Product name
Type
Vacuum ejector/vacuum unit
Vacuum ejector and vacuum unit model series variations
Series
Vacuum ejector stand-alone type
· Enable to install solenoid valve directly to supply port M5 to R1/4.
· A wide nozzle size variation range from ø0.5mm to ø2.0mm.
VSU series: Tube type
· Enable to set up piping line by Vacuum and support ports are arranged in a straight line.
· An original fixed bracket is available.
VSC series: Pad direct-mounted type
· Enable to mount pad directly to vacuum port M5 to R3/8.
· A wide nozzle size variation range from ø0.5mm to ø2.0mm.
VSB series: Square body type
· Enable to fix body directly by square body and built-in square silencer.
· Enable to select mechanical vacuum switch by option.
VSG series: 20 mm width stand-alone type
· Stand-alone universal type emphasized basic functions.
· Unitized valves, vacuum sensors, and vacuum filters are selectable based on the purpose.
VSK series: 16 mm width universal type
· Enable to select optimum unit by each modular unit.
· Options available, built-in check valve and vacuum release valve which have air-timer.
Vacuum ejector unit
Suitable types for Ejector system
VSH series: Solenoid valve direct-mounting type
VSJ series: 20 mm width universal type
· Enable to control air flow and pressure for vacuum release.
· Enable to realize to be shotened vacuum relaese time by relief function of vacuum circuit.
VSX series: 10.5 mm width universal type
· Compact, slim vacuum unit.
· Enable to select direct or DIN rail mount.
VSQ series: 31.5 mm width stand-alone type
· Large vacuum units are optimum to control high flow.
· Three standard nozzles are available: single, 2-step, and twin.
VSZM series: 11 mm pitch manifold type
1
VSJP series: 20 mm width universal type
Vacuum changeover unit
Suitable types for Vacuum pump system
· Wire-saving vacuum unit for manifold.
· Save energy type, valve power consumption is 0.55W.
· Suitable for wide application by variety of vacuum sensor.
· Enable to control air flow and pressure for vacuum release.
· Enable to realize to be shotened vacuum relaese time by relief function of vacuum circuit.
· Double solenoid is standard for vacuum valve.
VSXP series: 10.5 mm width universal type
· Compact and slim vacuum unit.
· Enable to select direct or DIN rail mount.
· High cycle operations are possible with 3-way vacuum valves (optional).
VSQP series: 31.5 mm width stand-alone type
· Large vacuum units are optimum to control high flow.
· Normal open and normal close are used as standards for vacuum solenoid valve.
VSZPM series: 11 mm pitch manifold type
· Wire-saving vacuum unit for manifold.
· Save energy type, valve power consumption is 0.55W.
· Suitable for wide application by variety of vacuum sensor.
Page
07
10
12
15
20
VSH
7
VSU
7
VSC
7
VSB
7
VSG
29
Vacuum pad
05
Vacuum related components
Check valve
Silencer
Vacuum filter
Vacuum sensor
Vacuum release
solenoid valve
Vacuum ejector/vacuum unit
Nozzle diameter ø (1/10 mm)
Components
Vacuum solenoid
valve
Reduced
wiring
Manifold
Individual
wiring
Model No.
Discrete
Piping method
VSK
37
VSKM
VSJ
71
VSJM
VSX
109
173
VSZM
203
VSJP
Vacuum valve effective area
3.5mm2 (ø4), 5mm2(ø6)
71
Vacuum valve effective area
2-way valve specification: 3.5mm2(ø4), 4.5mm2(ø6)
3-way valve specification: 3.0mm2(ø4), 3.6mm2(ø6)
109
VSQP
Vacuum valve effective area
16.5mm2
173
VSZPM
Vacuum valve effective area
4.5mm2
203
VSJPM
VSXP
VSXPM
•
: Standard
: Option
Related components
VSQ
Inch/NPT specifications
VSXM
2
Vacuum ejector/vacuum unit
Common Safety Instructions for Vacuum
Be sure to read the following instructions before selecting and using the CKD products.
Also read the detailed instructions for individual series.
！ WARNING
1. Where there is the danger of work dropping, provide some drop prevention means to assure safety.
2. Avoid use where there are constant pressure of 0.1MPa or above in the vacuum circuit. Since the
vacuum devices are not of explosion-proof structure, such use may cause damage to the devices
bodies.
3. Watch out for drop of vacuum due to faulty air supply or power supply. Reduced suction may cause
the drop of work. Therefore, take an adequate protective measure.
4. Where two or more pads are used with a single ejector in vacuum circuit, defective suction of one
pad may cause the drop of vacuum at the other pad(s).
5. Avoid such usage as may stop up the exhaust port of the ejector or raise exhaust resistance. Such
careless usage may cause the loss or drop of vacuum.
6. Do not use the vacuum devices in an atmosphere containing corrosive gas ,inflammable gas,
explosive gas, chemicals, seawater or vapor. Never allow the vacuum system to suck in such
substances.
7. Provide a protective cover where the equipment is exposed to sunshine.
8. Carry out periodic maintenance and checks of the silencer element of the ejector and the filter
element of the vacuum filter. A clogged element may cause performance drop or trouble.
9. Replace the element after gaining a full knowledge of the element of vacuum ejector.
10. Install the piping by checking the ports of the ejector in the manual and by the marking on the body.
Mistaken piping may cause damage to the device body.
11. Use clean air free from drain or dust for ejector air supply. Also, never supply air by a lubricator.
Impurities or oil contained in compressed air may cause malfunction or performance drop.
12. Do not give excessive tension or bending to leads. Disconnection may result.
13. Tighten the lock nut, in any, on the product securely with your hand and not with any tool.
Tightening with a tool may cause damage to the lock nut or the device body. Also, incomplete
tightening may cause a loose lock nut or inaccurate initial setting.
14. Do not subject the product with a rotating resin body to forcible swinging or rotation. Damage to the
resin body or leakage may result.
3
Vacuum ejector/vacuum unit
！ CAUTION
Vacuum related components
Vacuum pad
1. The specified supply pressure to the ejector is that during ejector operation. Secure the specified
level in consideration of pressure drop. If the specified level is not met, then the ejector may emit an
abnormal noise at certain supply pressures and become unstable, affecting the the sensor and
ohter parts adversely.
2. In selecting the piping and equipment, take into account that the effective sectional area on the
supply pressure side the ejector should be about three times the sectional area of the nozzle
diameter. Inadequate supply flow may result in performance drop.
3. Provide the vacuum-side piping as short as possible and with the bore as large as possible. If the
piping is long or the bore is small, the response time at suction or release may become longer and
the necessary suction flow may not be achieved.
4. Connect the vacuum switch or the ejector with vacuum switch as close to the end of the vacuum
piping as possible. With much distance between the vacuum switch and the end of vacuum piping,
the piping resistance may become large and the vacuum at the sensor may be high even during the
non-suction interval. This will cause malfunction of the vacuum switch.
5. In handling the mechanical vacuum sensor, observe the "Common Safety Instructions for
mechanical vacuum switches."
6. The clear filter cover is polycarbonate for VSG and PCT for VGK. Avoid using in areas where
exposure to chemicals (see the following table) is possible.
Table Chemicals
Inch/NPT specifications
Names of Chemicals
Thinner
Carbon tetrachloride
Chloroform
Acetic ester
Aniline
Cyclohexane
Trichloroethylene
Sulfuric acid
Lactic acid
Wter soluble cutting oil (alkaline)
* There are chemicals other than listed above that can not be used. Please contact your nearest CKD sales office for information.
7. The clear vacuum filter (VSFU type) is made of PA. Avoid using in areas where exposure to
chemicals (see the following table) is possible.
Table Chemicals
Related components
Chemicals
Methanol
Ethanol
Nitric acid
Sulphuric acid
Hydrochloric acid
Lactic acid
Acetone
Chloroform
Aniline
Trichloroethylene
Hydrogen peroxide
* For other possibly incompatible substances, contact your nearest CKD sales office.
4
Vacuum ejector/vacuum unit
Common Safety Instructions for Mechanical Vacuum Switches
！ WARNING
1.Do not use the mechanical vacuum switches in an atmosphere containing flammable or explosive
gases or fluids. As these vacuum switches are not explosion-proof, fire or explosion may be caused.
2. Do not use these devices in locations where they can be exposed to water drops, oil drops, dust,
tec. The mechanical vacuum switches are neither drip-proof nor dust-proof, so that trouble may
result.
3. Mechanical vacuum switches may suffer no performance drop when a pressure of about 0.5MPa is
applied instantaneously. Yet make arrangement so that any pressure of 0.2MPa or above does not
normally act on the vacuum switch at vacuum break. Otherwise damage to the switch may result.
4. Use the mechanical vacuum switch within the specified pressure range. Use outside the range may
cause malfunction due to pressure differences.
5. Be sure to turn off power before wiring the mechanical vacuum switch. When wiring, check the lead
color to avoid mis-wiring.
Principle of vacuum ejector
Diffuser
Nozzle
Exhaust
(EX)
Compressed air
(P)
Pad
Vacuum (V) (suction)
Work piece
5
The vacuum ejector generates a vacuum by feeding
compressed air. The principle of operation is shown at
left.
Primary side compressed air is pulled in causing
secondary side air to flow. This generates vacuum
attraction used to transfer work pieces.
A nozzle and diffuser attain high-speed flow and high
vacuum. Vacuum level, discharge (suction) and air
consumption are determined by the shape and
dimensions of this structure.
Vacuum ejector/vacuum unit
How to select vacuum ejector
Three different types of vacuum generators, H type: high vacuum, L type: large vacuum flow
(efficieny as importance) and E type: low pressure supply high vacuum, are provided to meet
your requirements.
How to use H type and E type
When your primary concern is to get a high vacuum level; where 0.5MPa of compressed air can be secured
H type is suitable, and where is cannot be secured or air consumption needs to be lowered, E type is
preferable at 0.35 to 0.4 MPa of compressed air.
Vacuum pad
How to use H type and L type
When high vacuum is required, H type is recommended. When the vacuum needs to be adjusted, L type can
be used to set the vacuum at a desired level by adjusting the pressure of the supply air with a regulator.
Vacuum level of L type is almost in proportion to the force of supply air.
L type vacuum characteristics are proportional to supply pressure. Between 0.2 and 0.6 MPa, characteristics
are as shown in Fig. 1. Note that a dofference of -5 to +15% occurs to the target, but the vacuum can be set
using the supply pressure for reference.
When the vacuum pad do not hold the surface of works perfectly
L type ultimate vacuum characteristics
Vacuum related components
Using H or L when the work piece shape prevents all suction pads from being installed is determined by the
vacuum level attained by the vacuum system. Select H if the system vacuum is -53 kPa or more based on
Fig. 2 showing the vacuum - suction flow. L is more efficient if the vacuum is -40 kPa or less.
VSH-H10, VSH-L10 vacuum - suction flow
93
Supply pressure 0.5 MPa(5.1kgf/cm2)
93
80
66
Vacuum (-kPa)
53
40
66
53
40
VH
L1
26
0
26
VH
H
13
0
0.1
0.2 0.3 0.4 0.5
Supply pressure (MPa)
(Fig. 1)
0.6
0.7
10
13
Inch/NPT specifications
Ultimate vacuum (-kPa)
80
0
10
20
30
40
Suction flow ( /min(ANR))
50
(Fig. 2)
Other precautions
Working valve
Related components
When using a solenoid valve, check that flow is sufficient.
(Use a valve with an effective section area three times or more the nozzle's sectional area.)
Vacuum piping
Vacuum system piping resistance may be very high. Keep vacuum piping as short as possible and use piping
with a large inner diameter. When using vacuum sensors, etc., malfunctions may occur if piping resistance is
too high. Ejector suction flow may be compromised and cause insufficient flow, compromising performance.
Supply side piping
Special consideration is required for piping at the air supply. Pipe so that specified pressure is ensured at
ejector input.
6
Discrete type for different piping conditions
Vacuum ejector/vacuum unit
Vacuum ejector
Features
This vacuum ejector converts compressed air to a vacuum.
When used with a vacuum pad, it can be used to transfer
workpieces (objects).
Types with different performance and shape match different
conditions.
Air supply port (P)
Vacuum ejector
(Tube type union)
Exhaust port (EX)
(Atmospheric type)
Vacuum port (V)
Vacuum tube
Vacuum pad
Workpiece
7
Vacuum ejector/vacuum unit
Specifications
Air
0.15 to 0.7 MPa
0.5 MPa (0.35 MPa)
0 to 60 ˚C
Vacuum pad
Working fluid
Working pressure range
Rated supply pressure
Ambient temperature range
Type with square union vacuum sensor (VSB), mechanical vacuum switch specifications
Diaphragm - microswitch
Air
0 to 60 ˚C (No condensation)
3A 250V
-20 to -66 kPa
5 kPa
22 kPa or less
-53 kPa
Vacuum related components
Pressure detection method
Working fluid
Ambient temperature range
Rated electricity
Set pressure range
Accuracy
Hysteresis
Factory set pressure
Structure drawing (direct-installation solenoid valve type: VSH)
Exhaust port (EX)
Silencer element (Poly-vinyl formal)
Diffuser (Brass, electroless nickeling)
Inch/NPT specifications
Cap (Aluminum)
Lock jaw (stainless)
Guide ring (Brass, electroless nickeling)
Exhaust port (EX)
Release ring (Polyacetal)
Metal body (Brass, electroless nickeling)
Tube
O ring (Nitrile rubber)
Vacuum port (V)
Rubber sleeve (Nitrile rubber)
Resin body (PBT)
Nozzle (Brass, electroless nickeling)
Related components
Air supply port (P)
8
Vacuum ejector/vacuum unit
Vacuum ejector
Characteristics
Supply pressure - ultimate vacuum, suction flow, consumed flow
26
E type suction flow
13
0
0.1
0.2
0.3
0.4
0.5
0.6
40
53
40
L type suction flow 10
H type suction flow
13
0
0.1
0.2
0.3
0.4
0.5
Supply pressure (MPa)
0.6
0.7
5
0
100
tim
ul
pe
ty
L
H type
80
suction
60
flow
ow
40
0.1
0.2
0.3
0.4
0.5
0.6
0.7
0.1
0.2
0.3
0.4
0.5
0.6
0.7
66
53
40
0
L
50
H type suction flow
13
E type suction flow
0
0.1
0.2
0.3
0.4
0.5
Supply pressure (MPa)
53
40
26
um
med
w
n flo Consu
uctio
0.6
20
10
0.7
0
flow
300
200
pe s
L ty
H type suction flow
0
0.1
0.2
0.3
0.4
0.5
Supply pressure (MPa)
40
flow flow
ion med
t
c
u
u
30
e s Cons
typ
26
66
100
E type suction flow
H type ultimate vacuum
80
0
H type ultimate vacuum
13
20
Flow rate ( /min (ANR))
uum
vac
ultim
ate
pe
cu
e
at
tim
pe
ul
80
uu
c
va
Et
ype
ulti
ma
te v
acu
um
L
ty
pe
ul
tim
at
e
va
cu
um
Flow rate ( /min (ANR))
Ultimate vacuum (-kPa)
cu
va
e
at
tim
ul
pe
ty
L
26
e
at
m 120
flow
VSU-H 07 VSU-L 07 VSU-E 07
20
ow
d fl
e
m
15
nsu
Co
Ht
40
flow
ed
93
Supply pressure (MPa)
um
um
cu
va
ate
ltim
yp
eu
53
0
140
uction fl
93
66
yp
Lt
C
um
ons
E type s
0
93
80
tion
uc
es
26
VSU-H 05 VSU-L 05
VSC-H 05 VSC-L 05
Ultimate vacuum (-kPa)
ty
um
acu
tima
te v
66
Supply pressure (MPa)
9
L
H type ultimate vacuum
80
0
0
VSH-H 20 VSH-L 20 VSH-E 20
VSC-H 20 VSC-L 20 VSC-E 20
13
20
0.7
0.7
10
VSH-H 15 VSH-L 15 VSH-E 15
VSC-H 15 VSC-L 15 VSC-E 15
pe u
l
60
H type suction flow
0.6
20
13
Supply pressure (MPa)
E ty
40
80
Flow rate ( /min (ANR))
Ultimate vacuum (-kPa)
d
me
su
n
Co
ype
53
100
w
flo
0.5
26
Supply pressure (MPa)
93
um
ulti
ma
te v
acu
66
Et
Ultimate vacuum (-kPa)
80
0.4
30
H type suction flow
E type suct
ion flow
cu
H type ultimate vacuum
93
0.3
40
ow
va
VSC-E 12
0.2
uction fl
0.6
0.7
0
Flow rate ( /min (ANR))
0.1
Supply pressure (MPa)
VSH-H 12
VSB-H 12
VSC-H 12
um
um
acu
te v
ulti
ma
0
50
at
e
0
60
low
m
0.7
df
ul
ti
0.6
L type s
ns
e
um
e
0.5
Co
uum
0.4
40
va
m
ty
p
0.3
10
t
tim
e
u
cu
L
0.2
E type suction flow
L
ul
at
vac
0.1
13
20
53
e
yp
ate
0
H type suction flow
66
ultim
5
H type suction flow
26
80
pe
13
10
e
yp
Lt
70
E ty
L type suction flow
40
40
w
flow
flo
d
e
n
m
ctio Consu
30
su
Flow rate ( /min (ANR))
Ultimate vacuum (-kPa)
26
15
53
50
Flow rate ( /min (ANR))
Ultimate vacuum (-kPa)
nsu
Co
20
VSH-E 10
VSS-E 10
VSB-E 10
VSG-E 10
VSC-E 10
93
Flow rate ( /min (ANR))
40
flow
d
me
66
pe
53
80
E ty
66
Flow rate ( /min (ANR))
Ultimate vacuum (-kPa)
ype
ulti
ma
L
te
ty
vac
pe
uu
ul
m
tim
at
e
va
cu
um
80
VSH-L 10
VSS-L 10
VSB-L 10
VSG-L 10
VSC-L 10
H type ultimate vacuum
H type ultimate vacuum
93
Ht
Ultimate vacuum (-kPa)
93
VSH-H 10
VSS-H 10
VSB-H 10
VSG-H 10
VSC-H 10
VSH-E 07
VSB-E 07
VSG-E 07
VSC-E 07
va
VSH-H 05 VSH-L 05
VSB-H 05 VSB-L 05
VSG-H 05 VSG-L 05
VSH-L 07
VSB-L 07
VSG-L 07
VSC-L 07
E ty
VSH-H 07
VSB-H 07
VSG-H 07
VSC-H 07
Vacuum reach time (supply pressure H type: 0.5 MPa, L type: 0.5 MPa, E type: 0.3 to 0.5 MPa)
* Values differ with vacuum system piping shape, etc., so use these values for reference.
