M-2800 Series
Inline Ultrasonic
Flow Meter
Description
The M-2800 consists of an inline flow sensor and electronics in one package. The flow sensor is a straight-through PFA
tube with a pair of assemblies of angled wedges and piezoelectric crystals mounted on it. The M-2800 utilizes the latest
digital signal processing (DSP) technology and provides flow
measuring solutions with minimum compromise in performance. The compact integrated package includes sensor and
electronics, and saves space and minimizes cabling, facilitating an easier installation.
There are no moving parts or mechanical seals. The M-2800 is
an ideal choice for use in the semiconductor industry where
minimal footprint, high purity and corrosion resistant wetted
parts are required.
Key Features
•Sensor and electronics in one
package
•No dead legs, no obstructions
•No moving parts in the flow path
•Straight flow path
•Minimal pressure loss
•Accuracy ±1% F.S.
•Repeatability ±0.5% F.S.
•All wetted parts made of PFA
•Free from ion or particle
contamination
•Corrosion resistant
•Wide rangeability
•Easy installation with compact
meter body
Measurement Principle
The flow meter utilizes transit-time ultrasonic technology to determine flow rate of the liquid. Two piezoelectric crystals (transducers) are attached on the outer diameter of the flow tube (or on angled wedges attached
on the outer diameter of the flow tube) and are excited
producing ultrasound signals. Each transducer alternately
transmits and receives ultrasound signals. The difference
in transit time of the signals (transmitting upstream and
downstream) is proportional to the velocity of the fluid
allowing determination of flow rate.
Applications
•
CMP, ECD, Electroless Deposition, Wet Clean and
Track tools in semiconductor manufacturing
•
•
•
•
•
Solar PV equipments
Medical devices
Wet process / Chemical distribution system
Laser Equipment
Cooling systems
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M-2800
Inline Ultrasonic Flow Meter
Operation Specifications
• Measurable Fluid: Liquids
• Fluid Temperature: 50° – 140°F (10° – 60°C)
• Fluid Pressure: 0 – 70 psig
• Ambient Temperature: 32° – 115°F (0° – 46°C)
• PFA Tube End or others *
• Enclosure Classification: IP64
* Consult Malema for any special requirements
Performance Specifications
Tube Size/ End connections
1/4”
3/8”
1/2”
3/4”
1”
1 1/8 “
Standard Full Scale Range *
3 l/min
8 l/min
40 l/min
80 l/min
200 l/min
250 l/min
Accuracy
±1% F.S.*
Repeatability
±0.5% F.S.*
* Custom flow ranges available upon request. Consult factory for any other special requirements
Electrical Specifications
Output
Options
Analog
Output
Current O/p:
Active: 4—20 mA (Max. Load < 900 ohms)
Passive: 4—20 mA (Max. Load < 1200 ohms @ 30 V max.)
Voltage O/p: 0—10 Vdc (min. impedance > 10 K)
Digital
Output
Open Collector / Max. 30 Vdc, 200 mA max.
