High Purity Systems - Saint-Gobain Performance Plastics

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High Purity Systems
Fluid Handling Solutions
Furon
AstiPure
®
™
Precision
Purity
Innovation
For more then 70 years, Saint-Gobain Performance Plastics has supplied the world
with high-performance polymer products for the most demanding applications.
With a strong engineering focus on research and development, we pioneer application
specific material solutions and unique processing techniques for many high-purity
markets. Our experienced engineers create a close working relationship with our
customers in the development of molded, extruded, machined and/or clean room
assembled components for OEMs to provide a rapid product development cycle.
Whether you're updating a current product to stay ahead of the competition or
launching the next generation of products to your marketplace, Saint-Gobain presents
a wealth of resources to meet your needs in every aspect of the product development
and production process.
We offer:
• Successful partnering with industry technology leaders and innovative companies
• Skilled senior-level engineering team with decades of experience in tool design,
part design, materials processing, and materials selection for polymers and
fluoropolymers
• Vertically integrated clean manufacturing facility offers complete process control
from molding to machining to final assembly and test for reliable turn key solutions
• Distribution Resource Planning and drop ship capabilities for a seamless supply
chain solution
Global Products—Local Support
We provide our worldwide customer base with technical support, customer service,
and local inventory through more than 25 sales offices in North America, Europe,
and Asia, and through our manufacturing facilities in Europe and the United States.
Ordering Information
For pricing information and product availability, contact our
Customer Service Department at 1-800-833-5661 or 714-630-5818.
For additional information on Saint-Gobain Performance Plastics or our products,
or to request literature, please visit or website at furon.com or call 1-800-463-8766.
Chemical Delivery
• Manufactured from ultra high-purity fluoropolymers
• Suitable for use with harsh or aggressive chemicals
• Materials compliant to USP Class VI
• Custom configurations available
CHEMICAL DELIVERY
We offer an extensive product line of high-purity fluid handling components. Featuring the Furon® and AstiPure™ lines of fluoropolymer-based fluid handling components,
our standard products include pumps, valves, fittings, accessories such as pressure
regulators and spray guns, and high-purity tubing and pipe. In addition to our standard products, we utilize our unparalleled expertise in designing custom fluid handling
systems to our customers’ exact requirements. We develop working relationships with
our end users’ engineering teams to assure the best possible solution for each specific
application. Our extensive product line, combined with our decades of engineering
expertise, assures that we can offer you a one-stop solution for all of your fluid
handling needs. We are experienced at solving the most challenging fluid handling
problems, from ultra-pure chemistry to abrasive slurries to extremely harsh or
aggressive liquids.
BCD
• Optimal performance for abrasive slurries
• Improved slurry life
• Maximized system up-time
• Meets Semi F57 requirements
S L U R R Y
High Temperature
HI G H T EM P E RAT U RE
Slurry
• Suitable for media up to 302o F (150o C)
• Optimal safety
• Superior reliability
• Maximized system up-time
Precision Dispense
• Superior Accuracy & Precision
• Maximum Chemical Efficiency
• Increased Yield
• Manufactured from ultra high-purity fluoropolymers
Alternative Energy
• Ideal for use in ultra-pure DI water
• Economical high-purity fluid handling solution
• 100% fluoropolymer wetted flow path
• Superior reliability
PRECISION DISPENSE
A P P L I C A T I O N S
Clean Room Facilities
Saint-Gobain Performance Plastics capabilities include injection, compression, isostatic
and endothermic molding for a wide range of polymers ranging from commodity
grade resins to highly engineered polymers and fluoropolymers. Our extraordinary
range of molding and manufacturing capabilities allow us to convert virgin resin to
molded components. Saint-Gobain Performance Plastics also provides world class
precision machining and assembly capabilities in a state-of-the-art, build-clean
environment, ensuring that our products meet and exceed the most stringent
cleanliness requirements of the Semiconductor, Chemical Processing, Alternative
Energy, and Life Sciences industries.
ALTERNATIVE ENERGY
Manufacturing
Capabilities
CMP
F/ C
O
O
L
AE
2
O
L
Furon Q-Valve
®
Configuration
Orifice Size
Standard
Connection Types
Connection Size
Actuation Type
2-Way
1/4”, 1/2”, 3/4”
Flare Grip II
Fuse Bond
1/4”, 3/8”, 1/2”, 3/4”, 1”
Pneumatic