3
2
2
2
1
1
1
-80kPa
1
2
3
4
5
6
Vacuum system volume ( )
5
Pa
-13k
6
-2
7
6
5
kPa
-13
4
3
2
1
1
1
Reach time (sec)
8
7
6
kPa
-13
4
0
Pa
0k
-4
kPa
-53
12
11
10
10
9
9
8
a
P
6k
7
-2
6
5
4
kPa
-13
5
2
1
1
1
1
2
3
4
5
6
Vacuum system volume ( )
Pa
4
2
0
Pa
6
3
7
k
-40
7
2
1
2
3
4
5
6
Vacuum system volume ( )
7
8
3
0
1
2
3
4
5
6
Vacuum system volume ( )
VSH-L 07
VSB-L 07
Reach time (sec)
Pa
6k
7
-13kPa
VSH-H 07
VSB-H 07
-66k
Pa
11
-2
5
-86kPa
a
-40
kP
12
10
9
1
2
3
4
5
6
Vacuum system volume ( )
VSU-E 07
-53k
Pa
11
0
-80kPa
-80kPa
-66kPa
-86kPa
12
7
kPa
-26
4
2
a
kP
5
3
3k
-40
6
2
1
2
3
4
5
6
Vacuum system volume ( )
kP
a
7
3
0
-5
8
Pa
6
a
kP
-5
3k
7
Pa
9
8
Reach time (sec)
Reach time (sec)
8
4
10
9
a
Pa
6k
-2
-26
a
kP
11
10
9
7
a
a
kPa
12
-60
kP
10
1
2
3
4
5
6
Vacuum system volume ( )
VSU-L 07
-40
11
-53
12
0
7
VSU-H 07
-66kP
-86kPa
11
-40
kP
a
-66kP
a
-60kP
a
-53k
Pa
12
3
kP
0
7
Pa
4
3
1
2
3
4
5
6
Vacuum system volume ( )
Vacuum pad
a
-13kP
5
-26k
3
7
Vacuum related components
4
6
Inch/NPT specifications
5
a
kP
-13
7
-60
4
6
8
Pa
5
kP
-26
kPa
k
-13
6
a
7
-66k
Pa
-66
7
8
-13kPa
0
1
2
3
4
5
6
Vacuum system volume ( )
7
Related components
9
Reach time (sec)
9
VSU-H 05
-40k
a
-4
0k
P
10
9
8
-86kPa
-80kPa
-53kPa -66kPa
Pa
10
VSU-L 05
Reach time (sec)
11
10
0
Reach time (sec)
12
-53
k
11
Pa
-66k
Pa
12
-60k
-2
6k
Pa
VSH-L 05
VSB-L 05
Reach time (sec)
Reach time (sec)
11
-40
kPa
12
-53kP
a
-66kPa
-86kPa
-80kPa
VSH-H 05
VSB-H 05
Vacuum ejector/vacuum unit
Characteristics
10
Characteristics
Vacuum reach time (supply pressure H type: 0.5 MPa, L type: 0.5 MPa, E type: 0.3 to 0.5 MPa)
* Values differ with vacuum system piping shape, etc., so use these values for reference.
6
5
4
3
3
2
2
1
1
1
2
3
4
5
6
Vacuum system volume ( )
kP
-13kPa
1
0
7
1
2
3
4
5
6
Vacuum system volume ( )
7
kP
a
11
a
VSH-E 12
VSB-E 12
12
kP
3k
10
10
9
9
9
kPa
-26
4
3
-13kP
2
a
-
6
5
a
0kP
4
-4
3
-26kP
0
1
2
3
4
5
6
Vacuum system volume ( )
7
0
1
2
3
4
5
6
Vacuum system volume ( )
10
9
9
8
Pa
6k
-6
7
6
5
Pa
53k
4
Pa
4
Pa
-26k
-13kPa
7
0
1
2
3
4
5
6
Vacuum system volume ( )
-66
12
11
a
-
7
6
5
kPa
-53
4
Pa
6k
-6
9
kP
60
7
VSH-E 15
10
8
a
kP
-40
5
1
kP
a
Pa
11
10
8
7
-53
6
kP
a
5
kPa
-40
4
3
-40k
3
a
2
-26kPa
-13kPa
-40kP
3
2
-26kPa
2
-26kPa
1
-13kPa
1
0
11
12
Reach time (sec)
Reach time (sec)
11
0k
-86
12
6
VSH-L 15
-8
kP
a
VSH-H 15
7
2
-13kPa
1
8
3
a
2
1
a
Pa
-60
0k
Pa
5
kP
53
7
kPa
6
8
3k
-5
-65
0
0k
-4
7
Reach time (sec)
Pa
8
Reach time (sec)
10
Reach time (sec)
Reach time (sec)
-6
-5
11
-80
-86k
Pa
12
Pa
kPa
-66
Pa
-80k
-86kPa
11
-26kPa
2
VSH-H 12
VSB-H 12
VSH-E 10
12
kPa
-40
4
3
a
-13kP
0
7
5
-66
1
2
3
4
5
6
Vacuum system volume ( )
-2
6
a
0
a
6kP
7
Pa
kPa
-13
4
kP
-40
-5
-80k
5
a
7
Pa
3k
8
-86kP
6
9
8
Pa
7
0k
-6
10
3k
-5
6k
6
Pa
-66
kP
-66
11
Pa
9
Reach time (sec)
-2
8
a
kP
a
a
Pa
Pa
12
10
9
VSH-L 10
VSB-L 10
Reach time (sec)
10
Reach time (sec)
-86k
11
-80
k
kP
Pa
12
-40
11
-53
k
-66kP
12
VSH-H 10
VSB-H 10
a
-80kPa
VSH-E 07
VSB-E 07
a
-86kPa
Vacuum ejector/vacuum unit
Vacuum ejector
1
2
3
4
5
6
Vacuum system volume ( )
1
7
-13kPa
0
1
2
3
4
5
6
Vacuum system volume ( )
7
0
1
2
3
4
5
6
Vacuum system volume ( )
7
Vacuum reach time (supply pressure H type: 0.5 MPa, L type: 0.5 MPa, E type: 0.3 to 0.5 MPa)
* Values differ with vacuum system piping shape, etc., so use these values for reference.
VSH-H 20
VSC-H 20
7
5k
9
Pa
Reach time (sec)
-8
8
a
kP
-80
6
5
4
a
P
-66k
3
1
Pa
0k
8
-8
7
6
5
kPa
-66
4
Pa
3
Pa
-53k
-40kPa
-26kPa
2
Pa
5k
-8
-53k
-40kPa
2
1
-26kPa
-13kPa
0
1
2
3
4
5
6
Vacuum system volume ( )
7
Vacuum pad
10
0
1
2
3
4
5
6
Vacuum system volume ( )
7
Vacuum related components
11
10
Inch/NPT specifications
12
11
Related components
12
9
Reach time (sec)
VSH-E 20
VSC-E 20
Vacuum ejector/vacuum unit
Characteristics
12
Vacuum ejector/vacuum unit
Vacuum ejector
Ordering model (Example)
VSH
(1)
H
(2)
07
(3)
6
(4)
6A
(5)
J
(6)
(6) Additional functions
J: Common exhaust (VSH/VSU/VSC)
S: Open to air with silencer (VSH/VSU/VSC)
V: With mechanical vacuum switch (VSB)
No symbol: No vacuum sensor (VSB)
(5) Air supply port (P)
Tube size
Symbol
Size (mm)
4
ø4
6
ø6
8
ø8
10
ø10
Port size
Symbol
Size
M5
M5 x 0.8
6A
R1/8
8A
R1/4
10A
R3/8
12
ø12
(4) Vacuum port (V)
Tube size
Symbol
Size (mm)
4
ø4
6
ø6
8
ø8
10
ø10
Port size
Symbol
Size
M5
M5 x 0.8
6A
R1/8
8A
R1/4
10A
R3/8
12
ø12
(3) Nozzle diameter
Symbol
Size
05
0.5mm
07
0.7mm
10
1.0mm
12
1.2mm
15
1.5mm
20
2.0mm
H type, vacuum, suction flow rate L type, vacuum, suction flow rate E type, vacuum, suction flow rate
-90kPa
-66kPa
7 /min (ANR)
12 /min (ANR)
-92 to 93kPa
-66kPa
-90 to 92kPa
12.5 to 13 /min (ANR) 22 to 26 /min (ANR) 10 to 10.5 /min (ANR)
-93kPa
-66kPa
-92kPa
28 /min (ANR)
42 /min (ANR)
21 /min (ANR)
-93kPa
-92kPa
38 /min (ANR)
27 /min (ANR)
-93kPa
-66kPa
-92kPa
63 /min (ANR)
95 /min (ANR)
42 /min (ANR)
-93kPa
-66kPa
-92kPa
110 /min (ANR) 180 /min (ANR)
84 /min (ANR)
Consumed flow rate
11.5 /min (ANR)
23
(17
46
(34
70
(47
100
(70
200
(150
/min (ANR)
/min (ANR))
/min (ANR)
/min (ANR))
/min (ANR)
/min (ANR))
/min (ANR)
/min (ANR))
/min (ANR)
/min (ANR))
* The supply pressure is 0.5 MPa for H type and L type and 0.35 MPa for E type.
* Values in parentheses for consumed flow are for E type.
* The nozzle diameter 20 suction flow above is for the VSC. Refer to outline dimensions on pages 15 to 16 for VSH
suction flow.
(2) Vacuum characteristics
H: High vacuum medium flow rate type
L: Medium vacuum large flow rate type
E: High vacuum small flow rate type
(1) Stand-alone type vacuum ejector
VSH: Direct-mounted solenoid valve type
VSU: Tube type
VSC: Direct-mounted pad type
VSB: Square type
Note: For details on the model combinations, refer to the model field on
pages 15 to 25 showing the dimensions.
13
Related components
Inch/NPT specifications
Vacuum related components
Vacuum pad
Vacuum ejector/vacuum unit
MEMO
14
VSH Direct-mounted solenoid valve type (Open to air exhaust)
øP1
øD
L2
EX
R
H
Type
VSH-H 05-4M5S
VSH-H 05-66AS
VSH-H 07-66AS
VSH-H 10-66AS
VSH-H 12-66AS
VSH-H 10-86AS
VSH-H 12-86AS
VSH-H 15-88AS
VSH-H 15-108AS
VSH-H 20-108AS
VSH-H 20-128AS
VSH-L 05-4M5S
VSH-L 05-66AS
VSH-L 07-66AS
VSH-L 10-66AS
VSH-L 07-86AS
VSH-L 10-86AS
VSH-L 15-88AS
VSH-L 15-108AS
VSH-L 15-128AS
VSH-L 20-108AS
VSH-L 20-128AS
VSH-E 07-66AS
VSH-E 10-66AS
VSH-E 12-66AS
VSH-E 10-86AS
VSH-E 12-86AS
VSH-E 15-88AS
VSH-E 15-108AS
VSH-E 20-108AS
VSH-E 20-128AS
Tube
O.D.
øD
4
R
A
M5x0.8 3.5
EX
B
35
48
44
17
25.5
14.4
17
18.1
28.4
13.5
28.9
22
14.8
31.2
R1/4 11
17.6
20.2
15.1
33.6
99.6 93.5
24
16.8 21
23.4 36.4
M5x0.8 3.5 35 31.5 10.5 10 9.8 14.9 21.2
71.5 65.5
12
4
6
11.4 12.4
R1/8
8
48
44
14.4
13.5
71.5 65.5 14.8 17.6
16.5 21
15.1 17.6
99.6 93.5
16.8 21
6
17
22
24
8
8
10
R1/4 11
10
12
48
44
20.2
23.4
20.2
23.4
17
25.5
18.4
12.4
14.4
13.5
71.5 65.5
14.8
17.6
15.1
99.6 93.5
16.8 21
18.1
22
24
24
2.0
104 200 116
0.5
12
0.7
1
0.7
1
26
42
26
42
8
28.4
28.9
31.2
36.9
33.6
36.4
66
1.5
95
24
2.0
174 200 116
17
0.7
1
1.2
1
1.2 0.35
10.5
21
27
21
27
17
34
47
34
47
92
36.5
37
36.5
38.5
38
78
80
22
1.5
42
70
24
2.0
82
150 116
* L1 and L2 dimensions for tapered screws are reference dimensions applicable after screw tightening.
15
0.5
13
36.5
23
37
46
36
23 38.5
46 37.5
75
100 77.5
81.5
11.5
22
28.4
28.9
20.2 31.2
20.2 33.6
23.4 36.4
0.7
1
1.2
1
1.2
1.5
17
18.1
11.4 12.4
R1/8
Unit: mm
Ultimate Suction Consumed Weight
vacuum flow flow rate
(-kPa) ( /min(ANR)) ( /min(ANR)) (g)
13
7 11.5
90
36.5
13
23
37
28
46
36.5
38
70
0.5
38
28
46
38
70 37.5
93
77
63 100
79.5
22
25.5
18.4
12.4
8
10
12 R1/4 11
10
12
R
Meter thread type
18.4
12.4
8
10
A
Opposite Nozzle Working
L1
L2 øP1 øP2 C
E
side diameter pressure
H (mm) (MPa)
31.5 10.5 10 9.8 14.9 21.2 8
0.5
11.4 12.4
8
L1
B
A
L1
B
6
R1/8
H
øP2
P
L2
C
E
C
V
øP2
øP1
øD
E
Vacuum ejector/vacuum unit
Vacuum ejector
VSH-H 05-4M5J
VSH-H 05-66AJ
VSH-H 07-66AJ
VSH-H 10-66AJ
VSH-H 12-66AJ
VSH-H 10-86AJ
VSH-H 12-86AJ
VSH-H 15-88AJ
VSH-H 15-108AJ
VSH-H 20-108AJ
VSH-H 20-128AJ
VSH-L 05-4M5J
VSH-L 05-66AJ
VSH-L 07-66AJ
VSH-L 10-66AJ
VSH-L 07-86AJ
VSH-L 10-86AJ
VSH-L 15-88AJ
VSH-L 15-108AJ
VSH-L 15-128AJ
VSH-L 20-108AJ
VSH-L 20-128AJ
VSH-E 07-66AJ
VSH-E 10-66AJ
VSH-E 12-66AJ
VSH-E 10-86AJ
VSH-E 12-86AJ
VSH-E 15-88AJ
VSH-E 15-108AJ
VSH-E 20-108AJ
VSH-E 20-128AJ
R
C2
L1
B
A
Meter thread type
Unit: mm
Tube Tube
Opposite Nozzle Working Ultimate Suction Consumed Weight
A
B L1 L2 øP1 øP2 C1 C2 E
O.D. O.D. R
side diameter pressure vacuum flow flow rate
øD1 øD2
H (mm) (MPa) (-kPa) ( /min(ANR)) ( /min(ANR)) (g)
18
4
6 M5x0.8 3.5 42.3 38.8 10.5 10 10 14.9 11.9 21.2 8
0.5
90
7 11.5
44.5
0.7
13 23 45.5
6
11.4 12.4
17
25.5
1
28 46 44.5
17
18.2
18.4
8 R1/8 8 58.4 54.4
1.2
38 70 44
1 0.5
28 46 45.5
12.4
28.4
93 38 70 46
18.1
14.4
1.2
8
13.5
28.9
92
12
76.9 70.9
22
22 1.5
63 100
14.8
17.6
20.2
31.2
94.5
10
R1/4 11
23.3
15.1
33.6
10
17.6
22
23.4
89.4 83.3
24 2.0
104 200 128
12
16.8
36.4
12
21
18
4
6 M5x0.8 3.5 42.3 38.8 10.5 10 10 14.9 11.9 21.2 8
12 11.5
0.5
44.5
6
11.4 12.4
17
25.5
0.7
26 23 45
1
42 46 44
R1/8
8
58.4
54.4
18.4
18.2
17
8
0.7
26 23 46
12.4
28.4
8
14.4
18.1
1 0.5 66 42 46 45
13.5
28.9
89.5
31.2 22 1.5
76.9 70.9 14.8 17.6 22 20.2
95 100 93
10 12
R1/4 11
16.5 21
96.5
23.4 23.3 36.9
15.1
33.6
12 10
17.6 20.2
22
89.4 83.3
24 2.0
174 200 128
16.8
36.4
12
21 23.4
0.7
10.5 17 45
6
11.4 12.4
17
25.5
1
21 34 44.5
R1/8
8
58.4
54.4
18.4
18.2
17
1.2
27 47 44.5
8
1
21 34 46.5
12.4
28.4
8
14.4
18.1
1.2 0.35 92 27 47 45.5
13.5
28.9
92
42 70
12
76.9 70.9
22
22 1.5
14.8 17.6
20.2
31.2
95.5
10
R1/4 11
23.3
15.1
33.6
10
17.6
22
23.4
89.4 83.3
24 2.0
82 150 128
12
16.8
36.4
12
21
* L1 and L2 dimensions for tapered screws are reference dimensions applicable after screw tightening.
