40 IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES, VOL. 54, NO. 1, JANUARY 2006 Development of Multiband Phase Shifters in 180-nm RF CMOS Technology With Active Loss Compensation Chao Lu, Student Member, IEEE, Anh-Vu H. Pham, Senior Member, IEEE, and Darrell Livezey Abstract—We present the design and development of a novel integrated multiband phase shifter that has an embedded distributed amplifier for loss compensation in 0.18- m RF CMOS technology. The phase shifter achieves a measured 180 phase tuning range in a 2.4-GHz band and a measured 360 phase tuning range in both 3.5- and 5.8-GHz bands. The gain in the 2.4-GHz band varies from 0.14 to 6.6 dB during phase tuning. The insertion loss varies from 3.7 dB to 5.4-dB gain and 4.5 dB to 2.1-dB gain in the 3.5- and 5.8-GHz bands, respectively. The gain variation can be calibrated by adaptively tuning the bias condition of the embedded amplifier to yield a flat gain during phase tuning. The return loss is less than 10 dB at all conditions. The chip size is 1200 m 2300 m including pads. Index Terms—CMOS analog integrated circuits distributed amplifiers, phase shifters, phased arrays. (ICs), I. INTRODUCTION M ULTIPLE input and multiple output (MIMO) transceivers have recently gained attention for the development of broad-band wireless applications. As a special case of MIMO, adaptive phased-array antennas can effectively combat co-channel interferences and deal with multipath fading [1]. By controlling the time delay and gain of the signal in each antenna independently, phased-array antennas can form beams and nulls in desired directions. This kind of beamforming improves antenna gain to yield higher signal-to-noise ratio and provides spatial diversity for higher data rate transmission. RF phase shifters are key elements of analog phased-array antennas and have been mostly implemented in GaAs integrated circuits (ICs). Recently, Si-based RF phase shifters have emerged as a new platform for wireless integrated transceivers [2]–[5]. Both digital and analog phase shifters have been demonstrated in RF silicon ICs. A 6-bit digital phase shifter was reported in SiGe technology over a 7–11-GHz frequency band [2]. A dual-band 5.2/2.4-GHz 4-bit phase shifter designed by combining two single-band phase shifters was reported in [3]. Low- factor passive devices and a small tuning ratio of varactor capacitance (typically 2 4) in CMOS represent challenges in the implementation of multiband continuous phase Manuscript received April 22, 2005; revised August 30, 2005. This work was supported in part by UC MICRO, by Tahoe RF Semiconductor Inc., and by the National Science Foundation under Contract ECS-0401375. C. Lu and A.-V. H. Pham are with the Department of Electrical and Computer Engineering, University of California at Davis, Davis, CA 95616 USA (e-mail: cflu@ucdavis.edu; pham@ece.ucdavis.edu). D. Livezey is with Tahoe RF Semiconductors Inc., Auburn, CA 95602 USA (e-mail: dlivezey@tahoeRFsemiconductor.com). Digital Object Identifier 10.1109/TMTT.2005.860892 Fig. 1. Circuit topology of a multiband phase shifter with broad-band active loss compensation. shifters with low loss and large phase tuning ranges. A continuous phase shifter with a 105 phase tuning range at 2.4 GHz has recently been reported in 0.18- m CMOS technology [4]. A 360 phase shifter at 8 GHz consuming 170 mW of power was proposed in [5] by embedding a varactor-tuned LC ladder network between driving amplifiers. In this paper, we present the development of a multiband RF CMOS phase shifter that employs a distributed amplifier for loss compensation since the conventional loss compensation methods, such as negative resistance [4], become ineffective for broad-band and multiband applications. In this phase shifter, two varactor-tuned LC networks have been designed to provide both phase shifting and broad-band impedance matching. The impedance-matching networks allow the distributed amplifier to have high input and output impedance for the reduction of power consumption. The distributed amplifier compensates loss from 2.4 to 6 GHz and provides the calibration of gain variation. The phase shifter achieves a measured continuous 180 and 360 phase tuning at 2.4- and 3.5/5.8-GHz bands, respectively. The gain is as high as 6.6 dB without calibration and the return loss is less than 10 dB from 2.4 to 6 GHz. The phase shifter requires only one phase control bias and, therefore, one digital-to-analog converter (DAC). To the best of our knowledge, this is the first multiband continuous phase shifter