●All specifications in this catalog and production status of products are subject to change without notice. Prior to the purchase, please contact NEC Tokin for updated product data.
●Please request for a specification sheet for detailed product data prior to the purchase.
●Before using the product in this catalog, please read "Precautions" and other safety precautions listed in the printed version catalog.
2006.09.01 P0760MPAC15VOL03E
PRECAUTIONS TO BE TAKEN WHEN USING MULTILAYER
PIEZOELECTRIC ACTUATORS
(Please read these precautions before using our products)
1. Before using our products or designing a system using our products, read
the precautions and specifications (such as level of quality) for the products
you intend to use on the last page of this manual.
2. The main failures with multilayer piezoelectric actuators are deterioration of
insulation resistance, short-circuit, and open-circuit.
Before using the products, design systems carefully to ensure redundancy,
prevention of the spread of fire, and prevention of faulty operation allowing
for the occurrence of failures.
3. Use the products after checking the working conditions and rated performance of each of the multilayer piezoelectric actuator series.
Selection of AE series (a resin-coated type) or ASB, ASL and AHB series (a
metal-sealed type) should be based on the intended working temperature
and humidity.
ISO 9001
ISO 14001
JQA
JQA
JQA-0366
JQA-E-90094
●All specifications in this catalog and production status of products are subject to change without notice. Prior to the purchase, please contact NEC Tokin for updated product data.
●Please request for a specification sheet for detailed product data prior to the purchase.
●Before using the product in this catalog, please read "Precautions" and other safety precautions listed in the printed version catalog.
2006.09.01 P0760MPAC15VOL03E
CONTENTS
Resin coated type multilayer piezoelectric acutuators AE series .........................
5
Metal sealed type multilayer piezoelectric actuatoes
ASB series (85˚C rated), ASL series (150˚C rated),
AHB series (High displacement model) .......................................................................
9
Reliability ..........................................................................................................................
14
Use guide ..........................................................................................................................
16
Precautions to be taken .................................................................................................
17
■ Inquiries
Multilayer Piezoelectric Actuators Vol.03 3
●All specifications in this catalog and production status of products are subject to change without notice. Prior to the purchase, please contact NEC Tokin for updated product data.
●Please request for a specification sheet for detailed product data prior to the purchase.
●Before using the product in this catalog, please read "Precautions" and other safety precautions listed in the printed version catalog.
2006.09.01 P0760MPAC15VOL03E
NEC TOKIN’s multilayer piezoelectric actuators are available in four series.
Resin-coated type
General-purpose
85˚C rated
AE series
Metal cased type
High-power
General-purpose
85˚C rated
ASB series
150˚C rated
ASL series
High displacement
model
AHB series
*AE series is resin-coated products. Therefore we recommend metallic case type, ASB,
ASL and AHB series in high humidity condition.
NEC TOKIN’s multilayer piezoelectric actuators were produced by our unique
element structure technology using ceramic materials with high electrostrictive
factors developed by NEC TOKIN.
Features
Special ceramics developed by NEC TOKIN are used in piezoelectric ceramic elements.
As compared with conventional actuator elements, NEC TOKIN’s multilayer piezoelectric actuators have
the following advantages:
Advantages over electromagnetic actuators
Superior response
High resolution for positioning
Low power consumption
No electromagnetic noise
Advantages over bimorph piezoelectric actuators
High energy conversion efficiency (around 7 times the
energy conversion efficiency of the bimorph type actuator), and low power consumption
Large generated force
Stable displacement, and reduced shift and creep phenomena
Higher response speed (more than 100 times the response
speed of the bimorph piezoelectric actuator)
Advantages over stacked piezoelectric actuators
Compact (less than 1/10 the specific ratio of the stacked
piezoelectric actuator)
Low drive voltage, and ease of use
Inexpensive
Insulator
Internal
electrode
External
electrode
Ceramic
Structure of NEC TOKIN’s Multilayer
Piezoelectric Actuator
4 Multilayer Piezoelectric Actuators Vol.03
●All specifications in this catalog and production status of products are subject to change without notice. Prior to the purchase, please contact NEC Tokin for updated product data.
●Please request for a specification sheet for detailed product data prior to the purchase.
●Before using the product in this catalog, please read "Precautions" and other safety precautions listed in the printed version catalog.
2006.09.01 P0760MPAC15VOL03E
Resin coated type multilayer piezoelectric actuators
AE Series
Outline
Features
● Large generated force: 3,500 N/cm2 (typ.)
● High-speed response: Driving up to about 1/3 of selfresonant frequency (in several ten kHz) is possible.
● Accurate positioning: Controllable in nm.
● Low power consumption: Can be retained at the leakage
current (100 애A or less).
● Very small size: 1/10 or less of conventional multilayer
actuators
Multilayer piezoelectric actuators are ceramic elements
for converting electrical energy into mechanical energy
such as displacement or force by utilizing the
piezoelectric longitudinal effect.