Manual Multi-Turn
Manual Quarter-Turn
Max. Operating Pressure 100 PSIG (6.9 bar)
Max. Operating
182 °F (82 °C)
Temperature
Cv Factor
0.8 – 9.4
Leak Detection Port
YES
Furon Suckback Valve
Features/Benefits:
• All virgin PTFE/high-purity molded
Configuration
2-Way
PFA wetted flow path
Orifice Size
1/8”, 1/4”, 3/8”, 1/2”, 3/4”
Standard
Flare Grip II
• Eliminates dripping of dispense
Connection Types
Grab Seal
media from nozzles
Pillar Super 300
Connection Size
1/8”, 1/4”, 3/8”, 1/2”, 3/4” • Adjustable suckback capacity permits
Actuation Type
Pneumatic
precise metering of dispense media
Max. Operating Pressure 60 PSIG (4.1 bar)
• Repeatability of suckback amount
Max. Operating
266 °F (130 °C)
Temperature
allows identical dispense media
Cv Factor
2.3 – 7.2
over time
3
NO
PRECISION DISPENSE
®
Leak Detection Port
O
AE
AE
L
Features/Benefits:
• 100% PFA HP and virgin PTFE
wetted flow path
• Integrated visual position indication
• Transparent actuation components
• Bi-directional flow
• Pneumatic, multi-turn and quarter
turn activation
BCD
ALTERNATIVE ENERGY
F/ C
O
CHEMICAL DELIVERY
BCD
ALTERNATIVE ENERGY
2-Way & 3-Way
1/2”, 3/4”
Flare Grip II
Pillar Super 300
Sanitech
Fuse Bond
Connection Size
1/2”, 3/4”, 1”
Actuation Type
Pneumatic
Manual Multi-Turn
Manual Quarter-Turn
Max. Operating Pressure 100 PSIG (6.9 bar)
Max. Operating
203 °F (95 °C)
Temperature
Cv Factor
3.18 – 7.0
Leak Detection Port
YES
PRECISION DISPENSE
Configuration
Orifice Size
Standard
Connection Types
F/ C
O
Features/Benefits:
• Furon SCR spring is rated for
concentrated HCl and other
aggressive applications
• 100 PSIG rated forward and
back-pressure in 2-way and 3-way
configurations
• True dual containment with leak
detection capability
• Available in 1/2" & 3/4" orifice versions
HIGH TEMPERATURE
®
CHEMICAL DELIVERY
Furon UPX-2000 Valve
BCD CMP
ALTERNATIVE ENERGY
2-Way & 3-Way
1/4”, 1/2”, 3/4”
Flare Grip II
Pillar Super 300
Sanitech
Fuse Bond
Connection Size
1/4”, 3/8”, 1/2”, 3/4”, 1”
Actuation Type
Pneumatic
Manual Multi-Turn
Manual Quarter-Turn
Max. Operating Pressure 100 PSIG (6.9 bar)
Max. Operating
203 °F (95 °C)
Temperature
Cv Factor
0.8 – 7.0
Leak Detection Port
YES
HIGH TEMP ERATURE
Configuration
Orifice Size
Standard
Connection Types
Features/Benefits:
• Comprehensive offering of orifice
sizes, actuation styles and port
configurations
• 100 PSIG (6.9 bar) forward and
back-pressure rating
• 2-way and 3-way configurations
• Slurry and high temperature
versions available
S L U R R Y
®
CHEMICAL DELIVERY
Furon UPM-1000 Valve
AE
Va l v e s
Saint-Gobain Performance
Plastics’ comprehensive line of
Furon® valves benefit from
state-of-the-art, patent-protected technology. Our team
of research and development
professionals represent a
combined 120 years of design
engineering experience. The
newest generation of Furon
valves are constructed from
high-purity, injection molded
fluoropolymers including
high-purity PFA. Innovative
designs and construction ensure
optimal system performance,
media purity, and maintenancefree operation.
4
2-Way & 3-Way
1/4”
Female NPT
1/4”
Electrical, 24 VDC
Electrical, 115 VAC
Max. Operating Pressure 100 PSIG (6.9 bar)
Max. Operating
176 °F (90 °C)
Temperature
Cv Factor
0.6
Leak Detection Port
No
Configuration
Orifice Size
Standard
Connection Types
Connection Size
Actuation Type
2-Way
1”
Fuse Bond
Flare Grip II
1/2“, 3/4”, 1”, 1-1/4”
Pneumatic
Manual Multi-Turn
Max. Operating Pressure 100 PSIG (6.9 bar)
Max. Operating
212 °F (100 °C)
Temperature
Cv Factor
Up to 15
Leak Detection Port
YES
®
Configuration
Orifice Size
Standard
Connection Types
Connection Size
Actuation Type
Max. Operating Pressure
Max. Operating
Temperature
Cv Factor
Leak Detection Port
Configuration
Orifice Size
Standard
Connection Types
Connection Size
Actuation Type
2-Way
2”
Fuse Bond
1-1/2”, 2”
Pneumatic
Manual Multi-Turn
Max. Operating Pressure 80 PSIG (5.5 bar)
Max. Operating
212 °F (100 °C)
Temperature
Cv Factor
42-52
Leak Detection Port
YES
5
2-Way
1-1/2”
Fuse Bond
1-1/2”
Pneumatic
60 PSIG (4.1 bar)
212 °F (100 °C)
31
YES
Features/Benefits:
• Maximum flow rating of Cv 52
• Fully swept flow path supports
no-hold-up volume
• Visual position indication
• Leak detection capability
CHEMICAL DELIVERY
®
AE
BCD
Furon 1-1/2” HRDV Valve
Furon 2” Inline Valve
L
Features/Benefits:
• 15 Cv Flow Factor
• Fully swept, low shear internal
flow path
• Quick-release, non-metallic,
8-position mounting base
• 100% PFA HP and Virgin PTFE
wetted flow path
BCD
Features/Benefits:
• 100% PFA HP and virgin PTFE
wetted flow path
• Patented rolling diaphragm
technology
• High flow factor, Cv 31
• Visual position indicator
• Furon O-ring free port connections
CHEMICAL DELIVERY
®
CHEMICAL DELIVERY
Furon 1” Inline Valve
BCD
ALTERNATIVE ENERGY
Configuration
Orifice Size
Standard
Connection Types
Connection Size
Actuation Type
Features/Benefits:
• Double diaphragm seals for strict
permeation control
• 100% PFA HP and virgin PTFE
