Power Semiconductor Device Testing
Solutions Guide
A Tektronix Company
2
www.tek.com
A Tektronix Company
High Power Semiconductor
Device Testing and Characterization
Choosing the Optimal Solution Throughout the Device Lifecycle
From its early stages of device and process design through application development, a power
semiconductor device endures a variety of characterization and testing. And, engineers must be
able to configure the most appropriate solution to accomplish the particular requirements in each
stage. Adding to this challenge, the best solution may sometimes need
Device and
to be upgraded or enhanced throughout the life of the device.
Process Desig
A
De ppli
ve ca
lo
p
n
atio
riz
te
ac
L I F E C YC L E
duc
Test tion
E n d Use
D e sig ns
POWE R S E MI DE V ICE
Pr o
This selection guide can help you choose the ideal instrument
or system for efficient, flexible test and characterization across
the entire power semiconductor device life cycle.
n C
ha
r
ns t
tio en
m
F
A n a il u r
a ly e
s is
R e li a
b i li
ty
www.keithley.com
1
2460 Interactive High Current SourceMeter® SMU Instrument
A New Intuitive Experience in High Current,
High Power DC Source Measure Testing
Learn Faster; Work Smarter; Invent Easier.
• Icon menu system eliminates complex, multi-layer menu structures.
• Change ranges and source values with a simple touch on the display.
• Full charting with “pinch and zoom,” data display and data
exportation for immediate analysis.
• The 2460 SMU Instrument couples a highly flexible, four-quadrant voltage and current source/load with precision voltage and current meters.
• With 7A DC and pulse current capability, the 2460 SMU Instrument is
optimized for characterizing and testing a wide range of high
power materials, devices and modules.
• Typical Power Applications: Power Semiconductor and Materials;
Power Devices; LEDs/Lighting; Electrochemistry; Energy Generation
and Efficient Energy Consumption.
2
www.tek.com
+7A
+5A
+4A
Quadrant II
– Sink
Quadrant I
+ Source
Quadrant III
– Source
Quadrant IV
+ Sink
+1A
0A
–1A
–4A
–5A
–7A
–100V
–20V
–10V
0V
DC or Pulsed
2460 Power Envelope
+10V +20V
+100V
A Tektronix Company
Benchtop Power Device Characterization Solutions
From Basic Curve Tracing to On-State/Off-State Testing
All power semiconductor devices require thorough characterization, from simple two-terminal devices such as resistors,
capacitors and diodes to three-terminal and four-terminal devices such as MOSFETs, BJTs and IGBTs. A source measure
unit (SMU) instrument, such as a Keithley SourceMeter ® SMU instrument, is the most versatile instrument for characterizing
power semiconductor devices. From simple, basic curve tracing to detailed on-state and off-state testing, a SourceMeter
SMU instrument is the fundamental building block for DC characterization of power semiconductor devices.
This selector table compares the power levels, connection schemes, communications interfaces, and programming
and software available from the various Keithley SMU instruments. Many even feature TSP-Link® expansion technology,
a master interface that enables combining up to 32 or even 64 SourceMeter SMU instruments for multi-channel parallel
testing without a mainframe.
2460
DC Current
Max/Min
2430
2410
2636B
2651A
2657A
2290-5
2290-10
20A/1pA or 40A in
parallel
120mA/1fA
5mA/1µA
1mA/1µA
5000V/50V
10,000/100V
7A/1pA
3A/100pA
1A/10pA
1.5A/0.1fA or 3.0A in
parallel
7A
10.5A
1A
10A or 20A in parallel
50A or 100A in parallel
120mA/1fA
100V/100nV
200V/1µV
1000V/1µV
200V/100nV
40V/1µV
3000/100µV
Max Power
105W
1100W
22W
200W
2000W
180W
25W
10W
Connectors
Banana, 8 pin
mass terminated
Banana
Banana
Triax
2 pin and 8 pin mass
terminated
High Voltage Triax
5KV SHV
Coax
10KV SHV
Coax
Communications
GPIB, USB,
Ethernet, Digital
I/O,TSP-Link
GPIB, RS232,
Digital I/O,
Trigger Link
GPIB, RS232,
Digital I/O,
Trigger Link
GPIB, USB, RS232,
Ethernet, Digital I/O,
TSP-LINK
GPIB, USB, RS232,
Ethernet, Digital I/O,
TSP-LINK
GPIB, USB, RS232,
Ethernet, Digital I/O,
TSP-LINK
GPIB
GPIB,
RS-232
TSP, SCPI,
IVI Drivers
SCPI,
IVI Drivers
SCPI, IVI
Drivers
TSP, IVI Drivers
TSP, IVI Drivers
TSP, IVI Drivers
SCPI,
IVI Drivers
SCPI,
IVI Drivers
KickStart, TS
Builder, LabView
ACS, ACS
Basic,
LabView
ACS, ACS
Basic,
LabView
Ivy, ACS, ACS Basic,
TSP Express, TS
Builder, LabView
ACS, ACS Basic, TSP
Express, TS Builder,
LabView
ACS, ACS Basic,
TSP Express, TS
Builder, LabView
ACS,
ACS Basic,
LabView
ACS,
ACS Basic,
LabView
8020
Contact
Keithey
Contact
Keithey
8020
8020
8020
Contact
Keithey
Contact
Keithey
Pulse Current
Voltage Max/Min
Programming
Software
Probe Station
Interface
Contact Keithley for configuration assistance or to learn more about product selection.