reported in RF CMOS. Section II describes the architecture of the proposed embedded amplifier topology. The detailed analysis of distributed amplifiers and phase transmission functions are presented. Section III describes the prototype implementation and measurements of the multiband phase shifter. II. PHASE-SHIFTER CIRCUIT TOPOLOGY Fig. 1 illustrates the multiband phase shifter that has a distributed amplifier for broad-band loss compensation. The proposed topology in this design yields significant loss compensation with less power consumption by increasing the characteristic impedance of gate and drain lines of the distributed amplifier to be above 50 . Varactor-tuned LC networks are employed 0018-9480/$20.00 © 2006 IEEE LU et al.: DEVELOPMENT OF MULTIBAND PHASE SHIFTERS IN 180-nm RF CMOS TECHNOLOGY 41 Fig. 2. Cascaded single-stage distributed amplifier. to achieve a compact chip size and to provide broad-band 50matching and phase tuning. Though the internal characteristic , the input impedance of the distributed amplifier is and output impedances of the whole phase-shifter circuit are maintained to be around 50 during phase tuning. A. Distributed Amplifiers In distributed amplifiers, gain stages are connected so that output currents are combined coherently while their capacitances are synthesized in parallel to form artificial transmission lines, namely, gate and drain lines. The artificial transmission-line topology gives distributed amplifiers a wide bandwidth. Due to its gain advantage over conventional distributed amplifiers, a cascaded single-stage distributed amplifier [6]–[8] is employed in this design. When the operation frequency is far below the cutoff frequency, the gain of a distributed amplifier with cascaded single stages is simplified as [6] Fig. 3. Schematic diagram of varactor-tuned LC network. B. Varactor-Tuned LC Network Fig. 3(a) shows a conventional varactor-loaded transmissionline phase shifter, where several lumped-element -sections are cascaded to implement an equivalent transmission line for the compact chip size. Similar to that in [9], the transmission phase of a single -section can be derived as (2) When tions is , the transmission phase of -sec- (1) (3) is the transconductance of each stage, and and where are the characteristic impedances of gate and drain artificial transmission lines, respectively. To enhance gain, the number of of each stage can be stages ( ) or the transconductance increased with a penalty of more power consumption. Furthermore, the gain can also be increased by designing high interstage impedances, but significantly sacrificing bandwidth [8]. Our strategy is to increase the characteristic impedances ( ) of gate and drain lines at the input and output of the amplifier to achieve high gain, while the inter-stage impedances are maintained at the intermediate level, i.e., 100 . If we define the , the power consumpimpedance transformation ratio tion of distributed amplifiers can be theoretically reduced by times for the same gain compared with for design. We have chosen for both and to balance power consumption and bandwidth. Fig. 2 shows a three-stage cascaded single-stage distributed amplifier where the gate/drain characteristic impedances are designed to and the gate/drain parasitic be equally 100 capacitances of transistors are adopted into the artificial transmission lines. The simulated results show that the distributed amplifier can yield 14–15-dB gain up to 8 GHz. The distributed amplifier draws maximum 25-mA current from 1.8-V power supply and, therefore, the maximum power consumption is 45 mW. where is the operation frequency. The group delay is then (4) This group delay is independent on frequency and is referred as a true time delay, and this delay can be adjusted by changing inductance or capacitance or both. Therefore, varactor-load transmission-line phase shifters are also suitable for broad-band applications [10]. For a given capacitance tuning ratio , which is defined to be , the relative phase shifting is controlled by varying the capacitance . The relative transmission phase tuning range is (5) We can see that the phase tuning range increases with the section number . For a typical silicon-based varactor, the capacitance tuning ratio is typically 2 4. To reach a symmetrical variation, we specify [11] (6) 42 IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES, VOL. 54, NO. 1, JANUARY 2006 Fig. 4. Peak Q frequency of spiral inductors and cutoff frequency of -sections in 180-nm RF CMOS technology. Assuming , we obtain (7) parameter variations resulting from device mismatching. Each varactor-tuned LC network in Fig. 1 is composed of the circuit shown in Fig. 3(b). The input varactor-tuned LC network , and the output one transforms transforms 50 to to 50 . These two varactor-tuned LC networks employ an identical architecture and can share one control voltage because of the symmetry. C. Hyperabrupt (HA) Varactor At these worst conditions, the return loss is calculated as dB Fig. 5. Tuning capacitance of MOS varactors and HA varactors at 3 GHz. (8) This indicates that the phase shifter can achieve a good impedance matching through the full phase tuning range. From (5), we can also see that the phase tuning range will increase as the inductance value increases in each section. However, a larger nominal capacitance value of varactors is required to maintain the characteristic impedance around and, therefore, the cutoff frequency of the -sections is degraded, as shown in Fig. 4. This figure also indicates the peak quality factor ( ) frequency of spiral inductors drops as the inductance increases. To alleviate the effect of parasitic capacitance related with spiral inductors and satisfy the condition of , we chose the inductance nH and, therefore, pF. At these conditions, pF pF. The desired phase tuning range can be and achieved by appropriately designing section number . The section number should be at least 20 to yield 360 phase tuning range at 3.5 GHz. One contribution of this study is to design a varactor-tuned LC network that provides both phase shifting and broad-band matching. To provide broad-band impedance matching, three-section Chebyshev impedance transformers [12] [see Fig. 3(b)] have been designed, and each section is composed of an equal “length” lumped varactor-loaded transmission line [see Fig. 3(a)]. Each section has a different characteristic impedance, i.e., 57.4, 70.7, and 87.1 , which are determined by Chebyshev polynomials. Since the frequency band of interest GHz in the design of multiis 2–6 GHz, we chose section Chebyshev transformers. The three-section Chebyshev transformer has 12 lumped -sections and, therefore, 12 inductors. All inductors are kept uniformly to be 1.0 nH, and all capacitors are comprised of the same unit varactor with different multipliers. Therefore, the circuit is insensitive to RF CMOS technology typically offers two options for varactor implementation: MOS accumulation varactors and HA junction varactors. The HA varactor utilizes a retrograde implant to modify a standard pn junction that results in a nonlinear n-type dopant across the depletion region. As the reverse bias is increased, the nonlinear doping profile causes a greater capacitance change in the HA junction diode and greatly enhances the tunability and linearity [13]. HA varactors have a larger tuning ratio and better capacitance–voltage (CV) linearity compared with MOS varactors, as shown in Fig. 5. The linear capacitance control property relaxes the resolution requirement on DACs. The tuning ratio of HA varactors is as high as 5 with the control voltage changing from 0 to 7 V. However, as the control voltage approaches at a high value, the linearity of capacitance versus control voltage is degraded. In this design, the control voltage from 0 to 4.5 V is chosen to result in a tuning ratio of 4. D. Gain Variation Calibration to yield difAs varactors are tuned and controlled by ferent phases, the quality factor of the varactors and the cutoff frequency of varactor-tuned LC networks will vary and cause changes in the insertion loss of the phase shifter. Generally, this kind of gain shift, as well as that resulting from temperature drifting needs to be calibrated in most applications [14], and the calibration is conventionally performed through a variable attenuator. Our proposed architecture provides an option for gain calibration by adaptively adjusting the bias condition of the embedded amplifier, as indicated by (1). For the operation frequencies far less than the cutoff frequency of the artificial gate and drain transmission lines, the transmission phase of the distributed amplifier is independent on the bias condition, as long as all transistors are maintained in the saturation region. Therefore, the gain (loss) calibration will not impact the transmission phase of the phase shifter. The calibration can be conducted to yield a flat gain by using a simple lookup table [3]. LU et al.: DEVELOPMENT OF MULTIBAND PHASE SHIFTERS IN 180-nm RF CMOS TECHNOLOGY Fig. 6. Die photograph of the multiband phase shifter in 0.18-m RF CMOS. Fig. 8. 