Lec. 2: Subthreshold FET behavior 1-Oct-11 MOS transistors (in subthreshold) History of the Transistor The term “transistor” is a generic name for a solid-state device with 3 or more terminals. The field-effect transistor structure was first described in a patent by J. Lilienfeld in the 1930s! It took about 40 years before MOS transistors were in mass production. • • • • • • • • History of MOSFET Review of Semiconductors What is a MOSFET? CMOS? How physics of transistors and voltage‐sensitive nerve membrane channels are related MOS capacitor structure Surface: accumulation, depletion, inversion Capacitive dividers: The back‐gate/body effect parameter kappa MOS transistor in subthreshold Cross‐section of a complementary pair of Field‐Effect Transistor (FET) The first transistor (point-contact bipolar) fabricated at Bell Labs in 1947 (Bardeen, Brattain, Shockley). MOS transistors were not commericalized until mid 1970’s. Top and Side Views of Field‐Effect Transistor (FET) Top Gate oxide Field oxide source|drain gate p+ p+ n well source|drain n+ W n+ L Side p- substrate n+ pFET nFET End n+ p- substrate TOX Gate oxide FOX Field Oxide hole carriers nFET terminology Symbols for transistors pn junction & source pn junction and source p+ p+ n well pFET NE1: avlsi.ini.uzh.ch/classwiki n+ p- Gate Putting positive charge here attracts electrons Vd Vg n+ substrate nFET Drain (of electrons) At higher voltage Source (of electrons) At lower voltage Vs 1 Lec. 2: Subthreshold FET behavior 1-Oct-11 pFET terminology Gate Putting negative charge here attracts holes Vs Source (of holes) At higher voltage The built‐in potentials in the pn junctions create an energy barrier. Controlling the barrier height controls the diffusion current. n+ Vg Vd Vg n+ Vd n+ Ec Drain (of holes) At lower voltage Vs p- Ev Vs Small Vgs, Vds=0 Vg Vd ++++ n+ n+ Larger Vgs, Vds=0 n+ Energy Energy p- Source Vs Vg ++++ Drain Larger Vgs, Large Vds Vd ++++ n+ Source Channel Drain Measuring voltage‐dependent nerve membrane currents Energy n+ Channel Source Channel NE1: avlsi.ini.uzh.ch/classwiki Drain Hodgkin & Huxley 1952 2 Lec. 2: Subthreshold FET behavior 1-Oct-11 Comparing transistor and membrane channel currents Transistor 40mV/e-fold Neuron channels and Transistors Both depend on Boltzmann distributions. Neurons Transistors • Membrane ionic conductance is exponentially dependent on the voltage across the neuron membrane. • The population of open channels depends exponentially on potential across barrier. • Current flow in transistors is exponentially dependent on barrier height. • The population of carriers depends exponentially on the barrier height. n‐type MOSFET Bulk (back gate) source Vb Vs p+ n+ gate drain Vg Vd s Regimes of operation for FET (dependent on Vgs) V s 0V •Cutoff - Surface is accumulated V g ,Vd Vs •Subthreshold (Weak Inversion) Regime Depletion region n+ p- Current flows through diffusion •Above threshold (Strong Inversion) Regime All voltages are referenced to Vb = 0V nFet curve: I vs. Vgs Current flows through drift Subthreshold nFET: Current is diffusion current Vs Vg Vd n+ z p- n+ Ec I qD dN dz N=carrier density D=diffusion constant Current Diffusion constant NE1: avlsi.ini.uzh.ch/classwiki Concentration gradient 3 Lec. 2: Subthreshold FET behavior 1-Oct-11 Subthreshold nFET: Current is diffusion current Vs s (surface potential) Vg Vd z n+ n+ N s N o e s /UT N d N o e d / UT p- Ec s I qWDn dN N s N d dz L d 0 q( s Vd ) dN I 0 e s / UT (e Vd / UT e Vs / UT ) dz Fwd Rev N=carrier density per unit volume W=channel width L=channel length D=diffusion constant =built-in voltage How is the surface potential related to the gate voltage? We need to understand effect of gate on surface potential Gate oxide Field oxide gate p+ p+ dN I 0 e s / UT (e Vd / UT e Vs / UT ) dz d s 0 q( s Vs ) I qWDn We have equation for