wetted flow path
• Integrated visual position indication
• Transparent actuation components
• Bi-directional flow
PRECISION DISPENSE
®
CHEMICAL DELIVERY
Furon DVX Valve
BCD
2-Way or 3-Way
3/16”, 1/4”
Flare Grip II
Fuse Bond
Pillar Super 300
Connection Size
1/4”, 3/8”, 1/2”
Actuation Type
Pneumatic
Manual Quarter-Turn
Manual Multi-Turn
Max. Operating Pressure 80 PSIG (5.5 bar)
Max. Operating
176 °F (80 °C)
Temperature
Cv Factor
0.5 – 0.8
Leak Detection Port
NO
Furon J-Series Valve
®
Configuration
Orifice Size
Standard
Connection Types
Connection Size
Actuation Type
2-Way
3/4”
Flare Grip II
Fuse Bond
1/2”, 3/4”, 1”
Pneumatic
Manual Multi-Turn
Max. Operating Pressure 85 PSIG (6.2 bar)
Max. Operating
203 °F (95 °C)
Temperature
Cv Factor
2.3 – 7.2
Leak Detection Port
YES
Configuration
Orifice Size
Standard
Connection Types
2-Way
3/4”
Flare Grip II
Fuse Bond
Sanitary
Connection Size
1/2”, 3/4”, 1”
Actuation Type
Pneumatic
Manual Multi-Turn
Max. Operating Pressure 100 PSIG (6.9 bar)
Max. Operating
180 °F (95 °C)
Temperature
Cv Factor
5.2–7.2
Leak Detection Port
Yes
Features/Benefits:
• Maximum flow rating of Cv-7.2
• Fully swept flow path supports
no-hold-up volume
• Visual position indication
• Leak detection capability
BCD CMP
AE
Features/Benefits:
• High Cv flow factor
• Inspection molded, PvDF valve body
with PTFE diaphragm
• No exposed metallics
• Fully swept flow path
• Leak detection capability
• Visible position indication
BCD
ALTERNATIVE ENERGY
®
CHEMICAL DELIVERY
Furon 750i-Series Valve
AE
AE
ALTERNATIVE ENERGY
CMP
S L U R R Y
BCD
CHEMICAL DELIVERY
2-Way & 3-Way
1/2”
Flare Grip II
Pillar Super 300
Fuse Bond
Connection Size
3/8”, 1/2”, 3/4”
Actuation Type
Pneumatic
Manual Multi-Turn
Manual Quarter-Turn
Max. Operating Pressure 90 PSIG (6.2 bar)
Max. Operating
182 °F (82 °C)
Temperature
Cv Factor
2.7 – 3.0
Leak Detection Port
YES
ALTERNATIVE ENERGY
Configuration
Orifice Size
Standard
Connection Types
L
Features/Benefits:
• The Furon SCR spring is rated for
concentrated HCl and other
aggressive applications
• 100 PSIG (6.9 bar) rated forward
and back-pressure in 2-way and
3-way configurations
• True dual containment with leak
detection capability
• Available in 1/2" & 3/4" orifice versions
S L U R R Y
®
CHEMICAL DELIVERY
Furon CDV Valve
CMP
ALTERNATIVE ENERGY
Configuration
Orifice Size
Standard
Connection Types
Features/Benefits:
• Semi F-57 specification compliant
• High-purity PFA or PTFE wetted
flow path and PTFE diaphragm
• 80 PSIG (5.5 bar) forward/
back-pressure rating
• Available in pneumatic normally
closed, normally open, multi-turn,
and quarter-turn actuation
PRECISION DISPENSE
®
S L U R R Y
Furon HPVM Valve
AE
6
2-Way
1/16”, 1/8”, 3/16”,1/4”,
3/8”, 1/2”
Standard
Flare Grip II
Connection Types
Pillar Super 300
Connection Size
1/8”, 1/4”, 1/2”, 3/4”
Actuation Type
Media
Max. Operating Pressure 120 PSIG (8.3 bar)
Max. Operating
203 °F (95 °C)
Temperature
Cv Factor
0.1 – 1.90
Furon Large Check Valve
®
Furon Dilution Drain Valve
1/2”, 3/4”
Media
60 PSIG (4.1 bar)
302 °F (150 °C)
32
Features/Benefits:
• Maximum flow rating of Cv-7.2
• Fully swept flow path supports
no-hold-up volume
• Visual position indication
• Leak detection capability
F/ C
O
O
ALTERNATIVE ENERGY
BCD
H IGH TE MPER ATURE
2.5
CHEMICAL DELIVERY
7
2-Way
2”
Flare Grip II
Fuse Bond
2”
Media
150 PSIG (10.3 bar)
250 °F (121 °C)
CHEMICAL DELIVERY
Configuration
Orifice Size
Standard
Connection Types
Connection Size
Actuation Type
Max. Operating Pressure
Max. Operating
Temperature
Cv Factor
Features/Benefits:
• High flow capability (57 Cv)
• Zero dead volume body seal with
no wetted thread areas
• O-ring free design
• Cracking pressure less than
1 PSIG (0.07 bar)
AE
BCD
L
ALTERNATIVE ENERGY
Furon Chempure 2”
Check Valve
2-Way
1/2”
Flare Grip I
AE
AE
PRECISION DISPENSE
L
ALTERNATIVE ENERGY
BCD
PRECISION DISPENSE
2-Way
1/2”, 3/4”
Flare Grip II
Fuse Bond
Pillar Super 300
Connection Size
1/2”, 3/4”, 1”
Actuation Type
Media
Max. Operating Pressure 150 PSIG (10.3 bar)
Max. Operating
250 °F (121 °C)
Temperature
Cv Factor
3.7 – 7.5
CHEMICAL DELIVERY
Configuration
Orifice Size
Standard
Connection Types
Configuration
Orifice Size
Standard
Connection Types
Connection Size
Actuation Type
Max. Operating Pressure
Max. Operating
Temperature
Cv Factor
L
Features/Benefits:
• 100% high-purity PFA
construction
• High flow capability (3.7–7.5 Cv)
• High-purity PFA spring
• Cracking pressure less than
1 PSIG (0.07 bar)
®
®
BCD
ALTERNATIVE ENERGY
Configuration
Orifice Size
Features/Benefits:
• 100% high-purity PFA
construction
• Cracking pressure less than
1 PSIG (0.07 bar)
• Non-contaminating high-purity
fluoropolymer spring
• High flow capability
PRECISION DISPENSE
®
CHEMICAL DELIVERY
Furon Mini Check Valve
AE
Configuration
Orifice Size
Standard
Connection Types
Connection Size
Actuation Type
2-Way
1”
Flare Grip II
Fuse Bond
1/2”, 3/4”, 1”, 1-1/4”
Pneumatic
Manual Multi-Turn