www.keithley.com
3
2600-PCT-4B Parametric Curve Tracer connected
through the 8020 High Power Interface Panel to
the Signatone 3kV/100A Wafer Probe Station
Complete Power Device Characterization Systems
Engineered for Optimum Performance and Price
Keithley Parametric Curve Tracers (PCT) support a broad range of device characterization tasks, including:
• Device and Process Design
3kV
•Modeling
• Reliability Testing
• Power Device Applications Development
• Failure Analysis
• Production Test
200V SMU
200V SMU
Based on Keithley’s family of high power SourceMeter
200V SMU
SMU instruments, PCTs support up to 3kV for off-state
test and 100A for on-state test. Optionally, multi-frequency
50A SMU
capacitance vs. voltage (C-V) testing capability is available
for any PCT configuration. PCTs are engineered to provide a
Model 8020 High Power
Interface Panel
Manages
• Series resistors
• High voltage bias tees
• Overvoltage protection
• Cabling differences
b etween measurements
• Connector interface
to p robe stations and
fixtures
50A SMU
comprehensive solution, so they include all the instruments
required, as well as specialized interconnects and cables,
CVU
safe test fixtures, probe station interfaces, and powerful
software, to support test development, data acquisition, graphing, and data analysis. Sample libraries are
provided for all common device types, including resistors, capacitors, diodes, bipolar transistors,
MOSFETS, IGBTs and many other devices. More than 400 test libraries are included, as well as software tools to develop fully customized tests quickly in a variety of ways.
8020 High Power
Interface Panel
4
www.tek.com
Keithley’s Parametric Curve Tracer configurations
support both package part and wafer level testing.
A Tektronix Company
WAFER LEVEL CHARACTERIZATION
8020 High Power
Interface Panel
Prober
Wafer
Probe Chuck
PROBE STATION
PCT CONFIGURATION
2600-PCT-4B
RESULTS
8010 High Power
Device Test Fixture
PACKAGED PARTS CHARACTERIZATION
Parametric Curve Tracer Configurations
Complete Test Development, Data Acquisition, Graphing, and Data Analysis
Collector/Drain Supply
Model
High Voltage Mode
High Current Mode
Step Generator
Base/Gate Supply
AuxilliarySupply
Low Power
2600-PCT-1B
200V/10A
200V/10A
200V/10A
NA
High Current
2600-PCT-2B
200V/10A
40V/50A
200V/10A
200V/10A
High Voltage
2600-PCT-3B
3KV/120mA
200V/10A
200V/10A
200V/10A
High Current and
High Voltage
2600-PCT-4B
3KV/120mA
40V/50A
200V/10A
200V/10A
Capacitance-Voltage
Option
PCT-CVU
Add C-V to any PCT. Can be used with either the 8020 (requires 8020-CVU option) or the 8010
(requires CVU-3K-KIT or CVU-200-KIT).
1. Contact your Keithley field applications engineer for custom configurations. 2. Add one 2651A to increase high current mode to 50A or two 2651As for 100A.
3. PCT-CVU Multi-Frequency Capacitance Meter can be added to any configuration.
8010 High Power Device Test Fixture — Safe
and easy connections for testing packaged high
power devices up to 3000V or 100A.
8020 High Power Interface Panel — Safe and easy
connections from the PCT to most legacy and new
probe stations.
• The full range of PCT measurements can be realized from pA to 100A, µV to 3000V, and high voltage
capacitance-voltage (C-V) from pF to nF.
• Achieve a full range of PCT measurements from pA to
100A, µV to 3000V, and high voltage C-V from pF to nF.
• Choose from a variety of sockets, including a Tektronix
Curve Tracer Socket Adaptor that is compatible with
nearly every seven-pin curve tracer socket.
•
• Complete interlock and protection modules capability
for high performance and safety.
• Unique four-terminal C-Vcapability gives the most accurate C ISS, C OSS, and C RSS results available.
• Unique access port provides access for oscilloscope,
thermal, and other probes.
• 8020 High Power Interface Panel compatibility allows converting easily from packaged part testing to wafer probing.
Choose from a variety of connectors to configure the
8020 for nearly any probe type, including Keithley high voltage triax, Keysight high voltage triax, and safe high voltage (SHV) coax.
• Compatible with 8010 High Power Device Test Fixture to
convert easily from wafer probing to packaged part testing.
