R. K. JAIN: Fermi Level, Carrier Concentration, and Einstein Relation 221 phys. stat. sol. (a) 42, 221 (1977) Subject classification: 13.1 and 14.3; 22.1.1; 22.1.2 Laboratorium Fysica en Elektronica van de Halfgeleiders, Departement Elektrotechniek, Katholieke Univeraiteit Leuven, Heverleel) Calculation of the Fermi Level, Minority Carrier Concentration, Effective Intrinsic Concentration, and Einstein Relation in n- and p-Type Germanium and Silicon BY R. K. JAIN~) For the basic understanding of the physics of any semiconductor device an up-to-dateknowledge of the various basic parameters is highly essential. Theoretical calculations are made of the Fermi level, minority carrier concentration, effective intrinsic concentration, and Einstein relation in n- and p-type germanium and silicon a t 300 K. The reported work is based on the recently developed new transport theory of heavily doped silicon by van Overstraeten et al.. It is found that the results are significantly different from the classical results. Fur ein grundlegendes Verstandnis der Physik eines Halbleiterbauelements ist eine vollstandige Kenntnis der verschiedenen grundlegenden Parameter sehr wesentlich. Es werden theoretische Berechnungen durchgefiihrt fur das Ferminiveau, die Minoritiitsladungstriigerkonzentration, effektive Eigenleitungskonzentration und Einsteinrelation in n- und p-leitendem Germanium und Silizium bei 300 K. Die Arbeit basiert auf einer kurzlich von van Overstraeten et al. entwickelten Transporttheorie fur stark dotiertes Silizium. Es wird gefunden, daB die Ergebnisse sich bedeutend Ton den klassischen Ergebnissen unterscheiden. 1. Introduction A lightly doped crystal is theoretically characterized by a perfect periodicity of the lattice. I n this case i t can be proved that the edges of the conduction and valence bands are well defined and that the density of quantum states obeys a square root dependence on energy. Since the concentration of the impurity atoms is strongly diluted, the wave functions associated with the electrons of the impurity atoms do not overlap. Consequently the energy levels of the impurity atoms are discrete. Under such circumstances the semiconductor crystal is called nondegenerate. At higher impurity concentrations the impurity atoms are beginning t o interact with each other so that the wave functions of their associated electrons are going t o overlap. This causes a splitting of the impurity energy levels, which a t higher concentrations results in the formation of a n impurity band [l]. As the impurity concentration increases, the electron concentration also increases and the interaction between electrons and atomic cores may not be neglected any more. The result of this interaction is a modification of the lattice periodicity and consequently a change in the number of allowed states. Instead of a well defined conduction band edge, we now have a band tail. The equation of this modified conduction band has been calculated in [2, 31. Therefore, a t very high impurity concentrations the semiconductor crystal is called degenerate, and for optimum impurity concentratlions it is called semidegenerate. - Kardinaal Mercierlaan 94, 3030 Heverlee, Belgium. Present address: Laboratorio de Electrhnica, Instituto Venezolano de Investigaciones Cientificas, Apartado 1827, Caracas, Venezuela. l) 2) 222 R. K. JAIN The purpose of the present work is to report tho theoretical calculations of the Fermi level, minority carrier concentration, effective intrinsic concentration, and Einstein relation in n- and p-type germanium and silicon at 300 K. For the basic. understanding of the physics of any semiconductor device an up-to-date knowledge of the various basic parameters considered here is highly essential. The reported work is based on the recently developed new transport theory of heavily doped semiconductor by van Overstraeten et al. [4].Heavy doping effects are mainly characterized by considering the dependence of the density of quantum states or impurity states on the iiiipurity concentration. Classical calculations never consider such a dependence. It has been found that our results based on position-dependent hand structure phenomena are significantly different from the well-known classical results available until now. 2. Sumniary of the Basic Approach The important basic parameters, namely the Fermi level, minority carrier concentration, effective intrinsic concentration, and Einstein relation, have been evaluated using the basic approach. This approach is nothing but to consider heavy doping effects in a quantitative manner. van Overstraeten et al. 141 have recently described this approach in detail by considering the mathematical equations describing the formation of band edge tailing and impurity band after Morgan [l] and Kane [a]. We have also considered the same method to evaluate the parameters considered in the present work in n- and p-type germanium and silicon a t 300 K. Therefore, we have omitted the detailed mathematical description of the basic approach and considered the final results and their physical significance. We have considered phosphorus and boron as donor and acceptor impurities, respectively, but the present results can also be considered for arsenic, since its energy level is close to the phosphorus level. All calculations have been done using IBM 3701158 computer. 