Max. Operating Pressure 100 PSIG (6.9 bar)
Max. Operating
72 °F (22 °C)
Temperature
Cv Factor
Up to 15.0
Leak Detection Port
YES
0.2 – 0.5
NO
L
Furon Precision Plug Valve
®
Configuration
Orifice Size
Standard
Connection Types
Connection Size
Actuation Type
Max. Operating Pressure
Max. Operating
Temperature
Cv Factor
Leak Detection Port
Configuration
Orifice Size
2-Way & 3-Way
1/16”, 1/8”, 3/16”, 1/4”,
3/8”, 1/2”
Standard
Flare Grip II
Connection Types
Male NPT
Connection Size
1/8”, 1/4”, 3/8”, 1/2”
Actuation Type
Manual
Max. Operating Pressure 50 PSIG (3.4 bar)
Max. Operating
95 °F (35 °C)
Temperature
Cv Factor
0.5–0.8
Leak Detection Port
NO
2-Way
1/16”, 1/8”, 3/16”, 1/4”
Grab Seal
Female NPT
1/8”, 1/4”
Manual Multi-Turn
75 PSIG (5.2 bar)
212 °F (100 °C)
0.2 – 0.5
NO
Features/Benefits:
• 100% virgin PTFE wetted parts for
high-purity and corrosion resistance
• Bubble tight sealing
• Suitable for both liquid and gas
applications
• Straight through flow path minimizes
pressure drop
L
AE
Features/Benefits:
• 100% high-purity PTFE and PFA
wetted flow path
• Maintenance-free operation
• 3-Way valves available in both “L”
and “T” configuration
• Panel mount versions are available
L
ALTERNATIVE ENERGY
™
PRECISION DISPENSE
AstiPure Stopcock Valve
AE
AE
ALTERNATIVE ENERGY
2-Way
1/16”
Grab Seal
Female NPT
1/8”, 1/4”
Manual Multi-Turn
75 PSIG (5.2 bar)
212 °F (100 °C)
PRECISION DISPENSE
Configuration
Orifice Size
Standard
Connection Types
Connection Size
Actuation Type
Max. Operating Pressure
Max. Operating
Temperature
Cv Factor
Leak Detection Port
BCD
Features/Benefits:
• 100% virgin PTFE wetted parts for
high-purity and corrosion resistance
• Fine thread on needle stem allows for
precise metering and flow control
• Bonnets and packing easily removable
for cleaning
• Straight through flow path
PRECISION DISPENSE
®
ALTERNATIVE ENERGY
Furon Metering Valve
Features/Benefits:
• Maximum flow rating of Cv -15
• Minimal inventory requirements
• Available in pneumatic- or
manual-actuated versions
• Flexible design to meet a wide
range of customer requirements
• May be assembled without
special tools
ALTERNATIVE ENERGY
®
CHEMICAL DELIVERY
Furon RDVM & SMDVM
Self-Manifolding
Distribution Valves
AE
8
Furon RDVM/SMDVM
Manifolds
®
Configuration
Orifice Size
Standard
Connection Types
2-Way
1”
Flare Grip II
Fuse Bond
Pillar Super 300
Connection Size
1/2”, 3/4”, 1”, 1-1/4”
Actuation Type
Pneumatic
Manual Multi-Turn
Max. Operating Pressure 100 PSIG (6.9 bar)
Max. Operating
72 °F (22 °C)
Temperature
Cv Factor
Up to 15
Leak Detection Port
YES
®
Configuration
Orifice Size
Standard
Connection Types
2-Way or 3-Way
Up to 1”
Flare Grip II
Fuse Bond
Pillar Super 300
Connection Size
Up to 1”
Actuation Type
Pneumatic
Manual Quarter-Turn
Manual Multi-Turn
Max. Operating Pressure 85 PSIG (5.9 bar)
Max. Operating
212 °F (100 °C)
Temperature
Cv Factor
Up to 7.2
Leak Detection Port
YES
9
Features/Benefits:
• Maximum flow rating of Cv-7.2
• Fully swept flow path supports
no-hold-up volume
• Visual position indication
• Leak detection capability
CHEMICAL DELIVERY
Furon Integrated Vessels
O
L
AE
AE
BCD
Features/Benefits:
• Modular design allows end user to
configure and build valve
manifolds “on the spot.”
• Quick-release, non metallic
8-position mounting base
• Visual position indicator
• Purge port and leak detection
options are available
BCD
ALTERNATIVE ENERGY
L
CHEMICAL DELIVERY
BCD CMP
ALTERNATIVE ENERGY
2-Way or 3-Way
1/2”
Flare Grip II
Fuse Bond
Pillar Super 300
Connection Size
1/4”, 3/4”, 1”
Actuation Type
Pneumatic
Manual Quarter-Turn
Manual Multi-Turn
Max. Operating Pressure 90 PSIG (6.2 bar)
Max. Operating
182 °F (82 °C)
Temperature
Cv Factor
2.7 – 3.0
Leak Detection Port
YES
PRECISION DISPENSE
Configuration
Orifice Size
Standard
Connection Types
F/ C
O
Features/Benefits:
• Compact design enables
space-efficient footprint
• Maintenance free operation
• Increases system reliability by
eliminating potential leak points
• Custom engineered to end user’s
exact specifications
S L U R R Y
®
CHEMICAL DELIVERY
Furon CDV Manifolds
CMP
ALTERNATIVE ENERGY
2-Way or 3-Way
3/16”, 1/4”
Flare Grip II
Fuse Bond
Pillar Super 300
Connection Size
1/4”, 3/8”, 1/2”
Actuation Type
Pneumatic
Manual Quarter-Turn
Manual Multi-Turn
Max. Operating Pressure 80 PSIG (5.5 bar)
Max. Operating
176 °F (80 °C)
Temperature
Cv Factor
0.5 – 0.8
Leak Detection Port
NO
PRECISION DISPENSE
Configuration
Orifice Size
Standard
Connection Types
Features/Benefits:
• Custom engineered to end user’s
exact specifications
• Space savings more than 50%
compared to discrete valves
• Integrated valve design maximizes
system up-time
• Endless design possibilities
HIGH TEMP ERATURE
®
S L U R R Y
Furon HPVM/HPV Manifolds
AE
Manifolds
Saint-Gobain Performance
Plastics is proud to offer the
Furon® Integrated Manifold
product line, featuring multiple
function components in a single,
pre-tested package that is easily
installed into your system.