NEC TOKIN's multilayer piezoelectric actuators are
produced based on our unique element structure
design by making use of originally developed
piezoelectric ceramic materials with high electrostrictive
factors. Compared to conventional piezoelectric
actuators, they are smaller in size but can generate
higher displacement and force at low voltages.
Especially, the resin-coated AE series actuators
feature compact size and wide variety in shape for
use in ultra-fine positioning mechanisms and drive
sources for various applications.
Applications
Printer/magnetic head position adjustment, mirror/
prism positioning, linear motors, pumps, vibration,
valve drive, manipulators, etc.
Numbering system
Example: AE 0505 D16 XXX F
Comply with RoHS
Additional code (optional)
Nominal displacement:
Indicated by two digits in micrometers [애m]
in succession to D
Example: D16 = 16 애m
Cross sectional dimensions: Unit: Millimeters [mm]
Example: 0505 = 5 mm ҂ 5 mm
Series name:
AE = Resin-coated type
Multilayer Piezoelectric Actuators Vol.03 5
●All specifications in this catalog and production status of products are subject to change without notice. Prior to the purchase, please contact NEC Tokin for updated product data.
●Please request for a specification sheet for detailed product data prior to the purchase.
●Before using the product in this catalog, please read "Precautions" and other safety precautions listed in the printed version catalog.
2006.09.01 P0760MPAC15VOL03E
Standard Parts List
Displacement [애m]
Generated force
Resonance frequency
Capacitance
Insulation resistance
Overall length
Maximum driving voltage Recommended driving voltage
[N]
[kHz]
[애F]
[M⏲] min.
[mm]
Model
AE0203D04
4.6 ±1.5
3.0±1.5
200
261
0.09
100
5
AE0203D08
9.1 ±1.5
6.1±1.5
200
138
0.18
100
10
AE0203D16
17.4 ±2.0
11.6 ±2.0
200
69
0.35
50
20
AE0203D44H40
42.0 ±6.6
28.0 ±6.6
200
34
0.82
20
40
AE0505D08
9.1 ±1.5
6.1±1.5
850
138
0.75
50
10
AE0505D16
17.4 ±2.0
11.6 ±2.0
850
69
1.4
10
20
AE0505D44H40
42.0 ±6.6
28.0 ±6.6
850
34
3.4
5
40
AE1010D16
18.4 ±3.5
12.3 ±3.5
3,500
69
5.4
5
20
AE1010D44H40
42.0 ±6.6
28.0 ±6.6
3,500
34
13.6
2
40
AE1414D16
18.4 ±3.5
12.3 ±3.5
7,000
69
10.8
2
20
AE2525D15
15.6 ±2.0
10.1 ±2.0
20,000
69
30.5
0.4
20
Performance
Item
Standard
Operating temperature range
–25 to +85˚C
Maximum driving voltage
150VDC
Recommended driving voltage
100VDC
Conditions
When applied with a DC voltage: Ambient temperature
When driven by an AC voltage: Ambient temperature + Temperature rise due to generated heat
Displacement
See the standard parts list
Generated force (compression resistance)
See the standard parts list
Capacitance
See the standard parts list
Capacitance allowance
+/–20 %
Dissipation factor
3.5 to 5.0%
Insulation resistance
See the standard parts list
The force required for restricting the displacement to 0 when the maximum driving voltage is applied.
f=1kHz
Value obtained in 1 minute at 150 VDC
With both ends of element in free state
Resonance frequency
See the standard parts list
Tensile strength
1/10 of generated force
Typical value of the element under our test conditions
Typical value of the element under our test conditions
Young's modulus
Temperature cycle test
4.4҂1010N/m2
Typical value of the element under our test conditions
Displacement: Initial value ±20%
Room temperature (3 min)
Capacitance: Initial value ±30%
–25˚C (30 min.)
tan웃: Less than initial rated value
Room temperature (3 min)
Insulation resistance: 1 M⏲ or more
+85˚C (30 min)
Appearance: No noticeable defect
Repetition of 10 cycles of the above
Outer Dimensions
Unit : mm
Model
H
1A007
(+)
T1
W1
AE0203D04
2±0.1
3±0.1
AE0203D08
2±0.1
AE0203D16
2±0.1
AE0203D44H40
H
T2
W2
5±0.1
3.5max.
4.5max.
100
3±0.1
10±0.1
3.5max.
4.5max.
100
3±0.1
20±0.1
3.5max.
4.5max.
100
2±0.1
3±0.1
40±0.1
3.5max.
4.5max.
100
AE0505D08
5±0.1
5±0.1
10±0.1
6.5max.
6.5max.
100
AE0505D16
5±0.1
5±0.1
20±0.1
6.5max.
6.5max.
100
5±0.1
5±0.1
40±0.1
6.5max.
6.5max.
100
10±0.1
10±0.1
20±0.1
11.5max. 11.5max.