Vacuum ejector/vacuum unit
øP2
H
Vacuum pad
Type
A
L1
B
L2
Vacuum related components
C2
øP2
R
P
H
C1
EX
øD1
L2
E
øD2
V
øD2
C1
E
øD1
Inch/NPT specifications
øP1
øP1
Related components
VSH Direct-mounted solenoid valve type (Common exhaust)
16
VSU Tube type (Open to air exhaust)
ø13
øD
Type
C
P
L
B
Vacuum ejector/vacuum unit
Vacuum ejector
H12
B
A L
V
A
R
Meter screw type
VSU-H 05-M54S
VSU-H 05-M56S
VSU-H 05-6A4S
VSU-H 05-6A6S
VSU-H 07-M54S
VSU-H 07-M56S
VSU-H 07-6A4S
VSU-H 07-6A6S
VSU-L 05-M54S
VSU-L 05-M56S
VSU-L 05-6A4S
VSU-L 05-6A6S
VSU-L 07-M54S
VSU-L 07-M56S
VSU-L 07-6A4S
VSU-L 07-6A6S
VSU-E 07-M54S
VSU-E 07-M56S
VSU-E 07-6A4S
VSU-E 07-6A6S
Tube
O.D.
øD
4
6
4
6
4
6
4
6
4
6
4
6
4
6
4
6
4
6
4
6
R
A
M5x0.8
3
R1/8
8
M5x0.8
3
R1/8
8
M5x0.8
3
R1/8
8
M5x0.8
3
R1/8
8
M5x0.8
3
R1/8
8
B
L
C
50.3
51.3
54.3
55.3
57.1
57.8
61.1
61.8
50.3
51.3
54.3
55.3
57.1
57.8
61.1
61.8
57.1
57.8
61.1
61.8
47.3
48.3
50.3
51.3
54.1
54.8
57.1
57.8
47.3
48.3
50.3
51.3
54.1
54.8
57.1
57.8
54.1
54.8
57.1
57.8
11.2
12.0
11.2
12.0
11.2
12.0
11.2
12.0
11.2
12.0
11.2
12.0
11.2
12.0
11.2
12.0
11.2
12.0
11.2
12.0
Unit: mm
Nozzle Ultimate Suction Consumed Weight
diameter vacuum flow flow rate
(mm) (-kPa) ( /min(ANR)) ( /min(ANR)) (g)
17.5
17
0.5
90
7
11.5
20
19.5
19
18
0.7
92 12.5 23
21
20.5
17.5
17
0.5
12 11.5
20
19.5
66
19
20
18
0.7
23
21
22
20.5
19
0.7
90
10
17
* The L dimension for tapered screws is the reference dimension applicable after screw tightening.
* The M5 screw's opposite hexagon side is knurled. H12 applies to 6A (R1/8) screws.
17
21.5
20.5
EX
11.9
H12
A
20.8
R
B
A L
V
Meter screw type
VSU-H 05-M54J
VSU-H 05-M56J
VSU-H 05-6A4J
VSU-H 05-6A6J
VSU-H 07-M54J
VSU-H 07-M56J
VSU-H 07-6A4J
VSU-H 07-6A6J
VSU-L 05-M54J
VSU-L 05-M56J
VSU-L 05-6A4J
VSU-L 05-6A6J
VSU-L 07-M54J
VSU-L 07-M56J
VSU-L 07-6A4J
VSU-L 07-6A6J
VSU-E 07-M54J
VSU-E 07-M56J
VSU-E 07-6A4J
VSU-E 07-6A6J
4
6
4
6
4
6
4
6
4
6
4
6
4
6
4
6
4
6
4
6
A
M5x0.8
3
R1/8
8
M5x0.8
3
R1/8
8
M5x0.8
3
R1/8
M5x0.8
8
3
R1/8
8
M5x0.8
3
R1/8
8
B
L
C
50.3
51.3
54.3
55.3
57.1
57.8
61.1
61.8
50.3
51.3
54.3
55.3
57.1
57.8
61.1
61.8
57.1
57.8
61.1
61.8
47.3
48.3
50.3
51.3
54.1
54.8
57.1
57.8
47.3
48.3
50.3
51.3
54.1
54.8
57.1
57.8
54.1
54.8
57.1
57.8
11.2
12.0
11.2
12.0
11.2
12.0
11.2
12.0
11.2
12.0
11.2
12.0
11.2
12.0
11.2
12.0
11.2
12.0
11.2
12.0
E
22.3
23.3
22.3
23.3
29.1
29.8
29.1
29.8
22.3
23.3
0.5
22.3
23.3
29.1
29.8
0.7
29.1
29.8
29.1
29.8
0.7
29.1
29.8
19.5
12
11.5
66
20
20
23
22
90
10
22
21.5
17
23
22.5
21.5
20.5
23.5
23
* The L dimension for tapered screws is the reference dimension applicable after screw tightening.
* The M5 screw's opposite hexagon side is knurled. H12 applies to 6A (R1/8) screws.
VSU Tube type union (Atmospheric)
øD2
Type
C1
B
C2
P
øD1
V
ø13
VSU-H 05-44S
VSU-H 05-46S
VSU-H 05-64S
VSU-H 05-66S
VSU-H 07-44S
VSU-H 07-46S
VSU-H 07-64S
VSU-H 07-66S
VSU-L 05-44S
VSU-L 05-46S
VSU-L 05-64S
VSU-L 05-66S
VSU-L 07-44S
VSU-L 07-46S
VSU-L 07-64S
VSU-L 07-66S
VSU-E 07-44S
VSU-E 07-46S
VSU-E 07-64S
VSU-E 07-66S
Tube
O.D.
øD1
4
6
4
6
4
6
4
6
4
6
Tube
O.D.
øD2
4
6
4
6
4
6
4
6
4
6
4
6
4
6
4
6
4
6
4
6
B
49.9
50.4
50.6
51.6
56.7
C1
11.2
11.9
11.2
57.4
58.1
49.9
50.9
50.6
51.6
56.7
11.9
11.2
11.9
11.2
57.4
58.1
56.7
11.9
11.2
57.4
58.1
11.9
C2
11.2
11.9
11.2
11.9
11.2
11.9
11.2
11.9
11.2
11.9
11.2
11.9
11.2
11.9
11.2
11.9
11.2
11.9
11.2
11.9
Unit: mm
Nozzle Ultimate Suction Consumed Weight
diameter vacuum flow flow rate
(mm) (-kPa) ( /min(ANR)) ( /min(ANR)) (g)
18.5
0.5
90
7
11.5
0.7
92
12.5
23
18
17.5
20
19.5
19
18.5
18.5
0.5
12
11.5
17.5
66
20
0.7
23
22
0.7
90
10
17
20
19
18.5
17.5
20.5
19.5
18.5
19
Vacuum ejector/vacuum unit
15
B
L
E
ø6
ø11
C
P
R
Vacuum pad
2-ø3.2
Type
Unit: mm
Nozzle Ultimate Suction Consumed Weight
diameter vacuum flow flow rate
(mm) (-kPa) ( /min(ANR)) ( /min(ANR)) (g)
20
19.5
0.5 90
7 11.5
22.5
22
21
20.5
0.7 92 12.5 23
23.5
23
Vacuum related components
ø13
øD
Tube
O.D.
øD
Inch/NPT specifications
8.5
Related components
VSU Tube type (Common exhaust)
18
VSU Tube type union (Common exhaust)
8.5
ø13
øD2
E
ø6
ø11
C2
2-ø3.2
Type
P
15
B
Vacuum ejector/vacuum unit
Vacuum ejector
C1
11.6
EX
20.5
V
øD1
VSU-H 05-44J
VSU-H 05-46J
VSU-H 05-64J
VSU-H 05-66J
VSU-H 07-44J
VSU-H 07-46J
VSU-H 07-64J
VSU-H 07-66J
VSU-L 05-44J
VSU-L 05-46J
VSU-L 05-64J
VSU-L 05-66J
VSU-L 07-44J
VSU-L 07-46J
VSU-L 07-64J
VSU-L 07-66J
VSU-E 07-44J
VSU-E 07-46J
VSU-E 07-64J
VSU-E 07-66J
Tube Tube
O.D. O.D.
øD1 øD2
4
6
4
6
4
6
4
6
4
6
4
6
4
6
4
6
4
6
4
6
4
6
4
6
4
6
4
6
4
6
B
C1
C2
E
49.9
11.2 22.3
11.2
50.9
11.9 23.3
50.6
11.2 22.3
11.9
11.9 23.3
51.6
11.2 29.1
56.7
11.2
11.9 29.8
57.4
11.2 29.1
11.9
58.1
11.9 29.8
49.9
11.2 22.3
11.2
50.9
11.9 23.3
50.6
11.2 22.3
11.9
51.6
11.9 23.3
56.7
11.2 29.1
11.2
11.9 29.8
57.4
11.2 29.1
11.9
58.1
11.9 29.8
56.7
11.2 29.1
11.2
11.9 29.8
57.4
11.2 29.1
11.9
58.1
11.9 29.8
Unit: mm
Nozzle Ultimate Suction Consumed Weight
diameter vacuum flow flow rate
(mm) (-kPa) ( /min(ANR)) ( /min(ANR)) (g)
0.5
90
7
0.7
92
12.5
0.5
12
66
20
0.7
22
21
20.5
11.5
20
19.5
22.5
23
21.5
20.5
21
20.5
11.5
20
19.5
22
21.5
23
21
20.5
22
0.7
90
10
17
21.5
20.5
VSU VSU type fixing bracket
21
13.5
B
12
Type
J
F
2-ø4.5
VSU-05-B
VSU-07-B
B
F
J
33.2
39.2
9
10
15
20
* VSU-05-B is for 0.5 mm nozzle diameters and VSU-07-B for 0.7 mm nozzle diameters.
19
Unit: mm
Weight
(g)
2
2
C
L1
L2
4
9
11.3
6.9
16.9
10.6 11.8
7.2
17.2
11.3
6.9
16.9
6
10.6 11.8
7.2
17.2
6
10.6 11.8
7.2
17.2
2-C
6
12
15
20
øP
VSB-H 05-44
VSB-H 07-66
VSB-H 10-66
VSB-H 12-66
VSB-L 05-44
P VSB-L 07-66
VSB-L 10-66
VSB-E 07-66
VSB-E 10-66
VSB-E 12-66
11.5
L2
2-ø4.3
Type
2-ø2.6
5 L1
5 12.7
50
4
9
Unit: mm
Nozzle Working Ultimate Suction Consumed Weight
diameter pressure vacuum flow flow rate
(mm) (MPa) (-kPa) ( /min(ANR)) ( /min(ANR)) (g)
0.5 0.5
90
7
11.5 18
0.7
13
23
18.5
0.5
1
28
46
93
1.2
38
70
18
0.5
12 11.5 18
23 18.5
0.7 0.45 66
26
46 17.5
1
42
0.7
10.5 17
18.5
1
0.4
92
21
34
1.2
27
47
18
Vacuum ejector/vacuum unit
2-øP
V
2-øD
Tube
O.D.
øD
Vacuum pad
12.2
VSB Square type (Open to air exhaust)
17
MAX
11.5
5
50
2-ø4.3
2-øD
12
27.2
VSB-H 05-44V
VSB-H 07-66V
VSB-H 10-66V
VSB-H 12-66V
VSB-L 05-44V
VSB-L 07-66V
VSB-L 10-66V
VSB-E 07-66V
VSB-E 10-66V
VSB-E 12-66V
*. Lead wire White: COMMON
Red: N.C.
Black: N.O.
Unit: mm
øD 11.5
2-ø4.3
12
20
Black Red White
VSB-VUSM Discrete mechanical vacuum switch
50
5
MAX
17
Type
VSB-VUSM-4
VSB-VUSM-6
*. Lead wire White: COMMON
Red: N.C.
Black: N.O.
Tube O.D.
øD
4
6
Weight
(g)
29
29
Inch/NPT specifications
20
Related components
Type
Unit: mm
Ultimate
Working
Nozzle
Suction
Consumed
Weight
Tube O.D. diameter pressure vacuum
flow
flow rate
(g)
øD
(-kPa) ( /min(ANR)) ( /min(ANR))
(MPa)
(mm)
0.5
0.5
90
7
11.5
46.5
4
0.7
13
23
46
93
1
28
46
47
0.5
6
38
70
47.5
1.2
0.5
12
11.5
46.5
4
0.45
66
26
23
48
0.7
6
42
46
46.5
1
17
0.7
10.5
48.5
1
0.4
92
21
34
6
1.2
27
47
47.5
Vacuum related components
VSB Square type with vacuum switch
White Red Black
20
21
EXH
P
M
V
H7
A 6.5
16
11.2
15.6
19
ø4
VSC Direct-mounted pad straight type (Open to air exhaust)
ø8
Vacuum ejector/vacuum unit
Vacuum ejector
Type
VSC-H 05-M54S
VSC-L 05-M54S
M
A
M5x0.8
M5x0.8
3
3
Unit: mm
Nozzle Ultimate Suction Consumed Weight
diameter vacuum
flow
flow rate
(g)
(-kPa) ( /min(ANR)) ( /min(ANR))
(mm)
0.5
90
7
11.5
14.5
0.5
66
11
11.5
17
Vacuum ejector/vacuum unit
EX
øP
A
VSC-H 07-6A6S
VSC-H 07-6A8S
VSC-H 10-6A6S
VSC-H 10-6A8S
VSC-H 12-6A6S
VSC-H 12-6A8S
VSC-H 15-8A8S
VSC-H 15-10A8S
VSC-H 15-8A10S
VSC-H 15-10A10S
VSC-H 20-8A8S
VSC-H 20-10A8S
VSC-H 20-8A10S
VSC-H 20-10A10S
VSC-L 07-6A6S
VSC-L 07-6A8S
VSC-L 10-6A6S
VSC-L 10-6A8S
VSC-L 15-8A8S
VSC-L 15-10A8S
VSC-L 15-8A10S
VSC-L 15-10A10S
VSC-L 20-8A8S
VSC-L 20-10A8S
VSC-L 20-8A10S
VSC-L 20-10A10S
VSC-E 07-6A6S
VSC-E 07-6A8S
VSC-E 10-6A6S
VSC-E 10-6A8S
VSC-E 12-6A6S
VSC-E 12-6A8S
VSC-E 15-8A8S
VSC-E 15-10A8S
VSC-E 15-8A10S
VSC-E 15-10A10S
VSC-E 20-8A8S
VSC-E 20-10A8S
VSC-E 20-8A10S
VSC-E 20-10A10S
6
8
6
8
6
8
8
10
8
10
6
8
6
8
8
10
8
10
6
8
6
8
6
8
8
10
8
10
R
R1/8
R1/4
R3/8
R1/4
R3/8
R1/4
R3/8
R1/4
R3/8
R1/8
R1/4
R3/8
R1/4
R3/8
R1/4
R3/8
R1/4
R3/8
R1/8
R1/4
R3/8
R1/4
R3/8
R1/4
R3/8
R1/4
R3/8
A
8
11
12
11
12
11
12
11
12
8
11
12
11
12
11
12
11
12
8
11
12
11
12
11
12
11
12
L1
28
39
28
39
28
39
L2
24
33
32.7
33
32.7
33
32.7
33
32.7
24
33
32.7
33
32.7
33
32.7
33
32.7
24
33
32.7
33
32.7
33
32.7
33
32.7
L3
16
21
20.7
21
20.7
21
20.7
21
20.7
16
21
20.7
21
20.7
21
20.7
21
20.7
16
21
20.7
21
20.7
21
20.7
21
20.7
øP
B
16
62.5
65.2
62.5
65.2
62.5
65.2
E
Unit: mm
Nozzle Ultimate Suction Consumed Weight
diameter vacuum flow flow rate
(mm) (-kPa) ( /min(ANR)) ( /min(ANR)) (g)
C
24.5 17
27.2 18.2
24.5 17
27.2 18.2
24.5 17
27.2 18.2
16
0.7
13
23
1
28
46
38
70
1.2
93
87
104.2 29.2 18.2
1.5
63
100
105.9 30.9 20.7
24
22
104.2 29.2 18.2
2
93
110
200
26
23
105.9 30.9 20.7
16
62.5
65.2
62.5
65.2
24.5 17
27.2 18.2
24.5 17
27.2 18.2
0.7
16
1
42
1.5
66
95
100
180
200
22
104.2 29.2 18.2
2
105.9 30.9 20.7
16
24.5 17
27.2 18.2
24.5 17
27.2 18.2
24.5 17
27.2 18.2
16
0.7
10.5
17
1
21
34
1.2
27
47
1.5
* L1, L2, and L3 dimensions are references applicable after screw tightening.
88
42
70
22
104.2 29.2 18.2
2
31.5
87.5
92
105.9 30.9 20.7
105.9 30.9 20.7
85
86
86.5
87.5
87
89
104.2 29.2 18.2
24
89
91
92
92.5
93.5
46
105.9 30.9 20.7
62.5
65.2
62.5
65.2
62.5
65.2
88
31.5
104.2 29.2 18.2
24
31.5
84
150
88.5
89.5
92.5
93.5
94
95
Vacuum related components
Type
Tube
O.D.
øD
V
Inch/NPT specifications
R
Related components
P
L1
L2
L3
øD
B
E
C
Vacuum pad
VSC Direct-mounted pad type (Open to air exhaust)
22
VSC Direct-mounted pad type (Common exhaust)
øD2
P
A
R
Type
VSC-H 07-6A6J
VSC-H 07-6A8J
VSC-H 10-6A6J
VSC-H 10-6A8J
VSC-H 12-6A6J
VSC-H 12-6A8J
VSC-H 15-8A8J
VSC-H 15-10A8J
VSC-H 15-8A10J
VSC-H 15-10A10J
VSC-H 20-8A8J
VSC-H 20-10A8J
VSC-H 20-8A10J
VSC-H 20-10A10J
VSC-L 07-6A6J
VSC-L 07-6A8J
VSC-L 10-6A6J
VSC-L 10-6A8J
VSC-L 15-8A8J
VSC-L 15-10A8J
VSC-L 15-8A10J
VSC-L 15-10A10J
VSC-L 20-8A8J
VSC-L 20-10A8J
VSC-L 20-8A10J
VSC-L 20-10A10J
VSC-E 07-6A6J
VSC-E 07-6A8J
VSC-E 10-6A6J
VSC-E 10-6A8J
VSC-E 12-6A6J
VSC-E 12-6A8J
VSC-E 15-8A8J
VSC-E 15-10A8J
VSC-E 15-8A10J
VSC-E 15-10A10J
VSC-E 20-8A8J
VSC-E 20-10A8J
VSC-E 20-8A10J
VSC-E 20-10A10J
Tube Tube
O.D. O.D.
