High Purity Systems Fluid Handling Solutions Furon AstiPure ® ™ Precision Purity Innovation For more then 70 years, Saint-Gobain Performance Plastics has supplied the world with high-performance polymer products for the most demanding applications. With a strong engineering focus on research and development, we pioneer application specific material solutions and unique processing techniques for many high-purity markets. Our experienced engineers create a close working relationship with our customers in the development of molded, extruded, machined and/or clean room assembled components for OEMs to provide a rapid product development cycle. Whether you're updating a current product to stay ahead of the competition or launching the next generation of products to your marketplace, Saint-Gobain presents a wealth of resources to meet your needs in every aspect of the product development and production process. We offer: • Successful partnering with industry technology leaders and innovative companies • Skilled senior-level engineering team with decades of experience in tool design, part design, materials processing, and materials selection for polymers and fluoropolymers • Vertically integrated clean manufacturing facility offers complete process control from molding to machining to final assembly and test for reliable turn key solutions • Distribution Resource Planning and drop ship capabilities for a seamless supply chain solution Global Products—Local Support We provide our worldwide customer base with technical support, customer service, and local inventory through more than 25 sales offices in North America, Europe, and Asia, and through our manufacturing facilities in Europe and the United States. Ordering Information For pricing information and product availability, contact our Customer Service Department at 1-800-833-5661 or 714-630-5818. For additional information on Saint-Gobain Performance Plastics or our products, or to request literature, please visit or website at furon.com or call 1-800-463-8766. Chemical Delivery • Manufactured from ultra high-purity fluoropolymers • Suitable for use with harsh or aggressive chemicals • Materials compliant to USP Class VI • Custom configurations available CHEMICAL DELIVERY We offer an extensive product line of high-purity fluid handling components. Featuring the Furon® and AstiPure™ lines of fluoropolymer-based fluid handling components, our standard products include pumps, valves, fittings, accessories such as pressure regulators and spray guns, and high-purity tubing and pipe. In addition to our standard products, we utilize our unparalleled expertise in designing custom fluid handling systems to our customers’ exact requirements. We develop working relationships with our end users’ engineering teams to assure the best possible solution for each specific application. Our extensive product line, combined with our decades of engineering expertise, assures that we can offer you a one-stop solution for all of your fluid handling needs. We are experienced at solving the most challenging fluid handling problems, from ultra-pure chemistry to abrasive slurries to extremely harsh or aggressive liquids. BCD • Optimal performance for abrasive slurries • Improved slurry life • Maximized system up-time • Meets Semi F57 requirements S L U R R Y High Temperature HI G H T EM P E RAT U RE Slurry • Suitable for media up to 302o F (150o C) • Optimal safety • Superior reliability • Maximized system up-time Precision Dispense • Superior Accuracy & Precision • Maximum Chemical Efficiency • Increased Yield • Manufactured from ultra high-purity fluoropolymers Alternative Energy • Ideal for use in ultra-pure DI water • Economical high-purity fluid handling solution • 100% fluoropolymer wetted flow path • Superior reliability PRECISION DISPENSE A P P L I C A T I O N S Clean Room Facilities Saint-Gobain Performance Plastics capabilities include injection, compression, isostatic and endothermic molding for a wide range of polymers ranging from commodity grade resins to highly engineered polymers and fluoropolymers. Our extraordinary range of molding and manufacturing capabilities allow us to convert virgin resin to molded components. Saint-Gobain Performance Plastics also provides world class precision machining and assembly capabilities in a state-of-the-art, build-clean environment, ensuring that our products meet and exceed the most stringent cleanliness requirements of the Semiconductor, Chemical Processing, Alternative Energy, and Life Sciences industries. ALTERNATIVE ENERGY Manufacturing Capabilities CMP F/ C O O L AE 