100
*
(–)
W1
T1
AE0505D44H40
W2
T2
AE1010D16
AE1010D44H40
Note:
Factory-shipped polarization : Red lead wire = (+),
white lead wire = (–)
10±0.1
10±0.1
40±0.1
11.5max. 11.5max.
100
AE1414D16
14.2±0.1
14.2±0.1
20±0.1
15.7max. 15.7max.
100
AE2525D15
25.1±0.1
25.1±0.1
20±0.1
26.6max. 26.6max.
100
*Length of lead wire
6 Multilayer Piezoelectric Actuators Vol.03
●All specifications in this catalog and production status of products are subject to change without notice. Prior to the purchase, please contact NEC Tokin for updated product data.
●Please request for a specification sheet for detailed product data prior to the purchase.
●Before using the product in this catalog, please read "Precautions" and other safety precautions listed in the printed version catalog.
2006.09.01 P0760MPAC15VOL03E
Wire diameter
φD
φd
R
Model Number
φd*
φD*
r*
AE0203D08
0.3
0.5
100
AE0203D16
0.3
0.5
100
φ d = Diameter of lead wire
AE0505D08
0.3
0.5
100
φ D = Outer diameter including
the thickness of coating
AE0505D16
0.5
0.8
100
AE1010D16
0.5
0.8
100
AE1414D16
0.5
0.8
100
R= Length of lead wire
* Typ.
Special Design Parts
Non-standard parts may be manufactured on order.
With regard to the generated displacement and
generated force, use the guideline below with the
performance of the standard parts as the reference.
Displacement: Roughly proportional to the
element length
Generated force: Roughly proportional to the
sectional area of the element
Please contact us for further details.
Characteristic Data
100
50
Unpolarized
0
Generated displacement (μm)
Measured temperature : 23°C
(with use of unpolarized element)
AE0505D16
40
Generated displacement (μm)
Voltage (V)
150
30
20
10
Measured temperature : 23°C
(with use of unpolarized element)
AE0505D16
30
0
50
100
Voltage (V)
150
20
10
Fig. 2 Voltage vs generated displacement
characteristics
Unpolarized
0
0
20
40
60
80
100
Time (sec)
Fig. 1 Voltage and generated displacement
vs time characteristics
Multilayer Piezoelectric Actuators Vol.03 7
●All specifications in this catalog and production status of products are subject to change without notice. Prior to the purchase, please contact NEC Tokin for updated product data.
●Please request for a specification sheet for detailed product data prior to the purchase.
●Before using the product in this catalog, please read "Precautions" and other safety precautions listed in the printed version catalog.
2006.09.01 P0760MPAC15VOL03E
AE0203D08
(measuring 2×3×10mm element)
Ihys
Generated displacement (μm)
20
20
Measured temperature : 25±5°C
(with use of polarized element)
AE0505D16
Generated displacement (μm)
10
150 VDC
500
16
Iγ +
14
0
10
I150
6
Iγ (residual
displacement)
4
Ihys
–50
0
50
100
150
200
Temperature (°C)
Generated force (N)
Fig. 4 Temperature characteristics of
generated displacement
0V, open element
–10
Iγ
75
150
Drive voltage (V)
8
0
1000
I150
I150
12
2
F0
0
18
0V, shorted element
–20
Fig. 3 Generated Force vs Generated
Displacement Characteristics
DC 75V superimposed on SIN waveform (150V)
AE0505D16
AE0505D16
After passage of 5 min
100
80
Heat generation T (°C)
1 kHz
500 Hz
Heat generation T (°C)
70
60
80
Amplitude
of a.c.
40 V
DC bias
100 V
50 V
150 V
75 V
Symbol
20 V
60
40
20
50
200 Hz
40
10
100
1000
AC frequency (Hz)
30
Fig. 6 Heat generation vs frequency
characteristics
100 Hz
20
50 Hz
10
0
100
200
300
Time (sec)
Fig. 5 Heat development characteristics
8 Multilayer Piezoelectric Actuators Vol.03
●All specifications in this catalog and production status of products are subject to change without notice. Prior to the purchase, please contact NEC Tokin for updated product data.
●Please request for a specification sheet for detailed product data prior to the purchase.
●Before using the product in this catalog, please read "Precautions" and other safety precautions listed in the printed version catalog.
2006.09.01 P0760MPAC15VOL03E
Metal sealed type multilayer piezoelectric actuators
ASB Series (85˚C rated), ASL series (150˚C rated), AHB series (High
displacement model)
Outline
Features
● High reliability: Realization of MTTF = 36,000 hours (at
85˚C and 100 V)
● Easier installation n equipment thanks to the built-in
pre-load mechanism and mounting attachment
● Minimum mechanical abrasion
● Large generated force: 800 N
● Accurate positioning: Controllable in nm
Multilayer piezoelectric actuators convert electrical energy
into mechanical energy such as displacement or force
by making use of the piezoelectric longitudinal effect.
