Electrolytic Copper Plating Additives and Contaminants Wayne Jones Electrolytic Copper Plating Chemistry Typical DC Acid Copper Electroplating Solution contains: Inorganic • Sulfuric Acid (180 - 250 g/l) • Copper Sulfate (40 - 100 g/l) • Hydrochloric Acid (25 - 100 mg/l) > > Organic • Brightener (2 - 10 mls/l) • Leveler (5 - 15 mls/l) • Carrier (25 - 100 mls/l) > Water (Balance) 2 Electrolyte Control Sulfuric Acid – Virtually unconsumed…Dragout ¾ Titration or Specific Gravity Copper Sulfate – Maintained by Anode Erosion ¾ Titration, UV/Vis Chloride – Maintained by chemical analysis ¾ Titration, Ion Specific Electrode, UV/Vis 3 Additives – Mostly Proprietary Brighteners – are plating accelerators, which act as a micro-leveler and impact grain refinement. They tend to be attracted to cathode induction zone points of higher electropotential, temporarily packing the area and forcing copper to deposit elsewhere. As the copper deposit levels, the local point of high potential disappears and the brightener drifts away, as well as depleting (hydrolysis) to a higher level of activity. Chemical Family - Organic Sulfides, Disulfides, Thioethers, Thiocarbamates. Levelers – are strong secondary plating inhibitors, which typically co-function with Brighteners to reduce copper growth at protrusions and edges. They improve mass transfer to localized sites of lesser electro-potential or feature height. Chemical Family – Quaternary Nitrogen Cmpd. Carriers – are plating inhibitors or suppressors, they create and maintain a defined diffusion layer at the Anode (which regulate the flow of Cu+2 ions into the electrolyte and ultimately to the cathode (board surface). Carrier depletion occurs as the PEG cleaves. Chemical Family – Polyethylene Glycol (PEG), Polyalkylene Glycol (PAG) Chlorides – mild plating inhibitors, which stabilizes the Cu+1 ion that serves as an intermediate in the electro-deposition process during reduction to Cu +2. Additionally they modify adsorption properties of carrier to influence thickness distribution. Chemical Family – Hydrochloric Acid 4 Hull Cell – Additive Control ASF 75, Needs Brightener Carbon Treated Copper Bath 5 ASF 90, Proper Operating Range CVS/CPVS – Cyclic (Pulse) Voltammetery Stripping CVS/CPVS is an indirect bath measurement which measures the “combined” effect of the additives and by-products on the plating quality 6 CVS and CPVS Instrumentation 7 Copper Anodes Phosphorized: 150 – 650 ppm P Oxygen Free Casting Grain structure grows from surface to the center, resulting in uniform corrosion of the anode. Anodes are “conditioned” when new by developing a necessary black CuO film – Dummying. Balls, Nuggets, Bars. Typical Chemical Analysis Contam inant Concentration, Wt % Lead 0.0002 Zinc 0.0001 Nickel 0.0002 Iron 0.0004 Sulfur <0.0010 Antimony 0.0001 Arsenic 0.0002 Silver <0.0010 Tin 0.0002 Anode surface area and continuous bath agitation is critical. 8 Pattern Plating Full panel Electroless Copper deposition. Photoresist apply, expose with positive image artwork majority of copper surface shielded, develop. 1) 2) a) b) c) d) Plate Copper, Plate Tin (Etch Resist) 3) a) 4) 5) 6) 7) 9 Reduced electroplated surface. Lower current capacity required. Less copper anode bank consumption. Less copper in etchant. Adds several additional wet process baths. Strip Photoresist – Potassium Carbonate Etch Copper – Ammoniacal Strip Tin Resist – Nitric Acid Antioxidant - BTA Panel Plating Full panel Electroless Copper deposition. Full panel Electrolytic Copper plated. 