
resea~ch i~terests are in artificial intelligence,
e~pec1ally 1n the application of learning techmques to expert system construction. His
AEA fellowship is sponsored by Honeywell.
MEIS NEWS 3:6, 1985 Page 3
rvEIS
NEW MEIS FELLOWS
RAISE TOTAL TO SIXTY-FOUR
MEIS Doctoral Fellowships are designed to
bring excellent graduate students studying in
the fields of microelectronic and information
sciences to UM. Sixty-four MEIS Doctoral
Fellowships have been awarded since the
program began in 1982.
Graduate degrees in fields contributing to
microelectronic and information sciences are
granted through course work and research
opportunities offered in the departments of
Chemical Engineering and Materials Science,
Chemistry, Computer Science, Electrical
Engineering, and Physics.
Nomination for the MEIS Doctoral Fellowship
is made by the graduate program committee
of the respective department. Notification of
awards is made in early March. To be eligible for the MEIS Fellowship, candidates must
have an undergraduate technical degree, an
outstanding academic record, and a commitment to a Ph.D. degree. Contact MEIS at
376-9122 for information on application procedures.
Each fellowship includes a nine-month
stipend of $10,000 plus tuition and fees for up
to 44 credits. In addition, opportunities are
available for summer research employment at
the University of Minnesota or in Twin Cities
companies,
including
Control
Data,
Honeywell, Sperry, and 3M.
Many of the first-round fellows will complete
graduate study in the 1986 academic year.
These new scientists and engineers will enter
academic or industrial workplaces, contributing their analytic skills to current problems in
the microelectronic and information sciences.
These students are being educated through
research programs sponsored directly and
indirectly by MEIS and through departmental
programs which have been energized by new
courses, new faculty, and new and remodeled
laboratories sponsored by MEIS.
Page 4 MEIS NEWS 3:6, 1985
1985-1986 Fellows
Jeffrey Brauch is a graduate student in
Electrical Engineering. He earned a B.S. in
EE at the University of Colorado, Boulder.
Jeff is interested in control systems, robotics
and digital signal processing.
Jois Malathi Char is a graduate student in
Computer Science. She earned a B.Tech. in
EE at The Indian Institute of Technology, New
Delhi. Malathi has worked as a systems
analyst for Tata Consultancy Services, the
largest software house in India. Her research
interests are in artificial intelligence and distributed computing.
David Craig is a graduate student in Physics. He earned a B.S. in Physics at Southern Oregon State College.
David is
interested in solid-state and condensed
matter physics as well as microelectronics.
Claude Fennema is a graduate student in
Computer Science. He earned a B.S. in
Mathematics at The Massachusetts Institute
of Technology and an M.A. in Mathematics at
The Johns Hopkins University.
Claude
intends to specialize in artificial intelligence.
He worked for 3M as a senior physicist and
research specialist from 1972-1978 and he
has worked for Control Data as a principal
engineer and manager since 1978.
Martin Feyereisen is a graduate student in
Chemistry. He earned a B.A. in Chemistry at
The College of St. Thomas in St. Paul, Minnesota. Martin received a 3M scholarship for
outstanding achievement and has worked for
3M as a technical aide. His research
interests are in physical chemistry.
David Kaiser is a graduate student in
Chemistry. He earned a B.A. in Chemistry at
Portland State University and received
several awards. David has research interests
in physical chemistry, electronic and magnetic
effects at the atomic level, photochemistry
and laser chemistry.
Kurt Krebsbach is a graduate student in
Computer Science. He earned a B.A. in
Mathematics/Computer Science and Music
from Lawrence University in Appleton,
Wisconsin. He has worked for Sperry at the
Knowledge
Systems Center.
Kurt is
interested in artificial intelligence, programming languages, numerical analysis, data
base management and optimization.
Jeffrey Naylor is a graduate student in
Computer Science. He earned a B.A. in
Psychology at Haverford College, Pennsylvania. Jeff has worked as a computer programmer for Walonick Associates and as a
computer consultant at Haverford College.
His research interests include computer architecture, assembly languages, operating systems and data base systems.
Lance Stover is a graduate student in Physics. He earned a B.A. at Concordia College
in Moorehead, Minnesota where he also
worked as a laboratory assistant and tutor.
Lance has worked as a student researcher at
Argonne National Laboratory. His research
interests are in solid-state physics and
biophysics.
Brian Trafas is a graduate student in
Chemical Engineering and Materials Science.
He earned a B.S. in Physics at St. John's
University at Collegeville, Minnesota. Brian
has worked for IBM at the Yorktown Heights
Semiconductor Plant and for 3M at the Magnetic Memories Division.
His research
interests include semiconductors, electronic
devices and solid-state electronics.
Norman Troullier is a graduate student in
Chemical Engineering and Materials Science.
He earned a B.S. in Physics and Mathematics from the University of Wisconsin, Platteville where he also worked as a research
assistant. Norman is interested in laser technology, vacuum systems, and physical properties of materials under stress.
Thomas Wagener is a graduate student in
Chemical Engineering and Materials Science.
He earned a B.S. at St. John's University in
Collegeville, Minnesota. Thomas has worked
for 3M as a computer interfacer and programmer. He is interested in surface science and
semiconductors.
Ching-Yi Wang earned a B.S. in EE at the
University of Idaho where he served as
president of the student chapter of IEEE. He
has worked for Hewlett-Packard as. a
development engineer and technical marketing engineer. His research interests are in
digital systems including VLSI design and
computer architecture.
MEIS fellowship recipients from previous
years are continuing coursework and thesis
research toward completion of their doctoral
degrees. Several MEIS fellows are conducting research activities and have begun publishing results.
1984-1985 Fellows
Mark Clare has research interests in
applied magnetics, digital magnetic recording
process and quantum mechanics.
Christopher Conger is interested in the
practice of digital signal processing in the
areas of image processing and communications, as well as development of DSP theory.
Diane Glinsman's research focus is on
software for the various geophysical prospecting interpretative methods.
Bruce Koski has worked as an associate
systems analyst at Honeywell Information
Systems and is currently working in Norway.
Mark Kozlowski has research interests in
semiconductor properties of metal oxide films
and breakdown mechanisms for passive
oxide films. He is also interested in the
investigation of the photoelectrochemistry of
corrosion at TiiTiOz'electrolyte interfaces.
Duane Lenn is interested in mathematical
physics and plans on a teaching career.
Laurie Lynch has research interests in
organic chemistry and drug delivery from conducting polymers.
Cheinan Marks has many research
interests, including thermodynamics, kinetics
and theoretical studies. He is also interested
MEIS NEWS 3:6, 1985 Page 5
in physics -- particularly quantum mechanics
and statistical thermodynamics -- and the
study of surface chemistry by laser induced
fluorescence.
research assistant in the EE Department. He
is interested in VLSI or semiconductor
research and development, fabrication design,
modeling and 3-D VLSI.
Steven Murphy is interested in VLSI design
and has worked for Bell Laboratories.
John Budenske has research interests in the
application of learning and problem solving in
the field of artificial intelligence. John has
worked part-time as an associate research
scientist for Honeywell.
Steven Ratering has interests in automata
theory, mathematical logic, artificial intelligence, algorithms, and computation theory.
Nancy Reed is interested in artificial intelligence and expert systems.
Richard Roiger is interested in the study of
computation and algorithms theory, artificial
intelligence, expert systems and learning.
Matthew Schmidt worked as a technical
aide at Sperry's Semiconductor Division.
Roland Schulze has research interests in
thin films, solid-state device fabrication and
processing, and electrochemistry.
Michael Wick has research interests in
operating systems, non-numeric programming
including artificial intelligence, and systems
programming.
Andrew Wowchak is interested in properties and growth of various thin films on different surfaces and physics of materials.
1983-1984 Fello\NS
Peter Andersen's research interests include
Hall effect, semiconductor devices and solidstate physics. Peter completed his summer
industry employment at Sperry and currently
works as a research assistant in Physics.
Saad Bedros is interested in control systems,
digital signal processing, and communication.
Saad is a teaching assistant in EE.
Paul Boyle is interested in physical inorganic
and organometallic chemistry and homogeneous catalysis. He currently works in the UM
X-ray Diffractometer Laboratory.
David Brown has worked as a teaching and
Page 6 MEIS NEWS 3:6, 1985
Charles Butler's research interests include
compilers, databases, distributed systems,
microcomputers, operating systems and text
processing.
Bradford Clements is currently a research
assistant in Physics. He is interested in
theoretical studies of two-dimensional systems in condensed matter physics, as well as
studies in quantum fluids.
Laurella Gerholz is interested in artificial
intelligence and computer graphics. Laurella
completed her summer industry employment
at Sperry and currently is a teaching assistant
in Computer Science.
Vincent
Hietala
is
interested
in
microwave/millimeter integrated circuits and
measurement. Vince is investigating microdimension coplanar waveguides as a
research assistant in EE.
Bruce Loehle is interested in operating systems. Bruce is currently employed at 3M in
the Engineering Systems Division.
John G. Martin, a research assistant in
Computer Science, has interests in syntax
directed editing and attributive grammars.
Kurt Mechelke is pursuing his research
interests in artificial intelligence and systems
design while serving in the Air Force.
Kevin Riggs is studying interactions in
surface/interface
systems
with
special
emphasis
on
semiconductor/metal
and
metal/metal systems using techniques such
as photoelectron spectroscopy, Auger electron spectroscopy, and low energy electron
diffraction.
f\!ElS
Thomas Schmitz Is interested In software
and systems programming and language and
compiler design.
Ursula Schwuttke's research included problem definition and resolution, microelectronics,
and development of semiconductor materials
and devices for advanced technology process
applications.
Benhoor Soumekh is studying controls,
communications, and digital signal processing.
Arthur Wall is investigating the application
of physics to microelectronic devices and is
currently concentrating on ternary semiconductor substrates.
Louise Wheeler is interested in diffusion of
branched polymers in concentrated ternary
solutions by dynamic light scattering.
1982-1983 Fellows
Jayaram Bhasker has worked for Sperry in
the CAD Division and has Interests in VLSI
design automation, graph theory, algorithm
design, and computational complexity and
geometry.
Asgeir Eiriksson is interested in computer
components and subsystems.
Richard Enbody is interested in CAD algorithms and CAD databases.
Jacob Fuchs Is currently working for the
Communication Products Division of Tadiran
Israel Electronics Industries, Ltd.
Thaddeus Gabara is interested in solidstate physics and VLSI design.
Bruce Greenwood is interested in surface
analysis of metals and metal compounds.
Bruce is currently employed at Sperry as an
etch engineer in the Semiconductor Division.
Dariush Keyani-Yazdi Is now pursuing a
Ph.D. at the University of California, Los
Angeles.
Heng-Chen Lin has worked as a teaching
assistant In Computer Science.
James McGee was a project leader for a
design team in the VLSI Design Laboratory In
1983. Jim recently completed his M.S. and
did his master's project on self-fault checking
finite-state machines.
Daniel McGregor has worked for GTE Labs
as a Research and Development Physicist
and for Honeywell as a Student Aide. Dan is
currently working on a research project In
Europe.
Surendra Nahar is interested in algorithms
for super computers and works part-time at
Sperry In computer-aided design examining
algorithm design for the CAD Division.
Paul Pukite has completed his M.S. and his
research has focused on the role of surface
wave resonances in reflection high-energy
electron diffraction (RHEED).
Karen Ryan earned a Ph.D. In Linguistics in
1983 and an M.S. in Computer Science In
1984. Her research interests include database and knowledge base systems as well as
natural language processing. Dr. Ryan Is a
Principal Research Scientist at Honeywell,
Artificial Intelligence Section, and Is the
President of the Twin Cities Special Interest
Group on Artificial Intelligence.
John Slavik has worked as a teaching assistant in the Computer Science Department.
Jerri L. Smith is interested in integrated circuit design. He has worked for the General
Motors Technical Center, Hewlett-Packard,
Honeywell Corporate Technology Center, and
Mostek Corporation.
Warren R. Smith has worked as a teaching
assistant In Computer Science.
Rene Zingg's interests Included semiconductor technology, particularly In the area of
recrystallized silicon layers for a stacked
CMOS process.
MEIS NEWS 3:6, 1985 Page 7
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MEIS PROGRAMS HELP GRAD
ASSISTANTS IN DEPARTMENTS
MEIS PROGRAM REVIEW 1985
HIGHLIGHTS ANNUAL PROGRESS
Support of research programs by MEIS provides research opportunities for graduate students and postdoctoral researchers. Funding
for some of the assistants is directly from
MEIS. Other support is available through the
matching funds leveraged for MEIS related
research from outside agencies.
A publication that describes MEIS research,
education and technology transfer accomplishments is now available. The MEIS Program Review 1985 presents significant results
from the cooperation of MEIS industrial,
government, and university partners.
MEIS affiliated graduate students and postdoctoral researchers are listed below.
Chemical Engineering and Materials Science:
Mieczystaw Kaczorowski, Davesh Kapur, Tze
Man Ko, Chla-Pyng Lee, Peter Lee, Harry
Moffat, Mark Ruckman, working on Artificially
Structured Materials and 111-V Compound
Semiconductors and High Speed Devices
programs.
Progress made by the four MEIS sponsored
team research projects is detailed in the publication. Results from the small grants program, laboratory facilities, fellowship program,
expanded curricula, seminars, and technical
reports supported by MEIS are included.
To request a copy of the MEIS Program
Review 1985, call MEIS at 376-9122.
MEIS INTEREST PROFILES
Chemistry: Ann Brearley, Steven Flom, V.
Nagarajan, Max Schaible, Alex Wegmann,
working on Artificially Structured Materials
program.
Computer Science: Sharon Garber, Paul
Krueger, James Moen, Andrew Phillips, workIng on Intelligent Systems program and small
grants project.
Electrical Engineering: Bruce Bernhardt,
Chung-Hsu Chen, Roger Gravrok, Choong
Hyun, Philip Jenkins, Young Kim, Thomas
Skaar, Long Tran, Hilmi Unlu, Pailu Wang,
Gregory Whaley, George Zimmerman, working on High Performance Integrated Circuits,
111-V Compound Semiconductors and High
Speed Devices, and Intelligent Systems programs.
Institute of Child Development: Martha Arterberry, Lincoln Craton, Marcia Glicksman,
Jose Nanez, working on Intelligent Systems
program.
Management Sciences: Keith Bellairs, working on Intelligent Systems program.
Physics: Yang Xiang, working on Artificially
Structured Materials program.
Page 8 MEIS NEWS 3:6, 1985
An important component in the development
of MEIS is the technical community on which
the industry-university partnership is based.
Nearly 200 faculty members and students
participate in this synergistic community.
In order to facilitate exchange of information
within this group, MEIS has prepared the
MEIS Interest Profiles. This publication contains career histories and research interests
of the students and faculty members that
make up the MEIS technical community.
To request a copy of the MEIS Interest Profiles, call MEIS at 376-9122.
Microelectronic and Information Sciences
Center
Prof. Wallace Lindemann, Director
Dr. Martha Russell, Associate Director
John Cornwell, MEIS News Editor
227 Lind Hall, 207 Church Street S.E.
Minneapolis, MN 55455
(612) 376-9122
MICROELECTRONIC &
INFORMATION SCIENCES
CENTER
NEWS
Volume 4; Number 1, January/February, 1986
ZVCAD CONVERTS ZILOS SOFlWARE FOR LOGIC EVALUATOR
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Zycad engineers have converted ZILOS
software for the logic evaluator -- a powerful
design tool which was recently donated to
MEIS by Zycad Corporation -- from VMS to
the UNIX operating sys~em.