43 Measured transmission phase at 2.4, 3.5, and 5.8 GHz. TABLE I COMPARISON OF PHASE TUNING RANGE WITH V Fig. 7. FROM 0 TO 4.5 V Measured: (a) input return loss and (b) output return loss. III. MEASUREMENT RESULTS OF PHASE SHIFTERS The novel phase shifter was implemented in IBM 180-nm RF CMOS. The varactor-tuned LC networks are on the left- and right-hand sides, while the embedded distributed amplifier is in the middle of the chip. The chip size is 2.3 mm 1.2 mm including pads. As shown in Fig. 6, the grounding path and all biases are connected onto an evaluation board using bond wires. A. -Parameter Measurements -parameter measurements were conducted at room temperature using a Cascade Microtech probe station and an Agilent E8364B Performance Network Analyzer. Fig. 7 shows that the measured return loss is less than 10 dB from 2.4 to 6 GHz with control voltage tuning from 0 to measurements are focused on three frequency 4.5 V. The bands, i.e., 2.4–2.48, 3.4–3.5, and 5.73–5.83 GHz, and the meafrom 0 to 4.5 V sured relative phase tuning ranges with are 220 , 360 , and 660 , respectively (Fig. 8). The measured Fig. 9. Measured S in 2.4-GHz frequency band. phase tuning ranges are consistent with those in the simulation, as compared in Table I. Fig. 8 indicates a nearly linear relation, as predicted ship between the relative phase shifting and in Section II. For narrow-band applications, the phase variation at a given control voltage versus operation frequency is an important specification for continuous phase shifters. The phase variation versus frequency determines the achievable resolution and, therefore, the performance of phased array antennas. The -parameter measurements show that the phase variation for 20-MHz bandwidth is 3 , and the gain ripple within the same bandwidth is less than 0.1 dB, as shown in Figs. 9–11. The results shown below are based on the measurements with the 180 and 360 continuous phase tuning ranges in 2.4- and 3.5/5.8-GHz bands, respectively. 44 Fig. 10. Fig. 11. IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES, VOL. 54, NO. 1, JANUARY 2006 Measured S Measured S Fig. 12. Calibration results at 2.4 GHz. Fig. 13. Calibration results at 3.5 GHz. Fig. 14. Calibration results at 5.8 GHz. in 3.5-GHz frequency band. in 5.8-GHz frequency band. Fig. 9 shows that the relative phase tuning range is 180 in the 2.4-GHz band as changes from 0.1 to 3.0 V, and the gain varies from 0.1 to 6.6 dB. This result indicates that the insertions loss caused by lossy CMOS passive devices has been significantly compensated. The phase tuning range in the 3.5-GHz band is 360 as changes from 0 to 4.0 V, and the insertion loss is reduced from 3.7- to 5.4-dB gain, as shown in Fig. 10. The phase tuning changes from 1.0 range in the 5.8-GHz band is 360 as to 4.5 V. The insertion loss is also compensated to vary from 4.5 dB to 2.1-dB gain during the phase tuning, as illustrated by Fig. 11. The distributed amplifier provides a constant gain of 14 dB up to 8 GHz. However, the loss of the phase shifter and matching networks increases significantly at 5.8 GHz and up to 18 dB. Hence, the compensated gain at 5.8 GHz is less than that at 2.4 and 3.5 GHz. B. Gain Variation Calibration As we can see from the -parameter measurement results, the changes for difgain (loss) of the phase shifter varies as ferent phase conditions. The gain variation of the phase shifter can be calibrated by adaptively adjusting the gate bias of the distributed amplifier through a lookup table. The calibration results at 2.4 GHz is shown in Fig. 12. We can see that a flat gain around 0 dB is achieved compared with the gain shifting from 0 to 6.6 dB before the calibration. On the other hand, the phase tuning versus control voltage curve with the calibration is almost identical as that without the calibration through the whole 180 tuning range. LU et al.: DEVELOPMENT OF MULTIBAND PHASE SHIFTERS IN 180-nm RF CMOS TECHNOLOGY The gain variation calibration has been also conducted at 3.5 and 5.8 GHz, as shown in Figs. 13 and 14, respectively. A flat insertion loss is achieved at 3.7 and 4.5 dB, respectively, across the 360 phase tuning range. Similar to that at 2.4 GHz, the transmission phase is almost unaffected through the calibration process. The independence of phase tuning on gain calibration simplifies the design of control (calibration) algorithms. IV. CONCLUSION This paper has presented the development of a multiband phase shifter in 180-nm CMOS technology. The phase shifter requires only one control voltage