CANDELA 6300
SERIES
Optical Surface Analyzer
A new level of topography measurement
and defect inspection capability
METROLOGY & INSPECTION
The Candela 6300 Series Offers
As a leading provider of process control and yield management solutions for the data storage industry,
KLA-Tencor offers a portfolio of products to help customers rapidly understand and resolve complex
manufacturing problems, resulting in faster time to market and increased product yields.
Growth in data storage is being driven by a wave of innovative consumer electronics with small form
factors and immense storage capacities, such as MP3 players or video-capable cell phones. To make
these devices possible, data storage manufacturers are currently embracing ultra-smooth glass media
and perpendicular recording technologies. These technologies enable the creation of extremely small
data bits in the magnetic media, and reduce the head-disk interface (HDI) for the flying of recording
disk heads closer to the disk surface.
KLA-Tencor’s Candela Series of Optical Surface Analyzers set the industry standard for magnetic disk
media inspection. These highly versatile systems inspect metal or glass substrates, as well as finished
disks — offering numerous metrology and defect inspection applications.
•
Industry’s widest spatial bandwidth and lowest noise floor
•
Circumferential, radial roughness and waviness metrology
•
Repeatable metrology which correlates to AFM measurements on metal and glass media
•
Fast and full-surface coverage on all disk form factors
•
High sensitivity for faint scratches, stains and particle inspection
•
Innovative Optical Surface Analysis (OSA) technology
METROLOGY & INSPECTION
Candela 6300 Series
A New Approach
The 6300 series harnesses patented multi-channel optics, combined
with unique laser stability management technology, to deliver powerful measurement capabilities for edge roll-off and texture/polish
uniformity, as well as scratch and particle inspection. The system’s
leading-edge optical scanning technology enables full surface disk
topography metrology in both radial and circumferential directions,
and allows manufacturers to use a single tool to measure the entire
spatial spectrum. Increased laser power, a lower noise floor and new
optics design eliminate the need for sputtering glass substrates in
order to detect defects and also allows for identification of roughness
variations of less than 0.1 Angstroms.
Ionic or Organic Contamination
Carbon Overcoat (3 to 5nm)
Ai
rF
Magnetic Head
Slider
Dust
l ow
Flying Height (10nm)
Lubricant (1nm)
Recording Layer
Carbon Overcoat (3 to 5nm)
Smaller form factors, glass substrates, higher areal densities and
improved reliability are driving the needs for better control of the
Head-Disk Interface (HDI).
KLA-Tencor’s Candela™ 6300-series optical surface analyzer system
addresses emerging requirements by delivering best-in-class metrology and inspection capabilities for data storage substrates and finished
media. As data storage manufacturers strive to enhance device storage
capacities by reducing head fly-heights even further, controlling disk
surface roughness is becoming increasingly important. The 6300 series
leverages the industry’s widest spatial bandwidth coverage (from 0.22
microns to 2,000 microns) and a noise floor below 0.5 Angstroms to
satisfy requirements for comprehensive roughness and micro-waviness
measurements.
Compared with other systems such as scatterometers or laser Doppler
vibrometry systems, the 6300 series is the best solution to provide radial
and circumferential data, and fast, full-surface topography information
on ultra-smooth substrate and media. The 6300 series provides full-disk,
non-contact coverage at a much lower cost of measurement than stylus
profilers or atomic force microscopy (AFM) technologies. Furthermore,
the 6300 series offers excellent correlation to AFM — simultaneously
reducing AFM dependence and making it a more efficient reference
source at a lower cost of measurement.
The Candela 6300 Series is the ideal solution for next-generation process
control of disk topography on conventional metal or glass substrates
and finished media.
Radial
Optical Path
Two 50mW
405nm violet lasers
Circumferential
Optical Path
Comparison of Spatial Wavelength Bandwidths
Roughness
AFM
Waviness
0.10
Scatterometer
0.70
Stylus Profiler
8.2
1000
LDV
5.0
0.22
-1
10
1.8
0
10
Scatter Detector for
Nano-Roughness
New
0.50
Candela
Technique
Circumferential
Detector for Radial
Micro-Roughness
and Waviness
100
2000
4.3
Radial Detector for
Circumferential
Micro-Roughness
and Waviness
2000
1
10
2
10
3
10
Spatial Wavelength (µm)
The 6300 system has the widest spatial bandwidth from 0.22 microns
to 2,000 microns.