The logic evaluator is a simulation engine that
enables the verification of chips, components,
or systems. ZILOS provides interactive control of the simulation process for accurate
modeling and debugging of chip designs.
Software engineers used the Electrical
Engineering Department's VAX 11/785, which
runs under UNIX, to complete the conversion.
This is the first conversion to UNIX and
expands Zycad's market for the logic evaluator to other sites with UNIX-based systems.
Several professors plan to use the logic
evaluator in their research. Prof. Larry Kinney is developing new schemes for processors with error detection mechanisms. His
use of the logic evaluator will increase the
amount of complexity and the percentage of
faults that can be detected in these schemes.
Prof. William Plice will work on designs for
logic circuits that are inherently self-testing.
Prof. Gerald Sobelman will use the logic
evaluator to simulate the design of several
VLSI chips, primarily involving either RISC
architectures or certain application-specific
functions. He will also investigate software
techniques which may allow the logic evaluator to be applied in areas other than logic
simulation.
Jim Andre of Zycad will give an MEIS seminar on April 1. He will discuss capabilities of
the hardware and software for research. The
seminar will be broadcast live over UNITE
Channel A at 3:15 and will be held in room
ME 108. A series of training seminars for
using the equipment is being scheduled to
take place during April.
The speed of the logic evaluator will make
new research projects at UM possible. Logic
simulation capabilities are expandable up to
1.1 million modeling elements at 16 million
events per second. The contribution of the
logic evaluator to MEIS by Zycad was part of
a fund-raising effort conducted by the Minnesota Council of the American Electronics
Association (AEA) last year.
REPLY CARD ENCLOSED
A reply card is enclosed with this issue of
MEIS News. Please return the card to
MEIS by March 30th if you wish to receive
future issues of this newsletter.
The addition of new MEIS member companies and an increase in the number of
people in the MEIS technical community
makes it necessary for us to verify that recipients' addresses and interests are
current.
Note: UM faculty and students do not need
to return the reply card.
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INSTITUTE OF TECHNOLOGY UNIVERSITY OF MINNESOTA
227 Lind Hall/207 Church Street S.E.!Minneapolis, Minnesota 554551(612) 376-9122
MEIS RESEARCHER INVOLVED
IN TRANSISTOR DISCOVERY
Michael Shur,
Professor of Electrical
Engineering, and two industry scientists have
developed a high-performance transistor
based on a new fundamental transistor principle with wide applications for microelectronic
devices. The new transistor controls much
higher levels of electric current and may
make it possible to construct threedimensional integrated circuits.
The DIFET, or double injection field effect
transistor, was developed by Prof. Shur, UM,
and Michael Hack and Wolodymyr Czubatyj
of Energy Conversion Devices, Inc., Detroit.
The DIFET incorporates the high-power capabilities of bipolar junction transistors and the
low-heat qualities of metal oxide semiconductor field effect transistors (MOSFETs). "It
combines the best features of both bipolar
and field-effect transistors," says Prof. Shur.
This is accomplished by the configuration
which allows current to pass through the device by holes and electrons at the same time.
The device is thereby capable of handling
more electric current than previous transistors
which used either holes or electrons for
current flow.
DIFETs made from amorphous materials are,
"twenty times better than conventional amorphous devices with respect to logic current for
the same voltage and geometry," says Prof.
Shur. The research also indicates that the
performance of the DIFET could be much
improved, according to Prof. Shur.
The DIFET may also make it possible to
develop highly complex three-dimensional
integrated circuits. Devices made with conventional materials are presently limited to
two dimensions. Amorphous materials, which
lack precise arrangements of atoms or
molecules, do not pose the same restrictions
and may allow for three-dimensional configurations.
Prof. Shur prefers to avoid the word "breakthrough," but he admits, "I'm very excited
about it," when describing the achievement.
Prof. Shur is a member of the MEIS sponsored 111-V Compound Semiconductors and
High Speed Devices research team. MEIS
also sponsors a team research project investigating three-dimensional integrated circuits.
Prof. Shur's work with Energy Conversion
Devices, Inc. is separate from his MEIS sponsored research activities.
SCHAUMANN IS IEEE FELLOW
Many DIFETs have been fabricated by
Energy Conversion Devices, Inc. using thinfilm amorphous materials. Although the
DIFET could also be fabricated using crystalline silicon, amorphous silicon is more abundant and less expensive.
Amorphous materials were thought to be
unacceptable for use in electronics applications, but DIFETs made from amorphous
materials are competitive in speed and performance to devices made from crystalline
materials.
Page 2 MEIS NEWS 4:1,1986
Rolf Schaumann, Professor of Electrical
Engineering, has been elected an IEEE Fellow effective January 1, 1986.
Prof. Schaumann has research interests in
design and tuning of fully-integrated filters,
problems in HF switched-capacitor circuits,
design of very-high-frequency monolithic
filters, analog circuits, and active RC filters.
Some of Prof. Schaumann's research efforts
have been supported by MEIS through the
small grants program.
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BIPOLAR DEVICE WORKSHOP TO
BE HELD AT BELGIAN CENTER
ST. PAUL TO HOST MIDWEST
ELECTRONICS EXPO IN APRIL
Several U.S. and European scientists, including Prof. Allen Nussbaum of the UM Department of Electrical Engineering, will attend a
three-day workshop in May 1986 on "Emitter
Efficiency in Bipolar Devices." The workshop
will be held at the Interuniversity MicroElectronics Center (IMEC) in Leuven, Belgium.
On April 16-17, 1986, the third annual
Midwest Electronics Exposition will convene
at the St. Paul Civic Center, St. Paul, Minnesota. Over BOO manufacturers will be
represented, including Hewlett-Packard Co.,
GenRad, Inc., Hughes Aircraft Co., and Fairchild Semiconductor Corp.
The purpose of the workshop is to review
recent advances in the areas of silicon and
heterojunction bipolar devices. Much work
has been done in these areas, but many
uncertainties and contradictions exist. This
workshop involving both U.S. and European
investigators will provide a forum for discussion and an exchange of views.
IMEC is located about 20 miles from Brussels
and is a state-of-the-art laboratory for
research and development in microelectronics
and related fields. The Center serves three
universities: State University in Gent, the Free
University of Brussels and the Catholic
University of Leuven. The new facility, built
with an initial investment of 40 million dollars,
will be operational in January 1986 and will
accommodate 250 researchers and staff.
REVIEW OF ARTIFICIALLY
STRUCTURED MATERIALS
TO BE HELD THIS SPRING
Researchers on the Artificially Structured
Materials for Microelectronics team will hold a
review in the Spring. Team members will
present findings since the last review, one
year ago.
The Artificially Structured Materials program
is a coordinated effort at synthesizing new
electronic, magnetic, and optical materials
using both physical and chemical techniques.
The purpose of the work is to develop new
types of small structures and to investigate
their properties.
The M.W.E.E. Conference Program includes
53 technical and management papers and
one full-day tutorial. In addition, the Twin
Cities Section of the Institute of Electrical and
Electronics Engineers (IEEE) and the Twin
Cities Chapter of the Association for Com puting Machinery (ACM) will sponsor an
"Expanding Horizons" meeting designed to
present "near term" technical information to
technical personnel and mangement.
Enclosed with this newsletter is a free admission pass to the M.W.E.E. and information
on the Expanding Horizons meeting.
The M.W.E.E. was honored by the St. Paul
Convention Bureau as the 1985 recipient of
the Outstanding Convention/Tradeshow of the
Year Award. The award was presented at
the Convention Bureau's Annual Membership
Meeting, December 18, 1985 at the Radisson
Hotel Saint Paul.
Begun in 1984, the M.W.E.E. covers electronic assembly, component and packaging
disciplines. The largest electronics show in
the northern Midwest, M.W.E.E. is endorsed
by the Paul Bunyun Chapter of the Electronics Representatives Association (ERA), Twin
Cities Chapter of the IEEE and supported by
the Governor's Office of Science and Technology.
For more information on attending the
M.W.E.E.,
contact
Registrar,
MorganGrampian Expositions Group, 1050 Commonwealth Avenue, Boston, MA 02215 or call
1-800·223-7126 or in Minnesota (612) 9200786.
MEIS NEWS 4:1, 1986 Page 3
VLSI COURSES TAUGHT
BY NEW EE PROFESSOR
Gerald Sobelman, Associate Professor of
Electrical Engineering, joins the EE Depart·
ment as of Winter Quarter. Professor Sobelman is teaching a course in circuit design and
will teach other courses in the VLSI engineering sequence including chip layout, and test
technology.
1986 SMALL GRANTS AWARDED
Five research proposals have received MEIS
small grants for 1986. The MEIS small
grants program, now in its fourth year, provides seed money to help UM researchers
leverage funds from external funding agencies for research in microelectronic and infor·
mation sciences.
The small grant projects for 1986 are:
Before joining the UM faculty, Professor
Sobelman was a senior technical consultant
with Control Data Corporation's Advanced
ECAD Department. He holds an M.A. and a
Ph.D. in Physics from Harvard University.
CAD COURSE TAUGHT BY
UNIVERSITY-INDUSTRY TEAM
A course in Computer-Aided Design (CAD)
offered through the Computer Science
Department is being taught by two UM
instructors and two industry scientists. The
course, labeled CSci 5280, is being taught by
Professors Valdis Berzins of Computer Sci·
ence and Larry Kinney of Electrical Engineering, and Adjunct Professors Don Singley of
Computer Science (Sperry) and Lionel Bening of Electrical Engineering (Control Data).
This noteworthy team approach to the teach·
ing of the course takes advantage of the
instructors' varied backgrounds in university
departments and industrial settings. The
instructors have different areas of expertise
which are especially useful in presenting
course material because CAD is characterized by rapidly-advancing technical develop·
ments on many fronts.
The focus of the course is on CAD for digital
systems, with emphasis on VLSI and synthesis, simulation, and test generation using
hardware description languages. The course
is one of several which have been added to
the IT curriculum and complements MEIS
activities and programs.
Page 4 MEIS NEWS 4:1, 1986
Growth and Magnetic Properties of Thin Film
Structures, by E. Dan Dahlberg, Physics and
Philip I. Cohen, Electrical Engineering
Volume and Plasma Sheath Properties of RF
Gaseous Plasmas, by Douglas W. Ernie and
Hendrik J. Oskam, Electrical Engineering
A New Approach to Designing Organic NonLinear Optical Materials, by Margaret C.
Etter, Chemistry
Symbolic and Qualitative Reasoning for Error
Recovery in Robot Programs, by Maria L. Gini,
Computer Science
Fault- Tolerant Distributed Operating Systems,
by Anand R. Tripathi, Computer Science.
NEW REPRESENTATIVES ON
MEIS MANAGEMENT BOARD
Don Boyd, Honeywell, was appointed to the
MEIS Management Board in the place of Wil·
liam Sackett, Honeywell, at the last Management Board meeting. Dr. Boyd also serves
on the MEIS Technical Coordinating Committee.
C. T. (Thomas) Walker, 3M, joined the MEIS
Management Board in the place of Ennio
Fatuzzo, 3M, last summer.
MEIS appreciates the participation of both
William Sackett and Ennio Fatuzzo on the
MEIS Management Board and their contributions to the development of MEIS.
MEIS FELLOWS MEET WITH
COMPANY REPRESENTATIVES
GRADUATE STUDENTS TOUR
MEIS MEMBER COMPANIES
Representatives of MEIS member companies
met with MEIS doctoral fellows at a breakfast
meeting on January 15th at Coffman
Memorial Union on the UM campus. The
professionals and students discussed opportunities for summer employment in MEIS
member companies.
MEIS is sponsoring tours of MEIS member
companies in February and March. The tours
help students prepare for summer employment in an MEIS company which is part of
the MEIS doctoral fellowship program.
Don Boyd of Honeywell described opportunities for summer employment at several
Honeywell research facilities: Computer Sciences Center, Physical Sciences Center,
Solid-State Electronics Division, Systems and
Research Center, and Technology Strategy
Center.
Monday, February 17, 8:00
Ray Sandborgh and Steve Campbell of
Sperry described projects in MOS and bipolar
silicon
technology,
advanced
process
development, lithography systems, gallium
arsenide technology, and computer-aided
design (CAD) technologies.
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Matt Smith and Bill Hamer of ADC Telecommunications described research on telecommunications products.
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MEIS fellows will have an opportunity to tour
MEIS member companies during February
and March (see accompanying article). Company representatives will meet with fellows
again in the spring to further discuss summer
employment opportunities.
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Sperry - Roseville
Testing and Manufacturing
Thursday, February 20, 8:00
Control Data
VTC Incorporated
Monday, February 24, 8:30
Cray - Mendota Heights
Computer Center
Sperry- Eagan
Semiconductor Operations
ADC Telecommunications
Honeywell
Computer Science Center
and Solid-State Electronics
Monday, March 3, 1:00
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Zycad
Thursday, February 27, 8:00
Dick Finstad of Cray discussed projects
involving gallium arsenide, chip design, strategies for fast turn-around of prototype devices, producing masks, and development of
advanced 111-V structures and processes for
future Cray systems.
Jeff Wisted, Bob Rousseau, and Gary Hokel
of VTC Incorporated described opportunities
in the Microcircuits Division involving highperformance devices, device modeling and
processing, integration and differentiation in
test development, device characterization,
CMOS technology, and CAD systems.
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Tour dates and times are listed below:
3M
Monday, March 10, 7:45
Cray - Chippewa Falls, Wisconsin
Research and Development
Buses will leave Lind Hall at the times shown
above.
Call Susan Maddux at MEIS, 376-9122, to
make reservations for the tours. Graduate
students who are not MEIS fellows may
attend if space is available.
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SUN DONATES VVORKSTATIONS
TO INTELLIGENT SYSTEMS LAB
Sun Microsystems, Incorporated has donated
two additional workstations, valued at approximately $26,000, to the Intelligent Systems
Laboratory in the Department of Computer
Science. The gift raises the number of Sun
workstations in the lab to five.
Each new workstation has twice the CPU
power of a VAX-11/780, according to Professor William Thompson, Director of the Intelligent Systems Laboratory. The workstations
will be extremely useful in further research on
computer vision and expert systems.
STUDENTS TO VISIT COMPANIES
DURING HIGH TECH VVORK DAY
Student engineers and scientists in the Institute of Technology will have an opportunity to
visit high-tech companies on April 8, 1986.
The Minnesota High Technology Council
(MHTC) will sponsor the event, called High
Tech Work Day.
MHTC member companies will participate by
inviting one or more students to spend a work
day at their firm. The High Tech Work Day
will allow ·students to meet one-on-one with
professionals working in high-tech companies.
Information on becoming a sponsor of the
High Tech Work Day was sent to MHTC
member companies In January. MHTC
member companies can become Involved in
the event by calling LeAnn Talbot of
Northwestern Bell at 344-8630.
Institute of Technology students will receive
information on the High Tech Work Day In
March. Contact the office of Student Affairs
in 105 Lind Hall for details.
The Work Day will initially involve only students from the University of Minnesota.
Eventually the MHTC Student Relations Committee, which planned the event, hopes to
include other schools in the state.
Page 6 MEIS NEWS 4:1, 1986
PHONE NUMBERS TO CHANGE
The telephone number for the MEIS main
office will change to (612) 624-8005 on April
26, 1986. Calls to the old number after April
26 will connect to a recorded message giving
the new number.