NEC TOKIN's multilayer piezoelectric actuators are
produced based on our unique element structure design
by making use of originally developed piezoelectric
ceramic materials with high electrostrictive factors.
Compared to conventional piezoelectric actuators,
they are smaller in size but can generate higher
displacements and forces at low voltages.
Especially, the metal sealed ASB/ASL and AHB
series actuators are much less influenced by ambient
humidity because of insulation from the atmosphere.
As a result, long service life and high performance
never experienced in the past have been attained to
allow use in various applications such as semiconductor
device production equipment and optical communication
equipment requiring high reliability.
Applications
Fine adjustment of various X-Y tables steppers,
mirror/prism positioning, linear motors, fluid flow
control valve drive, vibration, manipulators, etc.
Numbering system
Example: AS B 170 C 801 N P 0 F
Comply with RoHS
New design No.
Sequentially numbered starting from 0
Configuration of drive block
P = Plane
Configuration of mount
N = Female thread type
F = Flange type
Generated force
Unit: Newton [N]
The first two digits are effective numerals.
The last digit is an exponent of 10.
Example: 801 = 800 N = 80 kgf
Maximum drive voltage
C = 150 V
Nominal displacement
Unit: Micrometers (애m)
The first two digits are effective numerals.
The last digit is an exponent of 10.
Example: 170 = 17 애m
Construction of housing and B = Bellows ((pre-load), maximum operating temperature: 85˚C
operating temperature range L = Bellows (pre-load), maximum operating temperature: 150˚C
Series name
AS = Encapsulated in metal case
AH = Encapsulated in metal case (High displacement model)
Multilayer Piezoelectric Actuators Vol.03 9
●All specifications in this catalog and production status of products are subject to change without notice. Prior to the purchase, please contact NEC Tokin for updated product data.
●Please request for a specification sheet for detailed product data prior to the purchase.
●Before using the product in this catalog, please read "Precautions" and other safety precautions listed in the printed version catalog.
2006.09.01 P0760MPAC15VOL03E
Standard Parts List
• ASB series
Generated force
Resonance frequency
Capacitance
Insulation resistance
Maximum driving voltage
Recommended driving voltage
[N]
[kHz]
[애F]
[M⏲] min.
ASB170C801*P0
17.0 ± 3
12.0 ± 3
800
14
1.5
30
ASB340C801*P0
34.0 ± 6
24.0 ± 6
800
12
3.0
15
ASB510C801*P0
51.0 ± 9
36.0 ± 9
800
10
4.5
10
ASB680C801*P0
68.0 ±12
48.0 ±12
800
8
6.0
5
Model
Displacement [애m]
• ASL series
Generated force
Resonance frequency
Capacitance
Insulation resistance
Maximum driving voltage
Recommended driving voltage
[N]
[kHz]
[애F]
[M⏲] min.
ASL170C801*P0
17.0± 3
12.0± 3
800
14
1.5
30
ASL340C801*P0
34.0± 6
24.0± 6
800
12
3.0
15
ASL510C801*P0
51.0± 9
36.0± 9
800
10
4.5
10
ASL680C801*P0
68.0±12
48.0±12
800
8
6.0
5
Model
Displacement [애m]
• AHB series
Generated force
Capacitance
Insulation resistance
Maximum driving voltage
Recommended driving voltage
[N]
[애F]
[M⏲] min.
AHB550C801P0
55.0± 8
39.0± 8
800
6.4
10
AHB700C801P0
70.0±15
49.0±15
800
8.2
5
AHB800C801P0
80.0±15
56.0±15
800
9.3
5
Model
Displacement [애m]
10 Multilayer Piezoelectric Actuators Vol.03
●All specifications in this catalog and production status of products are subject to change without notice. Prior to the purchase, please contact NEC Tokin for updated product data.
●Please request for a specification sheet for detailed product data prior to the purchase.
●Before using the product in this catalog, please read "Precautions" and other safety precautions listed in the printed version catalog.
2006.09.01 P0760MPAC15VOL03E
Performance
Item
Operating temperature range
Standard
When applied with DC voltage: Ambient temperature
ASL : –40 to +150˚C
When driven by pulse: Ambient temperature + Rise by generated heat
Maximum driving voltage
150VDC
Recommended driving voltage
100VDC
Displacement
See the standard parts list
Generated force (compression resistance)
See the standard parts list
Capacitance
See the standard parts list
Capacitance tolerance
+/– 20 %
Dissipation factor
3.5 to 5.0%
Insulation resistance
See the standard parts list
Resonance frequency
See the standard parts list
Airtightness
1 ҂ 10–8 atm cc/sec or less
Displacement: Initial value ±30%
Capacitance: Initial value ±30%
Temperature cycle test
Conditions
ASB/AHB : –25 to +85˚C
tan 웃: Less than initial rated value
Insulation resistance: 1 M⏲ or more
Appearance: No noticeable defect
The force required for restricting the displacement to 0 when the maximum driving voltage is applied.
