Rod-style Actuator TR Rod-style Actuator 1. Structure of the Rod-style Actuator End rod Linear ball bearing Sensor Rod-style Actuator Motor Coupling Ball screw Angular ball bearing Rotational stop shaft 2. Features of the Rod-style Actuator • Fitted internally with precision miniature ball screws (manufactured by Nidec Tosok Corp.) * Shaft diameter, Ø4 mm; lead, 1 mm • High accuracy, high thrust • Equipped internally with an origin sensor (ORG) and ± limit sensors (EL+ and EL-) • Employs a motor manufactured by Nidec Group • Optimal for an alignment stage - 14 - 3. Specifications for the Rod-style Actuator 3.1 Notation for Rod-style Actuator Model Numbers Model numbers for TOSOK rod-style actuators are expressed using the following items. TR 04 20 A S 0 R 2 – B 1 Connector None Bracket None Effective stroke 20 20 mm (±10 mm) 40 40 mm (±20 mm) 60 mm (±30 mm) 60 B1 B2 Shape of axial tip Standard specifications A D Custom part (000~999) Not provided (without connector) Not provided Horizontal type with respect to axis Vertical type with respect to axis Sensor ± limit sensors (×2) R1 End made to M6 male screw specifications End made to M5 female screw specifications Spherical end specifications R2 ± limit sensors (×2), origin sensor (×1) (If not a standard product, considered a quasi-standard or special-purpose product) Motor S0 2-phase stepping motor Nidec Servo Corporation * Please inquire if planning to use a motor from another manufacturer. - 15 - Rod-style Actuator C Rod diameter (screw diameter) 04 4 mm C S Identification Standard S part Model Rod-style actuator B □□ 3. Specifications for the Rod-style Actuator 3.2 TR04 series specifications Depth, Rod-style Actuator Fig. 1 Dimensions (mm) a b c d Limit stroke (mm) Effective stroke (mm) Resolution (μm/P)* Single-step Driver (optional) Half-step Nidec Servo Corporation Quarter-step Thrust (N (kgf)) Maximum speed (mm/s) Positioning accuracy (μm) Repeated positioning accuracy (μm) Lost motion (μm) Nominal number TR0420□S0**-*** TR0440□S0**-*** TR0460□S0**-*** 8.2 10 78 169.8 20 (±10) 16 (±8) 5 2.5 1.25 369 (37) 10 10 ±1 1 8.2 20 118 219.8 40 (±20) 36 (±18) 5 2.5 1.25 369 (37) 10 20 ±1 1 8.2 30 158 269.8 60 (±30) 56 (±28) 5 2.5 1.25 369 (37) 10 30 ±1 2 *Resolution will be set to the specifications for the driver recommended by Nidec Tosok Corp.; please contact Nidec Tosok Corp. with inquiries about other resolution settings. - 16 - 3.3 List of specifications for the TR04 Series Shape of tip B C D Rod-style Actuator A Fig. 2 TR0420 Type Shape of tip Dimensions (Refer to Fig. 1) a b c d A Standard 8.2 10 78 169.8 Nominal number B C M6 male screw M5 female screw 23 23 10 10 78 78 185 185 D Spherical 27 10 78 189 A Standard 8.2 20 118 219.8 Nominal number B C M6 male screw M5 female screw 23 23 20 20 118 118 235 235 D Spherical 27 20 118 239 A Standard 8.2 30 158 269.8 Nominal number B C M6 male screw M5 female screw 23 23 30 30 158 158 285 285 D Spherical 27 30 158 289 TR0440 Type Shape of tip Dimensions (Refer to Fig. 1) a b c d TR0460 Type Shape of tip Dimensions (Refer to Fig. 1) a b c d - 17 - 3. Specifications for the Rod-style Actuator 3.4 Optional bracket The following two types of brackets have been made available for attachment to a TR04 Series model. Horizontal bracket Model number: B1 hole countersunk, depth 5.5 Rod-style Actuator hole countersunk, depth 5 (Square configuration) Vertical bracket Model number: B2 4-Ø3.5 hole Ø6.5 countersunk, depth 5 P. C. D26 (Square configuration) 4-Ø3.5 hole Ø6.5 countersunk, depth 5 (Square configuration) - 18 - 4. Terms for Rod-style Actuator Accuracies 4.1 Positioning accuracy [JIS B 6191-1993 compliance] “Allowable limit values for deviations in the position reached by one point of a moving part after operation from the target position.” The “Positioning Accuracy” is defined as the maximum difference, which is calculated by taking the position for positioning performed sequentially in one direction per standard length (angle) set for each automatic stage model and measuring the difference between the standard length (angle) that the position should have been moved and the amount that it was actually moved. Deviation Standard length, L Rod-style Actuator Amount of distance moved ΔL Position reached Target position 4.2 Repeated positioning accuracy [JIS B 6191-1999 compliance] Positioning is performed multiple times at a given point (a standard measurement point) from the same direction, and the resultant position is measured. Seven different measurements are performed for the measurement point to find the maximum difference in positioning. The “Repeating Positioning Accuracy” is defined as a value found by having the procedure performed for three points, one in the center and one on each of the two sides, and then taking the maximum value for the values obtained and multiplying by 1/2 and attaching the ± sign. - 19 - Ma dif ximu fer m enc e 4. Terms for Rod-style Actuator Accuracies 4.3 Lost motion [JIS B 6333-1999 compliance] Positioning is performed in the positive direction (in the CW direction of motor revolution) with respect to a given position (a standard measurement position), and that resultant position is measured. After the position is moved in the positive direction, positioning is then performed with a command to move the unit the same amount in the negative direction (in the CCW direction of motor revolution), and that resultant position is measured. Rod-style Actuator After the position is moved in the negative direction, positioning is then performed with a command to move the unit the same amount in the positive direction, and that resultant position is measured. The positioning measurements are performed seven times in the positive direction and seven times in the negative direction for obtaining the difference in average values for the stop position. “Lost Motion” is defined as the maximum value obtained from measurements performed on the three points, one point at the center and one point on each of the two sides. - 20 - 5. Precautions for Handling 5.1 When using the actuator horizontally The life of the actuator will be shortened dramatically if a load is applied against the axial tip in the direction of the arrow, as shown in Fig. 3. W Fig. 3 5.2 When using the actuator vertically If the actuator is to be used as shown in Fig. 4, the tip axis Rod-style Actuator may move when the power to the driver is turned OFF if a load of approximately 98 N (10 kgf) is applied. When using the actuator vertically, provide a braking mechanism or a locking mechanism in the load part. For details, please contact Nidec Tosok Corp. W Fig. 4 5.3 Other 1Whenever an actuator is to be used, using the actuator in a location in which a lot of dust, oil droplets, water droplets, or the like is produced may cause it to fail. 2Be sure to periodically wipe away old grease on the tip axis and apply new grease. 3Do not change the position of the sensors as doing so may cause the device to malfunction. Furthermore, please do not apply excessive force on the sensor cables as doing so may cause the position of the sensors to move or the device to fail. 4This product is a precision mechanical equipment. Please be sure to refrain from having the product disassembled, assembled, or adjusted by anyone other than a Nidec Tosok Corp. representative as doing so may result in breakdown or accident. Note that Nidec Tosok Corp. cannot guarantee the precision of the product once it has been disassembled. - 21 -