3. Calculation of the Fermi Level The Fermi level is a unique important parameter which often occurs a t several stages in semiconductor physics. It can be calculated accurately if the energy band structure of a heavily doped semiconductor is well understood. We have calculated the Fermi level by solving numerically the neutrality condition in a doped semiconductor material as n - p = N D-NA, (1) where n and p are electron and hole concentration, respectively, and can be defined in terms of concentration-dependent density of states : where ,o,(E) and ,o,,(B)are respectively the total electron and hole density of states and f ( E ) is the Fermi-Dirac distribution function. N , and N , are the donor and acceptor concentrations, respectively. I n Fig. l a we have plotted the Fermi level dependence on impurity concentration in germanium, while Fig. l b shows these results in silicon. From Fig. 1 we observe that even at high concentrations the Permi level is in the band gap (unlike classical results) and is approaching the nondegenerate impurity level. Fermi Level, Minority Carrier Concentration, and Einstein Relation (atoms/cm3) - mIC” lor8 223 - u8-N~lotoms/cm3) loTy 1 0 ~loz1 ~ a %-Nfllotom/cm3/ - b Fig. 1. Theoretical plots of the Fermi level EF as a function of the net donor and net acceptor concentration considering position-dependent band structure at 300 K a) in germanium, b) in silicon 4. Calculation of the Minority Carrier Concentration The minority carrier concentration can be calculated easily and accurately if we have a knowledge of the Fermi level position and then use either equation ( 2 ) or (3). As discussed earlier, first the E , (Fernii level) has been evaluated for a given set of impurity concentrations and then the carrier concentrations have been calculated. Fig. 2a shows the plots of the hole (minority carrier) concentration versus net donor or electron (majority carrier) concentration in germanium and silicon, while Fig. 2b shows the plots of the electron (minority carrier) concentration versus net acceptor or hole (majority carrier) concentration. Tor comparison we have also plotted the classical results (p(or n) = nf/n ( o r p ) ) in Fig. 2, where ni is the intrinsic carrier concentration and has been considered after Morin and Maita [ 5 ] . From Fig. 2 we observe that our results based on the heavy doping approach are completely different I lo? I electronconcenkotianfcni9 - Fig. 2. a) Theoretical plots of the minority carrier (hole) concentration as a function of the net donor or electron concentration taking into account heavy doping effects at 300 K in germanium (-) and silicon (- - - -). (a)N A = 1017, (b) 1Ol8, (c) 5 X 1Ol8, (d) lo1$atoms/cm3; (e) classical results. b) Theoretical plots of the minority carrier (electron) concentration as a function of the net acceptor or hole concentration taking into account heavy doping effects a t 300 K in germanium () and silicon (- - - -). (a) Nn = lo1”,(b) lola, (0) 5 x lola, (d) loxsatoms/crn3; (e) classical results 224 R.K. JAIN from classical results, although a t low donor and acceptor concentrations they are the same. At high impurity concentration we found a big increase in the minority carrier concentration, while classically i t decreases. Classical results also do not find any effect of the compensating impurity on the minority carrier concentration. It must be remarked here that there is not much difference in the results considered in Fig. 2 a and b. 5. Calculation of tho Effoctivo Intrinsic Concentration The intrinsic concentration is also one of the important basic parameters. Classically i t is only a function of temperature, but we have found its impurity conc-entration dependence and therefore we call i t effective intrinsic concentration ni,. We have calculated this quantity in a usual way: nie = (np)'l2.Fig. 3 a shows the plots of the njeversus the net donor concentration in germanium and silicon, while Fig. 3b shows these results, but as a function of the net acceptor concentration. Again we find that there is not much difference in the results plotted in Fig. 3 a and b. For comparison, in Fig. 3 we have also shown the classical Morin and Maita's [ 5 ] results for the in1 rinsic concentration. We observe that the heavy doping effects predict a strong impurity concentration dependence of tho intrinsic concentration a t higher doping levels. For lower donor and acceptor concentrations our results are in quite good agreeriicnt with the classicla1 results [5]. 6. Calculation of the Einstein Relation Einstein's [(i] work on diffusion about make than seventy years ago led to a fundamental relation between the diffusivity and mobility of charged carriers, which is called Einstein relation. It has been found that Einstein's equation is of great importance in semiconductor physics for the device analysis and desgin and can be defined in a usua,l way as D kT _ --P t 1027 q t A 7OZ71 .I* /7 / II /i net phu.iphurus Concentration lafuinsJcm') - - net boron concenfrofioii lofoms/cm3/ --_- 3. a,\ ThPnret,inn.l =. rilnts intrinnir - __ of - - the . . .