Saint-Gobain engineers the most
reliable valves in the world,
delivering superior performance
in limitless combinations and
configurations while providing a
low cost of ownership for end
users. Our dedicated manifold
resources will support you in the
development of all your critical
fluid applications. Every Furon
Integrated Manifold system
benefits from 100% fluoropolymer wetted flow paths while
ensuring world-class reliability
and safety. In addition, the
Furon Integrated Manifold
System provides space savings of
over 50% versus traditional valve
plumbing. Furon Integrated
Manifolds are perfect for
aggressive chemistry and
ultra-pure de-ionized water
delivery systems found in
semiconductor, pharmaceutical,
biomedical and laboratory
applications.
10
Pump Mechanism
Max. Flow Rate
Connection Type
Connection Size
Max Suction Head
Max. Back Pressure
Max. Air Pressure
Max. Air Consumption
Max. Operating
Temperature
Max. Back Pressure
Max. Air Pressure
Max. Air Consumption
Max. Operating
Temperature
BCD
AE
AstiPure High Temperature
Pumps
™
Pump Mechanism
Max. Flow Rate
Connection Type
Connection Size
Max Suction Head
Max. Back Pressure
Max. Air Pressure
Max. Air Consumption
Max. Operating
Temperature
Pump Mechanism
Max. Flow Rate
Connection Type
Connection Size
Max Suction Head
Max. Back Pressure
Max. Air Pressure
Max. Air Consumption
Max. Operating
Temperature
11
Diaphragm
8 GPM (30 lpm)
16 GPM (60 lpm)
Flare Grip II
Fusebond
1/2”, 3/4”
10 feet (3m)
100 psi (4.5 bar)
100 psi (7 bar)
4.5 SCFM (7m3/hr)
203 °F (95 °C)
Features/Benefits:
• Dual-containment PTFE diaphragm
• Rated for 100% continuous duty
• Integrated air logic controller for
“plug and play” operation
• Innovative “no stall” shuttle design
ensures maximum up-time
BCD
ALTERNATIVE ENERGY
®
CHEMICAL DELIVERY
Furon Chempure Pumps
Bellows
5 GPM (20 lpm)
13 GPM (50 lpm)
Flare Grip II
3/4”, 1”
1 1.5 feet (3.5m)
16.5 feet (5m)
58 PSIG (4 bar)
72.5 PSIG (5 bar)
12 SCFM (20m3/hr)
320 °F (160 °C)
AE
Features/Benefits:
• Capable of handling media
temperatures up to 320 °F (160 °C)
• No rotating shafts or glands
• Flow rates up to 13 GPM (50 lpm)
• 100% high-purity PTFE/PFA
construction
BCD
H IGH T EM PE R ATURE
Connection Type
Connection Size
Max Suction Head
Bellows
8 GPM (30 lpm)
16 GPM (60 lpm)
Flare Grip II
3/4”, 1”
12 feet (3.5m)
14 feet (4m)
80 PSIG (5.5 bar)
72.5 PSIG (5 bar)
4.5 SCFM (7m3/hr)
212 °F (100 °C)
CHEMICAL DELIVERY
Pump Mechanism
Max. Flow Rate
BCD CMP
Features/Benefits:
• Cost effective solution for handling
corrosive or aggressive media in
industrial applications
• Ideal for use in DI water and bulk
chemical delivery applications
• 100% PTFE/PFA construction
• 2-year warranty, extendable to 6 years
with Preventive Maintenance
CHEMICAL DELIVERY
™
ALTERNATIVE ENERGY
AstiPure PV Series Pumps
Bellows
4 GPM (15 lpm)
8 GPM (30 lpm)
16 GPM (60 lpm)
Flare Grip II
1/2”, 3/4”, 1”
10 feet (3m)
12 feet (3.5m)
14 feet (4m)
80 PSIG (5.5 bar)
72.5 PSIG (5 bar)
4.5 SCFM (7m3/hr)
212 °F (100 °C)
Features/Benefits:
• Constructed from 100% highpurity fluoropolymer materials
• 100% Elastomer free
• Field-proven reliability in
aggressive chemicals and slurries
• 2-year warranty, extendable to 6
years with Preventive Maintenance
S L U R R Y
™
CHEMICAL DELIVERY
AstiPure II Pumps
F/ C
O
O
Pumps
Saint Gobain Performance
Plastics is a global leader in
dependable, fluoropolymer-based
pumps designed specifically for
delivery of high-purity or
aggressive fluids. Our AstiPure™
pneumatically-operated pumps
feature 100% metal-free
construction, eliminating any
possibility of ionic contamination
caused by exposure of corrosive
chemicals to metal. Our AstiPure
PV Series Pumps offer a cost
effective solution for handling
corrosive or aggressive media in
industrial applications.
