Rotary Table/Vane Style
Series
MSU
Size: 1, 3, 7, 20
CRB2
-Z
CRBU2
CRB1
MSU
CRJ
CRA1
-Z
Peripheral table deflection
CRA1
mm or less
CRQ2
High Precision
Table top deflection
MSQ
mm or less
MSZ
CRQ2X
MSQX
MRQ
Series MSUB
Series MSUA
D-
147
Rotary
Vane Style/
Rotary actuator with lightweight,
High precision type
Size: 1, 3, 7, 20
High precision/High rigidity
A
Series
Series MSU
Improved table deflection accuracy:
0.03 mm or less
Special bearing
(Duplex single row ball bearing)
Easy alignment when mounting the load
Table inside/outside diameter tolerance H9/h9
Female threads for load mounting provided in eight places.
(Increases freedom in mounting the load)
Mounting reference pin holes
Easy alignment when mounting the body
Deflection accuracy: Displacement for 180° rotation
Table top
deflection
Mounting reference pin holes
(Alignment with center of body)
Provided on three sides, excluding port side
Peripheral table
deflection
Reference diameter h9
(Alignment with center of table rotation)
(mm)
Model
Table top deflection
Peripheral table deflection
MSUA
0.03 (0.1 to 0.2)
0.03 (0.1 to 0.2)
Values inside ( ) are for Series MSUB
Angle adjustable
90° ±10°, 180° ±10°
Double vane (MSUB only) 90° ±5°
Scale
indication
Disengageable
Maintenance work is simplified.
The drive unit can be replaced with the load mounted.
Angle adjustment
screws
Table unit
Auto switch capable
Drive unit
148
Since switches can be moved anywhere
on the circumference, they can be
mounted at positions which accommodate
the specifications.
Table
Size: 1, 3, 7, 20
CRB2
-Z
compact table for robotic hands
CRBU2
CRB1
Free mount type
MSU
Can be mounted from three directions: axial, lateral, vertical
A
SUUA
M
MS
Lateral mounting
Axial mounting
Bottom mount
CRJ
Vertical mounting
CRA1
-Z
Top mount
Tapped holes (4)
CRA1
CRQ2
B
SUUB
M
MS
MSQ
Tapped holes (4)
MSZ
Tapped holes (2)
Through-holes (2)
CRQ2X
MSQX
MRQ
Through-holes (2)
Tapped holes (2)
Bearing
Basic type
Series MSU
MSUB
Size: 1, 3, 7, 20
Single vane and double vane standardized
Double vane has the same dimensions as single vane
(Except size 1)
Single vane
Series Variations
Series
Size
1
High precision
type
MSUA
3
7
20
1
Basic type
MSUB
3
7
20
Rotating angle
Vane type
90°
Single vane
D-R73, D-T79
D-R80, D-S79, S7P
180°
90°
180°
Applicable auto switch
D-9,
D-T99
D-9A, D-S99, S9P
Single vane
D-9,
D-T99
D-9A, D-S99, S9P
Double vane ∗
D-R73, D-T79
D-R80, D-S79, S7P
D-
∗ Double vane is available with 90° rotation setting only.
149
Rotary Table: High Precision Type
Vane Style
Series MSUA
Size: 1, 3, 7, 20
How to Order
Connection port location
Side ported
Nil
Axial ported
E
Available with side ported
only, when equipped with
auto switch unit.
Bearing type
High precision type
A
Free mount type
MSUA 20
90 S
With auto switch M D SUA 20
90 S
Without auto switch
T79 L
Number of auto switches
S
Nil
With auto switch
(Built-in magnet)
∗ S (1 auto switch) is shipped with a
right-hand auto switch.
∗∗ Nil (2 auto switches) is shipped with
a right-hand and a left-hand switch.
Nominal size (Torque)
1
3
7
20
MSUA 1
MSUA 3
MSUA 7
MSUA20
Electrical entry/Lead wire length
Rotating angle
Applicable Symbol Rotating angle
90
90°
Single
180
180°
vane
Rotation adjustment range
Single vane: Both ends ±5° each
Vane type
S
Single vane
Grommet/Lead wire: 0.5 m
Nil
Grommet/Lead wire: 3 m
L
Grommet/Lead wire: 5 m
Z
Connector/Lead wire: 0.5 m
C
Connector/Lead wire: 3 m
CL
Connector/Without lead wire
CN
∗ Available only with R73, R80 and T79 type connectors.
∗∗ Lead wire with connector part nos.
D-LC05: Lead wire 0.5 m
D-LC30: Lead wire 3 m
D-LC50: Lead wire 5 m
Auto switch
Without auto switch (built-in magnet)
Nil
∗Refer to the table below for the applicable auto switch model.
Electrical
entry
Solid
state
auto
switch
Reed
auto
switch
No
Grommet
Yes
Reed
auto
switch
Yes
Solid
state
auto
switch
Grommet
Connector
Grommet
Connector
Grommet
Connector
Yes
MDSUA7
MDSUA20
Special
function
No
MDSUA1
MDSUA3
Type
Indicator light
Applicable Auto Switches/Refer to pages 807 to 856 for further information on auto swiches.
Applicable
model
Load voltage
Auto switch model Lead wire
type
In-line
3-wire (NPN)
S99
5 V, 12 V
Heavy-duty
3-wire (PNP)
S9P
cord
12 V
T99
Parallel cord
24 V 5 V, 12 V 5 V, 12 V, 24 V
90
5 V, 12 V,
5 V, 12 V,
2-wire
Heavy-duty cord
90A
100 V
24 V, 100 V
Parallel cord
97
Heavy-duty cord
100 V
93A
3-wire (NPN)
S79
5 V, 12 V
3-wire (PNP)
S7P
T79
12 V
T79C
Heavy-duty
24 V
cord
100 V
R73
2-wire
R73C
48 V, 100 V 100 V
R80
R80C
24 V or less
Wiring
(Output)
∗ Lead wire length symbols:
DC
0.5 m ······ Nil (Example) R73C
3 m ······ L (Example) R73CL
5 m ······ Z (Example) R73CZ
None ······ N (Example) R73CN
∗ Auto switches are shipped together (but not assembled).