øD1 øD2
6
8
6
8
6
8
8
10
8
10
6
8
6
8
8
10
8
10
6
8
6
8
6
8
8
10
8
10
8
R
R1/8
R1/4
R3/8
R1/4
R3/8
12
R1/4
R3/8
R1/4
R3/8
8
R1/8
R1/4
R3/8
R1/4
R3/8
12
R1/4
R3/8
R1/4
R3/8
8
R1/8
R1/4
R3/8
R1/4
R3/8
12
R1/4
R3/8
R1/4
R3/8
A
8
11
12
11
12
11
12
11
12
8
11
12
11
12
11
12
11
12
8
11
12
11
12
11
12
11
12
L1
28
38
28
38
28
38
L2
24
32
31.7
32
31.7
32
31.7
32
31.7
24
32
31.7
32
31.7
32
31.7
32
31.7
24
32
31.7
32
31.7
32
31.7
32
31.7
L3
16
21
20.7
21
20.7
21
20.7
21
20.7
16
21
20.7
21
20.7
21
20.7
21
20.7
16
21
20.7
21
20.7
21
20.7
21
20.7
V
øP
B
16
64.6
67.3
64.6
67.3
64.6
67.3
94
E
C1
Unit: mm
Nozzle Ultimate Suction Consumed Weight
diameter vacuum flow flow rate
(mm) (-kPa) ( /min(ANR)) ( /min(ANR)) (g)
C2
24.5 17
27.2 18.2
24.5 17
18.2
27.2 18.2
24.5 17
27.2 18.2
16
0.7
13
23
1
28
46
38
70
1.2
93
1.5
22
23.3
94
63
100 99.5
100.5
103
22
29.2 18.2
2
93
110 200 104
95.7 30.9 20.7
16
64.6
67.3
64.6
67.3
94
105
24.5 17
27.2 18.2
18.2
24.5 17
27.2 18.2
0.7
26
36.5
1
42
1.5
23.3
66
29.2 18.2
2
16
94
24.5 17
27.2 18.2
24.5 17
18.2
27.2 18.2
24.5 17
27.2 18.2
16
95
0.7
10.5
17
1
21
34
1.2
27
47
1.5
42
95.7 30.9 20.7
23.3
94
36.5
70 100.5
101.5
104.5
22
29.2 18.2
2
95.7 30.9 20.7
98
99.5
92
29.2 18.2
22
100
99
98.5
99.5
180 200
100
100.5
22
95.7 30.9 20.7
64.6
67.3
64.6
67.3
64.6
67.3
46
97
95.7 30.9 20.7
94
23
16
29.2 18.2
22
36.5
98.5
29.2 18.2
95.7 30.9 20.7
* L1, L2, and L3 dimensions are references applicable after screw tightening.
23
C2
EX
øP
øD1
B
E
C1
L1
L2
L3
Vacuum ejector/vacuum unit
Vacuum ejector
84
150 105.5
106.5
E1
E2
EX
øP2
H
A
VSC-H 07-6A6LS
VSC-H 07-6A8LS
VSC-H 10-6A6LS
VSC-H 10-6A8LS
VSC-H 12-6A6LS
VSC-H 12-6A8LS
VSC-H 15-8A8LS
VSC-H 15-10A8LS
VSC-H 15-8A10LS
VSC-H 15-10A10LS
VSC-H 20-8A8LS
VSC-H 20-10A8LS
VSC-H 20-8A10LS
VSC-H 20-10A10LS
VSC-L 07-6A6LS
VSC-L 07-6A8LS
VSC-L 10-6A6LS
VSC-L 10-6A8LS
VSC-L 15-8A8LS
VSC-L 15-10A8LS
VSC-L 15-8A10LS
VSC-L 15-10A10LS
VSC-L 20-8A8LS
VSC-L 20-10A8LS
VSC-L 20-8A10LS
VSC-L 20-10A10LS
VSC-E 07-6A6LS
VSC-E 07-6A8LS
VSC-E 10-6A6LS
VSC-E 10-6A8LS
VSC-E 12-6A6LS
VSC-E 12-6A8LS
VSC-E 15-8A8LS
VSC-E 15-10A8LS
VSC-E 15-8A10LS
VSC-E 15-10A10LS
VSC-E 20-8A8LS
VSC-E 20-10A8LS
VSC-E 20-8A10LS
VSC-E 20-10A10LS
A
L1
L2
R1/8
8
42.8
45.7
42.8
45.7
42.8
45.7
R1/4
R3/8
R1/4
10
R3/8
R1/4
8
R3/8
R1/4
10
R3/8
11
12
11
12
11
12
11
12
38.8
41.7
38.8
41.7
38.8
41.7
46.7
46.4
50.5
50.2
46.7
46.4
50.5
50.2
38.8
41.7
38.8
41.7
46.7
46.4
50.5
50.2
46.7
46.4
50.5
50.2
38.8
41.7
38.8
41.7
38.8
41.7
46.7
46.4
50.5
50.2
46.7
46.4
50.5
50.2
6
8
6
8
6
8
R
8
6
8
6
8
R1/8
8
R1/4
R3/8
R1/4
10
R3/8
R1/4
8
R3/8
R1/4
10
R3/8
11
12
11
12
11
12
11
12
8
6
8
6
8
6
8
R1/8
8
R1/4
R3/8
R1/4
10
R3/8
R1/4
8
R3/8
R1/4
10
R3/8
11
12
11
12
11
12
11
12
8
52.7
56.5
56.9
52.7
56.5
56.9
42.8
45.7
42.8
45.7
52.7
56.5
56.9
52.7
56.5
56.9
42.8
45.7
42.8
45.7
42.8
45.7
52.7
56.5
56.9
52.7
56.5
56.9
L3
16
21
20.7
21
20.7
21
20.7
21
20.7
16
21
20.7
21
20.7
21
20.7
21
20.7
16
21
20.7
21
20.7
21
20.7
21
20.7
V
Unit: mm
Opposite
Nozzle Ultimate Suction Consumed Weight
diameter vacuum flow flow rate
E1 E2 øP1 øP2 C
side
(mm) (-kPa) ( /min(ANR)) ( /min(ANR)) (g)
H
57.3 19.3 12.5
17
31.5
0.7
13 23
58.3 20.3 14.5
18.2
34
57.3 19.3 12.5
17
31.5
16
14 16
1
28 46
58.3 20.3 14.5
18.2
34
57.3 19.3 12.5
17
31.5
1.2 93 38 70
58.3 20.3
34
14.5
18.2
85.5
99.3 24.3
86.5
1.5
63 100
90.5
100.8 25.8 17.5
20.2
91.5
24
19 22
90
99.3 24.3 14.5
18.2
91
2
93 110 200
95
100.8 25.8 17.5
20.2
96
57.3 19.3 12.5
17
31.5
26 23
0.7
58.3 20.3 14.5
18.2
34
16
14 16
17
57.3 19.3 12.5
31.5
1
42 46
58.3 20.3
34
18.2
14.5
84
99.3 24.3
85
1.5 66 95 100
89
100.8 25.8 17.5
20.2
90
24
19 22
85.5
99.3 24.3 14.5
18.2
86.5
2
180 200
90.5
100.8 25.8 17.5
20.2
91.5
57.3 19.3 12.5
17
31.5
0.7
10.5 17
58.3 20.3 14.5
18.2
34
57.3 19.3 12.5
17
31.5
16
14 16
1
21 34
58.3 20.3 14.5
18.2
34
57.3 19.3 12.5
17
31.5
1.2
27 47
58.3 20.3
34
14.5
18.2
86.5
99.3 24.3
92
87.5
1.5
42 70
91.5
100.8 25.8 17.5
20.2
92.5
24
19 22
91.5
99.3 24.3 14.5
18.2
92.5
2
84 150
96.5
100.8 25.8 17.5
20.2
97.5
* L1, L2, and L3 dimensions are references applicable after screw tightening.
Vacuum pad
Type
Tube
O.D.
øD
Vacuum related components
R
Inch/NPT specifications
L3
L1
L2
C
P
øP1
Related components
øD
Vacuum ejector/vacuum unit
VSC Direct-mounted pad type air supply port Elbow type (Open to air exhaust)
24
VSC Direct-mounted pad type air supply port Elbow type (Common exhaust)
E1
E2
C1
EX
øP2
A
L3
H
R
Type
VSC-H 07-6A6LJ
VSC-H 07-6A8LJ
VSC-H 10-6A6LJ
VSC-H 10-6A8LJ
VSC-H 12-6A6LJ
VSC-H 12-6A8LJ
VSC-H 15-8A8LJ
VSC-H 15-10A8LJ
VSC-H 15-8A10LJ
VSC-H 15-10A10LJ
VSC-H 20-8A8LJ
VSC-H 20-10A8LJ
VSC-H 20-8A10LJ
VSC-H 20-10A10LJ
VSC-L 07-6A6LJ
VSC-L 07-6A8LJ
VSC-L 10-6A6LJ
VSC-L 10-6A8LJ
VSC-L 15-8A8LJ
VSC-L 15-10A8LJ
VSC-L 15-8A10LJ
VSC-L 15-10A10LJ
VSC-L 20-8A8LJ
VSC-L 20-10A8LJ
VSC-L 20-8A10LJ
VSC-L 20-10A10LJ
VSC-E 07-6A6LJ
VSC-E 07-6A8LJ
VSC-E 10-6A6LJ
VSC-E 10-6A8LJ
VSC-E 12-6A6LJ
VSC-E 12-6A8LJ
VSC-E 15-8A8LJ
VSC-E 15-10A8LJ
VSC-E 15-8A10LJ
VSC-E 15-10A10LJ
VSC-E 20-8A8LJ
VSC-E 20-10A8LJ
VSC-E 20-8A10LJ
VSC-E 20-10A10LJ
Tube Tube
O.D. O.D. R
øD1 øD2
6
8
6
8
6
8
8
10
8
10
6
8
6
8
8
10
8
10
6
8
6
8
6
8
8
10
8
10
A
L1
L2
R1/8
8
42.8
45.7
42.8
45.7
42.8
45.7
R1/4
R3/8
R1/4
R3/8
12
R1/4
R3/8
R1/4
R3/8
11
12
11
12
11
12
11
12
38.8
41.7
38.8
41.7
38.8
41.7
46.7
46.4
50.5
50.2
46.7
46.4
50.5
50.2
38.8
41.7
38.8
41.7
46.7
46.4
50.5
50.2
46.7
46.4
50.5
50.2
38.8
41.7
38.8
41.7
38.8
41.7
46.7
46.4
50.5
50.2
46.7
46.4
50.5
50.2
8
8
R1/8
8
R1/4
R3/8
R1/4
R3/8
12
R1/4
R3/8
R1/4
R3/8
11
12
11
12
11
12
11
12
8
R1/8
8
R1/4
R3/8
R1/4
R3/8
12
R1/4
R3/8
R1/4
R3/8
11
12
11
12
11
12
11
12
52.7
56.5
52.7
56.5
42.8
45.7
42.8
45.7
52.7
56.5
52.7
56.5
42.8
45.7
42.8
45.7
42.8
45.7
52.7
56.5
52.7
56.5
L3
E1
59.4
60.4
59.4
16
60.4
59.4
60.4
21
89.1
20.7
21
90.6
20.7
21
89.1
20.7
21
90.6
20.7
59.4
60.4
16
59.4
60.4
21
89.1
20.7
21
90.6
20.7
21
89.1
20.7
21
90.6
20.7
59.4
60.4
59.4
16
60.4
59.4
60.4
21
89.1
20.7
21
90.6
20.7
21
89.1
20.7
21
90.6
20.7
V
E2 øP1 øP2 C1
19.3
20.3
19.3
20.3
19.3
20.3
24.3
Opposite
C2 side
H
12.5
17
14.5
18.2
12.5
17
16
18.2 14
14.5
18.2
12.5
17
14.5
20.2
22
23.3 19
24.3 14.5
18.2
25.8 17.5
20.2
19.3 12.5
17
18.2
20.3 14.5
16
18.2 14
17
19.3 12.5
20.3
14.5
18.2
24.3
22
23.3 19
24.3 14.5
18.2
25.8 17.5
20.2
24.3
22
16
20.2
25.8 17.5
19.3
20.3
19.3
20.3
19.3
20.3
16
18.2
25.8 17.5
12.5
17
14.5
18.2
12.5
17
16
18.2 14
14.5
18.2
12.5
17
14.5
22
16
18.2
25.8 17.5
20.2
22
23.3 19
24.3 14.5
18.2
25.8 17.5
20.2
* L1, L2, and L3 dimensions are references applicable after screw tightening.
25
C2
P
øP1
øD2
øD1
L1
L2
Vacuum ejector/vacuum unit
Vacuum ejector
22
Unit: mm
Nozzle Ultimate Suction Consumed Weight
diameter vacuum flow flow rate
(mm) (-kPa) ( /min(ANR)) ( /min(ANR)) (g)
35.5
0.7
13 23
38
35.5
1
28 46
38
35.5
1.2 93 38 70
38
97.5
98.5
1.5
63 100
102
103
101.5
102.5
2 93 110 200
106.5
107.5
35.5
0.7
26 23
38
35.5
1
42 46
38
95.5
96.5
1.5 66 95 100
100.5
101.5
97
98
2
180 200
102
103
35.5
0.7
10.5 17
38
35.5
1
21 34
38
35.5
1.2
27 47
38
98
92
99
1.5
42 70
103
104
103
104
2
84 150
108
109
VSH Direct-mounted solenoid valve,
open to air exhaust type
VSU Tube type
Branch
VSB Square type
Straight
Silencer kit
Vacuum ejector/vacuum unit
Replacement elements for vacuum ejector
* VSH- 20VSC-20).
Vacuum ejector type
VSH- M5S
VSH- 6AS
VSH- 8AS
uses VSC-20-SK (silencer kit for
Filter element type
VSU-E
Element A type
VSB-EA
VSC Direct-mounted pad type
*VSB, VSG, VSJ
common parts
Element B type
VSB-EB
*VSB, VSG common part
Silencer element
Type: VSC-M5-SE
VSC Direct-mounted pad, open to air exhaust type
Silencer kit type
VSC-12-SK
VSC Direct-mounted pad, open to air exhaust type
Vacuum ejector type
VSC- 07-6A (L)S
VSC- 10-6A (L)S
VSC- 12-6A (L)S
Silencer kit type
VSC-15-SK
VSC-20-SK
A
A
Silencer kit
Silencer kit
B
B
C
Straight
Elbow
Straight
Elbow
Vacuum ejector type
VSC- 15-8A8 (L)S
VSC- 15-10A8 (L)S
VSC- 15-8A10 (L)S
VSC- 15-10A10 (L)S
VSC- 20-8A8 (L)S
VSC- 20-10A8 (L)S
VSC- 20-8A10 (L)S
VSC- 20-10A10 (L)S
Vacuum related components
Silencer kit type
VSH-M5-SK
VSH-6A-SK
VSH-8A-SK
Inch/NPT specifications
Elbow
Related components
Silencer element B
Filter element
Vacuum pad
Silencer element A
26
Vacuum ejector/vacuum unit
Common precautions for vacuum ejector VSG, VSK
Be sure to read the following instructions before selecting and using the CKD products.
Also read the detailed instructions for individual series.
！ WARNING
1. Confirm that leakage current is 1 mA or less when operating the valve. Malfunctions could result
from the leakage current and cause accidents.
2. Vacuum leaks are tolerated with vacuum holding and check valves. Provide separate safety
measures if the vacuum must be held for a long time.
3. When continuously energizing the valve for a long time, heat generated by the coil could cause
burns or adversely affect peripherals. Contact your nearest CKD sales office when using energizing
continuously for long times.
！ CAUTION
1. Do not apply strong tension or excessively bend valve leads. Wires or connectors could be break.
2. When using manifold specifications, the number of manifolds or combination of installed units could
cause the performance to drop or adversely affect other station vacuum ports. Read and understand
"Precautions for using manifolds" on page 64. Contact your nearest CKD sales office for any
questions.
3. Read this manual and instruction manuals carefully for directions on handling and setting the
vacuum sensor.
4. Read this manual carefully for directions on adjusting the vacuum release and air timer vacuum
release valve time.
27
Valve unit (vacuum break valve)
Valve unit (supply valve)
Break flow rate adjusting screw
Filter
Air supply port (P)
Vacuum ejector/vacuum unit
Vacuum sensor (electronic type), valve, vacuum release valve, internal filter type
Vacuum pad
Example of vacuum ejector VSG construction (Refer to page 29 of this manual.)
Example of vacuum ejector VSK construction (Refer to page 37 of this manual.)
Vacuum ejector, vacuum generating solenoid valve (normal close), air timer type vacuum release
valve, filter, internal vacuum sensor with LED
Vacuum generating solenoid valve
Air timer type vacuum release valve
Air supply port (P)
Ejector housing block
Exhaust port (EX)
ME
S1 S2
MO
DE
SW
1
SW
2
Vacuum sensor with LED display
Break air adjusting needle
Vacuum port (V)
Filter
Inch/NPT specifications
Vacuum sensor
Related components
Vacuum port (V)
Vacuum related components
Ejector unit
28
Basic performance-oriented general vacuum ejector unit
Vacuum ejector/vacuum unit
Vacuum ejector unit VSG series
Features
The vacuum sensor and vacuum release valve, etc., are unitized so types matching the work
purpose is selectable.
Types with analog output, 2-point switch output, and inexpensive analog output vacuum sensor
output specifications are available.