The change is due to a new telecommunications system being installed throughout the
University during March, April, and May. During the conversion, new telephone numbers
may be requested by calling University Information at (612) 625-5000.
AFOSR TO SPONSOR SUMMER
FACULTY RESEARCH PROGRAM
The Air Force Office of Scientific Research, in
conjunction with Universal Energy System,
Inc., is sponsoring a program to enable qualified faculty members and graduate students
of U.S. universities to undertake ten-week
periods of basic research at one of 21 United
States Air Force laboratories and centers
across the U.S.
Research opportunities are available in the
Physical Sciences, Engineering, Life Sciences, Business and Administration. All
applicants must be U.S. citizens and eligibility
for a Department of Defense secret security
clearance is desirable. Contact Captain John
McNally, at (612) 373-2205 for details.
Microelectronic and Information Sciences
Center
Prof. Wallace Lindemann, Director
Dr. Martha Russell, Associate Director
John Cornwell, MEIS News Editor
227 Lind Hall, 207 Church Street S.E.
Minneapolis, MN 55455
The U1Nnlty d M...-. Ia COIT'I'1itled to the policy thlll all p11110111llhall
" - equal .:xlllll to Its programs, facllitlel, and ~ wltha.t regard
to race, religion, cdor, Ill(, national origin, handicap, age, or lllll8ran ata1us.
MICROELECTRONIC &
INFORMATION SCIENCES
CENTER
NEWS
Volume 4; Number 2, March/April, 1986
i
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POLYMER INTERFACE GROUP RECEIVES IBM GRANT
IBM has awarded a grant of $1 million in
cash and up to $1 million in IBM equipment
and software to the University of Minnesota
for a 5-year project on polymer interface
research. UM is one of 12 universities that
will share $24 million in cash and equipment
from IBM for research in materials and processing sciences.
The grant to UM will support research in polymers, processing, and packaging proposed
by Professors Matthew Tirrell, John Weaver,
and Associate Professor Klavs Jensen, all of
the Department of Chemical Engineering and
Materials Science.
The three professors will study microelectronic interfaces between polymers and other
materials and how adhesion between the two
depends on the chemistry and preparation of
the interfaces. Their goal is to achieve a
better understanding of adhesion that will help
in designing faster and more powerful
microelectronic devices.
The three young investigators in this polymer
interface group are top-quality researchers
and are very deserving of the recognition
which this award conveys. They have established excellent research programs and regularly extend the benefits of their research to
the industrial community.
The award also affirms the research excellence being established by MEIS-seeded
research programs.
The IBM grant supplements support from
MEIS which awarded $60,000 to this new
team to support their start-up activities in
polymer interfaces. MEIS has also provided
funds to the three investigators for small grant
research projects, equipment acquisitions,
and team research programs.
Prof. Tirrell has received MEIS matching
funds for two small grant projects: 1) Diffusion
of Small Molecules in Bulk Polymers and
Polymer Solutions Near the Glass Transition
Temperature by Forced Rayleigh Scattering,
2) Surface Forces Apparatus, and support
through an early team project on ultrasmall
electronic research.
Prof. Weaver was recruited to the Department
of Chemical Engineering and Materials Science through MEIS faculty expansion initiatives which included salary and equipment
start-up funds. The Synchrotron Beamline
Laboratory, which Prof. Weaver coordinates,
was constructed through a MEIS/Argonne collaboration of $.5 million. Prof. Weaver has
received MEIS support through small grants:
1) Morphology and Electronic Structure of
Buried and Lateral Metal/Semiconductor Interfaces, 2) Studies of Electronic and Structural
Interactions at Metal and Semiconductor Surfaces and Interfaces, and through a team
research project. His research on these projects has contributed to the materials surface
and interface analysis expertise which he will
provide for the IBM-funded research.
GRANT continued on page 2
INSTITUTE OF TECHNOLOGY iUNIVERSITY OF MINNESOTA
227 Lind Hall/207 Church Street S.E.1Minneapolis, Minnesota 554551(612) 376-9122
I
GRANT (continued from page 1)
Prof. Jensen has received MEIS support for
his development and use of the new metal
organic chemical vapor deposition (MOCVD)
reactors. These MOCVD activities are central to his contributions to the IBM funded
research, as well as to the 111-V Compound
Semiconductors and High Speed Devices
team project, of which he is coordinator.
MEIS has provided matching funds for Prof.
Jensen's NSF Young Presidential Investigator
Award and for small grants: 1) A New Reactor for Experimental and Modeling Studies of
Plasma Deposition Processes, 2) Experimental and Theoretical Studies of Chemical Vapor
Deposition Processes.
The implementation of the MEIS research
mission began with building the educational
infrastructure through faculty, students and
laboratories. Initial MEIS team projects have
succeeded in bringing together faculty
interests and focusing that scientific and
engineering expertise on research issues
important to the industrial community.
The
IBM-sponsored
Polymer
Interface
Research project and the NSF-sponsored
High Performance Computing project, an
award of $3.62 million to a group of seven
faculty members in the Department of Computer Science last fall, are second-generation
projects emerging from MEIS investments of
approximately $1.075 million in research at
the University of Minnesota.
STUDENT RECEIVES MATERIALS
RESEARCH SOCIETY AWARD
John Joyce, a graduate student working with
Professor John Weaver of the Department of
Chemical Engineering and Materials Science,
has received a Materials Research Society
Student Award. Mr. Joyce received the
award at the Materials Research Society
conference in Boston last December where
he presented a paper on copper-gallium
arsenide interfaces. His research was sponsored by MEIS through the 111-V Compound
Semiconductors and High Speed Devices
team project.
Page 2 MEIS NEWS 4:2, 1986
INDUSTRY-GOVERNMENT EFFORT
PROPOSED AT BROOKHAVEN
A group of about 50 scientists and engineers
met at the Workshop on Compact Storage
Ring Technology, at Brookhaven National
Laboratory in March, to consider a cooperative effort by industry and U.S. national
laboratory researchers to develop an
advanced x-ray lithography system for the
production of future generations of integrated
circuits.
The purpose of the workshop was to examine
how the technology base at Brookhaven
could be transferred to companies interested
in commercial use of compact light sources.
A steering committee was established to pursue the cooperative effort at the appropriate
levels in industry and government.
Synchrotron radiation is vital as a light source
for the production of 64 megabit and larger
chips. Programs jointly financed by industry
and government are underway in Germany
and Japan to develop a superconducting
compact storage ring for semiconductor
manufacturers in those countries. A vigorous
effort by the U.S. is needed to prevent foreign
domination of the integrated circuits industry
in the 1990's.
An article titled, "Can Synchrotron Light Save
the Chip Industry?" in SCIENCE magazine,
volume 232, 4 April 1986, p. 22-23, provides
details of the workshop.
Assistant Professor Alfonso Franciosi, Department of Chemical Engineering and Materials
Science, attended the workshop on behalf of
MEIS and participated in developing the
recommendations. Prof. Franciosi is available to provide additional information about
the working conference and subsequent planning efforts.
Prof. Franciosi came to UM from the University of Wisconsin under an MEIS faculty initiative in 1984. He continues to use the Aladdin
storage ring at Stoughton, Wisconsin in his
research. Prof. Franciosi also participates in
the MEIS team project on 111-V Compound
Semiconductors and High Speed Devices.
rvElS
CURRENT LIST OF MEIS
SEMINARS ON VIDEOTAPE
Nonlinear Optics in Material Characterization and Optical Communication, by
Paul F. Barbara, Department of Chemistry,
presented November 19, 1985.
The Anamalous Quantized Hall Effect, by
Charles E. Campbell, School of Physics and
Astronomy, presented December 10, 1985.
Hg 1 _x Cdx Te Thin-Film Growth:
An
Overview, by C. A. Castro, Texas Instruments, Inc., presented January 15, 1985.
Determination of Atomic Positions at
Metal/Metal and Metal/Semiconductor
Interfaces, by Scott A. Chambers, Department of Chemical Engineering & Materials
Science, presented March 4, 1986.
GaAsfAIGaAs
Heterostructure&:
A
Model Two-Dimensional Electron Gas
For Studying the Quantum Hall Effect,
by E. Dan Dahlberg, School of Physics and
Astronomy, presented October 15, 1985.
The Physics of Deep Impurity Levels in
Semiconductors, by John D. Dow, University of Notre Dame, presented Feb. 5, 1985.
The Deposition of Thin Polymer Films of
Predictable Molecular Structure Using
Nonequilibrium Plasmas, by John F.
Evans, Department of Chemistry, presented
November 12, 1985.
Surface Reactivity in III-V Compound
Semiconductors and Overview of III-V
Team Research Program, by Alfonso Franciosi, Department of Chemical Engineering &
Materials Science, presented Feb. 4, 1986.
Radiation Effects on Power MOS, by Kenneth F. Galloway, National Bureau of Standards, presented February 18, 1985.
Defects and Stresses at Thin Film Interfaces, by William W. Gerberich, Department
of Chemical Engineering & Materials Science,
presented January 28, 1986.
Metallization for VLSI Circuits, by P. B.
Ghate, Texas Instruments, presented April
26, 1984.
Architectural and Design Issues for High
Peformance Signal Processors: The Synergism Between Algorithms and Technology, by Barry K. Gilbert, Mayo Foundation,
presented February 22, 1985.
Observations of Gas Flow Patterns in
Epitaxial
Reactors
by
Interference
Holography, by L. J. Giling, University of
Nijmegen,
The
Netherlands,
presented
October 17, 1985.
Introduction to the Quantum Hall Effect
with Application to GaAs Heterostructures, by Steve Girvin, National Bureau of
Standards, presented May 7, 1985.
Percolation, Localization and Superconductivity: The Birth of a Supercomputing Film, by Allen Goldman, School of Physics and Astronomy, presented Oct. 22, 1985.
Research on Artificially
Structured
Materials: An Overview, by Allen Goldman, School of Physics and Astronomy,
presented January 21, 1986.
X-Ray Microscopy Using Synchrotron
Radiation, by Robert M. Hexter, Department
of Chemistry, presented November 26, 1985.
Materials Science For VLSI Technology:
Perspective and Opportunities, by PaulS.
Ho, IBM T. J. Watson Research Center
presented February 12, 1985.
'
MOCVD of III-V Compound Semiconductors and Summary of III-V Team
Research Program, by Klavs Jensen,
Department of Chemical Engineering &
Materials Science, presented Feb. 18, 1986.
Research
Frontiers at Semiconductor
Res~arch Corporation, by James Key,
Semiconductor
Research
Corporation,
presented October 16, 1984.
(Continued on next page)
MEIS NEWS 4:2, 1986 Page 3
Creativity in Engineering, by Jack Kilby,
Consultant, presented May 1, 1984.
Contamination Control in Semiconductor Manufacturing, by Graydon B. Larrabee, Texas Instruments, February 6, 1985.
Fat Trees:
Universal Networks for
Hardware-Efficient Supercomputing, by
Charles E. Leiserson, Laboratory of Computer
Science, MIT, presented February 26, 1985.
Interface Studies on III-V Compound
Semiconductors, by Rudi Ludeke, IBM T. J.
Watson Research Center, presented April 30,
1985.
VLSI and Beyond, by James Meindl, Stanford University, presented March 6, 1984.
Cross-Sectional Transmission Electron
Microscopy of Electronic and Photonic
Devices, by T. T. Sheng, AT&T Bell Laboratories, presented October 9, 1984.
AlGaAs/GaAs Heterojunction Devices
and Summary of III-V Team Research
Program, by Michael Shur, Department of
Electrical Engineering, presented February
25, 1986.
Coherent
Evidence
Propagation
in
Expert Systems, by David J. Spiegelhalter,
Medical Research Council, Cambridge, England, presented February 7, 1986.
Growth of Structure in Systems Far
From Equilibrium, by Oriol T. Valls,
School of Physics and Astronomy, presented
December 3, 1985.
Topics on Tetrahedrally Bonded Amorphous Semiconductors, by Shashanka S.
Mitra, University of Rhode Island, presented
April 12, 1985.
Integrated Optics, Optoelectronics, and
Optical Computing, by Charles T. Walker,
3M Company, presented February 12, 1986.
New Materials For Integrated Circuit
Fabrication, by Shyam P. Murarka, Center
for Integrated Electronics, API, presented
April 23, 1985.
Reactions in Metal/Semiconductor Interfaces, by John H. Weaver, Department of
Chemical Engineering & Materials Science,
presented February 11, 1986.
Microwave
Semiconductor
Device
Research at Lincoln Laboratory, by R. A.
Murphy, Lincoln Laboratory, MIT, presented
January 22, 1985.
Materials Modifications Using Ion Beams
and Lasers, by C. W. White, Oak Ridge
National Laboratory, presented April 2, 1985.
Interactive Expert Systems in Technology Planning, by Karol Pelc, Technical
University of Warsaw, Poland, presented May
3, 1985.
Artificial Intelligence and Manufacturing,
by Raj Reddy, Carnegie-Mellon University,
presented April 2, 1984.
Kinetic Analysis of Polysilicon Etching in
CF 3 Cl Discharges, by Herbert H. Sawin,
Massachusetts
Institute of Technology,
presented February 11, 1986.
Microstructures
of
Small
Systems:
Metals on Oxides, by Lanny D. Schmidt,
Department of Chemical Engineering &
Materials Science, presented Oct. 29, 1985.
Page 4 MEIS NEWS 4:2, 1986
Fundamental Limits on Communication
and Storage of Information, by Aaron D.
Wyner, AT&T Bell Laboratories, presented
March 12, 1985.
The MEIS seminar tapes are available on a
loan basis to member companies. To
request tapes, write to Susan Maddux, MEIS,
227 Lind Hall, 207 Church Street S.E., Minneapolis, MN 55455, giving a complete
description of each tape requested.
MEIS requests a $50 deposit for each tape;
make check payable to University of Minnesota. Checks will be sent back when tapes
are returned, or MEIS can keep checks on
file for continuous lending.
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MEIS SPRING SEMINARS
The following is a list of MEIS seminars
presented during Spring Quarter. MEIS seminars are broadcast live and interactive over
UNITE and are available on videotape to
member companies.
Introduction to the Logic Evaluator, by
James Andre, Zycad Corporation, presented
April 1, 1986.
Experts in Intelligent Systems, by Paul E.
Johnson, Departments of Management Sciences and Psychology, presented April 8,
1986.
Symbolic
Reasoning
for
Error
Identification in Robot Programs, by
Maria Gini, Department of Computer Science,
presented April 15, 1986.
Artificial Intelligence, an Expert Systems
Shell, and an Overview, by James Slagle,
Department of Computer Science, presented
April 22, 1986.
I Didn't See It 'Til It Hit Me In the Face:
Determining Spatial Organization From
Visual Motion and Summary of Intelligent Systems Team Project, by William
Thompson, Department of Computer Science,
to be presented April 29, 1986.
New Directions in VLSI CAD, by Gerald
E. Sobelman, Department of Electrical
Engineering, to be presented May 6, 1986.
Monocrystalline
Three-Dimensional
Integrated Circuits, by R. M. Warner, Jr.,
Department of Electrical Engineering, to be
presented May 13, 1986.
Scanning Laser Acoustic Microscopy
With Digital Image Processing, by William
Robbins, Department of Electrical Engineering, to be presented May 20, 1986.
The Growth of GaAs By Molecular
Beam Epitaxy: The Role of the Surface,
by Philip I. Cohen, Department of Electrical
Engineering, to be presented May 27, 1986.
INDUSTRY SYMPOSIUM ON
INTELLIGENT SYSTEMS IN MAY
The Intelligent Systems project team will host
an Industry Symposium on Intelligent Systems on Tuesday, May 13th.
