Aging models for analog circuit level simulations – integration and deployment challenges ERMAVSS 2016 Peter Rotter, Infineon Technologies AG Friday, March 18th 2016 Agenda 1 Motivation 2 BTI and HCI Impact on Device Behavior 3 Aging Model Integration Challenges 4 Aging Time Scales 5 Long-term vs. Short-term Effects 6 Variation Handling 7 Stress Scenarios 8 Worst-case Challenges 2016-03-18 Copyright © Infineon Technologies AG 2016. All rights reserved. 2 Agenda 1 Motivation 2 BTI and HCI Impact on Device Behavior 3 Aging Model Integration Challenges 4 Aging Time Scales 5 Long-term vs. Short-term Effects 6 Variation Handling 7 Stress Scenarios 8 Worst-case Challenges 2016-03-18 Copyright © Infineon Technologies AG 2016. All rights reserved. 3 … new topic? 25+ years aging simulation coming-of-age? Aging Modelling & Characterization 2016-03-18 Recovery Effect Integration Copyright © Infineon Technologies AG 2016. All rights reserved. Time-dependent Variation 4 Agenda 1 Motivation 2 BTI and HCI Impact on Device Behavior 3 Aging Model Integration Challenges 4 Aging Time Scales 5 Long-term vs. Short-term Effects 6 Variation Handling 7 Stress Scenarios 8 Worst-case Challenges 2016-03-18 Copyright © Infineon Technologies AG 2016. All rights reserved. 5 BTI and HCI Impact on Device Behavior I NMOS Hot Carrier Injection (HCI) Effect • Emax at drain corner causes hot carrier generation • Hot carriers cause Isub, Igate and oxide damages S G Ig n+ n+ D n+ Impact Ionization P-well Oxide Damage Ibulk Parametric shift Increase of Vth Decrease of gm Increase of Ioff Decrease of Idsat 2016-03-18 Copyright © Infineon Technologies AG 2016. All rights reserved. 6 BTI and HCI Impact on Device Behavior II Negative Bias Temperature Instability (NBTI) Effect Positive Bias Temperature Instability (PBTI) Effect • Hydrogen-silicon bond (Si-H) is broken • Hydrogen is trapped into the oxide interface trap S n+ p+ G D p+ Degradation f(T,VGS) Parametric shift Increase of Vth Decrease of gm n-sub Increase of Ioff Decrease of Idsat 2016-03-18 Copyright © Infineon Technologies AG 2016. All rights reserved. 7 Agenda 1 Motivation 2 BTI and HCI Impact on Device Behavior 3 Aging Model Integration Challenges 4 Aging Time Scales 5 Long-term vs. Short-term Effects 6 Variation Handling 7 Stress Scenarios 8 Worst-case Challenges 2016-03-18 Copyright © Infineon Technologies AG 2016. All rights reserved. 8 T’IF Device Models Product Spec PDK Design Package 2016-03-18 Setup Design Step 1 Design Flow Design Step 2 Design Step … Design Step N Copyright © Infineon Technologies AG 2016. All rights reserved. Automation Product Requ’mts Design Flow Foundry REL Aging Models Design Manual Design Group T’DEV Analog Circuit Level Simulation: Aging Model Integration Challenges Data 1 Data 2 Data … Data N 9 Agenda 1 Motivation 2 BTI and HCI Impact on Device Behavior 3 Aging Model Integration Challenges 4 Aging Time Scales 5 Long-term vs. Short-term Effects 6 Variation Handling 7 Stress Scenarios 8 Worst-case Challenges 2016-03-18 Copyright © Infineon Technologies AG 2016. All rights reserved. 10 Aging Time Scales (1) electrical circuit functional time scale 𝜇𝑠 to m𝑠 (2) product lifetime 2-15y (1a ~ 3∙10 7 𝑠) (3) BTI recovery time scales [*] (1) several decades to bridge Spice Simulation (3) (2) Long Term Aging [*] B. Kaczer, S. Mahato, V. Camargo, M. Toledano-Luque, P. J. Roussel, F. Catthoor, T. Grasser, P. Dobrovolny, P. Zuber, G. Wirth, and G. Groeseneken, Atomistic approach to variability of bias-temperature instability in circuit simulations in Proc. IRPS, 2011, pp. 915–919. 2016-03-18 Copyright © Infineon Technologies AG 2016. All rights reserved. 11 Repetitive Stress Pattern I I simple stress pattern … t (2) (1) I … t 2016-03-18 Copyright © Infineon Technologies AG 2016. All rights reserved. 