Vacuum sensor
Filter
Ejector unit
Valve unit
(supply valve, vacuum break valve)
Break flow rate adjusting screw
Vacuum port (V)
29
Air supply port (P)
Air
0.25 to 0.7 MPa
5 to 50 ˚C
Not required
Supply valve specifications
Control method
Power supply voltage
Power consumption
Effective sectional area
Manual override
Pilot operated poppet type
24V DC 10%/100V AC 10%
1.2 W (with LED) /1.5 VA (with LED)
5 mm2
Push type (non-locking)
Vacuum ejector/vacuum unit
Working fluid
Working pressure range
Ambient temperature range
Lubrication
Vacuum pad
Specifications
Filtration degree
Element ordering model
Poly-vinyl formal
Polycarbonate transparent
PBT with fiberglass
10 µm
VSG-E
Vacuum sensor specifications
Type
VSG...-NA
VSG...-NW
VSG...-A
Switch output 1 point
Switch output 2 points
Output specifications
Analog output 1 point
Analog output 1 point
Power supply voltage
12 to 24V DC 10% ripple content rate 10% (P-P) or less
Power consumption (at 24V DC supply) 17 mA or less (with 1 switch point ON) 25 mA or less (with 2 switch point ON) 15 mA or less (at output current 0 mA)
Working fluid
Air, inert gas
Working pressure range
0 to -100 kPa
Pressure resistance
200kPa
Ambient temperature range
0 to 50˚C
Working humidity range
35 to 85% RH (no dew condensation)
Number of output points
1
2
Output type
NPN open collector
Setting pressure range
0 to -100 kPa
Switch Operation accuracy
3% F.S. (at 25˚C)
output Hysteresis
Approx. 1 to 15% of setting value
2% F.S. or less
Switch capacity
30V DC 80 mA or less
Residual voltage
0.8 V or less
Output voltage
1 to 5 V
1 to 5 V
1 0.1V
1 0.2V
Analog Zero point voltage
output Span voltage
4 0.1V
4 0.2V
Linearity/hysteresis
0.5% F.S. or less
0.5% F.S. or less
Vacuum release valve specifications
Control method
Power supply voltage
Surge protection circuit
Power consumption
Effective sectional area
Manual override
Direct acting poppet type
24V DC 10%/100V AC 10%
Surge absorber (24V DC), bridge diode (100V AC)
1.2 W (with LED)/1.5 VA (with LED)
0.3 mm2
Push type (non-locking)
Inch/NPT specifications
Element
Cover
Body
Related components
Material
Vacuum related components
Vacuum filter specifications
30
Vacuum ejector/vacuum unit
VSG series
Ordering model (Example)
VSG
(1)
E
(2)
07
(3)
F
(4)
4
(5)
4
(6)
3
(7)
NA
(8)
(8) Vacuum sensor specifications
(Selection only for unit combinations B and F)
NW: NPN output 2 points
NA: NPN output 1 point + analog output
A: Analog output
(7) Solenoid valve voltage
(Selection only for unit combinations E and F)
Symbol
Voltage (V)
3
DC24V
1
AC100V
(6) Air supply port (P)
Tube size
Symbol
Size(mm)
Metric size
4
6
ø4
ø6
(5) Vacuum port (V)
Tube size
Symbol
Size(mm)
* Use the same symbol (same tube size)
combination for (5) and (6).
Metric size
4
6
ø4
ø6
(4) Unit combination
Symbol
A
B
E
F
Filter
Vacuum sensor Vacuum supply valve Vacuum release valve
-
(3) Nozzle diameter
Symbol
Size
05
0.5mm
07
0.7mm
10
1.0mm
H type, vacuum, suction flow rate L type, vacuum, suction flow rate E type, vacuum, suction flow rate
-90kPa
-66kPa
7 /min(ANR)(6.5 /min(ANR))
12 /min(ANR)
-93kPa
-66kPa
-90kPa
13 /min(ANR)
26 /min(ANR)
10.5 /min(ANR)
-93kPa
-66kPa
-90kPa
27 /min(ANR)
40 /min(ANR)
21 /min(ANR)
* The supply pressure is 0.5 MPa for H type and L type and 0.35 MPa for E type.
(2) Vacuum characteristics
H: High vacuum medium flow rate type
L: Medium vacuum large flow rate type
E: High vacuum small flow rate type
(1) Vacuum ejector unit: VSG
31
Fix the vacuum ejector VSG with M3 screws using the fixing holes on the resin body.
Vacuum pad
(Refer to external dimension drawings for mounting hole pitch.)
Vacuum ejector/vacuum unit
Fixing method
Inch/NPT specifications
1. Monitor if piping resistance or required vacuum release flow is large. Insufficient vacuum relaese flow
could cause problems. Check specifications before use.
Related components
CAUTION
Read before use. Refer to pages 3 to 6 in the introduction for Safety Precautions and Precautions common to
listed products. Refer to page 27 for common precautions for the vacuum ejector VSG and VSK.
Vacuum related components
Special precautions
32
VSG (Unit combination: Type A)
P
V
3
P
50
2-C
2-øD
Circuit diagram
V
14
13.5
Vacuum ejector/vacuum unit
VSG series
2-ø3.2 10
3 14
L1
37
L2
20
Unit: mm
Type
Tube O.D.
øD
L1
L2
C
4
9.9
9.4
11.2
6
12.3
11.8
11.9
4
9.9
9.4
11.2
6
12.3
11.8
11.9
6
12.3
11.8
11.9
VSG-H 05A-44
VSG-H 07A-66
VSG-H 10A-66
VSG-L 05A-44
VSG-L 07A-66
VSG-L 10A-66
VSG-E 07A-66
VSG-E 10A-66
Nozzle
diameter
(mm)
0.5
0.7
1
0.5
0.7
1
0.7
1
Ultimate Suction Consumed
flow
vacuum
flow rate
(-kPa) ( /min(ANR)) ( /min(ANR))
90
7
11.5
93
13
23
93
27
46
12
11.5
66
26
23
40
46
10.5
17
90
21
34
Weight
(g)
47
49
48
46
48
47
48
VSG (Unit combination: Type B)
-NA: Hysteresis setting trimmer
-NW: SW2 Vacuum setting trimmer
-NA: SW Vacuum setting trimmer
-NW: SW1 Vacuum setting trimmer
Circuit diagram
6 About 500
Operation indicating LED
P
P
V
14
3 13.5
V
2-øD
56
2-C
3
L1
2-ø3.2 10
14
52
L2
20
* Analog output type (-A) is not used the operation indicating LED or vacuum setting trimmers.
Type
33
VSG-H 05B-44VSG-H 07B-66VSG-H 10B-66VSG-L 05B-44VSG-L 07B-66VSG-L 10B-66VSG-E 07B-66VSG-E 10B-66-
Tube O.D.
øD
L1
L2
C
4
9.9
9.4
11.2
6
12.3
11.8
11.9
4
9.9
9.4
11.2
6
12.3
11.8
11.9
6
12.3
11.8
11.9
Nozzle
diameter
(mm)
0.5
0.7
1
0.5
0.7
1
0.7
1
Unit: mm
Ultimate Suction Consumed
flow
vacuum
flow rate
(-kPa) ( /min(ANR)) ( /min(ANR))
90
7
11.5
93
13
23
93
27
46
12
11.5
66
26
23
40
46
10.5
17
90
21
34
Weight
(g)
74
75
75
73
75
74
75
74
LED
Vacuum release valve
4-ø3.2 3 14(18) 14 3
52
L2
L1
P
14.5
30.1 26 6
2-øD
16.5
P
3
V
50
13.5
2-C
vacuume relaese air adjusting needle
7.5
14.5
Circuit diagram
3
V
6
20
Unit: mm
Type
Tube O.D.
øD
L1
L2
C
4
9.9
7.9
11.2
6
12.3
10.3
11.9
4
9.9
7.9
11.2
6
12.3
10.3
11.9
6
12.3
10.3
11.9
VSG-H 05E-44VSG-H 07E-66VSG-H 10E-66VSG-L 05E-44VSG-L 07E-66VSG-L 10E-66VSG-E 07E-66VSG-E 10E-66-
Nozzle
diameter
(mm)
0.5
0.7
1
0.5
0.7
1
0.7
1
Ultimate Suction Consumed
flow
vacuum
flow rate
(-kPa) ( /min(ANR)) ( /min(ANR))
90
7
11.5
93
13
23
93
27
46
12
11.5
66
26
23
40
46
10.5
17
90
21
34
Weight
(g)
99
100
101
99
101
100
101
100
VSG (Unit combination: Type F)
Manual button
LED
-NA: Hysteresis setting trimmer
-NW: SW2 Vacuum setting trimmer
Vacuum related components
About 500
Vacuum generating pilot valve
Vacuum ejector/vacuum unit
Manual button
Vacuum pad
VSG (Unit combination: Type E)
Break air adjusting needle
14.5
26 6
7.5
16.5
3
4-ø3.2 3 14 (33) 14
L1
67
30.1
56
13.5
P
2-øD
P
L2
3
6
20
* Analog output type (-A) is not used the operation indicating LED or vacuum setting trimmers.
Type
VSG-H 05F-44- VSG-H 07F-66- VSG-H 10F-66- VSG-L 05F-44- VSG-L 07F-66- VSG-L 10F-66- VSG-E 07F-66- VSG-E 10F-66- -
Tube O.D.
øD
L1
L2
C
4
9.9
7.9
11.2
6
12.3
10.3
11.9
4
9.9
7.9
11.2
6
12.3
10.3
11.9
6
12.3
10.3
11.9
Nozzle
diameter
(mm)
0.5
0.7
1
0.5
0.7
1
0.7
1
V
Unit: mm
Ultimate Suction Consumed
flow
vacuum
flow rate
(-kPa) ( /min(ANR)) ( /min(ANR))
90
7
11.5
93
13
23
93
27
46
12
11.5
66
26
23
40
46
10.5
17
90
21
34
Weight
(g)
125
128
127
127
Related components
About 500
14.5
2-C
V
Circuit diagram
-NA: SW Vacuum setting trimmer
-NW: SW1 Vacuum setting trimmer
6 About 500
Operation indicating LED
Inch/NPT specifications
Vacuum release valve
Vacuum generating pilot valve
128
34
Vacuum ejector/vacuum unit
VSG series
Replacement element for vacuum ejector VSG
Filter element
Type: VSG-E
(Common parts for VSG, VSK)
The silencer element is the same as the square vacuum ejector (VSB),
so refer to VSB replacement silencer elements on page 26.
How to adjust vacuum release valve
How ro adjust vacuum release air
Turning the vacuum release air adjustment needle to the right (CW)
P
decreases the release air flow and turning it left (CCW) increases it.
Flow: Large
* After adjusting vacuum release air, tighten the lock nut so that the setting
does not change.
Flow: Small
Vacuum release air adjusting needle
Lock nut
Attaching and removing individual connectors
Attaching individual connectors
24V DC
100V AC
Individually inserted connectors are installed by inserting until
they stop.
Removing individual connectors
To remove individually inserted connectors, hold the lever on
the back of the connector down and pull the plug out.
+
-0V
(Black)
Connector back
Lever
-
+24V
(Red)
( ) Blue ( ) Blue
(Black) 0 V
(Red) +V
Handling the vacuum sensor
1. Setting pressure
(1) Energizing (checking wiring and supplying DC power.)
(2) Turn the hysteresis setting trimmer (HYS) fully in the CCW direction to set hysteresis to a minimum (only for vacuum
sensors with analog output (-NA)).
Note: If vacuum is unstable, output destabilizes if hysteresis is setting minimum.
(3) Adjust the pressure setting trimmer (S1 or S2, SW) to the required setting.
Note: Use a vacuum gauge, or check the set pressure when adjusting actual machinery.
(4) Apply pressure and confirm that operation actually takes place.
(For vacuum sensors with analog output (-NA))
Switch output (SW): The operation (LED red) turns on when set pressure is exceeded.
(For 2-point switch output vacuum sensor (-NW))
Switch output 1 (S1): The operation (LED red) turns on when set pressure is exceeded.
Switch output 2 (S2): The operation (LED green) turns on when set pressure is exceeded.
35
(1) Hysteresis is adjusted using the hysteresis setting trimmer (HYS).
(2) Hysteresis is adjusted from 1 to 15% of the setting. Hysteresis increases when the trimmer is turned to CW.
(3) Checking hysteresis
Gradually raise and lower pressure near the set pressure, and using the vacuum gauge, monitor values at which the
operation LED turns on or off. The difference in pressure displayed when the LED is on or off is hysteresis.
(4) Example of hysteresis adjustment
· If pressure has a pulse and output is thin and intermittent, use large hysteresis.
· To set the tolerable range for pressure drops.
3. Analog output vacuum sensor (-A) output characteristics
Vacuum ejector/vacuum unit
2. Setting hysteresis (only for vacuum sensors with analog output (-NA))
Vacuum pad
Analog output (V)
Analog output characteristics
5
4
3
2
1
0
26
53
Vacuum (-kPa)
80
100
(1) Turn power off before wiring.
(2) Check lead color and terminal output when wiring.
(3) Refer to Fig. 1 Connection when connecting wires.
(4) Do not apply strong tension or excessively bend leads.
(5) The cable is connected or disconnected from the connector. When disconnecting the cable, hold the connector, press
down on the stopper and pull the cable out. Load is applied on the sensor PCB each time the cable is connected or
disconnected, so minimize the times this step is done.
NPN output 1 point + analog output
vacuum sensor (-NA) connection diagram
Load
SW2 OUT(Gray)
COM(Blue)
2-point switch output vacuum sensor
(-NW) connection diagram
ANALOG OUT(Gray)
COM(Blue)
Analog output vacuum sensor (-A)
connection diagram
Fig. 1 How to connect
5. Precautions
(1) This product is not drip- or dust-proof. Avoid using in exposure to water, oil, or dust.
(2) This product is not explosion-proof. Avoid using in exposure to flammable or explosive gases or fluids.
(3) Do not use for applications where set the temperature range is exceeded so that the sensor could be damaged.
(4) When applying positive pressure during the vacuum relaese, check that pressure exceeding 0.2 MPa is not applied
constantly.
(5) This product cannot be used in an atmosphere or for fluids containing corrosive substances.
(6) Use clean fluids when possible.
(7) Use a stable DC power supply.
(8) Insert a surge voltage suppressing circuit in the relay and solenoid valve, etc., connected to the output or power terminal.
Avoid using where current could exceed 80 mA.
(9) When using unit power, such as switching power, ground the FG terminal.
(10) Check that the output terminal (black and gray) is not short-circuited with other terminals.
(11) Do not apply excessive external force to the sensor.
(12) Wiring and use that cause noise, etc., to be applied lead to trouble.
(13) When setting pressure or hysteresis, use the enclosed dedicated screwdriver to turn the trimmer carefully within its
rotation range. Do not apply force.
Inch/NPT specifications
COM(Blue)
Load
SW1 OUT(Black)
Related components
ANALOG OUT(Gray)
Main circuit
Main circuit
Load
SW OUT(Black)
V+(Brown)
Main circuit
V+(Brown)
V+(Brown)
Vacuum related components
4. Wiring and piping
36
A variety of modularized units enable selections of integrated type ejector units suitable for the application
Vacuum ejector/vacuum unit
Vacuum ejector unit VSK series
Features
The vacuum sensor has an LED and inexpensive easy-to-use mechanical vacuum sensor.
Two-point and 1-point switch output is available with analog output vacuum sensors with LED.
Select the type for the application.
Modules and a wide range of combinations enable you to choose the optimum module for your
work purpose.
Options in clued a solenoid valve type or air timer type vacuum relaese valve is selectable. The
built-in switching valve enables the short-time vacuum release air blow and release air can be
finely adjusted.
Four nozzles 05(ø0.5mm), 07(ø0.7mm), 10(ø1.0mm), and 12(ø1.2mm) are available as standard.
37
W... With solenoid valve type vacuum release valve (normally closed)
Vacuum sensor with LED display
V
Filter section
Vacuum release air adjusting needle
Solenoid valve type
vacuum release valve
EX
Manual button
Vacuum ejector/vacuum unit
VSK-A
Vacuum pad
Structure drawing (2-face type piping type: VSK-A)
Vacuum generating solenoid valve
Ejector section
P
Structure drawing (1-face type piping type: VSK-B)
Filter section
Vacuum sensor (mechanical)
Vacuume release time
adjusting needle
Vacuum release air adjusting needle
Air timer type vacuum
release valve
Vacuum generating solenoid valve
Ejector section
P
V
Inch/NPT specifications
EX
Manual button
Vacuum related components
Q... With air timer type vacuum release valve (normally closed)
Related components
VSK-B
38
Vacuum ejector/vacuum unit
VSK series
VSK-A operation explanation drawing
Example) VSK-A
W...B
Vacuum generating solenoid valve (normally closed), solenoid valve type vacuum release valve, filter, vacuum sensor with LED display
(1) Stopped condition
Vacuum release air adjustment
(2) At vacuum generation
Switching valve
V
Vacuum sensor (with LED display)
Filter
Vacuum generating solenoid valve
Ejector
P
(3) Vacuum holding condition
EX
Vacuum release solenoid valve
P
(4) At vacuum release
V
PR
P
P
VSK-A circuit diagram
Example) VSK-A
W...B
P
V
Switching valve
39
Example) VSK-B
Q...B
Vacuum generating solenoid valve (normally closed), air timer type vacuum release valve, filter, mechanical vacuum switch
(1) Stopped condition
(2) At vacuum generation
Vacuum pad
Vacuum sensor (mechanical type)
Vacuum ejector/vacuum unit
VSK-B operation explanation drawing
Timer cylinder
P
V
EX
P
P
PR
VSK-B circuit diagram
Example) VSK-B
Q...B
P
Timer cylinder
V
Inch/NPT specifications
EX
* Air timer release
If the electric signal is cut off after a vacuum is
generated with the electric signal, compressed air
is automatically fed to the vacuum circuit for a set
time, during which pads are retracted from the work
piece. When vacuum release operation ends, the
vacuum circuit is closed.
Related components
(3) At vacuum release (Immediately after vacuum generating solenoid valve turns OFF)
Vacuum related components
Vacuum release time adjustment
Switching valve
40
Vacuum ejector/vacuum unit
VSK series
Specifications
Working fluid
Working pressure range
Ambient temperature range
Lubrication
Air
0.25 to 0.7MPa
5 to 50 ˚C
Not required
Ejector characteristics
Nozzle diameter Supply pressure Ultimate vacuum Suction flow
(mm)
(MPa)
(-kPa)
( /min(ANR))
0.5
91
7
0.5
0.35
73
0.5
67
11
0.5
93
13
0.35
73
0.7
0.5
67
26
0.35
91
10.5
0.5
93
27
0.35
73
1.0
0.5
67
40
0.35
91
21
0.5
93
38
0.35
73
36
1.2
0.5
67
50
0.35
91
27
Type
VSK-
H05...