2 O L Furon Q-Valve ® Configuration Orifice Size Standard Connection Types Connection Size Actuation Type 2-Way 1/4”, 1/2”, 3/4” Flare Grip II Fuse Bond 1/4”, 3/8”, 1/2”, 3/4”, 1” Pneumatic Manual Multi-Turn Manual Quarter-Turn Max. Operating Pressure 100 PSIG (6.9 bar) Max. Operating 182 °F (82 °C) Temperature Cv Factor 0.8 – 9.4 Leak Detection Port YES Furon Suckback Valve Features/Benefits: • All virgin PTFE/high-purity molded Configuration 2-Way PFA wetted flow path Orifice Size 1/8”, 1/4”, 3/8”, 1/2”, 3/4” Standard Flare Grip II • Eliminates dripping of dispense Connection Types Grab Seal media from nozzles Pillar Super 300 Connection Size 1/8”, 1/4”, 3/8”, 1/2”, 3/4” • Adjustable suckback capacity permits Actuation Type Pneumatic precise metering of dispense media Max. Operating Pressure 60 PSIG (4.1 bar) • Repeatability of suckback amount Max. Operating 266 °F (130 °C) Temperature allows identical dispense media Cv Factor 2.3 – 7.2 over time 3 NO PRECISION DISPENSE ® Leak Detection Port O AE AE L Features/Benefits: • 100% PFA HP and virgin PTFE wetted flow path • Integrated visual position indication • Transparent actuation components • Bi-directional flow • Pneumatic, multi-turn and quarter turn activation BCD ALTERNATIVE ENERGY F/ C O CHEMICAL DELIVERY BCD ALTERNATIVE ENERGY 2-Way & 3-Way 1/2”, 3/4” Flare Grip II Pillar Super 300 Sanitech Fuse Bond Connection Size 1/2”, 3/4”, 1” Actuation Type Pneumatic Manual Multi-Turn Manual Quarter-Turn Max. Operating Pressure 100 PSIG (6.9 bar) Max. Operating 203 °F (95 °C) Temperature Cv Factor 3.18 – 7.0 Leak Detection Port YES PRECISION DISPENSE Configuration Orifice Size Standard Connection Types F/ C O Features/Benefits: • Furon SCR spring is rated for concentrated HCl and other aggressive applications • 100 PSIG rated forward and back-pressure in 2-way and 3-way configurations • True dual containment with leak detection capability • Available in 1/2" & 3/4" orifice versions HIGH TEMPERATURE ® CHEMICAL DELIVERY Furon UPX-2000 Valve BCD CMP ALTERNATIVE ENERGY 2-Way & 3-Way 1/4”, 1/2”, 3/4” Flare Grip II Pillar Super 300 Sanitech Fuse Bond Connection Size 1/4”, 3/8”, 1/2”, 3/4”, 1” Actuation Type Pneumatic Manual Multi-Turn Manual Quarter-Turn Max. Operating Pressure 100 PSIG (6.9 bar) Max. Operating 203 °F (95 °C) Temperature Cv Factor 0.8 – 7.0 Leak Detection Port YES HIGH TEMP ERATURE Configuration Orifice Size Standard Connection Types Features/Benefits: • Comprehensive offering of orifice sizes, actuation styles and port configurations • 100 PSIG (6.9 bar) forward and back-pressure rating • 2-way and 3-way configurations • Slurry and high temperature versions available S L U R R Y ® CHEMICAL DELIVERY Furon UPM-1000 Valve AE Va l v e s Saint-Gobain Performance Plastics’ comprehensive line of Furon® valves benefit from state-of-the-art, patent-protected technology. Our team of research and development professionals represent a combined 120 years of design engineering experience. The newest generation of Furon valves are constructed from high-purity, injection molded fluoropolymers including high-purity PFA. Innovative designs and construction ensure optimal system performance, media purity, and maintenancefree operation. 4 2-Way & 3-Way 1/4” Female NPT 1/4” Electrical, 24 VDC Electrical, 115 VAC Max. Operating Pressure 100 PSIG (6.9 bar) Max. Operating 176 °F (90 °C) Temperature Cv Factor 0.6 Leak Detection Port No Configuration Orifice Size Standard Connection Types Connection Size Actuation Type 2-Way 1” Fuse Bond Flare Grip II 1/2“, 3/4”, 1”, 1-1/4” Pneumatic Manual Multi-Turn Max. Operating Pressure 100 PSIG (6.9 bar) Max. Operating 212 °F (100 °C) Temperature Cv Factor Up to 15 Leak Detection Port YES ® Configuration Orifice Size Standard Connection Types Connection Size Actuation Type Max. Operating Pressure Max. Operating Temperature Cv Factor Leak Detection Port Configuration Orifice Size Standard Connection Types Connection Size Actuation Type 2-Way 2” Fuse Bond 1-1/2”, 2” Pneumatic Manual Multi-Turn Max. Operating Pressure 80 PSIG (5.5 bar) Max. Operating 212 °F (100 °C) Temperature Cv Factor 42-52 Leak Detection Port YES 5 2-Way 1-1/2” Fuse Bond 1-1/2” Pneumatic 60 PSIG (4.1 bar) 212 °F (100 °C) 31 YES Features/Benefits: • Maximum flow rating of Cv 52 • Fully swept flow path supports no-hold-up volume • Visual position indication • Leak detection capability CHEMICAL DELIVERY ® AE BCD Furon 1-1/2” HRDV Valve Furon 2” Inline Valve L Features/Benefits: • 15 Cv Flow Factor • Fully swept, low shear internal flow path • Quick-release, non-metallic, 8-position mounting base • 100% PFA