12 Aging Model – BTI Recovery Handling Compact model for NBTI degradation [1]: τk,capture N C defect database fk(T,VGS) τk,emission › Suitable for arbitrary periodic analog or logic-signal stress voltages › Includes NBTI recovery, the crucial feature missing in existing models › Exact and numerically efficient extrapolation from SPICE simulation times to large operation times › Appropriate for coupling to electric circuit simulator [1] K. Giering, G. Rott, G. Rzepa, A. Puppala, T. Reich, W. Gustin, T. Grasser, R. Jancke, Analog-circuit NBTI degradation and time-dependent NBTI variability: An efficient physics-based compact model, accepted for IRPS 2016. 2016-03-18 Copyright © Infineon Technologies AG 2016. All rights reserved. 13 Aging Simulation Phases Distinguish three different simulation phases (Spice runs): (F) Fresh Simulation Phase (S) Stress Phase (A) Aged Simulation Phase reference performances stress collection based on scenarios degraded performances, aging impact analyses Sequence: (F) Fresh Simulation Phase → (S) Stress Phase → (A) Aged Simulation Phase (F) I Spice Simulation (S) (A) 2016-03-18 stress extrapolation Long Term Aging parameter degradation Copyright © Infineon Technologies AG 2016. All rights reserved. 14 Agenda 1 Motivation 2 BTI and HCI Impact on Device Behavior 3 Aging Model Integration Challenges 4 Aging Time Scales 5 Long-term vs. Short-term Effects 6 Variation Handling 7 Stress Scenarios 8 Worst-case Challenges 2016-03-18 Copyright © Infineon Technologies AG 2016. All rights reserved. 15 Long-term vs. Short-term Effects I (F) Fresh Simulation Phase (S) Iterated Stress Phase (A) Aged Simulation Phase reference performances stress collection needs to cover slow operating point drifts degraded performances, aging impact analyses Problem: major impact on aging simulation runtime (F) I iteration of (S) … I Simulation Spice I (S) I (S) (S) (S) (A) 2016-03-18 1y 1y … 1y 1y Long Term Aging parameter degradation Copyright © Infineon Technologies AG 2016. All rights reserved. 16 Long-term vs. Short-term Effects II Short-term aging would require a direct coupling of electrical and aging effects and simulation on the same time-scale. (F+S+A) Combined Simulation Phase fast operating point drifts covered by simultaneous simulation Problems: setup of combined stress and verification patterns investigation of circuits pre-aged on intermediate time scales (F+S+A) Spice Simulation Short Term Aging 2016-03-18 Not covered by current EDA approaches! Copyright © Infineon Technologies AG 2016. All rights reserved. Long Term Aging 17 Agenda 1 Motivation 2 BTI and HCI Impact on Device Behavior 3 Aging Model Integration Challenges 4 Aging Time Scales 5 Long-term vs. Short-term Effects 6 Variation Handling 7 Stress Scenarios 8 Worst-case Challenges 2016-03-18 Copyright © Infineon Technologies AG 2016. All rights reserved. 18 Variation Handling: Default Static Spice Models USL Upper Spec Limit LSL Lower Spec Limit Modelled Device Parameter Measured 2016-03-18 Copyright © Infineon Technologies AG 2016. All rights reserved. 19 Aging Models Nominal Aging Models Statistical T’IF REL Variation Handling: Static vs. Dynamic Approaches Device Models Nominal Device Models Statistical Uncontrolled Drift Limits Controlled Limits Dynamically Generated Static Characterization Sample specific Characterization Long-term Average [1] H. Kukner, P. Weckx, J. Franco, M. Toledano Luque, M. Cho, B. Kaczer, P. Raghavan, D. Jang, K. Miyaguchi, M. Garcia Bardon, F. Catthoor, L. Van der Perre, R. Lauwereins and G. Groeseneken, Scaling of BTI reliability in presence of Time-zero Variability – Pathfinding from planar FET to advanced 3-D FinFET nodes in Proc. IRPS, 2014. [2] B. Kaczer, M. Toledano-Luque, J. Franco, P. Weckx, Statistical Distribution of Defect Parameters in Bias Temperature Instability for Devices and Circuits, Editors: Tibor Grasser, 2014. 2016-03-18 Copyright © Infineon Technologies AG 2016. All rights reserved. 