VSK-
L05...
VSK-
H07...
VSKVSK-
L07...
E07...
VSK-
H10...
VSKVSK-
L10...
E10...
VSK-
H12...
VSKVSK-
L12...
E12...
Consumed flow
( /min(ANR))
11.5
9
11.5
23
17
23S
17
46
34
46
34
70
47
70
47
*. Ensure the above supply pressure when the vacuum ejector operates. (Consider the pressure drop.)
Solenoid valve (for vacuum generation, for vacuum release)
Structure
Rated voltage
Vacuum generating solenoid valve
Vacuum release solenoid valve
24V DC
100V AC
24V DC
100V AC
21.6 to 26.4V DC
90 to 110V AC
21.6 to 26.4V DC
90 to 110V AC
Tolerable voltage fluctuation range
(24V DC 10%)
(100V AC 10%)
(24V DC 10%)
(100V AC 10%)
Surge protective circuit
Surge absorber
Bridge diode
Surge absorber
Bridge diode
Power consumption
0.8W
1VA
0.8W
1VA
Operation method
Pilot type
Insulation type
Class B or equivalent
Manual operation
Push lock type
Operation display
Red LED turns ON during coil energized
Connection method and lead wire length
Connector type: 500mm
Pressure resistance
1.05MPa
Operation class
N.C.
N.O.
N.C.
N.O.
N.C.
0.6mm2
Effective sectional area
3.5mm2 3.5mm2 3.5mm2 3.5mm2
Lead wire colors
For discrete solenoid valve for supply
24V DC
100V AC
Red (+)
Black (-)
41
Blue
For combined solenoid valve for supply/vacuum release
24V DC
100V AC
Black (-: solenoid valve for supply)
White (Common)
Red (+: Common)
Blue (solenoid valve for supply)
White (-: solenoid valve for vacuum release)
Black (solenoid valve for break)
Responsiveness
Display
Number of displays
Display accuracy
Resolution
Operation indication
Function
SW1: Red LED turns ON when above set pressure
SW2: Green LED turns ON when above set pressure
1. MODE switching switch (ME, S1 or S2)
2. S1 setting trimmer (2/3 rotation trimmer)
3. S2 setting trimmer (2/3 rotation trimmer)
LIN/HYS
1 mA or less (load
resistance 5 kΩ or more)
0.5% F.S. or less
Red LED turns ON when above set pressure
1. MODE switching switch (ME or SW)
2. SW setting trimmer (2/3 rotation trimmer)
3. HYS setting trimmer (Approx. 0 to 15% of set value)
Mechanical vacuum switch specifications
Pressure detection method
Set pressure range
Setting method
Switch terminal
Accuracy
Hysteresis
Microswitch
Microswitch rating
Diaphragm - microswitch
-20 to -80kPa
Stepless by rotating nut
Common, N.O., N.C.
4kPa
16 kPa or less
QJ type (AM8100) MATSUSHITA or J-7 OMRON
7A 250V AC
Air timer type vacuum release valve specifications
Structure
Vecuume release time
Vacuum release air flow rate
Time setting method
Delayed with timer air cylinder, poppet type, 2-way valve
Approx. 0.3 to 3 seconds immediately after vacuum generating solenoid valve closes
0 to 40 /min (ANR) (at supply pressure: 0.5 MPa)
Controlled with timer air cylinder's speed controller
Vacuum filter specifications
Element material
Filtration degree
Filter area
Replacement filter element ordering model
Poly-vinyl formal
10µ
1130mm2
VSG-E
Vacuum related components
0.5% F.S. or less
Approx. 2 msec or less
0 to -99 kPa (2-digit red LED display)
Approx. 4 times/sec
3%F.S. 2digit
1digit
SW1: Red LED turns ON when above set pressure
Red LED turns ON when above set pressure
SW2: Green LED turns ON when above set pressure
1. MODE switching switch (ME or SW) 1. MODE switching switch (ME, S1 or S2)
2. SW setting trimmer (2/3 rotation trimmer) 2. S1 setting trimmer (2/3 rotation trimmer)
3. HYS setting trimmer (Approx. 0 to 15% of set value) 3. S2 setting trimmer (2/3 rotation trimmer)
LIN/HYS
Output
current
Inch/NPT specifications
1 mA or less (load
resistance 5 kΩ or more)
Related components
Output
current
Vacuum ejector/vacuum unit
Specifications
With 2-point switch output(-NW) With analog output(-NA) With 2-point switch output(-PW) With analog output(-PA)
40 mA or less
Current consumption
Carrier diffusion type semiconductor pressure switch
Pressure detection method
-100 to 0kPa
Working pressure range
-99 to 0kPa
Set pressure range
0.2MPa
Withstanding pressure
-20 to 70˚C (atmospheric pressure, humidity 60%RH or less)
Storage temperature range
0 to 50˚C (with no freezing)
Working temperature range
35 to 85%RH (with no freezing)
Working humidity range
12 to 24V DC 10% Ripple (P-P) 10% or less
Power supply voltage
IEC Standards IP40 or equivalent
Protective structure
Number of pressure setting points
2
1
2
1
Operation accuracy
3%F.S. max (at Ta=25˚C)
Fixed (2% F.S. or less) Variable (Approx. 0 to 15% F.S.) Fixed (2% F.S. or less) Variable (Approx. 0 to 15% F.S.)
Hysteresis
NPN open collector output 30 V 80 mA or less Residual voltage 0.8 V or less PNP open collector output Power voltage 80 mA or less Residual voltage 0.8 V or less
Switch output
Output
Output
voltage 1 to 5V
voltage 1 to 5V
Zero point
Zero point
voltage 1 0.1V
voltage 1 0.1V
Span
Span
Analog output
voltage 4 0.1V
voltage 4 0.1V
Vacuum pad
Vacuum sensor with LED display specifications
42
Characteristics
Supply pressure - ultimate vacuum, suction flow, consumed flow
VSKVSKVSK-
H05
L05
26
E type suct
ion flow
13
20
10
0
0.1
0.2 0.3 0.4 0.5 0.6
Supply pressure (MPa)
0.7
55
40
um
cu
at
im
lt
eu
w
yp
Lt
100
flo
u
ns
Co
d
me
80
60
w
L type suction flo
40
H type suction flow
E type suction flow 20
26
13
0
um
cu
a
ev
0
0.1
0.2 0.3 0.4 0.5 0.6
Supply pressure (MPa)
Flow rate ( /min(A.N.R))
Flow rate ( /min(A.N.R))
30
H type suction flow
66
H
40
0.7
um
80
acu
60
te v
93
50
ti
suc
70
10
H12
L12
E12
ma
cu
va
ate
ltim
eu
typ
w
lo
df
e
um
ns
o
C
low
on f
ltim
u
pe
pe
L ty
u
ac
v
ate
y
Lt
um
40
30
0.2 0.3 0.4 0.5 0.6
Supply pressure (MPa)
ulti
um
um
acu
te v
ype
40
H
ulti
ma
66
Et
Ultimate vacuum (-kPa)
80
0.1
VSKVSKVSK-
H10
L10
E10
93
55
0
Ultimate vacuum (-kPa)
VSKVSKVSK-
0.7
va
0.2 0.3 0.4 0.5 0.6
Supply pressure (MPa)
26
ype
0.1
low
E type suction flow
Flow rate ( /min(A.N.R))
0
ed f
13
5
H type suction flow
C
um
ons
50
L type suction flow
20
H type suction flow
ate
L type suction flow 10
26
40
ltim
15
55
eu
Co
20
typ
nsu
13
pe
ultim
ate
vac
H
uum
typ
eu
ltim
L
ate
ty
pe
va
cu
ul
um
ti m
at
e
va
cu
um
ul
flow
66
Et
40
d
me
80
E ty
at
e
tim
ate
Ht
L
yp
55
ty
pe
eu
ltim
66
Ultimate vacuum (-kPa)
m
va
cu
u
cu
va
80
H07
L07
E07
93
um
93
Flow rate ( /min(A.N.R))
VSKVSK-
Ultimate vacuum (-kPa)
Vacuum ejector/vacuum unit
VSK series
0.7
1. The supply pressure above applies at vacuum generation.
2. An abnormal popping may sound at the supply pressure (H (high vacuum medium flow) type: 0.4 to 0.45 MPa, E (high vacuum low flow)
type: 0.29 to 0.32 MPa) just before the ultimate vacuum peaks. This abnormal noise is because characteristics are unstable and
increases with instability. This may adversely affect the sensor. Reset supply pressure.
(Example 1: When the H vacuum ejector operates with a base pressure of 0.5 MPa, an abnormal noise sounds when supply pressure
drops to 0.43 MPa due to a pressure drop. Reset the supply pressure to 0.5 MPa when the vacuum ejector operates.)
3. Select piping and components using a sectional area 3 times larger than the nozzle diameter. Satisfactory vacuum cannot be attained if
a sufficient air flow cannot be ensured. (Popping occurs at the set pressure if the intake flow is insufficient, the ultimate vacuum cannot
be attained, etc.)
(Example 2: An abnormal noise sounds even when using the H vacuum ejector at a working pressure of 0.5 MPa.
The air flow is
insufficient. The air flow is restricted preceding the vacuum ejector due to piping resistance, etc., keeping a satisfactory air
flow from being attained. Select piping components that provide the required effective section.)
(Example 3: When using the vacuum ejector with a 1.0 mm nozzle diameter, cross-sectional area is 0.52xπ=0.785mm2x3=2.35mm2.
Select piping and devices that ensure an effective section of 2.3 mm2 or more.)
43
24V DC
When only using
supply valve
100V AC
When combining supply and
vacuum release valve
When only using
supply valve
+
-
+
-
+24V
(Red)
Vacuum pad
-0V
(Black)
When combining supply and
vacuum release valve
( )Blue ( )Blue
0V
+24V
0V
Supply valve Common Vacuum beak
(black)
(Red)
valve
(white)
+
-
( )Common
(White)
Vacuum ejector/vacuum unit
Electric circuit (solenoid valve)
( )
Vacuum release
valve(black)
Reference drawing of manifold
MO
DE
1
SW
ME
2
SW
S2
S1
MO
DE
1
SW
ME
Vacuum ejector
2
SW
S2
S1
MO
DE
1
SW
ME
S2
S1
2
SW
Vacuum port
(Top connection type) (V)
Vacuum related components
( )Supply valve
(blue)
Masking block
Manifold
Vacuum port
(Side connection type) (V)
St 1
Air supply port (P)
St 2
St 3
R side
Exhaust port (EX)
Related components
L side
Inch/NPT specifications
Lock pin
44
Vacuum ejector/vacuum unit
VSK series
How to order
Discrete type model No.
VSK A H 07 W
4 6 8L
3 B
NW
Symbol
Descriptions
(A) Port position
(A) Port position
A
B
Discrete type connection port 2 planes
Discrete type, connection port on one face
(B) Vacuum characteristics Note 1
(B) Vacuum characteristics
H
L
E
High vacuum medium flow rate type
Medium vacuum large flow rate type
High vacuum small flow rate type
(C) Nozzle diameter Note 1, Note 2
(C) Nozzle diameter
05
07
10
12
ø0.5
ø0.7
ø1.0
ø1.2
(D) Unit combination Note 3, Note 4
(D) Unit combination
Refer to Appendix Table 1 for details on the unit combinations.
(E) Vacuum port (V) Note 2
(E) Vacuum port
4
6
8
(F) Air supply port (P) Note 2
(F) Air supply port
4
6
8
(G) Exhaust port
(H) Solenoid valve voltage
Note on model No. selection
Note on model No. selection
Note 1: (B)E and (C)05 cannot be combined.
Note 2: (C)10 and 15 cannot be used with 4 for (E) or (F).
Note 3: If the (D) unit combination is A, B, C, D, E, F, the
(H) solenoid valve voltage and (I) valve unit type
need not be selected.
Note 4: (J) vacuum sensor specifications are selectable
only when the (D) unit combination is E, F, L, M,
R, W.
Appendix Table 1 (Common with manifold type)
ø4 push-in joint
ø6 push-in joint
ø8 push-in joint
(I) Valve type
(J) Vacuum sensor
specifications
ø4 push-in joint
ø6 push-in joint
ø8 push-in joint
(G) Exhaust port (EX)
S
8
8L
Open air exhaust with silencer
ø8 push-in joint straight common exhaust
ø8 push-in joint elbow common exhaust
(H) Solenoid valve voltage Note 3
1
3
100V AC
24V DC
(I) Valve type Note 3
A
B
Normally open type
Normally closed type
(J) Vacuum sensor specifications Note 4
NW
NA
PW
PA
2-point NPN output with LED display
1-point NPN output + analog output with LED display
2-point PNP output with LED display
1-point PNP output + analog output with LED display
Unit combination
Symbol
A
B
C
D
E
F
G
H
J
K
L
M
P
Q
R
S
T
W
Z
45
Filter
Vacuum generating
Check valve
Mechanical
Vacuum sensor
Air timer type
Solenoid valve type
solenoid valve
(vacuum holding) vacuum switch with LED display vacuum release valve vacuum release valve
For mixed specifications (Indicate details in specifications.) <Applicable for manifold type>
*1: Built-in vacuum self-holding valve
NW
Discrete type for manifold model No.
VSKM H 07 W T4
3 B
NW
Model No. for independent manifold base
T4 20 S2
10
Symbol
(A) Vacuum characteristics
H
L
E
Z
05
07
10
12
00
Refer to Appendix Table 1 (Common for discrete type) for details on the unit combinations.
(E) Air supply port (P)
(E) Air supply port
Refer to Appendix Table 2 for details on the air supply port.
(F) Exhaust port
Note on model No. selection
(G) Solenoid valve voltage
Note 1: (A)E and (B)05 cannot be combined.
Note 2: Indicate "Mixed manifold specifications" when
selecting mixed specifications.
Note 3: If the (C) unit combination is A, B, C, D, E, F,
the (G) solenoid valve voltage and (H) valve unit
type need not be selected.
Note 4: (J) vacuum sensor specifications are selectable
only when the (C) unit combination is E, F, L,
M, R, W.
Note 5: Only (B)00 is selectable for (A)Z. Only (A)Z is
selectable for (B)00.
Note 6: When installing a masking block, select (D)CX
and state installation and quantity with manifold
specifications.
(H) Valve type
(I) Number of manifold
stations
(J) Vacuum sensor
specifications
(E) Air supply port
Symbol
Straight joint
18
10
28
20
38
30
ø8 ø10
12
22
32
ø12
Plug port position, side
ø4 push-in joint, port position side
ø6 push-in joint, port position side
ø8 push-in joint, port position side
ø4 push-in joint, port position top
ø6 push-in joint, port position top
ø8 push-in joint, port position top
Discrete for manifold with side port position
For mixed joints (Indicate details in specifications.)
Elbow joint
48
40
42
58
50
52
68
60
62
ø8 ø10 ø12
(F) Exhaust port (EX)
Refer to Appendix Table 3 for details on the exhaust port.
(G) Solenoid valve voltage Note 3
1
3
100V AC
24V DC
(H) Valve type Note 2, Note 3
A
B
Z
Normally open type
Normally closed type
For mixed specifications (Indicate details in specifications.)
(I) Number of manifold stations
2
to
10
2 stations
to
10 stations
(J) Vacuum sensor specifications Note 2, Note 4
NW
NA
PW
PA
Z
2-point NPN output with LED display
1-point NPN output + analog output with LED display
2-point PNP output with LED display
1-point PNP output + analog output with LED display
For mixed specifications (Indicate details in specifications.)
Appendix Table 3
(F) Exhaust port
Symbol
Port shape
R side only
Both sides
L side only
Joint size (mm)
Open to air
exhaust silencer
S1
S2
S3
-
Common exhaust type
Elbow joint
Tapered female screw for pipe
Straight joint
72
73
74
18
10
12
48
40
42
82
83
84
28
20
22
58
50
52
92
93
94
38
30
32
68
60
62
ø8 ø10 ø12 ø8 ø10 ø12 Rc1/4 Rc3/8 Rc1/2
Inch/NPT specifications
PP
S4
S6
S8
T4
T6
T8
00
CX
Vacuum related components
(D) Vacuum port (V) Note 2, Note 6
(D) Vacuum port
Appendix Table 2
ø0.5
ø0.7
ø1.0
ø1.2
For mixed specifications (Indicate details in specifications.)
(C) Unit combination Note 2, Note 3, Note 4
(C) Unit combination
16
26
36
ø6
High vacuum medium flow rate type
Medium vacuum large flow rate type
High vacuum small flow rate type
For mixed specifications (Indicate details in specifications.)
(B) Nozzle diameter Note 1, Note 2, Note 5
(B) Nozzle diameter
Port shape
R side only
Both sides
L side only
Joint size (mm)
Descriptions
(A) Vacuum characteristics Note 1, Note2, Note 5
Related components
VSKM
Only manifold
10
Manifold
3 B
Discrete for manifold
Type
VSKM H 07 W T4 20 S2
Vacuum ejector/vacuum unit
Manifold type model No.
Vacuum pad
How to order
46
Vacuum ejector/vacuum unit
VSK series
Ordering model for only masking block (Example)
VSKM
(1)
MB
(2)
* The set includes one O-ring for the exhaust port seal and two mounting screws (M2.5 x L10).
(2) Symbol for only masking block: MB
(1) Vacuum ejector unit manifold: VSKM
Ordering model for nozzle set (Example)
VSK
(1)
H
(2)
05
(3)
NK
(3) Nozzle diameter
Symbol
Size (mm)
05
0.5
07
0.7
10
1.0
12
1.2
(2) Vacuum characteristics
H: High vacuum medium flow rate type
L: Medium vacuum large flow rate type
E: High vacuum small flow rate type (0.5mm nozzle diameter is not available.)
(1) Vacuum ejector unit: VSK
47
Manifold type
VSKM...-...S1...
Side
VSKM...-...S2...
block
VSKM...-...S3...