Configurable for Low flow rate, High flow rate, Totalizer greater than,
Totalizer less than, Signal strength less, Positive totalizer pulse *
Digital Input
Zeroing – Momentary pull-up to 24 Vdc for activation
Power Supply
24 Vdc ±10%
Power
Consumption
100 mA
Digital
Communication
MODBUS over RS-485
* Pulse frequency configurable up to 10 KHz; Pulse weight configurable from 0.01 ml
Material Specifications
Enclosure Classification
IP64
Optional Cable
Consult factory for available cable lengths and configurations
Non-wetted Parts
PEEK, PP, SS
Wetted Parts
High Purity PFA
2
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M-2800
Connector or Mating Cable (Optional) Specification
Inline Ultrasonic Flow Meter
Front View
Pin #
Wire Color
Function
1
White
Signal OUT (4—20 mA or 0—10 Vdc)
2
Brown
Power IN (+24 Vdc)
3
Green
Remote Zero IN *
4
Yellow
Alarm or Pulse OUT
5
Gray
RS-485 A, Data -
6
Pink
RS-485 B, Data +
7
Blue
Ground (Power and signal)
8
Red
Not Used
* Momentary pull-up to 24 Vdc
NOTE: Consult factory for other cable and pin out options
Dimensional Drawings
FOR REFERENCE ONLY
1/4” Tube Ends Version
B
.63
C
8 Pin
Turck P/n FSFDV 8-0.5
for I/O
.53
A
E
D
d
F
H
G
M3 x .30" Dp
2 Places
3
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M-2800
Inline Ultrasonic Flow Meter
Dimensional Drawings (Continued)
FOR REFERENCE ONLY
3/8” Tube End Version
B
.63
C
8 Pin
Turck P/n FSFDV 8-0.5
for I/O
.73
A
1.40
E
D
3.00
d
F
L
H
G
M3 x .30" Dp
2 Places
1/2” S300 Pillar Version
107
4.20
16
.63
n
Flow direction
36
1.40
126
4.97
23
.90
4
30
1.20
1/2" S300 Pillar
Fitting
Both ends
41
1.60
68
2.68
13
.50
50
1.95
20
.80
Mounting hole
M3 x .25" dp
2 places
19
.74
11
.43
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M-2800
Inline Ultrasonic Flow Meter
Dimensional Drawings (Continued)
FOR REFERENCE ONLY
34mm GF Version
14
.55
24.8
.98
175
6.89
49.5
1.95
16
.63
92.7
3.65
Flow direction
1.125 Tube OD
x 1.000 Tube ID
247.7
9.75
58.4
2.30
19.1
.75
32mm GF connection
Both ends
24.8
.98
Mounting Hole
for M4 screw
2 Places
58.2
2.29
35.8
1.41
1” S300 Pillar Version
14
.55
24.8
.98
175
6.89
49.5
1.95
16
.63
92.7
3.65
Flow direction
1.125 Tube OD
x 1.000 Tube ID
1" Female S300 Pillar
Fitting
Both ends
266.9
10.51
58.4
2.30
5
58.2
2.29
24.8
.98
19.1
.75
Mounting Hole
for M4 screw
2 Places
35.8
1.41
NOTE: Drawings show mating cable option. 6’ pigtail cable with free leads standard.
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M-2800
Inline Ultrasonic Flow Meter
Ordering Information
Model Code
M-2800
-
*
-
*
*
*
-
*
*
-
Description ***
Electronics
Type
I
Integrated Electronics
-
Wetted Parts
Connection Size (O.D.)
Fluid Connection
F
PFA
2
1/4”
3
3/8”
4
1/2”
6
3/4”
8
1”
S
1 1/8”
1
Tube Ends
2
Pillar S300 Union Ends
3
Pillar S300 Welded Ends
5
Flare Union Ends
6
Others
-
Local Display
Analog Output
1
Yes ***
2
No
1
0—10 Vdc
2
4—20 mA active
3
4—20 mA passive
4
Others
XXX
Unique PN Identifier
*** Future versions
© 2015 Malema Engineering Corporation. All rights reserved.
Malema, Malema Sensors, and Malema Engineering Corporation are service marks of Malema Engineering Corpration. All other trademarks are property of their respective owners.
Malema supplies this publication for informational purposes only. While every effort has been made to ensure accuracy, this publication is not intended to make performance claims or process recommendations. Malema
does not warrant, guarantee, or assume any legal liability for the accuracy, completeness, timeliness, reliability, or usefulness of any information, product, or process described herein. We reserve the right to modify or
improve the designs or specifications of our products at any time without notice. For actual product information and recommendations, please contact your local Malema representative.
6
Corporate Headquarters
1060 S Rogers Circle
Boca Raton, FL 33487
P: (561) 995-0595 F: (561) 995-0622
DS.M2800/518201
West Coast Headquarters
2329 Zanker Road
San Jose, CA 95131
P: (408) 970-3419 F: (408) 970-3426
Asia Pacific Headquarters
35 Marsiling Industrial Estate Road 3 #02-06
Singapore 739257
P: (65) 6482-3533 F: (65) 6484-4231
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