- effective ___ - - __ . ._ _ _.__ .- - cnnoent.m.t,inn - ___ - - __ __ -_____ w. -. :'~a~s--R.- fnnntinn nf -- t,h6+ "-- _net. __" phosphorus concentration at 300 K in germanium () and silicon (- - - -). (a) N A = lo1', (b) 1018, (c) 5 x 10'8, (d) 101s atoms/cm3; (e) Morin and Maita 151. b) Theoretical plots of the effective intrinsic concentration nie as a function of the net boron concentration at 300 K in germanium (-) and silicon (----). (a) N D = IOl7, (b) 10l8, (c) 5 X lo1",(d) lo1$ atoms/cms; (e) Morin and Maita [5] Fermi Level, Minority Carrier Concentration, and Einstein Relation 225 where D and p are the diffusion coefficient and mobility of the charged carrier, respectively, b is the Boltzmann constant, T the absolute temperature, and q the electron charge. Equation (4)is valid only for nondegenerate semiconductors. In the last two decades enough modified relations for the Einstein relation have been emerged for the case of degenerate semiconductors “7 to 161. Anyhow, the analysis presented in these previous references is based on the assumption of the parabolic density of states function, i-e., no heavy doping effects have been considered. I n their recent work on the transport theory of heavily doped silicon van Overstraeten et al. [4] have shown qualitatively that the ratio of the electron diffusivity t o mobility in a degenerate semiconductor material can be defined as +I Qe(E)f ( E )dE De - - _-_ 1 pe --a3 [ (5) . ( d / d ~ , ) --m l m Q e ( E/) ( E )d ~ ] Similarly a relation for the ratio of the hole diffusivity t o mobility (Dh/ph)can also be written. The generalized Einstein relation given by (5) can also be written simply in this way as kT De -_-P.2 4 j. -w 1 +w 1 1 + exp ( ( E - E,)/~T)dE ( 6) exp ( ( E - E l ? ) / k T ) dE Q ~ ( E[I+ ) exp ( ( E - E,)/ET)12 --m Fig. 4 a shows the plots of the electron diffusivity t o mobility ratio as a function of net donor concentration in germanium and silicon, evaluating equation (6) numerically. Similarly Fig. 4b shows the plots of the hole diffusivity t o mobility ratio as a function of net acceptor concentration in germanium and silicon, From Fig. 4 we observe that the hole diffusivity t o mobility ratio is more than the electron diffusivity t o mobilitv ratio. We also find that the carrier diffusivitv t o mobilitv ratio is more for the case of germanium as compared to silicon. All tLe results p<otted in Fig. 4 1 Fig. 4. a) Theoretical plots of the ratio of the electron diffusivity to mobility as a function of the net donor concentration in (1) germanium and (2) silicon at 300 K based on heavy doping approach. N A = 101’ atoms/cms. b) Theoreticalplots of the ratio of the hole diffusivity to mobility as a. function of the net acceptor concentration in (1) germanium and (2) silicon at 300 K based on heavy doping approach. N D = 10’’ atoms/cm3 15 physica (a) 42/1 226 R. K. JAIN: Fermi Level, Carrier Concentration, and Einstein Relation approach the classical value of k T / q a t low impurity concentrations. The asymptotic lines drawn on the results shown in Fig. 4 give a n approximate idea of the order of the impurity concentration after which the classical Einstein relation starts failing. It must also be remarked t h a t the impurity concentration dependence of the Einstein relation predicted by Lindholm and Ayers [ 111, assuming parabolic density of states, is more pronounced than our results plotted in Fig. 4, which is due t o the fact that we have considered heavy doping effects. 7. Conclusions I n the present work various important basic parameters of the scrniconductor physics have been evaluated theoretically considering position-dependent band structure in the two important elemental semiconductor materials. It is found that our results are quite different from the available classical results. It is hoped that the present concentration dependence of the different parameters niay lead to a better explanation of the experimental results; this has been reported recently [ 17 to 191. Future efforts using the approach described here are in progress and will be considered in subsequent papers. Acknowledgement The author would like to thank Prof. Dr. R. van Overstraeten for inany stimulating discussions and his encouragement. Rcforences [lj T. N. MORGAN, Phys. Rev. 139, A343 (1965). [2] E. 0. KANE, Phys. Rev. 131, 79 (1963). [3] V. L. BONCH-BRUEVICH, The Electronic Theory of Heavily Doped Semiconductors, Elsevici Publ. Co., New York 1966. [4] R. VAN OVERSTRAETEN, H. DE MAN,and R. MERTENS, IEEE Trans. Electron Devices 20 290 (1973). [5] F. J. MORINand J. P. MAITA,Phys. Rev. 94, 1525 (1954); 96, 28 (1954). [.6] A. EINSTEIN, Ann. Phys. (Leipzig) 17, 549 (1905). [7] P. T. LANDSBERG, Proc. IEEE 61, 476 (1973); Proc. Roy. Soc. A213, 226 (1952); P. T. LANDSBERG and S. A. HOPE,Solid State Elektronics 19, 173 (1976). [8] M. A. MELEHY,Nature (London) 198,980 (1963); Proc. IEEE 61,1028 (1963);58,536 (1965). [9j R. W. LADE,Proc. IEEE 52, 743 (1964); W. B. BERRY, Proc. IEEE 53, 188 (1965). [lo] J. D. GASSAWAY, IEEE Trans. Electron Devices 18, 175 (1971); R. STRATTON, IEEE Trans. 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