VSKM...-.........
Intermediate VSKM-......-......(no plug)
block
VSKM-...P-......(with plug)
Weight (g)
72.5
84
72.5
61
20.5
22
Weight (g)
6
Silencer
Discrete open air exhaust
Weight (g)
2
Cartridge for discrete type
ø4 push-in joint
ø6 push-in joint
ø8 push-in joint
Plug cartridge
Weight (g)
3.5
3.5
10
1.5
Cartridge for manifold
ø6 push-in joint
ø8 push-in joint
ø10 push-in joint
ø12 push-in joint
ø8 elbow push-in joint
ø10 elbow push-in joint
ø12 elbow push-in joint
Rc1/4 cartridge
Rc3/8 cartridge
Rc1/2 cartridge
Plug cartridge
Weight (g)
20.5
20
19
26
25
31.5
37.5
43.5
34.5
38
6
Vacuum ejector/vacuum unit
Block plate
VSKM...-MB
Vacuum pad
Wieght for manifold (g)
VSKM...-S... VSKM...-T...
75.5
77.5
75.5
77.5
94
96
94
96
100
102
100
102
96.5
98.5
96.5
98.5
115
117
115
117
121
123
121
123
149.5
151.5
168
170
174
176
144
146
162.5
164.5
168.5
170.5
Vacuum related components
Individual wieght (g)
VSK-A...
VSK-B...
60
60
60
60
78.5
78.5
78.5
78.5
84.5
84.5
84.5
84.5
81
81
81
81
99.5
99.5
99.5
99.5
105.5
105.5
105.5
105.5
134
134
152.5
152.5
158.5
158.5
128.5
128.5
147
147
153
153
Inch/NPT specifications
Combination
symbol
A
B
C
D
E
F
G
H
J
K
L
M
P
Q
R
S
T
W
Related components
Vacuum ejector unit VSK weight table
48
Fixing method
Fix the vacuum ejector VSK with M3 screws using the
fixing holes on the resin body. (Refer to external
dimension drawings for fixing hole pitch.)
ME
S1 S2
MO
DE
SW
1
SW
2
Vacuum ejector/vacuum unit
VSK series
Special precautions
CAUTION
Read before use. Refer to pages 3 to 6 in the introduction for Safety Precautions and Precautions common to
listed products. Refer to page 27 for common precautions for the vacuum ejector VSG and VSK.
49
1. The cartridge joint, timer cylinder, and element are removed by pulling the lock pin out. Check that the
lock pin is inserted securely after installing parts.
2. Do not remove the gripper at the main connection. Although it can ideally be removed and connected
more than once, connection strength may deteriorate and damage the unit.
Vacuum ejector/vacuum unit
Circuit diagram
VSK-A
V
P
B......
P
V
When separating the work piece,
vacuum release air must be
supplied from an external source.
V
29.5
18
36
3.8
P
36
EX
16
VSK-A
25
3.5
2-ø3.2
19
73
10
A......
Vacuum pad
Unit connecting screw
(Screw section for mounting manifold)
8
Manifold specifications Upper unit section
When using manifold, side port side
VSK-A (Unit combination: Type A, B)
11
Circuit diagram
VSK-A
52
106
58
V 10
C......
VSK-A
D......
P
When separating
(Mechanical) the work piece,
vacuum release air
must be supplied
from an external
source.
V
Black: N.O
Red: N.C
White:Com
29.5
18
36
3.5
2-ø3.2
P
11 500
(Mechanical)
V
Vacuum related components
Unit connecting screw
(Screw section for mounting manifold)
8
Manifold specifications Upper unit section
When using manifold, side port side
VSK-A (Unit combination: Type C, D)
EX
Inch/NPT specifications
16
33
44
Unit connecting screw
(Screw section for mounting manifold)
MODE SW1 SW2
ME S1 S2
kPa
EX
6 6 500
39.5
50.5
Vacuum sensor
with LED display
16
3.8
P
36
23.8
41.5
V
2-ø3.2
112.5
10
64.5
Manifold specifications Upper unit section
Circuit diagram
Operation confirmation lamp
LED display section
29.5 3.5
When using manifold, side port side
VSK-A (Unit combination: Type E, F)
VSK-A
VSK-A
E......
P
F......
P
(Digital)
V
When separating
the work piece,
vacuum release air
must be supplied
from an external
source.
V
(Digital)
Related components
3.8
Mechanical vacuum switch
P
36
50
VSK-A (Unit combination: Type G, H)
8
52
9.5 500
106
10
58
33
V
2-ø3.2
29.5 3.5
When using manifold, side port side
18
36
Unit connecting screw (Screw section for mounting manifold)
16
Manual
button
LED
3.8
Vacuum ejector/vacuum unit
VSK series
P
36
EX
44
Manifold specifications Upper unit section
Circuit diagram
VSK-A
G ......B
VSK-A
(Normally closed)
G ......A
VSK-A
(Normally open)
S
S
P
H ......B
VSK-A
(Normally closed)
S
P
S
P
V
H ......A
(Normally open)
P
When separating
the work piece,
vacuum release air
must be supplied
from an external
source.
V
V
V
When separating
the work piece,
vacuum release air
must be supplied
from an external
source.
VSK-A (Unit combination: Type J, K)
16
8
11 500
29.5 3.5
When using manifold, side port side
V
52
106
10
58
2-ø3.2
Manual
button
Black: N.O
Red: N.C
White: Com
LED
3.8
18
36
Unit connecting screw (Screw section for mounting manifold)
EX
P
36
9.5 500
44
Manifold specifications Upper unit section
Circuit diagram
VSK-A
J......B
VSK-A
(Normally closed)
J......A
VSK-A
(Normally open)
S
P
51
(Mechanical)
V
K......A
S
S
P
(Mechanical)
V
VSK-A
(Normally open)
S
P
K......B
(Normally closed)
When separating
the work piece,
vacuum release air must
be supplied from
an external source.
P
(Mechanical)
V
When separating
the work piece,
vacuum release air must
be supplied from
an external source.
(Mechanical)
V
Vacuum ejector/vacuum unit
VSK-A (Unit combination: Type L, M)
Operation confirmation lamp
LED
MODE SW1 SW2
ME S1 S2
Manual
button
29.5
EX
36
LED
500
9.5
6.5
50.5
16
Vacuum pad
P
23.8
41.5
3.5
2-ø3.2
3.8
V
6 6 500
112.5
10
64.5
When using manifold, side port side
Circuit diagram
L......B
VSK-A
(Normally closed)
L......A
VSK-A
(Normally open)
S
S
P
M......B
VSK-A
(Normally closed)
S
P
S
P
P
When separating
the work piece,
vacuum release air
must be supplied
from an external
source.
(Digital)
(Digital)
(Digital)
V
M......A
(Normally open)
V
V
(Digital)
V
VSK-A (Unit combination: Type P)
4 to 7
Vacuum release time adjusting needle
Manual
button
47.5
54
18 18
9
2-ø3.2
Inch/NPT specifications
8
V
52
106
10
58
33
3.5
5 to 9
LED
3.8
Manifold specifications Upper unit section
Unit connecting screw (Screw section for mounting manifold)
EX
P
36
44
16
9.5 500
When using manifold, side port side
Circuit diagram
VSK-A
When separating
the work piece,
vacuum release air
must be supplied
from an external
source.
P......B (Normally closed)
VSK-A
P......A (Normally open)
S
S
P
P
V
V
Related components
VSK-A
Vacuum related components
8
kPa
Manifold specifications Upper unit section
Unit connecting screw (Screw section for mounting manifold)
52
VSK-A (Unit combination: Type S)
8
Unit connecting screw (Screw section for mounting manifold)
52
106
10
58
33
5 to 9
V
Manual
button
LED
47.5
54
18 18
9
3.5
2-ø3.2
Manual
button
Vacuum release solenoid valve
Vacuum generating solenoid valve
LED
3.8
Manifold specifications Upper unit section
Vacuum ejector/vacuum unit
VSK series
P
36
EX
9.5 500 16
44
When using manifold, side port side
Circuit diagram
VSK-A
S......B (Normally closed)
VSK-A
S......A (Normally open)
S
P
S
P
R
R
V
V
VSK-A (Unit combination: Type Q)
8
V
54
18 18
9
2-ø3.2
52
106
10
58
11 500
Vacuum release time adjusting needle
3.5
5 to 9
Black: N.O
47.5
N.C
4 to 7 Red:
White: Com
Manual button
LED
3.8
Manifold specifications Upper unit section
Unit connecting screw (Screw section for mounting manifold)
EX
P
36
44
16
9.5 500
When using manifold, side port side
Circuit diagram
VSK-A
Q......B (Normally closed)
VSK-A
Q......A (Normally open)
S
S
(Mechanical)
P
V
53
(Mechanical)
P
V
Vacuum ejector/vacuum unit
VSK-A (Unit combination: Type R)
Operation confirmation lamp
LED display section
MODE SW1 SW2
ME S1 S2
8
kPa
58.5
112.5
10 64.5
3.5
5.8
V
6 6 500
Vacuum release time adjusting needle
47.5
54
18 18
9
2-ø3.2
4 to 7
LED
6.5
P
36
EX
Manual button
44
Vacuum pad
5 to 9
3.8
Manifold specifications Upper unit section
Unit connecting screw (Screw section for mounting manifold)
16
9.5 500
When using manifold, side port side
Circuit diagram
R......B (Normally closed)
VSK-A
R......A (Normally open)
S
S
(Digital)
(Digital)
V
V
VSK-A (Unit combination: Type T)
8
Manual button
47.5
54
18 18
9
11 500
Inch/NPT specifications
V
2-ø3.2
52
106
10
58
3.5
5 to 9
Black: N.O
Red: N.C
White: Com
LED
Manual button
3.8
Manifold specifications Upper unit section
Unit connecting screw (Screw section for mounting manifold)
EX
P
36
LED
44
9.5 500
16
When using manifold, side port side
Circuit diagram
VSK-A
T......B (Normally closed)
VSK-A
T......A (Normally open)
S
S
(Mechanical)
P
Vacuum related components
P
P
(Mechanical)
P
R
V
R
V
Related components
VSK-A
54
VSK-A (Unit combination: Type W)
Operation confirmation lamp
Unit connecting screw (Screw section for mounting manifold)
LED display section
MODE SW1 SW2
Manifold specifications Upper unit section
ME S1 S2
8
kPa
2-ø3.2
3.5
5.8
58.5
66 500
112.5
10
64.5
V
43.5
5 to 9
47.5
54
18 18
9
Manual
button
3.8
Vacuum ejector/vacuum unit
VSK series
EX
P
36
Vacuum release solenoid valve
LED
Manual
button
LED
6.5
44
Vacuum generating solenoid valve
16
9.5 500
When using manifold, side port side
Circuit diagram
VSK-A
W......B (Normally closed)
VSK-A
W......A (Normally open)
S
S
(Digital)
P
(Digital)
P
R
R
V
V
Joint section dimensions
øD2
Unit: mm
V
Tube O.D. Tube O.D.
øD1
øD2
-
EX
Supply port joint
Port V
-
4
6
8
P
VSK common silencer (exhaust)
EX
L2
C1
C2
6.3
9.3
17.5
-
11.8
14.8
23
11.3
12.3
18.5
-
11.3
12.3
18.5
VSK common exhaust joint (elbow type)
EX
55
17
ø8
øD1
L1
ø14.5
ø8
Exhaust port joint
Port P
4
6
8
L1
C1
18.4
13.3
C2
L2
Vacuum port joint
18
23
8
Circuit diagram
19
73
10
VSK-B
A......
VSK-B
B......
25
P
P
3.5
2-ø3.2
16
19
EX
When separating the work piece,
vacuum release air must be
supplied from an external source.
V
V
Vacuum pad
3.8
36
29.5
18
Manifold specifications Upper unit section
When using manifold,
side port side
Unit connecting screw
(Screw section for mounting manifold)
17 11
V
Vacuum ejector/vacuum unit
VSK-B (Unit combination: Type A, B)
P
Unit connecting screw
(Screw section for mounting manifold)
Circuit diagram
VSK-B
D......
(Mechanical)
29.5 3.5
2-ø3.2
P
P
11 500
When separating the work
piece, vacuum release air
must be supplied from
an external source.
V
Black: N.O
Red: N.C
White: Com
(Mechanical)
V
EX
19 17
V P
Inch/NPT specifications
16
3.8
Mechanical vacuum switch
33
44
VSK-B (Unit combination: Type E, F)
Circuit diagram
LED display section
MODE SW1 SW2
ME S1 S2
kPa
58.5
EX 19 17
V P
23.8
41.5
39.5
50.5
Vacuum sensor
with LED display
16
3.8
29.5
2-ø3.2
66 500
3.5
112.5
10
64.5
Manifold specifications Upper unit section
Operation confirmation lamp
8
When using manifold, side port side
Unit connecting screw
(Screw section for mounting manifold)
VSK-B
E......
VSK-B
F......
P
P
(Digital)
V
When separating the work
piece, vacuum release air
must be supplied from
an external source.
V
(Digital)
Related components
52
106
10
58
Vacuum related components
C......
8
VSK-B
18
36
Manifold specifications Upper unit section
When using manifold, side port side
VSK-B (Unit combination: Type C, D)
56
VSK-B (Unit combination: Type G, H)
8
When using manifold, side port side
2-ø3.2
52
106
9.5
10
58
33
500
29.5 3.5
18
36
Unit connecting screw (Screw section for mounting manifold)
Manual
button
LED
3.8
Vacuum ejector/vacuum unit
VSK series
P
EX 19 17
V
16
44
Manifold specifications Upper unit section
Circuit diagram
VSK-B
G ......B
VSK-B
(Normally closed)
G ......A
VSK-B
(Normally open)
S
S
P
H ......B
VSK-B
(Normally closed)
S
P
S
P
V
H ......A
(Normally open)
P
When separating
the workpiece,
break air must be
supplied from an
external source.
V
V
When separating
the workpiece,
break air must be
supplied from an
external source.
V
VSK-B (Unit combination: Type J, K)
16
3.8
8
52
106
10
58
2-ø3.2
11 500
29.5 3.5
When using manifold, side port side
18
36
Unit connecting screw (Screw section for mounting manifold)
Manual
button
Black: N.O
Red: N.C
White: Com
LED
EX
P
44
19 17
9.5 500
V
Manifold specifications Upper unit section
Circuit diagram
VSK-B
J......B
VSK-B
(Normally closed)
J......A
VSK-B
(Normally open)
S
P
S
S
P
(Mechanical)
V
(Mechanical)
V
K......A
P
When separating the
workpiece, break air
must be supplied from
an external source.
(Mechanical)
V
57
VSK-B
(Normally open)
S
P
K......B
(Normally closed)
When separating the
workpiece, break air
must be supplied from
an external source.
(Mechanical)
V
Vacuum ejector/vacuum unit
66 500
23.8
41.5
3.5
Manual
button
LED
500
16
3.8
9.5
P 6.5
EX 19 17
50.5
V
Vacuum pad
2-ø3.2
Circuit diagram
VSK-B
L......B
VSK-B
(Normally closed)
L......A
VSK-B
(Normally open)
S
S
P
M......B
VSK-B
(Normally closed)
S
P
S
P
P
When separating
the work piece,
vacuum release air
must be supplied
from an external
source.
(Digital)
(Digital)
(Digital)
V
M......A
(Normally open)
V
V
When separating
the work piece,
vacuum release air
must be supplied
from an external
source.
(Digital)
V
VSK-B (Unit combination: Type P)
8
Inch/NPT specifications
4 to 7
Vacuum release time adjusting needle
47.5
54
18 18
9
2-ø3.2
52
106
10
58
33
3.5
5 to 9
Manual button
LED
P
EX 19 17 44
V
3.8
Manifold specifications Upper unit section
Unit connecting screw (Screw section for mounting manifold)
16
9.5 500
When using manifold, side port side
Circuit diagram
VSK-B
P......B (Normally closed)
VSK-B
P......A (Normally open)
S
S
P
P
V
Vacuum related components
112.5
10
64.5
V
Related components
8
MODE SW1 SW2
ME S1 S2
kPa
Manifold specifications Upper unit section
Unit connecting screw (Screw section for mounting manifold)
Operation confirmation lamp
LED display section
29.5
When using manifold, side port side
VSK-B (Unit combination: Type L, M)
58
VSK-B (Unit combination: Type S)
Unit connecting screw (Screw section for mounting manifold)
8
Manifold specifications Upper unit section
47.5
54
18 18
9
2-ø3.2
52
106
10
58
33
3.5
5 to 9
P
3.8
Vacuum ejector/vacuum unit
VSK series
EX 19 17
V
44
Manual
button
LED
Vacuum release solenoid valve
Manual
button
LED
Vacuum generating solenoid valve
9.5 500 16
When using manifold, side port side
Circuit diagram
VSK-B
S......B (Normally closed)
VSK-B
S......A (Normally open)
S
P
S
P
R
R
V
V
VSK-B (Unit combination: Type Q)
8
11 500
Vacuum release adjusting needle
3.5
2-ø3.2
Black: N.O
Red: N.C
47.5
54
18 18
9
When using manifold,
side port side
52
106
10
58
5 to 9
Manual
button
4 to 7 White: Com
LED
3.8
Manifold specifications Upper unit section
Unit connecting screw (Screw section for mounting manifold)
EX 19 17
V
P
44
16
9.5 500
Circuit diagram
VSK-B
Q......B (Normally closed)
VSK-B
Q......A (Normally open)
S
S
(Mechanical)
V
59
(Mechanical)
P
P
V
Vacuum ejector/vacuum unit
VSK-B (Unit combination: Type R)
Operation confirmation lamp
LED display section
8
MODE SW1 SW2
ME S1 S2
kPa
6 6 500
3.5
5.8
58.5
112.5
10
64.5
vacuum release time adjusting needle
47.5
54
18 18
9
2-ø3.2
Manual button
4 to 7
Vacuum pad
5 to 9
LED
6.5
P
EX 19 17 44 9.5 500
V
3.8
Manifold specifications Upper unit section
Unit connecting screw (Screw section for mounting manifold)
16
When using manifold, side port side
Circuit diagram
R......B (Normally closed)
VSK-B
R......A (Normally open)
S
S
(Digital)
(Digital)
P
P
V
V
VSK-B (Unit combination: Type T)
3.5
11 500
Manual button
47.5
54
18 18
9
2-ø3.2
Inch/NPT specifications
8
52
106
10
58
5 to 9
LED
Black: N.O
Red: N.C
White: Com
P
44
EX 19 17
V
3.8
Manifold specifications Upper unit section
Unit connecting screw (Screw section for mounting manifold)
Vacuum related components
VSK-B
Manual button
LED
9.5 500
16
Circuit diagram
VSK-B
T......B (Normally closed)
VSK-B
T......A (Normally open)
S
S
(Mechanical)
P
R
(Mechanical)
P
V
R
Related components
When using manifold, side port side
V
60
VSK-B (Unit combination: Type W)
Operation confirmation lamp
LED display section
Unit connecting screw (Screw section for mounting manifold)
8
MODE SW1 SW2
ME S1 S2
kPa
5.8
Manual
button
LED
Vacuum release solenoid valve
Manual
button
LED
Vacuum generating solenoid valve
47.5
54
18 18
9
2-ø3.2
58.5
112.5
6 6 500
10
64.5
43.5
3.5
5 to 9
6.5
P
44 9.5 500
EX 19 17
3.8
Manifold specifications Upper unit section
Vacuum ejector/vacuum unit
VSK series
16
V
When using manifold, side port side
Circuit diagram
VSK-B
W......B (Normally closed)
VSK-B
W......A (Normally open)
S
S
(Digital)
P
(Digital)
P
R
R
V
V
Joint section dimensions
Unit: mm
P
Port V
-
4
6
8
Supply port joint
Vacuum port joint
VSK common silencer (exhaust)
EX
-
L2
C1
C2
6.3
9.3
17.5
-
9.8
12.8
21
11.3
12.3
18.5
-
11.3
12.3
18.5
VSK common exhaust joint (elbow type)
EX
61
17
C2
V
4
6
8
L1
ø14.5
ø8
EX
Port P
øD1
øD2
ø8
Exhaust port joint
L2
L1
18.4
13.3
C1
Tube O.D. Tube O.D.