Refer to pages 843 and 844 for detailed solid state auto
switches with pre-wired connectors.
150
1 pc. ∗
2 pcs. ∗∗
AC
Perpendicular
S99V
S9PV
T99V
∗ Auto switches marked with “ ”
are made-to-order specifications.
Lead wire length (m) ∗
Pre-wired
Applicable load
5 None
0.5
3
connector
(Nil) (L) (Z) (N)
IC circuit
Relay,
IC circuit PLC
IC circuit
Relay,
PLC
IC circuit
Order example: MSUA20 single vane type
(connection port side location selected)
1. Standard type (Without auto switches), Rotation 90°, side port
location
MSUA20-90S
2. With auto switch unit (Without auto switches), Rotation 180°,
side port location
MDSUA20-180S
3. With auto switch unit + Auto switch R73, Rotation 180°, Side
port location
MDSUA20-180S-R73
Rotary Table: High Precision Type
Vane Style
Series
MSUA
Specifications
MSUA1
Model ∗2
MSUA3
MSUA7
MSUA20
Single vane
Vane type
Rotating angle ∗1
90° ± 10°
180° ± 10°
90° ± 10°
180° ± 10°
Fluid
90° ± 10°
180° ± 10°
90° ± 10°
180° ± 10°
Air (Non-lube)
Proof pressure (MPa)
0.2 to 0.7
0.15 to 0.7
Rotation time adjustment range (s/90°)
0.15 to 1.0
CRBU2
CRB1
0.07 to 0.3 (0.5 MPa)
Allowable radial load
20 N
40 N
50 N
60 N
Allowable thrust load
15 N
30 N
60 N
80 N
0.3 N·m
0.7 N·m
0.9 N·m
2.9 N·m
Allowable moment
Bearing
MSU
CRJ
Special bearing
Port location
Port size
CRB2
-Z
5 to 60°C
Operating pressure range (MPa)
Shaft load
1.5
1.05
Ambient and fluid temperature
Side ported or Top ported
Side ported
CRA1
-Z
M5 x 0.8
M3 x 0.5
Top ported
M3 x 0.5
M5 x 0.8
Deflection accuracy
CRA1
0.03 mm or less
∗1 Single vane 90° can be adjusted to 90° ± 10° (both ends of rotation ± 5° each)
∗ 2 Correspondence to equivalent conventional free-mount types
Single vane 180° can be adjusted to 180° ± 10° (both ends of rotation ± 5° each)
Rotary table
MSUA 1
MSUA 3
MSUA 7
MSUA20
Note) Refer to page 35 for allowable kinetic energy.
Free-mount rotary actuator
CRBU2W10
CRBU2W15
CRBU2W20
CRBU2W30
CRQ2
MSQ
MSZ
Symbol
CRQ2X
MSQX
MRQ
Table Rotation Range
Weight
Angle adjustment is possible as shown in the drawings below using adjustment
bolts (A) and (B).
Adjustment range of
adjustment bolt (B)
Adjustment range of
adjustment bolt (A)
(S): 10° (± 5°)
1
90
°
(S): 10° (± 5°)
(g)
Size
3
7
22.5°
20
Positioning pin hole
Adjustment bolt (B)
For 90° rotation
180°
162
180°
161
90°
262
180°
260
90°
440
180°
436
90°
675
180°
671
15
20
28
38
Allowable Load
Adjustment range of
adjustment bolt (B)
10° (± 5°)
22.5°
D-
Size
Positioning pin hole
Adjustment bolt (A)
Single vane
90°
Auto switch unit Note)
Do not permit the load and moment applied to the table to exceed the allowable
values shown in the table below. (Operation above the allowable values can
cause adverse effects on service life, such as play in the table and loss of
accuracy.)
Single vane (S): 80 to 100° adjustable
10° (± 5°)
Basic weight
Note) Values above do not include auto switch weight.
Adjustment bolt (A)
Adjustment range of
adjustment bolt (A)
Rotating angle
Adjustment bolt (B)
For 180° rotation
Single vane (S): 170 to 190° adjustable
Allowable radial load (N) Allowable thrust load (N) Allowable moment (N·m)
1
20
15
0.3
3
40
30
0.7
7
50
60
0.9
20
60
80
2.9
151
Series
MSUA
Construction
Internal Construction of Rotary Table
For 180°
(Figure in the middle
position)
For 90°
(Figure with pressure
to A port)
Single vane
(Figure in the middle
position for 180°)
Component Parts
Material
Note
1
Body A
Aluminum alloy
Anodized
2
Body B
Aluminum alloy
Anodized
3
Body C
Aluminum alloy
Anodized
4
Vane shaft
Stainless steel (MSUA20 is carbon steel)
Single vane
5
Stopper
Resin
Single vane
6
Stopper seal
NBR
7
Table
Aluminum alloy
Anodized, Serigraph
8
Stopper lever
Carbon steel
Heat treated, Electroless nickel plated
No.
Description
9
Stopper guide
Stainless steel
Nitriding
10
Lever retainer
Carbon steel
Zync Chromated
11
Bearing retainer
Aluminum alloy
Anodized
12
Bearing
High carbon chrome bearing steel
13
Special bearing
High carbon chrome bearing steel
14
Back-up ring
15
O-ring
16
With adjustment bolt
Carbon steel
17
Hexagon nut
Carbon steel
18
Hexagon socket head cap screw
19
Hexagon socket head cap screw
20
Hexagon socket head cap screw
21
Button bolt
22
Hexagon socket head cap screw
23
Label
Stainless steel
NBR
Heat treated
SE type only
∗ The plug is used only when the connection port is type SE.
∗ Individual part cannot be shipped. Please purchase the whole unit. (Refer to page 178.)
152
Rotary Table: High Precision Type
Vane Style
Series
MSUA
Construction
Internal construction with auto switch
MDSUA1/3
MDSUA7/20
CRB2
-Z
CRBU2
CRB1
MSU
Auto switch units
CRJ
Auto switches are
not included.
