Power Quality Standards: CBEMA,
ITIC, SEMI F47, IEC 61000-4-11/34
Mark Stephens, PE
Manager
Industrial Studies
Electric Power Research Institute
942 Corridor Park Blvd
Knoxville, Tennessee 37932
Phone 865.218.8022 mstephens@epri.com

Equipment Design that is not Certified to a PQ
Standard can have Components that are highly Robust and others that are Susceptible to voltage sags
100%
90%
80%
70%
60%
50%
40%
30%
20%
10%
0%
0
PQ Events
IEC Style Starter
AC Drive
SEMI F47
Robust PLC
AC "Ice Cube" Relay
Flame Controller
10 20 30
Cycles
40 50 60
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• The best way to Guarantee that Process Equipment is Compatible with its Electrical Environment is to Require the Equipment to
Comply with Voltage Sag Standards
• OEMs have to be Forced to Incorporate Voltage Sag Tolerance into their Equipment
• The Push has to come from End Users
• EPRI has shown that Machines can be Built to Comply with Voltage
Sag Standards, like SEMI F47, with almost no Difference in Cost
• Recognized Voltage Sag Standards Discussed in Presentation
– SEMI F47-0706 (Semiconductor Equipment and Materials institute)
– IEC 61000-4-11 and 61000-4-34 (International Electrotechnical
Commission)
– ITIC (Information Technology industry Council)
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3

• 1977 the Computer and
Business Equipment
Manufacturers Association’s
(CBEMA) developed a standard to address energy performance profile for computer equipment
• Throughout the last thirty years the CBEMA Curve grew from a simple curve describing the performance mainframe computer equipment (PCs were not available), to a curve that was used to attempt to define everything from specification criteria for electronic equipment to the basis of power quality performance contracts between electric utilities and large industrial customers.
4 © 2009 Electric Power Research Institute, Inc. All rights reserved.

SEMI F47-0706 Specification for Semiconductor
Processing Equipment Voltage Sag Immunity
• SEMI F47-0706 Cost $50 and can be Downloaded from www.semi.org
• EPRI along with Utilities, Semiconductor Manufacturers and
Semiconductor Equipment Suppliers were all Instrumental in
Developing SEMI F47 which was adopted in 1999
• SEMI F47-0706 Specification for Semiconductor Processing
Equipment Voltage Sag Immunity defines the minimum voltage sag levels not to cause equipment misoperations of semiconductor equipment to voltage sags
• SEMI F47-0706 References an IEC Standard (IEC 61000-4-34) for Test
Protocol Information
• SEMI F47 does not Address Product Quality or Factory Systems. For factory Related Equipment and Power Requirements, see;
– SEMI F49-0200 - Guide for Semiconductor Factory Systems Voltage
Sag Immunity
– SEMI F50-0200 - Guide for Electric Utility Voltage Sag Performance for Semiconductor Factories
© 2009 Electric Power Research Institute, Inc. All rights reserved.
5

© 2009 Electric Power Research Institute, Inc. All rights reserved.
6

SEMI F47-0706 Specification for Semiconductor
Processing Equipment Voltage Sag Immunity
• SEMI F47 does not Address Product Quality, the intent of the
Standard is to keep the equipment Running (i.e. No Operator
Interventions) when Exposed to Voltage Sags Above the Defined
Curve
© 2009 Electric Power Research Institute, Inc. All rights reserved.
7