Professor Lotfi Zadeh, from the Department of
Electrical Engineering and Computer Science
at the University of California - Berkeley, will
give the keynote address, "Formalization of
Common Sense Reasoning and Knowledge
Representation." Presentations by industrial
scientists will follow.
The symposium comes at the end of a series
of MEIS seminars presented by the Intelligent
Systems project team in April. Seminars are
broadcast live and interactive over UNITE
and are also available on videotape.
UM faculty, a select group of graduate students, representatives from MEIS member
companies and one or two equipment vendors will attend the symposium.
Representatives from MEIS member companies will discuss research topics which are
of interest to their organizations. As a working conference, industrial colleagues will provide input to the project team as they begin
their next phase of inquiry and development.
The Intelligent Systems program is aimed at
the development of high performance computing systems which incorporate human reasoning techniques. The team is active in two
research areas: computational vision and
expert systems.
The team has made progress in the development of expert system shells, model-based
diagnostic reasoning, analysis of visual
motion and other important areas. Plans for
new avenues of discovery include expert systems design of chemical reactors, development of techniques for knowledge-based
explanation and query generation in expert
systems, and automated image analysis.
MEIS NEWS 4:2, 1986 Page 5
ARTIFICIAL NANOSTRUCTURES
PROJECT DISCUSSED AT FORUM
A team research project on artificial nanostructures will be discussed at a forum at UM
on Monday, April 28, 1986. The purpose of
the forum is to develop agendas for research
on artificial nanostructures and to get feedback from scientists in industry as to how the
research may be useful to the goals of MEIS
member companies.
As a result of cooperation on the Artificially
Structured Materials for Microelectronics team
project, investigators are now in the process
of generating ideas for new research projects.
Professors will present information on growth
and characterization of thin films and nanostructures, electrical transport in ultra-thin films
and nanostructures, and transport in GaAsAIGaAs metal films. Discussions and laboratory tours will follow the presentations.
The artificial nanostructures program aims to
be a coordinated effort at the synthesis, characterization, and study of the electrical and
magnetic properties of metallic structures on
insulating and semiconducting substrates
which have either one, two, or three of their
dimensions constrained.
Basic research on materials synthesis which
controls both composition and structure over
atomic distances is to be emphasized. The
project would be a materials research effort in
which investigations combine the methods of
traditional fields such as materials science,
chemistry, and·condensed matter physics.
Research is to be focused on electronic
materials and systems with characteristic
feature sizes of nanometer and subnanometer scale. Specifically, this research would
emphasize insulating and semiconducting
substrates which have either one, two or
three of their dimensions constrained. New
scientific and device opportunities at the
nanometer and subnanometer scale are of
special interest.
Page 6 MEIS NEWS 4:2, 1986
MEIS FELLOW USES ZVCAD
LOGIC EVALUATOR TO
EMULATE QUEUEING NETWORKS
Asgeir Eiriksson, a 1982-83 MEIS doctoral
fellow and graduate student in Electrical
Engineering, is developing tools and techniques that may allow the Zycad logic evaluator to determine the performance of queueing
networks. He is using the fast emulation
capabilities of the logic evaluator to obtain
equivalent results more quickly than is possible using traditional computer-based simulations.
Mr. Eiriksson is making great progress on the
research and is a leader in using the Zycad
logic evaluator for non-logic applications,
according to Prof. Richard Kain of the Department of Electrical Engineering. Prof. Kain is
Mr. Eiriksson's adviser and the research is
part of his dissertation.
NEW MEIS PHONE NUMBER
The telephone number for the MEIS main
office will change to (612) 624-8005 on April
26, 1986. Calls to the old number after April
26 will connect to a recorded message giving
the new number.
The change is due to a new telecommunications system being installed throughout UM
during March, April, and May. During the
conversion, new telephone numbers may be
requested by calling University Information at
(612) 625-5000.
Microelectronic and Information Sciences
Center
Prof. Wallace Lindemann, Director
Dr. Martha Russell, Associate Director
John Cornwell, MEIS News Editor
227 Lind Hall, 207 Church Street S.E.
Minneapolis, MN 55455
The lkliversity a Mnnesota is committed to the policy that all ~shall
haw equal a:x:eas to its programs, facilities, and errployment Wthout regard
to race. religion, CXllor, sex, national origin, handicap, age, or wteran status.
MICROELECTRONIC &
INFORMATION SCIENCES
CENTER
NEWS HIGHLIGHTS
Volume 4; Number 3, May/June, 1986
THREE COMPANIES JOINED MEIS as Associate Sponsors in 1985 making eight the total
number of MEIS companies. Zycad Corporation donated a logic evaluator, software, and
maintenance contract worth nearly $500,000 in April. ADC Telecommunications, Inc. and VTC
Incorporated became Associate Sponsors last September. Cray Research, Inc. became the first
Associate Sponsor in November 1984. The MEIS Management Board created the Associate
Sponsorship category to encourage participation of smaller companies with specific research
interests in microelectronic and information sciences.
DR. WALLACE LINDEMANN JOINED the Institute of Technology last October as Director of
MEIS and Professor of Electrical Engineering. Lindemann was formerly vice president of Control Data's Microcircuits Division and was a member of the MEIS Technical Coordinating Committee. Lindemann says he is committed to MEIS' contribution to the Minnesota economy
through further development of the vital link between the Institute of Technology and the Minnesota microelectronics industry.
IBM AWARDED A GRANT of $1 million in cash and up to $1 million in IBM equipment and
software to three professors in the Department of Chemical Engineering and Materials Science
for a 5-year project on polymer interface research in March. Professors Tirrell, Weaver, and
Jensen will use the grant to study microelectronic interfaces between polymers and other materials and how adhesion between the two depends on the chemistry and preparation of the interfaces. MEIS has provided funds to the three investigators for equipment acquisitions and
research programs and has awarded funds for the group's start-up activities.
A GRANT OF $3.62 MILLION was awarded to a group of seven professors in the Department
of Computer Science by the National Science Foundation (NSF) last September for a 5-year
project to develop efficient methodologies for the use of ultra high speed computers. Professors
Sahni, Boley, Ibarra, Rosen, Du, Venkatesan, and Vergis will use the grant to study pipelined
and parallel computers. MEIS seeded this collaboration and has provided matching monies for
the NSF award.
SECOND-GENERATION PROJECTS, such as the IBM-funded polymer interface research and
the NSF-sponsored ultra high speed computer research, are emerging from MEIS investments
at the University of Minnesota.
THIRTEEN TOP-NOTCH STUDENTS from colleges around the country were brought to UM as
MEIS doctoral fellows for the 1985-86 academic year. The students are pursuing Ph.D.s in the
departments of Chemistry, Chemical Engineering and Materials Science, Computer Science,
Electrical Engineering, and Physics. Each fellowship includes a nine-month stipend of $10,000
plus tuition and fees for up to 44 credits. MEIS fellows are encouraged to work during the summers at one of the member companies.
INSTITUTE OF TECHNOLOGY/ UNIVERSITY OF MINNESOTA
227 Lind Hall/207 Church Street S.E.iMinneapolis. Minnesota 55455/(612) 376-9122
TOURS OF MEMBER COMPANIES by MEIS doctoral fellows were conducted during February
and March. The graduate students viewed research and laboratory facilities. Research scientists from member companies came to UM in January for a breakfast meeting with the fellows to
discuss opportunities for summer employment. Several fellows have maintained contact with
people at member companies and have made plans for continued interaction.
THE INTELLIGENT SYSTEMS project team hosted an industry symposium in May in which
industrial colleagues described topics of interest to their organizations. Representatives from
MEIS member companies participated in the working conference and provided input to the project team members as they begin their next phase of inquiry and development. Prof. Lotti
Zadeh from the University of California at Berkeley gave the keynote address, "Formalization of
Common Sense Reasoning and Knowledge Representation."
THE ARTIFICIAL NANOSTRUCTURES group met at a forum in April to develop agendas for
future research initiatives. The group received feedback from scientists in industry as to how
the research could be useful to member companies.
THREE MEIS RESEARCH TEAMS held program reviews last November. The teams were:
High Performance Integrated Circuits, 111-V Compound Semiconductors and High Speed Devices, and Intelligent Systems. Faculty members, graduate students, and industrial liaisons
attended the reviews and discussed progress made by the groups since their last annual review.
MEIS HOSTED WORKSHOPS on gallium arsenide and quantum 1/f noise at UM during July
and October, respectively. Several university and industry scientists and engineers attended.
THE IEEE BIPOLAR CONFERENCE will be held in Minneapolis in September. The conference
is being coordinated by MEIS participants Prof. Ray Warner of Electrical Engineering and Dr.
John Shier of VTC Incorporated.
MEIS SEMINARS FEATURED UM FACULTY involved in MEIS team research programs. The
seminars were broadcast to local companies over the UNITE television system. Videotapes are
available for loan from MEIS.
FIVE PROJECTS WERE AWARDED SMALL GRANTS from MEIS for 1986. The research projects are: Growth and Magnetic Properties of Thin Structures, by E. D. Dahlberg and P. I.
Cohen; Volume and Plasma Sheath Properties of RF Gaseous Plasmas, by D. W. Ernie and H.
J. Oskam; A New Approach to Designing Organic Non-linear Optical Materials, by M. C. Etter;
Symbolic and Qualitative Reasoning for Error Recovery in Robot Programs, by M. L. Gini; and
Fault-Tolerant Distributed Operating Systems, by A. R. Tripathi.
ZYCAD ENGINEERS WORKED AT UM to convert software for the logic evaluator, a powerful
design tool that enables the verification of chips, components, and systems, to run under the
UNIX operating system. The software conversion makes it possible for Zycad to market their
equipment to companies with UNIX-based systems.
Microelectronic and Information Sciences Center (612) 624-8005
Prof. Wallace Lindemann, Director
Or. Martha Russell, Associate Director
John Cornwell, MEIS News Editor
227 Lind Hall, 207 Church Street S.E., Minneapolis, MN 55455
Page 2 MEIS NEWS 4:3, 1986
The lX!Iverelty a Mnn.:x& Is OOI'I"f1"itled to the policy that all per80I18 shall have equal accee& to its programs,
fadlltlea. and llf'TlJIO'jiTlll"lt Wthout regard to raa1, religion, color, II8IC. nalional origin, handicap, age, or veteran status.
MICROELECTRONIC &
INFORMATION SCIENCES
CENTER
NEWS
Volume 4, Number 4, September/October, 1986
MEIS RESEARCH TEAMS
HOLD REVIEWS
MONOCRYSTALLINE
THREE-DIMENSIONAL
INTEGRATED CIRCUITS
October 21, 9:30a.m., Rm 351-2 Coffman
Investigations of approaches to developing a
single crystal semiconductor monolith containing a three-dimensional doping pattern with
buried, junction-isolated devices and circuits.
111-V COMPOUND SEMICONDUCTORS AND
HIGH SPEED DEVICES
November 17, 7:45a.m., Rm 320 Coffman
Synthesis, characterization and modeling of
advanced semiconductor materials with goal
to incorporate new methods of surface and
interface preparation of GaAs and related 111V semiconductors into new solid-state devices.
INTELLIGENT SYSTEMS
November 18, 8:30a.m., Coffman Theater
Construction of machine representations of
activities requiring skill and expertise with the
goal of developing general purpose vision
systems.
These program reviews are open to the public. There is no charge for attendance. Due
to space limitations, reservations for the
reviews and lunch are required. 624-8005.
NEW FELLOWS WELCOMED
Sixteen new MEIS Fellows were welcomed
by other Fellows, graduate students and
faculty at an MEIS reception held September
19th. The 1986-87 MEIS Fellowships provide
a one-year stipend and tuition grant, opportunities to work in sponsoring companies during the summer, and opportunities to work
with MEIS sponsored faculty on research projects. A total of 82 MEIS Fellowships have
been awarded.
Chemical Engineering and Materials Science
Michio Nikaido
Edward Parsonage
Chemistry
Paul Day
Daniel Freedman
Computer Science
Corey Carlson
LeeMin Chong
Daniel Challou
Martin Kenner
Elizabeth Stuck
Electrical Engineering
Julio Costa
John Grieger
Joel Kennedy
John Moe
Gale Petrich
Physics
Anna Aurilio
Glenn Paquette
INSTITUTE OF TECHNOLOGY/UNIVERSITY OF MINNESOTA
227 Lind Hall/207 Church Street, S.E./Minneapolis, Minnesota 55455
MEIS INVESTIGATORS LEVERAGE
$4M RESEARCH FUNDS
NEW GRADUATES BEGIN
TECHNOLOGY TRANSFER
In the four years since MEIS programs
began, external research sponsorship in
areas related to MEIS has increased eight·
fold. Before the initiation of MEIS programs
in 1982-83, several dozen faculty members,
primarily in the Electrical Engineering and
Computer Science Departments, taught
courses
and
conducted
research
in
microelectronic and information sciences.
These faculty members attracted about
$500,000 per year from external research
funding agencies.
Experimental facilities
were limited to a facility for surface analysis
and an outdated microelectronics laboratory.
MEIS support for research and education programs is an investment in the scientific personnel and technology transfer of tomorrow.
Almost 200 graduate students have completed Master's and Doctoral degrees in fields
related to microelectronic and information sciences since 1982 when the first MEIS programs were funded. These 44 Ph.D. degree
recipients and 149 M.S. degree recipients
reflect the substantial impact which MEIS has
had on graduate programs in the Chemical
Engineering and Materials Science, Chemistry, Computer Science, Electrical Engineering,
and Physics Departments.
Four years later, over fifty faculty members
are actively conducting research on aspects
of microelectronic and information sciences.
Investigators are working together and are
submitting joint proposals to MEIS, as well as
to external funding agencies. Several new
laboratory facilities complement a modernization of instrumentation in individual faculty
labs. In 1985-86 alone, external support for
MEIS related research neared $4,000,000.
Since the initiation of MEIS programs in 1982,
new external support for MEIS related
research has totaled over $10,000,000.
In the next four years, over 80 additional students expect to receive Ph.D. degrees in
areas reflected by MEIS research programs.
These new scientists will provide a powerful
mechanism for technology transfer as they
build links between their company of employment and MEIS affiliated faculty at the University.
MEIS GRADUATE STUDENT WINS
HONEYWELL AWARD
Dr. D. H. Ju, EE '85, has been awarded the
1985 Sweatt Award by Honeywell, where he
is employed. This award is Honeywell's
highest tribute to an individual for technical
accomplishment. Dr. Ju developed device
enhancements to the CMOS-3 process for
ETA System's next generation supercomputer. Not only did Ju meet the technical
requirements, but the time requirements as
well. The enhanced performance gives
Honeywell a competitive edge against near·
micron CMOS technologies developed by
other leading semiconductor manufacturers.
While he was at the University, Dr. Ju worked
on aspects of the Monocrystalline Three·
Dimensional Integrated Circuits Project with
Professor Ray Warner, Jr.
Page 2 MEIS NEWS 4:4, 1966
Graduate students influenced by MEIS
include MEIS Doctoral Fellows, graduate students sponsored by MEIS funds and by
research funds leveraged through MEIS. In
addition, MEIS has influenced the education
of graduate students whose degree activities
depended upon laboratory facilities developed
by MEIS, new courses developed through
MEIS initiatives, new faculty brought to IT
through MEIS initiatives and faculty whose
research interests have been strongly influenced by participation in MEIS research programs.