CRA1
-Z
CRA1
CRQ2
∗ Refer to page 57 for the component parts.
MSQ
∗ The auto switch unit can be retrofitted on a rotary actuator.
Auto switches should be ordered separately since they are not included.
Model
MSZ
Auto switch unit part no.
M(D)SUA 1
P211070-1
M(D)SUA 3
P211090-1
M(D)SUA 7
P211060-1
M(D)SUA20
P211080-1
CRQ2X
MSQX
MRQ
Auto switch block unit
MDSUA1/3
For reed auto switch
Right-handed
Left-handed
Part no.: P211070-8
Part no.: P211070-9
MDSUA7/20
For solid state auto
switch
Combination of reed and
solid state auto switches
Combination left & right-handed Combination left & right-handed
Part no.: P211070-13
Part no.: P211060-8
∗ The auto switch block unit is included in the auto switch unit.
∗ Auto switch block unit shows the necessary assembly for mounting 1 piece of auto switch to the auto
switch unit.
∗ Individual part cannot be shipped.
D-
153
Series
MSUA
Dimensions
These drawings indicate the condition when the B port is pressurized.
MSUA1
MSUA1-S,SE
8 x M3 x 0.5 depth 5
C
38
31
23.5
1
ø5
B
ø25
4 x M4 x 0.7 depth 4
22.5°
4.5
25
+0.0
0
27
9
5
2
0
–0.062
16
10.3
+0.043
0
12.5
ø36h9
ø17 H9
37
2 x 4.5 through
4.2
6.5
27
0
–0.062
31.5
( A , B , C )
ø35h9
2
22.5°
3
6.5
+0.025
depth
0
4.5
3 x 3H9
2.5
A
H9
2.5
Long groove depth 4
(Positioning pin hole)
Angle adjustment bolt
A port
0.5
8
1
5
2 x M3 x 0.5
Adjustment: Max. 7.5
2
2 x 4.5 through
B port
3 x 3H9 +0.025
long groove depth 2.5
0
–0.004
( A , B , C )
ø4g6 –0.012
0
ø9h9 –0.036
ø29
4 x M4 x 0.7 depth 8
ø36h9
0
–0.062
31
Top ported: MSUA1-SE
A port
9.5
B port
8.5
2 x M3 x 0.5
154
Rotary Table: High Precision Type
Vane Style
Series
MSUA
These drawings indicate the condition when the B port is pressurized.
With auto switch: MDSUA1-S
CRB2
-Z
∗1) 24: When using D-90/90A/S99/S99V/S9P/S9PV/T99/T99V
30: When using D-97/93A
∗2) 60°: When using D-90/90A/97/93A
69°: When using D-S99/S99V/S9P/S9PV/T99/T99V
CRBU2
CRB1
MSU
CRJ
CRA1
-Z
12.5
CRA1
CRQ2
MSQ
37
MSZ
Angle adjustment bolt
CRQ2X
MSQX
MRQ
2 x M3 x 0.5
A port
B port
28
∗1
24
(Port location: Side ported type only)
ø18.5
∗2
9°)
60° (6
ø29
15
∗1
30
D-97/93A
D-
155
Series
MSUA
Dimensions
These drawings indicate the condition when the B port is pressurized.
MSUA3
MSUA3-S/SE
8 x M4 x 0.7 depth 7
C
ø30
44
27
36
8
ø5
B
4 x M4 x 0.7 depth 5.5
22.5°
5
25
0
ø41h9 –0.062
+0.0
0
22.5°
depth 3
2 x 4.5 through
( A , B , C )
3
8
5
18.3
29
5
11
11
45
36
8
0
ø42h9 –0.062
15.5
3 x 3H9
3
29
+0.025
0
ø21H9 +0.052
0
2.5
A
3H9
Long groove depth 5
(Positioning pin hole)
Angle adjustment bolt
A port
3 x 3H9
+0.025
0
B port
0.5
long groove depth 2.5
( A , B , C )
ø5g6 –0.004
–0.012
0
ø12h9 –0.043
4 x M4 x 0.7 depth 8
ø34
0
ø42h9 –0.062
36
Top ported: MSUA3-SE
A port
10
B port
11
2 x M3 x 0.5
156
9
1.5
2 x M5 x 0.8
6
Adjustment: Max. 8.2
2
6
2 x 4.5 through
Rotary Table: High Precision Type
Vane Style
Series
MSUA
These drawings indicate the condition when the B port is pressurized.
With auto switch: MDSUA3-S
CRB2
-Z
CRBU2
∗ 1) 24: When using D-90/90A/S99/S99V/S9P/S9PV/T99/T99V
30: When using D-97/93A
∗ 2) 60°: When using D-90/90A/97/93A
69°: When using D-S99/S99V/S9P/S9PV/T99/T99V
CRB1
MSU
CRJ
CRA1
-Z
CRA1
15.5
CRQ2
MSQ
MSZ
45
CRQ2X
MSQX
MRQ
Angle adjustment bolt
∗1
24
A port
B port
∗2
9°)
60° (6
29
2 x M5 x 0.8
(Port location: Side ported type only)
ø18.5
ø34
D-97/93A
∗1
30
15
D-
157
Series
MSUA
Dimensions
These drawings indicate the condition when the B port is pressurized.
MSUA7
MSUA7-S/SE
Top ported: MSUA7-SE
8 x M4 x 0.7 depth 8
C
B port
A port
7
ø6
13
50
33
B
41
14
2 x M5 x 0.8
ø37
4 x M5 x 0.8 depth 7
22.5°
5
25
3H9
A
22.5°
+0.0
0
Long groove depth 5
(Positioning pin hole)
0
ø47h9 –0.062
ø26H9 +0.052
0
( A , B , C )
4.5
10.5
2 x 5.5 through
0
ø48h9 –0.062
19
36
4
3
+0.030
depth
0
4
3 x 4H9
44
11
2 x 5.5 through
6
Angle adjustment bolt
58.5
10.5
22.3
6
13
7
36
Adjustment: Max.10.2
3 x 4H9
4 x M5 x 0.8 depth 10
+0.030
0
( A , B , C )
long groove depth 3
A port
0.5
B port
ø6g6 –0.004
–0.012
0
ø14h9 –0.043
ø42
41
0
ø48h9 –0.062
158
10
7
1.5
3
2 x M5 x 0.8
Rotary Table: High Precision Type
Vane Style
Series
MSUA
These drawings indicate the condition when the B port is pressurized.