f=1kHz
Value obtained in 1 minute at 150 VDC
With both ends of element in free state
Typical value of the element under our test conditions
ASB, AHB
ASL
Room temperature (3 min)
Room temperature (3 min)
–25˚C (30 min)
–40˚C (30 min)
Room temperature (3 min)
Room temperature (3 min)
+85˚C (30 min)
+150˚C (30 min)
Repetition of 10 cycles of the above
Displacement: Initial value ±30%
Capacitance: Initial value ±30%
High-temperature shelf test
Temperature
tan 웃: Less than initial rated value
Insulation resistance: 1 M액 or more
ASB, AHB: 85±2˚C
ASL: 150±2˚C
Time
1,000±48 h
Appearance: No noticeable defect
Displacement: Initial value ±30%
Capacitance: Initial value ±30%
Solvent resistance test
tan 웃: Less than initial rated value
Insulation resistance: 1 M액 or more
Appearance: No noticeable defect
Solvent: Isopropyl alcohol
Temperature: 23±5˚C
Time: Immersion for 1 min
Mark: Easily legible
Displacement: Initial value ±30%
Capacitance: Initial value ±30%
Heat resistance test
tan 웃: Less than initial rated value
Temperature: 150±3˚C
Insulation resistance: 1 M액 or more
Time: 96±4 h
Appearance: No noticeable defect
Mark: Easily legible
Multilayer Piezoelectric Actuators Vol.03 11
●All specifications in this catalog and production status of products are subject to change without notice. Prior to the purchase, please contact NEC Tokin for updated product data.
●Please request for a specification sheet for detailed product data prior to the purchase.
●Before using the product in this catalog, please read "Precautions" and other safety precautions listed in the printed version catalog.
2006.09.01 P0760MPAC15VOL03E
Outer Dimensions (Common to ASB, ASL and AHB Series)
Flange type
Female thread type
TOP VIEW
TOP VIEW
17
φ 19.6±0.5
17
Enlarged cross-section of section A (4/1)
φ 11.5±0.5
4– φ 3.5
Section A
Enlarged cross-section of section A (4/1)
φ 11.5±0.5
Details of mark
Mark
ASB001A
←Product code
2A001
←Manufacturing
lot No.
Section A
Details of mark
Mark
L±0.5
2.5±0.2
L±0.5
130±10
[mm]
2
←Product code
2A001
←Manufacturing
lot No.
130±10
2.5±0.2
[mm]
2
19±0.5
9±0.2
ASB007A
13±0.5
φ19.6±0.5
3.0±0.2
Part name
L
AS*170C801NP0
38.4
Part name
L
AS*170C801FP0
32.4
AS*340C801NP0
58.4
AS*510C801NP0
78.4
AS*340C801FP0
52.4
AS*510C801FP0
72.4
AS*680C801NP0
Part name
98.4
AS*680C801FP0
92.4
L
Part name
L
AHB550C801NP0
58.4
AHB550C801FP0
52.4
AHB700C801NP0
78.4
AHB700C801FP0
72.4
AHB800C801NP0
78.4
AHB800C801FP0
72.4
P.C.D.28
17
45°
45°
φ 35±0.5
M4 screw of min. 3 deep
Prepared hole of max. 5 deep
BOTTOM VIEW
BOTTOM VIEW
Characteristic Data
• ASB series
Voltage vs Displacement
Drive frequency vs Displacement
Compression load vs Displacement
70
60
70
ASB680C801*P0
50
50
Crest value of voltage
150V (SIN waveform)
DC bias : 75V
ASB510C801*P0
50
Displacement (μm)
Displacement (μm)
B5
0
ASB340C801*P0
20
AS
*P
30
01
ASB510C801
*P0
40
Applied voltage 150VDC
C8
Displacement (μm)
80
B6
60
AS
60
10
C8
40
01
*P
0
30
AS
B3
40
C8
01
20
ASB
*P
0
40
ASB340C801*P0
30
20
ASB170C801*P0
170C
10
0
50
100
801*P
0
ASB170C801*P0
10
10
150
0
200
400
DC voltage (V)
600
800
0
10
1000
100
Generated force (N)
1000
Drive frequency (Hz)
Temperature vs Insulation resistance
Temperature vs Displacement
DC bias vs Capacitance
60
Applied voltage 150VDC
ASB340C801*P0
30
20
4
Insulation resistance (Ω)
Capacitance (μF)
40
ASB510C801*P0
3
ASB340C801*P0
2
ASB170C801*P0
ASB170C801*P0
10
0
20
40
60
80
Temperature (°C)
0
ASB170C801*P0
109
108
ASB510C801*P0
107
106
1
–20
10
5
ASB510C801*P0
Displacement (μm)
10
Measured frequency : 1kHz
50
0
Measured voltage : 150VDC
6
50
100
DC bias voltage (V)
150
–25 –15 –5
5
25
45
65
85 105
125
Temperature (°C)
12 Multilayer Piezoelectric Actuators Vol.03
●All specifications in this catalog and production status of products are subject to change without notice. Prior to the purchase, please contact NEC Tokin for updated product data.