1) 2) a) b) c) d) Photoresist apply – Negative Image Develop - Carbonate Etch – Ammoniacal or Cupric Chloride 3) 4) 5) a) 6) 7) 10 Higher current capacity required. Significant copper anode bank erosion. Smooth, even, bright finish on panel and hole walls. Easily cleaned/prep’d for downstream processing. Significant copper buildup in etch, more maintenance. Strip – Potassium Hydroxide Antioxidant - BTA Contaminants – Drag in / Leach Out Inorganics – ICP / GFAA analysis Trace Metals ¾ Iron (Fe) ¾ Calcium (Ca) ¾ Tin (Sn) ¾ Lead (Pb) ¾ Nickel (Ni) ¾ Antimony (Sb) Organics – Hull Cell / CVS / TOC ¾ Cleaner/Predip surfactants (inactive) ¾ Resist Photo-initiators (inactive) ¾ Anode Bag Sizing (inactive) ¾ Additive breakdown products / fragmentation (active) 11 Chemistry Impact / FMEA Defect / Failure Mode Inorganic CuS04 Burned Copper Deposit Low Poor Throwing Power High H2SO4 Cl- Brightener Low / High Low Low Low / High Leveler Carrier Low Low Poor Leveling Roughness Organic Low Pitting Streaking High Poor response to additives High Step Plating Grain Structure Poor Low High Low Anode Color Green Low High Anode Color Dark Low Anode Color Bright High Soft Copper Deposit Low Brittle Copper Deposit High High Low Tensile Strength Dull/Matte finish Copper Nodules Spiked Copper Deposit 12 High Low / High Low Contaminant & Process Impact / FMEA Defect / Failure Mode TOC Particulates Trace Burned Copper Deposit Poor Throwing Power Poor Leveling Mechanical / Electrical Contaminant / Impurities ASF Anodes Circulation Agitation Temp High High High Low Low High High Roughness High Low High High Pitting High Streaking High High Poor response to additives High High High / Low High Filtration Low High / Low High Step Plating Grain Structure Poor Anode Color Green Anode Color Dark Anode Color Bright Soft Copper Deposit High Brittle Copper Deposit High Low Tensile Strength High High High Dull/Matte finish Copper Nodules Spiked Copper Deposit 13 High Low / High Low / High Burnt Plating – Unbalanced CD / ASF 14 Even After Microetch 15 Plating Characteristics Impact Etch Differential 16 Topography Differential – SEM/BSE 17 Copper Topography Variations (80x) Burnt Copper Plating Detectable 18 Transitional Bright / Leveled Spiked Copper – Surface / Knee Courtesy Sanmina-SCI, Owego 19 Spiked Copper – Hole Wall Courtesy Sanmina-SCI, Owego 20 Grain Structure Failure – Blind Via Courtesy Sanmina-SCI, Owego 21 Copper Chicklets – Grain Structure Courtesy Sanmina-SCI, Owego 22 Cobblestones – Hole Wall Courtesy Sanmina-SCI, Owego 23 Cobblestones – Hole Wall Courtesy Sanmina-SCI, Owego 24 Surface Nodule – Process Debris Courtesy Sanmina-SCI, Owego 25 Surface Nodule - Debris Courtesy Sanmina-SCI, Owego 26 Barrel Crack / Lam Voids – 6x TS Courtesy Sanmina-SCI, Owego 27 Summary: Surface Contaminant Evaluation Macro Level: PCB fabricator - SPC, IPC TM’s and spec’s, customer requirements, cleanliness, water quality, post process residues, solderability, visual inspection. Micro Level: Post fab evaluations employing FTIR, Raman Spectroscopy, HPLC, SEM - EDS/Auger, IC, ICP/GFAA. What to look for: ¾Process residues (MOP, Resist Remnants, HW Salts, OSP)? ¾Co-plated contaminants (inorganic / organic)? ¾Hydrides, Oxides, Sulfides, Carbides, Halides? ¾Gas entrapment? What’s changed the most: ¾Etch Resists (Sn vs Sn/Pb) and strip chemistry? ¾High Temp OSP’s? ¾DC or Pulse (Reverse and Duplex) Plating and chemistry – High aspect ratio? 28