HP and Virgin PTFE wetted flow path BCD Features/Benefits: • 100% PFA HP and virgin PTFE wetted flow path • Patented rolling diaphragm technology • High flow factor, Cv 31 • Visual position indicator • Furon O-ring free port connections CHEMICAL DELIVERY ® CHEMICAL DELIVERY Furon 1” Inline Valve BCD ALTERNATIVE ENERGY Configuration Orifice Size Standard Connection Types Connection Size Actuation Type Features/Benefits: • Double diaphragm seals for strict permeation control • 100% PFA HP and virgin PTFE wetted flow path • Integrated visual position indication • Transparent actuation components • Bi-directional flow PRECISION DISPENSE ® CHEMICAL DELIVERY Furon DVX Valve BCD 2-Way or 3-Way 3/16”, 1/4” Flare Grip II Fuse Bond Pillar Super 300 Connection Size 1/4”, 3/8”, 1/2” Actuation Type Pneumatic Manual Quarter-Turn Manual Multi-Turn Max. Operating Pressure 80 PSIG (5.5 bar) Max. Operating 176 °F (80 °C) Temperature Cv Factor 0.5 – 0.8 Leak Detection Port NO Furon J-Series Valve ® Configuration Orifice Size Standard Connection Types Connection Size Actuation Type 2-Way 3/4” Flare Grip II Fuse Bond 1/2”, 3/4”, 1” Pneumatic Manual Multi-Turn Max. Operating Pressure 85 PSIG (6.2 bar) Max. Operating 203 °F (95 °C) Temperature Cv Factor 2.3 – 7.2 Leak Detection Port YES Configuration Orifice Size Standard Connection Types 2-Way 3/4” Flare Grip II Fuse Bond Sanitary Connection Size 1/2”, 3/4”, 1” Actuation Type Pneumatic Manual Multi-Turn Max. Operating Pressure 100 PSIG (6.9 bar) Max. Operating 180 °F (95 °C) Temperature Cv Factor 5.2–7.2 Leak Detection Port Yes Features/Benefits: • Maximum flow rating of Cv-7.2 • Fully swept flow path supports no-hold-up volume • Visual position indication • Leak detection capability BCD CMP AE Features/Benefits: • High Cv flow factor • Inspection molded, PvDF valve body with PTFE diaphragm • No exposed metallics • Fully swept flow path • Leak detection capability • Visible position indication BCD ALTERNATIVE ENERGY ® CHEMICAL DELIVERY Furon 750i-Series Valve AE AE ALTERNATIVE ENERGY CMP S L U R R Y BCD CHEMICAL DELIVERY 2-Way & 3-Way 1/2” Flare Grip II Pillar Super 300 Fuse Bond Connection Size 3/8”, 1/2”, 3/4” Actuation Type Pneumatic Manual Multi-Turn Manual Quarter-Turn Max. Operating Pressure 90 PSIG (6.2 bar) Max. Operating 182 °F (82 °C) Temperature Cv Factor 2.7 – 3.0 Leak Detection Port YES ALTERNATIVE ENERGY Configuration Orifice Size Standard Connection Types L Features/Benefits: • The Furon SCR spring is rated for concentrated HCl and other aggressive applications • 100 PSIG (6.9 bar) rated forward and back-pressure in 2-way and 3-way configurations • True dual containment with leak detection capability • Available in 1/2" & 3/4" orifice versions S L U R R Y ® CHEMICAL DELIVERY Furon CDV Valve CMP ALTERNATIVE ENERGY Configuration Orifice Size Standard Connection Types Features/Benefits: • Semi F-57 specification compliant • High-purity PFA or PTFE wetted flow path and PTFE diaphragm • 80 PSIG (5.5 bar) forward/ back-pressure rating • Available in pneumatic normally closed, normally open, multi-turn, and quarter-turn actuation PRECISION DISPENSE ® S L U R R Y Furon HPVM Valve AE 6 2-Way 1/16”, 1/8”, 3/16”,1/4”, 3/8”, 1/2” Standard Flare Grip II Connection Types Pillar Super 300 Connection Size 1/8”, 1/4”, 1/2”, 3/4” Actuation Type Media Max. Operating Pressure 120 PSIG (8.3 bar) Max. Operating 203 °F (95 °C) Temperature Cv Factor 0.1 – 1.90 Furon Large Check Valve ® Furon Dilution Drain Valve 1/2”, 3/4” Media 60 PSIG (4.1 bar) 302 °F (150 °C) 32 Features/Benefits: • Maximum flow rating of Cv-7.2 • Fully swept flow path supports no-hold-up volume • Visual position indication • Leak detection capability F/ C O O ALTERNATIVE ENERGY BCD H IGH TE MPER ATURE 2.5 CHEMICAL DELIVERY 7 2-Way 2” Flare Grip II Fuse Bond 2” Media 150 PSIG (10.3 bar) 250 °F (121 °C) CHEMICAL DELIVERY Configuration Orifice Size Standard Connection Types Connection Size Actuation Type Max. Operating Pressure Max. Operating Temperature Cv Factor Features/Benefits: • High flow capability (57 Cv) • Zero dead volume body seal with no wetted thread areas • O-ring free design • Cracking pressure less than 1 PSIG (0.07 bar) AE BCD L ALTERNATIVE ENERGY Furon Chempure 2” Check Valve 2-Way 1/2” Flare Grip I AE AE PRECISION DISPENSE L ALTERNATIVE ENERGY BCD PRECISION DISPENSE 2-Way 1/2”, 3/4” Flare Grip II Fuse Bond Pillar Super 300 Connection Size 1/2”, 3/4”, 1” Actuation Type Media Max. Operating Pressure 150 PSIG (10.3 bar) Max. Operating 250 °F (121 °C) Temperature Cv Factor 3.7 – 7.5 CHEMICAL DELIVERY Configuration Orifice Size Standard