●Please request for a specification sheet for detailed product data prior to the purchase.
●Before using the product in this catalog, please read "Precautions" and other safety precautions listed in the printed version catalog.
2006.09.01 P0760MPAC15VOL03E
• ASL series
Temperature vs. Capacitance
Temperature vs.Displacement
60
2500
2000
Capacitance (nF)
Displacement(μm)
50
ASB510C801***
40
30
ASL510C801***
20
ASB Type
1500
1000
ASL Type
500
10
0
0
-40
-20
0
20
80
100
40
60
Temperature(˚C)
120
140
160
-40
-20
0
20
40
60
80 100 120 140 160
SAMPLE:5×5×20mm
Temperature (˚C)
Shall be added as required in the same way as for the ASB series in the future
Application Examples
DC servo motor
Y-direction drive frame
Control circuit
Piezoelectric actuator
Piezoelectric actuator
Drive table
Bypath
Diaphragm
Flexible
supporting rod
Y
Drive table
X
X-Y slide surface
Base
PTFE slider
(Tuning method: Air gap)
Piezo Actuator
Air Gap
Alignment
Fixture
Single Mode Fiber
Mirror
Glass
Ferrule
Multilayer Piezoelectric Actuators Vol.03 13
●All specifications in this catalog and production status of products are subject to change without notice. Prior to the purchase, please contact NEC Tokin for updated product data.
●Please request for a specification sheet for detailed product data prior to the purchase.
●Before using the product in this catalog, please read "Precautions" and other safety precautions listed in the printed version catalog.
2006.09.01 P0760MPAC15VOL03E
Reliability
Majority of failure mode of multilayer piezoelectric actuators is the short circuit due to degraded insulation.
Though the cause of degradation of insulation has not been clarified perfectly, it has been found that the
failure rate varies greatly between statistic uses (DC voltage application) and dynamic uses (pulse voltage
application). Since it has been found that the influence of humidity is great in addition to the ambient
temperature as in the case of other general electronic parts, the metal sealed type featuring high reliability
by elimination of the influence of the atmosphere has been added in the product line.
This section describes the reliability guidelines for static and dynamic uses for each of the resin-coated and
metal sealed types.
Reliability of our multilayer piezoelectric actuators is represented by MTTF (mean time to failure) on
assumption of static uses. Though the number of repetitions is considered to be used to represent the
reliability in the case of dynamic uses, the accurate relationship between the indicator and cause has not
been obtained because of various influential causes and the mutual action between them. For the present,
therefore, only the obtained data and our concept are described.
(1) Resin-coated Type (AE Series)
a. DC voltage application
The acceleration factor has been obtained empirically for each of the drive voltage, ambient temperature
and relative humidity based on many experimental result data. The MTTFr in an actual application is
estimated using equation (1) below with MTTFs observed under accelerated condition as the reference
value.
MTTF r=MTTF s҂A v҂A h҂A t
• • • (1)
MTTF r : Estimated value
MTTF s : Reference value (=500h) • • • Typical value as of the year 1990
A v : Acceleration factor for drive voltage=
150
3.2
V r : Actual voltage (V)
Vr
A h : Acceleration factor for relative humidity=
90
4.9
H r : Actual relative humidity (RH%)
Hr
A t : Acceleration factor for ambient temperature=1.5
40–Tr
10
T r : Actual ambient temperature(˚C)
[Example] The following calculation is made for the case of use at 25˚C, 60% RH and 100 V:
MTTF r =500҂
150
100
3.2
҂
90
60
4.9
҂1.5
40–25
10
=500҂3.66҂7.29҂1.84
24,500h (2.8years)
b. Pulse voltage application
When this element is driven by a pulse voltage, temperature rise occurs as a result of heating due to
dielectric loss of ceramics. Therefore, the element is not likely to be influenced by the humidity, thus
extending the service life greatly. Since this effect is affected by the element shape, pulse waveform
and frequency, it cannot be calculated by an equation as in the case of DC voltage application.
It has been seen that no failure occurred after application of 0 to 150-V rectangular pulse wave at 500
Hz to the AE0203D08 for 500 hours (equivalent to 900 million pulses).
On the other hand, physical damage due to ringing phenomenon due to element fixing method and
voltage rising speed may arise, so attention should be paid.
Please refer to the separately printed "Guide to Multilayer Actuator" for more detailed data.
14 Multilayer Piezoelectric Actuators Vol.03
●All specifications in this catalog and production status of products are subject to change without notice. Prior to the purchase, please contact NEC Tokin for updated product data.
●Please request for a specification sheet for detailed product data prior to the purchase.
●Before using the product in this catalog, please read "Precautions" and other safety precautions listed in the printed version catalog.