With auto switch: MDSUA7-S
CRB2
-Z
CRBU2
CRB1
MSU
CRJ
CRA1
-Z
19
CRA1
25.5 (34.5: Connector type)
CRQ2
58.5
MSQ
Angle adjustment bolt
MSZ
CRQ2X
MSQX
MRQ
A port
B port
30
30
2 x M5 x 0.8
(Port location: Side ported type only)
Connector Type
34.5
4
8
ø42
Connector type
26.5
°
65
20.5 (26.5: Connector type)
ø25
D-
159
Series
MSUA
Dimensions
These drawings indicate the condition when the B port is pressurized.
MSUA20
MSUA20-S/SE
8 x M5 x 0.8 depth 10
C
Top ported: MSUA20-SE
ø7
8
A port
14
B port
15.5
59
38
B
48
2 x M5 x 0.8
ø42
4 x M6 x 1 depth 7
22.5°
5
25
3H9
Long groove depth 5
(Positioning pin hole)
A
22.5°
0
ø52h9 –0.074
ø30H9 +0.052
0
43
depth 4
( A, B, C)
4
5
0
–0.074
10.5
6
16
13
72
Angle adjustment bolt
2 x 6.6 through
4
6
Adjustment: Max. 10.3
+0.030
long
0
groove depth 3
8
A port
3 x 4H9
2
2 x M5 x 0.8
1
B port
ø8g6 –0.005
–0.014
(A, B, C)
0
ø16h9 –0.043
4 x M6 x 1 depth 11
ø50
48
0
ø53.5h9 –0.074
160
13
23
43
46
7
ø53.5h9
5
10.5
2 x 6.6 through
21.5
3 x 4H9
+0.030
0
+0.0
0
Rotary Table: High Precision Type
Vane Style
Series
MSUA
These drawings indicate the condition when the B port is pressurized.
With auto switch: MDSUA20-S
CRB2
-Z
CRBU2
CRB1
MSU
CRJ
21.5
CRA1
-Z
CRA1
25.5 (34.5: Connector type)
CRQ2
72
MSZ
CRQ2X
MSQX
2 x M5 x 0.8
(Port location: Side ported type only)
ø25
ø50
Connector Type
34.5
8
B port
Connector type
26.5
6
20.5 (26.5: Connector type)
31
A port
31
MRQ
5°
4
MSQ
Angle adjustment bolt
D-
161
Rotary Table: Basic Type
Vane Style
Series MSUB
Size: 1, 3, 7, 20
How to Order
Bearing type
B
Connection port location
Basic type
Side ported
Nil
Axial ported
E
Available with side ported
only, when equipped with
auto switch unit.
Free mount type
Without auto switch
M SUB 20
90 S
With auto switch
M D SUB 20
90 S
T79 L
Number of auto switches
S
Nil
With auto switch
(Built-in magnet)
∗ S (1 auto switch) is shipped with a
right-hand auto switch.
∗∗ Nil (2 auto switches) is shipped with
a right-hand and a left-hand switch.
Nominal size (Torque)
1
3
7
20
MSUB 1
MSUB 3
MSUB 7
MSUB20
Rotating angle
Electrical entry/Lead wire length
Application Symbol Rotating angle
90
90°
Single
vane
180
180°
Double
90
90°
vane
Nil
L
Z
C
CL
CN
Rotation adjustment range
Single vane: Both ends ±5° each
Double vane: Both ends ±2.5° each
Single vane
Double vane
Grommet/Lead wire: 0.5 m
Grommet/Lead wire: 3 m
Grommet/Lead wire: 5 m
Connector/Lead wire: 0.5 m
Connector/Lead wire: 3 m
Connector/Without lead wire
∗ Available only with R73, R80 and T79 type connectors.
∗∗ Lead wire with connector part nos.
D-LC05: Lead wire 0.5 m
D-LC30: Lead wire 3 m
D-LC50: Lead wire 5 m
Vane type
S
D
1 pc. ∗
2 pcs. ∗∗
Auto switch
Without auto switch (built-in magnet)
Nil
∗Refer to the table below for the applicable auto switch model.
MDSUB7
MDSUB20
Electrical
entry
Solid
state
auto
switch
Reed
auto
switch
Grommet
Load voltage
Wiring
(Output)
DC
3-wire (NPN)
3-wire (PNP)
Grommet
Connector
Grommet
Connector
Grommet
Connector
5V,12V
12V
24 V 5 V, 12 V
2-wire
5 V, 12 V,
100 V
3-wire (NPN)
3-wire (PNP)
5V,12V
12V
24 V
2-wire
∗ Lead wire length symbols: 0.5 m ······ Nil (Example) R73C
3 m ······ L (Example) R73CL
5 m ······ Z (Example) R73CZ
None ······ N (Example) R73CN
∗ Auto switches are shipped together (but not assembled).
Refer to pages 843 to 844 for detailed solid state auto
switches with pre-wired connectors.
162
Auto switch model Lead wire
type
In-line
S99
Heavy-duty
S9P
cord
T99
Parallel cord
5 V, 12 V, 24 V
90
5 V, 12 V,
Heavy-duty cord
90A
24 V, 100 V
Parallel cord
97
Heavy-duty cord
100 V
93A
S79
S7P
T79
T79C
Heavy-duty
cord
100 V
R73
R73C
100 V
R80
R80C
24 V or less
AC
Yes
Reed
auto
switch
Yes
Solid
state
auto
switch
No
Special
function
Yes
MDSUB1
MDSUB3
Type
No
Applicable
model
Indicator light
Applicable Auto Switches/Refer to pages 807 to 856 for further information on auto switches.
