Technical Data for Alicat MCS and MCRS Mass Flow Controllers
0 to 0.5SCCM Full Scale through 0 to 3000SLPM Full Scale
Standard Operating Specifications (Contact Alicat for available options)
Specification
MCS & MCRS Series Mass Flow Controller
Description
Accuracy
± (0.8% of Reading + 0.2% of Full Scale)
At calibration conditions after tare
1
± (0.4% of Reading + 0.2% of Full Scale)
At calibration conditions after tare
High Accuracy Option
Repeatability
± 0.2%
Full Scale
Operating Range
1% to 100% Full Scale
Turndown Ratio
100 : 1
Typical Response Time
Measure and Control
100
Standard Conditions (STP)
Milliseconds (Adjustable)
25ºC & 14.696PSIA
Operating Temperature
Mass Reference Conditions
−10 to +50
ºCelsius
Zero Shift
0.02%
Full Scale / ºCelsius / Atm
Span Shift
0.02%
Full Scale / ºCelsius / Atm
Humidity Range
0 to 100%
Controllable Flow Rate
Non–Condensing
102.4%
Maximum Pressure
Full Scale
145
PSIG
Input /Output Signal Digital
Mass Flow, Volumetric Flow, Pressure & Temperature
Input / Output Signal Analog
Mass Flow
Optional Input / Output Signal
Secondary Analog
0-5Vdc
Mass Flow, Volumetric Flow, Pressure or Temperature
Electrical Connections
0-5Vdc or 0-10Vdc or 4-20mA
8 Pin Mini-DIN, DB9 or DB15
Supply Voltage
MCS: 12 to 30 Vdc (15-30Vdc for 4-20mA outputs)
MCRS: 24 to 30 Vdc
Supply Current
MCS: 0.250Amp
MCRS: 0.750Amp
MCS: None
MCRS: Mount with valve cylinder vertical & upright
Mounting Attitude Sensitivity
Warm-up Time
Wetted Materials3
RS-232 Serial or RS-485 Serial or PROFIBUS2
<1
Second
316LSS, 303SS, 430FRSS, FFKM (Kalrez) standard, Viton, EPDM, Buna, Neoprene as needed for
some gases.
1. High Accuracy option not available for units ranged over 500SLPM.
2. If selecting PROFIBUS no analog signal is available. PROFIBUS units do not have the display. See PROFIBUS specifications for PROFIBUS
supply voltages and currents.
3. If your application demands a different material, please contact info@alicat.com or 888-290-6060 for available options.
Mechanical Specifications
Full Scale Flow Mass Controller
Process Connections1
Pressure Drop2 (PSID)
M-5 (10-32) Female Thread*
1.0
1.0
1.5
3.0
2.0
5.5
20.0
Mechanical Dimensions
MCS 0.5SCCM to 50SCCM
MCS 100SCCM to 500SCCM
MCS 1SLPM
MCS 2SLPM
MCS 5SLPM
MCS 10SLPM
MCS 20SLPM
4.4”H x 3.4”W x 1.1”D
4.6”H x 3.6”W x 1.1”D
1/8” NPT Female
MCRS 100SLPM
5.7”H x 7.7”W x 2.3”D
1/4” NPT Female
3.2
MCRS 250SLPM
6.0”H x 7.7”W x 2.3”D
1/2” NPT Female
2.4
MCRS 500SLPM
6.5
MCRS 1000SLPM
6.0”H x 7.3”W x 2.3”D
3/4” NPT Female
MCRS 1500SLPM
MCRS 2000SLPM
6.0”H x 8.1”W x 2.9”D
MCRS 3000SLPM
6.0”H x 8.9”W x 2.9”D
14.0
17.0
28.6
1-1/4” NPT Female
16.8
* Units ≤50SCCM F.S. are shipped with M-5 (10-32) Male Buna-N O-ring face seal to 1/8” Female NPT fittings.
These adaptor fittings were selected for customer convenience in process connection. It should be noted that the 1/8” Female NPT introduces
additional dead volume. To minimize dead volume, please see Accessories for the M-5 (10‑32) Male to 1/8”OD compression fitting.
1. Compatible with Beswick®, Swagelok® tube, Parker®, face seal, push connect and compression adapter fittings.
2. Venting to atmosphere. Lower Pressure Drops Available, Please contact info@alicat.com or 888-290-6060.
Standard Compatible Gas List for MC and MCR Series Controllers
0
1
2
3
4
5
6
7
8
9
10
11
12
13
Air
Argon
Methane
Carbon Monoxide
Carbon Dioxide
Ethane
Hydrogen
Helium
Nitrogen
Nitrous Oxide
Neon
Oxygen
Propane
normal-Butane
Air
Ar
CH4
CO
CO2
C2H6
H2
He
N2
N2O
Ne
O2
C3H8
n-C4H10
14
15
16
17
18
19
20
21
22
23
24
25
26
Acetylene
Ethylene
iso-Butane
Krypton
Xenon
Sulfur Hexafluoride
75%Ar / 25% CO2
90% Ar / 10% CO2
92% Ar / 8% CO2
98% Ar / 2% CO2
75% CO2 / 25% Ar
75% Ar / 25% He
75% He / 25% Ar
90% He / 7.5% Ar / 2.5% CO2
27
Helistar® A1025
C2H2
C2H4
i-C4H10
Kr
Xe
SF6
C-25
C-10
C-8
C-2
C-75
A-75
A-25
A1025
90% Ar / 8% CO2 / 2% O2
Star29
Stargon® CS
29
95% Ar / 5% CH4
P-5
30
Nitric Oxide
NO
31
Nitrogen Triflouride
NF3
32
Ammonia
NH3
34
Hydrogen Sulfide
H2S
36
Propylene
C3H6
In addition, the following gases are available
upon request:
Nitrogen Dioxide to 0.5% in an
NO2
inert carrier
Refrigerant gases to 100%
Other gases to 1000 ppm in an inert carrier
28
If your application requires another gas or gas mixture, please contact Info@alicat.com or call 888-290-6060.
DOC-SPECS-MCSCONTROLLERS Rev. 5
1
March 14, 2013