subthreshold current, but we don’t directly control the surface potential n well source drain n+ n+ MOS capacitor structure Vg Polysilicon or metal gate Gate oxide p- substrate p-substrate pFET nFET Mobile Hole MOS capacitor structure: accumulation Mobile electron Vg<0 MOS capacitor structure: flat band Vg=Vfb~0 This is called accumulation – the surface is accumulated with majority carriers; it is made more p-type Flat band – majority carrier density is constant and equal to dopant density p-substrate NE1: avlsi.ini.uzh.ch/classwiki 4 Lec. 2: Subthreshold FET behavior 1-Oct-11 MOS capacitor structure: depletion 0<Vg<VT Fixed ion MOS capacitor structure: inversion Vg>VT VT=Threshold voltage Depletion •Majority carriers pushed away •Fixed ions end gate charge field lines •Depletion region|space charge region formed p-substrate Inversion p-substrate Influence of gate on surface potential What is a depletion capacitor? Conductor Insulator Surface Depletion region C dQ dV Insulator Possible inversion region Depletion region C Cox Cdep ( kappa) Vg Gate‐depletion capacitive divider Cox s Cdep ++++ ---- s Cox Vg Cox Cdep s Cdep = Surface potential s Surface potential as function of Vg inversion- surface potential is pinned How does changing Vg change s? ++++ ---Q Cox p- p- Vg Vg Conductor gate gate •Mobile electrons are induced at the surface •Surface is inverted – it becomes n-type •Threshold is when mobile charge density equals doping density 1. CV=Q 2. Charge Q on s is constant 3. Change V, hold Q constant Cox (Vg s ) Cdep s s depletion Cox Vg (Cox Cdep ) s s Cox Vg Cox Cdep NE1: avlsi.ini.uzh.ch/classwiki Slope= Vg 5 Lec. 2: Subthreshold FET behavior 1-Oct-11 nFET curve: I vs Vgs Equations for Subthreshold nFET Vg Vs Vd If I I 0e V g / U T I f Ir I f I 0e Ir (e Vs / U T e Vd / U T ) I f forward current I r reverse current Vg / U T V g / U T I r I 0e e Vs / U T Slope = /UT e Vd / UT I0 Regimes of Subthreshold Operation (dependence on Vds) nFet Threshold Threshold current Triode/Linear Region I I 0e Ids=0.5*(extrapolated value) I I f I 0e nFET subthreshold Operation V in units of UT (Vg Vs ) / U T nFET drain curve: I vs Vds Ohmic region Triode/Linear Region Vg Vs (1 e (Vd Vs ) / UT ) Saturation Region Threshold Voltage (VT): I I 0e ( Vg Vs ) / U T (1 eVd s ) Saturation region Saturation Region, Vds> a few UT Vg Vs I I f I0e 4kT 100mV q NE1: avlsi.ini.uzh.ch/classwiki 6 Lec. 2: Subthreshold FET behavior 1-Oct-11 What about the pre‐exponential I0? I I f I 0e Band Diagram for subthreshold nFET (Vg Vs ) / U T n+ n+ p+ • I0 comes from the built‐in barrier and the doping concentrations. It takes the form VT I 0 N sU T T exp U T Dimensionless source concentration Linear regime 2 UT : diffusivity Vds 100 mV Saturation regime Drain density is zero UT : factor for density of states Vds 100 mV Concentration at source reduced by barrier p‐type MOSFET well (back gate) source Vw Vs n+ Band Diagram for subthreshold pFET gate drain Vg p+ Vd p+ p+ n+ V g , Vd , V s V w Linear regime Vs Vd p+ n Vds 100 mV p- Saturation regime All voltages are referenced to Vw = Vdd Vds 100 mV Equations for Subthreshold pFET pFET subthreshold Operation V in units of UT Vg Vs Vd If I I 0e Vg / U T Triode/Linear Region Ir (eVs / U T eVd / U T ) I f Ir I I 0e I f forward current I r reverse current Vg Vs (1 e Vd s ) Saturation Region, Vds> a few UT I I f I 0e I f I 0e Vg / U T eVs / U T NE1: avlsi.ini.uzh.ch/classwiki I r I 0e V g / U T Vg Vs eVd / U T 7 Lec. 2: Subthreshold FET behavior 1-Oct-11 nFET functional behavior pFET functional behavior Current sink Source conductance Vs Vd Transconductance Transconductance Vg Vs Source conductance Reference potential Vg Vd Current source THE END Next week: What is the transistor threshold? Above threshold operation. Drain conductance-Early effect NE1: avlsi.ini.uzh.ch/classwiki 8