In addition to chemical delivery
pumps, we also offer a wide
range of pumps for precision
dispense applications. Our Furon®
Precision Dispense Pump (PDP)
is a complete system in itself,
offering unparalleled accuracy
and reliability in dispensing
liquid doses up to 40 mL.
AstiPure Pneumatic Dispensing
Pumps and the Furon MiniDispense Pump offer reliable
and cost-effective options for
dispensing small doses of liquids.
Our Furon Turbo Pump is a
magnetically-driven turbine
pump ideal for use in systems
requiring a boost in pressure of
low viscosity fluids, such as spraying and cleaning systems used
in the Semiconductor and Life
Sciences industries. Furon Turbo
Pumps are best suited for use in
DI water, and feature 100% PTFE
and Alumina Ceramic wetted
surfaces.
12
™
Pump Mechanism
Control Mechanism
Dispense Volume
Max. Dispense Speed
Accuracy
Max. Suction Head
Max. Back Pressure
Max. Air Pressure
Max. Air Consumption
Max. Operating
Temperature
Pump Mechanism
Control Mechanism
Dispense Volume
Dispense Speed
Accuracy
Max. Suction Head
Max. Back Pressure
Max. Air Pressure
Max. Air Consumption
Max. Operating
Temperature
Rolling Diaphragm
Electronic with
Pneumatic Valves
0.1 – 40.0 mL
0.01 – 10 mL/sec
± .01 mL
6 feet
60 PSIG (4.1 bar)
60 PSIG (4.1 bar)
0.46 SCFM
122 °F (50 °C)
L
Furon Mini-Dispense Pump
(MDP)
®
Pump Mechanism
Control Mechanism
Dispense Volume
Accuracy
Max. Suction Head
Max. Back Pressure
Max. Air Pressure
Max. Air Consumption
Max. Operating
Temperature
Furon Turbo Pump
Max. Power
Consumption
13
Single Phase
7.4 Amps
BCD
ALTERNATIVE ENERGY
Pump Mechanism
Control Mechanism
Max. Discharge
Flow Rate
Required Inlet
Fluid Pressure
Max. Media
Temperature
Power Requirements
Rolling Diaphragm
Pneumatic
0 – 10.0 mL
0 – 5.0 mL
0 – 0.5 mL
±1 %
6 feet
60 PSIG (4.1 bar)
60 PSIG (4.1 bar)
0.46 SCFM
122 °F (50 °C)
Features/Benefits:
• Seal-free magnetically coupled
Impeller
turbine pump
Magnetic Drive Motor
4.5 GPM (18 lpm)
• High output pressure
15 – 60 PSIG (1 –4 bar) • Ideal for use as a booster pump in
DI water systems
122 °F (50 °C)
• PTFE and alumina ceramic wetted
parts
115/230 VAC
CHEMICAL DELIVERY
®
L
Features/Benefits:
• Superior accuracy and reliability
• Virgin PTFE wetted flow path
• 100% Elastomer free
• Ideal for high-purity fluid dispensing
applications
• Suitable for use with aggressive,
corrosive, and ultrapure media
AE
Features/Benefits:
• Efficiently dispenses small amounts
of liquid (up to 10 mL)
• Suitable for use in aggressive,
corrosive, and ultrapure liquids
• Easy manual adjustments for shot
size and dispense speed
• Compact footprint
PRECISION DISPENSE
®
PRECISION DISPENSE
Furon Precision Dispense
Pump (PDP)
Bellows
Pneumatic
6 – 40 mL (PPRD1)
8 – 80 mL (PPRD2)
0.5 GPM (120 l/hr)
1 GPM (240 l/hr)
± 1%
6 feet
60 PSIG (4 bar)
72.5 PSIG (5 bar)
3.5 SCFM
212 °F (100 °C)
Features/Benefits:
• Designed for dosing small
amounts of liquid (up to 80 mL)
• High-purity PTFE/PFA construction
• Accuracy ± 1% per dose
• Suitable for use with aggressive
or corrosive media
PRECISION DISPENSE
AstiPure Pneumatic
Dispensing Pumps (PPRD)
L
Fittings,
Tubing &
Accessories
Saint-Gobain Performance
Plastics manufactures the
industry’s most complete line of
high-purity PFA Furon® Flare
Grip®, Flare Grip II, Grab Seal™
and Fuse Bond fittings, to
accommodate nearly any
semiconductor fluid handling
application. We also provide a
wide array of accessory items
engineered to complement our
fittings. This line includes
pressure regulators, tubing, pipe
and much more. Our broad
product offering provides you
with a comprehensive single
source for high-purity fluid-handling products. We offer decades
of experience in injection molding of PFA and processing of
PTFE, coupled with state-of-theart equipment to assure accurate
repeatable processes. This
assures that our products
meet or exceed the most
stringent semiconductor
industry standards for purity
and ionic extractables to satisfy
your critical fluid handling
requirements.