Several recently graduated MEIS Fellows
include Dr. Jayaram Bhaskar, CSci, and Dr.
Steve Murphy, EE, who are working for
Sperry's Computer Sciences Center. Dr.
Surendra Nahar, CSci, is working for AT&T
Bell Laboratories. Dr. Ron Schrimpf, EE, was
recipient of an ADC Telecommunications
American Electronics Association Fellowship
and is assistant professor at the University of
Arizona.
SCHEDULE OF MEIS ACTIVITIES
MEIS/UNITE BROADCASTS
SEMINARS
October 7 - Joseph Demuth, IBM
"Electron Tunneling Microscopy"
September 30 - Joseph Demuth, IBM
"Electron
Tunneling
Microscopy"
(cosponsored with the Chemical Engineering &
Materials Science Department). This seminar
will be held in Amundson Hall Room 240 at
1 :15-2:15 p.m.
October 10 - John Sowa, IBM
"Knowledge Representation and Conceputal
Graphs" (sponsored by the MEIS Intelligent
Systems Group). Time and place to be
announced.
October 17 - Jack Minker, Univ. of Maryland
"Semantic Query Optimization in Conventional and Deductive Databases" (sponsored
by the MEIS Intelligent Systems Group).
Time and place to be announced.
October 28 - James Browne, Univ. of Texas
"Resource Structure for Parallel Computation"
(co-sponsored with the Computer Science
Department).
Time and place to be
announced.
November 10 - Sholom Weiss, Rutgers
An Approach to Knowledge Based Refinement" (co-sponsored with the Computer Science Department). This seminar will be held
in Mechanical Engineering Room 108 at
2:30-3:30 p.m.
December 2- James W. Mayer, Cornell
"lon Induced Metastable Phases" (cosponsored with the Chemical Engineering &
Materials Science Department). This seminar
will be held in Amundson Hall Room 240 at
1:15-2:15 p.m.
October 14- John Sowa, IBM
"Knowledge Representation and Conceptual
Graphs"
October 21 - Jack Minker, Univ. of Maryland
"Semantic Query Optimization in Conventional and Deductive Databases"
October 28- Jack Dow, Univ. of Notre Dame
"The Physics of Deep Impurity Levels in
Semiconductors"
November 4- James Browne, Univ. of Texas
"Resource Structure for Parallel Computation"
November 11 - Barry Gilbert, Mayo Foundation
"Architectural and Design Issues for High
Performance Signal Processors: The Synergism Between Algorithms and Technology"
November 18 - Sholom Weiss, Rutgers
"An Approach to Knowledge Based Refinement"
November 25 -Jerry Sobelman, Univ. of Minnesota
"New Directions in VLSI CAD"
December 2 - Lotfi Zadeh, Univ. of California
"Formalization of Common Sense Reasoning
& Knowledge Representation"
December 9 - James W. Mayer, Cornell
"lon Induced Metastable Phases"
These seminar tapes will be broadcast over
UNITE Channel A at 3:15 p.m. All broadcasts will be shown concurrently in Mechanical Engineering Room 108.
MEIS NEWS 4:4, 1986 Page 3
..
fVElS
SYMPOSIA
Symposium on Quantum 1/f Noise and Its
Implications, October 24th at the University of
Minnesota with:
P. H. Handel, University of Missouri,
"New Results of Quantum 1/f Noise
Theory"
A. van der Ziel, University of Minnesota,
"Update on Quantum 1/f Noise Experiments"
A. Pawlikiewicz, University of Minnesota,
& G. Kousik, University of Louisianna,
"Quantum 1/f Noise In Silicon JFETS
and Silicon BJTs"
Carolyn M. Van Vliet, University of Montreal, "Intervalley Scattering Noise and
Umklapp Noise in N-type Silicon"
Ms. Xiaolan Wu, University of Minnesota,
"Update on 1/f Noise in Hg(1-x) CdxTe
n+-P Diodes"
Dr. William Radford, Santa Barbara
Research Center, "1/f Noise in HgCdTe
Photodiodes"
SYMPOSIUM ON SUPERLATTICES
PLANNED FOR MAY 1987
The second MEIS symposium on new frontiers in microelectronic materials is planned
for May 18-19, 1987. The theme of this symposium will be Superlattices. The two-day
symposium will include presentations by the
following speakers:
Dr. M. Altarelli, Max Planck lnstitut fur
Festkorper Forschung, France
Professor A. Baldereschi, lnstitut de Physique Applique, Switzerland
Dr. Federick
Laboratories
Capasso,
AT&T
Bell
Professor J. D. Dow, University of Notre
Dame
Professor J. K. Furdyna, Purdue University
Dr. M. Heiblum, IBM T. J. Watson
Research Center
Dr. Christian Mailhiot, Xerox Webster
Research Laboratory
Dr. Brian Hughes, Hewlett-Packard, "1/f
Noise in GaAs FETS"
Professor G. Margaritondo, University of
Wisconsin, Madison
Dr. L. M. Rucker, "Limiting 1/f Noise in
BJT Amplifiers"
Dr. H. L. Stormer, AT&T Bell Laboratories
For further information on MEIS Seminars,
Video Broadcasts and other activities, call
624-8005.
Dr. Jerry Tersoff, IBM T. J. Watson
Research Center
Dr. Alex Zunger, Solar Energy Research
Center
For more information call 624-8005.
Microelectronic and Information Sciences
Center
Dr. Wallace Lindemann, Director
Dr. Martha Russell, Associate Director
227 Lind Hall, 207 Church Street S.E.
Minneapolis, MN 55455
(612) 624-8005
The University a Mn~ is committed to the policy that all J?lllllO"S shall
have equal aa:ass to Its prog~ fSC!Ii~es, ~ errpiC1y'ITIBI1l Without~
to race, religion. color, sex. national ongtn, handicap, age, or veteran
Page 4 MEIS NEWS 4:4, 1986
MICROELECTRONIC &
INFORMATION SCIENCES
CENTER
NEWS
Volume 5; Number 1, Winter, 1987
TRANSFER OF JAPANESE
TECHNOLOGY
LABORATORY PLANS
COMPLETED
As an affiliate of the Midwest Technology
Development Institute, MEIS will provide
access to the Japanese Technical Information
Service (JTIS) for member companies. The
service will begin in January 1987.
Construction
on
the
new
Electrical
Engineering/Computer Science Building at the
University of Minnesota is about to begin.
Footings have been poured, and the contracts for the basic building have been let.
Target date for completion and occupancy is
September 1988.
Gaining access to foreign technological
research •• such as Japanese •• has become
a priority for companies in the U.S. in order to
keep up with R&D and stay competitive.
Each month the JTIS, developed by Univer·
sity Microfilms International, reads and
abstracts in English over 650 of the top
Japanese engineering, applied research,
scientific, and business periodicals.
MEIS will receive a monthly listing of
abstracts from Japanese Current Research and
the annual cumulative, Japanese Technical
Abstracts Index. Through MEIS, researchers
can purchase individual abstracts or full trans·
lations for a nominal fee. For further information on the JTIS program, please contact
ME IS.
VLSI DESIGN SEMINARS
A series of working seminars on advanced
topics in CAD for VLSI Design will be held on
Thursdays during Winter Quarter, beginning
January 8th. The seminars will meet in 215
Lind Hall, from 11 :15 to noon. The intent of
the seminars is to initiate joint research efforts
on specific CAD topics of common interest.
Industrial researchers working in VLSI/CAD
are encouraged to participate in the seminars.
For further information on the seminar series,
contact Professor Jerry Sobelman at
625-8041.
The Microelectronics Laboratory, which will
be located on the first floor of the north wing,
is also progressing well. The design and
specifications have been completed, and the
first round of bids has been received. Due to
the highly technical nature of this laboratory, it
may be necessary to go out for a second
round of bids in some areas. The facility will
contain about 3000 square feet of class 10
clean room and will have state-of-the-art air
handling, temperature and humidity control,
ultra-pure gas handling, deionized water treatment, and vibration control.
MOCON DONATES EQUIPMENT
The Microelectronics Laboratory recently
received a residual gas analyzer from
MOCON Cooperation. The gift will be used
in research on silicon film growth being con·
ducted by Professor Stephen Campbell, EE.
EXECUTIVE SUMMARY AVAILABLE
The MEIS Executive Summary 1986 provides
an overview of MEIS research activities, collaboration with departments, industry participation, and educational enhancements.
Copies are available by contacting the MEIS
office.
INSTITUTE OF TECHNOLOGY !UNIVERSITY OF MINNESOTA
227 Lind Hall/207 Church Street S.E./Minneapolis, Minnesota 55455/ (612) 624·8005
ARTIFICIAL INTELLIGENCE
SYMPOSIA
A series of five workshops, Symposia on
Artificial Intelligence Applications in Engineering, will be conducted at the Sheraton Midway
Hotel, St Paul, MN. The sessions will feature
a combination of national and local speakers
presenting engineering applications of artificial
intelligence. Topics include: 5th and 6th Generation Computers, Overview and Hardware
Architecture (Jan. 24); Software for AI: Concept, Directions, Portability, Evolution, Limitations (Feb. 7); Engineering Expert Systems
(Feb. 28); AI Applications in Design
(March 21 ); and AI Applications in Diagnostics (April 11 ).
The symposia are all day Saturday sessions,
8:30-4:30, and have a varied format consisting of tutorials, case studies, latest product
reviews, and discussions on selected topics.
AI hardware-software vendors will also
demonstrate their latest products at the
workshops.
For more information on the programs and/or
registration form, please call Dr. Alicja Ellis
(612) 541-2063. Sponsored by: IEEE TC
Section, ACM/SigArt, Honeywell Inc., Zycad,
and 3M.
COMING SYMPOSIA
Electronic Packaging: Materials, Processes
and Corrosion in Microelectronics
April 28-30, 1987, Minneapolis, MN
New Frontiers in Materials Science: Superlattice Devices and Structures
May 18-20, 1987, Minneapolis, MN
MEIS SENDS SCIENTIST
TO BOEING
Dr. Scott Chambers, formerly a post doctoral
research associate with Professor John
Weaver, CEMS, was recently hired by
Boeing's Electronic High Technology Center.
Boeing Electronics Company has signed an
agreement with Honeywell that provides
Page 2 MEIS NEWS 5:1, 1987
Boeing with the same access to advanced
semiconductor
technology
that
other
Honeywell divisions enjoy. SSED will also
provide training and consulting to assist in set
up of design capabilities and in design and
manufacture of integrated circuits for Boeing.
C_hambers will do research on crystal growth
and on structural and chemical characterization of interfaces under Peter Young,
engineering manager of Boeing's Materials
Growth and Processing Lab. Chamber's
research with Professor Weaver used auger
electron diffraction to find atomic positions at
the junction between two solids. His research
also used x-ray photoelectron spectroscopy to
determine diffusion parameters associated
with interdiffusion at junctions between two
solids.
AEA OFFERS JAPANESE
EXPERIENCE
The American Electronics Association is
offering Graduate Research Fellowships for
study in Japan. Thirty-two top U.S. companies will sponsor 1987 summer fellowships
which include opportunities to:
1. learn Japanese at a major U.S.
university - summer 1987
2. spend 9 months to a year working
in a Japanese company research
lab - starting fall 1987
3. acquire incomparable skills and
add international perspective to
career development
All program expenses, except travel to
summer language training, are covered.
Program is open to U.S. citizens who are
currently enrolled in EE and CSci programs.
Contact MEIS for more information.
EE GRAD TAKES POSTDOC
Dr. Hilmi Unlu, a June 1986 graduate from
the Electrical Engineering Department, is
working as a post doctoral researcher with
Professor Hadis Morkoc at the Coordinated
Sciences Laboratory at the Urbana campus,
University of Illinois. Unlu's graduate study
and dissertation, "The Theory of Heterojunctions," advised by Professor Allen Nussbaum,
was sponsored by MEIS.
INTELLIGENT SYSTEMS
As one of the three MEIS research programs,
Intelligent Systems held Its program review
November 18, 1986. Presentations on expert
systems and computer vision Included:
Expert Systems
Hardware Diagnosis
Paul JohnBon, Elizabeth Stuck,
Jame8 Moen
Off-line Quality Control
Paul JohnBon, lmran Zualkernan
Conceptual Modeling of Expert
Systems
Jame8 Held
Expert System Shells for
Resource Allocation
Jame8 Slagle
Explanation Systems
Mike Wick
Graphics Interface for AGNESS
Expert System Shell
Bruce Petrick
Computer Vision
Map-matching
Steven Savitt
Motion-based Segmentation
Rand Whillock
Moving Object Detection
Ting-Ohuen Pong
Shadow Stereo
William ThompBon
Expert reviewers Professor William Swartout,
University of Southern California, Information
Science Institute; Dr. David Barstow,
Schlumberger-Doll Research; and Professor
Theo Pavlidis, SUNY-Stony Brook were
invited guests of MEIS and the AI group to
give their insight on the program here at the
University.
In the last year, the group studied expert reasoning strategies In the areas of computer
hardware fault diagnosis, product development of off-line quality control, chemical reactor design, and auditing. In most cases, a
better understanding of expert reasoning has
lead to the construction of high performance
expert systems.
In the coming year,
emphasis will be placed on the development
of a formal methodology for specifying expertise and using such specifications to aid in the
construction of expert systems.
An expert system shell called AGNESS (A
Generalized Network-based Expert System
Shell) has been constructed. AGNESS was
designed to provide greater representational
power, simplified knowledge specification, and
smaller storage requirements. It uses a computation network rather than the more traditional rule-based systems, supports values of
any well-defined data type, the Merit questioning scheme, an explanation facility, and
expert-defined Inference methods. Current
work is focusing on the development of explanation facilities more powerful than the inference traces provided by presently available
expert systems.
In the area of computer vision, several Important results have been obtained relevant to
the analysis of time-varying imagery.
Methods have been developed for the detection of moving objects, a difficult task in situations where the camera may also be moving.
Reliable motion detection has been shown to
require a careful integration of visual information with other information about camera
motion and/or scene geometry. Visual motion
has also been used to locate object boundaries, a necessary step for many identification and manipulation tasks. Future work will
concentrate on visual processes required for
autonomous vehicle navigation. Perception
systems are being developed to aid in both
path planning and in orienting a vehicle with
respect to a pre-stored map.
Technical progress reports of the Intelligent
Systems project may be obtained by contacting the MEIS office.
MEIS NEWS 5:1, 1987 Page 3
(
I
rv'EIS
111-V COMPOUND
SEMICONDUCTORS AND
HIGH SPEED DEVICES
Technical progress reports of the 111-V Compound Semiconductors project may be
obtained by contacting the MEIS office.
Presentations made by the 111-V Compound
Semiconductors and High Speed Devices
research team on November 17, 1986,
covered the following:
MONOCRYSTALLINE 3-D
INTEGRATED CIRCUITS
Metal/GaAs Interface Formation
John Weaver
Microscopic Control of Interface
Reactivity
AlfonBo FrancioBi
MOCVD Synthesis of 111-V Compounds
KlavB JenBen.
Molecular Beam Epitaxy of Compound
Semiconductors
Philip Cohen
Simulation, Modeling, Characteri·
zatlon, and Design of
AIGaAs/GaAs Devices and
Integrated Circuits
Michael Shur
Distinguished reviewers Dr. R. L. Moon, Optical
Communications
Division,
Hewlett
Packard; Professor lngolf Lindau, Stanford
Electronics Laboratories; Dr. Robert Leheny,
Bell Communications Research, Navesink
Laboratory; and Dr. Paul Palmberg, Perkin·
Elmer, served as a review committee at the
request of MEIS.