Connection Types Configuration Orifice Size Standard Connection Types Connection Size Actuation Type Max. Operating Pressure Max. Operating Temperature Cv Factor L Features/Benefits: • 100% high-purity PFA construction • High flow capability (3.7–7.5 Cv) • High-purity PFA spring • Cracking pressure less than 1 PSIG (0.07 bar) ® ® BCD ALTERNATIVE ENERGY Configuration Orifice Size Features/Benefits: • 100% high-purity PFA construction • Cracking pressure less than 1 PSIG (0.07 bar) • Non-contaminating high-purity fluoropolymer spring • High flow capability PRECISION DISPENSE ® CHEMICAL DELIVERY Furon Mini Check Valve AE Configuration Orifice Size Standard Connection Types Connection Size Actuation Type 2-Way 1” Flare Grip II Fuse Bond 1/2”, 3/4”, 1”, 1-1/4” Pneumatic Manual Multi-Turn Max. Operating Pressure 100 PSIG (6.9 bar) Max. Operating 72 °F (22 °C) Temperature Cv Factor Up to 15.0 Leak Detection Port YES 0.2 – 0.5 NO L Furon Precision Plug Valve ® Configuration Orifice Size Standard Connection Types Connection Size Actuation Type Max. Operating Pressure Max. Operating Temperature Cv Factor Leak Detection Port Configuration Orifice Size 2-Way & 3-Way 1/16”, 1/8”, 3/16”, 1/4”, 3/8”, 1/2” Standard Flare Grip II Connection Types Male NPT Connection Size 1/8”, 1/4”, 3/8”, 1/2” Actuation Type Manual Max. Operating Pressure 50 PSIG (3.4 bar) Max. Operating 95 °F (35 °C) Temperature Cv Factor 0.5–0.8 Leak Detection Port NO 2-Way 1/16”, 1/8”, 3/16”, 1/4” Grab Seal Female NPT 1/8”, 1/4” Manual Multi-Turn 75 PSIG (5.2 bar) 212 °F (100 °C) 0.2 – 0.5 NO Features/Benefits: • 100% virgin PTFE wetted parts for high-purity and corrosion resistance • Bubble tight sealing • Suitable for both liquid and gas applications • Straight through flow path minimizes pressure drop L AE Features/Benefits: • 100% high-purity PTFE and PFA wetted flow path • Maintenance-free operation • 3-Way valves available in both “L” and “T” configuration • Panel mount versions are available L ALTERNATIVE ENERGY ™ PRECISION DISPENSE AstiPure Stopcock Valve AE AE ALTERNATIVE ENERGY 2-Way 1/16” Grab Seal Female NPT 1/8”, 1/4” Manual Multi-Turn 75 PSIG (5.2 bar) 212 °F (100 °C) PRECISION DISPENSE Configuration Orifice Size Standard Connection Types Connection Size Actuation Type Max. Operating Pressure Max. Operating Temperature Cv Factor Leak Detection Port BCD Features/Benefits: • 100% virgin PTFE wetted parts for high-purity and corrosion resistance • Fine thread on needle stem allows for precise metering and flow control • Bonnets and packing easily removable for cleaning • Straight through flow path PRECISION DISPENSE ® ALTERNATIVE ENERGY Furon Metering Valve Features/Benefits: • Maximum flow rating of Cv -15 • Minimal inventory requirements • Available in pneumatic- or manual-actuated versions • Flexible design to meet a wide range of customer requirements • May be assembled without special tools ALTERNATIVE ENERGY ® CHEMICAL DELIVERY Furon RDVM & SMDVM Self-Manifolding Distribution Valves AE 8 Furon RDVM/SMDVM Manifolds ® Configuration Orifice Size Standard Connection Types 2-Way 1” Flare Grip II Fuse Bond Pillar Super 300 Connection Size 1/2”, 3/4”, 1”, 1-1/4” Actuation Type Pneumatic Manual Multi-Turn Max. Operating Pressure 100 PSIG (6.9 bar) Max. Operating 72 °F (22 °C) Temperature Cv Factor Up to 15 Leak Detection Port YES ® Configuration Orifice Size Standard Connection Types 2-Way or 3-Way Up to 1” Flare Grip II Fuse Bond Pillar Super 300 Connection Size Up to 1” Actuation Type Pneumatic Manual Quarter-Turn Manual Multi-Turn Max. Operating Pressure 85 PSIG (5.9 bar) Max. Operating 212 °F (100 °C) Temperature Cv Factor Up to 7.2 Leak Detection Port YES 9 Features/Benefits: • Maximum flow rating of Cv-7.2 • Fully swept flow path supports no-hold-up volume • Visual position indication • Leak detection capability CHEMICAL DELIVERY Furon Integrated Vessels O L AE AE BCD Features/Benefits: • Modular design allows end user to configure and build valve manifolds “on the spot.” • Quick-release, non metallic 8-position mounting base • Visual position indicator • Purge port and leak detection options are available BCD ALTERNATIVE ENERGY L CHEMICAL DELIVERY BCD CMP ALTERNATIVE ENERGY 2-Way or 3-Way 1/2” Flare Grip II Fuse Bond Pillar Super 300 Connection Size 1/4”, 3/4”, 1” Actuation Type Pneumatic Manual Quarter-Turn Manual Multi-Turn Max. Operating Pressure 90 PSIG (6.2 bar) Max. Operating 182 °F (82 °C) Temperature Cv Factor 2.7 – 3.0 Leak Detection Port YES PRECISION DISPENSE Configuration Orifice Size Standard Connection Types F/ C O Features/Benefits: • Compact design enables