IEC 61000-4-34 Low Frequency Phenomena
International Electrotechnical Commission - IEC
• IEC 61000-4-11 is Intended to be used for Equipment LESS Then 16A
• IEC 61000-4-34 is Intended to be used for Equipment GREATER Then
16A
• Both Standards can be Downloaded from http://www.iec.ch/
• The Intent of IEC 61000-4-11 and -34 is to Define Voltage Dip Test
Levels, not for Specific Types of Equipment, but Attempts to Define the
Environment of the Equipment
• IEC 61000-4-34 applies to Equipment over 16A and IEC 61000-4-11 for
Equipment Under 16A
• Table 1 Below are the Voltage Dip Test Levels from the IEC 61000-4-34 and -11 Standards
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• Class 1 This class applies to protected supplies and has compatibility levels lower than public network levels. It relates to the use of equipment very sensitive to disturbances in the power supply for instance the instrumentation of technological laboratories, some automation and protection equipment, some computers, etc.
• NOTE Class 1 environments normally contain equipment which requires protection by such apparatus as uninterruptible power supplies (UPS), filters, or surge suppressers.
© 2009 Electric Power Research Institute, Inc. All rights reserved.
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• Class 2 - This class applies to points of common coupling (PCC’s for consumer systems) and points of common coupling (IPC’s) in the industrial environment in general. The compatibility levels in this class are identical to those of public networks; therefore components designed for application in public networks may be used in this class of industrial environment.
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• Class 3 - This class applies only to IPC’s in industrial environments. It has higher compatibility levels than those of class 2 for some disturbance phenomena. For instance, this class should be considered when any of the following conditions are met:
• – a major part of the load is fed through converters;
• – welding machines are present;
• – large motors are frequently started;
• – loads vary rapidly
• NOTE 1 The supply to highly disturbing loads, such as arcfurnaces and large converters which are generally supplied from a segregated bus-bar, frequently has disturbance levels in excess of class 3 (harsh environment). In such special situations, the compatibility levels should be agreed upon.
• NOTE 2 The class applicable for new plants and extensions of existing plants should relate to the type of equipment and process under consideration.
11 © 2009 Electric Power Research Institute, Inc. All rights reserved.

• Class X – User Defined and in case of SEMI F47-0706, the test Points are Defined in the
SEMI F47 Standard
© 2009 Electric Power Research Institute, Inc. All rights reserved.
12

• SEMI F47 standard for the semiconductor industry
– Voltage sag immunity testing
– Relevant for single, two and three phase manufacturing equipment
• IEC standards 61000-4-11 (less than 16 amps) and 61000-4-
34 (greater than 16 amps)
– Voltage sag and short interruption testing
– Relevant for single, two and three phase manufacturing equipment
• The SEMI F47 and IEC standards appear similar but have subtle differences, especially for three-phase testing
– The IEC standard allows for the use of two phase-to-phase test vectors while the SEMI F47 adds an additional acceptable test vector
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13

• If the Equipment Under Test
(EUT) has a neutral conductor, then some loads may be wired with respect to neutral.
• Therefore, single-phase to neutral tests should be done to determine sensitivity/robustness of
EUT to such events.
• Considerations are
– Magnitude
– Duration
– Point-on-Wave
(0 degrees reference)
70%
70%
70%
Type “A” as shown IEC 61000-4-34, Figure 3A
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14

• IEC allows two types of phaseto-phase testing
– Type “B”
– Type “C”
• SEMI F47 allows three types of phase-to-phase testing
– Type “B”
– Type “C”
– Type “D”
• Neither IEC 61000-4-34 or
SEMI F47 calls for 3-phase symmetrical sags.
• The test methods can have implications on the test results with respect to pass/failure.
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• EPRI traditionally did Method D testing for all SEMI F47 work and System Compatibility
Testing.
– Needed a neutral – was difficult to obtain at times.
• Others chose Method B as an alternative due to lack of neutral and ease of test.
• Method C is the most frequently occurring in the power system and the most realistic off all three. It does not require a neutral.
(a.k.a. Type C per Bollen)
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16

• Adjustable speed drives are one of the most important loads affecting overall process response to voltage dips.
• Example 5HP drive trips for
Method D and E
• Did not trip for A, B and C
%Vdc Min=82%
(Occurs at 50% Vdip)
Drive Loaded to 80% FLA
© 2009 Electric Power Research Institute, Inc. All rights reserved.
WG Reference Doc: CIGRE-C4.110-2006-24
17