The team's efforts include several research
thrusts and have resulted in two patents for
device designs, the publication of 81 refereed
papers, numerous presentations at international conferences, other universities, and
electronic companies, and two workshops on
111-V materials and devices at Minnesota.
The group received $900,000 in research
support from federal agencies and corpora·
tlons for activities In fiscal year 1986. Nine
new laboratory instruments were built or
acquired by the team for their research.
Several industrial scientists, 38 graduate students, and 17 post doctoral researchers have
worked on the project during the past year.
Page 4 MEIS NEWS 5:1, 1987
The third research program, Monocrystalllne
Three-Dimensional Integrated Circuits, held
its review on October 21, 1986, with presentations in areas of:
3-D Devices and Circuits
R. M. Warner, Jr.
Low-Temperature Silicon Sputter
Epitaxy
Gottfried Wehner
Inert-Gas Sputtering and ElectronBeam-Promoted Reactions
William Peria
Monocrystalline Conducting and
Insulating Inclusions
Anthony ValoiB
Acoustic Microscopy
William RobbinB
At MEIS request, the following scientists
served as a review committee for the project:
Dr. Michael Liu, Honeywell Inc.; Dr. Graydon
Larrabee, Central Research Laboratories
Materials for VLSI, Texas Instruments, Incorporated; and Professor William Oldham,
University of California· Berkeley.
This group has recently completed "experimental" work that demonstrates the feasibility
of (1) an all-silicon tunnel-junction ohmic contact, and (2) the orthogonal-isolator technique
for the junction isolation of a silicon device in
three dimensions. These elements must be
combined with D-mode and E-mode JFETs
for a convincing demonstration of a junctionisolated 3-D device. A major challenge in
achieving this is the low-temperature growth
of a semiconductor single crystal with a 3·D
doping pattern. Progress for low-temperature
silicon sputter epitaxy has been made using
rvEIS
mercury.
In addition, early results are
encouraging toward realizing a parallel
nobel-gas sputtering system, and on
electron-beam-promoted reactions for localized doping.
Two team members, Professors Warner and
Wehner, along with a recently graduated doctoral student, Ron Schrimpf, have applied for
a patent for a monocrystalline threedimensional integrated circuit structure. This
structure, called an orthogonal-isolator, is
physically similar to a JFET having two
independent gate regions, and having channel properties such that V1z 0 (from the E·
mode point of view). E-mode, D-mode, and
"0·1 mode" JFETS have been fabricated
using quasiconventional technology for the
purpose of testing numerical and analytical
models experimentally.
Research on a fast and dependable system
architecture that circumvents Rent's rule, that
permits low design and debug costs, and
gives fast turnaround has also progressed.
Design criteria for a crucial 1/0 element have
been verified by SPICE simulation.
The scanning laser acoustic microscope
(SLAM) has recently demonstrated a backprojection capability that permits the imaging
of buried acoustic features (many acoustic
wavelengths below the surface) with high
lateral spatial resolution. This is a crucial first
step toward eventual subsurface imaging with
high resolution in the vertical direction.
Technical progress reports of the Monocrystalline Three-Dimensional Integrated Circuits
may be obtained by contacting the MEIS
office.
MEIS SENDS EXPERTISE
TOMHTC
Congratulations to John Cornwell, our past
MEIS News editor, on completion of his M.A.
in Journalism, and his new position as
manager of communications for the Minnesota High Technology Council.
NEW FACULTV IN EE AND CSCI
Three new faculty members joined the Electrical Engineering Department. All three have
research interests related to microelectronics.
Professor Anand Gopinath 's expertise concerns the modeling, fabrication, characterization, and design of compound semiconductor
devices and integrated circuits. Assistant
Professor
Stephen
Campbell's
research
interests lie in silicon microelectronic device
fabrication and characterization, primarily in
devices for high speed digital applications.
Assistant Professor Kevin Buckley's interests
are digital signal processing.
The Computer Science Department has also
added three new faculty members. Associate
Professor Eugene Shragowitz has research.
Interests in computer-aided design of VLSI,
theory of nonlinear networks (including artificial neural networks), algorithms for combina·
torial
optimization
and
computational
geometry. Assistant Professor Yoon-Hwa
Choi, has expertise in fault tolerance for
VLSI/WSI reconfigurable arrays, VLSI archi·
tectures, parallel processing, fault-tolerant
computing, and design for testability.
Research interests of Assistant Professor
Anthony Chronopoulos include numerical
analysis, mathematical software, and parallel
computing.
TIRRELL RECEIVES SHELL CHAIR
Professor Matthew Tirrell, CEMS, is the reel·
pient of the Shell Foundation endowed chair.
The chair of $750,000, which Tirrell will
occupy over five years, will allow him to pursue his research in fundamental physics of
adhesion. Tirrell's research has been supported by MEIS through two small grants on
surface studies of polymers, as a participant
of the Ultra Small Electronics Research pro·
ject, and most recently with a match on an
IBM grant for basic research in polymers,
processing, and packaging.
MEIS NEWS 5:1, 1987 Page 5
I
rvElS
AEA GRANTS AWARDED
SCHEDULE OF MEIS ACTIVITIES
Two assistant professors have received AEA
Faculty Development Grants. Stephen Campbell, EE, has received the Research Incorporated AEA Faculty Development Grant.
This award will provide $13,000 for his
research activities in rapid thermal vapor
phase epitaxy, a technique useful in fabricating abrupt junctions in heavily doped silicon
layers ranging from a few hundred to several
thousand angstroms thick. Kevin Buckley, EE,
has received the Rosemount Incorporated
AEA Faculty Development Grant for $10,000
for his research in signal processing.
SEMINARS
CEMSGRADGOEST03M
Dr. Karl Roenigk, a recent graduate in CEMS,
has accepted a position in the Graphics
Technology Sector at 3M. As a student
Roenigk worked for Professor Klavs Jensen
on MEIS related projects such as low pressure chemical vapor deposition. At 3M
Roenigk will work for Joanne Mukherjee on
process research and development for radiation detector technology, on the conversion of
radiation to electronic signal, and on imaging
electronic and color graphic technology.
January 28 - Leo Kadanoff, James Franck
·Institute, University of Chicago
"Measuring Fractals: Mapping Conductivity in Disordered Materials"
4:00 p.m., 131 Physics, co-sponsored
Physics (refreshments at 3:30 p.m. in
216 Physics).
February 23 - Lewis Brus, Bell Laboratories
"Nonlinear Optical Properties and Electronic Band Structure of Submicron Semiconductor Particles"
4:00 p.m., 325 Science Classroom Building, co-sponsored Chemistry.
February 24 - Robert E. Roberts, Institute for
Defense Analysis, Alexandria, VA
"Recent Trends in Defense Science and
Technology"
1:15 p.m., 240 Amundson Hall, cosponsored Chemical Engineering and
Materials Science.
March 12- Richard Williamson, MIT Lincoln
Laboratories
"Integrated Optical Components"
3:15 p.m., 108 Mechanical Engineering,
co-sponsored Electrical Engineering.
Microelectronic and Information Sciences
Center
Or. Wallace Lindemann, Director
Dr. Martha Russell, Associate Director
Suzanne Johnson, MEIS News Editor
227 Lind Hall, 207 Church Street S.E.
Minneapolis, MN 55455
(612) 624-8005
'The lklivarsity cl Mnneacta Ia c:ormilted to the polic;y that all peran shall
have equal axJIIl8 to Its progran'8. facilities and erTlllayrnenl ~ regard
to raat. religion, cdcr, 111<, national origin, handicap. age, 11111eran status. or
aaxual orlerUtion.
Page 6 MEIS NEWS 5:1, 1987
MICROELECTRONICS
SERIES
SEMINAR
On January 7, the Microelectronics Laboratory Group will begin a seminars series which
will take place on Wednesdays from 2:15 to
3:00 pm. Speakers will include U of M
faculty, graduate students and local/national
industrial colleagues. Many presentations will
be broadcast over UNITE. For more information, contact Professor Anand Gopinath, EE,
coordinator, 625-3054.
MICROELECTRONIC &
INFORMATION SCIENCES
CENTER
NEWS
Volume 5; Number 2, Spring, 1987
JAPANESE TRANSLATIONS
VISITING PROFESSOR J. D. DOW
As an affiliate of the Midwest Technology
Development Institute, MEIS is a subscriber
to the Japanese Technical Information Service (JTIS) and receives a monthly current
abstract list from "Japanese Current
Research." This list provides English translations of the titles of over 300 Japanese
technical publications. MEIS member companies and researchers may order English
translations of abstracts or complete articles
through the MEIS office.
In cooperation with the Chemical Engineering
and Materials Science Department, MEIS will
co-sponsor Professor J. D. Dow, Freiman
Professor of Physics at Notre Dame University, as a visiting professor Spring Quarter
1987. Professor Dow and his research team
will use the Supercomputer Institute facilities
to continue research on methods for calculating the effects of impurities in semiconductors. Professor Dow will also teach a special
topics course "Defects and Impurities in
Semiconductors," providing a general insight
into the properties of shallow impurities and
deep levels in semiconductors and a handson capability of calculating the electronic properties of arbitrary impurities in compound
and elemental semiconductors and ternary
semiconductor alloys.
Abstracts are approximately 120-150 words in
length and are available at the following
prices:
Abstract translations:
Quantities:
Price:
1- 3
$ 7.00
4- 10
5.00
11 - 25
3.25
+26
2.75
Professor Dow will also participate in the
MEIS Workshop on Superlattice Structures
and Devices (see p. 3).
Upon request, full article translations are
available at a fee of $120.00 per 1,000
English words. (Price information subject to
change by JTIS.)
A few of Professor Dow's many achievements include the first theory of the limit on
transparency of optical fibers, the theory of
nitrogen impurities in GaAsH 1.xPx• of 111-v
laser degradation, the antisite model of
Schottky barrier formation, the solution of the
deep trap problem in compound semiconductors, and the theory of interstitial defects in Si.
MEIS welcomes researchers to use the
abstract list In our office, or check company
libraries for a list of subjects covered. For
further information on the JTIS program,
please contact MEIS, 624-8005.
Contact Ted Zorn (625-1313) for more information on Dow's course (MatS 5482/8482,
2 cr., 548213/435990, 10:15-12:00 TTh,
AmundH 410. First meeting only: April 2, in
AmundH 21 0).
Brief article translation:
English $25.00
Japanese 35.00
INSTITUTE OF TECHNOLOGY /UNIVERSITY OF MINNESOTA
227 Lind Hall/207 Church Street S.E./Minneapolis, Minnesota 55455/(612) 624·8005
!
I
SUPERCONDUCTIVITY ADVANCES
Under the direction of Professor Allen Goldman, School of Physics and Astronomy, a
Minnesota research group reported some
unexpected findings related to the onset of
superconductivity in 20 granular films in an
Invited Talk and several presentations at the
American Physical Society Condensed Matter
Physics Meeting held in March.
First, the occurrence of superconductivity at
low temperatures was found to be determined
by the magnitude of the resistance of the film
in the normal state. They reported thatfilms
with sheet resistances greater than 6250
ohms/square are not superconducting. This
value of the sheet resistance is very close to
h/4e 2 which is the quantum of resistance for
electron pairs which are the carriers of charge
in superconductors. Secondly, they reported
data indicating that the superconducting transition is controlled by the normal resistance,
rather than temperature in these very thin
films (thicknesses less than 50 A).
The apparent explanation of these observations involves a relatively new area of physics
concerned with the application of quantum
mechanics to systems in which there is a
relationship between macroscopic quantum
mechanical variables and dissipation. Most
previous experimenters in the field have been
concerned with macroscopic quantum tunneling in single Josephson junctions. In the
case
of
the
thin
films,
the
nonsuperconducting
tunneling
of electrons
between the grains of the film is the source of
the dissipation. These films are so thin that
the capacitance of the individual grains is
extraordinarily small; i.e., the order of 10·16 F.
In this regime the charging energy of a grain
is very large, and there are substantial zero
point quantum fluctuations of the phase of the
superconducting order parameter on the
grains and quantum tunneling. The damping
of these fluctuations is inversely proportional
to the sheet resistance of the film. When the
sheet resistance is decreased, the fluctuations are damped out, and a superconducting
state results. When the damping is weak so
Page 2 MEIS NEWS 5:2, 1987
that the quantum fluctuations are substantial
cooling the sample to low temperatures doe~
not result in the observation of the onset of
zero electrical resistance. It appears that the
work of the Minnesota group is an important
test of ideas relating to the quantum mechanics of dissipative systems.
The Minnesota group has been studying the
onset of superconductivity in films by making
electrical measurements at various stages of
the growth of the film which is carried out in
an ultra high vacuum system using MBE
techniques. Small increments of material
(less than 0.1 A) are added in discrete steps,
and the electrical properties are characterized
after each increment of material. Since the
vacuum is in the 10"10 Torr range or much
lower during the entire process, there is no
significant contamination of the film between
depositions. The Minnesota group, led by
Professor Goldman, also includes H. Jaeger,
D. Haviland and B. Orr (now at IBM, Yorktown Heights).
The electrical properties of granular metals
have been studied for many years.
Extremely thin films with a morphology consisting of metal clusters are a two dimensional realization of a granular metal. The
onset of electrical conduction in such films is
usually modeled as a percolation problem. In
the case of a granular metal which is a superconductor, the onset of superconductivity is
connected with the development of Josephson tunneling between grains. The superconducting transition in a 20 granular system is
an unusual type of transition known as a
Kosterlitz-Thou less transition.
MEIS has sponsored Professor Goldman's
research through the Artificially Structured
Materials Pinnacle and small grant, in which
his group of seven graduate students has studied metal-insulator junctions which are fundamental to superconductivity and are the
basis of Josephson junctions. MEIS has also
funded Professor Goldman's construction of a
Scanning Tunnel Microscope.
rvEIS
SUPERLATTICE WORKSHOP
MEIS is sponsoring "Superlattice Structures and Devices: An International
Workshop on New Frontiers in Semiconductor Materials," to be held May 18-20.
This workshop will convene international
experts to discuss current and future trends in
materials science research, superlattice structures and devices. It is open to researchers
from both academic and industrial organizations.
Superlattices and multiple quantum well structures offer new degrees of freedom to optimize conventional solid state devices and
create novel device concepts. In an informal
setting experts will present personal assessments of the state of the field and of the most
promising new avenues of investigation. For
further information on program or registration,
see enclosed brochure or contact MEIS.
CAD for VLSI SYMPOSIUM
A symposium on CAD for VLSI will be held
on Tuesday, April 7 in Coffman Memorial
Union. Presentations will feature members of
the MEIS sponsored CAD for VLSI project
describing recent progress on Physical
Design, Design Snythesis, and Computational
Techniques. The CAD for VLSI project
includes faculty from Electrical Engineering
and Computer Science Departments:
Vladimir Cherkassky, EE
David Du, CS
Patrick Powell, CS
Gerald Sobelman, EE
and eight graduate students.
Afternoon discussion session and laboratory
visits will allow symposium attendees to see
demonstrations of work in progress. There is
no charge for the symposium; however, registration is required for luncheon reservations.
For registration or more information, call
MEIS at 624-8005.