space-efficient footprint • Maintenance free operation • Increases system reliability by eliminating potential leak points • Custom engineered to end user’s exact specifications S L U R R Y ® CHEMICAL DELIVERY Furon CDV Manifolds CMP ALTERNATIVE ENERGY 2-Way or 3-Way 3/16”, 1/4” Flare Grip II Fuse Bond Pillar Super 300 Connection Size 1/4”, 3/8”, 1/2” Actuation Type Pneumatic Manual Quarter-Turn Manual Multi-Turn Max. Operating Pressure 80 PSIG (5.5 bar) Max. Operating 176 °F (80 °C) Temperature Cv Factor 0.5 – 0.8 Leak Detection Port NO PRECISION DISPENSE Configuration Orifice Size Standard Connection Types Features/Benefits: • Custom engineered to end user’s exact specifications • Space savings more than 50% compared to discrete valves • Integrated valve design maximizes system up-time • Endless design possibilities HIGH TEMP ERATURE ® S L U R R Y Furon HPVM/HPV Manifolds AE Manifolds Saint-Gobain Performance Plastics is proud to offer the Furon® Integrated Manifold product line, featuring multiple function components in a single, pre-tested package that is easily installed into your system. Saint-Gobain engineers the most reliable valves in the world, delivering superior performance in limitless combinations and configurations while providing a low cost of ownership for end users. Our dedicated manifold resources will support you in the development of all your critical fluid applications. Every Furon Integrated Manifold system benefits from 100% fluoropolymer wetted flow paths while ensuring world-class reliability and safety. In addition, the Furon Integrated Manifold System provides space savings of over 50% versus traditional valve plumbing. Furon Integrated Manifolds are perfect for aggressive chemistry and ultra-pure de-ionized water delivery systems found in semiconductor, pharmaceutical, biomedical and laboratory applications. 10 Pump Mechanism Max. Flow Rate Connection Type Connection Size Max Suction Head Max. Back Pressure Max. Air Pressure Max. Air Consumption Max. Operating Temperature Max. Back Pressure Max. Air Pressure Max. Air Consumption Max. Operating Temperature BCD AE AstiPure High Temperature Pumps ™ Pump Mechanism Max. Flow Rate Connection Type Connection Size Max Suction Head Max. Back Pressure Max. Air Pressure Max. Air Consumption Max. Operating Temperature Pump Mechanism Max. Flow Rate Connection Type Connection Size Max Suction Head Max. Back Pressure Max. Air Pressure Max. Air Consumption Max. Operating Temperature 11 Diaphragm 8 GPM (30 lpm) 16 GPM (60 lpm) Flare Grip II Fusebond 1/2”, 3/4” 10 feet (3m) 100 psi (4.5 bar) 100 psi (7 bar) 4.5 SCFM (7m3/hr) 203 °F (95 °C) Features/Benefits: • Dual-containment PTFE diaphragm • Rated for 100% continuous duty • Integrated air logic controller for “plug and play” operation • Innovative “no stall” shuttle design ensures maximum up-time BCD ALTERNATIVE ENERGY ® CHEMICAL DELIVERY Furon Chempure Pumps Bellows 5 GPM (20 lpm) 13 GPM (50 lpm) Flare Grip II 3/4”, 1” 1 1.5 feet (3.5m) 16.5 feet (5m) 58 PSIG (4 bar) 72.5 PSIG (5 bar) 12 SCFM (20m3/hr) 320 °F (160 °C) AE Features/Benefits: • Capable of handling media temperatures up to 320 °F (160 °C) • No rotating shafts or glands • Flow rates up to 13 GPM (50 lpm) • 100% high-purity PTFE/PFA construction BCD H IGH T EM PE R ATURE Connection Type Connection Size Max Suction Head Bellows 8 GPM (30 lpm) 16 GPM (60 lpm) Flare Grip II 3/4”, 1” 12 feet (3.5m) 14 feet (4m) 80 PSIG (5.5 bar) 72.5 PSIG (5 bar) 4.5 SCFM (7m3/hr) 212 °F (100 °C) CHEMICAL DELIVERY Pump Mechanism Max. Flow Rate BCD CMP Features/Benefits: • Cost effective solution for handling corrosive or aggressive media in industrial applications • Ideal for use in DI water and bulk chemical delivery applications • 100% PTFE/PFA construction • 2-year warranty, extendable to 6 years with Preventive Maintenance CHEMICAL DELIVERY ™ ALTERNATIVE ENERGY AstiPure PV Series Pumps Bellows 4 GPM (15 lpm) 8 GPM (30 lpm) 16 GPM (60 lpm) Flare Grip II 1/2”, 3/4”, 1” 10 feet (3m) 12 feet (3.5m) 14 feet (4m) 80 PSIG (5.5 bar) 72.5 PSIG (5 bar) 4.5 SCFM (7m3/hr) 212 °F (100 °C) Features/Benefits: • Constructed from 100% highpurity fluoropolymer materials • 100% Elastomer free • Field-proven reliability in aggressive chemicals and slurries • 2-year warranty, extendable to 6 years with Preventive Maintenance S L U R R Y ™ CHEMICAL DELIVERY AstiPure II Pumps F/ C O O Pumps Saint Gobain Performance Plastics is a global leader in dependable, fluoropolymer-based pumps designed specifically for delivery of high-purity or aggressive fluids. Our AstiPure™ pneumatically-operated pumps feature 