2006.09.01 P0760MPAC15VOL03E
(2) Metal Sealed Type (ASB, ASL and AHB Series)
a. DC voltage application
MTTFr of the metal sealed type under the actual operating conditions is calculated/estimated from the
reference MTTFs and the acceleration factor as in the case of the resin-coated type. However since
the internal element is sealed from the atmosphere, it is not influenced by the atmospheric humidity.
Therefore, equation (2) below is used.
MTTF r =MTTF s҂A v҂A t
• • • (2)
MTTF r : Estimated value
MTTF s : Reference value (=36,000h) • • • Typical value as of 1990
A v : Acceleration factor for drive voltage=
100
2
V r : Actual operating voltage (V)
Vr
A t :Acceleration factor for ambient temperature=1.5
85–Tr
10
T r : Actual operating temperature (˚C)
[Example] The following calculation is made for use at 25(c and 150 V:
MTTF r=36,000҂
100
150
2
85–25
10
҂1.5
=36,000҂0.44҂11.3
179,000h (20.4years)
b. Pulse voltage application
Estimation by an equation is extremely difficult because of the influence of the pulse waveform,
frequency, etc. in addition to the voltage and ambient temperature as in the case of the resin-coated
type.
It has been seen that no failure occurred under the following conditions up to 1,000 hours (equivalent
to 100 million pulses) in the case of the ASB170C801NP0:
[Conditions for evaluation]
Temperature: 85±2˚C
Humidity: 90 to 95% RH
Load: 200 N to 500 N (20 kgf to 50 kgf)
Drive voltage waveform: Rectangular wave, 30 Hz, 0 V to 100 V, duty ratio at 30%
Multilayer Piezoelectric Actuators Vol.03 15
●All specifications in this catalog and production status of products are subject to change without notice. Prior to the purchase, please contact NEC Tokin for updated product data.
●Please request for a specification sheet for detailed product data prior to the purchase.
●Before using the product in this catalog, please read "Precautions" and other safety precautions listed in the printed version catalog.
2006.09.01 P0760MPAC15VOL03E
Guide to Use
Fixing Method:
● Carefully prevent any bending, twisting or tensile force from being applied to this product.
Reference: Guide for tolerance of twisting and tension
Reference value
Remarks
Twisting force
3҂10-1 N•m or less
For an actuator which generates a force of 800 N
Tension
50 N or less
(compression resistance)
● Install the actuator so that the center axis of generated displacement is aligned with the center axis of the load.
a. Resin-coated type
• Epoxy-based adhesives are usable for bonding. Select a type featuring high rigidity and minimum thickness
so that the generation force and displace ment would not be spoiled.
• When thermosetting resin is used, perform polarizing treatment (see the caution section) again after setting.
• This type is weak to a tensile force because of its structure and may be broken when applied with tension.
Use in the state constantly applied with compression is effective in preventing any mechanical damage. The
pressure applied to this element should be kept at 20 to 50% of the force generated by this element
(compression resistance).
• Install the element so that the axis of generated displacement is vertical to the mounting surface.
b. Metal sealed type
• Select the mounting bracket (female thread type or flange type) according to the mounting method, and install
the element utilizing the bracket.
• Fix the element securely so as not to damp the generated force or displacement.
• Connect the driven item at the displacement generating end after securing the mounting portion so as to
avoid unnecessary stress application at the time of installation.
• Though this product is designed to apply a compressive force to the internal element by the metal case, avoid
any usage causing application of bending, twisting or tension at the time of driving.
Driving Method:
● Connect the red lead wire to the positive (+) terminal of the power supply. Also prevent reverse voltage application.
● Basically the voltage controls the aimed displacement and generated force. In driving, however, it is also necessary
to take ringing due to the resonance or hysteresis of the element itself into consideration. In pulse driving, it is further
necessary to pay sufficient attention to heat generation due to dielectric loss, charge/discharge current due to the
capacitive component and the power output impedance as well. Please refer to the separately printed Guide for Use
of Multilayer Piezoelectric Actuators".
16 Multilayer Piezoelectric Actuators Vol.03
●All specifications in this catalog and production status of products are subject to change without notice. Prior to the purchase, please contact NEC Tokin for updated product data.
●Please request for a specification sheet for detailed product data prior to the purchase.
●Before using the product in this catalog, please read "Precautions" and other safety precautions listed in the printed version catalog.
2006.09.01 P0760MPAC15VOL03E
Precautions
●
●
●
●
●
●
Connect the red lead wire to the positive (+) terminal of the power supply.
Carefully avoid electric shock since a high voltage is in use.
Never apply an excessive tension to a lead wire. Do not handle the product by picking up or moving the lead wire.
Do not disassemble the case of the metal sealed type.
Machining of the actuator element and replacement of the lead wire are prohibited.
Do not handle the resin-coated type (AE series) with bare hands. Otherwise, the reliability of the element would be
degraded.
● Do not wash resin-coated type (AE series) by organic solvant.