20 Variation Handling: Aging Model Impact Device Models 1) Nominal ensemble average of dopants 2) Statistical variations covered by distributions of selected parameters Aging Models 1) Nominal (current EDA solutions, except for BTI recovery) ensemble average of generated traps 2) Statistical (current research [1-3]) time-dependent statistical Markov process for trap kinetics → large additional characterization efforts (defect databases) → huge impact on simulation runtime due to small trap time constants (except for [3]) → combination with default statistical methods unclear (nested Monte Carlo loops increase # of sim.) → enhanced design methods (yield optimization) not usable any more [1] B. Kaczer, S. Mahato, V. Valduga de Almeida Camargo, M. Toledano-Luque, Ph. J. Roussel, T. Grasser, F. Catthoor, P. Dobrovolny, P. Zuber, G. Wirth, G. Groeseneken, Atomistic approach to variability of bias-temperature instability in circuit simulations in Proc. IRPS, 2011. [2] H. Habal, H, Graeb, A Step-Accurate Model for the Trapping and Release of Charge Carriers Suitable for the Transient Simulation of Analog Circuits, Journal of Microelectronics Reliability, 2016. [3] K. Giering, G. Rott, G. Rzepa, A. Puppala, T. Reich, W. Gustin, T. Grasser, R. Jancke, Analog-circuit NBTI degradation and time-dependent NBTI variability: An efficient physics-based compact model, accepted for IRPS 2016. 2016-03-18 Copyright © Infineon Technologies AG 2016. All rights reserved. 21 Agenda 1 Motivation 2 BTI and HCI Impact on Device Behavior 3 Aging Model Integration Challenges 4 Aging Time Scales 5 Long-term vs. Short-term Effects 6 Variation Handling 7 Stress Scenarios 8 Worst-case Challenges 2016-03-18 Copyright © Infineon Technologies AG 2016. All rights reserved. 22 Hierarchical Stress Scenario IDS Electrical Device Stress during Operation t Operating Modes Important! 2016-03-18 Copyright © Infineon Technologies AG 2016. All rights reserved. 23 Repetitive Stress Pattern II I complex stress pattern … t (2) (1) I Spice Simulation ??? t 2016-03-18 Copyright © Infineon Technologies AG 2016. All rights reserved. 24 Worst-Case/Realistic Stress Conditions Main Impact Factors Aging Model Dependencies (VDS, VGS, Temperature) Analog Circuit Modes (Circuit Duty Cycles, Sleep Modes, Start-up Phase) Temperature Implications local temperature increase mixed temperature stress profiles worst-case temperature condition for single device dependent on aging effect (BTI, HCI) and device type, but circuit contains always a mixture Stress Scenario Discussion (open) worst-case vs. realistic stress pattern suppression of start-up simulation phases handling of complex multi-circuit mode stress pattern (stress stitching concepts?) mission profile propagation over design hierarchy (circuit-mode pre-characterization?) 2016-03-18 Copyright © Infineon Technologies AG 2016. All rights reserved. 25 Agenda 1 Motivation 2 BTI and HCI Impact on Device Behavior 3 Aging Model Integration Challenges 4 Aging Time Scales 5 Long-term vs. Short-term Effects 6 Variation Handling 7 Stress Scenarios 8 Worst-case Challenges 2016-03-18 Copyright © Infineon Technologies AG 2016. All rights reserved. 26 Worst-case Challenges 2016-03-18 Copyright © Infineon Technologies AG 2016. All rights reserved. 27 Performance Impact? 2016-03-18 Copyright © Infineon Technologies AG 2016. All rights reserved. 28 Worst-case Limits for Aging Population? 2016-03-18 Copyright © Infineon Technologies AG 2016. All rights reserved. 29 Critical Stress Conditions? 2016-03-18 Copyright © Infineon Technologies AG 2016. All rights reserved. 30 Acknowledgments Big thanks to all MoRV project partners for the excellent collaboration! › TU Vienna Team – Gerhard Rzepa, Tibor Grasser, … › IMEC Team – Ben Kaczer, Pieter Weckx, … › Fraunhofer IIS/EAS Dresden Team – Kay-Uwe Giering, Christoph Sohrmann, Roland Jancke › PJM MoRV (Offis) – Domenik Helms, … › Infineon Team – Gunnar Rott, Wolfgang Gustin, Hans Reisinger, Katja Puschkarsky, … This project has received funding from the European Union’s Seventh Framework Program for research, technological development and demonstration under grant agreement no. 619234 (MoRV). 2016-03-18 Copyright © Infineon Technologies AG 2016. All rights reserved. 31