øD1
øD2
18
23
16n+32(n=Number of stations) 4.5
16n+16
3
3
16 P=16 16
P
P
19
4.5
8
12
16
V
12
16
(Station)
L side St 1 St 2 ...... St n R side
Exhaust silencer
Block plate (Mounting example)
Upper unit mounting
screw section
8
Fixing of upper mounted parts
4-M4 fixing hole
EX
12
16
V
12
16
3
EX
(Station)
L side St 1 St 2 ...... St n R side
Block plate (Mounting example)
Inch/NPT specifications
19
4.5 16n+32(n=Number of stations) 4.5
16n+16
3
3
16 P=16 16
P
P
9.5
58
9.5
68
(14) 30 14
6
21
12
1
27
14
8
Related components
Manifold (common exhaust type)
Vacuum related components
21
12
Fixing of upper mounted parts
4-M4 fixing hole
3
Upper unit mounting
screw section
9.5
8
Vacuum pad
26
58
9.5
68
(14) 30 14
1
27
14
8
Vacuum ejector/vacuum unit
Manifold (open air exhaust)
62
Supply port joint dimensions
Elbow type
Plug type
Unit: mm
L
C
6
8
10
12
11
12
14
19
17
18
20
23.5
L2
C
L1
Tube O.D.
øD
øP
øD
øD
Unit: mm
Tube O.D.
øD
øP
C
L1
L2
8
10
12
14.5
17.5
21
18
20
23.5
17
21
23
23
26.5
29.5
ø19
1.5
Straight type
L
C
Vacuum ejector/vacuum unit
VSK series
Vacuum port joint dimensions
Straight type
Plug type
Unit: mm
L
C
4
6
8
6
9
17.5
11
12
18.5
1.5
ø10
Tube O.D.
øD
øD
C
L
Exhaust port joint dimensions
Elbow type
L
C
8
10
12
16
12
14
19
23.5
18
20
23.5
24.5
L2
C
øP
øD
Tube O.D.
øD
L
C
øD
Female thread type
Rc
Rc
L1
L2
H
63
Rc1/4
Rc3/8
Rc1/2
Plug type
Unit: mm
Unit: mm
Opposite
side L1 L2
H
22 10 14
22 10 14
24 13 17
Tube O.D.
øD
øP
C
L1
L2
8
10
12
14.5
17.5
21
18
20
23.5
17
21
23
23
26.5
29.5
ø19
1.5
Unit: mm
L1
Straight type
2. Vacuum sensor with LED display
1. How to set pressure
(1) Energizing (checking wiring and supplying DC power.)
(2) Set the display change switch to pressure setting mode. (ME
S1 or S2, SW)
(2)-2. (only for analog output vacuum sensors)
Turn the hysteresis setting trimmer (HYS) fully in the CCW direction to set hysteresis to a minimum.
(3) Turn the pressure setting trimmer (S1 or S2, SW) with a small screwdriver, setting it to the required
setting.
(4) Set the display change switch to ME, apply pressure, and check that the sensor operates practically.
(For vacuum sensors with 2-point switch output)
Switch output 1 (S1): The operation LED (red) turns on when set pressure is exceeded.
Switch output 2 (S2): The operation LED (green) turns on when set pressure is exceeded.
(For vacuum sensors with analog output)
Switch output (SW): The operation LED (red) turns on when set pressure is exceeded.
Vacuum pad
Vacuum related components
Increasing the number of manifold stations may adversely affect performance or cause problems due to the
causes below. Check with a CKD Sales Office.
1. Drop in vacuum performance due to insufficient air supply
Countermeasure: (1) Check the air supply capacity, etc.
(2) Keep piping as short as possible.
(3) Increase joint size.
(4) If using single-end supply, supply from both ends of the manifold.
2. Drop in exhaust port capacity causing vacuum performance to drop or exhaust to be discharged from
another station's vacuum port
The number of manifold stations depends on nozzle size and vacuum performance, etc. Check with a
CKD Sales Office.
Cause: When using a silencer (open air), insufficient silencer capacity causes exhaust resistance to
increase and performance to drop.
Countermeasure: (1) If using a single-end silencer, change to double-end silencer.
(2) Provide an external silencer. (Custom made)
(3) Provide separate exhaust for each station. (Custom made)
(4) Avoid exhaust at walls.
(5) Reduce the number of stations.
Cause: When using a common exhaust, performance drops when piping resistance is large.
Countermeasure: (1) If using single-end exhaust, change to double-end exhaust.
(2) Keep piping as short as possible.
(3) Increase exhaust joint size.
(4) Provide separate exhaust for each station. (Custom made)
(5) Reduce the number of stations.
Inch/NPT specifications
1. Precautions for using the manifold
Related components
The working temperature range of the vacuum ejector unit VSK is 5˚C to 50˚C. Do not use this ejector at
other temperature condition.
Compressed air contains a lot of drainage (water, oxidized oil, tar, and substance) that may adversely affect
the VSK's performance. Dehumidify air with Ater Cooler or Dryer and improve air quality.
Do not use a Lubricator.
Rust, etc., in piping can result in operation faults. Install a 5 µm or smaller filter before the supply port.
Avoid using this vacuum ejector unit in environments with corrosive gas or flammable gas. Do not use this
unit for fluids.
Avoid suck dust, salt, iron chips, and etc.
Do not operate the vacuum release solenoid valve when generating a vacuum.
Vacuum ejector/vacuum unit
Precautions
64
Vacuum ejector/vacuum unit
VSK series
2. Setting hysteresis
(1) Hysteresis is adjusted using the hysteresis setting trimmer (HYS).
(2) Hysteresis is adjusted from 0 to 15% of the setting. Hysteresis increases when the trimmer is turned to CW.
(3) Checking hysteresis
Set the display change switch to pressure display mode (ME) and gradually increase and decrease
pressure near the set pressure. Read values at which the operation indicator is turned on and off. The difference
in displayed values is hysteresis.
(4) Example of hysteresis adjustment
· If pressure has a pulse and output is thin and intermittent, use large hysteresis.
· To set the limit range for pressure drops.
Hysteresis setting trimmer
For setting SW2 pressure
Pressure setting trimmer
SW1 pressure setting trimmer
MODE switching switch 2-point
MODE switching switch 3-contact
LED display section
Upper level: Analog output vacuum sensor
Lower level: Vacuum sensor with 2-point switch output
3. Connection method
V+ (Brown)
V+ (Brown)
Load
SW1 OUT (Black)
Load
SW2 OUT (Gray)
Main circuit
Main circuit
Load
SW1 OUT (Black)
ANALOG OUT (Gray)
COM (Blue)
Vacuum sensor with 2-point switch output
COM (Blue)
Vacuum sensor with analog output
3. Precautions for vacuum sensor with LED display
(1) Do not use this vacuum sensor in fluids or in an atmosphere with corrosive substances. The sensor may fail.
(2) Do not use wiring or applications that may cause noise (surge), etc., to be applied. The sensor may fail.
(3) Do not use this vacuum sensor in an atmosphere containing fluids or flammable or explosive gases. This device
is not explosion-proof, so faults may occur.
(4) Do not use this vacuum sensor where it may be exposed to water, oil, or dust. This device is not drip-proof,
so faults may occur.
(5) Do not use this vacuum sensor for applications that generate heat exceeding the working temperature
range. The sensor may fail.
(6) Turn power off before wiring. Check the lead wire color during wiring, and check that the output terminal, power
terminal, and COM terminal are not short-circuited. The sensor may fail if these terminals are shortcircuited.
(7) Do not apply excessive tension or bend the connector cable excessively. Wires or connector section may break.
(8) Check that pressure exceeding 0.2 MPa is not constantly applied during a vacuum release. Constant
application of this pressure may damage the sensor.
(9) When setting pressure or hysteresis, use a small screwdriver, and gently turn the trimmer within its
rotation range. Do not force it. The trimmer or PCB may be damaged if excessive force is applied during
adjustment.
65
The vacuum ejector VSK vacuum switch uses a connector leads. Refer to the following drawing and wire.
To adjust pressure, twist off the cover with a screwdriver, etc., and adjust with the setting screw. The set
vacuum degree increases when the screw is turned to the right (CW). The adjustment screw is fixed with a
lock nut. Loosen the lock nut before adjusting the screw. After adjustment, fix the adjustment screw with the
fingers, etc., and tighten the lock nut. When removing the cover, hold it lightly so it does not pop off.
*. If the switch fails, contact a CKD Sales Office.
Common
N.C.
N.O.
5. Precautions for mechanical vacuum sensors with LED disply
Keep vacuum piping as short as possible when using the vacuum ejector VSK with the vacuum sensor.
If vacuum piping is too long, piping resistance increases when vacuum is generated. The vacuum at the
sensor may be high even when no suction exists. This may cause sensor faults. If piping must be long,
install a discrete sensor, such as a pad, near the end of piping.
6. How to adjust the vacuum relaese valve
Vacuum release air (solenoid valve type vacuum release valve, air timer type vacuum release valve)
· Turning the release air adjustment needle to the right (CW) decreases the release air flow and turning it
left (CCW) increases it.
Flow: Large
Flow: Small
Release air adjusting needle
Release time for air timer type vacuum release valve
· To adjust break time for the air timer type vacuum release valve, turn the vacuum release time adjustment
needle. When turned right (CW), the release time will increase, and when turned left (CCW), it decreases.
Release time short
Release time long
Release time adjusting needle
Vacuum related components
Adjusting screw
Inch/NPT specifications
Lock nut
Lead wire color
White
Red
Black
Filter side
Related components
Microswitch side
Vacuum ejector/vacuum unit
4. Mechanical vacuum switch
Vacuum pad
(10) Use stabilized DC power.
(11) Insert a surge voltage absorption circuit in the relay or solenoid valve, etc., connected to the output
terminal or power terminal. Avoid uses in which current exceeds 80 mA.
(12) Ground the FG terminal when using unit power, such as switching power.
(13) Do not short-circuit the output terminal (black or gray lead) with other terminals.
(14) Do not apply excessive external impact or force to the sensor.
66
Vacuum ejector/vacuum unit
VSK series
Replacement element for vacuum ejector unit VSK
Discrete type
1
SW
DE
MO
S2
2
SW
S1
ME
Silencer element
Type: VSK-SE
Filter element
Lock pin
Type: VSG-E
(Common parts
for VSG, VSK)
Manifold type
MO
DE
1
SW
ME
2
SW
S2
S1
MO
DE
1
SW
2
SW
S2
S1
ME
MO
DE
1
SW
ME
2
SW
S2
S1
Silencer kit
Type: VSKM-SK
67
Related components
Inch/NPT specifications
Vacuum related components
Vacuum pad
Vacuum ejector/vacuum unit
MEMO
68
Vacuum ejector/vacuum unit
VSK series
Preparing the VSKM mixed manifold specification sheet
Mixed manifold model No. (Example)
VSKM -
(A)
(B)
(C)
Z
00
Z
(D)
(E)
- CX
(F)
28
S2 -
(G)
(H)
3
Z
(I)
-
(J)
5
-
Z
Mixed manifold specification sheet (Example)
Layout position
Vacuum ejector model No.
(A)
(B)
(C)
VSKM -
H
07
G
VSKM -
E
10
VSKM -
E
10
2
1
4
5
6
7
8
9
10
Quantity
(H)
-
S8 -
A
-
2
W
-
S6 -
B
- NW
1
W
-
T6
B
- NW
1
-
(J)
3
(D)
VSKM -
-
-
-
VSKM -
-
-
-
Masking block model No.
VSKM -
MB
-
S6
1
<Specifications when only output port size joints are mixed>
Mixed manifold model No. (Example)
(A)
(B)
VSKM - H
(C)
07
(D)
(E)
W - CX
(F)
28
S2 -
(G)
(H)
(I)
3
B -
5
(J)
- NW
Mixed manifold specification sheet (Example)
Layout position
Vacuum ejector model No.
(A)
(B)
(C)
VSKM -
H
07
W
VSKM -
H
07
VSKM -
H
07
2
3
4
5
6
7
8
9
10
Quantity
(H)
-
S8 -
B
- NW
2
W
-
S6 -
B
- NW
2
W
-
T6
B
- NW
1
-
(J)
1
(D)
VSKM -
-
-
-
VSKM -
-
-
-
Masking block model No.
VSKM -
MB
-
MO
DE
1
SW
2
SW
S2
S1
ME
MO
DE
1
SW
ME
Vacuum ejector
2
SW
S2
S1
MO
DE
1
SW
2
SW
Vacuum port (Top connection type) (V)
S2
S1
ME
Lock pin
L side
Masking block
Manifold
Vacuum port
(Side connection type) (V)
Air supply port (P)
St 1
St 2
R side
St 3
Exhaust port (EX)
69
<Completing the form>
· Piping locations start from the vacuum port,
and are set in order from the left.
· Indicate the total number of designated
product models required at the far right in the
table.
Quantit
sets
Slip No.
Date of issue:
Customer
name
Person in
charge
Delivery
Order No.
Order No.
Mixed manifold model No.
(A)
(B)
(C)
(D)
VSKM -
(E)
(F)
(G)
-
-
(A) Vacuum characteristics Note 1, Note2, Note 3
H
High vacuum medium flow rate type
(H)
(I)
(J)
-
-
(F) Exhaust port (EX)
Refer to Appendix Table 3 on page 46 for details on the exhaust port.
L
Medium vacuum large flow rate type
E
High vacuum small flow rate type
Z
For mixed specifications (Indicate details in specification sheet.)
(G) Solenoid valve voltage Note 4
(B) Nozzle diameter Note 1, Note 2, Note 3
1
100V AC
3
24V DC
(H) Valve type Note 2, Note 4
05
ø0.5
07
ø0.7
10
ø1.0
12
ø1.2
00
For mixed specifications (Indicate details in specification sheet.)
A
Normally open type
B
Normally closed type
Z
For mixed specifications (Indicate details in specification sheet.)
Vacuum pad
Person in
charge
Vacuum ejector/vacuum unit
VSKM mixed manifold specification sheet
(I) Number of manifold stations
2 to 10 2 stations to 10 stations
PP
Plug port position, side
S4
ø4 push-in joint, port position side
S6
ø6 push-in joint, port position side
S8
ø8 push-in joint, port position side
T4
ø4 push-in joint, port position top
T6
ø6 push-in joint, port position top
T8
ø8 push-in joint, port position top
CX
For mixed joints (Indicate details in specification sheet.)
NW
2-point NPN output
NA
1-point NPN output + analog output
PW
2-point PNP output
PA
1-point PNP output + analog output
Z
For mixed specifications (Indicate details in specification sheet.)
Note on model No. selection
(E) Air supply port (P)
Refer to Appendix Table 2 on page 46for details on the air supply port.
Mixed manifold specification sheet
Note 1: (A)E and (B)05 cannot be combined.
Note 2: Indicate "Mixed manifold specification sheet" when selecting mixed
specifications.
Note 3: Only (B)00 is selectable for (A)Z.
Only (A)Z is selectable for (B)00.
Note 4: If the (C) unit combination is A, B, C, D, E, F, the (G) solenoid valve
voltage and (H) valve unit type need not be selected.
Note 5: (J) vacuum sensor specifications are selectable only when the (C) unit
combination is E, F, L, M, R, W.
Note 6: When installing a masking block, select (D)CX and state installation and
quantity with manifold specifications.
Layout position
Vacuum ejector model No.
(A)
(B)
(C)
(D)
(H)
(J)
VSKM -
-
-
-
VSKM -
-
-
-
VSKM -
-
-
-
VSKM -
-
-
-
VSKM -
-
-
-
Masking block model No.
VSKM -
MB
-
1
2
3
4
5
6
7
8
9
10
Quantity
Inch/NPT specifications
(D) Vacuum port (V) Note 2, Note 6
(J) Vacuum sensor specifications Note 2, Note 5
Related components
Refer to Appendix Table 1 on page 45 for details on the unit combinations.
Vacuum related components
(C) Unit combination Note 2, Note 4, Note 5
70