100% metal-free construction, eliminating any possibility of ionic contamination caused by exposure of corrosive chemicals to metal. Our AstiPure PV Series Pumps offer a cost effective solution for handling corrosive or aggressive media in industrial applications. In addition to chemical delivery pumps, we also offer a wide range of pumps for precision dispense applications. Our Furon® Precision Dispense Pump (PDP) is a complete system in itself, offering unparalleled accuracy and reliability in dispensing liquid doses up to 40 mL. AstiPure Pneumatic Dispensing Pumps and the Furon MiniDispense Pump offer reliable and cost-effective options for dispensing small doses of liquids. Our Furon Turbo Pump is a magnetically-driven turbine pump ideal for use in systems requiring a boost in pressure of low viscosity fluids, such as spraying and cleaning systems used in the Semiconductor and Life Sciences industries. Furon Turbo Pumps are best suited for use in DI water, and feature 100% PTFE and Alumina Ceramic wetted surfaces. 12 ™ Pump Mechanism Control Mechanism Dispense Volume Max. Dispense Speed Accuracy Max. Suction Head Max. Back Pressure Max. Air Pressure Max. Air Consumption Max. Operating Temperature Pump Mechanism Control Mechanism Dispense Volume Dispense Speed Accuracy Max. Suction Head Max. Back Pressure Max. Air Pressure Max. Air Consumption Max. Operating Temperature Rolling Diaphragm Electronic with Pneumatic Valves 0.1 – 40.0 mL 0.01 – 10 mL/sec ± .01 mL 6 feet 60 PSIG (4.1 bar) 60 PSIG (4.1 bar) 0.46 SCFM 122 °F (50 °C) L Furon Mini-Dispense Pump (MDP) ® Pump Mechanism Control Mechanism Dispense Volume Accuracy Max. Suction Head Max. Back Pressure Max. Air Pressure Max. Air Consumption Max. Operating Temperature Furon Turbo Pump Max. Power Consumption 13 Single Phase 7.4 Amps BCD ALTERNATIVE ENERGY Pump Mechanism Control Mechanism Max. Discharge Flow Rate Required Inlet Fluid Pressure Max. Media Temperature Power Requirements Rolling Diaphragm Pneumatic 0 – 10.0 mL 0 – 5.0 mL 0 – 0.5 mL ±1 % 6 feet 60 PSIG (4.1 bar) 60 PSIG (4.1 bar) 0.46 SCFM 122 °F (50 °C) Features/Benefits: • Seal-free magnetically coupled Impeller turbine pump Magnetic Drive Motor 4.5 GPM (18 lpm) • High output pressure 15 – 60 PSIG (1 –4 bar) • Ideal for use as a booster pump in DI water systems 122 °F (50 °C) • PTFE and alumina ceramic wetted parts 115/230 VAC CHEMICAL DELIVERY ® L Features/Benefits: • Superior accuracy and reliability • Virgin PTFE wetted flow path • 100% Elastomer free • Ideal for high-purity fluid dispensing applications • Suitable for use with aggressive, corrosive, and ultrapure media AE Features/Benefits: • Efficiently dispenses small amounts of liquid (up to 10 mL) • Suitable for use in aggressive, corrosive, and ultrapure liquids • Easy manual adjustments for shot size and dispense speed • Compact footprint PRECISION DISPENSE ® PRECISION DISPENSE Furon Precision Dispense Pump (PDP) Bellows Pneumatic 6 – 40 mL (PPRD1) 8 – 80 mL (PPRD2) 0.5 GPM (120 l/hr) 1 GPM (240 l/hr) ± 1% 6 feet 60 PSIG (4 bar) 72.5 PSIG (5 bar) 3.5 SCFM 212 °F (100 °C) Features/Benefits: • Designed for dosing small amounts of liquid (up to 80 mL) • High-purity PTFE/PFA construction • Accuracy ± 1% per dose • Suitable for use with aggressive or corrosive media PRECISION DISPENSE AstiPure Pneumatic Dispensing Pumps (PPRD) L Fittings, Tubing & Accessories Saint-Gobain Performance Plastics manufactures the industry’s most complete line of high-purity PFA Furon® Flare Grip®, Flare Grip II, Grab Seal™ and Fuse Bond fittings, to accommodate nearly any semiconductor fluid handling application. We also provide a wide array of accessory items engineered to complement our fittings. This line includes pressure regulators, tubing, pipe and much more. Our broad product offering provides you with a comprehensive single source for high-purity fluid-handling products. We offer decades of experience in injection molding of PFA and processing of PTFE, coupled with state-of-theart equipment to assure accurate repeatable processes. This assures that our products meet or exceed the most stringent semiconductor industry standards for purity and ionic extractables to satisfy your critical fluid handling requirements. 