MORE NSF FUNDING FOR
COMPUTER ALGORITHMS
An additional $447,836 from NSF has been
leveraged during the first year of a five year
grant, "Experimental Research in Computer
Algorithms." These additional funds complement NSF and MEIS funding which established the project and will expand several
individual components of this team project:
Computer Algorithms (Sahni); Large Matrix
Eigenvalue and Singular Value Problems
(Boley);
and
Systolic
Systems
and
Automata-based Computational Complexity
(Ibarra). The research group includes Computer Science Professors Sahni, coordinator,
Boley, Ibarra, Rosen, Venkatesan, and Vergis
and nine graduate students.
FELLOVVS VISIT COMPANIES
The 1986-87 MEIS fellows recently visited
several MEIS member companies, including
CDC, Honeywell (SSED and Corporate Systems Development Division), Unisys, ADC
Telecommunications and Zycad. Presentations ranging from software development,
VLSI design, and expert systems were given
by company employees. MEIS fellows also
explored summer employment opportunities
at these companies, as well as at VTC Incorporated, Cray Research Inc., and 3M. To
date MEIS has awarded 82 fellowships. Nine
fellowships are available for 1987-88.
INTELLIGENT SYSTEMS
INDUSTRY SYMPOSIUM
The Intelligent Systems Program will hold an
Industry Symposium the last week of June.
Following the very successful format established in 1986, the program will bring
together scientists and engineers from MEIS
companies to discuss new applications for
innovative technologies in computer vision
and expert systems. More information in the
near future.
MEIS NEWS 5:2 1987 Page 3
POSTER SESSION AT
CORROSION CONFERENCE
MEIS sponsored research will be reported at
a poster session as part of the ASM Conference on Electronic Packaging: Materials and
Processes and Corrosion in Microelectronics
to be held April 28-30, 1987. This session
will include six posters from MEIS affiliated
professors and projects:
Rapid Thermal Vapor Phase Epitaxy: A New
Technique for Growing Thin Quasiabrupt
Layers
Principal Investigator: Dr. Campbell, EE
Students: J. Leighton, J. Grieger,
T. Callahan
VLSI DESIGN CONFERENCE
The Institute for Mathematics and its Applications, in cooperation with the American
Mathematical Society/Society for Industrial
and Applied Mathematics (AMS), is hosting
the 18th Conference on Computational
Aspects of VLSI Design with an Emphasis on
Semiconductor Device Simulation. Scheduled
for April 30 - May 7, 1987, the conference will
be held at the University of Minnesota and
includes topics such as Process Modelling,
Relaxation Based Circuit Simulation and Device Modelling. For more information on the
program contact Hans Weinberger, IMA,
624-6066, or Betty A. Verducci, AMS, P.O.
Box 6248, Providence, Rl (401-272-9500).
Techniques for In Situ Integrated Circuit
Fabrication
• Deposition of Dopant Patterns
• A New Electron Source for Pattern
Generation
• Sputter Epitaxy of Silicon
Principal Investigator: Dr. Perla, EE
Students: C. Nordman, J. Schlotterbeck,
C. Wick
New Ternary Semiconductors for Infrared
Applications: Hg 1_xMnxTe and .Hg 1.lexSe
Principal Investigator: Dr. Franciosi, CEMS
Students: S. Chang, P. Philip, A. Wall
Semiconductor Stoichiometry During MetaiHG1.xCd1.xTe Junction Formation
Principal Investigator: Dr. Franciosi, CEMS
Students: S. Chang, P. Philip, A. Raisanen,
N. Troullier, A. Wall
Metallic Promoters of Semiconductor Oxidation
Principal Investigator: Dr. Franciosi, CEMS
Students: C. Caprile, S. Chang, P. Philip,
A. Wall
Atom Profiling at Metal Semiconductor Interfaces
Principal Investigator: Dr. Weaver, CEMS
Student: D. Hill
Page 4 MEIS NEWS 5:2, 1987
Microelectronic and Information Sciences
Center
Dr. Wallace Lindemann, Director
Dr. Martha Russell, Associate Director
Suzanne Johnson, MEIS News Editor
227 Lind Hall, 207 Church Street S.E.
Minneapolis, MN 55455
(612) 624-8005
1'he UliYEnity a M111111111D 1s cormitled 10 111e po11cy that 111 periiOI1S shall
haw equal ~ 10 Its programs, fadlille&, and lll'!llloymart v.lthout regard
10 na, religion, color, - . nallonal algin, handicap, age. veteran atatus, or
SliiQJaJ orientation.
'.!
MICROELECTRONIC &
INFORMATION SCIENCES
CENTER
NEWS
Volume 5; Number 3, Fall, 1987
MEIS FALL RECEPTION
RECOGNIZES PATENTS
The MEIS fall reception acknowledged faculty
technology transfer activities and welcomed new
MEIS fellows.
Faculty members recognized for patents and
copyrights include:
1.
This technology provides a method for
catalyzing the oxidation of gallium arsenide.
This process may prove very beneficial to
the
production
of high-quality GaAs
integrated circuits.
~
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2.
I
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THREE-DIMENSIONAL INTEGRATED
CIRCUITS
Professor R. M. Warner, Jr. et al- EE
This technology concerns the design and
production of three-dimensional integrated
circuits in a single-crystal all-semiconductor
monolith. These structures may provide for
improved reliability, circuit density, and speed
for various electrical devices such as highspeed computers.
l'
I
SAMARIUM-PROMOTED OXIDATION
OF GALLIUM ARSENIDE SURFACES
Professor Alfonso Franclosl - CEMS
3.
FOLDED LOGIC GATE
Professor Michael Shur - EE
This is an FET logic gate structure that provides very low power consumption in the
stable states, high speed, and large output
voltage swings.
4.
AGNESS
Professor James Slagle- CS
Generalized Network-Based Expert System
Shell that uses a merit based system for user
question selection. AGNESS may be used
to create customized computer-based expert
systems.
The University has filed patent applications on
items 1 and 2, has been granted a U.S. patent on
item 3, and has filed for a copyright on Item 4.
For further information call MEIS, 624-8005.
EQUIPMENT GIFTS RECEIVED
MEIS has received two donations of equipment
from Cray Research, Inc. This equipment will
expand the semiconductor design testing and processing instrumentation of the Microelectronics
Laboratories. Included in the gift are lon Mill II,
Developer Bake, Wafer Handler, Low Pressure
CVD Chamber, Plasma Depo System, VTI Mass
Spectrometer, Wafer Scrubber, Sputtering System, Resist Coater, plasma enhanced chemical
vapor deposition system, solitec resist coater,
LFE plasma enhanced chemical vapor deposition
(PECVD) system and other items.
In addition, Stephen Campbell, EE, has secured
for the Microelectronics Lab a plasma etch system from Honeywell Inc. The system will be used
for etching on silicon substrates with silicon dioxide, silicon nitride, silicon, polysilicon, aluminum,
tungsten and/or titanium tungsten.
1
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I
INSTITUTE OF TECHNOLOGY /UNIVERSITY OF MINNESOTA
227 Lind Hall/207 Church Street S.E.!Minneapolis, Minnesota 55455/(612) 624-8005
fVEIS
1987-88 MEIS GRANTS
creating expert systems for software engineering.
The group's goals are to:
Four MEIS grants for 1987-88 have been
awarded to research activities that were generated from previous MEIS investments. An additional MEIS grant has Initiated new research in
Computer-Aided Design for VLSI. Continuing
funding for NSF match in High Performance
Computing has also been awarded.
1.
Develop theory and methodology for creating
specifications of expertise required to perform
complex decision making and problem solving tasks.
2.
Develop methodologies and tools to support
the software engineering of expert systems
based upon the specifications of expertise.
Artificial Intelligence
Vision-Based Mobile Robotics
Professors William Thompson (PI), Ting-Chuen
Pong, and Maria Gini, all of CS, and Herbert Pick
lnst. of Child Development, are studying th~
expert systems necessary to build vision systems
capable of supporting autonomous robot navigation. This research has developed out of the
Intelligent Systems Pinnacle and is focused on
three primary activities:
1.
Research on perception for navigation will
study the interaction between visual perception and the use of maps to aid in navigation
tasks.
2.
Research on interpreting visual motion will
address the detection of moving objects and
the determination of shape by a combined
stereo-motion approach. The group also
intends to explore visual motion analysis
techniques applicable to robot navigation
applications.
3.
Research on error recovery in navigation
tasks will aim its effort to enable a mobile
robot to detect a large variety of unanticipated errors and to recover from them autonomously using knowledge about its task and
environment.
Software Engineering Of
Expert Systems
Building upon prior work by Professors Paul
Johnson, School of Management, and James Slagle, CS, from the Intelligent Systems Pinnacle,
and on an existing collaboration between Paul
Johnson and Professor Wei-Tek Tsai, CS, this
project team is developing methodologies for
Page 2 MEIS NEWS 5:3, 1987
Fabrication and Properties of
Microstructures
This program, headed by Professor Allen Goldman, Physics, and developed out of the Artificially
Structured Materials Pinnacle, includes the following projects:
1.
Continued development of 100-1000 A scale
metal patterns on Si wafers using E-beam
lithography with the JEOL SEM.
2.
Initiation of electrical measurements on these
ultra-small tunneling structures to establish
whether there are device possibilities.
3.
Initiation of the use of the Scanning
Tunneling Microscope (STM) for lithography
of resists which can be modified by energies
of 1-10 available from the STM.
Computer-Aided Design
for VLSI
Sophisticated CAD tools are essential for the
current state of design complexity in silicon technology. New CAD for VLSI design methods are
reducing the total design effort, allowing either
more complex chips to be designed with the
same or less effort, or simpler ones to be
designed in a shorter time.
The research projects of the CAD for VLSI team,
involving Professors David Du, Patrick Powell,
rvElS
E. Shragowitz, all of CS, and Gerald Sobelman
(PI), EE, and their students are studying methods
to improve CAD tools for VLSI design in terms of:
1.
Physical design to develop methods and
algorithms which allow decomposition of very
large gate arrays and "sea-of-gates" chips,
perform parallel solution of subproblems and
combine good approximating characteristics
with low computational complexity.
2.
High-level design synthesis to develop new
techniques for the construction of behavioral
silicon compilers that will consider several
conflicting objective functions as well as the
implications of design decisions.
3.
Explore the development of a new class of
tools for simulation and design which will
address both logic simulation and circuit
simulation and will work in a distributed
environment.
High Performance Computing
The High Performance Computing (HPC) project,
funded jointly by MEIS, NSF and the Institute of
Technology, completed its second of a five-year
program. This past year the group acquired a 64
node hypercube multicomputer which makes it
possible to perform experimental research on
parallel computing. Faculty directly associated
with the project are: Professors Sartaj Sahni (PI),
Daniel Boley, Anthony Chronopoulos, David Du,
Oscar l,barra, J. Ben Rosen, Eugene Shragowitz,
Shanker Venkatesan, and Anastasios Vergis, all
of Computer Science.
!
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High Speed Heterojunction
Devices
Professors Gopinath and Shur from Electrical
Engineering, Professor Dahlberg from Physics
and Professor Franciosi from Chemical Engineering and Materials Science are participants of an
interdisciplinary research project "High-Speed
Heterojunction Devices.". This program will be
funded for one year by MEIS.
The project will be concerned with a study of the
effects of introducing dipole layers into the heterojunctions between two compound semiconductors, primarily GaAs and AIGaAs. The variation
in the bandoffsets at the heterojunction will be
studied, as well as the resulting effects on the
operation of two typical heterojunction devices the modulation doped field effect transistor and
the heterojunction bipolar transistor.
Over the next year, the project team will initiate
several studies. Theoretical modeling of the devices will be done by Professor Shur. Fabrication
and device characterization will be done by Professor Gopinath. Professor Dahlberg will study
the transport properties of the heterojunctions and
relate those to technologically useful device properties. Professor Franciosi will characterize the
heterojunctions using a variety of x-ray, photo,
and electron beam techniques.
These initial activities will establish feasibility for
future collaborative research activities and sponsorship. The long range goal of the program is to
develop faster devices for application in supercomputers and a variety of microwave and millimeterwave systems.
Five Ph.D.'s were awarded last year to graduate
students who have participated in the HPC activities. Results of research dealing with parallel
solutions to constrained optimization problems,
eigenvalue problems, VLSI design problems, and
image processing problems have been published.
In addition, results of studies on systolic systems,
graph theoretic problems, fault tolerance, and
uniprocessor solutions to problems have also
been published. During the coming year, the
HPC group, which includes 25 Ph.D. students,
will intensify research emphasizing parallel computing.
·~
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MEIS NEWS 5:3 1987 Page 3
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NEW MEIS FELLOWS WELCOMED
GRAD STUDENTS GET INDUSTRY
EXPERIENCE
Five new MEIS fellows were welcomed by industrial affiliates, faculty and graduate students:
CHEMICAL ENGINEERING AND
MATERIALS SCIENCE
Michael Jost
CHEMISTRY
Steven Severtson
ELECTRICAL ENGINEERING
Brian Brunn
John Pierre
PHYSICS
Roger Proksch
Including these new fellows,
MEIS fellowships awarded.
ships provide a one-year
grant, opportunities to work
panies during the summer,
work with MEIS sponsored
projects.
there have been 87
The MEIS fellowstipend and tuition
in sponsoring comand opportunities to
faculty on research
JENSEN RECEIVES GUGGENHEIM
Professor Klavs Jensen, GEMS, received a Guggenheim fellowship for study and travel this year.
Jensen will be on leave during the academic year
and will work during fall quarter with colleagues at
Massachusetts Institute of Technology. During
spring quarter Jensen will collaborate with colleagues at the Institute for Semiconductors and
the Physics Department in Aachen, West Germany.
Jensen's current research on metal organic
chemical vapor deposition (MOCVD) reactors has
received international attention. Sponsored jointly
by MEIS and 3M and based on computational
studies of plasma flow done on supercomputers,
these new MOCVD reactors are being used to
study the growth of 111-V and II-VI semiconductors.
Page 4 MEIS NEWS 5:3, 1987
Students rece1v1ng MEIS, GE, and AEA fellowships are encouraged to work in industry at least
one summer during their graduate studies. This
industry exposure gives the students opportunity
for hands on experience; it gives industry the
opportunity to meet perspective employees; and
both can share ideas.
Eight fellows spent their summer working in
industry:
John Bolkcom EE
Cyber Optics
Brian Brunn
EE
Honeywell Systems and Research Center
Corey Carlson CS
U.S. West Technology Assessment and
Transfer Group
Dan Challou CS
ADC Telecommunications, Electron Digital
Cross Switching
Jeff Conger
EE
Honeywell Inc.
Vincent Hietala EE
Honeywell Physical Sciences Center
Joel Kennedy EE
IBM Corporation (N.Y.)
Martin Kenner CS
3M
GE GRANT RECEIVED
A second $50,000 Teaching Incentive Grant from
the General Electric Foundation has been
awarded to MEIS. The Incentive Grants provide
forgiveable loans to students who intend going
into teaching after receiving their Ph.D. degrees in
EE or CS. Awards from the first GE Incentive
Grant were given to EE graduate students: Judy
Gerhard, Vincent Hietala, Bruce Jones, and G.
Lee Zimmerman.
MEIS WELCOMES NEW FACULTY
Chemical Engineering and
Materials Science
Ravi Janardan, Assistant Professor (F87)
Research interests in graphic algorithms, network design, fault-tolerant distributed computations, approximation algorithms, cryptography.
Electrical Engineering
Jose Martins, Assistant Professor (F87)
Research in large scale scientific computations; theory of electronic properties of
materials; theory of high temperature superconductivity.
Marshall Nathan, Professor (F87)
Research activities in the area of high frequency compound semiconductor devices
and device physics.