14
Features/Benefits:
Unions (Union Adapters, • Available in 1/4”, 3/8”, 1/2”, 3/4”,
and 1”sizes to meet any application
Reducers, Panel,
Straight Tube Union)
• Interchangeable and compatible
Elbows (45° Union,
with most industry fluid handling
Adapters, Reducers)
systems
Tees (Union, Reducer,
•
Provide
reliable leak-free connections
Branch, Run)
High-Purity PFA
• Minimal dead space for fluid
PVDF, PFA
entrapment
1/8”, 1/4”, 3/8”, 1/2”, 3/4”, 1”
CHEMICAL DELIVERY
Body Material
Nut Material
Connection Sizes
Max. Operating Pressure 275 PSIG (19 bar)
Max. Operating
400 °F (204 °C)
Temperature
BCD CMP
F/ C
O
O
ALTERNATIVE ENERGY
Configurations
HIGH TEMP ERATURE
®
S L U R R Y
Furon Flare Grip II
AE
Furon Grab Seal
BCD CMP
F/ C
O
O
ALTERNATIVE ENERGY
ETFE
1/8”, 1/4”, 3/8”, 1/2”, 3/4”, 1”
275 PSIG (19 bar)
400 °F (204 °C)
H I G H T E M P E R AT U R E
Body Material
Nut Material
Connection Sizes
Max. Operating Pressure
Max. Operating
Temperature
S L U R R Y
Configurations
Features/Benefits:
Unions (Union Adapters, • Simple design for ease of
installation
Reducers, Panel,
Straight Tube Union)
• No special tools required
Elbows (45° Union,
• Accommodates temperatures up
Adapters, Reducers)
o
o
to 212 F (100 C)
Tees (Union, Reducer,
Branch, Run)
• Working pressure to 100 PSIG at
High-Purity PFA
ambient temperature
CHEMICAL DELIVERY
®
AE
Features/Benefits:
Unions (Union Adapters, • Lower hold-up volume due to
reduced fitting size
Reducers, O-ringless
Union)
• Manufactured from 100% virgin
Elbows (45° Union,
high-purity PFA
Tube Adapter)
•
O-ring
free unions feature leaktight
Tees (Union, Reducer,
patent-protected
tongue and groove
Branch)
High-Purity PFA
seal and are rated for 120 PSIG
N/A
system pressure at 300 oF (148 oC)
Furon Air & Liquid
Actuated Aspirators
®
Actuation
Input Media Pressure
Flow at Outlet Port*
End Connections
Body Material
Air or Liquid
5 to 60 PSIG (0.3 to 4 bar)
0.5 to 2.5 GPM
(1.9 to 9.5 LPM)
1/2” and 3/8” FNPT
PTFE
Features/Benefits:
• 100% PTFE wetted parts
• Extremely reliable – no moving parts
• Chemically inert, internally and
externally
15
BCD
PRECISION DISPENSE
CHEMICAL DELIVERY
*See specific product data sheets for actual flow data
L
BCD CMP
F/ C
O
O
ALTERNATIVE ENERGY
Body Material
Nut Material
Connection Sizes
1/4”, 1/2”, 3/4”, 1”, 2”
Max. Operating Pressure 250 PSIG (17 bar)
Max. Operating
400 °F (204 °C)
Temperature
H IGH TE MPE RAT URE
Configurations
S L U R R Y
®
CHEMICAL DELIVERY
Furon Fuse Bond
AE
Features/Benefits:
1/2”: 5.3 GPM (20 l/min) • Mixes two or more chemistries
1”: 13.2 GPM (50 l/min)
with no moving parts
1/2”: 9.0 PSID
• Ideal for high-purity mixing
1”: 10.0 PSID
applications
1/2”: 1.75
1”: 4.1
• Constructed from 100% virgin
41 °F to 212 °F
PTFE and high-purity PFA
(5 °C) to (100 °C)
90 PSIG (6 bar) max.
• Innovative, compact design
Furon Static Mixer
®
Max. Flow Rate
Max. Pressure Drop
Cv
Media Operating
Temperature
Media Operating
Pressure
Furon 1/4” UPRP
Precision Pressure
Regulator
Manual & Pneumatic
1/4”
Flare Grip II
Pillar Super 300
Fuse Bond
1/4”, 3/8”, 1/2”
194 °F (90 °C)
®
Actuation
Orifice Size
Standard
Connection Types
Connection Sizes
Max. Operating
Temperature
Max. Operating
Pressure
Pressure Regulation
Range
®
PTFE, High-Purity PFA
High-Purity PFA
FEP
Polypropylene
100 PSIG (7 bar)
Standard (DI Water)
Cone
Fan
Jug Fill
Nitrogen Blow-off
Pneumatic
1”
Flare Grip II
Pillar Super 300
Fuse Bond
3/4”, 1”
194 °F (90 °C)
100 PSIG (7 bar)
10 – 60 PSIG
(0.7 –4 bar)
Features/Benefits:
• 100% PFA HP and virgin PTFE
wetted flow path
• Integrated visual position indication
• Transparent actuation components
• Bi-directional flow
• Pneumatic, multi-turn and quarter
turn activation
BCD
F/ C
O
O
L
Features/Benefits:
• 100% virgin PTFE wetted fluid path
• No exposed metal components
• Shutoff pressure to 80 PSIG
• Varied spray pattern and spray nozzle
interchangeability
CHEMICAL DELIVERY
Furon Pistol Pete & Recirc
Spray Guns
Max. Media Pressure
Spray Patterns
Pressure Regulation
Range
ALTERNATIVE ENERGY
L
PRECISION DISPENSE
O
H IGH TE MPE RAT URE
F/ C
O
CHEMICAL DELIVERY
BCD
PRECISION DISPENSE
10 – 60 PSIG
(0.7 –4 bar)
H I G H T E M P E R AT U R E
120 PSIG (8 bar)
Furon 1” UPRP Precision
Pressure Regulator
Body Materials
Hose Materials
AE
®
CHEMICAL DELIVERY
Connection Sizes
Max. Operating
Temperature
Max. Operating
Pressure
Pressure Regulation
Range
BCD CMP
Features/Benefits:
• Designed for fluid temperatures
up to 194 oF (90 oC)
• Composed of all virgin PTFE/
Fluoroloy T and PFA wetted flow
paths
• Integral leak detection port is
standard
• PTFE isolation bellows provides
secondary containment
®
Actuation
Orifice Size
Standard
Connection Types
S L U R R Y
CHEMICAL DELIVERY
at room temperature.