48V,100V
Perpendicular
S99V
S9PV
T99V
∗ Auto switches marked with “ ” are
made-to-order specifications.
Lead wire length (m) ∗
Pre-wired
Applicable load
5 None
0.5
3
connector
(Nil) (L) (Z) (N)
IC circuit
Relay,
IC circuit PLC
IC circuit
Relay,
PLC
IC circuit
Order example: MSUB20 single vane type
(connection port side location selected)
1. Standard type (Without auto switches), Rotation 90°,
side port location MSUB20-90S
2. With auto switch unit (Without auto switches), Rotation
180°, Side port location MDSUB20-180S
3. With auto switch unit + Auto switch R73, Rotation 180°,
Side port location MDSUB20-180S-R73
Rotary Table: Basic Type
Vane Style
Series
MSUB
Specifications
Model ∗3
MSUB1
Single vane
Vane type
Rotating angle ∗1
MSUB3
Double vane
Single vane
MSUB7
Double vane
Single vane
MSUB20
Single vane
Double vane
Double vane
90° ± 10° 180° ± 10° 90° ± 5° 90° ± 10° 180° ± 10° 90° ± 5° 90° ± 10° 180° ± 10° 90° ± 5° 90° ± 10° 180° ± 10° 90° ± 5°
Air (Non-lube)
Fluid
1.05
Proof pressure (MPa)
0.15 to 0.7
0.2 to 0.7
Operating pressure range (MPa)
0.15 to 1.0
CRBU2
CRB1
20 N
40 N
50 N
60 N
15 N
30 N
60 N
80 N
10 N
15 N
30 N
40 N
0.3 N·m
0.7 N·m
0.9 N·m
2.9 N·m
Allowable radial load
Allowable thrust load ∗2
Allowable moment
Bearing
MSU
CRJ
Bearing
Port location
Port size
CRB2
-Z
0.07 to 0.3 (0.5 MPa)
Rotation time adjustment range (s/90°)
Shaft load
1.5
5 to 60°C
Ambient and fluid temperature
CRA1
-Z
Side ported or Top ported
Side ported
M5 x 0.8
M3 x 0.5
Top ported
M3 x 0.5
CRA1
M5 x 0.8
∗3 Correspondence to equivalent conventional free-mount types
∗1 Single vane 90° can be adjusted to 90° ± 10° (both ends of rotation ± 5° each)
Single vane 180° can be adjusted to 180° ± 10° (both ends of rotation ± 5° each)
Free-mount rotary actuator
Rotary table
Double vane 90° type can be adjusted to 90° ± 5° (both ends of rotation ± 2.5° each)
CRBU2W10
MSUB 1
• Rotation angles other than 90° and 180° (single vane) are available by special order.
CRBU2W15
MSUB 3
∗2 The allowable thrust load is directional. Refer to the allowable load table below for
CRBU2W20
MSUB 7
details.
CRBU2W30
MSUB20
CRQ2
MSQ
MSZ
Note) Refer to page 35 for allowable kinetic energy.
Symbol
CRQ2X
MSQX
MRQ
Table Rotation Range
Weight
Angle adjustment is possible as shown in the drawings below using
adjustment bolts (A) and (B).
Adjustment range of
adjustment bolt (B)
Adjustment range of
adjustment bolt (A)
(S): 10°(± 5°)
(D): 5°(± 2.5°)
(S): 10°(± 5°)
(D): 5°(± 2.5°)
(g)
Size
1
90
°
3
7
Basic weight
Rotation
angle
Single vane
Double vane
90°
145
150
180°
140
90°
230
180°
225
90°
360
180°
355
90°
510
Auto switch unit Note)
15
240
20
375
28
580
20
505
180°
Note) Values above do not include auto switch weight.
5
22.
Positioning pin hole
Adjustment bolt (A)
Adjustment bolt (B)
Allowable Load
Do not permit the load and moment applied to the table to exceed the
allowable values shown in the table below. (Operation above the
allowable values can cause adverse effects on service life, such as play in
the table and loss of accuracy.)
For 90° rotation
Single vane (S): 80° to 100° adjustable
Double vane (D): 85° to 95° adjustable
A
180°
Adjustment range of
adjustment bolt (A)
38
B
10°(± 5°)
Adjustment range of
adjustment bolt (B)
10°(± 5°)
5°
D-
22.
Size
Positioning pin hole
Adjustment bolt (A)
Adjustment bolt (B)
For 180° rotation
Single vane (S): 170° to 190° adjustable
Allowable radial load (N) Allowable thrust load (N) Allowable moment (N·m)
1
20
A 15
B 10
0.3
3
40
30
15
0.7
7
50
60
30
0.9
20
60
80
40
2.9
∗ The double vane type is not available with 180° rotation.
163
Series
MSUB
Construction
Internal Construction of Rotary Table
For 180°
Figure in the
middle position
Single vane: Size 1, 3, 7, 20
For 90°
Figure with
pressure to A port
Single vane
Figure in the middle
position for 180°
Double vane: Size 1
Double vane
Figure with
pressure to A port
Double vane: Size 3, 7, 20
Component Parts
No. Description
1
2
Body (A)
Body (B)
3
Vane shaft
4
5
6
7
8
9
10
11
12
13
14
15
16
17
18
19
20
21
22
23
24
25
26
27
28
29
30
Stopper
Stopper
Stopper seal
Table
Stopper lever (D)
Stopper lever (S)
Lever retainer
Ring collar
Bearing
Bearing
Back-up ring
Scraper
O-ring
Adjustment bolt
Hexagon nut
Hexagon socket head cap screw
Hexagon socket head cap screw
Hexagon socket head cap screw
Button bolt
Rubber cap
Hexagon socket head set screw
Cover
Plate
Gasket
O-ring
O-ring
Label
Note
Material
Aluminum alloy
Anodized
Aluminum alloy
Anodized
Stainless steel (MSUB20: Carbon steel)
Single vane
Carbon steel
Double vane
Resin
Single vane
Stainless steel
Double vane
NBR
Anodized, Serigraph
Aluminum alloy
Heat treated, Electroless nickel plated
Carbon steel
Heat treated, Electroless nickel plated
Carbon steel
Zync Chromated
Carbon steel
Zync Chromated
Carbon steel
High carbon chrome bearing steel
High carbon chrome bearing steel
Stainless steel
NBR
NBR
Heat treated
Carbon steel
Carbon steel
NBR
SE type only
Aluminum alloy
Resin
NBR
NBR
NBR
∗ The plug is used only when the connection port is type SE.