The Candela Optical Surface Analyzer (OSA ) topography system.
HDI Characterization
The system enables characterization of head dynamics with true
three dimensional disk topography and an understanding of the
impact of radial topography to HDI issues. These graphs illustrate
the importance of disk topography for flying-height. The graphs
show good correlation between the 6300 series topography data
and modeled flying-height for three different media suppliers. The
disk with the least topography and flying-height variation would
be the optimal choice.*
Site A (RMS 2.55 Å)
Site C (RMS 2.88 Å)
Site B (RMS 2.84 Å)
Site D (RMS 3.12 Å)
The 6300 Series offers identification of both radial and circumferential
direction roughness variations of less than 0.1 Angstroms.
6300 Series Radial Topography Data for three different
media suppliers.
Modeled flying-height for three different media suppliers.
* “Effect of radial and circumferential disk features on slider dynamics”,
Rohit Ambekar–UC Berkeley, Lanshi Zheng–WD , et. al.
Surface topography with the 6300 series can be measured in
either the circumferential or radial direction.
Optical Surface Analyzer
Full Surface, 2D Data
Excellent correlation to AFM on bare glass and metal
substrates – thus minimizing testing time and costs.
The radial channel (4.3 to 500 microns) is used to detect topography along the circumferential direction while the circumferential
channel (4.3 to 2000 microns) is used to detect topography along
the radial direction.
Nano-roughness correlation to AFM on metal substrate.
Micro-roughness correlation to AFM on glass substrate.
Intra- and inter-disk topography variation.
METROLOGY & INSPECTION
Candela 6300 Series
Glass
Substrate
Candela 6320
Candela 6300
A fully automated cassette-to-cassette
system, KLA-Tencor’s Candela 6320
offers a completely automated operation,
making it ideal for routine production
monitoring applications. The system
design minimizes operator interaction
with the disk and system – as well as the
potential for human error. A ULPA
filtration system maintains a Class 10
environment in the scan area.
The Candela 6300 is a manual system
well suited for both laboratory and
low volume production applications.
Highly versatile and easy to use, the
6300 inspects both metal or glass
substrates and finished media.
Mechanical
Polish Wash Texture
Final
Wash
Laser
Texture Sputter
6100 series
Aluminum
Substrate
Final Tape Glide and
Certify Test
Burnish
Lube
Media
Finished
6100 series
Carbon uniformity analysis
Scratch inspection
Carbon void inspection
Particle inspection
Soft under layer uniformity
analysis
Scratch and ridge inspection
Roughness and waviness
analysis
Defect inspection
Texture uniformity analysis
Lube uniformity analysis
Defect Inspection
Roughness and waviness
analysis
Particle and stain inspection
As a leading provider of process control and yield management solutions for the data storage industry, KLA-Tencor offers a portfolio of products to help
customers rapidly understand and resolve complex manufacturing problems — resulting in faster time to market and increased product yields.
In the front-end of thin film head wafer manufacturing, KLA-Tencor is the leading provider of the same process control equipment with which we serve the
semiconductor industry, with particular strength in photo-lithography and magnetics control. In the back-end of head manufacturing, we provide a range of
test equipment, including fly-height and head resonance testers and surface profilers. In substrate and media manufacturing, we offer metrology and defect
inspection solutions with our Candela™ optical surface analyzers and ADE magnetic and optical mappers. Leveraging our experience in magnetics, we also
meet our customers’ challenges in the emerging MRAM (magnetic random access memory) market.
KLA-TENCOR SERVICE/SUPPORT
Customer service and support are an integral part of KLA-Tencor’s yield optimization solution. Our vast customer support
organization services our worldwide installed base and is responsible for customer support following shipment of equipment
and software. Services include system installation, secure online monitoring, on-site repair, telephone support, relocation
services, and selected post-sales applications.
© 2007 KLA-Tencor Corporation. All brands or product names may be trademarks of their respective companies.
KLA-Tencor reserves the right to change the hardware and/or software specifications without notice.
Printed in the USA
PB-CAN6300-02/07
KLA-Tencor Corporation
160 Rio Robles
San Jose, CA 95134
phone 408.875.3000
fax 408.875.4144
www.kla-tencor.com