for phase tuning. The proposed novel topology yields significant loss compensation with moderate power consumption [5], [15], [16]. The measurement results have shown that the phase shifter can achieve more than 180 tuning range over 2.4- to 6-GHz bands. The phase variation within 20-MHz bandwidth is 3 , and the time-delay nature also makes this phase shifter suitable for wide-band applications. The gain can be as high as 6.6 dB without calibration. The gain variation during phase tuning can be calibrated by adaptively adjusting the bias condition of the embedded amplifier. The calibration through a lookup table has been conducted to yield a flat gain through the whole phase tuning range. [11] F. Ellinger, H. Jackel, and W. Bachtold, “Varactor-loaded transmissionline phase shifter at C -band using lumped elements,” IEEE Trans. Microw. Theory Tech., vol. 51, no. 4, pp. 1135–1140, Apr. 2003. [12] D. M. Pozar, “Impedance matching and tuning,” in Microwave Engineering, 3rd ed. Hoboken, NJ: Wiley, 2005, ch. 5, pp. 250–255. [13] J. S. Dunn, D. C. Ahlgren, D. D. Coolbaugh, N. B. Feilchenfeld, G. Freeman, D. R. Greenberg, R. A. Groves, F. J. Guarin, Y. Hammad, A. J. Joseph, L. D. Lanzerotti, S. A. St. Onge, B. A. Orner, J.-S. Rieh, K. J. Stein, S. H. Voldman, P.-C. Wang, M. J. Zierak, S. Subbanna, D. L. Harame, D. A. Herman, Jr., and B. S. Meyerson, “Foundation of RF CMOS and SiGe BiCMOS technologies,” IBM J. Res. Dev., vol. 47, no. 2/3, pp. 101–138, Mar./May 2003. [14] G. Tsoulos and M. Beach, “Calibration and linearity issues for an adaptive antenna system,” in Proc. Vehicular Technology Conf., vol. 3, Phoenix, AZ, May 1997, pp. 1597–1600. [15] H. Hayashi and M. Mauraguchi, “An MMIC active phase shifter using a variable resonant circuit (and MESFETs),” IEEE Trans. Microw. Theory Tech., vol. 47, no. 10, pp. 2021–2026, Oct. 1999. [16] D. Viveiros, Jr., D. Consonni, and A. K. Jastrzebski, “A tunable all-pass MMIC active phase shifter,” IEEE Trans. Microw. Theory Tech., vol. 50, no. 8, pp. 1885–1889, Aug. 2002. Chao Lu (S’05) received the B.E. and M.S. degrees in electronic engineering from Tsinghua University, Beijing, China, in 1999 and 2002, respectively, and is currently working toward the Ph.D. degree at the University of California at Davis. From 2002 to 2003, he was also a Design Engineer with Intel Technology Ltd., Shanghai, China, where he developed mixed-signal ICs. His current research interests include advanced communication architectures, wide-band/multiband RF integrated circuits (RFICs), and mixed-signal ICs. ACKNOWLEDGMENT The authors wish to acknowledge the IBM Corporation, Essex Junction, VT, for the chip fabrication. 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Luhmann, Jr., “Novel low loss delay line for broad-band phased antenna array applications,” IEEE Microw. Guided Wave Lett., vol. 6, no. 11, pp. 395–397, Nov. 1996. 45 Anh-Vu H. Pham (SM’03) received the B.E.E. (with highest honors), M.S., and Ph.D. degrees from the Georgia Institute of Technology, Atlanta, in 1995, 1997, and 1999, respectively. In 1997, he co-founded RF Solutions, LLC, an RFIC company that was acquired by Anadigics in 2003. He has held faculty positions with Clemson University and the University of California at Davis, where he is currently an Associate Professor. He is also active as a consultant to the industry. He has authored or coauthored over 50 technical journal and conference papers. His research interests are in the area of RF and high-speed packaging and signal integrity, RFIC design, and wireless sensors. Dr. Pham serves as a member of the IEEE Microwave Theory and Techniques Society (IEEE MTT-S) International Microwave Symposium (IMS) Technical Program Committee (TPC) on Power Amplifiers and Integrated Circuits. He has been the chair of the IEEE MTT-12 Microwave and Millimeter Wave Packaging and Manufacturing Technical Committee of the IEEE MTT-S. He was the recipient of the 2001 National Science Foundation CAREER Award on millimeter-wave organic packaging. Darrell Livezey received the B.S.E.E./C.S. degree from the University of Colorado at Boulder, in 1986. In 1986, he joined the Boeing Company, where he designed electrooptic systems for aircraft. In 1996, he joined CommQuest (an IBM company) and developed several RF and mixed-signal ICs for telecommunication applications. Since 2003, he has been a Senior Engineer with Tahoe RF Semiconductor Inc., Auburn, CA, where he currently develops RF and mixed-signal ICs for telecommunication, satellite, and automatic test equipment (ATE) applications.