• Compatible probe stations include Signatone, Cascade
Microtech, Wentworth, Vector, and more.
www.keithley.com
5
Semiconductor Parametric Test Systems
Pre-Stress
Characterization
Fail?
Yes
Stop
No
Record
Data
Stress
Fail?
Typical Wafer Level
Reliability Test Flow
Yes
No
Increase
Stress
Time
Interim
Record
Data
Fail/
Exit?
S530 Semiconductor Parametric Test Systems are engineered to handle the DC and C-V measurements required in
process control monitoring, process reliability monitoring, and device characterization. These parametric test systems
are used in production and lab environments that entail a broad range of devices and technologies. For specialized
applications, S500 Integrated Test Systems offer semi-custom configurability and can be built to accommodate from
small to large numbers of devices.
Model
Wiring & Pin Count
SMU Channels
Max Voltage
Max Current
S530 Low Current Parametric
Test System
Up to 60 pins
(4-wire or “Kelvin”)
2 to 8
200V (2636B SMU)
1A
S530 High Voltage
Parametric Test System
Up to 24 pins
(4-wire or “Kelvin”)
3 to 7
1100V (2410 SMU), 200V (2636B
SMU)
1A
Up to 60 pins with switch (2-wire), or
32 pins (direct wiring from SMU)
1 to 8 with switch, or
1 to 32 without switch
1100V with 7072-HV switch, or Max
voltage of SMU with no switch
1A with switch, or Max current
of SMU with no switch
S500 Integrated Test System
Contact Keithley for configuration assistance or to learn more about product selection.
6
www.tek.com
A Tektronix Company
Resources for You
Learn more about choosing the appropriate power semiconductor device testing solution from this special
collection of reference material from our on-line library.
e-Guide: Testing High Power Semiconductor Devices from Inception to Market
This e-Guide examines the life cycle of a power semiconductor device
and the tremendous variety of test and characterization activities and
measurements challenges that engineers face in each stage
throughout the cycle.
YouTube Video: High Power Connection Dilemma
Watch this short, introductory video to learn how
easy it can be to avoid the complications associated
with interconnecting high power test equipment to
a wafer probe station using the 8020 High Power
Interface Panel.
Application Note: Solving Connection Challenges
in On-Wafer Power Semiconductor Device Testing. Get details from this application
note on how to minimize connection changes and user errors when performing
comprehensive DC I-V and C-V testing of power semiconductor devices.
Webinar: Simple and Accurate Power Semiconductor Device Design
Validation This webinar demonstrates how to select and configure elements
of your test setup to minimize connection changes and protect your
instrumentation investment while producing high quality measurements.
Visit www.keithley.com/products to access additional
resources for high power semiconductor device testing,
including application notes, customer testimonial videos, data sheets, how-to videos,
on-line demos, white papers, and more.
Contact Keithley for configuration assistance or to learn more about product selection.
www.keithley.com
7
Contact Tektronix and Keithley
ASEAN / Australia (65) 6356 3900
Austria 00800 2255 4835
Balkans, Israel, South Africa and other ISE Countries +41 52 675 3777
Belgium 00800 2255 4835
Brazil +55 (11) 3759 7627
Canada 1 800 833 9200
Central East Europe and the Baltics +41 52 675 3777
Central Europe & Greece +41 52 675 3777
Denmark +45 80 88 1401
Finland +41 52 675 3777
France 00800 2255 4835
Germany 00800 2255 4835
Hong Kong 400 820 5835
India 000 800 650 1835
Italy 00800 2255 4835
Japan 81 (3) 6714 3010
Luxembourg +41 52 675 3777
Mexico, Central/South America & Caribbean 52 (55) 56 04 50 90
Middle East, Asia, and North Africa +41 52 675 3777
The Netherlands 00800 2255 4835
Norway 800 16098
People’s Republic of China 400 820 5835
Poland +41 52 675 3777
Portugal 80 08 12370
Republic of Korea 001 800 8255 2835
Russia & CIS +7 (495) 6647564
South Africa +41 52 675 3777
Spain 00800 2255 4835
Sweden 00800 2255 4835
Switzerland 00800 2255 4835
Taiwan 886 (2) 2656 6688
United Kingdom & Ireland 00800 2255 4835
USA 1 800 833 9200
R.0415
For Further Information
Tektronix and Keithley maintain a comprehensive, constantly expanding collection
of application notes, technical briefs and other resources to help engineers
working on the cutting edge of technology. Please visit www.tektronix.com and
www.keithley.com.
Copyright © 2015, Tektronix. All rights reserved. Tektronix products are
covered by U.S. and foreign patents, issued and pending. Information in this
publication supersedes that in all previously published material. Specification
and price change privileges reserved. TEKTRONIX and TEK are registered
trademarks of Tektronix, Inc. All other trade names referenced are the service
marks, trademarks or registered trademarks of their respective companies.
07/15 KI
1KW-60183-0
A Tektronix Company