● Avoid excessive physical shock resulting from, for example, dropping. Otherwise, the internal piezoelectric ceramic
element may be damaged.
● If exposed to high temperatures above 100˚C or for use after long storage (for more than three months), the actuator
should be used after being polarized using the following circuit configuration and conditions shown below.
R1
S
V
PA
R2
Protective resistor R1 = 1 k액
Protective resistor R2 = 1 k액
Polarizing conditions: DC voltage application
0 V 씮150±0.2 V (to be retained for 10 seconds) 씮0
● Do not apply voltage exceeding MAX. driving voltage value to the actuator. Otherwise, degraded reliability or
mechanical fracture may arise.
● Do not use the actuator in a high concentration of highly inflammable gas. Otherwise, ignition may occur.
● Use the actuator so as not to cause bending, twisting or tension. Furthermore, align the center axis of displacement
of the actuator with the center axis of the mechanical load.
● Drive the actuator at an initial speed exceeding three times the resonance cycle to prevent damage caused by ringing.
● Store the resin-coated type (AE series) preferably in a dry atmosphere (desirably below 40% RH) at ordinary
temperatures (–5 to +40˚C).
● Store actuators where there is no vibration.
Multilayer Piezoelectric Actuators Vol.03 17
●All specifications in this catalog and production status of products are subject to change without notice. Prior to the purchase, please contact NEC Tokin for updated product data.
●Please request for a specification sheet for detailed product data prior to the purchase.
●Before using the product in this catalog, please read "Precautions" and other safety precautions listed in the printed version catalog.
2006.09.01 P0760MPAC15VOL03E
18 Multilayer Piezoelectric Actuators Vol.03
●All specifications in this catalog and production status of products are subject to change without notice. Prior to the purchase, please contact NEC Tokin for updated product data.
●Please request for a specification sheet for detailed product data prior to the purchase.
●Before using the product in this catalog, please read "Precautions" and other safety precautions listed in the printed version catalog.
2006.09.01 P0760MPAC15VOL03E
When using our products, the following precautions should
be taken.
(1)
Safety designing of an apparatus or a system allowing for failures of electronic components used
in the system
In general, failures will occur in electronic components at a certain probability. NEC TOKIN makes
every effort to improve the quality and reliability of electronic component products. However, it is
impossible to completely eliminate the probability of failures. Therefore, when using NEC TOKIN’s
electronic component products, systems should be carefully designed to ensure redundancy in the
event of an accident which would result in injury or death, fire, or social damage, to ensure the
prevention of the spread of fire, and the prevention of faulty operation. (Please refer to precautions to be taken when using multilayer piezoelectric actuators for the details of failures.)
(2)
Quality level of various kinds of parts, and equipment in which the parts can be utilized
Electronic components have a standard quality level unless otherwise specified.
NEC TOKIN classifies the level of quality of electronic component products into three levels, in
order from a lower level, a standard quality level, a special quality level, and a custom quality level
in which a customer individually specifies a quality assurance program. Each of the quality levels
has recommended applications.
If a user wants to use the electronic parts having a standard quality level in applications other than
the applications specified for the standard quality level, they should always consult a member of
our company’s sales staff before using the electronic parts.
Standard quality level
: Computers, office automation equipment, communications equipment,
measuring instruments, AV equipment, household electrical appliances, machine tools, personal equipment, industrial robots
Special quality level
: Transportation equipment (automobiles, railways, shipping, or the
like), traffic signals, disaster prevention/crime prevention systems, a
variety of safety devices, and medical equipment which is not directly
intended for life-support purposes
Custom quality level
: Equipment for airplanes, aerospace equipment, nuclear power control
systems, and medical equipment, apparatus or system for life-support
purposes
Unless otherwise shown, the quality level of NEC TOKIN’s electronic component products included
in documents such as catalogues, data sheets or data books is the standard quality level.
(3)
This manual is subject to change without notice.
The contents of this manual are based on data which is correct as of September 2006, and they
may be changed without notice. If our products are used for mass-production design, please
cousult with a member of our company’s sales staff by way of precaution.
(4)
Reprinting and copying of this manual without prior written permission from NEC TOKIN Corporation are not permitted.
(5)
Industrial property problems
In the event any problems associated with industrial property of a third party arising as a result of
the use of our products, NEC TOKIN assumes no responsibility for problems other than problems
directly associated with the constitution and manufacturing method of the products.
(6)
Should any of these products come under the category of strategic goods or services (according
to Japan's foreign trade and foreign exchange regulations), the sender must obtain an export
license from the Japanese Government before said products can be exported outside Japan.
●All specifications in this catalog and production status of products are subject to change without notice. Prior to the purchase, please contact NEC Tokin for updated product data.
●Please request for a specification sheet for detailed product data prior to the purchase.
●Before using the product in this catalog, please read "Precautions" and other safety precautions listed in the printed version catalog.
2006.09.01 P0760MPAC15VOL03E