-1000
0.15
1000
0
-1000
0.15
1000
0
-1000
0.15
100
0
-100
0.15
700
650
600
0.15
1000
0
Simulation Output for Method B
(Figure 3B in IEC 61000-4-34)
(50% one L-L voltage, 12 cycles)
0.2
0.2
0.2
0.2
0.2
0.25
0.25
0.25
0.25
0.3
0.3
0.3
0.3
0.25
0.3
time (s)
0.35
0.35
0.35
0.35
0.35
0.4
0.4
0.4
0.4
0.4
700
600
0.45
500
0.15
1000
0
0.45
-1000
0.15
1000
0
0.45
-1000
0.15
1000
0
0.45
-1000
0.15
100
0.45
0
-100
0.15
Simulation Output for Method C
(Figure 3C in IEC 61000-4-34)
(50% one L-L voltage, 12 cycles)
0.2
0.2
0.2
0.2
0.2
0.25
0.25
0.25
0.25
0.3
0.3
0.3
0.3
0.25
0.3
time (s)
0.35
0.35
0.35
0.35
0.35
0.4
0.4
0.4
0.4
0.4
800
600
0.45
400
0.15
1000
0
0.45
-1000
0.15
1000
0
0.45
-1000
0.15
1000
0
0.45
-1000
0.15
200
0
0.45
-200
0.15
Simulation Output for Method D
(Figure 3D in IEC 61000-4-34)
(50% one L-L voltage, 12 cycles)
0.2
0.2
0.2
0.2
0.2
0.25
0.25
0.25
0.25
0.3
0.3
0.3
0.3
0.25
0.3
time (s)
0.35
0.35
0.35
0.35
0.35
0.4
0.4
0.4
0.4
0.4
0.45
0.45
0.45
0.45
0.45
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18

650
600
550
500
Method B
70% Trip Level
Method C
60% Trip Level
Method D
50% Trip Level
80% Trip Level
450
400
350
300
40 50 60 70 80 90 100 110 120 130 140 150 160 170 180 190 200 210 220 230 240
MicroFarad/Hp
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19

• EPRI has now patented the the
TRI-Mode voltage sag generator design. This unit can test all IEC and SEMI test vectors plus asymmetrical and symmetrical 3phase voltage sags.
• We expect this type of test equipment to be useful in evaluating system compatibility for multiple types of test vectors.
• The EPRI PQStar testing program tests are being done as
Type “C” for three-phase loads now since this is most realistic and is applicable to both SEMI
F47 and IEC 61000-4-11 & 34.
20 © 2009 Electric Power Research Institute, Inc. All rights reserved.

http://grouper.ieee.org/groups/ias/1668/index.html
• This project will undertake the development of a standard for the response of electrical equipment to voltage sags.
• The standard will describe a level of performance to be used as a criteria for acceptance of the product. End users will be able to use the standard in their purchase specifications to ensure the required level of performance.
• The project will apply to any electrical equipment that can experience nuisance shutdowns due to reductions in supply voltage.
• Issues:
– Existing Standards Advocate Different Test
Methods and in some cases conflict
– Existing Standards do not require 3-Phase
Sags
– Existing Standards do not provide methodology for characterization testing.
– Pass/Fail Information is all that is obtained in existing standard
• Effort is underway to develop the standard.
© 2009 Electric Power Research Institute, Inc. All rights reserved.
21

Voltage Dip Concepts for Type 1, Type 2, and Type 3
Proposed
Types
Actual Dip Vectors and Types [5]
Type 1:
Single-
Phase
Voltage
Dip
Type 2:
Two-
Phase
Voltage
Dip
Type 3:
Three-
Phase
Voltage
Dip
Formerly Type D
Formerly Type C
Formerly Type A
1.1
1
0.9
0.8
0.7
0.6
0.5
0.4
0
1.1
1
0.9
0.8
0.7
0.6
0.5
0.4
0
1.1
1
0.9
0.8
0.7
0.6
0.5
0.4
0
Actual
RMS
Plot
2 4
Time [Cycles]
6 8
2 4
Time [Cycles]
6 8
2 4
Time [C ycle s]
6 8
Approximation for
Testing Purposes
Approximation RMS
Plot for Testing Purposes
Comment
Approximation does not include phase shifting or magnitude change of non-dipped phases.
Added phase shift may be difficult to obtain with standard transformerswitch type voltage dip generators.
1.1
1
0.9
0.8
0.7
0.6
0.5
0.4
0
1.1
1
0.9
0.8
0.7
0.6
0.5
2 4
Ti me [Cycl es]
6 8
2 4
Time [Cycl es]
6 8
Approximation matches with actual dip type
Approximation matches with actual dip type
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22