14 Features/Benefits: Unions (Union Adapters, • Available in 1/4”, 3/8”, 1/2”, 3/4”, and 1”sizes to meet any application Reducers, Panel, Straight Tube Union) • Interchangeable and compatible Elbows (45° Union, with most industry fluid handling Adapters, Reducers) systems Tees (Union, Reducer, • Provide reliable leak-free connections Branch, Run) High-Purity PFA • Minimal dead space for fluid PVDF, PFA entrapment 1/8”, 1/4”, 3/8”, 1/2”, 3/4”, 1” CHEMICAL DELIVERY Body Material Nut Material Connection Sizes Max. Operating Pressure 275 PSIG (19 bar) Max. Operating 400 °F (204 °C) Temperature BCD CMP F/ C O O ALTERNATIVE ENERGY Configurations HIGH TEMP ERATURE ® S L U R R Y Furon Flare Grip II AE Furon Grab Seal BCD CMP F/ C O O ALTERNATIVE ENERGY ETFE 1/8”, 1/4”, 3/8”, 1/2”, 3/4”, 1” 275 PSIG (19 bar) 400 °F (204 °C) H I G H T E M P E R AT U R E Body Material Nut Material Connection Sizes Max. Operating Pressure Max. Operating Temperature S L U R R Y Configurations Features/Benefits: Unions (Union Adapters, • Simple design for ease of installation Reducers, Panel, Straight Tube Union) • No special tools required Elbows (45° Union, • Accommodates temperatures up Adapters, Reducers) o o to 212 F (100 C) Tees (Union, Reducer, Branch, Run) • Working pressure to 100 PSIG at High-Purity PFA ambient temperature CHEMICAL DELIVERY ® AE Features/Benefits: Unions (Union Adapters, • Lower hold-up volume due to reduced fitting size Reducers, O-ringless Union) • Manufactured from 100% virgin Elbows (45° Union, high-purity PFA Tube Adapter) • O-ring free unions feature leaktight Tees (Union, Reducer, patent-protected tongue and groove Branch) High-Purity PFA seal and are rated for 120 PSIG N/A system pressure at 300 oF (148 oC) Furon Air & Liquid Actuated Aspirators ® Actuation Input Media Pressure Flow at Outlet Port* End Connections Body Material Air or Liquid 5 to 60 PSIG (0.3 to 4 bar) 0.5 to 2.5 GPM (1.9 to 9.5 LPM) 1/2” and 3/8” FNPT PTFE Features/Benefits: • 100% PTFE wetted parts • Extremely reliable – no moving parts • Chemically inert, internally and externally 15 BCD PRECISION DISPENSE CHEMICAL DELIVERY *See specific product data sheets for actual flow data L BCD CMP F/ C O O ALTERNATIVE ENERGY Body Material Nut Material Connection Sizes 1/4”, 1/2”, 3/4”, 1”, 2” Max. Operating Pressure 250 PSIG (17 bar) Max. Operating 400 °F (204 °C) Temperature H IGH TE MPE RAT URE Configurations S L U R R Y ® CHEMICAL DELIVERY Furon Fuse Bond AE Features/Benefits: 1/2”: 5.3 GPM (20 l/min) • Mixes two or more chemistries 1”: 13.2 GPM (50 l/min) with no moving parts 1/2”: 9.0 PSID • Ideal for high-purity mixing 1”: 10.0 PSID applications 1/2”: 1.75 1”: 4.1 • Constructed from 100% virgin 41 °F to 212 °F PTFE and high-purity PFA (5 °C) to (100 °C) 90 PSIG (6 bar) max. • Innovative, compact design Furon Static Mixer ® Max. Flow Rate Max. Pressure Drop Cv Media Operating Temperature Media Operating Pressure Furon 1/4” UPRP Precision Pressure Regulator Manual & Pneumatic 1/4” Flare Grip II Pillar Super 300 Fuse Bond 1/4”, 3/8”, 1/2” 194 °F (90 °C) ® Actuation Orifice Size Standard Connection Types Connection Sizes Max. Operating Temperature Max. Operating Pressure Pressure Regulation Range ® PTFE, High-Purity PFA High-Purity PFA FEP Polypropylene 100 PSIG (7 bar) Standard (DI Water) Cone Fan Jug Fill Nitrogen Blow-off Pneumatic 1” Flare Grip II Pillar Super 300 Fuse Bond 3/4”, 1” 194 °F (90 °C) 100 PSIG (7 bar) 10 – 60 PSIG (0.7 –4 bar) Features/Benefits: • 100% PFA HP and virgin PTFE wetted flow path • Integrated visual position indication • Transparent actuation components • Bi-directional flow • Pneumatic, multi-turn and quarter turn activation BCD F/ C O O L Features/Benefits: • 100% virgin PTFE wetted fluid path • No exposed metal components • Shutoff pressure to 80 PSIG • Varied spray pattern and spray nozzle interchangeability CHEMICAL DELIVERY Furon Pistol Pete & Recirc Spray Guns Max. Media Pressure Spray Patterns Pressure Regulation Range ALTERNATIVE ENERGY L PRECISION DISPENSE O H IGH TE MPE RAT URE F/ C O CHEMICAL DELIVERY BCD PRECISION DISPENSE 10 – 60 PSIG (0.7 –4 bar) H I G H T E M P E R AT U R E 120 PSIG (8 bar) Furon 1” UPRP Precision Pressure Regulator Body Materials Hose Materials AE ® CHEMICAL DELIVERY Connection Sizes Max. Operating Temperature Max. Operating Pressure Pressure Regulation Range BCD CMP Features/Benefits: • Designed for fluid temperatures up to 194 oF (90 oC) • Composed of all virgin PTFE/ Fluoroloy T and PFA wetted flow paths • Integral leak detection port is standard • PTFE isolation bellows provides secondary containment ® Actuation Orifice Size Standard Connection Types S L U R R Y CHEMICAL DELIVERY at room temperature. BCD 16 1/8”, 1/4”, 3/8”, 1/2”, 3/4” 1”, 1-1/4”, 1-1/2”, 2” 0.030” – 0.060” O ® Material Max. Operating Pressure Max. Operating Temperature Standard Sizes (OD) Leak Detection Port High-Purity PFA 250 PSIG (17.2 bar) 400 °F (204 °C) 1/8”, 1/4”, 3/8”, 1/2”, 3/4”, 1”, 1-1/4”, 1-1/2“, 2” 0.068” – 