On-Chip Jitter-Spectrum Analyzer for High-Speed Digital Designs M. Takamiya, H. Inohara, and M. Mizuno NEC Outline Introduction to Signal Integrity Problems Feedback-Design Using On-chip Measurement Significance of Frequency-Domain Measurement Jitter-Spectrum Analyzer (JSA) • Main Features • Circuit Design • Measured Spectra Summary Signal Integrity (SI) Problems Steep rise of LSI-fabrication cost increases the need for a fail-safe LSI-design. (e.g. $1-million for 90-nm CMOS) On-chip SI problems become critical with technologyscaling. Inductive effect Power supply noise Voltage Jitter (This work) Time SI problems frequently cause operation errors in highspeed LSIs such as MPU or SerDes, which results in longer time-to-market and higher cost due to unanticipated LSI re-fabrication. Issue of Conventional Feedforward Design-Flow Signal integrity modeling No validation of the models (e.g.) RLC extraction, Modeling of power supply current Unreliable models Fabrication of LSI No measurement of signal integrity due to no need and inability to measure it The unreliable SI models induce operation errors due to SI problems. How can we correct this undesirable situation? Our Solution: Feedback Design-Flow Signal integrity modeling On-chip measurement macros Validation of the models Embedded in LSI Fabrication of LSI Measurement of SI by macros On-chip measurement macros can measure on-chip waveform during actual operation in the field. Operation errors due to SI problems can be certainly avoided with reliable SI models. LSI design with short time-to-market and low cost because of no design failure Proposed On-chip Measurement: JSA Jitter-Spectrum Analyzer (JSA) for feedback design-flow is proposed. JSA achieves the world’s first on-chip frequency-domain measurement of timing-jitter and provides jitter spectrum. Timing jitter kHz MHz GHz Frequency Why Frequency-Domain? Comparison of on-chip measurement macros All past works This work Time-domain measurement Frequency-domain measurement • Jitter histogram [1] • Jitter spectrum • Waveform [2] or amplitude [3] of power supply noise Able to locate and analyze trouble-spots in powerand clock-networks Unable to determine (e.g.) Decoupling capacitor, specific trouble-spot PLL location Difficult to reduce jitter and Jitter and power supply noise can be effectively supply noise reduced. [1] VLSI Symp. ‘01, p.187, [2] ISSCC ‘02, p.182, [3] VLSI Symp. ‘03, p.193 Jitter by Power Supply Noise Power supply noise Jitter in clock circuits / Noise PLL bandwidth (BW) fclock kHz MHz GHz f Timing jitter kHz MHz GHz f Resonance around BW fclock kHz MHz GHz Frequency (f) Jitter is determined by the degree to which power supply noise affects the clock circuits (PLLs + clk distributions). The spectrum from kHz to GHz is important. Critical spots in both the power- and clock-networks can be identified by the spectrum. Power Supply Noise Spectrum Impedance of power supply networks (Zp) Resonance kHz MHz GHz Power supply current (Ip) fclock Sub-harmonics Harmonics f Power supply noise kHz MHz GHz f fclock kHz MHz GHz Frequency (f) Power supply noise is determined by Ip and Zp. Measurement of an LSI during actual operation is important, because Ip fluctuates greatly with changes in LSI operations. Impedance of Power Supply Networks(PSN) Ip Jitter Power supply noise Zp C1 C2 C3 PCB Package LSI Impedance of PSN (Zp) Resonance C1 C2 C3 Frequency kHz MHz GHz Zp depends on PCB and package as well as LSI. In-field measurement of a packaged LSI, which is important, is enabled by the on-chip measurement macro. Outline Introduction to Signal Integrity Problems Feedback-Design Using On-chip Measurement Significance of Frequency-Domain Measurement Jitter-Spectrum Analyzer (JSA) • Main Features • Circuit Design • Measured Spectra Summary How to measure jitter spectrum? Jitter spectrum is obtained by Fourier transform of real-time successive measurements of the jitter. Target spec. of JSA •Measured signal: 1-GHz clock •Jitter resolution < 10 ps (0.01 U.I.) •Jitter time-range: ± 200 ps (± 0.2 U.I.) •Jitter frequency-range: kHz ~ GHz Key technologies for JSA (1) Real-time successive measurement of jitter to avoid aliasing noise (2) Timing jitter measurement to detect low frequency jitter Prevention of Aliasing Noise Bandwidth of jitter in x-Hz clock signal is x/2-Hz. Jitter measurement using below x-Hz sampling generates aliasing noise. (e.g.) The jitter of 1-GHz clk has 500-MHz bandwidth. Jitter 