BCD
16
1/8”, 1/4”, 3/8”, 1/2”, 3/4”
1”, 1-1/4”, 1-1/2”, 2”
0.030” – 0.060”
O
®
Material
Max. Operating Pressure
Max. Operating
Temperature
Standard Sizes (OD)
Leak Detection Port
High-Purity PFA
250 PSIG (17.2 bar)
400 °F (204 °C)
1/8”, 1/4”, 3/8”, 1/2”,
3/4”, 1”, 1-1/4”,
1-1/2“, 2”
0.068” – 0.154”
10’ (3 m)
Features/Benefits:
• Manufactured from virgin
high-purity PFA
• Nominal sizes standard in
10’ lengths
CHEMICAL DELIVERY
Wall Thickness
Standard Length
17
F/ C
O
O
ALTERNATIVE ENERGY
BCD CMP
H IGH T EMPE RATUR E
302 °F (150 °C)
120 PSIG (8 bar)
5% of Full Scale
1/4” FNPT
1/4” FNPT
DI Water (standard)
PTFE/PFA
S L U R R Y
Max. Media Temperature
Max. Media Pressure
Accuracy
End Connection
Gauge Connection
Fill Fluid
Materials
Features/Benefits:
• Proprietary diaphragm seals with zero
hold-up volume or elastomers
• Variety of optional mounts including
fuse bonded flow-thru tee option
• 100% non-metallic construction
• All molded high-purity PFA body;
PTFE diaphragm
CHEMICAL DELIVERY
®
AE
AE
Furon Fuse Bond Pipe
Furon Single & Double
Diaphragm Molded
Gauge Protectors
O
AE
BCD CMP
F/ C
O
O
ALTERNATIVE ENERGY
F/ C
O
H IGH TE MPE RAT URE
BCD CMP
S L U R R Y
1/8”, 1/4”, 3/8”, 1/2”,
3/4”, 1”, 1-1/4”
0.030” – 0.060”
500’ (152.4 m)
ALTERNATIVE ENERGY
High-Purity PFA
250 PSIG (17.2 bar)
400 °F (204 °C)
CHEMICAL DELIVERY
Material
Max. Operating Pressure
Max. Operating
Temperature
Standard Sizes (OD)
Leak Detection Port
Wall Thickness
Max. Continuous Length
F/ C
O
Features/Benefits:
• Saves installation time
• Continuous lengths up to 500’
• Provides superior chemically
resistant dual containment
• Compatible with Furon Dual
Containment flare fittings
H I G H T E M P E R AT U R E
®
S L U R R Y
Furon High-Purity
Coax Tubing
BCD CMP
ALTERNATIVE ENERGY
High-Purity PFA
250 PSIG (17.2 bar)
400 °F (204 °C)
CHEMICAL DELIVERY
Material
Max. Operating Pressure
Max. Operating
Temperature
Standard Sizes (OD)
Leak Detection Port
Wall Thickness
Features/Benefits:
• Non-contaminating laser scribing
for positive identification of size,
material and 100% lot traceability
• Heat stabilized during extrusion
for broadest service temperature
range
• Tube ends capped to prevent I.D.
contamination
HIGH TEMP ERATURE
®
S L U R R Y
Furon 400 Series
High-Purity PFA Tubing
AE
For our Furon & AstiPure product catalog on CD-ROM,
Please contact us at:
Tel: (714) 630-5818
Fax: (714) 688-2614
USA Toll Free: (800) 833-5661
US Patents: 6,000,416; 5,261,492; 5,645,301; 5,498,036; 5,575,311; 5,967,173; 5,652,391; 5,993,176; 7,335,003
Saint-Gobain Performance Plastics reserves the right to change product specifications without prior notice.
12-month Limited Warranty: For a period of 12 months from the date of first sale, Saint-Gobain Performance Plastics Corporation warrants this product to be free from defects in manufacturing.
This company’s only obligation will be to provide replacement product for any material proven to have such a defect, or at SGPPL’s option, to refund the purchase price thereof. User assumes
all other risks, if any, including the risk of injury, loss or damage, whether direct, consequential or incidental, arising out of the use, misuse, or inability to use this product. SAINT-GOBAIN
PERFORMANCE PLASTICS DISCLAIMS ALL IMPLIED WARRANTIES OF MERCHANTABILITY AND FITNESS FOR A PARTICULAR PURPOSE.
NOTE: Saint-Gobain Performance Plastics Corporation does not assume any responsibility or liability for any advice furnished by it,
or for the performance or results of any installation or use of the product or of any final product into which the product may be incorporated by the purchaser and/or user.
furon.com
A World
Leader in High
Performance
Materials
Saint-Gobain Performance Plastics is the world's leading producer of engineered
high-performance polymer products for all industries. With more than 50 locations
in 17 countries, Saint-Gobain is positioned to provide innovative products and
comprehensive service to a world wide customer base.
Parent company, Compagnie de Saint-Gobain is one of the world's top 100 industrial
corporations and a leader in the development and production of engineered materials.
Established in France in 1665 the company is a leading producer of flat glass, packaging, insulation, building materials, abrasives, reinforcements, industrial ceramics
and piping.
Garden Grove Facility
Saint-Gobain Performance Plastics-USA
High Purity Systems
7301 Orangewood Avenue
Garden Grove, CA 92841-1411
Phone: (714) 630-5818
Fax: (714) 688-2614
USA Toll Free: (800) 833-5661
Saint-Gobain Performance Plastics-France
High Purity Systems
EADAC des Berthilliers
71850 Charnay les Macons
France
Phone: +33(0)3 85 20 27 00
Fax: +33 (0)3 85 29 18 48
furon.com
highpurityplastics.com
Furon, is a registered trademark.
AstiPure is a trademark.
Grab Seal is a trademark.
©2010 Saint-Gobain Performance Plastics Corporation
ENC 2136
2.5M
0610 STAS
Garden Grove,
California
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