0.154” 10’ (3 m) Features/Benefits: • Manufactured from virgin high-purity PFA • Nominal sizes standard in 10’ lengths CHEMICAL DELIVERY Wall Thickness Standard Length 17 F/ C O O ALTERNATIVE ENERGY BCD CMP H IGH T EMPE RATUR E 302 °F (150 °C) 120 PSIG (8 bar) 5% of Full Scale 1/4” FNPT 1/4” FNPT DI Water (standard) PTFE/PFA S L U R R Y Max. Media Temperature Max. Media Pressure Accuracy End Connection Gauge Connection Fill Fluid Materials Features/Benefits: • Proprietary diaphragm seals with zero hold-up volume or elastomers • Variety of optional mounts including fuse bonded flow-thru tee option • 100% non-metallic construction • All molded high-purity PFA body; PTFE diaphragm CHEMICAL DELIVERY ® AE AE Furon Fuse Bond Pipe Furon Single & Double Diaphragm Molded Gauge Protectors O AE BCD CMP F/ C O O ALTERNATIVE ENERGY F/ C O H IGH TE MPE RAT URE BCD CMP S L U R R Y 1/8”, 1/4”, 3/8”, 1/2”, 3/4”, 1”, 1-1/4” 0.030” – 0.060” 500’ (152.4 m) ALTERNATIVE ENERGY High-Purity PFA 250 PSIG (17.2 bar) 400 °F (204 °C) CHEMICAL DELIVERY Material Max. Operating Pressure Max. Operating Temperature Standard Sizes (OD) Leak Detection Port Wall Thickness Max. Continuous Length F/ C O Features/Benefits: • Saves installation time • Continuous lengths up to 500’ • Provides superior chemically resistant dual containment • Compatible with Furon Dual Containment flare fittings H I G H T E M P E R AT U R E ® S L U R R Y Furon High-Purity Coax Tubing BCD CMP ALTERNATIVE ENERGY High-Purity PFA 250 PSIG (17.2 bar) 400 °F (204 °C) CHEMICAL DELIVERY Material Max. Operating Pressure Max. Operating Temperature Standard Sizes (OD) Leak Detection Port Wall Thickness Features/Benefits: • Non-contaminating laser scribing for positive identification of size, material and 100% lot traceability • Heat stabilized during extrusion for broadest service temperature range • Tube ends capped to prevent I.D. contamination HIGH TEMP ERATURE ® S L U R R Y Furon 400 Series High-Purity PFA Tubing AE For our Furon & AstiPure product catalog on CD-ROM, Please contact us at: Tel: (714) 630-5818 Fax: (714) 688-2614 USA Toll Free: (800) 833-5661 US Patents: 6,000,416; 5,261,492; 5,645,301; 5,498,036; 5,575,311; 5,967,173; 5,652,391; 5,993,176; 7,335,003 Saint-Gobain Performance Plastics reserves the right to change product specifications without prior notice. 12-month Limited Warranty: For a period of 12 months from the date of first sale, Saint-Gobain Performance Plastics Corporation warrants this product to be free from defects in manufacturing. This company’s only obligation will be to provide replacement product for any material proven to have such a defect, or at SGPPL’s option, to refund the purchase price thereof. User assumes all other risks, if any, including the risk of injury, loss or damage, whether direct, consequential or incidental, arising out of the use, misuse, or inability to use this product. SAINT-GOBAIN PERFORMANCE PLASTICS DISCLAIMS ALL IMPLIED WARRANTIES OF MERCHANTABILITY AND FITNESS FOR A PARTICULAR PURPOSE. NOTE: Saint-Gobain Performance Plastics Corporation does not assume any responsibility or liability for any advice furnished by it, or for the performance or results of any installation or use of the product or of any final product into which the product may be incorporated by the purchaser and/or user. furon.com A World Leader in High Performance Materials Saint-Gobain Performance Plastics is the world's leading producer of engineered high-performance polymer products for all industries. With more than 50 locations in 17 countries, Saint-Gobain is positioned to provide innovative products and comprehensive service to a world wide customer base. Parent company, Compagnie de Saint-Gobain is one of the world's top 100 industrial corporations and a leader in the development and production of engineered materials. Established in France in 1665 the company is a leading producer of flat glass, packaging, insulation, building materials, abrasives, reinforcements, industrial ceramics and piping. Garden Grove Facility Saint-Gobain Performance Plastics-USA High Purity Systems 7301 Orangewood Avenue Garden Grove, CA 92841-1411 Phone: (714) 630-5818 Fax: (714) 688-2614 USA Toll Free: (800) 833-5661 Saint-Gobain Performance Plastics-France High Purity Systems EADAC des Berthilliers 71850 Charnay les Macons France Phone: +33(0)3 85 20 27 00 Fax: +33 (0)3 85 29 18 48 furon.com highpurityplastics.com Furon, is a registered trademark. AstiPure is a trademark. Grab Seal is a trademark. ©2010 Saint-Gobain Performance Plastics Corporation ENC 2136 2.5M 0610 STAS Garden Grove, California