1ns 0 Time 1-GHz sampling 500-MHz sampling Aliasing noise Jitter Jitter f(MHz) 0 250 500 0 250 500 Correct spectrum Incorrect spectrum Two technologies to obtain a correct spectrum; (1) Real-time successive measurement of jitter (2) An anti-aliasing filter for output f(MHz) Why is the timing-jitter measured? Symp. Past work VLSI ‘01, p.187 Measured clock (mck) Macro Out • Period jitter is measured. Tclk ± ∆T mck →Unable to measure low-frequency jitter, because ∆T is very short. Unable to obtain wide range of jitter spectrum This work Reference clock (rck) Macro Out Measured clock (mck) • Timing jitter is measured. rck mck →Able to measure lowfrequency jitter Jitter spectrum from kHz to GHz can be obtained. Outline Introduction to Signal Integrity Problems Feedback-Design Using On-chip Measurement Significance of Frequency-Domain Measurement Jitter-Spectrum Analyzer (JSA) • Main Features • Circuit Design • Measured Spectra Summary Jitter-Spectrum Analyzer (JSA) High speed digital systems (e.g. Server) Logic analyzer jitter d e r u s a Me in a m o d e in tim JSA PC Frequency-domain Jitter Digital LSI (e.g. MPU) where jitter measurement macros (JMM) are embedded Frequency Real-time in-field measurements are performed by JMM. Only minimal functions are embedded to save chip-area. Place of JMM in an LSI Digital LSI Logic JMM PLL Reference clock Clk Dist. SerDes PLL Clk Dist. JMM Selector JMM Jitter by PLL and Jitter from clock distributions different clock domains Jitter in reference clocks is not a problem because the timing-jitter to be measured by JMMs is not an absolute value but a relative value. Jitter Measurement Macro (JMM) Reset charge pump rck Reference clock (rck) ∆T Up Phase frequency detector Measured clock Down Icp P1 SW Vx N1 Icp C Antialiasing filter Vdd 2 A/D converter Sampling Timing difference (∆T) is converted to analog voltage (Vx) by proposed reset-charge-pump. Out Timing Diagram for JMM Reference clock (rck) Measured clock ∆T ∆T Up Down Vx Sampling Icp∆T/C Icp∆T/C Vdd 2 Outline Introduction to Signal Integrity Problems Feedback-Design Using On-chip Measurement Significance of Frequency-Domain Measurement Jitter-Spectrum Analyzer (JSA) • Main Features • Circuit Design • Measured Spectra Summary Chip Micrograph 1.8 V, 0.18 µm CMOS 1.15 mm 1.6 mm Jitter measurement macro Reset charge pump PFD 137 µm 95 µm Block Diagram of Test Chip Noise generator Power supply noise Noise Jitter measurement macro rck V dd Measured 2 clock 1ns-inverter-chain Reference clock (rck) On-wafer measurement PFD To real-time oscilloscope 1-GHz clock Vx Measured VX vs. ∆T for Calibration 1.5 Vx (V) 1.2 Vdd = 1.8 V 1-GHz clock 0.9 0.6 0.3 0.0 -250-200-150-100 -50 Sensitivity (Icp/C) = 3.2 mV/ps Reference clock Measured clock 0 ∆T 50 100 150 200 250 Timing difference (∆T) (ps) Resolution = 8.8 ps @ 6-bit A/D, Range = ±200ps(±0.2 U.I.) 10 x log (Jitter / Clock cycle) Measured Jitter Spectrum -10 50-MHz noise -20 -30 -40 -10 5-MHz noise -20 5 MHz 50 MHz Harmonics 1-GHz clock jitter spectrum obtained by JSA. Frequency of power supply Harmonics noise was varied. -30 -40 100k 1M 10M 100M 500M Frequency (Hz) Measured jitter spectra clearly show peaks at the noise frequency and its higher harmonics. Noise source circuits can be identified by the spectrum. 10 x log (Jitter / Clock cycle) Resonance Found by Jitter Spectrum -10 -20 1-GHz clock jitter measured by JSA w/o noise 120-MHz -30 150-MHz -40 -50 0 100M 200M 300M Frequency (Hz) 400M 500M High peaks indicated trouble-spots in the power supply networks and appeared to result from resonance. To confirm this, power supply noise at peak frequency (120 MHz) and non-peak frequency (150 MHz) were applied. Confirmation of Resonance Peak-to-peak jitter by JSA Power supply Without decoupling capacitors (Cd) With Cd Quiet (w/o noise) 78.7 ps (Previous spectrum) 23.3 ps 120-MHz noise (On the resonant frequency) 281.1 ps 35.7 ps 150-MHz noise (Off the resonant frequency) 99.7 ps 26.1 ps The resonance at 120 MHz generates the large power supply noise which results in large peak-to-peak jitter. Off-chip 4.7-nF decoupling capacitors eliminate the resonance. Summary Signal integrity problems can be solved by proposed feedback-design using on-chip measurement macros. Developed on-chip jitter-spectrum analyzer can locate trouble-spots for jitter and power supply noise in the frequency-domain. The first on-chip measurement of jitter-spectrum was successfully performed.