∗ Individual part cannot be shipped.
164
Rotary Table: Basic Type
Vane Style
Series
MSUB
Construction
Internal construction with auto switch
Units are common for both single and double vane.
MDSUB1, 3
MDSUB7, 20
CRB2
-Z
CRBU2
CRB1
MSU
Auto switch unit
CRJ
Auto switches are
not included.
CRA1
-Z
MDSUB 1 double vane
type has a different figure.
CRA1
∗ Refer to page 57 for the component parts.
CRQ2
MSQ
∗ The auto switch unit can be retrofitted on a rotary actuator.
Auto switches should be ordered separately since they are not included.
Model
MSZ
Auto switch unit part no.
M(D)SUB 1
P211070-1
M(D)SUB 3
P211090-1
M(D)SUB 7
P211060-1
M(D)SUB20
P211080-1
CRQ2X
MSQX
MRQ
Auto switch block unit
MDSUB1/3
For reed auto switch
Right-handed
Left-handed
Part no.: P211070-8
Part no.: P211070-9
MDSUB7/20
For solid state auto
switch
Combination of reed and
solid state auto switches
Combination left & right-handed Combination left & right-handed
Part no.: P211070-13
Part no.: P211060-8
∗ The auto switch block unit is included in the auto switch unit.
∗ Auto switch block unit shows the necessary assembly for mounting 1 piece of auto switch to the auto
switch unit.
∗ Individual part cannot be shipped.
D-
165
Series
MSUB
Dimensions
These drawings indicate the condition when the B port is pressurized.
MSUB1 (Single vane)
MSUB1-S/SE
4 x M3 x 0.5 depth 5
2 x 4.5 through
2 x M4 x 0.7 depth 8
Long groove depth 5
(Positioning pin hole)
3 x 3H9 +0.025
depth 5
0
2 x 4.5 through
Adjustment bolt ∗
2 x 4.5 through
Adjustment:
Max. 5.75
A port
2 x M3 x 0.5
B port
2 x M4 x 0.7 depth 8
Top ported: MSUB1-SE
A port
B port
2 x M3 x 0.5
∗ If the adjustment bolt is removed, rotation will be
approximately 270° for the single vane type and 100°
for the double vane type. Since this will make it
impossible to satisfy the specifications, operate with
adjustment within the range of maximum values.
166
Rotary Table: Basic Type
Vane Style
Series
MSUB
These drawings indicate the condition when the B port is pressurized.
With auto switch: MDSUB1-S
∗1) 24: When using D-90/90A/S99(V)/T99(V)/S9P(V)
30: When using D-97/93A
∗2) 60°: When using D-90/90A/97/93A
69°: When using D-S99(V)/T99(V)/S9P(V)
CRB2
-Z
CRBU2
CRB1
MSU
CRJ
CRA1
-Z
CRA1
CRQ2
MSQ
MSZ
CRQ2X
MSQX
Adjustment bolt ∗
MSU_018.eps
MRQ
A port
B port
24 ∗1
2 x M3 x 0.5
(Port position: Side port type only)
60°
2
)∗
(69°
30 ∗1
D-97/93A
D-
∗ If the adjustment bolt is removed, rotation will be
approximately 270° for the single vane type and 100° for
the double vane type. Since this will make it impossible to
satisfy the specifications, operate with adjustment within
the range of maximum values.
167
Series
MSUB
Dimensions
These drawings indicate the condition when the B port is pressurized.
MSUB1 (Double vane)
MSUB1-D
4 x M3 x 0.5 depth 5
2 x 4.5 through
2 x M4 x 0.7 depth 8
Long groove depth 5
(Positioning pin hole)
3 x 3H9 +0.025
depth 5
0
(A, B, C)
2 x 4.5 through
Adjustment bolt ∗
2 x 4.5 through
B port
A port
Adjustment: Max. 5.75
2 x M3 x 0.5
2 x M4 x 0.7 depth 8
Top ported: MSUB1-DE
A port
B port
2 x M3 x 0.5
∗ If the adjustment bolt is removed, rotation will be
approximately 270° for the single vane type and 100°
for the double vane type. Since this will make it
impossible to satisfy the specifications, operate with
adjustment within the range of maximum values.
168
Rotary Table: Basic Type
Vane Style
Series
MSUB
These drawings indicate the condition when the B port is pressurized.
With auto switch: MDSUB1-D
∗1) 24: When using D-90/90A/S99(V)/T99(V)/S9P(V)
30: When using D-97/93A
∗2) 60°: When using D-90/90A/97/93A
69°: When using D-S99(V)/T99(V)/S9P(V)
CRB2
-Z
CRBU2
CRB1
MSU
CRJ
CRA1
-Z
CRA1
CRQ2
MSQ
MSZ
Adjustment bolt ∗
CRQ2X
MSQX
A port
MRQ
B port
24 ∗1
2 x M3 x 0.5
(Port location: Side ported type only)
2
)∗
(69°
D-97/93A
30 ∗1
60°
D-
∗ If the adjustment bolt is removed, rotation will be
approximately 270° for the single vane type and 100° for
the double vane type. Since this will make it impossible to
satisfy the specifications, operate with adjustment within
the range of maximum values.
169
Series
MSUB
Dimensions
These drawings indicate the condition when the B port is pressurized.