Robert Tranquillo, Assistant Professor (F87)
Research
in
biomedicine,
biochemical
engineering, mathematical modeling and
experimental studies.
Dennis Polla, Associate Professor (F87)
Research activities on integrated sensors,
mlcrofabrication techniques, and compound
semiconductor materials and device physics.
Chemistry
John Simmons, Visiting Professor (F87)
Expertise in the general area of solid-state
electronics, heterojunction devices, integrated
optics, optoelectronics and fiber optic communications.
Doreen Neopold, Assistant Professor (W87)
Research in physical chemistry involved with
the chemistry and spectroscopy of metal
clusters and other reactive transients in the
gas phase.
Kenneth Neopold, Assistant Professor (F86)
Research involved with the use of state-ofthe-art difference frequency techniques for
studying the weak-bonded vibrations of Van
der Waals molecules, with the intent of elucidating the fundamental nature of intermolecular forces.
Steven Kass, Assistant Professor (F86)
Research in physical organic chemistry,
involving research in gas phase ion-molecule
chemistry.
Michael Raftery, Professor (W87)
Research in the area of neurochemistry, the
biology and chemistry of cell surfaces in
health and disease and molecular mechanisms of synaptic transmission and axonal
conduction.
Ahmed Tewfik, Assistant Professor (F87)
Research interests in fast algorithms for multidimensional signal processing, special· estimation, parallel estimation algorithms, speech
recognition and passive tracking, and Identification algorithms.
Arthur van Rheenen, Assistant Professor (F87)
Research activities In the study of noise in
electrical devices.
Physics
Ronald Poling, Assistant Professor (F87)
Research interests in experimental
energy physics.
high
Computer Science
Haesun Park, Assistant Professor (F87)
Research activities in numeric analysis,
parallel computation, and signal processing
algorithms.
MEIS NEWS 5:3, 1987 Page 5
I
EE GRAD IN JAPAN ON NSF GRANT
IEEE MEETING IN MPLS
Dr. Ronald lndeck, EE grad, has received a oneyear research grant from NSF. Through this
grant lndeck is a visiting researcher - NSF fellow
at Tohoku University, Sendai, Japan. lndeck,
who received his Ph.D. in May 1987, also
received a Hewlett-Packard Educational Fellowship. This is a four year fellowship/loan made to
graduate students who plan academic careers in
EE or CS. The award will provide an equipment
grant when lndeck takes a faculty position.
lndeck's dissertation, "The Use of a Microinductive Transducer For the Characterization of the
Magnetic Head-Medium Interaction in Magnetic
Recording Systems," was advised by Professor
Kaveh, EE.
The second annual IEEE Bipolar Circuits and
Technology Meeting was held September 21-22
at the Hyatt Regency Hotel, Minneapolis, MN.
"Bipolar VLSI--Coming of Age" was addressed by
keynote speaker George Wilson of Bipolar
Integrated Technology Inc. His paper, along with
approximately 60 others, was published in the
proceedings distributed at the meeting. Professors Warner and Schaumann of EE and Dr.
Russell, MEIS, were participants o this year's
planning committee. For further information contact: Janice Jopke, BCTM Secretary/Treasurer,
5016 W. 99th Street, Bloomington, MN 55437
(612) 835-6742.
CONTRIBUTIONS TO MEIS
MINNESOTA MICROELECTRONICS
LAB GROUP MEETS AT U
Continued corporate support for the research,
educational and industrial partnership programs of
MEIS has been given by ADC Telecommunications, Inc., Control Data Corporation, Cray
Research Foundation and 3M for the 1987-88
year.
Microelectronic and Information Sciences
Center
Dr. Wallace Lindemann, Director
Dr. Martha Russell, Associate Director
Suzanne Johnson, MEIS News Editor
227 Lind Hall, 207 Church Street S.E.
Minneapolis, MN 55455
(612) 624-8005
The University of Minnesota Is committed to the policy that all persons shall
have equal
ac:oess to Its programs, facilities, and errployment \\lthout regard
to race, religion, color, sex, national orlgin, handicap, age, veteran status, or
sexual orlentation.
Page 6 MEIS NEWS 5:3, 1987
The Minnesota Microelectronics Laboratory Group
(MMLG), an association of microelectronic laboratory professionals, will hold its fall meeting at the
University of Minnesota.
Stephen Gilbert,
manager of the Microelectronics Laboratory and
member of the MMLG Advisory board, is coordinating the meeting in conjunction with MEIS. For
further information, call MEIS at 624-8005.
fo ':
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MICROELECTRONIC &
INFORMATION SCIENCES
CENTER
NEWS
Volume 6: Number 1,Winter, 1988
GRANT FOR SEMICONDUCTOR
MANUFACTURING AWARDED
The University of Minnesota was one of four
Institutions awarded a three year grant by the
Semiconductor Research Corporation (SRC)
to
develop
a
new
curriculum
In
Semiconductor Manufacturing. The new
curriculum will prepare top quality engineers
with well targeted cross disciplinary training
and communication skills to become
manufacturing
engineers
for
the
semiconductor Industry.
The Semiconductor Manufacturing Curriculum
program capitalizes on three strategic
resources at the University of Minnesota.
First, a cross disciplinary curriculum will be
cooperatively developed and offered through
three departments, represented by the project
coordinators, Stephen Campbell (EE), Ben
Llu (ME), and John Weaver (CEMS).
Second, there will be two laboratories
supporting the SRC program. The facilities In
the Microelectronics Research Laboratory
(under construction) will support related
research activities, while the exlsiting
Microelectronics Laboratory (located In EE)
will be designated as an Instructional
laboratory to support courses taught In the
proposed curriculum.
Third, significant
Industrial Interaction which Is already under
way will be expanded to provide transfer
linkages through: Internships and joint thesis
projects In Industrial laboratories and
factories: industrial representation on an
advisory board for curriculum planning,
Internships, career guidance, and cooperative
thesis projects; and seminars and guest
lectures given by industrial engineers.
0
Over the next three years the curriculum will
help produce semiconductor manufacturing
engineers who will have had hands on
experience In Industry. The curriculum and
experience Is intended to prepare the
graduates of this program to become key
employees
In
the
semiconductor
manufacturing industry.
Three other schools that also received SRC
awards were Rensselaer Polytechnic Institute,
Rochester Institute of Technology (New
York), and the University of Texas. The
Minnesota program is headed by Professor
Campbell.
Student Employment Opportunltes
Openings currently exist for students to work
1988
at companies
during
summer
In
the
Semiconductor
participating
Manufacturing Program. A key component to
the Semiconductor Manufacturing program Is
student and faculty contact with and
experience in industrial laboratories. This
Interaction will Include summer employment,
co-op experience, and extended Internships
for undergraduate and graduate students.
Industry locations Include local and national
companies. A variety of time frames will be
available
to
accommodate
Individual
schedules.
If you are Interested In the Semiconductor
Manufacturing Program and would like to get
more Information, contact your department
coordinator: Dr. Campbell, EE, 625-5876; Dr.
Llu, ME, 625-6574; and Dr. Weaver, CEMS,
625-6548. If you would like to apply for
industrial positions, contact Dr. Martha
Russell, MEIS, 625-8005.
INSTITUTE OF TECHNOLOGY /UNIVERSITY OF MINNESOTA
227 Lmd Hall/207 Church Street So E./Minneapolis, Minnesota 55455/(612) 624-8005
0
,.,
SYMPOSIA ON GRAPHICS
TECHNOLOGY FOR ENGINEERING
Symposia on graphics technologies for
engineering will be held three Saturdays this
winter at the Sheraton Midway Hotel in St.
Paul. Programs are sponsored by IEEE TC
Section, Computer Society Area 4, SigArt,
ACM, 3M Corporation and Honeywell Inc.
For more information contact Gary Moorhead,
(612) 593-2837.
January 23: Workshop 1
"Past, Present and Future Trends in
Computer Graphics Technology"
(Carl
Machover, Machover Associates)
"Tutorial on Basic and Advanced Computer
Graphics" (Donald Singley, 3M Company)
for
Hardware
(Ed
Applications"
Sutherland)
Computer
Graphics
Wild,
Evans
and
February 20: Workshop 2
"Fundamentals of Image Processing" (Fred
Waltz, 3M Company)
"Real Time Industrial Vision Imaging" (Fred
Waltz, 3M Company)
"Recovering Three Dimensional Information
from Two Dimensional Data" (Ting-Chuen
Pong, U of MN)
"Algorithms and Parallel Processing In Image
Processing" (Bill Samayoa, Cray Research)
March 19: Workshop 3
"3-D Animation Systems" (tentative)
"Flight Simulation" (Ron Rlesman, consultant
with NASA and Singer Link)
"Computer Generated Synthesized Images"
(Carl Graf and Karl Font, Honeywell Inc.)
"3-D Animation Applications" (Larry Lamb,
Lamb & Company)
Page 2 MEIS NEWS 6:1, 1988
CAD SEMINARS
Winter
seminars
sponsored
by
the
Computer-Aided Design for VLSI group begin
January 7th. Researchers involved in this
group are Professors Du, Powell, and
Shragowitz all of CS, and Professor
Sobelman of EE. For more information,
contact Professor Sobelman at 625-8041.
All seminars are held Thursday mornings,
11:15-12:00 a.m, in the MEIS Conference
Room, 227 Lind Hall.
January 7
H. C. Yen - "Timing Analysis"
January 14
Henry Chen - "Bus Synthesis Using Weighted
Cluster Partitioning"
January 21
I. C. Lin - "Gate Matrix Folding"
January 28
Wansoo Choi - "A New Hardware Maze
Router"
Hsi-Chuan
Problems"
February 4
Chen
"Pad
February 11
Perry Busalacchi
"VLSI
Generation"
Assignment
and
Font
February 18
Habib Youseff - "Correct-by-Construct Seaof-Gates Layout''
February 25
Richard Newton, University of California,
Berkeley
(see separate insert)
March 3
Dennis Vollrath - "A Mapping Algorithm for
High-level Synthesis"
March 10
S. Sutanhavibul - "Successive Augmentation
for Layout Problems"
1
rvEIS
I
I1
I
1988-89 AEA JAPAN RESEARCH
FELLOWSHIP PROGRAM
GE TEACHING INCENTIVE
GRANTS AWARDED
American graduate students In electrical
engineering, computer science, or a related field
have the opportunity to spend up to 12 months in
research labs of major Japanese electronics companies in Japan. All expenses (except health
Insurance) are paid by the Japanese host company. In the U.S., AEA member companies,
along with a grant from the National Science
Foundation, cover program expenses (except for
transportation) to summer language training and
orientation at a major U.S. university. Research
internships in Japan usually begin around midSeptember, 1988. Room and board accommodations prohibit dependents from accompanying participants. Ten to twelve students will be selected
for the program which began In 1984.
Three Teaching Incentive Grants from the
General Electric Foundation, administered by
MEIS, have been awarded to graduate students
in Computer Science. The incentive grants
provide forgiveable loans to students in EE or CS
who intend to pursue academic careers at an
accredited college or university after receiving
their Ph.D. degrees. All three students are
working on their Ph.D.'s.
.t
I
I
~
1
I
$
Eligibility Requirements
To participate In this program In 1988, students
must:
- Be enrolled and In good standing In a
graduate program In electrical engineering,
computer science or a related field at a
U.S. university.
- Agree to develop a research paper based
on his or her experience In Japan.
- Complete an Intensive summer Japanese
language program (unless he or she has
previous knowledge of Japanese). Travel
costs to and from the University providing
language training must be borne by student.
Charles C. Butler
two year award
Advisor: Professor Slagle, CS
Research Interests: AI logic foundation and
expert systems.
J. Andrew Holey
two year award
Advisor: Professor Ibarra, CS
Research Interests: Relationships among classes
of automata and their formal representation.
Andrew T. Phillips one year award
Advisor: Professor Rosen, CS
Research
Interests:
Parallel
computing
approaches to large scale optimization problems.
Previous GE Teaching Incentive Grants have
been awarded to EE graduate students:
Judy Gerhard
Vincent Hietala
Bruce Jones
G. Lee Zimmerman
-Be a U.S. citizen.
To Apply
I
I
I
Request an application form from the MEIS
Center or call AEA/Education Foundation at (408)
987-4200.
ALL APPLICATION MATERIALS
MUST BE POSTMARKED BY FEBRUARY 5,
1988.
l
l!
l
l
iI
'
MEIS NEWS 6:1 1988 Page 3
RICHARD NEWTON TO VISIT
Professor A. Richard Newton, University of
California, Berkeley, will present a seminar on
"Design Aids for VLSI - A Perspective",
Thursday, February 25, -1988. The seminar
will be held at 4:00 p.m. In room 240
Amundson Hall. For more information see
enclosed insert, or call MEIS at 624-8005.
NEW MICROELECTRONIC
LABORATORY PROGRESS
The
new
Microelectronics
Research
Laboratory facility is well underway In the
basement of the Electrical Engineering and
Computer Science building. Construction for
all major systems is underway and includes a
state-of-the-art deionized water system, ultrahigh purity gas distribution system for oxygen,
hydrogen, gaseous nitrogen, an_d liquid
nitrogen (LN2) directly piped to each
laboratory bay. The clean room construction
Is underway and Is scheduled to provide four
bays of tunnel design approximately 14 feet
wide by 60 feet long. The cleanroom
environmental controls will provide and
maintain 0.1 degree F temperature stability
and 0.5% relative humidity control. The
anticipated cleanliness level in the working
bays will be CLASS 1 to CLASS 10 areas.
The vibration isolation already in place in the
facility has demonstrated one of the lowest
background vibration levels in the country.
Installation of the cleanroom structure has
started.
Recently the University of Minnesota has
hosted several facilities and design personnel
from the Federal National Laboratory at
Lawrence Livermore in California, who visited
and Inspected the new facility. They were
seeking
new
ideas
and
successful
approaches to be used In a new
microelectronics facility they are planning.
Information on the new Microelectronics
Research
Laboratory has also been
presented to the Federal National Laboratory
personnel at Lawrence Berkeley in regard to
their facility enhancement.
Page 4 MEIS NEWS 6:1, 1988
NEW STAFF HIRED FOR
MICROELECTRONICS LAB
The Microelectronics Laboratory has hired
two electromechanical systems specialists to
help develop and operate the present
laboratory and the new laboratory In the
EE/CS building (to open In the fall). When
the new facility opens, the present facility will
be a teaching laboratory, while the new
facility will emphasize research.
Both
individuals have industrial backgrounds.
Michael King brings experience In a bipolar
lab, GaAs product development and plasma
deposition of nitride and reactive ion etching.
James Oikari brings experience in CMOS
and bipolar technologies, oxidations, anneals,
diffusions, LPCVD oxides, nitride and
polysilicon depositions. Both began their
employment early January, and will help
maintain equipment, establish and run
processes, help set up the new facility in the
EE/CS building, and supervise student
laboratory usage. Welcome to Mike King and
James Oikari.
Microelectronic
and
Information
Sciences
Center
Dr. Wallace Lindemann, Director
Dr. Martha Russell, Associate Director
Suzanne Johnson, MEIS News Editor
227 Lind Hall, 207 Church Street S.E.
Minneapolis, MN 55455
(612) 624-8005
The Ullverslty c:A Mnneecta Ia corrrritted to the policy thai 1111
pnons ehall have equal ~ to Ita prograiT1II, facilities, and
ll1'fllc¥'nant YAthout ragan:! to race. raligion, cola', - . national
origin, handicap, age. \1ll8r'lln status, or IIIKJII orientation.