MSUB3 (Single vane/Double vane)
MSUB3-S/D
Top ported: MSUB3-SE/DE
A port
4 x M4 x 0.7 depth 7
B port
2 x M3 x 0.5
2 x 4.5 through
(Single vane)
2 x M4 x 0.7 depth 8
Long groove depth 5
(Positioning pin hole)
2 x 4.5 through
+0.025
3 x 3H9 0 depth 5
( A, B, C )
Adjustment bolt ∗
2 x 4.5 through
A port
Adjustment: Max. 6.25
B port
2 x M5 x 0.8
2 x M4 x 0.7 depth 8
Chamfer
(Single vane)
Chamfer
(Double vane)
The outside drawings show the single vane type, but only the
position of the chamfered sections shown in the above drawings
differs from single and double vane.
170
∗ If the adjustment bolt is removed, rotation will be
approximately 270° for the single vane type and 100° for
the double vane type. Since this will make it impossible to
satisfy the specifications, operate with adjustment within
the range of maximum values.
Rotary Table: Basic Type
Vane Style
Series
MSUB
These drawings indicate the condition when the B port is pressurized.
With auto switch: MDSUB3
∗1) 24: When using D-90/90A/S99(V)/T99(V)/S9P(V)
30: When using D-97/93A
∗2) 60°: When using D-90/90A/97/93A
69°: When using D-S99(V)/T99(V)/S9P(V)
CRB2
-Z
CRBU2
∗ If the adjustment bolt is removed, rotation will be
approximately 270° for the single vane type and 100° for
the double vane type. Since this will make it impossible to
satisfy the specifications, operate with adjustment within
the range of maximum values.
CRB1
MSU
CRJ
CRA1
-Z
CRA1
CRQ2
MSQ
MSZ
CRQ2X
MSQX
Adjustment bolt ∗
MRQ
24 ∗1
A port
B port
2 x M5 x 0.8
(Port location: Side ported type only)
2
)∗
(69°
D-97/93A
30 ∗1
60°
D-
171
Series
MSUB
Dimensions
These drawings indicate the condition when the B port is pressurized.
MSUB7 (Single vane/Double vane)
MSUB7-S/D
Top ported: MSUB7-SE
A port
4 x M4 x 0.7 depth 7
B port
2 x M5 x 0.8
2 x 5.5 through
Single vane
2 x M5 x 0.8 depth 10
Long groove depth 5
(Positioning pin hole)
2 x 5.5 through
+0.030
3 x 4H9 0 depth 6
( A, B, C )
Adjustment bolt ∗
Adjustment: Max. 8.25
2 x 5.5 through
A port
B port
2 x M5 x 0.8
2 x M5 x 0.8 depth 10 Chamfer
(Single vane)
Chamfer
(Double vane)
The outside drawings show the single vane type, but only the
position of the chamfered sections shown in the above drawings
differs from single and double vane.
172
∗ If the adjustment bolt is removed, rotation will be
approximately 270° for the single vane type and 100° for
the double vane type. Since this will make it impossible to
satisfy the specifications, operate with adjustment within
the range of maximum values.
Rotary Table: Basic Type
Vane Style
Series
MSUB
These drawings indicate the condition when the B port is pressurized.
With auto switch: MDSUB7
∗1) 25.5: Grommet type
34.5: Connector type
∗2) 20.5: Grommet type
26.5: Connector type
CRB2
-Z
CRBU2
CRB1
MSU
CRJ
CRA1
-Z
CRA1
CRQ2
MSQ
MSZ
Adjustment bolt ∗
A port
CRQ2X
MSQX
B port
MRQ
Connector Type
34.5 ∗1
20.5 ∗2
25.5 ∗1
2 x M5 x 0.8
(Port location: Side ported type only)
Connector
D-
26.5 ∗2
∗ If the adjustment bolt is removed, rotation will be
approximately 270° for the single vane type and 100° for
the double vane type. Since this will make it impossible to
satisfy the specifications, operate with adjustment within
the range of maximum values.
173
Series
MSUB
Dimensions
These drawings indicate the condition when the B port is pressurized.
MSUB20 (Single vane/Double vane)
MSUB20-S/D
Top ported: MSUB20-SE
4 x M5 x 0.8 depth 8
B port
A port
2 x 6.6 through
2 x M5 x 0.8
(Single vane)
2 x M6 x 1 Depth 12
Long groove depth 5
(Positioning pin hole)
2 x 6.6 through
+0.030
3 x 4H9 0 depth 6
( A, B, C )
Adjustment bolt ∗
2 x 6.6 through
A port
B port
Adjustment: Max. 8.75
2 x M5 x 0.8
2 x M6 x 1 depth 12 Chamfer
(Single vane)
Chamfer
(Double vane)
The outside drawings show the single vane type, but only the
position of the chamfered sections shown in the above drawings
differs from single and double vane.
174
∗ If the adjustment bolt is removed, rotation will be
approximately 270° for the single vane type and 100° for
the double vane type. Since this will make it impossible to
satisfy the specifications, operate with adjustment within
the range of maximum values.
Rotary Table: Basic Type
Vane Style
Series
MSUB
These drawings indicate the condition when the B port is pressurized.
With auto switch: MDSUB20
∗1) 25.5: Grommet type
34.5: Connector type
∗2) 20.5: Grommet type
26.5: Connector type
CRB2
-Z
CRBU2
CRB1
MSU
CRJ
CRA1
-Z
CRA1
CRQ2
MSQ
MSZ
Adjustment bolt ∗
CRQ2X
MSQX
A port
MRQ
B port
Connector Type
34.5 ∗1
20.5 ∗2
25.5 ∗1
2 x M5 x 0.8
(Port location: Side ported type only)
Connector
D-
26.5 ∗2
∗ If the adjustment bolt is removed, rotation will be
approximately 270° for the single vane type and 100° for
the double vane type. Since this will make it impossible to
satisfy the specifications, operate with adjustment within
the range of maximum values.
175
Series MDSU
Auto Switch Mounting
Table Positioning Pin Hole Rotation Range and Auto Switch Mounting Position
MSU1/3
Single vane type
Double vane type (MSUB only)
Auto Switch for END 1
Auto Switch
for END 2
Auto Switch
for END 1
Auto Switch
for END 2
Auto Switch
for END 1
Auto Switch for END 2
MSU7/20
Single vane type
Double vane type (MSUB only)
Auto Switch for END 1
Auto Switch
for END 2
Auto Switch
for END 1
Auto Switch
for END 2
Auto Switch
for END 1
Auto Switch for END 2
Auto Switch Operating Angle and
Hysteresis Angle
• In drawings that show the rotation range, the arrows on the solid line 90° (180°)
indicate the rotation range of the positioning pin holes on the table surface.
When the pin hole is at END1, the END1 auto switch operates, and when the
pin hole is at END2, the END2 auto switch operates.
• The arrows on the broken line indicate the rotation range of the internal magnet.
The rotation range of each auto switch can be reduced by moving the END1
auto switch clockwise and the END2 auto switch counterclockwise.
Table
B port
A port
Positioning pin hole
176
Auto switch
Model
Operating angle
MDSU1, 3
110°
MDSU7, 20
90°
Hysteresis angle
10°
Note) Since the above values are only provided as
a guideline, they are not guaranteed. In the
actual setting, adjust them after confirming
the auto switch performance.
Refer to page 142 for operating angle of auto
switch and angle of hysteresis and the procedure
for moving the auto switch detection position.
Auto Switch Mounting
Series
MDSU
MSU1· 3Auto Switch Mounting
External view and descriptions of auto switch unit
The following shows the external view and typical descriptions of the auto switch.
Cover (B)
CRB2
-Z
Cross recessed round head screw (1)
(Right-hand and left-hand)
Cross recessed round head screw (2)
(Right-hand and left-hand)
CRBU2
CRB1
Cover (A)
MSU
CRJ
Switch block (B)
(Left-hand)
CRA1
-Z
Switch block (A)
(Right-hand)
CRA1
CRQ2
Solid state auto switch
Reed auto switch
MSQ
<Applicable auto switch>
<Applicable auto switch>
MSZ
3-wire······ D-S99(V)/S9P(V)
2-wire······ D-T99(V)
D-97/93A(With indicator light)
D-90/90A(Without indicator light)
CRQ2X
MSQX
∗ For details about shape and specifications of the auto switch, refer to
SMC’s catalog.
qSwitch block detaching
Holding block (A)
Remove the cross recessed
round head screw (1) to detach the switch block.
∗ For details about shape and specifications of the auto switch, refer to
SMC’s catalog.
MRQ
qPreparations
Loosen the cross recessed round
head screw (2). (About 2 to 3 turns)
∗ This screw has been secured
temporarily at shipment.
wSolid state auto switch
mounting
Secure the solid state auto
switch with the cross recessed
round head screw (1) and
holding block (A).
Proper tightening torque:
0.4 to 0.6(N·m)
∗ Since the holding block (A)
moves inside the groove,
move it to the mounting position beforehand.
∗ Use the auto switch after the
operating position has been
adjusted with the cross recessed round head screw
(1). For details about how to
adjust the operating position,
refer to SMC’s catalog.
D-T99
wReed auto switch mounting
D-93A
Insert the reed auto switch until it
is in contact with the hole in the
switch block.
∗ Insert the D-97/93A in the direction shown in the figure on
the right.
∗ Since the D-90/90A is a round
type, it has no directionality.
eReed auto switch securing
Tighten the cross recessed round
head screw (2) to secure the reed
auto switch.
Proper tightening torque:
0.4 to 0.6(N·m)
∗ Use the auto switch after the op-
D-
erating position has been adjusted with the cross recessed
round head screw (1). For details
about how to adjust the operating position, refer to SMC’s catalog.
177
Series MSU
Specific Product Precautions
Be sure to read before handling. Refer to front matter 35 for Safety Instructions
and pages 4 to 14 for Rotary Actuator and Auto Switch Precautions.
Selection
Maintenance
1. Ensure the load energy within the product’s
allowable energy value.
<High precision type/MSUA>
In case a rotary unit and table unit are required for
maintenance, order with the unit part numbers shown
below.
Warning
Caution
Operation with a load kinetic energy exceeding the allowable
value can cause human injury and/or damage to equipment or
machinery. (Refer to model section procedures in this
catalog.)
Caution
Rotary unit
1. When there are load fluctuations, allow a sufficient
margin in the actuator torque.
In case of horizontal mounting (operation with
product facing sideways), malfunction may occur
due to load fluctuations.
Model
Unit part no.
MSUA 1-S
P402070-2A
MSUA 1-SE
P402070-2B
MSUA 3-S
P402090-2A
MSUA 3-SE
P402090-2B
MSUA 7-S
P402060-2A
MSUA 7-SE
P402060-2B
MSUA20-S
P402080-2A
MSUA20-SE
P402080-2B
Mounting
Caution
1. Adjust the rotation angle within the prescribed
ranges.
Single vane type: (90°±10°, 180°±10°) (±5° at end of rotation)
Double vane type: (90°±10°) (±2.5° at end of rotation)
Table unit
Model
Unit part no.
MSUA 1- 90
P402070-3A
MSUA 1-180
P402070-3B
MSUA 3- 90
P402090-3A
∗ Series MSUB only.
Adjustment outside the prescribed ranges may cause
malfunction of the product or failure of switches to operate.
MSUA 3-180
P402090-3B
MSUA 7- 90
P402060-3A
MSUA 7-180
P402060-3B
2. Adjust the rotation time within the prescribed values
using a speed controller, etc. (0.07 to 0.3 s/90°)
MSUA20- 90
P402080-3A
MSUA20-180
P402080-3B
Adjustment to a speed slower than 0.3 s/90° can cause
sticking and slipping or stopping of operation.
178
Note 1) Note that the rotation angle should not be changed even though
the rotary unit has been changed. For maintenance, order units
with a part number suitable for the model being used.
Note 2) Due to the integral construction of the MSUB series, the rotary
and table units cannot be ordered separately.